CN101235849B - Air bearing and its machining process - Google Patents

Air bearing and its machining process Download PDF

Info

Publication number
CN101235849B
CN101235849B CN2007100173227A CN200710017322A CN101235849B CN 101235849 B CN101235849 B CN 101235849B CN 2007100173227 A CN2007100173227 A CN 2007100173227A CN 200710017322 A CN200710017322 A CN 200710017322A CN 101235849 B CN101235849 B CN 101235849B
Authority
CN
China
Prior art keywords
air cavity
working surface
end seat
concave spherical
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2007100173227A
Other languages
Chinese (zh)
Other versions
CN101235849A (en
Inventor
徐少臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XI'AN HIGH-TECH AEH INDUSTRIAL METROLOGY Co Ltd
Original Assignee
XI'AN HIGH-TECH AEH INDUSTRIAL METROLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XI'AN HIGH-TECH AEH INDUSTRIAL METROLOGY Co Ltd filed Critical XI'AN HIGH-TECH AEH INDUSTRIAL METROLOGY Co Ltd
Priority to CN2007100173227A priority Critical patent/CN101235849B/en
Publication of CN101235849A publication Critical patent/CN101235849A/en
Application granted granted Critical
Publication of CN101235849B publication Critical patent/CN101235849B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention relates to the technical field of mechanical transmission and guidance, in particular to an air bearing and a processing technology. The invention overcomes the problems existing in the prior art that an orifice is easy to block and has high demands for compressed air, the motive force is not steady, and the treatment process is complex. The technical solution is that the air bearing comprises a slide body, wherein an air cavity is arranged in the slide body, the air cavity is communicated with an air inlet of the slide body, and the orifice which is communicated with the air cavity is arranged on a working surface of the slide body. The air bearing is characterized in that the working surface is a concave spherical, and the outer edge of the concave spherical is a ring plane. The processing technology orderly comprises the following steps: V1ing, aeration: the working surface slightly plumps up under aeration status; V2ing, grinding: the plumped surface is flatted through a plane grinding process; V3ing, production: air supply is closed, the outer wall of the working surface is recovered to an original state, and a grinding surface sinks to form a concave spherical.

