CN101376230A

CN101376230A - Lapping apparatus and lapping method

Info

Publication number: CN101376230A
Application number: CNA2008101336813A
Authority: CN
Inventors: 须藤浩二; 柳田芳明; 西冈照秋
Original assignee: Fujitsu Ltd
Current assignee: Fujitsu Ltd
Priority date: 2007-08-29
Filing date: 2008-07-18
Publication date: 2009-03-04
Also published as: JP2009050992A; US20090061737A1; KR20090023079A

Abstract

A lap platen has a lapping surface contacting a surface of a work piece. A lap base has a support surface brought into contact with and supported by the lapping surface. An adapter has a first support part, a second support part and an arm part. The first support part is supported by the lap base. The work piece is attached to the second support part so that a surface of the work piece to be processed contacts the lapping surface. The arm part extends between the first and second support parts. A height adjusting mechanism adjusts a height from the lapping surface to the first support part. An inclination detector is provided to the adapter to detect an inclination of the adapter. The inclination of the adapter relative to the lapping surface is adjusted by adjusting the height of the first support part by the height adjusting mechanism.

Description

Milling apparatus and Ginding process

Technical field

The present invention relates to grind (lapping) equipment and method.The present invention can comprise milling apparatus and the Ginding process that is used to process the workpiece as the magnetic head element that requires high accuracy.

Background technology

Hard disk drive device is as the memory device of personal computer, video equipment or the like.Because Comparatively speaking hard disk drive device and other recording equipments have jumbo record area, hard disc apparatus is suitable for use as the memory device of video equipment or the like.In recent years, wish that hard disk drive device has bigger capacity.

Though present hard disk drive device is used the recording technique that is called the horizontal recording method, increase finite capacity by the horizontal recording method.Therefore, need development to adopt the hard disk drive device of other recording methods.

In order to obtain bigger hard-disk capacity, proposed a kind of recording technique that is called the perpendicular recording method and replaced the horizontal recording method.If in hard disk drive device, use the perpendicular recording method, not in the horizontal direction so just, realize record but on the direction vertical, form magnetic circuit with the recording surface of hard disk.Therefore, can make that magnetic domain is narrower, thereby can on single hard disk, write down more information.

In the hard disk drive device that adopts traditional horizontal recording method, use the combined recording head of having equipped write element that is used to write and the read element that is used to read.In combined recording head, read information for the recording surface that information write hard disk and from the recording surface of hard disk, need accurately keep the distance between the extreme and hard disk recording surface of extreme (the extreme end) of read element and distance between the hard disk recording surface and write element.Therefore, in traditional combined recording head, be the high accuracy magnetic head that utilizes milling apparatus to obtain to expect by fine finishining.

The manufacturing process of combined recording head is described below.In the first step of the manufacturing process of combined recording head, in two-dimensional arrangement, produce a plurality of combined recording heads by wafer process, each magnetic head comprises write element and read element simultaneously.At this moment, near the write element of each combined recording head and read element, embed write element resistive element and read element resistive element (all being called ELG) respectively.The resistance value of these resistive elements changes with wear extent.Therefore, by monitoring the resistance value of these resistive elements, just can when grinding, know wear extent exactly, thereby combined recording head is realized grinding technics accurately.

Then, in second step, wafer is cut into rectangle to form bar shaped rod (row bar), each bar shaped rod has a plurality of combined recording heads to be arranged in a straight line.Then, in third step, the bar shaped rod is attached to milling apparatus, makes a plurality of magnetic heads that are arranged in the bar shaped rod to grind simultaneously.At this moment, detect each resistance value that is used for the resistive element of read element and is used for the resistive element of write element that on wafer, forms in the first step by milling apparatus.When resistance value becomes predetermined value, just determined to obtain the final size of expectation, and stopped grinding.Afterwards, cutting bar shaped rod with a plurality of combined recording head individuations in the bar shaped rod, thereby obtains a plurality of combined recording heads in the 4th step.

Fig. 1 illustrates the bar shaped rod that will carry out above-mentioned grinding technics.Bar shaped rod 100 shown in Figure 1 is the bar shaped rods that are used to form perpendicular recording type magnetic head.Fig. 1 illustrates through the state after the grinding technics.The reading section RD that comprises read element is formed in the bar shaped rod 100, comprises that the part WR that writes of write element is formed near the reading section RD.In perpendicular recording type magnetic head, the distance between read element and the write element is minimum, and is for example little of 6 μ m.In addition, the requirement for height high accuracy of the height of read element and write element.For high accuracy ground obtains height, the treatment surface 100a to bar shaped rod 110 grinds as mentioned above.

In horizontal recording type magnetic head, the height MR-h of read element requires high accuracy, and is desired but this high accuracy of the height MR-h of read element is not the neck height NH of write element.Therefore, if in the 100a of milled processed surface, finish to grind when the height MR-h of read element is pre-dimensioning, then the neck height NH of write element falls in the predetermined range scale.

On the other hand, in perpendicular recording type magnetic head, require to form the neck height H T of write element with the high accuracy identical with the yardstick degree of accuracy of the height MR-h of read element.If be similar to traditional Ginding process, when being pre-dimensioning, finishes the height MR-h of read element to grind, such problem will appear: if the direction of the configuration of read element and write element tilts about lapped face, then the neck height of write element can shorten or an elongated yardstick corresponding with the inclination of bar shaped rod, therefore can not be set at pre-dimensioning.The inclination of above-mentioned bar shaped rod 100 is corresponding to transversely inclination (left and right directions among Fig. 1).

Therefore, when handling perpendicular recording type magnetic head, need to regulate the inclination of bar shaped rod.But, because this being tilted in traditional grinding magnetic head equipment of bar shaped rod can not caused the problems referred to above, so there is not governor motion to regulate the inclination of bar shaped rod in the horizontal.

At this, propose before handling, to detect and to regulate the inclination (for example with reference to patent documentation 1) of cylinder by providing checkout gear to detect to support the inclination of the cylinder of the head of milling in (grinding) equipment of milling that is similar to milling apparatus.In addition, propose to respond the detected value of the inclination sensor that is provided with on the rubbing head in the polissoir, change polish pressure, with polishing free form surface (for example with reference to patent documentation 2).

