CN101339816B - Two-dimensional micro-motion platform for atomic force microscope and micro-mechanical parameter test method - Google Patents
Two-dimensional micro-motion platform for atomic force microscope and micro-mechanical parameter test method Download PDFInfo
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- CN101339816B CN101339816B CN200810041517XA CN200810041517A CN101339816B CN 101339816 B CN101339816 B CN 101339816B CN 200810041517X A CN200810041517X A CN 200810041517XA CN 200810041517 A CN200810041517 A CN 200810041517A CN 101339816 B CN101339816 B CN 101339816B
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Abstract
The invention relates to a 2D micro-positioning platform for an atomic force microscope and a measuring method of mechanical parameters. The 2D micro-positioning platform is characterized in that the center of the 2D micro-positioning platform is provided with a hole for equipping a PZT scanning tube, wherein an X position and a Y position perpendicular to each other are provided with two adjusting knobs respectively, the two adjusting knobs are connected with two drive rods which are connected with the PZT scanning tube, and the 2D micro-positioning platform is fixed on a base. The moving range of the 2D micro-positioning platform of the invention is 3*3 square mm in the horizontal direction; and the maximum scanning shift of the PZT scanning tube is 20Mum. By utilizing an AFM microscope with the improved 2D micro-positioning platform, the mechanical parameters of a fixed point on a microstructure can be tested, the mechanical-displacement function test of micro point-to-point and the continuous elastic coefficient test in a micro area can be carried out, and all the tests produce good consistency results.
Description
Technical field
The present invention relates to a kind of two-dimensional micromotion stage of atomic force microscope and method of testing of micro mechanics parameter of being used for, detect and analyze the mechanics parameter of the microstructure of little processing and manufacturing, belong to micro mechanics test analysis field.
Background technology
The various micro devices of MEMS (micro electro mechanical system) (MEMS) processing and manufacturing all are made up of basic structural units such as micro-cantilever, films, and the vibration that these micro-structure unit can the perception external world, heat etc. also pass its signal with electricity or other form.Vibration and external influence such as heat will cause the deformation of microstructure, and the size of deformation quantity has determined parameters such as the sensitivity of device and range.Therefore, in order to obtain to reach the parameter that design needs, the processing and manufacturing CONTROL PROCESS is most important.Simultaneously, indispensable especially to the detection of microstructure especially micro-cantilever beam elasticity coefficient, this directly for the design and processing very data necessary is provided.Generally speaking, to hundreds of micron length, the microstructure of preparation has Three Dimensions Structure to the size of structural units such as micro-cantilever from nanometer.It is an important research contents that microstructure is carried out basic mechanical quantity detection, comprises as static state and dynamic characteristic parameters such as elasticity coefficient, resonant frequency, Young modulus, fatigue properties.The mechanical property of microstructure has become the core content that people pay close attention to the most on the micro-nano system practicability road.At present more existing equipment and instruments can be used for characterizing the mechanical characteristic of microstructure, in various microanalysis test macros, as utilize equipment such as atomic force microscope, nano-hardness tester, optical interdferometer to be applied in the mechanical property testing of microstructure, often need equipment can give the cashier ox precision that nanoscale is differentiated.In nano-hardness tester, equipment can accurately provide the power from little newton to milli newton and the displacement of nano-resolution, but receiving Niu Zaihe (nN) not high [the Holbery J D and Eden V L of precision down, Acomparison of scanning microscopy cantilever force constants determined using ananoindentation testing apparatus.Journal of Micromechanics andMicroenginering.2000,10:85-92.].Common optical detecting method bigger visual field is arranged but can only carry out static test and can not initiatively apply power load [O ' Mahony C, Hill M, Brunet M, DuaneR and Mathewson A 2003 Characterization of micromechanical structures usingwhite-light interferometry Meas, Sci.Technol.14 1807-14].Based on the method for testing of atomic force microscope (AFM), can give cashier newton the precision that nanoscale is differentiated at present.Utilize parameters such as its displacement that can accurately provide and resonant frequency, and utilize known cantilever beam structure parameter etc., just can obtain the isostructural elasticity coefficient of semi-girder [Comella B T, Scanlon M R, The determination ofthe elastic modulus of microcantilever beams using atomic force microscopy, Journal of Materials Science, 2000,35:567-572].
