CN101532876A - Micro accurate slit arrangement with adjustable slit width - Google Patents

Micro accurate slit arrangement with adjustable slit width Download PDF

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Publication number
CN101532876A
CN101532876A CN200910116537A CN200910116537A CN101532876A CN 101532876 A CN101532876 A CN 101532876A CN 200910116537 A CN200910116537 A CN 200910116537A CN 200910116537 A CN200910116537 A CN 200910116537A CN 101532876 A CN101532876 A CN 101532876A
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China
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rigid body
slit
elastic hinge
shaped
support bar
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CN200910116537A
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Chinese (zh)
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王秋平
杜学维
吴刚
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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Priority to CN200910116537A priority Critical patent/CN101532876A/en
Publication of CN101532876A publication Critical patent/CN101532876A/en
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Abstract

The invention relates to a micro accurate slit arrangement with adjustable slit width for various spectrographic instruments, which solves the problems of the prior adjustable slit arrangement of complicated structure, low precision and large volume. The slit arrangement comprises an elastic hinge body, a left slit slice, a right slit slice and a driving mechanism and the clearance between the adjacent edges of the left slit slice and the right slit slice is slit; a middle junction rigid body is mounted on the top of the elastic hinge body and one end is connected with a left upper connection rod and another two ends are respectively connected with a left right-angle rigid body and a right right-angle rigid body; the left right-angle rigid body and the right right-angle rigid body are respectively connected with a left tie bar and a right tie bar; the left tie bar and the right tie bar are respectively connected with a left rigid body and a right rigid body; the left rigid body and the right rigid body are respectively connected with more than two left support bars and right support bars; the driving mechanism is a differential micro-meter screw and steps screwed holes mated with the differential micro-meter screws are vertically set on the frame basal-body top and the middle connection rigid body on the elastic hinge body; the parallelism and symmetry of the slit are good. The slit arrangement has features of simple structure, compactness, small size and high accuracy.

