CN101398030A - Anti friction high bearing capacity micro precision bearing - Google Patents

Abstract

The invention relates to an antifriction miniature precision bearing with high carrying capacity. The antifriction miniature precision bearing is characterized in that: the antifriction miniature precision bearing comprises an upper plate and a lower panel; the surface of the upper plate is respectively applied with a nanometer adamas film coating and a nanometer alumina film coating, and the distance between the two coatings d is 2nm to 10nm; the surface of the lower panel is fully coated with a nanometer SiC film coating; the gap value hb between nanometer SiC film coating and the nanometer adamas film coating is 2nm to 5nm; the gap between the upper plate and the lower panel is filled with a liquid lubricant; and the moving direction of the lower panel against the upper plate is from the nanometer alumina film coating on the upper plate to the nanometer adamas film coating, therefore, the certain relative movement between the upper plate and the lower panel forms a bearing. Compared with an ordinary miniature precision bearing, under similar conditions, the antifriction miniature precision bearing can improve carrying capacity by 30 percent and reduce the coefficient of friction by 30 percent, thus being characterized by antifriction and high carrying capacity.

Description

Anti friction high bearing capacity micro precision bearing

Technical field

The present invention relates to a kind of bearing, particularly a kind of anti friction high bearing capacity micro precision bearing.

Background technique

Bearing is the important mechanical part that is used for supporting axial workpiece.Divide two kinds on sliding bearing and rolling bearing.There is following main performance to require for bearing: supporting precision, support stiffness, low coefficient of friction and wear-resistant.This just requires bearing is a kind of very accurate mechanical part, also requires it that enough big bearing capacity is arranged.In order to reach good antifriction and wear-resisting property, also need bearing to have greasy property preferably.Develop so far, though the bearing technology comparative maturity all is based upon on traditional lubrication theory basis.At present, rolling bearing respectively is applied to different occasions with sliding bearing, and its advantage is respectively arranged.Because what the present invention relates to is sliding bearing, has sliding bearing type and technology now and is summarized as follows:

From lubrication mechanism, sliding bearing is divided into two kinds on mixed friction sliding bearing and fluid lubrication sliding bearing.It is lubricated that the former relies on border adsorbed film and hydrodynamic effect to realize, is used for low speed, underloading and inessential occasion; It is lubricated that the latter relies on fluid film to realize, is used for important events, uses more extensive.The fluid lubrication sliding bearing is the main body of sliding bearing, is divided into two kinds on hydrldynamic pressure lubrication sliding bearing and hydrostatic lubrication sliding bearing again.The hydrostatic lubrication sliding bearing relies on extraneous hydraulic system fuel feeding, by oil lift load, be lubricated by hydraulic oil, accuracy of manufacturing height, structure are complicated, cost is higher, are used for that the requirement support stiffness is big, supporting precision height and the big important events of bearing capacity.The hydrodynamic effect that relies on the hydrldynamic pressure lubrication sliding bearing realizes lubricated, has that structure is simple, cost is lower, the advantage of better performances, is the more extensive and common sliding bearing of a kind of application.It is divided into two kinds of hydrldynamic pressure lubrication radial plain bearing and hydrldynamic pressure lubrication thrust slide bearings again.The former is used to support radial load, and the latter is used to support thrust load.Below introduce existing main fluid hydrodynamic lubrication thrust slide bearing type and characteristics thereof.

1, clinoplain fixed bush segment bearing.It relies on the convergence gap and the relative movement between this two surfaces that form between two surfaces up and down to realize the hydrodynamic effect, thereby realizes lubricated.This bearing has big bearing capacity, and better antifriction and wear-resisting property are arranged.

2, zigzag fashion segmental bearing.The same a kind of bearing of its work and lubrication mechanism.Its bearing capacity is more much lower than last a kind of bearing under the same conditions.

3, ramp platform segmental bearing.The same two kinds of bearings of its work and lubrication mechanism.Its maximum bearing capacity exceeds 20% than the maximum bearing capacity of clinoplain fixed bush segment bearing under identical operating mode.

4, Rayleigh ladder bearing.The same spherical bearing of its work and lubrication mechanism.Three kinds of bearings than the front, its maximum bearing capacity is the highest under identical operating mode, exceeds 28% than the maximum bearing capacity of clinoplain fixed bush segment bearing.

