CN101347846A - Microscopic geometry cutting device and microscopic geometry cutting method - Google Patents
Microscopic geometry cutting device and microscopic geometry cutting method Download PDFInfo
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- CN101347846A CN101347846A CNA200810137771XA CN200810137771A CN101347846A CN 101347846 A CN101347846 A CN 101347846A CN A200810137771X A CNA200810137771X A CN A200810137771XA CN 200810137771 A CN200810137771 A CN 200810137771A CN 101347846 A CN101347846 A CN 101347846A
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Abstract
A microscopic geometry cutting device and a method thereof, wherein the device includes: a controller that outputs a timer count start command in starting a driving program which controls a drive of an X-axis or a Y-axis moving mechanism; an arrival time calculator that calculates an arrival time from when the timer count start command is output till when the cutter arrives at a machining start position in accordance with relative moving speed information of the moving mechanisms and machining start position information of a workpiece W; an elapsed time determiner that determines whether an elapsed time from when the timer count start command is output is coincident with the arrival time and outputs a trigger signal when the elapsed time is coincident with the arrival time; and a reciprocating stage driver that drives the reciprocating stage in a manner that the cutter advances and retracts in a predetermined cutting depth in response to the trigger signal.
Description
Technical field
The present invention relates to use cutting element and at the cutting apparatus and the fine shape cutting working method of the fine concavo-convex fine shape of the Surface Machining of machined object.
Background technology
As using cutting element in the Surface Machining of machined object fine concavo-convex device or method, known have disclosed in the document (spy opens the 2006-123085 communique) " fine surface configuration cutting apparatus and fine cutting working method ".
This device constitutes, and possesses: the 1st slide mechanism, and the lift-launch machined object also moves back and forth; The 2nd slide mechanism carries out the setting movement at intermittence along the direction vertical with the direction of motion of the 1st slide mechanism; Instrument incision mechanism, vertical with the kinematic axis of these the 1st and the 2nd slide mechanisms respectively direction in edge is also controlled the approach of cutting element at a high speed imperceptibly; And position detector, produce pulse signal along with the motion of the 1st slide mechanism.
For the fine surface configuration of Surface Machining at machined object, at the 1st slide mechanism when positive direction is moved, by instrument incision mechanism the approach of cutting element is changed at high speed synchronously with the pulse signal that produces from position detector, at the 1st slide mechanism when opposite direction is moved, cutting element is kept out of the way from machined object, and back and forth seasonal the 2nd slide mechanism of each order 1 slide mechanism is sent fixed amount to.Thus, can be in the Surface Machining of machined object fine surface configuration.
In above-mentioned document in disclosed processing unit (plant) or the processing method, at the 1st slide mechanism when positive direction is moved, detect the positional information of the 1st slide mechanism with position detector, pulse signal from this position detector is counted, judge whether count value is consistent with predefined value, output triggering signal when both are consistent changes the approach of cutting element by instrument incision mechanism under this triggering signal effect at high speed.Therefore, need carry out counting from the pulse signal of position detector and judging whether and set value consistent processing, therefore think to be easy to generate the opportunity of cutting element advance and retreat sometimes to postpone and can not be in the high-precision fine surface configuration of the Surface Machining of machined object.
Especially, be used on sheet material transfer printing in processing and be shaped a plurality of lenticular lenticule transfer printings when being shaped with roller or transfer printing shaping dies, the micro-lens forming portion that is processed is the small unit lenses of external diameter the chances are about 10～300 μ m roughly circular and concavees lens that dark plating is 0.6～50 μ m or convex lens etc., therefore produce skew the opportunity as if the cutting element advance and retreat, then can not be in the high-precision fine surface configuration of the Surface Machining of machined object.
And, in above-mentioned document in disclosed processing unit (plant) or the processing method,, adopt following method usually in order to determine processing conditions, promptly select to determine feed rate with reference to needed time of processing etc. with trial and error method for the target shape that will process.
But in the above-mentioned method, the determining of processing conditions needs the time.And because the dynamic characteristic of utilizing instrument incision mechanism to make the approach of cutting element change at high speed, as shown in figure 11, with respect to the target trajectory of cutting element, the amplitude of the movement locus of the reality of cutting element reduces or the generation phase place lags behind.And the intrinsic frequency owing to the device with slide mechanism produces covibration sometimes.
Therefore, owing to can not make the movement locus of cutting element consistent, exist the machining error to become big problem with target trajectory.
Summary of the invention
Main purpose of the present invention is to remove such problem, provides a kind of and can and process the fine shape cutting apparatus and the fine shape cutting working method of fine shape expeditiously in the surperficial high accuracy of machined object.
Fine cutting apparatus of the present invention possesses: the workbench of mounting machined object and cutting element; X-axis travel mechanism and Y direction travel mechanism make above-mentioned workbench and above-mentioned cutting element relatively move towards orthogonal X-axis and Y direction; Z axle travel mechanism has the incision axle that above-mentioned cutting element is advanced and retreat towards the Z-direction vertical with above-mentioned X-axis and Y direction; Move back and forth platform, be arranged on the above-mentioned incision axle and make and change at high speed towards the approach of the above-mentioned cutting element of above-mentioned Z-direction, it is characterized in that, wherein, this fine shape cutting apparatus possesses: controlling organization, the driver of the driving of above-mentioned each travel mechanism of storage control is also controlled the driving of above-mentioned each travel mechanism according to this driver, and when above-mentioned driver begins output time counting sign on; The time of advent arithmetical organ, from the processing start position information of at least one side's of above-mentioned X-axis travel mechanism and y-axis shift actuation mechanism relative moving speed information and above-mentioned machined object and calculate from exporting above-mentioned time counting sign on and arrive time of advent of the processing starting position of above-mentioned machined object to above-mentioned cutting element; Elapsed time decision mechanism, instrumentation is from the elapsed time that above-mentioned controlling organization output time counting sign on begins, and whether judges this elapsed time with consistent by the time of advent of the above-mentioned arithmetical organ computing time of advent, output triggering signal when both are consistent; And move back and forth the platform driving mechanism, and receive triggering signal from above-mentioned elapsed time decision mechanism, above-mentioned reciprocating motion platform is driven so that above-mentioned cutting element is advanced and retreat with predefined approach.
