CN101387489A - High precision micro displacement detection device for demarcating machinery deformation amount and measurement method thereof - Google Patents
High precision micro displacement detection device for demarcating machinery deformation amount and measurement method thereof Download PDFInfo
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Abstract
The invention relates to a device for detecting mechanical micrometric displacement and a method for measuring the same, in particular to a high precision micrometric displacement detection device for labeling the mechanical micro-variation of a special micrometric displacement sensor. An electric analyzing part consists of a shell, a rectification voltage stabilizer, a phase discriminator, a high frequency oscillator, an analog-digital converter, a logic processor, a micrometric displacement display, an inductive micrometric displacement sensor and the like. A mechanical analyzing part consists of a mechanical pedestal part, a high multiplying factor speed reducer, a micrometric displacement generating part and the like. When the measurement is started, the high multiplying factor speed reducer is rocked and rotated to modulate a system to the zero displacement, the displacement variation of the rotation angle of a crank plate is changed from the range of between delta phi below zero and delta phi into the range of between delta L below zero and delta L, and is used as the mechanical input quantity of the special micrometric displacement sensor and detection touch iron of the inductive micrometric displacement sensor through a correlative transmission device acting on two ends of the special micrometric displacement sensor. The device has the advantages of simple structure, strong reliability, high sensitivity and long service life.
Description
Technical field
The present invention relates to a kind of mechanical micrometric displacement pick-up unit and measuring method thereof, particularly relate to a kind of high-precision micro displacement amount detecting device and measuring method thereof that is used to extraordinary micro-displacement sensor to demarcate mechanical little deformation quantity.
Background technology
Up to the present the special detection device of demarcating machinery deformation amount, does not also have special technical standard and product.
1, application and performance
Purpose to this high-precision micro displacement amount detecting device design invention is in order to give an important technology parameter of special-purpose micro-displacement sensor: the machinery input displacement of sensitivity provides a kind of caliberating device and measuring method thereof of demarcating the mechanical stress deformation quantity.
2, the classic method of measurement mechanical displacement is " stress displacement " detection method
Traditional resistance-strain chip " stress deformation displacement " detection method is a kind ofly to utilize the resistance strain gage sensor to stick on to have on the long-pending and standard stress length standard metallic object in standard section, is to be used for measuring method and the device that the strain displacement amount takes place when being subjected to elastic stress the steel body specially.Because object to be detected is subjected to the effect of external force, will produce corresponding deformation, " stress deformation displacement " pick-up unit just can be measured the size that external force acts on steel structure elastic stress indirectly.
The measuring principle of traditional " resistance-strain chip stress deformation micrometric displacement amount detecting device " is: the pith of this method is to accept (stretching) standard stress module, this acceptance (stretching) standard stress module is made up of a reference measurement assembly and a detected assembly, detected assembly is the target that detects, and the reference measurement assembly is the benchmark that detects reference.Adopt the installation method that the metal substrate of reference measurement assembly is parallel with the metal substrate of detected assembly and connect, be fixed on one can produce (stretching) standard stress pedestal above, (stretching) stress of this standard.The function of reference measurement components wherein: on the norm metal body substrate of standard unit's sectional area and length, install resistance-strain chip strain gauge and corresponding circuit, owing to the condition of (stretching) Young modulus that is installed in reference measurement part metals substrate is known, when the metal substrate of detected material body portion is subjected to the effect of 1/2 (stretching) standard external force, the reference part metal substrate also is subjected to the effect of 1/2 (stretching) standard external force, and wherein the stress of the unit cross-sectional area of detected mechanical metal substrate and unit length will cause mechanical metal substrate that corresponding retractable variable takes place.The resistivity one of top foil gauge resistive conductor regularly, its resistance value is directly proportional with the length of resistive conductor, be inversely proportional to sectional area, because after this resistance strain sensor connects with certain circuit form, by the firm surface measurements that is closely sticked on the norm metal substrate.Under the effect of (stretching) standard external force, this is by the effect size of the resistance strain sensor of firmly closely pasting along with 1/2 (stretching) standard external force, corresponding micromechanics geometric deformation also can take place, or elongation attenuates, or cripetura chap, under the cooperation of external circuit, produce the voltage output of corresponding analog variation.According to the physical relation of the resistance-strain chip strain gauge output voltage of (stretching) Young modulus correspondence, just can measure indirectly, its object to be detected metal substrate under the effect of (stretching) standard external force, the size of its elastic stress deformational displacement amount.
Conventional apparatus has the history of nearly three more than ten years from its birth development till now, and under desirable environmental baseline, reference part presents the external characteristics of good output, thereby foil gauge type reference part is employed in some fields.Because reference part is that what to be adopted by foil gauge type sensor material is semiconductor material, its basic physical characteristics, weakness is as follows:
● the core of the resistance strain-gauge transducer of reference measurement components is that semi-conductive silicon synthetic material is made, and its temperature is had higher sensitivity, therefore is not suitable for using in the bigger occasion of temperature variation span.
● the resistance strain gage sensor of reference measurement components is that semiconductor material is synthetic made, and its mechanical-stretching life-span is very limited, and mission life little and half a year under continuously dynamic operating mode, precision changes greatly.Even reference part is identical with the employed metal material lot number of detected part, also can cause the not high of measurement result precision.
● because the gap of the employed metal substrate material charge number of reference measurement components and detected components, the difference that causes (stretching) Young modulus of material reality, the stress that the reason device produces, cause the deformation quantity of reference part and detected part that the error that can't evade will take place, this error also is cumbersome on system handles, causes the reliability of test data on the weak side.
● reference measurement components and the employed metallic object of detected components all produce the influence of component to system stress, cause the increasing of system stress, cause the influence of the stress that strengthens again to system mechanics, cause the corresponding deformation quantity of its system mechanics strain that the error that can't evade, its measuring accuracy decline also will take place.
