CN101071141B

CN101071141B - Detecting unit and detecting device with same

Info

Publication number: CN101071141B
Application number: CN2007100976019A
Authority: CN
Inventors: 申东沅; 金昔中
Original assignee: Phicom Corp
Current assignee: Soulbrain ENG Co Ltd
Priority date: 2006-05-09
Filing date: 2007-04-20
Publication date: 2010-05-26
Anticipated expiration: 2027-04-20
Also published as: TW200804827A; TWI333071B; CN101071141A; KR100773732B1

Abstract

A detection unit includes: a first detecting probe arranged along the first direction; a second detecting probe arranged along the first direction at the top of the first detecting probe and between the first detecting probes; a first support member which is used to support the both sides of the first detecting probe; a second support member which is arranged at the first support member to support the both sides of the second detecting probe; a frame which is used to support the first detecting probe and the second detecting probe; a first fixing component which is used to fix the first support member and the second support member to the frame thereby arranging the first support member and the second support member along the second direction that is approximately upright to the first direction; and a second fixing component which is used to fix the support member and the second member to the frame thereby arranging the first support member and the second support member along the third direction that is approximately to the first direction and the second direction.

Description

Probe unit and have the sniffer of this probe unit

The cross-index of related application

The application now is incorporated by reference in its entirety according to the right of priority of 35 USC §, 119 requirements at the korean patent application No.2006-41528 of application on May 9th, 2006.

Technical field

Illustrative embodiments of the present invention relates to a kind of probe unit and has the sniffer of this probe unit.More specifically, illustrative embodiments of the present invention relates to the contacted probe unit of terminal a kind of and such as the display board of LCD panel (LCD), plasma display panel (PDP), organic electroluminescent display board etc., and a kind of sniffer that uses the electric fiduciary level of this probe unit test display board.

Background technology

Recently, display industry is developed the trend that increases the display board size to meet.Comprise manufacturing cost proportional ground increase gradually of the display device of display board along with the increase of display board size.

When making display device, must carry out defect inspection completely, because display device is difficult to make any change after manufacturing is finished.That is to say when the improper pixel in display board, found more than permissible value, except changing display board, not to have other optional approach.Thereby, if after manufacturing process finishes, in display device, found defective, then will cause changing the fringe cost of display board, thereby reduce the fiduciary level of display device and cause that the manufacturer makes a price reduction etc.Therefore, in the process of making display board, check that up hill and dale display board is important.Herein, sniffer is checked display board.

Before the assembling display board, whether normally sniffer checks display board operation.The probe unit of sniffer contacts with the terminal of display board to check display board.

Fig. 1 illustrates the cut-open view of conventional probe unit.

With reference to Fig. 1, conventional probe unit 10 comprises probe 15 and surveys piece 20.

Probe 15 contacts with the terminal 55 of display board 50.Thereby probe 15 is with uniform spacing setting, and this spacing is corresponding with the spacing of terminal 55.Probe 15 is fixed to surveys piece 20.

Survey piece 20 and combine with back up pad 40, so that probe 15 is placed on the terminal 55 of display board 50 by retainer 60.Be fixed to the probe 15 of surveying piece 20 and be electrically connected to integrated circuit 65 such as flexible circuit board (TCP).Integrated circuit 65 provides electric signal for probe 15.Probe 15 is transferred to terminal 55 to determine whether display board 50 is normal with electric signal.

Probe 15 is arranged on uniform spacing and surveys on the piece 20.After probe 15 is fixed to detection piece 20, be difficult to probe 15 from surveying piece 20 separately.And, can not reset probe 15 probably, thereby when finding abnormal probe 15, be difficult to change or repair this abnormal probe 15.And probe 15 is arranged on the ceramic support piece of surveying in the piece 20 25.Ceramic support piece 25 may damage and produce many problems continually.For example, when ceramic support piece 25 damaged, probe 15 may not be provided with exactly, thereby can't guarantee the contact between probe 15 and the terminal 55.Thereby, must replace the ceramic support piece 25 of damage with new ceramic support piece.Yet, because probe 15 is fixed firmly to ceramic support piece 25, so may not only ceramic support piece 25 be replaced by a new part.And, because being fixed firmly to, ceramic support piece 25 surveys piece 20, be with ceramic support piece 25 from surveying on the piece 20 separately very difficulty.

As mentioned above, probe 15 is arranged on and surveys in the piece 20 and the uniform spacing of each interval., be not easy the spacing between the constriction probe 15 herein, because can only be with the spacing constriction between the probe 15 to about 30 microns by present technology.On the contrary, the display board with high capacity and high integration of exploitation can comprise that the each interval spacing is about 25 microns terminal 55 recently.Therefore, the display board of exploitation can not be tested with conventional probe unit 10 recently.In addition, the spacing of terminal 55 possibility quilt is constriction undesirably, thereby must take optional measure to prevent that spacing is by constriction.

Summary of the invention

Illustrative embodiments of the present invention provides a kind of probe unit, and this probe unit comprises and is easy to the probe that the precision of making and repairing is provided with.

Illustrative embodiments of the present invention also provides a kind of sniffer, and this sniffer has above-mentioned probe unit so that test the object with accurate terminal that is provided with effectively.

According to an aspect of the present invention, probe unit comprises: first probe, and it is spaced apart from each other along first direction, and the longitudinally of each first probe is along the second direction setting vertical with described first direction; Second probe, it is spaced apart from each other along first direction, and described second probe is arranged on described first probe top and between described first probe, the longitudinally of each second probe is along described second direction setting; Be used to support first supporting member at the two ends of each first probe; Be arranged on first supporting member second supporting member with the two ends of supporting each second probe; Be used to support the framework of first probe and second probe; First fixed component, it is used for pushing described first supporting member and described second supporting member along described second direction, thereby described first supporting member and described second supporting member are fixed on the framework; And second fixed component, it is used for along pushing described first supporting member and described second supporting member with the described first direction third direction vertical with described second direction, thereby first supporting member and second supporting member are fixed to described framework.

In an exemplary embodiment of the present invention embodiment, first supporting member can comprise first support member of an end that is used to support each first probe and be used to support second support member of the other end of each first probe.In addition, second supporting member can comprise the 3rd support member of an end that is used to support each second probe and be used to support the 4th support member of the other end of each second probe.In addition, first groove that is used for ccontaining first probe can be formed on the surface element office of first support member and second support member.Second groove that is used for ccontaining second probe can be formed on the surface element office of the 3rd support member and the 4th support member.First probe removably combines with first support member and second support member.Second probe removably combines with the 3rd support member and the 4th support member.

First support member can be arranged on the maintainance block.The 3rd support member can be arranged on the back-up block.Back-up block can be fixed to framework by the 3rd fixed component.The 3rd support member can be aimed at first support member by the 4th fixed component, and the 4th fixed component contacts with two sides of the 3rd support member.

Second support member can be contained in the containing groove.The 4th support member can be positioned on second support member.Second support member and the 4th support member can be fastened on the framework.The 4th support member can be aimed at second support member by second fixed component, and second fixed component contacts with two sides of the 4th support member.

According to another aspect of the present invention, the probe unit that is used to test flat display board comprises: probe, it is spaced apart from each other along first direction, the longitudinally of each described probe is along the second direction setting vertical with described first direction, and described probe contacts with the circuit terminal of described flat display board so that the electric signal of testing apparatus is transferred to described flat display board; Two supporting members, it is used to support the two ends of each probe; Framework, it is used to support described supporting member, wherein, arbitrary described support member all movably is arranged on the bottom surface place of described framework towards other support member ground, thus with described probe stationary between described support member.

According to a further aspect of the invention, sniffer comprises: the housing that is used for ccontaining object; Be arranged in the housing to keep the stand of object; The probe unit that object ground on the contiguous stand is provided with, this probe unit comprises: i) first probe, it is spaced apart from each other along first direction, the longitudinally of each first probe is along the second direction setting vertical with described first direction, ii) second probe, it is spaced apart from each other along first direction, described second probe is arranged on above first probe and between first probe, the longitudinally of each second probe is along described second direction setting, iii) be used to support first supporting member at the two ends of each first probe, iv) be arranged on first supporting member top second supporting member with the two ends of supporting each second probe, v) be used to support the framework of first supporting member and second supporting member, vi) first fixed component, it is used for pushing described first supporting member and described second supporting member along described second direction, thereby first supporting member and second supporting member are fixed on the framework, and vii) second fixed component, it is used for along pushing described first supporting member and described second supporting member with the described first direction third direction vertical with described second direction, thereby first supporting member and second supporting member are fixed on the framework; And be used for providing electric signal so that check whether normally test cell of object to first probe and second probe.

According to the present invention, this probe unit and sniffer can accurately be checked the object with accurate terminal that is provided with.In addition, this probe unit can easily be made rapidly and repair.

Description of drawings

Connection with figures and with reference to following detailed, above-mentioned and other feature and advantage of the present invention will become very obvious, wherein:

Fig. 1 illustrates the cut-open view of traditional probe unit;

Fig. 2 illustrates the stereographic map according to the probe unit of an exemplary embodiment of the present invention;

Fig. 3 is the amplification stereogram of " A " part among Fig. 2;

Fig. 4 is the amplification stereogram of " B " part among Fig. 2;

Fig. 5 illustrates the exploded perspective view of probe unit shown in Figure 2;

Fig. 6 illustrates the stereographic map of first probe of probe unit shown in Figure 2;

Fig. 7 illustrates the stereographic map of second probe of probe unit shown in Figure 2;

Fig. 8 illustrates the stereographic map of the framework of probe unit shown in Figure 2;

Fig. 9 illustrates first support member of first supporting member shown in Figure 2 and the stereographic map of second support member;

Figure 10 illustrates the 3rd support member of second supporting member shown in Figure 2 and the stereographic map of the 4th support member;

Figure 11 to Figure 17 illustrates a kind of stereographic map and cut-open view of making the method for probe unit shown in Figure 2;

Figure 18 illustrates the stereographic map according to the probe unit of an exemplary embodiment of the present invention;

Figure 19 is the amplification stereogram of " C " part among Figure 18;

Figure 20 is the amplification stereogram of " D " part among Figure 18;

Figure 21 illustrates the exploded perspective view of probe unit shown in Figure 180;

Figure 22 illustrates the stereographic map of the framework of probe unit shown in Figure 180;

Figure 23 illustrates first support member of first supporting member shown in Figure 180 and the stereographic map of second support member;

Figure 24 illustrates the 3rd support member of second supporting member shown in Figure 180 and the stereographic map of the 4th support member;

Figure 25 to Figure 31 illustrates a kind of stereographic map and cut-open view of making the method for probe unit shown in Figure 180;

Figure 32 illustrates the side view according to the sniffer of an exemplary embodiment of the present invention; And

Figure 33 illustrates the stereographic map of the probe unit of sniffer shown in Figure 32.

Embodiment

Hereinafter the present invention is described more all sidedly with reference to the accompanying drawing that shows illustrative embodiments of the present invention.Yet the present invention can also many other modes implement, and should not be construed as and only limit to illustrative embodiments described herein.On the contrary, it is in order to make this disclosure more abundant and complete that these embodiments are provided, and makes and intactly inform those skilled in the art's protection scope of the present invention.In the drawings, the size in layer and zone and relative size may be by exaggerative so that express clearly.

Should be understood that, when pointing out that an element or layer " being positioned at " another element or layer are gone up or when " being connected to " another element or layer, it can be located immediately at another element or another element or layer are gone up or be directly connected to layer, perhaps can have intermediary element or middle layer.On the contrary, when pointing out that an element " is located immediately at " another element or layer is gone up or when " being directly connected to " another element or layer, then not having intermediary element or middle layer.In the text, similarly label refers to similar elements.As used herein, term " and/or " comprise any one and all combinations among one or more in the listed relevant entry.

Should be understood that though this paper can use the various elements of first, second, third, etc. term description, parts, zone, layer and/or part, these elements, parts, zone, layer and/or part are not limited to these terms.These terms only are used to distinguish an element, parts, zone, layer or part and other zone, layer or part.Therefore, following first element, parts, zone, layer and/or part can be known as second element, parts, zone, layer and/or part and not depart from instruction of the present invention.

Can use such as spatial relationship speech such as " lower ", " end faces " so that describe element shown in the figure or the relation between feature and other element or the feature at this.Should be understood that these spatial relationship speech are intended to comprise the different directions at use or operating equipment except that direction shown in the figure.For example, if the equipment operation among the figure then is described as being positioned at " top " that other elements or the element of feature " below " or " following " will be positioned at these other elements or feature.Therefore, exemplary term " below " can comprise the above and below towards.This equipment may be towards other direction (revolve turn 90 degrees or towards other directions), and then the spatial relationship of herein using is described and done corresponding the explanation.

The term of Shi Yonging only is used to describe specific implementations herein, and it is not construed as limiting the invention.As used herein, singulative " ", " one " reach " being somebody's turn to do " intention and also comprise plural form, unless context clearly illustrates that the opposite meaning.Further should be understood that, the term that uses in this instructions " comprises " and/or shows " comprising " existence of described feature, integral body, step, operation, element and/or parts, but does not get rid of existence or add one or more other features, integral body, step, operation, element, parts and/or its group.

With reference to the cross-sectional schematic that desirable embodiment of the present invention (and intermediate structure) is shown illustrative embodiments of the present invention is described herein.So, can expect the variation of the shape shown that produces owing to for example manufacturing technology and/or tolerance.Therefore, illustrative embodiments of the present invention should not be interpreted as only limiting to specific region shape shown here, but comprises that the shape that causes owing to for example manufacturing departs from.Zone shown in the figure is exemplary, and their shape is not used in the true form that equipment region is shown, and does not constitute the restriction to protection scope of the present invention.

Unless carried out opposite definition, all terms of Shi Yonging have (comprising technical term and scientific terminology) meaning of those skilled in the art's common sense herein.Further should be understood that, should be interpreted as having and the corresponding to meaning of its meaning in the correlation technique literary composition such as those terms with the meaning in the common dictionary, unless provided clear and definite definition herein, otherwise should not do idealized or formal explanation.

Fig. 2 illustrates the stereographic map according to the probe unit of an exemplary embodiment of the present invention, and Fig. 3 is the amplification stereogram of " A " part among Fig. 2, and Fig. 4 is the amplification stereogram of " B " part among Fig. 2.Fig. 5 illustrates the exploded perspective view of probe unit shown in Figure 2.

With reference to Fig. 2 to Fig. 5, probe unit 100 comprises first probe, 110, the second probes, 120, the first supporting members 130, second supporting member 150, framework 170, the first fixed components 181, the second fixed components 183, the 3rd fixed component 185, the four fixed components 187, and back-up block 190.First supporting member 130 comprises first support member 131 and second support member 141.Second supporting member 150 comprises the 3rd support member 151 and the 4th support member 161.

First support member 131 and second support member 141 are arranged on the framework 170.The first probe notch 135 and first aligned notches 137 are formed on the surface of first support member 131 along first direction.In an illustrative embodiments, but the first probe notch, 135 each intervals, the first spacing G11.The second probe notch 145 and second aligned notches 147 can be formed on the surface of second support member 141 along first direction.In an illustrative embodiments, but the second probe notch, 145 each intervals, the first spacing G11.

First probe 110 inserts in first support member 131 and second support member 141.In an illustrative embodiments, an end of each first probe 110 can insert in each first probe notch 135.In addition, the other end of each first probe 110 can insert in each second probe notch 145.Therefore, first probe 110 can be set to the each interval first spacing G11.The first spacing G11 can determine according to the spacing of the terminal on the object.For example, the first spacing G11 can drop in about 10 microns to 100 microns scope.

Back-up block 190 is arranged on the both sides of first support member 131.Back-up block 190 is fixed to framework 170 by the 3rd fixed component 185.The 3rd support member 151 is arranged on the back-up block 190.In addition, the 4th support member 161 is arranged on second support member 141.

The 3rd probe notch 155 and the 3rd aligned notches 157 are formed on the surface element of the 3rd support member 151 along first direction.In an illustrative embodiments, but the 3rd probe notch 155 each intervals second spacing G12.Four point probe notch 165 and the 4th aligned notches 167 can be formed on the surface of the 4th support member 161 along first direction.In an illustrative embodiments, but the four point probe notch 165 each intervals second spacing G12.

The 3rd support member 151 is aimed at first support member 131.In an illustrative embodiments, the 3rd support member 151 can be aimed at first support member 131 by the 3rd aligned notches 157 and first aligned notches 137.The 4th support member 161 is aimed at second support member 141.In an illustrative embodiments, the 4th support member 161 can be aimed at second support member 141 by the 4th aligned notches 167 and second aligned notches 147.

In second probe 120 inserts respectively with first support member 131 and second support member 141 are aimed at the 3rd support member 151 and the 4th support member 161.In an illustrative embodiments, an end of each second probe 120 can insert in each the 3rd probe notch 155.In addition, the other end of each second probe 120 can insert in each four point probe notch 165.Therefore, but second probe, 120 each intervals, the second spacing G12.The second spacing G12 can determine according to the spacing of the terminal on the object.For example, the second spacing G12 can drop in about 10 microns to 100 microns scope.The second spacing G12 between second probe 120 can and first probe 110 between the first spacing G11 roughly the same.Perhaps, the second spacing G12 between second probe 120 can be slightly different with the first spacing G11 between first probe 110.

Second probe 120 is arranged between first probe 110.Interval the 3rd spacing G13 between first probe 110 and second probe 120.The 3rd spacing G13 can determine according to the first spacing G11 and the second spacing G12.For example, when the first spacing G11 was about 50 microns and the second spacing G12 and also is about 50 microns, the 3rd spacing G13 was about 25 microns.

Second support member 141 and the 4th support member 161 are fixed to framework 170 by first fixed component 181 and second fixed component 183.Simultaneously, second support member 141 and the 4th support member 161 can combine with first probe 110 and second probe 120.

Hereinafter, the said elements of detailed explanation probe unit 100 with reference to the accompanying drawings.

Fig. 6 illustrates the stereographic map of first probe of probe unit shown in Figure 2.

Comprise body 111 with reference to Fig. 2 and 6, the first probes 110, contact site 114 and connecting portion 117.

Body 111 can be wide for W11, length are the thin sheet form of L11, and wherein L11 is much larger than W11.In an illustrative embodiments, a plurality of holes 116 can form runs through body 111 so that reduce the weight of body 111.In addition, body 111 can be with respect to the perpendicular first jiao of α 1 that tilt along clockwise direction.First jiao of α 1 can determine according to the shape of aftermentioned framework 170.Body 111 have the first end 111a and with the first end 111a second opposed end 111b.The first end 111a and the second end 111b can be set to and the perpendicular almost parallel.Contact site 114 extends from the end face of body 111 first end 111a.In addition, connecting portion 117 extends from the end face of body 111 second end 111b.

Contact site 114 directly contacts with terminal such as the object of liquid crystal display (LCD) equipment.Contact site 114 is with respect to second jiao of α 2 of top surface inclination of body 111 first end 111a.Contact site 114 can have the tip.

Connecting portion 117 contacts with integrated circuit such as flexible circuit board (TCP).Connecting portion 117 extends vertically from the end face of body 111 second end 111b, flatly extends then.Therefore, connecting portion 117 can be Γ shape.In addition, connecting portion 117 can have the tip that is bent upwards.

As mentioned above, body 111, contact site 114 and connecting portion 117 can be integrally formed, so that form first probe 110.In an illustrative embodiments, first probe 110 can have roughly the same shape.Perhaps, first probe 110 can have different slightly shapes.

Body 111, contact site 114 and connecting portion 117 can comprise conductive material.Therefore, electric signal can be transferred to contact site 114 from connecting portion 117 by body 111, and vice versa.First probe, 110 along continuous straight runs are arranged on the framework 170.Further, first probe, 110 each intervals, the first spacing G11.

Fig. 7 illustrates the stereographic map of second probe of probe unit shown in Figure 2.

Comprise body 121 with reference to Fig. 2 and 7, the second probes 120, contact site 124 and connecting portion 127.

Body 121 can be long for L21, widely be the thin sheet form of W21, wherein L21 is much larger than W21.In an illustrative embodiments, the width W 21 of second probe, 120 bodies 121 can be roughly the same with the width W 11 of first probe, 110 bodies 111.Perhaps, the width W 21 of second probe, 120 bodies 121 can be slightly different with the width W 11 of first probe, 110 bodies 111.On the other hand, the length L 21 of second probe, 120 bodies 121 is shorter than the length L 11 of first probe, 110 bodies 111.In an illustrative embodiments, a plurality of holes 126 can form runs through body 121 so that reduce the weight of body 121.In addition, body 121 can be with respect to the perpendicular third angle α 3 that tilts along clockwise direction.Third angle α 3 can determine according to the shape of aftermentioned framework 170.Body 121 have the first end 121a and with the first end 121a second opposed end 121b.The first end 121a and the second end 121b can be set to and the perpendicular almost parallel.

First fixed groove 122 that the 3rd support member 151 is inserted is formed on the first end 121a of body 121.In addition, second fixed groove 123 that inserted of the 4th support member 161 is formed on the second end 121b of body 121.Contact site 124 extends from the end face of body 121 first end 121a.In addition, connecting portion 127 extends from the end face of body 121 second end 121b.

Contact site 124 directly contacts with terminal such as the object of LCD equipment.The first end 121a of contact site 124 along the direction of extending from body 121 from body 121 extends.Contact site 124 can have the tip that is bent upwards.

Connecting portion 127 contacts with integrated circuit such as flexible circuit board (TCP).Connecting portion 127 extends along vertical from the end face of body 121 second end 121b, then horizontal-extending.In addition, connecting portion 127 can have the tip that is bent upwards.

As mentioned above, body 121, contact site 124 and connecting portion 127 are integrally formed, thereby form second probe 120.In an illustrative embodiments, second probe 120 can have identical substantially shape.Perhaps, second probe 120 can have different slightly shapes.

Body 121, contact site 124 and connecting portion 127 comprise conductive material.Therefore, electric signal can be transferred to contact site 124 from connecting portion 127 by body 121, and vice versa.

Be arranged on the framework 170 along first direction referring now to Fig. 3 and 4, the first probes 110.Second probe 120 is arranged between first probe 110 along first direction.Therefore, the 3rd spacing G13 between first probe 110 and second probe 120 approximately is the first spacing G11 between first probe 110 or half of the second spacing G12 between second probe.For example, when the first spacing G11 was about 20 microns and the second spacing G12 and is about 20 microns, the 3rd spacing G13 was about 10 microns.Therefore, by second probe 120 being set, can making the 3rd spacing G13 that wins between the probe 110 and second probe 120 between first probe 110 much smaller than first spacing G11 between first probe 110 or the second spacing G12 between second probe 120.Can adjust the first spacing G11, the second spacing G12 and the 3rd spacing G13 according to the spacing between the terminal of object.

Fig. 8 illustrates the stereographic map of the framework of probe unit shown in Figure 2.

With reference to Fig. 2 and 8, framework 170 can rectangular parallelepiped-shaped, and it has first width W 31, first length L 31 and first height H 31.Containing groove 176 is formed on the front portion of framework 170 end face 170a.Containing groove 176 is towards first direction and second direction opening.

Containing groove 176 has second width W 32, second length L 32 and first depth D 31.Second width W 32 is narrower than first width W 31.Second length L 32 is shorter than first length L 31.In addition, first depth D 31 can be deeper than first height H 31.In an illustrative embodiments, second width W 32 of containing groove 176 can with the width of second support member 141 about equally.Perhaps, second width W 32 of containing groove 176 can be slightly different with the width of second support member 141.

Sidewall 171 is along the both sides that vertically are arranged on containing groove 176.Sidewall 171 can be from the end face 170a of framework 170 projection partly.

End difference up is formed on the bottom surface of containing groove 176 along second direction.In an illustrative embodiments, the bottom surface of containing groove 176 can comprise the first basal plane 176a, the second basal plane 176b and the 3rd basal plane 176c.The 3rd basal plane 176c can be placed on second basal plane 176b top, and the second basal plane 176b is positioned at first basal plane 176a top.In addition, the first basal plane 176a, the second basal plane 176b and the 3rd basal plane 176c almost parallel each other.For second support member 141 is set on the first basal plane 176a, the length of the first basal plane 176a can be much larger than the length of second support member 141.

Maintainance block 173 is formed on the second basal plane 176b and the 3rd basal plane 176c.Maintainance block 173 has second width W 32 that the 3rd width W 33, the three width far are narrower than containing groove 176.In addition, the 3rd width W 33 of maintainance block 173 can with the width of first support member 131 about equally.Perhaps, the 3rd width W 33 of maintainance block 173 can be slightly different with the width of first support member 131.

Maintainance block 173 separates with sidewall 171.In an illustrative embodiments, the side of maintainance block 173 can equate each other substantially fully with spacing between the sidewall 171.Therefore, the space that back-up block 190 is set can be formed between maintainance block 173 and the sidewall 171.

The end face 173a of maintainance block 173 is arranged on the horizontal plane at end face 170a place of framework 170.Perhaps, the end face 173a of maintainance block 173 can be arranged on the horizontal plane different with the end face 170a place horizontal plane of framework 170.

End difference 173b is formed on the front portion of maintainance block 173 end face 173a along first direction.The shape of end difference 173b can be corresponding to the shape of the substructure of first support member 131.First support member 131 is arranged on the maintainance block 173.First support member 131 can closely contact with end difference 173b.

Maintainance block 173 has the back side 173c of inclination.In an illustrative embodiments, the inclination alpha 4 of first back side 173c can with first jiao of α 1 of first probe 110 about equally.The inclination alpha 4 of first back side 173c can be slightly different with first jiao of α 1 of first probe 110.

Terminal groove 178 is formed on the end face 170a place of framework 170.Terminal groove 178 links with containing groove 176.Integrated circuit such as TCP is arranged in the terminal groove 178.In addition, can form further groove or end difference at framework 170 places.

The first fixed orifice 181a, the second fixed orifice 183a, the 3rd fixed orifice 185a and the 4th fixed orifice 187a form the sidewall 171 that runs through framework 170.The first fixed orifice 181a, the second fixed orifice 183a, the 3rd fixed orifice 185a and the 4th fixed orifice 187a and containing groove 176 link.In addition, the first fixed orifice 181a, the second fixed orifice 183a, the 3rd fixed orifice 185a and the 4th fixed orifice 187a are provided with in turn along second direction.

The first fixed orifice 181a forms the first inwall 176d that extends to containing groove 176 from the sidewall 171 of framework 170.In an illustrative embodiments, the first fixed orifice 181a can tilt with respect to first direction.That is to say that the first fixed orifice 181a can be arranged on the plane of being determined by first direction and second direction along oblique.In addition, the first fixed orifice 181a can be provided with symmetrically with respect to an axis that extends along second direction.

First fixed component 181 inserts in the first fixed orifice 181a accordingly.One end of each first fixed component 181 exposes the first basal plane 176a of containing groove 176.First fixed component 181 contacts with the back side of second support member 141, thereby pushes second support member 141 along second direction.

The contiguous first fixed orifice 181a ground of the second fixed orifice 183a is provided with.The second fixed orifice 183a forms the sidewall 171 that runs through framework 170.In an illustrative embodiments, the second fixed orifice 183a can tilt with respect to third direction.That is to say that the second fixed orifice 183a can be arranged on the plane of being determined by first direction and third direction along oblique.In addition, the second fixed orifice 183a can be provided with symmetrically with respect to the axis that extends along second direction.Moreover the second fixed orifice 183a can be set to towards the first basal plane 176a.

Second fixed component 183 inserts in the second fixed orifice 183a accordingly.One end of each second fixed component 183 exposes the first basal plane 176a and the second basal plane 176b of containing groove 176.Second fixed component 183 contacts with two sides of the 4th support member 161, thereby pushes the 4th support member 161 along first direction and third direction.

The contiguous second fixed orifice 183a ground of the 3rd fixed orifice 185a is provided with.The 3rd fixed orifice 185a forms the sidewall 171 that runs through framework 170.In an illustrative embodiments, the 3rd fixed orifice 185a can tilt with respect to first direction.That is to say that the 3rd fixed orifice 185a can be arranged on the plane of being determined by first direction and third direction along oblique.In addition, the 3rd fixed orifice 185a can be provided with symmetrically with respect to the axis that extends along second direction.

The 3rd fixed component 185 inserts in the 3rd fixed orifice 185a accordingly.One end of each the 3rd fixed component 185 exposes the second basal plane 176b of containing groove 176.The 3rd fixed component 185 contacts with the back side of back-up block 190, thereby along second direction and third direction pushing back-up block 190.

Contiguous the 3rd fixed orifice 185a ground of the 4th fixed orifice 187a is provided with.The 4th fixed orifice 187a forms the sidewall 171 that runs through framework 170 along first direction.The 4th fixed orifice 187a can be provided with symmetrically with respect to the axis that extends along second direction.

The 4th fixed component 187 inserts in the 4th fixed orifice 187a accordingly.One end of each the 4th fixed component 187 exposes the second basal plane 176b and the 3rd basal plane 176c of containing groove 176.The 4th fixed component 187 contacts with two sides of the 3rd support member 151, thereby pushes the 3rd support member 151 along first direction.In an illustrative embodiments, additional fixed orifice can run through framework 170 ground and form.

Fig. 9 illustrates first support member of first supporting member shown in Figure 2 and the stereographic map of second support member.

Comprise first support member 131 and second support member 141 with reference to Fig. 2 and 9, the first supporting members 130.

First support member 131 supports the first end 111a of each first probe 110, so that make first probe 110 be set to the each interval first spacing G11.First support member 131 is arranged on the maintainance block 173.

In an exemplary embodiment of the present invention, first support member 131 can comprise that the cross section is L shaped beam.The width W 41 of first support member 131 can with the 3rd width W 33 of maintainance block 173 about equally.Perhaps, the width W 41 of first support member 131 can be slightly different with the 3rd width W 33 of maintainance block 173.

First support member 131 has the end face 131a of inclination.The inclination alpha 5 of end face 131a can with second jiao of α 2 of first probe 110 about equally.Perhaps, the inclination alpha 5 of end face 131a can be slightly different with second jiao of α 2 of first probe 110.

The first probe notch 135 is formed on the end face 131a and the 131b place, first back side of first support member 131 along second direction.The first probe notch 135 is along the first direction setting.In an illustrative embodiments, the number of the first probe notch 135 can with the number of first probe 110 about equally.Perhaps, the number of the first probe notch 135 can be greater than the number of first probe 110.

In an exemplary embodiment of the present invention, the first probe notch 135 can be set to each interval spacing G41, and the first spacing G11 of this spacing G41 and first probe 110 about equally.Perhaps, the first probe notch 135 can be set to each interval spacing G41, and this spacing G41 is slightly different with the first spacing G11 of first probe 110.The width W 42 of the first probe notch 135 can equal the width W 11 of first probe 110 substantially.Perhaps, the width W 42 of the first probe notch 135 can be slightly different with the width W 11 of first probe 110.The contact site 114 of first probe 110 inserts respectively in the first probe notch 135.In contact site 114 inserts the first probe notch 135 and when being arranged on first probe 110 on first support member 131, first probe 110 can automatically be set to the each interval first spacing G11, as shown in Figure 3.

First aligned notches 137 is formed on the end face 131a and first back side 131b of first support member 131 along second direction.The 137 contiguous outmost first probe notch 135 ground settings of first aligned notches.First aligned notches 137 is configured to corresponding with the alignment pin (not shown).Alignment pin inserts in first aligned notches 137 accordingly.First support member 131 and the 3rd support member 151, perhaps first support member 131, second support member 141, the 3rd support member 151 and the 4th support member 161 are aimed at by the alignment pin that inserts in first aligned notches 137.

In an exemplary embodiment of the present invention, long recess 132 can be formed on the end face 131a place of first support member 131 along first direction.Herein, two ranked first probe notch 135 and two and ranked first the end face 131a place that aligned notches 137 can be formed on first support member 131.

First engagement groove 136 that is used for the first end 111a of ccontaining each first probe 110 is formed on the 131b place, first back side of first support member 131.First engagement groove 136 is configured to corresponding with the shape of the first end 111a of first probe 110 shown in Figure 6.First engagement groove 136 forms along first direction.In an illustrative embodiments, the height H 41 of first engagement groove 136 can with the height H 11 of the first end 111a of first probe 110 about equally.Perhaps, the height H 41 of first engagement groove 136 can be slightly different with the height H 11 of the first end 111a of first probe 110.

The first end 111a of first probe 110 inserts in first engagement groove 136.Especially, the first end 111a can closely insert in first engagement groove 136 to prevent that first probe 110 from moving along first direction.

Second support member 141 supports the second end 111b of each first probe 110, thereby first probe 110 can be set to the each interval first spacing G11.Second support member 141 is placed on the first basal plane 176a of containing groove 176.

In an exemplary embodiment of the present invention, second support member 141 can comprise that the cross section is L shaped beam.The width W 43 of second support member 141 can with second width W 32 of containing groove 176 about equally.Perhaps, the width W 43 of second support member 141 can be slightly different with second width W 32 of containing groove 176.In addition, the height H 42 of second support member 141 can with first depth D 31 of containing groove 176 about equally.Perhaps, the height H 42 of second support member 141 can be slightly different with first depth D 31 of containing groove 176.

Second support member 141 has smooth end face 141a.The second probe notch 145 is formed on the end face 141a place of second support member 141 along second direction.The second probe notch 145 is along the first direction setting.In an illustrative embodiments, the number of the second probe notch 145 can with the number of first probe 110 about equally.Perhaps, the number of the second probe notch 145 can be greater than the number of first probe 110.

In an exemplary embodiment of the present invention, the second probe notch 145 can be set to each interval spacing G42, and the first spacing G11 of this spacing G42 and first probe 110 about equally.Perhaps, the second probe notch 145 can be set to each interval spacing G42, and this spacing G42 is slightly different with the first spacing G11 of first probe 110.The width W 44 of the second probe notch 145 can equal the width W 11 of first probe 110 substantially.Perhaps, the width W 44 of the second probe notch 145 can be slightly different with the width W 11 of first probe 110.The connecting portion 117 of first probe 110 inserts in the second probe notch 145 accordingly.In connecting portion 117 inserts the second probe notch 145 and when being set to first probe 110 on second support member 141, first probe 110 can automatically be set to the each interval first spacing G11, as shown in Figure 4.

Second aligned notches 147 is formed on the end face 141a of second support member 141 along second direction.The 147 contiguous outmost second probe notch 145 ground settings of second aligned notches.Second aligned notches 147 is configured to corresponding with the alignment pin (not shown).Alignment pin inserts in second aligned notches 147 accordingly.Second support member 141 and the 4th support member 161, perhaps first support member 141, second support member 141, the 3rd support member 151 and the 4th support member 161 are aimed at by the alignment pin that inserts in second aligned notches 147.

Second engagement groove 146 that is used for the second end 111b of ccontaining each first probe 110 is formed on the positive 141b place of second support member 141.Second engagement groove 146 is configured to corresponding with the shape of the second end 111b of first probe 110 shown in Figure 6.Second engagement groove 146 forms along first direction.In an illustrative embodiments, the height H 43 of second engagement groove 146 can with the height H 12 of the second end 111b of first probe 110 about equally.Perhaps, the height H 43 of second engagement groove 146 can be slightly different with the height H 12 of the second end 111b of first probe 110.

The second end 111b of first probe 110 inserts in second engagement groove 146.Especially, the second end 111b can closely insert in second engagement groove 146 to prevent that first probe 110 from moving along first direction.

Figure 10 illustrates the 3rd support member of second supporting member shown in Figure 2 and the stereographic map of the 4th support member.

Comprise the 3rd support member 151 and the 4th support member 161 with reference to Fig. 2 and 10, the second supporting members 150.

The 3rd support member 151 supports the first end 121a of each second probe 120, so that make second probe 120 can be set to the each interval second spacing G12.The 3rd support member 151 is arranged on first support member 131.The 3rd support member 151 is fixed to back-up block 190.

In an exemplary embodiment of the present invention, the 3rd support member 151 can be the beam shape that is linear.The width W 51 of the 3rd support member 151 can with second width W 32 of containing groove 176 about equally.Perhaps, the width W 51 of the 3rd support member 151 can be slightly different with second width W 32 of containing groove 176.

The 3rd support member 151 has smooth end face 151a.The 3rd probe notch 155 is formed on the end face 151a place of the 3rd support member 151 along second direction.The 3rd probe notch 155 cigarette first directions are provided with.In an illustrative embodiments, the number of the 3rd probe notch 155 can with the number of second probe 120 about equally.Perhaps, the number of the 3rd probe notch 155 can be greater than the number of second probe 120.

In an exemplary embodiment of the present invention, the 3rd probe notch 155 can be set to each interval spacing G51, and the second spacing G12 of this spacing G51 and second probe 120 about equally.Perhaps, the 3rd probe notch 155 can be set to each interval spacing G51, and this spacing G51 is slightly different with the second spacing G12 of second probe 120.The width W 52 of the 3rd probe notch 155 can equal the width W 21 of second probe 120 substantially.Perhaps, the width W 52 of the 3rd probe notch 155 can be slightly different with the width W 21 of second probe 120.The contact site 124 of second probe 120 inserts respectively in the 3rd probe notch 155.In contact site 124 inserts the 3rd probe notch 155 and when being set to second probe 120 on the 3rd support member 151, second probe 120 can automatically be set to the each interval second spacing G12, as shown in Figure 3.

The 3rd aligned notches 157 is formed on the end face 151a place of the 3rd support member 151 along second direction.157 contiguous outmost the 3rd probe notch 155 ground settings of the 3rd aligned notches.The 3rd aligned notches 157 is configured to corresponding with the alignment pin (not shown).Alignment pin inserts respectively in the 3rd aligned notches 157.First support member 131 and the 3rd support member 151, perhaps first support member 131, second support member 141, the 3rd support member 151 and the 4th support member 161 are aimed at by the alignment pin that inserts in the 3rd aligned notches 157.

First connecting rod 154 that combines with the first end 121a of second probe 120 is formed on the 151b place, the back side of the 3rd support member 151.As shown in Figure 7, first connecting rod 154 is configured to corresponding with the shape of first fixed groove 122 of second probe 120.Therefore, first connecting rod 154 forms along first direction.For example, when first fixed groove 122 was the square-section, first connecting rod 154 had the square-section roughly the same with the cross section of first fixed groove 122.In an illustrative embodiments, the height H 51 of first connecting rod 154 and the height H 13 of first fixed groove 122 are about equally.Perhaps, the height H 51 of first connecting rod 154 is slightly different with the height H 13 of first fixed groove 122.

First connecting rod 154 inserts in first fixed groove 122 of second probe 120.Herein, first connecting rod 154 closely inserts in first fixed groove 122 to prevent that second probe 120 from moving along first direction.

Claw 156 is formed on two edges of the bottom surface of the 3rd support member 151.In an illustrative embodiments, the width W 56 of claw 156 can with the width W 55 of back-up block 190 about equally.Perhaps, the width W 56 of claw 156 can be slightly different with the width W 55 of back-up block 190.

As mentioned above, the 3rd support member 151 can be arranged on the back-up block 190 by claw 156.

Back-up block 190 is arranged on the both sides of maintainance block 173 of framework 170 to support the 3rd back-up block 151.In an illustrative embodiments, the width W 55 of back-up block 190 can and maintainance block 173 shown in Figure 8 and the spacing B31 between the sidewall 171 about equally.Perhaps, the width W 55 of back-up block 190 can be slightly different with the spacing B31 between the sidewall 171 with maintainance block 173 shown in Figure 8.

Last end difference 192 is formed on the rear portion of the end face 190a of back-up block 190 along first direction.The shape of last end difference 192 is corresponding to the shape of the claw 156 of the 3rd support member 151.The claw 156 of the 3rd support member 151 can closely contact with last end difference 192.

Downstairs portion 193 is formed on the front portion of the bottom surface 190b of back-up block 190 along first direction.The shape of downstairs portion 193 is corresponding to the 3rd basal plane 176c shape of framework 170.Second basal plane 176b of framework 170 and the interface of the 3rd basal plane 176c can closely contact with downstairs portion 193.The back side 190c of back-up block 190 tilts with respect to second direction.Back side 190c has a positive pitch angle with respect to second direction.The 3rd fixed component 185 contacts with the back side 190c of back-up block 190 so that towards second direction and third direction pushing back-up block 190.

The 4th support member 161 supports the second end 121b of each second probe 120 and second probe 120 is set to the each interval second spacing G12.Second support member 141 is placed in the containing groove 176.The 4th support member 161 is positioned on second support member 141 of containing groove 176.

The 4th support member 161 comprises fixed part 163 and support portion 166.In an illustrative embodiments, fixed part 163 can be the beam shape that is linear.Fixed part 163 has smooth end face 163a.Four point probe notch 165 is formed on the end face 163a place of fixed part 163 along second direction.Four point probe notch 165 can be along the first direction setting.In an illustrative embodiments, the number of four point probe notch 165 can with the number of second probe 120 about equally.Perhaps, the number of four point probe notch 165 can be greater than the number of second probe 120.

In an exemplary embodiment of the present invention, four point probe notch 165 can be set to each interval spacing G52, and the second spacing G12 of this spacing G52 and second probe 120 about equally.Perhaps, four point probe notch 165 can be set to each interval spacing G52, and this spacing G52 is slightly different with the second spacing G12 of second probe 120.The width W 54 of four point probe notch 165 can equal the width W 21 of second probe 120 substantially.Perhaps, the width W 54 of four point probe notch 165 can be slightly different with the width W 21 of second probe 120.The connecting portion 127 of second probe 120 inserts in the four point probe notch 165 respectively.In connecting portion 127 inserts four point probe notches 165 and when being set to second probe 120 on the fixed part 163, second probe 120 can automatically be set to the each interval second spacing G12.

The 4th aligned notches 167 is formed on the end face 163a place of fixed part 163 along second direction.The 167 contiguous outmost four point probe notch 165 ground settings of the 4th aligned notches.The 4th aligned notches 167 is configured to corresponding with the alignment pin (not shown).Alignment pin inserts respectively in the 4th aligned notches 167.Second support member 141 and the 4th support member 161, perhaps first support member 131, second support member 141, the 3rd support member 151 and the 4th support member 161 are aimed at by the alignment pin that inserts in the 4th aligned notches 167.

Second connecting rod 164 that combines with the second end 121b of second probe 120 is formed on the positive 163b place of fixed part 163.As shown in Figure 7, second connecting rod 164 is configured to corresponding with the shape of second fixed groove 123 of second probe 120.Therefore, second connecting rod 164 forms along first direction.When second fixed groove 123 was the square-section, the square-section of second connecting rod 164 can be roughly the same with the cross section of second fixed groove 123.In an illustrative embodiments, the height H 52 of second engagement groove 164 and the height H 14 of second fixed groove 123 are about equally.Perhaps, the height H 52 of second connecting rod 164 is slightly different with the height H 14 of second fixed groove 123.

Second connecting rod 164 inserts in second fixed groove 123 of second probe 120.Second connecting rod 164 can closely insert in second fixed groove 123 to prevent that second probe 120 from moving along first direction.

Support portion 166 is formed on the both sides of the bottom surface of fixed part 163.Support portion 166 is the beam shape, and its cross section is L shaped.Support portion 166 can be arranged on the both sides of the bottom surface of fixed part 163 with being mutually symmetrical.Comprise fixed part 163 and support portion 166 the 4th support member 161 width W 53 can with second width W 32 of containing groove 176 about equally.Perhaps, comprise that the width W 53 of the 4th support member 161 of fixed part 163 and support portion 166 can be slightly different with second width W 32 of containing groove 176.

Hereinafter describe a kind of method of making probe unit 100 with reference to the accompanying drawings in detail.

Figure 11 to 17 illustrates a kind of stereographic map and cut-open view of making the method for probe unit shown in Figure 2.

Combine with framework 170 with reference to Figure 11 and 12, the first supporting members 130.In an illustrative embodiments, first support member 131 can be placed on the maintainance block 173.Second support member 141 can be arranged on the first basal plane 176a of containing groove 176.Herein, first support member 131 and second support member 141 can be configured such that first engagement groove 136 of first support member 131 and second engagement groove 146 of second support member 141 face each other mutually.

Aligned with each other so that definite first support member 131 of the both sides 131d of first support member 131 and the both sides 173d of maintainance block 173 is with respect to the position of first direction.Second back side 131c of first support member 131 closely contacts with the end difference 173b of maintainance block 173 so that determine the position of first support member 131 with respect to second direction.After having determined first position of support member 131 with respect to first direction and second direction, first support member 131 is fixed on the maintainance block 173.

The width of second support member 141 can with the width of containing groove 176 about equally.Therefore, when second support member 141 inserted in the containing groove 176, second support member can not move along first direction.Therefore, can when inserting in the containing groove 176, second support member 141 determine the position of second support member 141 with respect to first direction.

First probe 110 is arranged on first support member 131 and second support member 141.Herein, first support member 131 supports the first end 111a of first probe 110, and second support member 141 supports the second end 111b of first probe 110.

With reference to Figure 13, first probe 110 combines with first support member 131.In an illustrative embodiments, the first end 111a of first probe 110 can insert respectively in first engagement groove 136 of first support member 131.Herein, the contact site 114 of first probe 110 can be positioned at the first probe notch 135 of first support member 131.

Because the height of the first end 111a of first probe 110 and the degree of depth of first engagement groove 136 are about equally, so the first end 111a can engage with first engagement groove 136.Therefore, first probe 110 can not move along first direction.

The first all probes 110 all combines with first support member 131 by said procedure.Therefore, the first end 111a of first probe 110 can be set to the each interval first spacing G11, as shown in Figure 3.

With reference to Figure 14 and 15, back-up block 190 is arranged on maintainance block 173 both sides.In an illustrative embodiments, back-up block 190 can be placed on the second basal plane 176b and the 3rd basal plane 176c of containing groove 176.Back-up block 190 is supported by the 3rd basal plane 176c, thereby the bottom surface 190b of back-up block 190 and the second basal plane 176b are spaced apart.

The 3rd fixed orifice 185a of the 3rd fixed component 185 insertion frameworks 170 is interior so that back-up block 190 is fastened on the framework 170.Herein, containing groove 176 is exposed in the end of the 3rd fixed component 185.The end of exposing of the 3rd fixed component 185 contacts with the back side 190c of back-up block 190.

The 3rd fixed component 185 makes back-up block 190 move so that the second basal plane 176b of containing groove 176 is contacted with the downstairs portion 193 of back-up block 190 along second direction.Therefore, back-up block 190 is determined with respect to the position of second direction.In addition, the 3rd fixed component 185 is along third direction pushing back-up block 190.When the bottom surface of back-up block 190 190b and the second basal plane 176b are spaced apart, can adjust the pitch angle of the end face 190a of back-up block 190 by the 3rd fixed component 185.

The 3rd support member 151 is arranged on the back-up block 190.Then, the 4th support member 161 is placed on second support member 141.Herein, the 3rd support member 151 and the 4th support member 161 are configured such that first fixed bar 154 of the 3rd support member 151 and second fixed bar 164 of the 4th support member 161 face each other mutually.

The 3rd support member 151 moves horizontally so that the 3rd support member 151 closely is connected to the last end difference 192 of back-up block 190.Therefore, the 3rd support member 151 is determined with respect to the position of second direction.

The both sides of the both sides of the 3rd support member 151 and back-up block 190 are aligned with each other to determine the position of the 3rd support member 151 along first direction.

Determining the 3rd support member 151 after the position of first direction and second direction, the 3rd support member 151 is fastened on the back-up block 190.

The 4th support member 161 inserts in the containing groove 176.Herein, the 4th support member 161 in the containing groove 176 can not move along first direction.Therefore, can when inserting in the containing groove 176, the 4th support member 161 determine the 4th position of support member 161 on first direction.Moreover the 4th aligned notches 167 of the 4th support member 161 can be along second aligned notches, 147 rough alignment of the second direction and second support member 141.

Second probe 120 is arranged on the 3rd support member 151 and the 4th support member 161.The 3rd support member 151 supports the first end 121a of second probe 120.In addition, the 4th support member 161 supports the second end 121b of second probe 120.

First connecting rod 154 of the 3rd support member 151 inserts in first fixed groove 122 of second probe 120.Especially, first connecting rod 154 is meshed with first fixed groove 122, thereby makes second probe 120 can not move along first direction.The contact site 124 of second probe 120 is positioned at the 3rd probe notch 155 of the 3rd support member 151.

The second all probes 120 all fits together by said procedure and the 3rd support member 151.Therefore, the first end 121a of second probe 120 is set to the each interval second spacing G12, as shown in Figure 3.In addition, the first end 121a of second probe 120 is set to spaced apart the 3rd spacing G13 with the first end 111a of first probe 110, as shown in Figure 3.

With reference to Figure 16, first fixed component 181 inserts in the framework 170 so that first probe 110 and second probe 120 are combined with the 3rd support member 151 and the 4th support member 161 respectively.

Containing groove 176 is exposed in the end of first fixed component 181.The end of exposing of first fixed component 181 contacts with the back side 141d of second support member 141.First fixed component 181 makes second support member 141 move so that the second positive 141c of second support member 141 closely is connected on the interface of the first basal plane 176a of containing groove 176 and the second basal plane 176b along second direction.

Therefore, first probe 110 combines with second support member 141, and second probe 120 combines with the 4th support member 161.Especially, the second end 111b of first probe 110 inserts in second engagement groove 146 of second support member 141.Second connecting rod 164 of the 4th support member 161 inserts in second fixed groove 123 of second probe 120.Herein, the connecting portion 117 of first probe 110 is positioned at the second probe notch 145 of second support member 141.Moreover the connecting portion 127 of second probe 120 is placed in the four point probe notch 165 of the 4th support member 161.

As shown in Figure 4, the second end 111b that is fixed to first probe 110 of second support member 141 is set to the each interval first spacing G11.In addition, the second end 121b that is fixed to second probe 120 of the 4th support member 161 is provided with the each interval second spacing G12.Moreover the second end 111b of first probe 110 is set to second end 121b interval the 3rd spacing G13 with second probe 120.

With reference to Figure 17, second fixed component 183 inserts in the second fixed orifice 183a of framework 170.Containing groove 176 is exposed in the end of second fixed component 183.The end of exposing of second fixed component 183 contacts with the side of the 4th support member 161.Second fixed component 183 pushes the 4th support member 161 so that fix second support member 141 and the 4th support member 161 along third direction.Thereby first probe 110 and second probe 120 are determined along the slope of second direction.In addition, the both sides of second fixed component, 183 pushings the 4th support member 161 are so that fix the 4th support member 161 along first direction.Herein, the 4th support member 161 can insert the degree of depth in the frameworks 170 and mobile a little along first direction according to second fixed component 183.Therefore, can the 4th aligned notches 167 of the 4th support member 161 be aimed at second aligned notches 147 of second support member 141 by moving the 4th support member 161 a little.

The 4th fixed component 187 inserts in the 4th fixed orifice 187a of framework 170.Containing groove 176 is exposed in the end of the 4th fixed component 187.The end of exposing of the 4th fixed component 187 contacts with the side of back-up block 190.The side of the 4th fixed component 187 pushing back-up blocks 190 is so that fix the 3rd support member 151 and back-up block 190 along first direction.Herein, can come to move the 3rd support member 151 and back-up block 190 a little according to the degree of depth that the 4th fixed component 187 inserts in the framework 170 along first direction.Therefore, can first aligned notches 137 of first support member 131 be aimed at the 3rd aligned notches 157 of the 3rd support member 151 by moving the 3rd support member 151 and back-up block 190 a little.

As mentioned above, first support member 131 and second support member 141 support first probe 110.The contact site 114 of first probe 110 is outstanding from first support member 131.The connecting portion 117 of first probe 110 is outstanding from second support member 141.The contact site 114 that exposes from first support member 131 contacts with the terminal of object.The connecting portion 117 that exposes from second support member 141 is electrically connected to integrated circuit.The 3rd support member 151 and the 4th support member 161 support second probe 120.The contact site 124 of second probe 120 is outstanding from the 3rd support member 151.The connecting portion 127 of second probe 120 is outstanding from the 4th support member 161.The contact site 124 that exposes from the 3rd support member 151 contacts with the terminal of object.The connecting portion 127 that exposes from the 4th support member 161 is electrically connected to integrated circuit.Herein, the contact site 114 of first probe 110 and

second probe

120 and 124 can be in the same plane substantially.In addition, the connecting portion 117 of first probe 110 and

second probe

120 and 127 can be in the same plane substantially.

As mentioned above, first probe 110 and second probe 120 are respectively fixed on first supporting member 130 and second supporting member 150, thereby win probe 110 and second probe 120 can not moved.In addition, first probe 110 is fastened on first supporting member 130 so that be set to the each interval first spacing G11.Second probe 120 is fixed on second supporting member 150 so that be set to the each interval second spacing G12.First probe 110 is set to separate the 3rd spacing G13 from second probe 120.In addition, can easily separate respectively by the first, second, third and the 4th fixed component 181,183,185 and 187, the first probes 110 and second probe 120 with first supporting member 130 and second supporting member 150.Therefore, can easily repair and change first probe 110 and second probe 120.Thus, first supporting member 130 and second supporting member 150 also can easily be repaired and be changed.

According to an illustrative embodiment of the invention, first probe 110 and second probe 120 can quick, convenient, accurately be set.In addition, first probe 110 and second probe 120 can have narrow spacing.Moreover probe unit 100 of the present invention is easy to repair.

Figure 18 illustrates the stereographic map of probe unit according to an illustrative embodiment of the invention, and Figure 19 is the amplification stereogram of " C " part among Figure 18.Figure 20 is the amplification stereogram of " D " part among Figure 18, and Figure 21 illustrates the exploded perspective view of probe unit shown in Figure 180.

With reference to Figure 18 to Figure 21, probe unit 200 comprises first probe 110 shown in Figure 6 and second probe shown in Figure 7.Therefore, for the purpose of concise and to the point, omitted the label of the element that refers to first probe 110 and second probe 120 herein.In addition, for the purpose of concise and to the point, also omitted any further instruction herein about the element of first probe 110 and second probe 120.

Probe unit 200 comprises first probe, 110, the second probes, 120, the first supporting members, 230, the second supporting members 250, framework 270, the first fixed components 281, the second fixed components 283, the three fixed components 285, the four fixed components 287, and back-up block 290.First supporting member 230 comprises first support member 231 and second support member 241.Second supporting member 250 comprises first support member 251 and second support member 261.

First support member 231 and second support member 241 are arranged on the framework 270.The first probe notch 235 and first aligned notches 237 are formed on the surface element place of first support member 231 along first direction.In an illustrative embodiments, the first probe notch, 235 each intervals, the first spacing G21.The second probe notch 245 and second aligned notches 247 can be formed on the surface element place of second support member 241 along first direction.In an illustrative embodiments, the second probe notch 245, the first spacing G21 that can separate each other.

First probe 110 inserts in first support member 231 and second support member 241.In an illustrative embodiments, an end of each first probe 110 can insert in each first probe notch 235.The other end of each first probe 110 can insert in each second probe notch 245.Therefore, first probe 110 can be set to the each interval first spacing G11.Herein, the first spacing G11 can determine according to the spacing between the terminal of object.

Back-up block 290 is arranged on the both sides of first support member 231.Back-up block 290 is fixed to framework 270 by the 3rd fixed component 285.The 3rd support member 251 is arranged on the back-up block 290.The 4th support member 261 is positioned on second support member 241.

The 3rd probe notch 255 and the 3rd aligned notches 257 are formed on the surface element place of the 3rd support member 251 along first direction.In an illustrative embodiments, but the 3rd probe notch 255 each intervals second spacing G22.Four point probe notch 265 and the 4th aligned notches 267 are formed on the surface element place of the 4th support member 261 along first direction.In an illustrative embodiments, but the four point probe notch 265 each intervals second spacing G22.

The 3rd support member 251 is aimed at first support member 231.Additionally, the 4th support member 261 is aimed at respect to second support member 241.

Second probe 120 inserts in the 3rd support member 251 and the 4th support member 261.In an illustrative embodiments, an end of each second probe 120 can insert in each the 3rd probe notch 255.The other end of each second probe 120 can insert in each four point probe notch 265.Therefore, but second probe, 120 each intervals, the second spacing G22.Herein, the second spacing G22 can determine according to the spacing of the terminal on the object.The second spacing G22 between second probe 120 can and first probe 110 between the first spacing G21 about equally.

Second support member 241 and the 4th support member 261 are fixed to framework 270 by first fixed component 281 and second fixed component 283.Simultaneously, second support member 241 and the 4th support member 261 can be respectively fixed to first probe 110 and second probe 120.

Hereinafter describe the said elements in the probe unit 200 with reference to the accompanying drawings in detail.

Figure 22 illustrates the stereographic map of the framework of probe unit shown in Figure 180.

With reference to Figure 22, framework 270 can rectangular parallelepiped shape, and it has first width W 61, first length L 61 and first height H 61.Framework 270 comprises first basal plane 271 and second basal plane 275.First basal plane 271 is set to than second basal plane, 275 low first depth D 61.First basal plane 271 and second basal plane 275 have

smooth end face

271a and 275a respectively.

First containing groove 276 is formed on the end face 275a place of second basal plane 275.First containing groove 276 is towards first direction and second direction opening.First containing groove 276 has second width W 62, second length L 62 and second depth D 62.Second width W 62 of first containing groove 276 can with the width of second back-up block 241 about equally.Sidewall 272 can be along the both sides that vertically are arranged on first containing groove 276.Second depth D 62 can far be deeper than first depth D 61.Therefore, end difference 275b is formed between first containing groove 276 and first basal plane 271.Second support member 241 and the 4th support member 261 are arranged in first containing groove 276.

The opening 278 that links with first containing groove 276 is formed on the end face 275a place of second basal plane 275.The 3rd width W 63 of opening 278 can far be narrower than second width W 62 of first containing groove 276.Opening 278 runs through second basal plane, 275 ground along the third direction with first direction and second direction approximate vertical and forms.Integrated circuit such as TCP can be arranged in the opening 278.

Maintainance block 273 is formed on first basal plane 271 of framework 270.The 4th width W 64 of maintainance block 273 can be narrower than second width W 62 of first containing groove 276.Maintainance block 273 is positioned at the front portion of framework 270.The side of the maintainance block 273 and first basal plane 271 is spaced apart.In an illustrative embodiments, between the side of maintainance block 273 and the spacing between the sidewall 272 can be equal to each other substantially.Therefore, the end face 271a of first basal plane 271 can be exposed to maintainance block 273.

The end face 271a ground that the 3rd fixed orifice 285a runs through first basal plane 271 that is exposed to maintainance block 273 forms.The 3rd fixed orifice 285a is used for back-up block 290 is fixed to first basal plane 271.Maintainance block 273 can have the end face 273a that is positioned at horizontal plane, and the end face 275a of second basal plane 275 is arranged on this horizontal plane.

Second containing groove 277 is formed on the end face 273a place of maintainance block 273.The 5th width W 65 of second containing groove 277 can with the width of first support member 231 about equally.Second containing groove 277 is configured to corresponding with the shape of first support member, 231 bottoms.First support member 231 is arranged in second containing groove 277.

Maintainance block 273 has the back side 273c of inclination.In an illustrative embodiments, the inclination alpha 6 of back side 273c can with first inclination alpha 1 of first probe 110 about equally.The first fixed orifice 281a and the second fixed orifice 283a run through framework 270 ground and form.The first fixed orifice 281a and the second fixed orifice 283a and first containing groove 276 link.

The first fixed orifice 281a forms the first inwall 276d that extends to first containing groove 276 from the side of framework 270.In an illustrative embodiments, the first fixed orifice 281a can tilt with respect to first direction.That is to say that the first fixed orifice 281a can be arranged in the plane of being determined by first direction and second direction along oblique.The first fixed orifice 281a can be provided with symmetrically with respect to an axis that extends along second direction.

First fixed component 281 inserts respectively in the first fixed orifice 281a.One end of each first fixed component 281 exposes first containing groove 276.First fixed component 281 contacts so that push second support member 241 along second direction with the back side of second support member 241.

The contiguous first fixed orifice 281a ground of the second fixed orifice 283a is provided with.The second fixed orifice 283a forms the sidewall 272 that runs through framework 270.In an illustrative embodiments, the second fixed orifice 283a can be symmetrical arranged with respect to the axis that extends along second direction.

Second fixed component 283 inserts respectively in the second fixed orifice 283a.One end of each second fixed component 283 exposes first containing groove 276.Second fixed component 283 contacts so that push the 4th support member 261 along first direction and third direction with two sides of the 4th support member 261.

As shown in figure 21, the 4th fixed orifice 287a forms the bottom surface 270b that passes framework 270.The 4th fixed orifice 287a and the first fixed orifice 281a link.In an illustrative embodiments, the 4th fixed orifice 287a can form and pass framework 270 vertically.

The 4th fixed component 287 inserts respectively in the 4th fixed orifice 287a.First fixed component 281 in the end of the 4th fixed component 287 and the first fixed orifice 281a contacts to prevent that first fixed component 281 from unclamping from the first fixed orifice 281a.The 5th fixed orifice 289a forms the bottom surface 270b that passes framework 270.The 5th fixed component (not shown) can insert respectively in the 5th fixed orifice 289a.The 5th fixed component is fastened to the sway brace (not shown) with framework 270, and this sway brace is used for probe unit 200 is fixed to the pedestal (not shown).In an illustrative embodiments, other fixed orifice can form and pass framework 270.

Figure 23 illustrates first support member of first supporting member shown in Figure 180 and the stereographic map of second support member.

With reference to Figure 18 and Figure 23, first supporting member 230 comprises first support member 231 and second support member 241.

First support member 231 supports the first end 111a of each first probe 110 so that first probe 110 is set to the each interval first spacing G21.First support member 231 is placed on second containing groove 277 of maintainance block 273.

In an illustrative embodiments, first support member 231 can comprise that the cross section is L shaped beam.The width W 71 of first support member 231 can with the 5th width W 65 of second containing groove 277 about equally.

First support member 231 has the end face 231a of inclination.The inclination alpha 7 of end face 231a can with second inclination alpha 2 of first probe 110 about equally.

The first probe notch 235 is formed on the end face 231a and the 231b place, first back side of first support member 231 along second direction.The first probe notch 235 is along the first direction setting.In an illustrative embodiments, the number of the first probe notch 235 can with the number of first probe 110 about equally.The first probe notch 235 can be set to each interval spacing G71, and the first spacing G21 of this spacing G71 and first probe 110 about equally.The width W 72 of the first probe notch 235 can with the width W 11 of first probe 110 about equally.The contact site 114 of first probe 110 inserts respectively in the first probe notch 235.

In contact site 114 inserts the first probe notch 235 and when being arranged on first probe 110 on first support member 231, first probe 110 automatically is set to the each interval first spacing G21.

First aligned notches 237 is formed on the end face 231a and the 231b place, first back side of first support member 231 along second direction.The 237 contiguous outmost first probe notch 235 ground settings of first aligned notches.First aligned notches 237 is configured to corresponding with the alignment pin (not shown).

In an exemplary embodiment of the present invention, long recess 232 can be formed on the end face 231a place of first support member 231 along first direction.Herein, two ranked first probe notch 235 and two and ranked first the end face 231a place that aligned notches 237 can be formed on first support member 231.

First engagement groove 236 that is used for the first end 111a of ccontaining each first probe 110 is formed on the 231b place, first back side of first support member 231.First engagement groove 236 is configured to the shape corresponding to the first end 111a of first probe 110 shown in Figure 6.First engagement groove 236 forms along first direction.In an illustrative embodiments, the height H 71 of first engagement groove 236 can with the height H 11 of the first end 111a of first probe 110 about equally.

The first end 111a of first probe 110 inserts in first engagement groove 236.Especially, the first end 111a can closely insert in first engagement groove 236 to stop first probe 110 to move along first direction.

Second support member 241 supports the second end 111b of each first probe 110 so that first probe 110 is set to the each interval first spacing G21.Second support member 241 is placed in first containing groove 276.

In an exemplary embodiment of the present invention, second support member 241 can comprise that the cross section is L shaped beam.The width W 73 of second support member 241 can with second width W 62 of first containing groove 276 about equally.The height H 72 of second support member 241 can with first depth D 62 of first containing groove 276 about equally.

Second support member 241 has smooth end face 241a.The second probe notch 245 is formed on the end face 241a place of second support member 241 along second direction.The second probe notch 245 is along the first direction setting.In an illustrative embodiments, the number of the second probe notch 245 can with the number of first probe 110 about equally.

In an exemplary embodiment of the present invention, the second probe notch 245 can be set to each interval spacing G72, and the first spacing G21 of this spacing G72 and first probe 110 about equally.The width W 74 of the second probe notch 245 can with the width W 11 of first probe 110 about equally.The connecting portion 117 of first probe 110 inserts respectively in the second probe notch 245.

In connecting portion 117 inserts the second probe notch 245 and when being set to first probe 110 on second support member 241, first probe 110 can automatically be set to the each interval first spacing G21.

Second aligned notches 247 is formed on the end face 241a place of second support member 241 along second direction.The 247 contiguous outmost second probe notch 245 ground settings of second aligned notches.Second aligned notches 247 is configured to corresponding with the alignment pin (not shown).

In an exemplary embodiment of the present invention, long recess 242 can be formed on the end face 241a place of second support member 241 along first direction.Herein, two ranked second probe notch 245 and two and ranked second the end face 241a place that aligned notches 247 can be formed on second support member 241.

Second engagement groove 246 that is used for the second end 111b of ccontaining each first probe 110 is formed on the positive 241b place of second support member 241.Second engagement groove 246 is configured to the shape corresponding to the second end 111b of first probe 110 shown in Figure 6.Second engagement groove 246 forms along first direction.In an illustrative embodiments, the height H 73 of second engagement groove 246 can with the height H 12 of the second end 111b of first probe 110 about equally.

The second end 111b of first probe 110 inserts in second engagement groove 246.Especially, the second end 111b can closely insert in second engagement groove 246 to stop first probe 110 to move along first direction.

Figure 24 illustrates the 3rd support member of second supporting member shown in Figure 180 and the stereographic map of the 4th support member.

Comprise the 3rd support member 251 and the 4th support member 261 with reference to Figure 18 and 24, the second supporting members 250.

The 3rd support member 251 supports the first end 121a of each second probe 120 so that second probe 120 is set to the each interval second spacing G22.The 3rd support member 251 is placed on the back-up block 290.

In an exemplary embodiment of the present invention, the 3rd support member 251 can comprise the beam shape that is linear.The width W 81 of the 3rd support member 251 can with first width W 61 of framework 270 about equally.

The 3rd support member 251 has smooth end face 251a.The 3rd probe notch 255 is formed on the end face 251a place of the 3rd support member 251 along second direction.The 3rd probe notch 255 is along the first direction setting.

In an exemplary embodiment of the present invention, the number of the 3rd probe notch 255 can with the number of second probe 120 about equally.The 3rd probe notch 255 can be set to each interval spacing G81, and the second spacing G22 of this spacing G81 and second probe 120 about equally.The width W 82 of the 3rd probe notch 255 can with the width W 21 of second probe 120 about equally.The contact site 124 of second probe 120 can insert respectively in the 3rd probe notch 255.

In contact site 124 inserts the 3rd probe notch 255 and when being set to second probe 120 on the 3rd support member 251, second probe 120 automatically is set to the each interval second spacing G22.

The 3rd aligned notches 257 is formed on the end face 251a place of the 3rd support member 251 along second direction.257 contiguous outmost the 3rd probe notch 255 ground settings of the 3rd aligned notches.The 3rd aligned notches 257 is configured to corresponding with the alignment pin (not shown).

In an exemplary embodiment of the present invention, long recess 252 can be formed on the end face 251a place of the 3rd support member 251 along first direction.Herein, two ranked third probe notch 255 and two and ranked third the end face 251a place that aligned notches 267 can be formed on the 3rd support member 251.

First connecting rod 254 that combines with the first end 121a of second probe 120 is formed on the 251b place, the back side of the 3rd support member 251.As shown in Figure 7, first connecting rod 254 is configured to the shape corresponding to first fixed groove 122 of second probe 120.Thereby first connecting rod 254 forms along first direction ground.In an illustrative embodiments, the height H 81 of first connecting rod 254 can with the height H 13 of first fixed groove 122 about equally.

First connecting rod 254 inserts in first fixed groove 122 of second probe 120.First connecting rod 254 can closely insert in first fixed groove 122 to prevent that second probe 120 from moving along first direction.

Claw 256 is formed on the place, two edges of the bottom surface of the 3rd support member 251.In an illustrative embodiments, the width W 86 of claw 256 can with the width W 85 of back-up block 290 about equally.

As mentioned above, the 3rd support member 251 can be arranged on the back-up block 290 by claw 256.

Back-up block 290 is arranged on the both sides of maintainance block 273 of framework 270 to support the 3rd support member 251.Opening 295 forms and passes back-up block 290 vertically.Second hole that opening 295 comprises from first hole that the end face 290a of back-up block 290 forms and forms from the bottom surface in first hole.At this, first diameter in first hole can be greater than second diameter in second hole.Thereby the opening 285 with end difference can run through back-up block 290 ground and form.

The 3rd fixed component 285 inserts in the opening 295.Then, the 3rd fixed component 285 inserts in the 3rd fixed orifice 285a of framework 270.Herein, the head of the 3rd fixed component 285 can closely contact so that back-up block 290 is fixed to framework 270 with the end difference of opening 295.

The 4th support member 261 supports the second end 121b of each second probe 120 and second probe is set to the each interval second spacing G22.The 4th support member 261 is arranged on second support member 241 in first containing groove 276.

The 4th support member 261 comprises fixed part 263 and support portion 266.In an illustrative embodiments, fixed part 263 can be linear beam shape.Fixed part 263 has smooth end face 263a.Four point probe notch 265 is formed on the end face 263a place of fixed part 263 along second direction.Four point probe notch 265 is along the first direction setting.

In an exemplary embodiment of the present invention, the number of the number of four point probe notch 265 and second probe 120 about equally.Four point probe notch 265 can be set to each interval spacing G82, and the second spacing G22 of this spacing G82 and second probe 120 about equally.The width W 84 of four point probe notch 265 can with the width W 21 of second probe 120 about equally.The connecting portion 127 of second probe 120 can insert in the four point probe notch 265 respectively.

Thereby when being fixed to second probe 120 on the fixed part 263 in the connecting portion 127 insertion four point probe notches 265, second probe 120 can automatically be set to the each interval second spacing G22.

The 4th aligned notches 267 is formed on the end face 263a place of fixed part 263 along second direction.The 265 ground settings of the 4th aligned notches 267 contiguous outermost four point probe notches.The 4th aligned notches 267 can be configured to corresponding with the alignment pin (not shown).

Second connecting rod 264 that combines with the second end 121b of second probe 120 is formed on the positive 263b place of fixed part 263.As shown in figure 24, second connecting rod 264 is configured to the shape corresponding to second fixed groove 123 of second probe 120.Therefore, second connecting rod 264 forms along first direction.In an illustrative embodiments, the height H 82 of second connecting rod 264 can with the height H 14 of second fixed groove 123 about equally.

Second connecting rod 264 inserts in second fixed groove 123 of second probe 120.Herein, second connecting rod 264 can closely insert in second fixed groove 123 to prevent that second probe 120 from moving along first direction.

Support portion 266 is formed on two edges of fixed part 263 bottom surfaces.Support portion 266 is arranged on two edges of fixed part 263 bottom surfaces with being mutually symmetrical.Support portion 266 can have the side 266a with respect to the first direction inclination.In an illustrative embodiments, the oblique angle of side 266a with respect to first direction can on the occasion of.Thereby second fixed component 283 can contact with side 266a and push the 4th support member 261 along first direction and third direction.

Include fixed part 263 and support portion 266 the 4th support member 261 width W 83 can with second width W 62 of first containing groove 276 about equally.

Hereinafter describe a kind of method of making probe unit 200 with reference to the accompanying drawings in detail.

Figure 25 to 31 illustrates a kind of stereographic map and cut-open view of making the method for probe unit shown in Figure 180.

Be arranged on the framework 270 with reference to Figure 25 and 26, the first support members 231 and second support member 241.In an illustrative embodiments, second support member 241 can be placed in first containing groove 276, and first support member 231 is arranged in second storage tank 277.Herein, first support member 231 and second support member 241 can be configured such that first engagement groove 236 of first support member 231 and second engagement groove 246 of second support member 241 face each other mutually.

When first support member 231 inserted in second containing groove 277, first support member 231 can not move along first direction.That is to say that when first support member 231 inserted second containing groove 277, first support member 231 was determined with respect to the position of first direction.First support member 231 can closely contact with the end difference 273b of second containing groove 277, thereby determines the position of first support member 231 with respect to second direction.After having determined first position of support member 231 with respect to first direction and second direction, first support member 231 can be fixed in second containing groove 277.

When second support member 241 inserted first containing groove 276, second support member 241 was determined with respect to the position of first direction.

First probe 110 is arranged on first support member 231 and second support member 241.Herein, first support member 231 supports the first end 111a of first probe 110, and second support member 241 supports the second end 111b of first probe 110.

With reference to Figure 27, first probe 110 combines with first support member 231.

In an exemplary embodiment of the present invention, the first end 111a of first probe 110 can insert respectively in first engagement groove 236 of first support member 231.Herein, the contact site 114 of first probe 110 can be positioned at the first probe notch 235 of first support member 231.The first end 111a of first probe 110 engages with first engagement groove 236.Therefore, first probe 110 can not move along first direction.

The first all probes 110 can combine with first support member 231 by said procedure.Therefore, the first end 111a of first probe 110 is set to the each interval first spacing G21, as shown in figure 19.

With reference to Figure 28, back-up block 290 is arranged on the both sides of maintainance block 273.The 3rd fixed component 285 inserts in the 3rd fixed orifice 285a of framework 270, so that back-up block 290 is fastened to framework 270.

The 3rd support member 251 is placed on the back-up block 290.Then, the 4th support member 261 is arranged on second support member 241.Herein, the 3rd support member 251 and the 4th support member 261 are configured such that first connecting rod 254 of the 3rd support member 251 and second connecting rod 264 of the 4th support member 261 face each other mutually.

Thereby the 3rd support member 251 moves horizontally and makes the closely last end difference 290b of contact back-up block 290 of the 3rd support member 251.Therefore, the 3rd support member 251 is determined with respect to the position of second direction.

The 3rd support member 251 is aimed at respect to first support member 231.In this case, first aligned notches 237 of the 3rd aligned notches 257 of the 3rd support member 251 and first support member 231 is aimed at along second direction.Thereby the 3rd support member 251 is determined with respect to the position of first direction.

After having determined the 3rd position of support member 251 with respect to first direction and second direction, the 3rd support member 251 has been fixed to the end face of back-up block 290.

The 4th support member 261 inserts in first containing groove 276.Herein, the 4th support member 261 in first containing groove 276 can not move along first direction.Therefore, when the 4th support member 261 inserted first containing groove 276, the 4th support member 261 was determined along the position of first direction.In addition, the 4th aligned notches 267 of the 4th support member 261 can be along second aligned notches, 247 rough alignment of the second direction and second support member 241.

With reference to Figure 29, second probe 120 is arranged on the 3rd support member 251 and the 4th support member 261.The 3rd support member 251 supports the first end 121a of second probe 120.The 4th support member 261 supports the second end 121b of second probe 120.

With reference to Figure 30, second probe 120 is fixed to the 3rd support member 251.

In an exemplary embodiment of the present invention, first connecting rod 254 of the 3rd support member 251 can insert in first fixed groove 122 of second probe 120.Second probe 120 can not move along first direction.The contact site 124 of second probe 120 can be arranged in the 3rd probe notch 255 of the 3rd support member 251.

The second all probes 120 all are assembled into the 3rd support member 251 by said procedure.Therefore, the first end 121a of second probe 120 is set to the each interval second spacing G22, as shown in figure 19.The first end 121a of second probe 120 is set to first end 111a interval the 3rd spacing G23 with first probe 110, as shown in figure 19.

With reference to Figure 31, first fixed component 281, second fixed component 283 and the 4th fixed component 287 insert in the framework 270, so that first probe 110 and second probe 120 are fixed firmly to framework 270.

In an exemplary embodiment of the present invention, first fixed component 281 can insert in the first fixed orifice 281a of framework 270.First containing groove 276 is exposed in the end of first fixed component 281.The end of exposing of first fixed component 281 contacts with the back side 241c of second support member 241.First fixed component 281 can make second support member 241 move along second direction, thereby second support member 241 is closely contacted with the end difference 275b of first containing groove 276.The 4th support member 261 on second support member 241 can move with second support member 241, thereby the 4th support member 261 also can contact with the end difference 275b of first containing groove 276.Thereby first probe 110 can combine with second support member 241, and second probe 120 can combine with the 4th support member 261.Especially, the second end 111b of first probe 110 can insert in second engagement groove 246 of second support member 241.In addition, second connecting rod 264 of the 4th support member 261 can insert in second fixed groove 123 of second probe 120.Herein, the connecting portion 117 of first probe 110 can be positioned at the second probe notch 245 of second support member 241.The connecting portion 127 of second probe 120 can be placed in the four point probe notch 265 of the 4th support member 261.

In order to prevent that first fixed component 281 from unclamping from the first fixed orifice 281a, can extraly the 4th fixed component 287 be inserted in the 4th fixed orifice 287a.The 4th fixed component 287 contacts with first fixed component 281, thereby limits moving of first fixed component 281.

Second fixed component 283 inserts in the second fixed orifice 283a of framework 270.Second containing groove 277 is exposed in the end of second fixed component 283.The end of exposing of second fixed component 283 contacts with the side of the 4th support member 261.Second fixed component 283 pushes the 4th support member 261 along third direction, so that fix second support member 241 and the 4th support member 261.Therefore, first probe 110 and the slope of second probe 120 on second direction are determined.

Along in first probe 110 and second probe 120 that have the alignment gradient on the second direction, connecting

portion

117 and 127 end are positioned at same plane substantially.In addition,

contact site

114 and 124 end also are positioned at same plane substantially.Therefore, the integrated circuit such as TCP can be connected to connecting

portion

117 and 127

easily.Contact site

114 and 124 can easily contact with the terminal of object.

Two sides of second fixed component, 283 pushings the 4th support member 261, thus the 4th support member 261 fixed along first direction.Herein, the 4th support member 261 can be mobile slightly along first direction according to the degree of depth of second fixed component, 283 insertion frameworks 270.Therefore, can the 4th aligned notches 267 of the 4th support member 261 be aimed at second aligned notches 247 of second support member 241 by moving the 4th support member 261 slightly.

As mentioned above, first probe 110 and second probe 120 are respectively fixed to first supporting member 230 and second supporting member 250, thereby win probe 110 and second probe 120 can not moved along first, second and third direction.In addition, first probe 110 is fastened to first supporting member 230, so that be set to the each interval first spacing G21.Second probe 120 is fixed to second supporting member 250, so that be set to the each interval second spacing G22.First probe 110 is set to and second probe, 120 intervals the 3rd spacing G23.Moreover, can separate easily with first supporting member 230 and second supporting member 250 respectively by first fixed component 281, second fixed component 283, the 3rd fixed component 285 and the 4th fixed component 287, the first probes 110 and second probe 120.Therefore, first probe 110 and second probe 120 can easily keep in repair and change.Thereby first supporting member 230 and second supporting member 250 also can easily keep in repair and change.

According to an illustrative embodiment of the invention, first probe 110 and second probe 120 can quick, convenient, accurately be set.In addition, first probe 110 and second probe 120 can have narrow spacing, and probe unit of the present invention 200 can easily keep in repair.

Figure 32 illustrates the side view of sniffer according to an illustrative embodiment of the invention, and Figure 33 illustrates the stereographic map of the probe unit of sniffer shown in Figure 32.

With reference to Figure 32 and 33, sniffer 300 comprises probe unit shown in Figure 2 100.Therefore, identical label refers to the similar elements in the probe unit 100.In addition, for the purpose of concise and to the point, omitted further instruction herein about similar elements.Sniffer 300 comprises housing 310, stand 330, probe unit 100 and test cell (not shown).

Housing 310 is corresponding to the appearance of sniffer 300.Housing 310 has the space of ccontaining stand 330, probe unit 100 and test cell.

Transparent baffle 315 is arranged on the front portion of housing 310.Transparent baffle 315 opening and closing housings 310.Because baffle plate 315 comprises transparent material, so can pass the inside that transparent baffle 315 is observed housing 310 from the outside.

The object 301 that stand 330 supports such as display board.Stand 330 is arranged in the housing 310.The size of stand 330 can be corresponding to the size of object 301.For example, object 301 can have several inches sizes to the hundreds of inch scope.Therefore, stand 330 can have corresponding to several inches of object 301 sizes to the hundreds of inch scope.

In an exemplary embodiment of the present invention, in order to reduce the space that stand 330 is set, stand 330 tiltable settings.Perhaps, but stand 330 levels or vertically be provided with.

Be used for moving 330 driver element (not shown) and be connected to stand 330.Driver element vertically moves stand 330 with horizontal direction.Driver element also makes stand 330 tilt.Driver element is loaded into object 301 in the housing 310.After testing object 301, driver element draws off object 301 again in housing 310.Herein, driver element can comprise known mechanical arm, motor, cylinder etc.Therefore, for the purpose of concise and to the point, omitted any further instruction herein about driver element.

