CN101352836A - Method and device for controlling polishing temperature of freezing fixed abrasive - Google Patents
Method and device for controlling polishing temperature of freezing fixed abrasive Download PDFInfo
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- CN101352836A CN101352836A CNA2008101247345A CN200810124734A CN101352836A CN 101352836 A CN101352836 A CN 101352836A CN A2008101247345 A CNA2008101247345 A CN A2008101247345A CN 200810124734 A CN200810124734 A CN 200810124734A CN 101352836 A CN101352836 A CN 101352836A
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- fixed abrasive
- polishing pad
- freezing
- polishing
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- 238000005498 polishing Methods 0.000 title claims abstract description 132
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000008014 freezing Effects 0.000 title claims description 92
- 238000007710 freezing Methods 0.000 title claims description 92
- 238000012545 processing Methods 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 12
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 12
- 239000004809 Teflon Substances 0.000 claims description 6
- 229920006362 Teflon® Polymers 0.000 claims description 6
- -1 polytetrafluoroethylene Polymers 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 6
- 238000009423 ventilation Methods 0.000 claims description 3
- 239000002699 waste material Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000008018 melting Effects 0.000 abstract description 2
- 238000002844 melting Methods 0.000 abstract description 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000003082 abrasive agent Substances 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 238000010257 thawing Methods 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 235000018734 Sambucus australis Nutrition 0.000 description 2
- 244000180577 Sambucus australis Species 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- OGFXBIXJCWAUCH-UHFFFAOYSA-N meso-secoisolariciresinol Natural products C1=2C=C(O)C(OC)=CC=2CC(CO)C(CO)C1C1=CC=C(O)C(OC)=C1 OGFXBIXJCWAUCH-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention discloses a method for controlling the polishing temperature of frozenly fixed abrasive and a device thereof, a temperature recorder which has a radio emission module and is frozen in a frozenly fixed abrasive polishing pad is used for measuring the temperature in the frozen polishing pad and acquiring the temperature in the frozen polishing pad; radio wave with temperature signals is received by a radio receiver module arranged in a cold air generator, and is transmitted to a output signal processing module; the temperature signal is transmitted to a microcomputer to control the blowing operation of the cold air generator. An outlet which is arranged on the upper wall of the cold air generator is communicated with the cavity of a polisher; thereby, the polishing temperature of the frozenly fixed abrasive can be controlled. By controlling the polishing temperature of the frozenly fixed abrasive intelligently, the melting speed of the frozen polishing pad can be controlled effectively; abrasive waste is avoided; the effectiveness of the fixed abrasive in the frozen polishing pad within the polishing processing time is guaranteed; the manufacture cost of the frozen polishing pad is reduced and the aim of saving energy is achieved.
Description
Technical field
The present invention relates to a kind of control method and device of freezing buffing wheel processing temperature, especially a kind of temperature-controlled process and device that is used to process the cryogenic polishing pad of hard brittle materials such as monocrystalline silicon piece, specifically a kind of control method of polishing temperature of freezing fixed abrasive and device.
Background technology
Utilize the freezing fixed abrasive polishing pad that hard brittle materials such as monocrystalline silicon piece are carried out in the cryogenic polishing process, because of grinding tool is freezing polishing pad, the heat that polishing area produces can cause the thawing of freezing polishing pad.Freezing polishing pad top layer can make old abrasive material come off after melting on the one hand, and new abrasive material exposes, and makes polishing remove efficient and improves; On the other hand, the thawing speed of freezing polishing pad should effectively be controlled, and to avoid the waste of abrasive material, guarantees that concretion abrasive in the freezing polishing pad is in the validity of polishing in process time.Therefore, should suitably control the low temperature process environment, to guarantee that the freezing fixed abrasive polishing pad is unlikely to the former thereby premature failure because of environment temperature, and cause the increase of polishing pad cost thus, and the key that influences the polishing pad inefficacy is its internal temperature, have only the internal temperature of working as to maintain in certain scope, could guarantee that pad interface is in the ideal operation state, if internal temperature is too high, then must reduce the polishing pad operating ambient temperature by the cold wind generator, so that abrasive particle keeps certain adhesion strength, if internal temperature is low excessively, then must reduces the air output of cold wind generator, even close the cold wind generator, to improve the operating ambient temperature of polishing pad, abrasive particle can normally be separated with pad, keep the sharpness of pad interface, make polishing pad keep high working (machining) efficiency, therefore the measurement of polishing pad internal temperature is the key that control cold wind is sent out device work, also is the key that guarantees whole polishing pad efficient operation.
