CN101303440B - Optical apparatus and method for correcting coordinate - Google Patents
Optical apparatus and method for correcting coordinate Download PDFInfo
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- CN101303440B CN101303440B CN200710102246XA CN200710102246A CN101303440B CN 101303440 B CN101303440 B CN 101303440B CN 200710102246X A CN200710102246X A CN 200710102246XA CN 200710102246 A CN200710102246 A CN 200710102246A CN 101303440 B CN101303440 B CN 101303440B
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Abstract
The invention discloses a method for correcting coordinates of optical equipment, which is used for correcting and adjusting an orthogonal angular error between a scanning coordinate system and an inducting coordinate system so as to ensure that the orthogonal angular error returns to zero. The method of the invention includes that a correcting component is first prepared and two nonparallel correction straight lines are marked on the surface of the correcting component; the inducting coordinate system is then utilized for inducting the two correction straight lines to figure out two initial linear equations; the correcting component is next moved along the scanning direction of the scanning coordinate system so as to cause the two correction straight lines to move along the scanning direction at the same time; the inducting coordinate system is again utilized for inducting the two correction straight lines so as to figure out two correction linear equations; finally, the correction linear equations and the initial linear equations are used for figuring out the orthogonal angular error between the scanning coordinate system and the inducting coordinate system either of which is also adjusted to ensure that the orthogonal angular error returns to zero.
Description
Technical field
The present invention relates to a kind of optical device and method for correcting coordinate thereof, be meant a kind of method for correcting coordinate that utilizes a correcting element that is marked with the capable straight line of two irrelevancies that the orthogonal angles difference between an one scan coordinate system and an induction coordinate system is made zero especially.
Background technology
Along with the development and the evolution of the current situation, the requirement of many products aspect the processing dimension precision, also rigorous day by day thereupon, particularly for photoelectricity class or micro electronmechanical class component, its precision often must reach the requirement of nano-scale.Yet, in the whole process of photoelectricity class or micro electronmechanical class component, often workpiece to be processed must be delivered to specific Working position inevitably and process operation, even also may when workpiece still is kept in motion, just carry out specific processing operation.Under this situation,,, also will certainly cause great influence to processing quality even if these motions are very small from the angle of microcosmic.
Under this prerequisite, often must in each important production technology, detect and inspection work by means of more accurate optical device (or instrument) to workpiece, could further guarantee processing quality, the passing rate of processing of workpiece is provided.In order to make these optical devices when detecting, can access more accurate detection effect, then must carry out accurate self-correction to these optical devices earlier.In order further to set forth relevant alignment technique, will enumerate the coordinate self-correction technology that a known embodiment describes optical device in detail below.
See also Fig. 1 to Fig. 3, Fig. 1 is the sectional perspective schematic appearance that shows known optical equipment, Fig. 2 is the synoptic diagram that shows the display demonstration check point position of known optical equipment, and Fig. 3 shows the synoptic diagram that has the orthogonal angles difference between induction coordinate system and the scan coordinate system.As shown in the figure, an optical device 100 includes an optical lens assembly 1 and one scan platform 2.Optical lens assembly 1 includes a housing 11, one scan light source 12, an optical sensor module 13, a display 14, a cantilever 15 and a vertical rod 16.
Scanning light source 12, optical sensor module 13 are inside or the surfaces that are positioned at housing 11 with display 14, and housing 11 connects cantilever 15, and cantilever 15 is connected in vertical rod 16, and 16 of vertical rods are connected in fixedly bearing base (not indicating).The optical sensor module 13 built-in induction coordinate system Sec that are equipped with
0, it is by one first induction axis of orientation X
0' with one be orthogonal to the first induction axis of orientation X
0' the second induction axis of orientation Y
0' form.Simultaneously, even optical sensor module 13 includes an operation processing unit (not indicating) and a coordinate adjusting mechanism (not indicating).Scanning platform 2 is built and is equipped with one scan coordinate system Sac
0, it is by one first direction of scanning axle X
0With one be orthogonal to the first direction of scanning axle X
0The second direction of scanning axle Y
0Form.Simultaneously, be marked with two check point P on the scanning platform 2
1With P
2, wherein, check point P
1Be to be positioned at scan coordinate system Sac
0Initial point, so check point P
1Coordinate be (0,0), check point P
2Be to be positioned at scan coordinate system Sac
0The first direction of scanning axle X
0On, its coordinate is (x
1, 0).
