CN101459037B - Substrate rack control device, substrate rack mobility control method and sediment apparatus - Google Patents
Substrate rack control device, substrate rack mobility control method and sediment apparatus Download PDFInfo
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- CN101459037B CN101459037B CN2007100944785A CN200710094478A CN101459037B CN 101459037 B CN101459037 B CN 101459037B CN 2007100944785 A CN2007100944785 A CN 2007100944785A CN 200710094478 A CN200710094478 A CN 200710094478A CN 101459037 B CN101459037 B CN 101459037B
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Abstract
A substrate support control device comprises a substrate support lifting circuit for controlling the lifting of the substrate support, and further comprises a color sensor which is located above substrates and is used to control the operation of the substrate support lifting circuit according to the reflected light on surfaces of the substrates. The invention further provides a substrate support moving control method and a deposition device, through arranging the color sensor above the substrates located on the substrate support, the invention is convenient for detecting whether the placing position of the substrates on the substrate support is correct or not, thereby preventing the substrate support to move continuously to break the substrates.
Description
Technical field
The present invention relates to a kind of substrate rack control device, substrate rack mobility control method and precipitation equipment.
Background technology
Behind deposit film, because substrate temperature is higher,,, cause the fragmentation of Semiconductor substrate, and directly put into the film cracking that cold air causes formation on it easily through regular meeting owing to expand with heat and contract with cold if directly in the vacuum chamber of precipitation equipment, take out.For this reason, cooling-part is equipped with in precipitation equipment, usually.
Prior art discloses in a kind of precipitation equipment, as shown in Figure 1, comprises the chamber 10 that is used for substrate and external environment condition isolation; Platform 11 is arranged in the chamber 10, and anode 11a is placed on the platform 11; Substrate 1 is placed in the last placement surface of anode 11a; Platform 11 be set to anode 11a instrument around rotational.
Have confined space 11b at anode 11a, cooling component 12 is arranged among the 11b of space, and cooling component 12 has pipeline 19a, flow channel 19b and pipeline 19c.Entering flow channel 19b by recirculated cooling water, cooling calcium chloride water or analog from pipeline 19a discharges from pipeline 19c then.
So as the surperficial 12a of cooling component 12 during against the lower surface of platform 11, platform 11 is cooled.Further, the anode 11a that platform 11 coolings are placed on it is so that anode 11a can obtain heat from substrate 1.That is to say, the coolant of sending into from pipeline 19a near the flow channel 19b of the surperficial 12a of cooling component 12 with substrate 1 heat exchange to reduce the temperature of substrate 1, the coolant that raises of its temperature flows to pipeline 19c from flow passage 19b and is discharged from then.By unshowned cooling device, the coolant of discharging from pipeline 19c is cooled, and circulation is admitted to pipeline 19a once more then.For the surperficial 12a that makes cooling component 12 can evenly cool off substrate 1 along surface direction, shape and the substrate 1 of the surperficial 12a of the cooling component of optimizing 12 are similar, and be slightly larger than substrate 1, and member flow passage 19b is with circulating cooling medium, so that make surperficial 12a have even temperature.
In above-mentioned prior art, described precipitation equipment also comprises miscellaneous part, in order to simplify, enumerates no longer one by one herein.In above-mentioned prior art,, move up and down cooling component 12 so that substrate is cooled off by in the platform 11 of placing substrate 1, in the 11b of space cooling component 12 being set.But this precipitation equipment owing to can't realize transmits the function that substrate cools off automatically and can't be suitable in actual production technology.
In being 200610146366 Chinese patent application, application number can also find more information relevant with technique scheme.
Prior art also discloses another kind of precipitation equipment, and concrete structure for the purpose of simplifying the description, is only drawn cooling-part herein and is illustrated as shown in Figure 2.
Described cooling-part comprises substrate frame 31, place the substrate 32 on the substrate frame 31, and the cooling chamber 33 that is positioned at substrate frame 31 belows, described substrate frame 31 can translation, shown in arrow among Fig. 2, so that receive substrate 32 from the manipulator (not shown) that sends, this moment, substrate surface was formed with film, its temperature is higher than room temperature, moves down substrate frame 31 then to contacting so that substrate 32 is cooled off with cooling chamber 33.
