CN101391745B - Uniserial nanometer ball self-assembling method guided by slot - Google Patents
Uniserial nanometer ball self-assembling method guided by slot Download PDFInfo
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- CN101391745B CN101391745B CN2008102254717A CN200810225471A CN101391745B CN 101391745 B CN101391745 B CN 101391745B CN 2008102254717 A CN2008102254717 A CN 2008102254717A CN 200810225471 A CN200810225471 A CN 200810225471A CN 101391745 B CN101391745 B CN 101391745B
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Abstract
The invention discloses a self-assembling method of a single nanosphere guided by utilizing a groove. The method is characterized in that: firstly a base is selected; then the guiding grooves are manufactured on the surface of the base; a hydrophilic treatment is carried out on the base and then the nanospheres are coated on the base; the nanospheres are arranged on the base through adopting self-assembling and the restricting and guiding of grooves so as to realize the arrangement of single nanosphere with the same shape as the grooves; simultaneously sub areas dividing can be carried out through grooves so as to realize the different nanosphere assembling on different positions, the sub areas can not only be communicated but also can isolated so as to realize the various combination and arrangement. The method does not need complicated apparatus, has the obvious characters of low cost, high efficiency, simple process and the like and is an effective single nanosphere self-assembling method, thus providing a simple, practical and novel method for realizing the manufacturing of specially-arranged nano metal granules.
Description
Technical field
The invention belongs to technical field of micro and nano fabrication, relate to a kind of single-row nanosphere self-assembling method that utilizes the groove guiding.
Background technology
At present, nano-particle material has become the important component part of nano material.The nanosphere self-assembling technique obtains broad research in recent years, it is a kind of inexpensive and have a technology of parallel processing capability.Its main technique be will have the micelle of identical size and shape (normally spherical) be arranged on the treated smooth substrate with excellent hydrophilic, generally speaking, these micelles are random arrangement on substrate surface, according to the potential energy minimum principle, generally being combined to form hexagon arranges, also there is report to mix the assembling back and forms sizes of balls and mix and arrange, perhaps by removing the whole bag of tricks that the quadrangle that forms big ball behind the bead is arranged with the nanosphere that varies in size.After perhaps adopting the assembling of multi-layer nano ball, form complicated structure.Report is also arranged with the auxiliary self-assembling method of cylindrical, square, leg-of-mutton hole, utilize and the proportional nano particle of groove size, it can be arranged as shapes such as plum blossom shape, quadrangle, triangle as template.Above-mentioned the whole bag of tricks is all relatively complicated, and manufacturing procedure is more.And mostly arrange, arranging of single-row nanosphere do not seen that relevant research method report is arranged at a plurality of nanosphere set.
In recent years, along with developing rapidly of micro-nano process technology, the micro-measuring technology of nano material and near field, [Nature Materials 2 such as the Edwards of California Institute of Technology, 229-232] notion based on the metal nano waveguide of surface plasma has been proposed, realized on the nanometer scale yardstick, transmitting visible light signal.This breakthrough diffraction limit with important application prospect can be in the new technology of uploading the transmission of electricity magnetic signal much smaller than the space scale of wavelength, CGCM between the single-row metal nanoparticle of the different sizes of needs research, different arrangement modes, energy distribution, turn performance etc., this has proposed new challenge just for the nano particle technology of preparing.Biochemical sensitive need be carried out further investigation to the electromagnetic property between various nano particles of arranging in addition, to obtain higher sensing sensitivity; Nanosphere how to realize single-row specific configuration is arranged and is become the focus of research and difficult point.
Summary of the invention
The technical problem to be solved in the present invention is: a kind of single-row nanosphere self-assembling method that utilizes the groove guiding is provided, can realize that required specific nanosphere arranges, the conversion of studying right-angled bend performance, branch's Energy distribution and ohm decay, optical mode and the non-radiative mould of single-row metallic for needs such as nanometer waveguides provides condition and technical support, for how research is opening up new road at nanoscale realization optoelectronic integrated circuit.
