CN101514960A - SF* detecting system based on photoacoustic spectroscopic technology - Google Patents

SF* detecting system based on photoacoustic spectroscopic technology Download PDF

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Publication number
CN101514960A
CN101514960A CNA2009100666721A CN200910066672A CN101514960A CN 101514960 A CN101514960 A CN 101514960A CN A2009100666721 A CNA2009100666721 A CN A2009100666721A CN 200910066672 A CN200910066672 A CN 200910066672A CN 101514960 A CN101514960 A CN 101514960A
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China
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optoacoustic
detection system
photoacoustic
generator
control circuit
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CNA2009100666721A
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徐元哲
赵常均
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JILIN ZHONGZHUN INSTRUMENT EXPLOITATION CO Ltd
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JILIN ZHONGZHUN INSTRUMENT EXPLOITATION CO Ltd
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Abstract

The invention provides an SF6 detecting system based on photoacoustic spectroscopic technology, comprising a closed air chamber, an SF6 breaker, a plurality of leak gas samplers, an automatic control valve, a multipath gas collecting main and a control circuit of the SF6 detecting system. The system is characterized by comprising a photoacoustic generator and a laser, wherein the structure of photoacoustic generator is that: a photoacoustic cavity is arranged in a shell; an optical filter is hermetically arranged on the front end of the photoacoustic cavity; the shell is provided with a microphone contacted with the photoacoustic cavity; the photoacoustic cavity is connected with an air outlet of a sampling pump; an air inlet of the sampling pump is connected with the multipath gas collecting main; the shell is provided with an exhaust port communicated with the photoacoustic cavity; the laser is arranged on one side of the optical filter opposite to the photoacoustic generator; and a cleaning inlet of the photoacoustic generator is connected with a washing pump. The SF6 detecting system has the advantages of high sensitivity, stable and reliable long-term work, simple structure and small volume, is applicable to online detection of SF6 gas leakage of SF6 switching equipment, such as the SF6 breaker and the like, and full-sealed combined electrical apparatuses.

Description

SF based on optoacoustic spectroscopy 6Detection system
Technical field
The present invention relates to technical field of measurement and test, is a kind of SF based on optoacoustic spectroscopy 6Detection system.
Background technology
The safe operation of electric system is related to the development of whole national economy and stablizing of people's lives.Along with modern electric towards high voltage, big unit, jumbo developing rapidly, also more and more higher to the requirement of power system power supply reliability.Along with science and technology and expanding economy, to have the good electric insulation ability and the SF of arc extinction performance 6Gas is the SF of insulation arc-extinguishing medium 6Switchgear and hermetically sealed combined electrical apparatus GIS are extensive use of in electric system.Heavy wool formula, less oil, vacuum type isolating switch before progressively replacing, it has advantages such as volume is little, in light weight, capacity is big, maintenance cycle is long.In the center of big city and areal of industrial concentration transformer station, the dangerously steep mountain area transformer station in area, occasions such as super, UHV transmission have obtained using extremely widely.Especially in recent years SF 6Switch gear room, GIS combined electrical apparatus are applied to City Substation more and more at large.Since factors such as mass discrepancy such as manufacturing, installation and material aging, SF 6SF such as isolating switch 6High-tension switch gear SF 6Gas leaks and happens occasionally.When high-current on-off, because strong arc discharge can produce the subfluoride of some sulfur-bearings in leak scene.These substance reaction abilities are stronger, can further react with electrode material, hydrone again when water and oxygen, produce poisonous or hypertoxic gas thereby decompose.Bad reactions such as flu, allergic, n and V, fatigue can appear being similar in the main insulting respiratory system of these toxic gases after the poisoning, when inhalation dose is big, more serious consequence can occur.In addition because SF 6Specific gravity of gas is bigger than air, leaks easily to assemble, and easily causes low sheaf space anoxic, causes the field personnel to suffocate.Simultaneously, SF 6Gas is the greenhouse gases of generally acknowledging, is CO to the infrared ray absorbing ability 2Thousands of times.Therefore, accurately detect SF in the air 6Gas concentration is the guarantee of device security reliability service, and its security also receives global concern.Prior art detects SF 6Gas concentration adopts vapor-phase chromatography, coefficient of heat conductivity method, electron drift method, spectroscopic methodology, negative corona discharge method etc. usually.But these methods all need expensive instrument and equipment, and require the operator to have quite high operant level, obviously all are not suitable for.The existing sulfur hexafluoride detection system that is used for the high-voltage transforming scene is many based on following principle, and a kind of principle that is based on high-voltage corona discharge is because SF 6The insulativity of gas and air is different, and the electric current that effluve passes through between two electrodes is also with difference, has judged whether SF by detecting the size of this electric current, opening 6Gas exist with and concentration.This type of equipment volume is little, is convenient to building network, but its high-voltage corona discharge sensor life-time is shorter, and work that can not be steady in a long-term, and inaccessible advantages of higher stability, its staking-out work is difficulty relatively also.Another kind is to utilize SF 6Gas is to infrared feature with strong absorption, comes qualitative or detects SF quantitatively 6Leakage, also exist complex structure, detects air chamber and be not suitable for high Precision Detection in short-term, and cost is very high.
