CN101151662B - Perpendicular magnetic recording medium, and perpendicular magnetic recording and reproducing apparatus - Google Patents

Perpendicular magnetic recording medium, and perpendicular magnetic recording and reproducing apparatus Download PDF

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CN101151662B
CN101151662B CN2006800099129A CN200680009912A CN101151662B CN 101151662 B CN101151662 B CN 101151662B CN 2006800099129 A CN2006800099129 A CN 2006800099129A CN 200680009912 A CN200680009912 A CN 200680009912A CN 101151662 B CN101151662 B CN 101151662B
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magnetic
recording medium
magnetic recording
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soft magnetism
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CN101151662A (en
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高桥研
冈正裕
喜喜津哲
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Tohoku University NUC
Toshiba Corp
Resonac Holdings Corp
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Tohoku University NUC
Showa Denko KK
Toshiba Corp
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Abstract

The invention provides a perpendicular recording medium with high recording density, and a magnetic recording and reproducing apparatus, by improving the function of magnetic anisotropy of a soft magnetic underlayer. The perpendicular recording medium has at least a soft magnetic underlayer and a perpendicular magnetic recording layer on a non-magnetic substrate, wherein when Ku<SUP></SUP>-i- (erg/cm<SUP>3</SUP>) is defined as a perpendicular magnetic anisotropic energy, and Ms (emu/cm<SUP>3</SUP>) is defined as a saturation magnetization of the soft magnetic underlayer, Ku<SUP></SUP>of the soft magnetic underlayer has a negative value and Ku<SUP></SUP>< -2PMS<SUP>2</SUP>. As a result, the easy axis of a magnetization of a soft magnetic underlayer is oriented strongly in the substrate surface plane, which is effective to suppress the WATE phenomena and spike noise.

Description

Perpendicular magnetic recording medium and perpendicular magnetic recording and transcriber
The cross reference of related application
Require the right of priority of the Japanese patent application No.2005-100020 of acquisition application on March 30th, 2005.The application is an application of submitting to according to 35U.S.C. § 111 (a), according to 35U.S.C. § 119 (e), requires the rights and interests of acquisition according to the applying date of the provisional application 60/669,893 of the application in 11 days April in 2005 of 35U.S.C. § 111 (b) defined.
Technical field
The present invention relates to the perpendicular magnetic recording medium that is used in hard disk unit and so on, and the magnetic recording and the transcriber that use described perpendicular magnetic recording medium.
Background technology
In the perpendicular magnetic recording method, the easy magnetizing axis directed in orthogonal of magnetic recording layer is in the direction of medium, and this is positioned at the plane of medium in the medium of routine.As a result, near the degaussing field magnetization limited proportionality (it is the border between the position of being write down) has reduced, and makes recording density high more, and the magnetostatic stability of institute's recording status is good more, and the resistance to thermal fluctuation has improved simultaneously; Therefore this method is suitable for increasing surface density.
When the soft magnetism lining that is made of soft magnetic material is provided between substrate and perpendicular magnetic recording layer, just can obtains the function of so-called vertical double-layer medium, thereby obtain excellent record performance.At this moment, the soft magnetism lining is used for providing return path for the recording magnetic field of magnetic head, and can improve record and reproduce efficient.
Usually, perpendicular magnetic recording medium provides the soft magnetism lining in substrate, forms perpendicular magnetic recording layer and protective seam that magnetospheric easy magnetizing axis is constituted perpendicular to the non-magnetic under layer of base plane, by the Co alloy in the above successively.Yet in recent years, people recognize, WATE (being Wide Area Track Erasure, or Wide Adjacent Track Erasure, demagnetization of wide area magnetic track or the demagnetization of wide area adjacent track) phenomenon is problem in the perpendicular magnetic recording medium.The WATE phenomenon is the distinctive problem of perpendicular magnetic recording medium, and it is such problem, wherein, when signal is recorded on certain concrete magnetic track, extends the signal generation demagnetization in several microns the wide area from the magnetic track that write down.Having proposed to alleviate the method for this problem, mainly is to alleviate (referring to for example patent references 1) by the structure or the magnetic anisotropy of soft magnetism lining.
