CN101109634A - MEMS gyroscope accurate installation reference component and installation method thereof - Google Patents
MEMS gyroscope accurate installation reference component and installation method thereof Download PDFInfo
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Abstract
The invention provides an assembly of the reference body for the precision installation of a MEMS gyrometer and the installing method. The assembly comprises a precision installation reference body and a mini MEMS vibration gryometer body with a horizontal sensitive-axis that is inserted into the concave space in the reference body. The reference body is made of material with good assembling performance and secondary machining performance. The assembly is connected with a carrier through a first reference face and a second reference face. At installation, firs the preliminary shape of the reference body is machined, and the gyrometer is mounted, then the out-of-spec angle of the input axis of the gyro is measured, the installation drift angle is calculated; then the reference face of the reference body is corrected based on the drift angle so that the drift angle approaches to zero. The invention takes use of the excellent assembling and secondary machining performance of the material from which the reference body is made, improves the installation accuracy of the gyro by machining and correction, is applicable for mini gyrometers with horizontal sensitive-axis installed by circuit board, especially for mini MEMS vibration gyrometer in inertia measuring units in small carriers.
Description
Technical field
The invention belongs to the Navigation, Guidance and Control technical field, a kind of especially MEMS gyroscope accurate reference for installation body assembly and installation method thereof are applicable to low cost, the microminiature MEMS gyrotron of various sensitive axes levels.
Background technology
Inertial Measurement Unit is a kind of very important equipment in the Navigation, Guidance and Control system.It is made up of three gyroscopes and three accelerometers, according to the requirement of inertial navigation principle, needs three gyrostatic sensitive axes orthogonal in twos and parallel with three corresponding carrier coordinate axis respectively in the space.Do not rely on external information during Inertial Measurement Unit work, also not to extraneous emittance, be difficult for being interfered, this distinct advantages makes it become carrier, a kind of widely used main air navigation aid of carrier in especially space flight, aviation and the navigation field.Along with science and technology development, from engineering viewpoint, littler device, littler parts, littler structural unit even littler subsystem, shown special advantages in many aspects, can satisfy the requirement of a lot of special occasions and function, with space flight, aviation and navigation are large quantities of miniaturization carriers to have occurred in the field of representative, these miniaturization carriers become very urgent and outstanding to the requirement of micro-miniature inertial measuring unit, for example miniaturization aeroplane span is one meter of less than often, that have even have only as the palm big, its volume inside and the load that can bear are very limited, and this just requires their Inertial Measurement Unit volume very little, very light in weight.
Along with the development of micro-fabrication technique and MEMS technology, miniature MEMS gyroscope of new generation develops rapidly, provides powerful support for for the design of micro-miniature inertial measuring unit and development provide.But the gyrostatic principle of work of miniature MEMS, manufacturing process and application mode etc. have determined that the gyrostatic core sensitive element of present MEMS all is to be integrated in the chip of a paster encapsulation usually.In order to guarantee that this chip can be operated in normal condition, generally all need to be equipped with necessary peripheral circuit, need and need the electronic component of dispensing to be welded on the small-sized circuit board with the MEMS GYROCHIP during application.So the outward appearance of this class miniature MEMS gyrotron body is exactly an integrated circuit board of each element.In the MEMS gyroscope, have once the big gyrostatic sensitive axes of class to be parallel to this circuit board face, be called the MEMS gyroscope of sensitive axes level, gyrostatic circuit board body of this MEMS generally all is to be installed by mounting hole by screw.For example, the body outward appearance of the quartzy MEMS gyroscope LCG50 that BEI company produces as shown in Figure 1, it is installed by mounting hole complexed metal pad 2 and metallic support cylinder 3 by screw 1, metallic support cylinder 3 embeds in the rubber vibration isolation cushion 4, the gyroscope treatment circuit plate 6 of gyroscope sensitive element 5 has been welded in support, and the sensitive axes of gyroscope sensitive element 5 is parallel to the plate face of circuit board 6.The front elevation of quartzy MEMS gyroscope LCG50 outward appearance as shown in Figure 2, its mounting hole site is on four angles of this circuit board body, the gyroscope sensitive element is positioned at circuit board central authorities, other peripheral circuit element is dispersed in around the gyroscope sensitive element.
