CN101520387A - Low-dimension material dynamic tensile loading measurement system - Google Patents
Low-dimension material dynamic tensile loading measurement system Download PDFInfo
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- CN101520387A CN101520387A CN200910131921A CN200910131921A CN101520387A CN 101520387 A CN101520387 A CN 101520387A CN 200910131921 A CN200910131921 A CN 200910131921A CN 200910131921 A CN200910131921 A CN 200910131921A CN 101520387 A CN101520387 A CN 101520387A
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Abstract
The invention relates to a low-dimension material dynamic tensile loading measurement system which belongs to the technical field of the optical measurement mechanics, the engineering material, and the mechanical property testing, comprises an optical measurement system, a dynamic loading device and piezoelectric ceramics and a control system thereof and can realize the dynamic performance test of various low-dimension materials under the high frequency loading condition. The low-dimension material dynamic tensile loading measurement system adopts the piezoelectric ceramics drive to realize the high frequency loading with the highest frequency reaching up to several kilohertz, amplifies the micro displacement of the piezoelectric ceramics through an precision-machined displacement amplification lever to be fit for the tests of various hardness materials, adopts a high definition digital image relevant measurement system to measure the deformation situation of the surface of a tested piece under the condition of dynamic loading; and the low-dimension material dynamic tensile loading measurement system has convenient use and compact structure.
Description
Technical field
A kind of low-dimension material dynamic tensile loading measurement system belongs to optical measurement mechanics, construction material, mechanics performance testing technology field.
Background technology
Along with micro-nano science and technology development, the application of microelectromechanical systems (MEMS) more and more widely, low-dimensional materials such as various silicon fimls, metallic film are widely used in the manufacturing of microelectromechanical systems.The performance of these materials directly affects the reliability of microelectromechanical systems, therefore tests most important accurately and reliably to the mechanical characteristic of this class material.Present stage, the static tensile mechanical properties for these low-dimensional materials had reasonable research, developed multiple stretching loading system and measured its tensile property, as the suspension type static and dynamic material testing machine of tiny tensile [200510011828.8] of invention such as the Dai Fulong of Tsing-Hua University etc.Yet the common frequency of operation of microelectromechanical systems is than higher, so its dynamic mechanical is more important to security and the reliability of MEMS, and the research of micro nanometer mechanics and material science is also had important science and using value.Because conventional dynamic test means are powerless to the dynamic performance testing of low-dimensional materials, need the dynamic load measuring system of design at low-dimensional materials.
The Sun Jun of Xi'an Communications University etc. has invented a kind of method [200510096133.4] of determining metal film fatigue life in electro-mechanical coupling field, cardinal principle be with deposit metal films on base material, by applying testing machine base material is loaded, because the difference of the elastic performance of base material and metallic film realizes the fatigue of metallic film is loaded, this method measuring object is necessary for metal material, require the elastic performance of base material and metallic film to have apparent in view difference just can test simultaneously, and the dynamic load frequency is not high.People such as the Zhang Guangping of Metal Inst., Chinese Academy of Sciences have invented membraneous material electricity/heat/couple of force cooperation Performance Test System and method of testing [200610047538.3] down, this method utilizes alternating current to cause Joule heat in the metal wire, because the difference of metal wire and film matrix thermal expansivity realizes the heat fatigue of metal wire is loaded, this method requires tested object also to be confined to metal material, load mode is by hot adaptive generation thermal deformation, and loading frequency is not high.
The method that the top is mentioned is primarily aimed at metallic film material test, and all is to realize dynamic load to material by indirect method, and loading frequency is not high, and the mechanical parameter of material under can't the quantitative description dynamic load.
Summary of the invention
The purpose of this invention is to provide a kind of low-dimension material dynamic tensile loading measurement system, can realize under the high-frequency loading environment, various low-dimensional materials dynamic performance testings, easy to use, compact conformation.
Technical scheme of the present invention is as follows:
A kind of low-dimension material dynamic tensile loading measurement system contains optical microscope, dynamic loading device, piezo driven systems; Described dynamic loading device comprises two cantilever lever displacement load maintainers, back-moving spring and test specimen chuck; Described piezo driven systems comprises piezoelectric ceramics and piezoelectric ceramics control system; Described pair of cantilever lever displacement load maintainer is the integral type hollow structure, and two cantilever levers connect by connecting link, and the middle part of connecting link is an elastic hinge, and overhanging piezoelectric ceramics bearing is arranged on two cantilever levers; Piezoelectric ceramics is placed on the piezoelectric ceramics bearing, back-moving spring is installed on the end of two cantilever levers near the piezoelectric ceramics bearing, the test specimen chuck is installed on the other end of two cantilever levers, and test specimen sticks on the test specimen chuck, and whole dynamic loading device is positioned on the objective table of optical microscope.