Summary of the invention
The objective of the invention is, overcome the shortcoming of prior art, provide a kind of highly sensitive, long-term work is reliable and stable, and is simple in structure, the SF based on optoacoustic spectroscopy that volume is little 6Detection system.
The objective of the invention is to realize: a kind of SF based on optoacoustic spectroscopy by following technical scheme 6Detection system, the air chamber 1 that it is included in sealing is built-in with SF 6 Isolating switch 2 is at SF 6Some gas leakage sampling pipes 3 are set near isolating switch 2 positions, some gas leakage sampling pipes 3 are connected with multichannel gas gathering manifold 4 by the autocontrol valve of putting on the pipeline separately 20 respectively, SF6 detection system control circuit 7, it is characterized in that: also comprise optoacoustic generator 5, laser instrument 6, the structure of described optoacoustic generator 5 is, has housing 11, in housing 11, be provided with optoacoustic chamber 12, the forward end seal in optoacoustic chamber 12 is equipped with optical filter 13, the back-end sealing in optoacoustic chamber 12 is equipped with and stops up 14, on housing 11, be provided with and optoacoustic chamber 12 contacted microphones 8, microphone 8 is electrically connected with SF6 detection system control circuit 7, optoacoustic chamber 12 is connected with the gas outlet of sampling pump 9 by the air intake opening 15 that is provided with on its housing 11, the air intake opening of sampling pump 9 is connected with multichannel gas gathering manifold 4, sampling pump 9 is electrically connected with SF6 detection system control circuit 7, autocontrol valve 20 is electrically connected with SF6 detection system control circuit 7, the exhausr port 16 be communicated with optoacoustic chamber 12 is set on housing 11, laser instrument 6 is set in optical filter 13 1 sides of relative optoacoustic generator 5.
The cleaning air intake opening 17 be communicated with optoacoustic chamber 12 is set on the housing 11 of described optoacoustic generator 5, and cleaning air intake opening 17 is connected with scavenging pump 10, scavenging pump 10 be electrically connected at SF6 detection system control circuit 7.
SF based on optoacoustic spectroscopy of the present invention 6The advantage applies of detection system exists:
(1) owing to be the sound that absorption produced of direct measurement gas to light, photo-acoustic detection accurately and the reliability height;
(2) almost do not have the zero point drift phenomenon, when not having tested gas, can not produce acoustical signal;
(3) owing to the ad hoc structure of optoacoustic generator, be suitable for the modulating frequency 100HZ~10KHZ of laser, be convenient to the photoacoustic signal transmission;
(4) adopt multichannel to select owing to gather gas, can be implemented in the optoacoustic chamber of an optoacoustic generator and can monitor multipath gas;
(5) owing to adopt acoustical signal to detect, it is highly sensitive, and the minimum detection ability is 0.05ppm;
(6) be applicable to SF 6SF such as isolating switch 6Switchgear and hermetically sealed combined electrical apparatus SF 6The on-line monitoring that gas leaks;
(7) long-term work is reliable and stable, and is simple in structure, and volume is little.
Description of drawings
Fig. 1 is based on the SF of optoacoustic spectroscopy 6The detection system structural representation.
Fig. 2 is optoacoustic generator 5 structural representations among Fig. 1.
Fig. 3 is SF6 detection system control circuit 7 circuit theory synoptic diagram among Fig. 1.
Fig. 4 is the DSP data acquisition and treatment circuit 21 principle schematic of SF6 detection system control circuit 7.
Fig. 5 is pre-amplification circuit 23 principle schematic of the signal conditioning circuit 22 of SF6 detection system control circuit 7.
Fig. 6 is voltage lifting circuit 24 principle schematic of the signal conditioning circuit 22 of SF6 detection system control circuit 7.
Fig. 7 is double limiting circuit 25 principle schematic of the signal conditioning circuit 22 of SF6 detection system control circuit 7.
Fig. 8 is the principle schematic of the storer 19 of SF6 detection system control circuit 7.
Fig. 9 is multichannel autocontrol valve driving circuit 31 principle schematic of SF6 detection system control circuit 7.
Figure 10 is sampling pump driving circuit 32 principle schematic of SF6 detection system control circuit 7.
Figure 11 is scavenging pump driving circuit 33 principle schematic of SF6 detection system control circuit 7.
Figure 12 is the warning and display circuit 34 principle schematic of SF6 detection system control circuit 7.
Figure 13 is based on the SF of optoacoustic spectroscopy 6The detection system main program flow chart.
Among the figure: 1 air chamber, 2SF 6Isolating switch, 3 some gas leakage sampling pipes, 4 multichannel gas gathering manifolds, 5 optoacoustic generators, 6 laser instruments, 7SF6 detection system control circuit, 8 microphones, 9 sampling pumps, 10 scavenging pumps, 11 housings, 12 optoacoustic chambeies, 13 optical filters, 14 stop up 15 air intake openings, 16 exhausr ports, 17 clean air intake opening, 19 storeies, 20 autocontrol valves, 20-1 first autocontrol valve, 20-2 second autocontrol valve, 20-3 the 3rd autocontrol valve, 20-4 four selfs brake control valve, 20-5 the 5th autocontrol valve, 20-6 the 6th autocontrol valve, 20-7 the 7th autocontrol valve, 20-8 the 8th autocontrol valve, 21DSP data acquisition and treatment circuit, 22 signal conditioning circuits, 23 pre-amplification circuits, 24 voltage lifting circuit, 25 double limiting circuit, 31 multichannel autocontrol valve driving circuits, 32 sampling pump driving circuits, 33 scavenging pump driving circuits, 34 report to the police and display circuit.
Embodiment
Utilize drawings and Examples that the present invention is further described below.
With reference to Fig. 1 and 2, the SF based on optoacoustic spectroscopy of the present invention 6Detection system is included in the built-in SF of air chamber 1 of sealing 6 Isolating switch 2 is at SF 6Some gas leakage sampling pipes 3 are set near isolating switch 2 positions, some gas leakage sampling pipes 3 are connected with multichannel gas gathering manifold 4 by the autocontrol valve of putting on the pipeline separately 20 respectively, SF6 detection system control circuit 7, also comprise optoacoustic generator 5, laser instrument 6, the structure of described optoacoustic generator 5 is, has housing 11, in housing 11, be provided with optoacoustic chamber 12, the forward end seal in optoacoustic chamber 12 is equipped with optical filter 13, the back-end sealing in optoacoustic chamber 12 is equipped with and stops up 14, on housing 11, be provided with and optoacoustic chamber 12 contacted microphones 8, microphone 8 is electrically connected with SF6 detection system control circuit 7, optoacoustic chamber 12 is connected with the gas outlet of sampling pump 9 by the air intake opening 15 that is provided with on its housing 11, the air intake opening of sampling pump 9 is connected with multichannel gas gathering manifold 4, sampling pump 9 is electrically connected with SF6 detection system control circuit 7, autocontrol valve 20 is electrically connected with SF6 detection system control circuit 7, the exhausr port 16 be communicated with optoacoustic chamber 12 is set on housing 11, laser instrument 6 is set in optical filter 13 1 sides of relative optoacoustic generator 5.The cleaning air intake opening 17 be communicated with optoacoustic chamber 12 is set on the housing 11 of described optoacoustic generator 5, and cleaning air intake opening 17 is connected with scavenging pump 10, scavenging pump 10 be electrically connected at SF6 detection system control circuit 7.
