CN101323098A - Magnetorheological finishing device for high-steepness optical part - Google Patents
Magnetorheological finishing device for high-steepness optical part Download PDFInfo
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- CN101323098A CN101323098A CNA2008100318983A CN200810031898A CN101323098A CN 101323098 A CN101323098 A CN 101323098A CN A2008100318983 A CNA2008100318983 A CN A2008100318983A CN 200810031898 A CN200810031898 A CN 200810031898A CN 101323098 A CN101323098 A CN 101323098A
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Abstract
The invention relates to a magnetic rheological polishing device used in an optical part with high gradient, comprising a machine tool, a magnetic rheological polishing device and a control system which is connected with the above components. The machine tool comprises a horizontal base seat and a vertical base seat, an X axial linear motion mechanism and a Y axial linear motion mechanism are arranged on the horizontal base seat in a cross shape, the X axial linear motion mechanism is fixed on a slider of the Y axial linear motion mechanism, a Z axial linear motion mechanism is arranged on the vertical base seat, a C axial rotary worktable used for arranging the magnetic rheological polishing device is arranged on a slider of the X axial linear motion mechanism, a B axial rotary worktable used for arranging a work piece fixture is arranged on a slider of the Z axial linear motion mechanism, an A axial rotary worktable used for driving the work piece to be processed is arranged at the tail end of the work piece fixture, and the magnetic rheological polishing device is horizontally opposite to the work piece to be processed. The device of the invention has the advantages of simple and compact structure, low cost and easy control, and can realize the processing of the optical part with the high gradient.
Description
Technical field
The present invention is mainly concerned with the technical field of magnetorheological polishing, refers in particular to a kind of magnetorheological finishing device that is used for high-steepness optical part.
Background technology
The certainty polishing of high-steepness optical part is a guardian technique difficult problem in the optical element manufacture field.High-steepness optical part is mainly used in the window of airborne vehicle, the lens of thermal imaging system, window, the window of advanced weaponry equipment electro-optical system and guided missile dome etc., replace original plane and hemisphere face part that uses by high steepness part, thereby make aircraft have good air dynamic behaviour.The key request of realizing the polishing of high-steepness optical part certainty is: the range of work of burnishing device covers the whole finished surface of high-steepness optical part; Realize deterministic polishing removal model at the high steepness piece surface that radius of curvature changes greatly.Traditional optical polish technology can't realize the certainty polishing of high-steepness optical part.
Technique of Magnetorheological Finishing is exactly a kind of novel optical element processing method that electromagnetism, hydrodynamics, analytical chemistry theory are combined and propose, the characteristic that it utilizes the solid-liquid of Magnetorheologicai polishing liquid in magnetic field to transform mutually, by the control external magnetic field shear yield stress and the local shape of Magnetorheologicai polishing liquid are controlled in real time, create " a flexible polishing mould " that can match with processed optical surface, realize grinding, polishing correction of the flank shape processing hard brittle materials such as optical glass.Traditional relatively polishing processing method, this technology have the polishing efficiency height, remove significant advantages such as function is stable, edge effect is little.Domestic existing research also is in laboratory stage basically, and Harbin Institute of Technology, Tsing-Hua University etc. has carried out some basic researchs to the optical glass Technique of Magnetorheological Finishing, has set up some basic research equipments.Be the schematic diagram of some magnetorheological finishing devices of domestic existing research institute foundation as shown in Figure 1, 2, 3, Harbin Institute of Technology has successively adopted processing mode illustrated in figures 1 and 2, because the formed magnetorheological polishing spot of this patent is bigger, when the radius of curvature of high steepness part changes, it is removed model and also changes accordingly, be difficult to realize magnetorheological certainty polishing, therefore be not suitable for the processing of high steepness part; China Patent No.: 03153996.3, denomination of invention: the magnetorheological rubbing head of electromagnetic mode is exactly the polishing wheel device of the public rotation as shown in Figure 3 of Tsing-Hua University's exploitation.Because in this device, revolve round the sun again in the time of the polishing wheel rotation, remove function thereby form big gaussian-shape, violent in the radius of curvature variation of high steepness part, this device is difficult to form stable removal function, so the processing of this system's incompatibility high-steepness optical part.Chinese patent application number: 200610043079.1, denomination of invention: magnetic rheologic flexible, fine grinding, polishing equipment and method, this invention can not solve the difficult problem of high-steepness optical part processing.Can get from above-mentioned disclosed patent: current magnetorheological finishing device is basic only at the sphere and the aspheric surface of plane or small curvature radius, also can not realize the magnetorheological certainty polishing of high-steepness optical part, realize solving following technical problem:
1, the telecontrol equipment structure of design in the magnetorheological finishing device when making rubbing head along the Machining of Curved Surface of the high steepness of part, all the time perpendicular to contour curve, realizes the certainty polishing.