Summary of the invention
The present invention is not owing to there be the damping of the metal substrate of reference measurement components to the apparatus system mechanical stress, and the influence of not having component, the absolute micrometric displacement that makes system mechanics produce just can directly be demarcated, thereby has improved the precision that the absolute micrometric displacement amount of machinery is demarcated greatly.
Goal of the invention is achieved in that the high-precision micro displacement amount detecting device is made up of electrical analysis part and sizing part.
1, electrical analysis partly comprises: I is electric casing; P is the 220V/50HZ AC power, and input partly links to each other with M as M, provides electric energy to system; M is the internal power supply rectifying pressurizer, its function is that the AC energy that P provides is converted to the galvanic current energy, various piece as the J phase discriminator of DC voltage input and whole electrical analysis system, K high frequency oscillator, X analog to digital converter, W logic processor, N micrometric displacement amount display, SL inductance type micro-displacement sensor is joined, so that stable dc power supply to be provided, guarantee the energy of various piece required consumption when operate as normal; SL is the inductance type micro-displacement sensor, and its function is the mechanical micrometric displacement amount that sizing part is produced to be converted to electric variable quantity and as the output of SL, the input as the J part partly is connected with J again; S1 is that iron is touched in the detection among the inductance type micro-displacement sensor SL, directly the micrometric displacement pedestal with the sizing part contacts, when being subjected to the extruding of micrometric displacement F, iron S1 is touched in detection will produce displacement in SL inductance type micro-displacement sensor, change the response of inductance type micro-displacement sensor SL to high-frequency signal, make the response that the output response S1 of SL sensor changes at micrometric displacement, link to each other with J as the input of J; J is a phase discriminator, and SL institute response frequency amount is converted to the voltage transformation amount, links to each other with K; K is a high frequency oscillator, for the SL sensor provides necessary condition of work, links to each other with X; X is an analog to digital converter, and SL response simulation voltage is converted to digital quantity, links to each other with W as the input of W; W is a logic processor, carries out digital signal is carried out pre-service, is connected with N, and N is a micrometric displacement amount display, as the analysis result terminal, shows the quantized value of its micrometric displacement.
2, sizing partly comprises: this part is made up of three parts such as mechanical pedestal part, high magnification speed reduction unit and micrometric displacement generating units.E is a mechanical pedestal, and all mounted thereto of the various piece of sizing part adopts the high rigidity steel made, and the stability of its very good material is arranged; E1 and e2 are the mechanical pedestal pin, can carry out height adjustment in the little weight range, and the level that has well guaranteed the sizing part is with steady; C is with reference to the sliding seat base, be fastened on the mechanical pedestal of E by three set bolts, for A and B two parts provide stable, accurately, stationary platform reliably, thereby constitute the mechanical pedestal part.A is a reference seat base, is the fixing position of reference edge of detected sensor Sn, can be fixed on reliably with reference on the sliding seat base C, divides with mechanical pedestal part to keep good reference; B is a micrometric displacement sliding seat base, is fixed on the D, makes the benchmark of slide rail and D keep fine consistance; D is a slide rail holder base, well is fixed on reference on the sliding seat base C; E is the holder base of (SL inductance type micro-displacement sensor), and is closely fixing with D; S1 is that iron is touched in the detection among the inductance type micro-displacement sensor SL, directly contacts with the micrometric displacement that sizing is partly produced, and when detection is touched iron S1 and is subjected to the extruding of micrometric displacement F, will produce displacement in SL inductance type micro-displacement sensor; F touches iron S1 with the detection in the SL inductance type micro-displacement sensor to contact for sampling seat base; G is with the core hookup, is used for fixing the connection that connects the high magnification speed reduction unit, and wherein g1 and g2 are the set bolt with the core hookup, thereby constitutes the group parts that micrometric displacement produces; H1 among the high magnification speed reduction unit JS is the crank dish, and h2 is a worm and gear, and h3 is that reduction gearing, a h4 are the secondary speed-reducing gear, thereby forms the group parts of JS high magnification speed reduction unit.Sn1 is tested extraordinary micro-displacement sensor, and Sa-1 and Sb-1 are the test side of tested extraordinary micro-displacement sensor Sn1, and a1 and b1 are the set bolt of detected extraordinary micro-displacement sensor Sn1.
3, a kind of detection method that produces mechanical micrometric displacement variable quantity, its feature with: at first the crank dish h1 among the high magnification speed reduction unit JS of this device is adjusted in rotation, micrometric displacement sliding seat base B is adjusted to the center of micrometric displacement.Below again will be for treating measured extraordinary micro-displacement sensor Sn1, above reference seat base A that is placed in this device from top to down and the micrometric displacement sliding seat base B, again with fastening bolt a1 and b1 with extraordinary micro-displacement sensor Sn1 closely steadily be fixed on reference seat base A and micrometric displacement sliding seat base B above.Again below with inductance type micro-displacement sensor SL correct be fixedly mounted on mechanical pedestal E after, the detection among the inductance type micro-displacement sensor SL being touched iron S1 adjustment joins with the basic F of sampling seat again, open the power switch of electrical analysis part, make its total system enter stable duty fully.
