CN101299916B - Component mounting apparatus - Google Patents

Abstract

A component installing device with an electronic component supplying device (110) that maintains an electronic component (111) and mounts the maintained electronic component to a circuit board (161), including a component maintaining head (120) that enables the component maintaining element (121) maintaining the electronic component to be arranged in rows and lines and moves in mutually orthogonal X, Y directions; a component height detecting device (140) that is to detect whether maintaining gesture of the maintained electronic component by a plurality of component maintaining elements is good to detect height of the maintained electronic component by the component maintaining element, having a pair of light emitting portion (125) and a light receiving portion (142) that emits and receives light (143) detection detecting respectively angle (theta) of maintained electronic component by the component maintaining element for orthogonal direction (125) that is orthogonal with moving direction (124) of the moving component maintaining element by the component maintaining head.

Description

Component mounter

The application is dividing an application of following application

Application number: 200480013078.1

The applying date: on May 11st, 2004

Denomination of invention: component mounter

Technical field

The present invention relates to parts such as electronic unit are installed to the component mounter on the substrates such as circuit substrate.

Background technology

Existing electronic components mounting machine is for the parts supplied with from supply unit by the nozzle sorption of head and take out on the substrate that the back conveyance kept to the substrate maintaining part, then, parts is installed on this substrate.Check the maintenance posture of the parts that nozzle institute sorption keeps by inspection portion set on the mobile route of its head, and come the posture of correcting part as required and carry out fitting operation based on its check result.

Head has set in advance a plurality of nozzles, when checking the maintenance posture of these nozzle institute sorption parts in inspection portion, import the image information of a plurality of nozzle institute sorption parts one by one and do not check, by once being that the image information of a plurality of parts is imported and checked by 1 set transducer of inspection portion, can realize shortening keeping posture to check the needed time with the image information of a plurality of nozzles.

When checking the maintenance posture of nozzle institute sorption parts, although head moves above inspection portion, but also have by using line sensor (line sensor) and having the transducer of the face sensor (area sensor) of shutter (shutter) function as inspection portion, carry out above inspection portion, temporarily not making head stop with regard to the maintenance posture of the nozzle institute sorption parts that in statu quo move check (below, above inspection portion, do not make head stop just in statu quo the image information of mobile nozzle institute sorption parts input and keep the action of posture inspection to be called scanning motion), realize shortening and keep posture to check the needed time (for example, opening flat 9-186492 communique) with reference to the spy.

An example below with reference to Figure 36 simple declaration electronic unit height detection action in the prior art electronic component mounting apparatus.

Electronic component mounting apparatus 1020 shown in Figure 36 is examples of so-called robot type components erecting device, head with the nozzle that keeps electronic unit passes through at X, move on the Y direction and carry out remaining to installation to circuit substrate 1008 from parts, it comprises: supply unit 1002 is used to supply with electronic unit 1001; Head 1004, it comprises a plurality of installation nozzles 1003 that are used for taking out from supply unit 1002 electronic unit 1001; Identification part 1005 is used for the posture that the electronic unit 1001 that nozzle 1003 kept is installed in plane identification; Electronic unit height detection portion 1006, it has the illuminating part that is used to send collimated light beam and is used to receive the light receiver of above-mentioned collimated light beam, and the height detection of electronic unit 1001 that nozzle 1003 keeps is installed; Whether good the posture that control part 1007, its recognition result based on above-mentioned identification part 1005 carry out electronic unit 1001 proofreaied and correct and carried out the judgement of parts 1001 postures based on the testing result of above-mentioned electronic unit height detection portion 1006; Robot 1009, it at X, from supply unit 1002 moves to parts installation site circuit substrate 1008 on the Y direction with head 1004.

As shown in figure 37, on above-mentioned head 1004, a plurality of installation nozzles 1003 are aligned to row, and electronic unit height detection portion 1006 is configured to right angle orientation with respect to the detection moving direction α of head 1004.

Below, simple declaration is the action of electronic unit height detection in prior art electronic component mounting apparatus 1020.

For the installation nozzle of being installed by head 1,004 1003 takes out the electronic unit 1001 that is positioned to the sorption position by supply unit 1002, the installation nozzle 1003 of locating head 1004 and head 1004 by robot 1009 keeps electronic unit 1001.Because as above-mentioned a plurality of installation nozzles 1003 so each installation nozzle 1003 maintenance electronic units 1001 of on head 1004, being provided with.

When electronic unit 1001 is maintained at each when installing on nozzle 1003, for plane earth is confirmed the hold mode of electronic unit 1001, head 1004 is positioned to recognizing site in the identification part 1005 by robot 1009.

Each installs the flat state of electronic unit 1001 that nozzle 1003 keeps identification part 1005 identifications, and control part 1007 carries out the position correction of parts 1001 to the installation site based on above-mentioned recognition result.

Then, in order to carry out the detection of electronic unit 1001 short transverses, each of head 1004 installed nozzle 1003 by robot 1009 location, and as shown in figure 37, it passes through between the component height test section 1006 of arranged opposite along detecting moving direction α.At this moment, each is installed nozzle 1003 and is positioned at the sagging straight-through too collimated light beam that is used to detect 1010 of component height test section 1006 (for example opening the 2000-278000 communique with reference to the spy) of the state that detects height at the electronic unit 1001 that will be kept.When between component height test section 1006, passing through, based in component height test section 1006, detect, at each whether good maintenance posture the judgement that nozzle 1003 keeps formed image in the electronic unit 1001, control part 1007 carry out each electronic unit 1001 be installed.When carrying out the height detection of a plurality of electronic units 1001 continuously, by in component height test section 1006, detect each install nozzle 1003 that kept, in abutting connection with the gap between the electronic unit 1001, distinguish each electronic unit 1001 and carry out the differentiation of each electronic unit 1001.

When judging that electronic unit 1001 is non-defective unit in control part 1007, head 1004 comes localized electron parts installation site on circuit substrate 1008 by the action of robot 1009.On the other hand, when being judged as defective products, head 1004 moves to the discarded position (not shown) of electronic unit 1001, the electronic unit 1001 of discarded defective products.Like this, repeat aforesaid operations.

But existing electronic components mounting machine has following problems.

That is, when the maintenance posture of a plurality of nozzle institute sorption parts that undertaken by inspection portion being provided with on the head was checked, the image information of a plurality of parts was once imported by a transducer of inspection portion.At this moment, because the light that the Lighting Division that periphery disposes of the field range of the transducer by carrying out the input of this image information shines keeps the posture inspection, promptly owing to by same Lighting Division a plurality of parts are shone the light that is set to identical light quantity in the identical moment, therefore surface state/material/the color etc. by parts can not clearly obtain the image information of component shape.Therefore, in the single pass operation, existence is not the situation of checking the combination of the parts of precision and not forming the combination of the parts that keep posture inspection self in the inspection of maintenance posture.In this case, need import once more from the setting of the light of Lighting Division irradiation by change and be used to check the image information that is not to check precision or does not form the posture of the parts of checking self, increased thus and constituted the maintenance posture carry out repeatedly scan operation and check the desired time, its result just has the situation that electronic components mounting machine productivity ratio descends.

Owing in the transducer that inspection portion is provided with, once import the maintenance pose information of a plurality of nozzle institute sorption parts, if being angle of visibility, the field range of transducer becomes big, the resolution variation of each pixel of transducer then, can not obtain to check fully precision, its result just has the situation that electronic components mounting machine productivity ratio descends.

When the height detection of above-mentioned electronic unit, there is following problem.That is, when head 1004 included installation nozzles 1003 were 1 whens row, detecting action as above-mentioned component height becomes along detecting moving direction α and makes between component height test section 1006 and nozzle 1003 is installed only by once.But, as shown in figure 38, when installation nozzle 1003 multiple rows are configured on the head 1004, nozzle 1003 is installed on direction, is moved if make perpendicular to the collimated light beam 1010 of component height test section 1006, then owing to become the image of a plurality of electronic units 1001 of one-time detection, therefore detecting action can not once finish, and must carry out being listed as corresponding repeated detection action with each.

In recent years, just seeking the high speed of cycle period in the electronic component mounting apparatus, for this reason, the trend that exists head 1004 included installation nozzle 1003 numbers to increase, along with dwindling of equipment size, disposing installation nozzle 1003 by 2 row formations has also increased.Under this situation, become the high speed that hinders above-mentioned cycle period by being divided into the height detection action of repeatedly carrying out parts 1001.

Summary of the invention

Therefore, first purpose of the present invention provides a kind of electronic components mounting machine, and it can improve the productivity ratio in the electronic components mounting machine.

Second purpose of the present invention provides a kind of the seek apparatus for mounting component of cycle period high speed and the component mounting method of carrying out in this apparatus for mounting component.

In order to realize above-mentioned first purpose, the present invention is by following formation.

First form is characterised in that according to the present invention, and its formation comprises: supply unit, and it is used for supply part; Head, its with nozzle rows with the Y direction of directions X quadrature on dispose at least side by side more than 2 row, this nozzle rows be with take out and the nozzle of the parts that conveyance is supplied with from described supply unit in directions X row arrangement more than 1 at least also; The substrate maintaining part, it keeps substrate, and this substrate is installed the parts by the conveyance of described head institute; Inspection portion, it is configured in described supply unit from described head to the mobile route of described substrate maintaining part, check the maintenance posture of described nozzle institute holding member, in described inspection portion, have: the transducer of posture inspection usefulness, it is provided with one independently in each nozzle rows of the described nozzle that is disposed at described head; Lighting Division, its in each described nozzle rows, be provided with one, when posture is checked to the Lighting Division of described head irradiation light, it has and forms in each Lighting Division, is used for the optical information entrance port that the image of described nozzle institute holding member is imported.According to this formation, check by realize the maintenance posture of a plurality of parts of a plurality of nozzle rows institute's sorptions that head is provided with by the single pass operation, obtain to keep posture to check the shortening of the time of wanting, the maintenance posture of having sought nozzle institute holding member is simultaneously checked the raising of precision, as a result of, can improve the productivity ratio of component mounter.

Second form according to the present invention can be provided with independently entrance port and Lighting Division to each transducer of inspection portion.By this formation, for each transducer is each parts of each nozzle rows sorption of head setting, can independently carry out the setting of the light of Lighting Division irradiation, owing to can check by realize the maintenance posture of a plurality of parts of each nozzle rows institute's sorption by the single pass operation, therefore can obtain the shortening that posture is checked the time of wanting, as a result of, can improve the productivity ratio of component mounter.

The 3rd form according to the present invention can also dispose the center, the visual field of each transducer of inspection portion at directions X together side by side.By this formation, because the input of the image information of a plurality of nozzle rows institute sorption parts that can carry out that head is provided with in the identical moment, the maintenance posture that therefore can obtain nozzle institute sorption parts is checked and the shortening of the time of wanting as a result of, can be improved the productivity ratio of component mounter.And, can make inspection portion little in the shared space of directions X, thus can miniaturization, and the result can constitute the component mounter of miniaturization.

The 4th form according to the present invention can stagger the center, the visual field of each transducer of inspection portion and dispose side by side at directions X.According to this formation, when the interval of a plurality of nozzle rows that are provided with at head is narrow, with the visual field of each transducer of inspection portion under the state of directions X and neat configuration side by side, can not obtain enough Lighting Divisions the space is set, even under the light quantity because of the light of Lighting Division irradiation makes the situation that the maintenance posture that can not guarantee nozzle sorption parts checks that the parts of precision exist inadequately, by being staggered at directions X, the visual field of each transducer disposes side by side, can guarantee to be used to guarantee that nozzle institute holding member posture checks that the Lighting Division that is used to shine enough light light quantities of precision is provided with the space, as a result of, can improve the productivity ratio of component mounter.

The 5th form according to the present invention, the nozzle rows that can be provided with at head when the Y direction is above by 3 row arranged side by side, with the center, the visual field of each transducer of inspection portion at directions X with the snakelike configuration side by side of staggering.According to this formation, since with each center, transducer visual field is compared it and is diminished in the shared space of directions X in the directions X situation of configuration that staggers in turn side by side, the shortening of the image information input time of wanting of the maintenance posture of a plurality of nozzle rows institute sorption parts that therefore can obtain that head is provided with, as a result of, the productivity ratio of component mounter can be improved, simultaneously, the miniaturization of inspection portion can be made, as a result, can constitute the component mounter of miniaturization.