2, high steepness part radius of curvature changes acutely, realize the certainty polishing, must design and satisfy the novel magnetorheological finishing device that high steepness curvature changes.
3, the machining locus of planning high-steepness optical part, the relative position of reasonable Arrangement rubbing head and workpiece makes the stable Magnetorheologicai polishing liquid circulation of magnetorheological circulatory system realization in the process.
Summary of the invention
The problem to be solved in the present invention just is: at the technical problem that prior art exists, the invention provides a kind of simple and compact for structure, with low cost, control is simple, applied widely, can realize the magnetorheological finishing device that is used for high-steepness optical part of high-steepness optical part processing.
For solving the problems of the technologies described above, the solution that the present invention proposes is: a kind of magnetorheological finishing device that is used for high-steepness optical part, it is characterized in that: it comprises lathe, magnetorheological finishing device and the control system that links to each other with respectively above each assembly, described lathe comprises horizontal base and vertical pedestal, X-axis straight-line motion mechanism and Y-axis straight-line motion mechanism are " ten " word cross-like and are arranged on the horizontal base, the X-axis straight-line motion mechanism is fixed on the slide block of Y-axis straight-line motion mechanism, Z axle straight-line motion mechanism is arranged on the vertical pedestal, the C axle rotary table that is used for installing magnetorheological finishing device is fixed on the slide block of X-axis straight-line motion mechanism, the B axle rotary table that is used for installing work piece holder is fixed on the slide block of Z axle straight-line motion mechanism, be used for driving the tail end that A axle rotary table that workpiece to be processed rotates is installed in work piece holder, magnetorheological finishing device is relative with the workpiece to be processed level.
Described magnetorheological finishing device comprises the Magnetorheologicai polishing liquid circulatory system and is fixed in polishing wheel, polishing wheel driving mechanism and field generator for magnetic on the fixed mount that polishing wheel links to each other with the polishing wheel driving mechanism.
The described Magnetorheologicai polishing liquid circulatory system comprises nozzle, recover, fluid reservoir, rear pump, make-up water pump, recovery pump, computer and the adjuster that is used for controlling rear pump, nozzle and recover lay respectively at the both sides of polishing wheel, nozzle is connected to form the polishing fluid output loop by output pipe and rear pump and fluid reservoir, recover is connected to form polishing fluid recovery loop by reclaiming pump and reclaim line and fluid reservoir, and make-up water pump and fluid reservoir are connected to form the viscosity regulating loop; Be equiped with flowmeter and viscosimeter on the output pipe of described polishing fluid output loop, rear pump, make-up water pump, flowmeter and viscosimeter all link to each other with control system.
Described polishing wheel driving mechanism comprises polishing wheel drive motors, polishing wheel reductor and transmission mechanism, and described polishing wheel drive motors links to each other with the rotating shaft of polishing wheel with transmission mechanism by the polishing wheel reductor.
The diameter of described polishing wheel is 50mm～100mm.
Described magnetorheological finishing device is fixed on the C axle rotary table by the U-shaped bracing frame, and it is horizontally disposed that magnetorheological finishing device is.
Described work piece holder is a vacuum cup.