But because freezing polishing pad and polishing machine main shaft link, with main shaft rotate and rotating speed higher, its thermocouple temperature measurement signal is difficult for drawing, the influence of factors such as jump that slip ring scheme commonly used is subject to corrosion, the carbon brush of metal slip ring causes the loose contact between metal slip ring and the carbon brush, works both unreliablely also can have a strong impact on certainty of measurement.
Therefore, be badly in need of a kind of method and the device that can measure freezing polishing pad internal temperature easily of exploitation,, make polishing pad be in efficient, best duty, improve crudy so that the cryogenic polishing environment temperature is carried out intellectuality control.
Summary of the invention
The objective of the invention is at present because of freezing polishing pad inside temperature measurement difficulty is big, poor accuracy directly has influence on the temperature controlled problem of polishing pad processing environment, and a kind of control method and device of polishing temperature of freezing fixed abrasive is provided.
A kind of polishing temperature of freezing fixed abrasive control method is characterized in that it comprises the steps:
(1) at first, on the freezing fixed abrasive polishing pad by freezing to fixedly mount the moisture recorder that has the radio transmission module;
(2) secondly, at least freeze to install a temperature probe in freezing fixed abrasive polishing pad inside, and send in the moisture recorder by the lead that the is frozen in freezing fixed abrasive polishing pad inside temperature that temperature probe is measured, by moisture recorder measured freezing fixed abrasive polishing pad temperature inside is sent by the radio transmission module;
(3) the 3rd, the radio reception module is installed on the cold wind generator, be used to receive the temperature signal that moisture recorder collects;
(4) radio reception module temperature that the temperature that receives is sent into cold wind generator and setting compares the air output with control cold wind generator, reach the purpose of control polishing temperature of freezing fixed abrasive, finally reach the purpose of control freezing fixed abrasive and polishing pad bond strength, make polishing pad always work in optimum state.
The described moisture recorder that has the radio transmission module is encapsulated in the box of being made by the low temperature material polytetrafluoroethylene (PTFE), teflon carrier is frozen in freezing fixed abrasive polishing pad edge, and the thermocouple that is connected with moisture recorder extends to polishing pad inside; Dynamic balancing when keeping polishing is freezed the balance weight that has one to be made by polytetrafluoroethylmaterial material at the opposite side of freezing fixed abrasive polishing pad, this balance weight be packaged with the teflon carrier of moisture recorder about polishing pad centre of gyration symmetry.
A kind of polishing temperature of freezing fixed abrasive control device, comprise the moisture recorder that has the radio transmission module, thermocouple, the radio reception module, the cold wind generator, it is characterized in that described moisture recorder is installed in the mounting box, mounting box is frozen in the edge of freezing fixed abrasive polishing pad, thermocouple is frozen in the point for measuring temperature place of freezing fixed abrasive polishing pad inside and links to each other with moisture recorder in the mounting box by lead, the radio reception module links to each other with wireless transmitter module in the moisture recorder by less radio-frequency, and the control device of radio reception module and cold wind generator is electrically connected; The cold wind generator links to each other with freezing fixed abrasive polishing pad operating room by ventilation duct.