Description

Micro accurate slit arrangement with adjustable slit width
Technical field
The invention belongs to optical precision optical machinery design and processing technique field, relate to a kind of various spectral instrument system that can be used for, but or other require micro accurate slit arrangement with adjustable slit width in the instrument system of slit width minute adjustment.
Background technology
In spectral instrument, the spectrum of different wave length is at space development.Take out the monochromatic light of certain wavelength coverage by slit, write down monochromatic position and intensity, constituent that can amalyzing substances with detector.In this course, slit has played important effect, and homogeneity, slit width and the resolution of its opening collimation, symmetry and switching all requires very high.The slit These parameters directly influences the spectral resolution and/or the spatial resolving power of spectral instrument.Present a few class slit modes and the characteristics thereof that adopt: 1, fixed width slit.The characteristics of this type of slit are simple, and cost is low, but can not satisfy the requirement of width-adjustable joint.2, adopt the slit of a plurality of fixed widths, in use switch mutually.Shortcoming is can bring positioning error in the handoff procedure, requires the precision height of locating device.Perhaps behind each the switching, need total system is debugged again, use cumbersome.3, conventional width-adjustable joint slit arrangement: a), the left and right seam sheet that utilizes a wedge block to promote to constitute slit carries out transverse movement, thereby the width of realizing slit is regulated.The shortcoming of this structure be the slit precision symmetry not high, opening of opening bad and in adjustment process less stable, phenomenon such as occur creeping, interrupted, stuck easily.B), use the different screw mandrel of a two ends thread rotary orientation to drive left and right seam sheet and carry out the slit arrangement that width is regulated.This structure is the screw thread transmission owing to what use, and the requirement on machining accuracy of double thread is very high; Need device elimination thread pitches such as spring; Need to use bearing to support and fixing screw mandrel.Major defect is: complex structure, and assembling difficulty, cost is higher, and is difficult to the precision that reaches higher.Most at present adjustable slit devices also exist larger-size shortcoming except that above deficiency, be not easy to instrument size is done little.
Summary of the invention
In order to solve existing adjustable slit apparatus structure complexity, bulky problem, the invention provides a kind of micro accurate slit arrangement with adjustable slit width.
The technical solution that realizes above-mentioned purpose is as follows:
Micro accurate slit arrangement with adjustable slit width comprises elastic hinge body, left side seam sheet, right seam sheet and driving mechanism, the elastic hinge body is that the shaped as frame matrix with rigidity is a profile, there is the elastic hinge of hanging type inside, left side seam sheet and right seam sheet are symmetrically set in a side of elastic hinge body, and left side seam sheet is parallel with the adjacent edge of right seam sheet.
Connect rigid body in the middle of the top of described elastic hinge body inner elastomeric hinge is provided with, the one end is connecting upper left connecting rod, in addition two ends respectively symmetry connecting left right angle rigid body and right right angle rigid body; The outside of left side right angle rigid body and right right angle rigid body symmetry respectively is being connected left lever and right pull bar; The other end of left lever and right pull bar symmetry respectively is being connected left rigid body and right rigid body; Symmetrical respectively left support bar and the right support bar that is being connected more than two in the lower end of left side rigid body and right rigid body;
Corresponding respectively left side and the right side that is being connected in the shaped as frame matrix of the other end of the other end of the other end of described upper left connecting rod, left right angle rigid body and right right angle rigid body; Support bar lower end, a left side and the corresponding respectively downside that is being connected in the shaped as frame matrix in right support bar lower end;
Described left side seam sheet is fixed on the left rigid body, and described right seam sheet is fixed on the right rigid body, and the gap that forms between left side seam sheet and the right seam sheet adjacent edge is a slit;
Described driving mechanism comprises the differential differential tuning screw, the differential differential tuning screw is to have two sections rotation direction is identical but the ladder screw of the screw thread that pitch is different, elastic hinge body top vertically is provided with the threaded hole with the differential differential tuning screw fit, threaded hole is a stepped hole, one section is located on the shaped as frame matrix, connects on the rigid body in the middle of another section is located at.
The concrete structure of micro accurate slit arrangement with adjustable slit width is as follows on the basis of the above:
Described elastic hinge body crown center is provided with the middle rigid body DEE1 that connects of triangular shape;
The middle place, D angle that connects rigid body DEE1 is connecting upper left connecting rod CD, and its C end is connecting the shaped as frame matrix;
The middle place, E angle that connects rigid body DEE1 is connecting left right angle rigid body EFG, and the F end of left right angle rigid body EFG is connecting the shaped as frame matrix, and its G end is connecting left lever GH; The H end of left lever GH is connecting a jiao of left rigid body, and the bottom of left rigid body is connecting the left support bar more than two respectively, and the lower end of left support bar is connecting the shaped as frame matrix respectively;
The middle place, E1 angle that connects rigid body DEE1 is connecting right right angle rigid body E1F1G1, and its F1 end is connecting the shaped as frame matrix, and its G1 end is connecting right pull bar G1H1; The H1 end of right pull bar G1H1 is connecting a jiao of right rigid body, and the bottom of right rigid body is connecting the right support bar more than two respectively, and the lower end of right support bar is connecting the shaped as frame matrix respectively;
Above-mentioned left right angle rigid body EFG and right right angle rigid body E1F1G1 left-right symmetric, left lever GH and right pull bar G1H1 left-right symmetric, left rigid body and right rigid body left-right symmetric, left support bar and right support bar left-right symmetric.
The leading portion threaded rod of described differential differential tuning screw cooperates with threaded hole on being connected rigid body DEE1, and the back segment threaded rod cooperates with threaded hole on the shaped as frame matrix.
The upper end of described left rigid body is connecting left lever, and its underpart is equally distributed to connect three left support bars respectively; The upper end of described right rigid body is connecting right rigid body, and its underpart is equally distributed to connect three right support bars respectively.