According to this structure, if begin driver, then control the driving of X-axis travel mechanism, y-axis shift actuation mechanism and Z axle travel mechanism, and output time is counted sign on when driver begins according to driver by controlling organization.
So in elapsed time decision mechanism, instrumentation judges that from the elapsed time that controlling organization output time counting sign on begins whether this elapsed time is with consistent by the time of advent of the arithmetical organ computing time of advent.If the elapsed time of using elapsed time decision mechanism's instrumentation is then exported triggering signal with consistent by the time of advent of the arithmetical organ computing time of advent.
Move back and forth the triggering signal of platform driving mechanism reception, make to move back and forth the platform driving so that cutting element is advanced and retreat with predefined approach from elapsed time decision mechanism.Thus, because cutting element advances and retreat with predefined approach, so at the Surface Machining fine shape of machined object.
In the present invention, the elapsed time of instrumentation output time counting sign on when driver begins, with this elapsed time with the triggering signal of consistent time output triggers by the time of advent of the arithmetical organ computing time of advent in advance, drive and move back and forth platform, therefore can be at the high-precision fine shape of the Surface Machining of machined object.
Promptly, not as in the past, detect positional information with position detector, pulse signal from this position detector is counted, and judge whether count value is consistent with the value of setting, by instrument incision mechanism the approach of cutting element is changed at high speed under the effect of the triggering signal when both are consistent, therefore can be at the high-precision fine shape of the Surface Machining of machined object.
In fine shape cutting apparatus of the present invention, above-mentioned controlling organization carries out following actions: control the driving of above-mentioned X-axis travel mechanism and make above-mentioned workbench and feed motion that above-mentioned cutting element relatively moves towards the 2nd position from the 1st position of X-direction; Control above-mentioned Z axle travel mechanism and make above-mentioned cutting element from above-mentioned the 2nd position on Z-direction and move towards the 3rd position of the direction of keeping out of the way from above-mentioned workbench keep out of the way action; Control the driving of above-mentioned X-axis travel mechanism and make above-mentioned workbench and above-mentioned cutting element from the 3rd position on X-direction and towards the return action that relatively moves with rightabout the 4th position of above-mentioned feed motion; And control above-mentioned Z axle travel mechanism and make that above-mentioned cutting element moves towards above-mentioned the 1st position from above-mentioned the 4th position near action, be preferably in and drive above-mentioned reciprocating motion platform in the above-mentioned feed motion.
According to this structure, workbench and cutting element with from the 1st position to the 2nd position feed motion, then from the 2nd position to the 3rd position keep out of the way action, then from the 3rd position to the 4th position return action, relatively move near the rectangular-shaped track that moves from the 4th position to the 1st position at last.This relatively move from the 1st position to the feed motion of the 2nd position, control moves back and forth the driving of platform, cutting element is advanced and retreat on the surface with respect to machined object with predefined approach, its result, at the high-precision fine shape of the Surface Machining of machined object, therefore also can carry out the control of travel mechanism fairly simplely.
In fine shape cutting apparatus of the present invention, above-mentioned reciprocating motion platform preferably is made of the piezoelectric element duplexer of stacked a plurality of piezoelectric elements.
According to this structure, used on the platform piezoelectric element duplexer of a plurality of piezoelectric elements stacked moving back and forth, therefore can control the approach of cutting element at high speed.Thus, can be in the surperficial high accuracy and the fine shape of high-precision machining accuracy ground processing of machined object.
Fine shape cutting working method of the present invention is to use the fine shape cutting working method of fine shape cutting apparatus at the surface cut processing fine shape of above-mentioned machined object, and described fine shape cutting apparatus possesses: mounting has the workbench and the cutting element of machined object; X-axis travel mechanism and y-axis shift actuation mechanism make above-mentioned workbench and above-mentioned cutting element relatively move towards orthogonal X-axis and Y direction; Z axle travel mechanism has the incision axle that above-mentioned cutting element is advanced and retreat towards the Z-direction vertical with above-mentioned X-axis and Y-axis; Move back and forth platform, be arranged on the above-mentioned incision axle and make and change at high speed towards the approach of the above-mentioned cutting element of above-mentioned Z-direction, this fine shape cutting working method possesses following step: control the driving of above-mentioned each travel mechanism according to the driver of driving of above-mentioned each travel mechanism of control, and when above-mentioned driver begins the step of output time counting sign on; Calculation step calculated from exporting above-mentioned time counting sign on from the processing start position information of at least one side's of above-mentioned X-axis travel mechanism and y-axis shift actuation mechanism relative moving speed information and above-mentioned machined object and to arrive time of advent of the processing starting position of above-mentioned machined object to above-mentioned cutting element the time of advent; The elapsed time determination step, whether instrumentation judges this elapsed time with consistent by the time of advent of the above-mentioned calculation step computing time of advent from the elapsed time that output time counting sign on begins, output triggering signal when both are consistent; And move back and forth the platform actuation step, when the above-mentioned triggering signal of output, above-mentioned reciprocating motion platform is driven so that above-mentioned cutting element is advanced and retreat with predefined approach.