Before carrying out coordinates correction, can utilize scanning light source 12 to detect ray cast to earlier and contain check point P one
1Correcting area CA
0, make and detect light from this correcting area CA
0Reflex to optical sensor module 13, optical sensor module 13 can induce check point P
1The position, and induce position correction point P
1The position and be shown on the display 14.At this moment, but transmission display device 14 is adjusted the coordinate adjusting mechanism of optical sensor module 13, so that check point P
1Fall within induction coordinate system Sec
0Origin position and finish the initialization adjustment.
When carrying out coordinates correction, scanning platform 2 can be parallel to the above-mentioned first direction of scanning axle X along one
0Direction of scanning I
0Mobile one scan distance, delta x
1, make check point P
2Enter correcting area CA
0At this moment, on display 14, be the check point P on the reading scan platform 2
2Be positioned at an induction check point P
2' the position, and should induction check point P
2' coordinate be (x
1', y
1'), therefore, induction check point P
2' and the second induction axis of orientation Y
0' between at a distance of a distance of reaction difference Δ x
1'=x
1', induction check point P
2' and the first induction axis of orientation X
0' between at a distance of another distance of reaction difference Δ y
1'=y
1'.Simultaneously, check point P
1With induction check point P
2' line be and the first induction axis of orientation X
0' between differ an orthogonal angles difference Δ θ
0, utilize well-known trigonometric function relation, can obtain Δ θ
0=tan
-1(y
1'/x
1'), the operation processing unit that relevant evaluation work can see through in the optical sensor module 13 is finished.
Because check point P
1With check point P
2Line be to be positioned at the first direction of scanning axle X
0On, but check point P
1With induction check point P
2' line be and the first induction axis of orientation X
0' between differ an orthogonal angles difference Δ θ
0, the expression first induction axis of orientation X
0' and the first direction of scanning axle X
0Between differ this orthogonal angles difference Δ θ
0Therefore, the coordinate adjusting mechanism of optical sensor module 13 must be utilized, coordinate system Sec will be responded to
0Adjust this orthogonal angles difference Δ θ along counter-clockwise direction
0, make this orthogonal angles difference Δ θ
0Be classified as zero, and finish induction coordinate system Sec
0With scan coordinate system Sac
0Between correction operation.
Such as have in affiliated technical field and know that usually the knowledgeable all can understand easily, also can prepare a correcting element in addition, the above-mentioned check point P of mark on this correcting element
1With P
2After, it is being positioned on the scanning platform 2, by this scanning platform 2 along direction of scanning I
0Move and obtain similar result, thereby replace above-mentioned directly mark check point P on scanning platform 2
1With P
2The practice.
Such as have in affiliated technical field and know that usually the knowledgeable also can understand easily, in above disclosed technology, four serious problems of ubiquity.One, check point P
1With P
2Line must be parallel to direction of scanning I
0Its two, in order to allow the induction range of optical sensor module 13 can contain check point P
1With P
2, then will certainly dwindle the first induction axis of orientation X
0' and the first direction of scanning axle X
0Between ratio, that is dwindle the induction multiplying power, thus, then cause easily and resolve degree of distortion and uprise and the precision of effect correction; Its three, with respect to its two, if desire to keep high induction multiplying power, then certainly will to dwindle induction range, one of them check point is fallen within outside the induction range; Its four, in said method, owing to measure two data points, i.e. decision induction coordinate system Sec
0, under the few situation of sampling spot, will certainly cause measurement uncertainty (Uncertainty of Measurement) higher.
Take a broad view of the above as can be known, the line that exists two check points in the known technology must be parallel to the direction of scanning, resolution is not good, and induction range is little can't sense calibration reference target (being second check point among the known embodiment) simultaneously, and measures higher four subject matters of uncertainty.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of optical device and method for correcting coordinate thereof, it is to utilize the induction coordinate system to respond to two uneven straight lines in scan coordinate system, equation variation relation before and after scanning, in conjunction with the linear algorithm that returns of the least square on the statistics, try to achieve the computing technique of optimization convergence equation of line, to solve above-mentioned four problems simultaneously.
For solving the problems of the technologies described above, the present invention proposes a kind of method for correcting coordinate of optical device, it is poor in order to the orthogonal angles between an one scan coordinate system of proofreading and correct and adjust this optical device and an induction coordinate system, so that this orthogonal angles difference makes zero.This method is to prepare a correcting element earlier, and its surface is marked with the capable correction straight line of two irrelevancies on being.Then, utilize induction of induction coordinate system and the two initial straight equations that calculate the positive straight line of above-mentioned second revisal.Then, correcting element is moved along the one scan direction of this scan coordinate system, so that the positive straight line of above-mentioned second revisal also moves along the direction of scanning simultaneously.Afterwards, utilization is responded to the coordinate system induction and is calculated the positive equation of line of the second revisal of the positive straight line of above-mentioned second revisal after moving along the direction of scanning.At last, the orthogonal angles of utilizing correction equation of line and initial straight equation to calculate between scan coordinate system and induction coordinate system again is poor, and adjusts induction coordinate system or scan coordinate system, so that the orthogonal angles difference makes zero.