The control device of described cold wind generator is made up of output signal processing module, radio reception unit power module and micro computer, radio reception unit power module provides power supply for output signal processing module and radio reception module, the input of output signal processing module links to each other with the output of radio reception module, and the output of output signal processing module links to each other with the signal input part of micro computer.
Freeze that balance weight is arranged in described freezing fixed abrasive polishing pad, balance weight and mounting box balanced configuration are in both sides, freezing fixed abrasive polishing pad center.
As mentioned above, the moisture recorder that has the radio transmission module among the present invention is encapsulated in the box of being made by the low temperature material polytetrafluoroethylene (PTFE), teflon carrier is frozen in freezing fixed abrasive polishing pad edge, and the thermocouple that is connected with moisture recorder extends to polishing pad inside; Dynamic balancing when keeping polishing at the opposite side of freezing fixed abrasive polishing pad, has been freezed a balance weight of being made by polytetrafluoroethylmaterial material, this balance weight be packaged with the teflon carrier of moisture recorder about polishing pad centre of gyration symmetry.
A radio reception unit is housed on the cold wind generator, and this unit is made up of a radio reception module, an output signal processing module and a radio reception unit power module, by the unified power supply of radio reception unit power module; Radio reception module, output signal processing module and micro computer are electrically connected in proper order.When adopting the freezing fixed abrasive polishing pad that hard brittle materials such as monocrystalline silicon piece are polished, the moisture recorder that has the radio transmission module that is installed on the freezing fixed abrasive polishing pad is just gone out detected temperature signal with radio wave transmission, the radio reception module that radio wave is installed on the cold wind generator receives, be sent to the output signal processing module again, temperature signal is sent to micro computer, and then the pushing wind manipulation of control cold wind generator.Upper wall place at the cold wind generator has air outlet, and this air outlet communicates with the polishing machine inner chamber, thus with regard to controlled system polishing temperature of freezing fixed abrasive.
Beneficial effect of the present invention:
The present invention has created condition for realizing the intelligence control of low temp processing environment, the thawing speed of freezing polishing pad is controlled effectively, avoid the waste of abrasive material, guarantee that concretion abrasive in the freezing polishing pad is in the validity of polishing in process time, thereby reduce the cost of manufacture of freezing polishing pad, reach the purpose of energy savings.
Description of drawings
Fig. 1 is a polishing temperature of freezing fixed abrasive control system structural representation of the present invention.
Fig. 2 is the flow chart of freezing fixed abrasive polishing pad temperature survey service routine of the present invention.
SECO flow chart when Fig. 3 is polishing temperature of freezing fixed abrasive of the present invention control.
Fig. 4 is polishing temperature of freezing fixed abrasive control back freezing polishing pad central temperature curve over time when not controlling among the present invention.
The specific embodiment
The present invention is further illustrated below in conjunction with drawings and Examples.
Embodiment one.
A kind of polishing temperature of freezing fixed abrasive control method, it comprises the steps:
(1) at first, on the freezing fixed abrasive polishing pad by freezing to fixedly mount the moisture recorder that has the radio transmission module;
(2) secondly, at least freeze to install a temperature probe in freezing fixed abrasive polishing pad inside, and send in the moisture recorder by the lead that the is frozen in freezing fixed abrasive polishing pad inside temperature that temperature probe is measured, by moisture recorder measured freezing fixed abrasive polishing pad temperature inside is sent by the radio transmission module;
(3) the 3rd, the radio reception module is installed on the cold wind generator, be used to receive the temperature signal that moisture recorder collects;
(4) radio reception module temperature that the temperature that receives is sent into cold wind generator and setting compares the air output with control cold wind generator, if the temperature that measures is lower than setting value (can be determined according to abrasive material and processing object), then can close the air output of cold wind generator or minimizing cold wind generator, if the temperature that measures surpasses setting value, then should increase the air output of cold wind generator, reduce the temperature of working environment, finally reach the purpose of control freezing fixed abrasive and polishing pad bond strength, make polishing pad always work in optimum state.
A kind of polishing temperature of freezing fixed abrasive control device, comprise that (model can be the moisture recorder 1 that has the radio transmission module: the TC4000 type of Madge Tech company), thermocouple 5, (model can be radio reception module 7: the 750-642 type of WAGO company, also can adopt the circuit on the conventional textbook to be realized), cold wind generator 11 (as refrigeration machine), described moisture recorder 1 is installed in the mounting box 12, mounting box 12 is frozen in the edge of freezing fixed abrasive polishing pad 3, thermocouple 5 is frozen in the point for measuring temperature place of freezing fixed abrasive polishing pad 3 inside and links to each other with moisture recorder 1 in the mounting box 12 by lead, radio reception module 7 links to each other with wireless transmitter module in the moisture recorder 1 by less radio-frequency, and radio reception module 7 is electrically connected with the control device of cold wind generator 11; Cold wind generator 11 links to each other with freezing fixed abrasive polishing pad 3 operating rooms 13 by ventilation duct 4.The control device of cold wind generator 11 is made up of output signal processing module 8, radio reception unit power module 9 and micro computer 10, radio reception unit power module 9 provides power supply for output signal processing module 8 and radio reception module 7, the input of output signal processing module 8 links to each other with the output of radio reception module 7, and the output of output signal processing module 8 links to each other with the signal input part of micro computer 10.Freeze to have balance weight 6 in described freezing fixed abrasive polishing pad 3, balance weight 6 and mounting box balanced configuration are in both sides, freezing fixed abrasive polishing pad 3 center.
Details are as follows:
As shown in Figure 1, the moisture recorder 1 that has the radio transmission module is encapsulated in the mounting box of being made by the low temperature material polytetrafluoroethylene (PTFE), the polytetrafluoroethylene (PTFE) mounting box is frozen in freezing fixed abrasive polishing pad 2 edges and (also can be frozen on the surface of polishing pad, correspondingly balance weight also should symmetrical be frozen on the surface of polishing pad), the thermocouple 5 that is connected with moisture recorder extends to polishing pad inside; Dynamic balancing during for the maintenance polishing, opposite side at the freezing fixed abrasive polishing pad, freezed a balance weight 6 of making by polytetrafluoroethylmaterial material, balance weight 6 be packaged with the centre of gyration symmetry of the polytetrafluoroethylene (PTFE) mounting box of moisture recorder 1 about freezing polishing pad 2.
A radio reception unit is housed on cold wind generator 11, this unit is made up of a radio reception module 7, an output signal processing module 8 (can adopt the signal processing circuit on the conventional textbook to be realized) and a radio reception unit power module 9, by the 9 unified power supplies of radio reception unit power module; Radio reception module 7, output signal processing module 8 and micro computer 10 (program can be worked out voluntarily) order is electrically connected.When adopting 2 pairs of hard brittle materials such as monocrystalline silicon piece of freezing fixed abrasive polishing pad to polish, being installed on the freezing fixed abrasive polishing pad 2 the moisture recorder that has the radio transmission module 1 just goes out detected temperature signal with radio wave transmission, the radio reception module 7 that radio wave is installed on the cold wind generator 11 receives, be sent to output signal processing module 8 again, temperature signal is sent to micro computer 10, and then the pushing wind manipulation of control cold wind generator 11.Upper wall place at the cold wind generator has air outlet, and this air outlet communicates with the polishing machine inner chamber, thus with regard to controlled system polishing temperature of freezing fixed abrasive.
Figure 2 shows that the flow chart of freezing fixed abrasive polishing pad temperature survey service routine among the present invention.Three thermocouples can be measured following 3 temperature in polishing area surface simultaneously, calculate the mean temperature of freezing fixed abrasive polishing pad then.