The technical solution adopted for the present invention to solve the technical problems is: a kind of single-row nanosphere self-assembling method that utilizes the groove guiding is characterized in that: at first select substrate; Produce guiding groove on its surface then; Hydrophilicity-imparting treatment is carried out in substrate, and the coating nanometer ball adopts self assembly and arranges nanosphere by constraint, the guiding of groove in substrate, realizes that the single-row nanosphere consistent with the shape of groove arrange; The wherein said groove width and the degree of depth less than, or equal, or greater than the diameter of described nanosphere.
Described substrate is quartzy or K9 or silicon or zinc selenide or germanium material.
Described nanosphere is glass marble or polystyrene microsphere or polymer microballoon, and the nanosphere diameter is 50nm-7000nm.
The described groove width and the degree of depth less than, or equal, or be slightly larger than the nanosphere diameter.
Described ditch grooved profile can be rectangular channel according to the specific requirement of using, or circular, or dovetail groove, or V-shaped groove, or swallow tail shaped slot; On the one hand, not high to the processing request of groove, can adopt accomplished in many ways; Difform on the other hand groove is big to the stability influence of nanosphere.
Described trench profile can be a straight line, or curve or triangle, or polygon, or the combination of above-mentioned figure, can realize difform arrangement mode, satisfies different application demands.
Described groove bore can be consistent or be ascending variation or be descending variation and satisfy different application demands.
Described groove is to form behind dry method or wet etching by electron beam, interference lithography, or focused particle beam directly makes, or duplicates with the method for nano impression and to obtain, or makes of the method for machining.
Described groove can be realized the single-row nanosphere self assembly of multichannel by subregion control, and subregion both can communicate, also can be discrete, arrange in order to multiple independent, the combination that realize demand.
The advantage that the present invention is compared with prior art had is: the method applied in the present invention does not need complex device, have distinguishing features such as cost is low, efficient is high, technology is simple, be a kind of effective single-row nanosphere self-assembling technique, making for the nano-metal particle of realizing specific configuration provides a kind of simple and practical new method.Right-angled bend performance, branch's Energy distribution and ohm decay, the optical mode of arranging to the single-row metallic of needs such as nanometer waveguide research by the nanosphere that method of the present invention obtained provide condition and technical support with the conversion of non-radiative mould, for how research has opened up new road at nanoscale realization optoelectronic integrated circuit.
Description of drawings
Fig. 1 is that the rectangle groove guiding method that adopts width to be slightly less than nanosphere in the embodiment of the invention 1 is controlled the profile that nanosphere is arranged;
Fig. 2 adopts profile to realize the schematic diagram that the annular of nanosphere is arranged for the groove guiding of annular in the embodiment of the invention 1;
Fig. 3 is the profile that adopts vee-cut guiding control nanosphere to arrange in the embodiment of the invention 2;
Fig. 4 is that the employing profile is that leg-of-mutton groove guiding realizes the schematic diagram that the nanosphere triangle is arranged in the embodiment of the invention 2;
Fig. 5 is the profile that adopts circular groove guiding control nanosphere to arrange in the embodiment of the invention 3;
Fig. 6 is that the employing profile is that pentagonal groove guiding realizes the schematic diagram that the nanosphere pentagon is arranged in the embodiment of the invention 3;
Fig. 7 adopts the different groove combination guiding of width to realize the nanosphere specific blend that varies in size in the embodiment of the invention 4
Fig. 8 is the right-angle turning shape nanosphere realized in the embodiment of the invention 5 stereoscan photograph of arranging;
Fig. 9 is the nanosphere that utilizes groove guiding method to realize in the embodiment of the invention 5, is used for nanometer waveguide right-angled bend performance, branch's performance study schematic diagram after metallization.