The 6th form according to the present invention, it comprises: supply unit, it is used for supply part; Head, its with nozzle rows with the Y direction of directions X quadrature on dispose at least side by side more than 2 row, this nozzle rows be with take out and the nozzle of the parts that conveyance is supplied with from described supply unit in directions X row arrangement more than 1 at least also; The substrate maintaining part, it keeps substrate, and this substrate is installed the parts by the conveyance of described head institute; Inspection portion, it is configured in described supply unit from described head to the mobile route of described substrate maintaining part, check the maintenance posture of described nozzle institute holding member, in described inspection portion, have: the transducer of posture inspection usefulness, it is provided with one independently in each nozzle rows of the described nozzle that is disposed at described head; Lighting Division, it is by shared in each described transducer, and to being provided with one in all described nozzle rows, to the Lighting Division of described head irradiation light, this Lighting Division has the optical information entrance port of the image input that is used for described nozzle institute holding member when posture is checked.

According to this formation, by all sensors common entrance port and Lighting Division are set for inspection portion, because the space that is provided with that can guarantee Lighting Division with it doesn't matter the interval of a plurality of nozzle rows of head setting, the inspection precision of checking for the maintenance posture that obtains nozzle sorption parts, can easily be configured for obtaining the Lighting Division of essential light light quantity, the maintenance posture that can easily seek nozzle institute holding member is checked the raising of precision, simultaneously, by being staggered at directions X, the center, the visual field of each transducer disposes side by side, can be the light quantity setting that each parts of each nozzle rows sorption of head setting carry out the light of Lighting Division irradiation to each transducer, owing to can check by realize the maintenance posture of a plurality of parts of each nozzle rows institute's sorption by the single pass operation, therefore can obtain the shortening that posture is checked the time of wanting, as a result of, can improve the productivity ratio of component mounter.

The 7th form according to the present invention can be arranged on the reflector that with the speculum is representative between entrance port and the transducer, with the side of sensor configuration in inspection portion.According to this formation, reflex on the sensor orientation of inspection portion side configuration by reflector by the optical information of making the nozzle sorption parts of entrance port incident, can reduce the height dimension of inspection portion, rigidity as this part inspection portion uprises, the maintenance posture that can seek nozzle institute sorption parts is checked the raising of precision, as a result of, can improve the productivity ratio of component mounter.And, by with sensor configuration in inspection portion side, can make maintenances such as the adjustment of transducer and exchange become easy.

The 8th form according to the present invention, can be with the reflection/see through body to be arranged between entrance port and the transducer that with half-reflecting mirror or prism is representative, from the reflection of the optical information of the nozzle sorption parts of entrance port incident/see through the body, the transducer of inspection portion is configured in its reverberation side alternately side by side and sees through the light side.According to this formation, in the time of below transducer being configured in side by side inspection portion and on the same one side of side, even under the situation on the influence because of transducer overall dimension expands to the interval of the nozzle rows of header arrangement to need, body will be arranged between entrance port and the transducer and the transducer of inspection portion is configured in this reflection/see through the reverberation side of body and see through the light side alternately by reflecting/seeing through, the interval of the nozzle rows of described header arrangement is narrowed down, as a result, make the head miniaturization.Diminish because inspection portion is taken up space in the Y direction, therefore can make the miniaturization of inspection portion.

The 9th form according to the present invention can reflect lens configuration/seeing through between the transducer of body and inspection portion.By this formation, even the interval of a plurality of nozzle rows that are provided with at head is narrow, promptly below each transducer of inspection portion being configured in side by side inspection portion and under the state on the one side together of side, the interval of each transducer is narrow and lens diameter that can not guarantee to be used for the abundant brightness of transducer makes that the optical information brightness that is input to transducer is not enough, thereby make the maintenance posture that to guarantee nozzle institute sorption parts check under the situation of precision, be arranged between entrance port and the transducer by reflecting/see through body, the transducer of inspection portion is configured in this reflection/see through the reverberation side of body alternately and see through the light side and with lens configuration between each transducer of this reflection/through body and inspection portion, owing to can make this lens diameter become big, therefore the maintenance posture that can seek the nozzle institute sorption parts of described header arrangement is checked the raising of precision, as a result of, can improve the productivity ratio of component mounter.

The 10th form according to the present invention can be with the reflection/see through body to be arranged between entrance port and the transducer that with half-reflecting mirror or prism is representative, sees through the light side at reflection/see through body and can append sensors configured on the optional position of input picture.According to this formation, in a plurality of transducers of inspection portion, the image information of coming input block by transducer by the maintenance posture inspection that is suitable for most each nozzle institute sorption parts, can seek to keep posture to check the raising of precision, simultaneously, by increasing number of sensors, the posture that can seek nozzle institute sorption parts is checked the raising of precision, the expansion of object parts can also be sought to check, as a result of, the productivity ratio of component mounter can be improved.

The 11st form according to the present invention can make the different transducer of angle of visibility comprise in the transducer of inspection portion.According to this formation, in a plurality of transducers of inspection portion, the image information that the transducer of the maintenance posture inspection by being suitable for most each nozzle institute sorption parts by angle of visibility comes input block, can seek to keep posture to check the raising of precision, simultaneously, by comprising the different transducer of angle of visibility, the posture that can seek nozzle institute sorption parts is checked the raising of precision, the expansion of object parts can also be sought to check, as a result of, the productivity ratio of component mounter can be improved.

The 12nd form according to the present invention can make the different transducer of resolution comprise in the transducer of inspection portion.According to this formation, in a plurality of transducers of inspection portion, the image information that the transducer of the maintenance posture inspection by being suitable for most each nozzle institute sorption parts by resolution comes input block, can seek to keep posture to check the raising of precision, simultaneously, by comprising the different transducer of resolution, the posture that can seek nozzle institute sorption parts is checked the raising of precision, the expansion of object parts can also be sought to check, as a result of, the productivity ratio of component mounter can be improved.

In order to realize above-mentioned second purpose, the present invention is by following formation.

Promptly, the apparatus for mounting component of the present invention's the 13rd form, be to keep from the electronic unit of electronic part feeder and the electronic unit that is kept is installed to the apparatus for mounting component of circuit substrate, be characterised in that, it comprises: parts keep head, and it makes the parts retaining member multiple lines and multiple rows that keeps above-mentioned electronic unit arrange and move on mutually orthogonal X, Y direction; The component height checkout gear, it is the component height checkout gear that detects the height of the above-mentioned electronic unit that above-mentioned parts retaining member kept for the maintenance posture of checking the above-mentioned electronic unit that a plurality of above-mentioned parts retaining member keeps is whether good, have a pair of illuminating part and light receiver, for with the orthogonal direction that keeps the moving direction quadrature of the above-mentioned parts retaining member that head moved by above-mentioned parts, but it sends and receives to detect with detection angles (θ) and uses up, and is used for detecting respectively the above-mentioned electronic unit that each parts retaining member is kept.

When the configuration space of each parts retaining member is made as P1 and the configuration space of parts retaining member in the above-mentioned orthogonal direction is made as P2 in above-mentioned moving direction, but above-mentioned detection angles θ passes through tan ^-1(the angle of (P1/2)/P2) try to achieve.

It is constituted as and also comprises control device, it is within the component height information that above-mentioned component height checkout gear is sent, based on above-mentioned parts retaining member as the center and the above-mentioned component height information between the detection zone of moving direction is judged the whether good of above-mentioned electronic unit.

The component mounting method of the present invention's the 14th form, it is the component mounting method that keeps electronic unit and be installed to circuit substrate, be characterised in that, it comprises: after keeping above-mentioned electronic unit by the parts retaining member of arranging with multiple lines and multiple rows, before being installed to the foregoing circuit substrate, for with the orthogonal direction of the moving direction quadrature of above-mentioned parts retaining member, but send to detect with detection angles (θ) and use up and receive this detection and use up, be used for detecting the above-mentioned electronic unit that each parts retaining member is kept respectively, and check whether the maintenance posture of the above-mentioned electronic unit that a plurality of above-mentioned parts retaining members are kept is good.

According to the apparatus for mounting component of the invention described above the 13rd form and the component mounting method of the 14th form, by comprising the component height checkout gear, use up and receive this detection and use up to be used for detecting respectively the electronic unit that each parts retaining member kept and check whether the maintenance posture of the above-mentioned electronic unit that a plurality of above-mentioned parts retaining members are kept is good but send to detect with detection angles.Therefore, even under situation, do not increase and detect number of times and, just can obtain the image information of whole electronic units by single pass with multiple lines and multiple rows arrangement part retaining member.Therefore, compared with prior art, can seek to install the high speed of relevant cycle period with parts.

And, by comprising control device and based on coming decision means to keep posture whether good as the component height information between the detection zone at center above-mentioned parts retaining member, even under the situation of image overlap between the adjacent electronic unit, also can determine the component height information of having tried to achieve which electronic unit.Therefore, the result compared with prior art, can seek to install with parts the high speed of relevant cycle period.

Description of drawings

Purpose of the present invention and feature will be by becoming clear with the related following explanation in a preferred embodiment of appended accompanying drawing.

Fig. 1 is the approximate vertical view of expression first embodiment of the invention component mounter.

Fig. 2 is the stereogram of the head of above-mentioned first execution mode of expression.

Fig. 3 is the vertical view of the inspection portion of above-mentioned first execution mode of expression.

Fig. 4 is the sequential chart of transducer shooting in the inspection portion of above-mentioned first execution mode.

Fig. 5 is the cutaway view of the above-mentioned first execution mode inspection portion of expression.

Fig. 6 is the end view of the above-mentioned first execution mode inspection portion of expression.

Fig. 7 is the cutaway view of expression second embodiment of the invention inspection portion.

Fig. 8 is the end view of expression second embodiment of the invention inspection portion.

Fig. 9 is the vertical view of expression third embodiment of the invention inspection portion.

Figure 10 is the cutaway view of above-mentioned the 3rd execution mode inspection portion of expression.

Figure 11 is the end view of above-mentioned the 3rd execution mode inspection portion of expression.

Figure 12 is the vertical view of expression four embodiment of the invention inspection portion.

Figure 13 is the sequential chart of transducer shooting in the inspection portion of above-mentioned the 4th execution mode.

Figure 14 is the cutaway view of above-mentioned the 4th execution mode inspection portion of expression.

Figure 15 is the end view of above-mentioned the 4th execution mode inspection portion of expression.

Figure 16 is the cutaway view of expression fifth embodiment of the invention inspection portion.

Figure 17 is the end view of above-mentioned the 5th execution mode inspection portion of expression.

Figure 18 is the vertical view of expression sixth embodiment of the invention inspection portion.

Figure 19 is the cutaway view of above-mentioned the 6th execution mode inspection portion of expression.

Figure 20 is the end view of above-mentioned the 6th execution mode inspection portion of expression.

Figure 21 is the vertical view of expression seventh embodiment of the invention inspection portion.

Figure 22 is the sequential chart of transducer shooting in the inspection portion of above-mentioned the 7th execution mode.

Figure 23 is the cutaway view of above-mentioned the 7th execution mode inspection portion of expression.

Figure 24 is the end view of above-mentioned the 7th execution mode inspection portion of expression.

Figure 25 is the vertical view of expression eighth embodiment of the invention inspection portion.

Figure 26 is the cutaway view of above-mentioned the 8th execution mode inspection portion of expression.

Figure 27 is the end view of above-mentioned the 8th execution mode inspection portion of expression.

Figure 28 is the vertical view of expression ninth embodiment of the invention inspection portion.

Figure 29 is the cutaway view of above-mentioned the 9th execution mode inspection portion of expression.

Figure 30 is the end view of above-mentioned the 9th execution mode inspection portion of expression.

Figure 31 is the stereogram of tenth embodiment of the invention apparatus for mounting component.

Figure 32 is used for illustrating that the component height of carrying out at component height checkout gear shown in Figure 31 detects the stereogram of action.

Figure 33 is used for illustrating that the component height of carrying out at component height checkout gear shown in Figure 31 detects the vertical view of action.

Figure 34 is the figure that is illustrated in the image of the parts of gained in the component height checkout gear shown in Figure 31.

Figure 35 is the figure that is used for illustrating based on try to achieve the method for component height at the image of component height checkout gear resulting part shown in Figure 31.

Figure 36 is the stereogram of prior art apparatus for mounting component.

Figure 37 is the figure that is used for illustrating at the height detection method of prior art component height test section.

Figure 38 is the figure that is used for illustrating at the height detection method of prior art component height test section during when multiple lines and multiple rows arrangement part retaining member.

Embodiment

Before explanation the present invention, in the accompanying drawings identical parts have been provided identical reference marker.

Below, with reference to the accompanying drawings, describe each execution mode of the present invention in detail.

(execution mode 1)

Below, use Fig. 1 to Fig. 6, first execution mode of the present invention is described.

Fig. 1 is the approximate vertical view of expression first embodiment of the invention electronic components mounting machine, Fig. 2 is the stereogram of the above-mentioned electronic components mounting machine head of expression, and Fig. 3 is sequential chart, the cutaway view of inspection portion and the end view of inspection portion of the image information input (being called shooting later on) of nozzle institute sorption parts in the vertical view, inspection portion of the inspection portion of above-mentioned electronic components mounting machine to Fig. 6.

As shown in Figure 1, supply unit 2 has been installed a plurality of supply bodies 3 that are used for supply part (Fig. 1 does not have diagram), the parts of supplying with by this supply unit 2 are by set a plurality of nozzles (aftermentioned) sorptions maintenance of the head that can move on the XY direction 6, become to be installed on the substrate 5 that substrate maintaining part 4 kept.This substrate maintaining part 4 not only keeps described substrate 5, also bears the task at directions X conveyance and location substrate 5.

On described head 6, as shown in Figure 2 from nozzle rows 1 nozzle 8a to 8e and to nozzle rows 2 nozzle 9a to 9e, amount to 10 nozzles in 52 nozzle rows arranged side by side of directions X configuration at Y direction 2 row respectively.From this nozzle rows 1 nozzle 8a to 8e and the configuration space from nozzle rows 2 nozzle 9a to 5 nozzles of each nozzle rows of 9e be set to correspondingly with the configuration space of the supply body 3 of described supply unit 2, being constituted as can a plurality of parts of sorption.From this nozzle rows 1 nozzle 8a to 8e with the overall dimension of the nozzle institute sorption parts of the interval from nozzle rows 2 nozzle 9a to the 2 row nozzle rows of 9e by considering each nozzle rows, reserve by the sorption parts and do not contact the interval of not interfering above distance.The 10th, be used to proofread and correct the motor of the position of rotation of axle core rotation from nozzle rows 1 nozzle 8a to 8e, from nozzle rows 2 nozzle 9a to 9e, it is constituted as by making these motor 10 rotations make it possible to adjust from nozzle rows 1 nozzle 8a to 8e and the position of rotation from nozzle rows 2 nozzle 9a to each nozzle of 9e.

Inspection portion 7 is configured between described supply unit 2 and the substrate maintaining part 4, carries out the maintenance posture inspection to 9e institute sorption parts from nozzle rows 1 nozzle 8a to 8e, from nozzle rows 2 nozzle 9a of configuration on the described head 6 by this inspection portion 7.

Be provided with the control part 50 that is used to control described each action on this electronic components mounting machine 1.This control part 50 has been stored installation site information such as the position of kind, installation of institute's mounted component on the substrate 5 and angle.Described inspection portion 7 checks the maintenance posture from nozzle rows 1 nozzle 8a to 8e, from nozzle rows 2 nozzle 9a to the parts that 9e kept that is disposed on the head 6 from the image information of the parts of being made a video recording.When the maintenance posture of parts misplaces with respect to the posture of stipulating, 50 computings on one side of described control part are used to proofread and correct the i.e. anglec of rotation from nozzle rows 1 nozzle 8a to 8e, from nozzle rows 2 nozzle 9a to 9e of the anglec of rotation of the motor 10 of the XY amount of movement of described head 6 of this dislocation and head 6, by control part 50 control each ones move and carry out installation to the substrate 5 of parts on one side.

And the electronic components mounting machine 1 of present embodiment by shown in Figure 1, constitutes symmetrical 2 level structures in order to seek the raising of productivity ratio, at different levelsly can independently carry out fitting operation.

Below, describe in detail disposed on the head 6 from nozzle rows 1 nozzle 8a to 8e, from nozzle rows 2 nozzle 9a to 9e on the maintenance posture inspection of parts inspection portion 7 of institute's sorption.

The 11a of Fig. 3,11b are the nozzle rows 1 nozzle 8a that is disposed on the described head 6 (not having diagram among Fig. 3), first parts that the sorption of 8b institute keeps, and 12a, 12b are second parts that nozzle rows 2 nozzle 9a, the sorption of 9b institute keep.The 3rd later nozzle 8c of each nozzle rows, 8d, 8e, 9c, 9d, the parts of 9e and these nozzle institute sorptions do not illustrate in Fig. 3 by omitting, and omit in the explanation afterwards yet.The 13rd, the first parts 11a, the 11b that the nozzle rows 1 nozzle 8a that is used to make a video recording, the sorption of 8b institute keep keeps the first sensor of posture, the 15th, when shooting with first Lighting Division of irradiate light to the first parts 11a, 11b, the 17th, when shooting, be used to be taken into first entrance port of optical information.Equally, the 14th, nozzle rows 2 nozzle 9a, the second parts 12a of 9b institute sorption maintenance, second transducer of 12b are used to make a video recording, the 16th, when shooting with second Lighting Division of irradiate light to the second parts 12a, 12b, the 18th, when shooting, be used to be taken into second entrance port of optical information.First, second Lighting Division 15,16 is respectively along the peripheral part setting of first, second entrance port 17,18.Here, the interval at the center, the visual field of first sensor 13 and the center, the visual field of second transducer 14 be configured to make with head 6 on the interval of the nozzle rows that disposes be that the interval at center of the center of nozzle rows 1 nozzle 8a and nozzle rows 2 nozzle 9a is consistent.And configuration makes the center of the entrance port 17 of winning, the center of first Lighting Division 15 and center, the visual field unanimity of first sensor 13, and same configuration makes the center of second entrance port 18, the center of second Lighting Division 16 and center, the visual field unanimity of second transducer 14.Pretty good turn up the soil at directions X and dispose side by side in the center of the center of first entrance port 17 and second entrance port 18, with the connecting line of corresponding each nozzle center of Y direction of head 6 nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, 9b, promptly the connecting line at the center of nozzle rows 1 nozzle 8a and the center of nozzle rows 2 nozzle 9a is configured to parallel with the center of first entrance port 17 and the connecting line at the center of second entrance port 18.

The nozzle rows 1 nozzle 8a that is carrying out described header arrangement, 8b, nozzle rows 2 nozzle 9a, the first parts 11a of 9b institute sorption, 11b, the second parts 12a, when the maintenance posture of 12b is checked, at first, make head 6 on the Y direction, move the nozzle rows 1 nozzle 8a that makes head 6 configurations, 8b, nozzle rows 2 nozzle 9a, first of each nozzle rows of 9b and inspection portion 7, second transducer 13, after the Y direction position consistency at 14 each centers, visual field (Fig. 3 is the state that has finished that moves to the Y direction), shown in the arrow of Fig. 3, make and in inspection portion 7, pass through by head 6 is moved at directions X, by first, second transducer 13,14 carry out first to each parts respectively, the second parts 8a, 8b and 9a, the shooting of 9b.The shooting of these first, second parts 8a, 8b and 9a, 9b first, second transducer 13,14 come by the shutter function of using face sensor during for face sensor head 6 by inspection portion 7 above the time do not make to suspend on head 6 first, second entrance port 17,18 and carry out in inspection portion 7.Particularly, shown in Fig. 4 sequential chart, by head 6 directions X in inspection portion 7 is moved, at nozzle rows 1 nozzle 8a, nozzle rows 2 nozzle 9a is the moment at the center, the visual field of first, second transducer 13,14 by the center of first, second entrance port 17,18 respectively, the shutter of opening first, second transducer 13,14 exposes, and carries out simultaneously by sorption first parts 11a of 13 pairs of nozzle rows of first sensor, 1 nozzle 8a institute and the shooting by 14 pairs of nozzle rows of second transducer, the 2 sorption second parts 12a of nozzle 9a institute.And, make head 6 continue to move at directions X, pass through the moment at the center, the visual field of first, second transducer 13,14 respectively at nozzle rows 1 nozzle 8b, nozzle rows 2 nozzle 9b, the shutter of opening first, second transducer 13,14 exposes, and carries out simultaneously by sorption first parts 11b of 13 pairs of nozzle rows of first sensor, 1 nozzle 8b institute and the shooting by 14 pairs of nozzle rows of second transducer, the 2 sorption second parts 12b of nozzle 9b institute.Below, do not have illustrated equally, carry out the shooting of whole parts of 10 nozzle institutes sorption of configuration on the head 6.And, in the shooting moment of using,, carry out each parts being set the irradiation of light by first, second Lighting Division 15,16 for the parts of making a video recording by the control of described control part 50 by the shutter function of this first, second transducer 13,14.And, line sensor is being used as first, second transducer 13,14 o'clock, in the explanation of using described face sensor situation, be not to use the shutter function of transducer, pass through first at shooting object parts, second transducer 13, pass through first during in 14 visuals field, second transducer 13,14 continue the input aspect of image information and pass through first at shooting object parts, second transducer 13, promptly pass through first during in 14 visuals field, second transducer 13,14 continue during the input of image information by first, second Lighting Division 15,16 continue only difference of irradiate light aspect, and shooting is identical in proper order.

By becoming this formation, for the first parts 11a and the second parts 12a and the first parts 11b and the second parts 12b that walk abreast and pass through in the Y direction in inspection portion 7, the light that can independently carry out being shone by first, second Lighting Division 17,18 is set.Therefore, if the first parts 11a and the second parts 12a and the first parts 11b and second parts 12b view mode difference under identical light is set, exist under the situation of combination even then check that precision is not enough or can not carry out the parts that self posture checks in posture, move at directions X by head 6 and to make in inspection portion 7 only by once, promptly by single pass operation just can the carrying out shooting and the posture inspection of whole parts.And, because pretty good being turned up the soil at directions X in the center, the visual field of first, second transducer 13,14 disposes side by side, owing to can carry out the shooting of 2 parts at synchronization, therefore can seek whole parts shootings needs the shortening of time, its result can seek to keep posture to check the shortening of the time of wanting.

Since on per 1 nozzle of nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, 9b promptly on each parts of the first parts 11a, 11b and the second parts 12a, 12b respectively by using first, second transducer 13,14 to make a video recording, with compare by the situation that the visual field is become carry out greatly a plurality of parts shootings with a transducer as prior art, can make the resolution variation not of each pixel of transducer, thereby seek to keep posture to check the raising of precision.

19 of Fig. 5, Fig. 6 is reflectors such as speculum, constitute described first, second entrance port 17 that makes configuration above inspection portion 7, the optical information of the image of first, second parts 11a, the 11b of incident and 12a, 12b reflection in 18, and first, second transducer 13,14 that configuration is used to make a video recording on the side of inspection portion 7.According to this formation, with by with first, second transducer 13,14 be arranged on the following of inspection portion 7 and direct reception from first, second entrance port 17, the formation situation of 18 optical information is compared, can reduce the height dimension of inspection portion 7, if the rigidity as this part inspection portion 7 uprises, can seek parts keeps posture to check the raising of precision, simultaneously, by with first, second transducer 13,14 are configured in the side of inspection portion 7, with not disposing reflector 19 with first, second transducer 13, the 14 following promptly inner situations that are configured in inspection portion 7 are compared, and can make first, second transducer 13, the maintenance of 14 adjustment and replacing etc. becomes easy.

And, although do not illustrate, but first sensor 13 needs not be identical angle of visibility and resolution with second transducer 14, seeks to keep posture to check that the parts of object enlarge promptly as the expansion of electronic components mounting machine 1 corresponding component and can seek the raising of productivity ratio by the transducer of configuration various combination.As object lesson, by the angle of visibility that makes first sensor 13 is 8mm angle and will keep posture to check that the object parts are as being the profiled parts of the square shaped core chip part of the vertical 3mm of horizontal 6mm to overall dimension 6mm angle from overall dimension, by the angle of visibility that makes second transducer 14 is 6mm angle and will keep posture to check that the object parts are as being the profiled parts of the square shaped core chip part of the vertical 2mm of horizontal 4mm to overall dimension 4mm angle from overall dimension, to all first, second transducer 13,14, by making the resolution of transducer 13 become 30 everything elements as 8mm angle of visibility, the resolution of transducer 14 becomes 80 everything elements, compare with first sensor 13, the maintenance posture inspection object parts of second transducer 14 can be made can be corresponding to more small parts.But, under with first, second transducer 13,14 situation as the angle of visibility combination different with resolution, check on the object parts for the nozzle rows 1 nozzle 8a, the 8b that make head 6 configuration and nozzle rows 2 nozzle 9a, the first parts 11a, the 11b of 9b institute sorption and the maintenance posture that the second parts 12a, 12b are limited to the first sensor 13 and second transducer 14 respectively, need study intensively that supply unit 2 is supplied with the configuration sequence of bodies 3 and from the parts sorption order of supplying with body 3.

In the present embodiment, although the included nozzle of head is 2 row, each row nozzle is 5, is not limited to this, obviously is to be fine more than 3 row, even the radical of 1 row nozzle is also to be fine outside 5.The number of corresponding sensor, Lighting Division, entrance port also can be for more than 3 therewith.Even second execution mode in the back, this also is identical.

(execution mode 2)

Below, use Fig. 7 and Fig. 8 to carry out the explanation of second embodiment of the invention.

Second embodiment of the invention will reflect/see through body 20 and be configured in first, second entrance port 17,18 and first, second transducer 13,14 between replace the reflector 19 of described execution mode 1, because only sensor configuration that other mode is standby is identical formations in this reflection/see through the seeing through light side this point difference of body 20 and at other points, therefore provide identical label for same component part, and omitted its detailed description.

In Fig. 7 and Fig. 8, the 20th, be reflection/the see through body of representative with half-reflecting mirror or prism, the 13rd, be set at this reflection/see through reverberation side of body 20, the 21st, be set at this reflection/the see through first sensor and first backup sensors that see through the light side of body 20, it is used to carry out head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, the shooting of 11b, the 14th, be set at this reflection/see through reverberation side of body 20, the 22nd, be set at this reflection/see through second transducer and second backup sensors that see through the light side of body 20, it is used to carry out head 6 nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, the shooting of 12b.Here, the center, the visual field of the center, the visual field of the center, the visual field of the center, the visual field of first sensor 13 and first backup sensors 21 and second transducer 14 and second backup sensors 22 is configured as consistent respectively.The first sensor 13 and first backup sensors 21 and second transducer 14 and second backup sensors 22, resolution or angle of visibility can be different separately for they, perhaps resolution and angle of visibility neither with.

Like this, for the maintenance posture of each parts of the first parts 11a, the 11b of head 6 nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, the sorption of 9b institute and the second parts 12a, 12b is checked, as which structure different or the two two kinds of all different transducers that has its resolution or angle of visibility, when making a video recording, can be by being that parts selectively use these two kinds of transducers to seek to keep posture to check the raising of precision or the expansion that posture is checked the object parts according to the shooting object.

And, in execution mode 2, for nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, the first parts 11a of 9b institute sorption, the 11b and the second parts 12a, 12b, in order to keep the posture inspection, although as which structure different or the two two kinds of all different transducers that has its resolution or angle of visibility, but, according to needs as electronic components mounting machine 1, by only which backup sensors of first backup sensors 21 or second backup sensors 22 being configured in the inspection portion 7, for only to the first parts 11a, the 11b or the second parts 12a, the parts of 12b keep the posture inspection, also can make which structure different or the two two kinds of all different transducers that has its resolution or angle of visibility.

(execution mode 3)

Below, use Fig. 9 to carry out the explanation of third embodiment of the invention to Figure 11.

Third embodiment of the invention will reflect/see through body 20 and be configured in the reflector 19 of replacing described execution mode 1 between entrance port and the transducer, because only in order to carry out the nozzle rows 2 nozzle 9a that inspection portion 7 sides are disposed, the second parts 12a of 9b institute sorption, the maintenance posture inspection of 12b and second transducer 14 of making a video recording are configured in seeing through light side this point and limit and will being used for first of reflection/see through body 20, second transducer 13,14 lens configuration is reflecting/is seeing through body 20 and first, second transducer 13, different and are identical formations on this point between 14 for other points, therefore provide identical label for same component part, and omitted its detailed description.

At Fig. 9 in Figure 11, the 20th, in first, second entrance port 17,18 and first, second transducer 13,14 between reflections such as half-reflecting mirror/the see through body that is provided with, the 23rd, be used for first lens of the first sensor 13 that the maintenance posture of head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b checks, it is set at described reflection/see through between body 20 and the first sensor 13.The 24th, be used for second lens of second transducer 14 that the maintenance posture of nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b checks, it is set at described reflection/see through between the body 20 and second transducer 14.

By this formation, with first, second transducer 13, when the 14 same one sides that are configured in the following or side of inspection portion 7 side by side go up, even first, second transducer 13,14 overall dimension has to make first greatly, expand under the situation on needing at second entrance port 17 and 18 interval, promptly at the nozzle rows 1 nozzle 8a of head 6 configuration, 8b and nozzle rows 2 nozzle 9a, the interval of the nozzle rows of 9b becomes under the situation on needing, be arranged on first by reflecting/see through body 20, second entrance port 17,18 and first, second transducer 13, between 14, the transducer of inspection portion 7 is configured in this reflection/see through the reverberation side of body 20 alternately and sees through the light side and be about to first sensor 13 and be configured in the reverberation side, second transducer 14 is configured in through the light side, can make the nozzle rows 1 nozzle 8a of head 6 configurations, 8b and nozzle rows 2 nozzle 9a, the interval of the nozzle rows of 9b narrows down, thereby it is small-sized to make that head 6 forms.Owing to first entrance port 17 of inspection portion 7 and the interval of second entrance port 18 are narrowed down, therefore can make the size decreases of the Y direction of inspection portion 7.

Nozzle rows 1 nozzle 8a in head 6 settings, 8b and nozzle rows 2 nozzle 9a, the interval of 9b is narrow and with first, second transducer 13,14 be configured in below the inspection portion 7 side by side or the side with under the state on the one side, even because of guaranteeing to be used for first, second transducer 13, the lens diameter of 14 abundant brightness and make and be input to first, second transducer 13, thereby making inadequately, 14 optical information brightness can not guarantee nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, first of 9b institute sorption, the second parts 11a, 11b and 12a, the maintenance posture of 12b is checked under the situation of precision, by with first, second lens 23,24 are configured in reflection/see through body 20 and first, second transducer 13, between 14, this lens diameter is done greatly.Therefore, can seek on the head 6 raising of the maintenances posture inspection precision of first, second parts 11a, the 11b of the nozzle rows 1 nozzle 8a, the 8b that are provided with and nozzle rows 2 nozzle 9a, the sorption of 9b institute and 12a, 12b.

(execution mode 4)

Below, use Figure 12 to carry out the explanation of four embodiment of the invention to Figure 15.

Four embodiment of the invention is compared with described execution mode 1, be disposed at side by side in 5 row nozzle rows arranged side by side of directions X and with Y direction 3 row 15 nozzles are set on the head altogether by appending nozzle 6, in order to carry out the maintenance posture inspection of these 3 row nozzle rows institute sorption parts, in inspection portion 7, append 1 transducer, 3 transducers are set altogether, owing to only disposing on this point different by center, the visual field in snakelike staggering of directions X side by side but on other aspects, be same formation with these three transducers, therefore provide identical label for same component part, and omitted its detailed description.

The 26a of Figure 12,26b are the nozzle rows 3 nozzle 25a of head 6 configurations, the 3rd parts that the sorption of 25b institute keeps.And, not have in Figure 12, to illustrate to the 5th nozzle and these nozzles institute sorption parts by omitting the 3rd of nozzle rows 3 nozzles, even yet omission in the following description.Although diagram not, it remains on head 6 at directions X 5 nozzles arranged side by side, in Y direction 3 row nozzle rows 1,2,3 arranged side by side, constitute by having 15 structure of nozzle altogether.

At Figure 12 in Figure 15, the 29th, the nozzle rows 3 nozzle 25a that are used to make a video recording, the sorption of 25b institute keep the 3rd transducer of the maintenance posture of the 3rd parts 26a, 26b, the 27th, when this is made a video recording with the 3rd Lighting Division of irradiate light to the three parts 26a, 26b, the 28th, when this shooting, be used to import the 3rd entrance port of optical information, described the 3rd Lighting Division 27 is along the peripheral part setting of the 3rd entrance port 28.Here, the center, the visual field of the center, the visual field of first sensor 13 and second transducer 14 is configured to respectively nozzle rows 1 nozzle 8a with header arrangement at the interval of Y direction at the center, the visual field of the center, the visual field of the interval of Y direction and second transducer 14 and the 3rd transducer 29,8b and nozzle rows 2 nozzle 9a, nozzle rows interval and the nozzle rows 2 nozzle 9a of 9b, 9b and nozzle rows 3 nozzle 25a, the nozzle rows of 25b is that the interval at center of the center of interval and nozzle rows 2 nozzle 9a at center of the center of nozzle rows 1 nozzle 8a and nozzle rows 2 nozzle 9a and nozzle rows 3 nozzle 25a is consistent at interval.And configuration makes the center, the visual field of the center of center, first Lighting Division 15 of the entrance port 17 of winning and first sensor 13 consistent, same configuration makes that the center, the visual field of the center of center, second Lighting Division 16 of second entrance port 18 and second transducer 14 is consistent, and same configuration makes that the center, the visual field of the center of center, the 3rd Lighting Division 27 of the 3rd entrance port 28 and the 3rd transducer 29 is also consistent.And, the center that configuration makes the center of the entrance port 17 of winning and the 3rd entrance port 28 is in the directions X configuration side by side of not staggering, that is to say, make with corresponding each nozzle center of Y direction of nozzle rows 1 nozzle 8a, the 8b of head 6 and nozzle rows 3 nozzle 25a, 25b on connecting line for example the supercentral connecting line of the center of nozzle rows 1 nozzle 8a and nozzle rows 3 nozzle 26a with become parallel at the center of first entrance port 17 and the supercentral connecting line of the 3rd entrance port 28.Configuration makes the center of the entrance port 17 of winning and the center of second entrance port 18 stagger side by side at directions X, make first, second, third entrance port 17,18,28 center i.e. each center, visual field of first, second, third transducer 13,14,29 becomes snakelike at directions X.

Below, the maintenance posture of nozzle institute sorption parts in inspection portion 7 that describes head 6 configurations in detail checked.

Carrying out the nozzle rows 1 nozzle 8a that described head 6 is disposed, 8b and nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the first parts 11a of 25b institute sorption, 11b, the second parts 12a, 12b and the 3rd parts 26a, when the maintenance posture of 26b is checked, at first, make head 6 on the Y direction, move the nozzle rows 1 nozzle 8a that makes head 6 configurations, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 26a, first of each nozzle rows of 26b and inspection portion 7, second, the 3rd transducer 13,14, after the Y direction position consistency at 29 each centers, visual field, shown in the arrow of Figure 12, make and in inspection portion 7, pass through by head 6 is moved at directions X, by first, second, the 3rd transducer 13,14,29 carry out first to each parts respectively, second, the 3rd parts 11a, 11b, 12a, 12b and 26a, the shooting of 26b.At first, second, third transducer 13,14,29 when being face sensor, the shooting of these first, second, third parts 11a, 11b, 12a, 12b, 26a, 26b is by using first, second, third transducer 13,14,29 shutter function come head 6 by inspection portion 7 above the time do not make first, second, third entrance port 17 of head in inspection portion 7, suspend on 18,28 and carry out.Particularly, shown in Figure 13 sequential chart, by head directions X in inspection portion 7 is moved, at nozzle rows 1 nozzle 8a, nozzle rows 3 nozzle 25a is the first, the 3rd transducer 13 by the center of the first, the 3rd entrance port 17,28 respectively, the moment at 29 center, the visual field, open the first, the 3rd transducer 13,29 shutter exposes, and carries out simultaneously by sorption first parts 11a of 13 pairs of nozzle rows of first sensor, 1 nozzle 8a institute and the shooting by 29 pairs of nozzle rows of the 3rd transducer, 3 sorption the 3rd parts 26a of nozzle 25a institute.And, continue to make head to continue to move at directions X, the center of passing through second entrance port 18 at nozzle rows 2 nozzle 9a is the moment at the center, the visual field of second transducer 14, the shutter of opening second transducer 14 exposes, and carries out the shooting by 14 pairs of nozzle rows of second transducer, the 2 sorption second parts 12a of nozzle 9a institute simultaneously.Continue to make head to continue to move at directions X, pass through the first, the 3rd transducer 13 respectively at nozzle rows 1 nozzle 8b, nozzle rows 3 nozzle 25b, the moment at 29 center, the visual field, open the first, the 3rd transducer 13,29 shutter exposes, and carries out simultaneously by sorption first parts 11b of 13 pairs of nozzle rows of first sensor, 1 nozzle 8b institute and the shooting by 14 pairs of nozzle rows of the 3rd transducer, 3 sorption the 3rd parts 26b of nozzle 25b institute.Continue to make head to continue to move at directions X, pass through the moment at the center, the visual field of second transducer 14 at nozzle rows 2 nozzle 9b, the shutter of opening second transducer 14 exposes, the shooting of 14 pairs of nozzle rows of second transducer, the 2 sorption second parts 12b of nozzle 9b institute of working of going forward side by side.And, in the shooting moment of using by the shutter function of this first, second, third transducer 13,14,29, for the parts of making a video recording by the control of described control part 50, carry out each parts being set the irradiation of light by first, second, third Lighting Division 15,16,27.And, line sensor is being used as first, second, the 3rd transducer 13,14,29 o'clock, in the explanation of using described face sensor situation, only pass through first at the shooting object parts that are not to use the transducer shutter function, second, the 3rd transducer 13,14, during in 29 visuals field, by first, second, the 3rd transducer 13,14,29 continue the input aspect of image information and pass through first at shooting object parts, second, the 3rd transducer 13,14, promptly pass through first during in 29 visuals field, second, the 3rd transducer 13,14,29 continue during the input of image information, by first, second, the 3rd Lighting Division 15,16,27 continue irradiate light aspect difference, but shooting is identical in proper order.

And, in the detailed description that aforementioned maintenance posture is checked, nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the first parts 11a of 25b institute sorption, 11b, the second parts 12a, 12b and the 3rd parts 26a, 26b is by first, second, the 3rd transducer 13,14,29 shooting is the example of electronic components mounting machine 1 situation in proper order, and this electronic components mounting machine 1 constitutes: at the nozzle rows 1 nozzle 8a of described head setting, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, nozzle in each nozzle rows of 25b is that the interval at center of the center of nozzle rows 1 nozzle 8a and nozzle rows 1 nozzle 8b is bigger at the interval of directions X than the center of the center of first entrance port 17 and second entrance port 18 at interval.The interval at center that does not illustrate the center of nozzle rows 1 nozzle 8a and nozzle rows 1 nozzle 8b is than the sequence number of center institute's shooting part under the littler situation in the interval of directions X of the center of first entrance port 17 and second entrance port 18.In this case, at first respectively by the first, the 3rd transducer 13,29 carry out nozzle rows 1 nozzle 8a and nozzle rows 3 nozzle 25a institutes sorption first, the 3rd parts 11a simultaneously, the shooting of 26a, then respectively by the first, the 3rd transducer 13,29 carry out nozzle rows 1 nozzle 8b and nozzle rows 3 nozzle 25b institutes sorption first, the 3rd parts 11b simultaneously, the shooting of 26b, then carry out the shooting of the nozzle rows 2 sorption second parts 12a of nozzle 9a institute, then carry out the shooting of the nozzle rows 2 sorption second parts 12b of nozzle 9b institute by second transducer 14 by second transducer 14.The sequence number of the interval that does not illustrate the center of nozzle rows 1 nozzle 8a and the center of nozzle rows 1 nozzle 8b and center institute's shooting part under the consistent situation in the interval of directions X of the center of first entrance port 17 and second entrance port 18.In this case, at first respectively by the first, the 3rd transducer 13,29 carry out nozzle rows 1 nozzle 8a and nozzle rows 3 nozzle 25a institutes sorption first, the 3rd parts 11a simultaneously, the shooting of 26a, then respectively by first, second, third transducer 13,14,29 carry out nozzle rows 1 nozzle 8b and nozzle rows 2 nozzle 9a and the sorption first, second, third parts 11b of nozzle rows 3 nozzle 25b institutes simultaneously, 12a, the shooting of 26b is then carried out the shooting of the nozzle rows 2 sorption second parts 12b of nozzle 9b institute by second transducer 14.

By becoming this formation, for the first parts 11a that in inspection portion 7, passes through in the Y direction with arranging, the second parts 12a, the 3rd parts 26a and the first parts 11b, the second parts 12b, the 3rd parts 26b, owing to can independently carry out by first, second, the 3rd Lighting Division 17,18,27 light that shone are set, therefore, the first parts 11a, the second parts 12a, the 3rd parts 26a and the first parts 11b, the second parts 12b, the 3rd parts 26b, if view mode difference under identical light is set, exist under the situation of combination even then check that precision is not enough or can not carry out the parts that self posture checks in posture, move at directions X by head and only to make in inspection portion 7 by once, promptly, just can carry out the shooting and the posture inspection of whole parts by the single pass operation.

Owing on per 1 nozzle of nozzle rows 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, 25b, promptly on each parts of the first parts 11a, 11b, the second parts 12a, 12b and the 3rd parts 26a, 26b, pass through to use first, second, third transducer 13,14 respectively, 29 make a video recording, with compare by the situation that the visual field is become carry out greatly a plurality of parts shootings with a transducer as prior art, can make the resolution variation not of each pixel of transducer, thereby seek to keep posture to check the raising of precision.

Nozzle rows 1 nozzle 8a in the head setting, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the nozzle rows of 25b is narrow at interval and with first of inspection portion 7, second, the 3rd transducer 13,14, each center, visual field of 29 is by under the state that disposes side by side in the directions X alignment, exist because of obtaining first, second, the 3rd Lighting Division 15,16, enough illuminations of 27 are provided with the space and by first, second, the 3rd Lighting Division 15,16, the 27 light lights that shone make inadequately can not guarantee nozzle rows 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, first of 25b institute sorption, second, the 3rd parts 11a, 11b, 12a, 12b, 26a, the maintenance posture of 26b is checked the situation of precision.On the other hand, by with first, second, third transducer 13,14, stagger at directions X and dispose side by side in 29 center, the visual field, can guarantee to be used to shine and be used for guaranteeing that posture checks first, second, third Lighting Division 15 of the enough light of precision, 16,27 illumination is provided with the space, can seek the raising that posture is checked precision.

With with first, second, third transducer 13,14,29 the visual field is compared in stagger the in turn situation of side by side configuration of directions X, by making with first, second, third transducer 13,14,29 center, the visual field is the snakelike structure of configuration side by side that staggers at directions X, can make inspection portion 7 little in the shared space of directions X.Therefore, when making 7 miniaturizations of inspection portion, when being used for the set nozzle rows of head 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, first of 25b institute sorption, second, the 3rd parts 11a, 11b, 12a, 12b, 26a, during shooting that the maintenance posture of 26b is checked, owing to make in first of inspection portion 7, second, the 3rd entrance port 17,18, the distance that must move on 28 shortens, and therefore can seek first, second, the 3rd parts 11a, 11b, 12a, 12b, 26a, the desired time of the shooting of 26b promptly keeps posture to check the shortening of the time of wanting.

And although do not illustrate, first, second, third transducer 13,14,29 needs not be identical angle of visibility and resolution, can dispose the transducer of various combination.Therefore, the first parts 11a, 11b, the second parts 12a, 12b and the 3rd parts 26a, 26b as head nozzle rows 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the sorption of 25b institute, by considering first, second, third transducer 13,14 respectively, each angle of visibility of 29 and each resolution are come in posture is checked the parts by the optimum shape of supply body 3 sorptions of supply unit 2, and the parts that can seek to keep posture to check object enlarge and the raising of posture inspection precision.

(execution mode 5)

Below, use Figure 16 and Figure 17 to carry out the explanation of fifth embodiment of the invention.

Fifth embodiment of the invention is compared with described execution mode 4 and is replaced reflector 19 and will reflect/see through body 20 and be configured in first, second, third entrance port 17,18,28 and first, second, third transducer 13,14, between 29, because only sensor configuration that other mode is standby is identical formations in this reflection/see through the seeing through light side this point difference of body 20 and at other points, therefore provide identical label for same component part, and omitted its detailed description.

In Figure 16 and Figure 17, the 20th, reflection such as half-reflecting mirror/through body, the 13rd, be set at this reflection/see through body 20 the reverberation side, the 21st, be set at this reflection/see through the first sensor and first backup sensors through the light side of body 20, it is used to carry out the shooting of head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b.Equally, the 14th, be set at this reflection/see through body 20 the reverberation side, the 22nd, be set at this reflection/see through second transducer and second backup sensors through the light side of body 20, it is used to carry out the shooting of head 6 nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b.Equally, the 29th, be set at this reflection/see through body 20 the reverberation side, the 30th, be set at this reflection/see through the 3rd transducer and the 3rd backup sensors through the light side of body 20, it is used to carry out the shooting of head 6 nozzle rows 3 nozzle 25a, sorption the 3rd parts 26a of 25b institute, 26b.Here, the center, the visual field of the center, the visual field of the center, the visual field of the center, the visual field of the center, the visual field of the center, the visual field of first sensor 13 and first backup sensors 21, second transducer 14 and second backup sensors 22 and the 3rd transducer 29 and the 3rd backup sensors 30 is configured as consistent respectively.First sensor 13 and first backup sensors 21, second transducer 14 and second backup sensors 22 and the 3rd transducer 29 and the 3rd backup sensors 30, it can be resolution or the different combination of angle of visibility separately, or resolution and the neither same combination of angle of visibility.

Like this, for head 6 nozzle rows 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the first parts 11a of sorption that 25b distinguishes, 11b, the second parts 12a, 12b and the 3rd parts 26a, the maintenance posture of each parts of 26b is checked, as which structure different or the two two kinds of all different transducers that has its resolution or angle of visibility, when making a video recording, can be by being that parts selectively use these two kinds of transducers to seek to keep posture to check the raising of precision or the expansion that posture is checked the object parts according to the shooting object.

(execution mode 6)

Below, use Figure 18 to carry out the explanation of sixth embodiment of the invention to Figure 20.

Sixth embodiment of the invention is compared with described execution mode 4 reflection/see through body 20 to be configured in first, second, the 3rd entrance port 17,18,28 and first, second, the 3rd transducer 13,14, replace reflector 19 between 28, because only in order to carry out the nozzle rows 2 nozzle 9a that inspection portion 7 sides are disposed, the second parts 12a of 9b institute sorption, the maintenance posture inspection of 12b and make second transducer 14 of making a video recording be configured in seeing through light side this point and limit and to be used for first of reflection/see through body 20, second, the 3rd transducer 13,14,29 lens configuration is reflecting/is seeing through body 20 and first, second, the 3rd transducer 13,14, different but other points are identical formations on this point between 29, therefore provide identical label for same component part, and omitted its detailed description.

At Figure 18 in Figure 20, the 20th, in first, second, third entrance port 17,18,28 and first, second, third transducer 13,14, reflections such as the half-reflecting mirror that is provided with between 29/through body, the 23rd, be used for first lens of the first sensor 13 that the maintenance posture of head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b checks, it is set at described reflection/see through between body 20 and the first sensor 13.The 24th, be used for second lens of second transducer 14 that the maintenance posture of nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b checks, it is set at described reflection/see through between the body 20 and second transducer 14.The 31st, be used for the 3rd lens of the 3rd transducer 29 that the maintenance posture of nozzle rows 3 nozzle 25a, sorption the 3rd parts 26a of 25b institute, 26b checks, it is set at described reflection/see through between body 20 and the 3rd transducer 29.