Atomic force microscope is present comparatively widely used a kind of checkout equipment that is used for the surface structure parameter, has very high horizontal and vertical displacement resolution, and longitudinal frame can reach 0.01nm; Driving mechanism piezoelectric ceramics PZT (PbZrTiO by Z axle vertical direction
3, lead zirconate-titanate ceramic) and scanatron can impose on the small power load of scan-probe.When tested microstructure is placed on the platform, place scan-probe following time, the elastic deformation measurement corresponding mechanics amount that just can contact with microstructure by probe wherein.Atomic force microscope is the instrument that has higher force and displacement resolution in the micro-nano-scale scientific research, the scientific research personnel is using some function wherein to be used for testing always, but can not directly characterize effectively and analysis-by-synthesis, can not extract mechanics parameter automatically.Therefore, need special-purpose testing apparatus and corresponding special test analysis software control system.
At present, based on the mechanical test platform of the micro-nano-scale under the atomic force microscope with to be used for the software system of in-situ extraction mechanics parameter accordingly but be a blank all the time, research and development becomes the trend of development based on the mechanics dependence test system of atomic force microscope.A main problem be the afm scan area usually only at the yardstick of several square microns, as the atomic force microscope of DI company, the scan area of its scanatron PZT is about 5 * 5 square microns, observed surface is two dimension normally.And micro structural component generally all tens, hundreds of even several thousand microns, in a single day sample places on the test platform, just can only adopt the manual mode mobile example, and sample is navigated under the microprobe, this has greatly limited its application on the microstructure mechanical test.NSK Seiko II, SPA 400 type systems have the micromotion platform structure, can between millimeter and centimeter scale, move, it is characterized in that mobile platform places on the probe, exactly when micromotion platform moves, probe moves thereupon together, bigger mobile space scope can be arranged like this, convenient and practical, but its corresponding system only contains conventional sweep test and surface analysis, does not have the automatic abstraction function of corresponding mechanics test analysis and data.Therefore, the present invention attempts to develop a kind of mobile platform and micro mechanics method of testing of the microstructure test usefulness based on atomic force microscope, enables to finish the resolving accuracy that has higher micro-nano-scale than the measurement of large scale simultaneously again.
Summary of the invention
The object of the invention is to provide a kind of two-dimensional micromotion stage and micro mechanics method of testing based on atomic force microscope, and emphasis of the present invention has carried out adapting to the exploitation and relevant mechanical measuring and calculation method based on the platform testing system of atomic force microscope of micro-nano structure test.The present invention is intended to develop the mechanical test micromotion platform that is used for micro-nano structure on the basis of atomic force microscope of the AJ-III model that Shanghai AJ Nano-Science Development Co., Ltd. produces, wherein, this equipment did not possess the horizontally moving functions on large-size millimeter magnitude originally.Therefore,, make it to have bigger transversal displacement, guarantee micro-nano structure device convenient moving and test under atomic force microscope so the present invention has designed two-dimensional micromotion stage (among Fig. 1 2) on hardware.Fig. 2 is two-dimensional micromotion stage and scanatron PZT linked system structural representation.So just can adjust the pinpoint demand of microstructure sample under probe on the micromotion platform easily, and the probe maintenance is motionless.The method of testing of setting up based on test functions such as force-displacement curve main in the atomic force microscope, be used for directly carrying out the mechanical meaurement and the assessment of microstructure, micro element, directly extract the mechanical quantity of microstructure, at structures such as semi-girders, obtain mechanics parameters such as elasticity coefficient, Young modulus, stress.Can make things convenient for, automatically, effectively carry out the test analysis and the Parameter Extraction of the mechanical characteristic of microstructure like this, measurement that the mechanics parameter that can implement point of fixity extracts, the multiple spot microcell is differentiated and the elasticity coefficient under the single line continuous sweep such as obtain at test function.Test has consistance and usability preferably, can carry out the extraction of mechanical quantity easily.The microcell mechanical characteristic of developing and the algorithm of parameter extraction have cured in former test macro, realize the microcell mechanical characteristic Accurate Analysis under little power micrometric displacement, and realize using on the MEMS processing platform.
