CN101242069A - Power feedback control system and solid laser for solid laser - Google Patents
Power feedback control system and solid laser for solid laser Download PDFInfo
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- CN101242069A CN101242069A CNA2007100732298A CN200710073229A CN101242069A CN 101242069 A CN101242069 A CN 101242069A CN A2007100732298 A CNA2007100732298 A CN A2007100732298A CN 200710073229 A CN200710073229 A CN 200710073229A CN 101242069 A CN101242069 A CN 101242069A
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Abstract
The present invention relates to a power feedback control system used for the solid laser and the solid laser thereof, and the power feedback control system comprises the following components: a current detecting unit which is used for detecting the holding current provided to the pump source by the ignition circuit to generate feedback current signal; a light detecting unit which is used for detecting the output light power of the solid laser and generate power feedback signal; a power PID adjusting unit which generates the current signal to be supplied basing on the comparison result between the power feedback signal and the prearranged power value; and a pulse width modulating control unit which controls the power supply unit basing on the feedback current signal and the comparison between the current signal to be supplied and the prearranged current value. By adopting the above structure the power and current feedbacks are respectively realized with the double closed-loop feedback system, the output energy of the power source unit is regulated real-time, the laser instability caused by the electric network fluctuation, water temperature variation and the aging of the pump source. Besides, the control network which is composed of the double close loop system is especially suitable for the state of the grade connection of a plurality of pump sources.
Description
[technical field]
The present invention relates to a kind of solid state laser power feedback control system, relate in particular to a kind of based on the power feedback control system of PWM control and the solid state laser that uses this power feedback control system.
[background technology]
In solid state laser in order to realize that accurate power controls tends to adopt feedback control loop.The Poewr control method that generally adopts in the prior art comprises that mainly current detecting feedback control method and power output detect feedback control method.Wherein, the current detecting feedback control method is provided with earth resistance by employing at low side and carries out current sample, again by the control of feedback control loop realization to power output, it is simple in structure, cost is low, yet but have some problems, will produce bigger drift during as current detecting, precision is lower etc.Power output detects feedback control method and directly detects power output, realizes closed power control by feedback control loop.Power output detects the general laser power reponse system that adopts based on the sampling of tail mirror of feedback control method, realizes the linear power adjusting thus, and improves the stability of laser power.
Present solid state laser often adopts electric current or power list closed-loop feedback control method, and it controls weak effect.In addition, in many pumping sources system, only can use a control signal to control a plurality of pumping sources, under the situation of, self-characteristic aging and environmental difference at pumping source, a control signal can't make the best operating point that reaches of all pumping sources, causes the unbalanced of laser various piece work.
[summary of the invention]
Adopt electric current or power list closed-loop feedback control method in order to solve the prior art solid state laser, the technical problem of control weak effect the present invention proposes a kind of power feedback control system of two closed loop feedback systems and solid state laser that uses this power feedback control system of adopting.
The present invention solves the prior art solid state laser and adopts electric current or power list closed-loop feedback control method, the technical scheme that technical problem adopted of control weak effect is: a kind of power feedback control system that is used for solid state laser is provided, and solid state laser comprises: pumping source; The power subsystem that pumping source is discharged; The ignite shot-firing circuit of pumping source and the gain media that excites by pumping source, wherein this power feedback control system comprises: be used to detect by what shot-firing circuit was supplied with pumping source and keep electric current to produce the current detecting unit of feedback current signal; The optical detecting unit that is used to detect the Output optical power of solid state laser and produces power feedback signal; Comparative result based on power feedback signal and default performance number produces the power P ID regulon of answering the supplying electric current signal; Control the pulse width modulation controlled unit of described power subsystem based on feedback current signal and the comparative result of answering supplying electric current signal and predetermined current value.
According to one preferred embodiment of the present invention, current detecting unit comprises Hall current sensor.
According to one preferred embodiment of the present invention, power subsystem comprises rectification/filtration module and IGBT power driver module, and the described IGBT power driver module of described pulse width modulation controlled unit controls discharges to described pumping source.