Compared with prior art, advantage of the present invention just is:
1, the present invention is used for the magnetorheological finishing device of high-steepness optical part, and is simple and compact for structure, with low cost, control is simple, applied widely, can realize high-steepness optical part processing;
2, the present invention is used for the magnetorheological finishing device of high-steepness optical part, adopting bore is the small-bore novel polishing head of 50mm～100mm, under high steepness piece surface radius of curvature variation situation greatly, can realize removing the constant magnetorheological polishing of certainty of model;
3, the present invention is used for the magnetorheological finishing device of high-steepness optical part, and its motion is a six-freedom degree, has realized the range of work that high steepness part scope is wide, steepness is dark;
4, the present invention is used for the magnetorheological finishing device of high-steepness optical part, the magnetorheological finishing device horizontal positioned, and when having solved the polishing of high steepness part, machine tool motion has been realized stable Magnetorheologicai polishing liquid control to the influence of the magnetorheological circulatory system;
5, Magnetorheologicai polishing liquid cyclic control system of the present invention can provide every character such as composition, viscosity, flow, temperature long-time stable Magnetorheologicai polishing liquid, for the long-time processing of optical element provides prerequisite;
6, machine tool motion of the present invention mechanism is a six-freedom degree, is that the complex-curved optical element processing of 50mm～200mm has very strong adaptability to bore.
Description of drawings
Fig. 1 is the structural representation one of traditional magnetorheological polishing processing mode;
Fig. 2 is the structural representation two of traditional magnetorheological polishing processing mode;
Fig. 3 is the structural representation three of traditional magnetorheological polishing processing mode;
Fig. 4 is an overall structure schematic diagram of the present invention;
Fig. 5 is the schematic diagram of the free degree on the machine tool motion device of the present invention;
Fig. 6 is the structural representation of U type bracing frame among the present invention;
Fig. 7 is the structural representation of X axis straight-line motion mechanism among the present invention;
Fig. 8 is the structural representation of magnetorheological finishing device among the present invention;
Fig. 9 is the frame structure schematic diagram of the magnetorheological circulatory system among the present invention;
Figure 10 is a magnetorheological finishing device magnetic field intensity schematic diagram among the present invention;
Figure 11 is the schematic diagram of the present invention with PG-5 type Tesla meter actual measurement magnitude of field intensity;
Figure 12 is the machining locus original position schematic diagram of high-steepness optical part in the concrete application example;
Figure 13 is the machining locus centre position schematic diagram of high-steepness optical part in the concrete application example;
Figure 14 is the machining locus end position schematic diagram of high-steepness optical part in the concrete application example.
Marginal data
1, lathe
101, lathe bed 102, X axis straight-line motion mechanism
103, Y-axis is to straight-line motion mechanism 104, Z axial linear movement mechanism
105, A axle rotary table 106, B axle rotary table
107, C axle rotary table 108, U type bracing frame
109, work piece holder 110, digital control system
2, burnishing device 201, polishing wheel
2021, left magnetic head 2022, left magnetic head
2031, left magnetic arm 2032, right magnetic arm
204, nozzle 205, recover
206, coil 207, water tank
208, polishing wheel decelerator 209, polishing wheel drive motors
210, fixed mount 211, adjuster
213, rear pump 214, flowmeter
215, fluid reservoir 216, recovery pump
217, viscosimeter 218, make-up water pump
219, computer 3, workpiece to be processed
In the prior art (being among Fig. 1, Fig. 2 and Fig. 3)
401, field generator for magnetic 402, workpiece
403, rotating shaft 404, polishing disk
405, Magnetorheologicai polishing liquid 501, field generator for magnetic
502, workpiece 503, rotating shaft
504, polishing wheel 505, Magnetorheologicai polishing liquid
506, rear pump 601, magnetic polishing wheel
602, magnet 603, magnetic isolation plate
604, magnetic pound 605, the axis of rotation
606, hollow shaft
The specific embodiment
Below with reference to the drawings and specific embodiments the present invention is described in further details.
