CN101321413A - Condenser type microphone - Google Patents

Condenser type microphone Download PDF

Info

Publication number
CN101321413A
CN101321413A CNA2008100682965A CN200810068296A CN101321413A CN 101321413 A CN101321413 A CN 101321413A CN A2008100682965 A CNA2008100682965 A CN A2008100682965A CN 200810068296 A CN200810068296 A CN 200810068296A CN 101321413 A CN101321413 A CN 101321413A
Authority
CN
China
Prior art keywords
integrated circuit
vibrating diaphragm
mounted integrated
pole plate
back pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2008100682965A
Other languages
Chinese (zh)
Other versions
CN101321413B (en
Inventor
潘政民
***
孟珍奎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AAC Technologies Holdings Shenzhen Co Ltd
Original Assignee
AAC Acoustic Technologies Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AAC Acoustic Technologies Shenzhen Co Ltd filed Critical AAC Acoustic Technologies Shenzhen Co Ltd
Priority to CN2008100682965A priority Critical patent/CN101321413B/en
Publication of CN101321413A publication Critical patent/CN101321413A/en
Application granted granted Critical
Publication of CN101321413B publication Critical patent/CN101321413B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

The invention relates to a capacitance-type microphone, in particular to a micro electro-mechanical system (short for MEMS) microphone, comprising a back-electrode plate, a diaphragm and an integrated circuit board. A first capacitance is formed between the back-electrode plate and the diaphragm. A second capacitance is formed between the diaphragm and the integrated circuit board. The first capacitance and the second capacitance are electrically connected to the integrated circuit board through difference. The noise signal can be filtered and the sensitivity of the microphone can be improved through the difference connection of two capacitances.

Description

Electret Condencer Microphone
[technical field]
The present invention relates to Electret Condencer Microphone, relate in particular to a kind of microelectromechanical-systems microphone.
[background technology]
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
And the microphone of using more and better performances at present is microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone), and its encapsulation volume is littler than traditional electret microphone.Yet reducing of volume causes the influence of outside electromagnetic interference to become outstanding.How to eliminate or weaken outside electromagnetic interference, become important problem.
The invention provides a kind of new Electret Condencer Microphone of eliminating or weakening outside electromagnetic interference.
[summary of the invention]
The technical problem to be solved in the present invention is to provide a kind of new Electret Condencer Microphone, and outside electromagnetic interference can be eliminated or weaken to this microphone, improves sensitivity of microphone.
The present invention solves above-mentioned technical problem by such technical scheme:
A kind of Electret Condencer Microphone, mainly comprise: back pole plate, the vibrating diaphragm that is oppositely arranged with back pole plate, the surface-mounted integrated circuit that is oppositely arranged with vibrating diaphragm, vibrating diaphragm is between back pole plate and surface-mounted integrated circuit, and mutually insulated between the three, form first electric capacity between vibrating diaphragm and the back pole plate, form second electric capacity between vibrating diaphragm and the surface-mounted integrated circuit, two electric capacity are electrically connected to other circuit on the surface-mounted integrated circuit with difference form.
As a kind of improvement of the present invention, this Electret Condencer Microphone is provided with elastic coupling element in addition, and this elastic coupling element lays respectively between vibrating diaphragm and the surface-mounted integrated circuit and between vibrating diaphragm and the back pole plate, is used for vibrating diaphragm is positioned between back pole plate and the surface-mounted integrated circuit.
As another kind of improvement the of the present invention, be provided with on the back pole plate some through holes in order to transmission sound to vibrating diaphragm.
As another kind of improvement the of the present invention, surface-mounted integrated circuit is provided with conductive part and is electrically connected to external circuit.
As another kind of improvement the of the present invention, offer some sound holes on the surface-mounted integrated circuit.
Compared with prior art, the present invention has the following advantages: by the differential setting of electric capacity, filtering noise signal (being outside electromagnetic interference) is eliminated or has been weakened the harmful effect that electromagnetic interference is brought, the sensitivity that has improved microphone.
[description of drawings]
Fig. 1 is the cross-sectional schematic of Electret Condencer Microphone of the present invention.
Fig. 2 is the capacitance difference parallel circuit schematic diagram of Electret Condencer Microphone of the present invention.
[embodiment]
Describe concrete structure of the present invention in detail below in conjunction with accompanying drawing.
Electret Condencer Microphone of the present invention is mainly used on the mobile phone, accepts sound and sound is converted into the signal of telecommunication.
Please join Fig. 1 and Fig. 2, Electret Condencer Microphone 10 of the present invention, the vibrating diaphragm 12 that mainly comprises surface-mounted integrated circuit 11, is oppositely arranged with surface-mounted integrated circuit 11, with the back pole plate 13 that vibrating diaphragm 12 is oppositely arranged, vibrating diaphragm 12 is between surface-mounted integrated circuit 11 and back pole plate 13.
Back pole plate 13 is provided with some through holes 131, and these through holes 131 are used to accept external voice, and external voice is delivered on the vibrating diaphragm 12.
Surface-mounted integrated circuit 11 is provided with conductive layer 111 in the face of the part of vibrating diaphragm 12.
For vibrating diaphragm 12 being positioned between surface-mounted integrated circuit 11 and the back pole plate 13, respectively between back pole plate 13 and the vibrating diaphragm 12 and between vibrating diaphragm 12 and the surface-mounted integrated circuit 11 elastic coupling element 14 being set.
When the through hole 131 of external voice by back pole plate 13 was delivered on the vibrating diaphragm 12, vibrating diaphragm 12 produced up-down vibration because of the effect of acoustic pressure, as shown in phantom in Figure 1.Can add fixedly voltage on the conductive layer 111 of back pole plate 13, vibrating diaphragm 12 and surface-mounted integrated circuit 11, and mutually insulated between the conductive layer 111 of back pole plate 13, vibrating diaphragm 12 and surface-mounted integrated circuit 11, like this, after powering up separately, just formed first capacitor C 1 (ginseng Fig. 2) between back pole plate 13 and the vibrating diaphragm 12, form second capacitor C 2 (ginseng Fig. 2) between the conductive layer 111 of vibrating diaphragm 12 and surface-mounted integrated circuit 11, and be arranged in parallel between two electric capacity, the electric capacity after being arranged in parallel is connected to other circuit part of surface-mounted integrated circuit 11.When vibrating diaphragm 12 produces vibration, distance between vibrating diaphragm 12 and the back pole plate 13 and vibrating diaphragm 12 change simultaneously with the distance of the conductive layer 111 of surface-mounted integrated circuit 11, and variable in distance between vibrating diaphragm 12 and the back pole plate 13 and vibrating diaphragm 12 are opposite with the variation of the distance of the conductive layer 111 of surface-mounted integrated circuit 11, promptly, another reduces during an increase, the variation of distance causes the value of first capacitor C 1 and second capacitor C 2 to change, the variation of the value of the electric capacity after in parallel, make and produce electric current in the entire circuit, and this electric current is integrated circuit board and accepts, so microphone 10 converts voice signal to the signal of telecommunication.Conductive part 112 is set on the surface-mounted integrated circuit 11, and in order to be connected with external circuit, the signal of telecommunication that sound is converted transfers out.
Outside electromagnetic interference also is electricity in form, and the electric current that outside electromagnetic interference produces acts on capacitor C 1 and the C2 simultaneously, because the difference effect, this electromagnetic interference is cancelled or is weakened.
In addition, on surface-mounted integrated circuit 11, also can offer sound hole 113, so that sound is delivered on the vibrating diaphragm 12 from surface-mounted integrated circuit 11 sides.
The above only is a better embodiment of the present invention; protection scope of the present invention is not exceeded with above-mentioned execution mode; as long as the equivalence that those of ordinary skills do according to disclosed content is modified or changed, all should include in the protection range of putting down in writing in claims.

