CN101118112A - Large-sized vacuum hotpressing stove - Google Patents
Large-sized vacuum hotpressing stove Download PDFInfo
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- CN101118112A CN101118112A CNA2007100457163A CN200710045716A CN101118112A CN 101118112 A CN101118112 A CN 101118112A CN A2007100457163 A CNA2007100457163 A CN A2007100457163A CN 200710045716 A CN200710045716 A CN 200710045716A CN 101118112 A CN101118112 A CN 101118112A
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Abstract
The present invention relates to a large vacuum hot pressing furnace, which comprises an electric furnace main body. The electric furnace main body comprises a furnace casing, a furnace casing bottom elevating device and an induced heating device; the furnace casing bottom elevating device comprises a material loading elevating platform, an electrical motor, three plane guideposts supported on the bottom part of the material loading elevating platform, and two adjusting screw rods driven by the same electrical motor; the induced heating device comprises an inductor and a furnace lining; a fire-resisting heat-insulating layer and an electric insulation later are arranged around the furnace lining structure arranged between the induction coil and the graphite heating cylinder of the inductor. The vacuum hot pressing furnace can make the material feeding and discharging process more safe and reliable, and meets requirements of the vacuum sealing performance and improves the planeness of the material loading elevating platform evidently. The adaptation of the induction heating method can make the temperature-rising speed improved significantly, and because the heating element is a graphite susceptor cylinder, which has strong intensity under high temperature, even if the graphite mold breaks under the pressing condition, the heating element can not be damaged.
Description
Technical Field
The invention relates to sintering of ceramic materials, in particular to equipment for heating and sintering the ceramic materials in vacuum or protective atmosphere, and particularly relates to a large vacuum hot-pressing furnace.
Background
A medium frequency induction vacuum hot pressing furnace belongs to an electric furnace for periodic operation. The original bottom charging mechanism generally adopts a cylinder or hydraulic cylinder jacking mechanism to complete the charging process of the vertical vacuum furnace from the bottom of the furnace body. Because the cylinder or the hydraulic cylinder has poor stability in the reciprocating motion process and strong impact, the precision of the lifting platform, the flatness of the working material table and the vacuum sealing performance of the working material table and the furnace body are difficult to control. In the prior art, a screw rod lifting device is also adopted, but the flatness of a feeding lifting platform is still difficult to ensure because the lifting device only adopts two plane guide columns for guiding.
In addition, a common vacuum hot-pressing furnace in the prior art adopts a vacuum resistance heating mode, a graphite tube is used for heating, and the heating rate is low in the heating process; in the hot pressing process, the graphite mold is easy to crack under the pressure condition, so that the graphite tube for heating is damaged.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a large vacuum hot-pressing furnace, which can ensure that the feeding and discharging process is more accurate, safe and reliable, meets the requirement of vacuum sealing performance and obviously improves the flatness of a feeding lifting platform. The induction heating mode is adopted to obviously improve the temperature rising speed. Because the heating element is a graphite sensing cylinder, the heating element still has higher strength at high temperature, and the heating element cannot be damaged even if the graphite die is broken under the compression condition.
The purpose of the invention is realized as follows:
the large-scale vacuum hot-pressing furnace comprises an electric furnace main body, wherein the electric furnace main body comprises a furnace shell, a lifting device at the bottom of the furnace shell and an induction heating device in the furnace shell; the furnace shell bottom lifting device comprises a feeding lifting platform, a motor, a plane guide post and an adjusting screw rod, wherein the plane guide post is supported at the bottom of the feeding lifting platform; it is characterized in that the preparation method is characterized in that,
the number of the plane guide posts is three; the two adjusting screw rods are synchronously driven by one motor;
the induction heating device comprises an inductor and a furnace lining;
the inductor comprises an induction coil and a graphite sensing cylinder which are wound by a copper tube; and a fire-resistant heat insulation layer and an electric insulation layer are respectively arranged around the furnace lining structure between the induction coil and the graphite sensing cylinder.