In the technical scheme of the present invention, it is characterized in that: the width l of the elastic hinge part of described pair of cantilever lever displacement load maintainer is greater than zero and less than 1/20 of connecting link width.
In the technical scheme of the present invention, it is characterized in that: the enlargement factor of described optical microscope is at least 1000 times.
In the technical scheme of the present invention, it is characterized in that: adopt rigid material processing in two cantilever lever displacement load maintainers.
The present invention compared with prior art has the following advantages and the high-lighting effect: the present invention adopts Piezoelectric Ceramic can realize that the high-frequency loading highest frequency of various waveforms can reach thousands of hertz; The present invention amplifies the test that lever goes for the micro-displacement amplification of piezoelectric ceramics various rigidity materials by precision machined displacement; The present invention adopts the high-resolution optics measuring system can measure the distortion situation on test specimen surface under the dynamic load condition simultaneously; Compact conformation of the present invention easy to usely can be realized under the high-frequency loading environment dynamic performance testing of various low-dimensional materials.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the used dynamic loading device vertical view of the present invention.
Among the figure: 1-dynamic loading device; 2-piezoelectric ceramics; 3-piezoelectric ceramics controller; 4-optical microscope; 5-computing machine; The two cantilever levers of 6-; The 7-connecting link; The 8-elastic hinge; The 9-ceramic support; 10-back-moving spring; 11-test specimen chuck; 12 test specimens.
Embodiment
Further specify concrete structure of the present invention and embodiment below in conjunction with accompanying drawing:
As shown in Figure 1, low-dimension material dynamic tensile loading measurement system of the present invention mainly is made up of optical microscope 4, dynamic loading device 1, piezoelectric ceramics 2 and piezoelectric ceramics control system 3.Dynamic loading device is installed on the objective table of optical microscope, utilizes optical microscope that high-resolution observation is carried out on the test specimen surface.The eyepiece of optical microscope is connected on the ccd image acquisition system simultaneously, gathers the different images that load moment test specimen surface, and stores in the computing machine 5.Load the end back image that collects is carried out aftertreatment, can obtain the deformation field information on test specimen surface.
As shown in Figure 2, dynamic loading device 1 comprises two cantilever lever displacement load maintainers, back-moving spring 7 and test specimen chuck 8 among the present invention.Two cantilever lever displacement load maintainers once form for the integral type hollow structure adopts precision processing technology processing, two cantilever levers 6 connect by connecting link 7, the middle part of connecting link 7 is an elastic hinge 8, this elastic hinge 8 carries out retrofit for adopting wire cutting technology at connecting link 7 middle parts, connecting link 7 middle part width are cut to below 1/20 of its original width, an overhanging piezoelectric ceramics bearing 9 is arranged respectively on two cantilever levers 6.Piezoelectric ceramics 2 is placed on the ceramic support 9, back-moving spring 10 is installed on an end of the close ceramic support 9 of two cantilever levers 6, be in tensioned state, guarantee that piezoelectric ceramics 2 closely contacts tight with two cantilever levers 6 of two cantilever lever displacement load maintainers all the time, test specimen 12 sticks on the test specimen chuck 11, and test specimen chuck 11 is fixed on two cantilever lever displacement load maintainers by screw and cover plate.
Adjust the output waveform and the frequency of piezoelectric ceramics controller 3, to piezoelectric ceramics 2 output voltage signals.Make its elongation by on piezoelectric ceramics 2, applying voltage, thereby an end that promotes two cantilever lever displacement load maintainers moves, make back-moving spring 10 elongations simultaneously, because the elastic hinge 8 of two cantilever lever displacement load maintainers, cutting forms at connecting link 7 middle parts by wire cutting technology, and total adopts rigid material to process, because size effect can form the effect of spring-like steel disc, the mobile meeting of therefore two cantilever lever displacement load maintainer one ends is shunk by rightabout the moving promptly that this elastic hinge 8 is converted into the other end at this regional area.Recover former length behind piezoelectric ceramics 2 loss of voltage, back-moving spring 10 also recovers original length, and two cantilever lever displacement load maintainers are withdrawn into initial position, and the moving promptly of other direction that can be converted into two cantilever lever displacement load maintainers by elastic hinge 8 stretches.Connect alternating current when piezoelectric ceramics 2, voltage increases minimizing repeatedly, and then an end of two cantilever lever displacement load maintainers is realized stretching and shrinking, and the other end is then realized shrinking and stretching by the drive of elastic hinge 8, thereby test specimen 12 is realized dynamic load.
