CN101207343B - Driving apparatus and image pickup apparatus - Google Patents

Driving apparatus and image pickup apparatus Download PDF

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Publication number
CN101207343B
CN101207343B CN2007101957689A CN200710195768A CN101207343B CN 101207343 B CN101207343 B CN 101207343B CN 2007101957689 A CN2007101957689 A CN 2007101957689A CN 200710195768 A CN200710195768 A CN 200710195768A CN 101207343 B CN101207343 B CN 101207343B
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China
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oscillator
move
moving
moves
drive division
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CN101207343A (en
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川合澄夫
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Olympus Corp
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Olympus Imaging Corp
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The present invention provides a driving apparatus and an image pickup apparatus, the driving apparatus has miniature drive force and high efficiency. An X-axis transducer (320x) generating elliptical vibration is used as driving source, alternatively on side of a mobile body (311x), according to separation construction of X frame (301) forming desired size as mobile object and a sliding body (330x) small than the X frame (301), both of them are fixed and integrated, by a slicing plate (332x) and a bearing (331x) on the small sliding body (330x), driving force transmission function and mobile direction guide function are collected, a large X frame (301) and a sliding body (330x) are integrated to only carry out follow movement, thus high efficiency of driving force transmission can be carried out only by forming rigidity on the sliding body (330x) side, alternatively, the high rigidity like on the sliding body (330x) side is unnecessary to the X frame (301) side, form of desired size by adopting light quality material is satisfied, and special guide mechanism for restraining the mobile direction of the X frame (301) is unnecessary.

Description

Drive unit and camera head
Technical field
The present invention relates to utilize the elliptical vibration of oscillator to drive that moving body makes its drive unit that moves by predetermined direction and carry out the camera heads such as digital camera of jitter correction by this drive unit.
Background technology
In the past, as camera head, camera was for example arranged with image shake correction function.The image shake correction function that has as camera; Known have following hand to tremble calibration function: the tilt shake of (ヨ one) direction of shake vibration and the camera that uses shake detecting unit such as angular-rate sensor to detect on the camera (the ピ Star チ) direction that has a down dip is vibrated; According to the dither signal that is detected; On the direction of offsetting shake with the camera axis plane orthogonal in along continuous straight runs and vertical direction perhaps imaging apparatus of the part of dollying optical system independently respectively, the shake of proofreading and correct the image on the shooting face of imaging apparatus thus.
Tremble the hand of calibration function trembles in the aligning gear at the such hand of realization; Tremble and use driver element in order to proofread and correct hand, this driver element with the camera axis plane orthogonal in a part of camera lens or the imaging apparatus itself of along continuous straight runs and vertical direction travelling shot camera lens.This driver element is trembled and is moved owing to following hand, so require to have the height responsiveness, accurately drive (small driving) even and cut off the electricity supply and still can keep self retentivity of movable body position.
For such requirement, in patent documentation 1, disclose and used the hand of impact actuator to tremble aligning gear.Disclose vibration wave linear motor in the patent documentation 2 in addition, this vibration wave linear motor is pushed with respect to axle through two oscillators that the surface produced elliptical vibration, make the axle with respect to oscillator by Linear Driving.In the driving mechanism of this vibration wave linear motor, adopt following structure: cylindrical shaft relatively moves because of oscillator, and the projection that is arranged on the axle drives the camera lens frame, and the camera lens frame is by being set to the guide guiding moving direction that the camera lens frame uses and moving.
[patent documentation 1] TOHKEMY 2005-331549 communique
[patent documentation 2] TOHKEMY 2006-67712 communique
But; Impact actuator shown in the use patent documentation 1 is trembled in the aligning gear as the hand of driving mechanism; Can access height responsiveness, accurate driving and self retentivity, but owing to utilize inertia force to drive, can not be so exist through the small-sized problem that obtains high output.For example in camera etc., the front of imaging apparatuss such as CCD and membrane filter etc. are integrated, are not suitable for the situation of bigger, heavy image unit as driven object.Need strengthen inertia mass in order to increase actuating force, make driving mechanism become big.In addition, according to the principle that the inertia force by overcome friction drives, friction slip certainly leads to energy loss, also has the unfavorable condition of the essence that not too can raise the efficiency.
On the other hand, utilized the so-called vibration wave motor of the elliptical vibration of oscillator be fit to efficient high, obtain the driving of the image unit etc. of big actuating force and bigger, weight easily.But; In order to produce big actuating force, must use bigger power to make oscillator by being pressed on the moving body, if the rigidity of moving body is low; Then moving body can (vibration amplitude of vibration wave motor be that a few μ m are so little originally because of the pressing force deflection; Even so the deflection about a few μ m also can become problem), make the inefficiency of driving mechanism, can produce under extreme case that actuating force is absorbed and the problem of not moving.In order to prevent that such problem from taking place, shown in patent documentation 2, forming the moving body that makes direct contact oscillator is that columned axle improves rigidity, makes the camera lens frame that becomes the actual object that moves adopt the structure of coming transmission of drive force to move it through projection.In such structure, the guide that the actuating force transmission mechanism of camera lens frame one side, camera lens frame one side are used etc. need other approach, the problem that exists mechanism to become complicacy and become large-scale, heavy.Based on this point; Constituting mobile object self rigidity such as making the camera lens frame uprises; Can directly drive through the elliptical vibration of oscillator; But when the elliptical vibration at the oscillator through having the natural resonance frequency that is determined by shape, material etc. comes transmission of drive force, produce intrinsic unfavorable conditions such as vibration, must carry out needed above maximization, weightization, so just run counter to the requirement of miniaturization.
Summary of the invention
The present invention makes in view of foregoing, and its objective is provides a kind of small-sized, that actuating force is bigger, high efficiency drive unit and camera head.
Achieve the goal in order to solve above-mentioned problem, the drive unit that the present invention relates to is characterised in that to have: oscillator, and it makes drive division produce elliptical vibration through applying predetermined all wave voltages; Fixed part, it has the maintaining part that keeps said oscillator; And moving body, its elliptical vibration by said oscillator drives, and moves with respect to said fixed part, and said moving body comprises: the 1st moves body, and it forms hopes size; And the 2nd move body; It has the sliding part that contacts with said drive division because said drive division is pressed; With the opposition side that is arranged on this sliding part, moving direction through engaging the directed section that is directed with guide portion that said fixed part is had, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little, and be fixed on the 1st and move on the body.
