CN101352836A - Method and device for controlling polishing temperature of freezing fixed abrasive - Google Patents
Method and device for controlling polishing temperature of freezing fixed abrasive Download PDFInfo
- Publication number
- CN101352836A CN101352836A CNA2008101247345A CN200810124734A CN101352836A CN 101352836 A CN101352836 A CN 101352836A CN A2008101247345 A CNA2008101247345 A CN A2008101247345A CN 200810124734 A CN200810124734 A CN 200810124734A CN 101352836 A CN101352836 A CN 101352836A
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- China
- Prior art keywords
- temperature
- fixed abrasive
- polishing pad
- freezing
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 132
- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000008014 freezing Effects 0.000 title claims description 92
- 238000007710 freezing Methods 0.000 title claims description 92
- 238000012545 processing Methods 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 12
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 12
- 239000004809 Teflon Substances 0.000 claims description 6
- 229920006362 Teflon® Polymers 0.000 claims description 6
- -1 polytetrafluoroethylene Polymers 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 6
- 238000009423 ventilation Methods 0.000 claims description 3
- 239000002699 waste material Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000008018 melting Effects 0.000 abstract description 2
- 238000002844 melting Methods 0.000 abstract description 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000003082 abrasive agent Substances 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 238000010257 thawing Methods 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 235000018734 Sambucus australis Nutrition 0.000 description 2
- 244000180577 Sambucus australis Species 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- OGFXBIXJCWAUCH-UHFFFAOYSA-N meso-secoisolariciresinol Natural products C1=2C=C(O)C(OC)=CC=2CC(CO)C(CO)C1C1=CC=C(O)C(OC)=C1 OGFXBIXJCWAUCH-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2008101247345A CN100551627C (en) | 2008-09-01 | 2008-09-01 | The control method of polishing temperature of freezing fixed abrasive and device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2008101247345A CN100551627C (en) | 2008-09-01 | 2008-09-01 | The control method of polishing temperature of freezing fixed abrasive and device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101352836A true CN101352836A (en) | 2009-01-28 |
CN100551627C CN100551627C (en) | 2009-10-21 |
Family
ID=40305985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2008101247345A Expired - Fee Related CN100551627C (en) | 2008-09-01 | 2008-09-01 | The control method of polishing temperature of freezing fixed abrasive and device |
Country Status (1)
Country | Link |
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CN (1) | CN100551627C (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101982303A (en) * | 2010-10-11 | 2011-03-02 | 南京航空航天大学 | Grooved frozen solidified grinding material polishing pad and preparation method thereof |
CN102335888A (en) * | 2010-10-11 | 2012-02-01 | 南京航空航天大学 | Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof |
CN102343544A (en) * | 2011-11-22 | 2012-02-08 | 山东理工大学 | Ultralow temperature polishing machine |
CN102490115A (en) * | 2011-11-22 | 2012-06-13 | 山东理工大学 | Low-temperature polisher |
CN103862354A (en) * | 2014-03-24 | 2014-06-18 | 南京航空航天大学 | Ultrathin single crystal germanium wafer processing method |
CN107088825A (en) * | 2017-06-06 | 2017-08-25 | 上海华力微电子有限公司 | Work-table of chemicomechanical grinding mill, temperature control system and its temprature control method |
CN110666685A (en) * | 2019-10-16 | 2020-01-10 | 河北工业大学 | Heat dissipation grinding device with grinding face temperature measurement function |
CN112275413A (en) * | 2020-10-11 | 2021-01-29 | 绿之韵生物工程集团有限公司 | Ice mill impact type ganoderma lucidum spore powder wall breaking device |
-
2008
- 2008-09-01 CN CNB2008101247345A patent/CN100551627C/en not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101982303A (en) * | 2010-10-11 | 2011-03-02 | 南京航空航天大学 | Grooved frozen solidified grinding material polishing pad and preparation method thereof |
CN102335888A (en) * | 2010-10-11 | 2012-02-01 | 南京航空航天大学 | Slotting-type freezing and solidifying grinding material polishing pad and preparation method thereof |
CN102343544A (en) * | 2011-11-22 | 2012-02-08 | 山东理工大学 | Ultralow temperature polishing machine |
CN102490115A (en) * | 2011-11-22 | 2012-06-13 | 山东理工大学 | Low-temperature polisher |
CN102343544B (en) * | 2011-11-22 | 2013-08-07 | 山东理工大学 | Ultralow temperature polishing machine |
CN103862354A (en) * | 2014-03-24 | 2014-06-18 | 南京航空航天大学 | Ultrathin single crystal germanium wafer processing method |
CN107088825A (en) * | 2017-06-06 | 2017-08-25 | 上海华力微电子有限公司 | Work-table of chemicomechanical grinding mill, temperature control system and its temprature control method |
CN110666685A (en) * | 2019-10-16 | 2020-01-10 | 河北工业大学 | Heat dissipation grinding device with grinding face temperature measurement function |
CN112275413A (en) * | 2020-10-11 | 2021-01-29 | 绿之韵生物工程集团有限公司 | Ice mill impact type ganoderma lucidum spore powder wall breaking device |
Also Published As
Publication number | Publication date |
---|---|
CN100551627C (en) | 2009-10-21 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HAIAN CHANGGONG TECHNOLOGY TRANSFER CENTER CO., LT Free format text: FORMER OWNER: NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS Effective date: 20140527 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 210016 NANJING, JIANGSU PROVINCE TO: 226600 NANTONG, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140527 Address after: 226600 No. 8 Yingbin Road, Haian County, Nantong, Jiangsu Patentee after: Haian Chang Chang Technology Transfer Center Co., Ltd. Address before: Yudaojie Nanjing 210016 Jiangsu province No. 29 Patentee before: Nanjing University of Aeronautics and Astronautics |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091021 Termination date: 20170901 |