CN101281032A - Tilting angle sensor and detected device with the same - Google Patents
Tilting angle sensor and detected device with the same Download PDFInfo
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- CN101281032A CN101281032A CNA2007100968756A CN200710096875A CN101281032A CN 101281032 A CN101281032 A CN 101281032A CN A2007100968756 A CNA2007100968756 A CN A2007100968756A CN 200710096875 A CN200710096875 A CN 200710096875A CN 101281032 A CN101281032 A CN 101281032A
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- angle sensor
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Abstract
The invention provides a inclining angle sensor, which comprises a flexible component having a fixed end and a free end; the free end has a free degree which can inflex towards one direction; a magnetic field generating device which is arranged on the free end of the flexible component; a magnetic field detecting device, which faces the magnetic field generating device being installed; the magnetic field detecting device generates the direction of the magnetic field; and a declining device; the device is applied to declining the declining force of the bending action of the flexible component. The inclining angle of the invention has the acceleration and inclining angle for detecting the relevant devices high-sensitively, at the same time, the invention achieves the miniaturization and cost minimization via the simple structure.
Description
Technical field
The present invention relates to slant angle sensor, particularly about a kind of slant angle sensor that can calculate pitch angle at least one direction or acceleration etc.
Background technology
In the past,, study at the application of the acceleration transducer that detects the object correlation acceleration for action and the tilt condition that detects the regulation object.For example, can use following field: the degree of tilt of the composition accuracy when so-called detection is pushed shutter on camera detects, perhaps, by detecting the detection of putting upside down of motorcycle degree of tilt, and then, determine whether e-machine is arranged to the degree of tilt detection of expression arrangement state horizontality, so-called etc.And what can also be applied to moment detected electrons machine improperly moves or comes off, and takes the safety of movable part to answer the occasion of countermeasure.
As the formation of the relevant acceleration transducer of prior art, such as patent documentation 1 announcements, adopted the method for the distortion that detection produces because of acceleration on structure.Specifically, the center of criss-cross rubber-like support component (intersection point) gone up foundary weight is installed, and, the askew detecting element of fixed installation on each beam of support component.And, detect the distortion of each beam based on the detected value of this askew detecting element, and detect the acceleration on each axial (X, Y, Z).For example, use the semiconductor piezoelectric element to make up bridge circuit and detect its resistance value, perhaps, shown in patent documentation 1, use piezoelectric vibrator to detect according to crooked posting a letter the cycle as askew detecting element, thus sense acceleration.
And, as the inclination sensor of pick-up unit degree of tilt, also just like the sensor shown in the patent documentation 2.This inclination sensor possesses magnet and vibrating mass, and, utilize Hall element to detect the variation of the magnetic direction that the change in location because of vibrating mass produces.Specifically, propped up on housing by axle rotationally with the vibrating mass of ferromagnetism body, and, utilize Hall IC to detect to be installed on the rotation that is accompanied by housing and the changes of magnetic field of ferromagnetism body on the vibrating mass that rotates.
Patent documentation 1: specially permit communique No. 2732287
Patent documentation 2: the spy opens the 2006-90796 communique
Yet the sensor that above-mentioned patent documentation disclosed has defective as described below.At first, in the sensor that above-mentioned patent documentation 1 is disclosed, be necessary to be provided at crosswise support component (spring) self or near it reading the electrode of crooked detection with signal, therefore, because the cause of its wiring, structure thickens.And,, therefore, can't realize miniaturization because askew detecting element is installed on support component.And then, owing on the spring position of support component, install or built-in askew detecting element, therefore, hindering the displacement of spring, detection sensitivity is restricted.
And, in the sensor that above-mentioned patent documentation 2 is disclosed,, therefore, be difficult to realize miniaturization owing to used vibrating mass.And, when in vibrating mass, producing vibration, be difficult to restrain this vibration at short notice, particularly, make under the influence of degree of vibrating mass vibration and also can produce vibration, and keep the long period.Then, under the state of sustained vibration, pitch angle or acceleration can't be detected accurately, the quality of sensor can't be improved.
Summary of the invention
The object of the present invention is to provide a kind of shortcoming of improving above-mentioned prior art, particularly, can high sensitivity, detect the acceleration of relevant apparatus or pitch angle etc. accurately, simultaneously, realize the slant angle sensor of miniaturization and cost degradation by simple structure.
At this, the slant angle sensor that one embodiment of the present of invention are relevant, it comprises: elastomeric element, it has stiff end and free end, and this free end has at least the degree of freedom to a direction bending; Magnetic field generation device, it is installed on the free end of described elastomeric element; Detector for magnetic field, it is mounted in the face of described magnetic field generation device, and detects the magnetic direction that described magnetic field generation device produces; And attenuating device, this device applies the damping force of the described elastomeric element flexure operation that is used to decay.
At this moment, attenuating device is arranged near the free end of elastomeric element to well, and then the free end that attenuating device is arranged on elastomeric element is foremost on the position, perhaps, is arranged on the magnetic field generation device to well.
