CN101126854A - Joint method and manufacturing device for joint substrate - Google Patents
Joint method and manufacturing device for joint substrate Download PDFInfo
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- CN101126854A CN101126854A CNA2007101427080A CN200710142708A CN101126854A CN 101126854 A CN101126854 A CN 101126854A CN A2007101427080 A CNA2007101427080 A CN A2007101427080A CN 200710142708 A CN200710142708 A CN 200710142708A CN 101126854 A CN101126854 A CN 101126854A
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Abstract
The invention provides a joint method for increasing the rate of finished products and a manufacturing installation of joint substrate for joining top substrate (W2) with a number of first marks (A<SUB>U</SUB>-D<SUB>U</SUB>) with lower substrate (W1) with a number of second marks (A<SUB>L</SUB>-D<SUB>L</SUB>), comprising: position obtaining step of obtaining a number of coordinate positions of first mark and coordinate positions of second mark; and a first offset calculating step of calculating a number of first offsets (CamnX, CamnY) of position offsets of second marks relative to the first marks; joint position calculating step of calculating the joint position of the top substrate and the lower substrate based on the first offsets; and joining step of joining the top substrate with the lower substrate based on joint psotion. The joint position calculating step comprises: a second offset calculating step of calculating a number of second offsets (CalnX, CalnY) by respectively allocating stretching offset to the first offsets wherein the stretching offset is generated by stretching of top substrate and lower substrate from a number of first offsets; and offset calculating step of the require offset of any side of the top substrate and lower substrate moving to the joint position ralative to the other side using the second offsets.
Description
Technical field
The present invention relates to the applying method and the adhesive substrates manufacturing device of two substrates of a kind of applying, in detail, the present invention relates to a kind of method and apparatus of two substrates of applying of the flat-panel monitor that is used for liquid crystal indicator etc.
Background technology
Be provided in the adhesive substrates in liquid crystal indicator etc., two glass substrates are all arranged.These two glass substrates dispose in opposite directions with about several microns so very narrow intervals, and between two glass substrates, sealing is injected with liquid crystal.Wherein a glass substrate for example, is array base palte (a TFT substrate), on this array base palte, forms rectangular by many TFT (thin film transistor (TFT)).Another glass substrate for example, is colour filtering chip basic board (a CF substrate), on this CF substrate, is formed with color filter (red, green, indigo plant) and photomask etc.
Adhesive substrates generally all adopts for example two glass substrates, and its area size is so big with the area that a face of display is divided into six faces for 15 inches demonstrations connecting computer.Each glass substrate, all zoning six institutes becoming can be used as each display decide regionally, all are formed with electrode in each unit.By two glass substrates of fitting, the corresponding units that is arranged at certain intervals on each glass substrate just fits together each other.
Make the adhesive substrates manufacturing device (hereinafter to be referred as laminating apparatus) of adhesive substrates, portion has the vacuum processing chamber (for example, with reference to patent documentation 1) of two substrates that are used to fit within it.Indoor in application of vacuum, dispose lower table that can move horizontally and can support with horizontally rotating and the upper table that disposes in opposite directions, can support up or down with this lower table.The lower glass substrate mounting is on lower table, and top glass substrate is attracted on the upper table.Then, utilize four camera heads that are installed in lower table, last lower glass substrate is carried out optical registration.In order to carry out contraposition, on last lower glass substrate, described a plurality of (for example four) contraposition mark respectively.
As shown in Figure 9, be marked with contraposition mark A in top glass substrate
U, B
U, C
U, D
U, be marked with contraposition mark A in lower glass substrate
L, B
L, C
L, D
LBullet among Fig. 9 is represented the center of each contraposition mark.For example, contraposition mark A
U, B
U, C
U, D
UForm square frame shape, contraposition mark A
L, B
L, C
L, D
LForm the square shape.The control part of laminating apparatus, the view data of each contraposition mark of taking from camera head is tried to achieve the coordinate figure (for example, centre coordinate) of each contraposition mark.Secondly, control part is tried to achieve the contraposition mark (A that links the diagonal angle in top glass substrate
UAnd B
U, C
UAnd D
U) two imaginary line segment A
U-B
U, C
U-D
U, and calculate each imaginary line segment A
U-B
U, C
U-D
UMean value with X-axis institute angulation.This mean value is represented the inclination angle slope α of top glass substrate with respect to X-axis.Equally, control part is calculated the inclination angle slope β of lower glass substrate with respect to X-axis.Then, control part is from the inclination angle slope of two glass substrates, calculate top glass substrate with respect to the inclination angle slope Δ θ of lower glass substrate (Δ θ=β-α), and with this calculated value as the rotation angle correction.
Secondly, control part is calculated two imaginary line segment A on top glass substrate
U-B
U, C
U-D
UThe mid point coordinate figure.Then, control part is obtained the imaginary line segment that links two mid points, by the coordinate figure of this imagination line segment mid point, calculates the coordinate figure at top glass substrate center.Equally, control part is calculated the coordinate figure at lower glass substrate center.Then, control part horizontally rotates lower table according to the rotation angle correction, makes top glass substrate follow the inclination angle slope unanimity of lower glass substrate with respect to the inclination angle slope of X-axis.Then, control part moves horizontally lower table, makes the center unanimity of two glass substrates.In detail, control part is calculated the position correction amount of X-direction and the position correction amount of Y direction according to the difference and the rotation angle correction of two glass substrate centre coordinate values, again according to each position correction, and mobile lower table on X-axis and Y direction.
That is to say, as shown in figure 10, the center of lower glass substrate, the rotation by lower table is from coordinate points M
LBe adapted to coordinate points M
L1, then, by carrying out the moving of lower table of contraposition, from coordinate points M with the center of top glass substrate
L1Be adapted to coordinate points M
UTherefore, be partitioned under the situation of one or more unit,, just can overlapping mutually accurately between the unit of two glass substrate correspondences as long as can carry out contraposition based on two glass substrate centers from a glass substrate.Therefore, the machining precision of product (display panel) is improved.