The sizing system is achieved in that when measuring beginning the production process of linear micrometric displacement amount that ± ⊿ L takes place between reference seat base A and the micrometric displacement sliding seat base B, shake the crank dish h1 that rotates among the high magnification speed reduction unit JS with suitable power, this moment, crank dish h1 rotation drove worm and gear h2, drive reduction gearing h3 and secondary speed-reducing gear h4 again successively, the mechanical angle displacement of rotational transform on a large scale is converted to by high magnification speed reduction unit JS can be so that micrometric displacement sliding seat base B, the basic F of sampling seat, produce straight-line mechanical micrometric displacement amount with core hookup G and associated extension bar
When external force acted on crank dish h1 among the high magnification speed reduction unit JS, the crank dish h1 among the JS can produce the variable quantity that turns clockwise and change or be rotated counterclockwise
Angular displacement, crank dish h1 maximum changing range:
Between, this
Variable quantity acts on the slide rail at link to each other F, G two ends, and passes to micrometric displacement sliding seat base B by reduction gearing h3 of worm and gear h2 drive and secondary speed-reducing gear h4, makes micrometric displacement sliding seat base B take place
The micrometric displacement amount, this maximum micrometric displacement amount
Because reference seat base A and pedestal C closely are fixed on the holder base E, and there is not micrometric displacement to take place, the angular displacement variable quantity that makes this rotation
Be converted to the micrometric displacement amount
Act on the sampling two ends of extraordinary micro-displacement sensor Sn1 by reference seat base A and micrometric displacement sliding seat base B, take place between reference seat base A and the micrometric displacement sliding seat base B
Linear micrometric displacement amount as the mechanical input quantity of extraordinary micro-displacement sensor Sn1.
The electrical analysis system is to taking place between reference seat base A and the micrometric displacement sliding seat base B
The measuring process of linear micrometric displacement amount:
When measuring beginning, shake the crank dish h1 among the rotation high magnification speed reduction unit JS, crank dish h1 rotation drives worm and gear h2, reduction gearing h3 and secondary speed-reducing gear h4 one by one, with the mechanical angle displacement by high magnification speed reduction unit JS make micrometric displacement sliding seat base B, the basic F of sampling seat, produce straight line machinery micrometric displacement amount with core hookup G and associated extension bar.The basic F of sampling seat is fixed together with the slide rail shaft portion, and inductance type micro-displacement sensor SL is installed on the holder base E, and the detection of inductance type micro-displacement sensor SL is touched iron S1 and adjusted to a basic F that samples and suitably touch mutually.Between reference seat base A and micrometric displacement sliding seat base B, take place
Linear micrometric displacement amount the time, under the driving of high magnification speed reduction unit JS, also with regard to make the detection of the basic F compressing of seat inductance type micro-displacement sensor SL touch iron S1 issue looks in the retroaction of interior pressing spring should
Linear micrometric displacement variable quantity.It is important component part among the inductance type micro-displacement sensor SL that iron S1 is touched in detection, and it is the magnetic core in the telefault among the inductance type micro-displacement sensor SL, and this magnetic core is surveyed exactly and touched iron S1.Inductance type micro-displacement sensor SL is fixed on the holder base E, so telefault also is positioned among the SL, touches iron S1 when the detection of magnetic core and takes place
Linear micrometric displacement variable quantity the time, linearity also takes place in the inductance among the inductance type micro-displacement sensor SL
The response change of (inductance variable quantity).Inductance among this inductance type micro-displacement sensor SL partly links to each other with high frequency oscillator K with the phase discriminator J of electrical analysis system by certain electric connecting mode, finishes iron S1 generation is touched in the detection of magnetic core
Linear micrometric displacement variable quantity the time, the inductance that converts among the SL takes place linear
The variation of inductance value occurs as again
The variable quantity of aanalogvoltage, and as the input of analog to digital converter X, the function of analog to digital converter X be finish with
Analog voltage amount be converted to amount of digital information
By logic processor W, carry out the digital signal logic analysis and handle, on micrometric displacement amount display N, show at last.Thereby finish the micrometric displacement amount
Generation,
Analog voltage amount to amount of digital information
Conversion and the demonstration of the analysis result of terminal.
The invention has the advantages that: 1, this device can directly produce the variable quantity of the linear micrometric displacement of high-accuracy mechanical, and the computing method that need not employing machinery (stretching) Young modulus are calculated the variable quantity of mechanical linear micrometric displacement indirectly.2, this device is to adopt high-precision inductance type micro-displacement sensor to detect to the monitoring of the mechanical linear micrometric displacement variable quantity of produce sampling, to the micrometric displacement detection side to the induction that very strong displacement vector is arranged; 3, highly sensitive: compare with the measuring accuracy that resistance-type stress reference mode is compared, can be to the grade of measuring accuracy raising greater than a quantity; 4, response speed is fast: because the responsive part quality of sampling is less, frequency response speed is fast; 5, long working life: the continuous working life-span is not less than 1 year; 6, environmental compatible is good: very strong antijamming capability is arranged, good Electro Magnetic Compatibility is arranged; 8, from low in energy consumption: the self-heating influence is minimum; 9, simple in structure: just with Installation and Debugging and maintenance.
Description of drawings
Fig. 1: high-precision micro displacement amount detecting device schematic diagram;
Fig. 2: the high-precision micro displacement amount detecting device describes synoptic diagram in detail;
Embodiment
Embodiment:
Implement structure: be used for the demarcating machinery deformation amount the high-precision micro displacement amount detecting device basic design philosophy as depicted in figs. 1 and 2, among the figure high-precision micro displacement amount detecting device by electrical analysis part and sizing part formed.
1, electrical analysis partly comprises: I is electric casing; P is the 220V/50HZ AC power, and input partly links to each other with M as M, provides electric energy to system; M is the internal power supply rectifying pressurizer, its function is that the AC energy that P provides is converted to the galvanic current energy, import as DC voltage, link to each other with the various piece of the J phase discriminator of whole electrical analysis system, K high frequency oscillator, X analog to digital converter, W logic processor, N micrometric displacement amount display, SL inductance type micro-displacement sensor, so that stable dc power supply to be provided, guarantee the energy of various piece required consumption when operate as normal; SL is the inductance type micro-displacement sensor, and its function is that the micrometric displacement amount that the sizing part is produced is converted to the output of electric weight as SL, as the input of J part, partly is connected with J again; S1 is that SL is that iron is touched in detection in the inductance type micro-displacement sensor, directly contact with the micrometric displacement that the sizing part is produced, when detection is touched iron S1 and is subjected to the extruding of micrometric displacement F, to in SL inductance type micro-displacement sensor, produce displacement, change is to the response of high frequency, make the response that the output response S1 of SL sensor changes at micrometric displacement, link to each other with J as the input of J; J is a phase discriminator, and SL institute response frequency amount is converted to the voltage transformation amount, links to each other with K; K is a high frequency oscillator, for the SL sensor provides necessary condition of work, links to each other with X; X is an analog to digital converter, and SL response simulation voltage is converted to digital quantity, links to each other with W as the input of W; W is a logic processor, carries out digital signal is carried out pre-service, is connected with N, and N is a micrometric displacement amount display, as the analysis result terminal, shows the quantized value of its micrometric displacement.
