CN101362040A - Chemical filter screen device - Google Patents
Chemical filter screen device Download PDFInfo
- Publication number
- CN101362040A CN101362040A CNA2007101438916A CN200710143891A CN101362040A CN 101362040 A CN101362040 A CN 101362040A CN A2007101438916 A CNA2007101438916 A CN A2007101438916A CN 200710143891 A CN200710143891 A CN 200710143891A CN 101362040 A CN101362040 A CN 101362040A
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- CN
- China
- Prior art keywords
- filter screen
- screen device
- supporting construction
- chemical filter
- absorbing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention relates to a chemical filter screen device which comprises a frontal frame, at least one side frame and at least one absorption unit; wherein, the frontal frame is provided with at least one opening; the side frame and the frontal frame are fixedly combined into a whole; the two external sides of the absorption unit are respectively provided with a filter screen; supporting structure is arranged between the two filter screens and an absorbent is arranged in the supporting structure; furthermore, the absorption unit is assembled in the side frame; therefore, the chemical filter screen device is provided.
Description
Technical field
The present invention is relevant a kind of chemical filter screen device, refer in particular to a kind of by being provided with absorbing unit in the side frame, two outsides of this absorbing unit respectively are provided with filter screen, and be provided with a supporting construction between this two filter screen, and be provided with adsorbent in this supporting construction, so that the chemical filter screen device that is used in filtered air to be provided, be applicable to the dust free room or the similar place of the dust free room of electronics manufacturing such as IC, TFT, semiconductor manufacturing industry.
Background technology
Along with semiconductor technology is constantly progressive, IC processing line footpath constantly dwindles, the up-to-date semiconductor technology that advances has entered 45nm, to further stride into 22 and the 32nm technology future, also owing to IC line footpath constantly dwindles, therefore contain little pollution (AirborneMolecular Contamination, AMC) material, for example sulphur-containing substance: SO in extraneous air or the dust free room
X, H
2S, DMSO (Dimethyl Sulfoxide, (CH
3)
2SO), DMS (Dimethyl Sulfide, (CH
3)
2S) etc., acidic materials: NOX, alkaline matter: NH
3, MEA (Monoethanol Amine, NH
2C
2H
4OH) etc., contain lower boiling VOC (Volatile OrganicCompounds, VOCs), IPA (Isopropyl Alcohol, C
3H
7OH), acetone etc., and (Volatile Organic Compounds VOCs) etc., for the influence of technology yield, enlarges day by day to contain high boiling VOC.In order to promote the technology yield, semiconductor factory needs to install chemical filter screen additional in mau make up air hundling unit schedule and air-flow race way usually.
Known chemical filter screen often can't be taken into account and remove composition, remove factors such as efficient, the pressure loss, service life and manufacturing cost, and the historical facts or anecdotes border still is not inconsistent the required of user on using.
Summary of the invention
The object of the present invention is to provide a kind of chemical filter screen device, to overcome the defective that exists in the known technology.
For achieving the above object, chemical filter screen device provided by the invention comprises:
One front frame is provided with at least one opening;
At least one side frame, this side frame and this front frame secure bond are one; And
At least one absorbing unit, two outsides of this absorbing unit respectively are provided with filter screen, and are provided with a supporting construction between this two filter screen, be provided with adsorbent in this supporting construction, and this absorbing unit are incorporated in this side frame;
Thus, so that a chemical filter screen device to be provided.
Described chemical filter screen device, wherein, this supporting construction is made as a plurality of, and those support structure region are divided into several layers, and further be provided with filter screen between those supporting constructions, with this different adsorbents is set.
Described chemical filter screen device, wherein, this supporting construction is a fenestral fabric.
Described chemical filter screen device, wherein, this supporting construction is a honey comb structure.
Described chemical filter screen device, wherein, this supporting construction is a bar trellis structure.
Described chemical filter screen device, wherein, the side of this supporting construction is provided with perforate.
