CN101164138A - Cartesian robot cluster tool architecture - Google Patents

Cartesian robot cluster tool architecture Download PDF

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Publication number
CN101164138A
CN101164138A CNA2006800133558A CN200680013355A CN101164138A CN 101164138 A CN101164138 A CN 101164138A CN A2006800133558 A CNA2006800133558 A CN A2006800133558A CN 200680013355 A CN200680013355 A CN 200680013355A CN 101164138 A CN101164138 A CN 101164138A
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China
Prior art keywords
mechanical arm
base material
assembly
arm assembly
vertical
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Granted
Application number
CNA2006800133558A
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Chinese (zh)
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CN101164138B (en
Inventor
M·利斯
J·胡金斯
C·卡尔森
W·T·威弗
R·劳伦斯
E·英格哈特
D·C·鲁泽克
D·塞法缇
M·库查
K·范凯特
V·霍斯金
V·沙阿
S·洪乔姆
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Applied Materials Inc
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Applied Materials Inc
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Priority claimed from US11/315,778 external-priority patent/US20060182535A1/en
Priority claimed from US11/315,984 external-priority patent/US7651306B2/en
Priority claimed from US11/315,873 external-priority patent/US7374391B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN101164138A publication Critical patent/CN101164138A/en
Application granted granted Critical
Publication of CN101164138B publication Critical patent/CN101164138B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

A method and apparatus for processing substrates using a multi-chamber processing system that has an increased throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in vertical and horizontal directions, to access the various processing chambers retained in the processing racks. In one embodiment, a robot blade is adapted to restrain a substrate so that the accelerations experienced by the substrate during a transferring process will not cause the substrate position to change on the robot blade.

Description

Cartesian robot cluster tool architecture
Technical field
Embodiments of the invention generally relate to an integrated process system, its contain can a plurality of base materials of Synchronous Processing a plurality of processing procedures station and mechanical arm.
Background technology
The processing procedure that forms electronic component is normally finished in the multi-cavity chamber process system of the ability that is having continuous processing base material (for example semiconductor wafer) under the in check processing environment (for example, troop instrument).The typical case is used for the instrument of deposition (i.e. coating) and development photoresist and is commonly referred to as the automation photoresistance and is coated with and developer tool (track lithography tool), or be used for carrying out semiconductor cleaning processing procedure, be commonly referred to as wet type/burnisher, typical cluster tool comprises the body frame structure that holds at least one base material transfer robot, this mechanical arm one wafer case/wafer cassette erecting device with a plurality of process chambers that this body frame structure is connected between transmit base material.But cluster tool normally can handle base material through use with playback system under an in check processing environment.An environment that is controlled has many benefits, is included in during the transmission and in the pollution of finishing various substrate process step minimization substrate surfaces.Under a controlled environment, handle thereby can reduce generation of defects and improve the element qualification rate.
The validity that one base material is made processing procedure normally by two relevant and important factor weigh, promptly element qualification rate and cost of carry (cost of ownership, CoO).These factors are important, because it directly influences the production cost of an electronic component, thereby have influence on the market competitiveness of an element manufacturer.CoO, it is subjected to multiple factor affecting, is subjected to the influence of system and chamber production capacity significantly, the base material quantity of promptly per hour utilizing expection processing procedure routine processes of letter speech.The processing procedure program is commonly defined as the element manufacturing step finished in one or more process chamber in this cluster tool or the program of process recipe step.The processing procedure program generally can contain some base materials (or wafer) electronic component makes fabrication steps.Under the effort that reduces CoO, electronic component manufacturer spends many times trial optimization processing procedure programs and chamber processing procedure time, to be issued to possible maximum base material production capacity in cluster tool structure and the restriction of chamber processing procedure time.In coating of automation photoresistance and development formula cluster tool, because the chamber processing procedure time is short (for example, can finish this processing procedure in about 1 minute), but the fabrication steps quantity that need finish a typical processes program is a lot, is to expend transmitting described base material between each process chamber so be used for finishing the most of the time of this processing procedure program.One typical automation photoresistance coating and developing manufacture process program generally comprise following steps: the deposition uniform photoresistance of one layer or more (or impedance) layer on a substrate surface, then this base material is sent out stepper or scanning tools that this cluster tool to one separates, to adjust electromagnetic radiation this substrate surface of patterning that gets off, this patterned light blockage layer of then developing by this photoresist layer being exposed to a photoresistance.If the base material production capacity in the cluster tool is not subjected to the mechanical arm restriction, then the longest process recipe step can limit the production capacity of this processing procedure program.This can not occur in coating of automation photoresistance and the developing manufacture process program, because it has short processing procedure time and a large amount of fabrication steps usually.The canonical system production capacity of known manufacturing processing procedure, the automation photoresistance of for example carrying out a typical processes is coated with and developer tool, generally is per hour between the 100-120 plate substrate.
Other key factors during CoO calculates are system dependability and System production time.These factors are very important for the rentability and/or the validity of cluster tool, and are long more because system can't handle the time of base material, and the money of user's loss is just many more, and Zhao Yin is in the forfeiture of handling the chance of base material in cluster tool.Therefore, cluster tool user and manufacturer spend many times and attempt to research and develop the reliable processing procedure of the operating time that has increase, reliably hardware and system reliably.
Industry is for dwindling the semiconductor element size to improve the element processing speed and to reduce the living hot effort of element and reduced the tolerance of industry for process variation on the contrary.In order to minimize process variation, a key factor of coating of automation photoresistance and developing manufacture process program is that guarantee to pass through each base material of cluster tool all has identical " wafer history (wafer history) ".The wafer history of base material all is controlled to guarantee all elements manufacturing process variables that may influence element efficiency afterwards, and all base materials in the same batch is always handled in the same manner normally by processing procedure engineer monitoring and control.For guaranteeing that each base material all has identical " wafer history ", need make each base material stand identical repeatably substrate process step (for example cooling processing procedure of copying processing procedure, unanimity firmly of Yi Zhi coating process, unanimity or the like), and the time of each base material between each fabrication steps is identical.It can be non-sensitive for process recipe variable and the variation of the time between step of filling a prescription that little shadow formula element is made processing procedure, and it directly influences process variation, and finally has influence on element efficiency.Therefore, need a kind ofly can carry out cluster tool and the support equipment that minimizes the time-varying processing procedure program between process variation and fabrication steps.In addition, also need to carry out giving evenly and process results repeatably, the element that reaches expection base material production capacity is simultaneously made the cluster tool and the support equipment of processing procedure.
Therefore, have the needs for a kind of system, a kind of method and a kind of equipment, it can be handled a base material and make it meet desired element efficiency target and increase system's production capacity, therefore reduces processing procedure program CoO.
Summary of the invention
The present invention generally provides a kind of cluster tool of processing one base material, comprise one first processing procedure frame, contain one first group of process chamber, it has the two or more substrate process chambers that vertically stack, and one second group of process chamber, it has the two or more substrate process chambers that vertically stack, wherein two or more substrate process chambers of this first and second group have first side of arranging along a first direction, one first mechanical arm assembly, it is suitable for transmitting the substrate process chamber of a base material to this first processing procedure frame, wherein this first mechanical arm assembly comprises one first mechanical arm, it has the mechanical arm blade that has a base material receiving surface, wherein this first mechanical arm is to be suitable for a base material is arranged on one or more aspect that is contained in usually in one first plane, wherein this first plane and this first direction and parallel with the vertical second direction of this first direction, one first moving assembly, have and be suitable for this first mechanical arm is arranged on usually actuator assemblies on the third direction vertical with this first plane, and one second moving assembly, have and be suitable for this first mechanical arm is arranged on usually actuator assemblies on the direction parallel with this first direction, an and transit area, wherein hold this first mechanical arm, wherein when this base material is set on the base material receiving surface of this mechanical arm blade, the width of this transit area parallel with this second direction and than the substrate sizes of this second direction about 5% to about 50%.
Embodiments of the invention further provide a kind of cluster tool of processing one base material, comprise one first processing procedure frame, it contains two or more group with two or more substrate process chambers of vertically stacking, wherein these two or more substrate process chambers of two or more group have first side of arranging along a first direction, to pass through the described substrate process chamber of access therebetween, one second processing procedure frame, it contains two or more group with two or more substrate process chambers of vertically stacking, wherein these two or more substrate process chambers of two or more group have first side of arranging along a first direction, to pass through the described substrate process chamber of access therebetween, one first mechanical arm assembly, be arranged between this first processing procedure frame and this second processing procedure frame, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this first side, wherein this first mechanical arm assembly comprises a mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, have and be suitable for this mechanical arm is arranged on usually motor on the direction parallel with this first direction, one second mechanical arm assembly, be arranged between this first processing procedure frame and this second processing procedure frame, it is to be suitable for a base material is sent to substrate process chamber this second processing procedure frame from this first side, wherein this second mechanical arm assembly comprises a mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, have and be suitable for this mechanical arm is arranged on usually motor on the direction parallel with this first direction, an and three-mechanical arm assembly, be arranged between this first processing procedure frame and this second processing procedure frame, it is to be suitable for a base material is sent to the substrate process chamber this first processing procedure frame or is sent to this second processing procedure frame from this first side from this first side, wherein this three-mechanical arm assembly comprises a mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, has to be suitable for this mechanical arm is arranged on motor on parallel with this first direction usually direction.
The present invention further provides a kind of cluster tool of processing one base material, comprise one first processing procedure frame, it contains two or more group with two or more substrate process chambers that vertically stack, wherein these two or more substrate process chambers that vertically stack of two or more group have first side of arranging along a first direction, to pass through the described substrate process chamber of access therebetween, and second side of arranging along a second direction, to pass through the described substrate process chamber of access therebetween, one first mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this first side, wherein this first mechanical arm assembly comprises one first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this first mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, have and be suitable for this first mechanical arm is arranged on usually motor on the direction parallel with this first direction, and one second mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this second side, wherein this second mechanical arm assembly comprises one second mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this second mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, has to be suitable for this second mechanical arm is arranged on motor on parallel with this second direction usually direction.
Embodiments of the invention further provide a kind of cluster tool of processing one base material, comprise and be arranged on two or more substrate process chambers of trooping in the instrument, one first mechanical arm assembly, it is suitable for a base material is sent to this two or more substrate process chambers, wherein this first mechanical arm assembly comprises one first mechanical arm, it is suitable for a base material is arranged on the first direction, wherein this first mechanical arm comprises a mechanical arm blade, have one first end and a base material receiving surface, wherein this base material receiving surface is suitable for holding and transmits a base material, one first coupling member, it has one first pivot point and one second pivot point, one motor, be rotatably connected with this first coupling member at this second pivot point place, one first gear (gear), be connected with first end of this mechanical arm blade and be rotatably connected with this first coupling member at this first pivot point place, and one second gear, be rotatably connected with this first gear and with concentric alignment of second pivot point of this first coupling member, wherein the gear of this this first gear of second gear mesh ratio was between about 3: 1 to about 4: 3, one first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction, and one second moving assembly, have and be suitable for this first mechanical arm is arranged on motor on vertical with this second direction usually third direction.
Embodiments of the invention further provide a kind of cluster tool of processing one base material, comprise one first processing procedure frame, it contains two or more group with two or more substrate process chambers that vertically stack, wherein these two or more substrate process chambers that vertically stack of two or more group have first side of arranging along a first direction, to pass through the described substrate process chamber of access therebetween, and second side of arranging along a second direction, to pass through the described substrate process chamber of access therebetween, one first mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this first side, wherein this first mechanical arm assembly comprises one first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this first mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, have and be suitable for this first mechanical arm is arranged on usually motor on the direction parallel with this first direction, and one second mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this second side, wherein this second mechanical arm assembly comprises one second mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane, one vertical moving assembly, have and be suitable for this second mechanical arm is arranged on usually motor on the direction parallel with this vertical direction, and one move horizontally assembly, has to be suitable for this second mechanical arm is arranged on motor on parallel with this second direction usually direction.
Embodiments of the invention further provide a kind of cluster tool of processing one base material, comprise and be arranged on two or more substrate process chambers of trooping in the instrument, one first mechanical arm assembly, it is suitable for a base material is sent to this two or more substrate process chambers, wherein this first mechanical arm assembly comprises one first mechanical arm, it is suitable for a base material is arranged on the first direction, wherein this first mechanical arm comprises a mechanical arm blade, have one first end and a base material receiving surface, wherein this base material receiving surface is suitable for holding and transmits a base material, one first coupling member, it has one first pivot point and one second pivot point, one motor, be rotatably connected with this first coupling member at this second pivot point place, one first gear, be connected with first end of this mechanical arm blade and be rotatably connected with this first coupling member at this first pivot point place, and one second gear, be rotatably connected with this first gear and with concentric alignment of second pivot point of this first coupling member, wherein the gear of this this first gear of second gear mesh ratio was between about 3: 1 to about 4: 3, one first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction, and one second moving assembly, have and be suitable for this first mechanical arm is arranged on motor on vertical with this second direction usually third direction.
Embodiments of the invention further provide a kind of trooping one to transmit the equipment of a base material in the instrument, comprise one first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in one first plane, one vertical moving assembly, comprise a slide track component, it contains the block (block) that is connected with the linear track of a perpendicular positioning, one supporting bracket, be connected with this first mechanical arm with this block, an and actuator, it is suitable for along this linear track this supporting bracket being vertically set on the upright position, and one move horizontally assembly, it is to be connected with this vertical moving assembly, and has a horizontal actuator, and it is suitable for being provided with in the horizontal direction this first mechanical arm and this vertical moving assembly.
Embodiments of the invention further provide a kind of trooping one to transmit the equipment of a base material in the instrument, comprise one first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in one first plane, one vertical moving assembly, comprise an actuator assemblies, it is suitable for vertically being provided with this first mechanical arm, wherein this actuator assemblies further comprises a vertical actuator, it is suitable for vertically being provided with this first mechanical arm, an and vertical slide rail, it is suitable for guiding this first mechanical arm when this vertical actuator is transferred this first mechanical arm, one seals, has the sidewall that one or more forms an interior zone, this interior zone is the spare part that is selected from vertical actuator and this vertical slide rail around at least one, an and fan, with this interior zone fluid communication, it is to be suitable for producing in this seals negative pressure, and one move horizontally assembly, have a horizontal actuator and a horizontal slide rail member, it is to be suitable on parallel with first side of this first processing procedure frame usually direction this first mechanical arm being set.
Embodiments of the invention further provide a kind of trooping one to transmit the equipment of a base material in the instrument, comprise one first mechanical arm assembly, it is suitable for a base material is arranged on the first direction, wherein this first mechanical arm assembly comprises a mechanical arm blade, have one first end and a base material receiving surface, one first coupling member, it has one first pivot point and one second pivot point, one first gear, be connected with first end of this mechanical arm blade and be rotatably connected with this first coupling member at this first pivot point place, one second gear, be rotatably connected with this first gear and align with second pivot point of this first coupling member, and one first motor, it is to be rotatably connected with this first coupling member, wherein this first motor is suitable for by rotating this first coupling member with respect to this second gear and first gear is provided with this base material receiving surface, one first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction, and one second moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this second direction usually third direction.
Embodiments of the invention further provide a kind of trooping one to transmit the equipment of a base material in the instrument, comprise one first mechanical arm assembly, its be suitable for a base material be arranged on be contained in usually in one first plane on one or more aspect of an arc, wherein this first mechanical arm assembly comprises a mechanical arm blade, have one first end and a base material receiving surface, an and motor, it is rotatably connected with first end of this mechanical arm blade, one first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first plane usually second direction, wherein this first moving assembly comprises an actuator assemblies, it is suitable for vertically being provided with this first mechanical arm, wherein this actuator assemblies further comprises a vertical actuator, it is suitable for vertically being provided with this first mechanical arm, an and vertical slide rail, it is suitable for guiding this first mechanical arm when this vertical actuator is transferred this first mechanical arm, one seals, has the sidewall that one or more forms an interior zone, this interior zone is the spare part that is selected from vertical actuator and this vertical slide rail around at least one, an and fan, with this interior zone fluid communication, it is to be suitable for producing in this seals negative pressure, and one second moving assembly, have one second actuator, it is to be suitable for this first mechanical arm is arranged on vertical with this second direction usually third direction.
Embodiments of the invention further provide a kind of trooping one to transmit the equipment of a base material in the instrument, comprise one first mechanical arm assembly, it is suitable for a base material is arranged on the first direction, wherein this first mechanical arm assembly comprises a mechanical arm blade, have one first end and a base material receiving surface, one first gear, be connected with first end of this mechanical arm blade, one second gear, be rotatably connected with this first gear, and one first motor, be rotatably connected with this first gear, and one second motor, be rotatably connected with this second gear, wherein this second motor is suitable for rotating this second gear with respect to this first gear, to create variable gear ratio, and one first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction.
Embodiments of the invention further provide a kind of equipment of transmission one base material, comprise a pedestal, has a substrate support surface, one reactive means, be arranged on this pedestal, a contact member and is suitable for a base material is connected towards the actuator that this reactive means promotes, and a braking element, it when this reactive means promote is suitable for prevailingly suppress the moving of this contact member through being provided with this base material at this contact member.
Embodiments of the invention further provide a kind of equipment of transmission one base material, comprise a pedestal, has a stayed surface, one reactive means, be arranged on this pedestal, one actuator, be connected with this pedestal, one contact member, be connected with this actuator, wherein this actuator is suitable for this contact member towards being arranged on this stayed surface, and the edge that is supported the base material at an edge by this reactive means promotes a braking element assembly, comprise a braking element, and a brake actuation member, wherein this brake actuation member is suitable for this braking element is promoted towards this contact member, suppresses the restraint that this contact member moves prevailingly to create during a base material transmits.
Embodiments of the invention further provide a kind of equipment of transmission one base material, comprise a pedestal, has a stayed surface, one reactive means, be arranged on this pedestal, one contact member assembly, comprise an actuator, and a contact member, have a base material contact surface and and comply with member (compliantmember), it is arranged between this contact surface and this actuator, wherein this actuator is to be suitable for this contact surface is promoted towards the base material that leans on this reactive means surface setting, and a braking element assembly, comprises a braking element, an and brake actuation member, be suitable for this braking element is promoted towards this contact member, with moving of this contact member during suppressing a base material and transmitting, and an inductor, be connected with this contact member, wherein this inductor is suitable for responding to the position of this contact surface.
Embodiments of the invention further provide a kind of equipment of transmission one base material, comprise a mechanical arm assembly, contain one first mechanical arm, it is suitable for transmitting the base material that is arranged on the mechanical arm blade on the first direction, one first moving assembly, has an actuator, it is suitable for this first mechanical arm is arranged on the second direction, and one second moving assembly, be connected with this first moving assembly and have one second actuator, it is suitable for this first mechanical arm and this first moving assembly are arranged on vertical with this second direction usually third direction, an and base material grabbing device, be connected with this mechanical arm blade, wherein this base material grabbing device is suitable for supporting a base material, and contain a reactive means, be arranged on this mechanical arm blade, one actuator, be connected with this mechanical arm blade, one contact member, be connected with this actuator, wherein this actuator is suitable for by this contact member is limited a base material towards the edge promotion that is arranged on the base material between this contact member and this reactive means, an and braking element assembly, comprise a braking element, an and brake actuation member, be suitable for this braking element is promoted towards this contact member, suppress moving of this contact member with during transmitting at a base material.
Embodiments of the invention further provide a kind of method of transmission one base material, comprise a base material is arranged on the substrate support, between the base material contact member and a reactive means that are arranged on this substrate support, utilize an actuator to produce the base material grasping force, this actuator promotes this base material contact member towards this base material, and this base material promoted towards this reactive means, and producing a restraint, it is suitable for utilizing during transmitting a base material brake assemblies to suppress moving of this base material contact member.
Embodiments of the invention further provide a kind of method of transmission one base material, comprise a base material is arranged on the substrate support, between the base material contact member and a reactive means that are arranged on this substrate support, the actuator that will have a connection piece is connected with this base material contact member, and this connector is connected this actuator with this base material contact member, utilize an actuator to apply grasping force to this base material, this actuator promotes this base material contact member towards this base material, and this base material promoted towards this reactive means, storing energy in one complies with in the member, it is arranged between this base material contact member and this connector, after applying this grasping force, suppress moving of this connector, minimizing the amount of variability that transmits this grasping force during the base material, and respond to moving of this base material because be stored in moving of this minimizing of complying with the energy in the member by this base material contact surface of induction.
Embodiments of the invention further provide a kind of method of transmission one base material, comprising the base material that will be arranged in one first process chamber is received on the mechanical arm substrate support, the step that wherein receives this base material comprises a base material is arranged on this mechanical arm substrate support, between the base material contact member and a reactive means that are arranged on this mechanical arm substrate support, utilize an actuator to produce the base material grasping force, this actuator promotes this base material contact member towards this base material, and this base material promoted towards this reactive means, and a brake assemblies is set, suppress the restraint that this base material contact member moves during transmitting a base material, to produce, and utilize one first mechanical arm assembly that this base material and this mechanical arm substrate support are sent to a position in one second process chamber from the position in this first process chamber, this second process chamber is to be arranged on this first process chamber along a first direction one segment distance place is arranged, this first mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, wherein this second direction is vertical with this first direction usually.
Embodiments of the invention further provide a kind of trooping one to transmit the method for a base material in the instrument, comprise and utilize one first mechanical arm assembly one base material to be sent to the first process chamber array that is provided with along a first direction, this first mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, wherein this second direction is vertical with this first direction usually, utilize one second mechanical arm assembly one base material to be sent to the second process chamber array that is provided with along this first direction, this second mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of this second direction, and utilize a three-mechanical arm assembly one base material to be sent to first and second process chamber array that is provided with along this first direction, this three-mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and is arranged on the desired location of this second direction.
Embodiments of the invention further provide a kind of trooping one to transmit the method for a base material in the instrument, comprise and utilize one first mechanical arm assembly one base material to be sent to the first process chamber array that is provided with along a first direction from one first saturating cavity chamber, this first mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, wherein this second direction is vertical with this first direction usually, utilize one second mechanical arm assembly that one base material is sent to this first process chamber array from this first saturating cavity chamber, this second mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, and utilize the front end robot arm be arranged in the front end assemblies that one base material is sent to this first saturating cavity chamber from a base material casket, wherein this front end assemblies in fact with contain this first process chamber array, the transit area of this first mechanical arm assembly and this second mechanical arm assembly adjoins.