The function of laser instrument 6 is the laser beams that produce modulation, and the optical filter 13 by optoacoustic generator 5 incides optoacoustic chamber 12 to produce photoacoustic signal; Optoacoustic chamber 12 and microphone 8 amplify photoacoustic signal and make it convert electric signal to; Supply DSP data acquisition and treatment circuit 21 to handle the back after signal conditioning circuit 22 conditionings of the voltage signal that microphone 8 is produced through SF6 detection system control circuit 7 again alerting signal takes place.SF6 detection system control circuit 7 is electrically connected with some gas leakage sampling pipes 3 autocontrol valve 20 separately, can be by SF6 detection system control circuit 7 every by setup program unlatchings autocontrol valve 20 of a gas leakage sampling pipe 3 wherein, and the autocontrol valve 20 of cutting out other gas leakage sampling pipe 3 realizes SF 6The collection of isolating switch 2 multiple spot gas leakages.For example: the first autocontrol valve 20-1 opens, and the second autocontrol valve 20-2, the 3rd autocontrol valve 20-3, four selfs brake control valve 20-4, the 5th autocontrol valve 20-5, the 6th autocontrol valve 20-6, the 7th autocontrol valve 20-7 and the 8th autocontrol valve 20-8 close.The second autocontrol valve 20-2 opens, and first autocontrol valve 20-1 unlatching, the 3rd autocontrol valve 20-3, four selfs brake control valve 20-4, the 5th autocontrol valve 20-5, the 6th autocontrol valve 20-6, the 7th autocontrol valve 20-7 and the 8th autocontrol valve 20-8 close.By that analogy.SF6 detection system control circuit 7 is electrically connected with sampling pump 9, unlatching that can be by control sampling pump 9 or close and realize SF 6The gas leakage of isolating switch 2 enters the optoacoustic chamber 12 of optoacoustic generator 5 by setup program.SF6 detection system control circuit 7 is electrically connected with scavenging pump 10, when the optoacoustic chamber 12 of optoacoustic generator 5 is cleaned, 7 controls of SF6 detection system control circuit are closed sampling pump 9, and the scavenging pump 10 of cutting out opens, scavenging pump 10 is pressed into the optoacoustic chamber 12 of optoacoustic generator 5 with purge gas, and the gas after the cleaning is discharged outside 12 chambeies, optoacoustic chamber through exhausr port 16 again.Autocontrol valve 20 adopts commercially available solenoid valve.
Because SF 6Gas has stronger absorption at 10.6 mum wavelength places, so the emission wavelength of the exciting light source of selecting is 10.6 μ m.Laser instrument 6 is selected CO for use 2Laser instrument, this laser instrument utilize the transition of each vibrational energy level in the same electronic state, and the oscillates wavelength is near tens spectral lines 9.6um and the 10.6um.Because very near apart from ground state as these vibrations----rotational energy level of laser work energy level, so the energy conversion efficiency of device is higher, reaches 20%---25%.The used laser instrument 6 of the present invention adopts carbon dioxide RF-laser device, and its modulating frequency is 100HZ~10KHZ.Optical filter 13 is narrow band pass filters, only near the optical band the peak transmission wavelength is had higher transmission effect, all shows as high reflection at other wave band, so the optical filter peak transmission wavelength of selecting for use is corresponding SF 6The characteristic frequency of gas, and it is narrower to see through bandwidth, so that discharge the interference of non-detected gas.Optical filter peak transmission wavelength is selected 10.29um to 10.85um.The optoacoustic chamber 12 of optoacoustic generator 5 is the SF that the present invention is based on optoacoustic spectroscopy 6The core of detection system, the optoacoustic chamber 12 of optoacoustic generator 5 are that sample gas absorbs therein and distributes heat energy by radiationless relaxation process behind the luminous energy and produce pressure wave, and are converted to the part of electric signal by microphone 8.Its geometry and material have important effect to detection sensitivity.Microphone 8 is the parts that the acoustic energy that produce in the optoacoustic chamber 12 of optoacoustic generator 5 are converted into electric energy, and it must reflect the variation of pressure exactly, microphone 8 is selected for use microphone highly sensitive, that LF-response is good.The housing 11 of optoacoustic generator 5 of the present invention adopts stainless steel or brass chromium plating, the optoacoustic chamber 12 diameter 10mm that are provided with in the housing 11, the long 100mm in chamber.Optical filter 13 materials adopt the ZnSe crystal, press Brewster angle and install, because it meets CO 2The spectral line output area of laser instrument, and be difficult for deliquescence, stable performance.