Original equipment comprises the visual CCD of base (coupled charge device, charge-coupled image sensor) system, PZT scanatron and corresponding optical detection system.Scanatron PZT can carry out micro-nano size and move on X, Y, three directions of Z under driven, the maximum scan displacement of PZT scanatron is 5 microns, because of original scanatron PZT is fixed on the base, base can not move in the horizontal direction, therefore, the original PZT scanatron system very small size that can only move, observe and scan.Comprise automatic motor screw rod pickup groove (among Fig. 2 4) on the base, manual inserting needle screw rod pickup groove (among Fig. 2 3), the socle beam probe that scanning detects usefulness is installed in the probe anchor clamps, and laser radiation reflects into into the optics detecting device to semi-girder.The little mobile platform of two dimension provided by the invention is by steel preparations, and the perforate at center is used for installing PZT scanatron (among Fig. 2 7); Wherein on mutually perpendicular horizontal X and Y position, the adjusting knob (among Fig. 15,6) of two X, Y direction is arranged, two knobs connect two driving stems (outside is invisible), and two driving stems are fixedlyed connected with the PZT scanatron.When rotation X, Y adjusting knob, knob drives connecting link driven sweep pipe and just can move in the horizontal direction.The part-structure device of bulk of optical feedback principle and little power test philosophy as schematically shown in Figure 3.
Two-dimentional little mobile platform after making is debugged, and its moving range in the horizontal direction can reach 3 * 3 square millimeters, and this has satisfied the test of general micro element physical dimension.With having carried out the standard scan test on the two-dimensional micromotion stage that is installed in the AFM system, comprise detection to grating and dna molecular, be used for investigating resolution, drift etc.The resolution of system hardware can be achieved by raster or screen dna sample, and this system can repeatedly repeat to obtain the image of DNA, and resolution has reached the requirement of former AFM test; The stability of system can be in 40 minutes at sweep interval by the drift degree of long-time scanning samples surface fixed character dot image, and unique point is about 0.5 micron of directions X drift, and the Y direction is drifted about less than 0.1 micron, and this shows that system is very stable.The introducing of test shows mobile platform does not cause the instability of system.The micromotion platform system of processing and fabricating has antihunt action preferably, and system has stability and repeated preferably by test.Just system is after installing the two-dimentional little mobile platform of configuration, and the performance of AFM system is not affected.
In test, on the basis based on original operating system platform, designed the mechanical property testing control program, can the in-situ extraction mechanics parameter.The mechanical test function that mainly comprises following several aspects: the mechanics parameter of point of fixity test on the microstructure; In the microcell one by one the follow-on test analysis and microcell in the continuous mechanical test etc. of each point, realize elastic constant k, the isoparametric extraction of Young modulus E.The general data that relates to comprises: with reference to the elasticity coefficient of semi-girder, and the length and width of tested cantilever, thick size and on semi-girder, select the location parameter of length.With reference to the force curve slope of semi-girder point of fixity, microcell pointwise in hard substrate, and in the microcell continuity point scanning down constant force and sweep length (X, Y), Z direction deformation data; With reference to semi-girder on tested semi-girder point of fixity and microcell in the force curve slope of pointwise, and the constant force of continuity point and sweep length in the microcell (X, Y), semi-girder is in the deformation data of Z direction.Obtain the Young modulus of tested semi-girder point of fixity thus, pointwise elasticity coefficient in the microcell, data such as the elasticity coefficient of continuity point and deformation quantity in the microcell.
