CN101479841A - Manufacturing method for susceptor and susceptor using this method - Google Patents

Abstract

The invention relates to a method of manufacturing a susceptor, in a way of joining a susceptor body and a cover together while simultaneously embedding a heater. The method includes preparing a susceptor cover having one or more projections, preparing a susceptor body having grooves corresponding to the projections of the susceptor cover, and fitting the susceptor cover in the susceptor body through forging, in which at least one of each of the projections and each of the grooves is plastically deformed during the forging, thus enabling a close fit therebetween, wherein at least one of each of the projections and each of the grooves is partially changed in sectional shape such that the projection and the groove have different sectional areas, when viewed in an insertion direction.

Description

The manufacture method of pedestal and use the pedestal of this method

Technical field

The present invention relates to a kind of method of making pedestal, this pedestal is used for supporting and heating monocrystalline silicon piece and the homologue thereof that is used for the liquid crystal panel solar cell, and, be particularly related to a kind of manufacture method that is used to be installed in the pedestal of the liquid crystal display device in the vacuum chamber, wherein, in this vacuum chamber, surface such as transparent glass substrate such as the array substrate of liquid crystal display device or colored substrates, in gaseous environment, carry out vacuum moulding machine, thereby the glass substrate that heating or cooling are mounted thereon, wherein, this pedestal is fabricated from aluminum, and can be in order to seal the heater that wherein embeds.

Background technology

Usually, liquid crystal display device is by injecting liquid crystal and utilize its liquid crystal characteristic in order to realize the non-luminescent device of accurate visual performance effect between array substrate and colored substrate.Array substrate and colored substrate are made separately by this way, and clear glass or the made transparent glass substrate of its homologue are gone through thin film deposition, patterning and etch process repeatedly.Here, with the reaction material of gas phase and raw material introducing technology chamber with the situation of carrying out depositing operation under, a kind of pedestal that embeds heater that comprises is equipped with in this process chamber, so that will be installed on the temperature that transparent glass substrate on the pedestal is heated to the deposition that is fit to this transparent glass substrate.In such pedestal, because liquid crystal display device has experienced constant generations, so the size of transparent glass substrate is increasing.

The structure of the schematically illustrated a kind of pedestal according to prior art of Fig. 1.

With reference to Fig. 1, traditional pedestal is made up of Base body 100, heater 101 and support 106.

Base body 100 is formed by embedding groove 102 and heater 101, embed wherein that groove 102 can be any dendritic pattern and in order to hold heater 101 therein, and heater 101 has and embeds groove 102 corresponding patterns and embed in this embedding groove 102, in order to the temperature of control pedestal.In addition, support 106 is installed in the upper surface of pedestal, and the transparent glass substrate 107 that is used for liquid crystal display device is installed in support 106.

In the conventional method that heater is installed on the pedestal, wherein pedestal is used as the employed transparent glass substrate of liquid crystal display device is carried out vacuum-deposited heating plate, and Fig. 2 and Fig. 3 show the method that embeds heater in pedestal.

As shown in Figures 2 and 3, for heater 101 being embedded into the bottom of the made Base body of aluminum alloy materials 100, form the embedding groove 102 of any dendritic pattern, heater 101 is contained in this embedding groove 102, and subsequently seal cover 103 is assembled in the Base body 100, to fix heater 101 hermetically.

Yet there is following problem in this conventional method.As shown in Figure 4, the problem that exists between seal cover 103 and the heater 101 and produce gap 110 between heater 101 and the Base body 100.More specifically, as shown in Figure 4, heater 101 is from the heating core wire 101a heat that sheds, and heat is sent to Base body 100 through heating sheath 101b again.Yet, owing to the heat that heating core wire 101a produced that has gap 110 to make to be positioned at heater 101 centers can't be sent to this Base body 100 maturely, therefore there is following problem, the temperature homogeneity of whole pedestal reduces, and it is local inhomogeneous that the Temperature Distribution of heater 101 also becomes, thereby cause heating core wire 101a to break ahead of time.Therefore, increase the problem that exists product quality and productive rate to reduce owing in the manufacturing of array substrate, colored substrate and homologue thereof, produce the risk of faulty materials.

Summary of the invention

Therefore, the present invention is in order to overcome the problems referred to above that prior art produces and propose, and the objective of the invention is to by between elimination Base body and the heater and the gap between seal cover and the heater in order to improve the temperature homogeneity of pedestal integral body, thereby improve the machinability and the productive rate of transparent glass substrate, and can large-scale production be used for the High-quality transparent glass substrate of liquid crystal display device.

An aspect of of the present present invention provides a kind of method of making pedestal, may further comprise the steps: (a) preparation has the pedestal top cover of one or more ledges; (b) preparation has the Base body with the corresponding groove of ledge of pedestal top cover; And (c) the pedestal top cover is assembled to Base body by forging, wherein, in each ledge and each groove at least one produces plastic deformation in forging process, therefore can closely cooperate mutually, wherein, the section shape of at least one in each ledge and each groove can locally change, and makes that when direction of insertion was seen, ledge had the different areas of section with groove.

Method according to manufacturing pedestal of the present invention, pedestal top cover and Base body are engaged with each other by forging, and when direction of insertion is watched, the section shape of the ledge of pedestal top cover and at least one in the groove can locally change, thereby makes in ledge and the groove at least one produce plastic deformation during forging.Therefore, do not need excessive pressure, just can realize closely cooperating between pedestal top cover and the Base body, thereby can solve owing to the crack between pedestal top cover and Base body or space reduce the name of the game part that heat transmission is caused by plastic deformation.

Description of drawings

Fig. 1 is the perspective view that schematically shows traditional base construction;

Fig. 2 is the perspective view that the method in the conventional aluminum alloy Base body that heater is embedded is shown;

Fig. 3 illustrates the heater of traditional pedestal or the cutaway view in the embedded zone of cooling device;

Fig. 4 illustrates the heater of traditional pedestal or the photo that cooling device embeds the zone, and the cutaway view corresponding with this photo;

Fig. 5 is the cutaway view that illustrates according to the manufacture method of the pedestal of first embodiment of the invention;

Fig. 6 is the cutaway view that illustrates according to the manufacture method of the pedestal of second embodiment of the invention;

Fig. 7 is the cutaway view that illustrates according to the manufacture method of the pedestal of third embodiment of the invention;

Fig. 8 is the cutaway view that illustrates according to the manufacture method of the pedestal of fourth embodiment of the invention;

Fig. 9 is the cutaway view that illustrates according to the manufacture method of the pedestal of fifth embodiment of the invention;

Figure 10 is the cutaway view that illustrates according to the manufacture method of the pedestal of sixth embodiment of the invention;

Figure 11 is the cutaway view that illustrates according to the manufacture method of the pedestal of seventh embodiment of the invention;

Figure 12 is the cutaway view that illustrates according to the manufacture method of the pedestal of eighth embodiment of the invention;

Figure 13 is the cutaway view that illustrates according to the manufacture method of the pedestal of ninth embodiment of the invention;

Figure 14 is the cutaway view that illustrates according to the manufacture method of the pedestal of tenth embodiment of the invention;

Figure 15 is the cutaway view that illustrates according to the manufacture method of the pedestal of eleventh embodiment of the invention;

Figure 16 is the cutaway view that illustrates according to the manufacture method of the pedestal of twelveth embodiment of the invention;

Figure 17 is the cutaway view that illustrates according to the manufacture method of the pedestal of thriteenth embodiment of the invention;

Figure 18 is the cutaway view that illustrates according to the manufacture method of the pedestal of fourteenth embodiment of the invention;

Figure 19 is the cutaway view that illustrates according to the manufacture method of the pedestal of fifteenth embodiment of the invention;

Figure 20 is the cutaway view that illustrates according to the manufacture method of the pedestal of sixteenth embodiment of the invention;

Figure 21 is the cutaway view that illustrates according to the manufacture method of the pedestal of seventeenth embodiment of the invention;

Figure 22 is the cutaway view that illustrates according to the manufacture method of the pedestal of eighteenth embodiment of the invention;

Figure 23 is the cutaway view that illustrates according to the manufacture method of the pedestal of nineteenth embodiment of the invention;

Figure 24 is the cutaway view that illustrates according to the manufacture method of the pedestal of twentieth embodiment of the invention;

Figure 25 is the cutaway view that illustrates according to the manufacture method of the pedestal of 21st embodiment of the invention;

Figure 26 is the cutaway view that illustrates according to the manufacture method of the pedestal of 22nd embodiment of the invention;

Figure 27 is the cutaway view that illustrates according to the manufacture method of the pedestal of 23th embodiment of the invention; And

Figure 28 is the cutaway view of treatment step that the manufacture method of pedestal as shown in figure 27 is shown successively.

Embodiment

Best mode according to pedestal manufacture method of the present invention comprises: preparation has the pedestal top cover of one or more ledges, preparation has the Base body with the corresponding groove of ledge of pedestal top cover, and the pedestal top cover is assembled to Base body by forging, wherein, in each ledge and each groove at least one can produce plastic deformation in forging process, therefore can cooperate closely mutually.Here, the section shape of at least one in each ledge and each groove can local change, and makes that when direction of insertion was seen, ledge had the different areas of section with groove.Further, preferably embed heater at least one groove.When vertically watching, preferably, the area of section of groove depth location in the middle of it increases gradually.