Described chemical filter screen device, wherein, this absorbing unit is further combined with combining with side frame behind an adsorbent frame again, and this adsorbent frame is incorporated into the periphery of this supporting construction, and this adsorbent frame is incorporated into the inboard of side frame again.
Described chemical filter screen device, wherein, this absorbing unit type of laminating is in order to reducing the pressure loss.
Described chemical filter screen device, wherein, this filter screen is the adhesive-bonded fabric filter screen.
Described chemical filter screen device, wherein, this filter screen is a fine-structure mesh.
Described chemical filter screen device wherein, further is provided with filter screen on the opening of this front frame.
Described chemical filter screen device, wherein, this side frame further is provided with a catch net in the outside.
Described chemical filter screen device, wherein, the outside of this two filter screen further is provided with at least one support supplementary structure to support this filter screen.
Chemical filter screen device provided by the invention, the supporting construction and the adsorbent of the multiple pattern of replaceable one-tenth during by this absorbing unit installing, and make the demand of chemical filter screen of the present invention applicable to various occasions and varying environment, make that to remove efficient better and reduced the pressure loss of filtering, and the service life of having improved chemical filter screen, reduce manufacturing cost, increase practicality of the present invention and convenience.
Description of drawings
Fig. 1 is the stereo appearance figure of the embodiment of the invention.
Fig. 2 is the use schematic diagram of the embodiment of the invention.
Fig. 3 is the combination schematic diagram of embodiment of the invention absorbing unit and adsorbent frame.
Fig. 4 is provided with the combination schematic diagram that supports supplementary structure for the embodiment of the invention filter screen outside.
Fig. 5 is the combination schematic diagram that embodiment of the invention bar trellis supporting construction combines with side frame.
Fig. 6 is the combination dissected figure of absorbing unit of the present invention and side frame.
Fig. 7 is the combination dissected figure of absorbing unit of the present invention (adsorbent is located in two layers of supporting construction) and side frame.
Primary clustering symbol description in the accompanying drawing:
10, front frame
11, opening
20, side frame
30, absorbing unit
301, adsorbent
302, filter screen
303, supporting construction
304, perforate
305, support supplementary structure
303a, first supporting construction
303b, second supporting construction
31, adsorbent frame
40, catch net
The specific embodiment
Chemical filter screen device of the present invention, comprise a front frame, at least one side frame and at least one absorbing unit, wherein, this front frame is provided with at least one opening, this side frame and this front frame secure bond are one, and two outsides of this absorbing unit respectively are provided with filter screen, are provided with a supporting construction between this two filter screen, be provided with adsorbent in this supporting construction, and this absorbing unit is incorporated in this side frame; With this, so that a chemical filter screen device to be provided.
Other characteristics of the present invention and specific embodiment can further be understood in the detailed description of following conjunction with figs..
See also Fig. 1～Fig. 5, the present invention includes:
One front frame 10, this front frame 10 is provided with at least one opening 11, and this opening 11 is covered with filter screen 302.
At least one side frame 20, this side frame 20 can be made as V-type or U type enlarging the area of absorption, and this side frame 20 and front frame secure bond are one (its secure bond can be implemented with mode such as pasting), and side frame 20 outsides can further be provided with catch net 40.