Patent documentation 1: TOHKEMY No.11-207615

Patent documentation 2: TOHKEMY No.2001-260020

In order to improve the processing degree of accuracy, the milling apparatus of handling magnetic head uses special mechanism and structure, and different with the structure of traditional milling apparatus and grinding equipment.Especially, to the mechanism that is used for clamping bar shaped rod and it is pressed on the abrasive roller (lap platen) swing mechanism is set, this makes milling apparatus different with traditional milling apparatus.Therefore, disclosed governor motion and inclination sensor are not suitable for the milling apparatus of lapping magnetic heads in the patent documentation 1,2.

Summary of the invention

General objects of the present invention provides milling apparatus and method a kind of novelty, improvement, useful, has wherein eliminated the problems referred to above.

Another object of the present invention provide a kind of can high accuracy the milling apparatus and the method for ground grinding work-piece.

To achieve these goals, provide a kind of milling apparatus that is used for grinding work-piece, comprising according to a scheme: abrasive roller, have lapped face, the pending treatment surface of described lapped face and described workpiece contacts; Grind pedestal, have stayed surface, described stayed surface contacts with described lapped face, and is supported by described lapped face; Adapter (adapter), have first support portion, second support portion and arm, described first support portion is by described grinding base supports, the attached described workpiece in described second support portion, make the described treatment surface of described workpiece contact described lapped face, described arm extends between described first support portion and described second support portion; Height adjustment mechanism is used to regulate the height of described first support portion from described lapped face to described adapter; And angle detection, be arranged on the described adapter, be used to detect the inclination of described adapter, wherein, regulate the height of described first support portion, thereby regulate of the inclination of described adapter with respect to described lapped face by described height adjustment mechanism.

Provide a kind of Ginding process that is used for grinding work-piece according to another program, comprise step: described workpiece is attached to second support portion of adapter, makes the pending treatment surface of described workpiece contact with the lapped face of abrasive roller; The height of first support portion by regulating described adapter is regulated the inclination of the pending described treatment surface of described workpiece, and described adapter is supported on and grinds on the pedestal, and described grinding pedestal can slide on described lapped face; And the inclination that in process of lapping, detects described adapter, and, in described process of lapping, regulate the inclination on pending described surface based on the testing result of described inclination.

Utilize the present invention, can in the inclination of regulating surface to be ground, carry out milled processed in high accuracy ground.

When reading following detailed in conjunction with the accompanying drawings, other purposes, feature and advantage will become more obvious.

Description of drawings

Fig. 1 is the side view that will carry out the bar shaped rod of grinding technics;

Fig. 2 is the stereogram that can use milling apparatus of the present invention;

Fig. 3 is the side view of adapter shown in Figure 1;

Fig. 4 is the stereogram of adapter shown in Figure 3;

Fig. 5 is the front view of the left and right sides shown in Figure 2 difference aligning gear;

Fig. 6 is the side view of the curvature correcting mechanim that is provided with in the milling apparatus shown in Figure 2;

Fig. 7 is the amplification stereogram of clamper shown in Figure 6;

Fig. 8 is the cutaway view that is provided with the adapter of leaning device and inclination sensor;

Fig. 9 is the plane of adapter shown in Figure 8;

Figure 10 is the schematic diagram that the motion of bar shaped rod in the process of lapping is shown;

Figure 11 is an oscillogram, and the fluctuation of the output (angle of detection) that produces owing to the pivot swinging action during about the balanced configuration of pivot swinging center when two inclination sensors is shown;

Figure 12 is the oscillogram that obtains by the output valve of drawing two inclination sensors in the actual process of lapping;

Figure 13 is the oscillogram of a part of waveform shown in Figure 12 in the combination swing process;

Figure 14 is the oscillogram of a part of waveform shown in Figure 12 in the simple swing process;

Figure 15 is the profile stereogram that comprises the whole grinding technics equipment of milling apparatus;

Figure 16 is the functional-block diagram of grinding technics equipment shown in Figure 15;

Figure 17 is the flow chart of the calibration process of inclination sensor;

Figure 18 is the schematic diagram of the example of specific screen;

Figure 19 is the form that the deviant corresponding with a plurality of bar shapeds rod that comprises in single is shown;

Figure 20 is the flow chart of grinding technics;

Figure 21 is the schematic diagram that illustrates the operation of bar shaped rod soft landing (soft-landing) on abrasive roller;

Figure 22 is the side view that is placed on the bar shaped rod on the abrasive roller;

Figure 23 is when each control part that is provided with in according to controller shown in Figure 16 being shown grinding the bar shaped rod, the schematic diagram of the transformation of the structure variable condition of bar shaped rod; And

Figure 24 is the flow chart of inclination control procedure.

The specific embodiment

The milling apparatus of using the embodiment of the invention is at first described.Fig. 2 is a stereogram of using the milling apparatus 1 of the embodiment of the invention.Fig. 3 is the side view of adapter shown in Figure 3.Fig. 4 is the stereogram of adapter 12 shown in Figure 3.Fig. 5 is the front view of the left and right sides shown in Figure 2 difference aligning gear 14.Fig. 6 is the side view of the curvature correcting mechanim of setting in the milling apparatus 1 shown in Figure 2.Fig. 7 is the amplification stereogram of clamper 1201 shown in Figure 6.

Milling apparatus 1 is the treatment facility that is used to grind bar shaped rod 100 (as the bar shaped rod finish operation at last), and bar shaped rod 100 is workpiece.Milling apparatus 1 comprises abrasive roller 10, grinds pedestal 11 and adapter 12, the lapped face at abrasive roller 10 tops moves with respect to bar shaped rod 100, the stayed surface that grinds the bottom part 111 of pedestal 11 contacts with lapped face, grinds pedestal 11 and supports adapter 12 (with reference to Fig. 4) at intended support point 1210.The arm 120 of adapter 12 is from the strong point 1210 horizontal-extendings, further extends downwards from its end then, and the support portion 121 of adapter 12 (first support portion) is at the strong point 1210 supporting arm part 120 rotatably.As shown in Figure 3 and Figure 4, the arm 120 of adapter 12 is constructed so that clamper 1201 can be attached.Clamper 1201 is the parts that are used to support bar shaped rod 100, bar shaped rod 100 by adhesive on clamper 1201.