Yet, the display sizes as the display of automotive electronics guider, mobile telephone display etc., all little with the size of display than PC, its picture area for example all is about 7 inches or 2.7 inches.Therefore, number being cut apart in the unit of a glass substrate increases.With this understanding, if continue to use in the past applying method, when glass adhering substrate, then can produce the skew of fitting.Cut apart in that glass substrate is carried out multiaspect, when making FPD, can between unit and unit, produce skew.For example, as shown in figure 11, since stretching, extension, the distortion of lower glass substrate G1 self, original predetermined and top glass substrate G2 contraposition mark B
UThe contraposition mark B of the lower glass substrate G1 of contraposition
LJust to not gone up.Because be arranged to originally not overlap between the unit 21a that will overlap and the 21b, just formed this skew.
Figure 12 when to be expression by existing method carry out contraposition with upper substrate G2 and infrabasal plate G1 infrabasal plate G1 with respect to the chart of contraposition marking bias amount and the substrate center's side-play amount of upper substrate G2." AVE " expression mean value among the figure, " MAX " represents maximal value, " MIN " represents minimum value, " 3sigma " expression dispersion value (unit is a micron).Simultaneously, among the figure, " 1 ", " 2 ", " 3 ", " 4 " are represented contraposition mark " A respectively
U, A
L", " B
U, B
L", " C
U, C
L", " D
U, D
L", " X ", " Y " represent X-axis, Y-axis respectively.For example, " 1X " expression contraposition mark A
U, A
LBetween in the side-play amount of X-direction, " 1Y " expression contraposition mark A
U, A
LBetween in the side-play amount of Y direction." C
x", " C
y", represent respectively between two substrates G1, the G2 center in the side-play amount of X-direction with in the side-play amount of Y direction.As shown in figure 12, compare with the dispersion value of relevant substrate center side-play amount, the dispersion value of relevant contraposition marking bias amount is big.For example, the maximal value of relevant contraposition marking bias amount dispersion value, under " 3Y " 2.9.
By previous methods, even because substrate deformation, contraposition mark position has taken place under the situation of skew, also is to use to comprise glass substrate is calculated in this skew at interior coordinate figure central point.Therefore, as shown in figure 13, can be positioned at the contraposition of the contraposition mark on four angles of each glass substrate, produce very big deviation dependence.Therefore,, increased, surpass more than the setting, become unacceptable product by the offset meeting between two glass substrate G1, the G2 fitting near the formed unit big contraposition mark of side-play amount.Therefore, exist with respect to the FPD number made from one group of glass substrate, its yield rate reduces such problem.
Summary of the invention
The present invention does in view of such actual conditions just, and its purpose is to provide a kind of applying method and adhesive substrates manufacturing device that improves the finished product rate.
First embodiment of the present invention, a kind of exactly upper substrate that will have a plurality of first marks with have the applying method that the infrabasal plate that is used for catching up with respectively a plurality of second marks of stating a plurality of first mark contrapositions is fitted.This method comprises: operation is obtained in the position that obtains the coordinate position of the coordinate position of a plurality of first marks and a plurality of second marks; Represent the first side-play amount calculation process of a plurality of second marks respectively with calculating with respect to a plurality of first side-play amounts of the position offset of a plurality of first marks; With according to a plurality of first side-play amounts, calculate the applying position calculation operation of upper substrate and infrabasal plate applying position; With according to the applying position, the bonding process that upper substrate and infrabasal plate are fitted mutually.Applying position calculation operation, comprise: from a plurality of first side-play amounts, calculate the flexible side-play amount because of the flexible generation of upper substrate and infrabasal plate, the side-play amount of will stretching is assigned to respectively in a plurality of first side-play amounts, thereby calculates the second side-play amount calculation process of a plurality of second side-play amounts; With use a plurality of second side-play amounts, calculate either party of upper substrate and infrabasal plate, move to the correction calculation process of the required correction in applying position with respect to the opposing party.
Second embodiment of the present invention is a kind of upper substrate that will have a plurality of first marks and have the infrabasal plate that is used for catching up with respectively a plurality of second marks of stating a plurality of first mark contrapositions and fit and make the adhesive substrates manufacturing device of adhesive substrates.This device comprises: mechanism is obtained in the position that obtains the coordinate position of the coordinate position of above-mentioned a plurality of first marks and above-mentioned a plurality of second marks; Represent the first side-play amount calculation mechanism of above-mentioned a plurality of second mark respectively with calculating with respect to a plurality of first side-play amounts of the position offset of above-mentioned a plurality of first marks; With according to above-mentioned a plurality of first side-play amounts, calculate the applying position calculation mechanism of the applying position of above-mentioned upper substrate and above-mentioned infrabasal plate; With according to above-mentioned applying position, the fit body that above-mentioned upper substrate and above-mentioned infrabasal plate are fitted mutually; Above-mentioned applying position calculation mechanism comprises: by above-mentioned a plurality of first side-play amounts, calculate flexible side-play amount because of the flexible generation of above-mentioned upper substrate and above-mentioned infrabasal plate, again above-mentioned flexible side-play amount is assigned to respectively in above-mentioned a plurality of first side-play amount, thereby calculates the second side-play amount calculation mechanism of a plurality of second side-play amounts; With use above-mentioned a plurality of second side-play amounts, calculate either party of above-mentioned upper substrate and above-mentioned infrabasal plate, move to the correction calculation mechanism of the required correction in above-mentioned applying position with respect to the opposing party.
According to the present invention, can provide a kind of applying method and adhesive substrates manufacturing device that can improve two substrates of finished product rate.
Description of drawings
Fig. 1 is the summary construction diagram of expression first embodiment of the invention pressue device.