Referring to shown in Figure 4, the present invention is used for the magnetorheological finishing device of high-steepness optical part, it comprises lathe 1, magnetorheological finishing device 2 and the control system that links to each other with respectively above each assembly, the lathe bed 101 of lathe 1 is L-shaped, it comprises horizontal base and vertical pedestal, X-axis straight-line motion mechanism 102 and Y-axis straight-line motion mechanism 103 are " ten " word cross-like and are arranged on the horizontal base, X-axis straight-line motion mechanism 102 is fixed on the slide block of Y-axis straight-line motion mechanism 103, Z axle straight-line motion mechanism 104 is arranged on the vertical pedestal, the C axle rotary table 107 that is used for installing magnetorheological finishing device 2 is fixed on the slide block of X-axis straight-line motion mechanism 102, the B axle rotary table 106 that is used for installing work piece holder 109 is fixed on the slide block of Z axle straight-line motion mechanism 104, be used for driving the tail end that A axle rotary table 105 that workpiece to be processed 3 rotates is installed in work piece holder 109, magnetorheological finishing device 2 is relative with workpiece to be processed 3 levels.In the present embodiment, X axis straight-line motion mechanism 102, Y-axis all adopt identical structure to straight-line motion mechanism 103, Z axial linear movement mechanism 104, with X axis straight-line motion mechanism 102 is example, referring to shown in Figure 7, the slide block that it comprises drive motors 1021, motor fixing seat 1022, shaft coupling 1023, leading screw 1024 and is sheathed on the screw mandrel 1024 and can moves along screw mandrel 1024, drive motors 1021 drives leading screw 1024 by shaft coupling 1023, drives the slide block movement that links to each other with leading screw 1024.Drive motors 1021 drives C axle rotary table 107 moving linearlies of fixing on it by leading screw 1024 and slide block transmission.B rotary table 105 and C rotary table 107 are made up of turntable and drive motors, and A rotary table 106 is made up of torque motor, axle, axle sleeve, and its principle is identical.Each straight-line motion mechanism links to each other with control system 110 with rotary table.Referring to shown in Figure 5, behind the employing said structure, motion of the present invention is a six-freedom degree, has realized the range of work that high steepness part scope is wide, steepness is dark.In the present embodiment, work piece holder 109 adopts vacuum cup, is installed on the A rotary table 105, and workpiece to be processed 3 is adsorbed in.Referring to Fig. 4 and shown in Figure 6, magnetorheological finishing device 2 is fixed on the C axle rotary table 107 by U-shaped bracing frame 208, and magnetorheological finishing device 2 is horizontally disposed.
Referring to Fig. 4, Fig. 8 and shown in Figure 9, in the present embodiment, magnetorheological finishing device 2 comprises the Magnetorheologicai polishing liquid circulatory system and is fixed in polishing wheel 201, polishing wheel driving mechanism and field generator for magnetic on the fixed mount 210 that polishing wheel 201 links to each other with the polishing wheel driving mechanism.Polishing wheel 201 adopts stainless steel material to make, and its outer surface is a spherical surface, can process the aspheric surface optical accessory of high steepness, and in order to satisfy the requirement of the high steepness workpiece of processing, the diameter of polishing wheel 201 is 50mm-100mm in the present embodiment.The polishing wheel driving mechanism comprises polishing wheel drive motors 209, polishing wheel reductor 208 and transmission mechanism, and the rotating shaft with polishing wheel 201 links to each other polishing wheel drive motors 209 with transmission mechanism by polishing wheel reductor 208, drives polishing wheel 201 and rotates.Field generator for magnetic is screwed on U type bracing frame 108, field generator for magnetic is made up of left magnetic head 2021, right magnetic head 2022, left magnetic arm 2031, right magnetic arm 2032, coil 206 and baffle plate 207, coil 206 passes on left magnetic arm 2031 and right magnetic arm 2032, and the magnetic line of force forms the required magnetic field of magnetorheological polishing by left magnetic arm 2031, right magnetic arm 2032, left magnetic head 2021, right magnetic head 2022 on polishing wheel 201 surfaces.Referring to shown in Figure 10, it is the magnetic line of force distribution map that goes out with the ANSYS software emulation at machining area, principle according to magnetorheological polishing, it is to be dispersed by a magnetic pole that the magnetic line of force of field generator for magnetic in the magnetic field that polishing area produces distributes, " bulge " shape that converges