CN101075534A - Planar display device with circular internal-grid controlled cathode structure and its production - Google Patents
Planar display device with circular internal-grid controlled cathode structure and its production Download PDFInfo
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- CN101075534A CN101075534A CN 200710054601 CN200710054601A CN101075534A CN 101075534 A CN101075534 A CN 101075534A CN 200710054601 CN200710054601 CN 200710054601 CN 200710054601 A CN200710054601 A CN 200710054601A CN 101075534 A CN101075534 A CN 101075534A
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Abstract
This is a flat displayer of loop shape inner grid cathode structure and its production process. It includes a sealed vacuum chamber formed by a anodic glass panel, a cathode glass panel and surrounded glass frame; on the anodic glass panel is a conducting layer coated with fluorescent; on the cathode glass panel are a grid down-lead layer, carbon nanotube and loop shape inner grid structure; a supporting wall between the anodic and cathode panel and a getter; which is capable of increasing the display brightness and quality.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of circular internal-grid controlled cathode structure and manufacture craft thereof.
Background technology
The carbon nanotube cathod field-emitter display is to utilize a kind of novel planar display device of carbon nano-tube as cold-cathode material, after applying external electric field intensity in carbon nano-tube, will launch a large amount of electronics from carbon nanotube cathod, impact fluorescence bisque and send visible light.The principle of luminosity of this display is similar to traditional cathode-ray tube display, but save the warm-up time of thermionic source, it is a kind of response speed display device faster, it have high brightness, high display resolution, HD image, low in energy consumption, be suitable for characteristics such as the wide and complete panelized of warm area, having caused showing great attention to of scientific research personnel already, also is the display device of new generation of environmental protection, energy-conservation and health type.
Grid structure is the crucial control element in the tripolar carbon nanotube negative electrode field emission display device, and it is directly determining the electronics emission of carbon nano-tube.And in the middle of the present display device of reporting, generally all exist shortcomings such as grid voltage is high, display device brightness effective emission area not high, carbon nanotube cathod is little.Be positioned at grid structure in the middle of the control model of carbon nanotube cathod superstructure, grid structure also can partly be held back the electrons emitted Shu Jinhang of carbon nanotube cathod institute, has also caused anode current adverse effect too less than normal.And effective emission area of negative electrode diminishes, and then is directly to cause one of not high major reason of device display brightness.Obviously, it is big that the electron emission area of carbon nanotube cathod becomes, and the electronic transmitting efficiency of carbon nanotube cathod has improved, and grid structure has diminished to holding back of electron beam simultaneously, and the display brightness of integral device can be greatly improved naturally.Therefore, need conscientious device architecture is designed of scientific research personnel, the problem that needs are solved thinks over pragmatic solution practical problem.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of circular internal-grid controlled cathode structure simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose the sealed vacuum chamber that frame constitutes; Be arranged on anode conductive layer and the phosphor powder layer of preparation on anode conductive layer on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component; Cathode glass faceplate is provided with cathode leg layer, carbon nano-tube and circular internal-grid controlled cathode structure.
The backing material of described circular internal-grid controlled cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms grid and increases layer; Grid increases and has small sircle hole in the layer, as the passage of grid extended line layer; Grid increases the silver slurry layer that prints in the small sircle hole in the layer and forms grid extended line layer; The metal level that grid increases after the top etching of layer forms the regulation and control grid layer; The regulation and control grid layer presents the circular ring type shape, be seated on the upper surface that grid increases layer, and and the grid extended line layer of bottom be interconnected; Alternating floor between the insulation paste layer that grid increases the printing on layer upper surface forms; Between the upper and lower surface of alternating floor be the plane, lower surface wants cover grid to increase the upper surface of layer; Between have circular apertures in the alternating floor, it is circular apertures forms hollow at the upper surface of an alternating floor disk profile, the madial wall of circular apertures is perpendicular to the barrel surface of cathode glass faceplate, and the bottom surface of circular apertures will expose upper surface and the circular ring type regulation and control grid layer that grid increases layer; Between in the alternating floor diameter of circular apertures be greater than the overall diameter of circular ring type regulation and control grid layer; Between in the alternating floor in the circular apertures insulation paste layer of printing form two layers at interval; At interval two layers overall shape presents the circular ring type shape, cover circular ring type regulation and control grid layer above, two layers interior diameter is less than the interior diameter of regulation and control grid layer at interval, two layers overall diameter is greater than the overall diameter of regulation and control grid layer at interval; Two layers longitudinal cross-section presents class round table surface type shape at interval, promptly two layers last end face is the plane at interval, the width on plane is identical with the width of regulation and control grid layer annulus, two layers two sides are arcwall face at interval, two layers the last end face from the interval, to two layers bottom surface inclination at interval, form the arcwall face of a summary to outer lug gradually, two layers bottom surface will cover the regulation and control grid layer fully at interval; Two layers of center with the regulation and control grid layer, the interval of class round table surface type shape are the center, around forming a circular ring type shape, cover the top of regulation and control grid layer; At interval on two layers of upper surface and an alternating floor circular apertures madial wall on etching after metal level form the negative electrode transition zone; Metal level after the etching above the negative electrode transition zone above two layers forms cathode conductive layer at interval; Negative electrode transition zone and cathode conductive layer are interconnected; Between metal level after the etching above the alternating floor form the cathode leg layer; Cathode leg layer and negative electrode transition zone are interconnected; The insulation paste layer of the printing above the cathode leg layer forms cathode coating; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described circular internal-grid controlled cathode structure is for being fixed on the cathode glass faceplate; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium; The regulation and control grid layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; The trend of the trend of cathode leg layer and grid lead layer is orthogonal; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin, lead; The negative electrode transition zone can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel.