Arm 120 ends are held second support portion of the attached part of device 1201 (just the bar shaped rod 100) corresponding to adapter 12.Therefore in adapter 12, arm 120 is the parts that extend between first support portion 121 and second support portion, and first support portion 121 has the strong point 1210, and clamper 1201 is attached to second support portion.

Notice that support portion 121 is provided with rotating mechanism,, make bar shaped rod 100 to move closer to or away from abrasive roller 10 by rotation arm 120.Before grinding, just rotate arm 120, make bar shaped rod 100 be attached to clamper 1201, and after reverse rotation arm 120, so that bar shaped rod 100 is set on the lapped face of abrasive roller 10.In addition, though not shown in the accompanying drawing, arm 120 also is provided with the resistance detection probe, is used for the resistance value and the resistance value that is used for the resistive element of read element of the resistive element of write element in order to detection.

In milling apparatus 1, by grinding base supports portion 13 rotatable, the pedestals 11 (referring to Fig. 2) of support grinding swingably.Follow the lapped face of abrasive roller 10 by the treatment surface 100a (surface to be ground) of bar shaped rod 100 that adapter 12 is supported, structure and be configured to always to keep the treatment surface 100a of bar shaped rod 100 and the lapped face of abrasive roller 10 between parallel relation, even the rotating shaft of abrasive roller 10 slightly changes in spin finishing cylinder 10.

In addition, milling apparatus 1 is provided with load regulation mechanism 14, by handle the grinding load that arm 120 is regulated bar shaped rod 100 from the top.When adding the grinding load for bar shaped rod 100 via adapter 12 by load regulation mechanism 14, the treatment surface 100a of bar shaped rod 100 contacts reliably with the lapped face of abrasive roller 10, thereby realizes stable the grinding.Construct load regulation mechanism 14 (as shown in Figure 5) by the actuator 141 to 143 that is arranged on the direction vertical with three, the inclination that can proofread and correct bar shaped rod 100 in the process of lapping, just left and right sides difference with the bearing of trend of arm 120.

In addition, consider that bar shaped rod 100 has elongated shape shown in Figure 4, curvature correcting mechanim shown in Figure 6 is set, therefore, rise and fall or warpage if produce in the bar shaped rod 100, they just can be corrected or correct.Notice that Fig. 7 is the amplification stereogram of clamper 1201 shown in Figure 6.

Insert link (link) parts 36,38 by a plurality of hole 1201h that in clamper 1201, are provided with, and link member 36,38 is pressed onto the inner surface of hole 1201h, thereby make clamper 1201 distortion, the part among the treatment surface 100a of curvature correcting mechanim 15 correction bar shaped rods 100 shown in Figure 6 rises and falls and the part warpage.

In milling apparatus 1 with said structure, clamper 1201 and be clipped in the end that top bar shaped rod 100 is attached to the arm 120 of adapter 12.Arm 120 is 121 rotations (with reference to Fig. 3) around the support portion, and the treatment surface 100a of bar shaped rod 100 is arranged in the position of facing mutually with the lapped face of abrasive roller 10.

When applying when grinding load from last direction arm 120 by load regulation mechanism 14, the treatment surface 100a of bar shaped rod 100 contacts with the lapped face of abrasive roller 10, when applying suitable pressure, grinds.

When grinding when abrasive roller 10 rotations and to bar shaped rod 100, left and right sides difference aligning gear serves as in load regulation mechanism 14, make the lapped face that vertically always is parallel to abrasive roller 10 of bar shaped rod 100, and, the fluctuating and the warpage of correcting bar shaped rod 100 by curvature correcting mechanim.

In addition, as mentioned above, grind pedestal 11, make the treatment surface 100a of bar shaped rod 100 always follow lapped face by grinding 13 rotatable, the supports swingably of base supports portion.Therefore, when grinding and the shape of cross section of bar shaped rod 100 when changing, the treatment surface 100a of bar shaped rod 100 is adjusted to parallel with the lapped face of abrasive roller 10, thereby high accuracy ground grinds.

Here, as described above with reference to Figure 1, because magnetic domain narrows down, so perpendicular recording type magnetic head requires high accuracy being called on the yardstick of neck (neck) height and being called on the yardstick of MR-h, the neck height is the element yardstick of write element, and MR-h is the element yardstick of read element.Therefore, the short side direction of the treatment surface 100a of bar shaped rod 100 (combined recording head) shown in Figure 1 does not allow.Therefore for above-mentioned milling apparatus 1, becoming is difficult to grind the magnetic head of the employed combined recording head of hard disk drive device that utilizes the perpendicular recording method.

Therefore, according to embodiments of the invention, for adapter shown in Figure 3 12 is provided with height adjustment mechanism and angle detection.Fig. 8 is the cutaway view that is provided with the adapter 12a of leaning device 16 and inclination sensor 18, and leaning device 16 serves as height adjustment mechanism, and inclination sensor 18 serves as angle detection.

As shown in Figure 8, leaning device 16 has linear actuators 130 and pivot PB.Pivot PB is arranged on and grinds on the pedestal 11 to support the strong point 1210a (point on the linear actuators 130) of adapter 12a.Linear actuators 130 is the actuators with main body and bar, comes the elongation of adjusting rod from main body according to control signal.The main body of linear actuators 130 is fixed in arm 120a, and the end of the bar of linear actuators 130 contacts pivot PB, therefore can regulate the height of strong point 1210a according to the elongation of bar subtly.Notice that in this example use Chiba Seimitsu Co., the linear actuators that is labeled as MSD-23D23H10 (resolution ratio 1 μ m, stroke 10mm) that Ltd. makes is as linear actuators 130.

Before beginning to grind, utilize the method for using optical flat to determine the stroke amount of linear actuators 130, make the lapped face of the treatment surface 100a of bar shaped rod 100 and abrasive roller 10 be set to and be parallel to each other.In this state, operation linear actuators 130 extends bar, makes the height of the strong point increase by 200 μ m.Then, be set in the 10nm being arranged in read element RD on the bar shaped rod 100 short side directions and the difference in height between the write element WR.Because the adjusting that linear actuators 130 can carry out 1 μ m is as minimum resolution, so the minimum difference in height that parallel relation between read element RD and the write element WR can be brought up to 0.05nm.

As mentioned above, leaning device 16 serves as height adjustment mechanism, height with second support portion of regulating adapter 12a, and, have the height (to the distance of lapped face) of the first support portion 121a of strong point 1201a by adjusting, leaning device 16 can be regulated the inclination of adapter 12a about lapped face.By regulating the inclination of adapter 12a, can regulate the inclination on the bar shaped rod 100 short side directions of second support portion that is attached to adapter.

Inclination sensor 18 be arranged on arm 120a be held the attached part of device 1201a (second support portion of adapter 12a just) near.The inclination of inclination sensor 18 test adaptor (direction in the accompanying drawing shown in the arrow) is just being lacked on the side direction inclination of being fixed in the bar shaped rod 100 of clamper 1201a.Utilize the tilt detection value of inclination sensor 18 outputs, the inclination of adjustable adapter 12a in process of lapping.

That is to say that though leaning device 16 was regulated the inclination of bar shaped rod 100 before beginning to grind, if grind, then bar shaped rod 100 shortens, and causes bar shaped rod 100 to tilt a little.But, based on the tilt detection value of inclination sensor 18, in process of lapping, regulate the inclination of arm 120a by driving linear actuators 130, just can regulate to high accuracy the inclination of bar shaped rod 100.Therefore,, the inclination on short side direction shown in Figure 1 can be regulated exactly, and therefore, the height of read element and write element can be regulated to high accuracy by linear actuators 130 according to structure shown in Figure 8.

Inclination sensor 18 is described below.Because inclination sensor 18 necessary volumes are little, resolution ratio is high, so preferably use magnetoresistive element type inclination sensor.In the structure of magnetoresistive element type inclination sensor, come the weight of support magnet formation with the leaf spring in the damping oil.If sensor itself tilts, then magnet is because gravity and dislocation, and, can detect the dislocation of magnet by magnetoresistive element.Because the inclination angle of displacement and sensor itself is proportional, so can detect the inclination angle exactly.

But if this inclination sensor 18 attached ends near arm 120a, then the wobbling action of arm 120a can work to inclination sensor 18, causes being difficult to detecting exactly inclination.That is to say that because the wobbling action of arm 120a, inertia force works to the weight of magnetoresistive element type inclination sensor, so the displacement that produces owing to inertia force is included in only owing in the displacement that tilts to produce.

The wobbling action of arm 120a is described below with reference to Fig. 9 and Figure 10.Fig. 9 is the plane of adapter 12a when observing from the top.According to the grinding of milling apparatus, adapter 12a constructs and is configured to carry out two kinds of wobbling actions, and just simple wobbling action and pivot swinging move, thereby grinds the treatment surface 100a of bar shaped rod 100 equably.That is to say, when abrasive roller 10 rotations,, grind the treatment surface 100a of bar shaped rod 100 equably by the adapter 12a among mobile Fig. 8 (being the combination of two kinds of wobbling actions).

Simple wobbling action is a kind of motion of back and forth pivoting, and radius of turn is big, and its oscillation center is on the extended line of the adapter 12a longitudinal axis.Therefore, the inertia force that produces owing to simple wobbling action works to inclination sensor 18.On the other hand, the pivot swinging action is oscillation center back and forth the pivot motion consistent with the center of bar shaped rod 100, the weak point of the simple wobbling action of its period ratio.Therefore, the inertia force that produces owing to the pivot swinging action works to inclination sensor 18.The direction of inertia force is consistent with the direction of the weight dislocation of inclination sensor 18.Afterwards, the wobbling action that makes up the action of simple wobbling action and pivot swinging and obtain is called the combination wobbling action.

Figure 10 illustrates in the process of lapping, the schematic diagram of the combination wobbling action of bar shaped rod 100.Arrow shown in Figure 10 is represented the direction of the direction of rotation of abrasive roller, simple wobbling action and the direction of pivot swinging action.In a reciprocating motion process of simple wobbling action, carry out two kinds of reciprocating motions.

In order to eliminate the The Effect of Inertia Force that inclination sensor 18 is worked that produces owing to the combinations thereof wobbling action, two inclination sensors 18 are set, as shown in Figure 9 in symmetrical position.By two inclination sensors 18 are set, the influence of combination wobbling action shows as the inclination on the rightabout in the inclination sensor 18.Therefore, by the output of two inclination sensors 18 of summation, can eliminate and the corresponding detected value of inclination that produces owing to the combination wobbling action.

Figure 11 is an oscillogram, illustrates when two inclination sensors (sensor 1 and sensor 2) during about the center balanced configuration of pivot swinging action, because pivot swinging moves the fluctuation of the output (angle of detection) that produces.Because the inertia force on the rightabout works to sensor 1 and sensor 2, as shown in figure 11, so the symbol (positive and negative) of the output of sensor 1 and sensor 2 is opposite.Therefore, by summation output, just the fluctuation of the output (detection angles) that produces owing to the pivot swinging action can be eliminated fully.Though preferably two inclination sensors 18 are configured on the central shaft of pivot swinging action,, just inclination sensor 18 can be configured on the centrosymmetric position about the pivot swinging action if be difficult to sensor is arranged to this configuration.In this case, by adding deviant, can obtain angle detected value accurately to the angle detected value that two output summations are obtained.

Figure 12 is the oscillogram that obtains by the output valve of drawing two inclination sensors 18 in the actual process of lapping.One of them of left and right inclination sensor 18 is set at sensor 1, and another is set at sensor 2, with each output (angle of inclination) of measuring transducer 1 and sensor 2.Measurement is spaced apart 0.1 second.The cycle of pivot swinging action is approximately 1.35 seconds, and the cycle of simple wobbling action is approximately 2.7 seconds.

Combination wobbling action among the figure is the wobbling action of simple wobbling action and pivot swinging action when carrying out simultaneously, corresponding to wobbling action shown in Figure 10.In the process of combination wobbling action, the output (angle of inclination) of sensor 1 and sensor 2 is greatly to about ± 0.1 degree.In the process of simple wobbling action, the output (angle of inclination) of sensor 1 and sensor 2 is little of about ± 0.02 degree.This influence that shows pintle movement is bigger than the influence of simple wobbling action.

