CN101160181B - Coating apparatus and coating method - Google Patents
Coating apparatus and coating method Download PDFInfo
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- CN101160181B CN101160181B CN2006800127595A CN200680012759A CN101160181B CN 101160181 B CN101160181 B CN 101160181B CN 2006800127595 A CN2006800127595 A CN 2006800127595A CN 200680012759 A CN200680012759 A CN 200680012759A CN 101160181 B CN101160181 B CN 101160181B
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- nozzle
- solution
- shower nozzle
- travel mechanism
- vertical orientation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
Abstract
The invention provides a coating apparatus and a coating method, wherein the adopted jetting manner is such that when a plurality of nozzles arranged in rows spray a solution to a substrate, the thickness of coating film within a coating pattern can be nearly uniform, and a coating film of good quality can be formed. At the time of forming a coating pattern by spraying a solution to a substrate (W) by a head (5) having a plurality of nozzles (53a) in a Y direction, the spraying quantities of the solution differ by each of the nozzles (53a) arranged in the Y direction. Coating is performed a plurality of times to form the same coating pattern by shifting the head (5) a distance ( L) in the Y direction, therefore, the coating thickness variance (unevenness) can be corrected so as to the coating film thickness can be made uniform.
Description
Technical field
The present invention relates to from nozzle ejection solution so that form the applying device and the coating method of the ink-jetting style of the application pattern of stipulating at substrate.
Background technology
In the general film formation process in the manufacturing process of liquid crystal indicator or semiconductor device, on the real estate of glass substrate or semiconductor wafer etc., form the functional film of alignment films or diaphragm etc.
On real estate, form the occasion of functional film, use makes the solution that forms functional film from a plurality of nozzle ejection (discharge), and round point shape be coated in the applying device of the ink-jetting style on the substrate (with reference to patent documentation 1: Japanese kokai publication hei 9-105938 communique).
The applying device of existing ink-jetting style has the transport platform of conveying substrate, above this transport platform, a plurality of shower nozzles that will be formed with a plurality of nozzles (pore or aperture) that are arranged in the row shape be arranged side by side with the direction of the throughput direction quadrature of substrate on, and the solution that will supply to shower nozzle sprays and forms the application pattern of setting towards the substrate that relatively moves.
Above-mentioned applying device is during substrate is transported to predetermined distance by transport platform, from each nozzle round point shape ground sprayed solution.Therefore, the round dot that forms solution on substrate is listed as the application pattern of arranging along throughput direction linearity ground with the spacing identical with nozzle, forms the application pattern of rectangular shape usually as a whole.Be applied as the solution of round point shape, through flowing on the substrate, the solution of diffusion and adjacency is connected with each other and behind the flattening course of planarization, form coated film.
On the applying device of the ink-jetting style of coating solution on the real estate, since a plurality of shower nozzles be arranged side by side with the direction of the throughput direction quadrature of substrate on, and each shower nozzle forms along it and is arranged side by side a plurality of nozzle arrangement Cheng Liezhuan of direction, therefore, can select the nozzle of necessary quantity according to the width dimensions of application pattern, and in whole specific length (distance) scope sprayed solution.
Yet, find between each nozzle, to produce irregular deviation in each time emitted dose (discharge rate) on this shower nozzle.
If there is deviation in the solution emitted dose between each nozzle, the coating amount of big or small ie in solution that then forms the solution round dot in the round dot row of application pattern is inhomogeneous between row.Therefore, the homogenising that has occurred the thickness that forms after solution coating → solution leveling → solution dry run is impaired, can not get good membranous phenomenon in functional film.
Summary of the invention
So, the object of the present invention is to provide from a plurality of nozzles of being arranged in the row shape when the substrate sprayed solution, the thickness that makes the coated film in the application pattern is near uniform state and can form the applying device and the coating method of the ink-jetting style of good coated film.
The applying device of the ink-jetting style of first scheme of the present invention, from being formed at a plurality of nozzle ejection solution on the shower nozzle, on real estate, apply solution in the mode of drawing the application pattern that sets, it is characterized in that possessing: first travel mechanism that direction that described shower nozzle and described substrate intersect to the vertical orientation with described nozzle is relatively moved; Can make described shower nozzle and described substrate to second travel mechanism that vertical orientation of described nozzle relatively moves; And controller, this controller is controlled as follows, in the solution injection action of described first travel mechanism of control and described nozzle, by to control, the relative position of described shower nozzle and described substrate is staggered in described vertical orientation and repeatedly apply solution based on described second travel mechanism of the emitted dose deviation between described a plurality of nozzles.
The applying device of the ink-jetting style of alternative plan of the present invention, from being formed at a plurality of nozzle ejection solution on the shower nozzle, on real estate, apply solution in the mode of drawing the application pattern that sets, it is characterized in that possessing: first travel mechanism that direction that described shower nozzle and described substrate intersect to the vertical orientation with described nozzle is relatively moved; Can make described shower nozzle and described substrate to second travel mechanism that vertical orientation of described nozzle relatively moves; And controller, this controller is controlled as follows, in the solution injection action of described first travel mechanism of control and described nozzle, be made as P in spacing, when n is made as positive integer, the relative position of described shower nozzle and described substrate staggered (n * P+P/2) and repeatedly apply solution in described vertical orientation with vertical orientation of described nozzle.
The coating method of the ink-jetting style of third party's case of the present invention, from being formed at a plurality of nozzle ejection solution on the shower nozzle, on real estate, apply solution in the mode of drawing the application pattern that sets, it is characterized in that, based on the emitted dose deviation between described a plurality of nozzles, described shower nozzle in vertical orientation of described nozzle and the relative position between the substrate are staggered and repeatedly apply solution.
The coating method of the ink-jetting style of cubic case of the present invention, from being formed at a plurality of nozzle ejection solution on the shower nozzle, on real estate, apply solution in the mode of drawing the application pattern that sets, it is characterized in that, be made as P in spacing with vertical orientation of described nozzle, when n is made as positive integer, the primary coating position applies described shower nozzle and the relative position between the substrate between the position (n * P+P/2) and repeatedly the apply solution that staggers with this before making.
Like this, according to applying device that relates to ink-jetting style of the present invention and coating method, by relative position between shower nozzle and the substrate being staggered in vertical orientation of nozzle at least and repeatedly applies solution, the deviation of the emitted dose between the compensating jet, thus obtain good coated film.
Description of drawings
Fig. 1 is a front view of having represented to relate to first embodiment of applying device of the present invention.
Fig. 2 (a) is the left view of device shown in Figure 1, and Fig. 2 (b) is the amplification plan view of the major part of Fig. 2 (a).
Fig. 3 is the longitudinal sectional view of shower nozzle shown in Figure 2.
Fig. 4 is the upward view of shower nozzle shown in Figure 3.
Fig. 5 is the control circuit figure of shower nozzle shown in Figure 1.
Fig. 6 is the action specification figure of device shown in Figure 1.
Fig. 7 relates to the action specification figure of second embodiment of applying device of the present invention.
The specific embodiment
In the manufacturing process of liquid crystal indicator or semiconductor device, be useful on the substrate of glass substrate or semiconductor wafer the film formation process that forms circuit pattern etc.In this film formation process, on the plate face of substrate, be formed with for example functional film such as alignment films or diaphragm.
On substrate, form the occasion of functional film, have the solution that makes this functional film of formation to be coated in the applying device of the ink-jetting style on the plate face of substrate from a plurality of nozzle ejection.
Though on the applying device of this ink-jetting style, between nozzle, produce the deviation of emitted dose, even but the present invention notices in this case, repeatedly applying solution can eliminate and result from that coated film thickness inhomogeneous of deviation of emitted dose finish by the relative position between substrate and the shower nozzle is staggered on the nozzle arrangement direction, therefore, explanation relates to the applying device of ink-jetting style of the present invention and an embodiment of coating method with reference to the accompanying drawings.
Fig. 1 is the front view of first embodiment of having represented to relate to the applying device of ink-jetting style of the present invention, and Fig. 2 (a) is its left view, and Fig. 2 (b) is the amplification plan view of the major part of Fig. 2 (a).
Shown in Fig. 1 and Fig. 2 (a), the applying device of ink-jetting style has roughly rectangular-shaped pedestal 1, is respectively equipped with pin 1a on the assigned position below this pedestal 1, horizontal support pedestal 1.
Be provided with along its length (the arrow directions X of Fig. 1) long installing plate 1b on the both ends of the width on pedestal 1 (the arrow Y direction of Fig. 2), on these installing plates 1b, in the inner part, alongst be provided with pair of guide rails 1c.
On pair of guide rails 1c, the cross section that the tabular transport platform 2 of essentially rectangular is provided with abreast by means of both sides below it is the roughly mobile in the longitudinal direction support freely of slide unit 2a of L font.On transport platform 2, the substrate W that is used for the glass substrate etc. on the liquid crystal indicator for example is by electrostatic chuck or attract the holding unit mounting or dismounting of chuck etc. to keep freely.
In addition, erect in the mode that strides across pair of guide rails 1c at the length direction pars intermedia of said base 1 and be provided with a shape supporter 3.
At the upper position of door shape supporter 3, broad ways (Y direction) keeps platform 4 one side broad ways to be directed moving being supported on freely on this guiding parts 3a on one side flatly across being provided with guiding parts 3a.
And, shown in Fig. 2 (b), a plurality of (being 7 in this embodiment) shower nozzle 5 of ink-jetting style towards arrow Y direction and about be configured in alternately on the side that keeps platform 4 and install and fix.In addition, as following, on each shower nozzle 5, arrange more longways and be formed with a plurality of nozzles (pore) along Y direction row shape ground.
So, because guiding parts 3a and keep platform 4 with the not shown driving mechanism that keeps platform 4 is constituted second travel mechanism, therefore, shower nozzle 5 is whole constitute one can regulate on the transport platform 2 and substrate W between the Y direction on relative position.
So, because first travel mechanism makes substrate W move to directions X, second travel mechanism makes shower nozzle 5 move to the Y direction, and therefore, shower nozzle 5 and substrate W can relatively move to the X-Y direction.
In addition, as shown in Figure 1, the inner controller 6 that sprays together with the unified solution of controlling each nozzle of shower nozzle 5 of first and second travel mechanism that is equipped with in pedestal 1.
Fig. 3 is the amplification longitudinal sectional view of Figure 1 and Figure 2 shower nozzle 5, and Fig. 4 is the amplification inclinating view of shower nozzle 5.
As shown in Figures 3 and 4, shower nozzle 5 possesses nozzle body 51, and nozzle body 51 has the peristome 51a that a side is communicated with below a top side direction, and its lower aperture is sealed by flex plate 52.
As shown in Figure 4, be equipped with a plurality of nozzles (pore or aperture) 53a alternately at the central portion of nozzle plate 53, these a plurality of nozzle 53a go up at length direction (Y direction) and form the row with spacing P.
So; on an end of the length direction of nozzle body 51, be formed with and be responsible for the supply hole 51b that 54a is communicated with; form for example solution of the functional film of alignment films or diaphragm etc. thereby constitute on this supply hole 51b to supply with, make and be responsible for 54a and liquid chamber 54 is filled solution by supply pipe 51c.
As shown in Figure 3, relative with each nozzle 53a respectively and dispose a plurality of piezoelectric elements 55 on the upper surface of flex plate 52.These piezoelectric elements 55 are connected on the drive division 6a.Drive division 6a supplies with driving voltage to each piezoelectric element 55.Because piezoelectric element 55 stretch by the supply of this driving voltage, therefore, the part corresponding with this piezoelectric element 55 of flex plate 52 is out of shape.Volume-variation takes place in its result in liquid chamber 54, the solution of the amount of corresponding volume-variation sprays and coating towards the substrate W of transport platform 2 from the nozzle 53a corresponding with piezoelectric element 55.
In addition, as shown in Figure 3, on the Y of nozzle body 51 direction the other end (left part among the figure), be formed with and be responsible for the recovery holes 51d that 54a is communicated with, fail to spray and solution in the residual person in charge 54a presses from this recovery holes 51d, and by being recovered behind the discharging tube 51e.
Fig. 5 is the circuit diagram of the control system between expression controller 6 and each shower nozzle 5, and controller 6 is controlled the piezoelectric element 55 of each shower nozzle 5 by means of each drive division 6a.
On the basis of Fig. 1 to Fig. 5, illustrate that with further reference to Fig. 6 the action of applying device of the ink-jetting style of said structure is a coating method.
In addition, the applying device of the ink-jetting style of said structure be by controller 6 control first and second travel mechanism in, drive the control piezoelectric element 55 corresponding with the nozzle 53a of whole seven shower nozzles 5, thereby can on substrate W face, apply the applying device of solution, in the action specification below, for convenience of explanation, controller 6 as driving the control piezoelectric element 55 corresponding with the nozzle 53a of a shower nozzle 5, and is described by the applying device of the application pattern that obtains stipulating through twice coating.
That is, Fig. 6 (a) links from having with spacing P to be arranged in the curve that solution injection quantity value that the shower nozzle 5 of the nozzle 53a in the length L scope sprayed forms, and is the curve A of expression from the solution emitted dose of each nozzle 53a.Shown in Fig. 6 (a), between nozzle 53a, produce irregular emitted dose deviation.
So, in the present embodiment, the deviation coating in order to compensate in a shower nozzle 5 because of the corresponding solution band that makes with the position of nozzle 53a, make coating once more behind the relative position offset distance Δ L of the Y direction between substrate W and the shower nozzle 5 by controller 6 control second travel mechanism, thereby can compensate inhomogeneous that the coating that results from the application pattern of this deviation distributes by offsetting, can realize applying the homogenising of thickness.
That is, in primary coating, controller 6 makes the nozzle 53a that is positioned at from the left end of shower nozzle 5 to distance, delta L scope stop making substrate W move and apply towards directions X under the state by the coating of spraying on the position shown in Fig. 6 (a).Thus, be listed on the throughput direction of substrate W with spacing linearity ground side by side the application pattern identical at the round dot that forms solution on the substrate W with injector spacing.And,, on substrate W, form the uneven coated film of height shape shown in Fig. 6 (b) in the occasion that solution flattens on substrate W.
So controller 6 is then controlled second travel mechanism, the relative position between shower nozzle 5 and the substrate W is gone up to the only mobile Δ L of diagram right in vertical orientation (being the Y direction) of nozzle.
That is, controller 6 has memory 6b, and distance, delta L imports and is stored in this memory 6b by not shown keyboard or touch panel.Therefore, controller 6 reads the distance, delta L that is stored among this memory 6b, the moving to the Y direction of control shower nozzle.
In addition, this moment is in order to obtain the application pattern of same shape, make the nozzle 53a that in the nozzle 53a of shower nozzle 5, has stopped spraying be arranged in last opposite side be the position shown in Fig. 6 (c) from the right-hand member of shower nozzle 5 to the position of distance, delta L scope.
By this twice coating, to when applying for the first time, being sprayed onto the part of solution from the less nozzle 53a of emitted dose, will be when applying for the second time nozzle 53a when emitted dose applied than the first time nozzle 53a sprayed solution of Duoing.In addition, to when applying for the first time, being sprayed onto the part of solution from the more nozzle 53a of emitted dose, will be when applying for the second time the nozzle 53a sprayed solution lacked of nozzle 53a when emitted dose applied than the first time.The deviation of the solution emitted dose between the compensating jet 53a thus.Therefore, shown in Fig. 6 (d), on the Y direction, realize homogenising, the planarization of thickness in the coated film that forms on the substrate W across width (L-Δ L).
In addition, in example shown in Figure 6, for convenience of explanation, represented by the first time and secondary coating, the situation that the less part of part that emitted dose is more and emitted dose is just offset.But because in fact in primary coating, the less part of part that emitted dose is more and emitted dose is mixed in the orientation (Y direction) of nozzle 53a, therefore, when decision distance, delta L, operating personnel are according to for example curve shown in Fig. 6 (a), and consideration determines after making the relative position of shower nozzle 5 and substrate W move the application pattern that how much just can obtain as the whole homogenising of application pattern when applying for the second time.And Jue Ding Δ L is stored among the memory 6b by loader recited above like this.
In addition, in the above description, though from the controller that the solution of each nozzle 53a of a shower nozzle 5 sprays controller 6 has been described as control, but the occasion that applies making 5 actions of seven shower nozzles, be useful on the shower nozzle 5 that is positioned at the rightmost side by the action that will be positioned at, can on the Y direction, form the application pattern of growing (width is bigger) from shower nozzle 5 right-hand members shown in Figure 6 to the nozzle 53a of distance, delta L scope.
In addition, in above-mentioned coating method,, certainly adopt the method for returning initial position, also can adopt the method for returning from the rear portion of turning back as for the original position of the directions X that carries out twice coating.
In addition, from the shower nozzle 5 arranged alternately and arrange the nozzle 53a sprayed solution that forms alternately and when substrate W draws the application pattern of rectangular shape, spray from the solution of each nozzle 53a if begin and stop simultaneously, then in the end of the directions X of application pattern because the solution of the round point shape that is sprayed is interlaced with each other, thereby produce concavo-convex in this part.
Therefore, controller 6 with in the course of conveying of substrate W with substrate W on pattern form presumptive area each nozzle 53a by each shower nozzle 5 below opportunity combine and control drive division 6a from the mode of nozzle 53a sprayed solution.Thus, can on directions X, form the application pattern that does not have concavo-convex regulation shape.
So, though the applying device of the ink-jetting style of this embodiment and coating method with initial coating and with its of coating with overlapping second time that applies between, drawing the mode of same application pattern after the difference of Δ L only is set in vertical orientation (Y direction) of nozzle 53a controls, but when further contemplating nozzle 53a and on the Y direction, have spacing P, if make n is positive integer, the length that then it is desirable to Δ L is the position that the position of nozzle does not overlap, be (n * P+P/2), in addition, according to experiment, best n 〉=5.
Here if, why making Δ L=n * P+P/2 (n is a positive integer), is because Δ L=P/2, then by the formed round dot row of identical nozzle 53a with adjacent one another are, thereby the influence that the emitted dose deviation between the nozzle 53a is brought the thickness of coated film will be obviously.
Use shower nozzle 5 shown in Figure 4 to describe below.In coating for the first time and coating for the second time, make shower nozzle 5 left direction moved the occasion of P/2, by the formed round dot row of solution (the round dot row of right-hand member nozzle 53a) that when applying for the second time, spray from the nozzle 53a of diagram right-hand member be positioned at the right-hand member nozzle 53a when applying for the first time the round dot row and by from this nozzle 53a left between the formed round dot row of the solution that second adjacent nozzle 53a of 1P sprays (the round dot row of second nozzle 53a).Suppose from the emitted dose of the solution of the nozzle 53a of right-hand member more than mean value, then coating amount right-hand member two row side by side that are listed in application pattern more than the round dot of mean value from the emitted dose of the solution of whole nozzle 53a.Therefore, seem more obvious by the too much influence that brings of the emitted dose of the nozzle 53a of right-hand member on coated film, the coating amount of the right-hand member of application pattern is more than other parts, thereby the problem that thickness in this part coated film will be thicker than other parts is arranged.
On the other hand, in coating for the first time and coating for the second time, make shower nozzle 5 left direction moved the occasion of n * P+P/2, for example under the situation of n=1, the round dot row that spray from second nozzle 53a on the nozzle 53a left side of right-hand member are located at twice coating by the nozzle 53a of right-hand member between the formed two row round dots row.Thus, even, also have round dot to be listed as between the middle possibility that has more that reduces by second nozzle 53a from the emitted dose of the solution of the nozzle 53a of right-hand member occasion more than mean value.This is because the irregular deviation by the emitted dose between the nozzle 53a, can expect that emitted dose from the solution of second nozzle 53a is less than the emitted dose from the solution of the nozzle 53a of right-hand member.Even from the emitted dose of the solution of second nozzle 53a more than occasion from the emitted dose of the solution of the nozzle 53a of right-hand member, nozzle-integrated from deviation with irregular emitted dose, the probability that reduces deviation is also higher, and the thickness that can make coated film on the whole is near uniform state.
So, move n * P+P/2, make that the deviation from the emitted dose of nozzle 53a is uprised by the probability that solution reduced that sprays from other nozzle 53a by making shower nozzle 5, its result, the thickness that can make coated film is near state uniformly.
In addition, the occasion that is less than mean value from the emitted dose of the solution of the nozzle 53a of right-hand member also is the same.In addition, also can obtain each nozzle 53a solution emitted dose deviation and serve as according to setting said n with the deviation of this emitted dose.
That is, use measuring instrument such as electronic balance to obtain from the emitted dose of the solution each time of each nozzle 53a.For example,, and this solution taken a sample from nozzle 53a sprayed solution with predefined number of times.And, use the measuring instrument instrumentation to be somebody's turn to do the weight of the solution of sampling.Then, remove the instrumentation value with the number of times of above-mentioned setting, this value conduct obtains from the emitted dose of the solution that nozzle sprays each time.Each nozzle 53a is carried out this process.
By the putting in order side by side of nozzle 53a, line links the expression that obtains after each emitted dose shown in Fig. 6 (a) the solid line A from the emitted dose of the solution of each nozzle 53a with the emitted dose of each nozzle 53a of trying to achieve like this.
So, operating personnel make with the identical shaped curve of this solid line A [for example, dotted line B shown in Fig. 6 (c)] move successively with P/2 to Y direction right side or left side from the state that overlaps with solid line A, and the more part of emitted dose of trying to achieve dotted line B is arranged in the n value that the less part of emitted dose of less part of solid line A emitted dose and dotted line B is arranged in the more part of solid line A emitted dose.
In addition, here with regard to the n value, owing to be set at the coating action that as far as possible little value can be used to form application pattern effectively, thereby more satisfactory.Fig. 6 (c) though shown in distance, delta L expression stop from the scope of the injection of the solution of nozzle 53a, if less this distance, delta L that then can make of n value is little.If this distance, delta L is less, then can reduce the quantity of the nozzle 53a that is positioned at this scope, can reduce the quantity of the nozzle 53a of the injection that stops solution.Therefore, being arranged among the nozzle 53a on the shower nozzle 5 a plurality of nozzle 53a can be for coating, thereby can apply effectively.
In addition, measuring instrument such as electronic balance is preferably disposed on the applying device.
For example, by means of mobile device the mode of measuring instrument with the below of each nozzle 53a of being movable to each shower nozzle 5 and being had is configured on the applying device.Sampling containers such as beaker are set on the sample bench of measuring instrument.Measuring instrument is obtained the weight of the solution of being taken a sample from the weight difference before and after the solution sampling.
So, owing to can try to achieve on applying device from the emitted dose of the solution of each nozzle 53a, therefore, the solution of avoiding being taken a sample is transferred to the trouble on the other measuring instrument, thereby improves operating efficiency.
In addition, by above-mentioned measuring instrument to can be only from the mensuration of the solution emitted dose of each nozzle 53a carrying out once when the coating action beginning, also can carry out during through a setting-up time or when whenever finishing the processing of the substrate of setting number every.In addition, in a kind of occasion in back, owing to can change n value or distance, delta L in conjunction with variation from the emitted dose of the solution of nozzle 53a, therefore, more satisfactory.
In addition, though to utilize weight to obtain from the electronic balance of the solution emitted dose of nozzle 53a is that example has illustrated measuring instrument, as long as but importantly can try to achieve emitted dose, thereby also can use with from nozzle 53a ejection and the solution dispersing or the photographed images that is coated in the solution on the substrate serve as according to the image processing apparatus of obtaining emitted dose.
Have, the emitted dose of the solution in the nozzle 53a of shower nozzle 5 row has at the two ends of row (Y) direction maximum again, during the closer to tendency that central portion just tails off more gradually, is L/2 by the length that makes distance, delta L, can make application pattern be tending towards smooth.
Promptly, in above-mentioned first embodiment, although understand that difference on the column direction that Δ L only is set on the position of shower nozzle 5 (Y direction) as the situation of twice coating, is the second embodiment of the present invention that L/2 carries out twice coating but make the length of Δ L below with reference to Fig. 7 explanation.
In addition, second embodiment compares with first embodiment of above-mentioned explanation, owing to be made of same structure, just the control action by controller 6 is the coating method difference, therefore, describes at diverse ways especially.
That is, Fig. 7 (a) and Fig. 7 (b) are the vertical views of representing only to be provided with the position on each comfortable Y directions of seven shower nozzles 5 that carry out twice coating behind the distance, delta L.
The mode that makes the position of shower nozzle 5 that the difference of distance, delta L=L/2 is set on the Y direction in the coating of controller 6 with in initial (Fig. 7 (a)) locational coating and next time (be Fig. 7 (b) second time) drives control.
When applying at first, the nozzle 53a of the left side (L/2) of the shower nozzle 5 of left part shown in Fig. 7 (a) is applied to directions X with the state that has stopped solution and spray.
When carrying out applying the second time, the nozzle 53a of the right-hand part (L/2) of the shower nozzle 5 of right part shown in Fig. 7 (b) is applied to directions X once more with the state that has stopped solution and spray.
Fig. 7 (c) is illustrated in the flat coated pattern P h that is coated on the position of Fig. 7 (a) and Fig. 7 (b) on the substrate W, by above-mentioned action, forms the coated film of rectangular shape and the smooth applied thickness of 6.5L length amplitude on the Y direction.
In addition, driving in the mode that links to each other alternately in the same manner among this second embodiment that seven shower nozzles 5 apply with the explanation of first embodiment, in initial and next time coating, though make a part of nozzle 53a of the shower nozzle 5,5 of left end and right-hand member stop to spray respectively, the nozzle 53a of five shower nozzles 5 in the middle of making does not drive piezoelectric element 55 at all with stopping and applies.
As top illustrated, applying device and coating method according to the ink-jetting style that relates to above-mentioned each embodiment, by difference or the inequality of compensation based on the different solution emitted dose in each nozzle 53a position in the shower nozzle 5, make the thickness that is formed at the coated film on the substrate W face near uniform state, thereby can form good coated film.
Promptly, in twice solution coating process to substrate W, can accomplish when applying for the first time, being sprayed onto the part of solution from the less nozzle 53a of emitted dose, will be when applying for the second time nozzle 53a when emitted dose applied than the first time nozzle 53a sprayed solution of Duoing.In addition, to when applying for the first time, being sprayed onto the part of solution from the more nozzle 53a of emitted dose, will be when applying for the second time the nozzle 53a sprayed solution lacked of nozzle 53a when emitted dose applied than the first time.Therefore owing to can realize the equalization of solution emitted dose on the whole in application pattern, thereby coated solution planarization can obtain good coated film by leveling.
Therefore, in the deviation from the solution emitted dose of each nozzle 53a is permissible deviation, that is to say, even by substrate W to once carrying of directions X and the pattern on substrate W forms presumptive area and has formed application pattern, it also is the occasion of deviation that obtains having the coated film degree of the thickness deviation in the permissible range, can make the thickness ratio by the more approaching uniform state of the occasion that forms application pattern to once carrying of directions X, and can form the coated film of uniform fine texture.Therefore, can improve the membranous of the functional film that is formed on the substrate W.
In addition, even in the occasion that surpasses allowable deviation from the deviation of the solution emitted dose of each nozzle 53a, also can be by the deviation of this emitted dose of the compensation of solution coating for the second time.Therefore, can make from solution applies the coated film that formed application pattern obtains by the second time thickness near state uniformly, it is bad to reduce coating, enhances productivity.
For example, even make the occasion that reduces or stop from the emitted dose of a nozzle 53a stopping up because of nozzle 53a etc., in order to replenish from the emitted dose of the nozzle 53a that causes obstruction, make shower nozzle 5 also repeatedly apply solution to Y direction displacement Δ L by every the moving of substrate W thereupon, can reduce the thickness deviation of coated film to directions X.Therefore, even under the unfavorable condition of take place stopping up on the nozzle 53a etc., also needn't stop applying device immediately, can proceed coating, thereby can enhance productivity for maintenance.
In addition, in the explanation of above-mentioned each embodiment, although understand by twice and apply the technical essential that compensates the coating thickness, but also can carry out coating more than three times with same technology and method.In addition, though the application pattern that is formed on the substrate W has been described, also can be other shape with rectangular shape.In addition, substrate W also is not limited to the glass substrate on LCD panel etc., also can be semiconductor wafer.
In addition, utilizing coating to make the pattern of solution on substrate form the occasion that presumptive area forms application pattern, preferably will be made as half of emitted dose when forming application pattern from the coating amount of the solution each time of nozzle 53a with primary coating by twice.In addition, form the occasion of application pattern in the coating by more than three times, preferably the emitted dose of occasion that will form application pattern with primary coating divided by the resulting value of number of times of coating as coating amount from the solution each time of nozzle 53a.
In addition, carry out the occasion that solution applies the pattern on the substrate W being formed presumptive area m time (more than twice), preferably whenever carrying out only displacement Δ L=n * P+P/m of the direction of relative position in the vertical orientation of nozzle (Y direction shown in Figure 6) that primary coating just makes shower nozzle 5 and substrate W.
For example, the occasion about applying for three times describes with reference to Fig. 6.Here, shower nozzle 5 is moved to Y direction shown in Figure 6 right side.
At first, shown in Fig. 6 (a), carry out the coating first time.At this moment, be, stop from being positioned at from the nozzle 53a position of the left end of shower nozzle 5 to distance 2 * Δ L=2 * (injection of the solution of the nozzle 53a of the scope of n * P+P/3) with Fig. 6 (a) difference.
After for the first time coating finishes, make shower nozzle 5, under this state, as Fig. 6 (c) shown in, carry out like that applying the second time to Y direction right side displacement Δ L only.At this moment, be with Fig. 6 (c) difference, except stopping, also stopping from being positioned at from the nozzle 53a position in the left side of shower nozzle 5 to the injection of the solution of the nozzle 53a of distance, delta L scope from being positioned at nozzle 53a position from the right side of shower nozzle 5 to the injection of the solution of the nozzle 53a of distance, delta L scope.
After for the second time coating finishes, make shower nozzle 5, under this state, apply for the third time further to Y direction right side displacement Δ L only.At this moment, stop from being positioned at the extremely injection of the solution of the nozzle 53a of distance 2 * Δ L scope of nozzle 53a position from the right side of shower nozzle 5.
Like this, by carrying out three coatings, to the spread length L of the nozzle 53a of shower nozzle 5, on the Y direction across width (L-2 * Δ L=(m-1) * Δ L) coating solution.
Here, even in the occasion that the m value is set at more than 4, also, utilize the main points identical can implement to apply operation with foregoing by stopping at the injection of the solution that carries out each time when coating nozzle 53a outside the scope that is positioned at (L-(m-1) * Δ L).
According to the foregoing description, when on the interval that the round dot at solution is listed as deviation being arranged, though the thickness of formed coated film has thicker and in the thin tendency of wide portions in the narrower part in the interval of round dot row, but because the relative position by mobile shower nozzle 5 and substrate W as described above just can be listed as with the round dot of the equidistant arrangement solution of P/m, therefore, the deviation of coating thickness of spacing bias of the round dot row of solution can be prevented to result from, thereby the uniformity of coated film can be improved.
In addition,, be not limited to interlace mode, be configured to linearity and also can though be illustrated with the example that has disposed a plurality of shower nozzles 5 and a plurality of nozzle 53a alternately.
According to the present invention, can provide from a plurality of nozzles of being arranged in the row shape when the substrate sprayed solution, the thickness that makes the coated film in the application pattern is near uniform state and can form the applying device and the coating method of the ink-jetting style of good coated film.
Claims (5)
1. the applying device of an ink-jetting style from being formed at a plurality of nozzle ejection solution on the shower nozzle, applies solution in the mode of drawing the application pattern that sets on real estate, it is characterized in that possessing:
First travel mechanism that direction that described shower nozzle and described substrate intersect to the vertical orientation with described nozzle is relatively moved;
Can make described shower nozzle and described substrate to second travel mechanism that vertical orientation of described nozzle relatively moves; And
Controller, this controller is controlled as follows, in the solution injection action of described first travel mechanism of control and described nozzle, be made as P in spacing with vertical orientation of described nozzle, when n is made as positive integer, primary coating position and this coating described shower nozzle and the relative position of described substrate (n * P+P/2) apply solution 2 times that in described vertical orientation, staggers between the position before making by described second travel mechanism
And when applying for the first time, stop to be positioned at make by described second travel mechanism described shower nozzle to the rear end of the direction that described vertical orientation relatively moves to (apply under the state of the injection of the nozzle of the scope till the n * P+P/2),
When applying for the second time, stop to be positioned at make by described second travel mechanism described shower nozzle to the anterior end of the direction that described vertical orientation relatively moves to (applying under the state of the injection of the nozzle of the scope till the n * P+P/2).
2. the applying device of an ink-jetting style from being formed at a plurality of nozzle ejection solution on the shower nozzle, applies solution in the mode of drawing the application pattern that sets on real estate, it is characterized in that possessing:
First travel mechanism that direction that described shower nozzle and described substrate intersect to the vertical orientation with described nozzle is relatively moved;
Can make described shower nozzle and described substrate to second travel mechanism that vertical orientation of described nozzle relatively moves; And
Controller, this controller is controlled as follows, in the solution injection action of described first travel mechanism of control and described nozzle, be made as P in spacing with vertical orientation of described nozzle, n is made as positive integer, to apply number of times, to be made as m and m be 3 when above, primary coating position and this coating described shower nozzle and relative position of described substrate between the position only staggers in described vertical orientation before making by described second travel mechanism, and (n * P+P/m) applies solution for m time, if i is 1 to m integer, then when the i time coating, stop to be positioned at make by described second travel mechanism described shower nozzle to the rear end of the direction that described vertical orientation relatively moves to (m-i) * (nozzle of the scope till the n * P+P/m) and being positioned at make by described second travel mechanism described shower nozzle to the anterior end of the direction that described vertical orientation relatively moves to (i-1) * (apply under the state of the injection of the nozzle of the scope till the n * P+P/m).
3. the applying device of ink-jetting style according to claim 1 and 2 is characterized in that,
Have the measuring instrument of instrumentation from the emitted dose of the solution of each nozzle.
4. the coating method of an ink-jetting style, use is from being formed at a plurality of nozzle ejection solution on the shower nozzle, apply the applying device of the ink-jetting style of solution in the mode of drawing application pattern on real estate, this applying device possesses: first travel mechanism that direction that described shower nozzle and described substrate intersect to the vertical orientation with described nozzle is relatively moved; Can make described shower nozzle and described substrate to second travel mechanism that vertical orientation of described nozzle relatively moves; And controller, this controller is controlled as follows, in the solution injection action of described first travel mechanism of control and described nozzle, by described second travel mechanism being controlled based on the emitted dose deviation between described a plurality of nozzles, the relative position of described shower nozzle and described substrate is staggered in described vertical orientation and 2 coating solution, it is characterized in that
Be made as P in spacing with vertical orientation of described nozzle, when n is made as positive integer, primary coating position and described shower nozzle and relative position substrate between of this coating between the position (n * P+P/2) apply solution 2 times that in described vertical orientation, only staggers before making by described second travel mechanism
And when applying for the first time, stop to be positioned at make by described second travel mechanism described shower nozzle to the rear end of the direction that described vertical orientation relatively moves to (apply under the state of the injection of the nozzle of the scope till the n * P+P/2),
When applying for the second time, stop to be positioned at make by described second travel mechanism described shower nozzle to the anterior end of the direction that described vertical orientation relatively moves to (applying under the state of the injection of the nozzle of the scope till the n * P+P/2).
5. the coating method of an ink-jetting style, use is from being formed at a plurality of nozzle ejection solution on the shower nozzle, apply the applying device of the ink-jetting style of solution in the mode of drawing application pattern on real estate, this applying device possesses: first travel mechanism that direction that described shower nozzle and described substrate intersect to the vertical orientation with described nozzle is relatively moved; Can make described shower nozzle and described substrate to second travel mechanism that vertical orientation of described nozzle relatively moves; And controller, this controller is controlled as follows, in the solution injection action of described first travel mechanism of control and described nozzle, by described second travel mechanism being controlled based on the emitted dose deviation between described a plurality of nozzles, the relative position of described shower nozzle and described substrate is staggered in described vertical orientation and repeatedly apply solution, it is characterized in that
Be made as P in spacing with vertical orientation of described nozzle, n is made as positive integer, to apply number of times, to be made as m and m be 3 when above, before making by described second travel mechanism only stagger in described vertical orientation with the described shower nozzle and the relative position between the substrate of this coating between the position in the primary coating position, and (n * P+P/m) applies solution for m time, if i is 1 to m integer, then when the i time coating, stop to be positioned at make by described second travel mechanism described shower nozzle to the rear end of the direction that described vertical orientation relatively moves to (m-i) * (nozzle of the scope till the n * P+P/m) and being positioned at make by described second travel mechanism described shower nozzle to the anterior end of the direction that described vertical orientation relatively moves to (i-1) * (apply under the state of the injection of the nozzle of the scope till the n * P+P/m).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005119859 | 2005-04-18 | ||
| JP119859/2005 | 2005-04-18 | ||
| PCT/JP2006/308106 WO2006112453A1 (en) | 2005-04-18 | 2006-04-18 | Coating apparatus and coating method |
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| Publication Number | Publication Date |
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| CN101160181A CN101160181A (en) | 2008-04-09 |
| CN101160181B true CN101160181B (en) | 2011-04-20 |
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| CN2006800127595A Expired - Fee Related CN101160181B (en) | 2005-04-18 | 2006-04-18 | Coating apparatus and coating method |
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| JP (1) | JP4863999B2 (en) |
| KR (1) | KR100907389B1 (en) |
| CN (1) | CN101160181B (en) |
| TW (1) | TW200638083A (en) |
| WO (1) | WO2006112453A1 (en) |
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| WO2009014148A1 (en) * | 2007-07-26 | 2009-01-29 | Shibaura Mechatronics Corporation | Piezoelectric element driving apparatus and coating apparatus |
| JP5563752B2 (en) * | 2008-06-26 | 2014-07-30 | 東京応化工業株式会社 | Coating apparatus and coating method |
| JP5288917B2 (en) * | 2008-07-09 | 2013-09-11 | 芝浦メカトロニクス株式会社 | Paste coating apparatus and paste coating method |
| KR101164627B1 (en) * | 2008-07-28 | 2012-07-11 | 주식회사 탑 엔지니어링 | Dispenser with frames capable of separation |
| KR101000549B1 (en) * | 2008-09-19 | 2010-12-14 | 주식회사 디엠에스 | Coater |
| JP5730698B2 (en) * | 2011-07-15 | 2015-06-10 | 株式会社ミマキエンジニアリング | Printing method and printing apparatus |
| KR20140084002A (en) * | 2011-09-29 | 2014-07-04 | 도판 인사츠 가부시키가이샤 | Thin film forming method |
| KR102652755B1 (en) * | 2018-04-09 | 2024-04-01 | 세메스 주식회사 | Method and Apparatus for Ejecting Droplet |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4401991A (en) * | 1981-10-08 | 1983-08-30 | International Business Machines Corporation | Variable resolution, single array, interlace ink jet printer |
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|---|---|---|---|---|
| JP3056186B1 (en) * | 1998-12-25 | 2000-06-26 | 翼システム株式会社 | Computer readable medium recording accident vehicle damage area recognition system and program |
| JP2004255335A (en) * | 2003-02-27 | 2004-09-16 | Seiko Epson Corp | Method and apparatus for discharging liquid substance, manufacture method for color filter and color filter, liquid crystal display device, manufacture method for electroluminescence device, electroluminescence device, manufacture method for plasma display panel, plasma display panel, and electronic equipment |
| JP2005066401A (en) * | 2003-08-27 | 2005-03-17 | Seiko Epson Corp | Liquid droplet discharge apparatus, electrooptical apparatus, production method of electrooptical apparatus, and electronic device |
-
2006
- 2006-04-17 TW TW095113625A patent/TW200638083A/en unknown
- 2006-04-18 CN CN2006800127595A patent/CN101160181B/en not_active Expired - Fee Related
- 2006-04-18 KR KR1020077024117A patent/KR100907389B1/en active IP Right Grant
- 2006-04-18 WO PCT/JP2006/308106 patent/WO2006112453A1/en active Application Filing
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4401991A (en) * | 1981-10-08 | 1983-08-30 | International Business Machines Corporation | Variable resolution, single array, interlace ink jet printer |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2005-66401A 2005.03.17 |
| 同上. |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100907389B1 (en) | 2009-07-10 |
| KR20070113308A (en) | 2007-11-28 |
| WO2006112453A1 (en) | 2006-10-26 |
| JPWO2006112453A1 (en) | 2008-12-11 |
| JP4863999B2 (en) | 2012-01-25 |
| CN101160181A (en) | 2008-04-09 |
| TWI342238B (en) | 2011-05-21 |
| TW200638083A (en) | 2006-11-01 |
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