Figure 3 shows that the SECO flow chart when polishing temperature of freezing fixed abrasive of the present invention is controlled.At first start the intelligent radio test function, initialization air-supply control module, intiating radio temperature measurement module, initialization timing device module; Then, timer interrupts, and changes freezing fixed abrasive polishing pad temperature survey service routine (consulting Fig. 2) over to; Analyze freezing fixed abrasive polishing pad temperature data, and judge whether to adjust leaving air temp, if then adjust the wind pushing temperature of cold wind generator, if otherwise judge whether to carry out other control action; Return the timer interrupt step afterwards, so repeatedly, up to the power consumption that reduces the cold wind generator or close the cold wind generator.
Freezing polishing pad temperature curve comparison diagram over time when Figure 4 shows that among the present invention polishing temperature of freezing fixed abrasive control back with temperature control not.As seen from the figure, after adopting temperature control method of the present invention and installing, after polishing time reaches 1400s, freezing polishing pad temperature no longer rises with the increase of polishing time, but be stabilized in about-4 ℃, the temperature control effect is obvious, and the thawing speed of freezing polishing pad has obtained effective control.
Claims (5)
1, a kind of polishing temperature of freezing fixed abrasive control method is characterized in that it comprises the steps:
(1) at first, on the freezing fixed abrasive polishing pad by freezing to fixedly mount the moisture recorder that has the radio transmission module;
(2) secondly, at least freeze to install a temperature probe in freezing fixed abrasive polishing pad inside, and send in the moisture recorder by the lead that the is frozen in freezing fixed abrasive polishing pad inside temperature that temperature probe is measured, by moisture recorder measured freezing fixed abrasive polishing pad temperature inside is sent by the radio transmission module;
(3) the 3rd, the radio reception module is installed on the cold wind generator, be used to receive the temperature signal that moisture recorder collects;
(4) radio reception module temperature that the temperature that receives is sent into cold wind generator and setting compares the air output with control cold wind generator, reach the purpose of control polishing temperature of freezing fixed abrasive, finally reach the purpose of control freezing fixed abrasive and polishing pad bond strength, make polishing pad always work in optimum state.
2, polishing temperature of freezing fixed abrasive control method according to claim 1, it is characterized in that the described moisture recorder that has the radio transmission module is encapsulated in the box of being made by the low temperature material polytetrafluoroethylene (PTFE), teflon carrier is frozen in freezing fixed abrasive polishing pad edge, and the thermocouple that is connected with moisture recorder extends to polishing pad inside; Dynamic balancing when keeping polishing is freezed the balance weight that has one to be made by polytetrafluoroethylmaterial material at the opposite side of freezing fixed abrasive polishing pad, this balance weight be packaged with the teflon carrier of moisture recorder about polishing pad centre of gyration symmetry.
3, a kind of polishing temperature of freezing fixed abrasive control device, comprise the moisture recorder (1) that has the radio transmission module, thermocouple (5), radio reception module (7), cold wind generator (11), it is characterized in that described moisture recorder (1) is installed in the mounting box (12), mounting box (12) is frozen in the edge of freezing fixed abrasive polishing pad (3), thermocouple (5) is frozen in the inner point for measuring temperature place of freezing fixed abrasive polishing pad (3) and links to each other with moisture recorder (1) in the mounting box (12) by lead, radio reception module (7) links to each other with wireless transmitter module in the moisture recorder (1) by less radio-frequency, and radio reception module (7) is electrically connected with the control device of cold wind generator (11); Cold wind generator (11) links to each other with freezing fixed abrasive polishing pad (3) operating room (13) by ventilation duct (4).
4, polishing temperature of freezing fixed abrasive control device according to claim 3, the control device that it is characterized in that described cold wind generator (11) is by output signal processing module (8), radio reception unit power module (9) and micro computer (10) are formed, radio reception unit power module (9) provides power supply for output signal processing module (8) and radio reception module (7), the input of output signal processing module (8) links to each other with the output of radio reception module (7), and the output of output signal processing module (8) links to each other with the signal input part of micro computer (10).