At least one absorbing unit 30, this absorbing unit 30 type of laminating, in order to reducing the pressure loss, and two outsides of this absorbing unit 30 respectively are provided with filter screen 302, this filter screen 302 can be made as the adhesive-bonded fabric filter screen, the filter screen of fine-structure mesh or other form, and 302 of those filter screens are provided with adsorbent 301,302 of two filter screens of this absorbing unit 30 are provided with a supporting construction 303, and (present embodiment is made as a fenestral fabric, can also honeycomb during actual enforcement, bar trellis or similarly structure replacement), and this adsorbent 301 is located in this supporting construction 303, and this absorbing unit 30 is incorporated in this side frame 20, when this supporting construction 303 is made as the bar trellis and combines with side frame 20 (please join Fig. 5), the side of this supporting construction 303 is provided with perforate 304, this perforate 304 is for this adsorbent 301 is poured into from side, so when supporting construction 303 is made as the bar trellis, can earlier two filter screens 302 be sticked on this supporting construction 303, pour adsorbent 301 into from the side of supporting construction 303 again, the last side that will be provided with perforate 304 is again sealed and is prevented that adsorbent 301 from leaking, to finish the setting of absorbing unit 30, wherein, this absorbing unit 30 mutually combines with side frame 20 after also can being incorporated into an adsorbent frame 31 earlier again, this adsorbent frame 31 is incorporated into the periphery of this supporting construction 303, and this adsorbent frame 31 is incorporated into the inboard of side frame 20 again, and the outside of this two filter screen 302 also can further be provided with at least one support supplementary structure 305 in order to supporting or paste this filter screen 302 (seeing also Fig. 4).
See also Fig. 1～Fig. 5, characteristics of the present invention are to be by being provided with absorbing unit 30 in the side frame 20, the type and this absorbing unit 30 is laminated, in order to reducing the pressure loss, and two outsides of this absorbing unit 30 respectively are provided with filter screen 302,302 of this two filter screens are provided with a supporting construction 303, and make the Combination Design that is provided with adsorbent 301 in this supporting construction 303, again this side frame 20 is combined with interfixing of this front frame 10 forming a chemical filter screen device, and the outside of this two filter screen 302 also can further be provided with at least one support supplementary structure 305 in order to supporting or paste this filter screen; In addition, when installing this absorbing unit 30, supporting construction 303 in this absorbing unit 30 can be selected displacement with purposes on demand with adsorbent 301, so can make the removal efficient of micro polluting substance better, and can reduce the pressure loss of filtration, in the service life of therefore having improved chemical filter screen, increase the practicality and the convenience of this creation.
See also Fig. 1～Fig. 7; this absorbing unit 30 comprises adsorbent 301 among Fig. 3; two sides respectively have a filter screen 302 and a supporting construction 303; this adsorbent 301 is located in this supporting construction 303; two sides respectively are provided with a filter screen 302; again this supporting construction 303 is incorporated on the adsorbent frame 31; combine with side frame 20 by adsorbent frame 31; and with absorbing unit 30 secure bond on side frame 20; wherein this adsorbent frame 31 is incorporated into the periphery of this supporting construction 303; and this adsorbent frame 31 is incorporated into the inboard of side frame 20 again; and Fig. 6 is the combination dissected figure of this absorbing unit 30 and side frame 20 secure bond; wherein two sides of this side frame 20 are respectively in conjunction with one group of absorbing unit 30; during use; outer gas is by the filter screen 302 of front frame 10; entering side frame 20 centers from opening 11 advances and by absorbing unit 30 toward two other filter screens 302 again; when outer gas during by this absorbing unit 30 micro polluting substance can be absorbed by this adsorbent 301; then, discharge to finish filtration via catch net 40 at last again by the filter screen 302 in absorbing unit 30 outsides.This absorbing unit 30 type of laminating wherein, in order to reducing the pressure loss, and 302 of two filter screens of this absorbing unit 30 can further be provided with a plurality of supporting constructions 303, those supporting constructions 303 separate and are several layers, and 303 of those supporting constructions further are provided with filter screen 302, with this different adsorbents is set, see also Fig. 6～Fig. 7, the combination dissected figure that combines with side frame 20 for absorbing unit 30 of the present invention (adsorbent is located in this supporting construction), this absorbing unit 30 is made as in the supporting construction 303 and is provided with adsorbent, and among present embodiment Fig. 7 this supporting construction 303 to separate be two layers of the first supporting construction 303a and the second supporting construction 303b, and further be provided with a filter screen 302 between this first supporting construction 303a and the second supporting construction 303b with as separating, can be in being installed on each layer supporting construction with this with different adsorbent zone, for example in the first supporting construction 303a, insert high boiling VOC adsorbent, and in the second supporting construction 303b, insert lower boiling VOC adsorbent, so outer gas enters among the first supporting construction 303a and then can remove high boiling VOC earlier, enter again and remove lower boiling VOC among the second supporting construction 303b, and then reach multiple removal effect, make the efficient of removing little pollution polluter better, make the present invention have more practicality and convenience.