In addition, preferably, respectively the area of section of this groove increases gradually toward its bottom, and respectively the side of this groove is provided with a corrugated part or circular depression.

Describe the preferred embodiments of the present invention below with reference to accompanying drawings in detail.

First embodiment

As shown in Figure 5, in manufacture method according to the pedestal of first embodiment of the invention, preparation has one or more ledge 301 pedestal top cover 300 (seeing Fig. 5 (a)) formed thereon, preparation Base body 310, this Base body 310 have one or more pockets 303 formed thereon with the ledge 301 corresponding (seeing Fig. 5 (b)) of pedestal top cover 300, and subsequently by Forging Technology, pedestal top cover 300 cooperatively interacts with Base body 310.At this moment, ledge 301 and pockets 303 one of them part change at least, therefore from forging direction when watching, ledge 301 has the area of section (A that differs from one another with pockets 303, A '), thereby in Forging Technology, ledge 301 and pockets 303 can closely cooperatively interact by plastic deformation (seeing Fig. 5 (c)).In this case, self-evident ground, ledge 301 can be one-body molded with pedestal top cover 300, also may be separately formed.

More specifically, because pockets 303 is configured to when vertically watching, the area of section of depth location (A ') becomes big therebetween, so ledge 301 closely is assembled in the pockets 303 by plastic deformation when carrying out Forging Technology.The shape of the ledge 301 of experience after the plastic deformation helps to make ledge 301 can be assembled to locking effect in the pockets 303 safely.

In addition,, be provided with the heater 315 of embedding in one or more pockets 303, and the end of ledge 301 forms and has the recessed end surfaces corresponding with heater 315 for as pedestal usefulness.

As a reference, forge the joint technology that assembling or forging welding are used to steel or wrought iron for a long time always.More specifically, by removing two kinds of metals that the oxide layer that forms on two kinds of metal surfaces is cleaned, be heated to proper temperature, and when these two kinds of metals overlap each other, impacted.Therefore, two kinds of metals are engaged with each other by the diffusion of the metal ingredient between them.By utilizing above-mentioned phenomenon, the metal that overlaps each other and be heated to high temperature is carried out powerful press forging, thereby the technology that engages is called as and forges welding.

Above-mentioned forging welding is the reliable process that can allow metal engage securely.Yet, owing to ledge and pockets utilization are concentrated press forging and be fitted to each other, and have the space of defining each other, so assembly manipulation needs excessive pressure.Therefore, owing to forming gap and homologue thereof, and the gap makes the impairment of heat transfer efficiency between the metal that this excessive pressure causes assembling.

Correspondingly, in order to overcome the problems referred to above, the invention provides ledge and pockets, wherein the section shape of any one is local at least in ledge and the pockets changes, thereby make when the direction of insertion of ledge is watched, ledge and pockets have the area of section that differs from one another.Therefore, ledge and groove can closely cooperate at an easy rate, and also can obtain as the locking lockset as " locking effect ".

As further reference, the profile that this paper alleged " plastic deformation " (plastic deformation) refers to solid object is owing to being subjected to that external force is out of shape and forever keeping the phenomenon of this deformation state.Can make the solid object distortion although apply external force, as long as this is out of shape in the elastic limit of solid object, after external force was eliminated, solid object will be recovered its original-shape so.Therefore, for realizing permanent deformation, institute's externally applied forces must surpass elastic limit.

That is to say,, just must apply power greater than elastic limit in order to realize plastic deformation.

Usually, there is different technology to cause distortion according to the required net shape of object.Particularly, the production of plate relates to technique for rolling, and the production of pipe fitting relates to extruding, drawing and technique for rolling, and the production of wire rod relates to drawing and drawing process.In addition, the production with object of complicated shape also relates to forging and pressing or the like.

Owing to the pedestal that the present invention is used is normally made with the metal such as aluminium,, and after being subjected to surpassing the pressure of certain strength, produce plastic deformation when forging so certain zone on the pedestal can be out of shape.By using this principle, shown in Fig. 5 (c), the section shape of at least one meeting local deformation in ledge 301 and the pockets 303 is so that ledge 301 has the different area of section (A each other with pockets 303, A '), thus the space of carrying out plastic deformation is provided.Therefore, need not apply too high strength, and the repulsive force that produces between the metal to be assembled lowered, thereby realized the minimize effect of degree of distortion.Therefore, can provide heat conduction and heat conduction efficiency splendid pedestal.

Second embodiment

As shown in Figure 6, the manufacture method according to the pedestal of second embodiment of the invention is designed to such mode, by Forging Technology ledge 301 is assembled in the pockets 304 that the bottom enlarges.Because except said modules, remaining component is all identical with assembly described in first embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in Figure 6, the section shape of at least one in ledge 301 and the pockets 304 can locally change, and therefore has the different area of section (A, A ') each other.In the assembly technology shown in Figure 6, when ledge 301 was mounted to the pockets 304 of bottom expansion by Forging Technology, ledge 301 was out of shape because of external pressure, and therefore closely cooperates with pockets 304.

The 3rd embodiment

As shown in Figure 7, the manufacture method according to the pedestal of third embodiment of the invention is designed to such mode, and the section shape of pockets 305 is changed to have corrugated portion at side surface by the part.Because except said modules, remaining component is all identical with assembly described in first embodiment, so omit its detailed description at this in the present embodiment.

Therefore in more detail, as shown in Figure 7, the side surface of pockets 305 has corrugated portion, makes when direction of insertion is watched, and ledge 301 has the different area of section (A, A ') each other with pockets 305, therefore can closely cooperate owing to be out of shape.Correspondingly, owing to closely cooperate as screwing each other of bolt and nut between ledge and pockets, so can realize more firm and safe cooperation.

The 4th embodiment

As shown in Figure 8, the manufacture method according to the pedestal of fourth embodiment of the invention is designed to such mode, and the section shape of pockets 306 is changed by the part, and its side surface has the circular depressed part.Because except said modules, remaining component is all identical with assembly described in first embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in Figure 8, the side surface of pockets 306 has the circular depressed part, therefore when direction of insertion is watched, ledge 301 has the different area of section (A each other with pockets 306, A '), therefore, can closely cooperate owing to forge the distortion under the lower pressure when assembling.So ledge can be realized more firm and safe cooperating with groove.

As mentioned above, the section shape of at least one therefore have the different area of section (A, A ') each other, thereby between is provided for carrying out the space of plastic deformation by local deformation in ledge 301 and the pockets 306.Correspondingly, take to provide arbitrarily the mode in order to the space of carrying out plastic deformation, ledge and pockets can be fitted to each other.

The 5th embodiment

As shown in Figure 9, the manufacture method according to the pedestal of fifth embodiment of the invention is designed to such mode, strip heater 316 is embedded in the pockets, and be provided with banded groove at an end of ledge 302.Because except said modules, remaining component is all identical with assembly described in first embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in Figure 9, when strip heater 316 was embedded in the pockets 303, the end of ledge 302 preferably forms had banded groove.Especially, the banded groove of ledge 302 is configured to the area of arrival end of this band shape groove greater than the area of heater 316, therefore, because plastic deformation and can easily forge assembling.

When the area of the arrival end of the banded groove of ledge 302 is configured to such mode, this area is during greater than the area of heater 316, and when ledge 302 surrounds heater 316, external force is applied to the whole surface of heater 316 equably, thereby can realize not having the secure fit in distortion, crack or space.

The 6th embodiment

As shown in figure 10, manufacture method according to the pedestal of sixth embodiment of the invention, be designed to such mode, the preparation bottom surface has the Base body 330 of one or more pockets 332, heater 335 is embedded in one or more pockets 332, by Forging Technology size and pockets 332 corresponding top covers 340 are assembled in the pockets 332, wherein top cover 340 has the different areas of section with pockets 332, and closely cooperates each other by plastic deformation.

The sixth embodiment of the present invention provides a kind of method that top cover is assembled in the pockets that forms on Base body 330 bottom surfaces, wherein heater 335 is embedded in the pockets 332, and top cover 340 is assembled in the pockets 332 individually by Forging Technology.In more detail, by Forging Technology the advantage that top cover is assembled to the method in the pockets separately is, can be reduced in simultaneously the unsteadiness that can occur under the situation that the one or more ledges that will form on the pedestal top cover and Base body be fitted to each other and guarantees the burden that high precision is required.In addition, as shown in figure 10, one of them section shape of top cover 340 and pockets 332 is changed the area of section that differs from one another to have by the part, therefore guarantees to form one and is used to space that top cover and groove are fitted to each other by plastic deformation.In other words, when when direction of insertion is watched, the area of section of pockets 332 is greater than the area of section of top cover 340, and pockets 332 broadens in the part near the degree of depth in the middle of it.In addition, the end that top cover 340 is inserted into earlier in the pockets 332 preferably forms the sunk surface with corresponding heater 335, and the area of section of this cap end or radius of curvature are different with the radius of curvature of heater 335, thereby can forge assembling by plastic deformation.