The specific embodiment
Introduce the present invention in detail below in conjunction with the drawings and the specific embodiments.
Embodiment 1, realizes that the single-row nanosphere of annular distribution is arranged.
At first adopt polished silicon silicate glass sheet as substrate, forming profile with beamwriter lithography behind dry etching is ring-type, the wide 600nm that is about of section, groove depth is the rectangular channel of 400nm, and substrate is carried out hydrophilicity-imparting treatment with chemical method, be 3% with concentration then, diameter is that the monodisperse polystyrene nanosphere hydrosol 0.5 μ l of 800nm is uniformly coated on glass basic surface, solvent is slowly evaporated, behind the nano-colloid ball that the removal substrate surface adheres to, in the rectangular channel of annular distribution, form the nanosphere array.Profile as shown in Figure 1, outline drawing is as shown in Figure 2.
Embodiment 2, realize that profile is that the single-row nanosphere that triangle distributes is arranged.
Adopting K9 glass is substrate, adopt the method for interference lithography to form the lines that triangle distributes, with HF it is corroded again, because the defeated rate of all directions corrosion is inconsistent, obtaining bore at last on the K9 substrate of glass is 50nm, the V-arrangement open slot of groove depth 70nm, and substrate carried out hydrophilic treated, be 1% with concentration then, diameter is that the pipe/polyhenylethylene nano microballoon hydrosol 0.5 μ l of 50nm is uniformly coated on glass basic surface, and solvent is slowly evaporated, behind the nano-colloid ball that the removal substrate surface adheres to, in the V-shaped groove that triangle distributes, form the nanosphere array of 50nm, profile as shown in Figure 3, outline drawing is as shown in Figure 4.
Embodiment 3, realize that profile is that the single-row nanosphere that pentagon distributes is arranged.
The quartzy substrate that is is melted in employing, adopting the method making bore of machining is 8000nm, section is semicircular groove, then hydrophilic treated is carried out in substrate, is 1% with concentration then, diameter is that the borosilicate glass ball hydrosol 2.5 μ l of 7000nm are uniformly coated on substrate surface, solvent is slowly evaporated, remove the nanosphere that substrate surface adheres to after, form ball array for the pentagon profile in for circular groove in profile, profile as shown in Figure 5, outline drawing is as shown in Figure 6.
Embodiment 4, realize that the nanosphere mixing of bore 500nm, 550nm, 600nm and 250nm is arranged.
Adopt the zinc selenide material as substrate, adopt the direct method for processing of FIB, obtain connection pattern as shown in Figure 7, the centre is the groove of bore 250nm, one end is that bore is the groove of 500nm, and an other end is the horn-type opening groove, and groove width increases to 600nm gradually from 500nm.Groove depth and bore are suitable, the monodisperse polystyrene nanosphere hydrosol 0.2ml of each 1ml of the monodisperse polystyrene nanosphere hydrosol of cut-off footpath 500nm, 550nm, 600nm concentration 2% and diameter 250nm, concentration 1% mixes with ultrasonic wave, the mixing pipe/polyhenylethylene nano ball hydrosol for preparing is got 5 μ l drip to glass baseplate surface and carry out self assembly, obtain the nanosphere structure of specific arrangement after the drying at room temperature.Present embodiment adopts the different groove combination of width, and the nanosphere specific blend that the guiding realization varies in size is arranged; Outline drawing as shown in Figure 7.
Embodiment 5, realize the making of two kinds of discrete nanometer waveguide particles.