Description

A kind of pneumatic bearing and processing technology thereof
Technical field:
The present invention relates to mechanical transmission and guiding field, be specifically related to a kind of pneumatic bearing and processing technology thereof.
Background technique:
Pneumatic bearing (claiming air supporting again) is widely used in mechanical transmission and guiding technique field.Pneumatic bearing includes a slide block body; In the slide block body, be provided with air cavity, this air cavity is communicated with suction port on the slide block body, and a very high working surface of degree of finish through processing is arranged on the slide block body; Mostly working surface is plane structure; On working surface, be provided with throttle orifice, the throttle orifice diameter is less, and air is through the ejection of throttle orifice high pressure.Air-bearing is in start-up course, and when the air pressure in the balancing slit reached certain value, the slide block body floated, and therefore has advantages such as friction factor is little, kinematic accuracy is high, wearing and tearing are little.But existing technology also exists deficiency, 1, that the sector generally believes that throttle orifice Da Yi produces gas loss is big, and rigidity is poor; Therefore throttle orifice is all very little in the existing structure; Be approximately about 0.1~0.3mm, therefore be prone to stop up, so just have relatively high expectations compressed-air actuated; 2, its working surface is the plane, and when contacting with slideway, fitting each other in two very high planes of degree of finish, is prone to be in the vacuum engagement state, is prone to during work produce the phenomenon of can not floating because of the starting force instability; 3, in order to solve the little problem of starting force, also have the balancing slit structure is set around the throttle orifice, but the complex treatment process of balancing slit increases cost, and is prone to make air supporting to vibrate, effect is undesirable.
Summary of the invention:
The present invention provides a kind of pneumatic bearing and processing technology thereof, be prone to stop up to overcome throttle orifice that existing technology exists, to pressurized air have relatively high expectations, the problem of starting force instability and complex treatment process.
For achieving the above object; The technological scheme that the present invention adopts is: a kind of pneumatic bearing, comprise the slide block body, and be provided with air cavity in the slide block body; This air cavity is communicated with suction port on the slide block body; The working surface of slide block body is provided with the throttle orifice that is communicated with air cavity, it is characterized in that: said working surface is a concave spherical surface, and the outer edge of concave spherical surface is a ring plain.
Air cavity top in the above-mentioned end seat is the plane, and the wall thickness of its ring plain to the working surface is about 2~4mm.
Above-mentioned slide block body comprises pedestal and is connected the end seat two-part on this pedestal, and air cavity is arranged between the two, and working surface is arranged on the end seat.
Said base is the round boss shape, and air cavity is arranged at end seat one side, and the end seat cooperates with pedestal is nested.
The longitudinal section of above-mentioned air cavity is stepped, and end seat one side diameter is big.
A kind of processing technology of pneumatic bearing comprises the steps successively,
1. inflation: under aeration status, the little drum of working surface;
2. grind: use plane lapping technology will heave face and grind flat;
3. finished product: close source of the gas, the outer wall of working surface restores to the original state, and abradant surface sink and forms concave spherical surface.
The 1. middle gas pressure of above-mentioned steps is about 0.3~0.5MPa.
Compared with prior art, advantage of the present invention is:
1, throttle orifice can be accomplished and stop the pore blocking phenomenon basically about 0.6~1mm, and pressurized air is required to reduce;
2, owing to have only concave spherical surface ring plain on every side to contact with slideway generation small size on the working surface, pressurized air very easily is full of recessed core air cavity simultaneously, so starting force is big and stable, has guaranteed the stability of work;
3, the concave spherical surface abrasive process of being developed, technological method is simple, is prone to grasp.
Description of drawings:
Fig. 1 is embodiment 1 a structural representation;
Fig. 2 is embodiment 2 a structural representation;
Fig. 3 is that the A of Fig. 1 and Fig. 2 is to view;
Fig. 4 is a process flow diagram.
Description of reference numerals is following:
1-ring plain, 2-concave spherical surface, 3-pedestal, 4-are held seat, 5-air cavity, 6-suction port, 7-throttle orifice.
Embodiment
To combine accompanying drawing and embodiment that the utility model is done detailed explanation below.
Embodiment 1, referring to Fig. 1 and Fig. 3.A kind of pneumatic bearing comprises the slide block body, and said slide block body comprises pedestal 3 and be connected end seat 4 two-part on this pedestal 3 that air cavity 5 is arranged between pedestal 3 and the end seat 4, is communicated with suction port 6.Working surface on the said end seat 4 is a concave spherical surface 2, and the outer edge of concave spherical surface 2 is a ring plain 1, and the center portion of concave spherical surface 2 is provided with the throttle orifice 7 that is communicated with air cavity 5.Said air cavity 5 tops are the plane, and the wall thickness of its ring plain 1 to the working surface is about 4mm.
Embodiment 2, referring to Fig. 2 and Fig. 3.A kind of pneumatic bearing comprises the slide block body, and said slide block body comprises round boss shape pedestal 3 and nested end seat 4 two-part that are connected on this pedestal 3; Air cavity 5 is arranged at end seat 4 one sides; Be communicated with suction port 6, the longitudinal section of air cavity 5 is stepped, and end seat 4 one side diameters are big.Working surface on the said end seat 4 is a concave spherical surface 2, and the outer edge of concave spherical surface 2 is a ring plain 1, and the center portion of concave spherical surface 2 is provided with the throttle orifice 7 that is communicated with air cavity 5.Said air cavity 5 tops are the plane, and the wall thickness of its ring plain 1 to the working surface is about 3mm.
Referring to Fig. 4, a kind of processing technology of air bearing slider comprises the steps: successively
1. inflation: under ventilation (gas pressure is about 0.4MPa) state, the little drum of working surface;
2. grind: use plane lapping technology will heave face and grind flat;
3. finished product: close source of the gas, the outer wall of working surface restores to the original state, and abradant surface sink and forms concave spherical surface 2.

Claims (5)