In the large vacuum autoclave, wherein,
the fireproof heat insulation layer is arranged between the graphite sensing cylinder and the induction coil and is formed by combining a graphite felt product and a graphite brick product.
The electric insulation layer is arranged on the periphery of the induction coil and is made by spraying and drying high-strength insulating varnish and then binding a mica tape.
And two sets of travel switches are respectively arranged at the limit positions of the up-and-down movement of the feeding lifting platform.
The overall flatness of the feeding lifting platform is less than or equal to 0.2mm in the running process.
The power of the electric furnace main body and the number of turns of the inductor are calculated by the following formula:
wherein, the first and the second end of the pipe are connected with each other,
electric furnace power P = 0.6. F 0.76 (T/1000) 2.53 Unit kW
Wherein F is the surface area unit dm of the effective heating zone 2
T is heating temperature unit K (Kelvin)
The number of turns of the inductor is calculated as:
1) Diameter d unit cm of graphite heating element
2) Height h unit cm of graphite heating element
3) Diameter D unit cm of inductor
4) Height H unit cm of inductor
5) Depth of penetration of the inductor
Unit cm
Where ρ 1 is the specific resistance unit Ω · cm of copper
f is the frequency unit Hz of the medium-frequency power supply
6) Penetration depth of graphite heating elementUnit cm
In the formula, ρ 2 is the specific resistance unit Ω · cm of graphite
f is the frequency unit Hz of the medium-frequency power supply
7) Calculated diameter d' = d-delta 2 unit cm of graphite heat-generating body
8) Inductor single-turn resistance R01= ρ 1 · (π · D/K3 · δ 1 · H) unit Ω
K3 is the filling factor
9) Graphite heating element single-turn resistance R02= rho 2 · (pi · d'/δ 2 · h) unit Ω
10 ) self-inductance of inductor
Unit cm
Wherein α 1 is the length coefficient of the inductor
11 Self-induction coefficient of graphite heating elementUnit cm
Wherein α 2 is a length coefficient of the graphite heating element
12 ) inductor-graphite heater system mutual inductance
Unit cm
Wherein F is the geometric size coefficient of the inductor
13 ) angular frequency ω =2 π f
14 Reactance X of inductor) 01 ＝ω·L 01 ×10 -9 Unit omega
15 Reactance X of graphite heat-generating body 02 ＝ω·L 02 ×10 -9 Unit omega
16 ) inductor-graphite heater system mutual inductance reactance
X 02 ＝ω·M12×10 -9 Unit omega
17 Transformation coefficient of inductor-graphite heating element system
18 Reduced resistance R of furnace 0 ＝R 01 +A 2 R 02 Unit omega
19 ) reduced reactance X of the furnace 0 ＝X 01 -A 2 X 02 Unit omega
20 Reduced impedance of furnaceUnit omega
21 U0 units V) of the input voltage of the furnace
22 Ampere turns
Unit A
23 ) inter-turn voltage U1= Z0 · I0 unit V
24 N = U0/U1 inductor turns
Due to the adoption of the technical scheme, compared with the prior art, the invention has the advantages and positive effects as follows:
1. the furnace shell bottom lifting device adopts three plane guide posts to control the operation of bottom charging; the two screw rods are driven by one motor, so that the synchronism of the two screw rods is ensured. The screw rod transmission runs stably and reliably in the lifting process, the positioning is convenient and accurate, and the lifting height of the feeding platform can be adjusted at will to adapt to the lifting process of charging trays with different heights.
2. The screw rod transmission is driven by motors with different reduction ratios, so that the speed can be flexibly adjusted, and the requirements of different bottom loading lifting speeds required by users can be met very favorably. The motor adopts variable frequency speed regulation in the operation process, and corresponding lifting speeds are adopted in different feeding stages, so that the feeding and discharging process is more accurate, safe and reliable, and the requirement on the vacuum sealing performance can be met.
