CN101186349A - Pure water supplying system capable of controlling oxygen dissolving content and degassing method thereof - Google Patents
Pure water supplying system capable of controlling oxygen dissolving content and degassing method thereof Download PDFInfo
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- CN101186349A CN101186349A CNA2007101995055A CN200710199505A CN101186349A CN 101186349 A CN101186349 A CN 101186349A CN A2007101995055 A CNA2007101995055 A CN A2007101995055A CN 200710199505 A CN200710199505 A CN 200710199505A CN 101186349 A CN101186349 A CN 101186349A
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Abstract
The invention relates to a purified water supply system of controlling oxygen dissolved quantity and a degassing method thereof. A degassing process is carried out in a capacity space which is injected with purified water through an air exhaust device, the oxygen dissolved in the purified water is separated out, thus reducing the dissolved oxygen quantity of the purified water; meanwhile, a detection signal is sent to a controller by detecting the dissolved oxygen quantity of the purified water through a detection device.; the operating power of the degassing device is adjusted according to the detection signal, and the dissolved oxygen quantity of the purified water is controlled, thereby maintaining the dissolved oxygen quantity in a certain range.
Description
Technical field
The present invention relates to a kind of pure water supply system and degas method thereof, particularly a kind of pure water supply system and degas method thereof of controlling pure water oxygen dissolution amount.
Background technology
In high-tech industries such as semi-conductor manufacturing, liquid-crystal display, biological research and development or laboratories, in manufacturing processed, all to wash cleaning to work in-process, be beneficial to next processing step and be able to smooth execution, so the usage quantity of pure water is quite huge.
Difference because of the process requirements specification, so the dissolved oxygen content in the pure water is also variant, dissolved oxygen is too low in the pure water can increase the pure water manufacturing cost, the too high meeting of dissolved oxygen causes the problem of oxidation of product circuit in the pure water, and then cause quality product or production qualification rate to reduce, therefore the oxygen dissolution amount in the pure water must be limited to one and use in the scope of definite value.
Figure 1 shows that the synoptic diagram of traditional pure water supply system.The pure water supply system of known technology comprises cavity 11, proofing unit 12, vacuum pump 13 and CD-ROM drive motor 14.Pure water injects cavity 11, and drive vacuum pump 13 by CD-ROM drive motor 14 and bleed, so that the gas that is dissolved in the pure water is separated out and is discharged outside the cavity 11, at last, the pure water that transfers out from cavity 11 must detect via proofing unit 12, whether meets the use standard to confirm the oxygen dissolution amount in the pure water.
The employed proofing unit 12 of traditional pure water supply system is two independently implements with vacuum pump 13, there is no direct electrical connection between the two.And traditional vacuum pump 13 uncontrollable its running powers, but with the full rate drive manner cavity 11 is continued to bleed, the gas dissolving amount that causes the last pure water of outwards carrying is far below the use standard.
Though the oxygen dissolution amount of the pure water that obtains is at last used standard far below technology, yet therefore the spent electric energy of vacuum pump but increases considerably, and cross low gas dissolving amount and there is no too big help for the raising of production qualification rate, in the calculating of cost ratio and do not meet economic benefit, cause the excess waste of electric power energy simultaneously, cause the increase of manufacturing cost.
Summary of the invention
In view of above problem, the invention provides a kind of pure water supply system and degas method thereof of controlling the oxygen dissolution amount, improve the pure water supply system of known technology thus and can't in time control the pumping speed of vacuum pump and cause problems such as electric power energy excess waste and manufacturing cost increase.
The pure water supply system and the degas method thereof of control oxygen dissolution amount of the present invention are dissolved in the oxygen of pure water and control the oxygen dissolution amount of pure water in order to removal.
Pure water supply system of the present invention comprises cavity, air extractor, proofing unit, reaches controller, and its middle controller is electrically connected at proofing unit and air extractor.Cavity has an accommodation space, and pure water injects accommodation space, leaves accommodation space after bleeding, and air extractor to reduce the pressure of accommodation space, separates out the oxygen that is dissolved in the pure water in order to extract the gas of accommodation space.Proofing unit is in order to detecting the oxygen dissolution amount of pure water, and the detection signal of corresponding oxygen dissolution amount is issued in the controller, and controller is controlled the running power of air extractor according to this detection signal, with the oxygen dissolution amount of control pure water.
Degas method of the present invention at first is injected into pure water in the accommodation space of cavity, and with an initial operation power accommodation space is bled, and makes the oxygen that is dissolved in the pure water separate out.Then, pure water leaves accommodation space, detects the oxygen dissolution amount of pure water simultaneously, sends a detection signal corresponding to the oxygen dissolution amount, and controls the running power of air extractor according to this detection signal.
