CN101562025B - Micro-optical reading device - Google Patents
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- CN101562025B CN101562025B CN 200810092526 CN200810092526A CN101562025B CN 101562025 B CN101562025 B CN 101562025B CN 200810092526 CN200810092526 CN 200810092526 CN 200810092526 A CN200810092526 A CN 200810092526A CN 101562025 B CN101562025 B CN 101562025B
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- 230000003287 optical effect Effects 0.000 claims abstract description 63
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
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- 230000010415 tropism Effects 0.000 description 1
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Abstract
The invention relates to a micro-optical reading device which is used for supplying incident light to optical recording media and receiving reflected light from the optical recording media. The micro-optical reading device comprises a light source generating element, an axial type light splitting element, an optical polarization element, an astigmatism type reflector and an optical sensing element, wherein the light source generating element is used for generating the incident light; the axial type light splitting element is used for completely penetrating through the incident light according to the polarization directions of the incident light and the reflected light and leading the reflected light to deflect; the optical polarization element is arranged between the axial type light splitting element and the optical recording media and is used for changing the polarization directions of the incident light and the reflected light from the optical recording media; the astigmatism type reflector is used for receiving and astigmatically focusing the reflected light from the axial type light splitting element and reflecting the reflected light; and the optical sensing element is used for receiving the reflected light from the astigmatism type reflector and converting the reflected light into corresponding electric signals.
Description
Technical field
The present invention relates to a kind of micro-optical reading device, particularly relate to a kind of axial type beam splitter that branch is arranged and micro-optical reading device of astigmatism formula catoptron of using.
Background technology
At present, CD-ROM drive is widely used in video-audio playing device and data memory device, and has become the external device of computing machine indispensability.In the process of CD-ROM drive slimming, the design of optical read head is very crucial.Optical read head is the pith of CD-ROM drive, and its major function is to produce enough little focal spot on CD, and produces focus error signal and tracking error signal, and then correctly and apace obtains the stored data of CD.For reduced volume, the mode of existing at present utilization integrated circuit is made optical read head, micromachined component is mutually combined by micro electro mechanical system (MEMS) technology, and utilize surface silicon micro-processing technology minification, mitigation system weight, thereby obtain the optical platform (Optical Bench) of microminiaturization, thereby have the function of CD-ROM drive signal reader head.
With reference to Fig. 1, this figure is the synoptic diagram that shows the micro-optical reading device of prior art.In the drawings, micro-optical reading device 1 is silica-based stack micro optical element, micro-optical reading device 1 comprise lasing fluorescence diode 10, photodetector 11, holographic optics (Holographic Optical Element, HOE) 12, collimation lens 13 and object lens 14.Laser diode 10 produces incident light 16, and this incident light 16 becomes directional light through holographic optics 12 and collimation lens 13, converges on the CD 15 via object lens 14 again.Reflected light 17 process holographic optics 12 by CD 15 reflections focus on the photodetector 11.
In the design of holographic optics 12, the pattern of etching deviation certain angle spaced reciprocally, to obtain first order diffraction beam, this has produced limited light path efficiency, and little shadow manufacture difficulty increases, and needs to consider the stress problem of film own.In micro-optic manufacturing field; etching technique is most important making step; by little shadow manufacturing process with on the photoresistance of design transfer to the film; remove the film portion that is covered and protect by photoresistance by the mode of chemical reaction or physical action, thereby finally finish the purpose of design transfer to the film.
Wet-type etching is the etching technique that is used the earliest, utilizes the chemical reaction between film and the particular solution to remove the film portion that is not capped.Be characterized in that manufacturing process is simple, etching speed is fast, different materials is had select part preferably.But chemical reaction then is the oxidation bond reaction with corrosive free radical and etched material, but does not have the certain party tropism, is isotropic etching, and etched thing speed downward and to sidepiece equates have undercut phenomenon to take place easily.In addition, dry-etching is that energetic ion attracts through bias voltage by the ion bombardment, the etched material surface of accelerating impact, thus the phenomenon that material is excavated appears, belong to anisotropic etching technique, have the advantage that can control the film etching profile.Therefore, make holographic optics 12, when etching has the pattern of deviation certain angle, at film etching, calculating less parameter area and at aspect degree of difficulty height such as technology controls.
In addition, the holographic optics 12 of prior art is the penetration optical element, and its both sides all need the light communication space, and this also is the factor that is unfavorable for the optical pickup device slimming.