2, sizing partly comprises: this part is made up of three parts such as mechanical pedestal part, high magnification speed reduction unit and micrometric displacement generating units.E is a mechanical pedestal, and all mounted thereto of the various piece of sizing part adopts glass hard steel made, and the stability of its very good material is arranged; E1 and e2 are the mechanical pedestal pin, can carry out height adjustment in the little weight range, can well guarantee the level and the smoothness of sizing part; C is with reference to the sliding seat base, be fastened on the mechanical pedestal of E by three set bolts, for A and B partly provide stable, accurately, stationary platform reliably, thereby constitute the mechanical pedestal part.A is a reference seat base, is the fixing position of reference edge of detected sensor Sn, can be fixed on reliably with reference on the sliding seat base C, divides with mechanical pedestal part to keep good reference; B is a micrometric displacement sliding seat base, is fixed on the D, makes the benchmark of slide rail and D keep fine consistance; D is a slide rail holder base, well is fixed on reference on the sliding seat base C; E is the holder base of (SL inductance type micro-displacement sensor), and is closely fixing with D; S1 is that iron is touched in the detection among the inductance type micro-displacement sensor SL, directly contacts with the micrometric displacement that sizing is partly produced, and when detection is touched iron S1 and is subjected to the extruding of micrometric displacement F, will produce displacement in SL inductance type micro-displacement sensor; F touches iron S1 with the detection in the SL inductance type micro-displacement sensor to contact for sampling seat base; G is with the core hookup, is used for fixing the connection that connects the high magnification speed reduction unit, and wherein g1 and g2 are the set bolt with the core hookup, thereby constitutes the micrometric displacement generating unit; H1 among the high magnification speed reduction unit JS is the crank dish, and h2 is a worm and gear, and h3 is that reduction gearing, a h4 are the secondary speed-reducing gear, thereby forms JS high magnification speed reduction unit.Sn1 is tested extraordinary micro-displacement sensor, and Sa-1 and Sb-1 are the test side of tested extraordinary micro-displacement sensor Sn1, and a1 and b1 are the set bolt of detected extraordinary micro-displacement sensor Sn1.
3, a kind of detection method that produces mechanical micrometric displacement variable quantity is characterized in that: rotate the crank dish h1 among the high magnification speed reduction unit JS that adjusts this device, micrometric displacement sliding seat base B is adjusted to the center of micrometric displacement.To be tested extraordinary micro-displacement sensor Sn1 again, above reference seat base A that is placed in this device from top to down and the micrometric displacement sliding seat base B, with fastening bolt a1 and b1 with extraordinary micro-displacement sensor Sn1 closely be fixed on reference seat base A and micrometric displacement sliding seat base B above.With inductance type micro-displacement sensor SL correct be installed in mechanical pedestal E after, the detection among the inductance type micro-displacement sensor SL being touched iron S1 adjustment touches mutually with the basic F of sampling seat again, open the power switch of electrical analysis part, make its total system enter stable duty fully.
To and the sizing system to the production process of linear micrometric displacement amount that ± ⊿ L takes place between reference seat base A and the micrometric displacement sliding seat base B: when measuring beginning, shake the crank dish h1 that rotates among the high magnification speed reduction unit JS with suitable power, this moment, crank dish h1 rotation drove worm and gear h2, drive reduction gearing h3 and secondary speed-reducing gear h4 again successively, the mechanical angle displacement of rotational transform on a large scale is converted to and makes micrometric displacement sliding seat base B by high magnification speed reduction unit JS, the basic F of sampling seat, produce straight-line mechanical micrometric displacement amount with core hookup G and associated extension bar.
When the inner rotary masterpiece is used for the crank dish h1 of high magnification speed reduction unit JS, the crank dish h1 among the JS can turn clockwise the variable quantity that changes or be rotated counterclockwise ±
The angular displacement of Φ, this variable quantity ±
Φ is by reduction gearing h3 of worm and gear h2 drive and secondary speed-reducing gear h4, act on the slide rail at link to each other F, G two ends, and pass to micrometric displacement sliding seat base B, make micrometric displacement sliding seat base B that the micrometric displacement amount of ± ⊿ L take place, because reference seat base A and pedestal C closely are fixed on the holder base E, and do not have micrometric displacement to take place, make the variable quantity of this rotation ±
The angular displacement of Φ be converted to the micrometric displacement amount ±
L acts on the sampling two ends of extraordinary micro-displacement sensor Sn1 by reference seat base A and micrometric displacement sliding seat base B, take place between reference seat base A and the micrometric displacement sliding seat base B ±
The linear micrometric displacement amount of L is as the mechanical input quantity of extraordinary micro-displacement sensor Sn1.