By this formation, with first, second, the 3rd transducer 13,14, when the 29 same one sides that are configured in the following or side of inspection portion 7 side by side go up, even first, second, the 3rd transducer 13,14,29 overall dimension has to make first greatly, second, the 3rd entrance port 17,18, under the situation on 28 interval is expanded to and needed, promptly at the nozzle rows 1 nozzle 8a of head 6 configuration, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the interval of the nozzle rows of 25b becomes under the situation on needing, be arranged on first by reflecting/see through body 20, second, the 3rd entrance port 17,18,28 and first, second, the 3rd transducer 13,14, between 29, with first of inspection portion 7, second, the 3rd transducer 13,14,29 are configured in this reflection/see through the reverberation side of body 20 and see through the light side alternately is about to first, the 3rd transducer 13,29 are configured in the reverberation side, second transducer 14 is configured in through the light side, can make the nozzle rows 1 nozzle 8a of head 6 configurations, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the interval of each nozzle rows of 25b narrows down, thereby it is small-sized to make that head 6 forms.Owing to the interval of each entrance port of first, second, third entrance port 17,18,28 of inspection portion 7 is narrowed down, therefore can make the size decreases of the Y direction of inspection portion 7.

Nozzle rows 1 nozzle 8a in head 6 settings, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, the interval of each nozzle rows of 25b is narrow and with first, second, the 3rd transducer 13,14,29 be configured in below the inspection portion 7 side by side or the side with under the state on the one side, even because of guaranteeing to be used for first, second, the 3rd transducer 13,14, the lens diameter of 29 abundant brightness and make and be input to first, second, the 3rd transducer 13,14, thereby making inadequately, 29 optical information brightness can not guarantee nozzle rows 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and nozzle rows 3 nozzle 25a, first of 25b institute sorption, second, the 3rd parts 11a, 11b, 12a, 12b and 26a, the maintenance posture of 26b is checked under the situation of precision, by with first, second, the 3rd lens 23,24,31 are configured in reflection/see through body 20 and first, second, the 3rd transducer 13,14, between 29, these lens diameters are done greatly.Therefore, the raising of the maintenances posture inspection precision of first, second, third parts 11a, 11b, 12a, 12b and 26a, the 26b of nozzle rows 1 nozzle 8a, 8b, nozzle rows 2 nozzle 9a, 9b and the nozzle rows 3 nozzle 25a that can seek on the head 6 to be provided with, the sorption of 25b institute.

(execution mode 7)

Below, use Figure 21 to carry out the explanation of seventh embodiment of the invention to Figure 24.

Seventh embodiment of the invention is compared with described execution mode 1, first, second transducer 13,14 with respect to inspection portion 7, be provided with common illumination portion and entrance port, because it is only different and are identical formations in the directions X configuration this point that staggers at other points at the center, the visual field of the center, the visual field that makes first sensor 13 and second transducer 14, therefore provide identical label for same component part, and omitted its detailed description.

Among Figure 21, the 32nd, first, second transducer 13,14 of inspection portion 7 respectively to the second parts 12a of the first parts 11a, the 11b of head 6 nozzle rows 1 nozzle 8a, the sorption of 8b institute, nozzle rows 2 nozzle 9a, the sorption of 9b institute, when 12b makes a video recording to the common illumination portion of first, second parts 11a, 11b and 12a, 12b irradiation light.The 33rd, first, second transducer 13,14 respectively to the first parts 11a, 11b, the second parts 12a, be used to import the common entrance port of optical information when 12b makes a video recording, 33 the peripheral part setting of described Lighting Division 32 along the entrance port.The 34th, first visual field of expression first sensor 13 image input ranges, the 35th, second visual field of expression second transducer 14 image input ranges.The center in the center in first visual field 34 and second visual field 35 is in the directions X configuration of staggering, when first, second transducer the 13, the 14th, during line sensor, for the scope that makes first visual field 34 at directions X from the scope in the position and second visual field 35 end to end at directions X from the position is not overlapping end to end, with first visual field 34 and second visual field 35 in the directions X configuration of staggering.When first, second transducer the 13, the 14th, during face sensor, when first, second transducer 13,14 during opening shutter when the shooting promptly during first, second 13,14 time for exposure of transducer, come to stagger and dispose first visual field 34 and second visual field 35 by reserve the above interval of distance that head 6 moves in inspection portion 7 at directions X.

Below, the maintenance posture of nozzle institute sorption parts in inspection portion 7 that describes header arrangement in detail checked.

At the nozzle rows 1 nozzle 8a that carries out head 6 configurations, 8b and nozzle rows 2 nozzle 9a, the first parts 11a of 9b institute sorption, the 11b and the second parts 12a, when the maintenance posture of 12b is checked, at first, make head 6 on the Y direction, move the nozzle rows 1 nozzle 8a that makes head 6 configurations, 8b and nozzle rows 2 nozzle 9a, first of each nozzle rows of 9b and inspection portion 7, second visual field 34, after the Y direction position consistency at each center, visual field of 35, shown in the arrow of Figure 21, make and in inspection portion 7, pass through by head 6 is moved at directions X, by first, second transducer 13,14 carry out first to each parts respectively, the second parts 11a, 11b and 12a, the shooting of 12b.When first, second transducer 13,14 is face sensor, the shutter function of the shooting of these first, second parts 11a, 11b and 12a, 12b by using first, second transducer 13,14 come head 6 by inspection portion 7 above the time do not make on head first, second visual field 34,35 and stop to carry out in inspection portion 7.Particularly, shown in Figure 22 sequential chart, by head 6 directions X in inspection portion 7 is moved, in the moment at the center in first visual field 34 of nozzle rows 1 nozzle 8a by first sensor 13, the shutter of opening first sensor 13 exposes, the shooting of 13 pairs of nozzle rows of first sensor, the 1 sorption first parts 11a of nozzle 8a institute of working of going forward side by side.And, continue to make head 6 to continue to move at directions X, in the moment at the center in second visual field 35 of nozzle rows 2 nozzle 9a by second transducer 14, the shutter of opening second transducer 14 exposes, the shooting of 14 pairs of nozzle rows of second transducer, the 2 sorption second parts 12a of nozzle 9a institute of working of going forward side by side.Continue to make head 6 to move at directions X, pass through the moment at the center, the visual field in first visual field 34 at nozzle rows 1 nozzle 8b, the shutter of opening first sensor 13 exposes, the shooting of 13 pairs of nozzle rows of first sensor, the 1 sorption first parts 11b of nozzle 8b institute of working of going forward side by side.Continue to make head 6 to move at directions X, pass through the moment at the center, the visual field in second visual field 35 at nozzle rows 2 nozzle 9b, the shutter of opening second transducer 14 exposes, the shooting of 14 pairs of nozzle rows of second transducer, the 2 sorption second parts 12b of nozzle 9b institute of working of going forward side by side.Below, although diagram is not made a video recording to whole parts of 10 nozzle institutes sorption of head 6 configurations equally.And, in the shooting moment of using shutter function,, come the irradiate light that each parts is set by Lighting Division 32 to the parts of being made a video recording by this first, second transducer 13,14.And, using line sensor as first, second transducer 13, under 14 the situation, in the explanation of using described face sensor situation, pass through first respectively at the shooting object parts that are not to use the transducer shutter function, second visual field 34, during in 35 the visual field, by first, second transducer 13,14 continue the input aspect of image information and pass through first at shooting object parts, second visual field 34, during in 35 the visual field, promptly by first, second transducer 13,14 continue during the input of image information, continue irradiate light aspect difference by Lighting Division 32, but shooting is identical in proper order.

By the common illumination portion 32 that this first, second transducer 13,14 is provided with common entrance port 33 and is provided with along the peripheral part of this entrance port 33, dependence each first, second transducer 13,14 is provided with Lighting Division and with the center, the visual field of first, second transducer 13,14 in the directions X alignment situation of configuration side by side that do not stagger, nozzle rows 1 nozzle 8a, 8b that can be provided with head 6 and the nozzle rows of nozzle rows 2 nozzle 9a, 9b have nothing to do at interval and guarantee the space that is provided with of Lighting Division 32.Therefore, the inspection precision of checking for the maintenance posture that obtains nozzle institute sorption parts, can easily be configured for obtaining the Lighting Division 32 of necessary light light quantity, the maintenance posture that can easily seek nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b and nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b is checked the raising of precision.

By with second visual field 35 of first visual field 34 of first sensor 13 and second transducer 14 in the directions X configuration side by side of staggering, for shooting the first parts 11a and the second parts 12a and the first parts 11b and the second parts 12b that promptly the Y direction walks abreast and passes through in inspection portion 7 of first, second transducer 13,14, can independently carry out setting from the light of Lighting Division 32 irradiations.Therefore, if the first parts 11a and the second parts 12a and the first parts 11b and second parts 12b view mode difference under identical light is set, exist under the situation of combination even then check that precision is not enough or can not carry out the parts that self posture checks in posture, move at directions X by head 6 and only to make in inspection portion 7 by once, promptly just can carry out the shooting and the posture inspection of all parts, can seek the shortening that posture is checked the time of wanting by the single pass operation.

(execution mode 8)

Below, use Figure 25 to carry out the explanation of eighth embodiment of the invention to Figure 27.

Eighth embodiment of the invention is compared with described execution mode seven and is replaced reflector 19 and will reflect/see through body 20 and be configured between entrance port 33 and first, second transducer 13,14, because only sensor configuration that other mode is standby is identical formations in this reflection/see through the seeing through light side this point difference of body 20 and at other points, therefore provide identical label for same component part, and omitted its detailed description.

At Figure 25 in Figure 27, the 20th, in the entrance port 33 and first, second transducer 13, reflections such as the half-reflecting mirror that is provided with between 14/through body, the 13rd, be set at this reflection/see through reverberation side of body 20, be used to carry out head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, the first sensor of the shooting of 11b, the 14th, be set at this reflection/see through reverberation side of body 20, be used to carry out head 6 nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, second transducer of the shooting of 12b, the 36th, be set at this reflection/see through the 4th backup sensors that sees through the light side of body 20.The 37th, the 4th visual field of the image input range of expression the 4th backup sensors 36.The center, the visual field in the 4th visual field 37 is configured to consistent with the center of entrance port 33.Suppose that the 4th visual field 37 is bigger than second visual field 35 of the image input range of first visual field 34 of the image input range of expression first sensors 13 and expression second transducer 14, the posture of four-sensor 36 is checked that the overall dimension of object parts is assumed to be than the posture of first, second transducer 13,14 check that the overall dimension of object parts is bigger.As object lesson, the angle of visibility that constitutes first visual field 34 and second visual field 35 is set in 8mm angular travel degree, to be that the square shaped core chip part of the vertical 3mm of horizontal 6mm is that the electronic unit of the small shaped parts of 6mm degree is checked object as posture to overall dimension from overall dimension, the angle of visibility in the 4th visual field 37 is set in 25mm angle or 35mm angular travel degree, will be that the form parts of the medium-to-large of 22mm angle or 32mm angular travel degree is checked object as posture from overall dimension.

Below, illustrate that the maintenance posture of the parts that use four-sensor 36 in the inspection portion 7 is checked.In the middle of nozzle rows 1 nozzle 8a, the 8b and nozzle rows 2 nozzle 9a, the sorption first parts 11a of 9b institute, 11b and the second parts 12a, 12b of head 6 configurations, when having the parts of the posture inspection object that constitutes four-sensor 36, at first, head 6 is moved on the Y direction, make any of nozzle rows 1 nozzle 8a, the 8b of head 6 configurations or nozzle rows 2 nozzle 9a, 9b carry out the Y direction position consistency at the center, four-sensor 36 visual field of nozzle rows that posture checks and inspection portion 7.Afterwards, make and in inspection portion 7, pass through,, respectively each parts is made a video recording by four-sensor 16 by head 6 is moved at directions X.When this four-sensor 36 is face sensor, the shooting of being undertaken by four-sensor 36 by the shutter function of using four-sensor 36 come head 6 by inspection portion 7 above the time do not make on the 4th entrance port 37 of head 6 in inspection portion 7 and stop to carry out.When making a video recording,,, carry out each parts being set the irradiation of light by Lighting Division 32 for the parts of being made a video recording by the control of described control part 50 by this four-sensor 36.

Carry out in this shooting action specification (not illustrating sequential chart) particularly, when nozzle rows 1 nozzle 8a, the sorption first parts 9a of 8b institute, 9b are the posture inspection object parts of four-sensor 36, at first, with head 6 at image input range that the Y direction moves to the nozzle rows of nozzle rows 1 nozzle 8a, 8b and inspection portion 7 four-sensors 36 promptly on the position of the Y direction position consistency between the center in the 4th visual field 37.Then, head 6 is moved at directions X towards inspection portion 7, in the moment at the center in four visual field 37 of nozzle rows 1 nozzle 8a by four-sensor 36, the shutter of opening four-sensor 36 exposes, and carries out the shooting of the nozzle rows 1 sorption first parts 11a of nozzle 8a institute.And, head 6 continue to be moved at directions X, in the moment of nozzle rows 1 nozzle 8b by the center in the 4th visual field 37 of four-sensor 36, the shutter of opening four-sensor 36 exposes, and carries out the shooting of the nozzle rows 1 sorption first parts 11b of nozzle 8b institute.Be under the situation of inspection object parts of four-sensor 36 at nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b, also by same action make a video recording (action specification omission).And, line sensor is being used as first, second transducer 13,14 o'clock, in the explanation of using described face sensor situation, be not to use the shutter function of transducer, pass through first at shooting object parts, second transducer 13, pass through first during in 14 visuals field, second transducer 13,14 continue the input aspect of image information and pass through first at shooting object parts, second transducer 13, promptly pass through first during in 14 visuals field, second transducer 13,14 continue during the input of image information by first, second Lighting Division 15,16 continue only difference of irradiate light aspect, and shooting is identical in proper order.

And, when constituting four-sensor 36 and check that the parts of objects are present on the sorption parts of two nozzle rows of nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b and nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b, for each nozzle rows of nozzle rows 1 and nozzle rows 2, the scanning motion by four-sensor 36 becomes essential (action specification omission).

When first, second transducer 13,14 posture checks that the posture inspection object parts of object parts and four-sensor 36 are mingled in head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b and nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, when 12b is last, in order to carry out the first parts 11a, 11b, the second parts 12a, whole posture inspections of 12b, at nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b and nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, in the middle of the 12b, by first, second transducer 13,14 move and by the scanning motion in the inspection portion 7 at directions X by being used for head 6 that posture checks the object parts, and at nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, in the middle of the 11b, check that for the posture of four-sensor 36 the object parts are used for the scanning motion that posture is checked by four-sensor 36, and at nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, in the middle of the 12b, check that for the posture of four-sensor 36 the object parts become necessity (action specification omission) respectively by the scanning motion that four-sensor 36 is used for the posture inspection.

Like this, the light side that sees through at reflection/see through body 20 is provided with the different four-sensor 36 of angle of visibility and first, second transducer 13,14, according to nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b and the nozzle rows 2 nozzle 9a of head 6 settings, the member profile size of the sorption second parts 12a of 9b institute, 12b, carry out scanning motion or use four-sensor 36 to carry out the formation of scanning motion by becoming first, second transducer 13,14 of use, can seek the expansion that posture is checked the parts of object.

The situation of this formation is promptly when the posture of first, second transducer 13,14 checks that the posture of object parts and four-sensor 36 checks that the object parts are mingled among nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b and nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, the 12b, owing to need repeatedly scanning motion, therefore having wasted posture checks the desired time.But, as electronic components mounting machine 1, the square shaped core chip part is installed is accounted for major part to the small shaped parts, the situation that also needs to install the medium-to-large form parts though frequency is low, promptly check that for the posture of being undertaken the object parts account for major part by first, second transducer 13,14, check that the low posture that four-sensor 36 carries out of passing through of frequency checks the object parts but also have, for this situation, it becomes effective formation.

Although do not record and narrate the difference of resolution between four-sensor 36 and first, second transducer 13,14, but, by being first, second visual field 34 than the image input range of first, second transducer 13,14,35 the 4th wideer visuals field 37 are assumed to be the image input range and the resolution of four-sensor 36 are become than the resolution of first, second transducer 13,14 resolution of high definition more, can constitute to seek four-sensor 36 postures and check that the posture of object parts checks the raising of precision.

And, in the present embodiment, although the light side that sees through that constitutes at reflection/see through body is provided with the i.e. four-sensor 36 of a transducer, seeing through can being provided with on the optional position in the scope of light side different or the two all different a plurality of transducers of angle of visibility or resolution also can be set at reflection/see through body 20.Particularly, as implement mode 2, shown in 5, the light side that sees through that is reflecting/seeing through body 20 is provided with 2 transducers, make first sensor 13 the image input range promptly the image input range of the center, the visual field in first visual field 34 and second transducer 14 promptly each center, visual field at the center, the visual field in second visual field 35 is consistent, become the formation of selecting to use 2 transducers in when shooting, seek the raising that expansion that posture checks the object parts or posture are checked precision thereby can constitute.

(execution mode 9)

Below, use Figure 28 to carry out the explanation of ninth embodiment of the invention to Figure 30.

Ninth embodiment of the invention is compared with described execution mode 7 reflection/see through body 20 to be configured in entrance port 33 and first, second transducer 13, replace reflector 19 between 14, because only in order to carry out the nozzle rows 2 nozzle 9a that inspection portion 7 sides are disposed, the second parts 12a of 9b institute sorption, the maintenance posture inspection of 12b and second transducer 14 of making a video recording are configured in seeing through light side this point and limit and will being used for first of reflection/see through body 20, second transducer 13,14 lens configuration is reflecting/is seeing through body 20 and first, second transducer 13, different and are identical formations on this point between 14 for other points, therefore provide identical label for same component part, and omitted its detailed description.

At Figure 28 in Figure 30, the 20th, reflections such as the half-reflecting mirror that between entrance port 33 and first, second transducer 13,14, is provided with/through body, the 23rd, be used for first lens of the first sensor 13 that the maintenance posture of head 6 nozzle rows 1 nozzle 8a, the sorption first parts 11a of 8b institute, 11b checks, it is set at described reflection/see through between body 20 and the first sensor 13.The 24th, be used for second lens of second transducer 15 that the maintenance posture of nozzle rows 2 nozzle 9a, the sorption second parts 12a of 9b institute, 12b checks, it is set at described reflection/see through between the body 20 and second transducer 14.

By this formation, with first, second transducer 13, when the 14 same one sides that are configured in the following or side of inspection portion 7 side by side go up, even first, second transducer 13,14 overall dimension is big and have to make the interval in first visual field 34 and second visual field 35 to be expanded under the situation on the needs, promptly at the nozzle rows 1 nozzle 8a of head 6 configuration, 8b and nozzle rows 2 nozzle 9a, the interval of the nozzle rows of 9b becomes under the situation on needing, be arranged on entrance port 33 and first by reflecting/see through body 20, second transducer 13, between 14, the transducer of inspection portion 7 is configured in this reflection/see through the reverberation side of body 20 and see through the light side promptly by first sensor 13 is configured in the reverberation side alternately, second transducer 14 is configured in through the light side, can make the nozzle rows 1 nozzle 8a of head 6 configurations, 8b and nozzle rows 2 nozzle 9a, the interval of the nozzle rows of 9b narrows down, thereby it is small-sized to make that head 6 forms.Owing to first visual field 34 of inspection portion 7 and the interval in second visual field 35 are narrowed down, therefore can make the size decreases of the Y direction of inspection portion 7.

Nozzle rows 1 nozzle 8a in head 6 settings, 8b and nozzle rows 2 nozzle 9a, the interval of 9b is narrow and with first, second transducer 13,14 be configured in below the inspection portion 7 side by side or the side with under the state on the one side, even because of guaranteeing to be used for first, second transducer 13, the lens diameter of 14 abundant brightness and make and be input to first, second transducer 13, thereby making inadequately, 14 optical information brightness can not guarantee nozzle rows 1 nozzle 8a, 8b and nozzle rows 2 nozzle 9a, first of 9b institute sorption, the second parts 11a, 11b and 12a, the maintenance posture of 12b is checked under the situation of precision, by with first, second lens 23,24 are configured in reflection/see through body 20 and first, second transducer 13, between 14, this lens diameter is done greatly.Therefore, can seek on the head 6 raising of the maintenances posture inspection precision of first, second parts 11a, the 11b of the nozzle rows 1 nozzle 8a, the 8b that are provided with and nozzle rows 2 nozzle 9a, the sorption of 9b institute and 12a, 12b.

Independently be used for transducer that posture checks by constituting in each nozzle rows that has header arrangement in the inspection portion, when posture is checked towards the entrance port of the Lighting Division and the optical information of head irradiation light, can be enough the maintenance posture of a plurality of parts of the single pass operation a plurality of nozzle rows institute sorption that realizes that head is provided with check, seek to keep posture to check the shortening of the time of wanting, simultaneously, the maintenance posture that can seek nozzle institute holding member is checked the raising of precision and the productivity ratio that improves electronic components mounting machine.

(execution mode 10)

Below, the apparatus for mounting component of the present invention's the 10th execution mode and the component mounting method of carrying out in this apparatus for mounting component are described with reference to the accompanying drawings.

The apparatus for mounting component 1100 of the 10th execution mode shown in Figure 31 partly comprises as basic comprising: electronic part feeder 1110; Parts keep head 1120; X, Y robot 1130; Component height checkout gear 1140; Control device 1150.Also comprise base board delivery device 1160 and component recognition apparatus 1170 in the present embodiment.

Above-mentioned assembly supply device 1110 is devices of supplying with electronic unit 1111, in the present embodiment, be provided with so-called coiling band and supply with the assembly supply device of body type, it has the spool that the coiling band of electronic unit 1111 has been held in coiling, brings and carries out the parts supply by repeat above-mentioned coiling from this spool.And assembly supply device is not limited to this coiling band and supplies with the body type, for example, the assembly supply device that so-called pallet (tray) is supplied with the body type can be set also.

Above-mentioned parts keep head 1120 to have the parts retaining member 1121 that is used to keep electronic unit 1111, as Figure 32 and shown in Figure 33, parts retaining member 1121 is arranged with latticed multiple lines and multiple rows along X, Y direction, in the present embodiment, go, arranged 10 parts retaining members 1121 altogether along directions X 2 along Y direction 5 row.In the present embodiment, along directions X, the configuration space P1 of each parts retaining member 1121 in moving direction 1124 is 10.75mm as an example, along the Y direction, with the orthogonal direction 1125 of above-mentioned moving direction 1124 quadratures in the configuration space P2 of each parts retaining member 1121 be 22mm as an example.And, in the present embodiment, each parts retaining member 1121 is made of the sorption nozzle of the holding member 1111 by sorption, parts keep head 1120 to have the attraction portion 1122 that is used for above-mentioned sorption, and, also have and when parts keep and install, be used for parts retaining member 1121 at the lifting unit 1123 of its direction of principal axis lifting and with the rotating part 1126 of parts retaining member 1121 in its circumferencial direction rotation.

Above-mentioned X, Y robot 1130 is used to make parts to keep head 1120 in robot that directions X and Y direction move, have a pair of Y robot 1131 and X robot 1132, Y robot 1131 extends and has a ball screw framework in the Y direction, and X robot 1132 extends and two ends are supported in each Y robot 1131 and can move and install parts in the Y direction by Y robot 1131 and keep head 1120 and make these parts keep head 1120 to move and have a ball screw framework at directions X at directions X.By this X, Y robot 1130 makes parts keep head 1120 to move at directions X and Y direction.