According to this structure, can expect with above-mentioned fine shape cutting apparatus in the identical effect of effect described.
Fine cutting working method of the present invention is to have the reciprocating motion platform that the approach that makes cutting element changes at high speed and make above-mentioned cutting element and relative moving mechanism that machined object relatively moves towards the direction with the incision direction approximate vertical of above-mentioned cutting element, process the fine shape cutting working method of fine shape in the surface cut of above-mentioned machined object, this fine shape cutting working method possesses following step: input step, and input is in the target shape and the feed rate of the Surface Machining of above-mentioned machined object; The frequency analysis step is carried out the frequency analysis according to the target trajectory of the above-mentioned cutting element of being determined by the target shape and the feed rate of above-mentioned input step input; The processing conditions determining step is determined processing conditions from the result who is obtained by the said frequencies analytical procedure; Program makes step, according to making procedure by the determined processing conditions of above-mentioned processing conditions determining step; And procedure of processing, process according to make the procedure that step makes by said procedure.
According to this structure, if the frequency analysis of the target trajectory of the cutting element determined by the target shape and the feed rate of this input, is then carried out in initial input to the target shape and the feed rate of the Surface Machining of machined object.So, obtain the frequency content of the target trajectory of cutting element, so can determine optimal processing conditions from this frequency content.Its result makes procedure according to the processing conditions of determining thus, processes according to this procedure then.
In the present invention, carry out the frequency analysis of the target trajectory of the cutting element determined by target shape and feed rate in advance, therefore the result determines processing conditions such as optimal feed rate by this frequency analysis, can and process fine shape accurately in the surperficial high efficiency of machined object.Promptly, can not determine processing conditions by trial and error method yet, therefore can carry out determining of processing conditions efficiently, and the amplitude of the movement locus of the reality of cutting element can reduce, maybe can reduce phase delay etc., so can process fine shape accurately on the surface of machined object.
In fine shape cutting working method of the present invention, in above-mentioned processing conditions determining step, preferably select to determine the frequency content and the inconsistent feed rate of intrinsic frequency that comprises the device of above-mentioned reciprocating motion platform and above-mentioned relative moving mechanism of the target trajectory that obtains by the said frequencies analytical procedure.
According to this structure, in the processing conditions determining step, therefore the frequency content of the target trajectory that selection is obtained by the frequency analysis step and the inconsistent feed rate of intrinsic frequency that comprises the device that moves back and forth platform and relative moving mechanism can process under the condition that does not produce covibration.
In fine shape cutting working method of the present invention, possess: the transfer function determination step, measure the transfer function of above-mentioned reciprocating motion platform and relative moving mechanism; And simulation steps, the transfer function that use is measured by above-mentioned transfer function determination step, simulate the movement locus of above-mentioned cutting element, in above-mentioned processing conditions determining step, preferably determine processing conditions according to the analog result that obtains by above-mentioned simulation steps with respect to above-mentioned target trajectory.
According to this structure, measure the transfer function that moves back and forth platform and relative moving mechanism, use this transfer function, therefore the simulation cutting instrument can determine the processing conditions that error is few according to this analog result with respect to the movement locus of the target trajectory of being imported by input step.
In fine shape cutting working method of the present invention, the said frequencies analytical procedure is preferably used the frequency analysis of Fourier transform or wavelet transformation.
Fine shape cutting apparatus of the present invention is the approach of cutting element to be changed at high speed and while above-mentioned cutting element and machined object are relatively moved at the fine shape cutting apparatus of the surface cut processing fine shape of above-mentioned machined object towards the direction with the incision direction approximate vertical of above-mentioned cutting element, it is characterized in that, possess: move back and forth platform, the approach of above-mentioned cutting element is changed at high speed; Relative moving mechanism makes above-mentioned cutting element and above-mentioned machined object relatively move towards the direction with the incision direction approximate vertical of above-mentioned cutting element; Input unit, input is to the target shape and the processing conditions of the Surface Machining of above-mentioned machined object; And control device, control above-mentioned reciprocating motion platform and above-mentioned relative moving mechanism, above-mentioned control device possesses: frequency analysis mechanism, carry out the frequency analysis according to the target trajectory of the above-mentioned cutting element of being determined by the target shape and the feed rate of above-mentioned input unit input; Processing conditions is determined mechanism, according to the result who is obtained by said frequencies analysis institution and from determining processing conditions by the information of above-mentioned input unit input; Program makes mechanism, according to being determined that by above-mentioned processing conditions the processing conditions that mechanism determines makes procedure; And machining control mechanism, control above-mentioned reciprocating motion platform and above-mentioned relative moving mechanism according to make the procedure that step makes by said procedure.
According to this structure, identical with above-mentioned fine shape cutting process, can carry out determining of processing conditions efficiently, and, can expect to reduce that amplitude reduces or ground such as phase delay can process the effect of trickle shape accurately.
In fine shape cutting apparatus of the present invention, above-mentioned reciprocating motion platform preferably is made of the piezoelectric element duplexer that is laminated with a plurality of piezoelectric elements.
According to this structure, on the reciprocating motion platform, use the piezoelectric element duplexer that is laminated with a plurality of piezoelectric elements, therefore can control the approach of cutting element at high speed.Thus, can be in the surperficial high accuracy and the fine shape of high-precision machining accuracy ground processing of machined object.