Therefore, when top cover 340 is inserted in the local pockets 332 that enlarges, and when top cover applied the pressure that exceeds certain strength, top cover can be out of shape, thus because plastic deformation and closely cooperating with pockets 332.Owing to closely cooperate, guaranteed the locking effect between top cover and the main body, and used little strength that top cover and main body are fitted to each other, thereby firm cooperation is provided and has greatly reduced the generation in unexpected distortion and space.

The 7th embodiment

With reference to Figure 11, show according to the metal alloy layer that utilizes of seventh embodiment of the invention and make the method for pedestal.Because except said modules, remaining component is all identical with assembly described in the 6th embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in figure 11, top cover 340 is coated with the last layer metal material 350 different with the material of Base body 330 (Figure 11 (a)) thinly.Coated top cover 340 is used as the top cover of a standard.Pockets 332 is formed the area of section that has greater than the area of section (A) of top cover 340 (A ') partly, and is provided with the heater 335 of embedding in pockets 332.By Forging Technology, top cover is mounted to the pockets that wherein embeds heater.During Forging Technology, when the heat of predetermined temperature is applied in top cover 340 and pockets 332 from the outside (Figure 11 (b)), form metal alloy layer 352 (Figure 11 (c)) between top cover 340 and the pockets 332.

The reason that forms metal alloy layer 352 between top cover 340 and pockets 332 is the formation that this metal alloy layer has stoped oxide layer, otherwise, this oxide layer then can form between top cover 340 and pockets 332, thereby has prevented contact surface to be etched and cause assembling whole damage.In addition because metal alloy layer 352 only forms very thin one deck, so fine clearance that may form between top cover and the pockets or space during heating filled up by metal alloy layer 352, thereby further strengthen secure fit therebetween.

In this case, Base body 330 is to be made by aluminum, and coating forms by Zinc material, thereby aluminium-zinc metal alloy layer is provided.Metal alloy layer 352 also can use instead nickel, chromium and similarly metal come instead of zinc (Zn) and form.That is to say, those skilled in the art it is evident that, any metal material all can be used for forming metal alloy layer, as long as this metal material is different with the material of pedestal, and can guarantees to lower the formation of oxide layer and be easy to that the formation alloy gets final product under cryogenic conditions.

Manufacture method according to the constructed pedestal of above description, one of them section shape of ledge or top cover and pockets is changed by the part, thereby when when direction of insertion is watched, having the area of section that differs from one another, therefore, ledge or top cover and pockets can both be by therebetween because of the formed space of plastic deformation easily closely cooperate each other, thereby more firm and more stable confined state is provided.Therefore, when part experience such as the linearity welding of assembling or other technology the solder brazing, just need not provide in order to keeping the required support pressure of this confined state, thus the advantage that simplified manufacturing technique is provided and reduces production costs.

The 8th embodiment

As shown in figure 12, manufacture method according to the pedestal of eighth embodiment of the invention, be designed to such mode, preparation pedestal top cover 360, pedestal top cover 360 has one or more ledges formed thereon 362 (Figure 12 (a)), preparation has the Base body 370 of the ledge 362 corresponding pockets 372 of one or more and pedestal top cover 360, wherein each pockets 372 has the cooling duct 377 that is formed at its side, with so that cooling agent from wherein flowing through, bottom at corresponding pockets 372 embeds heater 375 (Figure 12 (b)), and pedestal top cover 360 and Base body 370 are fitted to each other by Forging Technology.In this case, one of them section shape of ledge 362 and pockets 372 is changed by the part, so that when direction of insertion is watched, ledge 362 has the different area of section (A each other with pockets 372, A '), thus make between ledge and the pockets because plastic deformation realizes closely cooperating (Figure 12 (c)) by Forging Technology.Here, self-evident, ledge 362 can be one-body molded with pedestal top cover 360, perhaps also may be separately formed.

More specifically, when when vertically watching, because the area of section of pockets 372 (A ') enlarge in the place of intermediate depth, so when being assembled to ledge 362 in the pockets 372, utilizing the plastic deformation of ledge and ledge 362 closely cooperated with pockets 372 by Forging Technology.The ledge 362 of plastic deformation can produce a kind of ledge that makes and closely be assembled to locking effect in the pockets 372.

In addition, preferably, the intensity of ledge 362 or hardness are different with pockets 372.Its reason is that then ledge or pockets can be easier to carry out plastic deformation during Forging Technology if ledge 362 has intensity or the hardness that differs from one another with pockets 372.In order to make ledge 362 have different intensity or hardness with pockets 372, the metal material of ledge and pockets can stand different heat treatment.

Again as shown in figure 12, heater 375 is embedded in the bottom of pockets 372, simultaneously pockets 372 have form in its side in order to the groove of cooling duct 377 to be provided.Thereafter, ledge closely cooperates by the plastic deformation of Forging Technology generation each other with pockets.Therefore, can avoid carrying out the complicated technology of traditional other formation cooling duct.In addition because the embedding of heater and the formation of cooling duct 377 are to carry out simultaneously, so have that manufacturing process is further simplified and production cost by significantly reduced advantage.In addition, because pockets 372 has the channel shaped cooling duct 377 that is formed at its lateral parts, and ledge closely cooperates by plastic deformation each other with pockets, and therefore synthetic assembly structure is compared more firm with the traditional handicraft of bonding plate up and down or embedding cooling duct.Further, because cooling duct 377 can easily be formed at the place near heater 375, therefore improved cooling effectiveness.

The 9th embodiment

As shown in figure 13, the manufacture method according to the pedestal of ninth embodiment of the invention is designed to such mode, and pockets 372 has the cooling duct 377 that forms in its side, and subsequently cooling water pipe 379 is embedded in the cooling duct 377.Because except said modules, remaining component is all identical with assembly described in the 8th embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in figure 13, present embodiment is to form cooling duct 377 in the side of pockets 372, and subsequently cooling water pipe 379 is embedded into the technology in the cooling duct 377.In other words,, avoid occurring cooling duct 377 blocked or local situations about narrowing down, therefore cooling water pipe 379 is embedded in the cooling ducts, thereby cooling agent can stably be flowed for during the Forging Technology of the ledge of pedestal top cover 360 assembling.In this embodiment, cooling water pipe 379 can be embedded in all cooling ducts 337, perhaps the interval that can fix and being embedded into off and in the cooling duct 377.

The tenth embodiment

As shown in figure 14, the manufacture method according to the pedestal of tenth embodiment of the invention is designed to such mode, and pockets 373 and ledge 362 with bottom of expansion are fitted to each other by Forging Technology.Because except said modules, remaining component is all identical with assembly described in the 8th embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in figure 14, one of them section shape of ledge 362 and pockets 373 is changed by the part, so ledge and pockets have the area of section (A, A ') that differs from one another.The pockets 373 that the area of section increases to its bottom and ledge 362 are fitted to each other by Forging Technology.When forging, therefore ledge 362 can closely be assembled in the pockets 373 because of the external pressure plastic deformation.

In method shown in Figure 14, because cooling duct 377 is the sides that are formed at pockets 373 when embedding heater 375, therefore can realize the cooling configuration by simple technology, and can produce the effect that reduces manufacturing time and production cost because of the simplification of technology.Here, ledge 362 and pockets 373 can various shape form, and get final product in order to the space of carrying out plastic deformation as long as thereby ledge 362 has the area of section (A, A ') that differs from one another provides to each other with pockets 373.

The 11 embodiment

As shown in figure 15, the manufacture method according to the pedestal of eleventh embodiment of the invention is designed to such mode, and pockets 373 has the cooling duct 378 of the triangular cross section that forms in its side.Because except said modules, remaining component is all identical with assembly described in the 8th embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in figure 15, one of them section shape of ledge 362 and pockets 373 is changed, thereby makes them have the area of section (A, A ') that differs from one another, to guarantee to each other in order to carry out the space of plastic deformation.The end that ledge 362 contacts with heater 375 is configured to have sunk surface, and the radius of curvature of heater 375 (r) is different with the radius of curvature (R) of the sunk surface of this end, therefore, it can be realized closely cooperating by the plastic deformation that Forging Technology produces.

In addition, the pockets 373 corresponding with ledge 362 has the cooling duct 378 that forms in its side, each cooling duct 378 has leg-of-mutton cross section, and therefore, pedestal top cover 360 can closely cooperate because of the plastic deformation that Forging Technology produces each other with Base body 370.Owing to closely cooperate, ledge is engaged securely with pockets, thereby can easily form cooling duct 378.It should be apparent to those skilled in the art that the condition according to design and craft, the cooling duct can form with various shape.

In this embodiment, the radius of curvature of the end of ledge 362 (R) is set at the radius of curvature (r) greater than heater 375.Exist the reason of this species diversity to be between the radius of curvature, when ledge 362 being contacted with heater 375 by Forging Technology, make ledge 362 around heater 375 time, produce plastic deformation, and make pressure can be applied to the circular surface of heater 375 equably.

In other words,, therefore can prevent from heater 375 is applied local or uneven forging pressure and the distortion that causes because external pressure is applied to the circular surface of heater 375 equably, or the space that forms owing to out-of-flatness between the contact surface.Certainly, even the radius of curvature of the sunk surface of ledge is less than or equal to the radius of curvature of heater, also can be owing to plastic deformation realizes closely cooperating.