1. pneumatic bearing; Comprise the slide block body; Be provided with air cavity (5) in the slide block body, this air cavity (5) is communicated with suction port (6) on the slide block body, and the working surface of slide block body is provided with the throttle orifice (7) that is communicated with air cavity (5); It is characterized in that: described slide block body also comprises pedestal (3) and is connected the end seat (4) on this pedestal (3); Said air cavity (5) is arranged between pedestal (3) and the end seat (4), and air cavity (5) top in the said end seat (4) is the plane, and the wall thickness of its ring plain (1) to the working surface is 2~4mm; Said working surface is arranged on the end seat (4), and working surface is concave spherical surface (2), and the outer edge of concave spherical surface (2) is ring plain (1).
2. a kind of pneumatic bearing as claimed in claim 1 is characterized in that: said pedestal (3) is the round boss shape, and air cavity (5) is arranged at end seat (4) one sides, end seat (4) and nested cooperation of pedestal (3).
3. a kind of pneumatic bearing as claimed in claim 2 is characterized in that: the longitudinal section of said air cavity (5) is stepped, and the diameter of the said air cavity (5) of end seat (4) one sides is big.
4. the processing technology of a kind of pneumatic bearing as claimed in claim 1 is characterized in that: comprises the steps successively,
1. inflation: under aeration status, the little drum of working surface;
2. grind: use plane lapping technology will heave face and grind flat;
3. finished product: close source of the gas, the outer wall of working surface restores to the original state, and abradant surface sink and forms concave spherical surface (2).
5. the processing technology of a kind of pneumatic bearing as claimed in claim 4 is characterized in that: said step 1. in gas pressure be 0.3~0.5MPa.
CN2007100173227A 2007-01-30 2007-01-30 Air bearing and its machining process Active CN101235849B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2007100173227A CN101235849B (en) 2007-01-30 2007-01-30 Air bearing and its machining process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2007100173227A CN101235849B (en) 2007-01-30 2007-01-30 Air bearing and its machining process

Publications (2)

Publication Number Publication Date
CN101235849A CN101235849A (en) 2008-08-06
CN101235849B true CN101235849B (en) 2012-07-18

Family

ID=39919688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007100173227A Active CN101235849B (en) 2007-01-30 2007-01-30 Air bearing and its machining process

Country Status (1)

Country Link
CN (1) CN101235849B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2834615C (en) * 2013-08-28 2020-04-28 Gedex Inc. Single axis rotational gas bearing with feed-through
CN106286595A (en) * 2015-05-26 2017-01-04 大银微***股份有限公司 Air bearing improvement structure
CN106271935B (en) * 2015-06-26 2019-08-13 北京航天计量测试技术研究所 A kind of polishing method of air bearing Thrust Faces and axis of rotation verticality
CN112096739B (en) * 2020-08-05 2021-12-21 佛山市华道超精科技有限公司 Air-floatation guide rail type switchable rigid-flexible coupling motion platform

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2842057Y (en) * 2005-09-30 2006-11-29 西安工业学院 High rigidity gas hydrostatic bearing
CN200999795Y (en) * 2007-01-30 2008-01-02 西安爱德华测量设备有限公司 Air bearing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2842057Y (en) * 2005-09-30 2006-11-29 西安工业学院 High rigidity gas hydrostatic bearing
CN200999795Y (en) * 2007-01-30 2008-01-02 西安爱德华测量设备有限公司 Air bearing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平9-320028A 1997.12.12

Also Published As

Publication number Publication date
CN101235849A (en) 2008-08-06

Similar Documents

Publication Publication Date Title
CN101235849B (en) Air bearing and its machining process
CN108890504B (en) Flexible pneumatic polishing head for processing complex parts
CN203317205U (en) Valve body sealing surface grinding tool of flat gate valve
CN110000416A (en) A kind of the power position control milling machine tool working and its control method of radial vibration auxiliary
CN105773081B (en) A kind of integral processing method of asymmetric anchor lip
CN115383560A (en) Polishing grinding head, polishing equipment and polishing method of aspheric surface mold of optical lens
CN200999795Y (en) Air bearing
CN102152193B (en) Method for grinding superhard mini-hemispheric coupling parts
CN102642174A (en) Systems and methods providing an air zone for a chucking stage
CN2721313Y (en) Flexible polisher of non-spherical optical component
CN201483062U (en) Movable scroll milling and clamping device of compressor
CN201760821U (en) Polishing sheet mounted on wood sanding machine
CN205111464U (en) Processing equipment of thick sapphire hemisphere of congruent , super hemisphere radome fairing
CN102825510A (en) Method for machining long shaft with round cross section
CN207239977U (en) A kind of thin slice heavy caliber DKDP polishing crystal fixtures
CN208019993U (en) A kind of grinding device of thin-walled parts
CN102536748B (en) York cylinder sleeve and processing method thereof
CN105234846A (en) Split type grinding wheel
CN201023212Y (en) Chemical machinery polishing grinding head
CN104723216A (en) Disc type arc air bag polishing head
CN2813256Y (en) Carbon fiber model airplane propeller blade forming mould
CN215847578U (en) Constant-pressure grinding device for inner cavity of mold
CN209478011U (en) A kind of spherical lens polishing paper slicing device
CN2352308Y (en) Vacuum self-exciting grinding and polishing device used for optical processing
CN210909350U (en) Strip-shaped flat steel polishing equipment

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant