CN101384416B - Laminating apparatus, and laminating method using it - Google Patents

Laminating apparatus, and laminating method using it Download PDF

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Publication number
CN101384416B
CN101384416B CN2007800053897A CN200780005389A CN101384416B CN 101384416 B CN101384416 B CN 101384416B CN 2007800053897 A CN2007800053897 A CN 2007800053897A CN 200780005389 A CN200780005389 A CN 200780005389A CN 101384416 B CN101384416 B CN 101384416B
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China
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mentioned
banded
resin material
film
layered product
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CN101384416A (en
Inventor
安本良一
岩田和敏
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Nippon Mining Holdings Inc
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Nichigo Morton Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06—Platens or press rams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • B29C43/183—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles the preformed layer being a lining, e.g. shaped in the mould before compression moulding, or a preformed shell adapted to the shape of the mould
    • B29C43/184—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles the preformed layer being a lining, e.g. shaped in the mould before compression moulding, or a preformed shell adapted to the shape of the mould shaped by the compression of the material during moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/20—Making multilayered or multicoloured articles
    • B29C43/203—Making multilayered articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0047—Preventing air-inclusions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • B32B37/22—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of both discrete and continuous layers
    • B32B37/223—One or more of the layers being plastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B39/00—Layout of apparatus or plants, e.g. modular laminating systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B29C2043/3652—Elastic moulds or mould parts, e.g. cores or inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/56—Compression moulding under special conditions, e.g. vacuum
    • B29C2043/561—Compression moulding under special conditions, e.g. vacuum under vacuum conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60—In a particular environment
    • B32B2309/68—Vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/08—PCBs, i.e. printed circuit boards
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0007—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
    • B32B37/003—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality to avoid air inclusion
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/281—Applying non-metallic protective coatings by means of a preformed insulating foil

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Laminated Bodies (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

The apparatus is equipped with vacuum laminating unit (2) furnished with a pair of heat discs (23,26) opposed to each other, at least one of these heat discs (23,26) capable of advancing forward and backward relative to the other. There is provided a laminating apparatus adapted to superimpose a film resin material on base material (8a) having at least one of its front and back surfaces furnishedwith unevenness on the uneven surface by the use of the vacuum laminating unit(2) to thereby form laminate (9), wherein elastic press plate (24(27)) brought into contact with the surface of the film resin material (8b) and pressing the same is disposed on the side of film resin material of the heat disc (23(26)) opposed to the film resin material. Accordingly, even when the unevenness interspace of the base material (8a) is minute, close follow of film resin layer on the base material (8a) can be attained so as to avoid any remaining of bubbles between the base material (8a) and the film resin layer.

Description

Laminater and use the laminating method of this laminater
Technical field
Laminater that is adopted when the present invention relates to make printed circuit base material etc. and the laminating method that uses this laminater, more particularly, relate to by membranaceous resin bed is close to and follow that printed circuit base material etc. has concavo-convex base material and between base material and membranaceous resin bed laminating method residual bubble, that not can be used for the laminater of lamination process method and use this laminater.
Background technology
In recent years, along with miniaturization, the high performance of electronic instrument, densification, the multiple stratification of printed circuit base material constantly develop, and with specific uses such as dimensional packaged circuit boards, the goods that the thickness of circuit base material is thicker also constantly increase as MPU.Multiple stratification for such printed circuit base material, use thermohardening type resin combination or photosensitive resin composition to be used as electric insulation layer, coating above-mentioned thermohardening type resin combination or photosensitive resin composition on preformed internal layer circuit, or the membranaceous resin bed that constitutes by above-mentioned thermohardening type resin combination or photosensitive resin composition of lamination.In addition, single sided lamination at this membranaceous resin bed has common Copper Foil, supporting mass film (barrier film), under the situation of lamination Copper Foil, it is etched partially or its whole surface of etching, under the situation of laminated bearing body film, can adopt effectively it is peeled off, utilize laser or ultraviolet perforate subsequently, then implement copper facing, and then make sheet with photoresist, utilize light forming pattern and make the method for circuit, promptly so-called lamination process method.
In above-mentioned lamination process method, has on the concavo-convex base material technology outbalance of the membranaceous resin bed of lamination flatly.As such technology, there is the vacuum lamination apparatus of diaphragm type vacuum lamination apparatus or non-diaphragm type.
As above-mentioned diaphragm type vacuum lamination apparatus, there is vacuum pressure device as shown in figure 31.The vacuum chamber 71 of this vacuum pressure device by the upside casing component 73 that is fixed in rest pad 72 and by cylinder 74a lifting freely downside casing component 75 constitute, in above-mentioned upside casing component 73, dispose upside pressurizing block 76, in above-mentioned downside casing component 75, dispose by air cylinder device 74b lifting downside pressurizing block 77 freely.In addition, in above-mentioned upside pressurizing block 76, contain heating plate 78, and, the pressure surface side that adds of this heating plate 78 is covered by diaphragm 79, thus, the inner space of above-mentioned upside pressurizing block 76 (space that is covered by diaphragm 79) made airtight construction, can make it form vacuum state or pressurized state.In addition, similarly in above-mentioned downside pressurizing block 77, also contain heating plate 80, and, the pressure surface side that adds of this heating plate 80 is covered by diaphragm 81, thus, the inner space of above-mentioned downside pressurizing block 77 (space that is covered by diaphragm 81) also made airtight construction, can make it form vacuum state or pressurized state.
And, to circuit board 82 heating and pressurization the time, circuit board 82 is positioned central portion in the vacuum chamber 71, cylinder 74a is risen and downside casing component 75 is close in 73 pairs of formed vacuum chambers 71 of upside casing component and reduce pressure, utilize heating plate 78 simultaneously, 80 heating remain in the film material on circuit board 82 surfaces, under this state, extend air cylinder device 74b and downside pressurizing block 77 is risen, circuit board 82 is clipped in two pressurizing block 76 up and down, between 77 and to its pressurization, when this pressurizes, make two pressurizing block 76 up and down, in 77 the inner space one or both form pressurized state, utilize diaphragm 79, the pressurize film material (for example, with reference to patent documentation 1) on circuit board 82 surfaces of in 81 one or both.
In addition, the vacuum lamination apparatus (non-diaphragm type vacuum lamination apparatus) as not being diaphragm type has proposed a kind of laminating molding device shown in Figure 32.This laminating molding device comprises that vacuum lamination apparatus 91 and planarization add press 92, adds press 92 in vacuum lamination apparatus 91 and planarization and is provided with heat dish 93a, 93b, 94a, the 94b that becomes a pair of up and down among both.And, in vacuum lamination apparatus 91, under vacuum state, utilize two heat dish 93a, 93b heating and pressurization laminated material 95, will be laminated to laminated material 95 by lamination material 96 by lamination material 96, add in the press 92 in planarization, the mirror boards (all not shown) of elastically deformable are set across cushioned material layer on the mutual opposite face of two heat dish 94a, 94b, utilize heating of two mirror boards and pressurization laminated material 95, made the having an even surface of laminated material 95 by lamination material 96.In addition, for above-mentioned vacuum lamination apparatus 91, also disclose in two heat and coil the mirror board (all not shown) that elastically deformable is set across cushioned material layer on the mutual opposite face of 93a, 93b, under vacuum state, utilize heating of two mirror boards and pressurization laminated material 95, will be laminated to laminated material 95 (for example, with reference to patent documentation 2) by lamination material 96 by lamination material 96.
Patent documentation 1: TOHKEMY 2003-181697 communique
Patent documentation 2: TOHKEMY 2002-120100 communique
But, in the diaphragm type vacuum lamination apparatus, because the thickness thicker (about 2～3mm) of diaphragm 79,81, therefore, under the situation of concavo-convex interval at circuit board 82 fine (about 20 μ m) or concavo-convex dark (more than the 40 μ m), be difficult to make film material to be close to and follow circuit board 82, can be between circuit board 82 and film material residual bubble.On the other hand, non-diaphragm type vacuum lamination apparatus is on this point of can pressurizeing to the base material thicker to thickness from the base material of thinner thickness with stronger pressure easily, more favourable than the diaphragm type vacuum lamination apparatus, but owing to as above-mentioned laminating molding device, utilize the heat dish 93a that becomes a pair of up and down, 93b, mirror board pressurization laminated material 95, by lamination material 96, therefore, same with the diaphragm type vacuum lamination apparatus, under the situation of fine by the concavo-convex interval of lamination material 96 (about 20 μ m) or concavo-convex dark (more than the 40 μ m), be difficult to make laminated material 95 to be close to and to follow, sometimes residual bubble between by lamination material 96 and laminated material 95 by lamination material 96.
Summary of the invention
The present invention promptly makes in view of such situation, even its purpose is to provide under the fine or concavo-convex darker situation in the concavo-convex interval of base material, membranaceous resin bed is close to and is followed base material and the not laminater of residual bubble and the laminating method that uses this laminater between base material and membranaceous resin bed.
In order to achieve the above object, laminater of the present invention comprises vacuum pressure device, this vacuum pressure device is provided with a pair of heat dish of facing mutually that has heater block, during these two heat are coiled at least one can be advanced and retreat with respect to another, utilize this vacuum pressure device, have the above-mentioned male and fomale(M﹠F) upper laminate film shape resin material of concavo-convex base material on the one side at least in table in the two sides and form layered product, its the 1st main points are, a kind of laminater, this laminater are at the heat dish of facing mutually with above-mentioned membranaceous resin material, the face of above-mentioned membranaceous resin material side is provided with the elasticity increased pressure board to membranaceous resin material pressurization; Its 2nd main points are, a kind of laminating method, and this laminating method uses above-mentioned laminater, having on the above-mentioned male and fomale(M﹠F) of concavo-convex base material on the one side at least in table in the two sides, the membranaceous resin material of lamination and form layered product.
Promptly, laminater of the present invention comprises vacuum pressure device, this vacuum pressure device is provided with a pair of heat dish of facing mutually that has heater block, during these two heat are coiled at least one can be advanced and retreat with respect to another, utilize this vacuum pressure device, has on the above-mentioned male and fomale(M﹠F) of concavo-convex base material the membranaceous resin material of lamination and form layered product in table in the two sides at least one.And, with the face heat dish, above-mentioned membranaceous resin material side that above-mentioned membranaceous resin material is faced mutually on be provided with elasticity increased pressure board to membranaceous resin material pressurization.Like this, in laminater of the present invention, owing to use above-mentioned elasticity increased pressure board, utilize its surface pressurization to membranaceous resin material, therefore, can utilize above-mentioned elasticity increased pressure board with stronger pressure to the pressurization of the surface of membranaceous resin material, thereby when this pressurize, can utilize the elasticity of above-mentioned elasticity increased pressure board to make it add the male and fomale(M﹠F) strain of pressure surface (face that is pressurizeed in the surface of above-mentioned membranaceous resin material) along base material.Therefore, even under the fine or concavo-convex darker situation in the concavo-convex interval of base material, membranaceous resin bed is close to and is followed base material, not residual bubble between this base material and membranaceous resin bed.On the other hand, because laminating method of the present invention is to use the method for above-mentioned laminater, therefore play above-mentioned good effect.
