CN101502835A - Mocvd设备内石墨基座的清洗方法 - Google Patents
Mocvd设备内石墨基座的清洗方法 Download PDFInfo
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- CN101502835A CN101502835A CNA2009101149154A CN200910114915A CN101502835A CN 101502835 A CN101502835 A CN 101502835A CN A2009101149154 A CNA2009101149154 A CN A2009101149154A CN 200910114915 A CN200910114915 A CN 200910114915A CN 101502835 A CN101502835 A CN 101502835A
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- graphite base
- acid
- degrees centigrade
- graphite
- cleaning method
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2009101149154A CN101502835B (zh) | 2009-02-09 | 2009-02-09 | Mocvd设备内石墨基座的清洗方法 |
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CN2009101149154A CN101502835B (zh) | 2009-02-09 | 2009-02-09 | Mocvd设备内石墨基座的清洗方法 |
Publications (2)
Publication Number | Publication Date |
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CN101502835A true CN101502835A (zh) | 2009-08-12 |
CN101502835B CN101502835B (zh) | 2011-01-05 |
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CN2009101149154A Expired - Fee Related CN101502835B (zh) | 2009-02-09 | 2009-02-09 | Mocvd设备内石墨基座的清洗方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102280396A (zh) * | 2011-09-14 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | 一种石墨舟饱和处理工艺 |
CN104998857A (zh) * | 2014-04-15 | 2015-10-28 | 宁波宝新不锈钢有限公司 | Abb板形仪滑环滑道的浸泡修复方法 |
CN112404022A (zh) * | 2020-11-20 | 2021-02-26 | 苏州镓港半导体有限公司 | 一种mocvd设备用石墨盘的清洗方法 |
CN114029300A (zh) * | 2021-03-12 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | 石墨盘的清洗方法 |
-
2009
- 2009-02-09 CN CN2009101149154A patent/CN101502835B/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102280396A (zh) * | 2011-09-14 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | 一种石墨舟饱和处理工艺 |
CN104998857A (zh) * | 2014-04-15 | 2015-10-28 | 宁波宝新不锈钢有限公司 | Abb板形仪滑环滑道的浸泡修复方法 |
CN112404022A (zh) * | 2020-11-20 | 2021-02-26 | 苏州镓港半导体有限公司 | 一种mocvd设备用石墨盘的清洗方法 |
CN112404022B (zh) * | 2020-11-20 | 2022-09-09 | 苏州镓港半导体有限公司 | 一种mocvd设备用石墨盘的清洗方法 |
CN114029300A (zh) * | 2021-03-12 | 2022-02-11 | 重庆康佳光电技术研究院有限公司 | 石墨盘的清洗方法 |
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Publication number | Publication date |
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CN101502835B (zh) | 2011-01-05 |
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Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20090812 Assignee: Crystal energy photoelectric (Changzhou) Co., Ltd. Assignor: Lattice Power (Jiangxi) Co., Ltd. Contract record no.: 2012360000083 Denomination of invention: Method for cleaning graphite base in MOCVD equipment Granted publication date: 20110105 License type: Common License Record date: 20121213 |
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LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110105 Termination date: 20190209 |
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EC01 | Cancellation of recordation of patent licensing contract | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: LATTICE POWER (CHANGZHOU) Corp. Assignor: LATTICE POWER (JIANGXI) Corp. Contract record no.: 2012360000083 Date of cancellation: 20220228 |