CN101320114A - Production method of frequency domain transmission function shape dynamic tuning optical spectrum wave filter - Google Patents

Abstract

The invention discloses a making method of a frequency domain transmission function shape dynamic tuning spectral filter, the making process of the making method is that an ITO electrode (5), a plurality of polymer micro-rings (P1, P2...Pn) with different radii, polymer claddings (4) and electrode round rings (E1, E2...En) are orderly arranged on the axial grinding plane (1) of a D-shaped fiber which is grinded; the polymer micro-rings with different radii are perpendicularly coupled with fiber cores (2); different bias voltages are applied on each of the polymer micro-rings (P1, P2...Pn) to change the resonance frequency of each of the polymer micro-rings (P1, P2...Pn), and the frequency domain transmission function shape of the filter is dynamically changed through adjusting the bias voltage (V1, V2...Vn) of the polymer micro-rings (P1, P2...Pn). The making method is suitable for making various dynamic flat-channel and power-equalization devices.

Description

The method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter

Technical field

The present invention relates to a kind of method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter, belong to fiber optic communication field.Be particularly useful for dense wave division multipurpose (DWDM) dynamic channel equalization, technical fields such as flat gain optimization.

Background technology

Along with the dual promotion of the market demand and technical progress, the DWDM Fibre Optical Communication Technology develops towards overlength, hypervelocity, high capacity and dynamic configurable networked direction.At present in the DWDM transmission system, because the Insertion Loss of the attenuation of optical fiber, the gain of Erbium-Doped Fiber Amplifier (EDFA) (EDFA), dispersion compensation module (DCM) and the gain of other opticses or loss are all different and different with the signal wavelength, make that each interchannel signal power of dwdm system and signal to noise ratio (S/N ratio) are unbalanced, thereby cause the dwdm system transmission quality to descend.Though in dwdm system, adopted static gain flat filter (GFF) to come luminous power between equalization channel, but the unbalanced constantly accumulation increase of remaining power along with the increase of level connected link, generally after 20 amplifier cascades are used, the gain unevenness degree of fiber amplifier will be up to 10dB, and along with the increase and decrease of channel number, the dirigibility deficiency of GFF equilibrium, so press for a kind of can the dynamically adapting optical fiber link and the dynamic gain flattening wave filter (DGFF) of change in gain, adapt to the dynamic-configuration of wavelength-division system.

At present, the technology that each major company makes the dynamic gain flattening wave filter has MEMS technology, planar S iON technology, slab guide circuit technology etc., yet, the production technology of these dynamic gain flattening wave filters is because the complicacy of its technology and lower yield rate, make the dynamic gain flattening wave filter hold at high price, seriously limited the widespread use of dynamic gain flattening wave filter.

Summary of the invention

Technical matters to be solved by this invention is to reduce the cost of dynamic gain flattening wave filter, and a kind of method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter is provided.

The technical scheme that technical solution problem of the present invention is adopted is:

A kind of method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter, this method for making step:

Step 1, selecting an optical fiber fuse diameter is the step type single mode optical fiber of 1 μ m～10 μ m, the length of step type single mode optical fiber is 1m～5m;

Step 2 is carried out axial grinding to the middle part of step change type single-mode fiber covering in the step 1, and grinding length is 0.5cm～5cm, is ground to apart from optical fiber fuse closest approach 0.5～5 μ m, then polishing;

Step 3 on ground flat, is coated with one deck ITO electrode at the fiber axis after the polishing;

Step 4, on the ITO electrode, the high electrooptical coefficient polymeric material that spin coating one deck 1 μ m～10 μ m are thick, then with the disposable pattern that plots n miniature annulus of photoetching process, utilize reactive ion etching process to etch the micro polymer ring of n various outer diameter, each micro polymer ring and fibre core take place vertical coupled and constitute resonant ring, and the difference of the interior external diameter of micro polymer ring is 1 μ m～10 μ m, n 〉=1, and be integer;

Step 5, on the ITO electrode, spin coating one layer thickness is the high electrooptical coefficient material that the polymeric material of the no electro-optical characteristic of 2 μ m～20 μ m comes filling step 4 to be etched away, and forms polymer;

Step 6 utilizes the corona polarizing method that the micro polymer ring is polarized, and polarizing voltage is 1KV～100KV, and the polarization temperature is the glass temperature of high electrooptical coefficient polymeric material, and the polarization time is 20～200 minutes;

Step 7, on the polymer after polarization, precipitation layer of metal film is etched into the electrode annulus with photoetching process and reactive ion etching process then.