In addition, in the present invention, under the situation that above-mentioned elasticity increased pressure board is made of hear resistance silicone rubber or hear resistance Viton, the excellent heat resistance of above-mentioned elasticity increased pressure board, and, by fibrage being set in above-mentioned elasticity increased pressure board or above-mentioned elasticity increased pressure board being vulcanized plate bodys such as being adhered to corrosion resistant plate use, can suppress the compression aspect of above-mentioned elasticity increased pressure board along the compression when compressing of above-mentioned elasticity increased pressure board, and with the elongation of the orthogonal direction of this compression aspect quadrature, the membranaceous resin material on the concave surface of base material and the membranaceous resin material on the convex surface are transmitted plus-pressure equably and improve membranaceous resin material with respect to base material be close to tracing ability in, also comparatively good on intensity, even pressurization repeatedly also can suppress the elongation strain of above-mentioned elasticity increased pressure board under hot conditions.
And, in the present invention, have under the fibrolaminar situation at above-mentioned elasticity increased pressure board, even pressurization repeatedly under hot conditions, also can suppress the elongation strain of above-mentioned elasticity increased pressure board, membranaceous resin material is good with respect to tracing ability, the close property of base material, thereby can improve the durability of above-mentioned elasticity increased pressure board.
In addition, in the present invention, under the Xiao A hardness of above-mentioned elasticity increased pressure board is situation more than 40 degree, above-mentioned elasticity increased pressure board can be extending when being difficult to tearing preferably, obtain stronger tearing strength, on the other hand, also can obtain sufficient fissility, layered product is easy to the own elasticity increased pressure board and peels.And, in order to obtain fissility, also can be to the surface enforcement embossing processing of elasticity increased pressure board or the handling of chemistry that contacts with layered product from shape.
And, in the present invention, under the situation about being roughened on surface above-mentioned elasticity increased pressure board, that contact with membranaceous resin material, after above-mentioned elasticity increased pressure board pressurization, this elasticity increased pressure board is easy to peel off from this band shape film under the situation of using layered product or banded film described later.
In addition, in the present invention, between heat dish of facing mutually with above-mentioned membranaceous resin material and elasticity increased pressure board, plate body is set, under the situation that this plate body and elasticity increased pressure board are adhesively fixed, even pressurization repeatedly under hot conditions, also can utilize above-mentioned plate body to suppress the elongation strain of elasticity increased pressure board, membranaceous resin material is good with respect to tracing ability, the close property of base material, can improve the durability of above-mentioned elasticity increased pressure board.
And, in the present invention, between above-mentioned heat dish and above-mentioned plate body, be provided with under the situation of padded coaming, can utilize the cushioning effect of padded coaming to absorb scale error when making above-mentioned heat dish, plate body etc., coil and contact with the single face of plate body etc. thereby can eliminate above-mentioned heat.
In addition, in the present invention, comprise the 1st film take up roll that is wound with the 1st banded film, be provided with standing facing each other and be wound with the 2nd film take up roll of the 2nd banded film mutually with the 1st film take up roll, to be wound in the above-mentioned the 1st and the 1st and the 2nd banded film of the 2nd film take up roll is pulled out with the state of facing mutually and make them by between the two heat dishes of above-mentioned vacuum pressure device and the 1st and the 2nd film takers-in that they are batched, and in the gap that is formed between the two banded films that above-mentioned two film take up rolls are pulled out, supply with at the temporary fixed supply part that the interim layered product that membranaceous resin material forms is arranged of the single face at least of base material, thereby, when forming layered product, can prevent that membranaceous resin softening when layered product forms is attached to two heat dishes of vacuum pressure device etc. utilizing above-mentioned two banded films that interim layered product is supplied to vacuum pressure device.In addition, at the temporary fixed interim layered product that has membranaceous resin material to form of the single face at least of base material, can be to use with the size of base material and cut continuous band-shaped membranaceous resin material with matching and it is temporarily fixed on auto slice laminater (オ one ト シ one ト カ Star ト ラ ミ ネ one タ) (the eastern corporate system Mach630 of uncle of base material, Mach610, the イ of Hitachi Application ダ ス ト リ one ズ corporate system TLD-6500, TLD-2400) etc. and make, supply to laminater of the present invention.
And, in the present invention, comprise and be wound with the 1st resin material take up roll of membranaceous resin material being done the 1st banded membranaceous resin material that becomes band, be provided with and be wound with standing facing each other the 2nd resin material take up roll of membranaceous resin material being done the 2nd banded membranaceous resin material that becomes band mutually with the 1st resin material take up roll, and in the gap that is formed between the two banded membranaceous resin materials that above-mentioned two resin material take up rolls are pulled out, supply with the supply part of base material, and comprise that the 1st and the 2nd banded membranaceous resin material of will pull out from the above-mentioned the 1st and the 2nd resin material take up roll is directed to the guide member between the two heat dishes of above-mentioned vacuum pressure device with the state of facing mutually, i.e. the 1st and the 2nd guide reel, the the 1st and the 2nd banded membranaceous resin material of the above-mentioned base material of sandwich is imported between the above-mentioned two heat dishes, be formed on the vacuum pressure device of the banded layered product that lamination the above-mentioned the 1st and the 2nd banded membranaceous resin material in two sides forms in the table of base material by this action, (batch the layered product takers-in of above-mentioned banded layered product with the parts of the above-mentioned banded layered product of tractive, the niproll of the above-mentioned banded layered product of tractive or utilize the above-mentioned banded layered product of chuck mechanism clamping and with mechanism of its tractive etc.), thereby, can supply with above-mentioned two banded membranaceous resin materials continuously to vacuum pressure device, base material connects into a series of (continuous or interruption) banded layered product and can form with a plurality of layered products.In the present invention, do not need membranaceous resin material is temporarily fixed on the single face of base material, the needed above-mentioned auto slice laminater of interim layered product of membranaceous resin material etc. need not arranged for the single face at least that is formed on base material is temporary fixed.In addition, the present invention is not defined as the above-mentioned the 1st and the 2nd guide reel, as long as can similarly retract strip material, then can be any mechanism.For the 3rd guide reel described later, structure of the present invention is not defined as guide reel similarly.
And, in the present invention, at base material is under the situation of individual circuit board or banded circuit board, can or supply with above-mentioned two banded membranaceous resin materials, base material continuously to the vacuum pressure device interruption, and form layered product is connected into a series of banded layered product.
In addition, in the present invention, also be provided with the 1st film take up roll that is wound with the 1st banded film, be wound with the 2nd film take up roll of the 2nd banded film, guide their the 1st and the 2nd guide member, with batch the above-mentioned the 1st and the takers-in of the 2nd banded film, pull out to clip from the above-mentioned the 1st and the 2nd resin material take up roll by the two banded films of pulling out from above-mentioned two film take up rolls, and form banded layered product at the state of the 1st and the 2nd banded membranaceous resin material of sandwich base material, batch the above-mentioned the 1st and the 2nd banded film in addition with respect to above-mentioned banded layered product, thereby, can prevent that membranaceous resin softening when banded lamination body forms is attached to two heat dishes of vacuum pressure device etc.
In addition, in the present invention, comprise that at least one that be provided with in a pair of heat dish faced mutually, these two the heat dishes can be with respect to the plane pressue device of another advance and retreat, the two heat dishes that utilize this plane pressue device pressurize to two sides in the table of the layered product that formed by above-mentioned vacuum pressure device and make it level and smooth, thereby, can utilize the plane pressue device to make in the table of layered product the two sides level and smooth.
Description of drawings
Fig. 1 is the structure chart of an embodiment of expression laminater of the present invention.
Fig. 2 is the cutaway view of interim layered product.
Fig. 3 is the cutaway view of layered product.
Fig. 4 is the structure chart of expression transport membrane coiling portion.
Fig. 5 is the structure chart of expression transport membrane reeling end.
Fig. 6 is the structure chart of expression vacuum lamination apparatus.
Fig. 7 is the structure chart of the major part of the above-mentioned vacuum lamination apparatus of expression.
Fig. 8 is the structure chart of another example of the above-mentioned vacuum lamination apparatus of expression.
Fig. 9 is the cutaway view of effect of the movable vacuum frame of the above-mentioned vacuum lamination apparatus of expression.
Figure 10 is the cutaway view of effect of the movable vacuum frame of the above-mentioned vacuum lamination apparatus of expression.
Figure 11 is the cutaway view of effect of the movable vacuum frame of the above-mentioned vacuum lamination apparatus of expression.
Figure 12 is the structure chart of expression plane pressue device.
Figure 13 is the cutaway view of layered product.
Figure 14 is the cutaway view of an example of expression elasticity increased pressure board.
Figure 15 is the cutaway view of another example of expression elasticity increased pressure board.
Figure 16 is the structure chart of the effect of the above-mentioned vacuum lamination apparatus of expression.
Figure 17 is the structure chart of the effect of the above-mentioned vacuum lamination apparatus of expression.
Figure 18 is the structure chart of the effect of the above-mentioned vacuum lamination apparatus of expression.
Figure 19 is the structure chart of another embodiment of expression laminater of the present invention.
Figure 20 is the structure chart of uncoiling portion such as expression film etc.
Figure 21 is the structure chart of reeling end such as expression film etc.
Figure 22 is the key diagram of ladder roller.
Figure 23 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 24 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 25 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 26 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 27 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 28 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 29 is the structure chart of the another embodiment of expression laminater of the present invention.
Figure 30 is the structure chart of the variation of the above-mentioned vacuum lamination apparatus of expression.
Figure 31 represents the side view of example in the past.
Figure 32 is another routine in the past structure chart of expression.
Description of reference numerals
2, vacuum lamination apparatus; 8a, base material; 9, layered product; 23,26, heat dish; 24,27, elasticity increased pressure board.
The specific embodiment
Then, describe embodiments of the present invention with reference to the accompanying drawings in detail.But the present invention is not limited to this embodiment.
Fig. 1 represents an embodiment of laminater of the present invention.In the present embodiment, above-mentioned laminater is made of transport membrane uncoiling portion 1, vacuum lamination apparatus (vacuum pressure device) 2, plane pressue device 3 and transport membrane reeling end 4, from the upstream of the flow direction (with reference to the arrow of Fig. 1) of circuit board (with reference to Fig. 2 and Fig. 3) towards downstream setting in proper order with this.
Shown in the enlarged drawing of Fig. 4, above-mentioned transport membrane uncoiling portion 1 comprises the upside transport membrane take up roll (the 1st film take up roll) 11 that is wound with upside transport membrane (the 1st banded film) 5, be wound with downside transport membrane (the 2nd banded film) 6 and be equipped on the downside transport membrane take up roll (the 2nd film take up roll) 12 of the more downside of upside transport membrane take up roll 11 mutually with upside transport membrane take up roll 11 with standing facing each other and be equipped on up and down and move into conveyer belt 13 between the two transport membrane take up rolls 11,12.And, the upside transport membrane 5 of pulling out from upside transport membrane take up roll 11 vacuum lamination apparatus 2 and plane pressue device 3 face mutually become a pair of heat dish 23 up and down, 26,47, after passing through between 51 (with reference to the enlarged drawings of Fig. 6 and Figure 12), batched in the upside takers-in (the 1st film takers-in) 14 at transport membrane reeling end 4 (with reference to the enlarged drawing of Fig. 5), from the downside transport membrane 6 of downside transport membrane take up roll 12 uncoilings too, vacuum lamination apparatus 2 and plane pressue device 3 face mutually become a pair of heat dish 23 up and down, 26,47, after passing through between 51, batched in the downside takers-in (the 2nd film takers-in) 15 at transport membrane reeling end 4.In addition, also be included in batch when heat dish 23,26,47,51 moves each time the 1st driver part (the 1st film driver part) 14b that drives upside takers-in 14 and with above-mentioned upside takers-in 14 synchronously and batch the 2nd driver part (the 2nd film driver part) 15a that drive downside takers-in 15 discontinuously.In addition, in the present invention, heat dish is the dish with heater block, and it is heated and forms the heat dish.