Described driving mechanism can also be piezoelectric ceramics or spiral micrometer head, is used for changing the distance between elastic hinge body A, the D at 2.
Described shaped as frame matrix physical dimension can be less than 30 * 32 * 7mm 3
The invention has the advantages that: use the gear train of elastic hinge, avoided the drawback of wedge and screw thread transmission as slit; Elastic hinge structure left-right symmetric, thus the collimation and the symmetry of slit opening guaranteed; Simple in structure, compact, size is little; The employing differential thread is regulated, and the precision height dwindles bulk.The width adjusting scope of this slit arrangement is 0.01-0.2mm, and degree of regulation can reach below 5 microns; The physical dimension of elastic hinge body can reach 30 * 32 * 7mm 3Or it is littler.
Description of drawings
Fig. 1 is a structural representation of the present invention,
Fig. 2 is an elastic hinge body structure synoptic diagram,
Fig. 3 is the elastic hinge structure principle chart with three pairs of support bars,
Fig. 4 is the elastic hinge structure principle chart with two pairs of support bars,
Fig. 5 is a differential differential tuning screw synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described by embodiment.
Embodiment 1:
Referring to Fig. 1, Fig. 2 and Fig. 3, micro accurate slit arrangement with adjustable slit width comprises elastic hinge body 1, left side seam sheet 2, right seam sheet 4 and driving mechanism.The elastic hinge body profile is of a size of 30 * 32 * 7mm 3, elastic hinge body 1 is that the shaped as frame matrix with rigidity is a profile, and there is the elastic hinge of hanging type inside, and left side seam sheet 2 and right seam sheet 4 are symmetrically set in a side of elastic hinge body 1, and left side seam sheet 2 and the right adjacent edge that stitches sheet 4 are parallel.
Elastic hinge body crown center is provided with the middle rigid body DEE1 that connects of triangular shape; Its place, D angle is connecting upper left connecting rod CD, and the C end of CD connecting rod is connecting the shaped as frame matrix;
Its place, E angle is connecting left right angle rigid body EFG, and the F end of left right angle rigid body EFG is connecting the shaped as frame matrix, and its G end is connecting left lever GH; The H end of left lever GH is connecting a jiao of left rigid body HJPK, the equally distributed J end in the bottom of left side rigid body HJPK, K end are being connected three left support bars respectively with the P end, be left support bar JL, left support bar PQ and left support bar KM, the L end of left support bar JL, left support bar PQ and left support bar KM, Q end and M end are being connected the shaped as frame matrix respectively;
Its place, E1 angle is connecting right right angle rigid body E1F1G1, and the F1 end of right right angle rigid body E1F1G1 is connecting the shaped as frame matrix, and its G1 end is connecting right pull bar G1H1; The H1 end of right pull bar G1H1 is connecting a jiao of right rigid body H1J1P1K1, the equally distributed J1 end in the bottom of right rigid body H1J1P1K1, K1 end are being connected three right support bars respectively with the P1 end, be right support bar J1L1, right support bar P1Q1 and right support bar K1M1, the L1 end of right support bar J1L1, right support bar P1Q1 and right support bar K1M1, Q1 end and M1 end are being connected the shaped as frame matrix respectively;
Left side seam sheet 2 is fixedly installed on the left rigid body by gib screw 3, right seam sheet 4 is fixedly installed on the right rigid body by gib screw 3, need pad on the gib screw 3, pad is between seam sheet and elastic hinge, make to have necessary gap between the two, be free to distortion with the inner structure that guarantees elastic hinge; The gap that forms between left side seam sheet 2 and right seam sheet 4 adjacent edges is a slit;
Left right angle rigid body EFG and right right angle rigid body E1F1G1 symmetry in the said structure, left lever GH and right pull bar G1H1 symmetry, left rigid body and right rigid body symmetry, left support bar and right support bar symmetry;
Driving mechanism comprises differential differential tuning screw 5, and differential differential tuning screw 5 is for having two sections rotation direction being identical but the ladder screw of the screw thread that pitch is different, and the nominal diameter of front end screw thread is seen Fig. 5 less than the nominal diameter of rear end screw thread.Shaped as frame matrix top vertically is provided with the major thread hole on the elastic hinge body, and the bosom of elastic hinge body connects rigid body DEE1 and is provided with the minor thread hole.Two sections threaded holes cooperate with differential differential tuning screw 5.
To have only one dimension rotational freedom, A point be the fixed point on top on the hinge shaped as frame matrix for hinge C end, F end, L end, Q end, M end, M1 end, Q1 end, L1 end and F1 end in the above-mentioned elastic hinge body 1.
The driving of elastic hinge is by changing the distance between the AD, promptly allow the D point produce vertically downward or the displacement that makes progress, order about the distortion of hinge inner structure, realizing that finally the width of slit is regulated.Referring to Fig. 3,, when even D point has displacement x (suppose downward) along the direction of arrow, will produce following a series of hinge movement when distance between the AD when changing:
The middle downward translation x of the rigid body DEE1 (first approximation that connects, as follows), left side right angle rigid body EFG and right right angle rigid body E1F1G1 are respectively around F end and F1 end rotational angle α, G end and G1 end respectively left with move right y, left side rigid body HJPK is moved to the left distance y, the right rigid body H1J1P1K1 distance y that moves right.Because left side seam sheet 2 and right seam sheet 4 are to be separately fixed on left rigid body HJPK and the right rigid body H1J1P1K1, so the slit opening width will increase 2y.When the linear drives displacement of ordering at D makes progress x, under the effect of elastic force, all hinges will have opposite motion, and the slit opening width will reduce 2y.There are following relational expression: y/x=FG/FE in x and y.The width that is slit will increase or reduce 2 * FG/FE * x.In the present embodiment scheme, adopt differential differential tuning screw 5 as driver part.
Embodiment 2:
Can three left support bars and three right support bars be reduced to two left support bars and two right support bars respectively according to actual conditions such as the strengths of materials, as shown in Figure 4.
Other is with embodiment 1.
Embodiment 3:
In order to gain in strength, increase left side support bar and right support bar that also can be paired.
Other is with embodiment 1.
Embodiment 4:
The type of drive of this slit arrangement can be made corresponding change according to practical application, as: adopt piezoelectric ceramics to be placed between A, the D, as driver part; Adopt the spiral micrometer head to be placed on the upper end of elastic hinge, change distance between A, D, as driver part; In order to realize the automatic adjusting of slit width, on driver part, dispose micro-machine, etc.
Other are with embodiment 1 or 2 or 3.