The input shaft misalignment is the angle between true sensitive axes of gyroscope and the desirable sensitive axes, and the gyrostatic input shaft misalignment of MEMS is generally all very big, and is also very big to the influence of Gyro Precision, is one of parameter that needs most care.In order to describe the convenience of problem, define the gyrostatic coordinate system o * yz of miniature MEMS as shown in Figure 3, under the perfect condition, the ox coordinate axis overlaps with the gyroscope sensitive axes, it is parallel that plane oxy and MEMS gyroscope are installed first reference field, and the oz coordinate axis is vertical with MEMS gyroscope datum clamp face.But in actual application, gyrostatic true sensitive axes oA axle can not overlap fully with the ox coordinate axis, also can not be parallel fully.Projection and angle ox coordinate axis between of the actual sensitive axes oA of definition gyroscope in the oxz of plane is vertical drift angle, is designated as α, i.e. angle between actual sensitive axes oA of gyroscope and installation first reference field; Projection and angle o * coordinate axis between of the definition actual sensitive axes oA of gyroscope in the oxy of plane is the lateral misalignment angle, is designated as β, i.e. angle between the actual sensitive axes oA of gyroscope and second datum clamp face.
The gyrostatic application of present MEMS, all be that MEMS gyroscope with as shown in Figure 1 and Figure 2 sensitive axes level is directly installed on the Inertial Measurement Unit support, and in navigation calculation, its data processing method is still copied the very little traditional high accuracy gyroscope instrument of input shaft misalignment, in processes such as its test, demarcation, modeling and navigation calculation, the gyro input axis misalignment is carried out the low-angle linearization process, reach the difficulty of reduction problem, shortcut calculation reduces the purpose in processing time.According to each gyroscope testing standard in conjunction with Fig. 3 analysis as can be known, vertical drift angle α and lateral misalignment angle β are respectively the projection of miniature MEMS gyro input axis misalignment in plane oxz and plane oxy.The then present gyrostatic installation method of MEMS, can cause very big vertical drift angle α and lateral misalignment angle β, very big vertical drift angle α and lateral misalignment angle β have determined that miniature MEMS gyro input axis misalignment is very big at this moment, therefore, in the navigation calculation, when the gyrostatic input shaft misalignment of MEMS is adopted linearization process, will introduce very big approximate error, sacrifice a large amount of system accuracies.And if do not carry out the low-angle linearization process, will influence each other between the gyrostatic parameter, intercouple, parameter model is seriously non-linear, makes the model complexity of traditional device detection, demarcation, compensation and navigation calculation be difficult to resolve.
The direct at present MEMS gyroscope body with the sensitive axes level is installed in the conventional mounting mode on the Inertial Measurement Unit support, exists following defective:
(1) the miniature MEMS gyroscope relies on circuit board to guarantee the sensing of horizontal sensitive axes, and circuit board generally is a plastic-substrates, indexs such as its rigidity, intensity, hardness are very low, easy deformation, poor stability, mode of oscillation is low, is easy to be subjected to the influence of external environment, poor anti jamming capability, these all greatly reduce the assembly precision of miniature MEMS gyroscope body and miscellaneous part.
(2) indexs such as the flatness of circuit board surface, smooth finish are well below general metal installed surface, if will have on the support that the circuit board of core sensitive element is directly installed on Inertial Measurement Unit, these factors will directly influence the size of the vertical drift angle of miniature MEMS gyrohorizon sensitive axes, make the vertical drift angle α alignment error of miniature MEMS gyrohorizon sensitive axes big, precision is difficult to control.