The main mechanical measuring and calculation method of system is summarized as follows: based in the atomic force microscope to the power-displacement control function of scanatron PZT and semi-girder, utilize the known reference semi-girder of elasticity coefficient that tested semi-girder is applied power load and carry out the engaged test that semi-girder is pressed semi-girder, obtain the mechanics parameter of unknown semi-girder from data such as the deformation quantity of semi-girder and applied force load.Test divides two steps to finish, and is k with elasticity coefficient at first
RefKnown reference semi-girder and a smooth skin hardness or the very big sample surfaces of elasticity coefficient contact (, being referred to as hard substrate) as smooth silicon face, obtain its total deformation quantity δ
Tot, will be in contact with one another the deformation quantity δ of acquisition on unknown semi-girder with reference to the semi-girder (being equivalent to soft structure) of semi-girder and unknown elasticity coefficient k then
TestData; Consider that semi-girder is placed with certain tilt angle theta in the atomic force microscope, θ is two angles between the semi-girder, as Fig. 3 (a) (b) shown in, wherein, (a) be semi-girder test process in hard substrate, (b) be the test process of a semi-girder on the another one semi-girder, the PSD among the figure is the four-quadrant position sensitive detectors.The elasticity coefficient that can obtain unknown semi-girder through suitable derivation is:
In the following formula, k is the elasticity coefficient of unknown semi-girder to be measured, k
RefBe the elasticity coefficient of known semi-girder, δ
TotBe total deformation quantity with reference to semi-girder, δ
TestBe the deformation quantity on tested semi-girder, for thickness t, width w, the semi-girder of length L, the pass of the elasticity coefficient of its normal orientation, structural parameters and Young modulus E is:
Under common situation, (difference power Δ F is the size that applies power when applying power load Δ F on semi-girder, be the poor of two different power), deformation Δ Z will take place in normal direction Z direction in semi-girder, Δ Z can be referred to as the difference displacement, with the difference of position on semi-girder, when applying same load, Δ Z difference.In elastic range, elasticity coefficient is expressed as:
Concrete implementation step:
Original AJ-III type test macro does not have horizontally moving functions, according to the structure of existing AJ-III type, adopts scanatron is installed in scheme on the mobile platform, and this once upgrades the original equipment system.By mobile platform motion scan pipe, reach the purpose of sample on accurate motion scan pipe on the XY plane.The structural drawing of the XY plane micromotion platform of design as shown in Figure 1.Mainly comprise the two-dimensional micromotion stage 2 that is fixed on the base, and two screw rods that vertically are used for connecting and driving two-dimensional micromotion stage mutually, two screw rods are regulated spiral shell buttons control (among Fig. 15 and 6) accordingly by two, and rotation spiral shell button then can be at X and Y direction horizontal shifting platform.Two-dimensional micromotion stage and base prepare by steel.Utilize epoxy glue that PZT scanatron 7 (among Fig. 2 7) is fixedly installed on the center pit of two-dimensional micromotion stage, comprise the two-dimensional micromotion stage of PZT scanatron and then be fixed in the former AFM system.Like this when rotation spiral shell button, the spiral shell button drives connecting link driven sweep pipe and just can move in the horizontal direction, obtain bigger moving range, the moving displacement of micromotion platform on X and Y direction is 3 millimeters, the maximum scan displacement of PZT scanatron is 20 microns, guarantees that in proper order socle beam probe can carry out moving on microstructure on a large scale.Manual inserting needle that comprises in the original structure and motor inserting needle control screw slot are installed in the base bottom, also comprise the device that reduces vibration under the base, avoid the vibrations in horizontal shift and inserting needle process to disturb.Fig. 4 has installed the micromotion platform behind the PZT.
Mainly tested resolution to having assembled the AFM system behind the two-dimensional micromotion stage, drifted about and locate the performance of three aspects.In micron dimension, can successfully be positioned at a certain ad-hoc location on the semi-girder with reference to socle beam probe.The resolution of system hardware can be achieved by raster or screen dna sample, and test result shows that this system can repeatedly repeat to obtain the image of DNA, and this satisfies request for utilization.When the stability of system can be passed through long-time scanning, the drift degree of test sample surface fixed character dot image, on 10 microns * 10 microns of sweep limits, sweep interval is 40 minutes.The directions X of unique point drifts in about 0.5 micron, and the Y direction is drifted about less than 0.1 micron, and the result shows that system is very stable.