Description of drawings
The mode of feature that therefore can detail knowledge the invention described above promptly to the clearer and more definite description of the present invention, was summarized tout court in front, can obtain by reference example, and wherein some is shown in the drawings.But it should be noted that accompanying drawing only illustrates general embodiment of the present invention, therefore should not be considered to restriction, because the present invention can allow other equivalent embodiment to its scope.
1A figure is the isometric view that an embodiment of cluster tool of the present invention is shown;
1B figure is the plane graph according to the process system shown in the 1A figure of the present invention;
1C figure is the end view that illustrates according to an embodiment of the first processing procedure frame 60 of the present invention;
1D figure is the end view that illustrates according to an embodiment of the second processing procedure frame 80 of the present invention;
1E figure is the plane graph according to the process system shown in the 1B figure of the present invention;
1F illustrate can with an embodiment of the processing procedure program that contains some process recipe steps of each embodiment of cluster tool described herein and usefulness;
1G illustrates the plane graph of the process system shown in the 1B figure, and it illustrates the base material transfer path that passes this cluster tool of the processing procedure program of following shown in the 1F figure;
2A figure is the plane graph according to process system of the present invention;
2B figure is the plane graph according to process system of the present invention shown in the 2A figure;
2C illustrates the plane graph of the process system shown in the 2B figure, and it illustrates the base material transfer path that passes this cluster tool of the processing procedure program of following shown in the 1F figure;
3A figure is the plane graph according to process system of the present invention;
3B illustrates the plane graph of the process system shown in the 3A figure, and it illustrates the base material transfer path that passes this cluster tool of the processing procedure program of following shown in the 1F figure;
4A figure is the plane graph according to process system of the present invention;
4B illustrates the plane graph of the process system shown in the 4A figure, and it illustrates the base material transfer path that passes this cluster tool of the processing procedure program of following shown in the 1F figure;
5A figure is the plane graph according to process system of the present invention;
5B illustrates the plane graph of the process system shown in the 5A figure, and it illustrates the base material transfer path that passes this cluster tool of the processing procedure program of following shown in the 1F figure;
6A figure is the plane graph according to process system of the present invention;
6B illustrates the plane graph of the process system shown in the 6A figure, and it illustrates two possible base material transfer paths that pass this cluster tool of the processing procedure program of following shown in the 1F figure;
6C figure is the plane graph according to process system of the present invention;
6D illustrates the plane graph of the process system shown in the 6C figure, and it illustrates two possible base material transfer paths that pass this cluster tool of the processing procedure program of following shown in the 1F figure;
7A figure is the end view according to an embodiment of heat exchanger chambers of the present invention;
7B figure is the plane graph according to the process system shown in the 1B figure of the present invention;
8A figure is the isometric view that illustrates according to another embodiment of the cluster tool shown in the 1A figure of the present invention, and it has attached protective cover;
8B figure is the profile according to the cluster tool shown in the 8A figure of the present invention;
8C figure is the profile according to a configuration of the present invention;
9A figure is the isometric view that an embodiment of mechanical arm is shown, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
10A figure is the isometric view that illustrates according to an embodiment of the mechanical arm nextport hardware component NextPort with single mechanical arm assembly of the present invention;
10B figure is the isometric view that illustrates according to an embodiment of the mechanical arm nextport hardware component NextPort with two-shipper tool arm component of the present invention;
10C figure is the profile according to an embodiment of the mechanical arm nextport hardware component NextPort shown in the 10A figure of the present invention;
10D figure is the profile according to an embodiment of mechanical arm nextport hardware component NextPort of the present invention;
10E figure is the profile according to an embodiment of the mechanical arm nextport hardware component NextPort shown in the 10A figure of the present invention;
11A figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11B illustrates the some possible paths according to this base material central point of the present invention, when it is transmitted when entering a process chamber;
11C figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11D figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11E figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11F figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11G figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11H figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11I figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention, the some positions when this mechanical arm blade being shown transmitting in base material to a process chamber;
11J figure is the plane graph according to an embodiment of mechanical arm assembly of the present invention;
11K figure is arranged near the plane graph of the known SCARA mechanical arm of the mechanical arm assembly the processing procedure frame;
12A figure is according to the profile that moves horizontally assembly shown in the 9A figure of the present invention;
12B figure is according to the profile that moves horizontally assembly shown in the 9A figure of the present invention;
12C figure is according to the profile that moves horizontally assembly shown in the 9A figure of the present invention;
13A figure is the profile according to the vertical moving assembly shown in the 9A figure of the present invention;
13B illustrates the isometric view of an embodiment of the mechanical arm shown in the 13A figure, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
14A figure is the isometric view that an embodiment of mechanical arm is shown, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
15A figure is the isometric view that an embodiment of mechanical arm is shown, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
16A illustrates the plane graph of an embodiment of mechanical arm blade assembly, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
16B illustrates the sectional side view of an embodiment of the mechanical arm blade assembly shown in the 16A figure, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
16C illustrates the plane graph of an embodiment of mechanical arm blade assembly, and it can be suitable for transmitting base material in each embodiment of this cluster tool;
16D illustrates the plane graph of an embodiment of mechanical arm blade assembly, and it can be suitable for transmitting base material in each embodiment of this cluster tool.
The main element symbol description
5 outside modules
9,9A, 9B, 9C, 9D, 9E, 9F channel position
10 cluster tool 10A cluster tool pedestals
10B slit 11 mechanical arm assemblies
The 11A first mechanical arm assembly 11B second mechanical arm assembly
The 4th mechanical arm assembly of 11C three-mechanical arm assembly 11D
11E the 5th mechanical arm assembly 11F the 6th mechanical arm assembly
11G the 7th mechanical arm assembly 11H the 8th mechanical arm assembly
15 front end robot arm component 15A move horizontally assembly
15B mechanical arm 15C mechanical arm blade
24 front end module, 25 central module
40 rear robot arm component 40A pedestals
40B slide track component 40C supporting seat
40E arm/blade 45 microscler mount pads
60 first processing procedure frame 60A, 60B side
80 second processing procedure frame 80A, 80B side
85 mechanical arm nextport hardware component NextPorts
86,86A, 86B transfer robot assembly
87 mechanical arm blade 87A, 87B blade
90 move horizontally under the assembly 90A and move horizontally assembly
Move horizontally assembly 91 transit areas on the 90B
95 vertical moving assemblies, 101 system controllers
105,105D wafer case assembly 106 wafer cassette
110,110A, 110B, 110C environment control assembly
111 filters, 112 filter elements
Roasting (PEB) chamber after 113 sidewalls 130 expose to the sun
160 coating machines/developing machine chamber
162 Waffer edges exposure sphere is removed (OEBR) chamber
165 support chamber
170 hexamethyldisiloxane (HMDS) process chamber
180 cooling chamber, 190 baking chambers
305 pairs of bars link mechanical arm 306 single shafts and link
310 first link 312 drive systems
313 seal 320 motors
321 supporting brackets 352 the 4th pulley
353 bearing axis 354 the 3rd pulley
354A bearing 355 first pulley systems
356 second pulley 356A bearings
358 first pulleys, 359 belts
The 532A base material holds spare part 533 heat exchanger chambers
534 process chambers, 536 outside process systems
560 vertical actuator assemblies 570 vertical support
571 driving belts, 572 movable blocks
573 drive tab, 574 linear tracks
575 pulley 575A, 575B driving belt pulley
576 pulley assemblies, 577 vertical slide rail assemblies
580 fan components, 581 tubes
582 fans 584 enrich the zone
585 slits, 586 interior zones
590 seal 591 outer walls
592 seal top 593 slits
601 substrate support assemblies 602 seal
Finger piece is supported at 603 access ports 610
611 base material receiving surfaces, 800 integrated baking/cooling chamber
A1, A2, A3, A4, A5, A6, A7, A8, A9, A10 transfer path
The C6 process chamber
Embodiment
The Apparatus and method for that the present invention generally provides a kind of use multi-cavity chamber process system (for example troop instrument) to handle base material, this system has the element qualification rate performance of system dependability, the improvement of system's production capacity, the enhancing of increase, wafer process history (or wafer history) that reproducibility is higher and less floor space (footpring).In one embodiment, this cluster tool is suitable for carrying out coating of automation photoresistance and developing manufacture process, wherein a base material is with a photosensitive material through coating, be sent to one stepper/scanner then, it is exposed to this photosensitive material under the radiation of certain type, and on this photosensitive material, form pattern, remove some part of this photosensitive material in the developing manufacture process that then is to finish in this cluster tool.In another embodiment, this cluster tool is suitable for carrying out a wet type/cleaning processing procedure program, wherein carries out some base material cleaning processing procedures in this cluster tool on a base material.
1-6 illustrate can with some mechanical arms of each embodiment of the present invention and usefulness and process chamber configuration wherein some.The general two or more mechanical arms that use with parallel processing procedure collocation method configuration of each embodiment of this cluster tool 10, to transmit base material between each process chamber of (for example element 60,80 or the like) in being retained in described processing procedure frame, therefore can on described base material, carry out the processing procedure program of expecting.In one embodiment, this parallel processing procedure collocation method comprises two or more mechanical arm assemblies 11 (element 11A, 11B and the 11C of 1A and 1B figure), it is to be suitable for moving substrate on vertical (being called the z direction afterwards) and horizontal direction, horizontal direction is direction of transfer (x direction) and the direction (y direction) vertical with this direction of transfer, therefore can handle described base material in each process chamber of arranging along this direction of transfer of keeping somewhere in described processing procedure frame (for example element 60 and 80).If one advantage of this parallel processing procedure collocation method is can't operate wherein of described mechanical arm, or takes off maintenance, and this system still can utilize and be retained in these intrasystem other mechanical arms and continue to handle base material.In general, each embodiment described herein has superiority, because each row or each group substrate process chamber all has the mechanical arm of two or more services, with the production capacity that increase is provided and the system dependability of enhancing.In addition, each embodiment described herein normally is configured to minimize and control the particulate that described substrate transport mechanism produces, with element qualification rate and the base material fragment problems of the CoO that avoids influencing this cluster tool.Another advantage of this collocation method is that elasticity and module type structure allow the configurable needed process chamber of production capacity that this user requires, processing procedure frame, and the quantity of processing procedure mechanical arm of meeting of user.Can be used to carry out an embodiment who respectively implements the mechanical arm assembly 11 of aspect of the present invention though 1-6 illustrates, the mechanical arm assembly 11 of other types also can be suitable for carrying out identical base material transmission and function being set, and can not deviate from base region of the present invention.
The configuration of first cluster tool
A. System configuration
1A figure is the isometric view of an embodiment of the instrument of trooping 10, and it illustrates the of the present invention some enforcement aspects that can receive benefits through use.1A illustrates an embodiment of this cluster tool 10, and it contains and is suitable for three mechanical arms and the outside module 5 that access vertically stacks each process chamber in one first processing procedure frame 60 and one second processing procedure frame 80.Implementing in the aspect one, when finishing a micro-photographing process program with this cluster tool 10, with this outside module 5 that this Background Region 45 (not illustrating at 1A) is connected, can be one stepper/scanner, carries out some extra exposed type fabrication steps.One embodiment of this cluster tool 10 shown in 1A figure, contains a front end module 24 and a central module 25.
1B figure is the plane graph of the embodiment of the cluster tool 10 shown in the 1A figure.This front end module 24 generally contains one or more a wafer case assembly 105 (for example object 105A-D) and a front end robot arm component 15 (1B figure).This one or more wafer case assembly 105, or front-open wafer box (FOUPs), generally be suitable for holding one or more can contain desire one or more base material of in this cluster tool 10, handling " W " or the wafer cassette of wafer.Implement in the aspect one, this front end module 24 also contains one or more channel position 9 (for example element 9A-C of 1B figure).
Implement in the aspect one, this central module 25 has the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C, rear robot arm component 40, the first processing procedure frame 60 and the second processing procedure frame 80.This first processing procedure frame 60 and the second processing procedure frame 80 contain various process chamber (for example coating machine/developing machine chamber, baking chamber, cooling chamber, wet-cleaning chamber or the like, it discusses (1C-D figure) in the wings), it is suitable for carrying out each fabrication steps in the substrate process program.
1C and 1D illustrate the end view of an embodiment of this first processing procedure frame 60 and the second processing procedure frame 80, when standing in when near the side of side 60A this first processing procedure frame 60 and the second processing procedure frame 80 being watched, therefore can meet with the diagram shown in the 1-6 figure.This first processing procedure frame 60 and the second processing procedure frame 80 generally contain one or the many groups of vertical process chambers that stack, and its semiconductor or flat-panel screens element that is suitable for carrying out some expections on a base material is made fabrication steps.For example, in 1C figure, this first processing procedure frame 60 has five groups, or five are listed as the process chamber that vertically stacks.In general, these elements are made fabrication steps can be included in deposition one material on this substrate surface, cleans this substrate surface, this substrate surface of etching, maybe this base material is exposed under the radiation of certain type, to cause one or more regional physics or the chemical change on this base material.In one embodiment, this first processing procedure frame 60 and the second processing procedure frame 80 contain the process chamber that is suitable for carrying out one or more micro-photographing process program step.Implement in the aspect one, processing procedure frame 60 and 80 can comprise that one or more coating machine/developing machine chamber 160, one or more cooling chamber 180, one or more baking chamber 190, one or more Waffer edge exposure sphere are removed (OEBR) chamber 162, one or more roasting (PEB) chamber 130 in back of exposing to the sun, one or more supports chamber 165, one integrated baking/cooling chamber 800 and/or one or more hexamethyldisiloxane (HMDS) process chamber 170.Can be suitable for making of the present invention one or more to implement the benefited illustration coating machine/developing machine chamber of aspect, cooling chamber, baking chamber, OEBR chamber, PEB chamber, support the special routine application case the 11/112nd of the U.S. of amortizing jointly that chamber, integrated baking/cooling chamber and/or HMDS process chamber are further filed an application on April 22nd, 2005, describe in No. 281, it extremely with under the inconsistent degree of the present invention who is advocated is not incorporated herein by quoting it in full at this.The special routine application case the 11/111st of the U.S. of amortizing jointly that can be suitable for making the example that one or more implements integrated baking/cooling chamber that aspect is benefited of the present invention further to file an application on April 11st, 2005, No. 154 and U.S. patent application case the 11/111st, describe in No. 353, it extremely with under the inconsistent degree of the present invention who is advocated is not incorporated herein by quoting it in full at this.Can be suitable on a base material, carrying out the special routine application case the 09/891st of the U.S. of amortizing jointly that one or more cleans processing procedure and can be suitable for making the example that one or more implements benefited process chamber of aspect and/or system of the present invention further to file an application in June 25 calendar year 2001, No. 849 and the U.S. patent application case the 09/945th of filing an application in August 31 calendar year 2001, describe in No. 454, it extremely with under the inconsistent degree of the present invention who is advocated is not incorporated herein by quoting it in full at this.
In one embodiment, as 1C figure those shown, wherein this cluster tool 10 is to be suitable for carrying out little shadow class processing procedure, and this first processing procedure frame 60 can have eight coating machines/developing machine chamber 160 (being denoted as CD1-8), 18 cooling chamber 180 (being denoted as C1-18), eight baking chambers 190 (being denoted as B1-8), six PEB chambers 130 (being denoted as PEB1-6), two OEBR chambers 162 (being denoted as 162) and/or six HMDS process chambers 170 (being denoted as DP1-6).In one embodiment, as 1D figure those shown, wherein this cluster tool 10 is to be suitable for carrying out little shadow class processing procedure, and this second processing procedure frame 80 can have eight coating machines/developing machine chamber 160 (being denoted as CD1-8), six integrated baking/cooling chamber 800 (being denoted as BC1-6), six HMDS process chambers 170 (being denoted as DP1-6) and/or six support chambers 165 (being denoted as S1-6).The direction of the process chamber shown in the 1C-D figure, position, type and quantity also are not intended to limit the scope of the invention, and only are intended to illustrate one embodiment of the invention.
Referring to 1B figure, in one embodiment, transmit base material between the wafer cassette 106 that this front end robot arm component 15 is suitable for (seeing element 105A-D) in being installed in a wafer case assembly 105 and this one or more channel position 9 (seeing the channel position 9A-C of 1B figure).In another embodiment, this front end robot arm component 15 is suitable for transmitting base material in wafer cassette 106 in being installed in a wafer case assembly 105 and this first processing procedure frame 60 or the one second processing procedure frame 80 in abutting connection with between one or more process chamber of this front end module 24.This front end robot arm component 15 generally contains one and moves horizontally an assembly 15A and a mechanical arm 15B, its merging can be arranged on a base material on the level and/or upright position of the expection in this front end module 24, or is arranged on the adjoining position in this central module 25.This front end robot arm component 15 is suitable for utilizing one or more mechanical arm blade 15C to transmit one or more base material, by using the instruction of transmitting from a system controller 101 (discussing in the wings).In a program, this front end robot arm component 15 be suitable for a base material from this wafer cassette 106 be sent to described channel position 9 (for example, the element 9A-C of 1B figure) wherein one.In general, one channel position is a base material build-up area, it can contain a passage process chamber, it has and a heat exchanger chambers 533 (see 7A figure) or the similar feature of a known base material casket 106, and can receive a base material from one first mechanical arm, so it can be shifted out and be provided with by one second mechanical arm.Implement in the aspect one, the passage process chamber that is installed in the channel position can be suitable for carrying out one or more interior fabrication steps of an expection processing procedure program, for example, and HMDS fabrication steps or cooling/cooling fabrication steps or base material breach alignment (notch align).Implement in the aspect one, each channel position (the element 9A-C of 1B figure) can be by each access of described central robot arm component (that is, the first mechanical arm assembly 11A, the second mechanical arm assembly 11B and three-mechanical arm assembly 11C).
Referring to 1A-B figure, this first mechanical arm assembly 11A, this second mechanical arm assembly 11B, and this three-mechanical arm assembly 11C be suitable for transmitting base material to each process chamber that is contained in this first processing procedure frame 60 and this second processing procedure frame 80.In one embodiment, in order in this cluster tool 10, to transmit base material, this first mechanical arm assembly 11A, this second mechanical arm assembly 11B, and this three-mechanical arm assembly 11C have the mechanical arm assembly 11 of similar configuration, wherein each all has at least one assembly 90, a vertical moving assembly 95, and mechanical arm nextport hardware component NextPort 85 of moving horizontally, and it is to exchange with a system controller 101.Implement in the aspect one, the side 60B of this first processing procedure frame 60, and the side 80A of this second processing procedure frame 80 is all along arranging with each the parallel direction of assembly 90 (describing in the wings) that moves horizontally of each mechanical arm assembly (i.e. the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, and three-mechanical arm assembly 11C).
This system controller 101 is suitable for controlling the position of each spare part that is used for finishing this transmission processing procedure and moves.This system controller 101 generally is that design promotes the control and the automation of whole system, and comprises a CPU (CPU) (not shown), memory body (not shown) usually and support circuit (or I/O) (not shown).This CPU is used for controlling various systemic-functions, chamber processing procedure and support hardware (for example, detector, mechanical arm, motor, gas source hardware or the like) and monitors this system and the computer processor of any kind of chamber processing procedure (for example chamber temp, processing procedure program production capacity, chamber processing procedure time, I/O signal or the like) a kind of in industry is set.This memory body is connected with this CPU, and can be one or more memory body that can obtain easily, and for example the numerical digit of random access memory (RAM), ROM (ROM), soft dish, hard disc or any other type stores, original position or far-end.Software instruction and data can be encoded and be stored in this memory body, to command this CPU.This supports that circuit also is connected with this CPU, supports this processor to utilize conventional approaches.Described support circuit can comprise soon get, power supply unit, clock pulse circuit, input/output circuitry, subsystem, and person like that.Can on a base material, carry out which kind of work by formula (or computer instruction) decision that this system controller 101 reads.Preferably, this system controller 101 can read the software of this formula, and it comprises and is used for carrying out and monitors and carry out described processing procedure program work and the relevant source code of each chamber process recipe step.
Referring to 1B figure, implement in the aspect of the present invention one, this first mechanical arm assembly 11A is suitable for from least one side, and for example this side 60B transmits base material between access and the described process chamber in this first processing procedure frame 60.Implement in the aspect one, this three-mechanical arm assembly 11C is suitable for from least one side, and for example this side 80A transmits base material between access and the described process chamber in this second processing procedure frame 80.Implement in the aspect one, this second mechanical arm assembly 11B is suitable for transmitting base material between side 60B access and the described process chamber in this first processing procedure frame 60, and transmits base material between the described process chamber of side 80A in this second processing procedure frame 80.1E illustrates the plane graph of the embodiment of the cluster tool 10 shown in the 1B figure, and wherein the mechanical arm blade 87 of this second mechanical arm assembly 11B extends into process chamber in this first processing procedure frame 60 by side 60B.With this mechanical arm blade 87 extend into a process chamber and from this process chamber withdraw this mechanical arm blade 87 ability normally by be contained in this move horizontally assembly 90, vertical moving assembly 95, and mechanical arm nextport hardware component NextPort 85 in spare part pull together move, and finish from the instruction that this system controller 101 transmits by utilization.These two or more mechanical arms ability of " overlapping " each other have superiority, for example this first mechanical arm assembly 11A and this second mechanical arm assembly 11B, or this second mechanical arm assembly 11B and this three-mechanical arm assembly 11C, because it allows that base material transmits redundant (transfer redundancy), it can improve this reliability of trooping, and also increases the base material production capacity.Mechanical arm " overlapping " generally is two or more mechanical arm accesses and/or the ability that independently transmits base material between the same process chamber of this processing procedure frame.The ability of two or more mechanical arms redundant ground access process chamber can be an important enforcement aspect, in case the locking system mechanical arm transmits bottleneck, because it allows that the low mechanical arm of utilization rate helps to limit the mechanical arm of this system's production capacity.Therefore, the base material production capacity can increase, and can allow the wafer history of base material have more reproducibility, and can improve system dependability by the live load of each mechanical arm of balance during the processing procedure program.
Implement in the aspect of the present invention one, the mechanical arm assembly of each overlapping (for example element 11A, the 11B among the 1-6 figure, 11C, 11D, 11E or the like) access simultaneously is the process chamber of level adjacent (x direction) or vertically adjacent (z direction) each other.For example, when the cluster tool collocation method shown in use 1B and the 1C figure, this first mechanical arm assembly 11A can access process chamber CD6 in this first processing procedure frame 60, and this second mechanical arm assembly 11B access simultaneously process chamber CD5, and can not colliding each other or disturb.In another example, when the cluster tool collocation method shown in use 1B and the 1D figure, this three-mechanical arm assembly 11C can access process chamber C6 in this second processing procedure frame 80, and this second mechanical arm assembly 11B access simultaneously process chamber DP6, and can not colliding each other or disturb.