Give birth to different and different that the ratio of the output power of vertical coupled optical fiber fuse and power input will be with input wavelength with the micro polymer environment-development, and reach minimum value at the resonance frequency place, the output power of fibre core and the ratio of power input can be determined by following formula:

$\frac{I_2}{{\mathrm{<figure-callout\; id="1"\; label="I"\; filenames="A20081011677600132.png"\; state="\{\{state\}\}">I</figure-callout>}}_1}=\frac{a^2-2\mathrm{ra}\cos \left(2\mathrm{\&pi;\&beta;}\right)+{\mathrm{<figure-callout\; id="2"\; label="r"\; filenames="A20081011677600132.png"\; state="\{\{state\}\}">r</figure-callout>}}^2}{1-2\mathrm{ra}\cos \left(2\mathrm{\&pi;\&beta;}\right)+r^2{a}^2}$

Wherein a is the loss by one path coefficient, r is the conducting coefficient, β is the one way wave number, the size of β numerical value is directly proportional with light frequency, be inversely proportional to the radius of micro polymer ring, therefore change the resonance frequency of β value and micro polymer ring by radius that changes the micro polymer ring and the bias voltage that is carried on the electro-optic polymer, thereby dynamically change the transition function of spectral filter.

During use, each micro polymer circulating application is added different bias voltages, because the radius of each micro polymer ring is different with being biased voltage, each micro polymer ring will have different resonance frequencies.

The various outer diameter of micro polymer ring is meant the resonance frequency difference of micro polymer ring in the step 4, each micro polymer ring (P1, P2 ... Pn) resonance frequency is f=cm/2 π n _EffR, wherein m is a positive integer, c is the light velocity in the vacuum, n _EffBe each micro polymer ring (P1, P2 ... Pn) effective refractive index, R are each micro polymer ring (P1, P2 ... Pn) external diameter.

Minor increment in the step 4 between the micro polymer ring of various outer diameter is greater than 10 μ m, and the order of each micro polymer ring can be arranged arbitrarily.

The micro polymer ring inner boundary of various outer diameter and outer boundary are tangent with the two edges of the projection of optical fiber fuse on ground flat respectively in the projection on the ground flat in the step 4.

The micro polymer ring of various outer diameter is to make synchronously in the step 4, therefore, has increased the integrated level and the cost performance of device.

Used high electrooptical coefficient polymeric material comprises DISPERSE Red 13/polymethylmethacrylate (DR13/PMMA), Red-1 200/polycarbonate (DR13/PC), mixes that the polymer material therefor is teflon (Teflon), 2-(3-cyano group-4 in lanthanum lead titanates/polymethylmethacrylate (PLT/PMMA), the step 5 in the step 4,5,5-trimethyl-5H-furans-2-Asia third)-malononitrile (being called for short FTC), Mei Site UV15 glue.

Electrode annulus in the step 7 overlaps with the projection of micro polymer ring on ground flat in the projection on the ground flat.Electrode used therein annulus material is gold electrode, silver electrode, copper electrode or aluminium electrode.

Beneficial effect of the present invention is as follows:

The present invention utilizes each micro polymer ring to form the wave filter of different resonance frequencies, and the various combination of these wave filters is made the spectral filter of frequency domain transition function shape dynamic tuning by adjusting each bias voltage.Manufacture craft of the present invention is simple, cost is low, is applicable to the smooth and power equalization device of various dynamic channels, has remarkable dirigibility, and wide model is applied to dynamic gain flattening wave filter (DGFF), adapts to the dynamic-configuration of wavelength-division system.The present invention uses single-mode fiber as matrix, has not only reduced cost, and has effectively reduced the insertion loss of device in optical fiber telecommunications system.

Description of drawings

Fig. 1 is the frequency domain transmission function shape dynamic tuning optical spectrum wave filter vertical view.

Fig. 2 is the A-A sectional view of Fig. 1.

Fig. 3 is the B-B step profile figure of Fig. 1.

Fig. 4 is the C-C sectional view of Fig. 2.

Fig. 5 is the frequency domain transmission function shape dynamic tuning optical spectrum wave filter test pattern.

Embodiment

Below in conjunction with accompanying drawing invention is further specified.

Embodiment one

A kind of method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter:

Step 1 is selected the step type single mode optical fiber that optical fiber fuse 2 diameters are 1 μ m, and the length of step type single mode optical fiber is 1m.

Step 2, axial grinding is carried out at middle part to step change type single-mode fiber covering 3 in the step 1, and grinding length is 0.5cm, is ground to apart from optical fiber fuse 2 closest approaches 0.5 μ m, then the polishing, two ends not means of abrasion as the tail optical fiber of frequency domain transmission function shape dynamic tuning optical spectrum wave filter.

Step 3 utilizes magnetron sputtering method to be coated with one deck ITO electrode 5 on ground flat 1 at the fiber axis after the polishing, and the thickness of ITO electrode is 50nm.

Step 4 is utilized rotation to throw on ITO electrode 5 and is coated with the thick DISPERSE Red 13/polymethyl methacrylate film with high electrooptical coefficient of machine spin coating one deck 1 μ m, etches the little ring of the DISPERSE Red 13/poly methyl methacrylate polymer P1 of 10 different radiis then in oxygen atmosphere with photoetching process and reactive ion etching process, P2 ..., P10, radius is respectively 10 μ m, 11 μ m ..., 20 μ m, micro polymer ring P1, P2 ..., the difference of the interior external diameter of P10 is 1 μ m.

Step 5, on the little ring of DISPERSE Red 13/poly methyl methacrylate polymer, utilize rotation to throw and be coated with DISPERSE Red 13/polymethylmethacrylate that machine spin coating one deck Mei Site UV15 glue comes filling step 4 to be etched away, and as the little ring of DISPERSE Red 13/poly methyl methacrylate polymer P1, P2, P10, the thickness of Mei Site UV15 glue are 2 μ m.

Step 6 utilizes the corona polarizing method that the little ring of DISPERSE Red 13/poly methyl methacrylate polymer is polarized, and polarizing voltage is 1KV, and the polarization temperature is 145 ℃, and the polarization time is 20 minutes.

Step 7 at polymer 4 surface precipitation layer of Au electrodes, is etched into electrode annulus E1 with photoetching process and reactive ion etching process then in oxygen atmosphere, E2 ..., E10.

Test process to above-mentioned device is as follows: with erbium doped fiber laser as light source 7, insert an optoisolator 8, to prevent the excessive unstable operation that causes light source of spectral filter return loss, one end tail optical fiber of the spectral filter 6 of another termination frequency domain transition function shape dynamic tuning of optoisolator 8, other end tail optical fiber is connected with spectral investigator 9.Utilize system architecture shown in Figure 5, be carried in voltage V1 on each resonant ring by change, V2 ..., V10 adjusts the frequency domain transition function, makes the purpose that reaches balanced EDFA gain spectrum.

Embodiment two

A kind of method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter:

Step 1 is selected the step type single mode optical fiber that optical fiber fuse 2 diameters are 10 μ m, and the length of step type single mode optical fiber is 5m.

Step 2, axial grinding is carried out at middle part to step change type single-mode fiber covering 3 in the step 1, and grinding length is 5cm, is ground to apart from optical fiber fuse 2 closest approaches 5 μ m, then the polishing, two ends not means of abrasion as the frequency domain transmission function shape dynamic tuning optical spectrum wave filter tail optical fiber.

Step 3 utilizes vacuum vapor deposition method to be coated with one deck ITO electrode 5 on ground flat 1 at the fiber axis after the polishing, and the thickness of ITO electrode is 80nm.

Step 4, on ito thin film, utilize rotation to throw and be coated with the thick Red-1 200/polycarbonate film of machine spin coating one deck 10 μ m with high electrooptical coefficient, in oxygen atmosphere, etch the little ring of the Red-1 200/carbonate polymer P1 of 3 different radiis then with photoetching process and reactive ion etching process, P2, P3, radius is respectively 200 μ m, 210 μ m, 220 μ m, micro polymer ring P1, P2, the difference of the interior external diameter of P3 is 10 μ m.

Step 5, on the little ring of Red-1 200/carbonate polymer, utilize rotation to throw and be coated with Red-1 200/polycarbonate that machine spin coating one deck teflon comes filling step 4 to be etched away, form the little ring of Red-1 200/carbonate polymer P1, P2, the polymer 4 of P3, the thickness of teflon are 20 μ m.