To and the electrical analysis system to take place between reference seat base A and the micrometric displacement sliding seat base B ±
The measuring process of the linear micrometric displacement amount of L:
When measuring beginning, shake the crank dish h1 among the rotation high magnification speed reduction unit JS, crank dish h1 rotation drives worm and gear h2, reduction gearing h3 and secondary speed-reducing gear h4 one by one, with the mechanical angle displacement by high magnification speed reduction unit JS make micrometric displacement sliding seat base B, the basic F of sampling seat, produce straight line machinery micrometric displacement amount with core hookup G and associated extension bar.The basic F of sampling seat is fixed together with the slide rail shaft portion, and inductance type micro-displacement sensor SL is installed on the holder base E, and the detection of inductance type micro-displacement sensor SL is touched iron S1 and adjusted to a basic F that samples and suitably touch mutually.Between reference seat base A and micrometric displacement sliding seat base B, take place ±
During the linear micrometric displacement amount of L, under the driving of high magnification speed reduction unit JS, also take place with regard to making the detection of the basic F compressing of seat inductance type micro-displacement sensor SL touch iron S1 ±
The linear micrometric displacement variable quantity of L.It is important component part among the inductance type micro-displacement sensor SL that iron S1 is touched in detection, is the magnetic core in the telefault among the inductance type micro-displacement sensor SL, and this magnetic core is just surveyed and touched iron S1.Inductance type micro-displacement sensor SL is fixed on the holder base E, so telefault also is positioned among the SL, touches iron S1 when the detection of magnetic core and takes place
Linear micrometric displacement variable quantity the time, the inductance among the inductance type micro-displacement sensor SL also takes place
Variation.Inductance among this inductance type micro-displacement sensor SL partly links to each other with high frequency oscillator K with the phase discriminator J of electrical analysis system by certain electric connecting mode, finishes iron S1 generation is touched in the detection of magnetic core
Linear micrometric displacement variable quantity the time, convert to
Analog voltage amount, as the input of analog to digital converter X, analog to digital converter X finish with
Analog voltage amount be converted to amount of digital information
By logic processor W, carry out the digital signal logic analysis and handle, on micrometric displacement amount display N, show at last.Thereby finish whole micrometric displacement amount
Generation,
Analog voltage amount to amount of digital information
Conversion and the demonstration of the analysis result of terminal.
If this device has three kinds of duties.
State 1:(state 1 is defined as no micrometric displacement state, both:
) make external force rotation regulate crank dish h1 among the high magnification speed reduction unit JS of this device, micrometric displacement sliding seat base B is adjusted to the center of micrometric displacement.To be tested extraordinary micro-displacement sensor Sn1 again, steadily be installed in the reference seat base A of this device and micrometric displacement sliding seat base B above, by fastening bolt that it is closely fixing.Inductance type micro-displacement sensor SL by correct firm be installed in mechanical pedestal E after, the detection among the inductance type micro-displacement sensor SL being touched iron S1 adjustment touches mutually with the basic F of sampling seat again, open the power switch of electrical analysis part, make its total system enter stable duty fully, and electrical analysis is partly adjusted to the original state of zero micrometric displacement.Do not rotate the crank dish h1 among the high magnification speed reduction unit JS, the rotation angle displacement of the crank dish h1 of this moment is
(angular displacement be zero), therefore to and the reference seat base A of sizing system and micrometric displacement sliding seat base B between the micrometric displacement amount does not take place yet, linear micrometric displacement amount at this moment
It is pith among the inductance type micro-displacement sensor SL that iron S1 is touched in detection, is the magnetic core in the telefault among the SL, and this magnetic core is just surveyed and touched iron S1.Inductance type micro-displacement sensor SL is fixed on the holder base E, so telefault also is positioned among the SL, touches iron S1 when the detection of magnetic core and linear micrometric displacement variable quantity does not take place (promptly
The time), the also nonevent variation of the inductance among the inductance type micro-displacement sensor SL is (that is:
).Inductance among this inductance type micro-displacement sensor SL partly links to each other with high frequency oscillator K with the phase discriminator J of electrical analysis system by certain electric connecting mode, finish when the detection of magnetic core touched iron S1 linear micrometric displacement variable quantity does not take place (
The time), and convert to
Analog voltage amount, as the input of analog to digital converter X, analog to digital converter X finish with
The aanalogvoltage variable quantity is converted to the numerical information variable quantity
Passing through logic processor W, the comparison process of carrying out the logic analysis of digital signal finally shows on micrometric displacement amount display N.Thereby finish whole micrometric displacement amount
Generation,
Analog voltage amount to amount of digital information
Conversion and terminal to the demonstration of the analysis result of no micrometric displacement.