According to described invention, at first, when the degree of freedom direction along elastomeric element produced acceleration or tilts, elastomeric element was bent, and the magnetic field generation device that is installed on this elastomeric element free end moves towards bending direction.Then, the magnetic direction that magnetic field generation device produces also changes, and detects the variation of this magnetic direction by detector for magnetic field, thereby can detect the variation of at least one degree of tilt on axially or acceleration etc.On the other hand, owing to having high sensitivity easily quiveringly, elastomeric element is formed, therefore, collect the outside interference such as impact that come from of this elastomeric element of vibration easily, particularly be subjected to disturbing and vibration easily near the resonant frequency, but, by attenuating device convergence vibration rapidly at short notice.Thereby, can continue to suppress the vibration of elastomeric element, and, can have high sensitivity and detect degree of tilt that ought to detect etc. accurately.By as mentioned above, utilize simple structure to realize small-sized and sensor cheaply, simultaneously, can improve the degree of tilt of sensor or the detection sensitivity of acceleration, and the influence that can suppress to disturb can realize high-qualityization of sensor.Particularly, by attenuating device being arranged on the free-ended front end of elastomeric element, thereby allow under the inclination or the situation of acceleration that is produced the mobility of elastomeric element, effectively apply damping force, thereby in the shorter time, make its decay, thereby can further improve detection sensitivity and precision.
And above-mentioned elastomeric element is particularly formed good by the thin plate-shaped member of the thickness of slab on free-ended bending direction, and, resonant frequency is kept than low water-mark and form length for well perpendicular to the length of the long axis direction of bending direction.Thus, the resonant frequency of elastomeric element is lower, and, be bent towards bending direction easily.That is, can have when detecting degree of tilt or external force in high sensitivity, as mentioned above, utilize attenuating device can restrain the vibration that on elastomeric element, produces because of interference at short notice.Thereby, the influence that can suppress to disturb, and have and detect degree of tilt or acceleration in high sensitivity.And, as mentioned above, owing to have high sensitivity, therefore, can suppress the influence of the temperature drift that detector for magnetic field causes.That is, utilize detector for magnetic field can obtain very big inspection by the clever lightness of height and calculate, therefore,, can improve the quality of sensor even exist the temperature drift of detector for magnetic field also can carry out high-precision test.
And above-mentioned attenuating device is made of the adhesive parts that relatively moves of elastomeric element or magnetic field generation device, other fixed parts and these part/device that decay.At this moment, be preferably the gel parts as above-mentioned adhesive parts.And specifically, above-mentioned attenuating device comprises: gel parts resettlement section, and it is set on other fixed parts, and accommodates the gel parts; And dipping portion, it belongs to the elastomeric element that is impregnated in the gel parts or the part of magnetic field generation device.
As mentioned above, by between the movable position of elastomeric element etc. and other fixed parts, adhesive parts being set, thereby can realize having the attenuating device of simple structure.Particularly by utilizing the gel parts, and will in described gel parts, flood the movable position of elastomeric element etc., thereby more effectively apply the damping force of the vibration of relative resilient parts, and make its vibration convergence at short notice, thereby realize the sensor of low-cost high clever lightness.
And preferred, above-mentioned gel parts are not hardened under-40 ℃～120 ℃ temperature and are had the viscosity of the scope of predesignating, and for example, described gel parts are the silicon gel.Thus, attenuating device is performance regulation viscosity in the serviceability temperature scope of general machine, and therefore, described sensor can be installed on all devices.And, can utilize universal component to constitute attenuating device, thereby realize low-cost.
And, described slant angle sensor can be installed on the various detected device as acceleration or degree of tilt detected object, can possess calculation element on the described detected device, this calculation element is based on the output valve of the sensor that is mounted and the pitch angle or the acceleration of the device itself on the bending direction of calculating elastic parts.
Compared with prior art, the present invention has above-mentioned composition and function, thereby realizes small-sized and sensor cheaply by easy structure, simultaneously, can improve the degree of tilt of sensor or the detection sensitivity and the accuracy of detection of acceleration.
Description of drawings
Fig. 1 be the relevant slant angle sensor structure of expression embodiment 1 from the observed stereographic map of front.
Fig. 2 be the relevant slant angle sensor structure of expression embodiment 1 from the observed stereographic map of rear end side.
Fig. 3 is the observed vertical view from the top of the relevant slant angle sensor structure of expression embodiment 1.
Fig. 4 is the side view of the relevant slant angle sensor structure of expression embodiment 1.
Fig. 5 is the exploded view of the relevant slant angle sensor of embodiment 1.
Fig. 6 is explanation detects principle according to the magnetic direction of GMR element a key diagram.
Fig. 7 is the key diagram of the relation between expression magnet arrangement and the GMR chip.
Fig. 8 represents the key diagram according to the detection principle of GMR element.
Fig. 9 be the relevant slant angle sensor structure of expression embodiment 2 from the observed stereographic map of front.
Figure 10 is the observed stereographic map from the place ahead of the relevant slant angle sensor structure of expression embodiment 2.
Figure 11 be the relevant slant angle sensor structure of expression embodiment 3 from the observed stereographic map of front.
Figure 12 is the observed stereographic map from the place ahead of the relevant slant angle sensor structure of expression embodiment 3.
Figure 13 be the relevant slant angle sensor structure of expression embodiment 4 from the observed stereographic map of front.