Indicated value shown in Figure 11 is the value when having eliminated the influencing of wobbling action in the output of sensor 1 and sensor 2, and can think the inclination of this value representation reality.When grinding, the height of bar shaped rod 100 thereby reduction, thus cause the inclination of arm 120a to increase.Therefore, indicated value increases to negative direction.Among Fig. 8, negative direction is the direction that right-hand side (second support portion just) moves down, and expression bar shaped rod 100 is at the incline direction on right side.In the present embodiment, be averaged by summation, and mean value carried out filtration treatment, can detect the inclination of bar shaped rod 100 with the degree of accuracy of ± 0.01 degree by software with the output of two inclination sensors 18.

Figure 13 is the oscillogram of a part of waveform shown in Figure 12 in the combination swing process, and wherein time shaft amplifies.In the process of combination wobbling action, each output of sensor 1 and sensor 2 is at positive side and minus side alternatively swinging, and the output of sensor 1 and sensor 2 is swung to opposite side.Therefore, in the waveform peak value of sensor 1 by with the peak value offset of the sensor 2 of sensor 1 reverse swing.Therefore, indicated value is basically in the centre of the output of sensor 1 and sensor 2.Note, by with the output summation of the output of sensor 1 and sensor 2, summation is averaged (half value) and along time shaft half value is averaged, calculate this indicated value in this example.

Figure 14 is the oscillogram of a part of waveform shown in Figure 12 in the simple wobbling action process, and wherein time shaft amplifies.Having only under the situation of simple wobbling action, the output of sensor 1 is swung to minus side with slight fluctuation, the output of sensor 2 with slight fluctuation to positive side oscillation.In addition, in this case,, calculate this indicated value by with the output summation of the output of sensor 1 and sensor 2, summation is averaged (half value) and along time shaft half value is averaged.

As mentioned above, by two inclination sensors 18 are set, and obtain inclination on symmetrical position, can easily obtain the inclination of bar shaped rod 100 according to the output of sensor.Then, by detected inclination in the process of lapping is fed back to inclination controller, can regulate the inclination of the treatment surface 100a of bar shaped rod 100 more accurately.

In addition, in the automatic processing of bar shaped rod 100,, then detect,, spend thereby inclination is set at 0 ± 0.01 with linear actuators 130 startups by inclination sensor 18 if bar shaped rod 100 contact with the lapped face of abrasive roller 10.Therefore, high accuracy ground is set at the treatment surface 100a of bar shaped rod 100 parallel with lapped face.Afterwards, the rotation of beginning abrasive roller 10 and the wobbling action of adapter 12a.Like this with regard to the problem of the edge damage abrasive roller 10 that do not have bar shaped rod 100, thereby can begin stable process of lapping.

The total of the example of the grinding technics equipment that comprises milling apparatus 1 is described below with reference to Figure 15.Figure 15 is the profile stereogram that comprises the grinding technics equipment of milling apparatus 1.

Grinding technics equipment shown in Figure 15 comprises control part 210, grinder 220 and two the part 240-1 of mechanism, 240-2, and control part 210 comprises the control computer.The abrasive roller 222 of grinder 220 (corresponding to abrasive roller shown in Figure 2 10) has lapped face.The part 240-1 of mechanism, 240-2 are arranged in the both sides of abrasive roller 222.By rotating, each of the part 240-1 of mechanism, 240-2 can be placed on adapter 12a on the abrasive roller 222, bar shaped rod 100 attached adapter 12a.The reason that two mechanism's parts are set is to boost productivity by grinding two bar shaped rods 100 simultaneously.Each of the part 240-1 of mechanism, 240-2 and the grinder 220 common milling apparatus that form.

Figure 16 is the functional-block diagram of grinding technics equipment shown in Figure 15.The control device 1000a that is arranged on the control part 210 is equipped with CPU 1001a.According to the treatment progress of program stored among the memory 1002a, CPU 1001a sends instruction by carrying out to handle to each control part.

Be provided with the control part 1003a of public organizations in control device 1000a, the control part 1003a of public organizations controls motor, and motor is used for the abrasive roller 222 of grindstone 220, and liquid slurry is offered abrasive roller 222 as lapping liquid.Be provided with driver and drive division in the control part 1002a of public organizations, driver is used for the motor of head roll rotating mechanism 170, and drive division is used for driving the magnetic valve of slurry switching mechanism 160.When from CPU 1001a when the driver of the control part 1003a of public organizations and drive division provide instruction, the motor rotation of cylinder rotating mechanism 170, thus make abrasive roller 222 rotations, and, the magnetic valve of slurry switching mechanism 160 is opened, thereby provides slurries to abrasive roller 22, begins then to grind.

When abrasive roller 222 begins rotation, when bar shaped rod 100 begins to grind, under the control of CPU 1001a, begins to detect the resistance value of the resistive element of the resistance value of the resistive element of read element in the bar shaped rod 100 and write element by ELG ohmer 150.

CPU 1001a among the control device 1000a makes the noise/exceptional value removal 1004a of portion in the milling apparatus remove noise or the like.Detect in the bar shaped rod 100 the accurate resistance value of the resistive element that is provided with in each of a plurality of combined recording heads of arranging successively, and based on the program among the memory 1002a, clavate production department handles the production of beginning clavate by image.Based on the result that clavate is produced, CPU 1001a difference correction control part 1005a to the left and right sends instruction, makes left and right sides difference aligning gear 14 in vertical adjusted left and right sides of bar shaped rod 100 difference.In addition, CPU 1001a sends instruction to crooked control part 1007a, makes curvature correcting mechanim 15 (with reference to Fig. 6) regulate fluctuating, warpage and the bending of bar shaped rod 100.In addition, CPU 1001a sends instruction to inclination control part 1006a, makes leaning device 16 at the inclination angle of lacking side direction adjusted bar shaped rod 100.

Measured value from two inclination sensors 18 is transfused to inclination control part 1006a.Based on measured value, drive leaning device 16 by carrying out FEEDBACK CONTROL, thereby inclination control part 1006a regulates the inclination of bar shaped rod 100 from two inclination sensors 18.

The grinding technics that utilizes above-mentioned grinding technics equipment to carry out is described below.Before handling bar shaped rod 100 automatically, carry out the calibration of inclination sensor 18.At first, will be attached to clamper 1201 as the main rod of bar shaped rod 100 altitude datums, and in the interference figure on the viewing optics plane, regulate the height of the support portion 121a of adapter 12a by driving linear actuators 130.Especially, on the aiming screen of control part 210,, thereby be the initial point of actuator position with the maximized set positions of interference fringe with (jogging) Move Mode operation linear actuators 130 slowly.