According to one preferred embodiment of the present invention, the pulse width modulation controlled unit comprises respectively the feedback current signal and answers supplying electric current signal and predetermined current value to carry out the PID adjustment module of computing.
According to one preferred embodiment of the present invention, pumping source is a krypton lamp, and gain media is the YAG crystal.
The present invention solves the prior art solid state laser and adopts electric current or power list closed-loop feedback control method, and another technical scheme that technical problem adopted of control weak effect is: a kind of solid state laser is provided, and solid state laser comprises: gain media; Excite a plurality of pumping sources of gain media; A plurality of power subsystems that a plurality of pumping sources are discharged respectively; And a plurality of power feedback control systems of respectively a plurality of power subsystems being controlled, wherein each power feedback control system comprises respectively: what be used to detect pumping source keeps electric current to produce the current detecting unit of feedback current signal; The optical detecting unit that is used to detect the Output optical power of solid state laser and produces power feedback signal; Comparative result based on power feedback signal and default performance number produces the power P ID regulon of answering the supplying electric current signal; Based on the pulse width modulation controlled unit of feedback current signal with the comparative result control power subsystem of answering supplying electric current signal and predetermined current value.
According to one preferred embodiment of the present invention, current detecting unit comprises Hall current sensor.
According to one preferred embodiment of the present invention, power subsystem comprises rectification/filtration module and IGBT power driver module, and pulse width modulation controlled unit controls IGBT power driver module discharges to pumping source.
According to one preferred embodiment of the present invention, the pulse width modulation controlled unit comprises respectively the feedback current signal and answers supplying electric current signal and predetermined current value to carry out the PID adjustment module of computing.
According to one preferred embodiment of the present invention, pumping source is a krypton lamp, and gain media is the YAG crystal.
By adopting said structure, utilize two closed loop feedback systems to realize power and current feedback respectively, the output energy of real-time regulated power supply unit has avoided power network fluctuation, water temperature to change and the aging caused laser shakiness of pumping source.In addition, the Control Network of being made up of this double loop system is specially adapted to the situation of many pumping sources cascade.
[description of drawings]
Fig. 1 is the schematic block diagram that adopts single pumping source solid state laser of power feedback control system of the present invention;
Fig. 2 is the schematic block diagram that adopts many pumping sources solid state laser of power feedback control system of the present invention.
[embodiment]
The present invention is described in detail below in conjunction with drawings and Examples.
Referring to Fig. 1, Fig. 1 is the schematic block diagram that adopts single pumping source solid state laser of power feedback control system of the present invention.In Fig. 1, solid state laser comprises: pumping source 11; The power subsystem 12 that pumping source 11 is discharged; The gain media 14 and the power feedback control system that ignite the shot-firing circuit 13 of pumping source 11, excite by pumping source 11.
Power feedback control system comprises: be used to detect by what shot-firing circuit 13 was supplied with pumping sources 11 and keep electric current to produce the current detecting unit 151 of feedback current signal Ic; Be used to the optical detecting unit 152 that detects the Output optical power of solid state laser and produce power feedback signal; Comparative result based on power feedback signal and default performance number produces power proportions-integration-differential (PID) regulon 153 of answering supplying electric current signal Ie; Based on the pulse width modulation controlled unit 154 of feedback current signal Ic with the comparative result control power subsystem 12 of answering supplying electric current signal Ie and predetermined current value Is.
In the present embodiment, the pumping source of solid state laser is a krypton lamp, and gain media is the YAG crystal.Current detecting unit 151 adopts Hall current sensor.Power subsystem 12 comprises rectification/filtration module and IGBT (igbt) power driver module, and the IGBT power driver module discharges to pumping source 11 under the control of PWM (pulse-width modulation) signal of pulse width modulation controlled unit 154 generations.