The invention allows for a kind of optical device, comprise: a correcting element is marked with the capable correction straight line of two irrelevancies on the surface thereof; The one scan platform is to build to put the one scan coordinate system, and is combined with this correcting element, moves along the one scan direction of this scan coordinate system to drive this correcting element; One optical sensor module, be to build to put an induction coordinate system, with before this correcting element moves along this direction of scanning, utilize this induction coordinate system to respond to the positive straight line of lip-deep above-mentioned second revisal of this correcting element to calculate two initial straight equations, and after this correcting element moves along this direction of scanning, utilize this induction coordinate system to respond to the positive straight line of the lip-deep above-mentioned second revisal of this correcting element respectively calculating the positive equation of line of second revisal again, and an orthogonal angles of further calculating between this induction coordinate system and this scan coordinate system is poor; And an adjusting mechanism, be in order to adjust the induction coordinate system of this optical sensor module, so that this orthogonal angles difference makes zero.
In preferred embodiment of the present invention, above-mentioned initial straight equation and correction equation of line, be before correcting element moves and after moving, the a plurality of initial viewpoint and the coordinate data of proofreading and correct observation point on the straight line are proofreaied and correct in induction respectively, the optimization convergence equation of line of trying to achieve in conjunction with the linear computing technique that returns algorithm of statistical least square.Simultaneously, preferred embodiment of the present invention has further disclosed a kind of in order to adjust the adjusting mechanism of this induction coordinate system, adjusts the angle of this induction coordinate system and this orthogonal angles difference is made zero with precision.
The present invention has following effect against existing technologies:
Compared to known coordinates correction technology, the present invention utilizes straight line that the induction coordinate system responds to two irrelevancies capable (linear each other each other independent) to change in the equation of line when move the direction of scanning of scan coordinate system, and try to achieve the orthogonal angles that is present between induction coordinate system and scan coordinate system in conjunction with the mathematical operation technology of coordinate conversion poor.
Putting before this, the placement direction of correcting element can be restricted, and promotes the convenience of operation so can effectively solve above-mentioned first problem.Simultaneously, owing to only need the capable straight line of two irrelevancies to get final product the cause that induction meter is calculated above-mentioned orthogonal angles difference in the distance slightly that moves along the direction of scanning, so needn't dwindle the induction multiplying power in order to increase the visual field, also not have the problem of induction less than calibration reference target (correction straight line).Therefore, this kind bearing calibration still can be kept high enlargement ratio and resolution, so can solve above-mentioned second problem and the 3rd problem simultaneously.
In addition, represent the initial straight equation and proofread and correct equation of line because preferred embodiment of the present invention is an optimization convergence equation of line of utilizing the mathematical operation technology of coordinate conversion and the linear recurrence of the least square on statistics algorithm to ask for, the orthogonal angles of describing institute's deviation between induction coordinate system and scan coordinate system according to this is poor.Get over for a long time in the initial viewpoint and the quantity of the coordinate data of proofreading and correct observation point, the initial straight equation that is calculated will be accurate more with the correction equation of line, so can effectively reduce the precision that measures uncertainty and promote correction.
Description of drawings
Fig. 1 is the sectional perspective schematic appearance that shows known optical equipment;
Fig. 2 is the synoptic diagram that shows the display demonstration check point position of known optical equipment;
Fig. 3 shows the synoptic diagram that has the orthogonal angles difference between induction coordinate system and the scan coordinate system;
Fig. 4 is the local appearance synoptic diagram that shows preferred embodiment of the present invention;
Fig. 5 is the partial enlarged drawing in zone shown in the displayed map 4 centre circle A;
Fig. 6 is that the display that shows preferred embodiment of the present invention shows the synoptic diagram of proofreading and correct linear position;
Fig. 7 shows the synoptic diagram that has the orthogonal angles difference between induction coordinate system and the scan coordinate system;
Fig. 8 is the arrangements of components synoptic diagram that shows the adjusting mechanism of preferred embodiment of the present invention;
Fig. 9 is that the adjusting mechanism that shows preferred embodiment of the present invention is adjusted the action synoptic diagram that image sensor is done the minute angle rotation; And
Figure 10 is the simple and easy process flow diagram that shows preferred embodiment coordinates correction of the present invention.