Fig. 2 (a) is the concept map of infrabasal plate, (b) is the concept map of upper substrate.
Fig. 3 is the concept map that explanation is fitted and is offset.
Fig. 4 is the concept map of explanation off-centring component.
Fig. 5 is the concept map of explanation distortion substrate.
Fig. 6 (a) is the planimetric map of the substrate (not being out of shape substrate) after the expression contraposition.
Fig. 6 (b) is the planimetric map of the substrate (distortion substrate) before the expression contraposition.
Fig. 6 (c) is the planimetric map of the substrate (substrate as shown in (b)) after the expression contraposition.
Fig. 7 is the side-play amount of expression contraposition mark and the key diagram of substrate center's side-play amount.
Fig. 8 is the key diagram that adopts offset component under the applying method situation of first embodiment of the invention.
Fig. 9 is the rotation correction concept map of prior art.
Figure 10 is the rotation correction of prior art and moves and revise concept map.
Figure 11 is the planimetric map that the applying method institute adhesive substrates of prior art is adopted in expression.
Figure 12 is the side-play amount of contraposition mark of expression prior art and the key diagram of substrate center's side-play amount.
Figure 13 is the key diagram that the offset component under the applying method situation of prior art is adopted in expression.
Embodiment
Below, with reference to the adhesive substrates manufacturing device of Fig. 1～9 explanation first embodiment of the invention.
Fig. 1 is the partial sectional view of expression adhesive substrates manufacturing device general arrangement.The adhesive substrates manufacturing device of first embodiment is a kind of pressue device.This pressue device in the unit manufacturing process in the manufacturing process of liquid crystal indicator, is implemented the processing procedure of two substrates of applying.Bonding process carries out after a substrate under liquid crystal drop.
Pressue device be two kinds of baseplate-laminatings will supplying with together, make the device of LCD panel.According to this instructions, wherein a kind of substrate is called infrabasal plate W1, and another kind of substrate is called upper substrate W2.For example, under the situation of first embodiment, infrabasal plate W1 is array base palte (a TFT substrate), and upper substrate W2 is colour filtering chip basic board (a CF substrate).Array base palte is included in a plurality of TFT that form on the glass substrate.The CF substrate is included in color filter and the photomask that forms on the glass substrate.Infrabasal plate W1 and upper substrate W2 are provided for pressue device after being made by independent process respectively.
Pressue device comprises and does not give illustrated control part.In the first embodiment, control part plays a part the control gear of following each operation of control: operation, the first side-play amount calculation process, applying position calculation operation, the second side-play amount calculation process, correction calculation process, bonding process and shooting operation are obtained in the position.
In the bottom of supporting frame 101, dispose travel mechanism 112.Lower container 110 relies on this travel mechanism 112, can move horizontally and can be supported in with horizontally rotating the top of travel mechanism 112.Below lower container 110 or inner, dispose many (in first embodiment being four) camera head 118a～118d of CCD camera for example etc.Under the first embodiment situation, each camera head 118a～118d plays a part to carry out the image mechanism of shooting operation.Below, in this manual, camera head 118a～118d is abbreviated as camera 1～4.
In lower container 110, be horizontally disposed with the worktable 113 of configuration infrabasal plate W1.In the upper exterior periphery of worktable 113, be provided with lifter plate 114.The part of this lifter plate 114 is protruded the foreign side at worktable 113.Lifter plate 114 is made of the elevating mechanism LM that is located at its below, and is movable up and down with respect to worktable 113.Worktable 113 is at least a power that rely on to attract absorption affinity or Electrostatic Absorption power, will be stated from infrabasal plate W1 absorption on this worktable 113 and keep and constitute.
Between the upper container 111 and second support plate 107, be provided with a plurality of corrugated tubes 115.In each corrugated tube 115 inside, interting and have the end that is fixed on second support plate 107 and the pillar 116 of the other end.Pillar 116 runs through upper container 111, and the other end of pillar 116 is fixed on the increased pressure board 117 that is disposed in the upper container 111.Second support plate 107 and upper container 111 rely on pressurization to rise or descend with the driving of motor 103.The side edge part of upper container 111 bumps before the side edge part of receiving lower container 110, if upper container 111 descends, then vacuum chamber 108 is by lower container 110 and upper container 111 sealings.Its result, the inner space of vacuum chamber 108 forms airtight sealing.
Infrabasal plate W1 and upper substrate W2 do not move in the vacuum chamber 108 by giving illustrated carrying device, configuration in opposite directions in vacuum chamber 108.In vacuum chamber 108, disposed after infrabasal plate W1 and the upper substrate W2, vacuumized in 100 pairs of vacuum chambers 108 of pressue device.Then, pressue device 100 uses contraposition mark that is marked in infrabasal plate W1 and the contraposition mark that is marked in upper substrate W2, and W2 carries out contactless optical registration to infrabasal plate W1 upper substrate.The contraposition mark is printed on each substrate W1, W2 in advance.In the first embodiment, the contraposition mark locates respectively to mark one at four angles (turning) of each substrate W1, W2.
In detail, as shown in Figure 2, on upper substrate W2, indicate for example contraposition mark A of square frame shape
U, B
U, C
U, D
U, on infrabasal plate W1, indicate for example contraposition mark A of square shape
L, B
L, C
L, D.And, among four angles, contraposition mark A
U, A
LBe marked on upper left, contraposition mark B
U, B
LBe marked on the bottom right, contraposition mark C
U, C
LBe marked on upper right, contraposition mark D
U, D
LBe marked on the lower-left.In addition, under the first embodiment situation, on infrabasal plate W1, form six unit 21b, on upper substrate W2, form six unit 21a.
Secondly, detailed description is based on the contraposition control of the upper substrate W2 and the infrabasal plate W1 of control part.