As above-mentioned two transport membranes 5,6 up and down, list PETG (PET) film, specifically, can use " EMBLETPTH series " or the ダ イ ア Off オ イ Le corporate system " matt film series " of UNI TIKA corporate system.In addition, for prevent to be heated and pressurize after membranaceous resin ooze out and be attached to vacuum lamination apparatus 2 and plane pressue device 3 to the outside of supporting mass film, the above-mentioned width of two transport membranes 5,6 up and down is set at than about the wide 10～40mm of going out of the width of interim layered product 7, layered product 9.When being attached with the membranaceous resin that oozes out in vacuum lamination apparatus 2 and plane pressue device 3, the membranaceous resin that adheres to is attached to the supporting mass film of follow-up goods once more.Be attached with the thickness of membranaceous resin material 8b at the position of the resin that oozes out, thickened the amount of the thickness of the resin that adheres to, cause goods bad.Two transport membranes 5,6 up and down like this are to be paid the state operation of the tension force in 0.5～150kN scope.In addition, the transporting velocity of two transport membranes 5,6 is set in the scope of 1～20m/ branch usually up and down.
As mentioned above, the conveyer belt (supply part) 13 of moving into shown in the enlarged drawing of Fig. 4 plays the effect of admitting interim layered product 7 and supplying with this interim layered product 7 up and down between two transport membranes 5,6.Interim layered product 7 also can be by making interim layered product 7 and the limit throughput direction quadrature that drops into side as required integral body or a plurality of positions such as two ends, central portion be connected to the moving device 13a of the interim lamination system that can utilize cylinder 13b lifting and stop, thereby this interim layered product 7 was correctly being located before supplying with between two transport membranes 5,6 up and down.Interim layered product 7 is overlapping (for example by the state that has concavo-convex base material 8a (hereinafter to be referred as making base material 8a) and cover with the male and fomale(M﹠F) with this base material 8a, by to the central portion on the limit in the angle of membranaceous resin material 8b, the outside with point-like heating and pressurization or pressurization, perhaps 1 limit of its circumference is adhesively fixed it with wire heating and pressurization or pressurization etc.) and temporary fixed thereon membranaceous resin material 8b constitutes (with reference to Fig. 2).As having concavo-convex base material 8a, for example use copper, scolding tin etc. to apply the printed circuit board of pattern etc., in addition, the multilayer circuit board that also can use lamination process method etc. to be adopted.For the thickness of base material 8a, size is not special in length and breadth limits, but thickness is preferably in the scope of 0.1～10mm, is preferably dimensioned to be in length and breadth in the scope of 150～800mm.As membranaceous resin material 8b (forming membranaceous resin bed 8c behind the vacuum lamination), so long as have the material of adherence, cementability, hot melt, be the resin combination of main component with resin softening more than glass transformation temperature, then there is no particular limitation, particularly can use the material with electrical insulating property.As such resin combination, the heat-curing resin constituent that mainly lists epoxy resin, constitutes by epoxy resin, photosensitive resin composition of constituting by ethene unsaturated compound and Photoepolymerizationinitiater initiater etc.In the present embodiment, above-mentioned interim layered product 7 (utilizes above-mentioned auto slice laminater etc. by a pair of membranaceous resin material 8b that becomes up and down of the male and fomale(M﹠F) on two sides in having concavo-convex base material 8a and be temporarily fixed on this base material 8a table in advance on two sides in the table, the material that the square sheet of membranaceous resin material 8b cut growth that is wound in the band shape of core is formed) constitutes, but also can in the table of base material 8a only, in the two sides have under the concavo-convex situation, only fixing membranaceous resin material 8b when having concavo-convex facing.
Then, 7 heating of interim layered product and pressurization that vacuum lamination apparatus 2 transports two transport membranes 5,6 about the quilt under vacuum state, make the layered product 9 (with reference to Fig. 3) that forms at base material 8a upper laminate film shape resin bed 8c, shown in the enlarged drawing of Fig. 6, vacuum lamination apparatus 2 comprises uprightly being arranged at and adds many (only illustrating 2 among Fig. 6) pillars 18 of presenting a theatrical performance as the last item on a programme on 17, utilizes fixed parts such as bolt, nut 19 to be fixed in the upper board 20 of these each pillars 18 and be installed on lower panel 21 of above-mentioned each pillar 18 etc. in mode moving up and down.This lower panel 21 is linked to hydraulic cylinder or cylinder 29 by shaft coupling 28, and its action by this hydraulic cylinder or cylinder 29 (along with rising or the decline of piston rod 29a) moves up and down.
On upper board 20, when upside is fixed with flat upside heat-insulating material 22, upside heat dish 23, vacuum lamination in order to the rubber system upside elasticity increased pressure board 24 of the surface pressurization of the membranaceous resin material 8b of the upside of interim layered product 7 (with reference to Fig. 2), on lower panel 21, when downside is fixed with flat downside heat-insulating material 25, downside heat dish 26, vacuum lamination in order to rubber system downside elasticity increased pressure board 27 (with reference to Fig. 7) of the surface pressurization of the membranaceous resin material 8b of the downside of interim layered product 7 (with reference to Fig. 2).
In addition, be fixed in not special qualification of method of two heat dishes 23,26 for above-mentioned two elasticity increased pressure boards 24,27, can adopt the method for fixed parts (not shown) such as using framework, bolt, the collar, perhaps adopt in that two elasticity increased pressure boards 24,27 and two heat are coiled under the state of sealing between 23,26,24,27 absorption of two elasticity increased pressure boards are fixed in its inner pressure relief the whole bag of tricks such as method of two heat dishes 23,26.
In addition, as other fixing means, also can use such method, promptly, between above-mentioned two elasticity increased pressure boards 24,27 and two heat dishes 23,26, metallic plate 24a, 27a (with reference to Fig. 8) are set respectively, vulcanize bonding two elasticity increased pressure boards 24,27 in the side of these two metallic plate 24a, 27a, and, utilize fixed parts (not shown) such as bolt, the collar that its another side (vulcanizing the side of bonding elasticity increased pressure board 24,27) is not fixed in two heat dishes 23,26.But be not limited thereto, also can suitably use two heat are being coiled under the state that seals between 23,26 and two metallic plate 24a, the 27a, two metallic plate 24a, 27a absorption is fixed in its inner pressure relief the method for two heat dishes 23,26 etc.In addition, as shown in Figure 8, preferably between two metallic plate 24a, the 27a and two heat dishes 23,26 that are arranged between above-mentioned two elasticity increased pressure boards 24,27 and the two heat dishes 23,26, padded coaming 24b, 27b with caoutchouc elasticity etc. are set respectively, also can vulcanize bonding elasticity increased pressure board 24,27, the elasticity increased pressure board 24,27 of a side is used as padded coaming 24b, 27b in the two sides of two metallic plate 24a, 27a.As mentioned above, vulcanized bonding elasticity increased pressure board at 24,27 o'clock in the two sides of two metallic plate 24a, 27a, elasticity increased pressure board 24 or 27 by the foreign matter equivalent damage under the surperficial situation, metallic plate 24a, the 27a autonomous agent that sulfuration can be bonded with the elasticity increased pressure board 24,27 of damage are pulled down, transposing is installed with elasticity increased pressure board 24,27 that will damage and is used as padded coaming in the table, thereby proceed to produce, preferable aspect the maintainability of device.
Upside heat-insulating material 22 utilizes fixed parts (not shown) such as bolt, nut to be fixed in the lower surface of upper board 20.Upside heat dish 23 utilizes fixed parts (not shown) such as bolt, nut to be fixed in upside heat-insulating material 22, and upside elasticity increased pressure board 24 directly is adhesively fixed in the lower surface of upside heat dish 23.In addition, downside heat-insulating material 25 utilizes fixed parts (not shown) such as bolt, nut to be fixed in the upper surface of lower panel 21.Downside heat dish 26 utilizes fixed parts (not shown) such as bolt, nut to be fixed in downside heat-insulating material 25, and downside elasticity increased pressure board 27 directly is adhesively fixed in the upper surface of downside heat dish 26.In addition, utilizing fixed parts such as bolt, nut directly fixedly during top (bottom) plate 20 (21) and upside (downside) heat dish 23 (26), the heat of upside (downside) heat dish 23 (26) is easy to be transmitted to top (bottom) plate 20 (21) by bolt, nut etc., and is unsatisfactory.
Suitably dispose in the inside of two heat dishes 23,26 up and down and to be used to add thermoelasticity increased pressure board heater block 24,27, temperature controllable.In the present embodiment, as above-mentioned heater block, dispose many shell- like heater 23a, 26a side by side in the inside of two heat dishes 23,26 up and down.Two heat dishes 47,51 up and down described later also are same structures.
In addition, vacuum lamination apparatus 2 comprises movable vacuum frame 30.(in this Fig. 9, two heat-insulating materials 22,25, up and down two heat dishes 23,26, up and down two elasticity increased pressure boards 24,27, metallic plate 24a, 27a, padded coaming 24b, 27b are not shown up and down as Fig. 9.Figure 10 and Figure 11 are also identical) shown in, this movable vacuum frame 30 comprises that airtight shape ground is fixed in the upside fixed frame portion 31 of roughly quadrilateral frame shape of lower surface of upper board 20 and the movable framework 32 that airtight shape ground is fixed in the upper surface of lower panel 21.Be fixed with extracting vacuum nozzle 33 among the through hole 31a that running through in upside fixed frame portion 31 is arranged at its all sidewall, when 20,21 sealings of two plates agree with up and down, can utilize this extracting vacuum will be formed in the spatial portion 34 (with reference to Figure 10) between upside fixed frame portion 31 and the movable framework 32 with nozzle 33 is evacuated, adjust the pressure (that is, making it form the vacuum state of authorized pressure) of this spatial portion 34.In addition, extracting vacuum also can be provided with through hole with nozzle 33 and dispose in upper board 20 not in upside fixed frame portion 31, and, when it is arranged at a plurality of position, can adjust the pressure of spatial portion 34 expeditiously.
Above-mentioned movable framework 32 comprise airtight shape ground be fixed in lower panel 21 upper surface roughly quadrilateral frame shape downside fixed frame portion 35, movable frame section 36 and support the spring 37 of this movable frame section 36 in the mode that moves freely up and down.The outstanding outside that is formed into of the complete cycle on above-mentioned downside fixed frame portion 35 tops, the chimeric containment member 38 that is fixed with ring-type among the groove 35a on the complete cycle of the outer peripheral face that is formed at this outstanding formation portion.The shape of containment member 38 is preferably lip-type packing.
Above-mentioned movable frame section 36 is coated at the outstanding formation portion of downside fixed frame portion 35 in the mode freely of sliding up and down, and under this state, it is supported on downside fixed frame portion 35 by spring 37.That is, be inserted with the top of spring 37 in a plurality of (only illustrating 2 among Fig. 9～Figure 11) recess 36a of the lower surface that is formed at above-mentioned movable frame section 36, these springs 37 difference mountings are on the protuberance 35b of the lower end of downside fixed frame portion 35.Thus, above-mentioned movable frame section 36 is supported on downside fixed frame portion 35 by spring 37 in the mode that moves freely up and down.In addition, the inner peripheral surface of above-mentioned movable frame section 36 is with the containment member 38 that is connected to downside fixed frame portion 35 of airtight shape and free sliding.
On the complete cycle of movable frame section 36 upper surfaces, be formed with groove 36b, the chimeric roughly containment member 39 of quadrangular ring-shaped that is fixed with in this groove 36b.The effect of the airtight shape of maintenance in sealing member 39 plays when up and down two plates 20,21 agree with sealing above-mentioned spatial portion 34.In addition, the shape of sealing member 39 is preferably lip-type packing.In Fig. 9～Figure 11,40a, 40b are containment members.
Movable vacuum frame 30 like this rises lower panel 21 by the action of hydraulic cylinder or cylinder 29 (with reference to Fig. 6), thereby, can make the lower surface of upside fixed frame portion 31 be close to (with reference to Figure 10) and make its inner space (above-mentioned spatial portion 34) form seal cavity (that is, can making up and down, 20,21 sealings of two plates agree with) with the upper surface of movable frame section 36.And, can be when above-mentioned each spring 37 be shunk, lower panel 21 is risen, thereby lower panel 21 is risen, be connected to up to the lower surface that makes movable frame section 36 (with reference to Figure 11) till the upper surface of lower end protuberance 35b of downside fixed frame portion 35.
Then, plane pressue device 3 will be by two transport membranes 5 up and down, 6 layered products 9 that transport from vacuum lamination apparatus 2 are positioned two pressurizing block 41 up and down, between 42 (with reference to Figure 12), utilize these two pressurizing block 41 up and down, 42 to its heating and pressurization, make two sides level and smooth (with reference to Figure 13) in the table of layered product 9, as shown in figure 12, it comprises uprightly being arranged at and adds 43 many (only illustrating 2 among Figure 12) the pillar 43a of presenting a theatrical performance as the last item on a programme, utilize bolt, fixed part 43b such as nut are fixed in the last pressurizing block 41 of these each pillar 43a, with following pressurizing block 42 that is installed on above-mentioned each pillar 43a in mode moving up and down etc.This time pressurizing block 42 is linked to hydraulic cylinder or cylinder 55 by shaft coupling 54, and its action by this hydraulic cylinder or cylinder 55 (along with rising or the decline of piston rod 55a) moves up and down.
For above-mentioned two pressurizing block 41,42 up and down, in the present embodiment, last pressurizing block 41 is on upper base layer 44, be fixed with flat upside heat-insulating material 46, upside heat dish 47, flat upside padded coaming 48 and upside flexible metal plate 49 in order and constitute from upside, and following pressurizing block 42 is on lower substrate layer 45, be fixed with flat downside heat-insulating material 50, downside heat dish 51, flat downside padded coaming 52 and downside flexible metal plate 53 in order and constitute from downside.
Upside heat-insulating material 46 utilizes fixed parts (not shown) such as bolt, nut to be fixed in the lower surface of upper base layer 44.Upside heat dish 47 utilizes fixed parts (not shown) such as bolt, nut to be fixed in upside heat-insulating material 46, and upside flexible metal plate 49 utilizes fixed parts (not shown) such as bolt, the collar, is fixed in upside heat dish 47 across upside padded coaming 48.In addition, downside heat-insulating material 50 utilizes fixed parts (not shown) such as bolt, nut to be fixed in the upper surface of lower substrate layer 45.Downside heat dish 51 utilizes fixed parts (not shown) such as bolt, nut to be fixed in downside heat-insulating material 50, and downside flexible metal plate 53 utilizes fixed parts (not shown) such as bolt, the collar, is fixed in downside heat dish 51 across downside padded coaming 52.In addition, utilizing fixed parts such as bolt, nut directly fixedly during top (bottom) basalis 44 (45) and upside (downside) heat dish 47 (51), the heat of upside (downside) heat dish 47 (51) is easy to be transmitted to top (bottom) basalis 44 (45) by bolt, nut etc., and is unsatisfactory.In the drawings, 47a, 51a are configured in the shell-like heater of two heat dishes, 47,51 inside up and down side by side.
Then, shown in the enlarged drawing of Fig. 5, transport membrane reeling end 4 comprises the upside takers-in 14 that batches upside transport membrane 5, batch downside transport membrane 6 and be equipped on upside takers-in 14 more downside downside takers-in 15 and be equipped on the discharge conveyer belt (not shown) between two takers- ins 14,15 up and down.In addition, also can not set this discharge conveyer belt.In addition, in transport membrane reeling end 4, also can utilize cooling fan 56 cooling-parts such as grade to come the level and smooth layered product 9 in two sides in the frigorimeter, the membranaceous resin bed 8c surface, that softened of layered product 9 is solidified and make the surface of layered product 9 be difficult to distortion, and, be easy to peel off the membranaceous resin bed 8c and the transport membrane 5,6 that ooze out.
As mentioned above, the maximum of laminater of the present invention is characterised in that, in vacuum lamination apparatus 2, two faces heat dish 23,36, interim layered product 7 sides are provided with the elasticity increased pressure board 24,27 to the surface pressurization of the membranaceous resin material 8b of interim layered product 7 respectively up and down.
As constituting the constituent material of two elasticity increased pressure boards 24,27 up and down, can use elastomeric material, the various resin materials of rubber-like such as hear resistance silicone rubber, hear resistance Viton, be fit to use in inside etc. to be provided with fibrolaminar material.By this fibrage is set, can improve the durability of two elasticity increased pressure boards 24,27 up and down, even thereby pressurization repeatedly under hot conditions, also can suppress the elongation strain of two elasticity increased pressure boards 24,27 up and down, bring into play membranaceous resin material 8b, the membranaceous resin bed 8c effect good with respect to tracing ability, the close property of base material 8a.On the other hand, be not provided with under the fibrolaminar situation in the two elasticity increased pressure boards 24,27 up and down, by the bonding two elasticity increased pressure boards 24,27 up and down of sulfuration on metallic plate 24a, 27a, fibrolaminar situation is same with being provided with, even pressurization repeatedly under hot conditions, also can suppress the elongation strain of two elasticity increased pressure boards 24,27 up and down, bring into play membranaceous resin material 8b, the membranaceous resin bed 8c effect good with respect to tracing ability, the close property of base material 8a.
Do not limit for above-mentioned fibrage is special, be fit to use chemical fibre, glass fibre are made into the material that the cloth shape forms, for example, be provided with in the inside of the plate-like body 61 of rubber system 1 layer or multilayer chemical fibre is made into the fibrage 62 that the cloth shape forms and make they integrated (with reference to Figure 14), 1 layer or the above-mentioned fibrage 62 of multilayer perhaps are set on the one side at least in the two sides in the table of the plate-like body 61 of rubber system and make they integrated (with reference to Figure 15).
Do not limit for above-mentioned metallic plate 24a, 27a are special, but consider to be fit to use corrosion resistant plate from antirust aspect, thickness is not special to be limited, but is preferably in the scope of 0.1～10mm, more preferably in the scope of 1～5mm.
As above-mentioned fluorine is rubber, can list vinylidene fluoride rubber, fluorine silicon rubber, tetrafluoroethene is a rubber, containing fluorovinyl ether is rubber, fluorine-containing phosphonitrile is a rubber, fluorinated acrylate is a rubber, fluorine-containing nitroso methaneseries rubber, fluorine-containing lactoprene, contain Cyanuric trifluoride rubber etc., as commercially available product, for example can list Jinyang corporate system " KINYO BOARD " series, KUREHA ELASTOMER CO.Ltd. system " FLUORIDE RUBBER SHEET FB " series, DAIKIN industrial group system " DAI-EL " series, DUPONT corporate system " VITON " series, DOW CORNING corporate system " SILASTIC " series, MONTEDISON corporate system " TECNOFLON " series, 3M corporate system " FLUOREL " series, " KEL-F " series etc.
As above-mentioned fibrolaminar fibrous raw material, from being easy to the aspect consideration bonding with elastomeric material, being preferably glass fibre, polyester or nonpolar hard raw materials such as other polarity hard raw material, polyethylene, polyester system and nylon is nonpolarity soft raw materials such as the soft raw material of isopolarity, olefine etc.Aspect preferred polyester, nylon from intensity, excellent heat resistance.Be preferably especially, as elastomeric material, portion is provided with the cloth (hear resistance nylon is made into the cloth shape and make fibrage) of hear resistance nylon system within it with the hear resistance Viton, and intensity and hear resistance are very good.Commodity as sell the market for example have Jinyang corporate system " KINYO BOARD " series, wherein preferred " F-200 ".
For the hardness of two elasticity increased pressure boards 24,27 up and down, preferred Xiao A hardness is set at more than 40 degree.That is, seek opposite stronger tearing strength and higher fissility for two elasticity increased pressure boards 24,27 up and down, above-mentioned hardness is bigger to the influence of tearing strength and fissility.At above-mentioned Xiao A hardness is 40 degree when above, and two elasticity increased pressure boards 24,27 can extend preferably and be difficult to tearing up and down, obtain the stronger tearing strength of anti-pressurization slabbing simultaneously.On the other hand, about fissility, can obtain sufficient fissility, two elasticity increased pressure boards 24,27 peeled about layered product 9 was easy to certainly.Preferred hardness of two elasticity increased pressure boards 24,27 is more than 50 degree about these, more preferably more than 60 degree.In addition, in the present invention, Xiao A hardness is that benchmark is measured with JIS Z2246 (2000).
In addition, the thickness of two elasticity increased pressure boards 24,27 is preferably in the scope of 0.1～10mm up and down, more preferably in the scope of 0.5～3mm.Cross when thin at above-mentioned thickness, exist fibrolaminar reticulate pattern to be presented in the surface of two elasticity increased pressure boards 24,27 up and down and the tendency of fibrolaminar reticulate pattern is arranged in the surface transfer of membranaceous resin bed 8c, when above-mentioned thickness is blocked up, existence worsens to the heat conduction of membranaceous resin bed 8c from upside heat dish 23, downside heat dish 26, the even tendency of temperature distributing disproportionation of upside heat dish 23, downside heat dish 26.In addition, the surface of two elasticity increased pressure boards 24,27 preferably is roughened up and down, and its surface roughness Rz is preferably more than the 1 μ m, more preferably in the scope of 20～400 μ m, more preferably in the scope of 20～60 μ m.Above-mentioned surface roughness Rz is big more, after heating and the pressurization, two elasticity increased pressure boards 24,27 are easy to more from membranaceous resin bed 8c or two transport membranes, 5,6 separation up and down up and down, but the rough surface of two elasticity increased pressure boards 24,27 is transferred to the surface of membranaceous resin bed 8c about existing, and the tendency of the surperficial specularity of damage layered product 9, when above-mentioned surface roughness is too small, itself and membranaceous resin bed 8c or the close property of two transport membranes 5,6 is strong excessively up and down, after having heating and pressurization, two elasticity increased pressure boards 24,27 are difficult to the tendency that peels from membranaceous resin bed 8c up and down.In addition, in the present invention, surface roughness Rz is that benchmark is measured with JIS B0601 (2001).
In the present invention, use the laminater of Fig. 1, following making layered product 9.At first, prepare the interim layered product 7 that male and fomale(M﹠F) that membranaceous resin material 8b is temporarily fixed on base material 8a forms in advance.Secondly, interim layered product 7 is fed into moves into conveyer belt 13, this is moved into conveyer belt 13 and it is supplied to two carries with between the films 5,6 certainly.Two conveyings were moved into vacuum lamination apparatus 2 with film 5,6 clampings about this was supplied to next interim layered product 7 quilts.
In this vacuum lamination apparatus 2, the following vacuum lamination operation of carrying out.At first, two conveyings are transported to above-mentioned interim layered product 7 in the vacuum lamination apparatus 2 with film 5,6 about utilizing, and (with reference to Fig. 1 and Figure 16, in this Figure 16, two conveyings are not shown with film 5,6 up and down in assigned position (compacted position) and be located.Figure 17 and Figure 18 are also identical).Secondly, make 29 actions of hydraulic cylinder or cylinder and lower panel 21 is risen, the lower surface that makes the upside fixed frame portion 31 of upper board 20 is close to the upper surface of the movable frame section 36 of lower panel 21 and two plates 20,21 is sealed agree with (with reference to Figure 10 and Figure 17).
After sealing is agreed with, make spatial portion 34 form decompression state.Specifically, utilize vavuum pump (not shown) and by vacuum drawn with nozzle 33 (with reference to Fig. 9) to spatial portion 34 decompression (with reference to Figure 17).Make the pressure of above-mentioned spatial portion 34 become below the 200P a, be preferably the following vacuum state of 100Pa.When above-mentioned pressure was excessive, residual between base material 8a and membranaceous resin material 8b had a slight void, during membranaceous resin bed 8c heat cure after in the operation of back, making lamination, and the surface depressions at the residual position that slight void arranged and cause the bad tendency of goods.
Then, make hydraulic cylinder or cylinder 29 actions, lower panel 21 is risen, utilize up and down the interim layered product 7 of two elasticity increased pressure boards, 24,27 crampings and, the bonding membranaceous resin material 8b in two sides in the table of base material 8a and make layered product 9 its heating and pressurization (with reference to Figure 18).Specifically, the adjustment of above-mentioned pressure is that the pressure of regulating downside elasticity increased pressure board 27 under the state that spatial portion 34 is reduced pressure gets final product, two elasticity increased pressure boards 24,27 are pushed the two membranaceous resin material 8b up and down of interim layered product 7 about utilizing, and base material 8a and membranaceous resin material 8b are compressed.Layered product 7 is formed layered product 9 by vacuum lamination like this, temporarily.The surface of this layered product 9, though on base material 8a concavo-convex, be close to and followed membranaceous resin bed 8c, concavo-convex the manifesting of base material 8a and and unsmooth.
When above-mentioned heating and pressurization, preferably making the temperature of upside heat dish 23 and downside heat dish 26 is 30～185 ℃, more preferably 70～140 ℃.Cross when low at said temperature, existence can't be filled membranaceous resin bed 8c in base material 8a, tracing ability deterioration and the tendency of residual slight void.On the other hand, when said temperature is too high, exist membranaceous resin material 8b to cause thermal decomposition curing, reduce the tendency that produces slight void because of decomposition gas makes tracing ability.Do not limit for such temperature-controlled process is special, can utilize to be built in the adjustment such as shell- like heater 23a, 26a of two heat dishes 23,26 up and down.
In above-mentioned heating and pressure process, pressurized conditions is set in the scope of 0.1～2MPa, is preferably 0.4～1.5MPa.
After above-mentioned heating and pressurization operation finished, the vacuum state that discharges above-mentioned spatial portion 34 with nozzle 33 by vacuum drawn made its recovery normal pressure, makes hydraulic cylinder or cylinder 29 actions and lower panel 21 is descended.Afterwards, layered product 9 two is carried with film 5,6 clampings up and down, moves into the plane pressue device 3 of subsequent processing.
In this plane pressue device 3, the following plane pressurization operation of carrying out.At first, utilize up and down two to carry that with film 5,6 above-mentioned layered product 9 to be transported to plane pressue device 3 interior and be located in assigned position (pressing position).Secondly, make hydraulic cylinder or cylinder 55 actions and pressurizing block 42 is risen, two flexible metal plates, 49,53 cramping layered products 9 about utilizing and, make the surface smoothing of the membranaceous resin bed 8c of layered product 9 its heating and pressurization.
Then, make hydraulic cylinder or cylinder 55 actions, pressurizing block 42 is descended.Afterwards, layered product 9 utilizes up and down two to carry with film 5,6 and discharge from plane pressue device 3, in transport membrane reeling end 4, from two carrying and peel off with film 5,6 up and down, utilizes and discharges the conveyer belt discharge after fan 56 coolings that are cooled.
In above-mentioned plane pressurization operation, heating-up temperature is set at 30～200 ℃, is preferably 70～140 ℃, and pressurized conditions is set at 0.1～2MPa, is preferably 0.5～1.5MPa.
As mentioned above, in the present embodiment, on the two hot dishes 23,26 that are arranged at vacuum lamination apparatus 2, be fixed with elasticity increased pressure board 24,27 respectively, use the surface pressurization of 24,27 couples of membranaceous resin material 8b of these two elasticity increased pressure boards, therefore, can utilize above-mentioned two elasticity increased pressure boards 24,27 with of the surface pressurization of stronger pressure to membranaceous resin material 8b, thereby can be when this pressurize, utilize the elasticity of above-mentioned two elasticity increased pressure boards 24,27 to make it add the male and fomale(M﹠F) strain of pressure surface (to the face of the surface pressurization of above-mentioned membranaceous resin material 8b) along base material 8a.Therefore, even under the fine or concavo-convex darker situation in the concavo-convex gap of base material 8a, the time membranaceous resin material 8b is close to and follows base material 8a, not residual bubble between this base material 8a and membranaceous resin material 8b in pressurization.And, comprise plane pressue device 3 in the present embodiment, therefore, can utilize in the table of the layered products 9 that 3 pairs of this plane pressue devices form the two sides pressurization and make it level and smooth in above-mentioned vacuum lamination apparatus 2.
Figure 19 represents another embodiment of laminater of the present invention.In the present embodiment, be not as above-mentioned embodiment, utilize and to move into conveyer belt 13 and interim layered product 7 is moved into up and down between two transport membranes 5,6 one by one and it is supplied to vacuum lamination apparatus 2.Replace, use banded circuit board 10c, use the banded membranaceous resin material 10a of upside simultaneously, the banded membranaceous resin material 10b of downside, and, each the take up roll 11a～11c that is wound with these materials is set, with batch the two banded membranaceous resin material 10a up and down that will pull out from these each take up roll 11a～11c, 10b, and banded circuit board 10c imported vacuum lamination apparatus 2 and the banded layered product 9a that obtains (superficial layer at banded circuit board 10c is pressed with the banded membranaceous resin material 10a of upside, be pressed with the material of the banded membranaceous resin material 10b of downside in its back layer) layered product takers-in 14a.Thus, two banded membranaceous resin material 10a, 10b and banded circuit board 10c supply to vacuum lamination apparatus 2, plane pressue device 3 continuously up and down.
The laminater of present embodiment is made of reeling end 4a such as the 1a of uncoiling portion, vacuum lamination apparatus 2, plane pressue device 3 and film such as films, and the structure of vacuum lamination apparatus 2, plane pressue device 3 is identical with above-mentioned embodiment, plays same effect.In addition, in the present embodiment,, therefore, do not use auto slice laminater and move into conveyer belt 13 owing to do not use interim layered product 7.
1a of uncoiling portion such as above-mentioned film and above-mentioned embodiment (transport membrane uncoiling portion 1) are same, not only comprise upside transport membrane take up roll 11 and downside transport membrane take up roll 12, two transport membrane take up rolls 11 about these, on 12 the basis, also comprise the upside resin material take up roll 11a that is wound with the banded membranaceous resin material 10a of upside, be wound with the banded membranaceous resin material 10b of downside and be equipped on the downside resin material take up roll 11b of the more downside (11a stands facing each other mutually with upside resin material take up roll) of upside resin material take up roll 11a, with the banded circuit board rolling roller 11c that is wound with banded circuit board 10c.This laminater also comprises the 1st guide reel 12a and the 2nd guide reel 12b; Above-mentioned the 1st guide reel 12a will guide between the two heat dishes 23,26 of above-mentioned vacuum lamination apparatus 2 from the banded membranaceous resin material 10a of the upside that upside resin material take up roll 11a pulls out; Above-mentioned the 2nd guide reel 12b (being equipped on the more downside of the 1st guide reel 12a) with the 1st guide reel 12a with standing facing each other mutually will from the banded membranaceous resin material 10b of the downside that downside resin material take up roll 11b pulls out with and the state faced mutually of the banded membranaceous resin material 10a of upside guide between the above-mentioned two heat dishes 23,26.This laminater also comprises the 3rd guide reel 12c, and the 3rd guide reel 12c will be positioned above-mentioned guiding between two banded membranaceous resin material 10a, the 10b and with it up and down between the above-mentioned heat dish 23,26 from the banded circuit board 10c that banded circuit board rolling roller 11c pulls out.And, this laminater also comprises the layered product takers-in 14a that batches banded layered product 9a, this band shape layered product 9a imports between the above-mentioned two heat dishes 23,26 by up and down two banded membranaceous resin material 10a, 10b and banded circuit board 10c, and makes 23,26 actions of above-mentioned two heat dishes and form.
At this, express as Figure 19, in the 1a of uncoiling portion such as above-mentioned film, 5,6, the up and down two banded membranaceous resin material 10a of two transport membranes up and down, the 10b and the banded circuit board 10c (with reference to Figure 20) that pull out from each take up roll 11,12,11a～11c are to be sent towards the tactic state of downside according to upside transport membrane 5, upside banded membranaceous resin material 10a, banded circuit board 10c, the banded membranaceous resin material 10b of downside, downside transport membrane 6 from upside.Therefore, with respect to transport membrane take up roll 11,12 up and down near upstream side (right side among Figure 19) configuration of flow path substrate directions (with reference to the arrow of Figure 19) two resin material take up roll 11a, 11b up and down, locating two banded membranaceous resin material 10a, 10b up and down up and down between two transport membranes 5,6, and, with respect to up and down two resin material take up roll 11a, 11b near the banded circuit board rolling roller 11c of upstream side (right side among Figure 19) configuration of above-mentioned flow direction, at the banded circuit board 10c in location between two banded membranaceous resin material 10a, the 10b up and down.In addition, also up and down two resin material take up roll 11a, 11b can be arranged on respect to transport membrane take up roll 11,12 up and down near the downstream of flow path substrate directions (with reference to the arrow of Figure 19).
In addition; with coverlay (not shown) the protection resin face of two banded membranaceous resin material 10a, 10b (face of facing mutually with banded circuit board 10c) up and down; need peel during use under the situation of coverlay, near up and down two resin material take up roll 11a, 11b, be provided for batching the takers-in (not shown) of coverlay.Do not limit for the driver part of this takers-in is special, special-purpose driver parts such as motor can be set, the takers-in periphery contact with the periphery of two resin material take up roll 11a, 11b up and down and about the general rotation of two resin material take up roll 11a, 11b be delivered to takers-in and batch.
As above-mentioned two banded membranaceous resin material 10a, 10b up and down, can use with above-mentioned embodiment in the identical material of membranaceous resin material 8b that adopts (form the rectangle sheet in the above-described embodiment, but form lengthwise in the present embodiment), thus the banded resin material 8b that is wound in core (not shown) can be used.In addition, as above-mentioned banded circuit board 10c, can use to have and to make the roller shape and be installed on banded circuit board rolling roller 11c and can batch in the material of the flexibility of the degree of layered product takers-in 14a, for example, also can use to have flexible symphysis knot to have the material that flexible a plurality of base material 8a form, perhaps on basilar memebrane, be formed with the material that many places circuit layout etc. forms (part that is formed with circuit layout etc. becomes base material 8a) with flexible lengthwise.For thickness and the not special qualification of length of banded circuit board 10c, thickness is preferably in the scope of 0.02～2mm, and length is preferably in the scope of 10～1000m m.In addition, above-mentioned up and down two transport membranes 5,6 can use with above-mentioned embodiment in the transport membrane identical materials that adopts.Two transport membranes 5,6 were to be paid the state operation of the tension force in 0.5～150kN scope about two banded membranaceous resin material 10a up and down like this, 10b, banded circuit board 10c reached, and transporting velocity is set in the scope of 1～20m/ branch usually.
Reeling end 4a such as above-mentioned film and above-mentioned embodiment (transport membrane reeling end 4) are same, not only comprise upside takers-in 14, downside takers-in the 15, the 1st driver part and the 2nd driver part, on this basis, also comprise and batching via vacuum lamination apparatus 2 and plane pressue device 3 and the layered product takers-in 14a of the banded layered product 9a (layered product 9 of a plurality of softnesses connects into a string material that forms) that makes.This layered product takers-in 14a is disposed at respect to two takers- ins 14,15 up and down and is being positioned with banded layered product 9a between two transport membranes 5,6 up and down near the downstream (left side among Figure 19) of above-mentioned flow directions.Reeling end 4a such as this film also comprise the layered product driver part 14c (with reference to Figure 21) that also batches driving layered product takers-in 14a with above-mentioned two takers- ins 14,15 up and down synchronously discontinuously.In addition, in the present embodiment, do not set the discharge conveyer belt.
After the upside transport membrane 5 that above-mentioned upside transport membrane take up roll 11 is uncoiled is passing through vacuum lamination apparatus 2 and plane pressue device 3, batch in the upside takers-in 14 of reeling end 4a such as film, after the downside transport membrane 6 that downside transport membrane take up roll 12 is uncoiled is passing through vacuum lamination apparatus 2 and plane pressue device 3 too, batch in the downside takers-in 15 of reeling end 4a such as film.In addition, two banded membranaceous resin material 10a, the 10b up and down and the banded circuit board 10c that are uncoiled from each take up roll 11a～11c are directed to vacuum lamination apparatus 2, plane pressue device 3 via each guide reel 12a～12c, form the banded layered product 9a of one and batch in layered product takers-in 14a.
In addition, in vacuum lamination apparatus 2, two transport membranes, 5,6, up and down two banded membranaceous resin material 10a, 10b and banded circuit board 10c are heated under vacuum state and pressurize up and down, the banded layered product 9a of two banded membranaceous resin material 10a, 10b and banded circuit board 10c about between two transport membranes 5,6 there be the formation lamination up and down.In addition, in plane pressue device 3, be transferred 5,6, the up and down two banded membranaceous resin material 10a of two transport membranes up and down, the 10b that come and banded circuit board 10c from vacuum lamination apparatus 2 and be heated and pressurize, the two sides is level and smooth in the table that makes above-mentioned banded layered product 9a up and down between two transport membranes 5,6.
Among the banded layered product 9a of Huo Deing, be formed with 1 goods that constitutes by 1 base material 8a and two membranaceous resin material 8b up and down laminated thereon along its length continuously in the present embodiment.Thereby banded layered product 9a is cut to per 1 goods in the operation of back.In order to obtain 1 goods expeditiously, the distance that is preferably between goods is shorter.In the present embodiment, owing to have distance between vacuum lamination apparatus 2 and the plane pressue device 3, therefore, can't in the space of the banded layered product 9a of the amount that is equivalent to this distance, form goods.As shown in figure 22, in order to eliminate this problem, between the stream oriented device 2,3 ladder roller 15b is being set up and down, crooked and when it is kept at the banded layered product 9a of the amount of the distance of 1 action cycle of the heat dish 23,26 that utilizes this ladder roller 15b to make to be equivalent to vacuum lamination apparatus 2, can shorten the distance between the adjacent goods.Thus, can eliminate the waste that produces because of the distance between vacuum lamination apparatus 2 and the plane pressue device 3.In addition, also can empty open the interval (distance that is equivalent to 1 action cycle of above-mentioned heat dish 23,26) of regulation and vacuum lamination apparatus 2 and plane pressue device 3 are set.
As mentioned above, present embodiment plays effect and the effect same with above-mentioned embodiment.And with respect to the attendant equipments such as auto slice laminater that need high price in the above-described embodiment, present embodiment has the advantage of the attendant equipment that does not need high price.And, under the thickness of the insulating barrier (basilar memebrane) of base material 8a is situation below the 100 μ m, crimping or undercapacity owing to its perk when insulating barrier is cut into the rectangle sheet, therefore, be difficult to form and carry interim layered product 7, but in the present embodiment, by making banded circuit board 10c form band shape and paying under the state of tension force with its processing, under the thickness of above-mentioned insulating barrier is situation below the 100 μ m, also can lamination two banded membranaceous resin material 10a, 10b and banded circuit board 10c up and down, and make its smoothing.
Figure 23 represents the another embodiment of laminater of the present invention.In the present embodiment, be not included in two transport membrane take up rolls 11,12, up and down two takers- ins 14,15 and two driver parts up and down in the embodiment shown in Figure 19.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.
Figure 24 represents the another embodiment of laminater of the present invention.In the present embodiment, be not included in the layered product takers-in 14a that batches banded layered product 9a in the embodiment shown in Figure 19.In addition, the driver part 14c with banded layered product 9a is arranged at position shown in Figure 24.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.In addition, in the present embodiment, the banded layered product 9a that pulls out from laminater of the present invention is formed with 1 goods that is made of 1 base material 8a and two membranaceous resin material 8b up and down laminated thereon along its length continuously, and banded layered product 9a is cut to per 1 goods by the shearing device (not shown) with laminater disposed adjacent of the present invention.In addition, though not shown, also shearing device can be disposed in the laminater of the present invention in driver part 14c downstream of banded layered product 9a.
Figure 25 represents the another embodiment of laminater of the present invention.In the present embodiment, do not comprise the layered product takers-in 14a that batches banded layered product 9a in the embodiment shown in Figure 19.In addition, the driver part 14c of banded layered product 9a is arranged at position shown in Figure 25, and, do not comprise two transport membrane take up rolls 11,12, up and down two takers- ins 14,15 and two driver parts up and down.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.Present embodiment can be used for such situation, promptly, when utilizing the banded membranaceous resin material 10b of laminater of the present invention heating and the banded membranaceous resin material 10a of pressurization upside, downside, resin dissolves and oozes out from the end of the membranaceous resin material 10a of these two band shapes, 10b, is not attached to laminater of the present invention.Specifically, it is suitable for photosensitive polyimide film etc.
Figure 26 represents the another embodiment of laminater of the present invention.Present embodiment is such structure,, substitutes the banded circuit board 10c in the embodiment shown in Figure 19 that is, uses base material (individual circuit board) 8a, and it is supplied to vacuum lamination apparatus 2.Simultaneously, be provided with and move into conveyer belt 13 by substituting take up roll 11c shown in Figure 19, can utilize and move into conveyer belt 13 and base material (individual circuit board) 8a is moved into up and down between two banded membranaceous resin material 10a, the 10b one by one and it is supplied to vacuum lamination apparatus 2.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.And, in the present embodiment, do not use the attendant equipments such as auto slice laminater of high price at base material 8a, just can lamination about two banded membranaceous resin material 10a, 10b.
Figure 27 represents the another embodiment of laminater of the present invention.In the present embodiment, do not comprise layered product takers-in 14a in the embodiment shown in Figure 19, that batch banded layered product 9a.In addition, the driver part 14c of banded layered product 9a is such structure,, is arranged at position shown in Figure 27 that is, and substitutes banded circuit board 10c and use base material (individual circuit board) 8a, and it is supplied to vacuum lamination apparatus 2.Simultaneously, be provided with and move into conveyer belt 13, can utilize and move into conveyer belt 13 and base material 8a is moved into up and down between two banded membranaceous resin material 10a, the 10b one by one and it is supplied to vacuum lamination apparatus 2 by substituting take up roll 11c shown in Figure 19.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.And, in the present embodiment, do not use the attendant equipments such as auto slice laminater of high price at base material 8a, just can lamination about two banded membranaceous resin material 10a, 10b.And, the banded layered product 9a that pulls out from laminater of the present invention is made of 1 base material (individual circuit board) 8a and two banded membranaceous resin material 10a, 10b up and down laminated thereon, and continuous along its length banded layered product 9a is cut to per 1 goods by the shearing device (not shown) with laminater disposed adjacent of the present invention.In addition, though not shown, also shearing device can be disposed in the laminater of the present invention in driver part 14c downstream of banded layered product 9a.
Figure 28 represents the another embodiment of laminater of the present invention.Present embodiment is such structure, that is, do not comprise the banded circuit board 10c in the embodiment shown in Figure 19 and use base material (individual circuit board) 8a, and it is supplied to vacuum lamination apparatus 2.Simultaneously, be provided with and move into conveyer belt 13 by substituting take up roll 11c shown in Figure 19, can utilize and move into conveyer belt 13 and base material (individual circuit board) 8a is moved into up and down between two banded membranaceous resin material 10a, the 10b one by one and it is supplied to vacuum lamination apparatus 2.And,, do not comprise two transport membrane take up rolls 11,12, up and down two takers-ins 14,15 and two driver parts up and down with respect to Figure 19.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.And, in the present embodiment, do not use the attendant equipments such as auto slice laminater of high price at base material (individual circuit board) 8a, just can lamination about two banded membranaceous resin material 10a, 10b.And, present embodiment can be used for such situation, that is, utilizing laminater of the present invention heating and pressurization up and down when two banded membranaceous resin material 10a, 10b, resin dissolves and oozes out from the end of the membranaceous resin material 10a of these two band shapes, 10b, is not attached to laminater of the present invention.Specifically, it is suitable for photosensitive polyimide film etc.
Figure 29 represents the another embodiment of laminater of the present invention.In the present embodiment, do not comprise the layered product takers-in 14a that batches banded layered product 9a in the embodiment shown in Figure 19.In addition, the driver part 14c of banded layered product 9a is such structure,, is arranged at position shown in Figure 29 that is, and, substitute banded circuit board 10c and use base material (individual circuit board) 8a, it is supplied to vacuum lamination apparatus 2.Simultaneously, be provided with and move into conveyer belt 13 by substituting take up roll 11c shown in Figure 19, can utilize and move into conveyer belt 13 and base material (individual circuit board) 8a is moved into up and down between two banded membranaceous resin material 10a, the 10b one by one and it is supplied to vacuum lamination apparatus 2.And,, do not comprise two transport membrane take up rolls 11,12, up and down two takers-ins 14,15 and two driver parts up and down with respect to Figure 19.In addition part is identical with embodiment shown in Figure 19, to the identical identical Reference numeral of part mark.Present embodiment also plays effect and the effect same with embodiment shown in Figure 19.And, in the present embodiment, do not use the attendant equipments such as auto slice laminater of high price at base material (individual circuit board) 8a, just can lamination about two banded membranaceous resin material 10a, 10b.And, the banded layered product 9a that pulls out from laminater of the present invention is made of 1 base material (individual circuit board) 8a and two banded membranaceous resin material 10a, 10b up and down laminated thereon, and the banded layered product 9a that forms discontinuously is cut to per 1 goods by the shearing device (not shown) with laminater disposed adjacent of the present invention along its length.In addition, though not shown, also shearing device can be disposed in the laminater of the present invention in driver part 14c downstream of banded layered product 9a.And, present embodiment can be used for such situation, that is, utilizing laminater of the present invention heating and pressurization up and down when two banded membranaceous resin material 10a, 10b, resin dissolves and oozes out from the end of two banded membranaceous resin material 10a, 10b up and down, is not attached to laminater of the present invention.Specifically, it is suitable for photosensitive polyimide film etc.
In addition, in Fig. 1, form the continuous laminating device that vacuum lamination apparatus 2 and plane pressue device 3 form is set in the lump, but be not limited thereto, also vacuum lamination apparatus 2 and plane pressue device 3 can be set independently.In addition, in Fig. 1, in order to carry interim layered product 7, layered product 9 and to eliminate oozing out from membranaceous resin material 8b, membranaceous resin bed 8c, use two transport membranes 5,6 up and down in the lump, but in order to control to adjust the such tension force and the transporting velocity of two transport membranes 5,6 up and down, transport membrane uncoiling portion 1 is disposed near the moving into the mouth of interim layered product 7 of vacuum lamination apparatus 2, and transport membrane reeling end 4 is disposed near the taking out of the mouth of layered product 9 of plane pressue device 3.In addition, in Figure 19, Figure 24, Figure 26 and Figure 27, ooze out from banded layered product 9a in order to eliminate resin, use two transport membranes 5,6 up and down in the lump, but in order to control to adjust the such tension force and the transporting velocity of two transport membranes 5,6 up and down, the 1a of uncoiling portion such as film are disposed near the film inlet of vacuum lamination apparatus 2, and reeling end 4a such as film are disposed near the film outlet of plane pressue device 3.
In addition, in above-mentioned vacuum lamination apparatus 2 and plane pressue device 3, use upper board 20, go up that pressurizing block 41 can move up and down and lower panel 21, the fixing structure of pressurizing block 42 down, but the aspect that produces foreign matter dust from the elevating mechanism by upper board 20, last pressurizing block 41 is considered, the structure of preferred Fig. 1, Figure 19 and Figure 24～Figure 29.
In addition, in Fig. 1, Figure 19, Figure 24, Figure 26 and Figure 27, represented when utilizing vacuum lamination apparatus 2 and plane pressue device 3 to handle, all to use the situation of two transport membranes 5,6 up and down, but also can only when utilizing vacuum lamination apparatus 2 to handle, use two transport membranes 5,6 up and down, or only when utilizing plane pressue device 3 to handle, use two transport membranes 5,6 up and down.In addition, also two transport membranes 5,6 up and down can be set separately in vacuum lamination apparatus 2 and plane pressue device 3 respectively.
Figure 30 represents the variation of the vacuum lamination apparatus 2 that adopts in the respective embodiments described above.In this example, movable vacuum frame 30 is not set in above-mentioned vacuum lamination apparatus 2, the airtight shape of lower surface of upper board 20 be fixed with the roughly upside fixed frame portion 63 of quadrilateral frame shape, on lower frame 21, be fixed with the roughly downside fixed frame portion 64 of quadrilateral frame shape.In addition, in this example, in upside fixed frame portion 63, be not fixed with vacuum drawn nozzle 33, and in lower panel 21, be provided with vacuum drawn with through hole 65, with through hole 65 air in the spatial portion 34 are evacuated by this vacuum drawn along downside fixed frame portion 64.
In addition, in this example, be provided with lifting freely mode support the hydraulic cylinder of lower panel 21 or cylinder 66 and with lifting freely mode support hydraulic cylinder or the cylinder 68 that is fixed in the support plate 67 of downside heat dish 26 across downside heat-insulating material 25, utilize hydraulic cylinder or cylinder 66 that lower panel 21 is moved up and down, utilize hydraulic cylinder or cylinder 68 that downside heat dish 26 is moved up and down.Among the figure, the 69th, be fixed in the annular seal member of downside fixed frame portion 64 upper surfaces, play the effect that when vacuum lamination, spatial portion 34 is remained airtight shape.In addition the vacuum lamination apparatus 2 that adopts in part and the respective embodiments described above is identical, to the identical identical Reference numeral of part mark.Under the situation of the vacuum lamination apparatus 2 that uses this example, also play effect and the effect same with the laminater of the respective embodiments described above.
In addition, also can for, use above-mentioned two laminaters, cleaning devices such as configuration little adhesive roller or ultrasonic cleaner before carrying out laminating method of the present invention utilize the surface of their cleaned base material 8a and the surface of two transport membranes 5,6 up and down.
In addition, before vacuum lamination apparatus 2, after the plane pressue device 3, dispose and move into conveyer belt 13, discharge conveyer belt (not shown), utilization is moved into conveyer belt 13 interim layered product 7 is supplied to two transport membranes 5,6 up and down, utilize to discharge conveyer belt and discharge the layered product of peeling off from two transport membranes 5,6 up and down 9, but also can substitute these two conveyer belts 13 and use rotation roller group, endless belt.In addition, the raw material of two conveyer belts 13 is to be difficult to pollute and the material that do not play dirt gets final product.In addition, above-mentioned two conveyer belts 13 be of a size of length in the scope of 0.3～3m, be preferably 0.5～1.5m and get final product, in addition, its transporting velocity is generally in the scope that 1～25m/ divides.
When plane pressue device 3 is discharged layered product 9, in order to prevent in the operation of back, to produce impression (squeezing into vestige), preferably after discharging, make it be cooled to the room temperature degree immediately and solidify, do not limit such cooling means is special, can cool off by natural heat dissipation, also can after being right after plane pressue device 3, cooling device be set.This cooling device industrially use refrigerator, use the heat insulation expansion utilize air and cold air cooling fan or cold wind squeegee, in pipe, feed chill roll that cold water is arranged etc.
When this cools off, more preferably under by the state of two transport membranes, 5,6 clampings up and down, cool off layered product 9, be preferably, clamping under the state of the layered product 9 that is transported by plane pressue device 3 its cooling in two transport membranes 5,6 up and down, it is discharged to the conveyer belt of rear side after cooling.
Be preferably, after the inlet of discharging conveyer belt is provided in plane pressue device 3 heating and pressurized treatments, peel layered product 9 and stripping off devices such as stripper roll, the anti-locking apparatus (not shown) that takeoffs for example of two transport membranes 5,6 up and down.Also can suitably dispose the accumulator that is used for after plane pressue device 3, storing compacted layered product 9, perhaps pressue device etc. suitably further is set for the surface smoothing that improves layered product 9.In addition, in order to tackle static, also can or the torch etc. that disappears be set everywhere at the film line of two transport membranes 5,6 up and down.
In addition, also can substitute the two banded membranaceous resin material 10a up and down among Figure 19,10b reaches two resin material take up roll 11a up and down, 11b, banded circuit board rolling roller 11c is configured in the upstream of auto slice laminater and will be inserted into auto slice laminater from the banded circuit board 10c that banded circuit board rolling roller 11c pulls out, the membranaceous resin material 8b that is cut into the rectangle sheet is temporarily fixed on banded circuit board 10c and it is supplied to vacuum lamination apparatus 2, as Figure 26, shown in Figure 27, also can substitute banded circuit board 10c and banded circuit board rolling roller 11c, utilization is moved into conveyer belt 13 base material 8a is moved into two banded membranaceous resin material 10a up and down one by one, between the 10b and it is supplied to vacuum lamination apparatus 2.In addition, in Figure 30, also can substitute banded circuit board 10c and banded circuit board rolling roller 11c, move into conveyer belt 13 as Figure 28 and utilization shown in Figure 29 and base material (individual circuit board) 8a is moved into up and down between two banded membranaceous resin material 10a, the 10b one by one and it is supplied to vacuum lamination apparatus 2.
The present invention is for other purposes of locating outside the printed circuit board, for example on the LCD circuit board, fit have the polarization plate of sticker, when having the polarizer of sticker, when the label band is fitted various base material, on various circuit boards bonding dicing tape etc. or be attached with the film of thermoplastic resin, when for example fitting IC-card etc., also be effective apparatus and method.And, the vacuum pressure device of the application of the invention, when can on having concavo-convex base material, being close to and following membranaceous resin material, make concavo-convex planarization by the concavo-convex membranaceous resin material surface that causes of base material, further utilizing the plane pressue device to make the purposes of the goods smoothing of lamination in vacuum pressure device of the present invention, because the surface of membranaceous resin material forms planarization as mentioned above, therefore, when shortening plane pressing time, suppress that resin oozes out and the resin thickness uniformity of improving membranaceous resin material outer part around membranaceous resin material.
Below, enumerate embodiment and more specifically describe the present invention, but the present invention is only otherwise exceed purport, then is not limited to following embodiment.
Embodiment 1
Use vacuum lamination apparatus 2 shown in Figure 1 and plane pressue device 3.Utilize the heat dish 23,26 of two plates 20,21 up and down of vacuum lamination apparatus 2 that spatial portion 34 is adjusted into 110 ℃ in advance.At first, to be provided in two sides in the table that two sides in the table has concavo-convex base material 8a by the membranaceous resin material 8b that heat-curing resin constituent (80 ℃ of glass transformation temperatures) and PETG support membrane constitute, this heat-curing resin constituent is made of epoxy resin, utilize auto slice laminater so that the resin face of two membranaceous resin material 8b (thickness of resin bed is 38 μ m) and the male and fomale(M﹠F) of above-mentioned base material 8a (concavo-convex thickness is 18 μ m, the concavo-convex 20 μ m that are spaced apart) mode of contact is temporary fixed with it, is ready to interim layered product 7.
Secondly, (thickness is 38 μ m utilizing two transport membranes 5,6 up and down that are made of PETG, surface roughness is 0.5 μ m) above-mentioned interim layered product 7 is transported to after the compacted position in the vacuum lamination apparatus 2, lower panel 21 is risen and it is sealed with upper board 20 and agree with, afterwards, enter decompression operation.
Utilize vavuum pump (not shown) to attract air with nozzle 33 from vacuum drawn, make and begin to attract 30 seconds spatial portions 34 afterwards to be 100Pa, utilize thickness for 2mm, be of a size of the two elasticity increased pressure boards 24,27 up and down of (vertical * horizontal stroke) 63cm * 63cm, with the pressure of 1MPa to 20 seconds of interim layered product 7 pressurizations.As two elasticity increased pressure boards 24,27 up and down, be directly fixed on Jinyang corporate system " KINYO BOARDF200 " up and down that two heat dishes 23,26 use, built-in 9 shell- like heater 23a, 26a respectively in the inside of two heat dishes 23,26 up and down.
Then, make spatial portion 34 recover atmospheric pressure, lower panel 21 is descended, utilizing up and down, two transport membranes 5,6 are transported to plane pressue device 3 with compacted interim layered product 7 (that is, layered product 9) from vacuum lamination apparatus 2 discharges.
Then, utilize plane pressue device 3 pressurization layered products 9.As two flexible metal plates 49,53 up and down, the flatness that use adds pressure surface is the corrosion resistant plate (SUS630H of 3 μ m, thickness is 3mm), as two padded coamings 48,52 up and down, using sand paper with #1500 that (copolymer of vinylidene fluoride, hexafluoro propylene, the tetrafluoroethylene) surface treatment of vinylidene fluoride rubber is adjusted into thickness with it is that 15 μ m, Xiao A hardness are 70 to spend the material that forms as 2.5mm, surface roughness Rz.In addition, be built-in with 9 shell- like heater 47a, 51a in the inside of two heat dishes 47,51 up and down, as lower panel 45, used thickness is the iron material of 80mm.
At first, the heat dish 47,51 of two plates 44,45 up and down of plane pressue device 3 is adjusted into 120 ℃, lower panel 45 is risen, utilize two flexible metal plates 49,53 up and down, with the pressure of 1.5MPa to 50 seconds of layered product 9 pressurizations.
Afterwards, lower panel 45 is descended, utilization two transport membranes 5,6 is up and down carried layered products 9 and it is discharged from plane pressue device 3.The layered product 9 that obtains is estimated the generation of tracing ability, film thickness uniformity, surperficial specularity, fold according to following main points.
Tracing ability
Observe the surface of layered product 9, utilize 250 power microscopes whether to observe and be pressed with membranaceous resin bed 8c along the buckle layer of base material 8a.
Zero ... be filled with membranaceous resin bed 8c along concavo-convex, do not follow with not having slight void.
* ... do not fill membranaceous resin bed 8c along concavo-convex, perhaps have slight void.
Film thickness uniformity
According to the cross section method, utilize the vertical truncation surface of electron microscope observation layered product 9, measure the thickness of the resin bed on the convex surface be laminated to base material 8a, following evaluation is thickness poor separately.
Zero ... less than 0.5 μ m
* ... greater than 0.5 μ m
The surface specularity
Visual observations drops on the reverberation of the fluorescent lamp on the base material 8a, the following evaluation with the angle with respect to membranaceous resin bed 8c surface tilt 45 degree of layered product 9.
Zero ... state near minute surface
* ... do not form minute surface
The generation of fold
Observe the surface of layered product 9, observe whether not producing fold on the surface of membranaceous resin bed 8c.
Zero ... do not produce fold
* ... produce fold
Embodiment 2
Under the condition of embodiment 1, base material 8a is placed on the central portion of the heat dish 23,26 of vacuum lamination apparatus 2, turn round after 300,000 times, equally the layered product 9 that obtains is estimated the generation of tracing ability, film thickness uniformity, surperficial specularity, fold under the condition of embodiment 1.
Embodiment 3
Under the condition of embodiment 2, except two elasticity increased pressure boards 24 up and down as vacuum lamination apparatus 2,27, with Xiao A hardness is 60 degree, thickness is 4mm, surface roughness Rz is that the fluorine-containing silicone vulcanization of rubber of 3 μ m is bonded in the corrosion resistant plate that flatness is 3 μ m (S US 630H, thickness is 2mm) single face, do not vulcanizing a side surface of bonding fluorine-containing silicone rubber, Jinyang corporate system " KINYO BOARDF200 " is fixed in two heat dishes 23 up and down as padded coaming (size (vertical * horizontal stroke) 63cm * 63cm), outside 26, form layered product 9 with identical condition, similarly estimate tracing ability, film thickness uniformity, the surface specularity, the generation of fold.
Embodiment 4
Except using vacuum lamination apparatus shown in Figure 19 2 and plane pressue device 3, as shown in figure 20 will be by the continuous band-shaped membranaceous resin material 10a of heat-curing resin constituent that constitutes with continuous band-shaped epoxy resin (80 ℃ of glass transformation temperatures) and PETG support membrane formation, 10b, (heat insulation layer of banded circuit board 10c is the polyimide film of 70 μ m to have concavo-convex banded circuit board 10c with two sides in table, concavo-convex thickness is 18 μ m, the concavo-convex 20 μ m that are spaced apart) insert outside, condition with embodiment 2 forms continuous band-shaped layered product 9a, similarly estimates tracing ability, film thickness uniformity, the surface specularity, the generation of fold.
Embodiment 5
Except the thickness at the resin bed of the two membranaceous resin material 8b that use under the condition of embodiment 2 is that the concavo-convex thickness of 68 μ m, base material 8a is 50 μ m, concavo-convex being spaced apart the 50 μ m, form layered product 9 with the condition identical, similarly estimate the generation of tracing ability, film thickness uniformity, surperficial specularity, fold with embodiment 2.
Embodiment 6
Except the thickness at the resin bed of the two membranaceous resin material 8b that use under the condition of embodiment 3 is that the concavo-convex thickness of 68 μ m, base material 8a is 50 μ m, concavo-convex being spaced apart the 50 μ m, form layered product 9 with the condition identical, similarly estimate the generation of tracing ability, film thickness uniformity, surperficial specularity, fold with embodiment 3.
Embodiment 7
Except the thickness of the resin bed of the continuous band-shaped two membranaceous resin material 10a, the 10b that use under the condition of embodiment 4 is that (heat insulation layer of banded circuit board 10c is the polyimide film of 70 μ m for 68 μ m, banded circuit board 10c, concavo-convex thickness is 50 μ m, the concavo-convex 50 μ m that are spaced apart) outside, form continuous band-shaped layered product 9a with the condition identical, similarly estimate the generation of tracing ability, film thickness uniformity, surperficial specularity, fold with embodiment 4.
Comparative example 1
Substitute vacuum lamination apparatus 2, plane pressue device 3 shown in Figure 1, use 1 plane pressue device 3 to form layered product 9, similarly estimate the generation of tracing ability, film thickness uniformity, surperficial specularity, fold.
Comparative example 2
Except two elasticity increased pressure boards 24,27 up and down as vacuum lamination apparatus 2, use that not contain fibrolaminar, Xiao A hardness be that 60 degree, thickness are outside the fluorine-containing silicone rubber of 3 μ m as 4mm, surface roughness Rz, form layered product 9a with the condition identical, similarly estimate the generation of tracing ability, film thickness uniformity, surperficial specularity, fold with embodiment 2.
The evaluation result of embodiment 1～7 and comparative example 1,2 is shown in down in the note table 1.
Table 1
? Tracing ability Film thickness uniformity The surface specularity The generation of fold
Embodiment
1 ○ ○ ○ ○
Embodiment 2 ○ ○ ○ ○
Embodiment 3 ○ ○ ○ ○
Embodiment 4 ○ ○ ○ ○
Embodiment 5 ○ ○ ○ ○
Embodiment 6 ○ ○ ○ ○
Embodiment 7 ○ ○ ○ ○
Comparative example 1 × × × ×
[0172]?
Comparative example 2 × × × ○
Can be judged by last note table 1, for the generation of tracing ability, film thickness uniformity, surperficial specularity and fold, embodiment 1～7 is better than comparative example 1.

Claims (12)

1. laminater, it comprises vacuum pressure device, this vacuum pressure device is provided with a pair of heat dish of facing mutually that has heater block, during these two heat are coiled at least one can be advanced and retreat with respect to another, utilize this vacuum pressure device, the above-mentioned male and fomale(M﹠F) upper laminate film shape resin material of the irregular base material of at least one mask in table in the two sides and form layered product is characterized in that
On the face of the above-mentioned membranaceous resin material side of the heat dish of facing mutually with above-mentioned membranaceous resin material, be provided with the elasticity increased pressure board that constitutes by hear resistance silicone rubber or hear resistance Viton to membranaceous resin material pressurization, between heat dish of facing mutually with above-mentioned membranaceous resin material and elasticity increased pressure board, plate body is set, this plate body and elasticity increased pressure board are adhesively fixed, between above-mentioned heat dish and above-mentioned plate body, padded coaming are set.
2. laminater according to claim 1 is characterized in that,
Above-mentioned elasticity increased pressure board has fibrage.
3. laminater according to claim 1 and 2 is characterized in that,
The Xiao A hardness of above-mentioned elasticity increased pressure board is more than 40 degree.
4. laminater according to claim 1 and 2 is characterized in that,
Surface above-mentioned elasticity increased pressure board, that contact with membranaceous resin material is roughened.
5. laminater according to claim 1 and 2 is characterized in that,
This laminater comprises:
The 1st film take up roll is wound with the 1st banded film;
The 2nd film take up roll is provided with mutually with the 1st film take up roll with standing facing each other, is wound with the 2nd banded film;
The the 1st and the 2nd film takers-in, be wound in the above-mentioned the 1st and the 1st and the 2nd banded film of the 2nd film take up roll pull out with the state of facing mutually, and make between the two heat dishes of the 1st and the 2nd banded film by above-mentioned vacuum pressure device and batch;
Supply part in the gap that is formed between the two banded films that above-mentioned two film take up rolls are pulled out, is supplied with at the temporary fixed interim layered product that has membranaceous resin material to form of the single face at least of base material.
6. laminater according to claim 5 is characterized in that,
This laminater comprises the takers-in driver part, and this takers-in driver part matches with the action each time of two heat dishes and drives the 1st and the 2nd film take up roll discontinuously.
7. laminater according to claim 1 and 2 is characterized in that,
This laminater comprises:
The 1st resin material take up roll is wound with membranaceous resin material is done the 1st banded membranaceous resin material that becomes band and form;
The 2nd resin material take up roll is provided with mutually with the 1st resin material take up roll with standing facing each other, is wound with membranaceous resin material is done the 2nd banded membranaceous resin material that becomes band and form;
Supply part is supplied with base material in the gap that is formed between the two banded membranaceous resin materials that above-mentioned two resin material take up rolls are pulled out;
This laminater also comprises:
The the 1st and the 2nd guide member will be directed to the state of facing mutually from the 1st and the 2nd banded membranaceous resin material that the above-mentioned the 1st and the 2nd resin material take up roll is pulled out between the two heat dishes of above-mentioned vacuum pressure device;
Vacuum pressure device, will between clip above-mentioned base material the 1st and the 2nd banded membranaceous resin material import between the above-mentioned two heat dishes, be formed on the banded layered product that lamination the above-mentioned the 1st and the 2nd banded membranaceous resin material in two sides forms in the table of base material by this action;
Drawing part, the above-mentioned banded layered product of tractive.
8. laminater according to claim 7 is characterized in that,
Base material is individual circuit board or banded circuit board.
9. according to claim 7 or 8 described laminaters, it is characterized in that,
This laminater comprises and matches with the action each time of two heat dishes and drive the drawing part of the above-mentioned banded layered product of tractive discontinuously.
10. laminater according to claim 7 is characterized in that,
Also be provided with the 1st and the 2nd guide member of the 1st film take up roll that is wound with the 1st banded film, the 2nd film take up roll that is wound with the 2nd banded film, guiding the 1st banded film and the 2nd banded film and batch the above-mentioned the 1st and the takers-in of the 2nd banded film, with clip by the two banded films of pulling out from above-mentioned two film take up rolls from the above-mentioned the 1st and the 2nd resin material take up roll pull out, between accompany the 1st and the 2nd banded membranaceous resin material of base material state form banded layered product, and above-mentioned relatively banded layered product batches the above-mentioned the 1st and the 2nd banded film separately.
11. laminater according to claim 1 and 2 is characterized in that,
This laminater comprises the plane pressue device, this plane pressue device be provided with in a pair of heat dish of facing mutually, these two the heat dishes at least one can advance and retreat with respect to another, the two heat dishes that utilize this plane pressue device pressurize to two sides in the table of the layered product that formed by above-mentioned vacuum pressure device and make it level and smooth.
12. a laminating method is characterized in that,
This laminating method uses each described laminater in claim 1～11, the above-mentioned male and fomale(M﹠F) upper laminate film shape resin material of the irregular base material of at least one mask in table in the two sides and form layered product.
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