Preferably, heater 375 has irregular surface.The reason that the out-of-flatness surface is set for heater is that when ledge 362 closely was assembled in the pockets because of plastic deformation, contact area each other increased, thereby improves heat conduction efficiency.Self-evident, heater 375 can have the surface of arbitrary structures, as long as can increase the contact area of heater 375.

Preferably, the manufactured materials of heater 375 is identical with the manufactured materials of Base body 370, and perhaps the manufactured materials of heater 375 has identical thermal coefficient of expansion with the manufactured materials of Base body 370.If the manufactured materials of heater 375 or thermal coefficient of expansion are different with Base body 370, increasing then along with heating-up temperature, heater 375 is different with the degrees of expansion meeting of Base body 370, therefore can produce the space at contact surface, thereby reduce heat conduction efficiency.

The 12 embodiment

As shown in figure 16, manufacture method according to the pedestal of twelveth embodiment of the invention, be designed to such mode, preparation has the Base body 380 of one or more pockets 392 that form in its bottom surface, heater 385 is embedded in one or more pockets, each pockets 392 has the cooling duct 395 that forms in its side, and size and pockets 392 corresponding top covers 390 are assembled in the pockets by Forging Technology, wherein, when when direction of insertion is watched, top cover 340 has the different areas of section with pockets 392.

As shown in figure 16, the 12nd embodiment of the present invention provides a kind of method that top cover 390 is assembled in the pockets 392 that forms on Base body 380, in Base body 380, heater 385 is embedded in the bottom of pockets 392, and cooling duct 395 forms in the side of pockets 392.The difference of this embodiment and other embodiment is that top cover 390 must be assembled in the pockets 392 individually by Forging Technology.That is to say, thisly the advantage that top cover is assembled to the method in the pockets separately is, can be reduced in once under the situation that the pockets with one or more ledges that are formed at the pedestal top cover and Base body is fitted to each other contingent unsteadiness and must guarantees the burden that pinpoint accuracy is required by Forging Technology.

In this embodiment, top cover 390 and pockets 392 are configured to one of them section shape of top cover and pockets and are changed the area of section that differs from one another to have by the part, thereby the space that can carry out the plastic deformation that Forging Technology causes is provided.In more detail, if when direction of insertion is watched, the area of section of pockets 392 is greater than the area of section of top cover 390, and pockets 392 is configured to its area of section and increases towards the intermediate depth position.In addition, top cover 390 is inserted into end in the pockets 392 earlier and forms and have the sunk surface corresponding with heater 385, and top cover 390 should end the area of section or radius of curvature different or equal with the radius of curvature of heater 385 so that realize closely cooperating because of plastic deformation.

Therefore, when top cover 390 is inserted in the local pockets 392 that enlarges, and when top cover applied the pressure that exceeds certain strength, top cover 390 can distortion, thereby closely cooperates with pockets 392 because of plastic deformation.Because this closely cooperates, therefore can guarantee the locking effect between top cover and the main body, and just can easily top cover 390 and main body 380 be fitted to each other, thereby firm cooperation is provided with lower strength, significantly reduce unexpected distortion and space simultaneously.

In addition, because pockets 392 forms in its part, side and has cooling duct 395, so utilize plastic deformation and when closely being assembled to pockets 392, formation automatically has the cooling duct 395 of catheter shape when top cover 390.Therefore, present embodiment has and can form the advantage that conventional art needs indivedual cooling ducts that form by firm cooperation near the heater place easily.

The 13 embodiment

As shown in figure 17, the manufacture method according to the pedestal of thriteenth embodiment of the invention is designed to such mode, and pockets forms has cooling duct 395 in its side, and subsequently cooling water pipe 397 is placed cooling duct 395.Because except said modules, remaining component is all identical with assembly described in the 12 embodiment, so omit its detailed description at this in the present embodiment.

In more detail, utilize because of plastic deformation that Forging Technology produced with top cover 390 close fit in the pockets 392 of Base body 380, with this form cooling duct 395 during, cooling duct 395 may blocked or local narrowing down.For avoiding the cooling duct blocked or narrow down, cooling water pipe 397 is arranged in the cooling duct, to guarantee that cooling agent can be stablized therein and to flow equably.

The 14 embodiment

As shown in figure 18, the manufacture method according to the pedestal of fourteenth embodiment of the invention is designed to such mode, additionally is provided with metal alloy layer 399.Because except said modules, remaining component is all identical with assembly described in the 11 embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in figure 18, top cover 390 quilts are metallizing material 398 (Figure 18 (a)) thinly, and this metal material 398 is different with the material of Base body 380.Coated top cover 390 is used as the top cover of standard.Pockets 392 forms and has the local area of section (A ') area of section (A) greater than top cover 390, and also forms in the side of pockets 392 and have groove, so that cooling duct 395 to be provided.Heater 385 is embedded in the bottom of pockets 392.By Forging Technology, top cover 390 be assembled in pockets 392 thereafter.During Forging Technology, when the heat of predetermined temperature being applied to top cover 390 and pockets 392 (Figure 18 (b)), between top cover 390 and pockets 392, form metal alloy layer 399 (Figure 18 (c)) from the outside.

The reason that forms metal alloy layer 399 between top cover 390 and pockets 392 is, this metal alloy layer can stop the formation of oxide layer, wherein oxide layer may produce under the situation that does not form metal alloy layer between top cover 390 and the pockets 392, thereby has prevented that contact surface is etched the reduction of the assembling integrality that causes.In addition because metal alloy layer 399 only forms very thin one deck, and since fine clearance that may form between top cover and the pockets or space during heating thus metal alloy layer 399 fill up, therefore, secure fit is therebetween further strengthened.

In this example, Base body 380 is to be made by aluminum, and coating is to utilize zinc (Zn) material to become, thereby aluminium-zinc metal alloy layer 399 is provided.The also available nickel of metal alloy layer 399, chromium and metalloid come instead of zinc (Zn) and form.That is to say, it should be apparent to those skilled in the art that any material all can be used for forming this metal alloy layer,, and can guarantee to reduce the formation of oxide layer and be easy to that the formation alloy gets final product under cryogenic conditions as long as this material is different with the material of pedestal.

Manufacture method according to the constructed pedestal of as described above, one of them section shape of top cover and pockets is changed to have in the areas of section different with another when direction of insertion is watched by the part, thereby make top cover and pockets can pass through formed space to each other, utilize plastic deformation and easily closely cooperate each other, therefore more firm and stable confined state is provided.Therefore, when part experience such as the linearity welding of assembling or other technology the solder brazing, just need not provide in order to keeping the required support pressure of this confined state, thereby realize simplified manufacturing technique and the great advantages that reduces production costs.In addition and since the cooling duct in the side of pockets and top cover be utilize plastic deformation that Forging Technology produces and by close fit in pockets, therefore can when embedding heater, easily cooling device be set in place near heater.

The 15 embodiment

As shown in figure 19, manufacture method according to the pedestal of fifteenth embodiment of the invention, be designed to such mode, preparation pedestal top cover 500, this pedestal top cover 500 has one or more ledges formed thereon 510 (Figure 19 (a)), preparation has the Base body 600 of the ledge 510 corresponding pockets 610 of one or more and this pedestal top cover 500, wherein each pockets 610 has a cooling duct 650 that forms in its side, so that allow cooling agent therefrom flow through, bottom at each pockets 610 embeds heater 615 (Figure 19 (b)), and by Forging Technology pedestal top cover 500 and Base body 600 is fitted to each other.In this example, one of them section shape of ledge 510 and pockets 610 is changed by the part, so that when direction of insertion is watched, ledge 510 has the area of section (A that differs from one another with pockets 610, A '), thus make between ledge and the pockets because of plastic deformation by Forging Technology and to realize closely cooperating (Figure 19 (c)).Here, self-evident, ledge 510 can be one-body molded with pedestal top cover 500, perhaps also may be separately formed.

Thereafter, the pedestal top cover 500 that is fitted to each other is placed in the vacuum chamber 700 of a maintenance vacuum environment with Base body 600, and start heaters 615 carrying out solder brazing (Figure 19 (d)), thereby make firm pedestal with high heat conduction efficiency by external power supply 550.

At length, when when vertically watching, because the area of section of pockets 610 (A ') enlarge in the intermediate depth position, so when being assembled to ledge 510 in the pockets 610 by Forging Technology, by the plastic deformation of ledge, ledge 510 precisely and closely cooperates with pockets 610.The ledge 510 of plastic deformation can produce and make the locking effect of ledge 510 close fit in the pockets 610.

As shown in figure 19, heater 615 is embedded in the bottom of pockets 610, and groove also is provided with the cooling duct 650 that forms in the side of pockets 610 simultaneously.Thereafter, by Forging Technology, ledge and pockets closely cooperate each other because of plastic deformation.Therefore, can avoid carrying out the complicated technology that traditional needs form the cooling duct in addition.In addition because the embedding of heater is to carry out simultaneously with the formation of cooling duct, so have manufacturing process by further simplification and production cost by significantly reduced advantage.

In addition, owing to form channel shaped cooling duct 650 on the part side of pockets 610, and ledge closely cooperates by plastic deformation each other with pockets, and therefore the traditional handicraft of the assembly structure that is generated and bonding plate up and down or embedding cooling duct is more firm.In addition, because cooling duct 650 can easily form near heater 615, therefore improved cooling effectiveness.