5, polishing temperature of freezing fixed abrasive control device according to claim 3, it is characterized in that freezing that balance weight is arranged (6) in described freezing fixed abrasive polishing pad (3), balance weight (6) and mounting box balanced configuration are in freezing fixed abrasive polishing pad (3) both sides, center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008101247345A CN100551627C (en) | 2008-09-01 | 2008-09-01 | The control method of polishing temperature of freezing fixed abrasive and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008101247345A CN100551627C (en) | 2008-09-01 | 2008-09-01 | The control method of polishing temperature of freezing fixed abrasive and device |
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| Publication Number | Publication Date |
|---|---|
| CN101352836A true CN101352836A (en) | 2009-01-28 |
| CN100551627C CN100551627C (en) | 2009-10-21 |
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|---|---|---|---|
| CNB2008101247345A Expired - Fee Related CN100551627C (en) | 2008-09-01 | 2008-09-01 | The control method of polishing temperature of freezing fixed abrasive and device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101982303A (en) * | 2010-10-11 | 2011-03-02 | 南京航空航天大学 | Grooved frozen solidified grinding material polishing pad and preparation method thereof |
| CN102335888A (en) * | 2010-10-11 | 2012-02-01 | 南京航空航天大学 | Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof |
| CN102343544A (en) * | 2011-11-22 | 2012-02-08 | 山东理工大学 | Ultralow temperature polishing machine |
| CN102490115A (en) * | 2011-11-22 | 2012-06-13 | 山东理工大学 | Low-temperature polisher |
| CN103862354A (en) * | 2014-03-24 | 2014-06-18 | 南京航空航天大学 | Ultrathin single crystal germanium wafer processing method |
| CN107088825A (en) * | 2017-06-06 | 2017-08-25 | 上海华力微电子有限公司 | Work-table of chemicomechanical grinding mill, temperature control system and its temprature control method |
| CN110666685A (en) * | 2019-10-16 | 2020-01-10 | 河北工业大学 | Heat dissipation grinding device with grinding face temperature measurement function |
| CN112275413A (en) * | 2020-10-11 | 2021-01-29 | 绿之韵生物工程集团有限公司 | Ice mill impact type ganoderma lucidum spore powder wall breaking device |
-
2008
- 2008-09-01 CN CNB2008101247345A patent/CN100551627C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101982303A (en) * | 2010-10-11 | 2011-03-02 | 南京航空航天大学 | Grooved frozen solidified grinding material polishing pad and preparation method thereof |
| CN102335888A (en) * | 2010-10-11 | 2012-02-01 | 南京航空航天大学 | Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof |
| CN102343544A (en) * | 2011-11-22 | 2012-02-08 | 山东理工大学 | Ultralow temperature polishing machine |
| CN102490115A (en) * | 2011-11-22 | 2012-06-13 | 山东理工大学 | Low-temperature polisher |
| CN102343544B (en) * | 2011-11-22 | 2013-08-07 | 山东理工大学 | Ultralow temperature polishing machine |
| CN103862354A (en) * | 2014-03-24 | 2014-06-18 | 南京航空航天大学 | Ultrathin single crystal germanium wafer processing method |
| CN107088825A (en) * | 2017-06-06 | 2017-08-25 | 上海华力微电子有限公司 | Work-table of chemicomechanical grinding mill, temperature control system and its temprature control method |
| CN110666685A (en) * | 2019-10-16 | 2020-01-10 | 河北工业大学 | Heat dissipation grinding device with grinding face temperature measurement function |
| CN112275413A (en) * | 2020-10-11 | 2021-01-29 | 绿之韵生物工程集团有限公司 | Ice mill impact type ganoderma lucidum spore powder wall breaking device |
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| Publication number | Publication date |
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| CN100551627C (en) | 2009-10-21 |
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