Figure 14 is the observed vertical view from the top of the relevant slant angle sensor structure of expression embodiment 4.
Figure 15 is the observed vertical view from the top of the relevant slant angle sensor structure of expression embodiment 5.
Figure 16 be the relevant slant angle sensor structure of expression embodiment 6 from the observed stereographic map of front.
Figure 17 is the observed stereographic map from the place ahead of the relevant slant angle sensor structure of expression embodiment 6.
Figure 18 is the synoptic diagram of the relevant camera structure that slant angle sensor is installed of expression embodiment 7.
Figure 19 is the synoptic diagram of the relevant hard disk drive structure that slant angle sensor is installed of expression embodiment 7.
Figure 20 is the synoptic diagram of the relevant seismograph structure that slant angle sensor is installed of expression embodiment 7.
Figure 21 is the seismographic inner structure synoptic diagram that slant angle sensor is installed that expression embodiment 7 is correlated with.
Embodiment
Being characterized as of position transducer of the present invention is provided with the attenuating device that applies damping force in order to suppress excessively to reply on the flexure operation of movable elastomeric element thereon, improves accuracy of detection and detection sensitivity thus.Next, the concrete structure and the action of slant angle sensor are described in conjunction with the embodiments.
In addition, in the following embodiments, the example that detects a pitch angle on the direction has been described, still, also a plurality of sensors can be installed on the cantilever part as described later, thereby detected pitch angle on a plurality of directions.And the present invention not only is confined in the detection at pitch angle, and the present invention can also be applied to come according to output valve the occasion of sense acceleration.For example, utilize the static output valve of sensor to calculate the pitch angle, utilize dynamic output valve to calculate acceleration.
[embodiment 1]
To shown in Figure 8, the first embodiment of the present invention is described in conjunction with Fig. 1.Fig. 1 to Fig. 4 is the observed structural drawing on all directions of the relevant slant angle sensor of present embodiment, and Fig. 5 is the exploded view of slant angle sensor.Fig. 6 to Fig. 8 is the detection principle key diagram at pitch angle.
[formation]
At first, Fig. 1 represents to observe from front the stereographic map of the relevant slant angle sensor of present embodiment, and Fig. 2 is from the observed stereographic map of rear end side.Fig. 3 is the vertical view of slant angle sensor, and Fig. 4 is a side view.And Fig. 5 is for decomposing the exploded view of each structure that shows slant angle sensor.
As shown in these figures, slant angle sensor comprises: carry the pedestal 7 of each inscape, be fixed on the back-up block 6 on this pedestal 7, the cantilever part 1 that is fixed and is supporting rearward end 11 on this back-up block 6.And, magnet 21,22 is installed on the leading section 12 of cantilever part 1, be equipped with GMR chip 31,32 on the said base 7 of these magnet 21,22 belows.And then, cantilever part 1 foremost near on pedestal 7 on the vibroshock 4 that is filled gel 5 is installed.In addition, as described later, output to for output valve on the control basal plate of the device that sensor is installed and the terminal that uses above-mentioned GMR chip 31,32, perhaps, the parts such as IC that detect the computing that is treated to the beginning are installed on the pedestal 7, but, omitted dependency structure in the accompanying drawings.And, the framework that covers slant angle sensor top itself also is installed, also omitted these parts in the accompanying drawings.Next, each structure is further detailed.
As Fig. 1 to Fig. 4, particularly shown in Figure 5, cantilever part 1 (elastomeric element) is formed by the thin-plate member with specified length, and it has soft elasticity.And the plate face of cantilever part 1 is set up perpendicular to pedestal 7.Specifically, the plate face broad at the both ends 11,12 of cantilever part 1 and being formed, conversely, the plate face width degree of central part is narrow relatively and be formed.
And the rearward end 11 (stiff end) of cantilever part 1 is held by the back-up block 6 that is made of the pair of block parts that are installed on the pedestal 7 and fixes (with reference to Fig. 1).Thus, thin cantilever part 1 central part of, plate face thickness narrow compared to two end plates face width degree is easily towards the thickness of slab direction shown in the arrow of Fig. 5, that is, and and perpendicular to cantilever part 1 length direction and be parallel to the direction bending of 7 of pedestals.Thereby the leading section of cantilever part 1 12 is formed as the free end that can move along direction shown in the arrow of above-mentioned Fig. 5.
And then the length of above-mentioned cantilever part 1 is longer, and for example, its resonant frequency is lower than the parts of identical material, identical thickness of slab and is formed.That is, if the length of cantilever part 1 is short, its resonant frequency uprises, and like this, though improve its security, its sensitivity descends.In order to improve this sensitivity, in the present embodiment, it is longer that the length of cantilever part 1 is formed, thereby make its reply small skew or external force and by crooked easily, thereby improve detection sensitivity.On the other hand, as the interference of the external force that cantilever part 1 is vibrated, particularly collect near the frequency interferences of resonant frequency easily on bending direction, thus, on cantilever part 1, be easy to generate vibration, still, as described later, by front attenuating device is set at cantilever part 1, thereby reduce rapidly at short notice and restrain the vibration that described interference brings, therefore, can discharge effectively and disturb the influence that brings, and, can have high precision and detect degree of tilt or acceleration in high sensitivity.