(3) circuit board is fixed by mounting hole by screw, and generally be interference fit between mounting hole and the screw, before screw is fastening, gyroscope is unfettered in datum clamp face, the installation accuracy at uncontrollable miniature MEMS gyrohorizon sensitive axes lateral misalignment angle, after screw is fastening, can make the alignment error of lateral misalignment angle β of miniature MEMS gyrohorizon sensitive axes big, precision is difficult to control.
Summary of the invention
Technology of the present invention is dealt with problems: overcome big, the unmanageable deficiency of precision of miniature MEMS gyrotron alignment error of existing sensitive axes level, a kind of high precision, amendable MEMS gyroscope accurate reference for installation body assembly and installation method thereof are provided.
Technical solution of the present invention is: a kind of MEMS gyroscope accurate reference for installation body assembly, its characteristics are: the miniature MEMS gyrotron body that comprises accurate reference for installation body and sensitive axes level, the main body of reference for installation body is the rectangular parallelepiped of inner recess, comprise first reference field, second reference field and inner recess space, the shape in inner recess space designs according to the physical dimension of gyroscope body, so that the gyroscope body is embedded in the inner recess space of accurate reference for installation body, the bottom surface parallel with MEMS gyroscope body installed surface is as first reference field, and the benchmark body side surface vertical with MEMS gyrohorizon sensitive axes is as second reference field; There are two kinds of mounting holes dented space inside, and a kind of is threaded hole, and its position is by the installation form decision that the gyroscope body is fixed in the reference for installation body, and another kind is a through hole, and its position is by the installation form decision that the reference for installation body is installed on the carrier.Not as the side perforate of reference field, as the cable hole of gyroscope body.
The material of described accurate reference for installation body adopts duralumin, hard alumin ium alloy, or copper and aldary or steel and steel alloy or titanium alloy or magnesium alloy or magnalium or magnesium lithium alloy or structural ceramics or micrometer ceramics or metal-base composites or ceramic matric composite.
The surfaceness R of described first reference field and second reference field
aBe better than 1.6.
Utilize the installation method of the described MEMS gyroscope accurate of claim 1 reference for installation body assembly, it is characterized in that: may further comprise the steps:
(1) produce the reference for installation body by the machining preparatory processing after, the miniature MEMS gyrotron body of sensitive axes level is installed in its inside;
(2), test out the size and Orientation of the input shaft misalignment of miniature MEMS gyrotron, and calculate the size and Orientation of vertical drift angle α and lateral misalignment angle β according to the gyroscope testing standard;
(3) according to the size and Orientation of vertical drift angle α, first reference field processing of reference for installation body is revised, made the relative gyroscope coordinate system of revised first reference field oxyz deflection-α angle, thereby make vertical drift angle α trend towards zero; Equally,, revise second reference field, make the relative gyroscope coordinate system of revised second reference field oxyz deflection-β angle, thereby make lateral misalignment angle β trend towards zero according to lateral misalignment angle β;
(4) once more according to the gyroscope testing standard, test out the input shaft misalignment of miniature MEMS gyrotron, and calculate the size and Orientation of vertical drift angle α and lateral misalignment angle β, if the error precision of vertical drift angle α and lateral misalignment angle β not in claimed range, then repeating step (3) and (4); If the size of vertical drift angle α and lateral misalignment angle β meets the demands, then MEMS gyroscope accurate reference for installation body assembly can normally use.