People know that also making the direction and the substrate radially aligned of the easy magnetizing axis of soft magnetism lining is effective for addressing the above problem.Method below having proposed is used for realizing this magnetic texure;
1) at radial magnetic field deposit soft magnetism lining
2) pile up soft ferromagnetic layer and antiferromagnetic film as soft magnetism lining (referring to for example patent references 2 and patent references 3).
The example (referring to patent references 4) of the magnetic recording media of use and the similar alloy structure of the present invention has been proposed.Yet this example is that the thickness of longitudinal magnetic recording medium and CoIr layer is very thin.
In the soft magnetism lining, use Ir known, but perpendicular recording medium use the porosint (referring to patent references 5) that is filled with functional material.Use Ir as the perpendicular recording medium of the separate layer between the soft ferromagnetic layer also known (referring to patent references 6).
Patent references 1: No.S58-166531 is announced in the Japanese laid-open patent application first
Patent references 2: No.H06-103553 is announced in the Japanese laid-open patent application first
Patent references 3:US 2002/0028357
Patent references 4: No.2003-132515 is announced in the Japanese laid-open patent application first
Patent references 5: No.2004-237429 is announced in the Japanese laid-open patent application first
Patent references 6: No.2003-203326 is announced in the Japanese laid-open patent application first
Summary of the invention
When depositing the SUL (soft magnetism lining) of perpendicular magnetic recording medium, exist following problem.
(1) is difficult in upwards controlling magnetic field equably of whole footpath.
(2) less in the inner-diameter portion whose magnetic field of substrate.
When media size constantly became littler in the future, (2) can become a serious problem.
As mentioned above, when use has the soft magnetism lining of simple membrane structure, be difficult in and radially be formed uniformly easy magnetizing axis.Need address this problem, thereby invent a kind of magnetic recording media of easy production.
In addition, even controlled easy magnetizing axis by the whole bag of tricks as mentioned above, the WATE phenomenon also can take place, because remain with some perpendicular magnetization components in SUL.
The present invention designs after the above-mentioned situation having considered, its target is, by the function of magnetic anisotropy in the further investigation soft magnetism lining, providing can be with the perpendicular magnetic recording medium of high density recording and information reproduction, and the manufacture method that is used for the magnetic recording and the transcriber of this medium.
In order to address the above problem, the invention below proposing:
(1) first invention that addresses the above problem is a kind of perpendicular recording medium that has soft magnetism lining and perpendicular magnetic recording layer on non-magnetic substrate at least, wherein, works as Ku (erg/cm 3) be defined as the perpendicular magnetic anisotropic energy of described soft magnetism lining, and Ms (emu/cm 3) when being defined as the saturation magnetization of described soft magnetism lining, the Ku of described soft magnetism lining Have negative value and Ku =-2 π Ms 2+ Ku Grain<0.
(2) second invention that addresses the above problem is the perpendicular recording medium described in above-mentioned (1), wherein, works as Ku GrainBe defined as the uniaxial crystal magnetic anisotropy can the time, described soft magnetism lining comprises and has negative Ku GrainMaterial, and the hard axis of described soft magnetism lining is perpendicular to described substrate surface plane.
(3) the 3rd invention that addresses the above problem is the perpendicular recording medium described in above-mentioned (1) or (2), and wherein, described soft magnetism lining comprises the CoIr alloy as principal ingredient.
(4) the 4th invention that addresses the above problem is any one the described perpendicular recording medium in above-mentioned (1) to (3), and wherein, the content of Ir is from 5at.% to 30at.% in the CoIr alloy of described soft magnetism lining.
(5) the 5th invention that addresses the above problem is any one the described perpendicular recording medium in above-mentioned (1) to (4), wherein, further comprises the crystal lining, and the hexagonal closs packing face of its crystal or a cube crystal face are parallel to described substrate surface plane.
(6) the 6th invention that addresses the above problem is any one the described perpendicular magnetic recording medium in above-mentioned (1) to (5), and wherein, described non-magnetic substrate is the disc substrate, and diameter is 28mm or littler.
(7) the 7th invention that addresses the above problem is a kind of magnetic recording and transcriber, comprising any one the described perpendicular magnetic recording medium in above-mentioned (1) to (6) and be used for the magnetic head of on described perpendicular magnetic recording medium recorded information and information reproduction.
