CN101248002B - 封装有锚定盖的微机电装置以及该装置的制造方法 - Google Patents
封装有锚定盖的微机电装置以及该装置的制造方法 Download PDFInfo
- Publication number
- CN101248002B CN101248002B CN2006800309112A CN200680030911A CN101248002B CN 101248002 B CN101248002 B CN 101248002B CN 2006800309112 A CN2006800309112 A CN 2006800309112A CN 200680030911 A CN200680030911 A CN 200680030911A CN 101248002 B CN101248002 B CN 101248002B
- Authority
- CN
- China
- Prior art keywords
- layer
- integrated circuit
- protection barrier
- low dielectric
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00238—Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Micromachines (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (23)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05291789 | 2005-08-26 | ||
EP05291789.5 | 2005-08-26 | ||
PCT/EP2006/008307 WO2007022978A1 (en) | 2005-08-26 | 2006-08-24 | Microelectromechanical device packaging with an anchored cap and its manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101248002A CN101248002A (zh) | 2008-08-20 |
CN101248002B true CN101248002B (zh) | 2012-01-11 |
Family
ID=37387429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800309112A Expired - Fee Related CN101248002B (zh) | 2005-08-26 | 2006-08-24 | 封装有锚定盖的微机电装置以及该装置的制造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8871606B2 (zh) |
EP (1) | EP1924523A1 (zh) |
JP (1) | JP2009506602A (zh) |
KR (1) | KR20080085826A (zh) |
CN (1) | CN101248002B (zh) |
WO (1) | WO2007022978A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7897506B2 (en) * | 2008-12-17 | 2011-03-01 | PixArt Imaging Incorporation, R.O.C. | Micro-electro-mechanical-system device with particles blocking function and method for making same |
DE102012208033B4 (de) | 2012-05-14 | 2020-08-06 | Robert Bosch Gmbh | Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung |
CN105460883B (zh) * | 2014-09-05 | 2017-11-14 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制备方法、电子装置 |
US20190169020A1 (en) * | 2017-12-05 | 2019-06-06 | Intel Corporation | Package substrate integrated devices |
US11884536B2 (en) * | 2020-10-23 | 2024-01-30 | AAC Technologies Pte. Ltd. | Electrical interconnection structure, electronic apparatus and manufacturing methods for the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994014240A1 (en) * | 1992-12-11 | 1994-06-23 | The Regents Of The University Of California | Microelectromechanical signal processors |
US6822304B1 (en) * | 1999-11-12 | 2004-11-23 | The Board Of Trustees Of The Leland Stanford Junior University | Sputtered silicon for microstructures and microcavities |
JP3817449B2 (ja) * | 2001-07-30 | 2006-09-06 | 株式会社ルネサステクノロジ | データ処理装置 |
US6624003B1 (en) * | 2002-02-06 | 2003-09-23 | Teravicta Technologies, Inc. | Integrated MEMS device and package |
US6936494B2 (en) * | 2002-10-23 | 2005-08-30 | Rutgers, The State University Of New Jersey | Processes for hermetically packaging wafer level microscopic structures |
EP1460519B1 (en) * | 2003-03-18 | 2014-05-07 | Panasonic Corporation | Processor, driving method thereof, and information processing device |
US6936491B2 (en) * | 2003-06-04 | 2005-08-30 | Robert Bosch Gmbh | Method of fabricating microelectromechanical systems and devices having trench isolated contacts |
EP1770535A4 (en) * | 2004-07-06 | 2009-07-15 | Panasonic Corp | RECORDING MEDIUM AND INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD FOR THE RECORDING MEDIUM |
JP4837456B2 (ja) * | 2006-06-28 | 2011-12-14 | パナソニック株式会社 | 情報処理装置 |
-
2006
- 2006-08-24 EP EP06777054A patent/EP1924523A1/en not_active Withdrawn
- 2006-08-24 US US11/991,041 patent/US8871606B2/en active Active
- 2006-08-24 KR KR1020087004532A patent/KR20080085826A/ko not_active Application Discontinuation
- 2006-08-24 WO PCT/EP2006/008307 patent/WO2007022978A1/en active Application Filing
- 2006-08-24 CN CN2006800309112A patent/CN101248002B/zh not_active Expired - Fee Related
- 2006-08-24 JP JP2008527393A patent/JP2009506602A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1924523A1 (en) | 2008-05-28 |
JP2009506602A (ja) | 2009-02-12 |
WO2007022978A1 (en) | 2007-03-01 |
US20100001368A1 (en) | 2010-01-07 |
KR20080085826A (ko) | 2008-09-24 |
CN101248002A (zh) | 2008-08-20 |
US8871606B2 (en) | 2014-10-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20080822 Address after: Holland Ian Deho Finn Applicant after: KONINKLIJKE PHILIPS ELECTRONICS N.V. Address before: France Kremlin Applicant before: Stmicroelectronics Crolles 2 S.A.S. Applicant before: KONINKLIJKE PHILIPS ELECTRONICS N.V. |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NXP BV Free format text: FORMER OWNER: KONINKLIJKE PHILIPS ELECTRONICS NV Effective date: 20140911 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS NV Free format text: FORMER NAME: KONINKLIJKE PHILIPS ELECTRONICS N.V. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Holland Ian Deho Finn Patentee after: Royal Philips Co.,Ltd. Address before: Holland Ian Deho Finn Patentee before: Koninklijke Philips Electronics N.V. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140911 Address after: Holland Ian Deho Finn Patentee after: NXP B.V. Address before: Holland Ian Deho Finn Patentee before: Royal Philips Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 Termination date: 20150824 |
|
EXPY | Termination of patent right or utility model |