Principle of the present invention is: the present invention adopts the miniature MEMS gyrotron body of accurate reference for installation body and sensitive axes level, the package assembly form as shown in Figure 4, the outside drawing of accurate reference for installation body as shown in Figure 5, the characteristic that accurate reference for installation body is better than miniature MEMS gyroscope circuit board is to be convenient to secondary processing, if the gyrostatic relatively angle in certain plane can not meet the demands, can be according to the size and Orientation of angle, this plane on the reference for installation body is cut again, processes, revised, make the deflection of revised plane, thereby can make angle trend towards zero.And there is mounting hole MEMS gyroscope accurate reference for installation body inside, and as shown in Figure 5, wherein, a class is a threaded hole, is used for the miniature MEMS gyroscope is fixed in the reference for installation body, in case fixing just no longer dismounting easily; Another kind of is through hole, is used for the reference for installation body is installed on other equipment.MEMS gyroscope accurate reference for installation body inner recess space, leave the space so that MEMS gyroscope body to be installed, gyrostatic one installation that faces down is arranged on this circuit board body, gyroscope is embedded in the groove of reference for installation body bottom design, as shown in Figure 6 just fully.After body embeds MEMS gyroscope accurate reference for installation body inside fully, utilize screw to cooperate as shown in Figure 4 with two threaded holes at interior concave space diagonal angle, make body fixing wherein, installation accuracy improves greatly like this.
In addition, the bottom surface of reference for installation body by the correction to first reference field, can make the vertical drift angle α of miniature MEMS gyrohorizon sensitive axes trend towards zero as first reference field; Have the side of flat through hole, be used for away the electronics circuit, can not be as reference for installation; The side of not opening the flat through hole by the correction to second reference field, can make the lateral misalignment angle β of miniature MEMS gyrohorizon sensitive axes trend towards zero as second reference field, like this by revising, installation accuracy is improved.
In addition, the first-selected metal material of manufacturing materials has insulativity, stability under the occasion of specific (special) requirements at some, also can select some special stupalith.These materials have enough rigidity, intensity, hardness, compare with the gyrostatic circuit board of miniature MEMS, and are not yielding, good stability.And its plasticity is higher, can process assembling indexs such as the flatness that meets the demands, smooth finish, verticality, helps improving the precision that miniature MEMS gyroscope and miscellaneous part assemble.
The present invention's advantage compared with prior art is: the present invention can improve the gyrostatic installation accuracy of MEMS, verticality between mutually and gyro sensitive axes reach very high precision with the depth of parallelism between the corresponding carrier coordinate axis in twos in the space to make in the Inertial Measurement Unit three gyroscope sensitive axes, and can revise, be in particular in following 3 points:
(1) the MEMS gyroscope accurate reference for installation body inner recess space of the present invention's design, leave the space so that MEMS gyroscope body to be installed, gyrostatic one installation that faces down is arranged on this circuit board body, gyroscope is embedded in the groove of reference for installation body bottom design, as shown in Figure 6 just fully.After body embeds MEMS gyroscope accurate reference for installation body inside fully, utilize screw to cooperate as shown in Figure 4 with two threaded holes at interior concave space diagonal angle, make body fixing wherein, installation accuracy is improved greatly.
(2) in addition, have good rigidity, intensity, hardness by the material that adopts, compare with the gyrostatic circuit board of miniature MEMS, not yielding, good stability also can improve the precision of miniature MEMS gyroscope and miscellaneous part assembling greatly.
(3) with first reference field of the accurate reference for installation body of miniature MEMS gyroscope assembly as installed surface, because the plasticity of reference for installation body rapidoprint is higher, can process assembling indexs such as satisfying very high flatness, smooth finish to first reference field, by correction to first reference field, can make the vertical drift angle α of miniature MEMS gyrohorizon sensitive axes trend towards zero, by revising, installation accuracy is improved greatly.
(4) with second reference field of the accurate reference for installation body of miniature MEMS gyroscope assembly as gyrostatic reference for installation, it is same because the plasticity of reference for installation body rapidoprint is higher, can process assembling indexs such as satisfying very high flatness, smooth finish to second reference field, by correction to second reference field, can guarantee the gyrostatic horizontal sensitive axes of miniature MEMS is installed in certain precision, make the lateral misalignment angle β of miniature MEMS gyrohorizon sensitive axes trend towards zero, by revising, installation accuracy is improved greatly like this.