(operation is obtained in the position)
Obtain in the operation in the position, at first, four cameras 1～4 of control part control are made a video recording to four jiaos of contraposition marks of infrabasal plate W1 and upper substrate W2.Then, control part is obtained the image (view data) of contraposition mark from each camera 1～4, utilizes the contraposition mark position (coordinate position) of this view data identification two substrates W1, W2.In addition, under the first embodiment situation, on the XY coordinate plane, by camera 1 take the photograph contraposition mark A
U, A
LThe position corresponding to second quadrant, camera 2 take the photograph contraposition mark B
U, B
LThe position corresponding to four-quadrant, camera 3 take the photograph contraposition mark C
U, C
LThe position corresponding to first quartile, camera 4 take the photograph contraposition mark D
U, D
LThe position corresponding to third quadrant.
Secondly, control part according to camera 1～4 take the photograph view data, make the lower table 113 of mounting infrabasal plate W1 move horizontally and horizontally rotate, four jiaos of contraposition marks of two substrates W1, W2 are overlapped in the position of correspondence respectively.Take this to carry out the contraposition between the contraposition mark in four angles of two substrates W1, W2.
Fig. 3 summary represent by camera 1～4 take the photograph the synoptic diagram of contraposition token image Cam1～Cam4.The contraposition mark of each substrate W1, W2 is because the incomplete mark of shape identifies, mark is described mistake or because the thermogenetic substrate dilatation that substrates such as sealing describing device, liquid crystal dripping device are processed to form etc. can cause offset (pitch error).Therefore, only with the contraposition mark of infrabasal plate W1, carrying out contraposition with respect to the contraposition mark of upper substrate W2 is to be difficult to overlap.As shown in Figure 3, the center of infrabasal plate W1 is as contraposition mark A
L, B
LBetween mid point M1 and contraposition mark C
L, D
LBetween mid point M2 between the coordinate figure of mid point M3 obtain.According to previous methods to method for position, be mobile infrabasal plate W1, make as the coordinate figure of this mid point M3 and the infrabasal plate W1 center of trying to achieve is consistent with the center of the upper substrate W2 that in kind tries to achieve.Therefore, under the state of having finished contraposition, the skew of base plate deformation place or its contraposition mark nearby (is the contraposition mark B among the image C am2 in Fig. 3
U, B
LBetween skew), all bigger than other the skew (being the skew between the contraposition mark among other the image C am1,3,4 in Fig. 3) of contraposition mark.If this side-play amount is big, just because the unit of two substrates W1, W2 does not overlap in specialized range, so can produce underproof unit.Therefore, such finished product rate, as mentioned above, along with the divided unit of substrate is many more and big more.Therefore, as described below, in the present invention,, at first to calculate the degree of pitch error, and utilize its result of calculation to calculate rotation correction and position correction amount in order to improve the finished product rate.
(the first side-play amount calculation process)
In this operation, control part use by camera 1～4 take the photograph image C am1～Cam4, calculate the side-play amount (first side-play amount) of infrabasal plate W1 with respect to four jiaos the contraposition mark of upper substrate W2.This first side-play amount comprises relative displacement (hereinafter referred to as the substrate side-play amount) between two substrates W2, the W1 and the side-play amount (hereinafter referred to as flexible side-play amount) that produces because of two substrates W2, W1 are flexible.
Specifically, as shown in Figure 3, control part is calculated contraposition mark A by resolving the image C am1 that takes the photograph from camera 1
LWith respect to contraposition mark A
UThe X component and the Y component of first side-play amount.
Equally, control part by resolve respectively from camera 2～3 take the photograph image C am2～Cam4, calculate contraposition mark B respectively
L, C
L, D
LWith respect to contraposition mark B
U, C
U, D
UFirst side-play amount (X component and Y component).
(applying position calculation operation)
In this operation, control part is calculated the applying position of two substrate W1, W2 according to a plurality of first side-play amounts of relevant four jiaos of contraposition marks.Applying position calculation operation comprises the second side-play amount calculation process and correction calculation process.
(the second side-play amount calculation process)
In this operation, at first, control part is calculated flexible side-play amount according to a plurality of first side-play amounts of relevant four jiaos of contraposition marks.Then, the control part side-play amount of will stretching is assigned in a plurality of first side-play amounts, calculates a plurality of second side-play amounts, makes the flexible side-play amount equalization of four jiaos of contraposition marks.This second side-play amount, comprise between two substrates W2, the W1 the substrate side-play amount and because of the flexible flexible side-play amount of skew after equalization that is caused of two substrates W2, W1.
Below, describe the computing method of second side-play amount in detail.
Under the situation of first embodiment, control part uses first to fourth quadrant component of first to fourth quadrant that is set in the XY planimetric coordinates respectively, calculates second side-play amount from first side-play amount.In addition, in this manual, so-called quadrant component, the X component in the expression all quadrants and the symbol (1 or-1) of Y component.
From first side-play amount that each camera 1～4 image pickup result is derived, relevant with corresponding position of camera.Under the situation of first embodiment, the quadrant component is associated with the position of camera.Control part is calculated the relative stroke (promptly flexible side-play amount) of infrabasal plate W1 with respect to upper substrate W2 according to the quadrant component of the X component of first side-play amount and Y component and corresponding position of camera.
As an example, as shown in Figure 3, with regard to infrabasal plate W1 with respect to upper substrate W2, at contraposition mark B
LThe upwardly extending situation in side describe.In the case, between image C am1, Cam3, Cam4, (Y direction (above-below direction among the figure) is same value for X component of first side-play amount (side-play amount of directions X (left and right directions among the figure)) and Y component.Therefore, as long as infrabasal plate W1 is moved side-play amount among image C am1, Cam3, the Cam4, the contraposition mark B in image C am2
U, B
LSide-play amount, just become the relative stroke of infrabasal plate W2 with respect to upper substrate W1.
As shown in Figure 4, the contraposition mark A that belongs to second quadrant
UBe associated with " X+ direction " and " Y+ direction ", the second quadrant component be set at (X, Y)=(1,1).Belong to four-quadrant contraposition mark B
UBe associated with " X-direction " and " Y-direction ", the four-quadrant component be set at (X, Y)=(1 ,-1).The contraposition mark C that belongs to first quartile
U" X-direction " and " Y+ direction " is associated, the first quartile component be set at (X, Y)=(1,1).The contraposition mark D that belongs to third quadrant
UBe associated with " X+ direction " and " Y-direction ", the third quadrant component be set at (X, Y)=(1 ,-1).In addition, in Fig. 4, the contraposition mark A of relevant infrabasal plate W1
L1, B
L1, C
L1, D
L1Represent the revised position of rotation described later.
Under the situation of first embodiment, at first, control part is the coordinate figure (X component, Y component) of each first side-play amount, multiply by corresponding quadrant component, obtain itself and, again with it with divided by 4, try to achieve the mean value (X component, Y component) of flexible side-play amount.
The X component of first side-play amount of calculating from the image of camera 1～4, be set at CamnX (n=1～4), the Y component of first side-play amount is set under the situation of CamnY (n=1～4), the mean value AveY of the mean value AveX of the X component of flexible side-play amount and the Y component of flexible side-play amount can be calculated by following formula " several 1 ", " several 2 ".
" several 1 "
AveX＝((Cam1X*1)+(Cam2X*-1)+(Cam3X*-1)+(Cam4X*1))/4
" several 2 "
AveY＝((Cam1Y*1)+(Cam2Y*-1)+(Cam3Y*1)+(Cam4Y*-1))/4
Secondly, control part is calculated the modified value (X component, Y component) that is used for flexible averaging of the side-play amount processing of four jiaos of contraposition marks according to mean value AveX, the AveY of flexible side-play amount.Mean value AveX, the AveY of this modified value by flexible side-play amount multiply by the quadrant component respectively, and (X Y) tries to achieve.
X component VirXn (n=1～4) and Y component VirYn (n=1～4) with the corresponding modified value of camera 1～4 (that is four jiaos contraposition mark) represents with following formula respectively.
VirX1＝AveX*1
VirX2＝AveX*-1
VirX3＝AveX*-1
VirX4＝AveX*1
VirY1＝AveY*1
VirY2＝AveY*-1
VirY3＝AveY*1
VirY4＝AveY*-1
Secondly, control part is revised first side-play amount according to the modified value of calculating, and calculates second side-play amount.Specifically, (X, (X Y), calculates second side-play amount to control part Y) to deduct corresponding modified value from first side-play amount.As mentioned above, this second side-play amount (CalnX, CalnY) comprises the mean value by substrate side-play amount between two substrates W2, the W1 and the flexible side-play amount that produces because of two substrates W1, W2 are flexible.
The X component CalnX (n=1～4) and the Y component CalnY (n=1～4) of second corresponding with camera 1～4 (i.e. four jiaos contraposition mark) the respectively side-play amount represent with following formula.
CalnX＝CamnX-VirXn
CalnY＝CamnY-VirYn
For example, set first side-play amount (X, Y), with regard to contraposition mark A
U, A
LBe (0.1,1.2), with regard to contraposition mark B
U, B
LBe (0.9 ,-0.8), with regard to contraposition mark C
U, C
LBe (1.0 ,-2.4), with regard to contraposition mark D
U, D
LBe (2.5,0.8).
In the case, from " several 1 ", the X component that " several 2 " calculate the mean value of flexible side-play amount is AveX=0.675, and the Y component of mean value is AveY=-0.3.In addition, the X component is considered the limit of precision, and numerical value is rounded up, and is set at 0.7.
By this mean value be multiply by the quadrant component, the X component and the Y component of modified value are calculated as follows.
(VirX1，VirX2，VirX3，VirX4)＝(0.7，-0.7，-0.7，0.7)
(VirY1，VirY2，VirY3，VirY4)＝(-0.3，0.3，-0.3，0.3)
Therefore, (X Y) is (0.6 to second side-play amount in second quadrant (camera 1), 1.5), (X Y) is (1.6 ,-1.1) to second side-play amount in the four-quadrant (camera 2), second side-play amount (the X in the first quartile (camera 3), Y) be (0.3 ,-2.1), the second side-play amount (X in the third quadrant (camera 4), Y) be (1.8,0.5).
(correction calculation process)
In this operation, control part is calculated either party (first embodiment is infrabasal plate W1) among upper substrate W2 and the infrabasal plate W1 is moved to the required correction in applying position with respect to the opposing party according to second side-play amount of four jiaos contraposition mark.This correction comprises to horizontally rotate the required rotation correction of infrabasal plate W1 correction and move horizontally infrabasal plate W1 revises required mobile correction.
Rotation correction (anglec of rotation) is calculated according to " several 3 "～" several 9 ".Specifically, control part is at first tried to achieve in upper substrate W2, connects the contraposition mark A at diagonal angle
U, B
UImaginary line segment A
U-B
UWith the contraposition mark C that is connected the diagonal angle
U, D
UImaginary line segment C
U-D
U, re-use " several 3 "～" several 5 " calculate two imaginary line segments respectively with the mean value α of X-axis angulation α 1, α 2.This mean value α represents the inclination angle slope of upper substrate W2 with respect to X-axis.Then, control part uses " several 6 "～" several 8 ", calculates in infrabasal plate W1, and infrabasal plate W1 is with respect to the inclination angle slope β of X-axis.Under the situation of first embodiment, (X Y), calculates the inclination angle slope β of this infrabasal plate W1 to use the coordinate figure corresponding with second side-play amount.In addition, in Fig. 4, use A
L1, B
L1, C
L1, D
L1Expression is based on the contraposition mark of the infrabasal plate W1 of second side-play amount.And from the inclination angle slope α of two substrates W1, W2, β calculates the inclination angle slope Δ θ (rotation correction) of upper substrate W2 with respect to infrabasal plate W1 according to " several 9 ".