Optical filter 13 characteristics of ZnSe crystal see the following form
With reference to Fig. 3, SF6 detection system control circuit 7 is the combination of existing known circuits, be that those skilled in the art just can realize without creative work, SF6 detection system control circuit 7 is selected the main control chip of TMS320LF2407DSP chip as data acquisition and processing, dsp chip is 16 fixed-point dsps, be applicable to the execution complicated algorithm, for example adapt to control, convolution, relevant, FFT etc.SF6 detection system control circuit 7 of the present invention comprises DSP data acquisition and treatment circuit 21, signal conditioning circuit 22, storer 19 and warning and display circuit 34.Photoacoustic signal changes voltage signal into after microphone 8 is gathered, input DSP data acquisition and treatment circuit 21 are sampled after signal conditioning circuit 22 is isolated amplification.The control of system and analysis software are stored in the flash memory that carries in the DSP sheet, and the voltage signal of discretize is carried out fft analysis.
With reference to Fig. 4, the DSP data acquisition of SF6 detection system control circuit 7 and treatment circuit 21 are the most basic dsp systems that can make the DSP operate as normal.DSP data acquisition and treatment circuit 21 are core with the TMS320LF2407 chip, at its peripheral expansion storer, clock circuit, reset circuit etc.The input of clock circuit external clock, clock frequency is 20MHz.Reset circuit uses a slice MAX708 power monitoring chip.The ADC module that carries in the TMS320LF2407 chip is 10 a bits serial A/D converter with built-in sampling/maintenance (S/H).The aanalogvoltage input range is 0V~3.3V, and the input that is higher than 3.3V is the output of full scale.
With reference to Fig. 5-7, signal conditioning circuit 22 mainly comprises pre-amplification circuit 23, voltage lifting circuit 24 and voltage double limiting circuit 25.
Adopt three grades of anti-phase amplifications with reference to Fig. 5 pre-amplification circuit 23, it is the OP07 integrated operational amplifier that operational amplifier adopts model, and it is the amplifier that is suitable as Detection of Weak Signals.
With reference to Fig. 6, voltage lifting circuit 24, when the ADC modular converter carries out the A/D sample conversion on the sheet that adopts TMS320LF2407, because the ADC module of TMS320LF2407 is the unipolarity input, can only sample to the signal greater than 0V, need be that direct current signal is sampled again with the ac input signal lifting therefore; Also because the interface voltage of the I/O pin of TMS320LF2407 is 3.3V, the voltage of input signal has surpassed 3.3V then can burn dsp chip, so, before carrying out the A/D employing, must carry out level conversion to the simulating signal of input, the reference voltage of the ADC module of TMS320LF2407 is 2.5V, must be controlled at input signal between 0V~2.5V, therefore, must at first carry out to insert TMS320LF2407 after the pre-service to input signal and handle, utilize model to come lifting voltage for the OP07 operational amplifier.Wherein+12V and-12V voltage is the working power of amplifier, Uref is used for the needed at ordinary times datum of lifting alternating current, according to known conditions when-5V<Vin<+during 5V, 0V<VO<2.5V must be arranged, as long as the value of Uref is set at 1V, can make the scope of output signal VO between 0V~2.5V by adjustable resistance R16.
With reference to Fig. 7, voltage double limiting circuit 25 accurately clamps down on output voltage V out2 0~+ the 2.5V scope in, with the chip of protection DSP.Operational amplifier A 1 is formed and is gone up amplitude limiter circuit, when input voltage during less than+2.5V since this moment operational amplifier A 1 work be in open loop situations.If operational amplifier A 1 is an ideal operational amplificr, then it is output as positive infinity or minus infinity.Output can only be positive voltage or negative supply voltage value in the reality.Diode D1 ends, so Vout2=Vout1; When input voltage during greater than+2.5V, this moment, A1 was output as the negative supply voltage value, so the D1 conducting, and output voltage will be clamped at+2.5V.The model of operational amplifier A 1, A2 is OP07.
With reference to Fig. 8, storer 19 is that expansion a slice ISSI61LV6416 constitutes on the TMS320LF2407DSP chip.The read-write of storer directly links to each other with the read-write of DSP.Storer /the CE signal is by the result's control with/PS pin logical and of/DS pin, wherein/and the DS pin receives on the A15 of storer, in order to distinguish the addressing range of program's memory space and data space.
With reference to Fig. 9, multichannel autocontrol valve driving circuit 31, employing be optical relay AQY274.Its drive current is little, and load capacity is stronger.Be enough to drive autocontrol valve 20.And the photoelectricity isolation, reduced interference to system.