Effect of the present invention is, oxygen dissolution amount by the measured pure water of proofing unit, with the running power of control mode signal bleeding regulating device, not only the oxygen dissolution amount of pure water can be controlled in the claimed range, also can reduce the spent electric power energy of air extractor.
More than about the explanation of the explanation of content of the present invention and following embodiment in order to demonstration with explain principle of the present invention, and further explain claim of the present invention.
Description of drawings
Fig. 1 is the composition synoptic diagram of the pure water supply system of known technology;
Fig. 2 is the composition synoptic diagram of pure water supply system of the present invention; And
Fig. 3 is the flow chart of steps of degas method of the present invention.
Wherein, description of reference numerals is as follows:
10,100 pure water supply systems, 11,110 cavitys
111 water filling ports, 112 aspirating holes
113 water outlets, 120 air extractors
13,121 vacuum pumps, 14,122 CD-ROM drive motors
12,130 proofing units, 131 dissolved oxygen meters
140 controllers, 141 frequency transformers
150 spraying guns, 160 scrubbers
170 power supplys
Embodiment
Fig. 2 and Fig. 3 are respectively the synoptic diagram and the flow chart of steps of the pure water supply system and the degas method thereof of control oxygen dissolution amount of the present invention.
Pure water supply system 100 of the present invention comprises: cavity 110, air extractor 120, proofing unit 130 and controller 140.Cavity 110 inside have accommodation space, and are respectively arranged with water filling port 111 and aspirating hole 112 at the top of cavity 110, are provided with water outlet 113 in the bottom of cavity 110.Air extractor 120 comprises vacuum pump 121 and CD-ROM drive motor 122, and vacuum pump 121 is connected in aspirating hole 112, and CD-ROM drive motor 122 is electrically connected between vacuum pump 121 and the controller 140.Proofing unit 130 is arranged at water outlet 113 positions of cavity 110, controller 140 has frequency transformer 141, and the power supply 170 that is electrically connected at proofing unit 130 and electrically connects with CD-ROM drive motor, frequency transformer 141 is in order to adjust electric voltage frequency and the size of current that power supply 170 exports CD-ROM drive motor 122 to.
In addition, the present invention also includes spraying gun 150 and scrubber (scrubber) 160.Spraying gun 150 is arranged at water filling port 111 places, and scrubber 160 is arranged between water filling port 111 and the water outlet 113.
Please continue to consult Fig. 2 and Fig. 3, pure water Automatic water-filling mouth 111 continues to inject in the accommodation space of cavity 110, and pure water flows in the cavity 110 with even spray pattern via the atomizing of spraying gun 150, volatilize fast so that be dissolved in the interior gas of pure water, and pass through scrubber 160 to increase the pure water contact area.Simultaneously, the CD-ROM drive motor 122 of air extractor 120 drives vacuum pump 121 and moves with an initial operation power, air in the accommodation space is discharged from aspirating hole 112,, the oxygen that is dissolved in the pure water is separated out and reduce dissolved oxygen amount (step 200) in the pure water to reduce the pressure in the cavity 110.The oxygen that is dissolved in pure water described in the present invention, its meltage is not about between the 7ppm to 8ppm before not removing, and can't directly use this kind pure water on the technology.
Then, pure water in the cavity 110 leaves accommodation space (step 210) by water outlet 113, the 130 pairs of pure water of proofing unit that are arranged at water outlet 113 places continue sampling, utilize dissolved oxygen meter 131 to detect the gas dissolving amount (being the oxygen dissolution amount of pure water) of sampling pure water, and will be sent in the controller 140 (step 220) corresponding to the detection signal that records numerical value.The standard value that frequency transformer 141 is default according to controller 140, the detection signal that relatively proofing unit 130 fed back and adjust the power supply output of power supply 170 accordingly is with the running power (step 230) of control air extractor 120.
When if the oxygen dissolution amount of pure water is higher than standard value, controller 140 will order vacuum pump 121 to improve the running power of bleeding; When if the oxygen dissolution amount of pure water is lower than standard value, controller 140 will order vacuum pump 121 to reduce the running power of bleeding, and maintain the quantitative of 100ppb with the oxygen dissolution amount with pure water, satisfy the service requirements of pure water.Yet controller 140 default standard values of the present invention can be adjusted according to the actual requirements, meet the use standard with the oxygen dissolution amount of controlling pure water, do not exceed with data disclosed in this invention.
