CN101245454A - Equipment for producing thin film with whirl coating atomizing thermal decomposition - Google Patents
Equipment for producing thin film with whirl coating atomizing thermal decomposition Download PDFInfo
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- CN101245454A CN101245454A CNA2007103044266A CN200710304426A CN101245454A CN 101245454 A CN101245454 A CN 101245454A CN A2007103044266 A CNA2007103044266 A CN A2007103044266A CN 200710304426 A CN200710304426 A CN 200710304426A CN 101245454 A CN101245454 A CN 101245454A
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- reaction chamber
- equipment
- rotating disk
- temperature measuring
- wheelwork
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Abstract
The invention discloses a device for film preparation by whirl coating spray pyrolysis, the structure of which comprises that: a turnplate on which a supporting base is fixed is arranged on a rotary shaft of a rotating device. A spray nozzle and a temperature measuring device are arranged on the turnplate. The spray nozzle and the temperature measuring device correspond with the supporting base fixed on the turnplate. The turnplate, the spray nozzle and the temperature measuring device are arranged in a reaction chamber; the spray nozzle is connected with an atomization device at the outside of the reaction chamber by a pipeline; the temperature measuring device is connected with a temperature regulating device; a heating device is arranged on the reaction chamber under the turnplate and connected with the temperature regulating device; a cooling device for heat insulation is arranged on the rotary shaft between the heating device and the rotating device; the reaction chamber is provided with a bleeder hole which is connected with an exterior air extracting device. The device adopts the whirl coating spray pyrolysis to prepare the film and the prepared film is directly heated by the device, thus no cracks and environmental pollution are caused. Furthermore, thickening can be processed if necessary. When in preparation, exact temperature control can be processed. Heat dissipation is processed through the cooling device so as to prevent the rotating device from being influenced by heat exchange.
Description
Technical field
The present invention relates to a kind of equipment for preparing film, relate in particular to a kind of equipment that uses whirl coating spraying pyrolysated method to prepare film.
Background technology
The method of film preparation has a variety of, as sol-gel method, chemical vapour deposition, chemical processes such as metal organic salt deposition, also comprise rheotaxy, sputter, physical methods such as evaporation, a kind of spray heating decomposition of also normal employing prepares film now, this method is used equipment shown in Figure 1, when preparing film in this way, after the compressed air atomizer A4 atomizing of the solution for preparing, under the drive of current-carrying gas, be placed with in the container that is heated substrate A2 by nozzle A1 spirt, step decomposition is deposited on film forming on the substrate to make atomization mass volatilization after nichrome wire A3 heating desolvate also, obtains the film of bright and clean on substrate.
From above-mentioned existing spray heating decomposition is prepared the process of film, the contriver finds that there is following problem at least in above-mentioned prior art:
Because the film forming process of spraying is for carrying out gradually from level to level, therefore cause the last uneven film thickness that forms even, middle portion usually occurs and reached thickness requirement, and the thickness of film periphery does not reach requirement, and the speed of preparation film is slower, therefore the above-mentioned used equipment of spray heating decomposition can't be prepared the even satisfactory film of thickness, has the not high shortcoming of working efficiency simultaneously.
Summary of the invention
Embodiment of the present invention provides a kind of equipment for producing thin film with whirl coating atomizing thermal decomposition, this equipment can prepare easily and fast thickness evenly, clean, the film that do not chap, and rotate the influence of the wheelwork of usefulness can avoid heating unit to whirl coating the time.
The objective of the invention is to be achieved through the following technical solutions:
Embodiment of the present invention provides a kind of equipment for producing thin film with whirl coating atomizing thermal decomposition, and this equipment comprises:
Reaction chamber, temperature measuring equipment, nozzle, rotating disk, heating unit, refrigerating unit, atomisation unit, wheelwork, temperature regulating device and air extractor constitute;
The rotating disk of stationary substrate is arranged in the rotating shaft of wheelwork, and the rotating disk top is provided with nozzle and temperature measuring equipment, and nozzle and temperature measuring equipment are corresponding with fixed substrate on the rotating disk, and rotating disk, nozzle and temperature measuring equipment all are arranged in the reaction chamber;
Described nozzle is connected by the outer atomisation unit of pipeline and reaction chamber; Temperature measuring equipment is connected with temperature regulating device;
The reaction chamber of rotating disk below is provided with heating unit, and heating unit is connected with described temperature regulating device; Rotating shaft between the body of described heating unit and wheelwork is provided with the refrigerating unit of heat insulation usefulness;
Described reaction chamber is provided with the aspirating hole that is connected with outside air extractor.