to another magnetic pole, thereby after making that Magnetorheologicai polishing liquid is subjected to the magnetic field effect, hardening is formed at similarly " bulge " shape workpiece is processed.As can be seen from the figure, the magnetic field that designed field generator for magnetic produces forms " bulge " shape between two magnetic poles, can satisfy magnetorheological polishing requirements.Referring to shown in Figure 11, be the magnetic field intensity that records at the polishing wheel outer surface of machining area with PG-5 type Tesla meter.Ordinate is a magnetic induction intensity, and unit is a tesla, and abscissa is position Z, and unit is a millimeter.The magnetic field of Z direction is BZ, and the magnetic field of directions X is BX, and the magnetic field of Y direction is BY, can see that BZ changes from small to big and from large to small bulge shape along with the variation of Z is one, and BY along Z to variation about the peak symmetry of BZ, BX is substantially zero.By to BX, BY, BZ's is synthetic, can obtain polishing area and be at Z meeting magnetorheological polishing requirements upwards about the bulge shape of magnetic pole symmetry.The nozzle 201 that the Magnetorheologicai polishing liquid cyclic control system of magnetorheological finishing device links to each other by pipeline, recover 205, fluid reservoir 215, rear pump 213, make-up water pump 217, recovery pump 216 are formed, nozzle 201 and recover 205 lay respectively at a side of polishing wheel 201, nozzle 201 is connected to form the polishing fluid output loop by output pipe and rear pump 213 with fluid reservoir 215, recover 205 is connected to form polishing fluid recovery loop by reclaiming pump 216 and reclaim line and fluid reservoir 215, and make-up water pump 2175 is connected to form the viscosity regulating loop with fluid reservoir 215; Be equiped with flowmeter 214 and viscosimeter 217 on the output pipe of polishing fluid output loop, rear pump 213, make-up water pump 217, flowmeter 214 and viscosimeter 217 all link to each other with control system.Rear pump 213 pumps the Magnetorheologicai polishing liquid in the fluid reservoir 215, through output pipe, by nozzle 201 it is ejected into the outer surface of polishing wheel.Polishing wheel 201 rotation is brought Magnetorheologicai polishing liquid into machining area and is processed, and the polishing fluid that recover 205 will leave machining area reclaims, by reclaim pump 216 through reclaim line with its blowback fluid reservoir 215.In the whole circulation process, the computer 219 in the control system will be in the signal that flowmeter 214 in the circulation canal and viscosimeter 217 record to be adopted back, and after control software was handled, control 217 pairs of flows of make-up water pump and viscosity were controlled.In fluid reservoir 215, be connected with simultaneously cooling water in allowed limits, see Fig. 8 and Fig. 9 the control of the temperature of Magnetorheologicai polishing liquid.
As Figure 12, Figure 13, Figure 14 shows that the machining locus schematic diagram of high-steepness optical part magnetorheological finishing device in concrete application example, small-bore magnetorheological rubbing head by the 50mm bore polishes the surface of high-steepness optical part, because it is very little that the zone is removed in the polishing that forms, the curvature of piece surface changes and can not form removing the variation in zone, Figure 12 is the processing original position, Figure 13 is the processing centre position, and Figure 14 is the process finishing position.
Claims (8)
1, a kind of magnetorheological finishing device that is used for high-steepness optical part, it is characterized in that: it comprises lathe (1), magnetorheological finishing device (2) and the control system that links to each other with respectively above each assembly, described lathe (1) comprises horizontal base and vertical pedestal, X-axis straight-line motion mechanism (102) and Y-axis straight-line motion mechanism (103) are " ten " word cross-like and are arranged on the horizontal base, X-axis straight-line motion mechanism (102) is fixed on the slide block of Y-axis straight-line motion mechanism (103), Z axle straight-line motion mechanism (104) is arranged on the vertical pedestal, the C axle rotary table (107) that is used for installing magnetorheological finishing device (2) is fixed on the slide block of X-axis straight-line motion mechanism (102), the B axle rotary table (106) that is used for installing work piece holder (109) is fixed on the slide block of Z axle straight-line motion mechanism (104), be used for driving the tail end that A axle rotary table (105) that workpiece to be processed (3) rotates is installed in work piece holder (109), magnetorheological finishing device (2) is relative with workpiece to be processed (3) level.