3. The electric furnace adopts a medium-frequency induction heating mode, the heating body is a graphite sensing cylinder, and the temperature rise rate is high. The heating element is a thick-walled graphite susceptor with the diameter delta =50mm, has high strength at high temperature, and does not damage the heating element even if the graphite mold is broken under a pressure condition.
4. The invention uses the induction heater to be introduced with water cooling, generates electromagnetic induction to generate heat under the work of a high-power medium-frequency power supply, and rapidly heats within minutes. When the medium-frequency power supply is powered off, the cooling water takes away heat in the workpiece and the hearth, and the purpose of rapid cooling is achieved. Therefore, the process problems of sintering special refractory metals and sintering high-temperature ceramic materials applied to the advanced technical fields of aerospace, nuclear industry and national defense under high pressure are solved, and the rate control requirements of temperature rise and temperature drop which need to be met in the induction heating process are structurally met. The accurate, stable and reliable bottom charging mechanism is particularly designed by adopting double-screw transmission, so that the labor intensity of workers is greatly reduced. The driven furnace cover can well play a role in sealing, and meanwhile, the furnace cover is not deformed due to delicate water cooling circulation, so that the service life is longer.
Drawings
The objects, specific structural features and advantages of the present invention will be further understood from the following description of the embodiments taken in conjunction with the accompanying drawings. Wherein, the attached drawings are as follows:
FIG. 1 is a schematic view of the overall assembly structure of a large hot-pressing heating furnace according to the present invention;
FIG. 2 isbase:Sub>A schematic cross-sectional view taken along line A-A of FIG. 1;
FIG. 3 is a schematic view of the bottom elevating device of the furnace casing in FIG. 1;
FIG. 4 is a left side view of the structure of FIG. 3;
FIG. 5 is a schematic top view of the structure of FIG. 3;
FIG. 6 is a schematic structural view of the induction heating apparatus of FIG. 1;
FIG. 7 is a schematic top view of the structure of FIG. 6;
fig. 8 is an enlarged schematic view of the portion I in fig. 6.
Detailed Description
The vacuum hot-pressing furnace of the present invention as shown in fig. 1 and 2 is a periodic electric furnace that heats in a vacuum (or protective atmosphere) state by a medium frequency induction method. The electric furnace comprises an upper mounting seat 1 and a lower mounting seat 9 which are supported by four upright posts 19, an electric furnace main body is fixedly connected with the four upright posts 19 through connecting pieces respectively, and the electric furnace main body mainly comprises a furnace cover 3, a furnace lining 4, a furnace shell 5, a lifting device 8 at the bottom of the furnace shell and an induction heating device in the furnace shell 5. The hot-pressing die filled with the powder adopts a bottom charging mode, and is loaded into the hearth through the bottom charging platform 7, so that the hot-pressing die is positioned in the middle of the graphite heating body. The furnace shell 5, the vacuum system 10 and the gas charging system can keep the hearth in a vacuum or protective atmosphere state all the time.
As shown in fig. 3, 4 and 5, the lifting device 8 at the bottom of the furnace shell comprises a feeding lifting platform 7, a motor 85, a plane guide column 89 supported at the bottom of the feeding lifting platform 7 and an adjusting screw 84. The guide post 89 is fixed through the mount pad 81, relies on the guide sleeve 82 to lead, and the brace table 83 links to each other with guide sleeve 82, lead screw 84, drives guide sleeve 83 and moves from top to bottom according to the guide path of guide sleeve 82 when lead screw 84 operates, and the brace table 83 drives material loading platform 7 again and accomplishes whole business turn over material process.
In this embodiment, the two screws 84 are used for driving the feeding platform 7 to ascend into the heating furnace. In the process of the lifting motion of bottom loading, in order to ensure the stable lifting of the loading platform 7 and keep the lifting accuracy within the effective lifting height range and the level degree of the plane of the loading platform 7, three plane guide posts 89 are adopted to carry out the bottom loading operation according to the principle that three points determine one plane. The two lead screws 84 are driven by a motor 85 to ensure the transmission synchronism of the two lead screws 84. The screw 84 runs stably and reliably in the lifting process, is convenient and accurate to position, can adjust the lifting height of the feeding platform 7 at will, and is suitable for lifting processes of trays with different heights. The three plane guide posts 89 are adopted to ensure that the feeding platform 7 is always in the same horizontal plane in the lifting process.