Described reaction chamber comprises:
Lower platform, leg and upper mounting plate, leg are arranged on the lower platform, and upper mounting plate is arranged on the described leg and is corresponding with lower platform, and upper mounting plate, lower platform and leg constitute reaction chamber jointly.
Described leg is a silica tube.
Described nozzle and temperature measuring equipment all are arranged on the upper mounting plate of reaction chamber.
Described heating unit is arranged on the lower platform of reaction chamber, and heating unit is corresponding with the rotating disk in the reaction chamber of lower platform top.
Described aspirating hole is arranged on the upper mounting plate or lower platform of reaction chamber.
Described refrigerating unit is a water cooling plant, and water cooling plant is connected to form the heat insulation cooling back installation of cooling by water inlet pipe and rising pipe and cyclic water tank.
Described water cooling plant is airtight body structure, and this body structure is arranged in the described rotating shaft by bearing, and fixedlys connected with the body of wheelwork by mounting block.
Described refrigerating unit is an air cooling equipment, and air cooling equipment is provided with blast inlet, is connected with the air outlet of blower fan by pipeline.
Described air cooling equipment is a body structure, and this body structure is arranged on by bearing on the hollow rotating shaft that has a plurality of ventilation holes, and this body structure is fixedlyed connected with the body of wheelwork by mounting block.
The technical scheme that provides by the invention described above embodiment as can be seen, embodiment of the present invention is by being arranged on rotating disk in the rotating shaft of wheelwork, and above the stationary substrate on the rotating disk the corresponding nozzle that is connected with atomisation unit that is provided with; On the reaction chamber below the rotating disk heating unit is set, the refrigerating unit that heat insulation usefulness is set in the rotating shaft between heating unit and the wheelwork body forms equipment for producing thin film.This equipment can cooperate formation whirl coating spraying pyrolysated mode to prepare even, the clean film of thickness by wheelwork with nozzle, atomisation unit, because heating unit direct heating, therefore be full of cracks can not appear in the film of preparation, can also be in preparation process by being arranged on above the rotating disk temperature that the temperature measuring equipment corresponding with the substrate place that is provided with on the rotating disk conveniently records the preparation film, reach the purpose of accurate controlled temperature, the heat that electro-heat equipment can be transmitted in the rotating shaft by refrigerating unit dissipates, and has avoided the influence that wheelwork is caused because of rotating shaft heat conduction.This device structure is simple, can prepare film easily and fast.
Description of drawings
The spray heating decomposition that Fig. 1 provides for prior art prepares the structural representation of the equipment of film;
Fig. 2 is the structural representation of the equipment for producing thin film of the embodiment of the invention one;
Fig. 3 is the structural representation of water cooling plant for refrigerating unit in the embodiment of the invention one;
Fig. 4 is the structural representation of the equipment for producing thin film of the embodiment of the invention two.
Embodiment
Embodiment of the present invention provides a kind of equipment for producing thin film with whirl coating atomizing thermal decomposition, this equipment is provided with rotating disk in the wheelwork rotating shaft, a heating unit is set on the reaction chamber below rotating disk, rotating shaft between heating unit and the wheelwork body is provided with the refrigerating unit of heat insulation usefulness, a nozzle that is connected with atomisation unit is set on rotating disk, and nozzle is corresponding with fixed substrate on the rotating disk.Utilize this equipment can adopt whirl coating spraying pyrolysated method to prepare film, liquid thin film material after nozzle is with the atomisation unit atomizing is ejected into when forming film on the fixed substrate on the rotating disk, and heating unit can add the film after forming the solvent in the heat abstraction film at once.Be located at that the refrigerating unit in the rotating shaft has played good heat-blocking action between the body of wheelwork and the heating unit, the heat that heating unit is distributed can not impact wheelwork because of thermal conduction.This device structure is simple, preparation film that can be easily and fast.