" several 3 "
α1＝arctan((B
Uy-A
Uy)/(B
Ux-A
Ux))
" several 4 "
α2＝arctan((D
Uy-C
Uy)/(C
Ux-D
Ux))
" several 5 "
α＝(α1+α2)/2
" several 6 "
β1＝arctan((B
L1y-A
L1y)/(B
L1x-A
L1x))
" several 7 "
β2＝arctan((D
L1y-C
L1y)/(C
L1x-D
L1x))
" several 8 "
β＝(β1+β2)/2
" several 9 "
Δθ＝β-α
By using above-mentioned rotation modification method, the center rotation of infrabasal plate W1 is adapted to center M
L1(with reference to Fig. 4).
Then, control part is calculated four jiaos the contraposition mark that is used for contraposition, that is, and and contraposition mark A
U, A
L1, contraposition mark B
U, B
L1, contraposition mark C
U, C
L1, contraposition mark D
U, D
L1Mobile correction (directions X, Y direction).This mobile correction is to try to achieve according to the side-play amount of the revised contraposition mark of rotation.
In the calculating of mobile correction, control part extracts distinguished point.So-called distinguished point is exactly the maximum contraposition mark of side-play amount (the 3rd side-play amount) of the revised X component of rotation, Y component.For example, the revised side-play amount of rotation in each contraposition mark is made as Δ A1, Δ B1, Δ C1, Δ D1, according to " several 10 ", " several 11 ", tries to achieve its X component Δ A again
X1, Δ B
X1, Δ C
X1, Δ D
X1With its Y component Δ A
Y1, Δ B
Y1, Δ C
Y1, Δ D
Y1Maximal value and minimum value.
" several 10 "
XA＝MAX(ΔBX1，ΔCX1)
XB＝MIN(ΔAX1，ΔDX1)
XC＝MIN(ΔBX1，ΔCX1)
XD＝MAX(ΔAX1，ΔDX1)
" several 11 "
YA＝MAX(ΔBY1，ΔDY1)
YB＝MIN(ΔAY1，ΔCY1)
YC＝MIN(ΔBY1，ΔDY1)
YD＝MAX(ΔAY1，ΔCY1)
At this, compare substrate center's direction and substrate lateral direction, a side big according to side-play amount tries to achieve each X, the calculating side-play amount of substrate in the Y component.For example, if the absolute value of the XA that tries to achieve according to " several 10 " this moment and XB sum is the also bigger value of absolute value than XC and XD sum, the calculating side-play amount DiffX of substrate X component then presses (XA+XB)/2 and obtains.In addition, if the absolute value of XC and XD sum is the bigger value of absolute value than XA and XB sum, aforementioned calculation side-play amount DiffX then obtains by (XC+XD)/2.
Equally, if the YA that tries to achieve according to " several 11 " and the absolute value of YB sum are the bigger values of absolute value than YC and YD sum, the calculating side-play amount DiffY of Y component, then obtain by (YA+YB)/2, simultaneously, if the absolute value of YC and YD sum is the bigger value of absolute value than YA and YB sum, aforementioned calculation side-play amount DiffY then obtains by (YC+YD)/2.
Like this, by considering flexible side-play amount, globality ground carries out position correction to flexible side-play amount equalization, just can as shown in Figure 5 upper substrate W2 and infrabasal plate W1 be overlapped mutually.Compare with method in the past, the correction that this method is carried out is to allow all overlap each other between unit 21a, the 21b in the whole base plate.In addition, in Fig. 5, two unit 21a, 21b seem to depart from very big, are that the stroke of substrate W1 here shows to such an extent that exaggerate a bit in fact, and actual stroke is then minimum, and the degrees of offset of two unit 21a, 21b is not in-problem in practicality.
Within control part, revising Coordinate Calculation one finishes, control part just horizontally rotates lower table according to rotation correction (angle), meanwhile, according to the X-direction of calculating according to the difference and the rotation correction of two substrates W1, W2 centre coordinate value and the mobile correction of Y direction, lower table is moved horizontally on X-axis and Y direction.
This method, shown in Fig. 6 (a), under situation not because of the position distortion of the flexible generation contraposition mark of upper substrate W2 and infrabasal plate W1, much less, shown in Fig. 6 (b), even at contraposition mark (D
L) produced on the position under the situation of skew, also can shown in Fig. 6 (c), consider the flexible of substrate, decision applying position.
Fig. 7 is the result that the 50 cover adhesive substrates that make are measured, and is the side-play amount of expression contraposition mark and the table of substrate center's side-play amount.In Fig. 7, " AVE " represents mean value, and " MAX " represents maximal value, and " MIN " represents minimum value, " 3sigma " expression dispersion value (unit is a micron).In addition, " 1 ", " 2 ", " 3 ", " 4 " are represented contraposition mark (A respectively
U, A
L), (B
U, B
L), (C
U, C
L), (D
U, D
L), " X ", " Y " represent X-axis, Y-axis respectively.For example, " 1X " expression contraposition mark A
U, A
LBetween at the side-play amount of X-direction, " 1Y " contraposition mark A
U, A
LBetween in the side-play amount of Y direction." Cx ", " Cy " represent respectively between two substrates W1, the W2 center in the side-play amount of X-direction with in the side-play amount of Y direction.In addition, Figure 12 is the measurement result of adhesive substrates of 50 covers that make by prior art.