The actual measurement results are that: during the operation of the feeding lifting platform 7, the flatness of the feeding lifting platform can be controlled within 0.2mm, and the feeding lifting platform does not deform under the high-temperature condition. The motors 85 with different reduction ratios are selected for driving the two screw rods 84 to adjust the speed, so that the requirement of the bottom loading material on the lifting speed can be conveniently met. The motor 85 adopts variable frequency speed regulation in the operation process, and adopts corresponding lifting speed in different charging stages, so that the charging and discharging process is more accurate, safe and reliable. The medium frequency power supply outside the furnace body and the cooling water of the coil are led into the induction coil 62 in the hearth through the feeder device 11, so that the vacuum sealing performance of the electric furnace body is ensured.
In order to ensure the safety and reliability of the operation process, the invention adopts an upper travel switch 87 and a lower travel switch 88 to control the limit positions of the up-and-down movement of the loading lifting platform 7 respectively. When the feeding platform 7 touches any one of the upper or lower sets of travel switches 87 and 88 in the ascending or descending process, a signal is sent out, the transmission motor stops running, and the feeding platform 7 ascends or descends to a proper position. Therefore, damage to the motor 85 or the two screw rods 84 caused by the fact that a single travel switch fails in the using process and a signal cannot be sent to the control system to stop the operation of the transmission motor 85 in time when the feeding platform 7 ascends or descends to the proper position can be avoided.
As shown in fig. 6, 7 and 8, the induction heating device located in the furnace chamber includes an inductor 6 and a furnace lining 4, and the inductor 6 includes an induction coil 62 formed by winding a copper tube and a graphite susceptor 61. In operation, the induction heating device may be considered as an air core transformer, and the windings of the inductor 6 comprise a primary winding and a secondary winding, wherein the primary winding is an induction coil 62 wound from copper tubing, and the secondary winding is a graphite susceptor 61. Intermediate frequency current is passed through the primary copper tube winding to create an alternating magnetic flux which also creates a sufficiently high induced potential in the secondary winding graphite susceptor 61 to create eddy currents on the outside of the graphite susceptor 61 parallel to the inductor 6. The induction current generated on the side surface of the graphite induction cylinder 61 is reduced sharply from the edge, the induction current reaches a high value on the surface layer of the graphite induction cylinder 61 which is relatively thin, and the purpose of heating the workpiece is achieved by means of high heat emitted by the induction current.
The furnace lining 4 structure between the induction coil 62 and the graphite susceptor cylinder 61 of the inductor 6 is mainly composed of two parts, a refractory heat-insulating layer 63 and an electrical insulating layer 64. A refractory insulation layer 63 is provided between the graphite susceptor cylinder 61 and the induction coil 62, and is composed of a combination of graphite felt and graphite brick. The electrical insulation layer 64 is arranged at the periphery of the induction coil 62 and is made of mica tape wrapped after high-strength insulating varnish is sprayed and dried. The refractory heat insulating layer 63 concentrates the high temperature generated by the heating body in the furnace chamber, so that the heat loss is reduced as much as possible, and the electric insulating layer 64 ensures the electric insulation of the inductor 6.
The power of the furnace body and the number of turns of the inductor 6 according to the invention are calculated by the following formulas.
Calculating the power of the electric furnace main body:
electric furnace power P = 0.6. F 0.76 (T/1000) 2.53 Unit kW
Wherein F is the unit of the surface area dm of the effective heating zone 2
T is heating temperature unit K (Kelvin)
The number of turns of the inductor is calculated as:
1) Diameter d unit cm of graphite heating element
2) Height h unit cm of graphite heating element
3) Diameter D unit cm of inductor
4) Height H unit cm of inductor
5) Depth of penetration of the inductor
Unit cm
Wherein ρ 1 is the specific resistance unit Ω · cm of copper
f is the frequency unit Hz of the medium-frequency power supply
6) Penetration depth of graphite heating elementUnit cm
In the formula, ρ 2 is the specific resistance unit Ω · cm of graphite
f is the frequency unit Hz of the medium-frequency power supply
7) Calculated diameter d' = d-delta 2 unit cm of graphite heat-generating body
8) Inductor single-turn resistance R01= rho 1 · (pi · D/K3 · δ 1 · H) unit Ω
K3 is the filling factor
9) Graphite heating element single-turn resistance R02= rho 2 · (pi · d'/δ 2 · h) unit Ω
10 Self inductance of inductor
Unit cm
Wherein α 1 is the length coefficient of the inductor
11 Self-inductance coefficient of graphite heater
Unit cm
Wherein α 2 is a length coefficient of the graphite heating element
12 ) inductor-graphite heater system mutual inductance
Wherein F is the geometric size coefficient of the inductor
13 Angular frequency ω =2 π f
14 Reactance X of inductor 01 ＝ω·L 01 ×10 -9 Unit omega
15 Reactance X of graphite heater 02 ＝ω·L 02 ×10 -9 Unit omega
16 ) inductor-graphite heater system mutual inductance reactance
X 02 ＝ω·M12×10 -9 Unit omega
17 Inductor-graphiteConversion coefficient of heat-generating body system
18 Calculated resistance R of the furnace 0 ＝R 01 +A 2 R 02 Unit omega
19 ) reduced reactance X of the furnace 0 ＝X 01 -A 2 X 02 Unit omega
20 Reduced impedance of furnace
Unit omega
21 U0 units V) of the input voltage of the furnace
22 Ampere turns
Unit A
23 Inter-turn voltage U1= Z0 · I0 unit V
24 N = U0/U1 inductor turns
The production process of the large vacuum hot pressing furnace is roughly as follows:
the invention adopts a silicon controlled frequency conversion device as the intermediate frequency power supply. In the heating process, when the temperature in the furnace is lower than 1000 ℃, a thermocouple temperature measuring device 2 is adopted to measure the temperature in the furnace; when the temperature in the furnace is higher than 1000 ℃, the thermocouple temperature measuring device 2 exits from the heating area, and the thermal infrared temperature measuring device 13 is adopted to measure the temperature in the hearth.
When the temperature in the hearth reaches the hot-pressing working temperature, the upper jack 12 and the lower jack 18 act to press the powder in the die to the height required by the process, and then the powder is subjected to heat preservation and sintering. And preserving heat in the sintering process according to the process requirement. After sintering, ar gas can be introduced into the furnace shell for cooling. When the temperature is cooled to room temperature, the materials can be discharged to complete the whole hot-pressing sintering process.
The lifting device 8 at the bottom of the furnace shell adopts a speed reducer to simultaneously drive two synchronous screw rods 84 to complete the lifting action of the feeding lifting platform 7, and after the feeding lifting platform 7 is lifted in place, the feeding lifting platform is locked by adopting a manual fixing bolt, so that the feeding lifting platform 7 and the furnace shell 5 of the electric furnace main body are always kept in good sealing performance in the operation process. An upper pressure head 14 and a lower pressure head 17 with phi 320 are respectively arranged on the furnace cover 3 and the feeding platform 7, and the diameters of the upper pressure head 14 and the lower pressure head 17 can be properly adjusted according to the needs of users. The upper and lower pressure heads 14, 17 are driven by upper and lower hydraulic jacks 12, 18 fixed on the upper and lower mounting seats 1, 9 of the electric furnace main body support respectively, so as to complete the hot-pressing sintering process. The inner head 16 of the furnace is made of graphite and is fixed on the upper head 14 through a graphite nut 15. The effective strokes of the upper and lower pressing heads 14, 17 can be properly adjusted according to the needs of users, and in this embodiment, the effective strokes of the upper and lower pressing heads 14, 17 are 200mm.
Claims (6)
1. The large vacuum hot-pressing furnace comprises an electric furnace main body, wherein the electric furnace main body comprises a furnace shell, a lifting device at the bottom of the furnace shell and an induction heating device in the furnace shell; the furnace shell bottom lifting device comprises a feeding lifting platform, a motor, a plane guide post and an adjusting screw rod, wherein the plane guide post is supported at the bottom of the feeding lifting platform; it is characterized in that the preparation method is characterized in that,
the number of the plane guide posts is three; the two adjusting screw rods are synchronously driven by one motor;
the induction heating device comprises an inductor and a furnace lining;
the inductor comprises an induction coil and a graphite sensing cylinder which are formed by winding a red copper pipe; and a fire-resistant heat-insulating layer and an electric insulating layer are respectively arranged around the furnace lining structure between the induction coil and the graphite sensing cylinder.
2. The large scale vacuum autoclave furnace of claim 1, wherein the fire resistant insulation layer is disposed between the graphite susceptor and the induction coil and is made of a combination of graphite felt and graphite brick.
3. A large vacuum autoclave according to claim 1 or 2, characterized in that the electrical insulation layer is arranged at the periphery of the induction coil and is made of mica tape wrapped after being sprayed and dried with high-strength insulating varnish.
4. The large-scale vacuum hot-pressing furnace according to claim 1, wherein two sets of travel switches are respectively arranged at the limit positions of the up-and-down movement of the feeding lifting platform.
5. The large-scale vacuum autoclave furnace according to claim 1, characterized in that the overall flatness of the loading elevating platform is less than or equal to 0.2mm during the operation.
6. The large vacuum hot pressing furnace according to claim 1, wherein the power of the electric furnace main body and the number of turns of the inductor are calculated by the following formulas:
wherein, the first and the second end of the pipe are connected with each other,
electric furnace power P = 0.6. F 0.76 (T/1000) 2.53 Unit kW
Wherein F is the unit of the surface area dm of the effective heating zone 2
T is heating temperature unit K (Kelvin)
The number of turns of the inductor is calculated as:
1) Diameter d unit cm of graphite heating element
2) Height h unit cm of graphite heating element
3) Diameter D unit cm of inductor
4) Height H unit cm of inductor
5) Depth of penetration of the inductor
Unit cm
Wherein ρ 1 is the specific resistance unit Ω · cm of copper
f is the frequency unit Hz of the medium-frequency power supply
6) Penetration depth of graphite heating element
Unit cm
In the formula, ρ 2 is a specific resistance unit Ω · cm of graphite
f is the frequency unit Hz of the medium-frequency power supply
7) Calculated diameter d' = d-delta 2 unit cm of graphite heat-generating body
8) Inductor single-turn resistance R01= rho 1 · (pi · D/K3 · δ 1 · H) unit Ω
K3 is the fill factor
9) Graphite heating element single-turn resistance R02= rho 2 · (pi. D'/delta 2. H) unit omega
10 Self inductance of inductor
Unit cm
Wherein α 1 is the length coefficient of the inductor
11 Self-inductance coefficient of graphite heater
Unit cm
Wherein α 2 is a length coefficient of the graphite heating element
12 ) inductor-graphite heater system mutual inductance
Unit cm
Wherein F is the geometric size coefficient of the inductor
13 ) angular frequency ω =2 π f
14 Reactance X of inductor 01 ＝ω·L 01 ×10 -9 Unit omega
15 Reactance X of graphite heater 02 ＝ω·L 02 ×10 -9 Unit omega
16 ) inductor-graphite heater system mutual inductance reactance
X 02 ＝ω·M12×10 -9 Unit omega
17 Transformation coefficient of inductor-graphite heating element system