Consider every problem of prior art, in order to take into account solution, the present inventor proposes a kind of micro-optical reading device based on research for many years with many practical experience, with implementation and the foundation as the above-mentioned shortcoming of improvement.
Summary of the invention
The object of the present invention is to provide a kind of micro-optical reading device, it uses and divides the axial type beam splitter and the astigmatism formula catoptron that are arranged to solve the narrow problem of manufacturing process parameter area that designs and produces, and then reduces the manufacture difficulty of integrated circuit.
According to purpose of the present invention, a kind of micro-optical reading device is proposed, be used for incident light is provided to optical record medium, and receive the reflected light of this optical record medium, thus the data of this optical record medium of access.Described micro-optical reading device comprises light source producing component, axial type beam splitter, light polarization element, astigmatism formula catoptron and the Photosensing Units that is used to produce incident light.The axial type beam splitter penetrates incident light according to incident light and catoptrical polarised direction fully, and makes reflected light generation deviation.The light polarization element is set between axial type beam splitter and the optical record medium, is used to change incident light and from the catoptrical polarised direction of optical record medium.Astigmatism formula catoptron receive and astigmatic focusing from the reflected light of axial type beam splitter, and it is reflected.Photosensing Units receives the reflected light from astigmatism formula catoptron, and this reflected light is converted to corresponding electric signal.
Wherein, the polarised direction nearly orthogonal of catoptrical polarised direction and incident light.
Wherein, the axial type beam splitter is preferably the serration type grating.
Wherein, astigmatism formula catoptron is preferably continuous curve surface structure, binary optical formula structure or Fresnel structure.
Description of drawings
By the description of carrying out below in conjunction with the accompanying drawing that an example exemplarily is shown, above-mentioned and other purposes of the present invention and characteristics will become apparent, wherein:
Fig. 1 is the synoptic diagram of the micro-optical reading device of prior art;
Fig. 2 is the synoptic diagram of micro-optical reading device of the present invention;
Fig. 3 is the synoptic diagram of first embodiment of micro-optical reading device of the present invention;
Fig. 4 is the synoptic diagram of second embodiment of micro-optical reading device of the present invention;
Fig. 5 A is the example of the light spot form that focuses on the photodetector of micro-optical reading device of the present invention;
Fig. 5 B is another example of the light spot form that focuses on the photodetector of micro-optical reading device of the present invention;
Fig. 5 C is an example again of the light spot form that focuses on the photodetector of micro-optical reading device of the present invention.
Wherein, the main element symbol description is as follows:
1: micro-optical reading device;
10: the lasing fluorescence diode;
11: photodetector;
12: holographic optics;
13: collimation lens;
14: object lens;
15: CD;
16: incident light;
17: reflected light;
2: micro-optical reading device;
20: the light source producing component;
21: Photosensing Units;
22: astigmatism formula catoptron;
23: the axial type beam splitter;
24: the light polarization element;
25: optical record medium;
26: reflected light;
27: incident light;
3: micro-optical reading device;
30: optical record medium;
31: the lasing fluorescence diode;
32: Photosensing Units;
331: the first reflectings surface;
332: the second reflectings surface;
34: astigmatism formula catoptron;
35: the serration type grating;
351: isotropic material;
352: anisotropic material;
36:1/4 phase delay wave plate;
37: incident light;
38: reflected light;
4: micro-optical reading device;
45: class serration type grating;
501～504: sensing area;
51～53: luminous point.
Embodiment
Hereinafter with reference to relevant indicators, micro-optical reading device according to a preferred embodiment of the invention is described, for ease of understanding, the similar elements among the following embodiment illustrates with identical symbology.
With reference to Fig. 2, this figure is the synoptic diagram of micro-optical reading device of the present invention.Among the figure, micro-optical reading device 2 is used to read the data of optical record medium 25 (for example CD of VCD, DVD series).Micro-optical reading device 2 comprises light source producing component 20, light polarization element 24, axial type beam splitter 23, astigmatism formula catoptron 22 and Photosensing Units 21.Light source producing component 20 is used to produce incident light 27, these incident light 27 directive axial type beam splitters 23.Light source producing component 20 is preferably laser diode.Axial type beam splitter 23 can make it produce deviation according to the polar orientation of the light of injecting or directly penetrate.In this explanation, incident light 27 penetrates axial type beam splitter 23, thus directive light polarization element 24.