In addition; The drive unit that the present invention relates to is characterised in that; In foregoing invention, with the said the 2nd move that the body one moves the said the 1st move the said guide portion and said 2nd of body through said fixed part and move engaging between the directed section of body and guide moving direction.
And the drive unit that the present invention relates to is characterised in that in foregoing invention, the said the 1st moves body is formed by resin material, aluminium or magnesium.
And; The drive unit that the present invention relates to is characterised in that; In foregoing invention; This drive unit has bullet and pushes away the unit, and this bullet pushes away the unit to carry out bullet to above-mentioned oscillator and push away, and makes to move body and said oscillator is pushed from the opposition side of said guide portion said drive division to said sliding part across the said the 2nd.
And; The drive unit that the present invention relates to is characterised in that; In foregoing invention, said guide portion and said directed section have the rotor that is arranged in 1 row along moving direction, on the position of the direction different with moving direction away from said guide portion; A rotor with location usefulness, this rotor is provided in the said the 1st and moves between body and the said fixed part under the clamp position that plays thrust.
And the drive unit that the present invention relates to is characterised in that to have: the 1st oscillator, and it makes drive division produce elliptical vibration through applying predetermined all wave voltages; Fixed part, it has the 1st maintaining part that keeps said the 1st oscillator; The 1st moving body; It pushes the said drive division of said the 1st oscillator; And moving direction is restricted to the 1st direction by the guide portion that said fixed part had, and the 1st moving body is driven by the elliptical vibration of said the 1st oscillator, moves along the 1st direction with respect to said fixed part; The 2nd oscillator, it is maintained in said the 1st moving body with the 2nd maintaining part, makes drive division produce elliptical vibration through applying predetermined all wave voltages; And the 2nd moving body; It pushes the said drive division of said the 2nd oscillator; And the guide portion that moving direction is had by said the 1st moving body is restricted to 2nd direction different with the 1st direction, and the 2nd moving body is driven by the elliptical vibration of said the 2nd oscillator, moves along the 2nd direction with respect to said the 1st moving body; At least one moving body in said the 1st, the 2nd moving body comprises: the 1st moves body, and it forms hopes size; And the 2nd move body; It has the sliding part that said drive division contacts; With the opposition side that is arranged on this sliding part, moving direction through engaging the directed section that is directed with said guide portion, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little, and be fixed on the 1st and move on the body.
And, the camera head that the present invention relates to have control this camera head molar behavior microcomputer, with the camera axis plane orthogonal in; On the 1st direction of quadrature and the 2nd direction, the imaging apparatus displacement is moved; With compensate for jitter, it is characterized in that this camera head has: the 1st oscillator; It makes drive division produce elliptical vibration according to the indication of said microcomputer through applying predetermined all wave voltages; Fixed part, it has the 1st maintaining part that keeps said the 1st oscillator, and is fixedly mounted on the camera head main body; The 1st moving body; It pushes the said drive division of said the 1st oscillator; And moving direction is restricted to the 1st direction by the guide portion that said fixed part had, and the 1st moving body is driven by the elliptical vibration of said the 1st oscillator, moves along the 1st direction with respect to said fixed part; The 2nd oscillator, it is maintained in said the 1st moving body with the 2nd maintaining part, according to the indication of said microcomputer, makes drive division produce elliptical vibration through applying predetermined all wave voltages; And the 2nd moving body; It pushes the said drive division of said the 2nd oscillator, and moving direction is restricted to the 2nd direction by the guide portion that said the 1st moving body is had, and the 2nd moving body is driven by the elliptical vibration of said the 2nd oscillator; Move along the 2nd direction with respect to said the 1st moving body; And on camera axis, keep said imaging apparatus, at least one moving body in said the 1st, the 2nd moving body comprises: the 1st moves body, and it forms hopes size; And the 2nd move body; It has the sliding part that said drive division contacts; With the opposition side that is arranged on this sliding part, moving direction through engaging the directed section that is directed with said guide portion, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little, and be fixed on the 1st and move on the body.
And, the camera head that the present invention relates to have control this camera head molar behavior microcomputer, with the camera axis plane orthogonal in; On the 1st direction of quadrature and the 2nd direction, the imaging apparatus displacement is moved; With compensate for jitter, it is characterized in that this camera head has: the 1st oscillator; It makes drive division produce elliptical vibration according to the indication of said microcomputer through applying predetermined all wave voltages; Fixed part, it forms the shaped as frame shape that surrounds camera axis opening on every side, and has the 1st maintaining part that keeps said the 1st oscillator, and is fixedly installed on the camera head main body; The 1st moves body, and it hopes size to surround the camera axis shaped as frame shape formation of opening on every side; The 2nd moves body; It has the sliding part that contacts with said drive division because the said drive division of said the 1st oscillator is pressed; With the opposition side that is arranged on this sliding part, moving direction through engaging and to the directed section that the 1st direction is directed with guide portion that said fixed part is had, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little; And be fixed on the 1st and move on the body, driven, move along the 1st direction with respect to said fixed part by the elliptical vibration of said the 1st oscillator; The 2nd oscillator, it is maintained at has the said the 1st of the 2nd maintaining part and moves in the body, according to the indication of said microcomputer, makes drive division produce elliptical vibration through applying predetermined all wave voltages; The 3rd moves body, and it keeps said imaging apparatus on camera axis, and is provided in the said the 1st and moves in the said opening of body, forms to hope size; And the 4th move body; It has the sliding part that contacts with said drive division because the said drive division of said the 2nd oscillator is pressed; With the opposition side that is arranged on this sliding part, moving direction through moving with the said the 1st that guide portion that body has engages and to the directed section that the 2nd direction is directed, the 4th move body rigidity move the body height than the said the 3rd, and; Form to such an extent that to move body than the said the 3rd little; And be fixed on the 3rd and move on the body, driven, move body with respect to the said the 1st and move along the 2nd direction by the elliptical vibration of said the 2nd oscillator.
According to drive unit that the present invention relates to and camera head, the high and oscillator of generation elliptical vibration that obtains big actuating force easily of service efficiency is as drive source, on the other hand; On mobile side, according to form as moving object hope the 1st of size move body, with than the 1st move body little the 2nd move body the structure of cutting apart, fix the two to make them integrated; Through moving sliding part and the directed section that is applied in big power is set on the body the little the 2nd; The actuating force propagation function and the moving direction guiding function that have compiled oscillator, the big the 1st moves body and the 2nd moves body and becomes one, and only follows mobile; Through only making the little the 2nd to move the body side and form rigidity and uprise; Can realize the high efficiency that actuating force is transmitted, on the other hand, the 1st moves the body side does not need the 2nd and moves the such high rigidity of body side; Hope size as long as adopt the material of lightweight to form; And, need not limit the 1st move the moving direction of body specific boot mechanism, can realize large driving force, high efficiency and miniaturization and as a whole.
Description of drawings
Fig. 1 is the block diagram of structure of main electrical system that the camera of execution mode of the present invention roughly is shown.
Fig. 2 is the vertical profile end view of the structure example of expression image unit.
Fig. 3 is the sketch map of the operating principle of expression oscillator.
Fig. 4 is the exploded perspective view of the structure example of expression vibrationproof unit.
Fig. 5 simplifies the shape of each one shown in Figure 4 and the summary side elevation of the vibrationproof unit that illustrates.
Fig. 6 be extract out and enlarged drawing 5 in X axle driving mechanism portion and the summary side elevation that illustrates.
Fig. 7 is the cutaway view of expression pilot bearing structure.
Fig. 8 is expression produces the situation of deflection because of the pressing force to oscillator a key diagram.
The general flowchart of the corrective action when Fig. 9 is the expression still image photographing.
Embodiment
Below, the drive unit that embodiment of the present invention is related to according to accompanying drawing and the best mode of camera head describe.The camera head of this execution mode is equipped with the hand that is used to carry out image unit and trembles the drive unit of correction; This image unit comprises the imaging apparatus that obtains picture signal according to light-to-current inversion; Here; As an example, the application examples of the single-lens reflex Electrofax (digital camera) that can change camera lens is described.And, the invention is not restricted to execution mode, so long as do not break away from the scope of aim of the present invention, can carry out various distortion.
At first, with reference to Fig. 1 the structure example of the camera arrangement of this execution mode is described.Fig. 1 is the block diagram that the main electrical system architecture of camera of this execution mode roughly is shown.The camera of this execution mode is by systematically constituting as the main computer unit 100 of camera body with as the lens unit 10 that an accessories apparatus is promptly changed camera lens.
The illustrated lens bracket of not doing of the front of lens unit 10 through being arranged on main computer unit 100 freely loads and unloads.The control of camera lens that the control of lens unit 10 is had by self is with microcomputer (below be called " Lucom ") 5 execution.The control of main computer unit 100 is carried out with microcomputer (below be called " Bucom ") 50 by host computer control.These Lucom 5 and Bucom 50 are connected into by being electrically connected under main computer unit 100 is equipped with the state of lens unit 10 and can communicate through communications connector 6.And,, from the possession Bucom 50 cooperated on one side and carries out work Yi Bian constitute Lucom 5 as camera arrangement.
Lens unit 10 possesses phtographic lens 1 and aperture 3.Phtographic lens 1 is by the illustrated DC Motor Drive of not doing that is arranged in the lens driving mechanism 2.Aperture 3 is driven by the illustrated stepping motor of not doing that is arranged in the aperture device 4.Lucom 5 is according to these each motor of commands for controlling of Bucom 50.
Be equipped with following component parts in the main computer unit 100 as shown in the figurely.For example, be provided with focal plane formula shutter 15 on component parts as the single-lens reflex of optical system (pentaprism 12, quick-return mirror 11, eyepiece 13, auxiliary mirror 11a), the camera axis, receive the AF sensor unit 16 that is used to detect amount from the folded light beam of auxiliary mirror 11a.AF sensor unit 16 is based on the device of phase difference detection mode, possesses single-lens 16a, speculum 16b and utilizes the AF transducer 16c of CCD etc.
And, be provided with to AF sensor unit 16 carry out drive controlling AF sensor drive driving circuit 17, quick-return mirror 11 is carried out the mirror driving mechanism 18 of drive controlling, shutter cocking mechanism 19 that the spring of the preceding curtain that drives shutter 15 and back curtain is tightened, is controlled the shutter control circuit 20 of the action of curtain and back curtain before these and carry out the light measuring circuit 21 that photometry is handled according to the photometry sensor 21a that detects from the light beam of pentaprism 12.
On camera axis, be provided with the image unit 30 that is carried out light-to-current inversion by subject image that is used for through above-mentioned optical system.Image unit 30 by as the CCD of imaging apparatus 31 and the optical low-pass filter (LPF) 32 that is provided in its front, membrane filter 33 as the unit and integrated formation.Circumference at membrane filter 33 is equipped with piezoelectric element 34.Piezoelectric element 34 has two electrodes, constitutes through membrane filter control circuit 48 to make piezoelectric element 34 with the predetermined frequencies vibration, makes membrane filter 33 vibrations thus, thereby can remove attached to the dust on the filter surfaces.Tremble the vibrationproof unit of proofreading and correct usefulness for the image unit 30 additional hands that have the back to narrate.
In addition, the camera arrangement of this execution mode constitutes, and possesses: be connected the CCD interface circuit 23 on the CCD 31; Wait the image process controller 28 that carries out image processing with the SDRAM 25, the FlashROM 26 that utilize monitoring lcd device 24, play a role, can the electronical record Presentation Function be provided with the electro-photographic function as storage area.Here, recording medium 27 is various storage cards and external recording mediums such as HDD in addition, is installed into through communications connector and can communicates by letter with camera body and can change.And, the view data that chronophotography obtains in this recording medium 27.As other storage area, the nonvolatile memory 29 that for example is made up of EEPROM of the expectant control parameter that photokymograph control is required is set to and can carries out access from Bucom 50.
In Bucom 50, be provided with through showing that output informs that to the user action demonstration of the operate condition of this camera shows with LED 51a, camera operation switch 52 with LCD 51 and action.Camera operation switch 52 is to comprise the required operating knob of these cameras of operation such as for example release-push, mode altering switch and mains switch in interior switches set.And; Be provided with battery 54, the voltage transformation of battery 54 is the power circuit 53 that the essential voltage of each circuit unit that constitutes this camera arrangement provides, also be provided with the voltage detecting circuit of the change in voltage of detection when external power source provides electric current through socket as power supply.