Shown in Figure 19 (d), because solder brazing is to carry out in the vacuum environment after Base body 600 and pedestal top cover 500 closely cooperate each other by plastic deformation, so improved the wettability of filler metal.And, because the heater of Base body and top cover are to utilize the heater 615 that is embedded in the Base body 600 to realize, rather than utilize smelting furnace, and can stewedization state not appear because of oxidation takes place therefore, and use cheap equipment can finish the technology that Base body engages with the pedestal top cover effectively.

In utilizing the traditional assembly technology that forges, during owing to heating base in smelting furnace, assembling is by press forging equipment the technology that pedestal carries out press forging to be finished, and therefore needs assembling heavy and costliness.Opposite with traditional handicraft, because technology according to the present invention is by plastic deformation pedestal top cover 500 close fit to be realized to the mode in the Base body 600, so this technology can not need extra support pressure because of the stable assembling with locking effect.In addition, in the solder brazing technology that the surface of having assembled is carried out, traditional solder brazing technology is to utilize large-scale firing equipment externally to carry out.Opposite, technology of the present invention is carried out by this way, the pedestal top cover and the Base body of assembling each other are placed in the vacuum chamber 700, and utilization is heated through 615 pairs of pedestal top covers of heater and the Base body that connecting line 617 is connected to external power supply 550, thereby can easily carry out the solder brazing of assembly surface.

Solder brazing is to be heated to 450 ℃ or higher temperature by application filler metal between two kinds of base metals and with these two kinds of base metals, so that the technology of its joint, wherein because temperature is lower than the fusing point of base metal, so base metal can be not destroyed.

In more detail, solder brazing is to utilize to have liquidus temperature and at 450 ℃ or above filler metal two kinds of base metals are heated to the temperature that is lower than solidus temperature, thereby the mode that two kinds of base metals are engaged realizes.

As a reference, use the joint method of filler metal can be categorized as welding (welding) by broad sense, solder brazing (brazing) and solder (soldering).In some cases, be welded in the Korean and be called as " YONGJOP ", be brazing in the Korean and be called as " KYONGNAPTEM ", and solder is called as " YONNAPTEM " in Korean.

It is to use filler metal to engage 450 ℃ or lower temperature that difference between these three kinds of joining techniques is in solder, and welding and solder brazing then are to carry out 450 ℃ or higher temperature.Wherein, it is to carry out under the temperature that is equal to or higher than base metal fusing point to be joined that difference between welding and the solder brazing is to weld, yet solder brazing then is to utilize filler metal to be undertaken by being heated to the temperature that is lower than base metal fusing point to be joined, and can not make base metal impaired.

In solder brazing, when filler metal reaches the solder brazing temperature, in the filler metal fusion and be penetrated under two kinds of situations between the base metal solder brazing that can realize ideal.In this case, the affinity between two kinds of base metals and the filler metal can be represented with wettability.In addition, the phenomenon that filler metal is flowed in the joint gap between two kinds of base metals can be described as capillarity.

At this moment, gravity can be to filler metal generation effect.Yet, the cardinal principle of solder brazing is introduced by such fact, when being heated and utilizing, base metal is fed to filler metal therebetween and when being engaged with each other, filler metal also closely contacts base metal because of the wettability fusion of himself, and filler metal flows between base metal subsequently.

If the wettability between filler metal and the base metal to be joined is not good, just can't realize the joint between the base metal.If the joint gap between the base metal is excessive, this joint gap just can't be filled up fully with filler metal, causes engaging not exclusively.

In general, base metal during solder brazing as make it be in stewedization state in the atmosphere because of staying for a long time, thereby or when base metal and airborne oxygen bonding formation oxide, liquid metal will become be difficult to moistening.

In addition, when metal is carried out solder brazing, preferably use scaling powder or at reducing atmosphere or vacuum atmosphere, such as in the protective gas to the base metal heating, suppressing the formation of oxide, thereby improve the wettability of filler metal.By the improvement of wettability, filler metal can easily flow between base metal because of capillarity.In this example, mainly be that inert gas is used as protective gas.

The 16 embodiment

As shown in figure 20, the manufacture method according to the pedestal of sixteenth embodiment of the invention is designed to such mode, forms cooling duct 650 in the side of pockets, and further embeds cooling water pipe 655 subsequently in the cooling duct.Because except said modules, remaining component is all identical with assembly described in the 15 embodiment, so omit its detailed description at this in the present embodiment.

As shown in figure 20, according to present embodiment, top cover 500 is assembled to Base body 600 with the Forging Technology that cooling duct 650 is provided during, for avoiding occurring cooling duct 650 blocked or local situations about narrowing down, and cooling water pipe 655 is embedded in the cooling duct, make cooling agent can stablize and uniform flowing.In this embodiment, cooling water pipe 655 can be embedded in all cooling ducts 650, or be embedded into off and in the cooling duct 650 with fixed intervals.

The 17 embodiment

As shown in figure 21, the manufacture method according to the pedestal of seventeenth embodiment of the invention is designed to such mode, will have the pockets 611 that enlarges the bottom by Forging Technology and be fitted to each other with ledge 510.Because except said modules, remaining component is all identical with assembly described in the 15 embodiment, so omit its detailed description at this in the present embodiment.

As shown in figure 21, one of them section shape of ledge 510 and pockets 611 is changed by the part, thus the area of section (A, A ') that ledge and pockets is had differ from one another.Having pockets 611 that the area of section increases towards the bottom and ledge 510 is fitted to each other by Forging Technology.Carry out this when forging, ledge 510 is subjected to external pressure and by plastic deformation, thereby closely is assembled in the pockets 611.

Because cooling duct 650 is the sides that are formed at pockets 611 when embedding heater 615, therefore can realize cooling provision by simple technology, and can realize reducing the effect of manufacturing time and production cost because of the simplification of technology.

Here, ledge 510 and pockets 611 can form various shape, as long as ledge 510 and pockets 611 have the area of section (A, A ') that differs from one another, get final product in order to the space of carrying out plastic deformation thereby can provide to each other.

In addition, preferably, ledge 510 has intensity or the hardness different with pockets 611.Its reason is to have the intensity that differs from one another or the ledge and the pockets of hardness, is not that ledge is exactly that pockets can be easier to plastic deformation during Forging Technology.For making ledge 510 have different intensity or hardness with pockets 611, the metal material of ledge and pockets can stand different heat treatment.

The 18 embodiment

As shown in figure 22, the manufacture method according to the pedestal of eighteenth embodiment of the invention is designed to such mode, forms the cooling duct 651 with triangular cross section in the side of pockets 610.Because except said modules, remaining component is all identical with assembly described in the 15 embodiment, so omit its detailed description at this in the present embodiment.

As shown in figure 22, one of them section shape of ledge 510 and pockets 610 is changed, thereby makes them have the area of section (A, A ') that differs from one another, in order to guarantee to each other in order to carry out the space of plastic deformation.The end that ledge 510 contacts with heater 615 is configured to have sunk surface, and the radius of curvature of heater 615 (r) is different with the radius of curvature (R) of the sunk surface of this end, thereby it can closely be cooperated because of the plastic deformation that Forging Technology produces.

In addition, the pockets 610 corresponding with ledge 510 has the cooling duct 651 that forms in its side, respectively the cross section of this cooling duct is a triangle, thereby pedestal top cover 500 is closely cooperated because of the plastic deformation that Forging Technology produces each other with Base body 600.By close fit, ledge can engage securely with pockets, therefore can be easy to form cooling duct 651.It should be apparent to those skilled in the art that the condition according to design and processes, the cooling duct can form various shape.

In this embodiment, preferably, the radius of curvature of heater 615 (r) differs from one another with the radius of curvature (R) of ledge 510.For example, the radius of curvature of the end of ledge 510 (R) can be set to the radius of curvature (r) greater than heater 615.To exist the reason of this species diversity to be between the radius of curvature, make ledge 510 around heater 615 time, produce plastic deformation, and make pressure can be applied to the circular surface of heater 615 equably.

In other words because external pressure is applied to the circular surface of heater 615 equably, therefore can prevent because of forging pressure by local or be applied to heater 615 unevenly and cause distortion, or out-of-flatness and cause the formation in space between the contact surface.

Preferably, heater 615 has irregular surface.Be that for heater 615 provides the reason on out-of-flatness surface when ledge 510 closely was assembled in the pockets 610 because of plastic deformation, the surface area of contact each other increased, thereby improve heat conduction efficiency.Self-evident, heater 615 can have the surface of any structure, as long as can increase the surface area of the contact of heater 615.

Preferably, the manufactured materials of heater 615 is identical with Base body 600, or has identical thermal coefficient of expansion with the manufactured materials of Base body 600.If heater 615 is by the made different with Base body 600 or have the thermal coefficient of expansion different with Base body 600, then along with the rising of heating-up temperature, the degrees of expansion of heater 615 and Base body 600 just can be different, thereby produce the space at contact surface, thereby reduce heat transfer efficiency.

According to the present invention, after realizing closely cooperating because of plastic deformation, the heater 615 that uses external power supply to start to be embedded in the pockets 610 closely cooperates to reach perfectly to carry out solder brazing.