More than four kinds of bearings be common hydrldynamic pressure lubrication thrust slide bearing.They are main bodys of thrust slide bearing, are subjected to extensive use on engineering.Lubrication technology is the core technology of these bearings.They all are based on the hydrodynamic effect and realize lubricated.These bearing size microminiaturizations are promptly got corresponding micro precision bearing.Micro precision bearing is extensive application in the microminiature precision optical machinery.The development trend of engineering goods microminaturization now such as the demand for development of MEMS are developed corresponding micro precision bearing.The requirement of micro precision bearing is remained its antifriction quality (being low coefficient of friction), wear resistance and high bearing capacity.Its core technology remains lubrication technology.

Summary of the invention

Technical problem to be solved by this invention is at the deficiencies in the prior art, and a kind of simple and reasonable, anti friction high bearing capacity micro precision bearing with lower friction factor and bigger bearing capacity is provided.

Technical problem to be solved by this invention is to realize by following technological scheme.The present invention is a kind of anti friction high bearing capacity micro precision bearing, is characterized in, it comprises upper plate and dull and stereotyped down, and the width of upper plate is 1～1000 micron; Being coated with thickness on the upper panel surface respectively is the nano-diamond film coating and the nano aluminium oxide film coating of 5～10 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate width, and between nano-diamond film coating surface and the nano aluminium oxide film coating surface is 2～10 nanometers apart from d; Be coated with the nano SiC film coating that thickness is 5～10 nanometers on the dull and stereotyped whole surface down; Gap width h between nano SiC film coating and the nano-diamond film coating _bBe 2～5 nanometers; Filled with liquid lubricant in upper plate and following dull and stereotyped gap; Following dull and stereotyped moving direction with respect to upper plate is the nano aluminium oxide film coating sensing nano-diamond film coating from upper plate, and certain relative movement just forms bearing between upper plate and following flat board like this.

Technical problem to be solved by this invention can also further realize by following technological scheme.Above-described anti friction high bearing capacity micro precision bearing is characterized in, described fluid lubricant is that viscosity is short chain alkanes or the short-chain alcohols of 0.1～10.0cP; Preferably propane, normal butane, pentane or DMAE.

The present invention is a kind of anti friction high bearing capacity micro precision bearing, and than common micro precision bearing, it has lower friction factor (promptly antifriction quality) preferably and bigger bearing capacity.Have higher adsorption strength and shear strength between the nano-diamond film coating interface on fluid lubricant and the upper plate, slippage does not take place in fluid lubricant in the work on the nano-diamond film coating surface.Have low adsorption strength and shear strength on fluid lubricant and the upper plate between nano aluminium oxide film coating interface, slippage takes place in fluid lubricant in the work on nano aluminium oxide film coating surface.Fluid lubricant and dull and stereotyped down going up between the nano SiC film coating interface have moderate adsorption strength and shear strength, slippage does not take place in fluid lubricant on the nano SiC film coating surface in a district (inlet region) of bearing of the present invention, and fluid lubricant on the nano SiC film coating surface slippage takes place in b district (outlet area).Instantly dull and stereotyped movement velocity direction with respect to upper plate just forms bearing of the present invention when pointing to the nano-diamond film coating for the nano aluminium oxide film coating from upper plate.

Fig. 1 provides the schematic diagram of bearing of the present invention.In Fig. 1, u: dull and stereotyped down movement velocity, w with respect to upper plate ₁: bearing load, l ₁: the width of nano-diamond film coating, l ₂: the width of nano aluminium oxide film coating; l ₁=l ₂h _b: the gap width between nano SiC film coating and the nano-diamond film coating, h _b=2～5 nanometers.h _a: the gap width between nano SiC film coating and the nano aluminium oxide film coating, d=h _a-h _b=2～10 nanometers.