2, according to the magnetorheological finishing device that is used for high-steepness optical part of claim 1, it is characterized in that: described magnetorheological finishing device (2) comprises the Magnetorheologicai polishing liquid circulatory system and is fixed in polishing wheel (201), polishing wheel driving mechanism and field generator for magnetic on the fixed mount (210) that polishing wheel (201) links to each other with the polishing wheel driving mechanism.
3, the magnetorheological finishing device that is used for high-steepness optical part according to claim 2, it is characterized in that: the described Magnetorheologicai polishing liquid circulatory system comprises nozzle (204), recover (205), fluid reservoir (215), rear pump (213), make-up water pump (218), reclaim pump (216), computer (219) and the adjuster (211) that is used for controlling rear pump (213), nozzle (204) and recover (205) lay respectively at the both sides of polishing wheel (201), nozzle (204) is connected to form the polishing fluid output loop by output pipe and rear pump (213) with fluid reservoir (215), recover (205) is connected to form polishing fluid recovery loop by reclaiming pump (216) and reclaim line and fluid reservoir (215), and make-up water pump (218) is connected to form the viscosity regulating loop with fluid reservoir (215); Be equiped with flowmeter (214) and viscosimeter (217) on the output pipe of described polishing fluid output loop, rear pump (213), make-up water pump (218), flowmeter (214) and viscosimeter (217) all link to each other with control system.
4, the magnetorheological finishing device that is used for high-steepness optical part according to claim 3, it is characterized in that: described polishing wheel driving mechanism comprises polishing wheel drive motors (209), polishing wheel reductor (208) and transmission mechanism, and the rotating shaft with polishing wheel (201) links to each other described polishing wheel drive motors (209) with transmission mechanism by polishing wheel reductor (208).
5, according to claim 1 or 2 or the 3 or 4 described magnetorheological finishing devices that are used for high-steepness optical part, it is characterized in that: the diameter of described polishing wheel (201) is 50mm～100mm.
6, according to claim 1 or 2 or the 3 or 4 described magnetorheological finishing devices that are used for high-steepness optical part, it is characterized in that: described magnetorheological finishing device (2) is fixed on the C axle rotary table (107) by U-shaped bracing frame (208), and magnetorheological finishing device (2) is horizontally disposed.
7, according to claim 1 or 2 or the 3 or 4 described magnetorheological finishing devices that are used for high-steepness optical part, it is characterized in that: described work piece holder (109) is a vacuum cup.
8, the magnetorheological finishing device that is used for high-steepness optical part according to claim 5 is characterized in that: described work piece holder (109) is a vacuum cup.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810031898A CN100586656C (en) | 2008-07-28 | 2008-07-28 | Magnetorheological finishing device for high-steepness optical part |
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|---|---|---|---|
| CN200810031898A CN100586656C (en) | 2008-07-28 | 2008-07-28 | Magnetorheological finishing device for high-steepness optical part |
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| CN101323098A true CN101323098A (en) | 2008-12-17 |
| CN100586656C CN100586656C (en) | 2010-02-03 |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102632435A (en) * | 2012-05-11 | 2012-08-15 | 中国工程物理研究院机械制造工艺研究所 | Double-flexible-grinding-head magnetorheological polishing device |
| CN102848287A (en) * | 2012-09-14 | 2013-01-02 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN104625960A (en) * | 2015-02-06 | 2015-05-20 | 苏州富强科技有限公司 | Drive assembly of polishing machine |