Claims (5)

1. Electret Condencer Microphone, mainly comprise: back pole plate, the vibrating diaphragm that is oppositely arranged with back pole plate, the surface-mounted integrated circuit that is oppositely arranged with vibrating diaphragm, it is characterized in that: vibrating diaphragm is between back pole plate and surface-mounted integrated circuit, and mutually insulated between the three, form first electric capacity between vibrating diaphragm and the back pole plate, form second electric capacity between vibrating diaphragm and the surface-mounted integrated circuit, two electric capacity are electrically connected to other circuit on the surface-mounted integrated circuit with difference form.
2. Electret Condencer Microphone as claimed in claim 1, it is characterized in that: this Electret Condencer Microphone is provided with elastic coupling element in addition, this elastic coupling element lays respectively between vibrating diaphragm and the surface-mounted integrated circuit and between vibrating diaphragm and the back pole plate, is used for vibrating diaphragm is positioned between back pole plate and the surface-mounted integrated circuit.
3. Electret Condencer Microphone as claimed in claim 1 is characterized in that: be provided with on the back pole plate some through holes in order to transmission sound to vibrating diaphragm.
4. Electret Condencer Microphone as claimed in claim 1, it is characterized in that: surface-mounted integrated circuit is provided with conductive part and is electrically connected to external circuit.
5. as claim 1 or 3 described Electret Condencer Microphones, it is characterized in that: offer some sound holes on the surface-mounted integrated circuit.
CN2008100682965A 2008-07-04 2008-07-04 Condenser type microphone Expired - Fee Related CN101321413B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008100682965A CN101321413B (en) 2008-07-04 2008-07-04 Condenser type microphone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2008100682965A CN101321413B (en) 2008-07-04 2008-07-04 Condenser type microphone

Publications (2)

Publication Number Publication Date
CN101321413A true CN101321413A (en) 2008-12-10
CN101321413B CN101321413B (en) 2012-03-28

Family

ID=40181162

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100682965A Expired - Fee Related CN101321413B (en) 2008-07-04 2008-07-04 Condenser type microphone

Country Status (1)