Select for use silicon materials as substrate, adopt the method for nano impression to obtain the upright groove of two components, one is that bore is the trapezoidal right-angle turning groove of 100nm, another be bore 800nm fall " T " font groove of arranging, groove depth and bore are suitable.The monodisperse polystyrene nanosphere hydrosol 0.2ml of the monodisperse polystyrene nanosphere hydrosol 1ml of cut-off footpath 100nm, concentration 2% and diameter 800nm, concentration 1% mixes with ultrasonic wave, the mixing pipe/polyhenylethylene nano ball hydrosol for preparing is got 5 μ l drip to glass baseplate surface and carry out self assembly, obtain the nanosphere structure of specific arrangement after the drying at room temperature.The stereoscan photograph that nanosphere in the right-angle turning groove is arranged as shown in Figure 8.Then, it is metallized, obtain metal nanoparticle, can adopt this structure of making respectively the right-angled bend characteristic of nanometer waveguide and the energy distribution characteristic of branched structure to be studied." T " font that falls is arranged nanoparticle research schematic diagram as shown in Figure 9.
Claims (8)
1. a single-row nanosphere self-assembling method that utilizes the groove guiding is characterized in that: at first select substrate; Produce guiding groove on its surface then; Hydrophilicity-imparting treatment is carried out in substrate, and the coating nanometer ball adopts self assembly and arranges nanosphere by constraint, the guiding of groove in substrate, realizes that the single-row nanosphere consistent with the shape of groove arrange; The wherein said groove width and the degree of depth less than, or equal, or greater than the diameter of described nanosphere.
2. a kind of single-row nanosphere self-assembling method that utilizes the groove guiding according to claim 1 is characterized in that: described substrate is quartzy or K9 or silicon or zinc selenide or germanium material.
3. a kind of single-row nanosphere self-assembling method that utilizes the groove guiding according to claim 1, it is characterized in that: described nanosphere is glass marble or polystyrene microsphere or polymer microballoon, and the nanosphere diameter is 50nm-7000nm.
4. a kind of single-row nanosphere self-assembling method that utilizes the groove guiding according to claim 1, it is characterized in that: described ditch grooved profile is a rectangular channel, or circular, or dovetail groove, or V-shaped groove, or swallow tail shaped slot.
5. a kind of single-row nanosphere self-assembling method that utilizes the groove guiding according to claim 1, it is characterized in that: described trench profile can be a straight line, or curve or triangle, or polygon, or the combination of above-mentioned figure.
6. a kind of single-row nanosphere self-assembling method that utilizes groove guiding according to claim 1 is characterized in that: described groove bore can be consistent or be ascending variation or be descending variation and satisfy different application demands.
7. a kind of single-row nanosphere self-assembling method that utilizes the groove guiding according to claim 1, it is characterized in that: described groove is to form behind dry method or wet etching by electron beam, interference lithography, or focused particle beam is directly made, or duplicate with the method for nano impression and to obtain, or make of the method for machining.
8. a kind of single-row nanosphere self-assembling method that utilizes the groove guiding according to claim 1, it is characterized in that: described groove can be realized the single-row nanosphere self assembly of multichannel by subregion control, subregion both can communicate, also can be discrete, arrange in order to multiple independent, the combination that realize demand.
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| CN104445058B (en) * | 2014-10-23 | 2017-01-25 | 北京科技大学 | Orderly assembling method for micro-nano composite system of PS small ball and gold nano-particles |
| CN109553063B (en) * | 2017-09-26 | 2023-09-22 | 中国科学院化学研究所 | Method for one-dimensional co-assembly of micro-particles and/or nano-particles with different particle sizes, substrate and application |
| CN109031498B (en) * | 2018-08-20 | 2020-10-13 | 武汉华星光电半导体显示技术有限公司 | Method for preparing ultrathin polarizer by self-assembly method, ultrathin polarizer and display panel |
| CN111829990B (en) * | 2020-07-24 | 2021-09-21 | 江苏致微光电技术有限责任公司 | LSPR (localized surface plasmon resonance) reflective biosensor chip, and preparation method, recycling method and application thereof |
| CN113044851B (en) * | 2021-03-10 | 2022-10-11 | 北京理工大学 | Method for preparing micro-nano two-stage structure with uniformly distributed multi-angle nano-columns |
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