CN101477306B - 高速多光束并行激光直写装置 - Google Patents
高速多光束并行激光直写装置 Download PDFInfo
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- CN101477306B CN101477306B CN200910045637.1A CN200910045637A CN101477306B CN 101477306 B CN101477306 B CN 101477306B CN 200910045637 A CN200910045637 A CN 200910045637A CN 101477306 B CN101477306 B CN 101477306B
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Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101807012B (zh) * | 2010-04-07 | 2011-12-21 | 芯硕半导体(中国)有限公司 | 一种直写光刻机的自动聚焦光路结构 |
CN101862910A (zh) * | 2010-06-17 | 2010-10-20 | 苏州市博海激光科技有限公司 | 卷烟接装纸并行式激光打孔方法及装置 |
CN102495534B (zh) * | 2011-12-12 | 2013-12-25 | 中国科学院上海光学精密机械研究所 | 振镜式激光直写光刻机 |
CN103182605A (zh) * | 2013-03-21 | 2013-07-03 | 常州镭赛科技有限公司 | 激光焊接机 |
CN104181671B (zh) * | 2013-05-23 | 2017-02-22 | 睿励科学仪器(上海)有限公司 | 基于象散法进行对焦的方法和相应的对焦*** |
CN103949774A (zh) * | 2014-04-29 | 2014-07-30 | 武汉锐科光纤激光器技术有限责任公司 | 监测激光束质量的激光加工头及实时监测的方法 |
CN104597718B (zh) * | 2015-01-09 | 2016-09-21 | 中国科学院上海光学精密机械研究所 | 高速旋转激光直写任意图形的方法 |
CN106248056A (zh) * | 2016-08-18 | 2016-12-21 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种多光源扫描检测方法 |
DE102016122528A1 (de) * | 2016-11-22 | 2018-05-24 | Carl Zeiss Microscopy Gmbh | Verfahren zum Steuern oder Regeln einer Mikroskopbeleuchtung |
CN107421964A (zh) * | 2017-08-31 | 2017-12-01 | 长江存储科技有限责任公司 | 一种扫描*** |
CN109143792A (zh) * | 2018-09-03 | 2019-01-04 | 中山新诺科技股份有限公司 | 一种空心柱立体结构的图形加工方法 |
CN109491214B (zh) * | 2018-12-04 | 2019-12-03 | 中国科学院上海光学精密机械研究所 | 集成化超分辨激光直写装置及直写方法 |
CN110441991A (zh) * | 2019-07-04 | 2019-11-12 | 中国科学院上海光学精密机械研究所 | 无掩模直写光刻*** |
CN110653488A (zh) * | 2019-10-16 | 2020-01-07 | 东南大学 | 一种跨尺度高分辨三维激光直写加工方法 |
CN110653485B (zh) * | 2019-10-16 | 2021-07-27 | 东南大学 | 一种跨尺度三维激光直写加工装置 |
CN111055018B (zh) * | 2019-12-29 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | 一种减阻微结构加工方法 |
CN113118652B (zh) * | 2019-12-30 | 2023-08-01 | 中国科学院上海光学精密机械研究所 | 兼容大焦深、高分辨率的多焦点并行激光划片设备 |
CN111766690B (zh) * | 2020-07-24 | 2022-03-25 | 苏州天准科技股份有限公司 | 对位成像设备及激光直接成像*** |
CN112764323A (zh) * | 2021-01-04 | 2021-05-07 | 无锡物联网创新中心有限公司 | 无掩模激光直写***及无掩模激光直写方法 |
CN113206950B (zh) * | 2021-04-12 | 2022-05-31 | 中国科学院上海光学精密机械研究所 | 微纳结构图形试样的高速跟踪方法 |
CN114488715B (zh) * | 2022-02-18 | 2023-09-29 | 西湖大学 | 一种光纤阵列光刻机 |
CN114643420B (zh) * | 2022-04-27 | 2023-10-13 | 天津大学 | 原子级表面及结构的梯度加工***及方法 |
CN116021167A (zh) * | 2023-03-07 | 2023-04-28 | 苏州天准科技股份有限公司 | 一种适用于大尺寸产品的ldi蚀刻设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0446887A1 (en) * | 1990-03-15 | 1991-09-18 | Sf Univentures Corporation | Laser, direct-write integrated circuit production system |
CN101096064A (zh) * | 2007-07-10 | 2008-01-02 | 中国科学院上海光学精密机械研究所 | 模块化的激光直刻装置 |
CN101135856A (zh) * | 2006-08-31 | 2008-03-05 | 中芯国际集成电路制造(上海)有限公司 | 激光直写装置及激光直写方法 |
CN201345033Y (zh) * | 2009-01-21 | 2009-11-11 | 中国科学院上海光学精密机械研究所 | 高速多光束并行激光直写装置 |
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- 2009-01-21 CN CN200910045637.1A patent/CN101477306B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0446887A1 (en) * | 1990-03-15 | 1991-09-18 | Sf Univentures Corporation | Laser, direct-write integrated circuit production system |
CN101135856A (zh) * | 2006-08-31 | 2008-03-05 | 中芯国际集成电路制造(上海)有限公司 | 激光直写装置及激光直写方法 |
CN101096064A (zh) * | 2007-07-10 | 2008-01-02 | 中国科学院上海光学精密机械研究所 | 模块化的激光直刻装置 |
CN201345033Y (zh) * | 2009-01-21 | 2009-11-11 | 中国科学院上海光学精密机械研究所 | 高速多光束并行激光直写装置 |
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Assignee: SUZHOU HUAWEINA NANO TECHNOLOGY CO., LTD. Assignor: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences Contract record no.: 2012310000016 Denomination of invention: High-speed multi-beam parallel laser direct-writing device Granted publication date: 20110406 License type: Exclusive License Open date: 20090708 Record date: 20120217 |
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Effective date of registration: 20220519 Address after: 241200 Chungu 3D Printing Industrial Park, Fanchang Economic Development Zone, Wuhu City, Anhui Province Patentee after: Anhui Zhongke Spring Valley Laser Industry Technology Research Institute Co.,Ltd. Address before: 201800 Shanghai 800-211 post office box Patentee before: SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCES |