CN101386547B - Carbon/carbon compound material heating element and production technology thereof - Google Patents

Carbon/carbon compound material heating element and production technology thereof Download PDF

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Publication number
CN101386547B
CN101386547B CN2008100321435A CN200810032143A CN101386547B CN 101386547 B CN101386547 B CN 101386547B CN 2008100321435 A CN2008100321435 A CN 2008100321435A CN 200810032143 A CN200810032143 A CN 200810032143A CN 101386547 B CN101386547 B CN 101386547B
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heating element
carbon
density
gained
base substrate
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CN101386547A (en
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廖寄乔
邰卫平
王跃军
龚玉良
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Hunan gold carbon Limited by Share Ltd
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HUNAN KBCARBON COMPOSITE SCIENCE AND TECHNOLOGY Co Ltd
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Abstract

The invention discloses a simple-process environment-friendly carbon/carbon composite heating element and a production process thereof, which is characterized in that the heating element is prepared by making blank from carbon fibers, densifying, purifying, machining and purifying; the heating element is simple in process; as a net body formed by fluffy needle-like carbon fibers is adopted in the process of making the blank, a quasi-3D prefabricated part is easier to obtain in a needling process; the carbon fibers inside the prefabricated part are crisscrossed, strong in cohesive force, free from delamination and stable in structure; meanwhile, the prefabricated part is small in pore, which facilitates the acceleration of the subsequent densifying process; the heating element blank prepared through chemical vapor deposition densification consists of the carbon fibers and a carbon matrix, wherein the carbon matrix is formed by pyrolytic carbon obtained through a high temperature pyrolysis mode, which is high in purity; and a carbon/carbon composite product with the ash content less than 180 ppm can be obtained only through high-temperature purification in a vacuum or protective atmosphere, thereby saving energy and protecting environment.

Description

Carbon/carbon compound material heating element and production technique thereof
Technical field:
The present invention relates to High Temperature Furnaces Heating Apparatus parts such as a kind of polycrystalline silicon furnace, single crystal growing furnace, specifically a kind of heating element and production technique thereof by the carbon/carbon compound material processing and manufacturing.
Background technology:
Polycrystalline silicon furnace and single crystal growing furnace are the major equipments of photovoltaic industry widespread usage, and its maximum operation (service) temperature at present, often adopts the resistive heating mode up to more than 1600 ℃, and its heating element generally adopts three high graphite to make.Because the graphite mechanical property is relatively poor, product strength is low, and broken easily under external force, work-ing life is shorter.In addition; Graphite heat resistanceheat resistant shock resistance is bad, is being prone to produce tiny crack under the high temperature thermal shock condition repeatedly, and the existence of tiny crack affects the electric property and the thermal property of goods; Changed its electrical and thermal conductivity performance; The interior thermal field of the power of graphite heater and stove changes when making heating, has influenced normally carrying out of producing, and also causes the enterprise production cost to increase.In addition, when heating element adopts long and narrow U type structure, if use machining graphite, then need with the middle portion excision of machine-tooled method with the monoblock material, consumptive material is more, and difficulty of processing is also bigger.The patent No. is to disclose a kind of preparation method of carbon/carbon heater for CN100366581C, denomination of invention are monocrystalline silicon draw machines and polysilicon smelting furnace with the preparing method's of carbon/carbon heater patent 200610043185.X, Granted publication number, in order to alternative graphite heater.This method adopts the accurate three way structure precast body of carbon cloth, the densification technique that combines through chemical vapour deposition and acetone-furfural resin dipping carbonization and the carbonization of hot isostatic pressing pitch, densified several repeatedly, extrudate density>=1.83g/cm 3The time densification technique finish, under the condition that feeds chlorine and freonll-11, goods are carried out high temperature purification treatment, can make monocrystalline silicon draw machines after the mechanical workout with thermal field carbon/carbon heater.The densification technique that this method adopts, densified makes extrudate density>=1.83g/cm for several times repeatedly 3Shi Caineng process ends, process are comparatively complicated, and foreign matter content is higher, and will feed chlorine and freonll-11 carries out purification process to goods, and environmental protection is brought certain pressure, and in people's environmental consciousness enhanced today day by day, this is that people are undesirable.
Summary of the invention:
The purpose of this invention is to provide that a kind of technology is simple, the carbon/carbon compound material heating element and the production technique thereof of environmental protection.
The present invention adopts following technical scheme to realize its goal of the invention, a kind of carbon/carbon compound material heating element production technique, and it may further comprise the steps:
(1) base: will make it compound through acupuncture by net tire and the carbon cloth that thomel is processed, and process the heating element precast body of necessary requirement;
(2) density: the heating element precast body of step (1) gained through chemical vapor infiltration (deposition) density, is processed the heating element base substrate of necessary requirement;
(3) purifying: the heating element base substrate of step (2) gained is put into High Temperature Furnaces Heating Apparatus, under vacuum condition, add wherein impurity of heat abstraction;
(4) machining: the heating element that step (3) gained heating element base substrate is machined to desired shape and size.
The impurity of the present invention for producing in the remover course of processing purifies after step (4), and described purification is heated to 1600 ℃~2800 ℃ for the heating element finished product is put into vacuum oven under vacuum condition, be incubated 30 minutes~360 minutes.
The present invention is in step (1), and the area density of said net tire is 20g/m 2~200g/m 2, the area density of carbon cloth is 100g/m 2~400g/m 2, the heating element precast body of processing, its apparent density is 0.3g/cm 3~0.7g/cm 3
The present invention is in step (2), and the apparent density of heating element base substrate is 1.2g/cm 3~1.9g/cm 3
The present invention's cleansing temp in step (3) is 1600 ℃~2800 ℃, and soaking time is 3h~10h.
A kind of heating element by above-mentioned production technique processing gained, it is processed through base-density-purifying-machining by thomel, and it is shaped as U-shaped, bar-shaped, tubular or tabular.
A kind of heating element by above-mentioned production technique processing gained, it is processed through base-density-purifying-machining-purification by thomel, and it is shaped as U-shaped, bar-shaped, tubular or tabular.
Heating element according to the invention is a tubular or when tabular, which is provided with the flow-guiding radiation groove and is uniformly distributed with.
Because adopt technique scheme, the present invention has realized goal of the invention preferably, its technology is simple, during base; The net tire that employing is made up of fluffy needle-like thomel is easier to obtain accurate three-dimensional preformed body when acupuncture, the precast body internal carbon fibers is crisscross; Cohesive force is stronger, can delamination, and Stability Analysis of Structures; Simultaneously, the precast body hole is less, also is convenient to accelerate follow-up density process; The heating element blank that adopts the chemical vapour deposition density to process is made up of thomel and carbon element matrix; Wherein carbon element matrix system is made up of the RESEARCH OF PYROCARBON that adopts the high temperature pyrolysis mode to obtain; Purity is very high; Need only be under vacuum or protective atmosphere high temperature purification can obtain the carbon/carbon compound material goods of ash<180ppm, energy-conserving and environment-protective.
Description of drawings:
Fig. 1 is the synoptic diagram of heating element when being U-shaped;
Fig. 2 is the synoptic diagram of heating element when being bar-shaped;
Fig. 3 is the synoptic diagram of heating element when being tubular;
Fig. 4 is the synoptic diagram of heating element when being tabular.
Embodiment:
Below in conjunction with accompanying drawing the present invention is described further.
Embodiment 1:
(1) base:
1. shredding becomes net that the long carbon fiber weak point is cut into the long short carbon fiber of 25mm~70mm; Become fluffy raphioid fiber through the shredding of shredding equipment; Then the good thomel of shredding through air and/or carding; Utilize the lapping machine to be paved into fibrous reticulum again, sting into the net tire in advance, the area density of said net tire is 20g/m 2~200g/m 2(present embodiment is 120g/m 2);
2. twine the acupuncture moulding and adopt the method for near-net-shape, will net tire and be wound on the mould (present embodiment is the U-shaped mould), cover one deck carbon cloth above that, the area density of carbon cloth is 100g/m 2~400g/m 2(present embodiment is 260g/m 2), and then cover one deck net tire, and net tire and carbon cloth crossover are placed to required thickness, and make it compound through acupuncture, process the carbon/carbon compound material heating element precast body of necessary requirement, and its apparent density is 0.3g/cm 3-0.7g/cm 3(present embodiment is 0.56g/cm 3).
(2) density:
The heating element precast body of step (1) gained through chemical vapor infiltration (deposition) density (present embodiment adopts and deposits), is progressively increased its density and through graphitization processing, makes it apparent density and reach 1.2g/cm 3~1.9g/cm 3(present embodiment is 1.63g/cm 3), process carbon/carbon compound material heating element blank.
(3) purifying:
The heating element blank of step (2) gained packed into carry out purification process in the vacuum oven, under vacuum condition, add wherein impurity of heat abstraction, cleansing temp is 1600 ℃~2800 ℃ (present embodiment is 2500 ℃), and soaking time is 3h~10h (present embodiment is 4.6h).
(4) machining:
With the heating element blank of step (3) gained through being machined to heating element finished product (present embodiment is a U-shaped).
Be the impurity that produces in the remover course of processing, the heating element finished product of step (4) gained is put into vacuum oven, under vacuum condition, be heated to 1600 ℃~2800 ℃ (present embodiment is 1860 ℃), be incubated 30 minutes-360 minutes (present embodiment is 90 minutes).
Embodiment 2:
In step (1), the heating element precast body is processed into tabular, and its apparent density is 0.61g/cm 3, apparent density is 1.65g/cm after the density 3, cut into inch strips earlier during machining, be machined to rod again, surplus with embodiment 1.
Embodiment 3:
In step (1), mould is a tubular, is processed into the heating element finished product and also is tubular, and heating element precast body apparent density is 0.5g/cm 3, apparent density is 1.59g/cm after the density 3, be evenly equipped with the flow-guiding radiation groove 1 that forms by machining on the tubular heating element, surplus with embodiment 1.
Embodiment 4:
In step (1), the heating element precast body is processed into tabular, and its apparent density is 0.59g/cm 3, apparent density is 1.5g/cm after the density 3, during machining, process flow-guiding radiation groove 1 on the tabular heating element and be uniformly distributed with, surplus with embodiment 1.