Description of reference numerals:
100,200 optical devices
1,3 optical lens assemblies
2,4 scanning platforms
11,31 housings
12,32 scanning light sources
13,33 optical sensor modules
14,34 displays
15,36 cantilevers
16,37 vertical rods
331 image sensors
The 331a central shaft
35 adjusting mechanisms
351 pedestals
352 holders
3521 ㄇ font bodies
3521a first section
3521b second section
3521c the 3rd section
3522 convex extension parts
353,353a retaining element
354, the universal element of 354a
355,355a clamping element
356 adjusters
356a resistance portion
The 356b adjustment part
357 Buffer Units
357a cushions holder
The 357b compression spring
5 correcting elements
Sec
0, Sec
1The induction coordinate system
Sac
0, Sac
1Scan coordinate system
X
0', X ' first induction axis of orientation
Y
0', Y ' second induction axis of orientation
X
0, the X first direction of scanning axle
Y
0, the Y second direction of scanning axle
GA
0, CA
1Correcting area
P
1, P
2Check point
P
2' the induction check point
P
11～P
13, P
21～P
23Initial viewpoint
P
11'～P
13', P
21'～P
23' the correction observation point
L
1, L
2Proofread and correct straight line
Δ x
1, Δ x scanning distance
Δ x
1', Δ y
1' distance of reaction is poor
Δ x ' distance of reaction
Δ θ
0, Δ θ
1Orthogonal angles is poor
I
0, I
1The direction of scanning
II adjusts direction
III adjusts sense of rotation
Embodiment
Because optical device provided by the present invention and method for correcting coordinate thereof can be widely used in multiple possess scan coordinate system and the optical devices, equipment and the system that respond to coordinate system, its combination embodiment is too numerous to enumerate especially, so give unnecessary details no longer one by one at this, only enumerating wherein, a preferred embodiment is specified.
See also Fig. 4 to Fig. 7, Fig. 4 is the local appearance synoptic diagram that shows preferred embodiment of the present invention, Fig. 5 is the partial enlarged drawing in zone shown in the displayed map 4 centre circle A, Fig. 6 is that the display that shows preferred embodiment of the present invention shows the synoptic diagram of proofreading and correct linear position, and Fig. 7 shows the synoptic diagram that has the orthogonal angles difference between induction coordinate system and the scan coordinate system.As shown in the figure, an optical device 200 includes an optical lens assembly 3, one scan platform 4 and a correcting element 5.Optical lens assembly 3 includes a housing 31, one scan light source 32, an optical sensor module 33, a display 34, an adjusting mechanism 35, a cantilever 36 and a vertical rod 37.
Scanning light source 32, optical sensor module 33, display 34 are inside or the surfaces that are positioned at housing 31 with adjusting mechanism 35, and housing 31 is to connect cantilever 36, and cantilever 36 is connected in vertical rod 37, and 37 of vertical rods are connected in fixedly bearing base (not indicating).The optical sensor module 33 built-in induction coordinate system Sec that are equipped with
1, it is made up of the second induction axis of orientation Y ' that one first induction axis of orientation X ' and is orthogonal to the first induction axis of orientation X '.Simultaneously, even optical sensor module 33 includes an operation processing unit (not indicating) and an image sensor 331 (being shown in Fig. 8), in the present embodiment, above-mentioned induction coordinate system Sec
1Be to build to place image sensor 331, and image sensor 331 possess a central shaft 331a (being shown in Fig. 8).Scanning platform 4 is built and is equipped with one scan coordinate system Sac
1, it is made up of the second direction of scanning axle Y that one first direction of scanning axle X and is orthogonal to the first direction of scanning axle X.
Simultaneously, the first induction axis of orientation and the second induction axis of orientation Y ' correspond respectively to the first direction of scanning axle and the second direction of scanning axle Y.Be to have an orthogonal angles difference Δ θ between induction coordinate system Sec1 and scan coordinate system Sac1
1Wherein, orthogonal angles difference Δ θ
1Equal the angle of X ' between the first direction of scanning axle X and this first induction axis of orientation, because above-mentioned orthogonality relation, certainly, orthogonal angles difference Δ θ
1Also equal the angle of Y ' between the second direction of scanning axle Y and this second induction axis of orientation.Correcting element 5 is to be fixed in scanning platform 4, and its surface indicia has the correction straight line L of two irrelevancies capable (promptly linear each other each other independent)
1With L
2
Before carrying out coordinates correction, can utilize scanning light source 32 to detect ray cast to earlier and contain correction straight line L one
1With L
2Correcting area CA
1, make and detect light from this correcting area CA
1Reflex to optical sensor module 33, the image sensor 331 of optical sensor module 33 can induce proofreaies and correct straight line L
1Go up arbitrarily three initial viewpoint P of acquisition
11, P
12With P
13Coordinate data, also can induce simultaneously and proofread and correct straight line L
2Go up arbitrarily three initial viewpoint P of acquisition
21, P
22With P
23Coordinate data.Then, can utilize the linear algorithm that returns of least square on the statistics to calculate correction straight line L respectively
1With L
2Two initial straight equations.
When carrying out coordinates correction, scanning platform 4 can be along a direction of scanning I who is parallel to the first direction of scanning axle X
1Mobile one scan distance, delta x makes and proofreaies and correct straight line L
1With L
2Still the retaining part line segment is positioned at correcting area CA
1At this moment, on display 34, can sense the correction straight line L on the scanning platform 4
1With L
2Move a distance of reaction Δ x ', and the image sensor 331 of optical sensor module 33 can induce correction straight line L
1Go up arbitrarily three correction observation point P of acquisition
11', P
12' and P
13' coordinate data, also can induce simultaneously and proofread and correct straight line L
2Go up arbitrarily three correction observation point P of acquisition
21', P
22' and P
23' coordinate data.Then, can utilize the linear algorithm that returns of least square on the statistics to calculate correction straight line L respectively
1With L
2The positive equation of line of second revisal.
Below, how to utilize the initial straight equation and proofread and correct the orthogonal angles difference Δ θ that equation of line calculates being described in further detail
1Suppose that above-mentioned two initial straight equations are respectively:
Y '=a
1X '+b
1... ... .... (equation 1)
Y '=a
2X '+b
2... ... .... (equation 2)
Wherein, a
1With a
2The expression slope, b
1With b
2Represent the intercept of two initial straight equations on the second induction axis of orientation Y ' respectively.Therefore, a
1, a
2, b
1With b
2Be all known parameters.
Simultaneously, because the correction straight line is to move and not rotation along a straight line,,, be respectively so can suppose the positive equation of line of above-mentioned second revisal so the initial straight equation of gained should possess identical slope with the correction equation of line before and after moving:
Y '=a
1X '+b
1' ... ... .... (equation 3)
Y '=a
2X '+b
2' ... ... .... (equation 4)
Wherein, a
1, a
2, b
1' and b
2' be known parameters, utilize above-mentioned equation 1 to equation 4, and the correlation parameter of above definition, can put out following relation in order.
b
1'=b
1+ Δ x ' cos (Δ θ
1)-a
1Δ x ' sin (Δ θ
1) .... (equation 5)
b
2'=b
2+ Δ x ' cos (Δ θ
1)-a
2Δ x ' sin (Δ θ
1) ... (equation 6)
After above equation 5 and equation 6 carried out a series of arrangement and calculate, can try to achieve orthogonal angles difference Δ θ
1With distance of reaction Δ x ',, then no longer given unnecessary details at this because relevant numerous and diverse mathematical operation process is to have in affiliated field to know the known art of computation of the knowledgeable usually.Simultaneously, after obtaining distance of reaction Δ x ', can be with it divided by scan coordinate system Sac
1On this scanning distance Δ x, the ratio of gained (Δ x '/Δ x) is the induction coordinate system with respect to the induction multiplying power of scan coordinate system.In addition, above-mentioned initial straight equation, proofread and correct equation of line, orthogonal angles difference Δ θ
1Can directly build with the related operation formula of distance of reaction Δ x ' and to place above-mentioned operation processing unit and carry out calculation process automatically.
Obtaining orthogonal angles difference Δ θ
1After, can further utilize above-mentioned adjusting mechanism 35 to adjust the rotation that image sensor 331 is made minute angle, to adjust this induction coordinate system Sec
1Angle, above-mentioned orthogonal angles difference is made zero.Therefore, below will continue the structure of adjusting mechanism 35 is proposed more detailed explanation.
See also Fig. 8 and Fig. 9, Fig. 8 is the arrangements of components synoptic diagram that shows the adjusting mechanism of preferred embodiment of the present invention, and Fig. 9 is that the adjusting mechanism that shows preferred embodiment of the present invention is adjusted the action synoptic diagram that image sensor is done the minute angle rotation.As shown in the figure, adjusting mechanism 35 comprises a pedestal 351, a holder 352, a pair of retaining element 353 and 353a, a pair of universal element 354 and 354a, a pair of clamping element 355 and 355a, an adjuster 356 and a Buffer Unit 357.
The central shaft 331a of pedestal 351 and image sensor 331 is relative fixed parts each other.Holder 352 comprises a ㄇ font body 3521 and a convex extension part 3522.ㄇ font body 3521 inside are to hold image sensor 331, and comprise one first section 3521a, one the second section 3521b perpendicular to the first section 3521a, and one be parallel to the first section 3521a and with the 3rd section 3521c perpendicular to the second section 3521b, image sensor 331 is to be contacted with the second section 3521b.Convex extension part 3522 is to protrude out from the second section 3521b, and is incorporated into pedestal 351 movably.
Retaining element 353 penetrates to be incorporated into this first section 3521a and the 3rd section 3521c with 353a.Universal element 354 is in ㄇ font body 3541 inside with 354a, and be incorporated into the end of retaining element 353 and 353a respectively, clamping element 355 is incorporated into universal element 354 and 354a respectively with 355a, and respectively with a pair of clamping direction clamping image sensor 331.
At the induction coordinate system Sec that adjusts image sensor 331
1The time, the adjustment part 356a of adjuster 356 is that the regulation and control resistance 356b of portion adjusts direction II along one and moves, and controls holder 352 whereby and carries out relative mobile along adjusting direction II with respect to pedestal 351 and above-mentioned central shaft 331a.Then, clamping element 355 can see through universal element 354 with 355a and turn to 354a, and changing clamping element 355 whereby, to make image sensor be center and adjust direction III rotation along a rotation with the clamping direction of 355a clamping image sensor 331 with central shaft 331a.
In the present embodiment, because the cause of Buffer Unit 357 side that to be convex extension parts 3522 of being contacted with holder 352 opposite with adjuster 356, therefore in whole adjustment process, speed and strength that this holder 352 of above-mentioned adjuster 356 regulation and control of Buffer Unit 357 available buffers moves along adjustment direction II, and reach the effect of assisting accurate regulation and control.
Below, above numerous and diverse narration is put in order in remittance, converged whole the operation workflow of preferred embodiment of the present invention and simplification.Please continue to consult Figure 10, it is the simple and easy process flow diagram that shows preferred embodiment coordinates correction of the present invention, and sees also Fig. 4 to Fig. 9.As shown in the figure, before the coordinates correction that carries out optical device 200, the preparation surface indicia has the correction straight line L of above-mentioned two irrelevancies capable (promptly linear each other each other independent) earlier
1With L
2Correcting element 5 (step 110).
Then, utilize induction coordinate system Sec in the image sensor 331 of optical sensor module 33
1Straight line is proofreaied and correct in induction, and utilizes the linear algorithm that returns of least square on the statistics to calculate initial straight equation (step 120).Then, along scan coordinate system Sac
1Direction of scanning I
1Shift calibrating element 5 makes and proofreaies and correct straight line L
1With L
2Simultaneously along direction of scanning I
1Move (step 130), and utilize induction coordinate system Sec
1Straight line L is proofreaied and correct in induction
1With L
2Proofread and correct equation of line (step 140) to calculate.
At last, utilize initial straight equation and correction equation of line to calculate induction coordinate system Sec
1With scan coordinate system Sac
1Between orthogonal angles difference Δ θ
1(step 150), and adjust induction coordinate system Sec
1Angle makes orthogonal angles difference Δ θ
1(step 160) makes zero.
Such as have in affiliated technical field and know that usually the knowledgeable all can understand,, also can install the angle that suitable coordinate adjusting mechanism is adjusted scanning platform 4, therefore, in execution in step 160, also can adjust scan coordinate system Sac at scanning platform 4 adjoining positions
1And make above-mentioned orthogonal angles difference Δ θ
1Make zero.Simultaneously, on practice utilization face, the coordinate data of the initial viewpoint of fechtable greater number and the coordinate data of proofreading and correct observation point, make that the initial straight equation that utilizes above-mentioned least square linearity recurrence algorithm to calculate is more accurate with the correction equation of line, and then reduce the measurement uncertainty.
Above embodiment explanation only is preferred embodiment explanation of the present invention, has in the affiliated such as technical field to know that usually the knowledgeable is when doing other all improvement and variation according to the above embodiment of the present invention explanation.Yet all improvement and variation that these are done according to the embodiment of the invention are in the claim that still belongs to invention spirit of the present invention and define.
Claims (16)
1. the method for correcting coordinate of an optical device is poor in order to an induction coordinate system and the orthogonal angles between the one scan coordinate system of proofreading and correct and adjust this optical device, so that this orthogonal angles difference makes zero, this method comprises:
(a) preparation one correcting element is marked with the capable correction straight line of two irrelevancies on the surface thereof;
(b) utilize this induction coordinate system to respond to the positive straight line of above-mentioned second revisal to calculate two initial straight equations respectively;
(c) this correcting element is relatively moved to this induction coordinate system along the one scan direction of this scan coordinate system, so that the positive straight line of above-mentioned second revisal also relatively moves to this induction coordinate system along this direction of scanning simultaneously;
(d) behind completing steps (c), utilize this induction coordinate system to respond to the positive straight line of above-mentioned second revisal to calculate the positive equation of line of second revisal respectively; And
(e) this orthogonal angles of utilizing this correction equation of line and this initial straight equation to calculate between this induction coordinate system and this scan coordinate system is poor, and adjusts this induction coordinate system or this scan coordinate system, so that this orthogonal angles difference makes zero.
