CN101209505B - Method for preparing metal binding agent diamond scroll saw - Google Patents
Method for preparing metal binding agent diamond scroll saw Download PDFInfo
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- CN101209505B CN101209505B CN2006101554791A CN200610155479A CN101209505B CN 101209505 B CN101209505 B CN 101209505B CN 2006101554791 A CN2006101554791 A CN 2006101554791A CN 200610155479 A CN200610155479 A CN 200610155479A CN 101209505 B CN101209505 B CN 101209505B
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- steel wire
- metal
- diamond
- scroll saw
- binding agent
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Abstract
The invention provides a preparation method and the product of a metal binder diamond wire saw, comprising the preparation steps of (1) steel wire surface, (2) plating auxiliary disposal of the steel wire, (3) burdening, (4) plating of steel wire and (5) post-processing. The thickness of the binder coating ranges from 1/2 to 2/3 of the grain diameter of the diamond. By a series of chemical and diffusion reaction, the surface of the steel wire is covered by a layer of uniform and firm coating 3; a diamond mill grain 2 is also uniformly held in a metal binding layer 1, thus achieving the cutting object.
Description
One, technical field
The present invention relates to a kind of preparation method of diamond fretsaw.
Two, background technology
Traditional cutting semiconductor materials adopts diamond inside and outside circle cutting technique always, but, development along with semicon industry, the particularly increase gradually of silicon wafer piece diameter, because output, productivity ratio, the influence of various factors such as size, diamond fretsaw will be widely used in the cutting processing of semi-conducting materials such as hard brittle material such as monocrystalline silicon, polysilicon, GaAs, lithium tantalate, lithium niobate and semiconductor element.
What the diamond wire sawing machine of main flow adopted at present is the diamond wire cutting technique of free abrasive, promptly when cutting, steel wire is wire longitudinally, compress mutually with workpiece simultaneously, when the slurries that contain diamond abrasive grain are injected between workpiece and the steel wire, the grinding fluid that the rapid movement of steel wire will contain diamond abrasive grain is brought in the workpiece joint-cutting, thereby workpiece material is produced dissection.Owing to adopted free abrasive, exist that cutting efficiency is low, operating environment abominable and the problems such as processing of waste pulp.
At these problems, be called as the fixed grain diamond fretsaw in recent years and progressively began to enter commercial Application, be that incisory saw silk surface has been consolidated with diamond abrasive grain, fixed grain has substituted original free abrasive in the cutting process, makes cutting efficiency improve greatly.This saw silk that is consolidated with diamond abrasive grain adopts electroplating technology and the manufacturing of resin solidification technology to form usually at present, and the former bond is metallic bonds such as copper, nickel.But, because the employing of this saw silk is electroplate technology, exist several fatal weakness: the firstth, the plating production process of saw silk exists the liquid waste processing problem; The secondth, the production efficiency problem of saw silk since electrodeposited coating need form certain thickness just might abrasive particle is fixed, be subjected to the restriction of electroplating deposition speed, make that production efficiency and production cost are higher.What latter's main flow adopted is the heat reactive resin bond, but adopts the scroll saw manufacturing speed can only bring up to about the tens of rice of per minute, uses the scroll saw cost too high.In addition, resin bonder wire saw all adopts thermosetting resin usually, and the heat-agglomerating operation of saw silk when resin solidification also can take place blue crisp, and the transverse strength that causes rupturing obviously descends.Simultaneously, the wearability of saw cut by the resinoid bond line and hear resistance is all poor than electroplating scroll saw, extremely difficult application the in the multiple tracks cutting of the high heavy caliber silicon ingot of the hard material of crystal and so on or processing stand temperature.
Three, summary of the invention
Environmental pollution, the production efficiency that will solve existing fixed grain diamond fretsaw manufacture method of the present invention is low, cost is high, product strength is low, the deficiency of wearability and poor heat resistance, the method that a kind of not only environmental protection is provided but also produces diamond fretsaw efficiently, cheaply, product has good wearability, bond strength again simultaneously.
The preparation method of a kind of metal binding agent diamond scroll saw of the present invention comprises being prepared as follows step:
(1) surface treatment of steel wire: first alkali cleaning after washing, pickling after washing again
(2) plating that helps of steel wire is handled: with steel wire immersion plating in the aqueous solution of zinc chloride and ammonium chloride mixt, make on its surface coverage and apply fluxing agent;
(3) batching: abrasive particle is put in the liquation of low-melting alloy, stirred, abrasive particle is soaked into by the carcass metal;
(4) steel wire plating: will enter after steel wire tensioning, the preheating in the metal worn particle mixed liquor, Steel Wire Surface has plated the metal level that one deck is mixed with abrasive particle.
(5) post processing: before metal level also solidifies fully, scrape off the impurity on surface, obtained uniform bond coating, cooling is solidified metal level fully again, at last scroll saw on take-up pulley.
Preferred way is before step (3) batching, earlier at abrasive particle coating surface metal such as nickel or copper etc.
Preferred way be bond coating thickness the diamond particle diameter 1/2nd and 2/3rds between.
Preferred way is a wear particle concentration 25%～100% in the above-mentioned scroll saw coating.
According to the metal binding agent diamond scroll saw that the inventive method is made, bonding agent layer is a metal, the thickness of bond coating the diamond particle diameter 1/2nd and 2/3rds between.
What the present invention developed is the diamond fretsaw production technology of bond with the metal, steel wire through pre-treatment, make it by being mixed with the molten metal bond of diamond abrasive grain, make Steel Wire Surface cover evenly firm coating of one deck by a series of chemistry, diffusion reaction, diamond abrasive grain is also by equably being held in the metal bonding coating, to reach the purpose of cutting.
The used steel wire of the present invention is a piano wire, and its diameter can be 0.05～2.5mm.
Surperficial fixed particle diameter at above-mentioned steel wire is the diamond particles of 10～150 μ m.
Wear particle concentration 25%～100% in the above-mentioned scroll saw coating, in grinding, the contained abrasive material of the definition every cubic centimeter volume of grinding layer is that 0.878g is defined as 100% concentration.
Advantage of the present invention is: this technology has been gathered the advantage of electroplating technology and resin solidification technology, has promptly improved manufacturing speed, has strengthened the binding ability of bond and steel wire again greatly because of the generation that alloy-layer is arranged in the immersion plating process.Be far superior to the existing plating technology at aspects such as production efficiency, costs, be better than existing resin solidification technology at aspects such as wearability, bond strengths again, application prospect is very widely arranged.
Description of drawings
Fig. 1 is the cross section structure figure of metallic bond scroll saw of the present invention.
Fig. 2 is the automatic manufacturing device schematic diagram of metallic bond scroll saw of the present invention.
The specific embodiment
Embodiment one
Present embodiment is the manufacture method about the scroll saw that is used for cutting semiconductor material (as silicon and carborundum, GaAs, bismuth telluride), photoelectron material, piezo-electric crystal, magnetic material etc.
With reference to accompanying drawing 1: a kind of preparation method of metallic bond scroll saw, this method may further comprise the steps:
(1), the surface treatment of metal saw silk: metal saw silk size: diameter 0.2mm, length: 100m; At first clean about 5min in the alkaline solution of autogamy, the back water that finishes is rinsed well.In the acid solution of autogamy, clean about 5min then, again with the clear water flushing, remove residual acid solution after the pickling.
(2), help plating to handle: the NH of steel wire in autogamy
4Cl, ZnCl
2, the immersion plating of KCl mixed liquor, and wash by rubbing with the hands with mechanical force, its surface is coated with equably is covered with fluxing agent and oven dry.
(3), batching, be that the diamond 36.93g of 10-40 μ m is heated to fusing in crucible with the commercially available kirsite of 113.07g, grit size specification, and above-mentioned material stirred that wear particle concentration is 50% with stirring rod;
(4), on the automatic producing device of metallic bond scroll saw, produce scroll saw.
It is as follows to manufacture saw process on homemade scroll saw production equipment:
With reference to Figure of description 2: through the individual wire 4 that helps plating to handle; be placed on the actinobacillus wheel 1; damping unit 2 on the actinobacillus wheel makes steel wire increase certain tensile force; steel wire is by guide wheel 3; enter and carry out The pre-heat treatment in the holding furnace 5; immerse in the metal worn particle mixed liquor 6; Steel Wire Surface has just plated the metal level that one deck is mixed with abrasive particle; because the immersion plating time is shorter, metal level does not also solidify fully, scrapes off the impurity on surface by doctor blade device 7; just obtained uniform coating; enter after the cooling device 8, metal level solidifies fully, at last by guide wheel scroll saw on take-up pulley 9.
The used metal of the present invention is low-melting alloy such as zinc, tin etc., and Yin Wendu surpasses 800 ℃, and carbonization will take place diamond.What the present invention adopted is kirsite, in order to satisfy various performances, in molten metal, add and comprise alloying elements such as aluminium, tin, tellurium, silicon, nickel, to increase the flowability of mixed liquor, reduce surface tension and the change that improves wetability and crystal habit, help forming in conjunction with good interface.
Because diamond is nonmetal, and very high interface energy is arranged between common metal or alloy, cause diamond surface not soaked into by low-melting-point metal or alloy, do not exist firm metallurgical chemistry to combine on the interface of coated metal and steel wire and diamond abrasive, abrasive material in fact just is embedded in the coated metal by mechanical embedding, thereby hold is little, and adhesive property is relatively poor.In the heavier high efficient grinding operation of load, scroll saw comes off because of abrasive particle easily or the coating flaking causes global failure.Therefore adopt the diamond abrasive grain of handling in the present invention, be exactly by physics or some metal of chemical method plating such as nickel, copper etc. at diamond surface, just can be soaked into by the carcass metal well by the mechanical mixing method diamond, can strengthen the cohesive force between diamond and the carcass metal greatly.
Coating should not be too thick; the blocked up meeting of coating is embedded in the metallic bond diamond abrasive grain fully, does not just reach the purpose of cutting, and the too thin diamond abrasive grain of coating can not be controlled by metallic bond again well; in working angles, a large amount of coming off can appear in diamond abrasive grain.Therefore the thickness of bond to be controlled at the diamond particle diameter 1/2nd and 2/3rds between.
After the surface treatment, obtain surperficial high-quality steel wire to improve the fastness of metal caking property and abrasive particle particle.
Alkali cleaning (degreasing), pickling are mainly used in removes surperficial greasy dirt, oxide skin etc., belongs to the preliminary treatment of steel wire, can be with acid, the alkali lye flush away on surface by washing.
Alkaline solution comprises NaOH, Na
2CO
3, Na
3PO
4, Na
2SiO
3Solution.In order to accelerate degreasing speed and to strengthen degreasing effect, temperature is 80～90 ℃, with the greasy dirt that guarantees to remove fully Steel Wire Surface, lubricating layer etc.In cleaning process, to constantly stir, can quicken skimming processes, can take away oil droplet from the metal surface better because stir.
Acid solution comprises H
2SO
4, HCl and H
2O forms, because the chemical reaction of acid solution and oxide skin, can the place to go stays the oxide skin of Steel Wire Surface.
Coating helps plating to handle:
The dip-coating coating agent can protect the clean Steel Wire Surface after alkali cleaning and the pickling no longer oxidized, improves the immersional wetting of metal mixed liquid to steel wire.It is one vital operation in the metal coating liquid that coating is handled, and this is the surface-treated core, the oxide-film that the oxidized formation of Steel Wire Surface is loose.This film has the characteristics that stop molten metal to contact with the wetability of steel wire.
The coating fluxing agent all covers and wetting steel wire could guarantee to apply molten metal and its reaction when soaking into.Add non-ionic surface active agent and can reduce the surface tension that applies fluxing agent solution, increase its spreading wetting ability on workpiece, guarantee the coating of turning and rejected region.In addition, when residual when oil stain and oxide skin are arranged on the steel wire, the lipophilic group of surfactant is adsorbed on the oil stain, and hydrophilic group stretches in the solvent, makes oil stain by wetting the becoming of steel wire nonwettingly finally is removed.The coating fluxing agent then is covered on the surface of former oil stain covering, oxide skin can be low than the surface of steel wire, fluxing agent is difficult for wetting, and the nonpolar group in surfactant is towards low-energy surface, polar group makes low-energy surface become high energy surface outwardly, make the coating fluxing agent be easy to wetting oxide skin, hydrochloric acid wherein can be removed it quickly.
Fluxing agent is the aqueous solution of zinc chloride and ammonium chloride mixt.
Acting as of fluxing agent:
1) Steel Wire Surface is played the effect of cleaning, remove the molysite or the oxide that remain in Steel Wire Surface after pickling is cleaned, make steel wire when entering mixed liquor, have maximum surface-active.
2) at Steel Wire Surface deposition last layer salt film, can prevent steel wire from quickening liquid to entering corrosion the inherent air of zinc pot this section period.
3) steel wire that purifies immerses in the mixed liquor, makes steel wire and mixed liquor quicken to soak into and reaction.
4) activation of the zinc chloride ammonium salt film of Steel Wire Surface covering.
The preparation method of metallic bond scroll saw of the present invention has following advantage:
1, use the bond of low-melting-point metal as scroll saw, improve scroll saw grinding layer mechanical performance and and steel wire between bond strength; 2, improved production efficiency greatly; Thereby 3 have reduced manufacturing cost;
Present embodiment is introduced a kind of metallic bond scroll saw that is used for cutting semiconductor material (as silicon and carborundum, GaAs, bismuth telluride), photoelectron material, piezo-electric crystal, magnetic material.
With reference to Fig. 1, its preparation method may further comprise the steps:
(1), the surface treatment of metal saw silk: metal saw silk size: diameter 0.2mm, length: 100m; At first clean about 5min in the alkaline solution of autogamy, the back water that finishes is rinsed well.In the acid solution of autogamy, clean about 5min then, again with the clear water flushing, remove residual acid solution after the pickling.
(2), help plating to handle: the NH of steel wire in autogamy
4Cl, ZnCl
2, the immersion plating of KCl mixed liquor, and wash by rubbing with the hands with mechanical force, its surface is coated with equably is covered with fluxing agent and oven dry.
(3), batching, be that the diamond 51.86g of 10-40 μ m is heated to fusing in crucible with the commercially available kirsite of 98.14g, grit size specification, and above-mentioned material stirred that wear particle concentration is 75% with stirring rod;
(4), on the automatic producing device of metallic bond scroll saw, produce scroll saw.
It is as follows to manufacture saw process on homemade scroll saw production equipment:
With reference to Figure of description 2: through the individual wire 4 that helps plating to handle; be placed on the actinobacillus wheel 1; damping unit 2 on the actinobacillus wheel makes steel wire increase certain tensile force; steel wire is by guide wheel 3; enter and carry out The pre-heat treatment in the holding furnace 5; immerse in the metal worn particle mixed liquor 6; Steel Wire Surface has just plated the metal level that one deck is mixed with abrasive particle; because the immersion plating time is shorter, metal level does not also solidify fully, scrapes off the impurity on surface by doctor blade device 7; just obtained uniform coating; enter after the cooling device 8, metal level solidifies fully, at last by guide wheel scroll saw on take-up pulley 9.
All the other are identical with embodiment one.
Embodiment 3
The characteristics of this enforcement are that wear particle concentration is 25% in preparation process (3) condiment, and all the other are identical with embodiment one.
Embodiment 4
The characteristics of this enforcement are that wear particle concentration is 100% in preparation process (3) condiment, and all the other are identical with embodiment two.
Claims (4)
1. the preparation method of a metal binding agent diamond scroll saw comprises being prepared as follows step:
(1) surface treatment of steel wire: first alkali cleaning after washing, pickling after washing again;
(2) plating that helps of steel wire is handled: with steel wire immersion plating in the aqueous solution of zinc chloride and ammonium chloride mixt, make on its surface coverage and apply fluxing agent;
(3) batching: abrasive particle is put in the liquation of low-melting metal, stirred, abrasive particle is soaked into by metal;
(4) steel wire plating: will enter after steel wire tensioning, the preheating in the metal worn particle mixed liquor, Steel Wire Surface has plated the metal level that one deck is mixed with abrasive particle;
(5) post processing: before metal level also solidifies fully, scrape off the impurity on surface, obtained uniform bond coating, cooling is solidified metal level fully again, at last scroll saw on take-up pulley.
2. the preparation method of a kind of metal binding agent diamond scroll saw as claimed in claim 1 is characterized in that before step (3) batching, earlier at abrasive particle coating surface metal.
3. the preparation method of a kind of metal binding agent diamond scroll saw as claimed in claim 1, the thickness that it is characterized in that bond coating the diamond particle diameter 1/2nd and 2/3rds between.
4. the preparation method of a kind of metal binding agent diamond scroll saw as claimed in claim 2, the thickness that it is characterized in that bond coating the diamond particle diameter 1/2nd and 2/3rds between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2006101554791A CN101209505B (en) | 2006-12-26 | 2006-12-26 | Method for preparing metal binding agent diamond scroll saw |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2006101554791A CN101209505B (en) | 2006-12-26 | 2006-12-26 | Method for preparing metal binding agent diamond scroll saw |
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| CN101209505A CN101209505A (en) | 2008-07-02 |
| CN101209505B true CN101209505B (en) | 2010-09-15 |
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| CN2006101554791A Expired - Fee Related CN101209505B (en) | 2006-12-26 | 2006-12-26 | Method for preparing metal binding agent diamond scroll saw |
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| CN101531035B (en) * | 2009-04-21 | 2014-04-16 | 青岛科技大学 | A method for manufacturing electroplating diamond wire saw |
| CN101745878B (en) * | 2009-12-25 | 2012-07-04 | 南京三超金刚石工具有限公司 | Diamond wire saw and manufacturing method thereof and special equipment |
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| CN106273007B (en) * | 2015-05-22 | 2017-11-03 | 江苏益林金刚石工具有限公司 | A kind of preparation method of combined binder diamond fretsaw |
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| CN108953716A (en) * | 2018-07-06 | 2018-12-07 | 上海市特种设备监督检验技术研究院 | A kind of preparation method of easy fusing alloy plug |
| CN109203264B (en) * | 2018-09-18 | 2021-04-06 | 苏州宇邦新型材料股份有限公司 | Dip-soldering diamond wire and manufacturing method thereof |
| CN109352544B (en) * | 2018-12-07 | 2020-08-14 | 成都惠锋智造科技有限公司 | Diamond wire saw and preparation method thereof |
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| CN111020572B (en) * | 2019-10-31 | 2020-09-25 | 山东大学 | Electric spark deposition diamond wire saw wire production device |
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Assignee: Changsha DIAT New Material Sci. & Tech. Co., Ltd. Assignor: Zhejiang University of Technology Contract record no.: 2011430000087 Denomination of invention: Method for preparing metal binding agent diamond scroll saw Granted publication date: 20100915 License type: Exclusive License Open date: 20080702 Record date: 20110623 |
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