A kind of manufacture craft of flat-panel monitor of circular internal-grid controlled cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of grid lead layer: on block layer, prepare a metal level, form the grid lead layer after the etching;
4) grid increases the making of layer: printing insulation paste layer on the grid lead layer forms grid and increases layer behind baking, sintering process;
5) making of grid extended line layer: in grid increases layer small sircle hole, print silver slurry layer, behind baking, sintering process, form grid extended line layer;
6) making of regulation and control grid layer: on grid increases layer, prepare a metal level, form the regulation and control grid layer after the etching;
7) making of alternating floor between: increase printing insulation paste layer on the upper surface of layer at grid, alternating floor between forming behind baking, the sintering process;
8) two layers making at interval: printing insulation paste layer in the circular apertures in an alternating floor forms two layers at interval behind baking, sintering process;
9) making of negative electrode transition zone: on two layers of upper surface at interval and prepare a metal level on the alternating floor circular apertures madial wall, form the negative electrode transition zone after the etching;
10) making of cathode conductive layer: prepare a metal level above the negative electrode transition zone above two layers at the interval, form cathode conductive layer after the etching;
11) making of cathode leg layer [11]: preparing a metal molybdenum layer above the alternating floor, forming the cathode leg layer after the etching;
12) making of cathode coating [12]: printing insulation paste layer on the cathode leg layer forms cathode coating behind baking, sintering process;
13) cleaning surfaces of circular internal-grid controlled cathode structure is handled: clean is carried out on the surface to circular internal-grid controlled cathode structure, removes impurity and dust;
14) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
15) making of anode glass panel: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
16) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
18) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described circular internal-grid controlled cathode structure, grid structure has been produced on the inside of carbon nanotube cathod.When after applying appropriate voltage on the grid structure, by the grid lead layer external voltage is delivered to device inside, be delivered to above the regulation and control grid layer through grid extended line layer, external voltage will be converted to the powerful electric field strength in carbon nanotube cathod top, surface, force carbon nano-tube to launch a large amount of electronics, embodied the strong controlled function of grid structure.Because two layers last end face is the plane at interval, and its two sides are arcwall face, the carbon nanotube cathod of having guaranteed to be positioned on the two-layer surface of interval is identical to the distance of regulation and control grid layer, just guaranteed that also the regulation and control grid layer can impose on carbon nanotube cathod with external voltage uniformly, guaranteed uniformity and stability that integral device is luminous.
Secondly, in described circular internal-grid controlled cathode structure, above the cathode conductive layer, cathode conductive layer then is covered with two layers upper surface at interval with the carbon nanotube cathod preparation.Increase the electron emission area of carbon nanotube cathod greatly, made more carbon nanotube cathod all participate in the electronics emission, helped to improve the display brightness of device.Because the cathode conductive layer that presents class round table surface type can approach to present the regulation and control grid layer of circular ring type as much as possible, has shortened the coverage between the two, helps further to reduce operating voltage of grid structure.Grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device.
In addition, in described circular internal-grid controlled cathode structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of circular internal-grid controlled cathode structure;
Fig. 2 has provided the transversary schematic diagram of circular internal-grid controlled cathode structure;
Fig. 3 has provided and has had structural representation circular internal-grid controlled cathode structure, the carbon nanotube field emission flat-panel screens.
Embodiment
The present invention is further described below in conjunction with drawings and Examples, but the present invention not the office in embodiment.
Described a kind of flat-panel monitor that has circular internal-grid controlled cathode structure, comprise by anode glass panel [14], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [19] is constituted; Anode conductive layer [15] and the phosphor powder layer [17] of preparation on anode conductive layer are arranged on the anode glass panel; Cathode leg layer [11], carbon nano-tube [13] and circular internal-grid controlled cathode structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate [18] and getter [20] subsidiary component.
Described circular internal-grid controlled cathode structure comprises that cathode glass faceplate [1], block layer [2], grid lead layer [3], grid increase layer [4], grid extended line layer [5], regulation and control grid layer [6], an alternating floor [7], interval two layers of [8], negative electrode transition zone [9], cathode conductive layer [10], cathode leg layer [11], cathode coating [12] and carbon nano-tube [13] part.
The backing material of described circular internal-grid controlled cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms grid and increases layer; Grid increases and has small sircle hole in the layer, as the passage of grid extended line layer; Grid increases the silver slurry layer that prints in the small sircle hole in the layer and forms grid extended line layer; The metal level that grid increases after the top etching of layer forms the regulation and control grid layer; The regulation and control grid layer presents the circular ring type shape, be seated on the upper surface that grid increases layer, and and the grid extended line layer of bottom be interconnected; Alternating floor between the insulation paste layer that grid increases the printing on layer upper surface forms; Between the upper and lower surface of alternating floor be the plane, lower surface wants cover grid to increase the upper surface of layer; Between have circular apertures in the alternating floor, it is circular apertures forms hollow at the upper surface of an alternating floor disk profile, the madial wall of circular apertures is perpendicular to the barrel surface of cathode glass faceplate, and the bottom surface of circular apertures will expose upper surface and the circular ring type regulation and control grid layer that grid increases layer; Between in the alternating floor diameter of circular apertures be greater than the overall diameter of circular ring type regulation and control grid layer; Between in the alternating floor in the circular apertures insulation paste layer of printing form two layers at interval; At interval two layers overall shape presents the circular ring type shape, cover circular ring type regulation and control grid layer above, two layers interior diameter is less than the interior diameter of regulation and control grid layer at interval, two layers overall diameter is greater than the overall diameter of regulation and control grid layer at interval; Two layers longitudinal cross-section presents class round table surface type shape at interval, promptly two layers last end face is the plane at interval, the width on plane is identical with the width of regulation and control grid layer annulus, two layers two sides are arcwall face at interval, two layers the last end face from the interval, to two layers bottom surface inclination at interval, form the arcwall face of a summary to outer lug gradually, two layers bottom surface will cover the regulation and control grid layer fully at interval; Two layers of center with the regulation and control grid layer, the interval of class round table surface type shape are the center, around forming a circular ring type shape, cover the top of regulation and control grid layer; At interval on two layers of upper surface and an alternating floor circular apertures madial wall on etching after metal level form the negative electrode transition zone; Metal level after the etching above the negative electrode transition zone above two layers forms cathode conductive layer at interval; Negative electrode transition zone and cathode conductive layer are interconnected; Between metal level after the etching above the alternating floor form the cathode leg layer; Cathode leg layer and negative electrode transition zone are interconnected; The insulation paste layer of the printing above the cathode leg layer forms cathode coating; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described circular internal-grid controlled cathode structure is for being fixed on the cathode glass faceplate; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium; The regulation and control grid layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; The trend of the trend of cathode leg layer and grid lead layer is orthogonal; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin, lead; The negative electrode transition zone can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel.
