CN101310359A - X-ray source, and fluorescent x-ray analyzing device - Google Patents
X-ray source, and fluorescent x-ray analyzing device Download PDFInfo
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- CN101310359A CN101310359A CNA2007800001642A CN200780000164A CN101310359A CN 101310359 A CN101310359 A CN 101310359A CN A2007800001642 A CNA2007800001642 A CN A2007800001642A CN 200780000164 A CN200780000164 A CN 200780000164A CN 101310359 A CN101310359 A CN 101310359A
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Abstract
Provided are an X-ray source for emitting a characteristic X-ray, and a fluorescent X-ray analyzing device using the X-ray source. A secondary target (119) is superimposed on a primary target (118). An electron beam (115) generated by an electron gun (114) is incident on the primary target (118), and this primary target (118) transmits and emits a continuous X-ray. The second target (119) transmits and emits a characteristic X-ray (121), which is excited with the continuous X-ray emitted from the primary target (118). The primary target (118) and the secondary target (119) are superimposed to make the continuous X-ray emitted from the primary target (118), efficient for the excitation of the secondary target (119) thereby to generate the characteristic X-ray (121) efficiently.
Description
Technical field
The present invention relates to the x-ray source of radioactive nature X ray and use this radiogenic fluorescent x-ray analyzer.
Background technology
To the target as anode, radiation a piece of wood serving as a brake to halt a carriage causes (Japanese: X ray and the distinctive characteristic X-ray of target (Japan's patent disclosure 2004-28845 communique for example, the 4th～5th page, Fig. 1～Fig. 2) system Move) to common x-ray source by the electron impact that will quicken with high pressure.
The power spectrum that a piece of wood serving as a brake to halt a carriage causes X ray constitutes continuously and by white, and its spectrum distribution changes because of the electron energy of incident; Characteristic X-ray does not rely on electron energy, is the monochrome of the intrinsic single energy distribution of target.The signal energy of the fluorescent X-ray that radiates when the x-ray fluorescence analysis measurement is incided sample with characteristic X-ray distributes, and identifies kind, the amount of the element in the sample, but is utilized as the various x-ray sources that improve analytical performance and study intensively.
In the fluorescent x-ray analyzer, the characteristic X-ray excitation sample that has known frequency spectrum by utilization, distinguish the signal of fluorescent X-ray and the scattering (noise component(s)) of incident X-rays easily, can do the S/N elementary analysis higher than (signal to noise ratio), so the tentative X ray frequency spectrum of x-ray source radiation that makes is the test near monochromatic frequency spectrum, and its part reaches practical.
Figure 29 is the general figure that forms example that the high-resolution fluorescent x-ray analyzer that utilizes above-mentioned characteristic X-ray is shown.Here, constitute and use common x-ray source 1, the continuous X-rays 2 as 1 X ray of continuum of this x-ray source 1 radiation are incided secondary target 3, make its radioactive nature X ray, by being arranged on outside collimating lens 5, shine sample 6, the element on the surface of sample 6 is encouraged and send fluorescent X-ray 7, and detect this fluorescent X-ray 7 with X-ray detector 8.
In the radiation mode of the characteristic X-ray of this composition, x-ray source 1 and secondary target must be arranged in 3 minutes.Continuous X-rays 2 are toward full Zhou Fangxiang, i.e. 4 π directions radiation, square reducing inversely of its intensity and distance, so in the existing composition, the efficient that the continuous X-rays of x-ray source 2 radiation shine secondary target 3 is low, intensity for the X ray 4 that improves 3 radiation of secondary target need have the big x-ray source 1 of output.Thereby high-resolution fluorescent x-ray analyzer maximizes, and power consumption increases, and X ray shielding scale increases; As a result, cause cost to increase, become the main cause (for example, " present state and perspectives of x-ray fluorescence analysis ", middle wellspring, Applied Physics, 74th volume, No. 4,2005 year, 455th page～456th page) of reinforcement universal restriction.
Figure 30 illustrates the total reflection x-ray fluorescence analysis (TXRF) that significantly is used in recent years check as the semiconductor wafer surface pollution of sample 6, but characteristic X-ray 4 need with semiconductor wafer surface is tried one's best constant and also smaller or equal to 0.1 the degree very little angle incident, so be fit to comprise for example sheet beam shape of the fan beam of fan-shaped.
In the above-mentioned high-resolution fluorescent x-ray analyzer, the x-ray source 1 that provides the energy high efficiency to produce characteristic X-ray 4 becomes important topic.The composition of the secondary target 3 of sample suppresses lowly and characteristic X-ray 4 is kept aspect the radiation of high monochromaticity ground at the ratio of sneaking into non-required component (noise), it is effective method, but existing methods is formed the outside that secondary target 3 is placed on x-ray source 1, continuous X-rays 2 are radiated toward omnirange (4 π direction), so, encourage the utilance of the continuous X-rays 2 of secondary target 3 usefulness to reduce by square decay of distance.The outside of x-ray source 1 also needs to dispose the space of secondary target 3 and monochromatic filter, so the problem that the formation system maximizes.
As this subordinate influence, need must be long with secondary target 3 to the distance setting of sample 6, so in order to ensure the intensity of 4 pairs of samples 6 of characteristic X-ray, require the big x-ray source of using strength, thereby become the main cause that the shielding scale increases, apparatus cost increases that causes X ray.
On the other hand, do one's utmost not contain non-required noise component(s) in the frequency spectrum of the X ray that radiates, further provide the x-ray source of selecting a plurality of characteristic X-rays according to analytic target, these also become problem.
Especially seek and obtain in the semiconductor applications low noise that requires in the high-resolution total reflection x-ray fluorescence analysis of significantly popularizing, be the x-ray source of high monochromaticity, sheet X-ray beam.
The present invention finishes in view of above-mentioned aspect, the fluorescent x-ray analyzer that its purpose is to provide a kind of x-ray source and uses this x-ray source, the fluorescent x-ray analyzer of this x-ray source and this x-ray source of use can high efficiency produce characteristic X-ray and suppress the characteristic X-ray that noise component(s) is blended into radiation, and obtains the suitable for example characteristic X-ray of the sheet beam shape of total reflection x-ray fluorescence analysis easily.
Summary of the invention
X-ray source of the present invention possesses: the electron gun that produces electron beam; From described electron gun incident beam, and the main target that X ray is penetrated and radiate; And the secondary target that is configured to be stacked on the described main target and makes the characteristic X-ray of the x-ray excitation of described main target radiation penetrate and radiate.
X-ray source of the present invention possesses: the vacuum chamber that has the X ray transmissive window; In described vacuum chamber, produce the electron gun of electron beam; Be configured in the described vacuum chamber, and also radiate the main target of X ray from described electron gun incident beam toward reflection direction; And in described vacuum chamber, be configured to with described main target be the center around opposed, and will be by the characteristic X-ray of the x-ray excitation of described main target radiation toward secondary target towards the reflection direction radiation of described X ray transmissive window.
X-ray source of the present invention possesses: the vacuum chamber that has the X ray transmissive window; In described vacuum chamber, produce the electron gun of ring-type electron beam; In described vacuum chamber, be configured to ring-type, and behind the described electron gun incident ring-type electron beam toward the main target of reflection direction radiation X ray; And in described vacuum chamber, be configured to, and will be by the characteristic X-ray of the x-ray excitation of described main target radiation toward secondary target towards the reflection direction radiation of described X ray transmissive window with opposed with the center of described main target.
X-ray source of the present invention possesses: the vacuum chamber that has the X ray transmissive window; Be configured in the electron gun of the earthing potential of the generation electron beam in the described vacuum chamber; In described vacuum chamber, be configured in the position of X ray transmissive window, and also radiate the main target of X ray from described electron gun incident beam toward reflection direction; And the position that in described vacuum chamber, is configured in the X ray transmissive window, and the secondary target that makes the characteristic X-ray of the x-ray excitation of described main target radiation penetrate and radiate.