According to interface sliding fluid lubrication theory, can push away to such an extent that the unit length dimension bearing capacity (the loaded line density of promptly bearing) of bearing of the present invention is:

$w_1=\frac{{\mathrm{\&tau;}}_{\mathrm{sb}}{(l_1+l_2)}^2[(3U-\frac{3}{2}{\mathrm{\&lambda;}}_{\mathrm{\&tau;}}){\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;}-\frac{3}{2}{r}_h\mathrm{\&psi;}]}{2h_a(1+{\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;})(1+\mathrm{\&psi;})}---\left(1\right)$

Herein, U=u η/(τ _Sbh _a), λ _τ=τ _Sa/ τ _Sb, r _h=h _a/ h _b, ψ=l ₁/ l ₂=1, η is a fluid lubricant viscosity, τ _SbBe interface shear strength between fluid lubricant and nano SiC film coating, τ _SaBe interface shear strength between fluid lubricant and nano aluminium oxide film coating.According to interface sliding fluid lubrication theory, realize bearing working condition of the present invention, need meet the following conditions:

${\mathrm{\&lambda;}}_{\mathrm{\&tau;}}<2U-\frac{1}{r_h^2}---\left(2\right)$

With

${\mathrm{\&phi;}}_{\mathrm{\&tau;}}>1+(1+\frac{1}{\mathrm{\&psi;}})\frac{(3U-\frac{3}{2}{\mathrm{\&lambda;}}_{\mathrm{\&tau;}}){\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;}-\frac{3}{2}{r}_h\mathrm{\&psi;}}{r_h(1+{\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;})(1+\mathrm{\&psi;})}---\left(3\right)$

Herein, φ _τ=τ _Sa, A/ τ _Sb, τ _{Sa, A}Be interface shear strength between fluid lubricant and nano-diamond film coating.

According to interface sliding fluid lubrication theory, can push away to such an extent that the friction factor of bearing upper surface of the present invention (whole upper plate coating surface), bearing lower surface (whole dull and stereotyped coating surface down) is respectively:

The bearing upper surface: $f_{a1}=\frac{2[{\mathrm{\&lambda;}}_{\mathrm{\&tau;}}+\mathrm{\&psi;}(1+G\frac{\mathrm{\&psi;}+1}{\mathrm{\&psi;}{r}_h})]}{G(\mathrm{\&psi;}+1)}\frac{h_a}{l_1+l_2}---\left(4\right)$

The bearing lower surface: $f_{b1}=\frac{2[\mathrm{\&psi;}+{\mathrm{\&lambda;}}_{\mathrm{\&tau;}}+G(\mathrm{\&psi;}+1)]}{G(1+\mathrm{\&psi;})}\frac{h_a}{l_1+l_2}---\left(5\right)$

Parameter G in formula (4), (5) is:

$G=\frac{(3U-\frac{3}{2}{\mathrm{\&lambda;}}_{\mathrm{\&tau;}}){\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;}-\frac{3}{2}{r}_h\mathrm{\&psi;}}{(1+\mathrm{\&psi;})(1+{\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;})}---\left(6\right)$

According to common fluid lubrication theory (no interface slip flow body lubrication theory), can push away under the similarity condition common micro precision bearing unit length dimension bearing capacity (the loaded line density of promptly bearing) be:

${\mathrm{<figure-callout\; id="2"\; label="w"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">w</figure-callout>}}_2=\frac{3\mathrm{<figure-callout\; id="2"\; label="U\; r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">U</figure-callout>}{r}_h^{}{}_2^{}\mathrm{\&psi;}(r_h-1){\mathrm{\&tau;}}_{\mathrm{sb}}{(l_1+l_2)}^2}{(1+{\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;})(1+\mathrm{\&psi;})h_a}---\left(7\right)$

The friction factor of bearing upper surface (whole upper panel surface) is:

$f_{a2}=\frac{U-M_2(1+\mathrm{\&psi;})+\mathrm{\&psi;}({\mathrm{Ur}}_h+{\mathrm{<figure-callout\; id="2"\; label="M"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">M</figure-callout>}}_2\frac{\mathrm{\&psi;}+1}{\mathrm{\&psi;}{r}_h})}{M_2(\mathrm{\&psi;}+1)}\frac{h_a}{l_1+l_2}---\left(8\right)$

The friction factor of bearing lower surface (whole planar surface down) is:

${\mathrm{<figure-callout\; id="2"\; label="f\; b"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">f</figure-callout>}}_b=\frac{U+M_2(1+\mathrm{\&psi;})+\mathrm{\&psi;}({\mathrm{Ur}}_h-{\mathrm{<figure-callout\; id="2"\; label="M"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">M</figure-callout>}}_2\frac{\mathrm{\&psi;}+1}{\mathrm{\&psi;}{r}_h})}{M_2(\mathrm{\&psi;}+1)}\frac{h_a}{l_1+l_2}---\left(9\right)$

Parameter M in formula (8), (9) ₂For:

${\mathrm{<figure-callout\; id="2"\; label="M"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">M</figure-callout>}}_2=3\mathrm{<figure-callout\; id="2"\; label="U\; r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">U</figure-callout>}{r}_h^{}{}_2^{}\mathrm{\&psi;}(r_h-1)/\left[(1+{\mathrm{<figure-callout\; id="3"\; label="r\; h"\; filenames="A200810235131E00171.png"\; state="\{\{state\}\}">r</figure-callout>}}_h^{}\mathrm{\&psi;})(1+\mathrm{\&psi;})\right]---\left(10\right)$

Following inventor is example with DMAE as fluid lubricant, uses above-mentioned formula (1)-(10) and calculates, and draws the correlation data of the friction factor and the bearing capacity of bearing of the present invention and common micro precision bearing.

Fluid lubricant is a DMAE, τ _Sa=0.1kPa, τ _Sb=0.5kPa, τ _{Sa, A}=1.5kPa gets: h _b=5nm, h _aFollowing different bearing width value (l is adopted in=7nm, u=0.001m/s, η=0.005Pas, ψ=1 ₁+ l ₂) time obtain the load w that different bearings of the present invention bears ₁With bearing upper surface friction factor f _A1, lower surface friction factor f _B1, and with the bearing capacity w under they and common micro precision bearing (the not being coated with coating) similarity condition ₂, upper surface friction factor f _A2, lower surface friction factor f _B2Compare, consequently:

(1) as (l ₁+ l ₂During the μ m of)=8, w ₁=2.7N/m, f _A1=2.14 * 10 ^-3, f _B1=2.64 * 10 ^-3Common micro precision bearing result: w under the similarity condition ₂=2.05N/m, f _A2=3.1 * 10 ^-3, f _B2=3.6 * 10 ^-3

(2) as (l ₁+ l ₂During the μ m of)=12, w ₁=6.07N/m, f _A1=1.43 * 10 ^-3, f _B1=1.76 * 10 ^-3Common micro precision bearing result: w under the similarity condition ₂=4.62N/m, f _A2=2.1 * 10 ^-3, f _B2=2.4 * 10 ^-3

(3) as (l ₁+ l ₂During the μ m of)=16, w ₁=10.8N/m, f _A1=1.07 * 10 ^-3, f _B1=1.32 * 10 ^-3Common micro precision bearing result: w under the similarity condition ₂=8.2N/m, f _A2=1.55 * 10 ^-3, f _B2=1.8 * 10 ^-3

(4) as (l ₁+ l ₂During the μ m of)=20, w ₁=16.86N/m, f _A1=8.56 * 10 ^-4, f _B1=1.06 * 10 ^-3Common micro precision bearing result: w under the similarity condition ₂=12.82N/m, f _A2=1.24 * 10 ^-3, f _B2=1.44 * 10 ^-3

From above comparing result as can be seen, bearing of the present invention is compared with common micro precision bearing, and under the same conditions, the bearing capacity of bearing of the present invention can improve 30%, and the pivot friction coefficient can reduce about 30%.Therefore bearing of the present invention has the characteristics of antifriction and high bearing capacity.

The principle of bearing of the present invention below is described.