Implement in the aspect one, this system controller 101 is suitable for based on the convey program of adjusting through the optimization production capacity of calculating by this base material of this cluster tool, or works arround the process chamber that can't operate.The feature of allowing its optimization production capacity of this system controller 101 is called as the logic scheduler.This logic scheduler is based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool.This logic scheduler can be suitable for inspecting the future work inventory that each mechanical arm (for example front end robot arm component 15, the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C or the like) is asked, it is to exist in the memory body of this system controller 101, distributes to the load of each mechanical arm to help balance.The use that using system controller 101 maximizes this cluster tool can improve the CoO of this cluster tool, makes the wafer history have more reproducibility, and can improve the reliability of this cluster tool.
Implement in the aspect one, this system controller 101 also is suitable for avoiding the collision between each overlapping mechanical arm, and optimization base material production capacity.Implement in the aspect one, this system controller 101 further stylize with monitoring and control all mechanical arms in this cluster tool move horizontally assembly 90, vertical moving assembly 95, and the moving of mechanical arm nextport hardware component NextPort 85, to avoid the collision between described mechanical arm, and improve system's production capacity, by allowing that all mechanical arms can move simultaneously.This so-called " CAS " can be implemented in many ways, but in general this system controller 101 during transmitting processing procedure, utilize be arranged on should (etc.) on the mechanical arm or each inductor in this cluster tool monitor the position of each mechanical arm, collide avoiding.Implement in the aspect one, this system controller is suitable for initiatively changing moving and/or route of each mechanical arm during transmitting processing procedure, to avoid collision and to minimize transfer path length.
B. The convey program example
1F illustrates the example by the substrate process program 500 of this cluster tool 10, and some of them fabrication steps (for example element 501-520) can be at transfer step A 1-A 10Each carry out after having finished.One or more fabrication steps 501-520 may carry out vacuum and/or fluid processes step on a base material, with deposition one material on this substrate surface, clean this substrate surface with this substrate surface of etching, or this base material is exposed under the radiation of certain type, to cause one or more regional physics or the chemical change on this base material.Executable typical processes example is micro-photographing process step, base material cleaning fabrication steps, CVD deposition step, ALD deposition step, electroplating process step or electroless plating fabrication steps.1G illustrates the example of the transfer step that a base material can follow, when its processing procedure program 500 of following 1F figure to describe transmits cluster tool through the cluster tool general configuration shown in 1B figure.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on this channel position 9C place, therefore can on this base material, finish this passage step 502.In one embodiment, this passage step 502 must be provided with or keep somewhere this base material, so that another mechanical arm can draw this base material from this channel position 9C.In case finish this passage step 502, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize this second mechanical arm assembly 11B to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533.In one embodiment, this fabrication steps 508 and 512 must be provided with or keep somewhere this base material, so that another mechanical arm can draw this base material from this heat exchanger chambers 533.After carrying out this fabrication steps 512, then utilize this second mechanical arm assembly 11B to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize this first mechanical arm assembly 11A to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, this first mechanical arm assembly 11A followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9A place.In one embodiment, this passage step 518 must be provided with or keep somewhere this base material, so that another mechanical arm can draw this base material from this channel position 9A.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
In one embodiment, fabrication steps 504,506,510,514 and 516 is respectively photoresistance application step, baking/cooling step, the step of exposure of carrying out in one stepper/scanner module, the back baking/cooling step that exposes to the sun, reach development step, the U.S. patent application case of amortizing jointly the 11/112nd that it is further filed an application on April 22nd, 2005, describe in No. 281, it is incorporated herein by the mode of quoting at this.This baking/cooling step and this back baking/cooling step that exposes to the sun can be carried out in single process chamber, perhaps also can utilize an internal mechanical arm (not shown) to transmit between the baking zone of an integrated baking/cooling chamber and cooling zone.Handle the example of the processing procedure program of base material in the instrument 10 though 1F-G illustrates to can be used to troop one, also can carry out complicated or more uncomplicated processing procedure program and/or convey program, and can not deviate from base region of the present invention.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out between each position in this cluster tool 10 or process chamber.
The configuration of second cluster tool
A. System configuration
2A figure is the plane graph of an embodiment of cluster tool 10, and it has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on four mechanical arm assemblies 11 between two processing procedure framves (element 60 and 80) (9-11 figure; Element 11A, 11B, 11C and the 11D of 2A figure), all are suitable for carrying out at least one enforcement aspect of the expection substrate process program of utilizing each process chamber in the described processing procedure frame.Embodiment shown in the 2A figure is identical with the configuration shown in the 1A-F figure, except adding the 4th mechanical arm assembly 11D and channel position 9D, therefore uses the components identical symbol in due course.Cluster tool collocation method shown in the 2A figure has superiority when the base material production capacity is subject to mechanical arm, because the interpolation of the 4th mechanical arm assembly 11D can be assisted the burden of eliminating other mechanical arms, and also set up some redundancies, it makes system can handle base material when one or more central robot arm can't operate.Implement in the aspect one, the side 60B of this first processing procedure frame 60, and the side 80A of this second processing procedure frame 80 is all along arranging with the parallel direction of assembly 90 (9A and 12A-C figure) that moves horizontally of each mechanical arm assembly (for example first mechanical arm assembly 11A, the second mechanical arm assembly 11B etc.).
Implement in the aspect one, this first mechanical arm assembly 11A is suitable for transmitting base material between side 60B access and the described process chamber in this first processing procedure frame 60.Implement in the aspect one, this three-mechanical arm assembly 11C is suitable for transmitting base material between side 80A access and the described process chamber in this second processing procedure frame 80.Implement in the aspect one, this second mechanical arm assembly 11B is suitable for transmitting base material between side 60B access and the described process chamber in this first processing procedure frame 60.Implement in the aspect one, the 4th mechanical arm assembly 11D is suitable for transmitting base material between side 80A access and the described process chamber in this second processing procedure frame 80.Implement in the aspect one, this second mechanical arm assembly 11B and the 4th mechanical arm assembly 11D are further adapted for the process chamber in the side 60B access first processing procedure frame 60, and the process chamber in the side 80A access second processing procedure frame 80.
2B illustrates the plane graph of the embodiment of the cluster tool 10 shown in the 2A figure, and wherein the mechanical arm blade 87 of this second mechanical arm assembly 11B extends into process chamber in this first processing procedure frame 60 by side 60B.With this mechanical arm blade 87 extend into a process chamber and/or from a process chamber withdraw this mechanical arm blade 87 ability normally by the spare part of this mechanical arm assembly 11 pull together move, it is to be contained in this to move horizontally assembly 90, vertical moving assembly 95, reach in the mechanical arm nextport hardware component NextPort 85, and finishes from the instruction that this system controller 101 transmits by utilization.As mentioned above, this second mechanical arm assembly 11B and the 4th mechanical arm assembly 11D can be suitable for allowing " overlapping " between each mechanical arm in this cluster tool together with this system controller 101, the logic scheduler of this system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool, and also can use CAS, transmit base material in the best way by this system to allow mechanical arm.The use that using system controller 101 maximizes this cluster tool can improve the CoO of this cluster tool, makes the wafer history have more reproducibility, and improves system dependability.
B. The convey program example
2C illustrates and can be used to finish the example that 1F schemes the transfer step program of passing through the cluster tool configuration shown in the 2A figure of described processing procedure program.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on this channel position 9C place, therefore can on this base material, finish this passage step 502.In case finish this passage step 502, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize the 4th mechanical arm assembly 11D to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize the 4th mechanical arm assembly 11D to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533.After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 512, then utilize the 4th mechanical arm assembly 11D to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize this second mechanical arm assembly 11B to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, this first mechanical arm assembly 11A followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9A place.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
Implement in the aspect this transfer path A one 7May be partitioned into is two transfer step, it may need the 4th mechanical arm assembly 11D to draw this base material from this heat exchanger chambers 533, and being sent to this four-way position 9D, it then draws and is sent to this process chamber 534 by this second mechanical arm assembly 11B at this.Implement in the aspect one, each channel chamber all can be by any one central robot arm component (i.e. the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C and the 4th mechanical arm assembly 11D) access.Implement in the aspect at another, this second mechanical arm assembly 11B can draw this base material and be sent to this process chamber 534 from this heat exchanger chambers 533.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out in this cluster tool 10.
The configuration of the 3rd cluster tool
A. System configuration
3A figure is the plane graph of an embodiment of cluster tool 10, and it has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), three mechanical arm assemblies 11 (9-11 figure on every side; Element 11A, 11B and the 11C of 3A figure), all are suitable for carrying out at least one enforcement aspect of the expection substrate process program of utilizing each process chamber in the described processing procedure frame.Embodiment shown in the 3A figure is identical with the configuration shown in the 1A-F figure, except the setting of this first mechanical arm assembly 11A on the side 60A of this first processing procedure frame 60 and channel position 9A and this three-mechanical arm assembly 11C and channel position 9C being arranged on the side 80B of this second processing procedure frame 80, therefore use the components identical symbol in due course.An advantage of this cluster tool preparation method is that this system still can utilize other two mechanical arms to continue to handle base material if one of them mechanical arm of this central module 25 can't operate.This collocation method is also removed, or minimizes, and for the needs of crash-proof controlling features, overlaps because removed the entity of the mechanical arm of next-door neighbour's setting when transmitting described base material between the process chamber of described mechanical arm in being installed in each processing procedure frame.Another advantage of this collocation method is that elasticity and module type structure allow the configurable needed process chamber of production capacity that this user requires, processing procedure frame, and the quantity of processing procedure mechanical arm of meeting of user.
In this configuration, this first mechanical arm assembly 11A is suitable for the described process chamber in this first processing procedure frame of side 60A access 60, this three-mechanical arm assembly 11C is suitable for the described process chamber in this second processing procedure frame of side 80B access 80, and this second mechanical arm assembly 11B is suitable for the described process chamber in this first processing procedure frame of side 60B access 60, and the described process chamber in this second processing procedure frame 80 of side 80A access.Implement in the aspect one, the side 80A of the side 60B of this first processing procedure frame 60, this second processing procedure frame 80 is all along arranging with the parallel direction of assembly 90 (describing in the wings) that moves horizontally of each mechanical arm assembly (i.e. the first mechanical arm assembly 11A, the second mechanical arm assembly 11B, three-mechanical arm assembly 11C).
This first mechanical arm assembly 11A, this second mechanical arm assembly 11B and this three-mechanical arm assembly 11C can be suitable for allowing " overlapping " between each mechanical arm together with this system controller 101, and the logic scheduler of allowing this system controller is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool.The cooperation of use cluster tool structure and system controller 101 improves CoO with the use that maximizes this cluster tool can allow the wafer history have more reproducibility, and improves system dependability.
B. The convey program example
3B illustrates and can be used to finish the example that 1F schemes the transfer step program of passing through the cluster tool shown in the 3A figure of described processing procedure program.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on this channel position 9C place, therefore can on this base material, finish this passage step 502.In case finish this passage step 502, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize this second mechanical arm assembly 11B to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 512, then utilize this second mechanical arm assembly 11B to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize this second mechanical arm assembly 11B to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, this first mechanical arm assembly 11A followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9A place.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out in this cluster tool 10.
Four group collection tool configuration
A. System configuration
4A figure is the plane graph of an embodiment of cluster tool 10, and it has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), two mechanical arm assemblies 11 (9-11 figure on every side; Element 11B and the 11C of 4A figure), all are suitable for carrying out at least one enforcement aspect of the expection substrate process program of utilizing each process chamber in the described processing procedure frame.Embodiment shown in the 4A figure is identical with the configuration shown in the 3A figure, this first mechanical arm assembly 11A on the side 60A of this first processing procedure frame 60 and the eliminating of channel position 9A, therefore uses the components identical symbol in due course.An advantage of this system's preparation method is that it provides for the access easily that is installed in the chamber in this first processing procedure frame 60, therefore makes one or more process chamber that is installed in this first processing procedure frame 60 still roll off the production line and to reach the standard grade when handling base material at this cluster tool.Another advantage is that this three-mechanical arm assembly 11C and/or the second processing procedure frame 80 can be reached the standard grade when utilizing this second mechanical arm assembly 11B to handle base material.This configuration allows that also the process chamber with short chamber processing procedure time that will use often is arranged in this second processing procedure frame 80 in a processing procedure program, therefore it can be served by these two central robot arms (being element 11B and 11C), transmit the restriction bottleneck and reduce mechanical arm, and therefore improve system's production capacity.This collocation method also removes or minimizes between the process chamber of described mechanical arm in being installed in a processing procedure frame when transmitting described base material the needs for the crash-proof controlling features, invades because removed the entity that each mechanical arm enters the space of other mechanical arms.Another advantage of this collocation method is that elasticity and module type structure allow the configurable needed process chamber of production capacity that this user requires, processing procedure frame, and the quantity of processing procedure mechanical arm of meeting of user.
In this configuration, this three-mechanical arm assembly 11C is suitable for transmitting base material between side 80A access and the described process chamber in this second processing procedure frame 80, and this second mechanical arm assembly 11B is suitable for from transmitting base material between side 60B access and the described process chamber in this first processing procedure frame 60, and transmits base material between the described process chamber of side 80A in this second processing procedure frame 80.Implement in the aspect one, the side 80A of the side 60B of this first processing procedure frame 60, this second processing procedure frame 80 is all along arranging with the parallel direction of assembly 90 (describing in the wings) that moves horizontally of each mechanical arm assembly (i.e. the second mechanical arm assembly 11B, three-mechanical arm assembly 11C).
As discussed above, this second mechanical arm assembly 11B and this three-mechanical arm assembly 11C can be suitable for allowing this system controller together with this system controller 101 logic scheduler is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool.The cooperation of use cluster tool structure and system controller 101 improves CoO with the use that maximizes this cluster tool can allow the wafer history have more reproducibility, and improves system dependability.
B. The convey program example
4B illustrates and can be used to finish the example that 1F schemes the transfer step program of passing through the cluster tool shown in the 4A figure of described processing procedure program.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on this channel position 9B place, therefore can on this base material, finish this passage step 502.In case finish this passage step 502, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize this three-mechanical arm assembly 11C to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 512, then utilize this second mechanical arm assembly 11B to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize this second mechanical arm assembly 11B to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, this second mechanical arm assembly 11B followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9A place.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out in this cluster tool 10.
The configuration of the 5th cluster tool
A. System configuration
5A figure is the plane graph of an embodiment of cluster tool 10, and it has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on single processing procedure frame (element 60) four mechanical arm assemblies 11 (9-11 figure on every side; Element 11A, 11B, 11C and the 11D of 5A figure), all are suitable for carrying out at least one enforcement aspect of the expection substrate process program of utilizing each process chamber in the processing procedure frame 60.Embodiment shown in the 5A figure and top shown in configuration similar, therefore use the components identical symbol in due course.This collocation method can reduce have three or still less the base material that system stood of mechanical arm transmit bottleneck because use four mechanical arms that can the access of redundant ground be installed in the described process chamber in this processing procedure frame 60.This collocation method is useful especially removing on the mechanical arm restricted type bottleneck, and fabrication steps quantity in the processing procedure program is a lot of and take place in the situation that the chamber processing procedure time is very short usually for they.
In this collocation method, this first mechanical arm assembly 11A and this second mechanical arm assembly 11B are suitable for transmitting base material between side 60A access and the described process chamber in this processing procedure frame 60, and this three-mechanical arm assembly 11C and the 4th mechanical arm assembly 11D are suitable for transmitting base material between side 60B access and the described process chamber in this processing procedure frame 60.
This first mechanical arm assembly 11A and this second mechanical arm assembly 11B, and this three-mechanical arm assembly 11C and the 4th mechanical arm assembly 11D can be suitable for allowing " overlapping " between each mechanical arm together with this system controller 101, the logic scheduler of this system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool, and also can use CAS, transmit base material in the best way by this system to allow mechanical arm.The cooperation of use cluster tool structure and system controller 101 improves CoO with the use that maximizes this cluster tool can allow the wafer history have more reproducibility, and improves system dependability.
B. The convey program example
5B illustrates and can be used to finish the example that 1F schemes the transfer step program of passing through the cluster tool shown in the 5A figure of described processing procedure program.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to the chamber that is arranged on this channel position 9C place, therefore can on this base material, finish this passage step 502.In case finish this passage step 502, then utilize this three-mechanical arm assembly 11C to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize the 4th mechanical arm assembly 11D to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize the 4th mechanical arm assembly 11D to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 512, then utilize this first mechanical arm assembly 11A to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize this first mechanical arm assembly 11A to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, this second mechanical arm assembly 11B followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9B place.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out in this cluster tool 10.
The configuration of the 6th cluster tool
A. System configuration
6A figure is the plane graph of an embodiment of cluster tool 10, and it has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), eight mechanical arm assemblies 11 (9-11 figure on every side; Element 11A, 11B, 11C and the 11D-11H of 6A figure), all are suitable for carrying out at least one enforcement aspect of the expection substrate process program of utilizing each process chamber in the processing procedure frame.Embodiment shown in the 6A figure and top shown in configuration similar, therefore use the components identical symbol in due course.This collocation method can reduce the base material that system stood with less mechanical arm and transmit bottleneck, because use eight mechanical arms that can the access of redundant ground be installed in the described process chamber in described processing procedure frame 60 and 80.This collocation method is useful especially removing on the mechanical arm restricted type bottleneck, and fabrication steps quantity in the processing procedure program is a lot of and take place in the situation that the chamber processing procedure time is very short usually for they.
In this collocation method, this first mechanical arm assembly 11A and this second mechanical arm assembly 11B are suitable for the described process chamber in this first processing procedure frame 60 of side 60A access, and the 7th mechanical arm assembly 11G and the 8th mechanical arm assembly 11H are suitable for the described process chamber in this second processing procedure frame 80 of side 80A access.Implement in the aspect one, this three-mechanical arm assembly 11C and the 4th mechanical arm assembly 11D can be from the described process chambers in this first processing procedure frame 60 of side 60B access.Implement in the aspect one, the 5th mechanical arm assembly 11E and the 6th mechanical arm assembly 11F are suitable for the described process chamber in this second processing procedure frame 80 of side 80B access.Implement in the aspect one, the 4th mechanical arm assembly 11D is further adapted for the described process chamber in this second processing procedure frame of side 80B access 80, and the 5th mechanical arm assembly 11E is further adapted for the described process chamber in this first processing procedure frame 60 of side 60B access.
Described mechanical arm assembly 11A-H can be suitable for allowing " overlapping " between each mechanical arm together with this system controller 101, the logic scheduler of this system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool, and also can use CAS, transmit base material in the best way by this system to allow mechanical arm.The cooperation of use cluster tool structure and system controller 101 improves CoO with the use that maximizes this cluster tool can allow the wafer history have more reproducibility, and improves system dependability.
B. The convey program example
6B illustrates and can be used to finish the example of the first processing procedure program that 1F schemes the transfer step of passing through the cluster tool shown in the 6A figure of described processing procedure program.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to channel chamber 9F, therefore can on this base material, finish this passage step 502.In case finish this passage step 502, then utilize the 6th mechanical arm assembly 11F to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize the 6th mechanical arm assembly 11F to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize the 6th mechanical arm assembly 11F to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 512, then utilize the 5th mechanical arm assembly 11E to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize the 5th mechanical arm assembly 11E to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, the 5th mechanical arm assembly 11E followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9E place.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
6B figure also illustrates the example of the second processing procedure program with transfer step of finishing simultaneously with this first program, and it uses the different process chambers in this second processing procedure frame 80.Shown in 1C-D figure, this first processing procedure frame generally contains some with the second processing procedure frame and is suitable for carrying out the process chamber (for example BC1-6 of the CD1-8 of 1C figure, 1D figure) that the fabrication steps of expection processing procedure program is carried out in identical being used for.Therefore, in this collocation method, each processing procedure program all can utilize any one process chamber that is installed in the described processing procedure frame to carry out.In an example, this second processing procedure program is and the identical processing procedure program of this first processing procedure program (discussing in front) that it contains identical transfer step A 1-A 10, be depicted as A at this 1'-A 10', use the 7th and the 8th central robot arm (being element 11G-11H) respectively, but not the 5th and the 6th central robot arm component (being element 11E-11F), as mentioned above as.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out in this cluster tool 10.
The configuration of the 7th cluster tool
A. System configuration
6C figure is the plane graph with an embodiment of the similar cluster tool 10 of the configuration shown in the 6A figure, except removing one of them mechanical arm assembly (being mechanical arm assembly 11D), still to provide high system's production capacity when reducing system-wide.Therefore, this cluster tool 10 has front end robot arm component 15, rear robot arm component 40, system controller 101 and is arranged on two processing procedure framves (element 60 and 80), seven mechanical arm assemblies 11 (9-11 figure on every side in this configuration; The element 11A-11C of 6C figure, and 11E-11H), all are suitable for carrying out at least one enforcement aspect of the expection substrate process program of utilizing each process chamber in the processing procedure frame.Embodiment shown in the 6C figure and top shown in configuration similar, therefore use the components identical symbol in due course.This collocation method can reduce the base material that system stood with less mechanical arm and transmit bottleneck, because use seven mechanical arms that can the access of redundant ground be installed in the described process chamber in described processing procedure frame 60 and 80.This collocation method is useful especially removing on the mechanical arm restricted type bottleneck, and fabrication steps quantity in the processing procedure program is a lot of and take place in the situation that the chamber processing procedure time is very short usually for they.
In this collocation method, this first mechanical arm assembly 11A and this second mechanical arm assembly 11B are suitable for the described process chamber in this first processing procedure frame 60 of side 60A access, and the 7th mechanical arm assembly 11G and the 8th mechanical arm assembly 11H are suitable for the described process chamber in this second processing procedure frame 80 of side 80A access.Implement in the aspect one, this three-mechanical arm assembly 11C and the 5th mechanical arm assembly 11E are suitable for the described process chamber in this first processing procedure frame 60 of side 60B access.Implement in the aspect one, the 5th mechanical arm assembly 11E and the 6th mechanical arm assembly 11F are suitable for the described process chamber in this second processing procedure frame 80 of side 80B access.
Described mechanical arm assembly 11A-11C and 11E-11H can be suitable for allowing " overlapping " between each mechanical arm together with this system controller 101, the logic scheduler of this system controller of tolerable is with based on manage out the priority that work and base material move from user and the input that spreads over each inductor in this cluster tool, and also can use CAS, transmit base material in the best way by this system to allow mechanical arm.The cooperation of use cluster tool structure and system controller 101 improves CoO with the use that maximizes this cluster tool can allow the wafer history have more reproducibility, and improves system dependability.