2. the method for correcting coordinate of optical device as claimed in claim 1, it is characterized in that, in this step (b), be to utilize this induction coordinate system to respond to the coordinate data of a plurality of initial viewpoint on the positive straight line of above-mentioned second revisal, and utilize the least square linearity on the statistics to return the coordinate data of algorithm and above-mentioned a plurality of initial viewpoint and calculate above-mentioned two initial straight equations.
3. the method for correcting coordinate of optical device as claimed in claim 1, it is characterized in that, in this step (d), be at the positive straight line of above-mentioned second revisal after relatively moving along this direction of scanning, utilize this induction coordinate system to respond to the coordinate data of a plurality of correction observation point on the positive straight line of above-mentioned second revisal, and utilize the least square linearity on the statistics to return the coordinate data of algorithm and above-mentioned a plurality of correction observation point and calculate the positive equation of line of above-mentioned second revisal.
4. the method for correcting coordinate of optical device as claimed in claim 1, it is characterized in that, this scan coordinate system is made up of the second direction of scanning axle that one first direction of scanning axle and is orthogonal to this first direction of scanning axle, this induction coordinate system is made up of second induction axis of orientation that one first induction axis of orientation and is orthogonal to this first induction axis of orientation, and this first is responded to axis of orientation and this second to respond to axis of orientation be to correspond respectively to this first direction of scanning axle and this second direction of scanning axle.
5. the method for correcting coordinate of optical device as claimed in claim 4 is characterized in that, this orthogonal angles difference is the angle between this first direction of scanning axle and this first induction axis of orientation, or the angle between this second direction of scanning axle and this second induction axis of orientation.
6. the method for correcting coordinate of optical device as claimed in claim 1, it is characterized in that, this optical device includes an optical sensor module, this induction coordinate system is to build to place in this optical sensor module, this optical sensor module includes an operation processing unit, and to be distinguished this orthogonal angles of this corresponding initial straight equation and this correction equation of line poor to calculate the positive straight line of above-mentioned second revisal.
7. the method for correcting coordinate of optical device as claimed in claim 1, it is characterized in that, this optical device more includes the one scan platform, this scan coordinate system is to build to place this scanning platform, and this correcting element is to be fixed in this scanning platform, when this scanning platform when move this direction of scanning, this correcting element is to move along this direction of scanning thereupon.
8. an optical device is characterized in that, comprises:
One correcting element is marked with the capable correction straight line of two irrelevancies on the surface thereof;
The one scan platform is to build to put the one scan coordinate system, and this scanning platform is combined with this correcting element, moves along the one scan direction of this scan coordinate system to drive this correcting element;
One optical sensor module, be to build to put an induction coordinate system, with before this correcting element moves along this direction of scanning, utilize this induction coordinate system to respond to the positive straight line of lip-deep above-mentioned second revisal of this correcting element to calculate two initial straight equations, and after this correcting element moves along this direction of scanning, utilize this induction coordinate system to respond to the positive straight line of the lip-deep above-mentioned second revisal of this correcting element respectively calculating the positive equation of line of second revisal again, and an orthogonal angles of further calculating between this induction coordinate system and this scan coordinate system is poor; And
One adjusting mechanism is in order to adjust the induction coordinate system of this optical sensor module, so that this orthogonal angles difference makes zero.
9. optical device as claimed in claim 8, it is characterized in that, this optical sensor module, be to utilize this induction coordinate system to respond to the coordinate data of a plurality of initial viewpoint on the positive straight line of above-mentioned second revisal, and utilize the least square linearity on the statistics to return the coordinate data of algorithm and above-mentioned a plurality of initial viewpoint and calculate above-mentioned two initial straight equations.
10. optical device as claimed in claim 8, it is characterized in that, this optical sensor module, be at the positive straight line of above-mentioned second revisal after moving along this direction of scanning, utilize this induction coordinate system to respond to the coordinate data of a plurality of correction observation point on the positive straight line of above-mentioned second revisal, and utilize the least square linearity on the statistics to return the coordinate data of algorithm and above-mentioned a plurality of correction observation point and calculate the positive equation of line of above-mentioned second revisal.
11. optical device as claimed in claim 8, it is characterized in that, this scan coordinate system possesses the second direction of scanning axle that one first direction of scanning axle and is orthogonal to this first direction of scanning axle, this induction coordinate system possesses the second induction axis of orientation that one first induction axis of orientation and is orthogonal to this first induction axis of orientation, and this first induction axis of orientation and this second is responded to axis of orientation and corresponded respectively to this first direction of scanning axle and this second direction of scanning axle.
12. optical device as claimed in claim 11 is characterized in that, this orthogonal angles difference is the angle between this first direction of scanning axle and this first induction axis of orientation, or the angle between this second direction of scanning axle and this second induction axis of orientation.
13. optical device as claimed in claim 8, it is characterized in that, this optical sensor module includes an operation processing unit, distinguished corresponding this initial straight equation and this correction equation of line to calculate the positive straight line of above-mentioned second revisal, and this orthogonal angles is poor.
14. optical device as claimed in claim 8 is characterized in that, this optical sensor module includes builds the image sensor of putting this induction coordinate system, and this image sensor possesses a central shaft, and this adjusting mechanism comprises:
One pedestal is and the central shaft of this image sensor relative fixed part each other;
One holder comprises:
One ㄇ font body, its inside holds this image sensor, this ㄇ font body comprises that one first section, second section and perpendicular to this first section are parallel to this first section and perpendicular to the 3rd section of this second section, and this image sensor is to be contacted with among this first section, this second section and this three of the 3rd section at least one; And
One convex extension part is to protrude out from this second section, and is incorporated into this pedestal movably;
A pair of retaining element, this is to penetrate to be incorporated in this first section and this retaining element another and to penetrate and be incorporated into the 3rd section to one in the retaining element;
A pair of universal element, this is corresponding one by one and should be incorporated into an end of the retaining element corresponding with it in the universal element each to retaining element with this to universal element;
A pair of clamping element, this was corresponding one by one to universal element with this to clamping element, and this is incorporated into the universal element corresponding with it in the clamping element each, this to clamping element corresponding one by one with a pair of clamping direction and this in the clamping element each with clamping direction clamping this image sensor corresponding with it; And
One adjuster is to be incorporated into this pedestal movably, and is contacted with the convex extension part of this holder,
When adjusting the induction coordinate system of this image sensor, this adjuster is that this holder of regulation and control moves along an adjustment direction with respect to this pedestal and this central shaft, make this see through and should turn to universal element clamping element, this of this image sensor of clamping element clamping made this image sensor to the clamping direction is that the center rotates with this central shaft to change this.
15. optical device as claimed in claim 14 is characterized in that, this adjuster comprises:
One resistance portion is to be contacted with this convex extension part; And
One adjustment part is to move along this adjustment direction for this resistance portion of regulation and control, moves along this adjustment direction with the convex extension part of controlling this holder.
16. optical device as claimed in claim 15, it is characterized in that, this adjusting mechanism more comprises a Buffer Unit, this Buffer Unit is contacted with the convex extension part opposite with surface of contact this adjuster a side of this holder, controls speed and the strength that this holder moves along this adjustment direction to cushion this adjuster.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710102246XA CN101303440B (en) | 2007-05-08 | 2007-05-08 | Optical apparatus and method for correcting coordinate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710102246XA CN101303440B (en) | 2007-05-08 | 2007-05-08 | Optical apparatus and method for correcting coordinate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101303440A CN101303440A (en) | 2008-11-12 |
| CN101303440B true CN101303440B (en) | 2010-06-16 |
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| CN200710102246XA Expired - Fee Related CN101303440B (en) | 2007-05-08 | 2007-05-08 | Optical apparatus and method for correcting coordinate |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6822748B2 (en) * | 2002-10-29 | 2004-11-23 | Metron Systems, Inc. | Calibration for 3D measurement system |
| CN1692889A (en) * | 2005-01-28 | 2005-11-09 | 大连理工大学 | Scale template used for pyramidal tract x-rays CT system |
| CN1801953A (en) * | 2005-12-15 | 2006-07-12 | 上海交通大学 | Video camera reference method only using plane reference object image |
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2007
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6822748B2 (en) * | 2002-10-29 | 2004-11-23 | Metron Systems, Inc. | Calibration for 3D measurement system |
| CN1692889A (en) * | 2005-01-28 | 2005-11-09 | 大连理工大学 | Scale template used for pyramidal tract x-rays CT system |
| CN1801953A (en) * | 2005-12-15 | 2006-07-12 | 上海交通大学 | Video camera reference method only using plane reference object image |
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| Publication number | Publication date |
|---|---|
| CN101303440A (en) | 2008-11-12 |
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