Then, carry out the calibration of inclination sensor 18 according to the process shown in Figure 17 flow chart.Calibration is carried out for each of inclination sensor 18.

At first, at step S110, the function screen of grinding technics equipment is switched to manual mode.At step S111, after main rod is attached to the adapter 12a of the part 240-1 of mechanism (240-2), mechanism part 240-1 (240-2) is arranged on the abrasive roller 222 then, makes main rod contact (loading) then with abrasive roller 222.

Finishing after the loading of main rod, at step S112, drive load regulation mechanism 14, is the load that will offer the bar shaped rod in the actual treatment will grind load set.At step S113, press the calibration knob that is used for the inclination angle detection then.At step S114, after pressing calibration knob, waited for for two seconds then, with the output of 0.1 second interval acquiring inclination sensor 18.Subsequently at step S116, according to continuous ten groups of output data computation moving averages.And then, calculate 100 moving averages, and this value is set at deviant at step S117.At step S118, the measured value of inclination sensor 18 is set at the value that obtains by the deviant that deducts such acquisition, finish calibration process then.

Each inclination sensor 18 is carried out above-mentioned calibration process independently.By two inclination sensors 18, the inclination angle after the calibration is set at the mean value of measured value.

Finish after the calibration of inclination sensor 18, process enters the automatic processing of bar shaped rod 100.As the preparatory stage of automatic processing, the quantity of bar shaped rod is imported control part 210 by the specific screen of control part 210.Figure 18 is the schematic diagram that the example of specific screen is shown.After input wafer number and bar shaped rod address, obtain information from data server, and reflect a series of processing orders and one group of inclination angle immediately about the bar shaped rod.Though " inclination angle " on Figure 18 screen is from the value of database input, also can manually import this value by screen.The minimum setting value at inclination angle is 0.01 degree.

Though the operator manually imports wafer number and bar shaped rod quantity in above-mentioned example, in order to prevent input error and to reduce and handle quantity, preferably according to rod coding input wafer number and bar shaped rod quantity.

As pending object, the form of bar shaped rod is to pile up the piece (block) that a plurality of bar shaped rods are arranged.For example in so-called Femto (flying) slider, become a piece with 8 bar shaped clavates at most.Therefore, carry out the adjusting of height according to the quantity of the bar shaped rod that comprises in the piece.Figure 19 is the form that the deviant corresponding with the quantity of the bar shaped rod that comprises in the piece is shown.In Figure 19, the thickness setting that will comprise the piece (piling up 8) of 8 bar shaped rods is a benchmark, and the piece that comprises 8 bar shaped rods provides maximum height.

The information of obtaining from data server about the bar shaped rod (piling up information) comprises piles up quantity (the bar shaped rod quantity the piece), if input bar shaped rod quantity is then obtained the information of piling up from data server automatically.

The grinding technics of bar shaped rod in the automatic processing is described below with reference to Figure 20.Figure 20 is the flow chart of grinding technics.

When carrying out the grinding technics of bar shaped rod 100, the bar shaped rod 100 that the operator will carry out milled processed is attached to the part 240-1 of mechanism (240-2).After having carried out beamhouse operation (calibration of for example above-mentioned inclination sensor 18), the operator presses auto-start button, to start automatic processing then.

After starting processing automatically,, carry out the height adjusting according to piling up quantity at first at step S200.Especially, operate linear actuators 130 by side-play amount shown in Figure 19, linear actuators 130 is the actuators that are used to tilt.Then at step S201, mechanism part 240-1 (240-2) is moved to position on the abrasive roller 222.At step S202, the part 240-1 of mechanism (240-2) is loaded to grinder 220.Afterwards, the adapter 12a that is attached with bar shaped rod 100 gently is placed on (soft landing) on the abrasive roller 222.

Figure 21 is the schematic diagram that illustrates the operation of bar shaped rod 100 soft landings on abrasive roller 222.By driving cylinder (air cylinder) 30, as the strong point, the arm 121a of adapter 12a is rotated up, its rise by support portion 121a.After being carried in mechanism part 240-1 (240-2) on the abrasive roller 222, drive cylinder 30, the arm 121a of adapter 12a moves down.Like this, bar shaped rod 100 gently is placed on the abrasive roller 222.Figure 22 is the side view that is placed on the bar shaped rod 100 on the abrasive roller 222.

After step S202 loads the part 240-1 of mechanism (240-2), determine whether correctly to load at step S203.By checking that lower limited sensor is conducting or turn-off determining of realizing loading.If lower limited sensor turn-offs, then repeat to determine up to the lower limited sensor conducting.If the lower limited sensor conducting is then exerted pressure to bar shaped rod 100 at step S204, and the measuring process of beginning inclination sensor 18.Wait for that at step S205 preset time becomes stable up to the output of inclination sensor 18 this moment.In this example, preset time is 2 seconds.

At step S206, carry out angular surveying then, and determine that the angle that records is whether in the scope of 0 ± 0.01 degree by inclination sensor 18.If go beyond the scope, then handle and proceed to step S207, thereby, carry out the meticulous adjusting of angle by the actuator (linear actuators 130) that startup is used to tilt.If angle in the scope of 0 ± 0.01 degree, is then handled and proceeded to step S208, wait for preset time.In this case, preset time is 0.5 second.

Said process is a loading procedure.Then, processing enters main procedure.After step S208 was through 0.5 second the scheduled time, S209 provided lapping liquid in step.Then at step S210, low speed rotation abrasive roller 222.At step S211, the combination wobbling action of beginning bar shaped rod 100 (adapter 12a).Therefore, when being pressed in bar shaped rod 100 on the abrasive roller 22, make up wobbling action, with the treatment surface 100a polishing of bar shaped rod 100 with low load.This process of lapping is called process of lapping 1.

Determine at step S222 whether process of lapping 1 is finished.If process of lapping 1 has been finished, then process proceeds to step S223, and the rotating speed of abrasive roller 222 is changed at a high speed.At step S224, increase offers the processing pressure of bar shaped rod 100, and continues this processing then.This process of lapping is called process of lapping 2.