For ease of understanding, be elaborated below in conjunction with drawings and the specific embodiments.
Embodiment one
As shown in Figure 2, present embodiment provides a kind of equipment for producing thin film with whirl coating atomizing thermal decomposition, can spray the pyrolysated mode at the various films of the last preparation of substrate (as substrates such as glass, silicon chips) with whirl coating, and this equipment specifically comprises:
Reaction chamber, temperature measuring equipment 1, nozzle 2, rotating disk 4, heating unit 5, refrigerating unit 6, atomisation unit 12, wheelwork 11, temperature regulating device 14 and air extractor 17 constitute;
The rotating disk 4 of stationary substrate 3 is arranged in the rotating shaft 10 of wheelwork 11, and rotating disk 4 tops are provided with nozzle 2 and temperature measuring equipment 1, and nozzle 2 and temperature measuring equipment 1 are corresponding with fixed substrate 3 on the rotating disk 4, and rotating disk 4, nozzle 2 and temperature measuring equipment 1 all are arranged in the reaction chamber; Be the below that wheelwork is arranged on reaction chamber, the bottom surface that reaction chamber is passed in the rotating shaft of wheelwork extend in the reaction chamber, and rotating disk is arranged on the rotating shaft top in the reaction chamber.
Described nozzle 2 is connected by the outer atomisation unit 12 of pipeline and reaction chamber; Temperature measuring equipment 1 is connected with temperature regulating device 14, and temperature measuring equipment 1 can adopt infrared temperature measurement device;
The reaction chamber of rotating disk 4 below correspondence positions is provided with heating unit 5, and heating unit 5 is connected with described temperature regulating device 14; Rotating shaft 10 between the body of described heating unit 5 and wheelwork 11 is provided with the refrigerating unit 6 of heat insulation usefulness;
Described reaction chamber is provided with the aspirating hole 18 that is connected with outside air extractor 17, and aspirating hole 18 can be arranged on the upper mounting plate 19 of reaction chamber, also can be arranged on the lower platform 15.The obnoxious flavour that produces in the preparation thin-film process in the reaction chamber can be extracted out by aspirating hole 18 and air extractor 17, avoid accidents caused (causing poisoning etc. in the air) as exploding, being dispersed into.
In aforesaid device, described reaction chamber concrete structure comprises as shown in Figure 2:
Described nozzle 2 and temperature measuring equipment 1 all are arranged on the upper mounting plate 19 on the silica tube reaction chamber, and be corresponding with the substrate on the rotating disk in the reaction chamber.
Described heating unit 5 is arranged on the lower platform 15 of reaction chamber, heating unit 5 is passed in the rotating shaft 10 of the outer wheelwork 11 that is provided with of the reaction chamber of lower platform 15 belows and lower platform 15 extend in the reaction chamber, the top of rotating shaft 10 is provided with rotating disk 4, heating unit 5 is corresponding with the bottom surface of rotating disk 4, heating unit 5 can play the 3 direct-fired effects of the substrate on the rotating disk 4, and heating unit fixedly installs the influence that not rotated by rotating disk 4, not only simple in structure, also increased security.
In the reality, refrigerating unit 6 in aforesaid device can adopt water cooling plant, see Fig. 3, water cooling plant is airtight body structure 25, be arranged in the described rotating shaft 10 by sealing bearing 23, and fixedly connected with wheelwork 11 bodies by mounting block 13, airtight body structure 25 is connected to form the heat insulation cooling back installation of cooling by water inlet pipe 22 and rising pipe 24 with cyclic water tank 9, this structure, when the rotating shaft of wheelwork is rotated, body structure 25 transfixions of water cooling plant, contact with vicarious by sealing bearing, recirculated water in the water tank can dissipate the heat in the rotating shaft, plays heat insulation, the effect of cooling.
