CN101439926B - Marking-out device and method and substrate cutting device by the same - Google Patents
Marking-out device and method and substrate cutting device by the same Download PDFInfo
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- CN101439926B CN101439926B CN2008101723040A CN200810172304A CN101439926B CN 101439926 B CN101439926 B CN 101439926B CN 2008101723040 A CN2008101723040 A CN 2008101723040A CN 200810172304 A CN200810172304 A CN 200810172304A CN 101439926 B CN101439926 B CN 101439926B
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- 238000000034 method Methods 0.000 title claims abstract description 63
- 239000000758 substrate Substances 0.000 title claims description 254
- 238000005520 cutting process Methods 0.000 title abstract description 7
- 230000007246 mechanism Effects 0.000 claims description 44
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 208000037656 Respiratory Sounds Diseases 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 10
- 239000010409 thin film Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention provides a marking device and a method, and a base plate cutting device using the device and method, characterized in that the marking device has marking units which are arranged in parallel, several parallel marks may be synchronously formed on a master base plate. Furthermore, space adjusting units used for adjusting spaces among the marking units are provided, and synchronously formed spaces among several parallel marks may be changed.
Description
Technical field
The present invention relates to the apparatus and method in making flat-panel display panel, used, the chalker and the method for particularly mother substrate that is formed with a plurality of unit substrate being rule and utilize this chalker and method to cut off the device of mother substrate.
Background technology
Recently, information processing device is fast-developing to functional diversities and information processing rate high speed.This signal conditioning package has the indicating meter that shows operation information.The display surface device mainly used CRT monitor in the past, but used the flat-panel monitor of light and take up room little Thin Film Transistor-LCD or organic light emitting diode display sharply to increase recently.
Generally the panel of use utilizes brittle base to process usually in flat-panel monitor etc., and panel can divide for by a single board substrate that constitutes and the adhesive base plate of getting up two substrate bondings substantially.
Because adhesive base plate will be processed into the small panel of using from the liquid crystal display of mobile phone and use to the multiple sizes such as large-scale panel of usefulness such as televisor and indicating meter; So will cut into the unit substrate of specified dimension from large-scale mother substrate, to use as various panels.
The method that the tracing wheel (ScribeWheel) that the method for cut-out mother substrate mainly adopts utilization to be inserted with fine diamond cuts off.The method of using tracing wheel to cut off mother substrate comprises following operation: crossed process, behind the predetermined cut-out line that makes on the tracing wheel contact mother substrate, along being scheduled to cut off the line (Scribe Line) that line forms prescribed depth; And the cut-out operation, mother substrate is applied the impact of physics, propagate along line through making crackle, cut into unit substrate to mother substrate.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can form the chalker and the method for many line and the substrate cut that utilizes this chalker and method simultaneously through carrying out a crossed process.
The object of the invention is not limited thereto, and those skilled in the art should make much of other purposes that the present invention does not mention from following explanation.
The present invention provides a kind of chalker, carries out separating into the mother substrate that is formed with a plurality of unit substrate the crossed process of each unit substrate.Said chalker comprises: bracing member, be used to place said mother substrate, and can on first direction, move by straight line; Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on said mother substrate; Move the unit, said scribing unit is being moved up with the vertical second party of said first direction; And spacing adjustment unit, regulate the interval between the said scribing unit, can change the interval between said many line that are parallel to each other that form simultaneously.
As an example, said scribing unit on the path that said bracing member moves, the said first direction and the row arrangement that move along said bracing member straight line.
The said mobile unit of each of said chalker comprises: drive member makes said scribing unit move along said second direction straight line; Ways is configured in along on the straight line of said second direction, guides said scribing unit straight line to move; And brace table, be configured in the two ends of said ways respectively, support said ways.
Said spacing adjustment unit can comprise: the guiding thruster, dispose along said first direction, and be connected with said mobile unitary brace table; Brace table supports said guiding thruster; And driving mechanism, said guiding thruster is rotated.
Said scribing unit has two; Making one of them said scribing unit is that the said mobile unitary brace table that first scribing unit moves is fixed on the base; Making wherein, another said scribing unit is that the said said first direction in unitary brace table edge that moves that second scribing unit moves can be arranged on the said base movably; Said spacing adjustment unit has driving mechanism, and the said mobile unitary brace table with said second scribing unit is moved moves along said first direction.
Said scribing unit has three; What make that first scribing unit that is configured in central authorities in the said scribing unit moves saidly moves unitary brace table and is fixed on the base; Making two remaining in said scribing unit scribing units is the said mobile unitary brace table that second scribing unit and the 3rd scribing unit move; Can be arranged on the said base movably along said first direction respectively; Said spacing adjustment unit has driving mechanism, and the said mobile unitary brace table with said second scribing unit and said the 3rd scribing unit are moved moves along said first direction.
As other example, said scribing unit on the path that said bracing member moves, vertical second direction of first direction and row arrangement that edge and said bracing member straight line move.
Said spacing adjustment unit can comprise: drive member moves each said scribing unit straight line on said second direction; And ways, be configured in along on the straight line of said second direction, guide said scribing unit straight line to move.
Said drive member comprises: carriage is connected with said scribing unit respectively; The guiding thruster inserts in the whole said carriage, with said ways configured in parallel; And driving mechanism, said guiding thruster is rotated; Wherein, on said carriage, can be provided with negative thread portion, be threaded with any guiding thruster in the said guiding thruster.
Said bracing member has the worktable that supports said mother substrate, and said worktable comprises: lower panel, can move by straight line on said first direction; And upper board, be used to place said mother substrate, and be connected with the top of said lower panel.
Said bracing member also comprises the rotating drive member, and said upper board is rotated on said lower panel.
Said a plurality of scribing unit has respectively each other and two scribers of row arrangement, and said two scribers can form line on opposite directions.
In addition, the present invention also provides a kind of substrate cut, cuts into a plurality of unit substrate to mother substrate.Said substrate cut comprises: loading portion loads the mother substrate that is formed with a plurality of unit substrate; Line portion on the said mother substrate that sends from said loading portion, forms line along the orientation of said unit substrate; Cut-out portion, the line along on said mother substrate, forming separates into unit substrate to said mother substrate; And unloading portion, unload separated said unit substrate; Said line portion comprises: bracing member, be used to place said mother substrate, and can on first direction, move by straight line; Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on said mother substrate; Move the unit, said scribing unit is being moved up with the vertical second party of said first direction; And spacing adjustment unit, regulate the interval between the said scribing unit, can change the interval between said many line that are parallel to each other that form simultaneously.
In addition, the present invention also provides a kind of scribble method, is used for separating into mother substrate the crossed process of a plurality of unit substrate.According to the present invention, utilize each other and a plurality of scribing units of row arrangement, on mother substrate, form many line that are parallel to each other simultaneously, when changing the direction of the line that on said mother substrate, will form, can regulate the interval between said a plurality of scribing unit.
Through making the bracing member that supports said mother substrate rotate 90 degree, change the direction of the line that on said mother substrate, will form.
As an example; Said scribing unit is on the path that said bracing member moves; Said first direction and row arrangement that the said bracing member straight line in edge moves; Fixing said mother substrate moves said a plurality of scribing units edge and the vertical second direction straight line of said first direction, forms said line simultaneously.
As other example; Said scribing unit is on the path that said bracing member moves; Vertical second direction of first direction and row arrangement that edge and said bracing member straight line move; Fixing said a plurality of scribing units make said mother substrate move along said first direction straight line, form said line simultaneously.
According to the present invention, owing to use a plurality of scribing units on mother substrate, to form line simultaneously, so can shorten the needed time of crossed process.
In addition; According to the present invention; Can adjust the interval between the scribing unit, so even according to unit substrate under the interval condition of different between the line that the orientation on the mother substrate will form, also can form many line simultaneously to whole orientations.
Description of drawings
Fig. 1 is the figure of an example of expression mother substrate.
Fig. 2 is the figure of schematic representation substrate cut structure of the present invention.
Fig. 3 is the stereographic map of an example of chalker of the line portion in the presentation graphs 2.
Fig. 4 is the vertical view of the chalker among Fig. 3.
Fig. 5 is the side-view of the chalker among Fig. 3.
Fig. 6 is the enlarged view at " A " position among Fig. 3.
Fig. 7 is the stereographic map of the scriber among Fig. 6.
Fig. 8 is the part sectioned view of the scriber bottom among Fig. 7.
Fig. 9 is the vertical view of the tracing wheel among Fig. 8.
Figure 10 is that the order expression utilizes substrate cut of the present invention to make the schema of flat-panel monitor process.
Figure 11 A is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 B is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 C is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 D is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 E is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 F is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 G is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 H is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 11 I is that expression utilizes the chalker among Fig. 3 and Fig. 4, on mother substrate, forms the figure of the process of line.
Figure 12 is the figure of other embodiments of the chalker in the presentation graphs 3.
Figure 13 is the figure of other embodiments of the chalker in the presentation graphs 3.
Figure 14 is the stereographic map of other embodiments of the chalker of the line portion in the presentation graphs 2.
Figure 15 is the vertical view of the chalker among Figure 14.
Figure 16 is the enlarged view at " B " position among Figure 14.
Figure 17 is the carriage of expression Figure 16 and the sectional view that guides annexation between the thruster.
Figure 18 A is the chalker that utilizes Figure 14 and Figure 15, on mother substrate, forms the figure of the process of line.
Figure 18 B is the chalker that utilizes Figure 14 and Figure 15, on mother substrate, forms the figure of the process of line.
Figure 18 C is the chalker that utilizes Figure 14 and Figure 15, on mother substrate, forms the figure of the process of line.
Figure 18 D is the chalker that utilizes Figure 14 and Figure 15, on mother substrate, forms the figure of the process of line.
Figure 18 E is the chalker that utilizes Figure 14 and Figure 15, on mother substrate, forms the figure of the process of line.
Description of reference numerals
100 bracing members
200a, 200b scribing unit
300 move the unit
400 spacing adjustment unit
200 ' a, 200 ' b scribing unit
300 ' spacing adjustment unit
500,500 ' control part
Embodiment
With reference to Fig. 1～Figure 18 E embodiment of the present invention is elaborated below.Embodiment of the present invention can carry out various deformation, the embodiment that scope of the present invention is stated after can not being interpreted as and being defined in.This embodiment is in order to illustrate in greater detail the present invention to those skilled in the art, and therefore, in order more clearly to emphasize, the key element shape among the figure etc. are exaggerated to some extent.
Embodiment
Fig. 1 is the figure of an example of expression mother substrate.
As shown in Figure 1, mother substrate 1 can be that (TFT-LCD) uses panel to Thin Film Transistor-LCD.Mother substrate 1 constitutes by being roughly the first tabular mother substrate 2 of tetragon and second mother substrate 3.First mother substrate 2 and second mother substrate, 3 stacked on top of one another.First mother substrate 2 is the substrates that form thin film transistor base plate, and second mother substrate 3 is the substrates that form color filter.
On first mother substrate 2 and second mother substrate 3, form a plurality of unit substrate 2a, 3a, unit substrate 2a, 3a are arranged in latticed on the plane of first mother substrate 2 and second mother substrate 3.The horizontal edge of general unit substrate 2a, 3a is long long different with longitudinal edge, and according to the orientation of unit substrate 2a, 3a, the distance between the line that form also has nothing in common with each other.
On the other hand, mother substrate 1 is except being Thin Film Transistor-LCD (TFT-LCD) with the panel, also can be that flat-panel monitor is used panel with Organic Light Emitting Diode (OLED) indicating meter of one of panel.
Fig. 2 is the figure of schematic representation substrate cut 10 structures of the present invention.
As shown in Figure 2, substrate cut 10 is used for cutting into a plurality of unit substrate to mother substrate (Reference numeral 1 of Fig. 1), and has loading portion 11, line portion 12, cut-out portion 13 and unloading portion 14.Loading portion 11, line portion 12, cut-out portion 13 and unloading portion 14 arranged in order become row.Mother substrate 1 is sent into substrate cut 10 through loading portion 11, and order separates into a plurality of unit substrate through line portion 12 and cut-out portion 13, after this delivers to the outside of substrate cut 10 through unloading portion 14.
In 12 1 sides configuration upset portion of line portion 15.Upset portion 15 makes the position of the one side that forms line and does not form the location swap of the another side of line.That is, in first mother substrate 2 and second mother substrate 3,, forming under the situation of line on second mother substrate 3 then, making mother substrate 1 upset, exchanging the upper-lower position of first mother substrate 2 and second mother substrate 3 when at first on first mother substrate 2, forming line.
Fig. 3 is the stereographic map of an example of chalker 12a of the line portion 12 of presentation graphs 2, and Fig. 4 and Fig. 5 are respectively vertical view and the side-views of the chalker 12a of Fig. 3.
For the ease of explanation; Call first direction 22 to the straight line travel direction of the bracing member 100 of back narration; On horizontal plane, calling second direction 24, calling third direction 26 with first direction 22 and second direction 24 vertical above-below directions with first direction 22 vertical directions.First direction 22 corresponds respectively to the some limits that on mother substrate 1, are arranged in latticed unit substrate 2 with second direction 24.
Like Fig. 3～shown in Figure 5, chalker 12a comprises bracing member 100, scribing unit 200, moves unit 300 and spacing adjustment unit 400.Bracing member 100 supports mother substrate 1 in crossed process.Bracing member 100 moves mother substrate 1 straight line on first direction 22, is benchmark with the hub towards the bracing member 100 of third direction 26, and mother substrate 1 is rotated.Scribing unit 200 contacts with mother substrate 1 on being placed on bracing member 100, on mother substrate 1, forms line.Moving unit 300 makes scribing unit 200 move along second direction 24 straight lines.Spacing adjustment unit 400 is regulated the interval on first direction 22 between the scribing unit 200.
Bracing member 100 comprises worktable 120, linear drives member 140 and rotating drive member 160.Worktable 120 has upper board 122 and lower panel 124.Upper board 122 is seen from top with lower panel 124 and is roughly rectangle.The configuration that is parallel to each other of upper board 122 and lower panel 124, upper board 122 is positioned at the upside of lower panel 124.On upper board 122, place mother substrate 1.The area of upper board 122 is similar or big slightly with mother substrate 1.On upper board 122, can form a plurality of holes (not expression among the figure) that are connected with vacuum pipe (not expression among the figure), mother substrate 1 utilizes vacuum pressure to be fixed on the upper board 122.Clamping element (not expression among the figure) can be set on upper board 122 or lower panel 124 selectively, further be fixed on mother substrate 1 on the upper board 122.
Linear drives member 140 moves worktable 120 straight line on first direction 22.Linear drives member 140 comprises ways 142, carriage 144 and driving mechanism (not expression among the figure).Ways 142 is long along first direction 22, is configured in the central authorities of base 30.Ways 142 has identical width along its length direction.Put down above the ways 142, on two sides of ways 142, be respectively formed at groove 141 long on the first direction 22.
Driving mechanism provides motivating force, makes worktable 120 by ways 142 guiding, and straight line moves on first direction 22.Driving mechanism uses and comprises phonomoter and angle of rake assembly.The assembly that uses as driving mechanism can be the assembly that comprises the assembly that phonomoter, band and belt wheel constitute selectively or comprise linear motor (Linear Motor).Therefore the structure that above-mentioned multiple driven unit is concrete has omitted detailed explanation owing to be known for a person skilled in the art.
Rotating drive member 160 rotates worktable 120.The rotation of worktable 120 changes the direction of the line that on mother substrate 1, forms.In the unit substrate 2a that on mother substrate 1, forms, the orientation of 3a; If forming line along any direction accomplishes; Then rotating drive member 160 makes mother substrate 1 rotate 90 degree, in the orientation of unit substrate 2a, 3a, forms line along some directions again.
As shown in Figure 5, rotating drive member 160 has phonomoter 162 and rotation axis 164.Phonomoter 162 is arranged on base plate 145 central parts of carriage 144.Be connected the rotation axis 164 on phonomoter 162 output terminals, connect the lower panel 124 of worktable 120, be connected on the upper board 122.Bearing components (not expression among the figure) can be set on lower panel 124, can support rotation axis 164 and rotate.According to this formation, the upper board 122 of the worktable 120 of placing mother substrate 1 is rotated, the rotational angle of upper board 122 is 90 degree.
Like Fig. 3 and shown in Figure 4, a plurality of scribing units 200 can be arranged according to the present invention.In this embodiment, be that example describes with the situation that disposes two scribing unit 200a, 200b.But scribing unit also can have more than three.The first scribing unit 200a and the second scribing unit 200b are configured to be spaced from each other at upper edge, the path first direction 22 that bracing member 100 moves.
As shown in Figure 6, the first scribing unit 200a has on second direction 24 and two scriber 220a, the 240a of row arrangement, and the second scribing unit 200b has on second direction 24 and two scriber 220b, the 240b of row arrangement.Scriber 220a, 240a, 220b, 240b have identical structure, are that example describes with wherein scriber 220a below.
Fig. 7 is the stereographic map of the scriber 220a among Fig. 6, and Fig. 8 is the part sectioned view of the bottom of the scriber 220a among Fig. 7, and Fig. 9 is the vertical view of the tracing wheel among Fig. 8.
Like Fig. 7～shown in Figure 9, scriber 220a has tracing wheel 222, strut member 224, pressing member 226 and oscillator 228.Tracing wheel 222 contacts with mother substrate 1 in crossed process, rolls along the surface of mother substrate 1, forms line at mother substrate 1 simultaneously.Can use the wheel of diamond material as tracing wheel 222.Central authorities at tracing wheel 222 form circular through hole 222b, and the edge 222a of tracing wheel 222 is sharp-pointed.Tracing wheel 222 is supported on the strut member 224.Strut member 224 has main body 224a and pivot pin 224b.Below main body 224a, be formed on the groove 225 that connects main body 224a on the direction.Pivot pin 224b is the stock shape with circular cross section.With the vertical direction of the length direction of groove 225 on, pivot pin 224b is positioned at groove 225.The two ends of pivot pin 224b are fixed on the main body 224a.Pivot pin 224b connects the through hole 222b that on tracing wheel 222, forms.When tracing wheel 222 was supported with pivot pin 224b, tracing wheel 222 parts were positioned at groove 225, and are a part of outstanding to strut member 224 times.226 pairs of tracing wheels 222 of pressing member are exerted pressure, and when tracing wheel 222 contacted with mother substrate 1, tracing wheel 222 can be with certain power by being pressed on the mother substrate 1.As an example, pressing member 226 is positioned at the top of strut member 224, utilizes air pressure to push strut member 224 downwards, to tracing wheel 222 pressurizations.Oscillator 228 makes tracing wheel 222 vibrations when carrying out crossed process.It is inner that oscillator 228 is installed in main body 224a, can use ultrasonic oscillator as oscillator 228.
Two scriber 220a, 240a are configured to have nothing in common with each other.If when being configured to scriber 220a and moving, can on mother substrate 1, form line, when then another scriber 240a is configured to the direction opposite with it on the edge and moves, can on mother substrate 1, form line along a direction.Therefore; Scriber 220a is when a side direction of mother substrate 1 opposite side opposite with it moves; On mother substrate 1, form line, another scriber 240a when opposite with it the said side shifting, forms line from the opposite side of mother substrate 1 on mother substrate 1. Scriber 220a, 240a can move up at upper and lower respectively independently, and the scriber that forms line is positioned at the downside of another scriber.
The scriber 220b of the second scribing unit 200b, 240b are identical with scriber 220b, the 240b of the first scribing unit 200a.
In addition, like Fig. 3～shown in Figure 5, move unit 300 have make that the first scribing unit 200a moves first move unit 320, make that the second scribing unit 200b moves second move unit 340.First moves unit 320 and second, and to move the structure of unit 340 substantially similar.First moves unit 320 has two vertical support platforms 321, ways 323, carriage 325 and drive member (Fig. 4 329).Vertical support platform 321 is spaced from each other configuration along second direction 24.Interval between the vertical support platform 321 makes mother substrate 1 when first direction 22 straight lines move, and mother substrate 1 can be through between the vertical support platform 321.
The first scribing unit 200a is connected on the ways 323 through carriage 325.As shown in Figure 6, carriage 325 has back up pad 336 and web plate 335.Back up pad 336 is rectangular flat board, is positioned on the side of ways 323.Web plate 335 has from the side plate 331 of the vertical outstanding back up pad 336 with downside of back up pad 336 upsides, be inserted in the insertion plate 333 the groove 323a that ways 323 forms.
The first scribing unit 200a is installed on the back up pad 336 of carriage 325, can move up and down.As an example, on back up pad 336, along the guide 336a of third direction 26 formation notch geometrys, scriber 220a, the 240a of the first scribing unit 200a is connected on the back shaft (not expression among the figure) that inserts among the guide 336a.
The interval of spacing adjustment unit 400 between first direction 22 adjusted, the first scribing unit 200a and the second scribing unit 200b.As an example, first move unit 320 vertical support platform 321 be fixed on the base 30, the first scribing unit 200a is not moved on first direction 22.Second move unit 340 vertical support platform 341 be arranged to and can from base 30, move to first direction 22, the second scribing unit 200b can move to first direction 22.Spacing adjustment unit 400 through make second move unit 340 vertical support platform 341 on first direction 22, move, regulate the interval between the first scribing unit 200a and the second scribing unit 200b.
Spacing adjustment unit 400 has brace table 420, ways 440 and drive member (Fig. 4 460).Brace table 420 be configured in respectively second move unit 340 vertical support platform 341 both sides.First back-up block 422 be configured in first move unit 320 vertical support platform 321 and second move between the vertical support platform 341 of unit 340.Second back-up block 424 with second move unit 340 vertical support platform 341 be benchmark, be configured in a side opposite with first back-up block 422.Drive member 460 make second move unit 340 vertical support platform 341 straight line on first direction 22 move.Drive member 460 has guiding thruster 462 and the driving mechanism 464 of turning force is provided to this guiding thruster.Guiding thruster 462 is between first back-up block 422 and second back-up block 424, and its length direction is a first direction 22, and two ends are connected with second back-up block 424 with first back-up block 422 respectively.Guiding thruster 462 moves negative thread portion (not expression among the figure) engagement that forms on the vertical support platform 341 of unit 340 respectively with second.Driving mechanism 464 is arranged on first back-up block 422 or second back-up block 424, and is connected on the end of guiding thruster 462.Driving mechanism 464 can use phonomoter.Though drive member 460 is that example is illustrated with the assembly with phonomoter 464 and guiding thruster 462, in addition, also can use as linear motor, offer linear drives power the various driving mechanisms that move unitary vertical support platform.
Move the action that unit 320, second moves unit 340, spacing adjustment unit 400 and worktable 120 by control part 500 controls first.That is, control part 500 is when forming line, and control first is moved unit 320 and second and moved unit 340, and the first scribing unit 200a and second scribing unit 200b straight line on second direction are moved.If form two line, then control part 500 control driving mechanisms move worktable 12 straight lines.In addition; If all form with mother substrate 1 on any line that orientation is parallel of unit substrate 2a, 3a of formation; Then control part 500 is controlled rotating drive members 160; Worktable 120 is rotated, and control interval regulon 400, the interval between the first scribing unit 200a and the second scribing unit 200b regulated.
Describe in the face of the process of using substrate cut of the present invention 10 manufacturing flat-panel display panels down with said structure.
Figure 10 is that the order expression utilizes substrate cut of the present invention to make the schema of the process of flat-panel monitor.
Like Fig. 2 and shown in Figure 10, mother substrate 1 is loaded in loading portion 11.Mother substrate 1 first mother substrate 2 or second mother substrate 3 towards above state under be loaded.At this for ease, be that example describes with the situation of first mother substrate 2 towards the top.Loading portion 11 is sent to line portion 12 (S10) to mother substrate 1.
12 pairs of first mother substrates 2 towards the top of line portion carry out crossed process.After forming line on first mother substrate 2, line portion 12 is sent to upset portion 15 (S20) to mother substrate 1.
12 pairs of second mother substrates 3 towards the top of line portion carry out crossed process.After forming line on second mother substrate 3, line portion 12 is sent to cut-out portion 13 (S40) to mother substrate 1.
13 pairs in cut-out portion has carried out the mother substrate 1 of first mother substrate 2 and second mother substrate, 3 crossed process, cuts off operation, separates into a plurality of unit substrate (S50) to mother substrate 1.
Utilize the cut-out operation to separate into a plurality of unit substrate to mother substrate 1, unit substrate by unloading (S60), is after this carried out matting to unit substrate in unloading portion 14.
Then, in line portion 12, the process that mother substrate 1 carries out crossed process is described utilizing chalker 12a of the present invention.
Figure 11 A～Figure 11 I is the chalker that expression utilizes Fig. 3 and Fig. 4, on mother substrate 1, forms the figure of the process of line.
If worktable 120 moves to the position of having set (that is, the first predetermined line a and the first scribing unit 200a aligned position of cutting off of mother substrate 1), with regard to moving of stop table 120.The driving mechanism 464 of this rear drive spacing adjustment unit 400 is regulated the interval between the first scribing unit 200a and the second scribing unit 200b.Spacing adjustment unit 400 make second move unit 340 vertical support platform 341 straight line on first direction 22 move.If move unit 340 through moving second; The second scribing unit 200b moves to the position set (promptly; The second predetermined line b aligned position that cuts off of the second scribing unit 200b and mother substrate 1), just stop second moving unit 340 the moving of vertical support platform 341 (Figure 11 B).
Be scheduled to cut off under the line b aligned state along first predetermined the cut off line a and second of first direction 22 at the first scribing unit 200a and the second scribing unit 200b with mother substrate 1; Drive first and move the driving mechanism 328,348 that unit 320 and second moves unit 340, make the first scribing unit 200a and the second scribing unit 200b move to a side of mother substrate 1.
After this, each scriber 220a of the first scribing unit 200a and the second scribing unit 200b, 220b move downwards, contact with mother substrate 1 (Figure 11 C).
The order of Figure 11 A, Figure 11 B and Figure 11 C can change mutually.For example behind the interval of at first regulating between the first scribing unit 200a and the second scribing unit 200b, the first predetermined line a of cut-out of mother substrate 1 and the second predetermined line b that cuts off aim at the first scribing unit 200a and the second scribing unit 200b.
Drive the driving mechanism 328,348 that moves unit 320,340 then, make the first scribing unit 200a and the second scribing unit 200b cross mother substrate 1 and move along second direction 24.Scriber 220a, the 220b of the first scribing unit 200a and the second scribing unit 200b make on the mother substrate 1 and form crackle at this moment.Through forming crackle continuously, on mother substrate 1, form line (Figure 11 D) along predetermined cut-out line a, b.
After the predetermined cut-out in mother substrate 1 upper edge line a, b formed line, scriber 220a, the 220b of the first scribing unit 200a and the second scribing unit 200b moved to the top.
The scriber 240a of the first scribing unit 200a and the second scribing unit 200b, 240b move downwards, contact with mother substrate 1.Drive the driving mechanism 328,348 that moves unit 320,340, make the first scribing unit 200a and the second scribing unit 200b cross mother substrate 1 and move along second direction 24.At this moment, scriber 240a, the 240b of the first scribing unit 200a and the second scribing unit 200b form crackle on mother substrate 1.Through forming crackle continuously, on mother substrate 1, form line (Figure 11 F) along predetermined cut-out line c, d.
Along being scheduled to cut-out line a, when b forms line, using scriber 220a, 220b, be scheduled to cut off line c on the edge, when d forms line, can use scriber 240a, 240b.This is scriber 220a, the 220b that forms crackle in order to make, and the tracing wheel of 240a, 240b keeps certain directivity.
In said process,, on mother substrate 1, form line along another direction when after all forming line in any orientation of the unit substrate 2a that forms on the mother substrate 1,3b.Be placed with the upper board 122 of the worktable 120 of mother substrate 1 for this reason, rotate 90 degree (Figure 11 G) with respect to lower panel 124.
This aftertable 120 straight line on first direction 22 moves, and the predetermined line f that cuts off is aimed at the first scribing unit 200a.If worktable 120 moves to the position of having set (that is, the predetermined cut-out line f of mother substrate 1 and the first scribing unit 200a aligned position), with regard to move (Figure 11 H) of stop table 120.
Drive the driving mechanism 464 of spacing adjustment unit 400, regulate the interval between the first scribing unit 200a and the second scribing unit 200b.Spacing adjustment unit 400 make second move unit 340 vertical support platform 341 straight line on first direction 22 move.Utilize second to move moving of unit 340; If the second scribing unit 200b moves to the position set (promptly; The predetermined cut-out line e aligned position of the second scribing unit 200b and mother substrate 1), just stop second moving unit 340 the moving of vertical support platform 341 (Figure 11 I).
After this scriber 220a, the 220b of the first scribing unit 200a and the second scribing unit 200b move down; Contact with mother substrate 1; Through the process of having carried out in Figure 11 D～Figure 11 F, having explained, mother substrate 1 form with in the past in the line of the line vertical direction of mother substrate 1 formation.
Following simple declaration changes a plurality of examples of coming from this embodiment.
In the example of above-mentioned embodiment, explained through moving second and moved unit 340, be adjusted in the interval between the first scribing unit 200a and the second scribing unit 200b on the first direction 22.But also can be shown in figure 12, first move unit 320 vertical support the platform 321 and second vertical support platform 341 that moves unit 340 all move.
In addition, in the example of above-mentioned embodiment, the situation that two scribing units are arranged is illustrated.But the scribing unit more than three or three can be arranged also.Under the situation that three scribing units are arranged, the scribing unit 200a that is positioned at central authorities does not move on first direction, and the scribing unit 200b, the 200c that are positioned at both sides can move up in first party.
In the example of above-mentioned embodiment, there is the situation of two scribers to be illustrated to a scribing unit.But also can a scriber be arranged at a scribing unit.
In the example of above-mentioned embodiment, to fixing mother substrate, scribing unit forms line on mother substrate while moving chalker is illustrated.But also can fix scribing unit, make mother substrate form line while moving.In this case, scribing unit is on second direction 24 and row arrangement, and mother substrate straight line on first direction 22 moves, and can regulate along the interval between the scribing unit of second direction 24.Be elaborated in the face of this down.
Figure 14 is the stereographic map of other embodiments of chalker in the line portion of presentation graphs 2, and Figure 15 is the vertical view of the chalker of Figure 14.Figure 16 is the enlarged view at Figure 14 " B " position, and Figure 17 is the carriage of expression Figure 16 and the sectional view of the annexation between the guiding thruster.
Like Figure 14 and shown in Figure 15, chalker 12b has bracing member 100, scribing unit 200 ', spacing adjustment unit 300 '.Bracing member 100 supports mother substrate 1.Bracing member 100 makes mother substrate 1 move along first direction 22 straight lines, and on the plane of mother substrate 1, is that benchmark can make mother substrate 1 rotate with vertical hub.Scribing unit 200 ' contacts with mother substrate 1 on being placed on bracing member 100, on mother substrate 1, forms crackle.Spacing adjustment unit 300 ' moves scribing unit 200 ' on second direction 24, regulate the interval between the scribing unit 200 '.When carrying out crossed process, fixing scribing unit 200 ', mother substrate 1 moves along first direction 22 straight lines.
With reference to Fig. 3～Fig. 5, because bracing member 100 has identical structure with the bracing member of front explanation, so omitted detailed description to it.
Like Figure 14 and shown in Figure 15, scribing unit 200 ' has first scribing unit, 200 ' a and second scribing unit, 200 ' b, and they are configured on the vertical direction of straight line travel direction with bracing member 100, promptly on the second direction 24.In this embodiment, be that example describes with the situation that disposes two scribing unit 200 ' a, 200 ' b, but can certainly dispose plural a plurality of scribing unit 200 '.First scribing unit, 200 ' a and second scribing unit, 200 ' b can move interval respectively through the spacing adjustment unit 300 ' of back narration on second direction 24.
Shown in figure 16, first scribing unit, 200 ' a has two scriber 220 ' a, the 240 ' a that is configured in side by side on the second direction 24, and second scribing unit, 200 ' b has two scriber 220 ' b, the 240 ' b that is configured in side by side on the second direction 24.Scriber 220 ' a, 240 ' a, 220 ' b, 240 ' b have with Fig. 7～Fig. 9 in the identical structure of scriber explained in front, so omitted detailed description to it.
Spacing adjustment unit 300 ' moves each scribing unit 200 ' a, 200 ' b on second direction 24, regulate the interval between scribing unit 200 ' a, the 200 ' b.Spacing adjustment unit 300 ' has vertical support platform 310 ', ways 320 ', carriage 330 ' a, 330 ' b and drive member 340 '.Vertical support platform 310 ' separates certain distance configuration on second direction 24.Vertical support platform 310 ' is configured at mother substrate 1 when first direction 22 straight lines move, and mother substrate 1 can be through between the vertical support platform 310 '.Ways 320 ' is fixed on the upper end of vertical support platform 310 '.On ways 320 ' with below, have along its length long groove 322 '.
First scribing unit, 200 ' a is connected on the ways 320 ' through carriage 330 ' a, and second scribing unit, 200 ' b is connected on the ways 320 ' through carriage 330 ' b.Carriage 330 ' a has identical structure with carriage 330 ' b, so followingly only carriage 330 ' a is described.Shown in figure 16, carriage 330 ' a has back up pad 332 ' and web plate 334 '.Back up pad 332 ' is rectangular flat board, is positioned on the side of ways 320 '.Web plate 334 ' has the side plate 334 ' a of the vertical outstanding back up pad 332 ' with downside of upside from back up pad 332 ' and is inserted in the insertion plate 334 ' b the groove 322 ' of ways 320 ' formation.
Drive member 340 ' provides motivating force, and carriage 330 ' a, 330 ' b are moved along ways 320 ' straight line.Drive member 340 ' has the first guiding thruster 342 ' and guides thruster 344 ' with second, they and ways 320 ' configured in parallel.Shown in figure 17, in first guiding carriage 330 ' a that can straight line moves is installed on the thruster 342 ', the carriage 330 ' b that can straight line moves is installed on the second guiding thruster 344 '.Promptly; The first guiding thruster 342 ' and the second guiding thruster 344 ' insert among the carriage 330 ' a; The first guiding thruster 342 ' and the 335 ' a of the negative thread portion engagement that upward forms at carriage 330 ' a, and the second guiding thruster 344 ' is not to connect with hole 336 ' a state of contact that goes up formation at carriage 330 ' a.Identical therewith; The first guiding thruster 342 ' and the second guiding thruster 344 ' insert among the carriage 330 ' b; The first guiding thruster 342 ' to be connecting with hole 336 ' the b state of contact that go up to form at carriage 330 ' b, and the second guiding thruster 344 ' with go up the 335 ' b of the negative thread portion engagement that forms at carriage 330 ' b.According to this configuration, when the first guiding thruster 342 ' drove, carriage 330 ' a straight line moved, and carriage 330 ' b does not move, and when the second guiding thruster 344 ' drove, carriage 330 ' a did not move, and carriage 330 ' b straight line moves.According to this type of drive, just can regulate being connected first scribing unit, the 200 ' a on the carriage 330 ' a and being connected the interval between second scribing unit, the 200 ' b on the carriage 330 ' b.On an end of the first guiding thruster 342 ', connect first driving mechanism 343 ' that turning force is provided, on an end of the second guiding thruster 344 ', connect second driving mechanism 345 ' that turning force is provided.Can use driving mechanisms such as phonomoter as first driving mechanism 343 ' and second driving mechanism 345 '.But in addition is that example be illustrated to have phonomoter with the angle of rake assembly of guiding as drive member 340 ',, also can use the various driving mechanisms that linear drives power can be provided to carriage 330 ' a, 330 ' b like cylinder etc.
Shown in figure 16, first scribing unit, 200 ' a is installed on the back up pad 332 ' of carriage 330 ' a, can move up and down.As an example; On back up pad 332 '; Scriber 220 ' a, the 240 ' a that form guide 331 ', the first scribing unit 200 ' a of notch geometry along third direction 26 are connected on the back shaft (not expression among the figure) that inserts in the guide 331 '.Second scribing unit, 200 ' b also is connected on the carriage 330 ' b, can move up and down, and syndeton is identical with the syndeton of first scribing unit, 200 ' a, so omitted the explanation to it.
Action by the said spacing adjustment unit 300 ' of control part 500 ' control.First driving mechanism 343 ' of 500 ' control interval of control part regulon 300 ' and the action of second driving mechanism 345 '; First scribing unit, 200 ' a and second scribing unit, 200 ' b are moved, to be adjusted in the interval between first scribing unit, the 200 ' a and second scribing unit, 200 ' b on the second direction 24 on second direction 24.
Utilize chalker 12b of the present invention below, the process of on mother substrate 1, carrying out crossed process is described with said structure.
Figure 18 A～Figure 18 E representes to utilize the chalker of Figure 14 and Figure 15, on mother substrate 1, forms the figure of the process of line.
Scriber 220 ' a, the 220 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b move down, and worktable 120 utilizes driving mechanism (not expression among the figure), and straight line moves (Figure 18 A) on first direction 22.
When first direction 22 moved, scriber 220 ' a, the 220 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b formed crackle on mother substrate 1 at worktable 120.Through forming crackle continuously, on mother substrate 1, form line (Figure 18 B) along predetermined cut-out line a ', b '.
After forming line on the mother substrate 1, scriber 220 ' a, the 220 ' b of first scribing unit, 200 ' a and second scribing unit, 200 ' b move to the top along predetermined line a ', the b ' of cutting off.
The driving mechanism 345 ' of spacing adjustment unit 300 ' drives the second guiding thruster 344 ', and second scribing unit, 200 ' b is aimed at the predetermined line d ' that cuts off.The driving mechanism 343 ' of spacing adjustment unit 300 ' drives the first guiding thruster 342 '; First scribing unit, 200 ' a is moved; Utilize moving of first scribing unit, 200 ' a, regulate the interval between first scribing unit, 200 ' a and second scribing unit, the 200 ' b.First scribing unit, 200 ' a aims at (Figure 18 C) with the predetermined line c ' that cuts off.
Scriber 240 ' a of first scribing unit, 200 ' a and second scribing unit, 200 ' b, 240 ' b move downwards, and worktable 120 utilizes driving mechanism (not expression among the figure), and straight line moves on first direction 22.When first direction 22 moved, first scribing unit, 200 ' a and second scribing unit, 200 ' b scriber 240 ' a, 240 ' b separately formed crackle on mother substrate 1 at worktable 120.Through forming crackle continuously, on mother substrate 1, form line along predetermined cut-out line c ', d '.After forming line on the mother substrate 1, scriber 240 ' a, the 240 ' b of scribing unit 200 ' a, 200 ' b move (Figure 18 D) to the top along predetermined line c ', the d ' of cutting off.
Along predetermined cut-out line a ', b ' formation line the time, can use scriber 220 ' a, 220 ' b, along predetermined cut-out line c ', d ' formation line the time, can use scriber 240 ' a, 240 ' b.This is scriber 220 ' a, the 220 ' b that forms crackle in order to make, and the tracing wheel of 240 ' a, 240 ' b keeps certain directivity.
Through aforesaid process, after all forming line, on mother substrate 1, form line along another direction in the direction in mother substrate 1 upper edge.Therefore to rotate 90 degree (Figure 18 E) to the upper board 122 of the worktable that is placed with mother substrate 1 120 with respect to lower panel 124.
After this process through carrying out once more in Figure 18 A～Figure 18 D, having explained is forming on the mother substrate 1 and the line of the vertical direction of line of formation in the past.
As stated, the present invention has a plurality of scribing units, through in a crossed process, forming many line simultaneously, can shorten the needed time of crossed process, therefore can improve the productivity of making the substrate operation.
In addition, because the present invention can regulate the interval between the scribing unit, so can form many line respectively forming in the orientation of unit substrate on the mother substrate.
Claims (26)
1. a chalker carries out the crossed process that a mother substrate that is formed with a plurality of unit substrate separates into each unit substrate, it is characterized in that comprising:
Bracing member is used to place said mother substrate, can on first direction, move by straight line;
Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on said mother substrate;
Move the unit, said scribing unit is being moved up with the vertical second party of said first direction; And
Spacing adjustment unit is regulated the interval between the said scribing unit, can change the interval between said many line that are parallel to each other that form simultaneously.
2. chalker according to claim 1 is characterized in that, said scribing unit on the path that said bracing member moves, the said first direction and the row arrangement that move along said bracing member straight line.
3. chalker according to claim 2 is characterized in that,
Each said mobile unit comprises:
Drive member makes said scribing unit move along said second direction straight line;
Ways is configured in along on the straight line of said second direction, guides said scribing unit straight line to move; And
Brace table is configured in the two ends of said ways respectively, supports said ways.
4. chalker according to claim 3 is characterized in that,
Said spacing adjustment unit comprises:
The guiding thruster disposes along said first direction, and is connected with said mobile unitary brace table;
Brace table supports said guiding thruster; And
Driving mechanism rotates said guiding thruster.
5. chalker according to claim 3 is characterized in that,
Said scribing unit has two,
Making one of them said scribing unit is that the said mobile unitary brace table that first scribing unit moves is fixed on the base,
Make another said scribing unit wherein promptly second scribing unit move saidly move unitary brace table and can be arranged on movably on the said base along said first direction,
Said spacing adjustment unit has driving mechanism, and the said mobile unitary brace table with said second scribing unit is moved moves along said first direction.
6. chalker according to claim 3 is characterized in that,
Said scribing unit has three,
What make that first scribing unit that is configured in central authorities in the said scribing unit moves saidly moves unitary brace table and is fixed on the base,
Making two remaining in said scribing unit scribing units is the said mobile unitary brace table that second scribing unit and the 3rd scribing unit move, can be arranged on movably on the said base along said first direction respectively,
Said spacing adjustment unit has driving mechanism, and the said mobile unitary brace table with said second scribing unit and said the 3rd scribing unit are moved moves along said first direction.
7. chalker according to claim 1 is characterized in that, said scribing unit on the path that said bracing member moves, vertical second direction of first direction and row arrangement that edge and said bracing member straight line move.
8. chalker according to claim 7 is characterized in that,
Said spacing adjustment unit comprises:
Drive member moves each said scribing unit straight line on said second direction; And
Ways is configured in along on the straight line of said second direction, guides said scribing unit straight line to move.
9. chalker according to claim 8 is characterized in that,
Said drive member comprises:
Carriage is connected with said scribing unit respectively;
The guiding thruster inserts in the whole said carriage, with said ways configured in parallel; And
Driving mechanism makes said guiding thruster rotate respectively; Wherein,
On said carriage, be provided with negative thread portion, be threaded with any guiding thruster in the said guiding thruster.
10. chalker according to claim 1 is characterized in that,
Said bracing member has the worktable that supports said mother substrate,
Said worktable comprises:
Lower panel can move by straight line on said first direction; And
Upper board is used to place said mother substrate, and is connected with the top of said lower panel.
11. chalker according to claim 10 is characterized in that, said bracing member also comprises the rotating drive member, and said upper board is rotated on said lower panel.
12. chalker according to claim 1 is characterized in that,
Said a plurality of scribing unit has respectively each other and two scribers of row arrangement,
Said scriber forms line in the opposite direction.
13. a substrate cut is characterized in that comprising:
Loading portion loads the mother substrate that is formed with a plurality of unit substrate;
Line portion on the said mother substrate that sends from said loading portion, forms line along the orientation of said unit substrate;
Cut-out portion, the line along on said mother substrate, forming separates into unit substrate to said mother substrate; And
Unloading portion unloads separated said unit substrate;
Said line portion comprises:
Bracing member is used to place said mother substrate, can on first direction, move by straight line;
Scribing unit, mutual and row arrangement can form many line that are parallel to each other simultaneously on said mother substrate;
Move the unit, said scribing unit is being moved up with the vertical second party of said first direction; And
Spacing adjustment unit is regulated the interval between the said scribing unit, can change the interval between said many line that are parallel to each other that form simultaneously.
14. substrate cut according to claim 13 is characterized in that, said scribing unit on the path that said bracing member moves, the said first direction and the row arrangement that move along said bracing member straight line.
15. substrate cut according to claim 14 is characterized in that,
Each said mobile unit comprises:
Drive member makes said scribing unit move along said second direction straight line;
Ways is configured in along on the straight line of said second direction, guides said scribing unit straight line to move; And
Brace table is configured in the two ends of said ways respectively, supports said ways.
16. substrate cut according to claim 15 is characterized in that,
Said spacing adjustment unit comprises:
The guiding thruster disposes along said first direction, and is connected with said mobile unitary brace table;
Brace table supports said guiding thruster; And
Driving mechanism rotates said guiding thruster.
17. substrate cut according to claim 15 is characterized in that,
Said scribing unit has two,
Making one of them said scribing unit is that the said mobile unitary brace table that first scribing unit moves is fixed on the base,
Make another said scribing unit wherein promptly second scribing unit move saidly move unitary brace table and can be arranged on movably on the said base along said first direction,
Said spacing adjustment unit has driving mechanism, and the said mobile unitary brace table with said second scribing unit is moved moves along said first direction.
18. substrate cut according to claim 13 is characterized in that, said scribing unit on the path that said bracing member moves, vertical second direction of first direction and row arrangement that edge and said bracing member straight line move.
19. substrate cut according to claim 18 is characterized in that,
Said spacing adjustment unit comprises:
Drive member moves each said scribing unit straight line on said second direction; And
Ways is configured in along on the straight line of said second direction, guides said scribing unit straight line to move.
20. substrate cut according to claim 19 is characterized in that,
Said drive member comprises:
Carriage is connected with said scribing unit respectively;
The guiding thruster inserts in the whole said carriage, with said ways configured in parallel; And
Driving mechanism makes said guiding thruster rotate respectively; Wherein,
On said carriage, be provided with negative thread portion, be threaded with any guiding thruster in the said guiding thruster.
21. substrate cut according to claim 13 is characterized in that,
Said bracing member comprises:
Lower panel can move by straight line on said first direction;
Upper board is used to place said mother substrate, and is connected with the top of said lower panel; And
The rotating drive member rotates said upper board on said lower panel.
22. a scribble method is characterized in that,
Utilize a plurality of scribing units of mutual and row arrangement, on mother substrate, form many line that are parallel to each other simultaneously,
When changing the direction of the line that on said mother substrate, will form, regulate the interval between said a plurality of scribing unit.
23. scribble method according to claim 22 is characterized in that, rotates 90 degree through making the bracing member that supports said mother substrate, changes the direction of the line that on said mother substrate, will form.
24. scribble method according to claim 22 is characterized in that,
Said scribing unit on the path that said bracing member moves, the first direction and the row arrangement that move along said bracing member straight line,
Fixing said mother substrate moves said a plurality of scribing units edge and the vertical second direction straight line of said first direction, forms said line simultaneously.
25. scribble method according to claim 22 is characterized in that,
Said scribing unit on the path that said bracing member moves, vertical second direction of first direction and row arrangement that edge and said bracing member straight line move,
Fixing said a plurality of scribing units make said mother substrate move along said first direction straight line, form said line simultaneously.
26. scribble method according to claim 22 is characterized in that,
Each said scribing unit has two scribers respectively,
Two scribers of said scribing unit form line on opposite directions.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020070119005A KR100905898B1 (en) | 2007-11-21 | 2007-11-21 | Scribing apparatus, apparatus and method for cutting substrate using the same |
| KR10-2007-0119005 | 2007-11-21 | ||
| KR1020070119005 | 2007-11-21 | ||
| KR1020070119002A KR100889308B1 (en) | 2007-11-21 | 2007-11-21 | Scribing apparatus and method, apparatus for cutting substrate using the scribing apparatus |
| KR10-2007-0119002 | 2007-11-21 | ||
| KR1020070119002 | 2007-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101439926A CN101439926A (en) | 2009-05-27 |
| CN101439926B true CN101439926B (en) | 2012-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101723040A Active CN101439926B (en) | 2007-11-21 | 2008-10-31 | Marking-out device and method and substrate cutting device by the same |
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| Country | Link |
|---|---|
| KR (1) | KR100889308B1 (en) |
| CN (1) | CN101439926B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101985388B (en) * | 2009-07-29 | 2013-03-27 | 北京京东方光电科技有限公司 | Cutting device and cutting method for liquid crystal glass substrate after cutting of paired boxes |
| KR101155027B1 (en) * | 2009-12-14 | 2012-06-11 | 주식회사 아바코 | Substrate dividing apparatus and method for dividing substrate using thereof |
| JP5091961B2 (en) * | 2010-02-15 | 2012-12-05 | 三星ダイヤモンド工業株式会社 | Scribing equipment |
| JP5578377B2 (en) * | 2011-07-29 | 2014-08-27 | セメス株式会社 | Substrate processing apparatus and method |
| TWI458108B (en) * | 2011-12-07 | 2014-10-21 | Ind Tech Res Inst | Trench scribing apparatus and trench scribing method |
| KR101383644B1 (en) * | 2012-06-01 | 2014-04-09 | 이종철 | Substrate separation device and for method for separating the substrate using thereof |
| CN103713409B (en) * | 2013-12-27 | 2016-03-30 | 合肥京东方光电科技有限公司 | A kind of liquid crystal panel cutter sweep and cutting method |
| CN105541095A (en) * | 2015-12-23 | 2016-05-04 | 苏州大道激光应用科技有限公司 | Laser cutting process used for glass cutting |
| CN106995274A (en) * | 2016-09-23 | 2017-08-01 | 广州市科卡通信科技有限公司 | A kind of new-type glass line-plotting device |
| CN108585460B (en) * | 2018-04-27 | 2021-02-02 | 中建材（合肥）新能源有限公司 | Automatic glass cutting equipment |
| KR20200130536A (en) * | 2019-05-08 | 2020-11-19 | 삼성디스플레이 주식회사 | Display panel cutting apparatus and cutting method using the same |
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| CN1769987A (en) * | 2004-11-05 | 2006-05-10 | Lg.菲利浦Lcd株式会社 | Scribing apparatus, substrate cutting apparatus equipped with the scribing apparatus and substrate cutting method using the substrate cutting apparatus |
| CN1953857A (en) * | 2004-05-20 | 2007-04-25 | 三星钻石工业股份有限公司 | Motherboard cutting method, motherboard scribing apparatus, program and recording medium |
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| JP4664544B2 (en) | 2001-07-27 | 2011-04-06 | 株式会社ディスコ | Scribing equipment |
| JP4199471B2 (en) | 2002-03-26 | 2008-12-17 | Ｊｕｋｉ株式会社 | Semiconductor wafer processing apparatus and semiconductor wafer processing method |
| JP4142458B2 (en) * | 2003-01-20 | 2008-09-03 | 中村留精密工業株式会社 | Vibration scribing method and apparatus for hard brittle plate |
| JP2006196574A (en) | 2005-01-12 | 2006-07-27 | Daitron Technology Co Ltd | Scribing tool |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1953857A (en) * | 2004-05-20 | 2007-04-25 | 三星钻石工业股份有限公司 | Motherboard cutting method, motherboard scribing apparatus, program and recording medium |
| CN1769987A (en) * | 2004-11-05 | 2006-05-10 | Lg.菲利浦Lcd株式会社 | Scribing apparatus, substrate cutting apparatus equipped with the scribing apparatus and substrate cutting method using the substrate cutting apparatus |
| CN1958490A (en) * | 2006-05-08 | 2007-05-09 | 塔工程有限公司 | Apparatus and method for substrate marking by synchronous multi-shaft |
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| CN101439926A (en) | 2009-05-27 |
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