Description of drawings
Fig. 1 is the sectional view of the perpendicular magnetic recording medium among the present invention;
Fig. 2 has shown the example of the configuration of magnetic recording among the present invention and transcriber;
Fig. 3 A has shown the magnetic track sketch plan under the example 1 Central Plains primary state;
Fig. 3 B has shown the magnetic track sketch plan under 10000 records state afterwards in the example 1;
Fig. 4 A has shown the magnetic track sketch plan under the reference examples 1 Central Plains primary state;
Fig. 4 B has shown the magnetic track sketch plan under 10000 records state afterwards in the reference examples 1;
Fig. 5 A has shown the side view that target and substrate are placed;
Fig. 5 B has shown the top view that target and substrate are placed;
Fig. 6 has shown Ir content and Ku in the example 7 GrainRelation.
Implement optimal mode of the present invention
The present invention use a kind of perpendicular to substrate surface the axle on have negative Ku GrainThe material of (crystal magnetic anisotropy energy) is as SUL.For example, CoIr alloy a kind of material that comes to this.When the CoIr crystal structure is hexagonal closs packing crystal (hcp), its Ku on the C axle GrainBe negative value.
When on the C axle, having negative Ku GrainThe C axle of material during perpendicular to the substrate surface plane, this material is magnetized on the direction that is parallel to the substrate surface plane consumingly.So, work as Ku For the perpendicular magnetic anisotropic of soft magnetism lining can the time, Ku The 2 π Ms of (=- 2+ Ku Grain) less than the corresponding value of conventional soft magnetism lining.Substrate surface is magnetized more consumingly being parallel on the axle of substrate surface, makes possibility that the WATE phenomenon takes place owing to reduced significantly perpendicular to this surperficial magnetization component suppresses significantly.
Be detailed explanation below.
As mentioned above, magnetic anisotropy and the easy axis of control SUL are very important in perpendicular magnetic recording medium.Particularly, for suppress WATE (wide area magnetic track demagnetization/wide area adjacent track demagnetization) phenomenon and with soft ferromagnetic layer in the mobile relevant so-called sharp-pointed noise of magnetic domain, not only need to make easy magnetizing axis to be positioned at the substrate surface plane, and ferromagnetic layer (being called pinning layer) moving with domain wall in the prevention soft ferromagnetic layer need be provided under SUL.
Target of the present invention is by selecting soft magnetic material suitably, to solve by the caused problem of the SUL in the perpendicular recording medium.
Fig. 1 has shown the example of first aspect of the perpendicular magnetic recording medium 10 among the present invention.By on non-magnetic substrate 1, forming pinning layer 2, non-magnetic under layer 3, SUL 4 and crystal orientation key-course 5, perpendicular magnetic recording layer 6, protective seam 7 and the lubricating layer 8 shown perpendicular magnetic recording medium 10 that is shaped successively here.
As non-magnetic substrate, can use the metallic substrates that constitutes by metal material such as aluminum or aluminum alloy, also can use the non metallic substrate that constitutes by the nonmetallic materials such as glass, pottery, silicon, emery, carbon.
Substrate of glass comprises amorphous glass and crystallized glass; As amorphous glass, can use soda-lime glass or sillico aluminate glass.As crystallized glass, can use to contain the lithium crystallized glass.
As non-magnetic substrate, especially preferred glass substrate or silicon base.
From the angle of using low flying height record-header to carry out high density recording, wish that the average surface roughness Ra of non-magnetic substrate 1 is 0.8nm or littler, be preferably 0.5nm or littler.
From the angle of using low flying height record-header to carry out high density recording, wish that surface waviness Wa is 0.3nm or littler, is preferably 0.25nm or littler.
Be preferably, after veining was handled, the average surface roughness Ra of substrate was more than or equal to 0.1nm and smaller or equal to 0.8nm.If less than 0.1nm, the effect handled of veining is just insufficient so, and the magnetic anisotropy of SUL just has and departs from.This situation does not wish to see.Roughness surpasses 0.8nm does not wish to see yet, because can not realize the low flying height of magnetic head.The degeneration of the magnetic orientation of perpendicular magnetic recording layer can reduce SNR.
In the present invention, can use pinning layer and/or non-magnetic under layer, but not have these layers can not influence effect of the present invention.In the present invention, the Ku that needs SUL GrainBe negative value.When using CoIr as the soft ferromagnetic layer material, the C axle that need make hcp CoIr crystal is perpendicular to the substrate surface plane.Sometimes provide a lining to control crystal orientation.In this case, common described lining also has the hcp crystal structure, such as Ti and Ru.
We find, the Ku of SUL GrainPerpendicular to the substrate surface plane the axle on for negative value be suitable.
The following describes and determine Ku GrainMethod.
By torque the extrapolation of 2 θ compositions of saturation field is estimated that perpendicular magnetic anisotropic can Ku Torque curve obtains by rotary magnetic field in the plane vertical with the substrate surface plane of specimen sample.
Use formula Ku =-2 π Ms 2+ Ku Grain(Ms: saturation magnetization) calculate the Ku of SUL Grain, in this SUL, the C axle of uniaxial crystal magnetic anisotropy is perpendicular to the substrate surface plane.
The known film sample has the very strong demagnetizing field perpendicular to membrane plane, at this moment Ku Be represented as-2 π Ms 2Target of the present invention provides a kind of SUL, if make Ku Be represented as-2 π Ms 2+ X, X are negative value.
In the situation of conventional SUL because the cause of defect and impurity, X be generally little on the occasion of.In the present invention, making X is negative, like this, big | Ku | can force magnetization to be pointed in the described plane.In addition, the magnetized fluctuation that is caused by environment field can be reduced, because when making direction of magnetization in the substrate surface plane, it is more stable that energy state becomes.
Work as Ku During for negative value, the magnetization attitude of material in the substrate surface plane is the most stable energy state.So so a kind of soft ferromagnetic layer will make from magnetizing in substrate surface, not need special external force.
As mentioned above, the inventor finds that the CoIr alloy is suitable as the SUL material of perpendicular recording medium very much.
When the Ir of CoIr alloy content is 5at.% or when bigger, its Ku On the C of CoIr alloy direction of principal axis, will get negative value.Yet the content of needs control Ir will be because saturation magnetization Ms will descend when Ir content increases.
The scope of base reservoir temperature is preferably between room temperature to 400 ℃ during the deposition CoIr layer.
The coercivity H of soft ferromagnetic layer is preferably 30 (Oe) or littler, more preferably 10 (Oe) or littler.One oersted approximates 79A/m.
The saturation magnetic flux density Bs of soft ferromagnetic layer is preferably 0.6T or higher, more preferably 1T or higher.
Total bed thickness of soft ferromagnetic layer is preferably greater than and equals 20nm but smaller or equal to 120nm, more preferably thickness more than or equal to 20nm smaller or equal to 100rnm, more preferably thickness more than or equal to 20nm smaller or equal to 60nm.
Find that in addition the critical film thickness of SUL depends on the content of Ir.The thickness that critical film thickness is the neticdomain wall structure when the Neel structure becomes the Bloch structure.In other words, when the content of Ir when 5at% is in the scope of 20at%, along with the increase of CoIr alloy thickness, neticdomain wall becomes the Bloch structure at the critical thickness place from the Neel structure.Know that the Neel structure is more suitable for the phenomenon in prevention WATE, yet the Bloch structure is more suitable in reducing media noise.When the design thickness, need consider the above-mentioned fact.
As the formation method of soft ferromagnetic layer, can use sputtering method.
SUL can be the rhythmo structure that is made of soft ferromagnetic layer and Ru or Re middle layer.By the thickness in design soft ferromagnetic layer and Ru or Re middle layer, two soft ferromagnetic layers can produce antiferromagnetic coupling.In this case, the thickness of Ru or Re is generally 0.3nm to 1.5nm, is preferably 0.5nm to 1.2nm.Said structure can prevent the WATE phenomenon, and this phenomenon is the peculiar problem of perpendicular recording medium.
The crystal orientation key-course is used for controlling the crystal structure and the crystallite dimension of perpendicular recording layer.The preferred structure of material therefor is hcp structure or face-centred cubic structure (fcc structure) in the crystal orientation key-course, for example, and Pt, Pd, NiCr, NiFeCr and Mg and so on.When the structure of using non-hcp and fcc structure, during such as use body-centered cubic structure (bcc structure) or non crystalline structure, it is insufficient that the orientation of perpendicular magnetic recording layer just becomes.The result is, can cause SNR and coercitive decline, and this does not wish to see.
Crystal orientation key-course 5 is made of inculating crystal layer 5-1 and middle layer 5-2.For example, Pd is preferably as the material of inculating crystal layer 5-1.Ru is preferably as the material of middle layer 5-2.The thickness of crystal orientation key-course 5 is preferably 30nm or littler.If the thickness of lining (crystal orientation key-course) surpasses 30nm, will be increased in the distance between record and reproduction period magnetic head and the SUL 4 so, the feasible resolution degradation that rewrites (OW) characteristic and reproducing signal, this does not wish to see.
The easy magnetizing axis of perpendicular magnetic recording layer 6 be directed to the perpendicular direction in the plane of non-magnetic substrate 1 on.As component element, comprise Co, Pt and a kind of oxide at least; And can add Cr, B, Cu, Ta or Zr, so that improve SNR characteristic or for other reasons.
The example of used oxide comprises in the perpendicular magnetic recording layer 6, SiO 2, SiO, Cr 2O 3, CoO, Ta 2O 3And TiO 2The volume ratio of oxide is preferably 15 to 40 percents by volume.If the volume ratio of oxide is less than 15 percents by volume, the SNR characteristic is just good inadequately so, and this is undesirable.If volume ratio surpasses 40 percents by volume, so just can not obtain the needed coercive force of high density recording, this also is undesirable.
In addition, the material of other type also can be used as the perpendicular recording medium material, such as ordered alloys such as Co/Pt and Co/Pd multilayer material, FePt and FePd and RE-TM alloy.
The nucleation field of perpendicular magnetic recording layer (Hn) is preferably 1.5 (kOe) or bigger.If (Hn) less than 1.5 (kOe), so thermal fluctuation will take place, this is undesirable to nucleation field.
The thickness of perpendicular magnetic recording layer is preferably 6nm to 18nm.If the thickness of perpendicular magnetic recording layer in this scope, will obtain rewriting (OW) characteristic that output is fully become reconciled so.
This perpendicular magnetic recording layer can be a single layer structure, also can be bilayer that material constituted or sandwich construction by different component.
Provide protective seam to prevent the corrosion of perpendicular magnetic recording layer and when preventing the magnetic head contact medium to the damage of dielectric surface; Conventional material be can use, C, SiO for example contained 2Or ZrO 2Material.From reducing distance between magnetic head and the medium so that can carry out the angle of high density recording, the thickness of protective seam is preferably greater than and equals 1nm and smaller or equal to 5nm.
As lubricating layer, preferably use conventional material, for example PFPE (perfluoropolyether), ethanol fluoride (alcohol fluoride) and carboxylic acid fluoride (carboxylic acid fluoride) and so on.
Fig. 2 has shown the magnetic recording that uses above-mentioned perpendicular magnetic recording medium 10 and the example of transcriber.Here shown magnetic recording and transcriber be provided with perpendicular magnetic recording medium 10, drive spindle drive motor 11 that perpendicular magnetic recording medium 10 rotates, magnetic head 12, magnetic-head actuator 13 and record and the reproducing signal disposal system 14 of record and information reproduction on perpendicular magnetic recording medium 10.Described record and reproducing signal disposal system 14 can be handled the input data and tracer signal is sent to magnetic head 12, and can handle reproducing signal and output data from magnetic head 12.
(example and reference examples)
Below, illustrate effect of the present invention and favourable outcome by example.Yet, the invention is not restricted to following Example.
(example 1)
Cleaning substrate of glass (crystallization substrate TS10-SX, 2.5 inches of diameters, Ohara Inc. makes) afterwards, this substrate of glass is put into the thin film deposition chamber of DC magnetic control sputtering plating system (Anelva Corp.modelC-3010), this thin film deposition chamber is evacuated to 1 * 10 -5The background pressure of Pa.The Ti layer of deposition 7nm on this substrate of glass.Deposit the Ru of 3nm and the 88Co-12Ir of 20nm (Co content 88at%, Ir content 12at%) then and have double-deck SUL with formation.
On this sample, deposit the Pd inculating crystal layer of 6nm, the Ru middle layer of 20nm, the CoCrPt-SiO of 10nm with sputtering method 2The C protective seam of magnetic recording layer and 5nm.Then, use the method for dipping to form the PFPE lubricating layer, to obtain perpendicular magnetic recording medium.
(reference examples 1)
The 91Co-5Zr-4Nb of 91Co-5Zr-4Nb (Co content 91at%, Zr content 5at%, Nb content 4at%), the 0.8nm Ru of deposition 60nm and 60nm is to form stacked soft magnetism lining in the substrate identical with example 1.
The Pd inculating crystal layer of deposition 6nm, the Ru middle layer of 20nm, the CoCrPt-SiO of 10nm on described soft magnetism lining 2The C protective seam of magnetic recording layer and 5nm.
Then, with the method spreading PFPE lubricating layer of dipping, so just obtained perpendicular magnetic recording medium.Prepare these samples and be used as reference examples.
Example and reference examples are carried out the WATE measurement.Appraisal procedure is as follows.
1) in the zone of ± 6 μ m, writes down fundamental figure with 156kfci.
2) the average output of each magnetic track of measurement on all magnetic tracks, and with it magnetic track sketch plan as initial state (track profile).
3) signal 10,000 times of duplicate record 937kfci on a magnetic track of described regional center.
4) measure the magnetic track sketch plan again, and the result is compared with initial state.
The magnetic track sketch plan that obtains like this is shown among Fig. 3 and Fig. 4.
In addition, the crystal magnetic anisotropy of C axle can Ku Grain, the output minimizing when following the tracks of sketch plan (tracking profile), perpendicular magnetic anisotropic can Ku -and-2 π Ms 2Value be shown in Table 1 respectively.
As shown in table 1, very clear in perpendicular magnetic recording medium of the present invention, the effect that suppresses the WATE phenomenon is arranged.
Table 1
Lining Soft magnetism lining (at.%) The crystal structure of soft magnetism lining Ku grain (10 6erg/ cm 3) Ku (10 6erg/ cm 3) -2πMs 2 (10 6erg/ cm 3) Output reduces (%) The magnetic track sketch plan
Example 1 Ti(7nm) /Ru(3nm) 88Co-12Ir hcp -4.8 -10.6 -5.8 0 Fig. 3
Reference examples 1 Do not have 91Co-5Zr-4Nb Amorphous 0.3 -4.8 -5.1 12 Fig. 4
(example 2 is to example 6, and comparative example 2 is to comparative example 6)
Then, use radius as the silicon base of 22mm as substrate, preparation is similar to the perpendicular recording medium of example 1 and reference examples 1.In deposition process, simultaneously thin film deposition is carried out in 5 substrates.5 samples are prepared by the operation identical with example 1, and other 5 samples are prepared by the operation identical with reference examples 1.The arrangement of substrate as shown in Figure 5 during the deposition process.
Example 2 is similar to example 1 to example 6, and reference examples 2 is similar to reference examples 1 to reference examples 6.
Above-mentioned sample is carried out WATE measure, this measures identical with the WATE measurement in example 1 and the reference examples 1.Also estimated the dependence of WATE phenomenon to substrate location.These the results are shown in table 2.
Table 2
Figure G2006800099129D00111
As shown in table 2, no matter the WATE phenomenon where, is not observed in the position of example 2 of the present invention substrate in the example 6.From the intensity of the external magnetic field of sputter gun and direction how the result shows that easy magnetizing axis can be oriented in the base plane consumingly, no matter.
On the other hand, in reference examples, not only observed the WATE phenomenon, and its degree depends on the position of substrate.This is because the soft magnetism characteristic of SUL depends on from the magnetic field of magnetic control rifle and from sputter particles incident angle of target or the like.