Claims (5)

1, micro accurate slit arrangement with adjustable slit width, comprise elastic hinge body (1), left side seam sheet (2), right seam sheet (4) and driving mechanism, elastic hinge body (1) is that the shaped as frame matrix with rigidity is a profile, there is the elastic hinge of hanging type inside, left side seam sheet (2) and right seam sheet (4) are symmetrically set in a side of elastic hinge body (1), left side seam sheet (2) is parallel with the adjacent edge of right seam sheet (4), it is characterized in that:
Connect rigid body in the middle of the top of described elastic hinge body internal hinge structure is provided with, the one end is connecting upper left connecting rod, in addition two ends respectively symmetry connecting left right angle rigid body and right right angle rigid body; The outside of left side right angle rigid body and right right angle rigid body symmetry respectively is being connected left lever and right pull bar; The other end of left lever and right pull bar symmetry respectively is being connected left rigid body and right rigid body; Symmetrical respectively left support bar and the right support bar that is being connected more than two in the lower end of left side rigid body and right rigid body;
Corresponding respectively left side and the right side that is being connected in the shaped as frame matrix of the other end of the other end of the other end of described upper left connecting rod, left right angle rigid body and right right angle rigid body; Support bar lower end, a left side and the corresponding respectively downside that is being connected in the shaped as frame matrix in right support bar lower end;
Described left side seam sheet (2) is fixed on the left rigid body, and described right seam sheet (4) is fixed on the right rigid body, and the gap that forms between left side seam sheet (2) and right seam sheet (4) adjacent edge is a slit;
Described driving mechanism comprises differential differential tuning screw (5), differential differential tuning screw (5) is for having two sections rotation direction being identical but the ladder screw of the screw thread that pitch is different, elastic hinge body top vertically is provided with the threaded hole that cooperates with differential differential tuning screw (5), threaded hole is a stepped hole, one section is located on the shaped as frame matrix, connects on the rigid body in the middle of another section is located at.
2, micro accurate slit arrangement with adjustable slit width according to claim 1 is characterized in that:
Described elastic hinge body crown center is provided with the middle rigid body DEE1 that connects of triangular shape;
The middle place, D angle that connects rigid body DEE1 is connecting upper left connecting rod CD, and its C end is connecting the shaped as frame matrix;
The middle place, E angle that connects rigid body DEE1 is connecting left right angle rigid body EFG, and the F end of left right angle rigid body EFG is connecting the shaped as frame matrix, and its G end is connecting left lever GH; The H end of left lever GH is connecting a jiao of left rigid body, and the bottom of left rigid body is connecting the left support bar more than two respectively, and the lower end of left support bar is connecting the shaped as frame matrix respectively;
The middle place, E1 angle that connects rigid body DEE1 is connecting right right angle rigid body E1F1G1, and its F1 end is connecting the shaped as frame matrix, and its G1 end is connecting right pull bar G1H1; The H1 end of right pull bar G1H1 is connecting a jiao of right rigid body, and the bottom of right rigid body is connecting the right support bar more than two respectively, and the lower end of right support bar is connecting the shaped as frame matrix respectively;
Above-mentioned left right angle rigid body EFG and right right angle rigid body E1F1G1 left-right symmetric, left lever GH and right pull bar G1H1 left-right symmetric, left rigid body and right rigid body left-right symmetric, left support bar and right support bar left-right symmetric;
The leading portion threaded rod of described differential differential tuning screw (5) cooperates with threaded hole on being connected rigid body DEE1, and the back segment threaded rod cooperates with threaded hole on the shaped as frame matrix.
3, micro accurate slit arrangement with adjustable slit width according to claim 1 is characterized in that: the upper end of described left rigid body is connecting left lever, and its underpart is equally distributed to connect three left support bars respectively; The upper end of described right rigid body is connecting right pull bar, and its underpart is equally distributed to connect three right support bars respectively.
4, micro accurate slit arrangement with adjustable slit width according to claim 1 is characterized in that: described driving mechanism is piezoelectric ceramics or spiral micrometer head, is used for changing the distance between elastic hinge body A, the D at 2.
5, micro accurate slit arrangement with adjustable slit width according to claim 1 is characterized in that: described shaped as frame matrix physical dimension is less than 30 * 32 * 7mm 3
CN200910116537A 2009-04-14 2009-04-14 Micro accurate slit arrangement with adjustable slit width Pending CN101532876A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101915613A (en) * 2010-08-02 2010-12-15 中国科学院长春光学精密机械与物理研究所 Slit adjusting device capable of adjusting slit width in double directions
WO2011091577A1 (en) * 2010-01-29 2011-08-04 北京普析通用仪器有限责任公司 Installation and debugging method for continuously variable slit mechanism
CN102869962A (en) * 2010-04-28 2013-01-09 台湾超微光学股份有限公司 Slit seat module for spectrometer and spectrometer
CN108806818A (en) * 2018-04-17 2018-11-13 东莞理工学院 A kind of four knife diaphragms of adjustable neutron flow
CN109001116A (en) * 2018-08-02 2018-12-14 佛山市方垣机仪设备有限公司 A kind of entrance slit regulating mechanism and the Atomic Emission Spectrometer AES using it
CN110646450A (en) * 2019-10-18 2020-01-03 散裂中子源科学中心 Diaphragm device
CN110749608A (en) * 2019-10-10 2020-02-04 中国科学院上海应用物理研究所 High-precision slit device for X-ray
CN111442839A (en) * 2020-04-10 2020-07-24 中国科学院西安光学精密机械研究所 Device capable of switching optical slits on line

