CN101280418A - 具有多层辐射式蒸发源分布结构的多源真空蒸镀装置 - Google Patents
具有多层辐射式蒸发源分布结构的多源真空蒸镀装置 Download PDFInfo
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101845611A (zh) * | 2010-05-07 | 2010-09-29 | 中山大学 | 一种真空蒸镀设备及其蒸镀方法 |
CN103014620A (zh) * | 2013-01-04 | 2013-04-03 | 四川虹视显示技术有限公司 | Oled玻璃基板蒸镀机 |
CN103243302A (zh) * | 2013-05-21 | 2013-08-14 | 上海和辉光电有限公司 | 挡板机构、薄膜沉积装置及薄膜沉积方法 |
CN103805957A (zh) * | 2012-11-14 | 2014-05-21 | 三星显示有限公司 | 用于沉积有机材料的设备 |
CN104195509A (zh) * | 2014-06-10 | 2014-12-10 | 合肥工业大学 | 基于ito加热片的金属膜电极的制作方法 |
WO2015062311A1 (zh) * | 2013-10-30 | 2015-05-07 | 京东方科技集团股份有限公司 | 真空蒸镀装置 |
CN106463625A (zh) * | 2014-05-05 | 2017-02-22 | 学校法人冲绳科学技术大学院大学学园 | 用于制造用于太阳能电池用途的钙钛矿膜的***和方法 |
CN109402592A (zh) * | 2017-08-18 | 2019-03-01 | Tcl集团股份有限公司 | 器件侧面蒸镀装置及器件侧面蒸镀方法 |
CN109536897A (zh) * | 2019-01-16 | 2019-03-29 | 合肥百思新材料研究院有限公司 | 一种24源连续有机材料蒸镀装备 |
CN110036135A (zh) * | 2016-12-14 | 2019-07-19 | 株式会社神户制钢所 | 靶用遮挡件机构及具备该靶用遮挡件机构的成膜装置 |
CN114277354A (zh) * | 2021-12-28 | 2022-04-05 | 深圳奥卓真空设备技术有限公司 | 一种af连续真空镀膜设备及其均匀性控制方法 |
-
2008
- 2008-04-29 CN CN2008100255575A patent/CN101280418B/zh not_active Expired - Fee Related
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101845611A (zh) * | 2010-05-07 | 2010-09-29 | 中山大学 | 一种真空蒸镀设备及其蒸镀方法 |
CN103805957A (zh) * | 2012-11-14 | 2014-05-21 | 三星显示有限公司 | 用于沉积有机材料的设备 |
CN103014620A (zh) * | 2013-01-04 | 2013-04-03 | 四川虹视显示技术有限公司 | Oled玻璃基板蒸镀机 |
CN103014620B (zh) * | 2013-01-04 | 2015-04-08 | 四川虹视显示技术有限公司 | Oled玻璃基板蒸镀机 |
CN103243302A (zh) * | 2013-05-21 | 2013-08-14 | 上海和辉光电有限公司 | 挡板机构、薄膜沉积装置及薄膜沉积方法 |
CN103243302B (zh) * | 2013-05-21 | 2015-07-08 | 上海和辉光电有限公司 | 挡板机构、薄膜沉积装置及薄膜沉积方法 |
WO2015062311A1 (zh) * | 2013-10-30 | 2015-05-07 | 京东方科技集团股份有限公司 | 真空蒸镀装置 |
US10316401B2 (en) | 2013-10-30 | 2019-06-11 | Boe Technology Group Co., Ltd. | Vacuum evaporation device |
CN106463625B (zh) * | 2014-05-05 | 2019-04-26 | 学校法人冲绳科学技术大学院大学学园 | 用于制造用于太阳能电池用途的钙钛矿膜的***和方法 |
US11447858B2 (en) | 2014-05-05 | 2022-09-20 | Okinawa Institute Of Science And Technology School Corporation | System and method for fabricating perovskite film for solar cell applications |
CN106463625A (zh) * | 2014-05-05 | 2017-02-22 | 学校法人冲绳科学技术大学院大学学园 | 用于制造用于太阳能电池用途的钙钛矿膜的***和方法 |
CN104195509A (zh) * | 2014-06-10 | 2014-12-10 | 合肥工业大学 | 基于ito加热片的金属膜电极的制作方法 |
CN104195509B (zh) * | 2014-06-10 | 2016-09-28 | 合肥工业大学 | 基于ito加热片的金属膜电极的制作方法 |
CN110036135A (zh) * | 2016-12-14 | 2019-07-19 | 株式会社神户制钢所 | 靶用遮挡件机构及具备该靶用遮挡件机构的成膜装置 |
CN109402592A (zh) * | 2017-08-18 | 2019-03-01 | Tcl集团股份有限公司 | 器件侧面蒸镀装置及器件侧面蒸镀方法 |
CN109536897A (zh) * | 2019-01-16 | 2019-03-29 | 合肥百思新材料研究院有限公司 | 一种24源连续有机材料蒸镀装备 |
CN109536897B (zh) * | 2019-01-16 | 2023-11-07 | 安徽贝意克设备技术有限公司 | 一种24源连续有机材料蒸镀装备 |
CN114277354A (zh) * | 2021-12-28 | 2022-04-05 | 深圳奥卓真空设备技术有限公司 | 一种af连续真空镀膜设备及其均匀性控制方法 |
CN114277354B (zh) * | 2021-12-28 | 2023-09-19 | 深圳奥卓真空设备技术有限公司 | 一种af连续真空镀膜设备及其均匀性控制方法 |
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