Claims (1)

1. carbon/carbon compound material heating element production technique is characterized in that may further comprise the steps:
⑴ base: will make it compound through acupuncture by net tire and the carbon cloth that thomel is processed; Process the heating element precast body of necessary requirement; The area density of said net tire is 20g/ ㎡~200g/ ㎡; The area density of carbon cloth is 100 g/ ㎡~400g/ ㎡, the heating element precast body of processing, and its apparent density is 0.3g/cm 3~0.7g/cm 3
⑵ density: the heating element precast body of step ⑴ gained through chemical vapor infiltration or deposition density, is processed the heating element base substrate of necessary requirement, and the apparent density of heating element base substrate is 1.2g/cm 3~1.9g/cm 3
⑶ purifying: the heating element base substrate of step ⑵ gained is put into High Temperature Furnaces Heating Apparatus, under vacuum condition, add wherein impurity of heat abstraction, cleansing temp is 1600 ℃~2800 ℃, and soaking time is 3h~10h;
⑷ machining: the heating element that step ⑶ gained heating element base substrate is machined to desired shape and size;
⑸ purify: step ⑷ gained heating element finished product is put into vacuum oven, under vacuum condition, be heated to 1600 ℃~2800 ℃, be incubated 30 minutes~360 minutes.
CN2008100321435A 2008-08-21 2008-08-21 Carbon/carbon compound material heating element and production technology thereof Active CN101386547B (en)