The 19 embodiment

As shown in figure 23, manufacture method according to the pedestal of nineteenth embodiment of the invention, be designed to such mode, preparation has one or more Base body 700 that are formed at the pockets 750 of its bottom surface, heater 815 is embedded in one or more pockets 750, each pockets 750 has the cooling duct 850 that forms in its side, and size and pockets 750 corresponding top covers 800 are assembled in the pockets 750 by Forging Technology, wherein, when when direction of insertion is watched, top cover 800 has the different areas of section with pockets 750.

The 19th embodiment of the present invention provides a kind of method that top cover 800 is assembled in the pockets 750 that forms in Base body 700, wherein heater 815 is embedded in the bottom of pockets 750, and cooling duct 850 forms in the side of pockets 750.The difference of this embodiment and other embodiment is that top cover 800 must be assembled in the pockets 750 individually by Forging Technology.That is to say, by Forging Technology the advantage that top cover is assembled to the method in the pockets separately is, can lower at the same time with one or more under the situation that the pockets of ledge that forms on the Base body and Base body is fitted to each other contingent unsteadiness with guarantee the burden that pinpoint accuracy is required.

As shown in figure 23, top cover 800 is configured to such mode with pockets 750, one of them section shape of top cover and pockets is changed the area of section that differs from one another to have by the part, thereby the space that can carry out the plastic deformation that Forging Technology causes is provided.In more detail, when when direction of insertion is watched, the area of section of pockets 750 is greater than the area of section of top cover 800, and pockets 750 is configured to its area of section depth location in the middle of it and increases.In addition, top cover 800 is inserted into ends in the pockets 750 earlier and forms and have the sunk surface corresponding with heater 815, and top cover should end the area of section or the radius of curvature of radius of curvature and heater 815 similar and different, thereby realize closely cooperating because of plastic deformation.

Therefore, when top cover 800 is inserted in the local pockets 750 that enlarges, and the pressure that exceeds certain strength is when being applied to top cover, and top cover 800 deforms, thus because plastic deformation and closely cooperating with pockets 750.By closely cooperating, guaranteed " locking effect " between top cover and the main body, and only needed very little strength that top cover and main body are fitted to each other, thereby firm cooperation is provided that unexpected distortion simultaneously and space are significantly lowered.

In addition, because pockets 750 has the local cooling duct 850 that forms in its side, so when top cover 800 utilizes plastic deformation and when closely being assembled in the pockets 750, the cooling duct 850 with catheter shape forms automatically by plastic deformation.Therefore, the advantage of present embodiment is, the cooling duct that the past forms separately can easily form near the heater place by firm cooperation.

The 20 embodiment

As shown in figure 24, manufacture method according to the pedestal of twentieth embodiment of the invention, be designed to such mode, heater 815 is embedded in one or more pockets, and each pockets has the cooling duct 850 that forms in its side, again cooling water pipe 855 is placed cooling duct 850, and be assembled in the pockets by the Forging Technology top cover 800 that size is corresponding with pockets, wherein, when when direction of insertion is watched, top cover 800 has the different areas of section with pockets.Because except said modules, remaining component is all identical with assembly described in the 19 embodiment, so omit its detailed description at this in the present embodiment.

In more detail, top cover 800 closely is assembled in the pockets 750 of Base body 700 in the plastic deformation that utilizes Forging Technology to produce, during formation cooling duct 850, cooling duct 850 may blocked or local narrowing down.For avoiding the cooling duct that such obstruction takes place or narrow down, cooling water pipe 855 is disposed in the cooling duct 850 to guarantee that cooling agent is stable therein and to flow uniformly.After closely cooperating, be embedded into heater in the pockets 750 and be activated carrying out solder brazing, thereby realize firm and stable closely cooperating because of plastic deformation.Therefore, can easily produce pedestal with high heat conduction efficiency.

The 21 embodiment

As shown in figure 25, the manufacture method according to the pedestal of 21st embodiment of the invention is designed to such mode, and metal alloy layer 811 is provided in addition.Because except said modules, remaining component is all identical with assembly described in the 19 embodiment, so omit its detailed description at this in the present embodiment.

In more detail, as shown in figure 25, top cover 800 applies the metal material 810 different with the material of Base body 700 (Figure 25 (a)) thinly.Coated top cover 800 is used as the top cover of standard.Pockets 750 forms and has the local area of section (A ') area of section (A) greater than top cover 800, and forms depression in the side of pockets 750, so that cooling duct 850 to be set.Heater 815 is embedded in the bottom of pockets 750.By Forging Technology, top cover 800 be assembled in pockets 750 thereafter.During carrying out Forging Technology, when the heat of predetermined temperature is applied to top cover 800 and pockets 750 from the outside (Figure 25 (b)), between top cover 800 and pockets 750, form metal alloy layer 811 (Figure 25 (c)).

As Figure 25 (c) shown in, by start the heater 815 that through connecting line 817 be connected to external power supply 950, keeping high vacuum environment (about 10 thereafter, ^-5Holder) carries out solder brazing in the vacuum chamber 900, thereby can easily realize firm and stable joint and need not support pressure.In addition, solder brazing is also replaceable for carrying out in the vacuum chamber 900 that is full of such as the protective gas of inert gas.Therefore, owing to need not expensive or large-scale vacuum equipment can prevent the oxidation of assembly surface, so the solder brazing technology that can reduce production costs and realize being easy to carrying out.

The reason that forms metal alloy layer 811 between top cover 800 and pockets 750 is, form oxide layer between this metal alloy layer prevention top cover 800 and the pockets 750, otherwise, this oxide layer then can form between top cover 800 and pockets 750, thereby prevents contact surface from suffering erosion and the destroy integrity that causes assembling.In addition, because metal alloy layer 811 is to form one deck thinly, so metal alloy layer 811 fillings thus during heating of fine clearance that may form between top cover and the pockets or space, therefore secure fit is therebetween further strengthened.

In this example, Base body 700 is to be made by aluminum, and coating is to utilize zinc (Zn) material to form, thereby aluminium-zinc metal alloy layer is provided.Metal alloy layer 811 also can utilize nickel, chromium or similar metal substitute zinc and form.That is to say, it should be apparent to those skilled in the art that any material all can be used for forming metal alloy layer,, and can guarantee to lower the formation of oxide layer and under cryogenic conditions, be easy to form alloy and get final product as long as this material is different with the material of pedestal.

The manufacture method of the pedestal that makes up according to as described above, one of them section shape of top cover and pockets is changed by the part, with box lunch when direction of insertion is watched, have the area of section different with another, thereby top cover and pockets can both easily be closely cooperated by formed space to each other each other because of plastic deformation, thereby more firm and stable confined state is provided.

In addition, do not keep the required support pressure of confined state owing to do not need to provide again, and by utilizing external power supply 950 to start the heater 815 that is embedded in the pockets, and in the high vacuum environment, carry out solder brazing, therefore have simplified manufacturing technique and the very big advantage that reduces production costs.In addition, because pockets has the cooling duct that forms in its side, and top cover is to be mounted in the pockets by plastic deformation, so can easily in the place near heater cooling device be set when embedding heater.

The 22 embodiment

As shown in figure 26, manufacture method according to the pedestal of 22nd embodiment of the invention, be designed to such mode, form embedding groove 203 in the bottom of Base body 201, in the embedding groove 203 of Base body 201, hold heater, and first top cover 213 and second top cover 215 are closely inserted the upper space that embeds groove 203, embed groove 203 in order to be sealed shut, shown in Figure 26 (a)., utilize friction rabbling welding (FSW) instrument 221 along border second top cover 215 and Base body 201 between carry out friction rabbling welding, in order to combination (integrate) second top cover 215 and Base body 201 thereafter.In the 22nd embodiment of the present invention, friction rabbling welding is to carry out along the border between second top cover 215 and the Base body 201, and weld seam 225 and connector 210 are parallel and form towards heater 210, as shown in figure 26.

Term used herein " friction rabbling welding " is meant a kind of technology, in this technology, use rotational circle tubular FSW instrument with shoulder, and from the outstanding pin fast rotational of this FSW instrument, thereby between this pin and base metal, produce mechanical friction, thereby plasticizing and weld metal.The technology of welding can be briefly described below.That is, metal object to be welded docks at first mutually and is fixed on the support plate member subsequently, and atwirl pin cylindraceous, also contacts with the metal object during at the joint between the metalloid object at this.Because this contact friction, so frictional heat generates rapidly, to cause the plasticizing of metal object.Then, pin enters into joint lentamente, contacts up to the surface of shoulder with the metal object.At this moment, be placed on around the pin and the metal of the great majority plasticizing of the shoulder below of cylindric instrument, form cylinder.The factor that influences the method can comprise that the rotary speed of pin, shoulder are with respect to the required power of the size of the diameter of pin, mobile pin and the translational speed of pin.

Subsequently, pin moves along closing line with respect to object.Along with moving of the pin that is rotating, the metal of plasticizing is because the caused forging action of the surface profile of mechanical agitation and pin and being pushed backward from pin, and suppressed from the top by the shoulder of cylindric instrument institute applied pressure.When pinprick inlet side portion surface after date, metal is crushed, heating is also plastified subsequently.Therefore, when pin was mobile backward along closing line, metal only was extruded in backward direction.That is to say, car body formed by friction stir welding carries out by this way, along closing line crushing metal, remove oxide layer, and stirring plasticizing metal, thereby the formation welding portion, wherein this plasticizing metal shoulder below and metal of being positioned at the rear portion of pin and being in cylindric instrument begins at this place to solidify.In this example, because metal is heated to the temperature that is lower than its fusing point, so car body formed by friction stir welding belongs to solid-phase bonding process.