In Fig. 7, the maximal value of dispersion value is that 1.9 (Final2Y is the contraposition mark B at camera 2
U, B
LBetween the Y component of side-play amount).In contrast, in Figure 12, the maximal value of dispersion value is that 2.9 (Final3Y is the contraposition mark C at camera 3
U, C
LBetween the Y component of side-play amount).Like this, under the situation of first embodiment, compare with applying method in the past, the maximal value of dispersion value is low 1.0.Therefore, can reduce the side-play amount of contraposition mark.
Fig. 8 is the side-play amount mapping of the side-play amount of the contraposition mark between two substrates W1, the W2 that will fit by first embodiment and substrate center and the figure that obtains.Figure 13 represents side-play amount of the prior art.In Fig. 8, Figure 13, a scale among image C am1～Cam4 is equivalent to 1 micron, and a scale in the substrate center (Center) is equivalent to 0.1 micron.Under first embodiment (Fig. 8) situation, (Figure 13) compares with prior art, and the side-play amount of contraposition mark diminishes as can be known.Therefore, the unit of upper substrate W2 and infrabasal plate W1 is balanced to be overlapped, and flexible even two substrates W1, W2 produce, the side-play amount of all unit among upper and lower base plate W1, the W2 that should overlap is all within specialized range.Therefore, the yield rate of the number of the FPD that finishes by two substrates, all good than prior art.
The applying manufacturing installation and the method for first embodiment have the following advantages.
(1) calculates first side-play amount of four jiaos contraposition mark by the image of camera 1～4, calculate from each first side-play amount again and result from the flexible side-play amount of two substrates W1, W2 (flexible side-play amount).Then, calculate second side-play amount,,, calculate the correction (rotation correction and mobile correction) of mobile upper substrate W2 and infrabasal plate W1 again according to this second side-play amount with the flexible side-play amount equalization of four jiaos contraposition marks.Its result, the balanced coincidence between the unit between two substrates W1, W2, the unit number of side-play amount scope up to specification compared with prior art increases to some extent, that is to say that the manufacturing quantity of unacceptable product is reduced.Therefore, can carry out the applying of high upper substrate W2 of yield rate and infrabasal plate W1.
(2) according to many cameras take the photograph the view data of contraposition mark and the coordinate position of camera, carry out Flame Image Process by control part, can be easy to obtain side-play amount.
(3) according to will stretch the side-play amount equalization the corresponding coordinate figure of second side-play amount, calculate and revise the rotation angle correction that upper substrate W2 and infrabasal plate W1 angular deflection are used.Then, according to this rotation angle correction, calculate the mobile correction when among upper substrate W2 and the infrabasal plate W1 either party rotated.Thereby, can carry out the angle modification of horizontal direction well and move correction.
In addition, above-mentioned embodiment also can be implemented in the following manner.
(camera head 118a～118d) also can be arranged on places such as the madial wall of vacuum chamber 108 or upper container 111 to camera 1～4.
Also can set rotatable and mobile upper substrate for.
The contraposition mark also can be the shape except that the square shape, toroidal for example, triangle.Simultaneously, mark quantity can be set arbitrarily according to operational circumstances and substrate shape.
Also can make two substrates applying method, follow the Base Plate Lamination Device of suitably changing based on the applying method of prior art based on above-mentioned embodiment.This device, for example, the side-play amount of stretching and causing because of substrate, compare with predefined decision content, under the flexible situation of side-play amount less than decision content, implement the applying method of above-mentioned embodiment, under the flexible situation of side-play amount, then implement the applying method of above-mentioned prior art greater than decision content.Under the situation of the applying method of implementing to have considered flexible side-play amount, if this side-play amount is excessive, in the substrate after applying, the situation that the unit that side-play amount surpasses specialized range increases (for example all the side-play amount of unit all above specialized range) appears sometimes.In the case, by implementing the applying method of prior art, the unit number in the side-play amount scope up to specification is increased, and can improve yield rate.
Claims (8)
1. applying method, it is a kind ofly will have a plurality of first mark (A
U～D
U) upper substrate (W2) be used for catching up with respectively a plurality of second mark (A that state the first mark contraposition with having
L～D
L) infrabasal plate (W1) applying method of fitting, it is characterized in that this method comprises:
Obtain the position of the coordinate position of the coordinate position of above-mentioned a plurality of first marks and above-mentioned a plurality of second marks and obtain operation; With
Calculate and represent the first side-play amount calculation process of above-mentioned a plurality of second mark respectively with respect to a plurality of first side-play amounts (CamnX, CamnY) of the position offset of above-mentioned a plurality of first marks; With
According to above-mentioned a plurality of first side-play amounts, calculate the applying position calculation operation of above-mentioned upper substrate and above-mentioned infrabasal plate applying position; With
According to above-mentioned applying position, with above-mentioned upper substrate and the mutual bonding process of fitting of above-mentioned infrabasal plate;
Above-mentioned applying position calculation operation wherein comprises:
From above-mentioned a plurality of first side-play amounts, calculate flexible side-play amount because of the flexible generation of above-mentioned upper substrate and above-mentioned infrabasal plate, above-mentioned flexible side-play amount is assigned to respectively in above-mentioned a plurality of first side-play amount, thus the second side-play amount calculation process of calculating a plurality of second side-play amounts (CalnX, CalnY);
Use above-mentioned a plurality of second side-play amount, calculate, move to the correction calculation process of the required correction in above-mentioned applying position with respect to the opposing party either party of above-mentioned upper substrate and above-mentioned infrabasal plate.
2. according to the applying method of claim 1 record, it is characterized in that above-mentioned position is obtained operation and also comprised:
With many camera heads (118a～118d), the shooting operation that above-mentioned a plurality of first marks and above-mentioned a plurality of second mark are made a video recording; With
According to coordinate position, obtain the coordinate position of the coordinate position of the coordinate position of above-mentioned a plurality of first marks and above-mentioned a plurality of second marks and obtain operation by above-mentioned many camera head shot image data and above-mentioned many camera heads.
3. according to the applying method of claim 1 or 2 records, it is characterized in that,
Above-mentioned a plurality of first mark and above-mentioned a plurality of second mark are associated with four quadrant components in the XY coordinate plane respectively;
The above-mentioned second side-play amount calculation process comprises:
Calculate the calculation process of above-mentioned flexible side-play amount mean value; With
According to all quadrants component, with the mean value of above-mentioned flexible side-play amount, with respectively the measuring addition or subtract each other and the calculation process of calculating above-mentioned a plurality of second side-play amounts of above-mentioned a plurality of first side-play amounts;
Above-mentioned correction calculation process comprises:
According to above-mentioned a plurality of second side-play amounts, calculate the calculation process of the rotation correction that is used to revise above-mentioned upper substrate and above-mentioned infrabasal plate angular deflection; With
Calculate and be used to revise through rotating the calculation process of revised above-mentioned upper substrate and above-mentioned infrabasal plate mobile correction of offset on X-axis and Y direction.
4. according to the applying method of claim 3 record, it is characterized in that aforementioned calculation moves the operation of correction, comprising:
Calculate respectively in maximal value and minimum value X-axis and Y direction, state the position offset of a plurality of second marks on revised above-mentioned a plurality of first marks with respect to above-mentioned rotation, according to the maximal value of above-mentioned X-direction and the maximal value and the minimum value of minimum value and above-mentioned Y direction, calculate either party of above-mentioned upper substrate and above-mentioned infrabasal plate moved horizontally the calculation process of required above-mentioned mobile correction.
5. adhesive substrates manufacturing device, it is a kind ofly will have a plurality of first mark (A
U～D
U) upper substrate (W2) be used for catching up with respectively a plurality of second mark (A that state a plurality of first mark contrapositions with having
L～D
L) infrabasal plate (W1) fit and make the adhesive substrates manufacturing device of adhesive substrates, it is characterized in that this adhesive substrates manufacturing device comprises:
Obtain the position of the coordinate position of the coordinate position of above-mentioned a plurality of first marks and above-mentioned a plurality of second marks and obtain mechanism; With
Calculate and represent the first side-play amount calculation mechanism of above-mentioned a plurality of second mark respectively with respect to a plurality of first side-play amounts (CamnX, CamnY) of the position offset of above-mentioned a plurality of first marks; With
According to above-mentioned a plurality of first side-play amounts, calculate the applying position calculation mechanism of the applying position of above-mentioned upper substrate and above-mentioned infrabasal plate; With
According to above-mentioned applying position, with above-mentioned upper substrate and the mutual fit body of fitting of above-mentioned infrabasal plate;
Above-mentioned applying position calculation mechanism comprises:
By above-mentioned a plurality of first side-play amounts, calculate flexible side-play amount because of the flexible generation of above-mentioned upper substrate and above-mentioned infrabasal plate, again above-mentioned flexible side-play amount is assigned to respectively in above-mentioned a plurality of first side-play amount, thereby calculates the second side-play amount calculation mechanism of a plurality of second side-play amounts (CalnX, CalnY); With
Use above-mentioned a plurality of second side-play amount, calculate, move to the correction calculation mechanism of the required correction in above-mentioned applying position with respect to the opposing party either party of above-mentioned upper substrate and above-mentioned infrabasal plate.
6. according to the adhesive substrates manufacturing device of claim 5 record, it is characterized in that, mechanism is obtained in above-mentioned position, possesses a plurality of image mechanisms that above-mentioned a plurality of first marks and above-mentioned a plurality of second mark are made a video recording (118a～118d), and, obtain the coordinate position of above-mentioned a plurality of first marks and the coordinate position of above-mentioned a plurality of second marks according to coordinate position with above-mentioned a plurality of image mechanism shot image data and above-mentioned a plurality of image mechanisms.
7. according to the adhesive substrates manufacturing devices of claim 5 or 6 records, it is characterized in that above-mentioned a plurality of first marks and above-mentioned a plurality of second mark are associated with four quadrant components in the XY coordinate plane respectively;
The above-mentioned second side-play amount calculation mechanism comprises:
Calculate the calculation mechanism of above-mentioned flexible side-play amount mean value; With
With the mean value of above-mentioned flexible side-play amount,, carry out addition with each amount of above-mentioned a plurality of first side-play amounts respectively or subtract each other and calculate the calculation mechanism of above-mentioned a plurality of second side-play amounts according to all quadrants component;
Above-mentioned correction calculation mechanism comprises:
According to above-mentioned a plurality of second side-play amounts, calculate the calculation mechanism of revising the rotation correction that above-mentioned upper substrate and above-mentioned infrabasal plate angular deflection use; With
Calculate the above-mentioned upper substrate that is used to revise after rotation is revised and above-mentioned infrabasal plate calculation mechanism in the mobile correction of the offset of X-axis and Y direction.
8. according to the adhesive substrates manufacturing device of claim 7 record, it is characterized in that, calculate the mechanism of above-mentioned mobile correction, calculate respectively earlier above-mentioned a plurality of second mark with respect to above-mentioned through rotating maximal value and the minimum value of revised above-mentioned a plurality of first marks at the position offset of X-axis and Y direction, again according to the maximal value of above-mentioned X-direction and the maximal value and the minimum value of minimum value and above-mentioned Y direction, calculate either party the required above-mentioned mobile correction that moves horizontally above-mentioned upper substrate and above-mentioned infrabasal plate.
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| JP2006222666 | 2006-08-17 | ||
| JP2006222666 | 2006-08-17 | ||
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| CN115097664A (en) * | 2022-07-11 | 2022-09-23 | 河南省华锐光电产业有限公司 | Method and device for bonding substrates |
| CN115200480A (en) * | 2022-09-17 | 2022-10-18 | 深圳市巨力方视觉技术有限公司 | Alignment and lamination visual detection system |
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