State 2:(state 2 is defined as stretching displacement and is changed to positive micrometric displacement state, both:
) when measuring beginning, shake the crank dish h1 that rotates among the high magnification speed reduction unit JS with suitable power, this moment, crank dish h1 rotation drove worm and gear h2, drive reduction gearing h3 and secondary speed-reducing gear h4 again successively, with the mechanical angle displacement of rotational transform on a large scale be converted to by high magnification speed reduction unit JS and make micrometric displacement sliding seat base B, the basic F of sampling seat, produce the positive micrometric displacement amount of straight-line machinery with core hookup G and associated extension bar.When the inner rotary masterpiece was used for the crank dish h1 of high magnification speed reduction unit JS, the crank dish h1 among the JS turned clockwise, and the rotation angle displacement of crank dish h1 is
(angular displacement is big and zero), by reduction gearing h3 of worm and gear h2 drive and secondary speed-reducing gear h4, act on the F that links to each other, on the slide rail at G two ends, and pass to micrometric displacement sliding seat base B, because reference seat base A and pedestal C closely are fixed on the holder base E, and do not have micrometric displacement to take place, make micrometric displacement sliding seat base B and reference seat base A that the trend of leaving gradually be arranged, begin to take place gradually the variation of+⊿ L micrometric displacement amounts this moment, therefore to and the reference seat base A of sizing system and micrometric displacement sliding seat base B between the variable quantity of the micrometric displacement of draw direction, linear micrometric displacement amount at this moment also take place
Be defined as positive micrometric displacement duty.Act on the sampling two ends of extraordinary micro-displacement sensor Sn1 by reference seat base A and micrometric displacement sliding seat base B, take place between reference seat base A and the micrometric displacement sliding seat base B
Linear micrometric displacement amount as the input quantity of the mechanical stretching micrometric displacement of extraordinary micro-displacement sensor Sn1.Must define the quantized value with the mechanical stretching micrometric displacement input quantity that is added to extraordinary micro-displacement sensor Sn1 is to carry out electrochemical signal Processing by the electrical analysis system.To and the electrical analysis system to taking place between reference seat base A and the micrometric displacement sliding seat base B
The measuring process of linear micrometric displacement amount: when measuring beginning, shake the crank dish h1 among the rotation high magnification speed reduction unit JS, crank dish h1 rotation drives worm and gear h2, reduction gearing h3 and secondary speed-reducing gear h4 one by one, with the mechanical angle displacement by high magnification speed reduction unit JS make micrometric displacement sliding seat base B, the basic F of sampling seat, produce straight line machinery micrometric displacement amount with core hookup G and associated extension bar.The basic F of sampling seat is fixed together with the slide rail shaft portion, and inductance type micro-displacement sensor SL is installed on the holder base E, and the detection of inductance type micro-displacement sensor SL is touched iron S1 and adjusted to a basic F that samples and suitably touch mutually.Between reference seat base A and micrometric displacement sliding seat base B, take place
Linear micrometric displacement amount the time, under the driving of high magnification speed reduction unit JS, also just make the detection of the basic F compressing of seat inductance type micro-displacement sensor SL touch iron S1 and take place
Linear micrometric displacement variable quantity.It is important component part among the inductance type micro-displacement sensor SL that iron S1 is touched in detection, is the magnetic core in the telefault among the inductance type micro-displacement sensor SL, and this magnetic core is just surveyed and touched iron S1.Inductance type micro-displacement sensor SL is fixed on the holder base E, so telefault also is positioned among the SL, touches iron S1 when the detection of magnetic core and takes place
Linear micrometric displacement variable quantity the time, the inductance among the inductance type micro-displacement sensor SL also takes place
Variation.Inductance among this inductance type micro-displacement sensor SL partly links to each other with high frequency oscillator K with the phase discriminator J of electrical analysis system by certain electric connecting mode, finishes iron S1 generation is touched in the detection of magnetic core
Linear micrometric displacement variable quantity the time, convert to
Analog voltage amount, as the input of analog to digital converter X, analog to digital converter X finish with
Analog voltage amount be converted to amount of digital information
By logic processor W, carry out the digital signal logic analysis and handle, on micrometric displacement amount display N, show at last.Thereby finish whole micrometric displacement amount
Generation,
Analog voltage amount to amount of digital information
Conversion and the demonstration of the terminal analysis result that aligns micrometric displacement.
State 3:(state 3 is defined as and shortens change in displacement for bearing the micrometric displacement state, both:
) when measuring beginning, shake the crank dish h1 that rotates among the high magnification speed reduction unit JS with suitable power, this moment, crank dish h1 rotation drove worm and gear h2, drive reduction gearing h3 and secondary speed-reducing gear h4 again successively, with the mechanical angle displacement of rotational transform on a large scale be converted to by high magnification speed reduction unit JS and make micrometric displacement sliding seat base B, the basic F of sampling seat, produce the positive micrometric displacement amount of straight-line machinery with core hookup G and associated extension bar.When the inner rotary masterpiece was used for the crank dish h1 of high magnification speed reduction unit JS, the crank dish h1 among the JS turned clockwise, and the rotation angle displacement of crank dish h1 is
(angular displacement is big and zero), by reduction gearing h3 of worm and gear h2 drive and secondary speed-reducing gear h4, act on the slide rail at link to each other F, G two ends, and pass to micrometric displacement sliding seat base B, because reference seat base A and pedestal C closely are fixed on the holder base E, and do not have micrometric displacement to take place, and make micrometric displacement sliding seat base B and reference seat base A that the trend of leaving gradually be arranged, begin to take place gradually this moment
The variation of micrometric displacement amount, therefore to and the reference seat base A of sizing system and micrometric displacement sliding seat base B between the variable quantity of the micrometric displacement of draw direction, linear micrometric displacement amount at this moment also take place
Be defined as positive micrometric displacement duty.Act on the sampling two ends of extraordinary micro-displacement sensor Sn1 by reference seat base A and micrometric displacement sliding seat base B, take place between reference seat base A and the micrometric displacement sliding seat base B
Linear micrometric displacement amount as the input quantity of the mechanical stretching micrometric displacement of extraordinary micro-displacement sensor Sn1.Must define the quantized value with the mechanical stretching micrometric displacement input quantity that is added to extraordinary micro-displacement sensor Sn1 is to carry out electrochemical signal Processing by the electrical analysis system.To and the electrical analysis system to taking place between reference seat base A and the micrometric displacement sliding seat base B
The measuring process of linear micrometric displacement amount: when measuring beginning, shake the crank dish h1 among the rotation high magnification speed reduction unit JS, crank dish h1 rotation drives worm and gear h2, reduction gearing h3 and secondary speed-reducing gear h4 one by one, with the mechanical angle displacement by high magnification speed reduction unit JS make micrometric displacement sliding seat base B, the basic F of sampling seat, produce straight line machinery micrometric displacement amount with core hookup G and associated extension bar.The basic F of sampling seat is fixed together with the slide rail shaft portion, and inductance type micro-displacement sensor SL is installed on the holder base E, and the detection of inductance type micro-displacement sensor SL is touched iron S1 and adjusted to a basic F that samples and suitably touch mutually.Between reference seat base A and micrometric displacement sliding seat base B, take place
Linear micrometric displacement amount the time, under the driving of high magnification speed reduction unit JS, also just make the detection of the basic F compressing of seat inductance type micro-displacement sensor SL touch iron S1 and take place
Linear micrometric displacement variable quantity.It is important component part among the inductance type micro-displacement sensor SL that iron S1 is touched in detection, is the magnetic core in the telefault among the inductance type micro-displacement sensor SL, and this magnetic core is just surveyed and touched iron S1.Inductance type micro-displacement sensor SL is fixed on the holder base E, so telefault also is positioned among the SL, touches iron S1 when the detection of magnetic core and takes place |
Linear micrometric displacement variable quantity the time, the inductance among the inductance type micro-displacement sensor SL also takes place
Variation.Inductance among this inductance type micro-displacement sensor SL partly links to each other with high frequency oscillator K with the phase discriminator J of electrical analysis system by certain electric connecting mode, finishes iron S1 generation is touched in the detection of magnetic core
Linear micrometric displacement variable quantity the time, convert to
Analog voltage amount, as the input of analog to digital converter X, analog to digital converter X finish with
Analog voltage amount be converted to amount of digital information
By logic processor W, carry out the digital signal logic analysis and handle, on micrometric displacement amount display N, show at last.Thereby finish whole micrometric displacement amount
Generation,
Analog voltage amount to amount of digital information
Conversion and terminal to the demonstration of the analysis result of negative micrometric displacement.
The theory structure block diagram that is used for the high-precision micro displacement amount detecting device as shown in Figure 2, by sizing part and electrical analysis part formed.
The composition of sizing part: this part is made up of three parts such as mechanical pedestal part, high magnification speed reduction unit and micrometric displacement generating units.E is a mechanical pedestal, all mounted thereto of the various piece of machinery; E1 and e2 are the mechanical pedestal pin; C is with reference to the sliding seat base, and E is a mechanical pedestal; A is a reference seat base; B is a micrometric displacement sliding seat base; D is a slide rail holder base; E is the holder base; S1 is that iron is touched in the detection among the inductance type micro-displacement sensor SL; F touches iron S1 with the detection in the SL inductance type micro-displacement sensor to contact for sampling seat base; G is with the core hookup; Wherein g1 and g2 are the set bolt with the core hookup; H1 among the high magnification speed reduction unit JS is the crank dish, and h2 is a worm and gear, and h3 is that reduction gearing, a h4 are the secondary speed-reducing gear, thereby forms JS high magnification speed reduction unit.Sa-1 and Sb-1 are the test side of tested extraordinary micro-displacement sensor Sn1, and a1 and b1 are the set bolt of detected extraordinary micro-displacement sensor Sn1.
The composition of electrical analysis part: I is electric casing; P is the 220V/50HZ AC power; M is internal power supply rectifying pressurizer, J phase discriminator; The K high frequency oscillator; The X analog to digital converter; The W logic processor; N micrometric displacement amount display; SL inductance type micro-displacement sensor; S1 is that SL is that iron is touched in detection in the inductance type micro-displacement sensor; N is a micrometric displacement amount display.
Claims (4)
1, a kind of high-precision micro displacement amount detecting device that is used to detect extraordinary micro-displacement sensor comprises electrical analysis part and sizing part; It is characterized in that,
Described electrical analysis partly comprises: electric casing (I);
AC power (P) links to each other with internal power supply rectifying pressurizer (M) as the input of internal power supply rectifying pressurizer (M), provides electric energy to apparatus system;
Internal power supply rectifying pressurizer (M), be used for the AC energy that AC power (P) provides is converted to the galvanic current energy, import as DC voltage, link to each other with phase discriminator (J), high frequency oscillator (K), analog to digital converter (X), logic processor (W), micrometric displacement amount display (N), inductance type micro-displacement sensor (SL) in the electrical analysis part, so that stable dc power supply to be provided;
Inductance type micro-displacement sensor (SL) is used for the mechanical micrometric displacement amount that the sizing part is produced is converted to electric variable quantity; And as output, the input as phase discriminator (J) is connected with phase discriminator (J) again;
Iron (S1) is touched in detection in the inductance type micro-displacement sensor (SL), directly the micrometric displacement pedestal with the sizing part contacts, when being subjected to the extruding of micrometric displacement (F), iron (S1) is touched in detection will produce displacement in inductance type micro-displacement sensor (SL), change makes the output echo probe of inductance type micro-displacement sensor (SL) touch the response that iron (S1) changes at micrometric displacement to the response of high frequency; Simultaneously, the input as phase discriminator (J) links to each other with phase discriminator (J);
Phase discriminator (J) is converted to the voltage transformation amount with inductance type micro-displacement sensor (SL) institute response frequency amount, and inductance type micro-displacement sensor (SL) links to each other with high frequency oscillator (K);
High frequency oscillator (K) links to each other with analog to digital converter (X);
Analog to digital converter (X) is used for the response simulation voltage of inductance type micro-displacement sensor (SL) is converted to digital quantity, links to each other with logic processor (W) as the input of logic processor (W);
Logic processor (W) carries out pre-service to digital signal, is connected with micrometric displacement amount display (N),
Micrometric displacement amount display (N) shows the quantized value of its micrometric displacement as the analysis result terminal.
2, be used to detect the high-precision micro displacement amount detecting device of extraordinary micro-displacement sensor according to claim 1, it is characterized in that: described sizing partly comprises mechanical pedestal part, high magnification speed reduction unit and micrometric displacement generating unit three parts;
The various piece of sizing part be installed in mechanical pedestal (E) above;
Mechanical pedestal pin (e1, e2) can carry out height adjustment among a small circle;
With reference to sliding seat base (C), be fastened on the mechanical pedestal of holder base (E), for reference seat base (A) and micrometric displacement sliding seat base (B) provide platform, constitute the mechanical pedestal part;
Reference seat base (A) is the reference edge position of detected sensor (Sn), is fixed on reference on the sliding seat base (C);
Micrometric displacement sliding seat base (B) is fixed on the slide rail holder base (D);
Slide rail holder base (D) is fixed on reference on the sliding seat base (C);
The holder base (E) of inductance type micro-displacement sensor (SL) is closely fixing with slide rail holder base (D);
Detection in the inductance type micro-displacement sensor (SL) is touched iron (S1) and is directly contacted with the micrometric displacement that sizing is partly produced, and when detection is touched iron (S1) and is subjected to the extruding of micrometric displacement (F), will produce displacement in inductance type micro-displacement sensor (SL);
Sampling seat base (F) touches iron (S1) with the detection in the inductance type micro-displacement sensor (SL) and contacts;
Be used for fixing connection high magnification speed reduction unit (JS) with core hookup (G).