Description of drawings
Fig. 1 is the front view that an embodiment of fine shape cutting apparatus of the present invention is shown.
Fig. 2 is the block diagram that the control system of the 1st embodiment of the present invention is shown.
Fig. 3 illustrates the figure of the motion track of cutting element in embodiments of the present invention.
Fig. 4 illustrates the figure of the relation of cutting element and workpiece in embodiments of the present invention.
Fig. 5 illustrates the figure of the state of cutting element processing work in embodiments of the present invention.
Fig. 6 is the block diagram that the control system of the 2nd embodiment of the present invention is shown.
Fig. 7 is in the 2nd embodiment of the present invention, carries out the trickle flow chart that adds man-hour on workpiece.
Fig. 8 is the figure of the screen example when being illustrated in the 2nd embodiment medium frequency of the present invention and analyzing.
Fig. 9 is the figure that is illustrated in the screen example of the 2nd embodiment medium frequency analysis result of the present invention.
Figure 10 is the figure that is illustrated in the analog result of movement locus in the 2nd embodiment of the present invention.
Figure 11 is illustrated in the example in the past cutting element with respect to the figure of the movement locus of target trajectory.
The specific embodiment
[the 1st embodiment]
Below, the 1st embodiment of the present invention is described with reference to the accompanying drawings.
The explanation of＜Fig. 1 〉
Fig. 1 is the front view that the fine shape cutting apparatus of present embodiment is shown.This fine shape cutting apparatus possesses: pedestal 1; Workbench 2 can be arranged on the upper surface of this pedestal 1 movably along Y direction (direction vertical with the paper of Fig. 1), on upper surface mounting as the workpiece W of machined object; Column 3, the upright both sides that are located at pedestal 1; Cross rail 4 is erected between the upper end of this column 3; Slide block 5 can (left and right directions among Fig. 1) be provided with movably along this cross rail 4 towards X-direction; Incision axle 6 can be arranged on this slide block 5 movably towards Z-direction (above-below direction among Fig. 1); And cutting element 8, be installed in via moving back and forth platform 7 on this incision axle 6.
Between pedestal 1 and workbench 2, be provided with the y-axis shift actuation mechanism 11 that workbench 2 is moved to Y direction.Between cross rail 4 and slide block 5, be provided with and make slide block 5 to X-axis travel mechanism 12 that X-direction moves.Between slide block 5 and incision axle 6, be provided with and comprise incision axle 6 and make this incision spools 6 to Z axle travel mechanism 13 that Z-direction moves.That is, possessing the mounting of making has X-axis travel mechanism 12 and the y-axis shift actuation mechanism 11 that the workbench 2 of workpiece W and cutting element 8 relatively move towards orthogonal X-axis and Y direction and makes the Z axle travel mechanism 13 of cutting element 8 towards the Z-direction advance and retreat vertical with X-axis and Y direction.In addition, these travel mechanisms 11,12,13 are made of ball-screw feed mechanism etc., but are not limited thereto.
Move back and forth platform 7 and be arranged between incision axle 6 and the cutting element 8, so long as can make the approach of cutting element 8, the reciprocating motion platform that promptly changes at high speed towards the advance and retreat amount of Z-direction gets final product.For example, can be that piezoelectric element duplexer by stacked a plurality of piezoelectric elements constitutes.In addition, also can use linear motor or voice coil loudspeaker voice coil to wait constitutes.
The explanation of＜Fig. 2 〉
Fig. 2 shows the control system of fine shape cutting apparatus.In this system, possess control device 21 as the controlling organization of control X-axis travel mechanism 12, y-axis shift actuation mechanism 11, Z axle travel mechanism 13 etc., time of advent arithmetical organ 22, elapsed time decision mechanism 23, and move back and forth platform driving mechanism 24.
The driver of the driving of control device 21 storage control X-axis travel mechanisms 12, y-axis shift actuation mechanism 11, Z axle travel mechanism 13, control the driving of X-axis travel mechanism 12, y-axis shift actuation mechanism 11, Z axle travel mechanism 13 according to this driver, and according to this driver output time counting sign on (for example, M80 coding) when driver begins.
Elapsed time, decision mechanism 23 had counter, the elapsed time T2 that begins from the output time counting sign on of control device 21 with this counter instrumentation.And, whether judge this elapsed time T2 with consistent, output triggering signal when both are consistent by the T1 time of advent of the arithmetical organ 22 computings time of advent.
Move back and forth platform driving mechanism 24 and receive, make to move back and forth platform 7 and drive so that cutting element 8 is advanced and retreat with predefined approach from elapsed time decision mechanism's triggering signal of 23.Particularly, storage is used for the driving data of reciprocating motion platform 7 of the Surface Machining shape of processing work W, is receiving from elapsed time during decision mechanism's triggering signal of 23, and the driving data of storage is transformed to aanalogvoltage and moves back and forth platform 7.
The explanation of＜Fig. 3 〉
Fig. 3 shows by the cutting element 8 of control device 21 controls and the track that relatively moves of workpiece W.
If, then control the driving of X-axis travel mechanism 12, y-axis shift actuation mechanism 11 and Z axle travel mechanism 13, and output time is counted sign on when driver begins according to this driver by control device 21 beginning drivers.
At first, by the driving of X-axis travel mechanism 12 control, cutting element 8 relatively move from the 1st position P1 of X-direction towards the 2nd position P2 (feed motion).Then, by the driving of Z axle travel mechanism 13 control, cutting element 8 moves (keeping out of the way action) from the 2nd position P2 on Z-direction and towards the 3rd position P3 of the direction of keeping out of the way from workbench 2.Then, by the driving of X-axis travel mechanism 12 control, cutting element 8 from the 3rd position P3 on X-direction and towards moving (return action) with rightabout the 4th position P4 of feed motion.At last, by the driving control of Z axle travel mechanism 13, cutting element 8 moves (near action) from the 4th position P4 towards the 1st position P1.That is, cutting element 8 moves back and forth with respect to workpiece W.