Step 6 utilizes the corona polarizing method that the little ring of Red-1 200/carbonate polymer is polarized, and polarizing voltage is 100KV, and the polarization temperature is 105 ℃, and the polarization time is 200 minutes.

Step 7 at polymer 4 surface precipitation one deck A1 electrodes, is etched into electrode annulus E1, E2, E3 with photoetching process and reactive ion etching process then in oxygen atmosphere.

Test process to above-mentioned device is as follows: with wavelength-division multiplex/demultiplexing equipment as light source 7, insert an optoisolator 8, to prevent the excessive unstable operation that causes light source of spectral filter return loss, but an end tail optical fiber of the spectral filter 6 of another termination frequency domain transition function shape dynamic tuning of optoisolator 8, other end tail optical fiber is connected with spectral investigator 9.Utilize system architecture shown in Figure 5, be carried in voltage V1 on each resonant ring by change, V2, V3 adjusts the frequency domain transition function, makes each channel power of monitoring on the spectroanalysis instrument 9 about equally.

Embodiment three

A kind of method for making of frequency domain transmission function shape dynamic tuning optical spectrum wave filter:

Step 1 is selected the step type single mode optical fiber that optical fiber fuse 2 diameters are 5 μ m, and the length of step type single mode optical fiber is 2.5m.

Step 2, axial grinding is carried out at middle part to step change type single-mode fiber covering 3 in the step 1, and grinding length is 3cm, is ground to apart from optical fiber fuse 2 closest approaches 2 μ m places, then the polishing, but two ends not means of abrasion as the tail optical fiber of the spectral filter of frequency domain transition function shape dynamic tuning.

Step 3 utilizes ion plating method to be coated with one deck ITO electrode 5 on ground flat 1 at the fiber axis after the polishing, and the thickness of ITO electrode is 100nm.

Step 4, on ito thin film, utilize rotation to throw to be coated with machine coating one deck 5 μ m thick have a high electrooptical coefficient mix lanthanum lead titanates/polymethyl methacrylate film, in oxygen atmosphere, etch 1 with photoetching process and reactive ion etching process then and mix the little ring of lanthanum lead titanates/poly methyl methacrylate polymer P1, radius is 100 μ m, and the difference of the interior external diameter of micro polymer ring P1 is 5 μ m.

Step 5, utilize on above-mentioned device rotation to throw to be coated with that machine spin coating one deck FTC comes that filling step 4 etched away mixes lanthanum lead titanates/polymethylmethacrylate, the polymer 4 of the little ring of lanthanum lead titanates/poly methyl methacrylate polymer P1 is mixed in formation, and the thickness of FTC is 9 μ m.

Step 6 utilizes the corona polarizing method to polarize to mixing the little ring of lanthanum lead titanates/poly methyl methacrylate polymer, and polarizing voltage is 50KV, and the polarization temperature is 105 ℃, and the polarization time is 60 minutes.

Step 7 at polymer 4 surface precipitation one deck Ag electrodes, is etched into miniature toroidal E1 with photoetching process and reactive ion etching process then in oxygen atmosphere.

Test process to above-mentioned device is as follows: with the single channel laser instrument as light source 7, insert an optoisolator 8, to prevent the excessive unstable operation that causes light source of spectral filter return loss, but an end tail optical fiber of the spectral filter 6 of another termination frequency domain transition function shape dynamic tuning of optoisolator 8, other end tail optical fiber is connected with spectral investigator 9.Utilize system architecture shown in Figure 5, the voltage V1 that is carried on each resonant ring by change adjusts the frequency domain transition function, makes the channel power size that monitors on the spectroanalysis instrument 9 meet the demands.

Utilization of the present invention has the ITO of spectrum transparent characteristic and conductive characteristic as bottom electrode, can either provide bias voltage for the miniature resonant ring of polymkeric substance, can not influence vertical coupled effect again.

The present invention uses single-mode fiber as matrix, has not only reduced cost, and has effectively reduced the insertion loss of device in optical fiber telecommunications system.