Description of drawings
Fig. 1 is the outward appearance and the scheme of installation of quartzy MEMS gyroscope LCG50 gyro body, among the figure: 1, trip bolt, 2, metallic gasket, 3, the metallic support cylinder, 4, rubber vibration isolation cushion, 5, gyro core sensitive element, 6, gyroscope circuit board;
Fig. 2 is the front elevation of quartzy MEMS gyroscope LCG50, among the figure: 7, first datum clamp face, 8, second datum clamp face;
Fig. 3 is coordinate and the drift angle defined declaration figure in the miniature MEMS gyroscope synoptic diagram of the present invention;
Fig. 4 is accurate reference for installation body of the present invention and the gyrostatic wiring layout of MEMS, and wherein Fig. 4 a is left front vertical view, and Fig. 4 b is a vertical view;
Fig. 5 is the outside drawing of MEMS gyroscope accurate reference for installation body of the present invention, and wherein Fig. 5 a is left front vertical view, and Fig. 5 b is a vertical view;
Fig. 6 is the explosive view of accurate reference for installation body of the present invention and the assembling of MEMS gyroscope, and wherein Fig. 6 a is left front vertical view, and Fig. 6 b is right front upward view.
Embodiment
The present invention is example with the miniature MEMS gyroscope with the quartzy MEMS gyroscope LCG50 that BEI company produces, and designs accurate reference for installation body assembly.
The accurate reference for installation body assembled figure of LCG50 comprises the miniature MEMS gyrotron body of accurate reference for installation body and sensitive axes level as shown in Figure 4.Its accurate reference for installation body as shown in Figure 5, main body is the rectangular parallelepiped of a smooth outer surface, comprises first reference field, second reference field and inner recess space.The inner recess space by upper surface to inner recess, shape designs according to the physical dimension of LCG50 gyroscope body, so that LCG50 gyroscope body is embedded in the inner recess space of accurate reference for installation body, the matching relationship of LCG50 gyroscope body and accurate reference for installation body as shown in Figure 6.The bottom surface 7 parallel with LCG50 gyroscope installed surface is as first reference field, the benchmark body side surface 8 vertical with LCG50 gyrohorizon sensitive axes is as second reference field, and the accurate reference for installation body assembly that contains the miniature MEMS gyrotron will cooperate installation by these two reference fields with carrier.
There are two kinds of mounting holes dented space inside, and a kind of is threaded hole, is used for the LCG50 gyroscope is fixed in the reference for installation body, and gyroscope is in case fixing just no longer dismounting easily; A kind of is through hole, is used for the reference for installation body is installed on the carrier.Not as the side perforate of reference field, as the cable hole of circuit.
During specific design, physical dimension according to quartzy MEMS gyroscope LCG50, the cave in machined parameters such as size, shape, mounting hole, technology in space of the accurate reference for installation body of design MEMS gyroscope, design and installation benchmark external body characteristic mainly comprises the index and the parameter such as position, size, shape, processing technology of reference field.
After design is finished, press design parameter and index, elder generation's preparatory processing goes out MEMS gyroscope reference for installation body, require first reference field and second reference field that higher flatness and smooth finish are arranged, quartzy MEMS gyroscope LCG50 is fixedly mounted in the space of caving in of MEMS gyroscope benchmark body closely, make it to be difficult to gyroscope reference for installation body relative position to take place again and move, once fastening, dismounting no longer easily.According to the gyroscope testing standard, utilizing turntable again, is reference for installation with first reference field and second reference field, tests out the size and Orientation of the input shaft misalignment of miniature MEMS gyrotron, and calculates the size and Orientation of vertical drift angle α and lateral misalignment angle β.Size and Orientation according to vertical drift angle α to first reference field of reference for installation body, utilizes milling machine, grinding machine etc. to process correction again, makes relative gyroscope coordinate system oxyz deflection α angle, revised plane, thereby makes vertical drift angle α trend towards zero; Equally,, revise second reference field, thereby make lateral misalignment angle β trend towards zero according to lateral misalignment angle β.Test after the processing again, calculate, if the size of vertical drift angle α and lateral misalignment angle β does not meet the demands, then reprocessing, test again are till the size of test, the vertical drift angle α that calculates and lateral misalignment angle β meets the demands.