When adopting the present invention to measure, earlier piezoelectric ceramics 2 is placed on the ceramic support of two cantilever lever displacement load maintainers, fix by back-moving spring 10, then test specimen 12 sticked on the test specimen chuck 11, and by screw retention on two cantilever lever displacement load maintainers.Again whole dynamic loading device 1 is fixed on the objective table of optical microscope, adjusts the object distance blur-free imaging.Situation according to required loading, by piezoelectric ceramics controller 3, adjust the frequency and the waveform of piezoelectric ceramics 2, test specimen is loaded, the image that utilizes CCD to gather the test specimen surface simultaneously outputs to computing machine, utilize the digital picture related system to analyze the deformation field information on test specimen surface after finishing loading, draw the dynamic property of test specimen.
Claims (4)
1. a low-dimension material dynamic tensile loading measurement system is characterized by: contain optical microscope, dynamic loading device (1), piezo driven systems; Described dynamic loading device (1) comprises two cantilever lever displacement load maintainers, back-moving spring (10) and test specimen chuck (11); Described piezo driven systems comprises piezoelectric ceramics (2) and piezoelectric ceramics control system (3); Described pair of cantilever lever displacement load maintainer is the integral type hollow structure, and two cantilever levers (6) connect by connecting link (7), and the middle part of connecting link is an elastic hinge (8), and overhanging piezoelectric ceramics bearing (9) is arranged on two cantilever levers; Piezoelectric ceramics (2) is placed on the piezoelectric ceramics bearing, and back-moving spring (10) is installed on the end of two cantilever levers near the piezoelectric ceramics bearing, and test specimen chuck (11) is installed on the other end of two cantilever levers, and test specimen (12) sticks on the test specimen chuck (11); Whole dynamic loading device (1) is positioned on the objective table of optical microscope.
2. according to the described low-dimension material dynamic tensile loading measurement system of claim 1, it is characterized in that: the width l of the elastic hinge part of described pair of cantilever lever displacement load maintainer is greater than zero and less than 1/20 of connecting link width.
3. according to the described low-dimension material dynamic tensile loading measurement system of claim 1, it is characterized in that: the enlargement factor of described optical microscope is at least 1000 times.
4. according to the described low-dimension material dynamic tensile loading measurement system of claim 1, it is characterized in that: described pair of cantilever lever displacement load maintainer adopts rigid material processing.
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Cited By (12)
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| CN103163024A (en) * | 2013-03-20 | 2013-06-19 | 清华大学 | Film loading device |
| CN103278386A (en) * | 2013-05-22 | 2013-09-04 | 天津大学 | Measurement system for thin-film material tension-compression fatigue dynamic loading |
| CN103868810A (en) * | 2014-02-27 | 2014-06-18 | 中国科学院物理研究所 | Loading fatigue property test system of micromechanical device |
| CN105043893A (en) * | 2015-07-31 | 2015-11-11 | 中国科学院长春光学精密机械与物理研究所 | Small-load loading mechanism applied to tensile test in vacuum state |
| CN106525847A (en) * | 2016-10-25 | 2017-03-22 | 哈尔滨工业大学 | Composite material elastic property variability identification method based on strain full-field measurement |
| CN107121278A (en) * | 2017-07-10 | 2017-09-01 | 内蒙金属材料研究所 | A kind of test device and method of testing for ensureing load test for fastener |
| CN107367238A (en) * | 2016-05-13 | 2017-11-21 | 浙江微科机电有限公司 | A kind of novel portable strain measurement system and method for testing |
| CN108469407A (en) * | 2018-03-16 | 2018-08-31 | 中国石油大学(华东) | A kind of device and method of detection clean surface degree |