X-ray source of the present invention possesses: the electron gun that produces electron beam; From described electron gun incident beam, and the main target that X ray is penetrated and radiate; And have and be stacked on the described main target and the X ray of main target is produced position-movable a plurality of secondary target, and the secondary target that the is configured in described X ray occurrence positions secondary target body that makes the X ray by described main target radiation penetrate and radiate.
X-ray source of the present invention possesses: the vacuum chamber that has the X ray transmissive window; In described vacuum chamber, produce the electron gun of electron beam; Target body; And the travel mechanism that the target body in the described vacuum chamber is moved, this target body is configured in the described vacuum chamber, have stacked and make up many groups target portion of different main targets and secondary target, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, and after its secondary target penetrates the characteristic X-ray of the x-ray excitation of main target radiation, from described X ray transmissive window radiation.
X-ray source of the present invention possesses: the vacuum chamber that has the X ray transmissive window; In described vacuum chamber, produce the electron gun of electron beam; Target body; And the travel mechanism that the target body in the described vacuum chamber is moved, this target body is configured in the described vacuum chamber, have stacked and make up many groups target portion of different main targets and secondary target, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, after its secondary target penetrates the characteristic X-ray of the x-ray excitation of main target radiation, from the radiation of described X ray transmissive window, and K β ray is weakened filter and the K alpha ray penetrates and radiates.
X-ray source of the present invention possesses: have the vacuum chamber of being arranged to the mobile x-ray transmissive window; In described vacuum chamber, produce the electron gun of electron beam; And target body, this target body is set at the X ray transmissive window in described vacuum chamber, and have stacked and make up many groups target portion of different main targets and secondary target, utilize moving of described X ray transmissive window, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, and after its secondary target penetrates characteristic X-ray by the x-ray excitation of main target radiation, from described X ray transmissive window radiation.
X-ray source of the present invention possesses: have the vacuum chamber of being arranged to the mobile x-ray transmissive window; In described vacuum chamber, produce the electron gun of electron beam; And target body, this target body is set at the X ray transmissive window in described vacuum chamber, and have stacked and make up many groups target portion of different main targets and secondary target, utilize moving of described X ray transmissive window, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, after its secondary target penetrates the characteristic X-ray of the x-ray excitation that is radiated by main target, from the radiation of described X ray transmissive window, and K β line is weakened filter and K α line penetrates and radiates.
Again, fluorescent x-ray analyzer of the present invention possesses: to sample illumination characteristic X ray, above-mentioned x-ray source; And detect that the element of specimen surface in the described characteristic X-ray of irradiation is encouraged and the X-ray detector of the fluorescent X-ray that sends.
X-ray source of the present invention possesses: vacuum chamber; In described vacuum chamber, produce the electron gun of electron beam; The separating part of the electron beam through-hole that the electron beam that contains the wall portion of separating and be arranged on this wall portion and described electron gun is produced in described vacuum chamber passes through; Be arranged on the electron beam that passes through described electron beam through-hole in the described separating part with incident, and the main target of radiation X ray; Be arranged on the X ray that radiates with the described main target of incident in the described separating part, and the secondary target of radioactive nature X ray; And being arranged on vacuum chamber, and the characteristic X-ray of described secondary target radiation is emitted to outside X ray transmissive window in the face of the mode of described separating part.
Again, fluorescent x-ray analyzer of the present invention possesses: to sample illumination characteristic x-ray source X ray, above-mentioned; And detect that the element of specimen surface in the described characteristic X-ray of irradiation is encouraged and the X-ray detector of the fluorescent X-ray that sends.
Description of drawings
Fig. 1 is the key diagram that the x-ray source of embodiment of the present invention 1 is shown.
Fig. 2 is the key diagram of X ray change action in the target part of this x-ray source of explanation.
Fig. 3 is the key diagram that the x-ray source of embodiment of the present invention 2 is shown.
Fig. 4 is the key diagram of X ray change action in the target part of this x-ray source of explanation.
Fig. 5 is the key diagram that the x-ray source of embodiment of the present invention 3 is shown.
Fig. 6 is the key diagram that the x-ray source of embodiment of the present invention 4 is shown.
Fig. 7 is the key diagram that the x-ray source of embodiment of the present invention 5 is shown.
Fig. 8 is the key diagram that the x-ray source of embodiment of the present invention 6 is shown.
Fig. 9 is the key diagram that the x-ray source of embodiment of the present invention 7 is shown.
Figure 10 A is the key diagram that the x-ray source of embodiment of the present invention 8 is shown.
Figure 10 B is the stereogram that the secondary target body of embodiment of the present invention 8 is shown.
Figure 11 A is the key diagram that the x-ray source of embodiment of the present invention 9 is shown.
Figure 11 B is the stereogram that the secondary target body of embodiment of the present invention 9 is shown.
Figure 12 A is the key diagram that the x-ray source of embodiment of the present invention 10 is shown.
Figure 12 B is the key diagram that the x-ray source of embodiment of the present invention 10 is shown.
Figure 13 is the key diagram that the x-ray source of embodiment of the present invention 11 is shown.
Figure 14 is the key diagram that the x-ray source of embodiment of the present invention 12 is shown.
Figure 15 is the key diagram that the x-ray source of embodiment of the present invention 13 is shown.
Figure 16 is the key diagram that the x-ray source of embodiment of the present invention 14 is shown.
Figure 17 is to use the key diagram of the fluorescent x-ray analyzer of x-ray source of the present invention.
Figure 18 is the key diagram that another routine fluorescent x-ray analyzer of the present invention is shown.
Figure 19 is the key diagram that the x-ray source of embodiment of the present invention 15 is shown.
Figure 20 is the key diagram of the relation of explanation electron gun of this x-ray source and X ray generating unit.
Figure 21 is from the direction of Figure 20 difference 90 degree being watched and illustrated the key diagram of the relation of this radiogenic electron gun and X ray generating unit.
Figure 22 is the key diagram that the x-ray source of embodiment of the present invention 16 is shown.
Figure 23 A illustrates embodiment of the present invention 17 and the energy of electron beam is shown and the key diagram of the relation of intensity.
Figure 23 B illustrates embodiment of the present invention 17 and the energy of electron beam is shown and the key diagram of the relation of intensity.
Figure 23 C illustrates embodiment of the present invention 17 and the energy of electron beam is shown and the key diagram of the relation of intensity.
Figure 23 D illustrates embodiment of the present invention 17 and the energy of electron beam is shown and the key diagram of the relation of intensity.
Figure 24 is the key diagram that the x-ray source of embodiment of the present invention 18 is shown.
Figure 25 is the key diagram of the target of this x-ray source.
Figure 26 is the key diagram that the x-ray source of embodiment of the present invention 19 is shown.
Figure 27 is the key diagram that the x-ray source of embodiment of the present invention 20 is shown.
Figure 28 is to use the key diagram of the fluorescent x-ray analyzer of x-ray source of the present invention.
Figure 29 is the key diagram of existing fluorescent x-ray analyzer.
Figure 30 is the key diagram of existing total reflection fluorescent x-ray analysis method.
Embodiment
Below, with reference to the description of drawings embodiments of the present invention.
Fig. 1 and Fig. 2 illustrate the execution mode 1 of x-ray source.
Among Fig. 1, x-ray source 111 has the vacuum chamber that inside is kept vacuum, and an end of this vacuum chamber configuration X ray transmissive window 113, this X ray transmissive window 113 emit to the outside with X ray.
The other end of vacuum chamber 112 configuration electron gun 114 is being positioned at vacuum chamber and with the end of X ray transmissive window 113 opposed electron guns 114 emitter 116 toward X ray transmissive window 113 electron radiation bundles 115 is being set.Electron gun 114 utilizes driving voltage 117 to produce electron beam 115 and make its acceleration.
The secondary target 119 of configuration in the X ray transmissive window 113, this pair target 119 are vacuum chamber 112 in and electron gun 114 opposed main targets 118 and superimposed and be configured to be close to state in the outside of this main target 118.
As shown in Figure 2, main target 118 incident beams 115, the radiation X ray promptly as 1 X ray continuous X-rays 120, and makes these continuous X-rays 120 be transmitted to secondary target 119.The characteristic X-ray 121 of continuous X-rays 120 excitations that secondary target 119 radiation penetrate and radiate from main target 118, and emit to the outside of vacuum chamber 112 after this characteristic X-ray 121 is penetrated.Characteristic X-ray 121 comprises the long K alpha ray of ripple and the short K β ray of wavelength of K ray.The Beta-ray ratio of K alpha ray and K is about 10: 2.
The electron beam 115 that utilizes driving power 117 to obtain has the energy of the characteristic X-ray 121 (being the Beta-ray K ray of K alpha ray and K) that is enough to encourage and radiate secondary target 119.
In order effectively to carry out secondary target 119 radioactive nature X ray 121, main target 118 to be selected than secondary target 119 element of big 2 on the atom sequence number, this situation is a best of breed.For example, selecting to make main target 118 is the combination of the Co (cobalt) of atom sequence number 27 for the Cu (copper) of atom sequence number 29, secondary target 119.
So, the continuous X-rays 120 of main target 118 radiation penetrate main target 118, in statu quo incide the secondary target 119 that is close on the main target 118, thus can make the minimum of dispersing of the continuous X-rays 120 that in the past depend on distance like that, thus can be used to encourage secondary target 119 expeditiously.
Like this, but the high efficiency radiation small-sized x-ray source 111 as the characteristic X-ray 121 of the energy of purpose can be provided.
Moreover, thickness as main target 118, the degree of depth of past these main target 118 interior infiltrations several microns (μ m) just enough in the electron energy of consideration incident, then also can utilize in the coating surface of secondary target 119 or the structure of electroplating the element of main target 118, be formed on the decay aspect effective configuration of the continuous X-rays 120 that penetrate in the main target 118 of inhibition.
As the example of selecting these 2 targets 118,119, satisfy above-mentioned atom sequence number matching requirements, and secondary target 119 is electrical insulator or Ge (germanium), the such semiconductor of Si (silicon), main target 118 is a conductor, the electric charge savings (charging) that the incident of electron beam 115 causes does not then take place, the energy steady operation.
Then, at Fig. 3 and Fig. 4 execution mode 2 is shown.
This execution mode is formed in the x-ray source 111 of execution mode 1, in the outside of secondary target 119, will weaken as the K β ray of the K alpha ray of the characteristic X-ray 121 that makes secondary target 119, K β ray medium wave length and the K boundary filter 122 of the filter of the long K alpha ray of ripple transmission is superimposed and be configured to be close to state.
These secondary targets 119 and K boundary filter 122 need be selected suitable combination respectively, and the element of K boundary filter 122 is more preferable than little 1 the combination on the atom sequence number of the secondary target 199 of radioactive nature X ray 121.For example, selecting to make secondary target 119 is the combination of the Ni (nickel) of atom sequence number 28 for the Cu (copper) of atom sequence number 29, K boundary filter 122.
So, the effect that K boundary filter 122 has has big abated effect to the K alpha ray of the characteristic X-ray 121 of secondary target 119, the K β ray of K β ray medium wave length, and make the transmission of the long K alpha ray of ripple, so the Alpha-ray ratio of the long K of ripple significantly improves, and can radiate the high characteristic X-ray of monochromaticjty 121.
Like this, can provide K alpha ray ratio height and the good small-sized x-ray source 111 of monochromaticjty in the characteristic X-ray 121 of secondary target 119.
Moreover, in the present embodiment, need be considered as the X ray degree of weakening and the degree of monochromaticity of purpose, to set the thickness of each target 118,119 and K boundary filter 122, but when can not get abundant thickness as X ray transmissive window 133, identical with execution mode 1, also can use Be X ray such as (berylliums) is weakened the little material of rate as the X ray transmissive window 113 and the structure of each target 110,119 of plating, K boundary filter 122 thereon.
Then, Fig. 5 illustrates execution mode 3.
This execution mode is formed in the composition of the x-ray source 111 identical with execution mode 1, be taken as the main target 118 of incident beam 115 coniform, and be configured on the axis of electron beam 115 opposed with electron gun 114, and secondary target 119 is taken as tubular, and be configured to the axis (promptly main target 118) with electron beam 115 be on the concentric circles at center with main target 118 around opposed.Constitute the surperficial parallel of the inner peripheral surface of secondary target 119 and for example cone shape main target 188, will be from the characteristic X-ray 121 of continuous X-rays 120 excitations of main target incident toward reflection directions radiation towards X ray transmissive window 113.
So the electron beam 115 that electron gun 114 produces incides the surface of cone shape main target 118 by the opening of the central authorities of secondary target 119, from the surface of this main target 118 toward reflection direction radiation continuous X-rays 120 towards the inner peripheral surface of secondary target 119.The characteristic X-ray 121 of main target 118 radiation incides the inner peripheral surface of secondary target 119, from the inner peripheral surface of this pair target 119 with characteristic X-ray 121 toward reflection directions radiation towards X ray transmissive window 113.The characteristic X-ray 121 of secondary target 119 radiation penetrates X ray transmissive window 115, emits to the outside.
In the case, the distance of main target 118 and secondary target 119 is than long in the composition of execution mode 1, irradiation, launching efficiency to secondary target 119 reduce, but by main target 118 of configuration and secondary target 119 in vacuum chamber 112, can shorten the distance of main target 118 and secondary target 119, the continuous X-rays 120 that can expeditiously main target 118 be radiated are used to encourage secondary target 119, thereby can produce characteristic X-ray 121 expeditiously.And main target 110 and secondary target 119 all have any thickness, can be with the big overall structure of thermal capacity, so than the transmission mode of execution mode 1 superior aspect the heat shock resistance, can set the incident beam magnitude of current greatly, the characteristic X-ray 121 of the big output of radiation.
When the incident beam magnitude of current is increased, can adopt main target 118 is implemented water-cooled (secondary as required target 119 is water-cooled also) thereby the structure that thermal endurance is further improved.
Like this, can provide the durability of also guaranteeing each target 118,119 under the big current condition and can radiate the small-sized x-ray source 111 of the characteristic X-ray 121 of big output.
Then, Fig. 6 illustrates execution mode 4.
This execution mode is formed in the x-ray source 111 of composition of execution mode 3, at the arranged outside K of X ray transmissive window 113 boundary filter 122.
So, the effect that K boundary filter 122 has has big abated effect to the K alpha ray of the characteristic X-ray 121 of secondary target 119, the K β ray of K β ray medium wave length, and make the transmission of the long K alpha ray of ripple, so the Alpha-ray ratio of the long K of ripple significantly improves, and can radiate the high characteristic X-ray of monochromaticjty 121.
Like this, can provide the durability of also guaranteeing each target 118,119 under the big current condition also can further improve the small-sized x-ray source 111 of the characteristic X-ray 121 of monochromaticjty and the big output of radiation.
Then, Fig. 7 illustrates execution mode 5.
This execution mode is formed in the composition of the x-ray source 111 identical with execution mode 3, the emitter 116 of electron gun 114 is taken as the ring-type that produces ring-type electron beam 115, again main target 118 is taken as the ring-type with the axis coaxle of ring-type electron beam 115, is configured at the inner peripheral surface of the center of main target 118 and this main target 118 secondary target 119 opposed.The inner peripheral surface of main target 118 is towards electron gun expansion and the inclined plane that tilts, toward the reflection direction radiation continuous X-rays 120 towards the secondary target 119 at center.Constitute secondary target 119 for coniform, it is configured to the top towards X ray transmissive window 113, and the surface of secondary target 119 is parallel with the inner peripheral surface of main target 118, and the characteristic X-ray 121 that will encourage from the continuous X-rays 120 of main target 118 incidents is toward the reflection directions radiation towards X ray transmissive window 113.
So, the ring-type electron beam 115 that electron gun produces is by around the main target 118, incide the inner peripheral surface of main target 118, the continuous X-rays 120 of main target 118 radiation incide the inner peripheral surface of secondary target 119, from interior all machines of this pair target 119 with characteristic X-ray 121 toward reflection directions radiation towards X ray transmissive window 113.The characteristic X-ray 121 of secondary target 119 radiation penetrates X ray transmissive window 115, emits to the outside.
In the case, the distance of main target 118 and secondary target 119 is than long in the composition of execution mode 1, irradiation, launching efficiency to secondary target 119 reduce, but by main target 118 of configuration and secondary target 119 in vacuum chamber 112, can shorten the distance of main target 118 and secondary target 119, the continuous X-rays 120 that can expeditiously main target 118 be radiated are used to encourage secondary target 119, thereby can produce characteristic X-ray 121 expeditiously.
Again, identical with execution mode 3, main target 110 energy heat-obtainings structure capacious can be cooled off easily by vacuum chamber 112 and X ray transmissive window 113, thereby can increase electric current, the energy of incident electron, have the advantage that increases the continuous X-rays 120 that produce and make characteristic X-ray 121 increases thereupon.The origination point that can also make characteristic X-ray 121 is a spot shape, make main target 118 play the collimating lens of the expansion of suppression characteristic X ray 121 again, thereby can emit characteristic X-ray 121 with the little pencil of the angle of divergence, have the advantage that can reduce background that check point is caused with the external radiation exposure X ray.
Like this, can provide can quantity of X-rays X is big characteristic X-ray 121 emit small-sized x-ray source 111 into pencil.
Then, Fig. 8 illustrates execution mode 6.
This execution mode is formed in the x-ray source 111 of execution mode 5, K boundary filter 122 is arranged on the outside of X ray transmissive window 113.
So, the effect that K boundary filter 122 has has big abated effect to the K alpha ray of the characteristic X-ray 121 of secondary target 119, the K β ray of K β ray medium wave length, and make the transmission of the long K alpha ray of ripple, so the Alpha-ray ratio of the long K of ripple significantly improves, and can radiate the high characteristic X-ray of monochromaticjty 121.
Like this, can provide and to improve monochromaticjty and the characteristic X-ray 121 that quantity of X-rays X is big and emit small-sized x-ray source 111 into pencil.
Then, Fig. 9 illustrates execution mode 7.
This execution mode constitutes opposite with the composition of the respective embodiments described above, electron gun 114 is taken as earthing potential, and main target 118 is placed high-voltage.
At the secondary target 119 of X ray transmissive window 113 configurations, the outside configuration K boundary filter 122 of this secondary target 119.
So the electron beam 115 that ring-type electron gun 114 produces incides the surface of the main target 118 of truncated cone shape, from the surface of this main target 118 toward reflection direction radiation continuous X-rays 120 towards the secondary target 119 of X ray transmissive window 113.The continuous X-rays 120 of main target 118 radiation incide secondary target 119, from these pair target 119 transmissions and emit characteristic X-ray 121.
After the characteristic X-ray 121 of secondary target 119 radiation penetrates the K boundary filter 122 of X ray transmissive window 113, emit to the outside.
In the case, the distance of main target 118 and secondary target 119 is than long in the composition of execution mode 1, irradiation, launching efficiency to secondary target 119 reduce, but by main target 118 of configuration and secondary target 119 in vacuum chamber 112, can shorten the distance of main target 118 and secondary target 119, the continuous X-rays 120 that can expeditiously main target 118 be radiated are used to encourage secondary target 119, thereby can produce characteristic X-ray 121 expeditiously.
Again, identical with execution mode 3, main target 110 can heat-obtainings structure capacious, thereby can increase electric current, the energy of incident electron, has the advantage that increases the continuous X-rays 120 that produce and make characteristic X-ray 121 increases thereupon.
Like this, can provide the characteristic X-ray 121 that can radiate expeditiously as the energy of purpose.
Moreover, also can constitute the good material of the X ray transmissison characteristic that Be (beryllium) is such as X ray transmissive window 113, and paste K boundary filter 122 at the outside of this X ray transmissive window 113 dress.
Then, Figure 10 A, 10B illustrate execution mode 8.
This execution mode has stack and is configured in the secondary target body 131 in the outside of main target 118 in the composition of the x-ray source 11 identical with execution mode 1.This secondary target body 131 has a plurality of secondary target 119a, 119b, 119 α, the 119d of the characteristic X-ray 121 that for example can produce different energy, and these secondary target 119a～119d is arranged on equally spaced to make to be on the same circumference of rotary body 133 of center rotation with rotating shaft 132.
The rotating shaft 132 of rotary body 133 can be rotated by unshowned rotating mechanism as travel mechanism, with overlapping with main target 118 and produce the mode of the position of X ray at main target 118, disposes any among secondary target 119a～119d selectively.
So, possess a plurality of secondary target 119a～119d, and to any 1 among the secondary target 119a～119d of position configuration of main target 118 generation X ray, thereby needn't be for exchanging secondary target mobile x-ray source 111, so have the characteristic X-ray 121 of emitting different energy easily, and do not change the advantage that X ray produces point.This point is when being used for fluorescent x-ray analyzer with x-ray source 111, and the measurement system ground that can not confound X ray generation point or sample position etc. is analyzed.
Like this, can provide and select and radiate the characteristic X-ray 121 of different energy and do not change the small-sized x-ray source 111 that X ray produces point.
Then, Figure 11 A, Figure 11 B illustrate execution mode 9.
This execution mode possesses the filtering body 135 in the outside that is configured in secondary target body 131 in the x-ray source 111 of execution mode 8.This filtering body 135 for example has corresponding K boundary filter 122a, 122b, 122c, the 122d as filter of each secondary target 119a～119d with the characteristic X-ray 121 that produces different energy, and with these K boundary filters 122a～122d be arranged on make can with rotating shaft 132 be on the same circumference of the rotary body 136 that rotates of center with each corresponding position of secondary target 119a～119d.The disk of rotary body 136 being made of one of the rotary body 133 of secondary target body 131 and filtering body 135 also can be can be disk separately.
So, to any 1 among the secondary target 119a～119d of the position configuration of the generation X ray of main target 118, thereby needn't be for exchanging secondary target or exchange K boundary filter 122a～122d mobile x-ray source 111, so it is identical with execution mode 8, also have the characteristic X-ray 121 of emitting different energy easily, and do not change the advantage that X ray produces point.
And, the effect that K boundary filter 122a～122d has has big abated effect to the K alpha ray of the characteristic X-ray 121 of secondary target 119, the K β ray of K β ray medium wave length, and make the transmission of the long K alpha ray of ripple, so the Alpha-ray ratio of the long K of ripple significantly improves, and can radiate the high characteristic X-ray of monochromaticjty 121.
Like this, can provide and to select and to radiate the characteristic X-ray 121 of different-energy and do not change the small-sized x-ray source 111 that X ray produces point and obtains the high characteristic X-ray of monochromaticjty 121.
Then, Figure 12 A, Figure 12 B illustrate execution mode 10.
This execution mode possesses the target body 141 that rotatably is configured in the vacuum chamber 112 in the composition of the x-ray source 111 identical with execution mode 1.This target body 141 has stacked and makes up different main target 118a, 118b, 118c, 118d and suitable secondary target 119a, 119b, 119c, many groups target 142a of portion of 119d, 142b, 142c, 142d, and equally spaced to be arranged on these main target 118a～118d and secondary target 119a～119d with rotating shaft 143 be same position on the same circumference of rotary body 144,145 of center rotation.Rotary body 144 and rotary body 145 can being made of one disk, also can be disk separately.
Be provided as the rotating mechanism 146 that makes the travel mechanism of target body 141 rotations in the vacuum chamber 122 from the outside of vacuum chamber 112.
So, configuration target body 141, making arbitrary group among many group target 142a～142d of portion is the center with rotating shaft 143, electron beam incident position from electron gun 114 incident beams 115 is rotated, thereby the main target 118a～118d that is configured in the 142a～142d of target portion of electron beam incident position makes continuous X-rays 120 penetrate and radiate because of the incident of electron beam 115, and secondary target 119a～119d penetrates the characteristic X-ray 121 of continuous X-rays 120 excitations of main target 118a～118d radiation and from 113 radiation of X ray transmissive window.
Utilize to select the target 142a～142d of portion, emit the characteristic X-ray 121 of the energy of selection easily, and needn't exchange x-ray source 111 during this selections, have and to make the X ray generation put a constant advantage.
And, constitute and to make independently X ray transmissive window 113 with the function of vacuum dividing plate, so can select the thickness of main target 118a～118d, secondary target 119a～119d arbitrarily.
Like this, can provide the small-sized x-ray source 111 that to select and to radiate some characteristic X-rays 121 and not change X ray generation point.
Then, Figure 13 illustrates execution mode 11.
This execution mode possesses the filtering body 148 in the outside that is configured in secondary target body 131 in the x-ray source 111 of execution mode 10.This filtering body 148 has K boundary filter 122a, 122b, 122c, the 122d corresponding with each 142a～142d of target portion, and with these K boundary filters 122a～122d be arranged on make can with rotating shaft 143 be on the same circumference of rotary body 149 of center rotation with each corresponding position of secondary target 119a～119d.Rotating shaft 143 is arranged to connect X ray transmissive window 113.
So, has K boundary filter 122a～122d, and secondary target 119a～119d and the K boundary filter 122a～122d overlapping with main target 118a～118d rotate with being integrated, thereby have the advantage that can select and radiate the some characteristic X-rays 121 that improve monochromaticjty.
Like this, can provide the small-sized x-ray source 111 that to select and to radiate the high some characteristic X-rays 121 of monochromaticjty and not change X ray generation point.
Then, Figure 14 illustrates execution mode 12.
This execution mode is in the x-ray source 111 of execution mode 11, and target body 141 has stacked and makes up different main target 118a, 118b, 118c, 118d and suitable secondary target 119a, 119b, 119c, many groups target 142a of portion of 119d, 142b, 142c, 142d.
So, secondary target 119a～119d and the K boundary filter 122a～122d overlapping with main target 118a～118d rotate with being integrated, thereby obtain energy difference and the high characteristic X-ray 121 of monochromaticjty, simultaneously also because rotation with being integrated, the outside of x-ray source 111 does not have drive division, so have further raising reliability and x-ray source 111 can be arranged to advantage near x-ray source 111.
Like this, can provide and to select and to radiate the high some characteristic X-rays 121 of monochromaticjty and do not change X ray and produce point and the high small-sized x-ray source 111 of reliability.
Moreover in the respective embodiments described above, each 142a～142d of target portion rotates mobile being not limited to of electron beam incident position, also can be slip.
Then, the above-mentioned execution mode 13 of Figure 15.
This execution mode is in the composition of the x-ray source 111 identical with execution mode 8, and X ray transmissive window 113 is constituted can be to vacuum chamber 112 rotations.Inner surface in X ray transmissive window 133 forms target body 141, and this target body 141 has stacked and makes up different main target 118a, 118b, 118c, 118d and suitable secondary target 119a, 119b, 119c, many groups target 142a of portion of 119d, 142b, 142c, 142d.
So, target body 141 can utilize the rotation of X ray transmissive window 113, to organize arbitrary target portion the 142a～142d of target portion from the electron beam incident position configuration of electron gun 114 incident beams 115 more, the main target 118a～118b that is configured in the 142a～142d of target portion of electron beam incident position makes continuous X-rays 120 penetrate and radiate because of the incident of electron beam 115, and secondary target 119a～119d penetrates the characteristic X-ray 121 of continuous X-rays 120 excitations of main target 118a～118d radiation and from 113 radiation of X ray transmissive window.
Utilize and select the target 142a～142d of portion, emit the characteristic X-ray 121 of the energy of selection easily, and by target body 141 is rotated with being integrated, the main target 118a～118d that is subjected to electron beam 115 heating has the advantage that the life-span prolongs because of the heat transfer of X ray transmissive window 113 obtains cooling.
Like this, can provide the small-sized x-ray source 111 that to select and to radiate the high some characteristic X-rays 121 of monochromaticjty and not change X ray generation point and life-span length.
Then, Figure 16 illustrates execution mode 14.
This execution mode is in the x-ray source 111 of execution mode 13, and target body 141 has stacked and makes up different main target 118a, 118b, 118c, 118d and suitable secondary target 119a, 119b, 119c, many groups target 142a of portion of 119d, 142b, 142c, 142d.
So, secondary target 119a～119d and the K boundary filter 122a～122d overlapping with main target 118a～118d rotate with being integrated, thereby obtain the high characteristic X-ray of different energy and monochromaticjty 121, simultaneously also because rotation with being integrated, the main target 118a～118d that is subjected to electron beam 115 heating has the advantage that the life-span prolongs because of the heat transfer of X ray transmissive window 113 obtains cooling.
Like this, can provide the small-sized x-ray source 111 that to select and to radiate the high some characteristic X-rays 121 of monochromaticjty and not change X ray generation point and life-span length.
Then, Figure 17 illustrates the fluorescent x-ray analyzer 161 of the x-ray source 111 that uses the respective embodiments described above.
The characteristic X-ray 121 that fluorescent x-ray analyzer 161 constitutes x-ray source 111 radiation shines sample 162, the element that makes the surface of this sample 162 is encouraged and the fluorescent X-ray 163 that sends, this fluorescent X-ray 163 is by behind the collimating lens 163, caught by energy identifying X-ray detector 165, to carry out elementary analysis.
So, the x-ray source 111 that is used for fluorescent x-ray analyzer 161, the principal component of its power spectrum is the characteristic X-ray (K alpha ray, K β ray) 121 of secondary target 119a～119d, catches this ray the surface of sample 162 is encouraged and the fluorescent X-ray 163 of emitting, just can the analytical element composition.
At this moment, the frequency spectrum of characteristic X-ray 121 with excitation is stored in the analytical equipment in advance, obtains the relation of resulting fluorescence signal and excitation density in view of the above, then can carry out the quantitative analysis of the surface-element of the good sample of precision 162 according to fluorescence signal intensity.
If use main target 118a～118d and the secondary target 119a～119d or the K boundary filter 112a～112d of rotation, the energy of the characteristic X-ray 121 that the atoms of elements sequence number selection that just can contain according to the sample 162 as object is used to encourage, and do not exchange x-ray source 111.
Like this, utilize the x-ray source 111 of energy high efficiency radioactive nature X ray 121, high-resolution fluorescent x ray analytical equipment 161 can be provided.
Then, Figure 18 illustrates another routine fluorescent x-ray analyzer 161.
These fluorescent x ray analytical equipment 161 formations possess a plurality of x-ray sources 111, characteristic X-ray 121 irradiation samples 162 with wherein any radiation, and, catch fluorescent X-ray 153 at energy identifying X-ray detector 165 by collimating lens 164, carry out elementary analysis.
So, identical with above-mentioned fluorescent x-ray analyzer 161, the characteristic X-ray (K alpha ray, K β ray) 121 that can catch an x-ray source 111 of use is encouraged the surface-element of sample 162 and the fluorescent X-ray 163 of emitting, the analysis element composition, but can analyze by switching to, analyze the elemental composition of atom sequence number on a large scale at short notice from the characteristic X-ray 121 of another x-ray source 111.
Like this, utilize the x-ray source 111 of energy high efficiency radioactive nature X ray 121, the fluorescent x ray analytical equipment that can do the high-resolution elementary analysis at short notice can be provided.
Figure 19 to Figure 21 illustrates execution mode 15.
X-ray source 211 has the vacuum chamber 212 that keeps inner vacuum, in the configuration of the side of these vacuum chamber 212 1 ends X ray is emitted to outside X ray transmissive window 213.
The other end of vacuum chamber 212 configuration electron gun 214 is provided as the filament 216 of emitter of a distolateral electron radiation bundle 215 of past vacuum chamber 212 in the end of the electron gun 214 that is positioned at vacuum chamber 212.Filament 216 forms wire, can radiate the electron beam 215 of elongated wire.Driving power 217 makes electron gun 214 produce electron beam 215, and makes its acceleration.
One distolateral in vacuum chamber 212 is divided into the X ray generating unit 221 of box-shaped.
This X ray generating unit 221 forms separating part 223 by the wall portion 222 of separating in vacuum chamber 212.Wall portion 222 with 214 opposed in electron gun on, the shape of the electron beam 215 of the wire that produces with electron gun 214 forms the slot-shaped electron beam through-hole 224 that this electron beam 215 can pass through easily accordingly.At the face that the hand-deliver to electron beam through-hole 224 is set of separating part 223 is pitched, configuration X ray transmissive window 213.
In the separating part 223 with electron beam through-hole 224 opposed inner surfaces on, main target 226 is set, the most inner surface in the inner surface in separating part 223 except that main target 226 is provided with the secondary target 227 of box-shaped.
The continuous X-rays 228 of secondary target 227 incident master targets 226 radiation, and radiate 2 X ray, promptly radiate characteristic X-ray 229 as the K ray.The shape of the electron beam 215 of the wire that produces with electron gun 214 on the secondary target 227 forms the slot-shaped electron beam through-hole 230 that this electron beam 215 can pass through easily accordingly, to the hand-deliver fork that forms this electron beam through-hole 230 and with 213 opposed of X ray transmissive window, form the X ray through hole 231 of radioactive nature X ray 229.X ray through hole 231 forms the shape in elongated gap shape hole, so that emit the characteristic X-ray 229 of sheet beam shape, continuous X-rays 228 is not sneaked into.
Shape according to the electron beam 215 of the electron beam through-hole 230 by secondary target 227 also is taken as elongated wire with main target 226, when formation is carried out high-intensity electron beam incident, can main target 226 be installed at the anode construction thing with cooling jacket, carries out heat extraction.
So,, incide and be arranged to opposed main target 226 with it because of apply electron beam 215 that voltage radiates electron beam through-hole 230 from 217 pairs of electron guns 214 of driving power by the secondary target 227 of box-shaped.At this moment, the opposed secondary target 227 of continuous X-rays 228 irradiations of main target 226 radiation, thus encourage secondary target 227, radioactive nature X ray 229.Only make the component of the characteristic X-ray 229 that radiates with the surperficial little angle of leaving secondary target 227 pass through X ray through hole 231, and emit to the outside by X ray transmissive window 213.
The x-ray source 211 of the characteristic X-ray 229 of the acquisition characteristic X-ray that inhibition will the utilize 229 sheet beam shape that noise component(s) is in addition sneaked into can be provided like this.
Moreover, the secondary target 227 of box-shaped not all constituent material be taken as secondary target material, for example that stainless steel is such common material only pastes secondary target material paper tinsel or applies plating in the inner surface portion packing of continuous X-rays 228 incidents as main constituent material, and such structure also can adapt to.
Then, Figure 22 illustrates execution mode 16.
This execution mode is in the x-ray source 211 of execution mode 1, formation is used multiple material (element) to main target 226a, 226b, 226c, and opposed secondary target 227a, 227b, the 227c of the irradiation that is subjected to continuous X-rays 228 simultaneously also used multiple material (atom).
When utilizing the excitation of X ray, the main target 226a of the continuous X-rays 228 of the secondary target 227 of radiation excitation～226c uses big 2 the element on the atom sequence number than secondary target 227a～227c, can the most effectively utilize the characteristic X-ray 229 of its radiation, encourages secondary target 227.
Therefore, when obtaining using a plurality of secondary target 227a～227c, need to select main target 226a～226c to the element that encourages each element the best as the characteristic X-ray 229 of purpose.
As an example, can adopt as the main target 226a～226c that to secondary target 227a～227b is titanium (Ti: characteristic X-ray K α energy is 4.5keV) is chromium (Cr: characteristic X-ray K α energy is 5.4keV), as the main target 226a～226c that to secondary target 227a～227b is molybdenum (Mo: characteristic X-ray K α energy is 17.5keV) is rhodium (Rh: characteristic X-ray K α energy is 20.2keV), is chromium tantalum combinations such as (Ta: characteristic X-ray K α energy are 57.5keV) as the main target 226a～226c that is gadolinium (Gd: characteristic X-ray K α energy is 43keV) to secondary target 227a～227b.Thereby, can radiate the X-ray beam that comprises Cr, Mo, this 3 specific character X ray (4.5keV, 17.5keV, 43keV) of Gd simultaneously.
In view of the above, in the x-ray fluorescence analysis, when utilizing the X ray of single energy to encourage, the kind of the element that this ray can encourage is limited, but can use the X ray that comprises a plurality of monochromatic energy component that cover low-yield zone to high-energy, thereby can enlarge the elementary analysis district and adopted.
Like this, can provide that to radiate noise component(s) little and comprise the x-ray source 211 of characteristic X-ray 229 of the characteristic X-ray frequency spectrum of multiple energy.
Then, Figure 23 A, 23B, 23C, Figure 23 D illustrate execution mode 17.
This execution mode is in the x-ray source 211 about execution mode 16, contains the method for work of x-ray source 211 of structure of the combination of a plurality of main target 226a～226c and a plurality of secondary target 227a～227c.
Will encourage most effectively when selecting the secondary target 227a of the continuous X-rays 228 of main target 226a～226c radiation～227c with compound mode, the electron beam 215 that shines main target 226a～226c importantly has the abundant energy that main target 226a～226c fully radiates continuous X-rays 228 usefulness.
When encouraging, generally can radiate the continuous X-rays 228 of main target 226a～226c most effectively, thereby can radiate the characteristic X-ray 229 of secondary target 227a～227c most effectively with the electron beam 215 of 2 to 3 times energy of the K ray energy of main target 226a～226c.
Otherwise when the continuous X-rays 228 of next autonomous target 226a～226c did not reach the K shell absorption edge energy of secondary target 227a～227c, secondary target 227a～227c can not the radioactive nature X ray.
Utilize this feature, can form the method for work of adjusting the accelerating voltage (being the energy of electron beam 215) of electron beam 215 according to the energy of the characteristic X-ray of selecting 229.
Figure 23 A, Figure 23 B, Figure 23 C, Figure 23 D illustrate the control method of spectrum distribution of the characteristic X-ray 229 of radiation.Improve supply voltage, and when encouraging with high-octane electron beam 215, shown in target D etc., carry out the excitation of the high main target 226a～226c of atom sequence number most effectively, can improve the intensity of the characteristic X-ray 229 of its secondary target 227a that brings～227c radiation, otherwise, shown in target A etc., the intensity of the continuous X-rays 228 of the main target 226a that the atom sequence number is low～226c radiation is low, so low from the intensity of the characteristic X-ray 229 of the secondary target 227a～227c of combination.
Because supply voltage is reduced, shown in target D or C etc., the spectrum intensity of the characteristic X-ray 229 of high-energy side reduces specifically, and shown in target C or B etc., the spectrum intensity of low-yield side's characteristic X-ray 229 increases.When also continuing to reduce supply voltage, shown in target D and C, the frequency spectrum of high-energy side almost disappears, and shown in target B or A, can only radiate low-yield side's X ray frequency spectrum.
In the x-ray fluorescence analysis, by controlling this X ray spectrum distribution, to the signal of the fluorescent X-ray of the sample of differentiating the element that comes the paramount atom sequence number of self-contained low atom sequence number and to obtain correct analysis result effective.
Like this, can provide and to adjust the x-ray source 211 of spectrum distribution of the characteristic X-ray 229 of radiation with radiating the little and x-ray source 211 of characteristic X-ray 229 that comprise the characteristic X-ray frequency spectrum of multiple energy of noise component(s).
Then, Figure 24 and Figure 25 illustrate execution mode 18.