B. The convey program example
6D illustrates and can be used to finish the example of the first processing procedure program that 1F schemes the transfer step of passing through the cluster tool shown in the 6C figure of described processing procedure program.In this embodiment, this base material is to be shifted out from a wafer case assembly 105 (object #105D) by this front end robot arm component 15, and follows transfer path A 1Be sent to channel chamber 9F, therefore can on this base material, finish this passage step 502.In case finish this passage step 502, then utilize the 6th mechanical arm assembly 11F to follow this transfer path A 2This base material is sent to first process chamber 531, on this base material, finishes in this fabrication steps 504.After finishing this fabrication steps 504, then utilize the 6th mechanical arm assembly 11F to follow this transfer path A 3This base material is sent to this second process chamber 532.After carrying out this fabrication steps 506, then utilize the 6th mechanical arm assembly 11F to transmit this base material, follow this transfer path A 4, to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 508, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 5,, carry out fabrication steps 510 at this to this outside process system 536.After carrying out fabrication steps 510, then utilize this rear robot arm component 40 to transmit this base material, follow this transfer path A 6,, carry out fabrication steps 512 at this to this heat exchanger chambers 533 (7A figure).After carrying out this fabrication steps 512, then utilize the 5th mechanical arm assembly 11E to transmit this base material, follow this transfer path A 7,, carry out fabrication steps 514 at this to this process chamber 534.Utilize the 5th mechanical arm assembly 11E to follow this transfer path A then 8Transmit this base material.After this fabrication steps 516 was finished, the 5th mechanical arm assembly 11E followed this transfer path A 9This base material is sent to the channel chamber that is arranged on this channel position 9E place.After carrying out this passage step 518, then utilize this front end robot arm component 15 to transmit this base material, follow this transfer path A 10, to this wafer case assembly 105D.
6D figure also illustrates the example of the second processing procedure program with transfer step of finishing simultaneously with this first program, and it uses the different process chambers in this second processing procedure frame 80.Shown in 1C-D figure, this first processing procedure frame generally contains some with the second processing procedure frame and is suitable for carrying out the process chamber (for example BC1-6 of the CD1-8 of 1C figure, 1D figure) that the fabrication steps of expection processing procedure program is carried out in identical being used for.Therefore, in this collocation method, each processing procedure program all can utilize any one process chamber that is installed in the described processing procedure frame to carry out.In an example, this second processing procedure program is and the identical processing procedure program of this first processing procedure program (discussing in front) that it contains identical transfer step A 1-A 10, be depicted as A at this 1'-A 10', use the 7th and the 8th central robot arm (being element 11G-11H) respectively, but not the 5th and the 6th central robot arm component (being element 11E-11F), as mentioned above as.
In addition, in one embodiment, this cluster tool 10 is not connected with an outside process system 536 or exchanges, so this rear robot arm component 40 is not the part of this cluster tool configuration, and this transfer step A5-A6 and fabrication steps 510 can not carried out on this base material.In this configuration, all fabrication steps and transfer step are all carried out in this cluster tool 10.
The rear robot arm component
In one embodiment, as 1-6 figure those shown, this central module 25 contains a rear robot arm component 40, and it is suitable for transmitting base material being retained between described process chamber in this second processing procedure frame 80 of an outside module 5 and a for example heat exchanger chambers 533.Referring to 1E figure, to implement in the aspect one, this rear robot arm component 40 generally contains the known horizontal articulated mechanical arm (SCARA) with single arm/blade 40E.In another embodiment, this rear robot arm component 40 can be a SCARA type mechanical arm, and it has two arm that can independently control/blade (not shown), exchanges base material and/or transmits base material in the mode with two group.These two arm that can independently control/blade type mechanical arms can have advantage, for example, when this mechanical arm must be before next base material be put in same position earlier when a desired location removes a base material.One illustrative two arm that can independently control/blade type mechanical arms can be buied by the Asyst Technologies company of Vermont, California.Though 1-6 illustrates the collocation method that contains rear robot arm component 40, an embodiment of this cluster tool 10 does not also conform to rear robot arm component 40 is arranged.
7A illustrates an embodiment of the heat exchanger chambers 533 in the support chamber 165 (1D figure) that can be arranged on a processing procedure frame (for example element 60,80).In one embodiment, this heat exchanger chambers 533 is suitable for receiving and keeping somewhere a base material, and makes at least two mechanical arms in this cluster tool 10 can deposit or draw a base material.Implement in the aspect one, at least one mechanical arms in this rear robot arm component 40 and this central module 25 be suitable for from this heat exchanger chambers 533 deposit/or receive a base material.This heat exchanger chambers 533 generally contains substrate support assembly 601, seal 602 and be formed on this and seal at least one access port 603 on 602 the sidewall.This substrate support assembly 601 generally has a plurality of support finger pieces 610 (shown in the 7A figure six), and it has a base material receiving surface 611 to support and to keep somewhere base material disposed thereon.This seals 602 generally is to have the structure that one or more encloses the sidewall of this substrate support assembly 601, controlling the context of described base material, in the time of in it is retained in this heat exchanger chambers 533.This access port 603 generally is to be positioned at this to seal opening on 602 sidewalls, and it makes the exterior mechanical arm can access and draw or put down base material to described support finger piece 610.Implement in the aspect one, this substrate support assembly 601 is suitable for allowing that base material is set on this base material receiving surface 611 and removes from this base material receiving surface 611, and this seals two or more mechanical arms of 602 with the angle accesses of at least 90 degree separately by being suitable for.
In an embodiment of this cluster tool 10, illustrate at 7B, the pedestal 40A of this rear robot arm component 40 is installed on the supporting seat 40C that is connected with a slide track component 40B, so this pedestal 40A can be arranged on any point on the slide track component 40B length direction.In this collocation method, this rear robot arm component 40 can be suitable for from this first processing procedure frame 60, this second processing procedure frame 80 and/or should transmit base material by module 5 interior process chambers in outside.This slide track component 40B generally can contain a linear spherical bearing slide rail (not shown) and a linear actuator (not shown), and this knows in skill, so that this supporting seat 40C and indwelling rear robot arm component 40 thereon to be set.This linear actuator can be can be by the linear brushless servo motor of the driving that the Danaher Motion company of Illinois State Wood Dale buys.Shown in 7B figure, this slide track component 40B is oriented on the y direction.In this collocation method, for fear of with described mechanical arm assembly 11A, 11B or 11C collision, this controller can be suitable for this slide track component 40B removable and can not clash into other central robot arm components the time (element 11A, 11B etc.) only move this rear robot arm component 40.In one embodiment, this rear robot arm component 40 is to be installed on the slide track component 40B, and it is through being provided with to such an extent that make it can not disturb other central robot arm components.
Environment control
8A illustrates an embodiment of the cluster tool 10 with an environment control assembly 110 that adds, and this assembly 110 is enclosed these cluster tools 10 so that in check processing environment to be provided, to carry out each base material treatment step of an expection processing procedure program therein.8A illustrates the configuration that described process chamber is provided with the cluster tool 10 shown in the 1A figure that environment seals.This environment control assembly 110 generally contains optionally cluster tool pedestal 10A of one or more filter element 112, one or more fan (not shown) and one.Implement in the aspect one, one or more sidewall 113 is through being added into this cluster tool 10 enclosing this cluster tool 10, and provides an in check environment to carry out described substrate process step.In general, this environment control assembly 110 is suitable for controlling air velocity, flow pattern (regime) (for example laminar flow (laminar flow) or turbulent flow (turbulent flow)), and the particle contamination degree in this cluster tool 10.Implement in the aspect one, this environment control assembly 110 is may command air themperature, relative humidity, airborne static and can utilize the ventilation compatible with known dust free room and other typical processes parameters of air-conditioning (HVAC) system control also.During operation, this environment control assembly 110 utilizes a fan (not shown) to import air from source (not shown) or the zone that is positioned at these cluster tool 10 outsides, it then transmits air by a filter 111, leave this cluster tool 10 then by this cluster tool 10, and by this cluster tool pedestal 10A.Implement in the aspect one, this filter 111 is high-effect particulate air (HEPA) filters.This cluster tool pedestal 10A generally is the floor or the bottom section of this cluster tool, its contain some slit 10B (12A figure) or allow by this (etc.) fan promotes to leave by the air of this cluster tool 10 other micropores of this cluster tool 10.
8A figure further illustrates an embodiment of this environment control assembly 110, and it has a plurality of different environment control assembly 110A-C, and it provides in check processing environment, to carry out each base material treatment step of an expection processing procedure program therein.Each different environment control assembly 110A-C is arranged on each mechanical arm assembly 11 in this central module 25 (for example element 11A, the 11B etc. of 1-6 figure), separately to control the air-flow on each mechanical arm assembly 11.This collocation method has superiority in the collocation method shown in 3A and the 4A figure especially, because described mechanical arm assembly is by the entity isolation each other of described processing procedure frame.Each different environment control assembly 110A-C generally contains optionally cluster tool pedestal 10A of a filter element 112, a fan (not shown) and, to discharge controlled atmosphere.
8B illustrates the profile of an environment control assembly 110, and it has single the filter element 112 that is installed on the cluster tool 10, and is to use with the y section plane parallel with the z direction to watch.In this collocation method, this environment control assembly 110 has single filter element 112, one or more fan (not shown) and the one tool base 10A that troops.In this collocation method, air enters in this cluster tool 10 (element A) from these environment control assembly 110 vertical transmission, around described processing procedure frame 60,80 and mechanical arm assembly 11A-C, leaves this cluster tool pedestal 10A then.Implement in the aspect one, described sidewall 113 is suitable for enclosing and forming a process zone in this cluster tool 10, the described process chamber processing environment on every side that therefore is retained in the described processing procedure frame 60,80 can be by the air control of these environment control assembly 110 transmission.
8C illustrates the profile of an environment control assembly 110, and it has a plurality of different environment control assembly 110A-C that is installed on the cluster tool 10, and is to use with the y section plane parallel with the z direction to watch (seeing 1A figure).In this collocation method, this environment control assembly 110 contains the tool base 10A that troops, three environment control assembly 110A-C, one first processing procedure frame 60, it extends on the lower surface 114 of described environment control assembly 110A-C or its, and one second processing procedure frame 80, it extends on the lower surface 114 of described environment control assembly 110A-C or its.In general, each of these three environment control assembly 110A-C all contains one or more a fan (not shown) and a filter 111.In this collocation method, air vertically is sent in this cluster tool 10 (seeing element A) from each environment control assembly 110A-C, between between described processing procedure frame 60,80 and mechanical arm assembly 11A-C, leaves this cluster tool pedestal 10A then.Implement in the aspect one, described sidewall 113 is suitable for enclosing and forming a process zone in this cluster tool 10, the described process chamber processing environment on every side that therefore is retained in the described processing procedure frame 60,80 can be by the air control of these environment control assembly 110 transmission.
In another embodiment, this cluster tool 10 is to place the dust free room environment, and it is suitable for transmitting the air that contains small amount of fines with goal pace and passes through this cluster tool 10, leaves this cluster tool pedestal 10A then.In this collocation method, do not need this environment control assembly 110 usually, therefore can not use.Control air property and be retained in environment around the described process chamber in this cluster tool 10 in the control of accumulation of particulates and/or to minimize be a key factor, the element qualification rate problem that it can cause particle contamination to cause.
The mechanical arm assembly
In general, each embodiment of cluster tool 10 described herein is better than the Prior Art configuration, because the mechanical arm size of components of dwindling (for example element 11 of 9A figure) causes the cluster tool floor space to dwindle, and minimize and transmit the mechanical arm design that entity that a mechanical arm during the base material process enters the space that other cluster tool spare parts (for example mechanical arm, process chamber) occupy is invaded.The entity that reduces is invaded the collision of avoiding mechanical arm and other spare parts.When reducing this cluster tool floor space, the embodiment of mechanical arm described herein also has specific advantages, needs control to carry out the quantity of the axle that transmits action because reduce.This implements aspect is important, because this can improve the reliability of described mechanical arm assembly, thereby the reliability of this cluster tool.This importance of implementing aspect can be directly proportional with the reliability product of each element in this system and more clear by the reliability of noticing a system.Therefore, the mechanical arm that has three on-line time and be an actuator of 99% is that 99% actuator is good than having four on-line time always, because each online implementing time that all has three actuators of 99% on-line time is 97.03%, each four actuator that all have 99% on-line time then is 96.06%.
The embodiment of cluster tool 10 described herein also is better than the Prior Art configuration because reduce channel chamber (for example element 9A-C of the 1B figure) quantity that need be used for base material transmits by this cluster tool.Two or more channel chamber are installed in the configuration of Prior Art cluster tool usually in this processing procedure program, or have temporary transient base material and keep somewhere the station, so this cluster tool mechanical arm can and be arranged between another mechanical arm on the middle position between one or more other process chambers at a mechanical arm on the middle position that is being arranged at during this processing procedure program between this one or more process chamber and transmits base material.The process in a plurality of channel chamber that can not carry out fabrication steps subsequently of successively base material being seated in lose time, reduce this (etc.) workability of mechanical arm, waste the space in this cluster tool and increase should (etc.) loss of mechanical arm.The increase of described passage step also has harmful effect to the element qualification rate, stems from the increase that base material changes the hand number of times, and this can increase the particle contamination amount of dorsal part.In addition, the substrate process program that contains a plurality of passage steps can have different base material wafer histories naturally, expends time in this channel chamber unless control each base material.The time that is controlled in this channel chamber can increase system complexity, because increased a process variables, and probably can damage accessible maximum base material production capacity.Enforcement aspect of the present invention, said person, avoid the difficulty place of these Prior Art configurations, because only being to carry out before the processing procedure and in all fabrication steps on the base material usually, this cluster tool configuration after finishing on the base material, had described passage step (for example step 502 of 1F figure and 518) all, therefore only can have influence on the base material wafer history a little or not usually, and also can not increase the base material delivery time of this processing procedure program significantly, because removed the passage step between the described fabrication steps.
Be subjected in the situation of mechanical arm restriction in system's production capacity, the maximum base material production capacity of this cluster tool is to control by finishing this processing procedure program mechanical arm total quantity that is moved and the time that need be used for this mechanical arm is moved.The mobile time of an expection of finishing that one mechanical arm is required considered by distance, the base material cleannes between mechanical arm hardware, process chamber and system's control limit is limit.Usually the mechanical arm traveling time can not change significantly because of the difference of mechanical arm type, and rather consistent on industry.Therefore, system's production capacity that mobile less mechanical arm can be finished the cluster tool of processing procedure program can move to finish the cluster tool height of processing procedure program than needs are more, for example contains the cluster tool of a plurality of passage steps.
The configuration of flute card mechanical arm
9A illustrates an embodiment who can be used to as the mechanical arm assembly 11 of one or more mechanical arm assembly 11 (for example element 11A-H shown in the 1-6 figure).This mechanical arm assembly 11 generally contains a mechanical arm nextport hardware component NextPort 85, one or more vertical mechanical arm assembly 95 and one or more horizontal mechanical arm component 90.Therefore can utilize the instruction of these system controller 101 reception and registration by the pulling together to move base material is arranged on arbitrary expection x, the y and z position in this cluster tool 10 of this mechanical arm nextport hardware component NextPort 85, vertical mechanical arm assembly 95 and horizontal mechanical arm component 90.
This mechanical arm nextport hardware component NextPort 85 generally contains one or more transfer robot assembly 86, and one or more base material is kept somewhere, transmitted and be provided with in its instruction that is suitable for utilizing this system controller 101 to pass on.In one embodiment, the transfer robot assembly 86 shown in the 9-11 figure is suitable for transmitting base material on horizontal plane, for example comprises the plane of X shown in the 11A figure and Y direction, because each transfer robot assembly 86 spare parts is mobile.Implement in the aspect one, this transfer robot assembly 86 is suitable for transmitting base material on parallel with the substrate support surface 87C (10C figure) of this mechanical arm blade 87 usually plane.10A illustrates an embodiment of this mechanical arm nextport hardware component NextPort 85, and it contains single the transfer robot assembly 86 that is suitable for transmitting base material.10B illustrates an embodiment of this mechanical arm nextport hardware component NextPort 85, it contains two transfer robot assemblies 86 that are provided with in the opposite direction each other, therefore described mechanical arm blade 87A-B (and first coupling member 310A-310B) can be separated a bit of distance and put.Configuration shown in the 10B figure, or " on/down " type mechanical arm blade arrangement, can have superiority, for example, before wanting to put the next base material of desiring in the same process chamber, to handle, from process chamber, remove base material earlier, and when not needing to allow this mechanical arm nextport hardware component NextPort 85 leave its home position to move to another chamber (i.e. " exchange " base material) will be somebody's turn to do " removing " base material.In another implemented aspect, this this mechanical arm of collocation method tolerable filled up all mechanical arm blades, was that one group mode transmits the desired location of described base material to this instrument with two or more base materials then.Base material is divided into two or more one group processing procedures can transmits the base material production capacity that the required mechanical arm amount of movement of described base material help improve this cluster tool by reducing.Though the transfer robot assembly 86 that 10A-B figure is described is mechanical arms (10C figure) that two bars (bar) link mechanical arm 305 types, this configuration and be not intended to limit can with the mechanical arm assembly of this embodiment that discusses and usefulness to position and type.In general, embodiment with mechanical arm nextport hardware component NextPort 85 of two transfer robot assemblies 86, as 10B figure those shown, have two transfer robot assemblies 86 that contain identical basic spare part, therefore after for the discussion of single transfer robot assembly 86 also be intended to describe should (etc.) two-shipper tool arm component implements the spare part in the aspect.
One advantage of cluster tool shown in the 9-11 figure and mechanical arm configuration is to minimize the size around the zone of a transfer robot assembly 86, and described therein mechanical arm spare part and base material can move freely and can not collide with other cluster tool spare parts of these mechanical arm assembly 11 outsides.The zone that mechanical arm and base material can move freely therein is called as " transit area " (element 91 of 11C figure).This transit area 91 generally may be defined as when a base material is retained on the mechanical arm blade, this mechanical arm can move freely and not can with the space (x, y and z direction) of other cluster tool spare parts collision.Though this transit area can be described as a space, the most important enforcement aspect of this transit area is the horizontal area (x and y direction) that this transit area occupies usually, because it directly influences the floor space and the CoO of cluster tool.The horizontal area of this transit area is a key factor when defining the floor space of this cluster tool, because the horizontal zero assembly of this transit area is more little, each mechanical arm assembly (for example element 11A, the 11B of 1-6 figure, 11C or the like) just can the closer to each other or mechanical arm just can be the closer to the processing procedure frame.A factor that defines this transit area size is to confirm the enough big needs of this transit area, to reduce or to avoid a mechanical arm entity to invade the space that other cluster tool spare parts occupy.Embodiment described herein is better than Prior Art, stems from described embodiment described mechanical arm assembly 86 spare parts withdrawals (retract) are moved horizontally mode in the directed transit area of the direction of transfer (x direction) of assembly 90 along this.
Referring to 11J figure, this horizontal area generally may be partitioned into two parts, width " W 1" (y direction) and length " L " (x direction).Embodiment described herein has further advantage, because center on the reduced width " W of the empty regions of this mechanical arm 1" guarantee that this mechanical arm can be arranged on base material in one process chamber reliably.Can be by noticing that known SCARA mechanical arm (for example object CR of 11K figure) generally had in when withdrawal, extend arm (the object A for example of a segment distance from these mechanical arm central authorities (for example object C) 1) and understand the width " W that dwindles 1" being better than the benefit that known many bars link horizontal articulated mechanical arm (SCARA) type mechanical arm, it (is width " W that known mechanical arm increases described mechanical arm relative distance to each other 2"), because the zone around this mechanical arm must headroom, so that this arm spare part can spin orientation and can not disturb other cluster tool spare parts (for example, other mechanical arms, processing procedure frame spare part).Known SCARA type mechanical arm collocation method is also than some embodiment complexity described herein, because they also have the axles that need control more, with described base material orientation and be arranged in the process chamber.Referring to 11J figure, implement in the aspect width W of this transit area 91 one 1Than this substrate sizes about 5% to about 50% (i.e. base material of 11J figure " S ").At base material is in the example of semiconductor wafer of a 300mm, the width W of this transit area 1Understand between between about 315mm and about 450mm, and preferably between between about 320mm and about 360mm.Referring to 1B figure, in an example, for the substrate process instrument of a 300mm, the distance between the side 80A of the side 60B of this first processing procedure frame 60 and this second processing procedure frame 80 can be about 945mm (for example 315%).In another example, for the substrate process instrument of a 300mm, the distance between the side 80A of the side 60B of this first processing procedure frame 60 and this second processing procedure frame 80 can be about 1350mm (for example 450%).It should be noted that this transit area generally is intended to describe this mechanical arm zone on every side, in case wherein its blade withdrawal after being drawn into the base material that is positioned on the desired location, this mechanical arm can be moved till the original position (SP) outside it moves to next process chamber in this processing procedure program therein.
Two bars link the mechanical arm assembly
10A and 10C illustrate the embodiment that a pair of bar links the transfer robot assembly 86 of mechanical arm 305 types, and it generally contains a supporting bracket 321, one first coupling member 310, a mechanical arm blade 87, a drive system 312 (10C figure), and seals 313 and one motor 320.In this configuration, this transfer robot assembly 86 is to be connected with this vertical moving assembly 95 by the supporting bracket 321 that is connected with this vertical actuator assemblies 560 (13A figure).10C illustrates the profile of an embodiment that this pair bar links the transfer robot assembly 86 of mechanical arm 305 types.The drive system 312 that this pair bar links mechanical arm 305 generally contains one or more power conveying element (powertransmitting element), it is suitable for by moving of described power conveying element this mechanical arm blade 87 being moved, for example by the rotation of motor 320.In general, this drive system 312 can contain known gear, pulley or the like, and it is to be suitable for sending from the rotation of an element or transfer action to next element.Generally be intended to describe the spare part that is rotatably connected with second spare part by belt, tusk or other typical way at this employed " gear " speech, and be to be suitable for moving to another element from element transmission.In general, one gear, person as used herein, can be known gear type device or pulley type device, it can be including but not limited to for example spur gear (spur gear), bevel gear (bevel gear), tooth bar (rack) and/or pinion (pinion), worm gear (worm gear), timing disc (timing pulley), and pulley concial disk spare parts such as (v-belt pulley).Implement in the aspect one, this drive system 312 as 10C figure those shown, contains first pulley system 355 and second pulley system 361.This first pulley system 355 has first pulley 358 that is connected with this motor 320, second pulley 356 that is connected with this first coupling member 310, and the belt 359 that connects this first pulley 358 and this second pulley 356, so this motor 320 can drive this first coupling member 310.Implement in the aspect one, a plurality of bearing 356A are suitable for allowing the axle V of this second pulley 356 around the 3rd pulley 354 1Rotation.