The IGBT power driver module begins discharge to pumping source 11 before, at first pumping source 11 is lighted, and kept the less electric current of keeping by shot-firing circuit 13.Current detecting unit 151 detects this and keeps electric current and produce feedback current signal Ic, and feedback current signal Ic sends into pulse width modulation controlled unit 154.
Pulse width modulation controlled unit 154 is cores of power feedback control system.In the present embodiment, pulse width modulation controlled unit 154 is mainly based on the UC3854 chip, the UC3854 chip is a kind of pwm chip with fixed frequency, it can be integrated with the current comparator that can carry out proportional-integral-differential (PID) computing by Rt and Ct pin outer meeting resistance and electric capacity formation RC circuit formation frequency of oscillation in it.With control system (for example, computer or single-chip microcomputer) deliver to the in-phase end of current comparator with the predetermined current value Is of D/A conversion regime output, feedback current signal Ic is delivered to the end of oppisite phase of current comparator, current comparator is exported both differences again by the triode output of UC3854 chip internal, has formed pwm control signal thus.Pwm control signal amplifies the I/O mouth that chip is transported to the IGBT power driver module of power subsystem 12 after amplifying by computing, realizes first feedback loop that laser current is fed back in real time thus, so that Laser Power Devices are realized closed-loop control.When the IGBT power driver module discharges, make it be excited to send laser on the strong illumination gain crystal 14 that pumping source 11 sends, laser vibrates in the vibration chamber of solid state laser and exports.152 pairs of laser output powers of optical detecting unit detect and compare by power P ID regulon 153 and predefined output power value, and what electric current specified rate that current time should supply with was represented in output answers supplying electric current signal Ie.Answer supplying electric current signal Ie to be input among the UC3854, and the predetermined current value Is that exports by the D/A conversion regime by current comparator and control system compares, thereby form new electric current difference and constitute new pwm signal, and by this new pwm signal to the control of discharging of IGBT power driver module, thus, second feedback loop that realization is fed back in real time to laser power so that in time adjust the output of laser energy, guarantees the stability of laser energy.
Fig. 2, Fig. 2 are the schematic block diagrams that adopts many pumping sources solid state laser of power feedback control system of the present invention.In this figure, solid state laser adopts a plurality of (being 2 in the present embodiment) pumping source, corresponding respectively power supply unit of each pumping source and power feedback control system.The described power feedback control system of each power feedback control system and Fig. 1 is roughly the same.Adopt two closed loop feedback networks, can reach and to make each pumping source arrive best operating point, and make the equilibrium of laser various piece work.
In the above-described embodiments, only the present invention has been carried out exemplary description, but those skilled in the art can design various execution modes according to different actual needs under the situation of the scope and spirit that do not break away from the present invention and protected.
Claims (10)
1. power feedback control system that is used for solid state laser, described solid state laser comprises: pumping source; The power subsystem that described pumping source is discharged; The ignite shot-firing circuit of described pumping source and the gain media that excites by described pumping source, it is characterized in that: described power feedback control system comprises:
Be used to detect by what described shot-firing circuit was supplied with described pumping source and keep electric current to produce the current detecting unit of feedback current signal;
The optical detecting unit that is used to detect the Output optical power of described solid state laser and produces power feedback signal;
Comparative result based on described power feedback signal and default performance number produces the power P ID regulon of answering the supplying electric current signal;
Control the pulse width modulation controlled unit of described power subsystem based on described feedback current signal and described comparative result of answering supplying electric current signal and predetermined current value.
2. power feedback control system as claimed in claim 1 is characterized in that: described current detecting unit comprises Hall current sensor.
3. power feedback control system as claimed in claim 1, it is characterized in that: described power subsystem comprises rectification/filtration module and IGBT power driver module, and the described IGBT power driver module of described pulse width modulation controlled unit controls discharges to described pumping source.
4. power feedback control system as claimed in claim 1 is characterized in that: described pulse width modulation controlled unit comprises respectively with described feedback current signal and described PID adjustment module of answering supplying electric current signal and described predetermined current value to carry out computing.