Country Link
CN (1) CN101321413B (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102714773A (en) * 2009-11-16 2012-10-03 美国亚德诺半导体公司 Microphone with backplate having specially shaped through-holes
CN102932718A (en) * 2012-11-13 2013-02-13 山东共达电声股份有限公司 Electret microphone picking up differential signals
CN105246013A (en) * 2014-07-11 2016-01-13 晶镁电子股份有限公司 Microphone device
CN106658248A (en) * 2017-01-06 2017-05-10 北京博实联创科技有限公司 Condenser microphone with mutually switched bi-directional and non-directional functions and electronic device
CN103563399B (en) * 2011-03-11 2017-06-09 歌尔股份有限公司 Cmos compatible silicon differential condenser microphone and its manufacture method
CN107666645A (en) * 2017-08-14 2018-02-06 苏州敏芯微电子技术股份有限公司 Differential capacitance type microphone with double diaphragm
CN113784266A (en) * 2020-06-09 2021-12-10 通用微(深圳)科技有限公司 Silicon-based microphone device and electronic equipment
CN113784264A (en) * 2020-06-09 2021-12-10 通用微(深圳)科技有限公司 Silicon-based microphone device and electronic equipment
CN113949979A (en) * 2020-07-17 2022-01-18 通用微(深圳)科技有限公司 Sound collection device, sound processing device and method, device and storage medium

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004010867B3 (en) * 2004-03-05 2005-08-18 Siemens Audiologische Technik Gmbh Matching phases of microphones of hearing aid directional microphone involves matching second signal level to first by varying transition time of output signal from microphone without taking into account sound source position information
CN100571452C (en) * 2006-04-07 2009-12-16 清华大学 Loudspeaker simple tone detecting method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102714773A (en) * 2009-11-16 2012-10-03 美国亚德诺半导体公司 Microphone with backplate having specially shaped through-holes
CN103563399B (en) * 2011-03-11 2017-06-09 歌尔股份有限公司 Cmos compatible silicon differential condenser microphone and its manufacture method
CN102932718A (en) * 2012-11-13 2013-02-13 山东共达电声股份有限公司 Electret microphone picking up differential signals
CN102932718B (en) * 2012-11-13 2015-09-30 山东共达电声股份有限公司 A kind of electret microphone picking up differential signal
CN105246013A (en) * 2014-07-11 2016-01-13 晶镁电子股份有限公司 Microphone device
CN106658248A (en) * 2017-01-06 2017-05-10 北京博实联创科技有限公司 Condenser microphone with mutually switched bi-directional and non-directional functions and electronic device
CN106658248B (en) * 2017-01-06 2019-01-18 北京博实联创科技有限公司 The Electret Condencer Microphone and electronic equipment of double directing property and non-directive exchange function
CN107666645A (en) * 2017-08-14 2018-02-06 苏州敏芯微电子技术股份有限公司 Differential capacitance type microphone with double diaphragm
CN107666645B (en) * 2017-08-14 2020-02-18 苏州敏芯微电子技术股份有限公司 Differential capacitor microphone with double diaphragms
CN113784266A (en) * 2020-06-09 2021-12-10 通用微(深圳)科技有限公司 Silicon-based microphone device and electronic equipment
CN113784264A (en) * 2020-06-09 2021-12-10 通用微(深圳)科技有限公司 Silicon-based microphone device and electronic equipment
CN113949979A (en) * 2020-07-17 2022-01-18 通用微(深圳)科技有限公司 Sound collection device, sound processing device and method, device and storage medium

Also Published As

Publication number Publication date
CN101321413B (en) 2012-03-28

Similar Documents

Publication Publication Date Title
CN101321413B (en) Condenser type microphone
CN102740206B (en) Dual cell mems assembly
CN201438743U (en) microphone
CN101588529A (en) Silica-based condenser microphone and production method thereof
CN104902415A (en) Differential capacitive MEMS (Micro-Electro-Mechanical System) microphone
CN103402160A (en) MEMS (micro electro mechanical system) microphone and work control method of MEMS microphone
CN105050013B (en) A kind of operation control method of MEMS microphone and the MEMS microphone
CN201528409U (en) Micro-electro-mechanical microphone
CN201226591Y (en) Capacitance type microphone
CN101835080B (en) Silicon-based microphone
CN201226594Y (en) Silicon-based capacitance microphone
CN101646120A (en) Capacitance microphone
CN202587368U (en) Micro machine system microphone
CN101959109A (en) Micro-electro-mechanical-system microphone
CN216649990U (en) Capacitance microphone
CN201491261U (en) capacitance microphone
CN205320289U (en) Capacitive microphone
CN201118978Y (en) Electret microphone
CN102291660A (en) Miniature capacitive microphone
CN207603920U (en) A kind of Electret Condencer Microphone
CN204616092U (en) A kind of electret microphone
CN101651919A (en) Silicon capacitance microphone
CN101651918A (en) Capacitance type microphone
US20230171551A1 (en) Silicon-Based Microphone Device And Electronic Device
CN201967086U (en) Microphone

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
DD01 Delivery of document by public notice

Addressee: Patent of Ruisheng acoustic technology (Shenzhen) Co.,Ltd. The person in charge

Document name: payment instructions

DD01 Delivery of document by public notice
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120328

Termination date: 20210704

CF01 Termination of patent right due to non-payment of annual fee