The belt 362 that this second pulley system 361 has the 3rd pulley 354 that is connected with this supporting bracket 321, the 4th pulley 352 that is connected with this blade 87 and connects the 3rd pulley 354 and the 4th pulley 352, so the rotation of this first coupling member 310 can make this blade 87 around bearing axis 353 rotation (the pivot V of 11A figure that are connected with this first coupling member 310 2).When transmitting a base material, this first pulley 358 of this motor driven, it causes this second pulley 356 and the rotation of first coupling member 310, itself then because this first coupling member 310 and belt 362 around the angle rotation (angular rotation) of the 3rd static pulley 354 and make 352 rotations of the 4th pulley.In one embodiment, this motor 320 and system controller 101 are suitable for forming closed-loop control system, and it allows that the position, angle of this motor 320 and connected all spare parts all can be controlled.Implement in the aspect one, this motor 320 is a stepper motor or DC servo motor.
Implement in the aspect one, the gearratio of this first pulley system 355 and second pulley system 361 (for example diameter ratio, gear teeth quantity ratio) can reach path (the element P among 11C or the 11D of expection through design 1) shape and decomposition, can be when this base material is provided with by a transfer robot assembly 86 along this path movement.Gearratio can be defined as the driving element size with respect to the component size that is driven afterwards, perhaps in this example, for example, the gear teeth quantity of the 3rd pulley 354 is with respect to the gear teeth quantitative proportion of the 4th pulley 352.Therefore, for example, when 310 rotations 270 of this first coupling member were spent, it caused this blade 87 Rotate 180 degree, was equal to the gear ratio of 0.667 gearratio or 3: 2.Gear is intended to represent the D of this first gear than a speech 1Revolution causes the D of this second gear 2Revolution, or D 1: D 2Ratio.Therefore, these first gear rotation, three circles of one 3: 2 proportional representations can make this second gear take two turns, thus the size of this first gear must be approximately three minutes of this second gear two.Implement in the aspect one, the 3rd pulley 354 is between about 3: 1 to about 4: 3 for the gear ratio of the 4th pulley 352, preferably between about 2: 1 and about 3: 2.
10E illustrates another embodiment that a pair of bar links the transfer robot assembly 86 of mechanical arm 305 types, and it generally contains a supporting bracket 321, one first coupling member 310, a mechanical arm blade 87, a drive system 312 (10E figure), and seals 313, one motor 320 and one second motor 371.Embodiment shown in embodiment shown in the 10E figure and the 10C figure is similar, except the position of rotation of the 3rd pulley 354 in this collocation method can utilize this second motor 371 and adjusts from the instruction of this controller 101.Because 10C and 10E figure are similar, can use the components identical symbol for the sake of simplicity.In this collocation method, this transfer robot assembly 86 is connected with this vertical moving assembly 95 via the supporting bracket 321 that is connected with this vertical actuator assemblies 560 (13A figure).10E illustrates the sectional side view that this pair bar links the transfer robot assembly 86 of mechanical arm 305 types.The drive system 312 that this twin shaft links mechanical arm 305 generally contains two power conveying elements, and it is suitable for utilizing moving of this motor 320 and/or this second motor 371 that this mechanical arm blade 87 is moved.In general, this drive system 312 can comprise gear, pulley or the like, and it is to be suitable for sending from the rotation of an element or transfer action to next element.Implement in the aspect one, this drive system 312 contains first pulley system 355 and second pulley system 361.This first pulley system 355 has first pulley 358 that is connected with this motor 320, second pulley 356 that is connected with this first coupling member 310, and the belt 359 that connects this first pulley 358 and this second pulley 356, so this motor 320 can drive this first coupling member 310.Implement in the aspect one, a plurality of bearing 356A are suitable for allowing the axle V of this second pulley 356 around the 3rd pulley 354 1Rotation.Implement in the aspect one, not shown in the 10E figure, described bearing 356A is installed on the feature that is formed on this supporting bracket 321, but not is formed on as shown in 10E figure on the 3rd pulley 354.
The belt 362 that this second pulley system 361 has the 3rd pulley 354 that is connected with this second motor, the 4th pulley 352 that is connected with this blade 87 and connects the 3rd pulley 354 and the 4th pulley 352, so the rotation of this first coupling member 310 can make this blade 87 around bearing axis 353 rotation (the pivot V of 11A figure that are connected with this first coupling member 310 2).This second motor 371 is to be installed on this supporting bracket 321.When transmitting a base material, this motor 320 drives this first pulley 358, it causes this second pulley 356 and the rotation of first coupling member 310, itself then because this first coupling member 310 and belt 362 around the angle rotation of the 3rd pulley 354 and make 352 rotations of the 4th pulley.In this collocation method, with respect to the collocation method shown in the 10C figure, the 3rd pulley can rotation when this motor 320 these first coupling members 310 of rotation, and this makes the gear of 352 on the 3rd pulley 354 and the 4th pulley than changing by the relative motion of adjusting 352 on the 3rd pulley 354 and the 4th pulley.Can notice gear than influencing this mechanical arm blade 87 moving with respect to this first coupling member 310.In this collocation method, the gear ratio is not decided by the size of described gear, and can change in the different phase of this mechanical arm blade transmission action, with the mechanical arm blade transfer path (seeing 11D figure) that reaches expection.In one embodiment, this motor 320, this second motor 371 and system controller 101 are suitable for forming closed-loop control system, and it allows that the position, angle of this motor 320, the position, angle of this second motor 371 all can be controlled with all spare parts that are connected with these elements.Implement in the aspect one, this motor 320 and this second motor 371 are a stepper motor or DC servo motor.
11A-D illustrates the plane graph of an embodiment of a mechanical arm assembly 11, and it uses a pair of bar to link mechanical arm 305 collocation methods and transmits and be provided with on the desired location of base material in second process chamber of keeping somewhere in this cluster tool 10 532.This pair bar links mechanical arm 305 and generally contains a motor 320 (10A-C figure), one first coupling member 310 and a mechanical arm blade 87, it is to make the spinning movement of this motor 320 cause this first coupling member, 310 rotations through connection, itself then cause this mechanical arm blade 87 along expectation path rotation and/or shift.The advantage of this collocation method is that this mechanical arm is sent to a base material on the desired location in this cluster tool, and the spare part of this mechanical arm can not extend into instantly and occupied by another mechanical arm or system zero assembly, or the ability in the space that will be occupied.
11A-C illustrates moving of the transfer robot assembly 86 that is contained in the mechanical arm nextport hardware component NextPort 85, by being transmitted at base material when entering process chamber 532, immediately (for example corresponds respectively to the T of 11A-C figure 0-T 2) the plurality of continuous image of the position of each transfer robot assembly 86 spare parts is shown.Referring to 11A figure, in time T 0The time, this transfer robot assembly 86 generally is to utilize described vertical moving assembly 95 spare parts to be arranged on the expection vertical orientations (z direction), and utilizes described assembly 90 spare parts that move horizontally to be arranged on the expection horizontal direction (x direction).At T 0The time the mechanical arm position, illustrate in 11A, can be called original position (object SP) at this.Referring to 11B figure, in time T 1The time, this first coupling member 310 in this pair bar binding mechanical arm 305 is with pivoting point V 1Be the center rotation, thereby the mechanical arm blade 87 that makes connection is around a pivoting point V 2Shift and rotation, this transfer robot assembly 86 position on the x direction is to utilize described assembly 90 spare parts that move horizontally to adjust with this system controller 101 simultaneously.Referring to 11C figure, in time T 2The time, this mechanical arm blade 87 on the y direction from the center line C of this transit area 91 1Extend a desired distance (element Y 1), and be arranged on an x direction position (element X who expects 1) on, with (object FP) on the final position that base material is seated in expection, or the changing on the hand position of this process chamber 532.In case this mechanical arm has been arranged on base material on this final position, then this base material can be sent to this process chamber base material and hold on the spare part, for example lifting is sent or other substrate support spare parts on (for example element 532A of 11A figure).This base material is being sent to after this process chamber holds on the spare part, then can be but this mechanical arm blade of withdrawing out of order according to above-mentioned steps.
11C figure further illustrates a possible path (the object P of this base material central point 1) example, when its when this original position moves to this final position, as top 11A-C figure those shown.Implement in the aspect of the present invention one, the shape in this path can change with respect to the position of this transfer robot assembly 86 by utilizing this to move horizontally assembly 90 adjusts this first coupling member 310 along the x direction position of rotation.This feature has advantage, because the shape of this curve can be to be particularly suitable for allowing a mechanical arm blade this process chamber of 87 accesses and can not hold the transit area 91 that spare part (for example element 532A) collided or invaded other mechanical arms with each process chamber base material.It is apparent especially that this advantage becomes, when a process chamber is configured and can be from a plurality of different directions or orientation access the time, this therefore the restriction described base material that can be used to support reliably a base material hold the position and the orientation of spare part and avoid this mechanical arm blade 87 and this base material to hold collision between spare part.
11D illustrates and can be used to the base material transmission is entered the possible path P of the desired location in this process chamber 532 1-P 3Some examples.Path P shown in the 11D-F figure 1-P 3Be intended to illustrate this base material central point, or the moving of the substrate support regional center point of this mechanical arm blade 87, when it is provided with by described mechanical arm assembly 11 spare parts.Base material transfer path P shown in the 11D figure 2The path of a base material when the transmission ratio of second pulley system 361 of a transfer robot assembly 86 is 2: 1 is shown.Because the mobile of this base material is a straight line when the gearratio that uses 2: 1, when this collocation method can be removed this mechanical arm blade 87 and extends on the Y direction on directions X the needs of this mechanical arm nextport hardware component NextPort 85 of transfer.The benefit that the mobile complexity of this collocation method reduces in some cases can by can't design not can this base material from this process chamber each homonymy transmit and disturb the reliable base material of this mechanical arm blade 87 to hold the spare part influence when not entering this process chamber.
11E-11F illustrates the multistage that a base material enters this process chamber 532 and transmit to move.In one embodiment, this multistage transmits to move and is divided into three transfer path (path P 1-P 3), it can be used to transmit this base material and enters this process chamber 532 (11E figure) or leave this process chamber (11F figure).This collocation method is useful especially on the high acceleration that this base material and mechanical arm assembly 11 are experienced during this transmission processing procedure of reduction, and also moves complexity by using single axle control to reduce this mechanical arm as far as possible during this transmission processing procedure.The high acceleration that this mechanical arm experienced can produce vibration in this mechanical arm assembly, it can influence the position accuracy of described transmission processing procedure, the reliability and possible move of this base material on this mechanical arm blade of this mechanical arm assembly.A cause of these mechanical arm assembly 11 experience high accelerations of one-tenth letter produces when using collaborative mobile (coordinated motions).In that this is employed " collaborative moving " that a speech is intended to describe that two or more axles move simultaneously (for example, transfer robot assembly 86, move horizontally assembly 90, vertical moving assembly 95) so that a base material moves to down a bit from a bit.
11E illustrates the multistage transmission of three transfer paths and moves, and it is to be used for base materials that a base material is sent in this process chamber 532 are held on the spare part 532A.Carrying out before this multistage transmits mobile processing procedure, this transfer robot assembly 86 generally is arranged on (SP of 11E figure) on this original position, it may need to utilize described vertical moving assembly 95 spare parts that this base material is moved to an expection vertical orientations (z direction), and utilizes described assembly 90 spare parts that move horizontally to move to an expection horizontal level (x direction).Implement in the aspect one, in case this base material be positioned on this original position, utilize with that described transfer robot assembly 86, this move horizontally assembly 90 and this system controller 101 with this base material along path P 1Move to this final position (FP).Implement in the aspect at another, this base material is to utilize the Control Shaft quantity that reduces along path P 1Be provided with, a Control Shaft is for example only arranged.For example, can make this mechanical arm blade by the transfer robot assembly 86 that control exchanges with this controller 101, and this base material, move and realize single Control Shaft.In this collocation method, the use of single axle can be simplified the control that this base material or mechanical arm move significantly, and reduces and move to the required time of this centre position from this starting point.The next procedure that this multistage is transmitted mobile processing procedure is to utilize described vertical moving assembly 95 spare parts to move on the z direction, or utilize a base material to hold the described base material of spare part actuator (not shown) vertical moving and hold spare part and hold on the spare part this base material is sent to described process chamber base material, for example lifting is sent or other substrate support spare parts (for example element 532A of 11A figure).Implement in the aspect one, shown in 11E and 11F figure, this transfer robot assembly 86 be suitable for the X plane parallel with the Y direction on shift this base material W, as path P 1 and P3 those shown.
After transmission this base material to this process chamber held spare part, this mechanical arm blade can be followed path P then 2And P 3Withdrawal.This path P 2, in some cases, may need this transfer robot assembly 86 and this to move horizontally the collaborative of 90 of assemblies and move, can from these process chamber 532 withdrawals the time, not strike described substrate support spare part 532A to guarantee this mechanical arm blade 87.Implement in the aspect one, shown in 11E figure, this path P 2, it describes the moving of substrate support regional center point of this mechanical arm blade 87, is a linear path, on it extends to some intermediate point (IP) between this final position and this terminal point (EP) position from this final position (FP).In general, this intermediate point is this mechanical arm blade point enough far away of having withdrawn, so it can be along path P 3Contact with any chamber spare part when moving to this final position with simplification or accelerated motion.Implement in the aspect one, in case this mechanical arm blade on this intermediate point position, this base material promptly utilizes described transfer robot assembly 86, this moves horizontally assembly 90 and this system controller 101 along path P 3Move to this terminal point.Implement in the aspect one, this base material only utilizes a Control Shaft to be arranged on this terminal point (EP) and locates, for example moving by the transfer robot assembly 86 that exchanges with this controller 101.In this collocation method, the use of single axle can be simplified mobile control significantly, and minimizing moves to this terminal point (EP) required time of position from this intermediate point (IP).
11F illustrates the multistage transmission of three transfer paths and moves, and it is to be used for that a base material is held spare part 532A from the base materials in this this process chamber 532 to shift out.Carrying out before this multistage transmits mobile processing procedure, illustrate at 11F, this transfer robot assembly 86 generally is arranged on (SP of 11F figure) on this original position, it may need to utilize described vertical moving assembly 95 spare parts that this base material is moved to an expection vertical orientations (z direction), and utilizes described assembly 90 spare parts that move horizontally to move to an expection horizontal level (x direction).Implement in the aspect one, in case this base material be positioned on this original position, utilize with that described transfer robot assembly 86, this move horizontally assembly 90 and this system controller 101 with this base material along path P 1Move to this centre position (IP).In general, this intermediate point is that this mechanical arm blade has stretched into point enough far away, so it can be along path P 1Contact with any chamber spare part when moving to this intermediate point with simplification or accelerated motion.Implement in the aspect at another, this base material is to utilize the Control Shaft quantity that reduces along path P 1Be provided with.For example, can make this mechanical arm blade by the transfer robot assembly 86 that control exchanges with this controller 101, and this base material, move and realize single Control Shaft.In this collocation method, the use of single axle can be simplified the control that this base material or mechanical arm move significantly, and reduces and move to the required time of this centre position from this starting point.
After this base material was sent to this centre position, this mechanical arm blade can further be followed path P 2Stretch into this chamber.This path P 2, in some cases, may need this transfer robot assembly 86 and this to move horizontally the collaborative of 90 of assemblies and move, can when extending into this process chamber 532, not strike described substrate support spare part 532A to guarantee this mechanical arm blade 87.Implement in the aspect one, shown in 11F figure, this path P 2, it describes the moving of substrate support regional center point of this mechanical arm blade 87, is a linear path, and it extends to this final position (FP) from this intermediate point (IP).After this mechanical arm blade has been arranged on this final position, then utilize this vertical moving assembly 95 on the z direction, to move this transfer robot assembly 86, or utilize a base material to hold the described base material of spare part actuator (not shown) vertical moving and hold spare part 532A and this base material is held spare part 532A from this process chamber base material shift out.
After this base material is held spare part from described process chamber shifting out, this mechanical arm blade can be followed path P 3Withdrawal.This path P 3, in some cases, may need this transfer robot assembly 86 and this to move horizontally the collaborative of 90 of assemblies and move.Implement in the aspect one, this base material only utilizes a Control Shaft to be arranged on this terminal point (EP) and locates, for example moving by the transfer robot assembly 86 that exchanges with this controller 101.In this collocation method, the use of single axle can be simplified mobile control significantly, and minimizing moves to this terminal point (EP) required time of position from this final position (FP).Implement in the aspect one, shown in 11F figure, this path P 3, it describes the moving of substrate support regional center point of this mechanical arm blade 87, is a nonlinear path, and it extends to some terminal point (EP) from this final position (FP).
Single shaft mechanical arm assembly
10D and 11G-I illustrate another embodiment of a mechanical arm assembly 11, wherein this transfer robot assembly 86A is that a single shaft links 306 (10D figure) configuration, to transmit and base material to be set on the desired location of keeping somewhere second process chamber 532 in this cluster tool 10.This single shaft links 306 and generally contains a motor 320 (10D figure) and a mechanical arm blade 87, and it is to make the rotation of this motor 320 cause this mechanical arm blade 87 rotations through connection.The advantage of this collocation method is that this mechanical arm transmits the ability of the desired location of base material to this cluster tool, it is only with more uncomplicated and have more cost-benefit single axle and control this blade 87, also reduces described mechanical arm spare part simultaneously and extend into chance in the space that may be occupied by another mechanical arm during this transmission processing procedure.
10D illustrates a single shaft and links 306 sectional side view, and it generally contains a motor 320, a supporting bracket 321 and a mechanical arm blade 87, and it is through being connected to this motor 320.In one embodiment, as 10D figure those shown, this mechanical arm blade 87 is to be connected to one first pulley assembly 355.This first pulley assembly 355 has first pulley 358 that is connected with this motor 320, second pulley 356 that is connected with this mechanical arm blade 87, and the belt 359 that connects this first pulley 358 and this second pulley 356.In this configuration, this second pulley 356 is to be installed in by on described bearing 354A and the pivot 364 that this supporting bracket 321 is connected, so these motor 320 rotatable these mechanical arm blades.In an embodiment of this single shaft binding 306, this mechanical arm blade 87 is directly to be connected with this motor 320, with the quantity, the cost that reduces this mechanical arm assembly and the complexity that reduce the mechanical arm spare part, and reduce in this first pulley system of maintenance the needs of 355 spare part.This single shaft links 306 and can have superiority, because the mobile control system that should simplify, and mechanical arm and the system dependability therefore improved.
11G-J figure is the plane graph that single shaft links the transfer robot assembly 86 of 306 types, and it illustrates this single shaft and links 306 move, by being transmitted at base material when entering process chamber 532, and instant (object T for example 0-T 2) the plurality of continuous image of the position of each transfer robot assembly 86 spare parts is shown.Referring to 11G figure, in time T 0The time, this transfer robot assembly 86 generally is to utilize described vertical moving assembly 95 spare parts to be arranged on the expection vertical orientations (z direction), and utilizes described assembly 90 spare parts that move horizontally to be arranged on the expection horizontal direction (x direction).At T 0The time the mechanical arm position, illustrate in 11C, can be called original position (object SP discussed above) at this.Referring to 11H figure, in time T 1The time, this mechanical arm blade 87 is with pivoting point V 1Be the center rotation, thereby make this mechanical arm blade 87 rotations, this transfer robot assembly 86 position on the x direction is to utilize this system controller 101 to adjust simultaneously.Referring to 11I figure, in time T 2The time, this mechanical arm blade 87 has rotated to an expection angle, and this mechanical arm assembly has been arranged on the x direction position of an expection, so this base material is on the expection final position (object FP) in this process chamber 532, or changes on the hand position.11D figure discussed in the above, and the possible path P on the desired location that can be used to use this single shaft binding 306 the base material transmission to be entered this process chamber 532 also is shown 1-P 3Some examples.This base material is being sent to after this process chamber holds on the spare part, then can be but this mechanical arm blade of withdrawing out of order according to above-mentioned steps.
Move horizontally assembly
12A figure gets along the plane parallel with this y direction the profile that this moves horizontally an embodiment of assembly 90 is shown.12B figure is the sectional side view of an embodiment of this mechanical arm assembly 11, and its middle heart is cut down the length that this moves horizontally assembly 90.This moves horizontally assembly 90 and generally contains one and seal 460, one actuator assemblies 443 and a microscler mount pad 451.This actuator assemblies 443 generally contains at least one a horizontal linearity slide track component 468 and a moving assembly 442.This vertical moving assembly 95 moves horizontally assembly 90 by this microscler mount pad 451 with this and is connected.This microscler mount pad 451 is to support this to move horizontally the structural member of the various loads that createed when assembly 90 is provided with this vertical moving assembly 95.This moves horizontally assembly 90 and generally contains two horizontal linearity slide track components 468, its each all have a linear track 455, a drive tab 458 and supports mount pad 452, it supports the weight of this microscler mount pad 451 and vertical moving assembly 95.This configuration thereby provide this vertical moving assembly 95 to move horizontally the smooth and easy of assembly 90 length directions and shift accurately along this.This linear track 455 and this drive tab 458 can be linear ball bearing slide rail or known linear slide rail (linear guide), and it is known in skill.
Scheme referring to 12A-B, this moving assembly 442 generally contains microscler mount pad 451, a horizontal mechanical arm actuator 367 (10A and 12A figure), a driving belt 440 and two or more driving belt pulley 454A, and it is suitable for controlling along this length that moves horizontally assembly 90 position of this vertical moving assembly 95.In general, this driving belt 440 (for example is connected with this microscler mount pad 451, adhesion, bolt-lock or clamp) move horizontally the successive loops of length extension of assembly 90 with formation along this, and support by these two or more driving belt pulley 454A at this end points place that moves horizontally assembly 90.12B illustrates the configuration with four driving belt pulley 454A.In one embodiment, this horizontal mechanical arm actuator 367 is connected with one of them of described driving belt pulley 454A, so rotatablely moving of this pulley 454A can make the driving belt 440 and the microscler mount pad 451 that are connected with this vertical moving assembly 95 move along this horizontal linearity slide track component 468.In one embodiment, this horizontal mechanical arm actuator 367 is direct drive wire brushless servo motors, and it is suitable for moving this mechanical arm with respect to this horizontal linearity slide track component 468.