A kind of manufacture craft that has the flat-panel monitor of circular internal-grid controlled cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of grid lead layer [3]: on block layer, prepare a metallic chromium layer, form the grid lead layer after the etching;
4) grid increases the making of layer [4]: printing insulation paste layer on the grid lead layer forms grid and increases layer behind baking, sintering process;
5) making of grid extended line layer [5]: in grid increases layer small sircle hole, print silver slurry layer, behind baking, sintering process, form grid extended line layer;
6) making of regulation and control grid layers [6]: on grid increases layer, prepare a metallic chromium layer, form the regulation and control grid layer after the etching;
The making of alternating floor 7) [7]: increase printing insulation paste layer on the upper surface of layer at grid, alternating floor between forming behind baking, the sintering process;
8) making of two layers [8] at interval: printing insulation paste layer in the circular apertures in an alternating floor forms two layers at interval behind baking, sintering process;
9) making of negative electrode transition zone [9]: on two layers of upper surface at interval and prepare a metal molybdenum layer on the alternating floor circular apertures madial wall, form the negative electrode transition zone after the etching;
10) making of cathode conductive layer [10]: prepare a metal nickel dam above the negative electrode transition zone above two layers at the interval, form cathode conductive layer after the etching;
11) making of cathode leg layer [11]: preparing a metal molybdenum layer above the alternating floor, forming the cathode leg layer after the etching;
12) making of cathode coating [12]: printing insulation paste layer on the cathode leg layer forms cathode coating behind baking, sintering process;
13) cleaning surfaces of circular internal-grid controlled cathode structure is handled: clean is carried out on the surface to circular internal-grid controlled cathode structure, removes impurity and dust;
14) preparation of carbon nano-tube [13]: with made of carbon nanotubes on cathode conductive layer;
15) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
16) making of anode glass panel [14]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
17) making of anode conductive layer [15]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
18) making of insulation paste layer [16]: at the non-display area printing insulation paste layer of anode conductive layer;
19) making of phosphor powder layer [17]: the viewing area printing phosphor powder layer on anode conductive layer;
20) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [18] and all around glass enclose frame [19] and be assembled together, and getter [20] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
21) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 18 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 19 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 21 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (7)
1, a kind of flat-panel monitor of circular internal-grid controlled cathode structure, comprise by anode glass panel [14], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [19] is constituted; Be arranged on anode conductive layer [15] and the phosphor powder layer [17] of preparation on anode conductive layer on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate [18] and getter subsidiary component [20]; It is characterized in that: cathode glass faceplate is provided with cathode leg layer [11], carbon nano-tube [13] and circular internal-grid controlled cathode structure.
2, the flat-panel monitor of circular internal-grid controlled cathode structure according to claim 1 is characterized in that: the backing material of described circular internal-grid controlled cathode structure is soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms grid and increases layer; Grid increases and has small sircle hole in the layer, as the passage of grid extended line layer; Grid increases the silver slurry layer that prints in the small sircle hole in the layer and forms grid extended line layer; The metal level that grid increases after the top etching of layer forms the regulation and control grid layer; The regulation and control grid layer presents the circular ring type shape, be seated on the upper surface that grid increases layer, and and the grid extended line layer of bottom be interconnected; Alternating floor between the insulation paste layer that grid increases the printing on layer upper surface forms; Between the upper and lower surface of alternating floor be the plane, lower surface wants cover grid to increase the upper surface of layer; Between have circular apertures in the alternating floor, it is circular apertures forms hollow at the upper surface of an alternating floor disk profile, the madial wall of circular apertures is perpendicular to the barrel surface of cathode glass faceplate, and the bottom surface of circular apertures will expose upper surface and the circular ring type regulation and control grid layer that grid increases layer; Between in the alternating floor diameter of circular apertures be greater than the overall diameter of circular ring type regulation and control grid layer; Between in the alternating floor in the circular apertures insulation paste layer of printing form two layers at interval; At interval two layers overall shape presents the circular ring type shape, cover circular ring type regulation and control grid layer above, two layers interior diameter is less than the interior diameter of regulation and control grid layer at interval, two layers overall diameter is greater than the overall diameter of regulation and control grid layer at interval; Two layers longitudinal cross-section presents class round table surface type shape at interval, promptly two layers last end face is the plane at interval, the width on plane is identical with the width of regulation and control grid layer annulus, two layers two sides are arcwall face at interval, two layers the last end face from the interval, to two layers bottom surface inclination at interval, form the arcwall face of a summary to outer lug gradually, two layers bottom surface will cover the regulation and control grid layer fully at interval; Two layers of center with the regulation and control grid layer, the interval of class round table surface type shape are the center, around forming a circular ring type shape, cover the top of regulation and control grid layer; At interval on two layers of upper surface and an alternating floor circular apertures madial wall on etching after metal level form the negative electrode transition zone; Metal level after the etching above the negative electrode transition zone above two layers forms cathode conductive layer at interval; Negative electrode transition zone and cathode conductive layer are interconnected; Between metal level after the etching above the alternating floor form the cathode leg layer; Cathode leg layer and negative electrode transition zone are interconnected; The insulation paste layer of the printing above the cathode leg layer forms cathode coating; Made of carbon nanotubes is on cathode conductive layer.