The pure water supply system and the degas method thereof of control oxygen dissolution amount of the present invention, can control the running power of air extractor by the feedback of detection signal accordingly, air extractor is adjusted electric voltage frequency and size of current according to the oxygen dissolution amount of pure water, not only the oxygen dissolution amount of pure water can be controlled in the claimed range, simultaneously also reduce the spent electric energy of air extractor, reach the purpose of saving the energy and reducing manufacturing cost.
Though embodiments of the invention openly as above; right described embodiment is not in order to limit the present invention; those skilled in the art are not in breaking away from design of the present invention and scope; can make some according to shape of the present invention, structure, feature and design and change, therefore scope of patent protection fibrous root of the present invention is as the criterion according to the scope that this specification sheets appending claims is defined.
Claims (10)
1. a pure water supply system is dissolved in the oxygen of pure water in order to removal, and controls the oxygen dissolution amount of described pure water, and this system comprises:
One cavity has an accommodation space, and described pure water injects this accommodation space;
One air extractor is connected on this cavity, separates out to reduce the pressure of this accommodation space, to make the oxygen that is dissolved in the described pure water in order to the gas that extracts this accommodation space;
One proofing unit is connected in this cavity, in order to detecting the oxygen dissolution amount of described pure water, and sends a pair of detection signal that should the oxygen dissolution amount; And
One controller is electrically connected between this proofing unit and this air extractor, and controls the running power of this air extractor according to this detection signal.
2. pure water supply system as claimed in claim 1, wherein this cavity has:
One water filling port is arranged on this cavity, in order to described pure water is injected this accommodation space;
One aspirating hole is arranged on the cavity and with this air extractor and is connected, and the gas in this accommodation space can be extracted out from this aspirating hole; And
One water outlet is arranged at this cavity bottom, uses for described pure water and leaves this accommodation space.
3. pure water supply system as claimed in claim 2 also comprises: a spraying gun is arranged at this water filling port position.
4. pure water supply system as claimed in claim 2 also comprises: a scrubber, be arranged between this water filling port and this water outlet, and described pure water is by this scrubber.
5. pure water supply system as claimed in claim 1, wherein this air extractor comprises:
One vacuum pump is connected in the accommodation space of this cavity; And
One CD-ROM drive motor is electrically connected between this controller and this vacuum pump, and this CD-ROM drive motor is subjected to the control of this controller and is used to drive this vacuum pump.
6. pure water supply system as claimed in claim 5, wherein this controller comprises: a frequency transformer, it connects this CD-ROM drive motor.
7. pure water supply system as claimed in claim 1, wherein this proofing unit comprises: a dissolved oxygen meter, it is connected in this cavity.
8. a degas method is dissolved in the gas of pure water in order to removal, and controls the gas dissolving amount of described pure water, and this method comprises the following steps:
Described pure water is injected into an accommodation space, and this accommodation space is bled, the gas that is dissolved in the described pure water is separated out with an initial operation power;
Make described pure water leave this accommodation space;
Detect the gas dissolving amount of described pure water, and send a pair of detection signal that should the gas dissolving amount; And
Control the running power of this air extractor according to this detection signal.
9. degas method as claimed in claim 8, wherein this gas dissolving amount is the oxygen dissolution amount.
10. degas method as claimed in claim 8 also comprises: an atomization steps makes the pure water atomizing of injecting this accommodation space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101995055A CN101186349A (en) | 2007-12-10 | 2007-12-10 | Pure water supplying system capable of controlling oxygen dissolving content and degassing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101995055A CN101186349A (en) | 2007-12-10 | 2007-12-10 | Pure water supplying system capable of controlling oxygen dissolving content and degassing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101186349A true CN101186349A (en) | 2008-05-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101995055A Pending CN101186349A (en) | 2007-12-10 | 2007-12-10 | Pure water supplying system capable of controlling oxygen dissolving content and degassing method thereof |
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| CN (1) | CN101186349A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106115831A (en) * | 2016-06-30 | 2016-11-16 | 东软安德医疗科技有限公司 | A kind of pure water feedway |
| CN110568809A (en) * | 2018-06-05 | 2019-12-13 | 株式会社荏原制作所 | Control device, control system, control method, recording medium, and machine learning device |
-
2007
- 2007-12-10 CN CNA2007101995055A patent/CN101186349A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106115831A (en) * | 2016-06-30 | 2016-11-16 | 东软安德医疗科技有限公司 | A kind of pure water feedway |
| CN110568809A (en) * | 2018-06-05 | 2019-12-13 | 株式会社荏原制作所 | Control device, control system, control method, recording medium, and machine learning device |
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Open date: 20080528 |