This seal 460 generally contain a pedestal 464, one or more outer wall 463 and one seals top board 462.This seals 460 and is suitable for covering and support this and moves horizontally spare part in the assembly 90, for safety and reduce and pollute.Because particulate is to be produced by the mechanical spare part that rotates, slides or contact with each other, guarantee that this spare part that moves horizontally in the assembly 90 can the contaminated substrate surface be not very important when described base material transmits by this cluster tool 10.This seals 460 and therefore forms an inclosure zone, and it is minimized in this and seals the chance that the particulates that produce in 460 arrive at substrate surface.Particle contamination is for the element qualification rate, so the CoO of cluster tool has a direct impact.
This seals top board 462 and contains a plurality of slits 471, and it makes a plurality of support mount pads 452 of described horizontal linearity slide track component 468 can extend through this and seals top board 462, and is connected with this microscler mount pad 451.Implement in the aspect one, the width of described slit 471 (size of this opening on the y direction) is to arrive at the chance that this moves horizontally assembly 90 outsides through custom-made by size with minimize particle.
This pedestal 464 that seals 460 is structural elements, its through design supporting the load that weight was createed of this microscler mount pad 451 and vertical moving assembly 95, and this vertical moving assembly 95 move the load that is createed.Implement in the aspect one, this pedestal 464 further contains a plurality of pedestal slit 464A, it is the length setting that moves horizontally assembly 90 along this, to allow that the air that enters this slit that seals top board 462 471 leaves this via described pedestal slit 464A and seals, to leave then the slit 10B that is formed in this cluster tool pedestal 10A.In an embodiment of this cluster tool 10, do not use cluster tool pedestal 10A, so this moves horizontally assembly 90 and the processing procedure frame can be arranged on the floor in the zone that this cluster tool 10 wherein is installed.Implement in the aspect one, this pedestal 464 is to utilize described sealing to support 461 and be arranged on this cluster tool pedestal 10A, or the floor, on, this moves horizontally the limited and not consistent flow path of assembly 90 to provide air to flow through.Implement in the aspect one, described sealing supported 461 and also can be suitable for as known vibration absorber.With a direction, preferably downward, flowing through, this seals air-flow that this environment control assembly 110 of 460 or dust free room environment produce and can help to reduce this and seal the chance that the particulates that produce in 460 arrive at substrate surface.Implement in the aspect one, being formed on these described slit 471 and described pedestal slit 464A that seal in the top board 462 is the air capacities that flow out from this environment control assembly 110 with restriction through being provided with, therefore can this seal top board 462 outside and this seal between 460 interior zone reach at least 0.1 " pressure drop of wg.Implement in the aspect one, form this and seal 460 middle section and this zone is separated with these other parts that move horizontally assembly to utilize described inwall 465.The interpolation of inwall 465 can minimize and enter this and seal 460 air re-circulation, and as an air-flow guide features.
Referring to 12A and 13A figure, seal 460 one implement in the aspect at this, this driving belt is set with at driving belt 440 be formed on this and seal 472 formation of driving belt slit small gap top board 462 in.This collocation method can have superiority, and arrives at this and seals 460 outsides to avoid sealing in 40 particulate that produces at this.
Referring to 12C figure, this seal 460 another implement in aspect, a fan unit 481 can be connected with this pedestal 464, and is suitable for sealing 460 inside from this and drawing air by being formed on this pedestal 464 interior pedestal slit 464A.Implement in the aspect at another, this fan unit 481 impels the air that contains particulate by a filter 482, to discharge (seeing object A) preceding particulate of removing at it by this cluster tool pedestal 10A or floor.In this collocation method, a fan 483 is contained in this fan unit, be to create negative pressure through design to seal at this 460 in, so this seals air outside and can be sucked in this seals, and limit the possibility that these particulates that seal generations in 460 spill.In one embodiment, this filter 482 is a HEPA type filter maybe can be removed the particulate that is produced from air other type filters.Implement in the aspect one, the size of the length of described slit 471 and width and this fan 483 be through selecting so that this seal 460 outsides a bit and the pressure drop that between this seals any of 460 inside, produces between about 0.02 inch water column (～5 handkerchief) and about 1 inch water column (～250 handkerchief).
Move horizontally among the embodiment of assembly 90 at this, a protection belt 479 is set covers described slit 471, arrive at base material to avoid this to move horizontally the assembly 90 inner particulates that produce.In this collocation method, this protection belt 479 forms the successive loops that extends along this length that moves horizontally assembly 90, and is arranged in this slit 471, so that be formed on this protection belt 479 and this open area that seals 462 on top board is as far as possible little.In general, this protection belt 479 is to be connected (for example adhesion, bolt-lock or clamp) with this support mount pad 452, move horizontally the successive loops of length extension of assembly 90 with formation along this, and support by these two or more driving belt pulley (not shown) at this end points place that moves horizontally assembly 90.In the configuration shown in the 12C figure, this protection belt 479 can highly be located and is connected (not shown) with this support mount pad 452 at this slit 471, and pass this in the passage 478 in being produced on this pedestal 464 and move horizontally assembly 90 and turn around, and form a successive loops.Should (etc.) protect belt 479 so move horizontally the interior zone of assembly 90 around this.
The vertical moving assembly
13A-B illustrates an embodiment of this vertical moving assembly 95.13A figure is the plane graph of this vertical moving assembly 95, and each enforcement aspect of this design is shown.This vertical moving assembly 95 generally contains a vertical support 570, one vertical actuator assemblies 560, a fan component 580, a supporting bracket 321 and and vertically seals 590.This vertical support 570 generally is a structural elements, and it is bolt-lock, welding or is installed on this microscler mount pad 451, and is suitable for supporting each spare part in this vertical moving assembly 95.
This fan component 580 generally contains a fan 582 and forms and substantial regional 584 tube 581 of these fan 582 fluid communication.This fan 582 generally is to be suitable for utilizing some machine tool to make the element of air flows, for example, and the fan blade of rotation, mobile bellows, mobile dividing plate or the high-accuracy mechanical gear that moves.This fan 582 is suitable for sealing 586 formation of 590 interior zones at this and seals the negative pressure of 590 outsides with respect to this, by creating negative pressure in enriching zone 584, itself and a plurality of slits 585 and these interior zone 586 fluid communication that are formed on this tube 581.Implement in the aspect one, the quantity of described slit 585, size and distribution, it can be circle, ellipse or rectangle, is to draw air through design fifty-fifty with the All Ranges from this vertical moving assembly 95.Implement in the aspect one, interior zone 586 also can be suitable for holding and be used for reaching a plurality of cable (not shown) that transmit signals with this system controller 101 between the spare part of each mechanical arm nextport hardware component NextPort 85 and vertical moving assembly 95.Implement in the aspect one, the air that this fan 582 is suitable for discharging from this interior zone 586 is sent in this middle section that moves horizontally assembly 90 430, and it moves horizontally assembly 90 by described pedestal slit 464A from this at this and discharges.
This vertical actuator assemblies 560 generally contains a vertical motor 507 (12A and 13B figure), a pulley assembly 576 (13B figure) and a vertical slide rail assembly 577.This vertical slide rail assembly 577 generally contains a linear track 574 and a drive tab 573, and its movable block 572 with vertical support 570 and this pulley assembly 576 is connected.This vertical slide rail assembly 577 is suitable for guiding and provides this mechanical arm nextport hardware component NextPort 85 smooth and easy and shift, and also support this mechanical arm nextport hardware component NextPort 85 accurately and move weight and the load that is createed along the length of this vertical moving assembly 95.This linear track 574 and this drive tab 573 can be linear ball bearing slide rail, accurate axle slide type rail system or known linear slide rail, and it is known in skill.Typical linear roller bearing holds slide rail, accurate axle slide type rail system or known linear slide rail and can buy from the Daedal Division of the Parker HannifinCorporation of SKF USA company or Binzhou Irwin.
Referring to 13A and 13B figure, this pulley assembly 576 generally contains a driving belt 571, a movable block 572 and two or more pulley 575 (for example element 575A and 575B), it is rotatably connected with this vertical support 570 and vertical motor 507, and make a supporting bracket (for example element 321A-321B of 13B figure), thereby mechanical arm nextport hardware component NextPort 85, can be along the length setting of this vertical moving assembly 95.In general, this driving belt 571 is connected (for example adhesion, bolt-lock or clamp) with this movable block 572, forming the successive loops that extends along the length of this vertical moving assembly 95, and support (for example element 575A and 575B) by these two or more driving belt pulleys 575 at the end points place of this vertical moving assembly 95.13B illustrates the configuration with two driving belt pulley 575A-B.Implement in the aspect one, this vertical motor 507 is connected with one of this driving belt pulley 575B, therefore this pulley 575B rotatablely move can make this driving belt 571 and should (etc.) supporting bracket, thereby mechanical arm nextport hardware component NextPort 85 moves along this vertical linearity slide track component 577.In one embodiment, this vertical motor 507 is direct drive wire brushless servo motors, and it is suitable for moving this mechanical arm nextport hardware component NextPort 85 with respect to this vertical slide rail assembly 577, does not therefore need this driving belt 571 and two or more pulley 575.
This vertically seals 590 and generally contains one or more outer wall 591 and one and seal top 592 (9A figure) and slit 593 (9A, 12A and 13A figure).This vertically seals 590 spare parts that are suitable for covering in this vertical moving assembly 95, for safety and minimizing pollution.Implement in the aspect one, this vertically seals 590 and is connected with this vertical support 570 and by its support.Because particulate is to be produced by the mechanical spare part that rotates, slides or contact with each other, guarantee that the spare part in this vertical moving assembly 95 can the contaminated substrate surface be not very important when transmitting described base material by this cluster tool 10.This seals 590 and therefore forms an inclosure zone, and it is minimized in this and seals the chance that the particulates that produce in 590 arrive at substrate surface.Particle contamination is for the element qualification rate, so the CoO of cluster tool has a direct impact.Therefore, implement in the aspect one, the size (for example flow velocity) of the size of this slit 593 (being length and width) and/or this fan 582 is to be configured to such an extent that make and can minimize from the particle number that this vertical moving assembly 95 is deviate from.Implement in the aspect one, the size of the length of this slit 593 (Z direction) and width (directions X) and this fan 582 is through selecting, and make this outer wall 591 outsides a bit with in the pressure drop of 586 generations of this interior zone between about 0.02 inch water column (～5 handkerchief) and about 1 inch water column (～250 handkerchief).Implement in the aspect one, the width of this slit 593 is between between about 0.25 inch and about 6 inch.
Embodiment described herein is better than Prior Art design usually, and it is that be suitable for utilizing must folding, intussusception or indentation self is interior lifts described mechanical arm spare part with the spare part that reaches its minimum upright position.The generation of subject under discussion be because the extreme lower position of this mechanical arm be subjected to must folding, the size of the interior vertical moving spare part of intussusception or indentation self and orientation are limit is the interference of Zhao Yin in this vertical moving spare part.When it can't further be withdrawn, the position of this Prior Art vertical moving spare part is commonly called " idle space (dead space) ", or " solid height (solid height) ", because this minimum mechanical arm position is subjected to the fact of the restriction of described withdrawal spare part height.In general, this problem of embodiment escape described herein, because there is not spare part in this vertical moving assembly 95 bottom of this one or more transfer robot assembly 86 in supported underneath, so this extreme lower position only is subjected to the length of this linear track 574 and the size of described mechanical arm nextport hardware component NextPort 85 spare parts is limit.In one embodiment, shown in 13A-13B figure, described mechanical arm assembly is to be supported in the cantilever beam mode by the supporting bracket 321 that is installed on this vertical slide rail assembly 577.It should be noted that the spare part collocation method of this supporting bracket 321 shown in the 10C-10E and this mechanical arm nextport hardware component NextPort 85 and be not intended to be limited in this described scope of the present invention,, the orientation of this supporting bracket 321 and this mechanical arm nextport hardware component NextPort 85 reaches the rigidity of structure of expection because can adjusting, and/or the normal trajectories of the vertical moving assembly 95 of expection.
The embodiment of vertical moving assembly 95 described herein also is better than the design of Prior Art vertical moving, for example must folding, person in intussusception or the indentation self, stem from moving of this mechanical arm nextport hardware component NextPort 85 because move and accuracy and/or the accuracy improved along the pressure of a vertical slide rail assembly 577.Therefore, implement in the aspect of the present invention one, always moving of this mechanical arm nextport hardware component NextPort guides (for example the vertical slide rail assembly 577) by a rigid member, and it provides the described spare part rigidity of structure and position precision, when its length along this vertical moving assembly 95 moves.
Two arrangement of components methods that move horizontally
14A illustrates and uses two embodiment that can be used to as the mechanical arm assembly 11 that moves horizontally assembly 90 of the mechanical arm assembly 11A-H shown in the 1-6 figure above one or more.In this collocation method, this mechanical arm assembly 11 generally contains a mechanical arm nextport hardware component NextPort 85, a vertical moving assembly 95 and two horizontal mechanical arm components 90 (for example element 90A and 90B).Therefore can utilize the collaborative instruction of moving and transmitting of described mechanical arm nextport hardware component NextPort 85, vertical mechanical arm assembly 95 and horizontal mechanical arm component 90A-B that a base material is arranged on x, the y and z position of any expection from this system controller 101.One advantage of this collocation method is this vertical moving assembly 95 during dynamically the moving of this direction of transfer (x direction), and the rigidity of these mechanical arm assembly 11 structures can strengthen, and allowing has higher acceleration during moving, and therefore has the base material delivery time of improvement.
Implement in the aspect one, this vertical moving assembly 95, move horizontally assembly 90B on this and contain the basic spare part identical, so use the components identical symbol in due course with top debater with the spare part that this time moves horizontally assembly 90A.Implement in the aspect one, vertical moving assembly 95 and the microscler mount pad 451A of this time and upward microscler mount pad 451B be connected, it is that utilization is retained in each and moves horizontally the interior moving assembly 442 of assembly 90A and 90B along the setting of x direction.In another embodiment of this mechanical arm assembly 11, single moving assembly 442 is installed in described moving horizontally on one of them of assembly (for example element 90A), and other to move horizontally assembly (for example element 90B) effect only be a support, to guide an end of this vertical moving assembly 95.
The base material grouping
More competitive on market in trial; thereby need to reduce under the effort of cost of carry; electronic component manufacturer spends the plenty of time usually and attempts optimization processing procedure program and chamber processing procedure time, to be issued to possible maximum base material production capacity in known cluster tool structural limitations and chamber processing procedure time.In the processing procedure program with short chamber processing procedure time and a large amount of fabrication steps, most time of handling base material is occupied at the processing procedure that transmits described base material between each process chamber of instrument of trooping.In an embodiment of this cluster tool 10, this CoO be by with base material grouping and with two or more be that one group mode transmits and handles described base material and reduces.Therefore this type of parallel processing increases system's production capacity, and reduces by a mechanical arm and transmit mobile that a collection of base material must carry out between described process chamber, therefore reduces the loss of this mechanical arm and increases system dependability.
In an embodiment of this cluster tool 10, this front end robot arm component 15, described mechanical arm assembly 11 (for example element 11A, 11B of 1-6 figure or the like) and/or this rear robot arm component 40 can be suitable for transmitting base material in two or more one group modes, to improve system's production capacity by the described base material of parallel processing.For example, implement in the aspect one, this mechanical arm nextport hardware component NextPort 85 has a plurality of transfer robot assembly 86A that can independently control and 86B (10B figure), it is to be used for drawing one or more base material from the plurality of process chamber, transmits and place described base material then in a plurality of process chambers subsequently.Implement in the aspect at another, each transfer robot assembly 86 (for example 86A or 86B) is suitable for separately drawing, transmits and puts down a plurality of base materials.In this case, for example, mechanical arm nextport hardware component NextPort 85 with two transfer robot assemblies 86 can be suitable for utilizing the first blade 87A to draw base material from first process chamber " W ", therefore move to second process chamber then and draw a base material to utilize the second blade 87B, the mode that two base materials can a group transmits and puts down.
In an embodiment of this mechanical arm assembly 11, as 15A figure those shown, this tool arm nextport hardware component NextPort 85 contains two mechanical arm nextport hardware component NextPorts 85 (for example element 85A and 85B), it has at least one transfer robot assembly 86, it is to separate a desired distance or height (element A), and is suitable for drawing or put down base material simultaneously from two different process chambers.The distance that these two mechanical arm nextport hardware component NextPorts are 85, or difference in height A can be configured to correspondence and be installed in interval between two process chambers within the described processing procedure frame, therefore makes once these two process chambers of access simultaneously of this mechanical arm assembly 11.This collocation method is because can the two or more base materials of block transfer, therefore has superiority especially improving on base material production capacity and the cluster tool reliability.
Mechanical arm blade hardware configuration method
16A-16D illustrates an embodiment of a mechanical arm blade assembly 900, and it can be with some embodiment described herein and in order to support and keep somewhere a base material " W ", when it transmits by this cluster tool 10 by a mechanical arm assembly.In one embodiment, this mechanical arm blade assembly 900 can be suitable for replacing this blade 87, therefore can be connected with described first pulley system 355 shown in the 10A-10E figure or second pulley system, 361 spare parts at the tie point place (element CP) that is formed on this blade pedestal 901.Mechanical arm blade assembly 900 of the present invention is suitable for grasping, and " seizing ", or limit a base material " W ", so the acceleration that base material is experienced during the transmission processing procedure can not make this substrate location remove from the known location on this mechanical arm blade assembly 900.Base material mobile during transmitting processing procedure can produce particulate and reduce the base material setting accuracy and the repeatability of this mechanical arm.Under situation worst, described acceleration can allow base material drop out from this mechanical arm blade assembly 900.
The acceleration of this base material experience can be divided into three parts: horizontal radial acceleration part, horizontal axis acceleration part and normal acceleration part.The acceleration that this base material experienced produces when this base material quickens on X, Y and Z direction or slows down, during this base material moves through this cluster tool 10.Referring to 16A figure, this horizontal radial acceleration part and this horizontal axis acceleration partly are to be shown as strength F respectively AAnd F RThe strength that is exposed to and the quality of this base material multiply by the base material acceleration, and to deduct any frictional force that is createed between this base material and this mechanical arm blade assembly 900 spare parts relevant.In the above-described embodiments, this radial acceleration is normally rotated into when location at base material by a transfer robot assembly 86 and takes place, and can either direction (promptly+Y or-the Y direction) on work.This axial acceleration normally at base material by mobilely producing when being arranged on the directions X that this moves horizontally assembly 90 and/or this transfer robot assembly 86, and can either direction (promptly+X or-directions X) go up and act on.This normal acceleration normally takes place when this base material is arranged on the z direction by this vertical moving assembly 95, and can either direction (promptly+Z or-the Z direction) on or cantilever beam act on when bringing out structure quake.
16A figure is the schematic plan view of an embodiment of this mechanical arm blade assembly 900, and it is suitable for supporting this base material " W ".This mechanical arm blade assembly 900 generally contains a blade pedestal 901, an actuator 910, a brake mechanism 920, a position sensor 930, a grip module 905, one or more reactive means 908 (for example illustrating) and one or more substrate support spare part 909.This grip module 905 generally contains a clamp pad 906 and is installed in one or more contact member 907 (i.e. two contact members shown in the 16A figure) on this clamp pad 906.This clamp pad 906, contact member 907, reactive means 908, and blade pedestal 901 can or can bear the acceleration that this mechanical arm blade assembly 900 experiences (10-30m/s for example by metal (for example aluminium, the SST of aluminium, coating nickel), ceramic material (for example carborundum) reliably during this transmission processing procedure 2), and not can because of and this base material between reciprocation and produce or attract the plastic material of particulate to make.16B figure is the concise and to the point profile in side of the mechanical arm blade assembly 900 shown in the 16A figure, and it has passed through the central cutout of this mechanical arm blade assembly 900.For the sake of simplicity, the spare part that is arranged on behind the section plane of 16B figure is stood in a corner (for example contact member 907), but this brake assemblies 930 is still stayed among this figure.
Referring to 16A and 16B figure, this base material during use " W " be sent to base material by the contact member 907 of this actuator 910 by this grip module 905 " W " grasping force (F 1) compressing leans on the indwelling surface 908B of this reactive means 908.Implement in the aspect one, described contact member 907 is suitable for contact and forces this base material " W " the edge " E " lean on this and keep somewhere surperficial 908B.Implement in the aspect one, this grasping force can between about 0.01 and about 3 kgfs (kgf) between.In one embodiment, shown in 16A figure, tend to allow described contact member 907 with an angular distance " A " spaced apart, to provide this base material axially and support radially, when it is transmitted by this mechanical arm assembly 11.
Limit this base material so that its processing procedure that can utilize this mechanical arm blade assembly 900 to transmit reliably by this cluster tool 10 needs three steps to finish usually.It should be noted that one or more step that describes below can finish synchronously or in regular turn, and can not depart from base region of the present invention described herein.Before beginning to draw the processing procedure of a base material, this grip module 905 (not shown) of on+directions X, withdrawing.This first step is since a substrate support spare part (for example element 532A, the 2A of 11A-11I figure, channel position 9A-H of 3A figure or the like) when drawing a base material, so this base material rests on respectively on the substrate support surface 908A and 909A on this reactive means 908 and the substrate support spare part 909.Next, this grip module 905 moves on directions X, is sent to base material up to this base material by this actuator 910 contact member 907 and this reactive means 908 by this grip module 905 " W " grasping force (F 1) be limited on this mechanical arm blade assembly 900 till.In the end in step, this brake mechanism 920 keeps this grip module 905, or " lock " in position go up, and changes this grasping force (F significantly to avoid the acceleration of this base material during this transmission processing procedure 1), thereby this base material can be moved with respect to described stayed surface.After this brake mechanism 920 limits this grip module 905, this base material can be sent to another point of this cluster tool 10.Desire is put into base material on the one substrate support spare part, can reversed sequence finish above-mentioned steps.
Implement in the aspect at one of this mechanical arm blade assembly 900, this brake mechanism 920 is to be suitable for during transmitting at least one direction (for example+directions X) to limit moving of this grip module 905.At the grasping force (F that supplies with this grip module 905 1) limit on the opposite direction ability that this grip module 905 moves can avoid this (etc.) the horizontal axis acceleration significantly reduces this grasping force, thereby this base material can be moved, this may produce particulate, or drops from this blade assembly 900 during transmitting.In another implements aspect, this brake mechanism 920 be suitable on both direction at least (for example+X and-directions X) limit moving of this grip module 905.This configuration in, with this grasping force (F 1) limit on the parallel direction of direction ability that this grip module moves can avoid this (etc.) the horizontal axis acceleration significantly increases this grasping force, this may make base material damage or be cracked, or significantly reduces, this may produce particulate or allow this base material drop.In another embodiment again, this brake mechanism 905 is suitable for limiting all six-freedom degrees of this grip module 905,, or minimizes the moving of this base material avoiding.Limiting ability that this grip module 905 moves on an anticipated orientation can utilize and be suitable for limiting the spare part that this grip module 905 moves and finish.Can be used to limit the typical spare part that this grip module 905 moves and comprise known latch mechanism (for example bolt type mechanism), or other similar devices.Implement in the aspect one, the mobile of this grip module 905 is by supplying with a restraint (the element F of 16A figure 2) mechanism limit opposite brake assemblies 920A for example discussed above.