(example 7)
Use a kind of vacuum chamber of the special magnetic control sputtering plating system that has two rotatable targets (Anelva Corp.model C-3010) on crystallized glass substrate, to carry out the common sputter experiment of two kinds of different materials.Described chamber is evacuated to 1 * 10 -5The background pressure of Pa.Use pure Co and pure Ir as two kinds of target materials.
At first, use the light fixture well heater that crystallized glass substrate is heated to 350 ℃.Then, the Ti film of sequential aggradation 7nm and the Ru film of 3nm are positioned at the Co in same chamber and the Co of Ir target deposition 20nm by rotation then 100-xIr xFilm.Co 100-xIr xX in the film regulates the discharge power of target by changing.
In addition, deposition C protective seam is as the uppermost layer of sample.
To having the Co of various formations 100-xIr xThe crystal magnetic anisotropy of film can Ku GrainMeasure.Use the torque magnetometer of aforementioned type to measure.In addition, measure the film composition that the discharge output through regulating two targets obtains by x-ray fluorescence analysis.The results are shown in table 3.In addition, at deposition Co 100-xIr xDuring the film, use two kinds of Ar dividing potential drops, 3.0Pa and 0.6Pa.
Table 3
On table 3 result's basis, Ir content and Ku GrainBetween relation be shown among Fig. 6.
In the present invention, need Ku GrainHas negative value.Ar dividing potential drop during according to deposition, Ku GrainValue has shown different proterties, but according to The above results, Ir content is only at 5at% in the scope of 30at%.
(example 8 is to example 12, and reference examples 8 is to reference examples 12)
In 5 kinds of substrates with different-diameter, by with example 1 and reference examples 1 in identical method form perpendicular recording medium.Measure its WATE characteristic then.
Use the 5 kind substrates of diameter, 4 samples of every kind of substrate preparation as 95mm (example 8), 65mm (example 9), 48mm (example 10), 28mm (example 11) and 22mm (example 12).Use CoIr in the example 12, in reference examples 12, use the material of Co-Zr-Nb in example 8 as SUL in reference examples 8.Measurement result is shown in Table 4.
Table 4
Figure G2006800099129D00131
When using Co-Zr-Nb as the material of SUL, the WATE phenomenon of minor diameter medium becomes more remarkable.So effect of the present invention is more remarkable for the substrate of size below diameter 28mm.
Industrial applicibility
According to the present invention, a kind of perpendicular recording medium can be provided, wherein the easy magnetizing axis of soft magnetism lining is oriented in the substrate surface plane, and this is effective for suppressing WATE phenomenon and sharp-pointed noise etc.

Claims (6)

1. a perpendicular recording medium that has soft magnetism lining and perpendicular magnetic recording layer on non-magnetic substrate at least wherein, is worked as Ku (erg/cm 3) be defined as the perpendicular magnetic anisotropic energy of described soft magnetism lining, and Ms (emu/cm 3) when being defined as the saturation magnetization of described soft magnetism lining, the Ku of described soft magnetism lining Have negative value, and Ku <-2 π Ms 2And
Described soft magnetism lining comprises the CoIr alloy as principal ingredient.
2. perpendicular recording medium according to claim 1 wherein, is worked as Ku GrainBe defined as the crystal magnetic anisotropy can the time, described soft magnetism lining comprises and has negative Ku GrainMaterial, and the hard axis of described soft magnetism lining is perpendicular to the substrate surface plane.
3. perpendicular recording medium according to claim 1, wherein, the content of Ir is from 5at.% to 30at.% in the CoIr alloy of described soft magnetism lining.
4. perpendicular recording medium according to claim 2 further comprises the crystal lining, and wherein a hexagonal closs packing face or a cube crystal face are parallel to the substrate surface plane.
5. perpendicular magnetic recording medium according to claim 2, wherein, described non-magnetic substrate is the disc substrate, its diameter is 28mm or littler.
6. magnetic recording and transcriber comprise according to the described perpendicular magnetic recording medium of any one claim in the claim 1 to 5, and
Be used for the magnetic head of on described perpendicular magnetic recording medium recorded information and information reproduction.
CN2006800099129A 2005-03-30 2006-03-29 Perpendicular magnetic recording medium, and perpendicular magnetic recording and reproducing apparatus Expired - Fee Related CN101151662B (en)

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