| CN105598785A (en) * | 2015-10-14 | 2016-05-25 | 中国人民解放军国防科学技术大学 | Combined random vibration small-bore polishing device |
| CN109531431A (en) * | 2019-01-14 | 2019-03-29 | 中国工程物理研究院机械制造工艺研究所 | A kind of circulator of Magnetorheologicai polishing liquid |
| CN110052916A (en) * | 2019-04-22 | 2019-07-26 | 中国工程物理研究院激光聚变研究中心 | Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method |
| CN110064997A (en) * | 2019-06-05 | 2019-07-30 | 中国工程物理研究院机械制造工艺研究所 | Mangneto rheological deformation effect burnishing device and method for thin wall special-shaped curved surface |
| CN110774075A (en) * | 2019-12-06 | 2020-02-11 | 江苏心力量智能科技有限公司 | Manual surface grinding machine |
| CN112329167A (en) * | 2020-11-02 | 2021-02-05 | 中国工程物理研究院机械制造工艺研究所 | Magnetorheological polishing removal function deduction method based on curvature and immersion depth |
| CN112706026A (en) * | 2020-12-24 | 2021-04-27 | 中国人民解放军国防科技大学 | Optical element grinding and polishing compound machine tool |
| CN112975677A (en) * | 2019-12-13 | 2021-06-18 | 嘉兴职业技术学院 | Portable tool grinding machine |
| CN113427325A (en) * | 2021-07-16 | 2021-09-24 | 吉林大学 | Electromagnetic current coupling optical curved surface precision polishing machining tool and machining method |
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- 2008-07-28 CN CN200810031898A patent/CN100586656C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102632435B (en) * | 2012-05-11 | 2013-12-25 | 中国工程物理研究院机械制造工艺研究所 | Double-flexible-grinding-head magnetorheological polishing device |
| CN102632435A (en) * | 2012-05-11 | 2012-08-15 | 中国工程物理研究院机械制造工艺研究所 | Double-flexible-grinding-head magnetorheological polishing device |
| CN102848287A (en) * | 2012-09-14 | 2013-01-02 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN102848287B (en) * | 2012-09-14 | 2014-09-17 | 中国人民解放军国防科学技术大学 | Combination machining method for removing high-frequency errors in optical elements |
| CN104625960A (en) * | 2015-02-06 | 2015-05-20 | 苏州富强科技有限公司 | Drive assembly of polishing machine |
| CN105598785A (en) * | 2015-10-14 | 2016-05-25 | 中国人民解放军国防科学技术大学 | Combined random vibration small-bore polishing device |
| CN109531431B (en) * | 2019-01-14 | 2024-04-16 | 中国工程物理研究院机械制造工艺研究所 | Circulation device of magnetorheological polishing liquid |
| CN109531431A (en) * | 2019-01-14 | 2019-03-29 | 中国工程物理研究院机械制造工艺研究所 | A kind of circulator of Magnetorheologicai polishing liquid |
| CN110052916A (en) * | 2019-04-22 | 2019-07-26 | 中国工程物理研究院激光聚变研究中心 | Heavy caliber wedge optical element ultraprecise combined shaping grinding attachment and processing method |
| CN110064997A (en) * | 2019-06-05 | 2019-07-30 | 中国工程物理研究院机械制造工艺研究所 | Mangneto rheological deformation effect burnishing device and method for thin wall special-shaped curved surface |
| CN110774075A (en) * | 2019-12-06 | 2020-02-11 | 江苏心力量智能科技有限公司 | Manual surface grinding machine |
| CN112975677A (en) * | 2019-12-13 | 2021-06-18 | 嘉兴职业技术学院 | Portable tool grinding machine |
| CN112329167A (en) * | 2020-11-02 | 2021-02-05 | 中国工程物理研究院机械制造工艺研究所 | Magnetorheological polishing removal function deduction method based on curvature and immersion depth |
| CN112329167B (en) * | 2020-11-02 | 2022-06-17 | 中国工程物理研究院机械制造工艺研究所 | Magnetorheological polishing removal function deduction method based on curvature and immersion depth |
| CN112706026A (en) * | 2020-12-24 | 2021-04-27 | 中国人民解放军国防科技大学 | Optical element grinding and polishing compound machine tool |
| CN113427325A (en) * | 2021-07-16 | 2021-09-24 | 吉林大学 | Electromagnetic current coupling optical curved surface precision polishing machining tool and machining method |
| CN113427325B (en) * | 2021-07-16 | 2022-09-20 | 吉林大学 | Electromagnetic current coupling optical curved surface precision polishing machining tool and machining method |
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