18 Reduced resistance R of furnace 0 ＝R 01 +A 2 R 02 Unit omega
19 ) reduced reactance X of the furnace 0 ＝X 01 -A 2 X 02 Unit omega
20 Reduced impedance of furnace
Unit omega
21 U0 units V) of the input voltage of the furnace
22 Ampere turns
Unit A
23 Inter-turn voltage U1= Z0 · I0 unit V
24 N = U0/U1 inductor turns
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710045716A CN100592835C (en) | 2007-09-07 | 2007-09-07 | Large-sized vacuum hotpressing stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710045716A CN100592835C (en) | 2007-09-07 | 2007-09-07 | Large-sized vacuum hotpressing stove |
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| Publication Number | Publication Date |
|---|---|
| CN101118112A true CN101118112A (en) | 2008-02-06 |
| CN100592835C CN100592835C (en) | 2010-02-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710045716A Expired - Fee Related CN100592835C (en) | 2007-09-07 | 2007-09-07 | Large-sized vacuum hotpressing stove |
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| CN102261835A (en) * | 2011-08-31 | 2011-11-30 | 太仓市华瑞真空炉业有限公司 | Vertical vacuum sintering furnace |
| CN102560434A (en) * | 2010-12-13 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Chamber component and metal organic compound chemical vapor deposition equipment with same |
| CN102980389A (en) * | 2011-09-02 | 2013-03-20 | 中国科学院理化技术研究所 | Micron-sized measurement and control vacuum hot-pressing sintering furnace system |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN108247062A (en) * | 2018-01-29 | 2018-07-06 | 宁波星科新材料科技有限公司 | Metal powder semi-liquid phase minute-pressure sinter molding device and method |
| CN108534553A (en) * | 2017-03-02 | 2018-09-14 | 中国科学院金属研究所 | The device and method of block body ceramic material is quickly prepared using high-frequency induction heating |
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| CN113831144A (en) * | 2021-10-26 | 2021-12-24 | 中国工程物理研究院材料研究所 | Method for preparing ceramic material by multi-field coupling ultra-fast sintering |
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|---|---|---|---|---|
| CN102560434A (en) * | 2010-12-13 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Chamber component and metal organic compound chemical vapor deposition equipment with same |
| CN102560434B (en) * | 2010-12-13 | 2014-10-22 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Metal organic compound chemical vapor deposition equipment |
| CN102261835A (en) * | 2011-08-31 | 2011-11-30 | 太仓市华瑞真空炉业有限公司 | Vertical vacuum sintering furnace |
| CN102261835B (en) * | 2011-08-31 | 2013-03-20 | 太仓市华瑞真空炉业有限公司 | Vertical vacuum sintering furnace |
| CN102980389A (en) * | 2011-09-02 | 2013-03-20 | 中国科学院理化技术研究所 | Micron-sized measurement and control vacuum hot-pressing sintering furnace system |
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN108534553A (en) * | 2017-03-02 | 2018-09-14 | 中国科学院金属研究所 | The device and method of block body ceramic material is quickly prepared using high-frequency induction heating |
| CN108623192A (en) * | 2017-03-23 | 2018-10-09 | 南京理工大学 | A kind of titanium alloy-K9 glass composite joint device and method of based intermediate layer gradient |
| CN108623192B (en) * | 2017-03-23 | 2021-04-16 | 南京理工大学 | Titanium alloy-K9 glass composite connection equipment and method based on intermediate layer gradient |
| CN108247062A (en) * | 2018-01-29 | 2018-07-06 | 宁波星科新材料科技有限公司 | Metal powder semi-liquid phase minute-pressure sinter molding device and method |
| CN113188528A (en) * | 2021-05-11 | 2021-07-30 | 中国科学院西北生态环境资源研究院 | Vertical Z-axis sliding table suitable for micro-deformation automatic measuring equipment |
| CN113831144A (en) * | 2021-10-26 | 2021-12-24 | 中国工程物理研究院材料研究所 | Method for preparing ceramic material by multi-field coupling ultra-fast sintering |
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| CN100592835C (en) | 2010-02-24 |
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