And, when this driver begins, promptly when feed motion begins, from control device 21 output times counting sign on.
The explanation of＜Fig. 4 and Fig. 5 〉
Fig. 4 and Fig. 5 show by behind the control device 21 beginning drivers, and 8 couples of workpiece W of cutting element carry out the process of machining.
At first, before the beginning by the driver of control device 21, in time of advent arithmetical organ 22, calculate the T1 time of advent that begins to arrive the processing starting position of workpiece W from control device 21 output times counting sign on from the relative moving speed information of X-axis travel mechanism 12 and the processing start position information of workpiece W etc. to cutting element 8.Promptly, as shown in Figure 4, the position of the cutting element 8 according to from control device 21 output times countings sign on the time calculates the T1 time of advent that begins to arrive to cutting element 8 the processing starting position of workpiece W from control device 21 output times counting sign on to the distance of the X-direction of the processing starting position of workpiece W, feed rate, acceleration information etc.
If by control device 21 beginning drivers, then in elapsed time decision mechanism 23, instrumentation arrives the processing starting position of workpiece W from control device 21 output times counting sign on to cutting element 8 elapsed time T2 judges that whether this elapsed time T2 is with consistent by the T1 time of advent of the arithmetical organ 22 computings time of advent.By the elapsed time T2 of elapsed time decision mechanism's 23 instrumentations with by reach 22 computings of temporal calculation mechanism the time of advent, T1 was consistent the time, the output triggering signal.
Move back and forth platform driving mechanism 24 and receive, make to move back and forth platform 7 and drive so that cutting element 8 is advanced and retreat with predefined approach from elapsed time decision mechanism's triggering signal of 23.For example, as shown in Figure 5, in each fixing cycle, after becoming greatly gradually, diminish, be maintained afterwards the approach that fixing mode is controlled cutting element 8.Thus, on the surface of workpiece W with the constant spacing recess 31 of working depth h at interval.That is the fine concaveconvex shape of processing on the surface of workpiece W.
Like this, after the surface of workpiece W has processed fine concaveconvex shape along X-direction, make y-axis shift actuation mechanism 11 move constant spacing and locate, in this position, if repeat above-mentioned action, then can the surface of workpiece W comprehensively on the fine concaveconvex shape of processing.
The effect of＜the 1 embodiment 〉
According to the present invention, can access following effect.
(1) in the present embodiment, the elapsed time T2 that output time counting sign on began when the instrumentation slave driver began, this elapsed time T2 with by the arithmetical organ 22 computings time of advent the time of advent, T1 was consistent the time export triggering signal, drive reciprocating motion platform 7 as triggering with this triggering signal, therefore can be at the high-precision fine shape of the Surface Machining of workpiece W.
Promptly, not as in the past, detect positional information with position detector, pulse signal from this position detector is counted, judge whether count value is consistent with the value of setting, by instrument incision mechanism the approach of cutting element is changed at high speed under the effect of the triggering signal when both are consistent, therefore can be at the high-precision fine shape of the Surface Machining of machined object.For example, can on the surface of workpiece, process the micro-lens forming that is spaced fine dome shape recess with constant spacing with mould etc.
(2) in the present embodiment, cutting element 8 from the 1st position P1 to the 2nd position P2 feed motion, then from the 2nd position P2 to the 3rd position P3 keep out of the way action, then from the 3rd position P3 to the 4th position P4 return action, at last from the 4th position P4 to the 1st position P1 near moving.In this rectangular-shaped action that relatively moves, from the 1st position P1 to the feed motion of the 2nd position P2, control moves back and forth the driving of platform 7, cutting element 8 is with the surface advance and retreat of predefined approach with respect to workpiece W, its result, at the high-precision fine shape of the Surface Machining of workpiece W, therefore also can carry out the control of travel mechanism fairly simplely.
(3) in the present embodiment, used on the platform 7 the piezoelectric element duplexer of a plurality of piezoelectric elements stacked moving back and forth, therefore can control the approach of cutting element 8 at high speed.Thus, can be in the surperficial high accuracy and the fine shape of high finished product accuracy ground processing of machined object.
[the 2nd embodiment]
Below, the 2nd embodiment of the present invention is described with reference to the accompanying drawings.
In the present embodiment, for above-mentioned the 1st embodiment, on the control system of trickle shape cutting apparatus possesses input unit 25 and display unit 26 these aspects, and utilize on this aspect of data that input unit 25 imports with control device 21 places be different.
In addition, in the present embodiment, about with above-mentioned the 1st embodiment identical construction and same parts, omit its detailed explanation or its explanation simplified.
The explanation of＜Fig. 6 〉
Fig. 6 shows the control system of trickle shape cutting apparatus.In this system, possess control X-axis travel mechanism 12, y-axis shift actuation mechanism 11, Z axle travel mechanism 13 etc. control device 21, time of advent arithmetical organ 22, elapsed time decision mechanism 23, move back and forth platform driving mechanism 24, input unit 25, and display unit 26.
From input unit 25 input at the target shape of the Surface Machining of workpiece W or processing conditions etc.
In display unit 26,, go back display frequency analysis result or analog result etc. except by the various data of input unit 25 input or condition etc.