Each one of the camera arrangement of above-mentioned formation roughly carries out following work.At first, image process controller 28 is controlled CCD interface circuit 23 according to the instruction of Bucom 50, is taken into view data from CCD 31.This view data is transformed into vision signal through image process controller 28, on monitoring lcd device 24, is shown by output.The user can confirm the image of being photographed from the display image of this monitoring lcd device 24.
SDRAM 25 is that the temporary transient keeping of view data is used memory, the working region during as the view data conversion etc.In addition, keeping was in recording medium 27 after view data was transformed to jpeg data.
Mirror driving mechanism 18 is to be used for quick-return mirror 11 to the mechanism that lifting position and down position drive, and this quick-return mirror 11 is separated from the light beam of phtographic lens 1 and is transmitted to AF sensor unit 16 sides and pentaprism 12 sides when down position.From the output of the AF transducer in the AF sensor unit 16, be sent to Bucom 50 through AF sensor drive driving circuit 17 and carry out known range finding processing.On the other hand, the part of the light beam through pentaprism 12 is directed to the photometry sensor 21a in the light measuring circuit 21, carries out known photometry according to the light quantity that detects here and handles.
Then, with reference to Fig. 2 the image unit 30 that comprises CCD 31 is described.Fig. 2 is the vertical profile end view of the structure example of expression image unit 30.Image unit 30 possesses: as the CCD 31 of imaging apparatus, it obtains shining with seeing through photographic optical system the corresponding picture signal of light on self the photoelectric conversion surface; Optical low-pass filter (LPF) 32, it is provided in the photoelectric conversion surface side of CCD 31, the intrafascicular removal radio-frequency component of object light that shines from seeing through photographic optical system; Membrane filter 33, its front face side at this optics LPF 32 separate predetermined space and this optics LPF 32 configuration opposed to each other mutually; And piezoelectric element 34, it is configured in the circumference of this membrane filter 33, the vibration that membrane filter 33 is scheduled to.
Here; The CCD chip 31a of CCD 31 is directly installed on the flexible substrate 31b that is equipped on the fixed head 35, and the connecting portion 31c that stretches out from the two ends of flexible substrate 31b, 31d are connected with main circuit substrate 36 sides through connector 36a, the 36b that is arranged on the main circuit substrate 36.In addition, the cover glass 31e that has of CCD 31 is fixedly mounted on the flexible substrate 31b through pad 31f.
In addition, be equipped with the filter support component 37 that constitutes by elastomeric element etc. between CCD 31 and the optics LPF 32.This filter support component 37 constitutes; Avoid through the front face side circumference that is provided in CCD 31 on the position of effective range of photoelectric conversion surface; And be connected to optics LPF32 the rear side circumference near, can roughly keep the air-tightness between CCD 31 and the optics LPF 32.Then, set the retainer 38 that hermetic covers CCD 31 and optics LPF 32.The substantial middle of retainer 38 around camera axis partly has rectangular-shaped opening 38a; Be formed with section in the inner peripheral portion of membrane filter 33 sides of this opening 38a and be the stage portion 38b of L word shape roughly, be equipped with optics LPF 32 and CCD 31 from its rear side with respect to opening 38a.Here through being configured to that the front face side circumference of optics LPF 32 roughly is contacted with stage portion 38b airtightly, can limit the position of optics LPF 32, prevent that its inside from retainer 38 breaks away to front face side through stage portion 38b in the camera axis direction.
On the other hand; Circumference in the front face side of retainer 38; In order membrane filter 33 to be remained on with separating predetermined space the front of optics LPF 32, complete cycle ground forms than stage portion 38b to the side-prominent membrane filter support portion 38c in front around stage portion 38b.Forming circular or polygonal tabular membrane filter 33 is as a whole formed by the elastomer of leaf spring etc.; The parts 40 that are pressed are supported under pressed state on the 38c of membrane filter support portion, and this pressing component 40 is fixed on the 38c of membrane filter support portion by screw 39.Here, on piezoelectric element 34 parts of the outer peripheral edges portion of the rear side that is provided in membrane filter 33, and membrane filter support portion 38c between get involved cyclic sealing gasket 41 arranged, guarantee airtight conditions.Image unit 30 constitutes possesses the air tight construction that forms the retainer 38 of hoping size, and this retainer 38 is installed CCD 31 like this.
Then, the hand of the camera of this execution mode being trembled calibration function describes.In this execution mode; Direction at camera axis is under the situation of Z-direction; With the XY plane of camera axis quadrature in; To move as CCD 31 displacements of imaging apparatus in the X-direction of mutually orthogonal conduct the 1st direction with on as the Y direction of the 2nd direction; With compensate for jitter, comprise hand tremble the vibrationproof unit of the drive unit of proofreading and correct usefulness will produce elliptical vibration through applying predetermined all wave voltages on drive division oscillator as drive source, with the installation in the image unit 30 retainer 38 of CCD 31 constitute mobile object.
At first, the operating principle that is used as the oscillator of drive source in the drive unit to this execution mode describes.Fig. 3 is the sketch map of the operating principle of expression oscillator.Oscillator 200 possesses with predetermined size and forms rectangular-shaped piezoelectrics 201, is biased in a side of these piezoelectrics 201 and forms centrosymmetric a pair of drive electrode 202,203, be arranged at the driver 204,205 as drive division on the surface location of the piezoelectrics 201 corresponding with drive electrode 202,203 through polarization.If apply positive voltage to drive electrode 202, then shown in Fig. 3 (a), the drive electrode 202 part extensional deformations of polarization structure, piezoelectrics 201 parts of its rear side extensional deformation not on the other hand is so integral body is circular-arc distortion.On the contrary; If apply negative voltage to drive electrode 202, then shown in Fig. 3 (c), the drive electrode 202 part contraction distortions of polarization structure; Piezoelectrics 201 parts at its back side are not shunk on the other hand, so integral body is and the rightabout circular-arc distortion of Fig. 3 (a).Drive electrode 203 sides too.
Therefore; Want to produce elliptical vibration on the surface of driver 204,205; Apply all wave voltages of the sine wave of preset frequency on the drive electrode 202 that need polarize, apply all wave voltages of the sine wave of but phase shifting identical simultaneously to another drive electrode 203 with the cycle electric voltage frequency that applies to drive electrode 202 at the quilt of piezoelectrics 201.The frequency of all wave voltages that apply is set to following predetermined numerical value: the central authorities of piezoelectrics 201 become the joint of flexural vibrations; Driver 204,205 parts become the abdomen of flexural vibrations; And, the joint homogeneity value of the joint of the compressional vibration of piezoelectrics 201 and flexural vibrations.So, being accompanied by the positive and negative variation of all wave voltages that apply, oscillator 200 comprises the reset condition shown in Fig. 3 (b) interior, and the flexural vibrations shown in Fig. 3 (a)~(c) repeatedly produce elliptical vibration on the surface of driver 204,205.Therefore, set through the moving body that face contact becomes driven object in driver 204,205 sides of oscillator 200, thus the elliptical vibration that moving body produces along with the surface of driver 204,205 towards moving.
At this moment, be applied to the phase difference of all wave voltages on the drive electrode 202,203, can change the shape of the elliptical vibration that produces on the surface of driver 204,205, therefore can change by oscillator 200 and drive and the translational speed of the moving body that moves through change.For example, if the phase difference of all wave voltages is 0 °, then speed is 0, but phase difference is when increasing; Speed improves gradually, and phase difference is 90 ° and reaches maximal rate, and in addition, phase difference is greatly to above 90 ° the time; Speed descends on the contrary gradually, and when phase difference was 180 °, speed was 0 once more.If phase difference is a negative value, then the direction of rotation counter-rotating of the elliptical vibration of driver 204,205 generations can drive moving body in the other direction.Also be that phase difference reaches maximal rate when being-90 ° under this situation.
Then, describe as the vibrationproof unit of this execution mode of drive source using such oscillator with reference to Fig. 4~Fig. 7.Fig. 4 is the exploded perspective view of structure example of the vibrationproof unit of this execution mode of expression; Fig. 5 simplifies the shape of each one shown in Figure 4 and the summary side elevation of the vibrationproof unit that illustrates; Fig. 6 is the summary side elevation shown in the X axle driving mechanism portion in extraction and the enlarged drawing 5, and Fig. 7 is the cutaway view of its pilot bearing structure of expression.
At first; The vibrationproof unit 300 of this execution mode is the final object that moves that retainer 38 that CCD 31 has been installed is moved along X-direction and Y direction with optics LPF 32, membrane filter 33 etc.; Possess: X frame (the 1st moving body) 301; It is installed as retainer 38 can move along Y direction according to the shaped as frame shape with the 301b of frame portion that surrounds camera axis opening 301a on every side, and forms the hope size; And framework (fixed part) 302, it is installed as X frame 301 can move along X-direction according to the shaped as frame shape with the 302b of frame portion that surrounds camera axis opening 302a on every side, and forms the hope size, and is fixed on the not shown camera body.
And; Possess the X axle driving mechanism 310x of portion that X frame 301 is moved along the X-direction displacement with respect to framework 302, the Y axle driving mechanism 310y that retainer 38 is moved along the Y direction displacement with respect to X frame 301; Through retainer 38 is moved along the X-direction displacement with respect to framework 302 with X frame 301; Move along the Y direction displacement with respect to X frame 301 simultaneously, the CCD 31 that is installed on the retainer 38 moves along X-direction and Y direction displacement in the XY plane, with compensate for jitter.
Here, the structure to the X axle driving mechanism 310x of portion describes.The X axle driving mechanism 310x of portion possesses: X axle oscillator (the 1st oscillator) 320x; Slide mass (the 2nd moves body) 330x, it is fixed on the X frame 301 integratedly, becomes moving body (the 1st moving body) 311x of driven object with X frame 301; And pressing mechanism (bullet pushes away the unit) 340x, it carries out bullet to slide mass 330x side to X axle oscillator 320x and pushes away.
X axle oscillator 320x possesses on the one side of rectangular-shaped piezoelectrics 323x through applying driver (drive division) 321x, the 322x that predetermined all wave voltages produce elliptical vibration according to the operating principle of the oscillator 200 of Fig. 3 explanation.X axle oscillator 320x has oscillator retainer 324x at the driver 321x of piezoelectrics 323x, the middle position of 322x opposition side; Because oscillator retainer 324x goes up the projection 325x that forms and is entrenched among the groove 342x (maintaining part) of framework 302; The X axle oscillator 320x maintenance that is positioned thus makes the mobile of X-direction be restricted.According to such structure, the formed actuating force of elliptical vibration that driver 321x, 322x produce plays a role along X-direction.
In addition, slide mass 330x is at last sliding panel (sliding part) 332x that is fixed with of bearing (directed section) 331x. Bearing 331x driver 321x, the 322x of X axle oscillator 320x be pressed and with sliding panel 332x position contacting on, with respect to the part of X frame 301, for example fixedly make it integrated through screw 333x.And slide mass 330x fixedly is not limited to screw with respect to X frame 301, also can be bonding etc., and fixed form is not special specifies.Here, slide mass 330x can know from Fig. 4, compares with forming the X frame 301 of hoping size, and size forms than its little (with the suitable size of X axle oscillator 320x).In addition; X frame 301 uses resin material or aluminium alloy or the high formation such as magnesium alloy of absorption of vibrations property; And that sliding panel 332x uses pottery with mar proof etc. to form is higher than X frame 301 rigidity, and bearing 331x improves rigidity through the hardenable materials such as stainless steel of ferrite class are quenched.
In addition, framework 302 possesses bearing (guide portion) 304x, and this bearing 304x is configured on the installation portion of the opening shape that is formed at framework 302, is fixed to mutually opposed with the bearing 331x of slide mass 330x through screw 303x.On this bearing 304x, as shown in Figure 7, form the V frid 306x that is fixed with the usefulness that prevents to wear and tear along the V groove 305x of X-direction.On bearing 331x, as shown in Figure 7, be formed with the opposed V groove 334 of V groove 305x (V frid 306x) with bearing 304x.Here, be clipped between V groove 305x, the 334x through making two the ball 336x (rotor) by locator 335x location, bearing 304x, 331x are constructed to have two ball 336x that are arranged in 1 row along X-direction.Two ball 336x are as shown in Fig. 6 waits, and are positioned near the position under driver 321x, the 322x, by moving of locator 335x restriction X-direction.And, being not limited to ball as rotor, roller also can.
Pressing mechanism 340x possesses: pressing plate 341x, and it is fixed on by screw 344x across pad 343x one end and keeps X axle oscillator 320x on the framework 302; And press pressing spring 347x; Its across pad 346x be provided in another of this pressing plate 341x distolateral be fixed on screw 345x on the framework 302 around; Pressing plate 341x is carried out bullet push away, make the driver 321x, 322x face contact of X axle oscillator 320x on sliding panel 332x.The pressing force of pressing mechanism 340x is set to the very large power about 15N (newton).
And; Bearing 331x is through the center of ball 336x; Can be around the axle rotation that is parallel to V groove 334x, still, bearing 331x and X frame 301 are integrated; On the position away from bearing 331x of the direction different (on the frame 302b of portion farthest the position at almost diagonal angle), between framework 302 and X frame 301, be equipped with a ball 307x (rotor) with X-direction.This ball 307x locatees as follows: blocked the bullet thrust of ending the spring 308x between near framework the ball 307x 302 and X frame 301 and be maintained clamp position, keep X frame 301 with respect to the interval of framework 302 in camera axis (Z axle) direction.Here, as long as the bullet thrust of spring 308x can be kept the clamp position of ball 307x, can set for than by a little less than the bullet thrust of pressing spring 347x what.Thus, constitute with the moving body 311x that slide mass 330x constitutes, can move through the supported at three point of forming by two ball 336x and ball 307x with respect to framework 302 by X frame 301.In addition, ball 307x can separate the distance between ball 307x and the ball 336x through be configured in the opposition side of ball 336x across camera axis and opening 301a, therefore can form stable supported at three point structure.Like this,, use three balls (rotor) can also the regulation gradient in the guiding of the moving direction that carries out moving body 311x, can carry out stable driving according to this execution mode.
On the other hand, the Y axle driving mechanism 310y of portion also is that essential structure and the X axle driving mechanism 310x of portion are same, at same or counterpart prosign are enclosed subscript y and represent, and omit explanation.And; For the Y axle driving mechanism 310y of portion; Replace framework 302 with X frame 301 as fixed part, replace X frame 301 that retainer 38 is moved the 1st of object and moves body (perhaps the 3rd moving body) as becoming, and possess slide mass (the 2nd moves body perhaps the 4th moves body) 330y; This slide mass 330y is fixed on the retainer 38 integratedly, becomes moving body (the 2nd moving body) 311y of driven object with retainer 38.
In addition, the vibrationproof unit 300 of this execution mode is equipped with the X axle gyroscope 350x of the shake around the X axle (shake of incline direction up and down) that detects main computer unit 100 and the Y axle gyroscope 350y of the shake around the Y axle (shake of the direction that tilts) that detects main computer unit 100 on framework 302.In addition, possess position-detection sensor 353, this position-detection sensor 353 by be provided on the framework 302 Hall element 351 with constitute with magnet 352 that Hall element 351 is provided on the part of retainer 38 mutually opposed to each other.And; Also possess Vibroisolating control circuit 355, this Vibroisolating control circuit 355 is according to controlling the oscillator drive circuit 354 to X axle oscillator 320x, Y axle oscillator 320y from the signal of these X axle gyroscopes 350x, Y axle gyroscope 350y and position-detection sensor 353.Vibroisolating control circuit 355 is carried out control action according to the indication from Bucom 50.
Then, the action to X axle driving mechanism 310x describes.When applying predetermined all wave voltages on the X axle oscillator 320x during at driver 321x, the last generation of 322x elliptical vibration; Driver 321x, the 322x of X axle oscillator 320x is pressed the strong bullet thrust face contact of mechanism 340 on sliding panel 332x, and slide mass 330x drives to the direction of rotation of the elliptical vibration of driver 321x, 322x.
At this moment; Because the pressing force that is applied on the X axle oscillator 320x is strong; If so a little less than the rigidity of the sliding panel 332x of formation slide mass 330x or bearing 331x; Then shown in dotted line among Fig. 8, additional pressing force makes sliding panel 332x or bearing 331x deflection, and driver 321x, 322x and sliding panel 332x partly contact and the action that becomes is unstable, or no longer action.
Based on this point; In this execution mode; Owing to constitute the sliding panel 332x of slide mass 330x and the rigidity height of bearing 331x; So the face contact of driver 321x, 322x and sliding panel 332x is in stable condition, follow the actuating force of elliptical vibration to be passed to reliably on the sliding panel 332x, can be expeditiously drive in the direction of rotation of elliptical vibration.At this moment; Having the slide mass 330x side of sliding panel 332x is not the face contact with respect to framework 302; Slide mass 330x contacts with the rotating manner of ball 336x in bearing 331x, 304x part, so even pressing force is strong, also can move under the very little state of friction with respect to framework 302 reliably.And bearing 331x, 304x are owing to being made up of 1 row ball location bearing along X-direction, so slide mass 330x only moves in X-direction under the situation of the driving that receives X axle oscillator 320x.Like this, when slide mass 330x moved, fixedly the X frame 301 of slide mass 330x also moved along X-direction with slide mass 330x integratedly.That is, the moving direction of X frame 330x also comes channeling conduct through bearing 331x, 304x engaging each other, and this bearing 331x, 304x are made up of 1 row ball location bearing along X-direction.
In such action; Bearing 331x can be around the axle rotation that is parallel to V groove 334x, still through the center of ball 336x; Bearing 331x and X frame 301 are integrated; On the position of the direction different away from bearing 331x with X-direction, set a ball 307x between framework 302 and the X frame 301, on the position that separate carry out three somes supports with respect to framework 302 by two ball 336x and a ball 307x with the moving body 311x that slide mass 330x constitutes by X frame 301; So can stably not move because of producing repercussions around the axle rotation that is parallel to V groove 334x in framework 302 upper edge X-directions.Therefore, so long as get final product, can realize miniaturization/simple structureization to the guide support mechanism of the strong pressing part of X axle oscillator 320x along the 1 row ball location bearing structure of the X-direction of bearing 331x, 304x.
Y axle driving mechanism 310y also with the same action of situation of X axle driving mechanism 310x.
Then, the adversary trembles corrective action and describes.Do not make illustrated hand in the unlatching camera operation switch 52 and tremble correcting switch; When not making illustrated master switch and being unlocked; The signal that oscillator drive circuit 354 is carried out initial actuating is passed to Vibroisolating control circuit 355 from Bucom 50; Apply predetermined all wave voltages from oscillator drive circuit 354 to X axle oscillator 320x and Y axle oscillator 320y, X frame 301 and retainer 38 are driven on X-direction and Y direction, make the center of CCD 31 move on on the camera axis.
The dither signal of the main computer unit 100 that then, X axle gyroscope 350x, Y axle gyroscope 350y is detected is taken into Vibroisolating control circuit 355.Here, in X axle gyroscope 350x, Y axle gyroscope 350y, the signal of exporting around the angular-rate sensor of the shake of an one of which axle from detection carries out the A/D conversion after the process signal amplification treatment circuit, be transfused to Vibroisolating control circuit 355 then.
In Vibroisolating control circuit 355, come computing jitter correction amount according to the output signal of X axle gyroscope 350x, Y axle gyroscope 350y, and will export oscillator drive circuit 354 to the corresponding signal of jitter correction amount of institute computing.Retainer 38 and X frame 301 that CCD 31 has been installed are driven by Y axle oscillator 320y, X axle oscillator 320x, and this Y axle oscillator 320y, X axle oscillator 320x move according to the signal of telecommunication that oscillator drive circuit 354 is generated.The activation point of CCD 31 (retainer 38) is detected by position-detection sensor 353, and delivers to Vibroisolating control circuit 355 and carry out FEEDBACK CONTROL.
That is, in Vibroisolating control circuit 355, come the computing fiducial value according to the signal of being imported (below be also referred to as " dither signal " or " shake angular velocity signal ") from X axle gyroscope 350x, Y axle gyroscope 350y.The computing of fiducial value from the main power source of connecting camera, till carry out exposure that still image photographing uses during carry out.As this computing, have the moving average of calculating more long dither signal method, or obtain the method etc. of DC composition through the lower low pass filter of cut-off frequency, can use arbitrary method.Through from dither signal, deducting the fiducial value that this computing is obtained, the signal of the low-frequency component of the dither signal that has been removed.Then, control oscillator drive circuit 354, the position of CCD 31 (retainer 38) is moved, with compensate for jitter according to the output signal of this signal and position-detection sensor 353.
Here, the corrective action during to still image photographing describes with reference to Fig. 9.The general flowchart of the corrective action when Fig. 9 is the expression still image photographing.And this action (before 1R ON) before beginning is prepared in release-push indication photography is not carried out, and (during 1R ON) just began when beginning was prepared in release-push indication photography.
During this action beginning, use the said reference value to come the computing correcting value, begin jitter correction according to the correcting value of calculating and drive (step S11).Then, judge whether to remove the photography that release-push carries out and prepare to begin indication (whether being 1R OFF) (step S12), (step S12 under situation about removing; Be), stop at the jitter correction that has begun among the step S11 and drive, and CCD 31 is felt relieved (step S17), become the indication wait state (1R wait state) that beginning is prepared in photography.
On the other hand; Do not removing (step S12: not) under the situation that photography that release-push carries out prepares to begin to indicate; Judge then whether release-push indicates photography beginning (whether being 2R ON) (step S13); (step S13: not), return step S12, waiting for standby under the indicating status under the situation of not indication.Indicated at release-push under the situation of photography beginning (step S13: be), stopped at the jitter correction that has begun among the step S11 and drive, and to CCD 31 feel relieved (step S14).Then, use the fiducial value that is kept to come the computing correcting value, begin jitter correction according to this correcting value and drive (step S15).Then, make public (step S16) when end exposure, stops jitter correction and drives, and CCD 31 is felt relieved (step S17), becomes the indication wait state (1R wait state) that beginning is prepared in photography.
According to this execution mode; Service efficiency high and the oscillator 320x, 320y that obtain the generation elliptical vibration of big actuating force easily be as drive source, on the other hand, and in moving body 311x, 311y side; According to form as original mobile object the X frame 301 of hoping size and retainer 38 such the 1st move body, with than the 1st move the little slide mass 330x of body and slide mass 330y such the 2nd move body the structure of cutting apart; Fix the two and make them integrated, sliding panel 332x, 332y and bearing 331x, 331y are set on the body, compiled actuating force propagation function and the moving direction guiding function of oscillator 320x, 320y through moving the little the 2nd; The big the 1st moves body and the 2nd moves body and becomes one; Only follow mobilely, move the body side and form rigidity and uprise, can realize the high efficiency that actuating force is transmitted through only making the little the 2nd; On the other hand; The 1st moves the body side does not need the 2nd and moves the such high rigidity of body side, as long as adopt the material of lightweight to form to hope size, and; Need not limit the 1st move the moving direction of body specific boot mechanism, can realize large driving force, high efficiency and miniaturization and as a whole.

Claims (12)

1. a drive unit is characterized in that, this drive unit has:
Oscillator, it makes drive division produce elliptical vibration through applying predetermined all wave voltages;
Fixed part, it has the maintaining part that keeps said oscillator; And
Moving body, its elliptical vibration by said oscillator drives, moves with respect to said fixed part,
Said moving body comprises:
The 1st moves body, and it forms hopes size; And
The 2nd moves body; It has the sliding part that contacts with said drive division because said drive division is pressed; With the opposition side that is arranged on this sliding part, moving direction through engaging the directed section that is directed with guide portion that said fixed part is had, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little, and be fixed on the 1st and move on the body.
2. drive unit according to claim 1; It is characterized in that, with the said the 2nd move that the body one moves the said the 1st move the said guide portion and said 2nd of body through said fixed part and move engaging between the directed section of body and guide moving direction.
3. drive unit according to claim 1 is characterized in that, the said the 1st moves body is formed by resin material, aluminium or magnesium.
4. drive unit according to claim 1; It is characterized in that; This drive unit has bullet and pushes away the unit, and this bullet pushes away the unit to carry out bullet to above-mentioned oscillator and push away, and makes to move body and said oscillator is pushed from the opposition side of said guide portion said drive division to said sliding part across the said the 2nd.
5. drive unit according to claim 1 is characterized in that, said guide portion and said directed section have the rotor that is arranged in 1 row along moving direction,
On the position of the direction different away from said guide portion with moving direction, have a rotor of location usefulness, this rotor is provided in the said the 1st and moves between body and the said fixed part under the clamp position that plays thrust.
6. a drive unit is characterized in that, this drive unit has:
The 1st oscillator, it makes drive division produce elliptical vibration through applying predetermined all wave voltages;
Fixed part, it has the 1st maintaining part that keeps said the 1st oscillator;
The 1st moving body; It pushes the said drive division of said the 1st oscillator; And moving direction is restricted to the 1st direction by the guide portion that said fixed part had, and the 1st moving body is driven by the elliptical vibration of said the 1st oscillator, moves along the 1st direction with respect to said fixed part;
The 2nd oscillator, it is maintained in said the 1st moving body with the 2nd maintaining part, makes drive division produce elliptical vibration through applying predetermined all wave voltages; And
The 2nd moving body; It pushes the said drive division of said the 2nd oscillator; And the guide portion that moving direction is had by said the 1st moving body is restricted to 2nd direction different with the 1st direction; The 2nd moving body is driven by the elliptical vibration of said the 2nd oscillator, moves along the 2nd direction with respect to said the 1st moving body
At least one moving body in said the 1st, the 2nd moving body comprises:
The 1st moves body, and it forms hopes size; And
The 2nd moves body; It has the sliding part that said drive division contacts; With the opposition side that is arranged on this sliding part, moving direction through engaging the directed section that is directed with said guide portion, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little, and be fixed on the 1st and move on the body.
7. camera head, it has the microcomputer of this camera head molar behavior of control, with the camera axis plane orthogonal in; On the 1st direction of quadrature and the 2nd direction, the imaging apparatus displacement is moved; With compensate for jitter, it is characterized in that this camera head has:
The 1st oscillator, it makes drive division produce elliptical vibration according to the indication of said microcomputer through applying predetermined all wave voltages;
Fixed part, it has the 1st maintaining part that keeps said the 1st oscillator, and is fixedly mounted on the camera head main body;
The 1st moving body; It pushes the said drive division of said the 1st oscillator; And moving direction is restricted to the 1st direction by the guide portion that said fixed part had, and the 1st moving body is driven by the elliptical vibration of said the 1st oscillator, moves along the 1st direction with respect to said fixed part;
The 2nd oscillator, it is maintained in said the 1st moving body with the 2nd maintaining part, according to the indication of said microcomputer, makes drive division produce elliptical vibration through applying predetermined all wave voltages; And
The 2nd moving body; It pushes the said drive division of said the 2nd oscillator; And moving direction is restricted to the 2nd direction by the guide portion that said the 1st moving body is had, and the 2nd moving body is driven by the elliptical vibration of said the 2nd oscillator, moves along the 2nd direction with respect to said the 1st moving body; And on camera axis, keep said imaging apparatus
At least one moving body in said the 1st, the 2nd moving body comprises:
The 1st moves body, and it forms hopes size; And
The 2nd moves body; It has the sliding part that said drive division contacts; With the opposition side that is arranged on this sliding part, moving direction through engaging the directed section that is directed with said guide portion, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little, and be fixed on the 1st and move on the body.
8. camera head according to claim 7 is characterized in that, on the camera axis of said imaging apparatus, has the pick-up lens that can load and unload.
9. camera head according to claim 7; It is characterized in that; Said the 2nd moving body is in the front face side of said imaging apparatus; With airtight conditions membrane filter and optical low-pass filter are installed with this imaging apparatus, said membrane filter has makes add the shake parts of this membrane filter along the vibration of camera axis direction.
10. camera head, it has the microcomputer of this camera head molar behavior of control, with the camera axis plane orthogonal in; On the 1st direction of quadrature and the 2nd direction, the imaging apparatus displacement is moved; With compensate for jitter, it is characterized in that this camera head has:
The 1st oscillator, it makes drive division produce elliptical vibration according to the indication of said microcomputer through applying predetermined all wave voltages;
Fixed part, it forms the shaped as frame shape that surrounds camera axis opening on every side, and has the 1st maintaining part that keeps said the 1st oscillator, and is fixedly installed on the camera head main body;
The 1st moves body, and it hopes size to surround the camera axis shaped as frame shape formation of opening on every side;
The 2nd moves body; It has the sliding part that contacts with said drive division because the said drive division of said the 1st oscillator is pressed; With the opposition side that is arranged on this sliding part, moving direction through engaging and to the directed section that the 1st direction is directed with guide portion that said fixed part is had, the 2nd move body rigidity move the body height than the said the 1st, and; Form to such an extent that to move body than the said the 1st little; And be fixed on the 1st and move on the body, driven, move along the 1st direction with respect to said fixed part by the elliptical vibration of said the 1st oscillator;
The 2nd oscillator, it is maintained at has the said the 1st of the 2nd maintaining part and moves in the body, according to the indication of said microcomputer, makes drive division produce elliptical vibration through applying predetermined all wave voltages;
The 3rd moves body, and it keeps said imaging apparatus on camera axis, and is provided in the said the 1st and moves in the said opening of body, forms to hope size; And
The 4th moves body; It has the sliding part that contacts with said drive division because the said drive division of said the 2nd oscillator is pressed; With the opposition side that is arranged on this sliding part, moving direction through moving with the said the 1st that guide portion that body has engages and to the directed section that the 2nd direction is directed, the 4th move body rigidity move the body height than the said the 3rd, and; Form to such an extent that to move body than the said the 3rd little; And be fixed on the 3rd and move on the body, driven, move body with respect to the said the 1st and move along the 2nd direction by the elliptical vibration of said the 2nd oscillator.
11. camera head according to claim 10 is characterized in that, on the camera axis of said imaging apparatus, has the pick-up lens that can load and unload.
12. camera head according to claim 10; It is characterized in that; The said the 3rd moves body installs membrane filter and optical low-pass filter with this imaging apparatus with airtight conditions in the front face side of said imaging apparatus, and said membrane filter has makes add the shake parts of this membrane filter along the vibration of camera axis direction.
CN2007101957689A 2006-12-15 2007-12-14 Driving apparatus and image pickup apparatus Expired - Fee Related CN101207343B (en)

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