CN101289025B - 曝光装置以及激光控制部用电路板 - Google Patents
曝光装置以及激光控制部用电路板 Download PDFInfo
- Publication number
- CN101289025B CN101289025B CN2008100933446A CN200810093344A CN101289025B CN 101289025 B CN101289025 B CN 101289025B CN 2008100933446 A CN2008100933446 A CN 2008100933446A CN 200810093344 A CN200810093344 A CN 200810093344A CN 101289025 B CN101289025 B CN 101289025B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- laser
- control
- control unit
- card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0617—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium using memorised or pre-programmed laser characteristics
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-111495 | 2007-04-20 | ||
JP2007111495A JP2008265149A (ja) | 2007-04-20 | 2007-04-20 | 露光装置およびレーザー制御部用回路基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101289025A CN101289025A (zh) | 2008-10-22 |
CN101289025B true CN101289025B (zh) | 2010-06-02 |
Family
ID=39872133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100933446A Expired - Fee Related CN101289025B (zh) | 2007-04-20 | 2008-04-18 | 曝光装置以及激光控制部用电路板 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7920609B2 (zh) |
JP (1) | JP2008265149A (zh) |
CN (1) | CN101289025B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5022587B2 (ja) * | 2005-10-07 | 2012-09-12 | 富士フイルム株式会社 | 半導体レーザの駆動方法および装置、並びに補正パターンの導出方法および装置 |
JP4776644B2 (ja) * | 2008-03-05 | 2011-09-21 | シャープ株式会社 | 画像形成装置 |
CN102064466A (zh) * | 2010-12-07 | 2011-05-18 | 深圳市大族激光科技股份有限公司 | 一种大功率激光电源控制***与方法技术领域 |
JP5713688B2 (ja) * | 2011-01-12 | 2015-05-07 | 株式会社キーエンス | レーザー加工システム及びレーザー加工装置 |
JP2015188047A (ja) * | 2014-03-27 | 2015-10-29 | 株式会社Screenホールディングス | 発光制御装置、露光装置、および発光制御装置の調整方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4751383A (en) * | 1985-04-02 | 1988-06-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus for detection of position with correction of errors caused by errors in scale pitch |
CN1754694A (zh) * | 2004-09-30 | 2006-04-05 | 大日本网目版制造株式会社 | 印刷版的制版方法以及印刷版的制版装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5734672A (en) * | 1996-08-06 | 1998-03-31 | Cutting Edge Optronics, Inc. | Smart laser diode array assembly and operating method using same |
JP2000043317A (ja) * | 1998-07-29 | 2000-02-15 | Dainippon Screen Mfg Co Ltd | マルチビーム描画方法および装置 |
JP4853753B2 (ja) | 2001-09-18 | 2012-01-11 | 澁谷工業株式会社 | レーザモジュールの照射位置調節装置 |
JP2005317586A (ja) | 2004-04-27 | 2005-11-10 | Yamagata Casio Co Ltd | Led照明装置及びそれを備えた部品搭載装置 |
-
2007
- 2007-04-20 JP JP2007111495A patent/JP2008265149A/ja active Pending
-
2008
- 2008-04-18 CN CN2008100933446A patent/CN101289025B/zh not_active Expired - Fee Related
- 2008-04-18 US US12/081,637 patent/US7920609B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4751383A (en) * | 1985-04-02 | 1988-06-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus for detection of position with correction of errors caused by errors in scale pitch |
CN1754694A (zh) * | 2004-09-30 | 2006-04-05 | 大日本网目版制造株式会社 | 印刷版的制版方法以及印刷版的制版装置 |
Non-Patent Citations (1)
Title |
---|
JP平10-35006A 1998.02.10 |
Also Published As
Publication number | Publication date |
---|---|
US7920609B2 (en) | 2011-04-05 |
US20080259978A1 (en) | 2008-10-23 |
CN101289025A (zh) | 2008-10-22 |
JP2008265149A (ja) | 2008-11-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100602 Termination date: 20170418 |
|
CF01 | Termination of patent right due to non-payment of annual fee |