But when working as substrate 32 run-off the straights that are positioned on the substrate frame 31, as shown in Figure 3, if continue to move down substrate frame 31, cooling chamber 33 can be broken substrate 32 folders, and as shown in Figure 4, substrate 32 is split into substrate 32a and substrate 32.
Summary of the invention
The problem that the present invention solves provides a kind of substrate rack control device, substrate rack mobility control method and precipitation equipment, so that whether detect the substrate placement location that is positioned on the substrate frame correct.
For addressing the above problem, the invention provides a kind of substrate rack control device, comprising: substrate frame lifting circuit is used to control the lifting of substrate frame; Also comprise: color sensor, be positioned at the substrate top that places on the substrate frame, be used for whether controlling substrate frame lifting circuit working according to the reverberation of substrate surface.
Alternatively, described color sensor further comprises: photoelectric conversion unit receives the reverberation of substrate surface, and is converted into current signal; Logic control element receives the current signal of photoelectric conversion unit, and according to this current signal control substrate frame lifting circuit working whether.
Alternatively, described logic control element further comprises: amplification module is used for the current signal of photoelectric conversion unit output is amplified; Whether the substrate frame control module controls substrate frame lifting circuit working according to the current signal after amplifying.
Alternatively, described amplification module comprises triode transistor.
Alternatively, described triode transistor is the PNP triode transistor, and its emitter is connected to input supply terminal by voltage stabilizing didoe, and its base stage is connected to the output of photoelectric conversion unit.
Alternatively, described substrate frame control module comprises electromagnetically operated valve.
Correspondingly, the present invention also provides a kind of substrate rack mobility control method, comprising: color sensor is placed the substrate top that is positioned on the substrate frame; Whether color sensor controls substrate frame lifting circuit working according to the reverberation of substrate surface.
Alternatively, whether described reverberation control substrate frame lifting circuit working according to substrate surface further comprises: receive the reverberation of substrate surface, and be converted into current signal; Receive the current signal of photoelectric conversion unit, and whether control substrate frame lifting circuit working according to this current signal.
Alternatively, also comprise: will amplify through the current signal of photoelectric conversion unit output; Whether control substrate frame lifting circuit working according to the current signal after amplifying.
Alternatively, described amplification module comprises triode transistor.
Alternatively, described triode transistor is the PNP triode transistor, and its emitter is connected to input supply terminal by voltage stabilizing didoe, and its base stage is connected to the output of photoelectric conversion unit.
Alternatively, described substrate frame control module comprises electromagnetically operated valve.
The present invention also provides a kind of precipitation equipment, comprising: substrate frame, be used to place substrate, and described substrate frame can translation; Substrate frame lifting circuit is used to control the lifting of substrate frame; Also comprise: color sensor, be positioned at the substrate top, whether control substrate frame lifting circuit working according to the reverberation of substrate surface.
Alternatively, described color sensor further comprises: photoelectric conversion unit receives the reverberation of substrate surface, and is converted into current signal; Logic control element receives the current signal of photoelectric conversion unit, and according to this current signal control substrate frame lifting circuit working whether.
Alternatively, described logic control element comprises: amplification module is used for the current signal through Voltage stabilizing module is amplified; Whether the substrate frame control module controls substrate frame lifting circuit working according to the current signal after amplifying.
Alternatively, described amplification module comprises triode transistor.
Alternatively, described triode transistor is the PNP triode transistor, and its emitter is connected to input supply terminal by voltage stabilizing didoe, and its base stage is connected to the output of photoelectric conversion unit.
Alternatively, described substrate frame control module comprises electromagnetically operated valve.
Compared with prior art, the technical program has the following advantages: by color sensor is set above substrate, so that whether detect the substrate placement location that is positioned on the substrate frame correct, prevent that the continuation of substrate frame from moving the destruction substrate;
The technical program so that whether detect the substrate placement location that is positioned on the substrate frame correct, prevents that the continuation of substrate frame from moving the destruction substrate by color sensor is set on precipitation equipment.