The above only is preferred embodiment of the present invention, and when can not be in order to limit the enforceable scope of the present invention, all those skilled in the art obviously can do to change and modification, all should be considered as not departing from claim content of the present invention.
In sum, the present invention really can reach the intended purposes of creation, and a kind of chemical filter screen device is provided, and has practical value.
Claims (13)
1. chemical filter screen device comprises:
One front frame is provided with at least one opening;
At least one side frame, this side frame and this front frame secure bond are one; And
At least one absorbing unit, two outsides of this absorbing unit respectively are provided with filter screen, and are provided with a supporting construction between this two filter screen, be provided with adsorbent in this supporting construction, and this absorbing unit are incorporated in this side frame;
Thus, so that a chemical filter screen device to be provided.
2. chemical filter screen device as claimed in claim 1, wherein, this supporting construction is made as a plurality of, and those support structure region are divided into several layers, and be provided with filter screen between those supporting constructions, with this different adsorbents is set.
3. chemical filter screen device as claimed in claim 1 or 2, wherein, this supporting construction is a fenestral fabric.
4. chemical filter screen device as claimed in claim 1 or 2, wherein, this supporting construction is a honey comb structure.
5. chemical filter screen device as claimed in claim 1 or 2, wherein, this supporting construction is a bar trellis structure.
6. chemical filter screen device as claimed in claim 5, wherein, the side of this supporting construction is provided with perforate.
7. chemical filter screen device as claimed in claim 1, wherein, this absorbing unit combines with side frame after being incorporated into an adsorbent frame again, and this adsorbent frame is incorporated into the periphery of this supporting construction, and this adsorbent frame is incorporated into the inboard of side frame again.
8. chemical filter screen device as claimed in claim 1, wherein, this absorbing unit type of laminating is to reduce the pressure loss.
9. chemical filter screen device as claimed in claim 1, wherein, this filter screen is the adhesive-bonded fabric filter screen.
10. chemical filter screen device as claimed in claim 1, wherein, this filter screen is a fine-structure mesh.
11. chemical filter screen device as claimed in claim 1, wherein, the opening of this front frame is provided with filter screen.
12. chemical filter screen device as claimed in claim 1, wherein, this side frame is provided with a catch net in the outside.
13. chemical filter screen device as claimed in claim 1, wherein, the outside of this two filter screen is provided with at least one support supplementary structure to support this filter screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101438916A CN101362040A (en) | 2007-08-06 | 2007-08-06 | Chemical filter screen device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101438916A CN101362040A (en) | 2007-08-06 | 2007-08-06 | Chemical filter screen device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101362040A true CN101362040A (en) | 2009-02-11 |
Family
ID=40388758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101438916A Pending CN101362040A (en) | 2007-08-06 | 2007-08-06 | Chemical filter screen device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101362040A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108136314A (en) * | 2015-12-14 | 2018-06-08 | 松下电器产业株式会社 | Chemical substance inspissator and chemical detector |
-
2007
- 2007-08-06 CN CNA2007101438916A patent/CN101362040A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108136314A (en) * | 2015-12-14 | 2018-06-08 | 松下电器产业株式会社 | Chemical substance inspissator and chemical detector |
| CN108136314B (en) * | 2015-12-14 | 2021-07-20 | 松下电器产业株式会社 | Chemical substance concentrator and chemical substance detector |
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| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090211 |