Particularly, control device 21 possesses: the 21A of frequency analysis portion, as carrying out according to frequency analysis mechanism by the frequency analysis of the target trajectory of the definite cutting element 8 of the target shape of input unit 25 input and feed rate (feed rate of travel mechanism 11 or travel mechanism 12); Processing conditions determination portion 21B is as determining mechanism according to the result who is obtained by the 21A of frequency analysis portion from determined the processing conditions of processing conditions by the information of input unit 25 inputs; Program makes the 21C of portion, makes mechanism as the program that makes procedure according to the processing conditions of being determined by processing conditions determination portion 21B; And the 21D of machining control portion, as moving back and forth the machining control mechanism of platform 7 and each travel mechanism 11,12,13 according to make procedure control that the 21C of portion makes by program.
The explanation of＜Fig. 7～Figure 10 〉
Flow chart when Fig. 7 shows on workpiece W machining microfabrication.
At first, in ST1 (input step), target shape and feed rate that input is processed on the surface of workpiece W.
In ST2, wave analysis, the definite processing of processing conditions are carried out in the target shape of importing and the affirmation of feed rate afterwards.Particularly, after the affirmation of having carried out target shape and feed rate, (1) at first carries out the frequency analysis (frequency analysis step) of the target trajectory of definite thus cutting element 8.Here, used the frequency analysis of Fourier transform or wavelet transformation.For example, in screen shown in Figure 8 (screen of display unit 26), when specifying FFT (high speed Fourier transform) to analyze, as shown in Figure 9, the target trajectory of the cutting element 8 that will determine from target shape and feed rate carries out fft analysis, shows the frequency content of the target trajectory of cutting element 8.
Thus, determine processing conditions (processing conditions determining step) from the analysis result that obtains by this frequency analysis.For example, in Fig. 9, select to determine the frequency content of the target trajectory that obtains by frequency analysis,, can avoid covibration thus with the inconsistent feed rate of intrinsic frequency that moves back and forth platform 7 and travel mechanism 11～13.
Then, (2) carry out the output simulation based on transfer function.For example, measure the transfer function (transfer function step) that moves back and forth platform 7 and travel mechanism 11～13, simulation cutting instrument 8 then can be realized the processing that error is few for the movement locus (simulation steps) of the target trajectory of cutting element 8 if use the transfer function of this mensuration.
At this moment, in the processing conditions determining step, can determine target shape or processing conditions (feed rate) according to the analog result that obtains by simulation steps.For example, as shown in figure 10, to the radio-frequency component of the degree of depth 2 μ m when inconsistent etc., can judge B partly to be set at the side-play amount of incision axle 6 and actual processing part only is the A part.
In ST3, the running of the platform 7 that moves back and forth is prepared, and makes procedure (program makes step) and send procedure according to the processing conditions of being determined by ST2.
In ST4, process (step is carried out in processing) according to the procedure that makes.
The effect of＜the 2 embodiment 〉
According to present embodiment, except the effect (1) of above-mentioned the 1st embodiment to (3), can access following effect.
(4) in the present embodiment, carry out the frequency analysis of the target trajectory of cutting element 8 in advance,, therefore can process fine shape accurately on the surface of workpiece W by the processing conditions that this frequency analysis result determines optimal feed rate etc.That is, the amplitude of movement locus that can reduce the reality of cutting element 8 reduces or phase delay etc., therefore, can process fine shape accurately on the surface of workpiece W.
(5) in the present embodiment, in the processing conditions determining step, therefore the frequency content of the target trajectory that selection is obtained by frequency analysis and the inconsistent feed rate of intrinsic frequency that comprises the device that moves back and forth platform 7 and each travel mechanism 11～13 can process under the condition that does not produce covibration.
(6) in the present embodiment, measure the transfer function (transfer function step) that moves back and forth platform 7 grades, use the transfer function of this mensuration and simulate, therefore can realize the processing that error is few according to the movement locus (simulation steps) of the cutting element of determining by the target shape and the feed rate of input unit 25 input 8 with respect to the cutting element 8 of the target trajectory of cutting element 8.
At this moment, in the processing conditions determining step, can determine processing conditions according to the analog result that obtains by simulation steps.
＜variation 〉
The present invention is not limited to above-mentioned embodiment, and the distortion in the scope that can realize purpose of the present invention, improvement etc. are also contained among the present invention.
In the above-described embodiment, workbench 2 is constituted and can move towards Y direction, and cutting element 8 is constituted and can move towards X-direction, but also can be structure rightabout with it.That is, also workbench 2 can be constituted and can move towards X-direction, and cutting element 8 is constituted and can move towards Y direction.Perhaps, also any one party of workbench 2 and cutting element 8 can be constituted to move towards X-direction and Y direction.
In the above-described embodiment, by X-axis travel mechanism 12 cutting element 8 is moved towards X-direction, drive simultaneously and move back and forth the approach that platform 7 is controlled cutting element 8, but also can cutting element 8 be moved towards Y direction, drive simultaneously and move back and forth the approach that platform 7 is controlled cutting element 8 by y-axis shift actuation mechanism 11.
Perhaps, also can cutting element 8 side by side be moved towards X-axis 2 directions and Y direction, drive simultaneously and move back and forth the approach that platform 7 is controlled cutting element 8 by X-axis travel mechanism 12 and y-axis shift actuation mechanism 11.
In the above-described embodiment, illustrated on the surface of workpiece W with the processing method of fixed intervals recesses machined 31, but be not limited thereto.For example, also go in the surface imperfection ground recesses machined of workpiece W or the situation of groove.