Light polarization element 24 is arranged between axial type beam splitter 23 and the optical record medium 25, is used to change the described polarised direction of injecting light.Incident light 27 produces reflected light 26 by optical record medium 25 reflections, to be incident upon light polarization element 24 again through light polarization element 24 back directive optical record mediums 25.Because the effect of light polarization element 24 is to make reflected light 26 different with the polarised direction of incident light 27, this makes and produces deviation when reflected light 26 is injected axial type beam splitter 23, thus directive astigmatism formula catoptron 22.
Astigmatism formula catoptron 22 is with reflected light 26 astigmatic focusings and reflex to Photosensing Units 21.Photosensing Units 21 comprises a plurality of independent sensing areas, and is set on the optical path of astigmatism formula catoptron 22, is used to receive the reflected light 26 from astigmatism formula catoptron 22, and the intensity of sensing reflected light 26, to produce corresponding electric signal.Reflected light 26 forms luminous point on Photosensing Units 21, the shape of this luminous point changes along with the change in location of optical record medium 25, so the light intensity signal that can sense respectively according to all independent sensing districts of Photosensing Units 21 carries out computing, to learn the change in location of optical record medium 25.
Thus, the incident light directive that light source producing component 20 produces reads optical record medium 25, after reading optical record medium 25 reflections, the reflected light that is produced by astigmatism formula catoptron 22 astigmatic focusings on Photosensing Units 21 to form luminous point.And the variation that optical record medium 25 can make when waving up and down because of running luminous point produce dissymmetrical structure can produce error signal by the variation of analyzing luminous point.Light polarization element 24 can be retardation plate (retarder), for example 1/4 phase delay wave plate, or light polarization plate, or arbitraryly make the rotation of catoptrical polarised direction and make its optical element different with the polarised direction of incident light 27.
The optical element that axial type beam splitter 23 is preferably made by the combination of isotropic material and anisotropic material, for example serration type grating (blazed grating) or class serration type grating.This grating forms the class sawtooth element of sawtooth element or stairstepping earlier with isotropic material on making, anisotropic material is covered on the above-mentioned element again, thereby form described serration type grating or described class serration type grating.Owing to the refractive index of anisotropic material can change along with polarised direction, so when when the refractive index of the polarised direction isotropy material of incident light 27 and anisotropic material is identical, incident light 27 can directly penetrate, make polarised direction different and work as reflected light 26 because of 24 effects of light polarization element with the polarised direction of incident light 27, and not simultaneously in the refractive index of the polarised direction isotropy material of reflected light 26 and anisotropic material, then deviation takes place at this grating place in reflected light, and the deviation angle is relevant with the sawtooth groove angle or the slope of grating cycle and grating.
Above-mentioned micro-optical reading device 2 is preferably free space stacked optical pickup device, and also can comprise at least one reflecting surface as required, so that above-mentioned light path folding.Astigmatism formula catoptron 22 can be continuous curve surface structure, binary optical formula (binary optics) structure or Fresnel (Fresnel) structure.Fresnel structure is a kind of fragment continuous structure, and binary optical formula structure is a kind of stepped construction, and its thickness is less than traditional mirror structure, and can produce non-spherical lens profile arbitrarily, but just its optical efficiency is lower.In addition, astigmatism formula catoptron 22 can be rotational symmetry or non-rotational symmetry, can be curved surface, also can be column.
Because micro-optical reading device of the present invention uses astigmatism formula catoptron to carry out focusing function, and astigmatism formula catoptron can be set on other element according to the design needs, and the both sides of traditional penetration holographic optics all need the light communication space, under comparing, the present invention can produce the thinner optical pickup device of thickness.
With reference to Fig. 3, this figure is the synoptic diagram of first embodiment of micro-optical reading device of the present invention.Among the figure, micro-optical reading device 3 is placed on the silica-based silicon nitride, utilize chip encapsulation technology to finish with the stack manner encapsulation, computing machine emulation in view of the above defines the needed specification of optical element, and then with the design producing of each optical element to light shield, utilize at last little shadow and etched mode with this design transfer to optical element, to finish described free space stacked micro-optical reading device.Micro-optical reading device 3 comprises optical record medium 30, lasing fluorescence diode 31, Photosensing Units 32, first reflecting surface 331, second reflecting surface 332, astigmatism formula catoptron 34, serration type grating 35 and 1/4 phase delay wave plate 36.
The incident light 37 that laser diode 31 produces reflexes to serration type grating 35 by first reflecting surface 331 and second reflecting surface 332.Serration type grating 35 is made by the isotropic material 351 and the combination of anisotropic material 352.In this embodiment, it is identical that isotropic material 351 and the refractive index of anisotropic material 352 are designed on the polarised direction of incident light 37, so incident light 37 can directly penetrate into 1/4 phase delay wave plate 36, the directive optical record medium 30 again.Optical record medium 30 reflects incident lights 37 and produces reflected light 38.
Because reflected light 38 is once more through the polarised direction nearly orthogonal of 1/4 phase delay wave plate 36 its polarised directions of back and incident light 37, and isotropic material 351 is designed to different on the polarised direction of reflected light 38 with the refractive index of anisotropic material 352, therefore, reflected light 38 is at the interface generation deviation of isotropic material 351 with anisotropic material 352, thus directive astigmatism formula catoptron 34.The angle of reflected light 38 deviations is relevant with the sawtooth groove angle of the cycle of grating 35 and grating 35, and the cycle and the sawtooth groove angle (slope) of the deviser of micro-optical reading device is adjustable lay the grain grid are to design the deviation angle that needs.Reflected light 38 by serration type grating 36 is received and astigmatic focusing by astigmatism formula mirror 34, and reflexes to Photosensing Units 32, to produce the luminous point of shape asymmetry change.
With reference to Fig. 4, this figure is the synoptic diagram of second embodiment of micro-optical reading device of the present invention.Among the figure, the difference of micro-optical reading device 4 and micro-optical reading device 3 be in, micro-optical reading device 4 uses class serration type grating 45 as the axial type beam splitter, and astigmatism formula catoptron 34 also is set at different positions, to be received in the reflected light 38 that deviation takes place on the class serration type grating 45.Class serration type grating 45 is made by the isotropic material 351 and the combination of anisotropic material 352, and isotropic material 351 is stepped, and anisotropic material 352 covers isotropic material 351.The principle of class serration type grating 45 deviation reflected light 38 is similar to serration type grating 35, and the ladder groove slope of the cycle of the angle of reflected light 38 deviations and grating 35 and grating 35 is relevant.And astigmatism formula catoptron 34 is set on the light path of the reflected light 38 behind the deviation, with astigmatic focusing reflected light 38, and it reflexed to Photosensing Units 32.Class serration type grating 45 is compared with serration type grating 36, the difficulty and the cost of its manufacturing process are lower, but optical efficiency is lower than serration type grating 36, and therefore, the deviser of micro-optical reading device can select suitable axial type beam splitter according to the practical application needs.
In addition, in above-mentioned two embodiment, the axial type beam splitter is implemented with the made grating of the combination of isotropic material and anisotropic material, and incident light is injected grating from the anisotropic material side, and reflected light is injected grating from the isotropic material side, and all is that deviation takes place in grating reflected light.This only is for example, but the invention is not restricted to this, as long as can inject the optical element that light has different deviation angles according to different the making of the polarised direction of injecting light, all in protection scope of the present invention.
Above-mentioned two embodiment illustrate that micro-optical reading device of the present invention can change in design as required, for example change employed axial type beam splitter, change the deviation angle of axial type beam splitter, the position of change astigmatism formula catoptron 34 or the version of change astigmatism formula catoptron 34.In addition, the deviser can distinguish the efficient and the function of independent optimization axial type beam splitter and astigmatism formula catoptron, improves the efficient and the function of micro-optical reading device in proper order.Compare with traditional holographic optics, available parameter that the present invention designs and produces and elasticity increase, and its realizability is significantly promoted.
Shown in Fig. 5 A to Fig. 5 C, described accompanying drawing is to show the shape that focuses on the luminous point on the photodetector respectively, focuses on focus from as far as near synoptic diagram.Among the figure, behind astigmatism formula catoptron astigmatic focusing, reflected light forms luminous point 51～53 on Photosensing Units.Optical sensor components has a plurality of sensing areas 501～504, be respectively applied for the part light intensity that senses luminous point 51～53, and be converted to corresponding electric signal, and carry out computing by light intensity signal from sensing area 501～504 outputs, thus can learn the change in location of optical record medium.
For example, when the value of sensing area 502 and the light intensity summation of sensing area 504 greater than the value of sensing area 501 with the light intensity summation of sensing area 503, and surpass threshold value, that is, light spot form is similar to luminous point 51, it is far away excessively that this expression focuses on focus; When the value of sensing area 501 and the light intensity summation of sensing area 503 greater than the value of sensing area 502 with the light intensity summation of sensing area 504, and surpass threshold value, promptly light spot form is similar to luminous point 53, it is near excessively that this expression focuses on focus; If the light intensity of sensing area 501～504 is similar, promptly light spot form is similar to luminous point 52, and this expression reflected light focuses on the optical sensor components.