3, be used to detect the high-precision micro displacement amount detecting device of extraordinary micro-displacement sensor according to claim 1, it is characterized in that: describedly comprise set bolt (g1, g2) with core hookup (G), described set bolt (g1, g2) constitutes the group parts that micrometric displacement produces; Crank dish (h1) in the high magnification speed reduction unit (JS), worm and gear (h2), a reduction gearing (h3) and secondary speed-reducing gear (h4) are formed the group parts of high magnification speed reduction unit (JS).
4, a kind of high-precision micro displacement amount detecting device that is used to detect extraordinary micro-displacement sensor produces the measuring method of mechanical micrometric displacement variable quantity, it is characterized in that,
At first the crank dish (h1) in the high magnification speed reduction unit (JS) is adjusted in rotation, micrometric displacement sliding seat base (B) is adjusted to the center of micrometric displacement;
Again extraordinary micro-displacement sensor (Sn1) is placed in from top to down reference seat base (A) and micrometric displacement sliding seat base (B) above, more extraordinary micro-displacement sensor (Sn1) closely steadily is fixed on reference seat base (A) and micrometric displacement sliding seat base B above;
Again inductance type micro-displacement sensor (SL) is fixedly mounted on the mechanical pedestal (E), iron (S1) is touched in detection in the inductance type micro-displacement sensor (SL) to join with sampling seat base (F), open the power switch of electrical analysis part, make its total system enter stable duty fully;
When measuring beginning, rotate the crank dish (h1) in the high magnification speed reduction unit (JS), driving worm and gear (h2) by crank dish (h1) rotates, drive a reduction gearing (h3) and secondary speed-reducing gear (h4) more successively, the mechanical angle displacement of rotational transform is converted to by high magnification speed reduction unit (JS) can be so that micrometric displacement sliding seat base (B), sampling seat base (F), produce straight-line mechanical micrometric displacement amount ± ⊿ L with core hookup (G);
When external force acts on crank dish (h1) in the high magnification speed reduction unit (JS), crank dish (h1) in the high magnification speed reduction unit (JS) can produce the angular displacement ± ⊿ Φ that turns clockwise or be rotated counterclockwise, angular displacement ± ⊿ Φ drives a reduction gearing (h3) and secondary speed-reducing gear (h4) by worm and gear (h2), act on sampling seat base (F) and the slide rail with core hookup (G) two ends, and pass to micrometric displacement sliding seat base (B), make micrometric displacement sliding seat base (B) that micrometric displacement Liang ± ⊿ L take place;
Closely be fixed on the holder base (E) owing to reference seat base (A) with reference to sliding seat base (C), and do not have micrometric displacement to take place, make the angular displacement variable quantity ± ⊿ Φ of this rotation be converted to micrometric displacement Liang ± ⊿ L, act on the sampling two ends of extraordinary micro-displacement sensor (Sn1) by reference seat base (A) and micrometric displacement sliding seat base (B), the mechanical input quantity of linear micrometric displacement Liang ± ⊿ L as extraordinary micro-displacement sensor (Sn1) takes place between reference seat base (A) and the micrometric displacement sliding seat base (B);
The measuring process of linear micrometric displacement Liang ± ⊿ L to taking place in the electrical analysis system between reference seat base (A) and the micrometric displacement sliding seat base (B): when measuring beginning, shake the crank dish (h1) in the rotation high magnification speed reduction unit (JS), crank dish (h1) rotation drives worm and gear (h2), a reduction gearing (h3) and secondary speed-reducing gear (h4) successively, the mechanical angle displacement by high magnification speed reduction unit (JS) make micrometric displacement sliding seat base (B), sampling seat base (F), with the mechanical micrometric displacement amount of core hookup (G) generation straight line;
When linear micrometric displacement Liang ± ⊿ L takes place between reference seat base (A) and the micrometric displacement sliding seat base (B) when, under the driving of high magnification speed reduction unit (JS), also touch iron (S1) and issue living corresponding linear micrometric displacement variable quantity ± ⊿ L in the retroaction of interior pressing spring with regard to the detection that makes seat base (F) oppress inductance type micro-displacement sensor (SL);
When the detection that has magnetic core was touched iron (S1) linear micrometric displacement variable quantity ± ⊿ L is taken place, the response change of linear inductance variable quantity ± ⊿ h also took place in the inductance in the inductance type micro-displacement sensor (SL); Inductance in the inductance type micro-displacement sensor (SL) links to each other with high frequency oscillator (K) with the phase discriminator (J) of electrical analysis system, when the detection of magnetic core is touched iron (S1) linear micrometric displacement variable quantity ± ⊿ L is taken place, convert the variation of inductance generation linear inductance Liang ± ⊿ h in the inductance type micro-displacement sensor (SL) to, occur as the variable quantity ± ⊿ U of aanalogvoltage again, and as the input of analog to digital converter (X), the function of analog to digital converter (X) is that the variable quantity ± ⊿ U that finishes aanalogvoltage is converted to amount of digital information ± ⊿ D, by logic processor (W), carry out the digital signal logic analysis and handle, on micrometric displacement amount display (N), show at last.
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