Claims (10)
1. a fine shape cutting apparatus possesses: the workbench of mounting machined object and cutting element; X-axis travel mechanism and y-axis shift actuation mechanism make above-mentioned workbench and above-mentioned cutting element relatively move towards orthogonal X-direction and Y direction; Z axle travel mechanism has the incision axle that above-mentioned cutting element is advanced and retreat towards the Z-direction vertical with above-mentioned X-axis and Y direction; Move back and forth platform, be arranged on the above-mentioned incision axle and make and change at high speed towards the approach of the above-mentioned cutting element of above-mentioned Z-direction,
It is characterized in that possessing:
Controlling organization, the driver of the driving of above-mentioned each travel mechanism of storage control is controlled the driving of above-mentioned each travel mechanism according to this driver, and when above-mentioned driver begins output time counting sign on;
The time of advent arithmetical organ, according at least one side's of above-mentioned X-axis travel mechanism and y-axis shift actuation mechanism the relative moving speed information and the processing start position information of above-mentioned machined object, calculate from exporting the time of advent above-mentioned time counting sign on arrives the processing starting position of above-mentioned machined object to above-mentioned cutting element till;
Elapsed time decision mechanism, whether instrumentation judges this elapsed time with consistent by the time of advent of the above-mentioned arithmetical organ computing time of advent from the elapsed time of above-mentioned controlling organization output time counting sign on, output triggering signal when both are consistent;
Move back and forth the platform driving mechanism, receive triggering signal, drive above-mentioned reciprocating motion platform so that above-mentioned cutting element is advanced and retreat with predefined approach from above-mentioned elapsed time decision mechanism.
2. fine shape cutting apparatus as claimed in claim 1 is characterized in that,
Above-mentioned controlling organization carries out following actions: control the driving of above-mentioned X-axis travel mechanism and make above-mentioned workbench and feed motion that above-mentioned cutting element relatively moves towards the 2nd position from the 1st position of X-direction; Control above-mentioned Z axle travel mechanism and make above-mentioned cutting element from above-mentioned the 2nd position on Z-direction and move towards the 3rd position of the direction of keeping out of the way from above-mentioned workbench keep out of the way action; Control the driving of above-mentioned X-axis travel mechanism and make above-mentioned workbench and above-mentioned cutting element from the 3rd position on X-direction and towards the return action that relatively moves with rightabout the 4th position of above-mentioned feed motion; And control above-mentioned Z axle travel mechanism and make that above-mentioned cutting element moves towards above-mentioned the 1st position from above-mentioned the 4th position near action,
In above-mentioned feed motion, drive above-mentioned reciprocating motion platform.
3. fine shape cutting apparatus as claimed in claim 1 or 2 is characterized in that,
Above-mentioned reciprocating motion platform is made of the piezoelectric element duplexer that is laminated with a plurality of piezoelectric elements.
4. a fine shape cutting working method uses the fine shape cutting apparatus to cut out fine shape on the surface of above-mentioned machined object, and described fine shape cutting apparatus possesses: the workbench of mounting machined object and cutting element; X-axis travel mechanism and y-axis shift actuation mechanism make above-mentioned workbench and above-mentioned cutting element relatively move towards orthogonal X-direction and Y direction; Z axle travel mechanism has the incision axle that above-mentioned cutting element is advanced and retreat towards the Z-direction vertical with above-mentioned X-axis and Y direction; Move back and forth platform, be arranged on the above-mentioned incision axle and make and change at high speed towards the approach of the above-mentioned cutting element of above-mentioned Z-direction,
It is characterized in that possessing following step:
Control the driving of above-mentioned each travel mechanism according to the driver of driving of above-mentioned each travel mechanism of control, and when above-mentioned driver begins the step of output time counting sign on;
The time of advent calculation step, according at least one side's of above-mentioned X-axis travel mechanism and y-axis shift actuation mechanism the relative moving speed information and the processing start position information of above-mentioned machined object, calculate from exporting the time of advent above-mentioned time counting sign on arrives the processing starting position of above-mentioned machined object to above-mentioned cutting element till;
The elapsed time determination step, instrumentation is counted the elapsed time of sign on from output time, and whether judges this elapsed time with consistent by the time of advent of the above-mentioned calculation step computing time of advent, output triggering signal when both are consistent;
Move back and forth the platform actuation step, when the above-mentioned triggering signal of output, drive above-mentioned reciprocating motion platform so that above-mentioned cutting element is advanced and retreat with predefined approach.
5. fine shape cutting working method, have the reciprocating motion platform that the approach that makes cutting element changes at high speed and make above-mentioned cutting element and relative moving mechanism that machined object relatively moves towards the direction with the incision direction approximate vertical of above-mentioned cutting element, on the surface of above-mentioned machined object, cut out fine shape
It is characterized in that possessing following step:
Input step, target shape and feed rate that input is processed to the surface of above-mentioned machined object;
The frequency analysis step is carried out the frequency analysis according to the target trajectory of the above-mentioned cutting element of being determined by the target shape and the feed rate of above-mentioned input step input;
The processing conditions determining step is determined processing conditions from the result who is obtained by the said frequencies analytical procedure;
Program makes step, makes procedure according to the processing conditions of being determined by above-mentioned processing conditions determining step;
Procedure of processing is processed according to made the procedure that step makes by said procedure.
6. fine shape cutting working method as claimed in claim 5 is characterized in that,
In above-mentioned processing conditions determining step, select and the frequency content and the inconsistent feed rate of intrinsic frequency that comprises the device of above-mentioned reciprocating motion platform and above-mentioned relative moving mechanism of the target trajectory determining to obtain by the said frequencies analytical procedure.
7. fine shape cutting working method as claimed in claim 5 is characterized in that possessing:
The transfer function determination step is measured the transfer function of above-mentioned reciprocating motion platform and relative moving mechanism;
Simulation steps is used the transfer function of being measured by above-mentioned transfer function determination step, above-mentioned cutting element simulated with respect to the movement locus of above-mentioned target trajectory,
In above-mentioned processing conditions determining step, determine processing conditions according to the analog result that obtains by above-mentioned simulation steps.
8. as any described fine shape cutting working method in claim 5～claim 7, it is characterized in that,
The said frequencies analytical procedure is to use the frequency analysis of Fourier transform or wavelet transformation.
9. fine shape cutting apparatus, the approach of cutting element is changed at high speed, and, above-mentioned cutting element and machined object on the surface of above-mentioned machined object, cut out fine shape while being relatively moved towards the direction with the incision direction approximate vertical of above-mentioned cutting element
It is characterized in that possessing:
Move back and forth platform, the approach of above-mentioned cutting element is changed at high speed;
Relative moving mechanism makes above-mentioned cutting element and above-mentioned machined object relatively move towards the direction with the incision direction approximate vertical of above-mentioned cutting element;
Input unit, target shape and processing conditions that input is processed to the surface of above-mentioned machined object;
Control device is controlled above-mentioned reciprocating motion platform and above-mentioned relative moving mechanism,
Above-mentioned control device possesses: frequency analysis mechanism, carry out the frequency analysis according to the target trajectory of the above-mentioned cutting element of being determined by the target shape and the feed rate of above-mentioned input unit input; Processing conditions is determined mechanism, determines processing conditions according to the result who is obtained by said frequencies analysis institution from the information of being imported by above-mentioned input unit; Program makes mechanism, according to being determined that by above-mentioned processing conditions the processing conditions that mechanism determines makes procedure; And machining control mechanism, control above-mentioned reciprocating motion platform and above-mentioned relative moving mechanism according to make the procedure that step makes by said procedure.
10. fine shape cutting apparatus as claimed in claim 9 is characterized in that, above-mentioned reciprocating motion platform is made of the piezoelectric element duplexer that is laminated with a plurality of piezoelectric elements.
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| JP2007188024A JP5100230B2 (en) | 2007-07-19 | 2007-07-19 | Fine shape cutting apparatus and fine shape cutting method. |
| JP2008-135404 | 2008-05-23 | ||
| JP2008135404A JP5255905B2 (en) | 2008-05-23 | 2008-05-23 | Fine shape cutting method and fine shape cutting apparatus |
| JP2008135404 | 2008-05-23 |
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| CN102205610A (en) * | 2010-03-12 | 2011-10-05 | 东芝机械株式会社 | Reciprocating apparatus, method of controlling reciprocating apparatus, and injection molding apparatus |
| CN102834231A (en) * | 2010-01-26 | 2012-12-19 | 朴荣根 | Groove processing apparatus |
| CN104400837A (en) * | 2014-10-31 | 2015-03-11 | 合肥鼎雅家具有限责任公司 | Material fixing platform of material digging saw |
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| JP4554701B2 (en) * | 2008-11-06 | 2010-09-29 | ファナック株式会社 | Straight groove processing method and straight groove processing apparatus |
| KR101194204B1 (en) * | 2010-03-25 | 2012-10-29 | 화낙 코퍼레이션 | Method and apparatus for machining linear groove |
| TWI380888B (en) * | 2010-03-30 | 2013-01-01 | Fanuc Ltd | Straight groove processing method and straight groove processing device |
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| JPH1120045A (en) * | 1997-06-30 | 1999-01-26 | Mitsubishi Heavy Ind Ltd | Method and device for working fluted paper laminate |
| JPH11305819A (en) * | 1998-04-27 | 1999-11-05 | Hitachi Via Mechanics Ltd | Driller |
| JP2003311527A (en) * | 2002-04-25 | 2003-11-05 | Hitachi Ltd | Method and apparatus for producing undulation by cutting |
| JP4363912B2 (en) * | 2003-06-17 | 2009-11-11 | 株式会社岡本工作機械製作所 | Work grooving method and cutting apparatus |
| CN1597215A (en) * | 2004-08-16 | 2005-03-23 | 吉林大学 | Method of processing revolving surface on wire-cutting lathe |
| JP2006123085A (en) * | 2004-10-28 | 2006-05-18 | National Institute Of Advanced Industrial & Technology | Fine surface shape cutting work device and fine cutting work method |
| CN2925718Y (en) * | 2006-07-06 | 2007-07-25 | 上海交通大学 | Multifunctional fine electric machine tool |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102834231A (en) * | 2010-01-26 | 2012-12-19 | 朴荣根 | Groove processing apparatus |
| CN102205610A (en) * | 2010-03-12 | 2011-10-05 | 东芝机械株式会社 | Reciprocating apparatus, method of controlling reciprocating apparatus, and injection molding apparatus |
| CN102205610B (en) * | 2010-03-12 | 2014-10-15 | 东芝机械株式会社 | Reciprocating apparatus, method of controlling reciprocating apparatus, and injection molding apparatus |
| US8936739B2 (en) | 2010-03-12 | 2015-01-20 | Toshiba Kikai Kabushiki Kaisha | Reciprocating apparatus, method of controlling reciprocating apparatus, and injection molding apparatus |
| CN104400837A (en) * | 2014-10-31 | 2015-03-11 | 合肥鼎雅家具有限责任公司 | Material fixing platform of material digging saw |
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