3, the flat-panel monitor of circular internal-grid controlled cathode structure according to claim 2 is characterized in that: the fixed position of described circular internal-grid controlled cathode structure is for being fixed on the cathode glass faceplate; The grid lead layer is metal gold, silver, aluminium, molybdenum, chromium; The regulation and control grid layer is metal gold, silver, copper, aluminium, molybdenum, chromium, tin; The trend of the trend of cathode leg layer and grid lead layer is vertical mutually; The cathode leg layer is metal gold, silver, copper, aluminium, molybdenum, chromium, tin, lead; The negative electrode transition zone is metal gold, silver, copper, aluminium, molybdenum, chromium, tin; Cathode conductive layer is metallic iron, cobalt, nickel.
4, a kind of manufacture craft of flat-panel monitor of circular internal-grid controlled cathode structure is characterized in that, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]:, make cathode glass faceplate to whole plate glass scribing;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of grid lead layer [3]: on block layer, prepare a metal level, form the grid lead layer after the etching;
4) grid increases the making of layer [4]: printing insulation paste layer on the grid lead layer forms grid and increases layer behind baking, sintering process;
5) making of grid extended line layer [5]: in grid increases layer small sircle hole, print silver slurry layer, behind baking, sintering process, form grid extended line layer;
6) making of regulation and control grid layers [6]: on grid increases layer, prepare a metal level, form the regulation and control grid layer after the etching;
The making of alternating floor 7) [7]: increase printing insulation paste layer on the upper surface of layer at grid, alternating floor between forming behind baking, the sintering process;
8) making of two layers [8] at interval: printing insulation paste layer in the circular apertures in an alternating floor forms two layers at interval behind baking, sintering process;
9) making of negative electrode transition zone [9]: on two layers of upper surface at interval and prepare a metal level on the alternating floor circular apertures madial wall, form the negative electrode transition zone after the etching;
10) making of cathode conductive layer [10]: prepare a metal level above the negative electrode transition zone above two layers at the interval, form cathode conductive layer after the etching;
11) making of cathode leg layer [11]: preparing a metal level above the alternating floor, forming the cathode leg layer after the etching;
12) making of cathode coating [12]: printing insulation paste layer on the cathode leg layer forms cathode coating behind baking, sintering process;
13) cleaning surfaces of circular internal-grid controlled cathode structure is handled: clean is carried out on the surface to circular internal-grid controlled cathode structure, removes impurity and dust;
14) preparation of carbon nano-tube [13]: with made of carbon nanotubes on cathode conductive layer;
15) making of anode glass panel [14]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
16) making of anode conductive layer [15]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer [16]: at the non-display area printing insulation paste layer of anode conductive layer;
18) making of phosphor powder layer [17]: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [18] and all around glass enclose frame [19] and be assembled together, and getter [20] is put in the middle of the cavity, fix with glass powder with low melting point;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
5, the manufacture craft of the flat-panel monitor of circular internal-grid controlled cathode structure according to claim 4 is characterized in that: described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
6, the manufacture craft of the flat-panel monitor of circular internal-grid controlled cathode structure according to claim 4 is characterized in that: described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
7, the manufacture craft of the flat-panel monitor of circular internal-grid controlled cathode structure according to claim 4 is characterized in that: the device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
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| CNB2007100546010A CN100561652C (en) | 2007-06-19 | 2007-06-19 | The flat-panel monitor of circular internal-grid controlled cathode structure and manufacture craft thereof |
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| CNB2007100546010A CN100561652C (en) | 2007-06-19 | 2007-06-19 | The flat-panel monitor of circular internal-grid controlled cathode structure and manufacture craft thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102074440A (en) * | 2010-12-15 | 2011-05-25 | 清华大学 | Field-emission cathode device and field-emission display |
| CN111081505A (en) * | 2019-12-24 | 2020-04-28 | 中山大学 | Nano cold cathode electron source with coplanar double-gate focusing structure and manufacturing method thereof |
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2007
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102074440A (en) * | 2010-12-15 | 2011-05-25 | 清华大学 | Field-emission cathode device and field-emission display |
| CN111081505A (en) * | 2019-12-24 | 2020-04-28 | 中山大学 | Nano cold cathode electron source with coplanar double-gate focusing structure and manufacturing method thereof |
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| CN100561652C (en) | 2009-11-18 |
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