Determine at step S225 whether process of lapping 2 is finished then.If process of lapping 2 has been finished, then process proceeds to step S226, and lapping liquid is changed into the finishing lapping liquid, continues this processing.This process of lapping is called process of lapping 3.Determine at step S228 whether process of lapping 3 is finished then.If process of lapping 2 has been finished, then process proceeds to step S228, and the rotating speed of abrasive roller 22 is changed into middling speed.At step S229, reduce processing pressure then, continue this processing.This process of lapping is called process of lapping 4.

Determine at step S230 whether process of lapping 4 is finished then.If process of lapping 4 has been finished, then process proceeds to step S231, and the rotating speed of abrasive roller 222 is changed into low speed.At step S232, stop the pivot swinging action then, only proceed single wobbling action.

Determine at step S233 whether the mean value of read element height MR-h equals target scale then.If the mean value of read element height MR-h is not equal to target scale, then continue to handle not change.If the mean value of read element height MR-h becomes with target scale equate, then handle proceeding to step S234, begin unloading and handle.

In unloading is handled, stop the rotation of abrasive roller 222 at step S235, and stop the wobbling action of bar shaped rod 100.At step S236, stop to provide lapping liquid then.At step S237, adapter 12a is risen afterwards, bar shaped rod 100 is separated from abrasive roller 222.Afterwards, mechanism part 240-1 (240-2) is moved on to position of readiness, end process.

The processing controls of bar shaped rod in the above-mentioned milled processed is described below.In the processing of bar shaped rod 100, measure the resistance of a plurality of ELG elements that embed bar shaped rod 100.Carry out left and right sides difference correction, curvature correction and slant correction then, make the structure of the treatment surface 100a by measured value being converted to the bar shaped rod 100 that height obtains become directly.

Figure 23 is when each control part that is provided with in according to control device 1000a shown in Figure 16 being shown grinding bar shaped rod 100, the schematic diagram of the transformation of the structure variable condition of bar shaped rod 100.

After proofreading and correct by any mechanism before Figure 23 right side illustrates and regulates by left and right sides aligning gear 14, curvature correcting mechanim 15 and leaning device 16 and under the control of each control part, the side view of bar shaped rod 100 on the short side direction.

Shown in the left part curve of top, the structure of vertically going up bar shaped rod 100 before the milled processed is not straight, the curved surface projection of its core.After finishing milled processed, the rod of bar shaped in the vertical 100 becomes straight, but exists to tilt on short side direction, thus the height that obtains expecting.

At first, when milled processed begins, the resistance value of the read element that records according to ELG ohmer 150, the CPU 1001a of control device 1000a detects the structure of the treatment surface 100a of bar shaped rod 100, and the image of the clavate shape shown in the uppermost position among the generation figure.The shape of the treatment surface 100a of bar shaped rod 100 illustrates on the right side of the clavate shape of Figure 23 uppermost position before grinding.

At first, control device 1000a difference correction control part 1005a to the left and right sends instruction, makes left and right sides difference aligning gear 14 regulate the inclination of bar shaped rod 100 in the vertical.Thus, eliminated bar shaped rod 100 inclination in the vertical, thereby caused among Figure 23 from the clavate shape of the second place at top.Subsequently, control device 100a sends instruction to crooked control part 1007a, makes curvature correcting mechanim 15 regulate and rises and falls and warpage.Thus, proofread and correct fluctuating and the warpage of the treatment surface 100a of bar shaped rod 100, as among Figure 23 from shown in the clavate shape of the 3rd position at top.Simultaneously, control device 1000a sends instruction to inclination control part 1006a, makes leaning device 16 regulate the inclination angle.At this moment, carry out the adjusting at inclination angle based on the output of above-mentioned inclination sensor 18.

Become directly as after shown in the clavate shape of the 3rd position at top at clavate shape longitudinally, and till the height MR-h of read element WR becomes target scale, in the control that tilts, crooked control and the control of tilting, carry out milled processed.Then, treatment surface 100a flattens, and shown in nethermost position among Figure 23, and the shape of bar shaped rod 100 finishes, and wherein treatment surface 100a suitably tilts to and makes that the elevational dimension of read element RD and write element WR is all adjusted.

Describe control below with reference to Figure 24.Figure 24 is the flow chart of inclination control procedure.

The control of tilting is independent of left and right sides difference control and crooked control.According to the control of tilting, per 3 seconds are with meticulous adjusting 0.001 degree in inclination angle.When beginning to tilt control, at first determine at step S300 whether the bar shaped rod is just processed.If it is processed that the bar shaped rod does not have, with regard to end process.If the bar shaped rod is just processed, then handles and proceed to step S301.

Determine at step S301 whether the inclination angle that inclination sensor 18 detects equals specified angle.If the inclination angle of detecting equals specified angle, then process of lapping continues, and handles and returns step S300.If the inclination angle of detecting is not equal to specified angle, then handle and proceed to step S302, regulate the inclination of bar shaped rod by driving leaning device 16, make the inclination angle near specified angle.At step S303, wait for preset time then.In this example, preset time was 3 seconds.At step S304, keep the tilt quantity of current time then, finish the control of tilting.

In this example, angle is increased a very little angle with fixing interval.But,,, can increase constant low-angle for each fixing amount of grinding in order to suppress the influence of grinding rate fluctuation.

In addition, continue in exceptional value under the situation of fixed time period, for example under the situation of mean value away from preset range of the detected value of two inclination sensors, determine to occur among part 240-1 of mechanism and the 240-2 unusual, perhaps lapping liquid occurs not enough.Therefore in this case, by stopping the operation of abrasive roller 222 and part 240-1 of mechanism and 240-2, can force to finish process of lapping.This is because if this abnormal conditions continue, just may go wrong in abrasive roller 222 or the part 240-1 of mechanism, 240-2.

It should be noted that in the present embodiment, by constituting the linear actuators 130 of leaning device, progressively regulate the contact angle of the lapped face of bar shaped rod 100 treatment surface to be ground and abrasive roller per 3 seconds with the minute angle that is equal to or less than 0.001 degree.Can regulate with meticulous like this resolution ratio by structure or configuration, the read element RD and the write element WR at treatment surface 100a place can be ground, thereby are parallel to the lapped face of abrasive roller exactly.In addition,, just can carry out stable grinding, can not produce infringement abrasive roller by making it possible to regulate the angle of inclination by leaning device 16.