Because the present invention uses astigmatism formula catoptron to come the astigmatic focusing reflected light, thus the similar rhombus of the optoelectronic shape that on optical sensor components, forms, and non-traditional elliptical shape.In addition, by above-mentioned computing, also can reach the effect of the change in location of judging optical record medium.
As mentioned above, micro-optical reading device according to the present invention has the following advantages:
(1) micro-optical reading device of the present invention uses axial type beam splitter and astigmatism formula speculum disconnected from each other, compares with traditional holographic optics, and integrated component manufacture difficulty of the present invention is lower, and reduces cost of manufacture.
(2) micro-optical reading device of the present invention can be optimized respectively efficient and the function of axial type beam splitter and astigmatism formula speculum, improve efficient and the function of micro-optical reading device, compare with traditional holographic optics, the available parameter that the present invention designs and produces and elasticity increase, and its realizability is significantly promoted.
(3) micro-optical reading device of the present invention uses astigmatism formula speculum to focus on, and compares with traditional penetration holographic optics, more is conducive to the slimming of optical pickup device.
The above only is illustrative, and non-limiting. Anyly do not break away from equivalent modifications or the change that spirit of the present invention and scope are carried out the present invention, all can fall into the application's claim scope.
Claims (9)
1. a micro-optical reading device is used for incident light is provided to optical record medium, and receives the reflected light from this optical record medium, thus the data of this optical record medium of access, and this micro-optical reading device comprises:
The light source producing component produces incident light;
The axial type beam splitter penetrates described incident light according to incident light and catoptrical polarised direction fully, and makes reflected light generation deviation;
The light polarization element is arranged between axial type beam splitter and the optical record medium, is used to change incident light and from the catoptrical polarised direction of optical record medium;
Astigmatism formula catoptron, receive and astigmatic focusing from the reflected light of axial type beam splitter, and it is reflected; And
Photosensing Units receives the reflected light from astigmatism formula catoptron, and this reflected light is converted to corresponding electric signal,
Wherein, described astigmatism formula catoptron makes described reflected light astigmatic focusing on described Photosensing Units, and forming luminous point, and the change of shape of this luminous point is corresponding to the change in location of described optical record medium,
Wherein, described Photosensing Units comprises a plurality of sensing areas of the intensity that is used for this luminous point of sensing.
2. micro-optical reading device as claimed in claim 1, wherein, the polarised direction quadrature of described catoptrical polarised direction and this incident light.
3. micro-optical reading device as claimed in claim 1, wherein, described axial type beam splitter is made by the combination of isotropic material and anisotropic material.
4. micro-optical reading device as claimed in claim 1, wherein, described axial type beam splitter is serration type grating or class serration type grating.
5. micro-optical reading device as claimed in claim 4, wherein, described reflected light is relevant with respect to the sawtooth groove angle or the slope of cycle of the angle of described axial type beam splitter deviation and described grating and described grating.
6. micro-optical reading device as claimed in claim 1, wherein, described astigmatism formula catoptron is axially symmetric structure or nonaxisymmetric structure.
7. micro-optical reading device as claimed in claim 1, wherein, the surface of described astigmatism formula catoptron is sphere or cylinder.
8. micro-optical reading device as claimed in claim 1, wherein, described astigmatism formula catoptron is continuous curve surface structure, binary optical formula structure or Fresnel structure.
9. micro-optical reading device as claimed in claim 1, wherein, the surface of described astigmatism formula catoptron is an aspheric surface.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810092526 CN101562025B (en) | 2008-04-18 | 2008-04-18 | Micro-optical reading device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810092526 CN101562025B (en) | 2008-04-18 | 2008-04-18 | Micro-optical reading device |
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| CN101562025B true CN101562025B (en) | 2011-05-11 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1160267A (en) * | 1995-11-22 | 1997-09-24 | 松下电器产业株式会社 | Optical head |
| US5761178A (en) * | 1994-10-18 | 1998-06-02 | Matsushita Electric Industrial Co., Ltd. | Optical integrating element and integration type optical pickup device using the same |
-
2008
- 2008-04-18 CN CN 200810092526 patent/CN101562025B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5761178A (en) * | 1994-10-18 | 1998-06-02 | Matsushita Electric Industrial Co., Ltd. | Optical integrating element and integration type optical pickup device using the same |
| CN1160267A (en) * | 1995-11-22 | 1997-09-24 | 松下电器产业株式会社 | Optical head |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2006-12245A 2006.01.12 |
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| CN101562025A (en) | 2009-10-21 |
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