In one embodiment, use a position sensor 930 to respond to the position of this clamp pad 906, and make this controller 101 any time during transmitting put the state of judging this blade assembly 900.Implement in the aspect one, this position sensor 930 is suitable for sensing not, and base material is arranged on this blade assembly 900, or this base material ( element 908A and 909A) dislocation on this stayed surface, by notice that this clamp pad 906 moves too far on-directions X, because the distance between the strength that the position of this clamp pad 906 and this actuator 910 transmit.Similarly, the existence that this position sensor 930 and controller 101 can be suitable for sensing a base material, by the position of noticing this clamp pad 906 when existing in the acceptable position range corresponding to a base material.Implement in the aspect one, this position sensor 930 by be arranged on a plurality of optical position inductors, the linear variable differential transformer (LVDT) (LVDT) on the desired point or can be used to distinguish this clamp pad 906 accept form with other analogous position induction devices of unacceptable position.
16C figure schematically illustrates the plane graph of an embodiment of a blade assembly (element 900A), and it has the opposite brake assemblies 920A of the schematic representation of the brake mechanism 920 that replaces 16A figure.This opposite brake assemblies 920A is suitable for during base material transmits this clamp pad 906 being limited on the location.Embodiment shown in the 16C figure is similar to the collocation method shown in the 16A-B figure, except adding this opposite brake assemblies 920A, actuator assemblies 910A and a plurality of support spare part, therefore, for the sake of simplicity, uses the components identical symbol in due course.The embodiment of this mechanical arm blade assembly 900A generally contains a blade pedestal 901, an actuator assemblies 910A, an opposite brake mechanism 920A, a position sensor 930, a grip module 905, a reactive means 908 and a substrate support spare part 909.In one embodiment, this clamp pad 906 is to be installed on the linear slide rail (not shown), and it is connected with this blade pedestal 901 to aim at and to limit this clamp pad 906 moving on anticipated orientation (for example directions X).
In one embodiment, this actuator assemblies 910A connecting plate 916 of containing an actuator 911, an actuator connecting rod 911A, a coupling member 912, a slide track component 914, a connecting elements 915 and being connected with this coupling member 912 and being connected with clamp pad 906 by this connecting elements 915.This coupling member 912 can be generally to be used for the known binding that various mobile control spare parts link together is engaged or " float and engage (floating joint) ".In one embodiment, this connecting plate 916 is directly to be connected with the actuator connecting rod 911A of this actuator 911.This slide track component 914 can be known linear slide rail assembly, or the ball bearing slide rail, and it is connected with aligning and guides moving of this connecting plate with this connecting plate 916, thereby this clamp pad 906 is mobile.This actuator 911 is suitable for by mobile this connecting rod 911A, coupling member 912, connecting elements 915 and connecting plate 916 this clamp pad 906 being set.Implement in the aspect one, this actuator 911 is a pneumatic cylinder (aircylinder), linear motor or other analogous setting and load transfer device.
In one embodiment, this opposite brake assemblies 920A contains an actuator 921, and it is connected with this blade pedestal 901, and links with a braking contact member 922.In this collocation method, this opposite brake assemblies 921A is suitable for " pinning ", or restriction, and this clamp pad 906 stems from the restraint F that this opposite brake assemblies 920A produces 2In one embodiment, this restraint F 2Be to form, when this actuator 921 forces (element F by the frictional force that is formed on 922 of this connecting plate 916 and this braking contact members 3) when this braking contact member 922 is leaning on this connecting plate 916.In this collocation method, this slide track component 914 is to accept the F of braking force institute that this actuator 921 transmits through design 3The lateral load (side load) that produces.The restraint F that this clamp pad 906 is remained on the location that produces 3Equal that this braking force multiply by this braking contact member 922 and 916 static friction that create of this connecting plate are several.The size of this actuator 921 and braking contact member 922 and this connecting plate 916 materials and surface-treated are selected can optimization, and any strength that the restraint that is produced to guarantee is always produced than this base material accelerating period during transmitting is big.Implement in the aspect restraint F that is produced one 2About 0.5 and about 3.5 kgfs (kgf) scope in.Implement in the aspect one, this braking contact member 922 can be made by rubber or polymer-based material, for example polyurethane (polyurethane), ethylene-propylene rubber (EPDM), natural rubber or other polymeric materials that is fit to, and this connecting plate 916 is to be made by aluminium alloy or stainless steel alloy.In one embodiment, direct and these clamp pad 906 bindings of the connecting rod 911A of this actuator, and the braking contact member 922 of this opposite brake assemblies 920A is suitable for contacting this connecting rod 911A or this clamp pad, moves to avoid it.
16D figure schematically illustrates the plane graph of the embodiment of this blade assembly 900A, and it has the configuration of the opposite brake assemblies 920A different with 16C figure those shown.In this collocation method, the pivoting point that this opposite brake assemblies 920A contains the lever arm 923 that at one end is connected with this braking contact member 922, then has this actuator 921 and be arranged on somewhere between these lever arm two ends at this lever arm other end " P ".Implement in the aspect one, this pivoting point is connected with this blade pedestal 901, and is suitable for the strength F that supports this lever arm 923 and be supplied to this lever arm 923 from this actuator 921 when oppressed this connecting plate 916 of dependence of this braking contact member 922 4In this collocation method, by this pivoting point strategically is set " P ", can utilize this lever arm 923 to create mechanical dominance, it can be used to supply with surpass directly and produces the braking force F that spare part contacts accessible strength with the strength of this actuator 921 3, thereby restraint F 2
16D figure also illustrates the embodiment of this blade assembly 900A, its contain be arranged on 915 of this clamp pad 906 and connecting elementss comply with member 917, exist or do not exist on this blade assembly 900A to help the induction base material.Whether this is complied with, and member is general adds and this extra degree of freedom that inductor 930 and controller 101 and usefulness are set, exist on this blade assembly 900A to respond to this base material, in case this restraint F 2Be applied on the connecting plate 916.If there is not the existence of other degrees of freedom among this blade assembly 900A, then prevents or suppress the restraint F that this clamp pad 906 moves 2Meeting thus make this position sensor 930 and controller 101 before base material transmits or during can't detect moving or loss of base material.
Therefore, in one embodiment, this actuator assemblies 910 contains generally that an actuator 911, an actuator connecting rod 911A, a coupling member 912, a slide track component 914, a connecting elements 915, are complied with member 917, a clamp pad slide track component 918 and is connected with this coupling member 912 and by this connecting elements 915 and comply with the connecting plate 916 that member 917 is connected with this clamp pad 906.This clamp pad slide track component 918 generally is a known linear slide rail assembly, or the ball bearing slide rail, and it is connected with this clamp pad 906 to aim at and to guide it to move.
This complies with member 917 generally is an elasticity spare part, for example a spring, bool or other similar devices, and it can apply grasping force F in release 1Transmit enough strength during potential energy that its deflection during this time produces, to move at this base material or to make this clamp pad 906 move the amount that can measure by this position sensor 930 easily when " wrong path ".Implement in the aspect one, this complies with member 917 is springs, and it has enough low spring constant (spring rate), and makes it use this grasping force F 1Reach during to this base material " solid height ".In another implements aspect, this connecting elements 915, comply with member 917 and clamp pad 906 is to make through design using this grasping force F 1The time, this connecting elements 915 can contact with this clamp pad 906, or the bottom contact is on this clamp pad.One advantage of the collocation method of these types is that it avoids grasping force F 1During transmitting, change, because this complies with further deflection of member 917, the acceleration that Zhao Yin is being exposed to during this base material is transmitting, the loss that this can reduce the particle number that is produced and be avoided this base material.
Following steps are intended to illustrate this and comply with member 917 and how can apply this restraint F 2To this connecting plate 916, be used for responding to the example of the existence of this base material on this blade assembly 900A.In this first step, this actuator 911 applies this grasping force F by contact member 907 and this reactive means 908 in this grip module 905 1To this base material, this makes this comply with member 917 deflections and allows the slit of 906 of this connecting elements 915 and this clamp pad " G " amount of dwindling.This controller 101 is checked to confirm that this clamp pad 906 is positioned on the acceptable position by the information of monitoring and annotation receives from this position sensor 930 then.In case sense this base material, therefore be the desired location place on this blade assembly 900A, promptly apply this restraint F 2To this connecting plate 916 with limit its with this grasping force (F 1) moving on the parallel direction of direction.Move as if this base material then, and/or become " removing to grasp (un-gripped) ", this complies with the potential energies that produce in the member 917, because apply this grasping force F 1Deflection during this time can make this clamp pad 906 move apart this restricted connecting plate 916, and it is then by this position sensor 930 and controller 101 inductions.The mobile meeting of this clamp pad 906 of these position sensor 930 annotations makes this controller 101 stop this transmission processing procedure or avoids transmitting processing procedure and takes place, and it can help to avoid the infringement of this base material and system.
Though aforementioned is at embodiments of the invention, other and further embodiment of the present invention can design not deviating under its base region, and its scope is defined by appended claim.

Claims (87)

1. cluster tool of handling a base material, it comprises at least:
One first processing procedure frame, contain:
One first group of two or more process chamber that vertically stack; And
One second group of two or more process chamber that vertically stack, wherein two or more substrate process chambers of this first and second group have one first side of arranging along a first direction;
One first mechanical arm assembly is suitable for transmitting the substrate process chamber of a base material to this first processing procedure frame, and wherein this first mechanical arm assembly comprises:
One first mechanical arm, have a mechanical arm blade and a position base material receiving surface thereon, wherein this first mechanical arm defines a transit area, and be suitable for a base material is arranged on one or more aspect that is contained in usually in one first plane, wherein this first plane and this first direction and parallel with the vertical second direction of this first direction;
One first moving assembly is suitable for this first mechanical arm is arranged on vertical with this first plane usually third direction; And
One second moving assembly is suitable for this first mechanical arm is arranged on parallel with this first direction usually direction;
Wherein when this base material is set on the base material receiving surface of this mechanical arm blade, the width of this transit area parallel with this second direction and than the substrate sizes of this second direction about 5% to about 50%.
2. cluster tool as claimed in claim 1, wherein above-mentioned mechanical arm assembly more comprises:
One second mechanical arm has the mechanical arm blade that has a base material receiving surface, and wherein this second mechanical arm is suitable for a base material is arranged on one or more aspect that is contained in usually in one second plane, and wherein this first plane and this second plane separate a segment distance.
3. cluster tool as claimed in claim 1, the first wherein above-mentioned moving assembly more comprises:
One actuator assemblies is suitable for vertically being provided with this first mechanical arm, and wherein this actuator assemblies more comprises:
One vertical actuator is suitable for vertically being provided with this first mechanical arm; And
One vertical slide rail is suitable for guiding this first mechanical arm when it is transferred by this vertical actuator;
One seals, and has an interior zone, and it is the spare part that is selected from a group that is made up of this vertical actuator and this vertical slide rail around at least one; And
One fan, with this interior zone fluid communication, it is to be suitable for sealing the inner negative pressure that produces at this.
4. cluster tool as claimed in claim 1, wherein above-mentioned cluster tool more comprises:
One second processing procedure frame, contain:
One first group of two or more process chamber that vertically stack; And
One second group of two or more process chamber that vertically stack, wherein two or more substrate process chambers of this first and second group have one first side of arranging along a first direction;
One second mechanical arm assembly is suitable for transmitting the substrate process chamber of a base material to this second processing procedure frame, and wherein this second mechanical arm assembly comprises:
One second mechanical arm, have one second a mechanical arm blade and a position base material receiving surface thereon, wherein this second mechanical arm defines a transit area, and be suitable for a base material is arranged on one or more aspect that is contained in usually in one second plane, wherein this second plane and this first direction and parallel with the vertical second direction of this first direction;
One first moving assembly has an actuator assemblies, is suitable for this second mechanical arm is arranged on vertical with this second plane usually third direction; And
One second moving assembly has an actuator assemblies, is suitable for this second mechanical arm is arranged on parallel with this first direction usually direction;
Wherein when this base material is set on the base material receiving surface of this second mechanical arm blade, the width of this second transit area parallel with this second direction and than the substrate sizes of this second direction about 5% to about 50%.
5. cluster tool as claimed in claim 4, wherein above-mentioned cluster tool more comprises:
One three-mechanical arm assembly is suitable for transmitting the substrate process chamber of a base material to this first processing procedure frame and this second processing procedure frame, and wherein this three-mechanical arm assembly comprises:
One three-mechanical arm, have a three-mechanical arm blade and a position base material receiving surface thereon, wherein this three-mechanical arm defines a transit area, and be suitable for a base material is arranged on one or more aspect that is contained in usually in one the 3rd plane, wherein the 3rd plane and this first direction and parallel with the vertical second direction of this first direction;
One first moving assembly has an actuator assemblies, is suitable for this second mechanical arm is arranged on vertical with the 3rd plane usually third direction; And
One second moving assembly has an actuator assemblies, is suitable for this second mechanical arm is arranged on parallel with this first direction usually direction;
Wherein when this base material is set on the base material receiving surface of this three-mechanical arm blade, the width of the 3rd transit area parallel with this second direction and than the substrate sizes of this second direction about 5% to about 50%.
6. cluster tool of handling a base material, it comprises at least:
One first processing procedure frame, it contains two or more group with two or more substrate process chambers of vertically stacking, wherein these two or more substrate process chambers of two or more group have one first side of arranging along a first direction, to pass through the described substrate process chamber of this side access;
One second processing procedure frame, it contains two or more group with two or more substrate process chambers of vertically stacking, wherein these two or more substrate process chambers of two or more group have one first side of arranging along a first direction, to pass through the described substrate process chamber of this side access;
One first mechanical arm assembly is arranged between this first processing procedure frame and this second processing procedure frame, and it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this first side, and wherein this first mechanical arm assembly comprises:
One mechanical arm is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this mechanical arm is arranged on usually a vertical actuator assemblies on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this mechanical arm is arranged on usually a motor on the direction parallel with this first direction;
One second mechanical arm assembly is arranged between this first processing procedure frame and this second processing procedure frame, and it is to be suitable for a base material is sent to substrate process chamber this second processing procedure frame from this first side, and wherein this second mechanical arm assembly comprises:
One mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this mechanical arm is arranged on usually a vertical actuator assemblies on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this mechanical arm is arranged on usually a motor on the direction parallel with this first direction; And
One three-mechanical arm assembly, be arranged between this first processing procedure frame and this second processing procedure frame, it is to be suitable for a base material is sent to the substrate process chamber this first processing procedure frame or is sent to this second processing procedure frame from this first side from this first side, and wherein this three-mechanical arm assembly comprises:
One mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this mechanical arm is arranged on usually a vertical actuator assemblies on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this mechanical arm is arranged on usually a motor on the direction parallel with this first direction.
7. cluster tool as claimed in claim 6, more comprising one seals, it has one or more sidewall that forms a process zone, be provided with this first processing procedure frame, the second processing procedure frame, the first mechanical arm assembly, second mechanical arm assembly and the three-mechanical arm assembly in this process zone, wherein a fan is to be suitable for making air by a filter and enter this process zone.
8. cluster tool as claimed in claim 7 more comprises one the 4th mechanical arm assembly, and it is arranged in this process zone, and is suitable for transmitting a base material and passes in and out a process chamber and in this first processing procedure frame and be positioned at this and seal outside position.
9. cluster tool as claimed in claim 6 more comprises:
One the 4th mechanical arm assembly, it is to be provided with between this first processing procedure frame and this second processing procedure frame, be suitable for a base material is sent to the substrate process chamber this first processing procedure frame or is sent to this second processing procedure frame from this first side from this first side, wherein the 4th mechanical arm assembly comprises:
One mechanical arm, it is to be suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this mechanical arm is arranged on usually a vertical actuator assemblies on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this mechanical arm is arranged on usually a motor on the direction parallel with this first direction.
10. cluster tool as claimed in claim 6 more comprises:
One wafer cassette, it is suitable for keeping somewhere two or more base materials; And
One first passage chamber, it is suitable for receiving a base material from a front end robot arm and this first mechanical arm assembly;
One second channel chamber, it is suitable for receiving a base material from this front end robot arm and this second mechanical arm assembly;
One third channel chamber, it is suitable for receiving a base material from this front end robot arm and this three-mechanical arm assembly; And
This front end robot arm is to be suitable for transmitting a base material to pass in and out a wafer cassette and this first, second and the third channel chamber.
11. cluster tool as claimed in claim 6, in the first wherein above-mentioned mechanical arm assembly move horizontally in assembly, this second mechanical arm assembly move horizontally assembly, and this three-mechanical arm assembly in move horizontally assembly each more comprise:
One seals, and has one or more sidewall and a pedestal, and it is around an interior zone; And
One or more fan component, itself and this interior zone fluid communication of sealing.
12. cluster tool as claimed in claim 6, the first wherein above-mentioned mechanical arm assembly, the second mechanical arm assembly, and the three-mechanical arm assembly in mechanical arm more comprise basically:
One mechanical arm blade, it is suitable for receiving and transmitting a base material; And
One motor exchanges with this mechanical arm blade rotation.
13. cluster tool as claimed in claim 6, the first wherein above-mentioned mechanical arm assembly, the second mechanical arm assembly, and the three-mechanical arm assembly in mechanical arm more comprise basically:
One mechanical arm blade has one first end and a base material receiving surface, and wherein this base material receiving surface is suitable for receiving and transmitting a base material;
One first coupling member, it has one first pivoting point, and it is the center rotation that first end of this mechanical arm blade is suitable for it; And
One motor exchanges with this mechanical arm blade rotation with this first coupling member.
14. cluster tool as claimed in claim 6, the vertical moving assembly in the vertical moving assembly in the first wherein above-mentioned mechanical arm assembly, this second mechanical arm assembly, and this three-mechanical arm assembly in each of vertical moving assembly more comprise:
One seals, and has one or more sidewall and filter, and it is around an interior zone; And
One fan component, itself and this interior zone fluid communication of sealing, and be suitable for removing a fluid and by this filter from this interior zone.
15. cluster tool as claimed in claim 6, the first wherein above-mentioned mechanical arm assembly, the second mechanical arm assembly, and each of three-mechanical arm assembly more comprise:
One seals, and has one or more sidewall and filter, and it is around an interior zone; And
One or more fan component, itself and this interior zone fluid communication of sealing, and be suitable for making air flows to pass through this filter towards this first, second or three-mechanical arm.
16. cluster tool as claimed in claim 6, the first wherein above-mentioned mechanical arm assembly, the second mechanical arm assembly, and each of three-mechanical arm assembly more comprise:
One second mechanical arm, it is suitable for a base material is arranged on one second horizontal plane, and wherein this horizontal plane and this second horizontal plane separate a segment distance.
17. cluster tool as claimed in claim 6, each of the vertical moving assembly in wherein above-mentioned first, second and the three-mechanical arm assembly more comprises:
This vertical actuator assemblies, it comprises:
One vertical actuator is suitable for vertically being provided with this first mechanical arm; And
One vertical slide rail is suitable for guiding this first mechanical arm when it is transferred by this vertical actuator;
One seals, and has an interior zone, and it is the spare part that is selected from a group of this vertical actuator and this vertical slide rail formation around at least one; And
One fan, with this interior zone fluid communication, it is to be suitable for sealing the inner negative pressure that produces at this.
18. a cluster tool of handling a base material, it comprises at least:
One first processing procedure frame, it contains two or more group with two or more substrate process chambers that vertically stack, wherein these two or more substrate process chambers that vertically stack of two or more group have one first side of arranging along a first direction, to pass through the described substrate process chamber of this side access; And one second side of arranging along a second direction, with by the described substrate process chamber of this side access;
One first mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this first side, wherein this first mechanical arm assembly comprises:
One first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this first mechanical arm is arranged on usually a motor on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this first mechanical arm is arranged on usually a motor on the direction parallel with this first direction; And
One second mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this second side, wherein this second mechanical arm assembly comprises:
One second mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this second mechanical arm is arranged on usually a motor on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this second mechanical arm is arranged on usually a motor on the direction parallel with this second direction.
19. cluster tool as claimed in claim 18 more comprises:
One three-mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this first processing procedure frame from this first side, wherein this three-mechanical arm assembly comprises:
One three-mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in the horizontal plane;
One vertical moving assembly has and is suitable for this three-mechanical arm is arranged on usually a motor on the direction parallel with this vertical direction; And
One moves horizontally assembly, has to be suitable for this three-mechanical arm is arranged on usually a motor on the direction parallel with this first direction.
20. cluster tool as claimed in claim 18 more comprises:
One second processing procedure frame, it contains two or more group with two or more substrate process chambers of vertically stacking, wherein these two or more substrate process chambers that vertically stack of two or more group have one first side of arranging along this first direction, to pass through the described substrate process chamber of this side access; And
This first mechanical arm assembly, it is to be suitable for a base material is sent to substrate process chamber this second processing procedure frame from this first side.
21. cluster tool as claimed in claim 18 more comprises:
One wafer cassette, it is suitable for keeping somewhere two or more base materials; And
One first passage chamber, it is suitable for receiving a base material from a front end robot arm and this first mechanical arm assembly;
One second channel chamber, it is suitable for receiving a base material from this front end robot arm and this second mechanical arm assembly; And
This front end robot arm is to be suitable for transmitting a base material to pass in and out a wafer cassette and this first and second channel chamber.
22. cluster tool as claimed in claim 18, in the first wherein above-mentioned mechanical arm assembly move horizontally in assembly and this second mechanical arm assembly move horizontally assembly each more comprise:
One seals, and has one or more sidewall and a pedestal, and it is around an interior zone; And
One or more fan component, itself and this interior zone fluid communication of sealing.
23. cluster tool as claimed in claim 18, first wherein above-mentioned mechanical arm assembly and the mechanical arm in the second mechanical arm assembly more comprise basically:
One mechanical arm blade, it is suitable for receiving and transmitting a base material; And
One motor exchanges with this mechanical arm blade rotation.