Above-mentioned component height checkout gear 1140 is the devices that are used for the height of the parts 1111 that detection part retaining member 1121 kept, whether the maintenance posture of the electronic unit 1111 that is used for checking that a plurality of parts retaining members 1121 are kept is good, and it has and is used for sending the detection that becomes collimated light beam with the illuminating part 1141 of light 1143 be used for receiving above-mentioned detection that illuminating part 1141 sends with light 1143 and comprise 1 light receiver 1142 of tieing up imageing sensor.As Figure 32 and shown in Figure 33, illuminating part 1141 and light receiver 1142 are configured in the both sides of parts retaining member 1121 moving directions 1124 by clipping the parts retaining member 1121 that keeps head 1120 to move by parts, and, the detection of sending from illuminating part 1141 with light 1143 with respect to the orthogonal direction 1125 of moving direction 1124 quadratures, but be configured to make to intersect and constitute the detection angles θ that can detect 1121 holding members 1111 of each parts retaining member respectively.In the present embodiment, above-mentioned moving direction 1124 is corresponding to directions X, with the orthogonal direction 1125 of moving direction 1124 quadratures corresponding to the Y direction.

But above-mentioned detection angles θ such as above-mentioned when the configuration space of each parts retaining member 1121 is made as P1 and the configuration space of parts retaining member 1121 in the above-mentioned orthogonal direction 1125 is made as P2 in moving direction 1124 is to pass through tan ^-1(the angle of (P1/2)/P2) try to achieve.

For example, as above-mentioned,, when configuration space P2 is 22mm,, detection angles θ spends but becoming 14 when the configuration space P1 of each parts retaining member 1121 is 10.75mm.

Above-mentioned control device 1150 is the devices that carry out the action control of this apparatus for mounting component 1100, and be connected to above-mentioned component height checkout gear 1140, and come decision means 1111 to keep posture whether good based on the component height information that component height checkout gear 1140 is supplied with.

But the image that detects by light receiver 1142 after the parts 1111 that Figure 34 represents to be kept by each parts retaining member 1121 with light 1143 as above-mentioned detection of sending from the illuminating part 1141 with detection angles θ configured parts height detecting device 1140.As shown in figure 34, the size of the parts 1111 that kept by each parts retaining member 1121 has produced shown in situation that has the gap in the image of each parts 1111 shown in the A portion of Figure 34 and the B portion image overlap of parts 1111 like that and has not had the situation in gap.

Therefore, even in order to judge also whether the maintenance posture of each parts 1111 is good when the image overlap of parts 1111, in the control device 1150 of present embodiment, as shown in figure 34, within the component height information that above-mentioned component height checkout gear 1140 is sent, based on each parts retaining member 1121 above-mentioned component height information in 1144 and between each detection zone of moving direction 1124, judge whether the maintenance posture of above-mentioned each electronic unit 1111 is good as the center.From the B portion of Figure 34 as can be known, 1144 be in each image of the electronic unit 1111 of adjacency, to remove the interval that to set in the non-repetition scope 1145 of repeating part between above-mentioned detection zone.Particularly, the scope that non-repetition scope 1145 maximums are with P2 * sin θ is suitable.Above-mentioned surveyed area 1144 is 3mm in the present embodiment.This be because, for for example 1608 (the micro chip parts that 1.6mm * 0.8mm) is such only can not keep posture to judge in the identification of plane.

In the present embodiment, although 1144 for the identical distance of whole parts retaining members 1121 uses between above-mentioned detection zone, but, for example, also can be corresponding come each parts retaining member 1121 is changed between detection zones 1144 with the size of parts retaining member 1121 etc.

Aforesaid substrate carrying device 1160 is circuit substrate 1161 to be moved into this apparatus for mounting component 1100 and after parts 1111 are installed circuit substrate 1161 is taken out of device the subsequent processing from this apparatus for mounting component 1100.

Above-mentioned component recognition apparatus 1170 is to be used for the device that the plane photographic unit keeps the maintenance posture of electronic unit 1111 that parts retaining member 1121 keeps of head 1120, is connected to control device 1150.Control device 1150 when being installed to parts 1111 on the circuit substrate 1161, is tried to achieve its position revisal amount based on the maintenance pose information of each parts 1111 of supplying with from component recognition apparatus 1170.

The action that the following describes in the 10th execution mode apparatus for mounting component 1100 as constituted above is a component mounting method.This component mounting method is carried out by the action control of control device 1150.

Circuit substrate 1161 is moved into this apparatus for mounting component 1100 from the upstream side of this apparatus for mounting component 1100, and is fixed to parts mounting substrate holding position in this apparatus for mounting component 1100 by base board delivery device 1160 conveyances.

Then, for the parts retaining member 1121 that keeps head 1120 by parts takes out by assembly supply device 1110 by the electronic unit 1111 of conveyance to the parts sucking device, by X, Y robot 1130, parts keep head 1120 to be positioned on the above-mentioned parts sucking device, and electronic unit 1111 keeps by parts retaining member 1121.Parts keep head 1120 owing to have a plurality of parts retaining members 1121, according to the parts installation procedure that control device 1150 is stored, make parts 1111 remain on parts and install on essential a plurality of at least parts retaining members 1121.

After parts retaining member 1121 maintenance electronic units 1111, for plane earth confirm the hold mode of electronic unit 1111 in the parts retaining member 1121, parts keep head 1120 by X, Y robot 1130 by conveyance be positioned at the recognizing site of component recognition apparatus 1170.The flat state of each electronic unit 1111 that component recognition apparatus 1170 shooting part retaining members 1121 are kept, and each shooting information passed out to control device 1150.Based on this shooting information, control device 1150 is to each electronic unit 1111, try to achieve the revisal amount make with circuit substrate 1161 in the installation site coincide, according to this revisal amount, the amount of movement of revisal X, Y robot 1130 and parts retaining member 1121.

Then, for whether the detection and the decision means of the short transverse of carrying out each electronic unit 1111 that parts retaining member 1121 kept keeps posture good, parts keep head 1120 to move control by X, Y robot 1130, shown in figure 32, make each electronic unit 1111 by between the illuminating part 1141 and light receiver 1142 of component height checkout gear 1140.At this moment, the electronic unit 1111 that keeps making of the parts parts retaining member 1121 that keeps having on the head 1120 is located under the state of detection height and position of the certain altitude in the Z direction by between illuminating part 1141 and the light receiver 1142.

As above-mentioned, but constituted detection angles θ with light 1143 owing to intersecting with respect to above-mentioned orthogonal direction 1125 from the detection that illuminating part 1141 sends, therefore, as above-mentioned, even electronic unit 1111 is arranged as 2 row, 5 row in the present embodiment, keep head 1120 to move by parts to moving direction 1124, as shown in figure 33, for example, each electronic unit 1111 with parts 1111-1, parts 1111-2, parts 1111-3, parts 1111-4, parts 1111-5 ... the order of .., parts 1111-10 is checked in turn.Therefore, as shown in figure 34, at the image of each electronic unit 1111 of light receiver 1142 tested in sequence, these image informations that detected are passed out to control device 1150 in turn.

Like this, but constituted detection angles θ with light 1143 owing to intersecting with respect to above-mentioned orthogonal direction 1125 from the detection that illuminating part 1141 sends, even under situation with multiple lines and multiple rows arrangement part retaining member 1121, pass through single pass, for all parts 1111, also can obtain image information.Therefore, according to the apparatus for mounting component 1100 of present embodiment, compared with prior art, it can seek to install with parts the high speed of relevant cycle period.

In control device 1150, have according in the height of parts retaining member 1121, also having standard deviation and to each parts retaining member 1121 predefined parts retaining member elevation information and to the predefined component height information of each parts.Therefore, control device 1150 is based on the image of the electronic unit 1111 that is supplied to, as shown in figure 35, try to achieve the height of above-mentioned image, will be by above-mentioned parts retaining member elevation information and above-mentioned component height information and predetermined specified altitude information compares with the component height information of being tried to achieve, surpass setting for its error, parts keep posture to be judged as bad.

As above-mentioned, owing to have the situation that produces image overlap between each parts, therefore control device 1150 is when trying to achieve above-mentioned component height information, tries to achieve above-mentioned component height information based on the image information in 1144 between the detection zone in the non-repetition scope 1145 of each parts 1111 images.Like this, owing to try to achieve above-mentioned component height information based on the image information in 1144 between above-mentioned detection zone, in the image that light receiver 1142 is received, though between adjacent component 1111 image overlap, also can differentiate the component height information of having tried to achieve which parts 1111.Therefore, the result compared with prior art, can seek to install with parts the high speed of relevant cycle period.

When the result of above-mentioned judgement is that non-defective unit is that parts keep posture to be judged as when good for electronic unit 1111, operation control by control device 1150, parts keep head 1120 to be positioned to the parts installation site of circuit substrate 1161 by X, Y robot 1130, and the electronic unit 1111 that parts retaining member 1121 is kept is installed on the circuit substrate 1161.

On the other hand, when judging that electronic unit 1111 is that defective products is that parts are when to keep posture be bad, operation control by control device 1150, parts keep head 1120 by the discarded place (not diagram) that X, Y robot 1130 are moved to electronic unit 1111, discard this bad electronic unit 1111.

Repeat once more to keep moving installation action from above-mentioned parts.

In above-mentioned the 10th execution mode, although with moving direction 1124 as directions X, orthogonal direction 1125 as the Y direction, is not limited to this.That is, for example, can in component height checkout gear 1140, will detect with light 1143 luminous become parallel with the Y direction.On the other hand, also can keep head 1120 by moving-member, but the above-mentioned detection angles θ of feasible formation.

And, by any execution mode in above-mentioned each execution mode is carried out the effect that suitable combination also can obtain to have separately.

Although the present invention has carried out abundant record in conjunction with preferred implementation with reference to the accompanying drawings, those skilled in the art can carry out various changes and modifications.Obviously, this distortion and modification should be understood in the scope of the invention that claims limit.

Claims (4)

1. apparatus for mounting component, it is kept electronic unit and the electronic unit that is kept is installed to circuit substrate by electronic part feeder, comprising:

Parts keep head, and it makes and keeps the parts retaining member multiple lines and multiple rows of the described electronic unit that described electronic part feeder supplies with to arrange and move on mutually orthogonal X, Y direction;

The component height checkout gear, whether it is good for the maintenance posture of checking the described electronic unit that a plurality of described parts retaining members are kept, and detect the height of the described electronic unit that described parts retaining member kept, but have a pair of illuminating part and the light receiver that detects the reception of using up that detects the emission of using up with detection angles (θ), but should detection angles be that described detection is used up and is parallel in the plane of described circuit substrate and the orthogonal direction angulation of the moving direction quadrature of described parts retaining member, wherein said detection is with only launching for the image that detects the described electronic unit that each parts retaining member keeps respectively

Control device, its within the component height information that described component height checkout gear is sent, based on described parts retaining member as the center between the detection zone of described moving direction in described component height information, judge whether described electronic unit good.

2. apparatus for mounting component as claimed in claim 1 is characterized in that,

When the configuration space of each parts retaining member is made as P1 and the configuration space of parts retaining member in the described orthogonal direction is made as P2 in described moving direction, but described detection angles is to pass through tan ^-1(the angle of (P1/2)/P2) try to achieve.

3. component mounting method, it keeps electronic unit also to be installed to circuit substrate, and described component mounting method comprises:

After keeping described electronic unit by a plurality of parts retaining members of arranging with multiple lines and multiple rows, before being installed to described circuit substrate, but use up with respect in being parallel to the plane of described circuit substrate, detecting with detection angles (θ) emission with the orthogonal direction of the moving direction quadrature of described parts retaining member by the illuminating part in the component height checkout gear, but wherein said detection angles (θ) is for the image that detects the described electronic unit that each parts retaining member keeps respectively and the detection light angulation of launching, receiving described detection by the light receiver in the described component height checkout gear uses up, removed in each image of the described electronic unit that is set in adjacency by control device between the detection zone in the non-repetition scope of repeating part, based on described parts retaining member as the center between the detection zone of described moving direction in component height information, check whether the maintenance posture separately of the described electronic unit that a plurality of described parts retaining members are kept good.

4. component mounting method as claimed in claim 3 is characterized in that,

When the configuration space with each parts retaining member in the described moving direction is made as P1 and the configuration space of the parts retaining member in the described orthogonal direction is made as P2, but described detection angles is to pass through tan ^-1(the angle of (P1/2)/P2) try to achieve.

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