Claims (9)

1. frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making is characterized in that: this method for making step:

Step 1, selecting an optical fiber fuse (2) diameter is the step type single mode optical fiber of 1 μ m～10 μ m, the length of step type single mode optical fiber is 1m～5m;

Step 2 is carried out axial grinding to the middle part of step change type single-mode fiber covering (3) in the step 1, and grinding length is 0.5cm～5cm, is ground to apart from optical fiber fuse (2) closest approach 0.5 μ m～5 μ m, then polishing;

Step 3 on ground flat (1), is coated with one deck ITO electrode (5) at the fiber axis after the polishing;

Step 4, on ITO electrode (5), the high electrooptical coefficient polymeric material that spin coating one deck 1 μ m～10 μ m are thick, etch the micro polymer ring (P1 of n various outer diameter then with photoetching process and reactive ion etching process, P2 ... Pn), micro polymer ring (P1, P2 ... the difference of interior external diameter Pn) is 1 μ m～10 μ m, n 〉=1, and be integer;

Step 5, on ITO electrode (5), spin coating one layer thickness is the high electrooptical coefficient material that the polymeric material of the no electro-optical characteristic of 2 μ m～20 μ m comes filling step 4 to be etched away, and forms polymer (4);

Step 6 utilizes the corona polarizing method to micro polymer ring (P1, P2 ... Pn) polarize, polarizing voltage is 1KV～100KV, and the polarization temperature is the glass temperature of high electrooptical coefficient polymeric material, and the polarization time is 20～200 minutes;

Step 7 on the polymer (4) after polarization, precipitates the layer of metal film, then with photoetching process and reactive ion etching process be etched into the electrode annulus (E1, E2 ... En).

2. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1, it is characterized in that, micro polymer ring (P1 in the step 4, P2 ... Pn) various outer diameter is meant micro polymer ring (P1, P2 ... Pn) resonance frequency difference, each micro polymer ring (P1, P2 ... Pn) resonance frequency is f=cm/2 π n _EffR, wherein m is a positive integer, c is the light velocity in the vacuum, n _EffBe each micro polymer ring (P1, P2 ... Pn) effective refractive index, R are each micro polymer ring (P1, P2 ... Pn) external diameter.

3. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1, it is characterized in that, micro polymer ring (the P1 of various outer diameter in the step 4, P2 ... Pn) minor increment between is greater than 10 μ m, each micro polymer ring (P1, P2 ... Pn) order can be arranged arbitrarily.

4. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1, it is characterized in that, micro polymer ring (P1, the P2 of various outer diameter in the step 4 ... Pn) inner boundary and outer boundary are tangent with the two edges of the projection of optical fiber fuse (2) on ground flat (1) respectively in the projection on the ground flat (1).

5. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1 is characterized in that, micro polymer ring (P1, the P2 of various outer diameter in the step 4 ... Pn) be to make synchronously.

6. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1, it is characterized in that, electrode annulus (E1 in the step 7, E2, En) projection on ground flat (1) and micro polymer ring (P1, P2 ... Pn) projection on ground flat (1) overlaps.

7. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1 is characterized in that, the electrode used therein annulus (E1, E2 ... En) material is gold electrode, silver electrode, copper electrode or aluminium electrode.

8. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1, it is characterized in that, the used high electrooptical coefficient polymeric material of step 4 comprises DR13/PMMA, DR13/PC, PLT/PMMA, and polymer in the step 5 (4) material therefor is Teflon, FTC, UV15.

9. a kind of frequency domain transmission function shape dynamic tuning optical spectrum wave filter method for making according to claim 1 is characterized in that, with micro polymer ring (P1, P2 ... Pn) output power (I of vertical coupled optical fiber fuse (2) takes place ₂) and power input (I ₁) ratio will be with the difference of input wavelength different, and reach minimum value, the output power (I of fibre core at the resonance frequency place ₂) and power input (I ₁) ratio can determine by following formula:

$\frac{I_2}{I_1}=\frac{a^2-2\mathrm{ra}\cos \left(2\mathrm{\&pi;\&beta;}\right)+r^2}{1-2\mathrm{ra}\cos \left(2\mathrm{\&pi;\&beta;}\right)+r^2{a}^2}$

Wherein a is the loss by one path coefficient, r is the conducting coefficient, β is the one way wave number, the size of β numerical value is directly proportional with light frequency, be inversely proportional to the radius of micro polymer ring, therefore change the resonance frequency of β value and micro polymer ring by radius that changes the micro polymer ring and the bias voltage that is carried on the electro-optic polymer, thereby dynamically change the transition function of spectral filter.

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