In addition, as mentioned above, the length of cantilever part 1 is long more, and it is high more just to detect clever lightness, still, wishes to realize the miniaturization of slant angle sensor.Make sensor have the sensitivity of expectation when therefore, dwindling the size of sensor itself as far as possible and design suitable cantilever part 1 length for well.
And, as mentioned above, be separately installed with magnet 21,22 on the two sides side of the leading section 12 of the cantilever part 1 of plate face broad.And, barricade 23,24 (with reference to Fig. 5) is installed on the upper face side of each magnet 21,22.And, on the pedestal 7 below each magnet 21,22, be equipped with the GMR chip 31,32 of detection respectively since the magnetic field that described magnet 21,22 sends.At this,, magnet 21,22 and GMR chip 31,32 are elaborated with reference to Fig. 6 to Fig. 8.
Shown in Fig. 7 (a), magnet 21,22 (magnetic field generation device) is made of group magnet, and, the N utmost point and S are provided on the one side (following) of pedestal 7 sides extremely alternately.For example, at the magnet 21 shown in the symbol 21, the S utmost point is positioned on the following two ends, and the N utmost point is positioned at central authorities, and at the magnet 22 shown in the symbol 22, the N utmost point is positioned on the following two ends, and the S utmost point is positioned at central authorities.Thereby, produce magnetic field towards direction shown in the circular-arc arrow of Fig. 7 (a).
And the substantial middle below of each magnet 21,22 is equipped with GMR chip 31,32 respectively.And, on each GMR chip 31,32 (detector for magnetic field), be separately installed with one or more GMR element (figure does not show).In addition, in the present embodiment, on each GMR chip 31,32,2 GMR elements are installed respectively.And the GMR element is the magnetic direction that is transfused to of a kind of reply and export the magneto-resistance effect element of MR resistance value.In conjunction with shown in Figure 6, be further detailed at detecting principle as the pitch angle of using this GMR element.
At first, Fig. 6 (a) represents a GMR element 31a, and its top is equipped with magnet 21.And, not producing in any direction when quickening, the magnetic field H direction of the relative magnet 21 of GMR element 31a keeps approximate vertical and is set (with reference to the dot-and-dash line among Fig. 6 (a)).In addition, the direction of magnetic field H can be the opposite direction of direction as shown.Under this state, if moving magnet 21, then shown in Fig. 6 (a), the magnetic field H direction of magnet 21 changes, and the direction of magnetic field H that is input to GMR element 31a is from vertical direction inclination Δ θ.Then, shown in Fig. 6 (b), GMR element 31a has the characteristic that changes the MR resistance value.In addition, in the example shown in Fig. 6 (b), when the resistance value under the plumbness was set at R0, it had change king-sized characteristic when the inclination minute angle.According to above characteristic, be installed in the GMR element 31 of magnet 21 belows shown in the symbol 21, shown in Fig. 7 (b), it has the character that changes resistance value corresponding to moving of magnet 21.
And, utilize each GMR element (4) of above-mentioned each GMR chip 31,32 to constitute bridge circuit shown in Figure 8, thus exportable differential voltage.Thus, based on differential voltage, can be easily and detect the resistance change of GMR element accurately.And, can calculate the pitch angle according to the size of detected resistance value.At this moment, calculate at that time pitch angle by utilizing the static resistance value, and, utilize the resistance change on the certain hour to calculate acceleration.
Next attenuating device on the front end position that is installed in cantilever part 1 is described.At first, be formed (that is, pedestal 7) approximate vertical on the position foremost of cantilever part 1 and the zigzag part 13 of warpage towards the below.And, this zigzag part 13 again below pedestal 7 be provided with and form the vibroshock 4 that quadrangle is accommodated recess, in this accommodates recess, be filled with gel 5 (gel parts (adhesive parts)).In addition, gel 5 is positioned at the recess of accommodating of vibroshock 4, and its liquid level is lower than the height of opening surface, and the amount of being filled is to make the lower portion of above-mentioned zigzag part 13 can be impregnated in amount in the gel 5.That is, the lower portion of zigzag part 13 becomes and is impregnated in dipping portions in the gel 5.
Specifically, above-mentioned gel 5 is the silicon gel, and gel 5 is a kind of under-40 ℃～120 ℃ temperature, that is, and and the parts that do not hardened and have the viscosity of specialized range in the serviceability temperature scope of general machine.And, as follows as the range of viscosities of gel 5: consider the rigidity of above-mentioned cantilever part 1 etc., and, allow crooked this cantilever part 1 and the magnet 21,22 at mobile front end position, and, can restrain cantilever part 1 vibration at short notice, the scope that applies suitable damping force is for well.In addition, the gel 5 that is filled in the vibroshock 4 is not limited to above-mentioned material, can also use the parts that are made of other material.
[action]
Next explanation utilization has the pitch angle detection action of the slant angle sensor of said structure.At first, 11 supported 6 fixed supports of the rearward end of cantilever part 1, leading section 12 sides and the pedestal 7 that are mounted magnet 21,22 of cantilever part 1 have prescribed distance, and this leading section 12 is located on the position with specified altitude of top of pedestal 7.At this moment, the plate face of cantilever part 1 is set up perpendicular to the surface of pedestal 7, and it has high rigidity and is set on above-below direction, thereby suppresses the phenomenon that leading section 12 becomes because of gravity factor downwards.
At this, because the length of cantilever part 1 is long, thickness of slab is thin, therefore, this cantilever part 1 is on the vertical direction of plate face, that is, crooked easily on the direction of arrow shown in Figure 3.Thereby when producing along the inclination of the direction of arrow of Fig. 3 or being subjected to external force, cantilever part 1 is bent, and the magnet 21 that is set on its leading section 12 moves along the direction of arrow.That is, can have in high sensitivity and detect.On the other hand, cantilever part 1 particularly is subjected near the interference of the external force the resonant frequency etc. and vibration easily, but, as mentioned above, be positioned at cantilever part 1 foremost the zigzag part 13 of portion follow vibration and mobile at gel 5, thereby apply the damping force of relative pedestal 7 (other fixed part) for cantilever part 1 by this viscosity.Thereby, can restrain cantilever part 1 at short notice rapidly, that is, the vibration of magnet 21,22, and the influence of suppress disturbing, thus the state that can detect degree of tilt etc. kept always.
And when producing the inclination that needs detection or quickening, cantilever part 1 is bent and moving magnet 21,22.Thus, change the magnetic direction (with reference to Fig. 7 (a)) of the GMR chip 31,32 that is positioned at its below relatively, and change by described GMR chip 31,32 detected MR resistance values.And,, thereby can calculate the pitch angle according to this resistance value with reference to the corresponding Image Data at predefined resistance value and pitch angle etc.As mentioned above, the influence that can suppress to disturb, and improve detection sensitivity.
And, as mentioned above, because the detection sensitivity height by cantilever part 1, therefore, can suppress the influence of the temperature drift that detector for magnetic field causes.That is, utilize GMR chip 31,32 can obtain very big detection limit, therefore,, can improve the quality of sensor even exist the temperature drift of GMR chip 31,32 also can carry out high-precision test by the clever lightness of height.
In addition, in the above description,, show the occasion that the GMR element is installed for example, still, can also use other magnetic field detection elements such as Hall element at this in order to detect magnetic direction by moving magnet 21,22.
[embodiment 2]
Next, to shown in Figure 10, the second embodiment of the present invention is described in conjunction with Fig. 9.At first, Fig. 9 represents to observe from front the stereographic map of the relevant slant angle sensor of present embodiment, Figure 10 be from top view roughly to synoptic diagram.
The slant angle sensor that present embodiment is relevant has and is approximately identical to the structure that the foregoing description 1 is disclosed, and still, the structure of vibroshock 104 is different.As Fig. 9, shown in Figure 10, the vibroshock 104 that present embodiment is relevant forms, and two plate-like portions extend upward, and its top has the roughly U glyph shape of opening.And, be filled with gel 105 between two plate-like portions with regulation viscosity.In addition, gel 105 rests on the U word shape position of vibroshock 104 by self viscosity, thereby keeps the state of being accommodated.And, be impregnated with zigzag part 13 bottoms in this gel 105 as a position of cantilever part 1.
Thus,,, therefore, quicken relatively or tilt and have and produce reaction in high sensitivity and be bent because cantilever part 1 has the structure of easy bending as above-mentioned, thus moving magnet 21,22.Thus, change the magnetic direction of the GMR chip 31,32 that is positioned at its below relatively, and change by described GMR chip 31,32 detected MR resistance values.And, can measure degree of tilt according to this detected resistance value.On the other hand, cantilever part 1 is collected the interference such as impact from the outside of this cantilever part 1 of vibration easily, particularly produces vibration by near the interference the resonant frequency easily, but, owing to apply damping force by 105 pairs of cantilever parts 1 of gel, therefore, can restrain vibration at short notice rapidly.Thereby, the influence that can suppress to disturb, and improve detection sensitivity and accuracy of detection.
[embodiment 3]
Next, to shown in Figure 12, the third embodiment of the present invention is described in conjunction with Figure 11.At first, Figure 11 represents to observe from front the stereographic map of the relevant slant angle sensor of present embodiment, Figure 12 be from top view roughly to synoptic diagram.
The slant angle sensor that present embodiment is relevant has and is approximately identical to the structure that the foregoing description 2 is disclosed, and still, the shape at the front end position of cantilever part 1 is different.In addition, as embodiment 2, the vibroshock 204 that present embodiment is relevant forms, and two plate-like portions extend upward, and its top has the roughly U glyph shape of opening.And the height of two plate-like portions is higher than embodiment 2, and is filled with the gel 205 with regulation viscosity betwixt.
And the portion foremost 213 of the cantilever part 1 that present embodiment is relevant is not tortuous downwards, and its length direction along this cantilever part 1 extends, and its length forms, and can run through the length of the gel 205 that is filled in above-mentioned vibroshock 204.That is, the part of portion 213 is submerged in the gel 205 foremost.
Thus,,, therefore, quicken relatively or tilt and have and produce reaction in high sensitivity and be bent because cantilever part 1 has the structure of easy bending as above-mentioned, thus moving magnet 21,22.Thus, change the magnetic direction of the GMR chip 31,32 that is positioned at its below relatively, and change by described GMR chip 31,32 detected MR resistance values.And, can measure degree of tilt according to this detected resistance value.On the other hand, collect the interference such as impact from the outside of this cantilever part 1 of vibration easily, particularly produce vibration by near the interference the resonant frequency easily, but, owing to apply damping force by 205 pairs of cantilever parts 1 of gel, therefore, can restrain vibration at short notice rapidly.Thereby, the influence that can suppress to disturb, and improve detection sensitivity and accuracy of detection.
[embodiment 4]
Next, to shown in Figure 14, the fourth embodiment of the present invention is described in conjunction with Figure 13.At first, Figure 13 represents to observe from front the stereographic map of the relevant slant angle sensor of present embodiment, and Figure 14 is observed vertical view from the top.
The slant angle sensor that present embodiment is relevant has and is approximately identical to the structure that the foregoing description 1 is disclosed, and still, vibroshock 4 is not installed, adopts the attenuating device of other structures at this.Specifically, as Figure 13, shown in Figure 14, the front again of cantilever part 1 leading section roughly sets the roughly fixing wall portion 341 of rectangular parallelepiped side by side with magnet 21,22, and it is fixedly installed on the pedestal 7.In addition, the height of this fixing wall portion 341 is roughly the same with the height that is supported on the magnet 21,22 on the pedestal 7 by cantilever part 1.
And, as shown in the figure, the bar-shaped link 342 that connects cantilever part 1 front end position and fixing wall portion 341 tops is installed.Follow in this, between the top at cantilever part 1 front end position and fixing wall portion 341 tops, be attached with the gel 351,352 of ormal weight respectively.And the both ends of above-mentioned link 342 are submerged on each gel 351,352.That is, link 342 intervention gels 351,352 are connected cantilever part 1 (magnet 21,22) with fixing wall portion 341.
In addition, preferred, be formed the gel resettlement section on the top and fixing wall portion 341 tops at cantilever part 1 front end position, and gel 351,352 is filled in the described resettlement section.Follow in this, the two ends of link 342 are submerged in the gel 351,352 that is contained in the gel resettlement section.
Thus,,, therefore, quicken relatively or tilt and have and produce reaction in high sensitivity and be bent because cantilever part 1 has the structure of easy bending as above-mentioned, thus moving magnet 21,22.Thus, change the magnetic direction of the GMR chip 31,32 that is positioned at its below relatively, and change by described GMR chip 31,32 detected MR resistance values.And, can measure degree of tilt according to this detected resistance value.On the other hand, collect the interference such as impact from the outside of this cantilever part 1 of vibration easily, particularly produce vibration by near the interference the resonant frequency easily, but, for fixed part 341, by gel 351,352 and get involved 342 pairs of cantilever parts 1 of link and apply damping force, therefore, can restrain vibration at short notice rapidly.Thereby, the influence that can suppress to disturb, and improve detection sensitivity and accuracy of detection.
[embodiment 5]
Next, in conjunction with shown in Figure 15, the fifth embodiment of the present invention is described.Figure 15 represents to observe from the top vertical view of the relevant slant angle sensor of present embodiment.
The slant angle sensor that present embodiment is relevant has and is approximately identical to the structure that the foregoing description 4 is disclosed, and still, the structure of attenuating device is different.Specifically, as shown in figure 15, difference is, is provided with two links 343,344.At this, correspond respectively to the two ends of two links 343,344, on magnet 21,22 tops that are installed on cantilever part 1 leading section and fixing wall portion 341 tops, be attached with the gel 353,354,355,356 of ormal weight respectively.And the both ends of above-mentioned each link 343,344 are submerged on each gel 353,354,355,356.That is, two links 343,344 intervention gels 353～356 are connected cantilever part 1 (magnet 21,22) with fixing wall portion 341.
In addition, preferred, the top and fixing wall portion 341 tops that are arranged on the magnet 22,23 at cantilever part 1 front end position have been formed the gel resettlement section, and gel 353～356 is filled in the described resettlement section.Follow in this, the two ends of each link 343,344 are submerged in the gel 351～354 that is contained in the gel resettlement section.
Thus,,, therefore, quicken relatively or tilt and have and produce reaction in high sensitivity and be bent because cantilever part 1 has the structure of easy bending as above-mentioned, thus moving magnet 21,22.Thus, change the magnetic direction of the GMR chip 31,32 that is positioned at its below relatively, and change by described GMR chip 31,32 detected MR resistance values.And, can measure degree of tilt according to this detected resistance value.On the other hand, collect the interference such as impact from the outside of this cantilever part 1 of vibration easily, particularly produce vibration by near the interference the resonant frequency easily, but, for fixed part 341, by gel 353,354,355,356 and get involved 343,344 pairs of cantilever parts 1 of link and apply damping force, therefore, can restrain vibration at short notice rapidly.Thereby, the influence that can suppress to disturb, and improve detection sensitivity and accuracy of detection.
[embodiment 6]
Next, to shown in Figure 17, the sixth embodiment of the present invention is described in conjunction with Figure 16.At first, Figure 16 represents to observe from front the stereographic map of the relevant slant angle sensor of present embodiment, and Figure 17 is observed vertical view from the top.
The slant angle sensor that present embodiment is relevant has and is approximately identical to the structure that the foregoing description 1 is disclosed, and still, vibroshock 4 is not installed, adopts the attenuating device of other structures at this.Specifically, as Figure 16, shown in Figure 17, be installed in the side of the magnet 21,22 of cantilever part 1 leading section, set the roughly fixing wall portion 441,442 of rectangular parallelepiped side by side with magnet 21,22 respectively, it is fixedly installed on the pedestal 7.In addition, the height of this fixing wall portion 441,442 is roughly the same with the height that is supported on the magnet 21,22 on the pedestal 7 by cantilever part 1.
And, as shown in the figure, be attached with the gel 451,452 of ormal weight between each sidepiece of each magnet 22,23 and adjacent each fixing wall portion 441,442 respectively.In addition, gel 451,452 keeps stopping the state that is provided between magnet 22,23 and the fixing wall portion 441,442 by self viscosity.
Thus,,, therefore, quicken relatively or tilt and have and produce reaction in high sensitivity and be bent because cantilever part 1 has the structure of easy bending as above-mentioned, thus moving magnet 21,22.Thus, change the magnetic direction of the GMR chip 31,32 that is positioned at its below relatively, and change by described GMR chip 31,32 detected MR resistance values.And, can measure degree of tilt according to this detected resistance value.On the other hand, collect the interference such as impact from the outside of this cantilever part 1 of vibration easily, particularly produce vibration by near the interference the resonant frequency easily, but, owing to apply damping force to cantilever part 1 by gel 451,452 relative fixed parts 441,442, therefore, can restrain vibration at short notice rapidly.Thereby, the influence that can suppress to disturb, and improve detection sensitivity and accuracy of detection.
[embodiment 7]
Next example about the slant angle sensor that said structure is installed is described.At first, above-mentioned slant angle sensor can utilize on camera.With reference to Figure 18 this concrete example is described.
Figure 18 represents the inner structure of camera 500.As shown in the figure, camera 500 inside are equipped with the control basal plate 501 of this camera action of control, on this substrate 501 slant angle sensor 510 are installed.And, utilize calculation apparatus on the control basal plate 501 (figure does not show) to the processing that performs calculations of the signal of these sensor 510 outputs, thereby the pitch angle on the computational rules direction (measurement mechanism).Thus, can detect the vertical or transverse pitch direction when pushing camera shutter, and can use in portrait conversion and the revisal.
And slant angle sensor can also be installed on the e-machine such as projector, and measures the pitch angle, thereby whether detects laying state such as horizontal positioned.And then slant angle sensor can also be installed on the motorcycle, and detects the pitch angle of motorcycle, detects thereby be used in overturning.
And, can also utilize slant angle sensor to measure acceleration.That is, have the output valve of the slant angle sensor of above-mentioned formation, that is, carry out computing by MR resistance value, thereby can measure the acceleration on the prescribed direction the GMR element.As an example,, describe at the occasion that will be installed on hard disk drive 600 as the slant angle sensor 610 of acceleration transducer in conjunction with shown in Figure 19.
Figure 19 represents to observe from the inboard inner structure synoptic diagram of hard disk drive 600.The inside of hard disk drive 600 is equipped with the control basal plate 601 of this driver action of control, on this substrate 601 slant angle sensor 610 is installed.And, utilize calculation apparatus on the control basal plate 601 (figure does not show) to the processing that performs calculations of the signal of these sensor 610 outputs, thus the acceleration on the computational rules direction (measurement mechanism).For example, by calculating the variation of dynamic resistance value, that is, the variable quantity of the resistance value in the unit of account time, thus acceleration can be measured.Thus, what can detect hard disk drive 600 in a flash improperly moves or comes off, and control head, and it is removed on disk, thus the destruction that can suppress data.
And then above-mentioned slant angle sensor can also be installed on the controller of game machine.At this moment, measure the action (acceleration) or the pitch angle of controller, and, correlation used as the input value of controller.
At this, in the above description illustration 1 slant angle sensor is installed on situation above the e-machine etc., still, a plurality of slant angle sensors can be installed, thereby can measure the pitch angle on a plurality of directions, perhaps, acceleration.For example, two slant angle sensors are installed on respectively on the elastomeric element of vertically establishing mutually (cantilever part), thereby can measure two axially, that is, and degree of tilt on the in-plane or acceleration.Specifically, can be installed on the stove, thus the upset that is used in stove prevent, perhaps, can be used in the detection of parastate of crane.
And, three slant angle sensors can be installed on bending direction respectively and be three axially on the elastomeric element (cantilever part) of (X, Y, Z axial), thereby can detect three-dimensional degree of tilt or acceleration.Specifically, can be used on the seismograph.At this, Figure 20, Figure 21 represent that the slant angle sensor that the invention described above is relevant is installed on the example on the seismograph 700.Figure 20 is the schematic appearance of seismograph 700, and Figure 21 is the body interior synoptic diagram of seismograph 700.As shown in the figure, the inside of seismograph 700 is equipped with three slant angle sensors 710,720,730, and the bending direction of each elastomeric element (cantilever part) is set up towards 3 axial (that is, horizontal X direction, horizontal Y direction, vertical Z directions).Thus, can have high sensitivity and detect seimic three-dimensional acceleration or degree of tilt accurately.