The present invention can be used as the form and methods for using them of the accurate reference for installation body of a kind of general miniature MEMS gyroscope assembly, application person can realize its function by revising size or partial structurtes flexibly and easily according to the gyrostatic characteristics of special separately miniature MEMS.
Claims (4)
1. MEMS gyroscope accurate reference for installation body assembly, it is characterized in that: the miniature MEMS gyrotron body that comprises accurate reference for installation body and sensitive axes level, the main body of reference for installation body is the rectangular parallelepiped of inner recess, comprise first reference field, second reference field and inner recess space, the shape in inner recess space designs according to the physical dimension of gyroscope body, so that the gyroscope body is embedded in this dented space, the bottom surface parallel with MEMS gyroscope body installed surface is as first reference field, and the benchmark body side surface vertical with MEMS gyrohorizon sensitive axes is as second reference field; There are two kinds of mounting holes dented space inside, a kind of is threaded hole, its position is by the installation form decision that the gyroscope body is fixed in the reference for installation body, another kind is a through hole, its position is by the installation form decision that the reference for installation body is installed on the carrier, not as the side perforate of reference field, as the cable hole of gyroscope body.
2. MEMS gyroscope accurate reference for installation body assembly according to claim 1, it is characterized in that: the material of described accurate reference for installation body adopts duralumin, hard alumin ium alloy, or copper and aldary or steel and steel alloy or titanium alloy or magnesium alloy or magnalium or magnesium lithium alloy or structural ceramics or micrometer ceramics or metal-base composites or ceramic matric composite.
3. MEMS gyroscope accurate reference for installation body assembly according to claim 1 is characterized in that: the surfaceness R of described first reference field and second reference field
aBe better than 1.6.
4. utilize the installation method of the described MEMS gyroscope accurate of claim 1 reference for installation body assembly, it is characterized in that: may further comprise the steps:
(1) produce the reference for installation body by the machining preparatory processing after, the miniature MEMS gyrotron body of sensitive axes level is installed in its inside;
(2), test out the size and Orientation of the input shaft misalignment of miniature MEMS gyrotron, and calculate the size and Orientation of vertical drift angle α and lateral misalignment angle β according to the gyroscope testing standard;
(3) according to the size and Orientation of vertical drift angle α, first reference field processing of reference for installation body is revised, made the relative gyroscope coordinate system of revised first reference field oxyz deflection-α angle, thereby make vertical drift angle α trend towards zero; Equally,, revise second reference field, make the relative gyroscope coordinate system of revised second reference field oxyz deflection-β angle, thereby make lateral misalignment angle β trend towards zero according to lateral misalignment angle β;
(4) once more according to the gyroscope testing standard, test out the input shaft misalignment of miniature MEMS gyrotron, and calculate the size and Orientation of vertical drift angle α and lateral misalignment angle β, if the error precision of vertical drift angle α and lateral misalignment angle β not in claimed range, then repeating step (3) and (4); If the size of vertical drift angle α and lateral misalignment angle β meets the demands, then MEMS gyroscope accurate reference for installation body assembly can normally use.
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| CN110482483B (en) * | 2019-08-07 | 2022-05-20 | 北京自动化控制设备研究所 | Sensitive structure patch system and method for MEMS device |
| CN114993279A (en) * | 2022-08-03 | 2022-09-02 | 北京晨晶电子有限公司 | Quartz micromechanical gyroscope |
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