Before the experimental test, sample is placed on the PZT surface that comprises micromotion platform, under the visual field of visual CCD, regulates two-dimensional micromotion stage then, make with reference to socle beam probe to move on the tested micro-cantilever,, can carry out mechanical test in case the position is selected.
The mechanics parameter test mainly comprises the following aspects: the mechanics parameter of point of fixity test on the microstructure; In the microcell one by one the follow-on test analysis and microcell in the continuous mechanical test etc. of each point, realize elastic constant k, the isoparametric extraction of Young modulus E.The general data parameter that relates to is as follows.The major parameter of input comprises: with reference to the elasticity coefficient of semi-girder with select the location parameter of length on semi-girder, the length and width of tested cantilever, thick size.The enforcement testing data packet is drawn together: with reference to the force curve slope of semi-girder point of fixity, microcell pointwise in hard substrate, and in the microcell continuity point scanning down constant force and sweep length (X, Y), Z direction deformation data; With reference to semi-girder on tested semi-girder point of fixity and microcell in the force curve slope of pointwise, and the constant force of continuity point and sweep length in the microcell (X, Y), semi-girder is in the deformation data of Z direction.The data that output obtains comprise: data such as the elasticity coefficient of continuity point and deformation quantity in the pointwise elasticity coefficient in the parameters such as Young modulus of tested semi-girder point of fixity, microcell, microcell.
The mechanics parameter of point of fixity test on microstructure is actually the single force curve test of single-point, and test process as schematically shown in Figure 4.At first the reference socle beam probe with the known elasticity coefficient carries out first force-displacement curve test in hard substrate, obtains its slope data; Then, on semi-girder to be tested, under the observation of the CCD visual field, mobile two-dimensional micromotion stage, choose position to be tested, will place position selected on the micro-cantilever to be tested to carry out second force-displacement curve test, obtain corresponding slope with reference to semi-girder.By given elasticity coefficient, utilize formula (1) to calculate the elasticity coefficient of semi-girder to be tested with reference to semi-girder; By the structural parameters of given semi-girder to be tested, calculate the Young modulus of directly acquisition unknown semi-girder to be tested and the stress of semi-girder root etc. by corresponding formulas (2) again.
Carrying out power-displacement functional test in the microcell pointwise is in order to obtain the power resolution of difference on the micro-nano-scale on certain film micro area in microstructure, test process as schematically shown in Figure 5, as automatic traverse measurement less than the diverse location point in 1 micro-meter scale, the error of having avoided the location inaccuracy of manual measurement to be brought.At first selected scan area is set several pilots to be measured then.Basic operation sequence is identical with point of fixity.Implementation capacity-displacement measurement carries out pointwise and tests automatically then, obtains pointwise power-curve data on the semi-girder, extracts its slope data, calculates according to given formula (1).Through testing and calculate the elasticity coefficient of each location point correspondence.
The test of the continuous elasticity coefficient of microcell is actually with reference to socle beam probe elasticity coefficient analytical test continuously in a certain tiny area on the tested semi-girder, is the power scan mode of single line, and test process as schematically shown in Figure 6.At first in hard substrate, carry out the constituency, power load and scan size are set then, carry out with reference to semi-girder, obtain under the constant force and scanning position (semi-girder X, Y direction are illustrated as Fig. 3 internal coordinate), Z direction deformation data in hard suprabasil continuous sweep; Then under the CCD visual field and under the operation of micromotion platform, to place on the tested semi-girder in the microcell with reference to semi-girder, the power load and the same scan size of several varying level sizes are set, carry out sweep test, Automatic Program live load (difference power) is applied to power on the semi-girder, can obtain the change in displacement (deformation quantity) of semi-girder under different loads like this, according to formula (3), just can obtain on the sweep length direction of semi-girder the microstructure elasticity coefficient with the variation relation of sweep length by difference power and displacement.Fig. 8 is a test result.
Description of drawings
Fig. 1, two-dimentional mobile platform structural drawing
Fig. 2, two-dimensional micromotion stage and PZT linked system structural representation;
Fig. 3, based on the mechanical measuring and calculation method of probe, wherein (a) is that a probe is tested in hard suprabasil deformation under the atomic force microscope, (b) is the deformation test of this probe on another semi-girder;
Fig. 4, the point of fixity testing process.
Fig. 5, microcell pointwise power is differentiated testing process.
Fig. 6, microcell continuity point one-line scanning flow process.
Fig. 7 is with reference to the semi-girder force curve synoptic diagram on (right side) on hard substrate (left side) and micro-cantilever respectively.
Fig. 8, micro-cantilever is differentiated in the effect bottom offset deflection of power load, socle beam probe is in hard suprabasil single line force curve scanning signal, the length travel deformation of preliminary sweep point and ending analyzing spot does not change (a), figure (b) is in sweep limit is 10 microns scope, near the deformation analysis of root and afterbody.Wherein the first half is the deformation under different power load set-point, and the latter half is elasticity coefficient variation (only having calculated wherein one group) in the longitudinal direction.
Among the figure: 1 expression base, 2 expression two-dimensional micromotion stages, the manual inserting needle screw rod pickup groove of 3 expressions, 4 expression automatic motor screw rod pickup grooves, 5 and 6 represent corresponding two spiral shell buttons 5 and 6 (and mutually perpendicular drive screws) respectively, 7 expression PZT scanatrons, 8 expression sample or semi-girders to be measured, 9 expression incident lasers, 10 expressions are with reference to semi-girder, and 11 represent photodetectors.
Embodiment
Two-dimensional micromotion stage as illustrated in fig. 1 and 2, mainly comprise the two-dimensional micromotion stage 2 that is fixed on the base, the PZT scanatron is fixed on by epoxy glue in the center pit of two-dimensional micromotion stage 2, and two-dimensional micromotion stage is to control mutually perpendicular drive screw by two adjusting knobs (among Fig. 1 5) and (among Fig. 1 6).Two-dimensional micromotion stage and base prepare by steel, on the two-dimensional micromotion device, fixedly mount PZT scanatron 7 again, adjusting knob 5 is connected driving stem with 6, and driving stem is fixedlyed connected with the PZT scanatron with two-dimensional micromotion stage, so that the position of motion scan pipe and respective sample.Then micromotion platform is placed into again on the base 8 fixing.When adjusting knob, knob drives connecting link driven sweep pipe and just can move at X and Y horizontal direction, obtain bigger moving range, the moving displacement of micromotion platform on X and Y direction is 3 millimeters, the maximum scan displacement of PZT scanatron is 20 microns, to guarantee that socle beam probe can move on microstructure.Manual inserting needle in the structural drawing and motor inserting needle control screw slot are installed in the bottom, chassis of head.Also comprise the device that reduces vibration on the chassis, avoid the vibrations in horizontal shift and inserting needle process to disturb.
Test is carried out under room temperature ultra-clean chamber environment, and 25 ℃ of temperature are between the humidity 40-60%.Test according to Fig. 4 program, in length is on silicon (100) surface of 100 μ m, width 40 μ m, thickness 1.55 μ m, along＜110〉micro cantilever structure of crystal orientation preparation, utilize the semi-girder test (producer provides) of elasticity coefficient k=16N/m, the elasticity coefficient that obtains semi-girder tail end to be measured is 6.2N/m.By the Young modulus E=165GPa that calculates monocrystalline silicon, near the 169GPa that generally acknowledges at present.According to Theoretical Calculation, by formula
Calculating can obtain elasticity coefficient, and wherein, E is the Young modulus of silicon, and w is the width of semi-girder, and t is a thickness, and l is a length.If getting the Young modulus of single crystalline Si is 169GPa, obtaining elasticity coefficient is 6.3N/m, and with test number relatively, evaluated error is 2%.Theoretical Calculation shows, is no more than 2% in semi-girder elasticity coefficient maximum error transversely, and therefore, the microcell elasticity coefficient is differentiated test and is mainly reflected on the length direction of semi-girder.Fig. 7 is an example of test, with reference to the semi-girder force-displacement curve on hard substrate and unknown semi-girder respectively.
Carry out similar microcell power according to Fig. 5 program and differentiate functional test, be in order to obtain the power resolution of difference on certain film micro area in microstructure, as automatic measurement, avoid the inaccurate error of bringing in manual measurement location less than the diverse location point in 1 micro-meter scale.After the test, calculate the elasticity coefficient of each location point correspondence.Select 1 micron * 1 micron scan area, select 3 points to test along the length direction of semi-girder then, as, even dot spacing 200nm., test behind three points of Continuous Selection to the end from the root of semi-girder, elasticity coefficient is respectively 9.04N/m, 8.40N/m, 8.15N/m.Through comparing, result error is between 3.5%-7%.
Test according to Fig. 6 flow process, keep probe under the effect of constant force, continuously automatic traveling probe on microstructure.By the reference point of several different power is set, the automatic live load of system (difference power) is applied to power on the semi-girder, can obtain the change in displacement of semi-girder under different loads like this, be deformation quantity, just can obtain on the sweep length direction of semi-girder the microstructure elasticity coefficient with the variation relation of sweep length by difference power and deformation quantity.An example of Fig. 8 signal.
The test and Selection elasticity coefficient is the semi-girder of 0.8N/m, and its length is 200 μ m, and width is 40 μ m, and thickness is 1.55 μ m.Utilize elasticity coefficient to be pressed near suspended wall root 70-80 μ m place for the reference semi-girder of 16N/m, sweep length 10 μ m, the sweep speed of experiment middle probe is 1Hz.The displacement of test is differentiated and is reached 2nm.Except the cantilever root, exist than mistake, on the length of whole test, obtained the variation relation of semi-girder elasticity coefficient with length, the result is consistent with theory, and the cube of elasticity coefficient k and length L is inversely proportional to, and elasticity coefficient changes to 11.39N/m from 14.20N/m.Obviously diminish away from the root elasticity coefficient, the fluctuating in the test result curve can obviously be observed.This be because, even without outside noise, two semi-girders are in contact with one another motion and have produced the result who is similar to resonance effects in scanning process.After the one-line scanning test, keep probe in position, test pattern is transformed into the elasticity coefficient test of carrying out single-point under the single pattern, be used for the elasticity coefficient that obtained under comparison and the one-line scanning pattern.It is 13.40N/m that in site measurement obtains elasticity coefficient, this between the elasticity coefficient under the one-line scanning pattern is from 14.20N/m to 11.39N/m, thus the result as can be known system have consistance preferably.
Claims (7)
1. two-dimensional micromotion stage that is used for atomic force microscope, it is characterized in that, the center drilling of two-dimensional micromotion stage (2) is used to install PZT scanatron (7), two adjusting knobs (5), (6) are wherein arranged respectively on mutually perpendicular X and Y position, two adjusting knobs connect two driving stems, two driving stems are connected with the PZT scanatron, and described two-dimensional micromotion stage is fixed on the base (1).
2. by the described two-dimensional micromotion stage that is used for atomic force microscope of claim 1, it is characterized in that the displacement range on the described two-dimensional micromotion stage horizontal direction is 3 * 3 square millimeters.
3. by the described two-dimensional micromotion stage that is used for atomic force microscope of claim 1, it is characterized in that two-dimensional micromotion stage and base are prepared by steel.
4. by the described two-dimensional micromotion stage that is used for atomic force microscope of claim 1, it is characterized in that this two-dimensional micromotion stage is fixed in the atomic force microscope system by epoxy glue fixing PZT scanatron in the center pit of two-dimensional micromotion stage.
5. by claim 1 or the 4 described two-dimensional micromotion stages that are used for atomic force microscope, the maximum scan displacement that it is characterized in that the PZT scanatron is 20 microns.
6. utilize each described two-dimensional micromotion stage that is used for atomic force microscope among the claim 1-5 to carry out the method for testing of mechanics parameter, the parameter testing that it is characterized in that the elasticity coefficient of in-situ extraction semi-girder and Young modulus divides in following three kinds of situations any:
A. the mechanics parameter of point of fixity test on microstructure also is the single force curve test of single-point, and testing procedure is: at first the reference socle beam probe with the known elasticity coefficient carries out first force-displacement curve test in hard substrate, obtains its slope data; Then, on semi-girder to be tested, under the observation of the CCD visual field, mobile two-dimensional micromotion stage, choose position to be tested, will place position selected on the micro-cantilever to be tested to carry out second force-displacement curve test, obtain corresponding slope with reference to semi-girder, by given elasticity coefficient, utilize formula (1) to calculate the elasticity coefficient of semi-girder to be tested with reference to semi-girder; By the structural parameters of given semi-girder to be tested, calculate the Young modulus of directly acquisition unknown semi-girder to be tested and the stress of semi-girder root by corresponding formulas (2) again;
B. carry out power-displacement functional test in the microcell pointwise, at first selected scan area, set several pilots to be measured then, basic operation sequence is identical with the described point of fixity of A, carries out power-displacement measurement then, carries out pointwise and tests automatically, obtain the power-curve data of pointwise on the semi-girder, extract its slope data, calculate, through testing and calculate the elasticity coefficient of each location point correspondence according to given formula (1);
C. the continuous elasticity coefficient test of microcell, also promptly with reference to socle beam probe to continuous elasticity coefficient analytical test in a certain tiny area on the tested semi-girder, it is the power scan mode of single line, step is: at first carry out the constituency in hard substrate, power load and scan size are set then, carry out with reference to semi-girder in hard suprabasil continuous sweep, obtain under the constant force and semi-girder X, the scanning position of Y direction, Z direction deformation data; Then under the CCD visual field and under the operation of micromotion platform, to place on the tested semi-girder in the microcell with reference to semi-girder, the power load and the same scan size of several varying level sizes are set, carry out sweep test, the Automatic Program live load is applied to difference power on the semi-girder, obtain the deformation quantity of the change in displacement of semi-girder under different loads,, just obtain the elasticity coefficient of unknown semi-girder to be measured by difference power and displacement according to formula (3);
Described formula (1), (2), (3) are
In the formula, k is the elasticity coefficient of unknown semi-girder to be measured, k
RefBe the elasticity coefficient of known reference semi-girder, δ
TotBe total deformation quantity with reference to semi-girder, δ
TestBe the deformation quantity on tested semi-girder, θ is the angle between two semi-girders;
Thickness t, width w, length L is the structural parameters of semi-girder to be measured, E is a Young modulus;
Δ F is a difference power, Δ Z be semi-girder in normal direction Z direction generation deformation, also be referred to as the difference displacement;
Described hard substrate is meant smooth silicon face, and the described CCD visual field is the visual field of visual charge-coupled image sensor system.
7. carry out the method for testing of mechanics parameter by the described two-dimensional micromotion stage that is used for atomic force microscope of claim 6, it is characterized in that corresponding automatic traverse measurement under the B situation less than diverse location point in the microcell of 1 micro-meter scale.
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| CN104793019B (en) * | 2014-01-18 | 2017-09-29 | 天津大学 | The source tracing method of micro-cantilever elastic constant is demarcated on AFM |
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| CN109884344A (en) * | 2019-02-25 | 2019-06-14 | 天津大学 | A kind of atomic force microscope micro-cantilever coefficient of elasticity scaling method |
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| CN112698208A (en) * | 2020-12-11 | 2021-04-23 | 上海理工大学 | System and method for in-situ measurement of Young modulus and partial molar volume of lithium battery material |
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