The airtight body structure 25 of described water cooling plant can be ring structure, also can be other shape, as long as play the cavity that can storE recirculated cooling water, the heat of the rotating shaft 10 that will contact with this cavity through bearing by recirculated cooling water is taken away, but because of the concrete structure shape of water cooling plant the present invention is not construed as limiting.
Wheelwork can adopt electric motor, as adjustable-speed motor etc., can select speed range at 0～8000 rev/min adjustable-speed motor according to actual needs.
Described atomisation unit can adopt air compressor, air compression atomizing device or ultrasonic atomizer.
For guaranteeing in the dial rotation process, prevent from that substrate on the rotating disk from being got rid of to fly, be the webge slot of acute angle between the leg of rotating disk and bottom surface, can be used to block substrate.
Be accurate controlled temperature, need measure the temperature at substrate place, employing above corresponding substrate 3 places, be provided with the corresponding infrared temperature measurement device in edges of substrate position as temperature measuring equipment 1, record the temperature of edges of substrate by infrared temperature measurement device thermometric end, the temperature that further obtains the substrate place is (as can be according to the temperature difference that may exist between the substrate place's point that records temperature a little and seek out, calculate the substrate place's point temperature that seeks out), when the infrared temperature measurement device of She Zhiing can be avoided directly surveying on the substrate temperature like this, the film that forms because of substrate is to the influence of light and then influenced the flash ranging Wen Duan of infrared temperature measurement device, causes the inaccurate problem of temperature-measuring results.
During use, by being sprayed onto after the liquid material atomizing of atomisation unit and nozzle on the substrate on the rotating disk that is rotating with film, form film with whirl coating gradually with the form that spraying cooperates, heating unit is simultaneously to rotating disk and substrate heating, play the effect that the film on the substrate is added the heat abstraction solvent, at this moment the cycle operation by recirculated cooling water in the refrigerating unit is conducted heating unit to the heat of rotating shaft and is taken away, and then has guaranteed that wheelwork is not subjected to the influence of heating unit can works better.Can measure the temperature at substrate place by infrared temperature measurement device, and heating unit be controlled by temperature regulating device, and then the convenient temperature of controlling substrate place when preparing film.
Embodiment two
As shown in Figure 4, provide a kind of with the equipment for producing thin film with whirl coating atomizing thermal decomposition of air cooling equipment as refrigerating unit in the present embodiment, other structure of this equipment is identical with embodiment one described equipment.
The concrete structure of described air cooling equipment is seen Fig. 4, and air cooling equipment is provided with blast inlet 30, is connected by the air outlet of pipeline with blower fan 32.The rotating shaft of the wheelwork in this equipment is a hollow structure, rotating shaft is provided with a plurality of ventilation holes 31 that are connected with hollow structure, described air cooling equipment is a body structure, this body structure is arranged on by bearing on the hollow rotating shaft that has a plurality of ventilation holes 31, and this body structure is fixedlyed connected with the body of wheelwork 11 by mounting block 13.
Wherein, the body structure of above-mentioned refrigerating unit can be annular or other shape, as the logical out of date accommodation space of cooling air, the present invention is not construed as limiting.
In the present embodiment by air cooling equipment as refrigerating unit, when actual fabrication, not only be easier to realize, and can not occur using liquid as in the refrigerating unit of medium because of leaking the detrimentally affect that equipment is caused, increased the security of equipment.
In sum, the equipment for producing thin film with whirl coating atomizing thermal decomposition that provides in the embodiment of the invention, cooperate by wheelwork, atomisation unit and heating unit, realization is with whirl coating spraying pyrolysated mode preparation film easily and fast, and avoided heating unit to the influence that wheelwork causes by refrigerating unit, guaranteed safe, the efficient operation of equipment.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (10)
1, a kind of equipment for producing thin film with whirl coating atomizing thermal decomposition is characterized in that, this equipment comprises:
Reaction chamber, temperature measuring equipment (1), nozzle (2), rotating disk (4), heating unit (5), refrigerating unit (6), atomisation unit (12), wheelwork (11), temperature regulating device (14) and air extractor (17) constitute;
The rotating disk (4) of stationary substrate (3) is arranged in the rotating shaft (10) of wheelwork (11), rotating disk (4) top is provided with nozzle (2) and temperature measuring equipment (1), upward fixed substrate (3) is corresponding with rotating disk (4) for nozzle (2) and temperature measuring equipment (1), and rotating disk (4), nozzle (2) and temperature measuring equipment (1) all are arranged in the reaction chamber;
Described nozzle (2) is connected by the outer atomisation unit (12) of pipeline and reaction chamber; Temperature measuring equipment (1) is connected with temperature regulating device (14);
The reaction chamber of rotating disk (4) below is provided with heating unit (5), and heating unit (5) is connected with described temperature regulating device (14); Rotating shaft (10) between the body of described heating unit (5) and wheelwork (11) is provided with the refrigerating unit (6) of heat insulation usefulness;
Described reaction chamber is provided with the aspirating hole (18) that is connected with outside air extractor (17).