Description of drawings
Fig. 1 is the precipitation equipment schematic diagram of prior art;
Fig. 2 is the cooling-part schematic diagram in the another kind of precipitation equipment of prior art;
Substrate frame in the another kind of precipitation equipment of Fig. 3 to Fig. 4 prior art is because misoperation causes substrate to be pressed from both sides broken schematic diagram;
Fig. 5 is the substrate rack control device of one embodiment of the present of invention;
Fig. 6 is the module diagram of the substrate rack control device of one embodiment of the present of invention;
Fig. 7 is the circuit diagram of the substrate rack control device of one embodiment of the present of invention;
Fig. 8 is the concrete implementing procedure figure of cooling substrate method of the present invention;
Fig. 9 is the precipitation equipment schematic diagram of one embodiment of the present of invention.
Embodiment
The present invention so that whether the substrate placement location that detects on the substrate frame is correct, prevents that the continuation of substrate frame from moving the destruction substrate by above the substrate that is positioned on the substrate frame color sensor being set.
The present invention at first provides a kind of substrate rack control device, comprising: substrate frame lifting circuit is used to control the lifting of substrate frame; Also comprise: color sensor, be positioned at the substrate top that places on the substrate frame, be used for whether controlling substrate frame lifting circuit working according to the reverberation of substrate surface.
Provide the substrate rack control device of one embodiment of the present of invention with reference to Fig. 5, comprising:
Color sensor is positioned at substrate 32 tops that place on the substrate frame 31, is used for whether controlling substrate frame lifting circuit working according to the reverberation of substrate surface.
Described substrate rack control device 34 also comprises substrate frame lifting circuit, is used to control the lifting (not shown) of substrate frame.
With reference to Fig. 6, the modular structure schematic diagram for substrate rack control device 34 of the present invention comprises:
Substrate frame lifting circuit 43, the lifting of control substrate frame.
Described logic control element 342 further comprises:
Substrate frame control module 23, according to the work of the control of the current signal after amplifying substrate frame lifting circuit whether, the control module of substrate frame described in the present embodiment 23 comprises electromagnetically operated valve.
Simultaneously, Fig. 7 provides the circuit structure of above-mentioned substrate rack control device 34, and is corresponding with Fig. 6, comprising:
Voltage stabilizing didoe D1, its positive pole is connected to the power input of photoelectric conversion module 341, adds voltage stabilizing didoe D1 herein and is used for power input input voltage Vdd is carried out voltage stabilizing.
PNP triode transistor M1, the emitter of described PNP triode transistor M1 is connected to the negative pole of voltage stabilizing didoe D1, and base stage is connected to the signal output part of photoelectric conversion unit 341 by load R1.
Electromagnetically operated valve 23, it comprises coil and K switch 1, so have two inputs and two corresponding outputs, the input/output terminal of the corresponding coil of wherein a pair of input and output side, another is to the two ends of K switch 1 in the input/output terminal corresponding diagram, the input of its corresponding coil is connected to the collector electrode of PNP triode transistor M1, the output of corresponding coil is connected to the negative pole of photoelectric conversion unit 341, the two ends of K switch 1 are connected to substrate frame lifting circuit 43 in its corresponding diagram, be used to control the closed and disconnected of substrate frame lifting circuit 43, thereby whether substrate frame lifting circuit 43 is worked.
Substrate frame control module 23 in the present embodiment is made of electromagnetically operated valve, can also add that inverter constitutes by linked switch, should too much not limit protection scope of the present invention at this.
The present invention gives the course of work of above-mentioned substrate rack control device, at first the photoelectric conversion module 341 of color sensor receives the substrate surface reverberation, and be converted into current signal, and this current signal is exported to the PNP triode transistor M1 base stage of Logic control module 342, the voltage stabilizing didoe D1 of Logic control module 342 carries out input voltage Vdd to input to after the voltage stabilizing emitter of PNP triode transistor M1, under the current signal acting in conjunction of the input voltage Vdd of emitter and base stage, the PNP triode transistor is opened, and the current signal of base stage is amplified after export electromagnetically operated valve 23 to by collector electrode.