In bearing of the present invention, a district (inlet region) at bearing, fluid lubricant slippage and fluid lubricant is increased at the lip-deep flow velocity of nano aluminium oxide film coating on nano aluminium oxide film coating surface during work, slippage does not take place in fluid lubricant on the nano SiC film coating surface on the other hand, and so just making the liquid lubrication agent flux that relies on bearing down dull and stereotyped (having the nano SiC film coating) motion traction to go into the contact area in bearing a district (inlet region) is a district (inlet region) Couette traffic flow (seeing fluid mechanics) increase.On the contrary, in the b district of bearing (outlet area), because the gap width h between upper plate nano-diamond film coating and the following dull and stereotyped nano SiC film coating _bLess, fluid lubricant makes the flow velocity of fluid lubricant on following dull and stereotyped coating surface reduce in slippage on following flat board (the having the nano SiC film coating) coating surface of bearing, slippage does not take place in fluid lubricant on the nano-diamond film coating surface of upper plate on the other hand, and so just making the liquid lubrication agent flux that relies on dull and stereotyped (having the nano SiC film coating) motion under the bearing to pull out the contact area at the bearing outlet area is that Couette traffic flow in b district (outlet area) reduces.Even for the flow that keeps the continuity fluid lubricant that fluid lubricant flows in whole contact area at whole contact area conservation, the fluid lubricant pressure gradient value in the fluid lubricant pressure gradient value in bearing a district (inlet region) and bearing b district (outlet area) all need increase, so that the liquid lubrication agent flux that is caused by the fluid lubricant pressure gradient at bearing a district (inlet region) and b district (outlet area) is that Poiseuille traffic flow (seeing fluid mechanics) increases.Because bearing a district (inlet region) Poiseuille traffic flow reduces the fluid lubricant total discharge that flows into the contact area, and Poiseuille traffic flow in bearing b district (outlet area) increases the fluid lubricant total discharge that flows out the contact area, has so just kept fluid lubricant at the flow conservation of the whole contact area of bearing with flow continuously.Therefore, than common micro precision bearing (not being coated with coating), under same condition, bigger fluid lubricant pressure gradient and fluid lubricant pressure can be set up in bearing of the present invention contact area.Therefore bearing of the present invention has bigger bearing capacity than common micro precision bearing under identical condition.Because fluid lubricant slippage on the nano aluminium oxide film coating of bearing surface and nano SiC film coating is a bearing surface place friction stress reaches that the interface shear strength causes between fluid lubricant and this two kinds of plated films, in the work on bearing a of the present invention district (inlet region) the nano aluminium oxide film coating on friction stress and b district (outlet area) the nano SiC film coating friction stress equal interface shear strength between fluid lubricant and this two kinds of plated films respectively.In other words, in the work on bearing a of the present invention district (inlet region) the nano aluminium oxide film coating on friction stress and b district (outlet area) the nano SiC film coating friction stress be subjected to the restriction of interface shear strength between fluid lubricant and this two kinds of plated films respectively.Because interface shear strength value is lower between fluid lubricant and this two kinds of plated films, on bearing a of the present invention district (inlet region) the nano aluminium oxide film coating on friction stress and b district (outlet area) the nano SiC film coating friction stress all less.This makes bearing upper surface of the present invention, lower surface place surface friction drag obviously littler than common micro precision bearing under the same operating conditions.Therefore, the friction factor of bearing of the present invention obviously low than common micro precision bearing under the similarity condition.This is bearing low friction coefficient of the present invention, the better and energy-conservation reason of antifriction performance.

Advantage of the present invention and technique effect.

The present invention adopts bearing surface plating nano coating method and uses fluid lubricant and bearing surface is coated with interlayer weak interface shear strength and the slippage of fluid lubricant on this coating surface and designs the micro precision bearing with good antifriction performance and high bearing capacity.Than common micro precision bearing, bearing load carrying capacity of the present invention can improve about 30% and friction factor can reduce about 30% under the similarity condition.So bearing of the present invention is a kind of bearing with obvious energy-saving effect.Bearing basic mechanical design feature of the present invention all being significantly improved than common micro precision bearing.Bearing of the present invention also has the advantage of easy realization, and current micro-nano manufacturing technology, surface film deposition technique and magnetron sputtering technology can easily be realized bearing of the present invention.Therefore, than common micro precision bearing, the manufacture cost of bearing of the present invention can not be significantly increased.Under same operating mode, bearing of the present invention has better greasy property than common micro precision bearing, makes microminiature precision optical machinery parts that better service behaviour and longer operating life be arranged, and the user cost of microminiature precision optical machinery parts middle (center) bearing is reduced.On the other hand, the manufacture cost of bearing of the present invention does not have a remarkable increase than common micro precision bearing.Bearing of the present invention can obtain practical application in the microminiature precision optical machinery.

Description of drawings

Fig. 1 is the schematic diagram of bearing of the present invention.