In the x-ray source 211 of execution mode 16, can radiate characteristic X-ray 229 simultaneously from a plurality of main target 226a～226c and secondary target 227a～227c, but electron beam 215 disperses to shine main target 226a～226c that quantity is set, so unfavorable aspect the intensity that strengthens each characteristic X-ray 229.
In this execution mode 18, use a plurality of X ray generating unit 221a～221d, and they are arranged on the same circumference of the turntable 242 that is rotated by rotating mechanism 241 as many groups unit of the main target 226a～226d of combination and secondary target 227a～227d.Utilize rotating mechanism 241 to select X ray generating unit 221a～221d arbitrarily, its electron beam incident position to electron beam 215 incidents is moved, thereby can change the characteristic X-ray 229 of radiation.
The exchange mouth 243 of interchangeable X ray generating unit 221a～221d is set in the vacuum chamber 212, and configuration is to carrying out the vacuum pump 244 of exhaust in the vacuum chamber 212.Therefore, during the X ray energy change of needs, can exchange and use X ray generating unit 221a～221d.
By adopting this structure, the characteristic X-ray 229 of energy selective emission also utilizes successively.In the x-ray fluorescence analysis, illumination characteristic X ray 229 and analyzing is effective aspect the element evaluation of correctly carrying out in the sample so one by one.
Like this, can provide the x-ray source 211 that to select and to emit little and many characteristic X-rays 229 that intensity is high of noise component(s) arbitrarily.
Then, Figure 26 illustrates execution mode 19.
This execution mode is formed in the x-ray source 211 of execution mode 16, and the deflecting magnet 252 of electron beam deflecting parts 251 is set by the upstream portion of direction as the electron beam of the electron beam through-hole 230 of the electron beam through-hole 224 of the wall portion 222 of the separating part 233 of anode and secondary target 227a～227c.
In this structure, electromagnet when the deflecting magnet 252, can be become electron beam 215a, electron beam 215b, electron beam 215c such the orbit transfer of electron beam 215 by controlling magnetic field intensity, thereby can shine different main target 226a～226c respectively.
When permanent magnet is used as deflecting magnet 252, changes the energy of the electron beam 215 that passes through, thereby orbit transfer can be become electron beam 215a～215c such equally again.
When reducing the voltage of driving power 217 and utilizing low energy electrons bundle 215, form the crooked like that big track of electron beam 215c, purpose master target 226c is set in its terminal with identical magnetic field intensity.Equally, for high-octane electron beam 215, as electron beam 215b, electron beam 215a, the track deflection diminishes, and in separately terminal main target 226b, 226a is set.By adopting this structure, electron beam can be according to the different main target of voltage irradiation of driving power 217, so can activity be higher than the continuous X-rays 228 to this intensity in the structure of the embodiment 2 of multiple main target irradiating electron beam simultaneously.Thereby, can further emphasize to carry out the X ray spectrum distribution that obtains behind the control voltage shown in the execution mode 17 strong and weakly.
Like this, can provide the x-ray source 211 that noise component(s) is little and can utilize voltage control to comprise the spectrum distribution of multifrequency nature X ray 229 not only but also emit.
Then, Figure 27 illustrates execution mode 20.
This execution mode in the composition of the x-ray source 211 of execution mode 19, further formation main target 226a～226c and secondary target 227a～227c are distributed one by one, as the X ray generating unit 221a～221c of unit independently.The track of electron beam 215 is deflected magnet 252 bendings, incides main target 226a～226c of X ray generating unit 221a～221c arbitrarily.
For example, when formation is set the magnetic field intensity of the energy of electron beam 215a and deflecting magnet 252 for to X ray generating unit 221a main target 226a incident beam 215a, the continuous X-rays 228 that incide the main target 226a of X ray generating unit 221a encourage the independently secondary target 227a of box-shaped, and secondary target 227b, the 227c to other X ray generating unit 221b, 221c do not carry out incident and excitation.Thereby, during any radioactive nature X ray 229 among each X ray generating unit 221a～221c, do not radiate other characteristic X-ray 229, can only utilize single characteristic X-ray 229.
So, in the x-ray fluorescence analysis, low-yield characteristic X-ray 229 to high-energy can be shone successively and encourage sample, thereby differentiate the element in the sample easily.
Like this, can provide noise component(s) little and can utilize the control of voltage and magnetic field intensity to emit the x-ray source 211 of multifrequency nature X ray 229 arbitrarily one by one.
Then, Figure 28 illustrates the fluorescent x-ray analyzer 261 of the x-ray source 211 that uses the respective embodiments described above.
When checking that surface contamination as the semiconductor crystal wafer of sample is purpose, characteristic X-ray 229 need be to try one's best constant and smaller or equal to the 0.1 very little angle incident of spending, to comprise for example sheet beam shape of the fan beam of fan-shaped so be taken as to semiconductor wafer surface.
So, the x-ray source 211 that is used for fluorescent x-ray analyzer 261, the principal component of its power spectrum is the characteristic X-ray 229 of secondary target 227,227a～227d, catches this ray the surface of sample 262 is encouraged and the fluorescent X-ray 263 of emitting, just can the analytical element composition.
At this moment, the frequency spectrum of characteristic X-ray 229 with excitation is stored in the analytical equipment in advance, obtains the relation of resulting fluorescence signal and excitation density in view of the above, then can carry out the quantitative analysis of the surface-element of the good sample of precision 262 according to fluorescence signal intensity.
Like this, utilize the x-ray source 211 of the characteristic X-ray 229 of energy high efficiency radiogram beam shape, high-resolution fluorescent x ray analytical equipment 261 can be provided.
Industrial practicality
According to the present invention, a kind of x-ray source can be provided and use the x-ray fluorescence analysis of this x-ray source to fill Put, wherein by the X ray of main target radiation being used for encouraging secondary target expeditiously with main target and secondary target are stacked, Thereby can high efficiency produce characteristic X-ray.
According to the present invention, can also provide the fluorescent X-ray of a kind of x-ray source and this x-ray source of use again, Analytical equipment wherein by the main target of configuration and secondary target in vacuum chamber, can shorten the distance of main target and secondary target, The continuous X-rays that can expeditiously main target be radiated are used for encouraging secondary target, thereby can produce expeditiously characteristic X ray owing to the direction radiation X ray of reflection electronic bundle on main target, exists than X ray transmission mode again The heat shock resistance aspect is superior, can adapt to the increase of the electron beam current amount that is used for big outputization.
According to the present invention, can also provide the fluorescent X-ray of a kind of x-ray source and this x-ray source of use again, Analytical equipment wherein is built in main target and secondary target in the vacuum chamber, radioactive nature X ray expeditiously, And the noise component(s) that can be inhibited is easily sneaked into the characteristic X-ray of radiation and is fit to for example total reflection fluorescence The characteristic X-ray of the sheet beam shape of X-ray analysis.
Claims (23)
1, a kind of x-ray source is characterized in that, possesses:
Produce the electron gun of electron beam;
From described electron gun incident beam, and the main target that X ray is penetrated and radiate; And
Secondary target, this pair target is configured to be stacked on the described main target, and makes the characteristic X-ray of the x-ray excitation that is radiated by described main target penetrate and radiate.
2, the x-ray source described in claim 1 is characterized in that,
Possesses the filter that K β ray weakens and the K alpha ray penetrates and radiates in the K β ray that makes in the characteristic X-ray that is included in the radiation of secondary target and the K alpha ray
3, a kind of x-ray source is characterized in that, possesses:
The vacuum chamber that has the X ray transmissive window;
In described vacuum chamber, produce the electron gun of electron beam;
Be configured in the described vacuum chamber, and also radiate the main target of X ray from described electron gun incident beam toward reflection direction; And
Secondary target, this pair target in described vacuum chamber, be configured to with described main target be the center around opposed, and will be by the characteristic X-ray of the x-ray excitation of described main target radiation toward reflection direction radiation towards described X ray transmissive window.
4, a kind of x-ray source is characterized in that, possesses:
The vacuum chamber that has the X ray transmissive window;
In described vacuum chamber, produce the electron gun of ring-type electron beam;
In described vacuum chamber, be configured to ring-type, and behind the described electron gun incident ring-type electron beam toward the main target of reflection direction radiation X ray; And
Secondary target, this pair target are configured in described vacuum chamber with opposed with the center of described main target, and will be by the characteristic X-ray of the x-ray excitation of described main target radiation toward the reflection direction radiation towards described X ray transmissive window.
5, a kind of x-ray source is characterized in that, possesses:
The vacuum chamber that has the X ray transmissive window;
Be configured in the electron gun of the earthing potential of the generation electron beam in the described vacuum chamber;
In described vacuum chamber, be configured in the position of X ray transmissive window, and also radiate the main target of X ray from described electron gun incident beam toward reflection direction; And
Secondary target, this pair target is configured in the position of X ray transmissive window in described vacuum chamber, and makes the characteristic X-ray of the x-ray excitation that is radiated by described main target penetrate and radiate.
6, as each described x-ray source in the claim 3 to 5, it is characterized in that,
Possesses the filter that K β ray weakens and the K alpha ray penetrates and radiates in the K β ray that is included in the characteristic X-ray that makes the radiation of secondary target and the K alpha ray in the position of X ray transmissive window.
7, a kind of x-ray source is characterized in that, possesses:
Produce the electron gun of electron beam;
From described electron gun incident beam, and the main target that X ray is penetrated and radiate; And
Secondary target body, this pair target body have and are stacked on the described main target and the X ray of main target is produced position-movable a plurality of secondary target, and the secondary target that is configured in described X ray occurrence positions makes the X ray by described main target radiation penetrate and radiate.
8, the x-ray source described in claim 7 is characterized in that,
Possesses the filtering body, this filtering body contains the movably a plurality of filters of X ray occurrence positions, and K β ray is weakened the filter that is configured in described X ray occurrence positions and the K alpha ray penetrates and radiates.
9, a kind of x-ray source is characterized in that, possesses:
The vacuum chamber that has the X ray transmissive window;
In described vacuum chamber, produce the electron gun of electron beam;
Target body; And
Travel mechanism, this travel mechanism moves the target body in the described vacuum chamber, this target body is configured in the described vacuum chamber, have stacked and make up many groups target portion of different main targets and secondary target, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, and after its secondary target penetrates the characteristic X-ray of the x-ray excitation of main target radiation, from described X ray transmissive window radiation.
10, the x-ray source described in claim 9 is characterized in that,
Possess and contain corresponding a plurality of filters with a plurality of target portions, and move at the X ray transmissive window arranged outside Cheng Nengyu of vacuum chamber target body, and the filter corresponding with target portion that is configured in described X ray incoming position makes the filtering body that K β ray weakens and the K alpha ray penetrates and radiates in K β ray in the characteristic X-ray that is included in secondary target radiation and the K alpha ray with being integrated.
11, a kind of x-ray source is characterized in that, possesses:
Have the X ray transmissive window vacuum chamber,
In described vacuum chamber, produce electron beam electron gun,
Target body and
Travel mechanism, this travel mechanism moves the target body in the described vacuum chamber, this target body is configured in the described vacuum chamber, have stacked and make up many groups target portion of different main targets and secondary target, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, after its secondary target penetrates the characteristic X-ray of the x-ray excitation of main target radiation, from the radiation of described X ray transmissive window, and K β ray is weakened filter and the K alpha ray penetrates and radiates.
12, a kind of x-ray source is characterized in that, possesses:
Have the vacuum chamber of being arranged to the mobile x-ray transmissive window;
In described vacuum chamber, produce the electron gun of electron beam; And
Target body, this target body is set at the X ray transmissive window in described vacuum chamber, and have stacked and make up many groups target portion of different main targets and secondary target, utilize moving of described X ray transmissive window, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, and after its secondary target penetrates characteristic X-ray by the x-ray excitation of main target radiation, from described X ray transmissive window radiation.
13, a kind of x-ray source is characterized in that, possesses:
Have the vacuum chamber of being arranged to the mobile x-ray transmissive window;
In described vacuum chamber, produce the electron gun of electron beam; And
Target body, this target body is set at the X ray transmissive window in described vacuum chamber, and have stacked and make up many groups target portion of different main targets and secondary target, utilize moving of described X ray transmissive window, these target portions that organize are made and can move the electron beam incident position of described electron gun incident beam more, the main target that is configured in the target portion of described electron beam incident position utilizes the incident of electron beam that X ray is penetrated and radiates, after its secondary target penetrates the characteristic X-ray of the x-ray excitation that is radiated by main target, from the radiation of described X ray transmissive window, and K β ray is weakened filter and the K alpha ray penetrates and radiates.
14, a kind of fluorescent x-ray analyzer is characterized in that, possesses:
To sample illumination characteristic X ray, each described x-ray source in the claim 1 to 12; And
X-ray detector, this X-ray detector detect that the element of specimen surface in the described characteristic X-ray of irradiation is encouraged and the fluorescent X-ray that sends.
15, the fluorescent x-ray analyzer described in claim 14 is characterized in that,
As x-ray source, possess a plurality of x-ray sources of the different characteristic X-ray of irradiation.
16, a kind of x-ray source is characterized in that, possesses:
Vacuum chamber;
In described vacuum chamber, produce the electron gun of electron beam;
The separating part of the electron beam through-hole that the electron beam that contains the wall portion of separating and be arranged on this wall portion and described electron gun is produced in described vacuum chamber passes through;
Be arranged on the electron beam that passes through described electron beam through-hole in the described separating part with incident, and the main target of radiation X ray;
Be arranged on the X ray that radiates with the described main target of incident in the described separating part, and the secondary target of radioactive nature X ray; And
The X ray transmissive window, this X ray transmissive window is arranged on vacuum chamber in the mode in the face of described separating part, and the characteristic X-ray of described secondary target radiation is emitted to the outside.
17, the x-ray source described in claim 16 is characterized in that,
Secondary target is a box-shaped, and the electron beam through-hole that electron beam passes through is set, and the X ray through hole that characteristic X-ray is limited beam shape radiation in blocks is set.
18, the x-ray source described in claim 16 or 17 is characterized in that,
Use kinds of materials that a plurality of main targets and secondary target are set, so that can radiate the characteristic X-ray of multiple spectrum distribution.
19, the x-ray source described in claim 18 is characterized in that,
Adjust the accelerating voltage of the electron beam of electron gun generation, control is from the spectrum distribution of the characteristic X-ray of secondary target radiation.
20, as each described x-ray source in the claim 16 to 18, it is characterized in that,
The a plurality of X ray generating units that possess a plurality of main target and a plurality of secondary targets of the kinds of materials of being used in combination, these a plurality of X ray generating units are made and can be moved the electron beam incident position from described electron gun incident, and from being configured in the X ray generating unit radioactive nature X ray of this electron beam incident position.
21, the x-ray source described in claim 18 is characterized in that,
Possess the electron beam deflecting that electron gun is produced, and to the electron beam deflecting parts of any main target incident in a plurality of main targets.
22, the x-ray source described in claim 18 is characterized in that,
Possess a plurality of main target that is used in combination different materials and a plurality of X ray generating units of a plurality of secondary targets, and
Possess the electron beam deflecting that electron gun is produced, and to the electron beam deflecting parts of any X ray generating unit incident in a plurality of X ray generating units.
23, a kind of fluorescent x-ray analyzer is characterized in that, possesses:
To sample illumination characteristic X ray, each described x-ray source in the claim 16 to 22; And
X-ray detector, this X-ray detector detect that the element of specimen surface in the described characteristic X-ray of irradiation is encouraged and the fluorescent X-ray that sends.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006024071A JP2007207539A (en) | 2006-02-01 | 2006-02-01 | X-ray source and fluorescent x-ray analysis system |
| JP024071/2006 | 2006-02-01 | ||
| JP024261/2006 | 2006-02-01 |
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| CN101310359A true CN101310359A (en) | 2008-11-19 |
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| CN (1) | CN101310359A (en) |
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