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011091577A1 (en) * 2010-01-29 2011-08-04 北京普析通用仪器有限责任公司 Installation and debugging method for continuously variable slit mechanism
CN102141507B (en) * 2010-01-29 2012-08-08 北京普析通用仪器有限责任公司 Installation debugging method of continuously variable slit mechanism
CN102869962A (en) * 2010-04-28 2013-01-09 台湾超微光学股份有限公司 Slit seat module for spectrometer and spectrometer
CN102869962B (en) * 2010-04-28 2014-05-07 台湾超微光学股份有限公司 Slit seat module for spectrometer and spectrometer
CN101915613A (en) * 2010-08-02 2010-12-15 中国科学院长春光学精密机械与物理研究所 Slit adjusting device capable of adjusting slit width in double directions
CN108806818A (en) * 2018-04-17 2018-11-13 东莞理工学院 A kind of four knife diaphragms of adjustable neutron flow
CN109001116A (en) * 2018-08-02 2018-12-14 佛山市方垣机仪设备有限公司 A kind of entrance slit regulating mechanism and the Atomic Emission Spectrometer AES using it
CN110749608A (en) * 2019-10-10 2020-02-04 中国科学院上海应用物理研究所 High-precision slit device for X-ray
CN110749608B (en) * 2019-10-10 2022-08-02 中国科学院上海应用物理研究所 High-precision slit device for X-ray
CN110646450A (en) * 2019-10-18 2020-01-03 散裂中子源科学中心 Diaphragm device
CN111442839A (en) * 2020-04-10 2020-07-24 中国科学院西安光学精密机械研究所 Device capable of switching optical slits on line

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Open date: 20090916