When the position of substrate is normal, the current signal of photoelectric conversion module 341 conversions is such as being the less current signal, PNP triode transistor M1 is opened under input voltage Vdd and less current signal, the current signal of base stage is amplified, electromagnetically operated valve 23 work, its Inside coil produces magnetic force and makes K switch 1 closure that is connected to substrate frame lifting circuit 43.43 work of substrate frame lifting this moment circuit, substrate frame moves.
When the malposition of substrate is often waited, the current signal of photoelectric conversion module 341 conversions is such as being bigger current signal, this moment is under input voltage and bigger current signal, not conducting of PNP triode transistor M1, so electromagnetically operated valve 23 is in the disconnection operating state, K switch 1 disconnects, therefore, substrate frame lifting circuit 43 also is in off-state, and this moment, substrate frame stopped action.
Stop action if substrate frame occurs, the staff can place situation according to substrate, adjusts substrate position to normal condition by manual or manipulator, and this moment, PNP triode transistor M1 was opened, substrate frame lifting circuit 43 closures, and substrate frame begins to move.
The process of this detection, judgement and control is carried out continuing, the general reaction time is to be 300 μ s, even it is incorrect therefore the substrate placement location to occur in substrate frame decline process, also can detect, by the action of substrate frame control circuit control substrate frame by this color sensor.
The present invention gives a kind of cooling substrate method embodiment, comprising:
Substrate is placed on the substrate frame, and described substrate frame can translation.
Color sensor is placed the substrate top, whether described color sensor moves according to the reverberation control substrate frame of substrate surface, the photoelectric conversion part of color sensor converts reverberation to a kind of current signal, after amplification module amplifies current signal, export the substrate frame control module to, the correctness of substrate position, its catoptrical color difference, so the current signal size that converts to is also different, such as when substrate position is normal, the current signal of conversion is smaller, and the substrate frame control module with substrate frame lifting closing of circuit, makes its work according to this electric current; When substrate position was unusual, the current signal of conversion was bigger, and the substrate frame control module disconnects substrate frame lifting circuit according to this electric current, makes it stop to move.If substrate frame stops action, need to adjust substrate position and continue to move until substrate frame.
The module knot of described color sensor as shown in Figure 6.
The present invention also provides a kind of precipitation equipment embodiment, comprising:
Substrate frame is used to place substrate, and described substrate frame can translation; Also comprise: color sensor, be positioned at the substrate top, whether control substrate frame lifting circuit working according to the reverberation of substrate surface.
Provide precipitation equipment structural representation of the present invention with reference to Fig. 9, described precipitation equipment 50 comprises:
Described precipitation equipment 50 further comprises:
Whether color sensor 55 is positioned at substrate 53 tops, be used for moving to contact with cooling chamber 54 according to the reverberation on substrate 53 surfaces control substrate frame 53 cooling off substrate 53.
Described color sensor 55 further comprises:
Photoelectric conversion unit receives the reverberation of substrate surface, and is converted into current signal.
Logic control element receives the current signal of photoelectric conversion unit, and according to this current signal control substrate frame lifting circuit working whether.
Described logic control element further comprises:
Amplification module is used for the current signal of photoelectric conversion unit is amplified; Amplification module comprises triode transistor described in the present embodiment.
The substrate frame control module, according to the closed and disconnected of the current signal control substrate frame lifting circuit after amplifying, the control module of substrate frame described in the present embodiment comprises electromagnetically operated valve.
The circuit module of described color sensor 55 and circuit diagram please refer to Fig. 6 and Fig. 7 and associated description thereof, do not repeat them here.
In the present embodiment; color sensor 55 is arranged at the inside of vacuum deposit chamber 51; described color sensor 55 can also be positioned over substrate 53 tops of the outside of vacuum deposit chamber 51; protection scope of the present invention should too can not limited at this in substrate 53 tops of its probe placement in vacuum deposit chamber 51 inside yet.