Fig. 2 is the bearing capacity comparison diagram.In Fig. 2, bearing curve of the present invention is meant bearing capacity (contact area load) curve that calculates by formula (1); The plain bearing curve is meant bearing capacity (contact area load) curve of the common micro precision bearing that calculates by formula (7); The experimental result curve is meant contact area load (bearing capacity) curve that embodiment's 11 described experiments record.

Fig. 3 is the friction factor comparison diagram.In Fig. 3, bearing curve of the present invention is meant the friction factor curve that calculates by formula (4); The plain bearing curve is meant the friction factor curve of the common micro precision bearing that calculates by formula (8); The experimental result curve is meant the friction factor curve that embodiment's 11 described experiments record.

Embodiment

Following with reference to accompanying drawing, further describe concrete technological scheme of the present invention, so that those skilled in the art understands the present invention further, and do not constitute restriction to its right.

Embodiment 1.With reference to Fig. 1.A kind of anti friction high bearing capacity micro precision bearing, it comprises upper plate 1 and following flat board 3, and the width of upper plate 1 is 1 micron; Being coated with thickness on upper plate 1 surface respectively is the nano-diamond film coating 5 and the nano aluminium oxide film coating 2 of 5 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate 1 width, and between nano-diamond film coating 5 surface and nano aluminium oxide film coating 2 surfaces is 2 nanometers apart from d; On down dull and stereotyped 3 whole surfaces, be coated with the nano SiC film coating 4 that thickness is 5 nanometers; Gap width hb between nano SiC film coating 4 and the nano-diamond film coating 5 is 2 nanometers; Filled with liquid lubricant in upper plate 1 and following dull and stereotyped 3 gap; Following dull and stereotyped 3 moving direction with respect to upper plate 1 are the nano aluminium oxide film coating 2 sensing nano-diamond film coatings 5 from upper plate 1, and upper plate 1 and down dull and stereotyped 3 certain relative movement just form anti friction high bearing capacity micro precision bearing like this.

Embodiment 2.With reference to Fig. 1.A kind of anti friction high bearing capacity micro precision bearing, it comprises upper plate 1 and following flat board 3, and the width of upper plate 1 is 1000 microns; Being coated with thickness on upper plate 1 surface respectively is the nano-diamond film coating 5 and the nano aluminium oxide film coating 2 of 10 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate 1 width, and between nano-diamond film coating 5 surface and nano aluminium oxide film coating 2 surfaces is 10 nanometers apart from d; On down dull and stereotyped 3 whole surfaces, be coated with the nano SiC film coating 4 that thickness is 10 nanometers; Gap width hb between nano SiC film coating 4 and the nano-diamond film coating 5 is 5 nanometers; Filled with liquid lubricant in upper plate 1 and following dull and stereotyped 3 gap; Following dull and stereotyped 3 moving direction with respect to upper plate 1 are the nano aluminium oxide film coating 2 sensing nano-diamond film coatings 5 from upper plate 1, and upper plate 1 and down dull and stereotyped 3 certain relative movement just form anti friction high bearing capacity micro precision bearing like this.

Embodiment 3.With reference to Fig. 1.A kind of anti friction high bearing capacity micro precision bearing, it comprises upper plate 1 and following flat board 3, and the width of upper plate 1 is 100 microns; Being coated with thickness on upper plate 1 surface respectively is the nano aluminium oxide film coating 2 of the nano-diamond film coating 5 and 7 nanometers of 6 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate 1 width, and between nano-diamond film coating 5 surface and nano aluminium oxide film coating 2 surfaces is 5 nanometers apart from d; On down dull and stereotyped 3 whole surfaces, be coated with the nano SiC film coating 4 that thickness is 8 nanometers; Gap width hb between nano SiC film coating 4 and the nano-diamond film coating 5 is 3 nanometers; Filled with liquid lubricant in upper plate 1 and following dull and stereotyped 3 gap; Following dull and stereotyped 3 moving direction with respect to upper plate 1 are the nano aluminium oxide film coating 2 sensing nano-diamond film coatings 5 from upper plate 1, and upper plate 1 and down dull and stereotyped 3 certain relative movement just form anti friction high bearing capacity micro precision bearing like this.