As mentioned above, the present invention has disclosed the various embodiment that utilize slant angle sensor, still, can also be installed on any electronic installation or other devices.And, when detecting the acceleration of regulation or pitch angle, the action of control electronic installation, thereby protection related electronic device.Thus, can constitute electronic installation or various device with high reliability, simultaneously, multifunction that can implement device.
Utilizability on the industry
Slant angle sensor of the present invention is installed on e-machine or the various device, and measures these devices Gradient or acceleration, therefore, it has the utilizability on the industry.
Claims (11)
1. a slant angle sensor is characterized in that, comprising:
Elastomeric element, it has stiff end and free end, and this free end has at least the degree of freedom to a direction bending;
Magnetic field generation device, it is installed on the free end of described elastomeric element, and produces magnetic field;
Detector for magnetic field, it is mounted in the face of described magnetic field generation device, and detects the magnetic direction that described magnetic field generation device produces; And
Attenuating device, this device apply the damping force of the described elastomeric element flexure operation that is used to decay.
2. slant angle sensor according to claim 1 is characterized in that described attenuating device is arranged near the free end of described elastomeric element.
3. slant angle sensor according to claim 2 is characterized in that, described attenuating device is arranged on the free-ended position foremost of described elastomeric element, perhaps is arranged on the described magnetic field generation device.
4. according to claim 1,2 or 3 described slant angle sensors, it is characterized in that described attenuating device is made of the adhesive parts that relatively moves of described elastomeric element or described magnetic field generation device, other fixed parts and these part/device that decay.
5. slant angle sensor according to claim 4 is characterized in that, described adhesive parts is the gel parts.
6. slant angle sensor according to claim 5 is characterized in that, described attenuating device comprises:
Gel parts resettlement section, it is set on described other fixed parts, and accommodates described gel parts; And
Dipping portion, it belongs to the described elastomeric element that is impregnated in the described gel parts or the part of described magnetic field generation device.
7. according to claim 5 or 6 described slant angle sensors, it is characterized in that described gel parts are not hardened and have the viscosity of the scope of predesignating under-40 ℃～120 ℃ temperature.
8. according to claim 5,6 or 7 described slant angle sensors, it is characterized in that described gel parts are the silicon gel.
9. according to claim 1,2,3,4,5,6,7 or 8 described slant angle sensors, it is characterized in that described elastomeric element is formed by the thin plate-shaped member of the thickness of slab on described free-ended bending direction.
10. one kind is equipped with the detected device that right is wanted ball 1 to 9 described slant angle sensor, it is characterized in that, comprising:
Calculation element, this device calculate the pitch angle or the acceleration of the device of described elastomeric element on bending direction self based on the output valve of described slant angle sensor.
11. detected device according to claim 10 is characterized in that this device belongs to e-machine.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100968756A CN101281032B (en) | 2007-04-06 | 2007-04-06 | Tilting angle sensor and detected device with the same |
| US12/061,281 US7956602B2 (en) | 2007-04-06 | 2008-04-02 | Tilt angle sensor and detection-target device comprising the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100968756A CN101281032B (en) | 2007-04-06 | 2007-04-06 | Tilting angle sensor and detected device with the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101281032A true CN101281032A (en) | 2008-10-08 |
| CN101281032B CN101281032B (en) | 2012-08-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100968756A Expired - Fee Related CN101281032B (en) | 2007-04-06 | 2007-04-06 | Tilting angle sensor and detected device with the same |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103364073A (en) * | 2013-07-25 | 2013-10-23 | 北京卫星环境工程研究所 | Method and system for measuring micro-vibration by using magnetic field |
| CN104582867A (en) * | 2012-06-18 | 2015-04-29 | 特鲁普机械奥地利有限公司及两合公司 | Bending press having an angle-measuring device and method for determining the bending angle |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1417555A (en) * | 2002-11-08 | 2003-05-14 | 许建平 | Magnetic induction angular shift sensor |
| JP2005257520A (en) * | 2004-03-12 | 2005-09-22 | Omron Corp | Inclination sensor |
| JP4817747B2 (en) * | 2005-07-28 | 2011-11-16 | 新科實業有限公司 | Acceleration sensor, hard disk drive equipped with the same, and acceleration measurement method |
-
2007
- 2007-04-06 CN CN2007100968756A patent/CN101281032B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104582867A (en) * | 2012-06-18 | 2015-04-29 | 特鲁普机械奥地利有限公司及两合公司 | Bending press having an angle-measuring device and method for determining the bending angle |
| CN104582867B (en) * | 2012-06-18 | 2016-08-24 | 特鲁普机械奥地利有限公司及两合公司 | Including the bullodozer of angle detection device and for the method determining angle of bend |
| US9664493B2 (en) | 2012-06-18 | 2017-05-30 | Trumpf Maschinen Austria Gmbh & Co. Kg. | Bending press having an angle-measuring device and method for determining the bending angle |
| CN103364073A (en) * | 2013-07-25 | 2013-10-23 | 北京卫星环境工程研究所 | Method and system for measuring micro-vibration by using magnetic field |
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| CN101281032B (en) | 2012-08-22 |
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