With reference to Figure 10, sampling pump driving circuit 32, employing be optical relay AQY274.Its drive current is little, and load capacity is stronger.Be enough to drive sampling pump 9.And the photoelectricity isolation, reduced interference to system.
With reference to Figure 11, scavenging pump driving circuit 33, employing be optical relay AQY274.Its drive current is little, and load capacity is stronger.Be enough to drive scavenging pump 10.And the photoelectricity isolation, reduced interference to system.
With reference to Figure 12, the man-machine communication interface is to report to the police and display circuit 34.
With reference to Figure 13, system software program is the technology that those skilled in the art are familiar with according to Computer Processing technology and Automatic Measurement Technique establishment.With DSP is that the data acquisition of core and the software of fft analysis system are divided into system initialization module, parameter input module, acquisition module, FFT module and data transmitting module.System powers on the back according to program setting auto-initiation DSP, can adopt default setting then, promptly adopts the parameter that presets in the program.System entered waiting status after setting was finished, wait to receive to start sampling module behind the signal and begin sampling, and with data storage in the SRAM of DSP.System program has been taked modular design, and each module can realize a specific function.Can increase and decrease wherein some modules easily according to actual conditions during field adjustable.Also can suitably revise certain module in the later stage of program debug, and not influence the work of other pieces, this can reduce the workload of update routine greatly.
Utilization is based on the SF of optoacoustic spectroscopy 6Detection system through half a year to SF 6The isolating switch leak detection proves characteristics such as this measuring results is accurate, and highly sensitive, long-term work is reliable and stable, and is simple in structure, and volume is little.

Claims (2)

1. SF based on optoacoustic spectroscopy 6Detection system, the air chamber (1) that it is included in sealing is built-in with SF 6Isolating switch (2) is at SF 6Isolating switch (2) is provided with some gas leakage sampling pipes (3) near the position, some gas leakage sampling pipes (3) are connected with multichannel gas gathering manifold (4) by the autocontrol valve of putting on the pipeline separately (20) respectively, SF6 detection system control circuit (7), it is characterized in that: also comprise optoacoustic generator (5), laser instrument (6), the structure of described optoacoustic generator (5) is, has housing (11), in housing (11), be provided with optoacoustic chamber (12), the forward end seal in optoacoustic chamber (12) is equipped with optical filter (13), the back-end sealing in optoacoustic chamber (12) is equipped with obstruction (14), go up setting and the contacted microphone in optoacoustic chamber (12) (8) at housing (11), microphone (8) is electrically connected with SF6 detection system control circuit (7), optoacoustic chamber (12) is gone up the air intake opening (15) that is provided with by its housing (11) and is connected with the gas outlet of sampling pump (9), the air intake opening of sampling pump (9) is connected with multichannel gas gathering manifold (4), sampling pump (9) is electrically connected with SF6 detection system control circuit (7), autocontrol valve (20) is electrically connected with SF6 detection system control circuit (7), at housing (11) exhausr port (16) that is communicated with optoacoustic chamber (12) go up to be set, laser instrument (6) to be set in optical filter (13) one sides of relative optoacoustic generator (5).
2. the SF based on optoacoustic spectroscopy according to claim 1 6Detection system, it is characterized in that: go up at the housing (11) of described optoacoustic generator (5) the cleaning air intake opening (17) that is communicated with optoacoustic chamber (12) is set, clean air intake opening (17) and be connected with scavenging pump (10), scavenging pump (10) be electrically connected at SF6 detection system control circuit (7).
CNA2009100666721A 2009-03-23 2009-03-23 SF* detecting system based on photoacoustic spectroscopic technology Pending CN101514960A (en)

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CN102519904A (en) * 2011-12-13 2012-06-27 重庆大学 Automatic constant temperature type photoacoustic detection device for SF6 decomposed components and experiment method thereof
CN102661918A (en) * 2012-05-28 2012-09-12 中国科学院电工研究所 Off-resonance photoacoustic spectrometric detection and analysis device
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CN104101568A (en) * 2013-04-03 2014-10-15 徐元哲 Device for monitoring SF6 content of air based on photoacoustic spectrum technology
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CN104237126A (en) * 2014-09-09 2014-12-24 中国科学院电工研究所 Photoacoustic spectrometry detection device adopting axial multilayer filter plate structure
CN104198130A (en) * 2014-09-19 2014-12-10 国家电网公司 SF6 gas leakage detection method base on fractional laser-induced breakdown spectroscopy
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