Friction rabbling welding is because of having eliminated the defective that produces in the fusing process of intermediate such as arc welding for known in the industry.In melting welding, metal is melted to form welding pool, and welding pool is cooled, thereby forms welding portion.In this case, there is the risk that forms space, crackle and produce the weldering cigarette in melting welding.And under the situation of metal alloy, owing to the difference loss that the evaporation of metal alloy composition causes, the synthetic of the metal of welding is changed into the synthetic different with the composition of original metal alloy.In addition, under the situation that metal is difficult to weld, aluminium for example, then welding may need the protective gas that is used to weld.Opposite with melting welding, the advantage of friction rabbling welding is, need not filler metal and other required consumable material of some melting welding, and compares with gas metal arc welding and to have outstanding weld strength and persistence.

The 23 embodiment

As shown in figure 27, manufacture method according to the pedestal of 23th embodiment of the invention, be designed to such mode, prepare integrated heater 260 by in the foundry goods 261 that has with the corresponding shape in space of the embedding groove 252 of pedestal 250, embedding heater 251, the device 260 that is integrated and connected is used as heater and seal cover, and integrated heater 260 is assembled and is embedded into and embeds in the groove 252.

Figure 28 shows the consecutive steps of the manufacturing process of the described pedestal of Figure 27.

Shown in Figure 28 (a), preparation has the mold 262 of the groove identical with the embedding groove 252 of pedestal 250, arranges heater support 263 in mold 262, and places heater 251 on heater support 263.

Subsequently, the aluminium (Al) or the aluminium alloy 264 of fusing are introduced in the mold 262 and with after coagulation, thereby form integrated heater 260, in this integrated heater 260, heater support 263, heater 251 and foundry goods 261 are integrated in one, shown in Figure 28 (b).Although the heater support that illustrates is the section shape with semicircle, heater support also can have the Any shape that can support heater during cast shaping process.Shown in Figure 28 (b), integrated heater 260 takes out from mold 302, and the redundance of integrated heater 260 utilizes Precision Machining to be removed, shown in figure Figure 28 (c).Thereafter, as shown in figure 27, the integrated heater prepared like this 260 inserts in the embedding groove 252 of pedestals, embeds heater and do not produce the gap betwixt in embedding groove 252 thereby finish.

Because this method of assembled heater is that such mode is carried out hermetically in pedestal, preparation is integrated in heater in the foundry goods and does not allow heater separate with the connector top cover, and is therefore, very close to each other between heater and connector top cover.

In addition, because integrated heater is prepared to the corresponding section shape in space that has with the embedding groove of pedestal, and this integrated heater is assembled and is embedded in the embedding groove of pedestal, and is therefore very close to each other in the embedding groove.

So the gap between pedestal and the heater is eliminated.Therefore heater 260 can provide the even temperature that spreads all over whole pedestal, and machinability and productive rate that can transparent glass substrate.

Although in order to understand the present invention all sidedly, the present invention is carried out detailed diagram and description with reference to special assembly, preferred embodiments and drawings, those skilled in the art should be understood that, the invention is not restricted to the foregoing description, in scope described above, can carry out various forms of variations and modification to it.

Therefore, the invention is not restricted to the foregoing description, and accessory claim and all drop within the disclosed principle scope and spirit of the application with all distortion that claim is equal to.

Industrial applicability

According to the manufacture method of pedestal of the present invention, pedestal top cover and Base body are joined each other by forging Close, and utilize the plastic deformation that produces when forging, the outstanding part of pedestal top cover is closely assembled In the groove of Base body. In addition, since one of them section shape of outstanding part and groove changed Become, therefore when watching from direction of insertion, outstanding part has the section area that differs from one another with groove, And need not too high pressure. In addition, because the closely cooperation that has this kind to realize by plastic deformation, So can greatly alleviate because of the heat biography that cracks between pedestal top cover and the Base body or cause in the space Lead the problem that performance subtracts damage.

In addition, owing to the invention provides a kind of shape on the assembly surface of pedestal top cover and Base body that is easy to The erosion by preventing that the assembly surface oxidation from taking place becomes the method for alloy-layer, so can provide efficient With high-quality pedestal.

In addition, owing to be bonded with each other between pedestal top cover and the Base body, so more firm and more stablely When the bonding part being carried out extra linearity welding or solder brazing technology, need not to provide in order to keep joint The bearing capacity of state, thereby simplified manufacturing technique and reducing production costs.

Manufacture method according to pedestal of the present invention, because Base body and pedestal top cover utilize the friction rabbling welding method and integrally are engaged with each other, so can fully prevent welding portion in traditional melting welding aluminium alloy layer solidify the fire check that is produced, thereby the more pedestal product of high reliability is provided.

Manufacture method according to pedestal of the present invention, because heater is to make up by this way, integrated and need not to prepare separately top pressure closure and heater with foundry goods, and foundry goods is made with the corresponding section shape of embedding groove with Base body, therefore eliminated between Base body and the heater and the gap between top pressure closure and the heater, thereby improved the uniformity of the temperature of pedestal integral body.So, can improve the machinability and the productive rate of transparent glass substrate, and can produce the high-quality transparent glass substrate that is used for liquid crystal display device in large quantity.

Claims (68)

1. method of making pedestal may further comprise the steps:

Preparation has the pedestal top cover of one or more ledges;

Preparation has the Base body with the corresponding groove of described ledge of described pedestal top cover; And

By forging described pedestal top cover is assembled in the described Base body; Wherein, at least one plastic deformation in described forging process in each described ledge and each the described groove, thus make and can closely cooperate to each other;

Wherein, the section shape of at least one in each described ledge and each the described groove is changed by the part, thereby when direction of insertion is watched, described ledge has the different areas of section with described groove.

2. the method for claim 1 further is included in the step that embeds heater at least one described groove.

3. method as claimed in claim 1 or 2, wherein, in the step of the described Base body of preparation, when when vertically watching, the area of section of described groove increases gradually towards the intermediate depth position of this groove.

4. method as claimed in claim 1 or 2, wherein, in the step of the described Base body of preparation, the area of section of described groove increases gradually towards the bottom of this groove.

5. method as claimed in claim 1 or 2, wherein, in the step of the described Base body of preparation, each described groove has corrugated portion or the circular depressed part that forms in its side.

6. method of making pedestal may further comprise the steps:

Preparation pedestal top cover, described pedestal top cover has one or more ledges, and the end surface of each described ledge with depression;

The preparation Base body, described Base body has the corresponding groove of described ledge with described pedestal top cover, and has corresponding with the end surface of described depression and be embedded into heater in the described groove; And

By forging described pedestal top cover is assembled in the described Base body, wherein, each described ledge plastic deformation in described forging process, thus closely cooperate with described groove;

Wherein, when when direction of insertion is watched, described ledge has the different areas of section with described groove.

7. method as claimed in claim 6, wherein, in the step of the described Base body of preparation, described heater is embedded in the described groove with tubulose.

8. method as claimed in claim 7, wherein, in the step of the described pedestal top cover of preparation, the end surface of described depression is the arcs of recesses end surface, and the radius of curvature of described arcs of recesses end surface is different with the radius of curvature of described heater.

9. method as claimed in claim 7, wherein, in the step of the described pedestal top cover of preparation, described heater is embedded in the described groove with dish.

10. method as claimed in claim 7, wherein, in the step of the described pedestal top cover of preparation, the openend of the end surface of described depression is greater than the described heater that is shaped as dish.

11. a method of making pedestal may further comprise the steps:

Preparation Base body, described Base body have the one or more grooves that form in its bottom;

Be embedded at least one heater at described groove;

Preparation and the corresponding top cover of described groove; And

By forging described top cover is assembled in the described groove, wherein, at least one plastic deformation in described forging process in each described top cover and each the described groove, thus feasiblely can closely cooperate to each other;

Wherein, the section shape of at least one in each described top cover and each the described groove is changed, thereby when when direction of insertion is watched, described top cover has the different areas of section with described groove.

12. method as claimed in claim 11, wherein, in embedding the step of described heater, when when vertically watching, the area of section of described groove increases gradually towards the intermediate depth position of this groove.

13. method as claimed in claim 11, wherein, in the step that embeds described heater, the area of section of described groove increases gradually towards the bottom of this groove.

14. method as claimed in claim 11, wherein, in the step that embeds described heater, described heater or cooling device are embedded in the described groove with tubulose.

15. method as claimed in claim 14, wherein, described top cover is corresponding to the radius of curvature of the end surface of described heater or described cooling device, and is identical or different with the radius of curvature of described heater or described cooling device.

16. method as claimed in claim 11, wherein, the step of assembling described top cover comprises:

Use the metal material different to apply described top cover with the material of described Base body; And

By forging described coated top cover is assembled in the described groove, and heats described Base body and the described top cover that is assembled together.

17. method as claimed in claim 16, wherein, the coated a kind of metal that is selected from the group of being formed by zinc (Zn), nickel (Ni) and chromium (Cr) of described top cover.