24. cluster tool as claimed in claim 18, first wherein above-mentioned mechanical arm assembly and the mechanical arm in the second mechanical arm assembly more comprise basically:
One mechanical arm blade has one first end and a base material receiving surface, and wherein this base material receiving surface is suitable for receiving and transmitting a base material;
One first coupling member, it has one first pivoting point, and it is the center rotation that first end of this mechanical arm blade is suitable for it; And
One motor exchanges with this mechanical arm blade rotation with this first coupling member.
25. cluster tool as claimed in claim 18, each of the vertical moving assembly in the vertical moving assembly in the first wherein above-mentioned mechanical arm assembly and this second mechanical arm assembly more comprises:
One seals, and has one or more sidewall and filter, and it is around an interior zone; And
One fan component, itself and this interior zone fluid communication of sealing, and be suitable for removing a fluid and by this filter from this interior zone.
26. cluster tool as claimed in claim 18, first wherein above-mentioned mechanical arm assembly and each of the second mechanical arm assembly more comprise:
One seals, and has one or more sidewall and filter, and it is around an interior zone; And
One or more fan component, itself and this interior zone fluid communication of sealing, and be suitable for making air flows to pass through this filter towards this first, second or three-mechanical arm.
27. cluster tool as claimed in claim 18, first wherein above-mentioned mechanical arm assembly and each of the second mechanical arm assembly more comprise:
One second mechanical arm, it is suitable for a base material is arranged on one second horizontal plane, and wherein this horizontal plane and this second horizontal plane separate a segment distance.
28. a cluster tool of handling a base material, it comprises at least:
Two or more substrate process chambers are arranged on one and troop in the instrument;
One first mechanical arm assembly, it is suitable for a base material is sent to this two or more substrate process chambers, and wherein this first mechanical arm assembly comprises:
One first mechanical arm, it is suitable for a base material is arranged on the first direction, and wherein this first mechanical arm comprises:
One mechanical arm blade has one first end and a base material receiving surface, and wherein this base material receiving surface is suitable for receiving and transmitting a base material;
One first coupling member, it has one first pivot point and one second pivot point;
One motor is rotatably connected with this first coupling member at this second pivot point place;
One first gear is connected with first end of this mechanical arm blade, and is rotatably connected with this first coupling member at this first pivot point place; And
One second gear is rotatably connected with this first gear, and with concentric alignment of second pivot point of this first coupling member, wherein the gear of this this first gear of second gear mesh is than between about 3: 1 to about 4: 3;
One first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction; And
One second moving assembly has and is suitable for this first mechanical arm is arranged on usually a motor on the third direction vertical with this second direction.
29. troop one and to transmit the equipment of a base material in the instrument for one kind, it comprises at least:
One first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in one first plane;
One vertical moving assembly comprises:
One slide track component, it contains the block that is connected with the linear track of a perpendicular positioning;
One supporting bracket is connected with this first mechanical arm with this block; And
One actuator, it is suitable for along this linear track this supporting bracket being vertically set on the upright position; And
One moves horizontally assembly, and it is to be connected with this vertical moving assembly, and has a horizontal actuator, and it is suitable for being provided with in the horizontal direction this first mechanical arm and this vertical moving assembly.
30. equipment as claimed in claim 29 more comprises one second and moves horizontally assembly, it is connected with this vertical moving assembly, and has one second horizontal actuator, and it is suitable for this first mechanical arm and this vertical moving assembly are arranged on the horizontal direction.
31. equipment as claimed in claim 29 more comprises an environment control assembly, has a fan, it is to be suitable for promoting air by a filter and towards a base material that is arranged on this first mechanical arm.
32. equipment as claimed in claim 29 more comprises:
One second mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in one second plane; And
This vertical moving assembly more comprises:
One second supporting bracket is connected with this linear track and this second mechanical arm, and wherein this second supporting bracket is connected with this linear track by this block or one second block that is connected with this linear track; And
This actuator is further adapted for along this track this second supporting bracket is vertically set on the upright position;
Wherein second plane of this second mechanical arm normally with first plane parallel of this first mechanical arm, and this second plane is arranged on this first plane one segment distance place is arranged.
33. equipment as claimed in claim 29, wherein above-mentioned vertical moving assembly more comprises:
One seals, and has one or more sidewall that forms an interior zone, and this interior zone is selected from the spare part of a group of this actuator and this slide track component formation around at least one;
One slit is formed on one of this one or more sidewall that seals;
This supporting bracket extends through this slit; And
One fan, be further adapted for this seal outside a bit and produce between this interior zone between about 0.02 and about 1 inch water column height between a pressure reduction.
34. troop one and to transmit the equipment of a base material in the instrument for one kind, it comprises at least:
One first mechanical arm, it is suitable for a base material is arranged on one or more aspect that is contained in usually in one first plane;
One vertical moving assembly comprises:
One actuator assemblies, it is suitable for vertically being provided with this first mechanical arm, and wherein this actuator assemblies more comprises:
One vertical actuator, it is suitable for vertically being provided with this first mechanical arm; And
One vertical slide rail, it is suitable for guiding this first mechanical arm when being transferred by this vertical actuator;
One seals, and has the sidewall that one or more forms an interior zone, and this interior zone is the spare part that is selected from a group of this vertical actuator and this vertical slide rail formation around at least one; And
One fan, with this interior zone fluid communication, it is to be suitable for sealing the inner negative pressure that produces at this; And
One moves horizontally assembly, has a horizontal actuator and a horizontal slide rail member, and it is to be suitable on parallel with first side of this first a processing procedure frame usually direction this first mechanical arm being set.
35. equipment as claimed in claim 34, the wherein above-mentioned assembly that moves horizontally more comprises:
One second seals, and has one or more sidewall, and it second seals the inner interior zone that forms around this horizontal slide rail member and at this; And
One fan, with this interior zone fluid communication, it is to be suitable for second sealing the inner negative pressure that produces at this.
36. equipment as claimed in claim 34, wherein above-mentioned vertical moving assembly more comprises:
One slit is formed on one of this one or more sidewall that seals;
One supporting bracket extends through this slit, and is connected with this first mechanical arm with this vertical slide rail; And
This fan be further adapted for this seal outside a bit and produce between this interior zone between about 0.02 and about 1 inch water column height between a pressure reduction.
37. equipment as claimed in claim 34 more comprises an environment control assembly, has a fan, it is to be suitable for promoting air by a filter and towards a base material that is arranged on this first mechanical arm.
38. troop one and to transmit the equipment of a base material in the instrument for one kind, it comprises at least:
One first mechanical arm assembly, it is suitable for a base material is arranged on the first direction, and wherein this first mechanical arm assembly comprises:
One mechanical arm blade has one first end and a base material receiving surface;
One first coupling member, it has one first pivot point and one second pivot point;
One first gear is connected with first end of this mechanical arm blade and is rotatably connected with this first coupling member at this first pivot point place;
One second gear is rotatably connected with this first gear and aligns with second pivot point of this first coupling member; And
One first motor, it is to be rotatably connected with this first coupling member, wherein this first motor is suitable for by rotating this first coupling member with respect to this second gear and first gear is provided with this base material receiving surface;
One first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction; And
One second moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this second direction usually third direction.
39. equipment as claimed in claim 38, the second wherein above-mentioned gear compares between about 3: 1 and about 4: 3 with respect to the gear of this first gear.
40. equipment as claimed in claim 38, the second wherein above-mentioned gear is connected with one second motor, wherein is suitable for adjusting the rotary speed of this first coupling member with respect to this second gear with the controller that this first motor exchanges with this second motor during this transmission processing procedure.
41. troop one and to transmit the equipment of a base material in the instrument for one kind, it comprises at least:
One first mechanical arm assembly, it is suitable for a base material is arranged on and is contained in usually in one first plane on one or more aspect of an arc, and wherein this first mechanical arm assembly comprises:
One mechanical arm blade has one first end and a base material receiving surface; And
One motor, it is rotatably connected with first end of this mechanical arm blade;
One first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first plane usually second direction, wherein this first moving assembly comprises:
One actuator assemblies, it is suitable for vertically being provided with this first mechanical arm, and wherein this actuator assemblies more comprises:
One vertical actuator, it is suitable for vertically being provided with this first mechanical arm; And
One vertical slide rail, it is suitable for guiding this first mechanical arm when being transferred by this vertical actuator;
One seals, and has the sidewall that one or more forms an interior zone, and this interior zone is selected from the spare part of a group of this vertical actuator and this vertical slide rail composition around at least one; And
One fan, with this interior zone fluid communication, it is to be suitable for sealing the inner negative pressure that produces at this; And
One second moving assembly has one second actuator, and it is to be suitable for this first mechanical arm is arranged on vertical with this second direction usually third direction.
42. equipment as claimed in claim 41, the second wherein above-mentioned moving assembly more comprises:
One second seals, and has one or more sidewall, and it second seals the inner interior zone that forms around this second actuator and at this; And
One fan, with this interior zone fluid communication, it is to be suitable for second sealing the inner negative pressure that produces at this.
43. troop one and to transmit the equipment of a base material in the instrument for one kind, it comprises at least:
One first mechanical arm assembly, it is suitable for a base material is arranged on the first direction, and wherein this first mechanical arm assembly comprises:
One mechanical arm blade has one first end and a base material receiving surface;
One first gear is connected with first end of this mechanical arm blade;
One second gear is rotatably connected with this first gear; And
One first motor is rotatably connected with this first gear; And
One second motor is rotatably connected with this second gear;
Wherein this second motor is suitable for rotating this second gear with respect to this first gear, to create a variable gear ratio; And
One first moving assembly, it is to be suitable for this first mechanical arm is arranged on vertical with this first direction usually second direction.
44. equipment as claimed in claim 43 more comprises one second moving assembly, it is suitable for this first mechanical arm is arranged on vertical with this second direction usually third direction.
45. equipment as claimed in claim 43, wherein above-mentioned second direction is vertical with this first direction usually.
46. an equipment that transmits a base material, it comprises at least:
One pedestal has a substrate support surface;
One reactive means is arranged on this pedestal;
One contact member and is suitable for a base material is connected towards the actuator that this reactive means promotes; And
One braking element, it when this reactive means promote is suitable for prevailingly suppress the moving of this contact member through being provided with this base material at this contact member.
47. equipment as claimed in claim 46, wherein above-mentioned restraint are the generations that contacts that utilizes between this braking element and this contact member.
48. equipment as claimed in claim 46 more comprises an inductor, it is connected with this contact member, and is suitable for responding to the position of this contact member.
49. equipment as claimed in claim 46 more comprises a controller, exchanges with this inductor with this actuator, to respond to the dislocation of a base material on this stayed surface.
50. an equipment that transmits a base material, it comprises at least:
One pedestal has a stayed surface;
One reactive means is arranged on this pedestal;
One actuator is connected with this pedestal;
One contact member is connected with this actuator, and wherein this actuator is suitable for this contact member towards being arranged on this stayed surface, and the edge that is supported a base material at an edge by this reactive means promotes;
One braking element assembly comprises:
One braking element; And
One brake actuation member, wherein this brake actuation member is suitable for this braking element is promoted towards this contact member, can suppress the restraint that this contact member moves prevailingly to create during a base material transmits.
51. equipment as claimed in claim 50, wherein above-mentioned restraint are the generations that contacts that utilizes between this braking element and this contact member.
52. equipment as claimed in claim 50, wherein above-mentioned restraint are the frictional force that produces between a surface of this contact member and this braking element.
53. equipment as claimed in claim 50 more comprises an inductor, it is connected with this contact member, and is suitable for responding to the position of this contact member.
54. equipment as claimed in claim 53 more comprises a controller, exchanges with this inductor with this actuator, to respond to the dislocation of a base material on this stayed surface.
55. an equipment that transmits a base material, it comprises at least:
One pedestal has a stayed surface;
One reactive means is arranged on this pedestal;
One contact member assembly comprises:
One actuator; And
One contact member, have a base material contact surface and and comply with member (compliantmember), it is arranged between this contact surface and this actuator, and wherein this actuator is to be suitable for this contact surface is promoted towards the base material that a surface that leans on this reactive means is provided with; And
One braking element assembly comprises:
One braking element: and
One brake actuation member is suitable for this braking element is promoted towards this contact member, with moving of this contact member during suppressing a base material and transmitting; And
One inductor is connected with this contact member, and wherein this inductor is suitable for responding to the position of this contact surface.
56. equipment as claimed in claim 55, the wherein above-mentioned member of complying with is a spring.
57. equipment as claimed in claim 55, wherein above-mentioned braking element assembly more comprises a lever arm, has one first end that is connected with this brake actuation member, and one second end that is connected with this braking element, wherein this lever arm is connected with a pivoting point, and be suitable for producing the braking force that this contact member of inhibition moves, and it is the power that produces greater than this brake actuation member.
58. an equipment that transmits a base material, it comprises at least:
One mechanical arm assembly, contain:
One first mechanical arm, it is suitable for transmitting a base material that is arranged on the mechanical arm blade on the first direction;
One first moving assembly has an actuator, and it is suitable for this first mechanical arm is arranged on the second direction; And
One second moving assembly is connected with this first moving assembly and has one second actuator, and it is suitable for this first mechanical arm and this first moving assembly are arranged on vertical with this second direction usually third direction; And
One base material grabbing device is connected with this mechanical arm blade, and wherein this base material grabbing device is suitable for supporting a base material, and contains:
One reactive means is arranged on this mechanical arm blade;
One actuator is connected with this mechanical arm blade;
One contact member is connected with this actuator, and wherein this actuator is suitable for by this contact member is limited this base material towards the edge promotion that is arranged on the base material between this contact member and this reactive means; And
One braking element assembly comprises:
One braking element; And
One brake actuation member is suitable for this braking element is promoted towards this contact member, suppresses moving of this contact member with during transmitting at a base material.
59. equipment as claimed in claim 58, wherein above-mentioned base material grabbing device more comprises an inductor, and it is connected with this contact member, and is suitable for responding to the position of this contact member.
60. equipment as claimed in claim 58, wherein above-mentioned base material grabbing device more comprises a controller, exchanges with this inductor with this actuator, to respond to the dislocation of a base material on this stayed surface.
61. equipment as claimed in claim 58, wherein above-mentioned base material grabbing device more comprises complies with member, and it is arranged between this contact member and this actuator, and is suitable at this actuator this contact member storage power when a substrate surface promotes.
62. a method that transmits a base material, it comprises at least:
One base material is arranged on the substrate support, between the base material contact member and a reactive means that are arranged on this substrate support;
Utilize an actuator to produce the base material grasping force, this actuator promotes this base material contact member towards this base material, and this base material is promoted towards this reactive means; And
Produce a restraint, it is suitable for utilizing during transmitting a base material brake assemblies to suppress moving of this base material contact member.
63. method as claimed in claim 62, wherein above-mentioned restraint are to produce after this grasping force is applied to this base material.
64. method as claimed in claim 62 more comprises and utilizes a controller to respond to moving of this base material contact member.
65. method as claimed in claim 62 more comprises:
With this substrate support be set together the beginning position on;
This substrate support is sent to a final position from this original position; And
Execution is arranged on step on this substrate support with a base material, produces this base material grasping force, and produces this restraint.
66. method as claimed in claim 62, more comprise a base material that utilizes one first mechanical arm assembly will be arranged on this substrate support and be sent to the one first process chamber array that is provided with along a first direction, this first mechanical arm assembly is suitable for this base material is arranged on the desired location on this first direction and on the desired location on the second direction, and wherein this second direction is vertical with this first direction usually.
67. a method that transmits a base material, it comprises at least:
One base material is arranged on the substrate support, between the base material contact member and a reactive means that are arranged on this substrate support;
The actuator that will have a connection piece is connected with this base material contact member, and this connector is connected this actuator with this base material contact member;
Utilize an actuator to apply grasping force to this base material, this actuator promotes this base material contact member towards this base material, and this base material is promoted towards this reactive means;
Store energy in one and comply with in the member, it is arranged between this base material contact member and this connector;
After applying this grasping force, limit moving of this connector, to minimize the amount of variability that transmits this grasping force during the base material; And
Respond to moving of this base material by this base material contact surface of induction because be stored in moving of this minimizing of complying with the energy in the member.
68. as the described method of claim 67, more comprise when the base material contact member of sensing be moved beyond user's value of defining the time stop moving of this substrate support.
69. as the described method of claim 67, more comprise a base material that utilizes one first mechanical arm assembly will be arranged on this substrate support and be sent to the one first process chamber array that is provided with along a first direction, this first mechanical arm assembly is suitable for this substrate support is arranged on the desired location on this first direction and on the desired location on the second direction, and wherein this second direction is vertical with this first direction usually.
70. as the described method of claim 69, wherein above-mentioned second direction is aimed on a vertical direction usually.
71. a method that transmits a base material, it comprises at least:
A base material that is arranged in one first process chamber is received on the mechanical arm substrate support, and the step that wherein receives this base material comprises:
One base material is arranged on this mechanical arm substrate support, between the base material contact member and a reactive means that are arranged on this mechanical arm substrate support;
Utilize an actuator to produce the base material grasping force, this actuator promotes this base material contact member towards this base material, and this base material is promoted towards this reactive means; And
One brake assemblies is set, suppresses the restraint that this base material contact member moves during transmitting a base material, to produce; And
Utilize one first mechanical arm assembly that this base material and this mechanical arm substrate support are sent to a position in one second process chamber from the position in this first process chamber, this second process chamber is to be arranged on this first process chamber along a first direction one segment distance place is arranged, this first mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, wherein this second direction is vertical with this first direction usually.
72. as the described method of claim 71, wherein above-mentioned restraint is to produce after this grasping force is applied to this base material.
73., more comprise and utilize a controller to respond to moving of this base material contact member as the described method of claim 71.
74. as the described method of claim 71, wherein above-mentioned second direction is aimed on a vertical direction usually.
75. troop one and to transmit the method for a base material in the instrument for one kind, it comprises at least:
Utilize one first mechanical arm assembly one base material to be sent to the one first process chamber array that is provided with along a first direction, this first mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, wherein this second direction is vertical with this first direction usually;
Utilize one second mechanical arm assembly one base material to be sent to the one second process chamber array that is provided with along this first direction, this second mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and is arranged on the desired location of this second direction; And
Utilize a three-mechanical arm assembly one base material to be sent to first and second process chamber array that is provided with along this first direction, this three-mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and is arranged on the desired location of this second direction.
76. as the described method of claim 75, wherein above-mentioned three-mechanical arm assembly comes down to adjoin with this first and second mechanical arms assembly.
77. as the described method of claim 76, wherein above-mentioned three-mechanical arm assembly is arranged on this first and second mechanical arms inter-module.
78. as the described method of claim 75, first wherein above-mentioned mechanical arm assembly to the three-mechanical arm assembly and second mechanical arm assembly to the three-mechanical arm assembly be greater than between about 5% and about 50% at interval than the processing procedure surface size of a base material.
79. as the described method of claim 75, the distance of the center line of the first wherein above-mentioned mechanical arm assembly to the center line of the center line of this three-mechanical arm assembly and this second mechanical arm assembly to the center line of this three-mechanical arm assembly is between between about 315mm and about 450mm, and the distance between wherein said center line is to measure on substantially vertical with this first direction direction.
80. as the described method of claim 75, the wherein above-mentioned center line that is arranged on the base material on this first mechanical arm assembly or this second mechanical arm assembly during the processing procedure that transmits a base material on this first direction to the distance of the center line that is arranged on the base material on this three-mechanical arm assembly is greater than about 5% and about 50% than the processing procedure surface size of a base material.
81. as the described method of claim 75, more comprise and utilize one the 4th mechanical arm assembly one base material to be sent to first and second process chamber array that is provided with along this first direction, the 4th mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and is arranged on the desired location of this second direction.
82. as the described method of claim 75, more be included in and be formed on one of one first actuator assemblies periphery and produce the pressure be lower than atmospheric pressure in sealing, this first actuator assemblies is to be contained in this first mechanical arm assembly, this second mechanical arm assembly and this three-mechanical arm assembly, and wherein this first actuator assemblies is suitable for this base material is arranged on this second direction.
83. troop one and to transmit the method for a base material in the instrument for one kind, it comprises at least:
Utilize one first mechanical arm assembly one base material to be sent to the one first process chamber array that is provided with along a first direction from one first saturating cavity chamber, this first mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and be arranged on the desired location of a second direction, wherein this second direction is vertical with this first direction usually;
Utilize one second mechanical arm assembly that one base material is sent to this first process chamber array from this first saturating cavity chamber, this second mechanical arm assembly is suitable for this base material is arranged on the desired location of this first direction, and is arranged on the desired location of a second direction; And
The front end robot arm that utilization is arranged in the front end assemblies is sent to this first saturating cavity chamber with a base material from a base material casket, and wherein this front end assemblies adjoins with a transit area that contains this first process chamber array, this first mechanical arm assembly and this second mechanical arm assembly in fact.
84. as the described method of claim 83, more comprise and utilize this first or second mechanical arm assembly that one base material is sent to this first process chamber array from one second saturating cavity chamber, wherein this second saturating cavity chamber be on this first direction, be provided with and this first process chamber array at least one process chamber between a segment distance is arranged.
85. as the described method of claim 83, more comprise a front end assemblies, have a front end robot arm that is suitable for a base material is sent to from a base material casket this first saturating cavity chamber.
86. as the described method of claim 83, wherein above-mentioned front end robot arm, the first mechanical arm assembly and the second mechanical arm assembly are further adapted for transmission one base material and pass in and out one second saturating cavity chamber.
87. as the described method of claim 83, more be included in and be formed on one of one first actuator assemblies periphery and produce the pressure be lower than atmospheric pressure in sealing, this first actuator assemblies is to be contained in this first mechanical arm assembly and this second mechanical arm assembly, and wherein this first actuator assemblies is suitable for this base material is arranged on this second direction.
CN2006800133558A 2005-04-22 2006-04-07 Cartesian robot cluster tool architecture Expired - Fee Related CN101164138B (en)

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US11/315,778 US20060182535A1 (en) 2004-12-22 2005-12-22 Cartesian robot design
US11/315,984 US7651306B2 (en) 2004-12-22 2005-12-22 Cartesian robot cluster tool architecture
US11/315,984 2005-12-22
US11/315,873 US7374391B2 (en) 2005-12-22 2005-12-22 Substrate gripper for a substrate handling robot
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CN102176425A (en) 2011-09-07
JP5265343B2 (en) 2013-08-14
CN101164138B (en) 2012-10-17
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CN102867764B (en) 2015-06-17
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WO2006115745A1 (en) 2006-11-02
TW200707621A (en) 2007-02-16

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