5. power feedback control system as claimed in claim 1 is characterized in that: described pumping source is a krypton lamp, and described gain media is the YAG crystal.
6. solid state laser, described solid state laser comprises: gain media; Excite a plurality of pumping sources of described gain media; A plurality of power subsystems that described a plurality of pumping sources are discharged respectively; And a plurality of power feedback control systems of respectively described a plurality of power subsystems being controlled, it is characterized in that: each described power feedback control system comprises respectively:
What be used to detect described pumping source keeps electric current to produce the current detecting unit of feedback current signal;
The optical detecting unit that is used to detect the Output optical power of described solid state laser and produces power feedback signal;
Comparative result based on described power feedback signal and default performance number produces the power P ID regulon of answering the supplying electric current signal;
Control the pulse width modulation controlled unit of described power subsystem based on described feedback current signal and described comparative result of answering supplying electric current signal and predetermined current value.
7. solid state laser as claimed in claim 6 is characterized in that: described current detecting unit comprises Hall current sensor.
8. solid state laser as claimed in claim 6 is characterized in that: described power subsystem comprises rectification/filtration module and IGBT power driver module, and the described IGBT power driver module of described pulse width modulation controlled unit controls discharges to described pumping source.
9. solid state laser as claimed in claim 6 is characterized in that: described pulse width modulation controlled unit comprises respectively with described feedback current signal and described PID adjustment module of answering supplying electric current signal and described predetermined current value to carry out computing.
10. solid state laser as claimed in claim 6 is characterized in that: described pumping source is a krypton lamp, and described gain media is the YAG crystal.
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CN102637012A (en) * | 2012-04-01 | 2012-08-15 | 深圳市联赢激光股份有限公司 | Double-path power negative feedback system for laser processing equipment |
CN103001122A (en) * | 2012-12-04 | 2013-03-27 | 上海贝岭股份有限公司 | Power control system of double-closed-loop laser tube |
CN103022895A (en) * | 2012-12-04 | 2013-04-03 | 上海贝岭股份有限公司 | Laser tube power control system |
CN104682179A (en) * | 2015-02-04 | 2015-06-03 | 昂纳信息技术(深圳)有限公司 | Laser driving method |
CN105356214A (en) * | 2015-12-16 | 2016-02-24 | 天津津芯微电子科技有限公司 | Laser energy control device and method |
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CN102637012A (en) * | 2012-04-01 | 2012-08-15 | 深圳市联赢激光股份有限公司 | Double-path power negative feedback system for laser processing equipment |
CN102637012B (en) * | 2012-04-01 | 2013-12-18 | 深圳市联赢激光股份有限公司 | Double-path power negative feedback system for laser processing equipment |
CN103001122A (en) * | 2012-12-04 | 2013-03-27 | 上海贝岭股份有限公司 | Power control system of double-closed-loop laser tube |
CN103022895A (en) * | 2012-12-04 | 2013-04-03 | 上海贝岭股份有限公司 | Laser tube power control system |
CN103022895B (en) * | 2012-12-04 | 2015-03-18 | 上海贝岭股份有限公司 | Laser tube power control system |
CN104682179A (en) * | 2015-02-04 | 2015-06-03 | 昂纳信息技术(深圳)有限公司 | Laser driving method |
CN105356214A (en) * | 2015-12-16 | 2016-02-24 | 天津津芯微电子科技有限公司 | Laser energy control device and method |
CN105356214B (en) * | 2015-12-16 | 2019-02-05 | 天津津芯微电子科技有限公司 | A kind of laser energy attenuation device and method |
CN110445547A (en) * | 2019-09-17 | 2019-11-12 | 成都芯瑞科技股份有限公司 | A kind of circuit using optical fiber transmission width adjustable pulse signal |
CN111542152A (en) * | 2020-05-22 | 2020-08-14 | 中国科学院半导体研究所 | Ultraviolet light source system with light intensity automatic feedback correction function and application thereof |
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Address after: 518000 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: No. 5 road 518057 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8 Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |
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