In addition, impaired in order to prevent abrasive roller, when temporarily reducing the processing pressure that is applied on the bar shaped rod 100, preferably regulate the inclination angle by driving leaning device 16 by load regulation mechanism 14.In addition, impaired in order to prevent abrasive roller 222, when regulating contact angle, send instruction by driver, but the motor of index drum rotating mechanism slows down or stops to the control part 1003a of public organizations by leaning device 16.

Though in the present embodiment magnetoresistive element type inclination sensor is used for inclination sensor 18, but also can use other sensor, for example laser angle meter, gyro sensor, potentiometer, line tool engineer's scale (liner scale) (difference in height between 2 o'clock is converted to angle).

As mentioned above, the Ginding process of a kind of milling apparatus and this milling apparatus of use is provided according to present embodiment, can in the inclination of regulating surface to be ground, carry out milled processed in high accuracy ground, milled processed is applied to combined record, and combined record is used to use the hard disk drive device of perpendicular recording method.

The invention is not restricted to the disclosed embodiment of mask body, can make various modification and remodeling and do not depart from the scope of the present invention.

The application based on the Japan of submitting on August 29th, 2007 at first to file No.2007-222742, and by with reference to its full content is merged in this application.

Claims

1, a kind of milling apparatus that is used for grinding work-piece comprises:

Abrasive roller has lapped face, and the pending treatment surface of described lapped face and described workpiece contacts;

Grind pedestal, have stayed surface, described stayed surface contacts with described lapped face, and is supported by described lapped face;

Adapter, have first support portion, second support portion and arm, described first support portion is by described grinding base supports, the attached described workpiece in described second support portion, make the described treatment surface of described workpiece contact described lapped face, described arm extends between described first support portion and described second support portion;

Height adjustment mechanism is used to regulate the height of described first support portion from described lapped face to described adapter; And

Angle detection is arranged on the described adapter, is used to detect the inclination of described adapter;

Wherein, regulate the height of described first support portion, thereby regulate of the inclination of described adapter with respect to described lapped face by described height adjustment mechanism.

2, milling apparatus as claimed in claim 1, wherein, described angle detection comprises the pair of angled sensor, described pair of angled sensor is configured in about on the centrosymmetric position of the wobbling action of described workpiece.

3, milling apparatus as claimed in claim 2, wherein, each of described inclination sensor is a magnetoresistive element type inclination sensor.

4, milling apparatus as claimed in claim 3, wherein, described inclination sensor is arranged on described workpiece and is attached near the position in described second support portion.

5, milling apparatus as claimed in claim 1, wherein, described workpiece is attached to described adapter, make that the short side direction of structure of described treatment surface of described workpiece is consistent with the bearing of trend of the described arm of described adapter, and regulate the described short side direction of described workpiece by the height of described height adjustment mechanism.

6, milling apparatus as claimed in claim 1, wherein, described height adjustment mechanism comprises pivot and linear actuators, described pivot is arranged in the described grinding pedestal, described linear actuators is arranged in described first support portion of described adapter, and described linear actuators contacts with described pivot and by described pivotal support.

7, milling apparatus as claimed in claim 1, also comprise left and right sides difference aligning gear, be used for described workpiece vertically on proofread and correct the described workpiece that is attached to described second support portion inclination, wherein, described left and right sides difference aligning gear comprises along a plurality of actuators of vertical layout of described workpiece, to push described arm from the top, make described left and right sides difference aligning gear by partly pushing the attached part of described workpiece, in described inclination of proofreading and correct described workpiece on vertically.

8, milling apparatus as claimed in claim 1 also comprises:

Clamper, described workpiece are fixed on the described clamper, under the state that described workpiece is supported by described second support portion, by being attached to the described clamper of described second support portion, make described workpiece contact with described lapped face; And

Curvature correcting mechanim, by partly pushing described clamper along the direction on the pending described surface of described workpiece, described curvature correcting mechanim is proofreaied and correct the bending of described workpiece in the vertical.

9, a kind of Ginding process that is used for grinding work-piece comprises step:

Described workpiece is attached to second support portion of adapter, makes the pending treatment surface of described workpiece contact with the lapped face of abrasive roller;

The height of first support portion by regulating described adapter is regulated the inclination of the described treatment surface of described workpiece, and described adapter is supported on and grinds on the pedestal, and described grinding pedestal can slide on described lapped face; And

In process of lapping, detect the inclination of described adapter, and, in described process of lapping, regulate the inclination on pending described surface based on the testing result of described inclination.

10, Ginding process as claimed in claim 9 wherein, based on the described testing result of the inclination of described adapter, by regulating the height of described first support portion, is regulated the inclination on pending described surface in described process of lapping.

11, Ginding process as claimed in claim 9 wherein, detects the described inclination of described adapter in described second support portion of described adapter.

12, Ginding process as claimed in claim 9, wherein, when grinding when described adapter is swung described workpiece by swinging, two some places about the oscillation center symmetry on second support portion detect, thus the inclination of obtaining described adapter based on the inclination at described two some places.

13, Ginding process as claimed in claim 12 wherein, is averaged by the summation with the detected value of the inclination at described two some places, obtains the inclination of described adapter.

14, Ginding process as claimed in claim 9 wherein, is regulated the height of described first support portion and the corresponding height in inclination angle that is equal to or less than the 0.001 described adapter of spending.

15, Ginding process as claimed in claim 9 wherein, in process of lapping, is proofreaied and correct after the inclination of described treatment surface of described workpiece, proofreaies and correct the vertically bending of the above treatment surface, and proofreaies and correct the inclination of described treatment surface.

16, Ginding process as claimed in claim 9, wherein, when proofreading and correct the inclination of described treatment surface, the temporary transient reduction ground load.

17, Ginding process as claimed in claim 9 wherein, when proofreading and correct the inclination of described treatment surface, temporarily reduces the rotating speed of described abrasive roller, perhaps temporarily stops the rotation of described abrasive roller.

18, a kind of processing method of magnetic head comprises according to Ginding process and grinds the described magnetic head with read element and write element, and described Ginding process comprises step:

Workpiece is attached to second support portion of adapter, makes the pending treatment surface of described workpiece contact with the lapped face of abrasive roller;

In process of lapping, detect the inclination of described adapter, and, in described process of lapping, regulate the inclination of described treatment surface based on the testing result of described inclination.