Precipitation equipment of the present invention also comprises other parts, and such as the support of placing target, air inlet pipe, escape pipe etc., it is provided with and technology as well known to those skilled in the art, does not repeat them here.
Though oneself discloses the present invention as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (2)
1. a substrate rack control device is characterized in that, comprising:
Substrate frame lifting circuit is used to control the lifting of substrate frame, and described substrate frame can translation;
Color sensor is positioned at the substrate top on the substrate frame, is used for judging according to the reverberation of substrate surface whether the position of described substrate is correct, whether to control substrate frame lifting circuit working;
Described color sensor comprises photoelectric conversion unit, voltage stabilizing didoe, PNP triode transistor and electromagnetically operated valve; Described photoelectric conversion unit comprises the signal output part that is used for the input voltage electrical power source input, is used to export the current signal of conversion; The positive pole of described voltage stabilizing didoe is connected to the power input of photoelectric conversion module; The emitter of described PNP triode transistor is connected to the negative pole of voltage stabilizing didoe, and base stage is connected to the signal output part of photoelectric conversion unit by load R1; Electromagnetically operated valve comprises coil and K switch 1, the input of coil is connected to the collector electrode of PNP triode transistor, the output of coil is connected to the negative pole of photoelectric conversion unit, and the input/output terminal of K switch 1 is connected to substrate frame lifting circuit, is used to control the closed and disconnected of substrate frame lifting circuit.
2. a precipitation equipment is characterized in that, comprising:
Substrate frame is used to place substrate, and described substrate frame can translation;
Substrate frame lifting circuit is used to control the lifting of substrate frame;
Color sensor is positioned at the substrate top, judges according to the reverberation of substrate surface whether the position of described substrate is correct, whether to control substrate frame lifting circuit working;
Described color sensor comprises photoelectric conversion unit, voltage stabilizing didoe, PNP triode transistor and electromagnetically operated valve; Described photoelectric conversion unit comprises the signal output part that is used for the input voltage electrical power source input, is used to export the current signal of conversion; The positive pole of described voltage stabilizing didoe is connected to the power input of photoelectric conversion module; The emitter of described PNP triode transistor is connected to the negative pole of voltage stabilizing didoe, and base stage is connected to the signal output part of photoelectric conversion unit by load R1; Electromagnetically operated valve comprises coil and K switch 1, the input of coil is connected to the collector electrode of PNP triode transistor, the output of coil is connected to the negative pole of photoelectric conversion unit, and the input/output terminal of K switch 1 is connected to substrate frame lifting circuit, is used to control the closed and disconnected of substrate frame lifting circuit.
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| CN2007100944785A CN101459037B (en) | 2007-12-13 | 2007-12-13 | Substrate rack control device, substrate rack mobility control method and sediment apparatus |
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| CN2007100944785A CN101459037B (en) | 2007-12-13 | 2007-12-13 | Substrate rack control device, substrate rack mobility control method and sediment apparatus |
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| CN101459037A CN101459037A (en) | 2009-06-17 |
| CN101459037B true CN101459037B (en) | 2011-10-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109913824A (en) * | 2017-12-13 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | Mobile phone glass cover board experiment porch |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102087987B (en) * | 2009-12-08 | 2012-08-29 | 上海微电子装备有限公司 | Positioning device and positioning control method for vertical lifting plate bank |
| CN110164787B (en) * | 2018-02-11 | 2021-05-25 | 江苏鲁汶仪器有限公司 | Cavity wafer position detection device and detection method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030042419A1 (en) * | 1999-12-21 | 2003-03-06 | Hirohumi Katsumata | Method and apparatus for detecting a wafer's posture on a susceptor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030042419A1 (en) * | 1999-12-21 | 2003-03-06 | Hirohumi Katsumata | Method and apparatus for detecting a wafer's posture on a susceptor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109913824A (en) * | 2017-12-13 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | Mobile phone glass cover board experiment porch |
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