2, equipment according to claim 1 is characterized in that, described reaction chamber comprises:
Lower platform (15), leg (16) and upper mounting plate (19), leg (16) is arranged on the lower platform (15), it is last and corresponding with lower platform that upper mounting plate (19) is arranged on described leg (16), and upper mounting plate, lower platform (15) and leg (16) constitute reaction chamber jointly.
3, equipment according to claim 2 is characterized in that, described leg is a silica tube.
4, equipment according to claim 2 is characterized in that, described nozzle (2) all is arranged on the upper mounting plate (19) of reaction chamber with temperature measuring equipment (1).
5, equipment according to claim 2 is characterized in that, described heating unit (5) is arranged on the lower platform (15) of reaction chamber, and heating unit (5) is corresponding with the rotating disk (4) in the reaction chamber of lower platform (15) top.
6, equipment according to claim 2 is characterized in that, described aspirating hole (18) is arranged on the upper mounting plate (19) or lower platform (15) of reaction chamber.
7, equipment according to claim 1 is characterized in that, described refrigerating unit (6) is a water cooling plant, and water cooling plant is connected to form the heat insulation cooling back installation of cooling by water inlet pipe (22) and rising pipe (24) with cyclic water tank (9).
8, equipment according to claim 2, it is characterized in that, described water cooling plant is airtight body structure (25), and this body structure (25) is arranged in the described rotating shaft (10) by bearing (23), and fixedlys connected with the body of wheelwork (11) by mounting block (13).
9, equipment according to claim 1 is characterized in that, described refrigerating unit (6) is an air cooling equipment, and air cooling equipment is provided with blast inlet (31), is connected by the air outlet of pipeline with blower fan (32).
10, equipment according to claim 9, it is characterized in that, described air cooling equipment is a body structure, and this body structure is arranged on by bearing on the hollow rotating shaft that has a plurality of ventilation holes (30), and this body structure is fixedlyed connected with the body of wheelwork (11) by mounting block (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103044266A CN101245454A (en) | 2007-12-27 | 2007-12-27 | Equipment for producing thin film with whirl coating atomizing thermal decomposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103044266A CN101245454A (en) | 2007-12-27 | 2007-12-27 | Equipment for producing thin film with whirl coating atomizing thermal decomposition |
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| Publication Number | Publication Date |
|---|---|
| CN101245454A true CN101245454A (en) | 2008-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007103044266A Pending CN101245454A (en) | 2007-12-27 | 2007-12-27 | Equipment for producing thin film with whirl coating atomizing thermal decomposition |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104889010A (en) * | 2015-06-04 | 2015-09-09 | 大连顺诚自动化设备有限公司 | Glue coating device special for thin film bonding machine |
| CN105689209A (en) * | 2016-03-03 | 2016-06-22 | 江苏雷博科学仪器有限公司 | Spin coating device for heating and spin-coating |
-
2007
- 2007-12-27 CN CNA2007103044266A patent/CN101245454A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104889010A (en) * | 2015-06-04 | 2015-09-09 | 大连顺诚自动化设备有限公司 | Glue coating device special for thin film bonding machine |
| CN105689209A (en) * | 2016-03-03 | 2016-06-22 | 江苏雷博科学仪器有限公司 | Spin coating device for heating and spin-coating |
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Open date: 20080820 |