Embodiment 4.With reference to Fig. 1.A kind of anti friction high bearing capacity micro precision bearing, it comprises upper plate 1 and following flat board 3, and the width of upper plate is 500 microns; Being coated with thickness on upper plate 1 surface respectively is the nano-diamond film coating 5 and the nano aluminium oxide film coating 2 of 7 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate 1 width, and between nano-diamond film coating 5 surface and nano aluminium oxide film coating 2 surfaces is 7 nanometers apart from d; On down dull and stereotyped 3 whole surfaces, be coated with the nano SiC film coating 4 that thickness is 7 nanometers; Gap width hb between nano SiC film coating 4 and the nano-diamond film coating 5 is 4 nanometers; Filled with liquid lubricant in upper plate 1 and following dull and stereotyped 3 gap; Following dull and stereotyped 3 moving direction with respect to upper plate 1 are the nano aluminium oxide film coating 2 sensing nano-diamond film coatings 5 from upper plate 1, and upper plate 1 and down dull and stereotyped 3 certain relative movement just form anti friction high bearing capacity micro precision bearing like this.

Embodiment 5.With reference to Fig. 1.A kind of anti friction high bearing capacity micro precision bearing, it comprises upper plate 1 and following flat board 3, and the width of upper plate 1 is 250 microns; Being coated with thickness on upper plate 1 surface respectively is the nano-diamond film coating 5 and the nano aluminium oxide film coating 2 of 6 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate 1 width, and between nano-diamond film coating 5 surface and nano aluminium oxide film coating 2 surfaces is 8 nanometers apart from d; On down dull and stereotyped 3 whole surfaces, be coated with the nano SiC film coating 4 that thickness is 6 nanometers; Gap width h between nano SiC film coating 4 and the nano-diamond film coating 5 _bBe 4 nanometers; Filled with liquid lubricant in upper plate 1 and following dull and stereotyped 3 gap; Following dull and stereotyped 3 moving direction with respect to upper plate 1 are the nano aluminium oxide film coating 2 sensing nano-diamond film coatings 5 from upper plate 1, and upper plate 1 and down dull and stereotyped 3 certain relative movement just form anti friction high bearing capacity micro precision bearing like this.

Embodiment 6.With reference to Fig. 1.A kind of anti friction high bearing capacity micro precision bearing, it comprises upper plate 1 and following flat board 3, and the width of upper plate 1 is 750 microns; Being coated with thickness on upper plate 1 surface respectively is the nano-diamond film coating 5 and the nano aluminium oxide film coating 2 of 9 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate 1 width, and between nano-diamond film coating 5 surface and nano aluminium oxide film coating 2 surfaces is 9 nanometers apart from d; On down dull and stereotyped 3 whole surfaces, be coated with the nano SiC film coating 4 that thickness is 9 nanometers; Gap width h between nano SiC film coating 4 and the nano-diamond film coating 5 _bBe 5 nanometers; Filled with liquid lubricant in upper plate 1 and following dull and stereotyped 3 gap; Following dull and stereotyped 3 moving direction with respect to upper plate 1 are the nano aluminium oxide film coating 2 sensing nano-diamond film coatings 5 from upper plate 1, and upper plate 1 and down dull and stereotyped 3 certain relative movement just form anti friction high bearing capacity micro precision bearing like this.

Embodiment 7.In any one described anti friction high bearing capacity micro precision bearing, described fluid lubricant is that viscosity is short chain alkanes or the short-chain alcohols of 0.1cP in embodiment 1-6.

Embodiment 8.In any one described anti friction high bearing capacity micro precision bearing, described fluid lubricant is that viscosity is short chain alkanes or the short-chain alcohols of 10.0cP in embodiment 1-6.

Embodiment 9.In any one described anti friction high bearing capacity micro precision bearing, described fluid lubricant is that viscosity is short chain alkanes or the short-chain alcohols of 1.0cP in embodiment 1-6.

Embodiment 10.In any one described anti friction high bearing capacity micro precision bearing, described fluid lubricant is propane, normal butane, pentane or DMAE in embodiment 1-6.

Embodiment 11.With reference to Fig. 1-3.Anti friction high bearing capacity micro precision bearing experiment and result thereof.