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CN102795871A (en) * 2012-05-14 2012-11-28 中国人民解放军国防科学技术大学 Method for quickly preparing C/SiC ceramic matrix composite material
CN102718540B (en) * 2012-07-05 2013-11-06 湖南金博复合材料科技有限公司 Carbon/carbon/silicon carbide composite material heating element and preparation method
CN102731132B (en) * 2012-07-05 2013-10-02 湖南金博复合材料科技有限公司 Draft tube using carbon/carbon/silicon carbide composite material and preparation method of draft tube
CN102718539B (en) * 2012-07-05 2014-06-04 湖南金博复合材料科技有限公司 Carbon/carbon/silicon carbide composite material thermal-insulation barrel and preparation method
CN102718535A (en) * 2012-07-05 2012-10-10 湖南金博复合材料科技有限公司 Carbon/carbon/silicon carbide composite material and preparation method
CN102912425B (en) * 2012-10-22 2015-06-17 湖南金博复合材料科技有限公司 Guide cylinder and preparation method thereof
CN103232255A (en) * 2013-05-07 2013-08-07 湖南友缘新材料有限公司 Preparation method of carbon/carbon composite material flat plate with carbide coating on surface
CN105502405B (en) * 2015-12-25 2018-04-27 苏州宏久航空防热材料科技有限公司 A kind of method of carbon insulation quilt surface dephosphorization in polysilicon handle wafer stove
CN106966752B (en) * 2017-03-30 2020-04-17 中南大学 Carbon-based composite material with flatting paint and preparation method and application thereof
CN109291544A (en) * 2018-10-30 2019-02-01 中南大学 A kind of precursor structure and slab preparation method of carbon/carbon compound material slab
CN112047749A (en) * 2020-07-29 2020-12-08 株洲红亚电热设备有限公司 Carbon-carbon crucible, manufacturing method and induction heating furnace
CN114804906B (en) * 2022-05-27 2023-02-14 陕西美兰德炭素有限责任公司 High-purity carbon/carbon composite material and preparation method and application thereof
CN115974571B (en) * 2022-12-28 2023-11-24 湖南金博碳基材料研究院有限公司 Heating tube device and preparation method thereof

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CN1683284A (en) * 2004-04-13 2005-10-19 杨颖辉 Method for quick preparing fiber reinforced ceramic base composite material or carbon/carbon composite material
CN1887804A (en) * 2006-07-20 2007-01-03 西安超码科技有限公司 Making process of C/C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace
CN101157563A (en) * 2007-09-13 2008-04-09 北京航空航天大学 Process for preparing charcoal/charcoal component by electrothermy orienting infiltration
CN101195899A (en) * 2007-10-22 2008-06-11 湖南博云高科技有限公司 Composite material of carbon/carbon/copper and production technology thereof

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Publication number Priority date Publication date Assignee Title
CN1544828A (en) * 2003-11-27 2004-11-10 西安诚瑞科技发展有限公司 Use of carbon/carbon, carbon/ceramic composite material as brake lining, method and apparatus for making same
CN1683284A (en) * 2004-04-13 2005-10-19 杨颖辉 Method for quick preparing fiber reinforced ceramic base composite material or carbon/carbon composite material
CN1887804A (en) * 2006-07-20 2007-01-03 西安超码科技有限公司 Making process of C/C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace
CN101157563A (en) * 2007-09-13 2008-04-09 北京航空航天大学 Process for preparing charcoal/charcoal component by electrothermy orienting infiltration
CN101195899A (en) * 2007-10-22 2008-06-11 湖南博云高科技有限公司 Composite material of carbon/carbon/copper and production technology thereof

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Denomination of invention: Carbon/carbon compound material heating element and production technology thereof

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