| CN109443230A (en) * | 2018-12-17 | 2019-03-08 | 东莞理工学院 | A kind of piezoelectric ceramics measuring system based on image procossing |
| CN110243679A (en) * | 2019-05-29 | 2019-09-17 | 北京工业大学 | A kind of thermo bimetal stretches driver and preparation method thereof |
| CN112414842A (en) * | 2020-10-21 | 2021-02-26 | 中国石油大学(北京) | Rock rigidity determination method and device |
| CN113375581A (en) * | 2021-04-30 | 2021-09-10 | 西安电子科技大学 | Device and method for testing strain of low-dimensional material in different directions |
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| DE19520071C2 (en) * | 1995-06-06 | 1998-01-02 | Karlsruhe Forschzent | Device for uniaxial examination of micro tensile samples |
| CN100489485C (en) * | 2004-09-24 | 2009-05-20 | 中国科学院力学研究所 | Micromechanics measurer and measuring method |
| KR100670234B1 (en) * | 2005-01-17 | 2007-01-17 | 한국기계연구원 | A subminiature material tester |
| CN100470230C (en) * | 2005-05-31 | 2009-03-18 | 清华大学 | Suspension type static and dynamic material testing machine of tiny tensile |
| CN100405040C (en) * | 2005-08-15 | 2008-07-23 | 清华大学 | Film stretching loading device under scanning microscopy environment and film distortion measurement method |
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2009
- 2009-03-27 CN CN2009101319210A patent/CN101520387B/en not_active Expired - Fee Related
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| CN103163024A (en) * | 2013-03-20 | 2013-06-19 | 清华大学 | Film loading device |
| CN103278386A (en) * | 2013-05-22 | 2013-09-04 | 天津大学 | Measurement system for thin-film material tension-compression fatigue dynamic loading |
| CN103868810A (en) * | 2014-02-27 | 2014-06-18 | 中国科学院物理研究所 | Loading fatigue property test system of micromechanical device |
| CN105043893A (en) * | 2015-07-31 | 2015-11-11 | 中国科学院长春光学精密机械与物理研究所 | Small-load loading mechanism applied to tensile test in vacuum state |
| CN105043893B (en) * | 2015-07-31 | 2017-09-12 | 中国科学院长春光学精密机械与物理研究所 | Side crops industry load maintainer applied to tension test under vacuum state |
| CN107367238A (en) * | 2016-05-13 | 2017-11-21 | 浙江微科机电有限公司 | A kind of novel portable strain measurement system and method for testing |
| CN106525847B (en) * | 2016-10-25 | 2019-04-19 | 哈尔滨工业大学 | Composite material elastic property variability discrimination method based on strain measurement of full field |
| CN106525847A (en) * | 2016-10-25 | 2017-03-22 | 哈尔滨工业大学 | Composite material elastic property variability identification method based on strain full-field measurement |
| CN107121278A (en) * | 2017-07-10 | 2017-09-01 | 内蒙金属材料研究所 | A kind of test device and method of testing for ensureing load test for fastener |
| CN108469407A (en) * | 2018-03-16 | 2018-08-31 | 中国石油大学(华东) | A kind of device and method of detection clean surface degree |
| CN108469407B (en) * | 2018-03-16 | 2021-01-12 | 中国石油大学(华东) | Device and method for detecting surface cleanliness |
| CN109443230A (en) * | 2018-12-17 | 2019-03-08 | 东莞理工学院 | A kind of piezoelectric ceramics measuring system based on image procossing |
| CN109443230B (en) * | 2018-12-17 | 2021-01-12 | 东莞理工学院 | Piezoelectric ceramic measuring system based on image processing |
| CN110243679A (en) * | 2019-05-29 | 2019-09-17 | 北京工业大学 | A kind of thermo bimetal stretches driver and preparation method thereof |
| CN110243679B (en) * | 2019-05-29 | 2024-01-09 | 北京工业大学 | Thermal bimetal stretching driver and preparation method thereof |
| CN112414842A (en) * | 2020-10-21 | 2021-02-26 | 中国石油大学(北京) | Rock rigidity determination method and device |
| CN112414842B (en) * | 2020-10-21 | 2022-02-08 | 中国石油大学(北京) | Rock rigidity determination method and device |
| CN113375581A (en) * | 2021-04-30 | 2021-09-10 | 西安电子科技大学 | Device and method for testing strain of low-dimensional material in different directions |
| CN113375581B (en) * | 2021-04-30 | 2022-12-13 | 西安电子科技大学 | Device and method for testing strain of low-dimensional material in different directions |
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