18. a pedestal uses as method manufacturing as described in a kind of in the claim 1 to 17.

19. a method of making pedestal may further comprise the steps:

Preparation has the pedestal top cover of one or more ledges;

The preparation Base body, described Base body has with the corresponding groove of described ledge and with described ledge and matches;

In described groove, form at least one cooling duct; And

By forging described pedestal top cover is assembled in the described Base body, wherein, the plastic deformation in described forging process of described ledge, thus close fit is in described groove;

Wherein, when when direction of insertion is watched, described ledge has the different areas of section with described groove.

20. method as claimed in claim 19, wherein, in the step that forms described cooling duct, heater is embedded into the bottom of described groove, and described cooling duct is formed in the side of described groove.

21. method as claimed in claim 20, wherein, in the step that forms described cooling duct, described cooling duct is formed in the relative side of described groove.

22. as claim 19 or 20 described methods, wherein, the step that forms described cooling duct further is included in the step that embeds cooling water pipe in the described cooling duct.

23. as claim 19 or 20 described methods, wherein, in the step of the described Base body of preparation, when when vertically watching, the area of section of described groove increases gradually towards the intermediate depth position of this groove.

24. as claim 19 or 20 described methods, wherein, in the step of the described Base body of preparation, the area of section of described groove increases gradually towards the bottom of this groove.

25. as claim 19 or 20 described methods, wherein, the end of described ledge has the arcs of recesses end surface, and the radius of curvature of the radius of curvature of described arcs of recesses end surface and described heater is identical or different.

26. as claim 19 or 20 described methods, wherein, in forming the step of described cooling duct, described cooling duct is formed in the medial surface of described groove to have the leg-of-mutton area of section.

27. as claim 19 or 20 described methods, wherein, described ledge and described groove have intensity or the hardness that differs from one another.

28. method as claimed in claim 20, wherein, described heater has irregular surface.

29. a method of making pedestal may further comprise the steps:

Preparation Base body, described Base body have the one or more grooves that form in its bottom;

In described one or more grooves, form heater;

Prepare the top cover corresponding with described groove; And

By forging described top cover is assembled in the described groove, wherein, at least one plastic deformation in described forging process in each described top cover and each the described groove, thus feasiblely can closely cooperate to each other;

Wherein, the section shape of at least one in each described ledge and each the described groove is changed, thereby when when direction of insertion is watched, described ledge has the different areas of section with described groove.

30. method as claimed in claim 29, wherein, in the step that forms described heater, described heater forms in the bottom of described groove, and described cooling duct forms in the side of described groove.

31. method as claimed in claim 30, wherein, in the step that forms described heater, described cooling duct forms in the opposite flank of described groove.

32. as claim 29 or 30 described methods, wherein, the step that forms described heater further is included in the step that the cooling duct is embedded in cooling water pipe.

33. method as claimed in claim 29, wherein, in the step of the described Base body of preparation, when when vertically watching, the area of section of described groove increases gradually towards the intermediate depth position of this groove.

34. method as claimed in claim 29, wherein, in the step of the described Base body of preparation, the area of section of described groove increases gradually towards the bottom of this groove.

35. method as claimed in claim 29, wherein, described top cover is corresponding to the radius of curvature of the end surface of described heater, and is identical or different with the radius of curvature of described heater.

36. method as claimed in claim 29, wherein, the step of assembling described top cover comprises:

Use the metal material different to apply described top cover with the material of described Base body; And

By forging described coated top cover is assembled in the described groove, and heats described Base body and the described top cover that is assembled together.

37. method as claimed in claim 36, wherein, the coated a kind of metal that is selected from the group of being formed by zinc (Zn), nickel (Ni) and chromium (Cr) of described top cover.

38. method as claimed in claim 29, wherein, described ledge and described groove have intensity or the hardness that differs from one another.

39. method as claimed in claim 29, wherein, described heater has irregular surface.

40. a pedestal uses as method manufacturing as described in claim 20 or 30.

41. a method of making pedestal may further comprise the steps:

Preparation has the pedestal top cover of one or more ledges;

The preparation Base body, described Base body has with the corresponding groove of described ledge and with described ledge and matches;

In described groove, form heater;

By forging described pedestal top cover is assembled in the described Base body, wherein, the plastic deformation in described forging process of described ledge, thus close fit is in described groove; And

Be used to described pedestal top cover is brazed to described Base body from the heat of described heater;

Wherein, when when direction of insertion is watched, described ledge has the different areas of section with described groove.

42. method as claimed in claim 41, wherein said solder brazing step is carried out in the high vacuum environment.

43. method as claimed in claim 41, wherein said solder brazing step is to carry out in the environment of protective gas.

44. method as claimed in claim 41 further is included in the step that forms the cooling duct in the opposite flank of described groove.

45. method as claimed in claim 41, wherein, in the step of the described Base body of preparation, when when vertically watching, the area of section of described groove increases gradually towards the intermediate depth position of this groove.

46. method as claimed in claim 41, wherein, in the step of the described Base body of preparation, the area of section of described groove increases gradually towards the bottom of this groove.

47. method as claimed in claim 41, wherein, the end of described ledge has the arcs of recesses end surface, and the radius of curvature of the radius of curvature of described arcs of recesses end surface and described heater is identical or different.

48. method as claimed in claim 41, wherein, described ledge and described groove have intensity or the hardness that differs from one another.

49. method as claimed in claim 41, wherein, described heater has irregular surface.

50. a method of making pedestal, described method comprises the following steps:

Preparation Base body, described Base body have the one or more grooves that form in its bottom;

In described one or more grooves, form heater;

Prepare the top cover corresponding with described groove;

By forging described top cover is assembled in the described groove of described Base body, wherein, at least one plastic deformation in described forging process in each described top cover and each the described groove, thus feasiblely can closely cooperate to each other; And

Be used to described pedestal top cover is brazed to described groove from the heat of described heater;

Wherein, the section shape of at least one in each described top cover and each the described groove is changed, thereby when when direction of insertion is watched, described ledge has the different areas of section with described groove.

51. method as claimed in claim 50, wherein, the step of assembling described top cover further comprises uses the metal material different with the material of described Base body to apply the step of described top cover.

52. method as claimed in claim 51, wherein, the coated a kind of metal that is selected from the group of being formed by zinc (Zn), nickel (Ni) and chromium (Cr) of described top cover.

53. method as claimed in claim 50, wherein, described solder brazing step is carried out in the high vacuum environment.

54. method as claimed in claim 50, wherein, described solder brazing step is to carry out in the environment of protective gas.

55. method as claimed in claim 50, wherein, in the step that forms described heater, described heater forms in the bottom of described groove, and the cooling duct forms in the side of described groove.

56. method as claimed in claim 50, wherein, in the step of the described Base body of preparation, when when vertically watching, the area of section of described groove increases gradually towards the intermediate depth position of this groove.

57. method as claimed in claim 50, wherein, in the step of the described Base body of preparation, the area of section of described groove increases gradually towards the bottom of this groove.

58. method as claimed in claim 50, wherein, the end of described top cover has the arcs of recesses end surface, and the radius of curvature of the radius of curvature of described arcs of recesses end surface and described heater is identical or different.

59. method as claimed in claim 50, wherein said top cover and described groove have intensity or the hardness that differs from one another.

60. method as claimed in claim 50, wherein, described heater has irregular surface.

61. a pedestal uses as claim 41 or 49 described method manufacturings.

62. a pedestal comprises:

Base body, described Base body have the embedding groove that forms in its bottom;

The heater that in described embedding groove, holds; And

The top of closely inserting described embedding groove is to seal the top cover of described embedding groove;

Wherein, described Base body and described top cover are bonded to each other by friction rabbling welding.

63. pedestal as claimed in claim 62, wherein, described top cover comprises:

Be suitable for contacting first top cover of described heater; And

Second top cover that is suitable for contacting described first top cover and is welded to described Base body.

64. a method of making pedestal may further comprise the steps:

Be to arrange heater in the embedding groove that the bottom of Base body forms;

Use the described embedding groove that is provided with described heater of top seal ground sealing; And

By friction rabbling welding described top cover is combined with described Base body.

65. a method of making pedestal may further comprise the steps:

Form the embedding groove in the bottom of Base body, in order to embed heater therein;

Casting, described foundry goods are included in the space of the described heater of wherein setting with the described embedding groove of correspondence; And

With the assembling of described foundry goods and be embedded in the described embedding groove.

66., wherein, said method comprising the steps of as the described method of claim 65:

Preparation has the mold of the groove identical with described embedding groove;

In described mold, arrange heater support, described heater is placed on the described heater support, and in described mold, pour the aluminum or aluminum alloy of fusing into, solidify subsequently;

From described mold, remove the foundry goods that is included in the described heater that wherein is provided with;

Process the redundance of described foundry goods; And

The described foundry goods that will comprise described heater is assembled in the described embedding groove.

67. as the described method of claim 66, wherein, described heater support is made by aluminum or aluminum alloy.

68. pedestal, has the groove of embedding in order to embed heater therein in its bottom, wherein, described pedestal is included in the foundry goods that assembles in the described embedding groove, and described foundry goods comprises described heater located therein and has and the corresponding shape in the space of described embedding groove.

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