The 45 steel steel discs that prepare a width in advance and be 1 millimeter, length and be 5 millimeters and thickness and be 2 millimeters are made upper plate, finish grind and polish that to make width be that 1 millimeter, length are 5 millimeters polished surface in the one side of upper plate, on this polished surface, plated a layer thickness and be 0.2 millimeter chromium film.Adopt magnetron sputtering method then, at width is that 0.5 millimeter, length are that to have plated a layer thickness on 5 millimeters the chromium film surface be the nano aluminium oxide film coating of 5 nanometers, and having plated a layer thickness on second half surface of chromium film is the nano-diamond film coating of 7 nanometers.Prepare an internal orifice dimension simultaneously and be 10 millimeters, external diameter and be 38 millimeters, thickness and be 4 millimeters 45 steel steel loops and do dull and stereotypedly down, a dull and stereotyped down toroidal surface is finish grinded and polishes, and on this toroidal surface plating to establish a layer thickness be 0.2 millimeter chromium film.Adopt magnetron sputtering method, the nano SiC film coating that a layer thickness is 7 nanometers is established in plating on the chromium film surface of steel loop.

Experiment is carried out on the little frictional testing machine of UMT-2.

It is on 10 millimeters the round pin that the upper plate that has plated coating is sticked on the testing machine diameter, and make upper plate length be positioned at dull and stereotyped down radially.The following flat board that has plated coating is contained on the main shaft of testing machine.In the experiment, round pin is static, following dull and stereotyped the rotation, and following dull and stereotyped rotating speed can be regulated in broad range.Nano-diamond film coating and the down dull and stereotyped gap width of going up the nano SiC film coating are 5 nanometers on the control upper plate, and fluid lubricant is DMAE (recording viscosity is 5cP).Record that the interface shear strength is respectively 0.1kPa, 0.5kPa, 1.5kPa between DMAE and nano aluminium oxide film coating, nano SiC film coating, nano-diamond film coating.Making down dull and stereotyped moving direction with respect to upper plate is to point to the nano-diamond film coating from the nano aluminium oxide film coating.Following this pairing dull and stereotyped and upper plate has promptly formed anti friction high bearing capacity micro precision bearing.

Adopt multiple dull and stereotyped rotating speed down in the experiment, record between bearing upper surface and lower surface and contact load and bearing upper surface friction factor.The common micro precision bearing result of calculation (formula (7), (8)) that is not coated with coating under experimental result and formula (1), (4) and the similarity condition compares.See Fig. 2 and Fig. 3.Fig. 2 and Fig. 3 show that anti friction high bearing capacity micro precision bearing has bigger bearing capacity and littler friction factor than the common micro precision bearing that is not coated with coating under similarity condition under certain operating mode.This advantage is more obvious when Sliding velocity is big between bearing upper plate and following flat board.

Claims (3)

1, a kind of anti friction high bearing capacity micro precision bearing is characterized in that, it comprises upper plate (1) and down dull and stereotyped (3), and the width of upper plate (1) is 1～1000 micron; Being coated with thickness on upper plate (1) surface respectively is the nano-diamond film coating (5) and the nano aluminium oxide film coating (2) of 5～10 nanometers, the width of two kinds of coatings respectively accounts for half of upper plate (1) width, and between nano-diamond film coating (5) surface and nano aluminium oxide film coating (2) surface is 2～10 nanometers apart from d; On down dull and stereotyped (3) whole surface, be coated with the nano SiC film coating (4) that thickness is 5～10 nanometers; Gap width h between nano SiC film coating (4) and the nano-diamond film coating (5) _bBe 2～5 nanometers; Filled with liquid lubricant in the gap of upper plate (1) and down dull and stereotyped (3); Following dull and stereotyped (3) be that nano aluminium oxide film coating (2) from upper plate (1) points to nano-diamond film coating (5) with respect to the moving direction of upper plate (1), and certain relative movement just forms bearing between upper plate (1) and time flat board (3) like this.

2, anti friction high bearing capacity micro precision bearing according to claim 1 is characterized in that, described fluid lubricant is that viscosity is short chain alkanes or the short-chain alcohols of 0.1～10.0cP.

3, anti friction high bearing capacity micro precision bearing according to claim 1 is characterized in that, described fluid lubricant is propane, normal butane, pentane or DMAE.

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