Probe unit 100 is arranged on around the neighboring area that is arranged in the object 301 on the stand 330 that is moved to test position.Probe unit 100 is installed to plate 325, and this plate 352 is fixed to the inwall of housing 310.In an illustrative embodiments, probe unit 100 can be installed on the plate 325 by retainer 320.

Retainer 320 is fastened to plate 325 with probe unit 100.Retainer 320 supports probe unit 100, so that make first probe 110 and second probe, 120 definite object things 301.

A plurality of retainers 320 can be installed on the plate 325.Therefore, a plurality of probe units 100 can maintain by retainer 320 respectively.The number of retainer 320 and probe unit 100 can be determined according to the number of the terminal module 305 of object 301.

Object 301 has terminal module 305.Terminal module 305 has a plurality of terminals 306.Terminal 306 is set to the uniform spacing of each interval.For example, the spacing between the terminal 306 can be less than about 25 microns.

First probe 110 and second probe 120 contact with terminal 306.For first probe 110 is accurately contacted with terminal 306 with second probe 120, the spacing between first probe 110 and second probe 120 can equal the spacing between the terminal 306 substantially.

As mentioned above, the gap variable ground between first probe 110 and second probe 120 is regulated.Therefore, how many spacings between the tube terminal 306 is not, and the sniffer 300 of illustrative embodiments can both be tested object 301.

Probe unit 100 is electrically connected to test cell.Test cell is electrically connected to probe unit 100 by the circuit board such as TCP.Whether normally test cell provides electric signal for first probe 110 and second probe 120, so that check object 301 operation.Herein, because test cell is known for a person skilled in the art, so repeat no more further instruction herein about test cell.

In an exemplary embodiment of the present invention, probe unit 100 has first probe 110 and second probe 120.Perhaps, though do not draw among the figure, probe unit 100 can have single probe.For example, single type probe unit 100 can comprise first probe 110 or second probe 120.In addition, probe unit 100 can comprise three kinds of probes.For example, probe unit 100 can comprise the 3rd probe except that first probe 110 and second probe 120.

Though above-mentioned various illustrative embodiments is not shown among the figure, those skilled in the art is easy to just can understand above-mentioned various illustrative embodiments.

According to the present invention, probe can be provided with on little spacing ground.In addition, be easy to just can regulate spacing between the probe.Therefore, no matter how many spacings between the terminal is, all available probe unit is the test target thing accurately.Moreover probe unit can be fast and is easily made and repair.Thereby, can test object effectively by described probe unit with high capacity and high integration.

Above-mentioned is that it is not construed as limiting the invention to explanation of the present invention.Though described several exemplary embodiment of the present invention, but what those skilled in the art will readily understand is: substantially do not depart under the situation of novel teachings of the present invention and advantage, can make many remodeling of this illustrative embodiments.Correspondingly, all suchlike remodeling will be included within the present invention such as the determined protection domain of claim.In the claims, the statement that device adds function is intended to cover all structures of carrying out function described herein, and just structural equivalence does not also comprise structure of equal value.Therefore; should be understood that; above-mentioned is to explanation of the present invention, can not be interpreted as that the present invention only limits to disclosed embodiment, and the protection domain of appended claim is intended to comprise disclosed specific implementations and modification and other embodiment.The present invention is determined by following claim, has comprised the claim that is equal to simultaneously.

Claims

1. probe unit comprises:

First probe, it is spaced apart from each other along first direction, and the longitudinally of each first probe is along the second direction setting vertical with described first direction;

Second probe, it is spaced apart from each other along first direction, and described second probe is arranged on described first probe top and between described first probe, the longitudinally of each second probe is along described second direction setting;

First supporting member, it is used to support the two ends of each described first probe;

Second supporting member, it is arranged on described first supporting member to support the two ends of each described second probe;

Framework, it is used to support described first supporting member and described second supporting member;

First fixed component, it is used for pushing described first supporting member and described second supporting member along described second direction, thereby described first supporting member and described second supporting member are fixed to described framework; And

Second fixed component, it is used for along pushing described first supporting member and described second supporting member with the described first direction third direction vertical with described second direction, thereby described first supporting member and described second supporting member are fixed to described framework.

2. probe unit as claimed in claim 1, wherein, described first supporting member comprises: first support member, described first support member is used to support first end of each described first probe; And second support member, described second support member is used to support each described first probe and the described first end second opposed end, and

Described second supporting member comprises: the 3rd support member, described the 3rd support member are arranged on described first support member to support first end of each described second probe; And the 4th support member, its be arranged on described second support member with support each described second probe with this first end second opposed end.

3. probe unit as claimed in claim 2, wherein, the first probe slot interruption-forming of described first end that is used for ccontaining each described first probe is in the surface of described first support member,

The second probe slot interruption-forming of described second end that is used for ccontaining each described first probe is in the surface of described second support member,

The 3rd probe slot interruption-forming of described first end that is used for ccontaining each described second probe is in the surface of described the 3rd support member, and

The four point probe notch that is used for described second end of ccontaining each described second probe is formed on the surface of described the 4th support member.

4. probe unit as claimed in claim 2, wherein, containing groove is formed on the end face place of described framework, and the width of described containing groove is narrower than the width of described framework and described containing groove and extends back from the front of described framework, and

Be formed on the place, bottom surface of described containing groove along the end difference up of described second direction.

5. probe unit as claimed in claim 4, wherein, the described bottom surface of described containing groove comprises first basal plane, be positioned at second basal plane on described first basal plane and be positioned at the 3rd basal plane on described second basal plane, and

Described framework comprises further and being arranged between described second basal plane and described the 3rd basal plane to maintain the maintainance block of described first support member that the width of described maintainance block is narrower than the width of described containing groove.

6. probe unit as claimed in claim 5, wherein, described framework further comprises the both sides that the are arranged on described maintainance block back-up block with the two ends of supporting described the 3rd support member.

7. probe unit as claimed in claim 6, wherein further comprise be fixed to described framework and with contacted the 3rd fixed component in the back side of described back-up block, described the 3rd fixed component makes described back-up block closely contact with the interface of described second basal plane and described the 3rd basal plane.

8. probe unit as claimed in claim 7, wherein, the fixed orifice that tilts with respect to described first direction is formed on the place, two sides of described framework, and described the 3rd fixed component inserts respectively in the described fixed orifice.

9. probe unit as claimed in claim 8 wherein, tilts with the back side of the contacted described back-up block of described the 3rd fixed component.

10. probe unit as claimed in claim 6, wherein further comprise be fixed to described framework and with contacted the 3rd fixed component in two sides of described the 3rd support member, described the 3rd fixed component makes described the 3rd support member that is positioned on the described back-up block mobile slightly along described first direction.

11. probe unit as claimed in claim 5, wherein, described second support member is arranged on described first basal plane, and described the 4th support member is arranged on described second support member.

12. probe unit as claimed in claim 2, wherein, first engagement groove that is used for described first end of ccontaining described first probe is located along the back side that described first direction is formed on described first support member, and

Second engagement groove that is used for described second end of ccontaining described first probe is formed on the place, front that the back side with described first support member of described second support member faces mutually along described first direction.

13. probe unit as claimed in claim 2, wherein, described the 3rd support member comprises connecting rod, and described connecting rod is sentenced described first end of ccontaining described second probe along the back side that described first direction is formed on described the 3rd support member.

14. probe unit as claimed in claim 13, wherein, the fixed groove that is used for ccontaining described connecting rod is formed on the described first end place of each described second probe.

15. probe unit as claimed in claim 2, wherein, described the 4th support member comprises connecting rod, and described connecting rod is sentenced described second end of ccontaining described second probe along the front that first direction is formed on described the 4th support member.

16. probe unit as claimed in claim 15, wherein, the fixed groove that is used for ccontaining described connecting rod is formed on the described second end place of each described second probe.

17. probe unit as claimed in claim 2, wherein, the end face of described framework comprises first basal plane and is higher than second basal plane of described first basal plane, and

Described framework comprises further and being arranged on described first basal plane to maintain the maintainance block of described first support member that the width of described maintainance block is narrower than the width of described framework.

18. probe unit as claimed in claim 17, wherein, described framework further comprises the both sides that the are arranged on described maintainance block back-up block with the two ends of supporting described the 3rd support member.

19. probe unit as claimed in claim 18 wherein further comprises the 3rd fixed component that is used for described back-up block is fixed to described framework.

20. probe unit as claimed in claim 18 wherein, is formed on the surface of each described back-up block corresponding to the end difference of described the 3rd support member bottom.

21. probe unit as claimed in claim 17, wherein, containing groove is formed on the end face place of described second basal plane, the width of described containing groove is narrower than the width of described framework, and described containing groove extends back with ccontaining described second support member and described the 4th support member from the front of described framework.

22. probe unit as claimed in claim 2, wherein, the fixed orifice that tilts with respect to described first direction is formed on the place, two sides of described framework, and described first fixed component inserts respectively in the described fixed orifice and with the back side of described second support member and contacts.

23. probe unit as claimed in claim 2, wherein, fixed orifice is formed on the place, two sides of described framework along described first direction, and second fixed component inserts respectively in the described fixed orifice and with two sides of described the 4th support member and contacts.

24. probe unit as claimed in claim 23, wherein, described two sides of described the 4th support member tilt.

25. probe unit as claimed in claim 2, wherein, the fixed orifice that tilts with respect to described third direction is formed on the place, two sides of described framework, and described second fixed component inserts respectively in the described fixed orifice and with two sides of described the 4th support member and contacts.

26. probe unit as claimed in claim 2, wherein, be used to make described first support member, described second support member, described the 3rd support member and described the 4th support member to be formed on the surface of described first support member, described second support member, described the 3rd support member and described the 4th support member with respect to the aligned notches of described second direction aligning.

27. probe unit as claimed in claim 2, wherein, described first support member or described second support member movably are arranged on the described framework, thereby described first probe is fastened between described first support member and described second support member.

28. probe unit as claimed in claim 2, wherein, described the 3rd support member or described the 4th support member movably are arranged on the described framework, thereby described second probe is fastened between described the 3rd support member and described the 4th support member.

29. probe unit as claimed in claim 1, wherein, each described first probe comprises:

Body, its have along the width of described first direction and greater than described width, along the length of described second direction;

Towards the contact site that tilts, extend on its top from described body; And

Connecting portion, it is vertical the extension and horizontal-extending then from another top of described body, and described connecting portion has crooked top up.

30. probe unit as claimed in claim 1, wherein, each described second probe comprises:

Contact site, it is along extending with the end of the roughly the same direction of the length direction of described body from described body, and described contact site has crooked top up; And

Connecting portion, it is along extending with the other end of the roughly the same direction of the length direction of described body from described body, and described connecting portion has crooked top up.

31. probe unit as claimed in claim 1 wherein further comprises the 3rd fixed component, the 3rd fixed component inserts in the described framework and contacts with described first fixed component in inserting described framework along described third direction.

32. be used to test the probe unit of flat display board, comprise:

Probe, it is spaced apart from each other along first direction, the longitudinally of each described probe is along the second direction setting vertical with described first direction, and described probe contacts with the circuit terminal of described flat display board so that the electric signal of testing apparatus is transferred to described flat display board;

Two support members, it is used to support the two ends of each described probe; And

Framework, it is used to support described support member,

Wherein, arbitrary described support member all movably is arranged on the bottom surface place of described framework towards other support member ground, thus with described probe stationary between described support member.

33. probe unit as claimed in claim 32 further comprises:

First fixed component, it is used for pushing described support member along described second direction, thereby described support member is fixed on the described framework; And

Second fixed component, it is used for along pushing described support member with the described first direction third direction vertical with described second direction, thereby described support member is fixed on the described framework.

34. a sniffer comprises:

Housing, it is used for ccontaining object;

Stand, it is arranged in the described housing to maintain described object;

Probe unit, its contiguous described object ground that is positioned on the described stand is provided with, described probe unit comprises: i) first probe, it is spaced apart from each other along first direction, the longitudinally of each first probe is along the second direction setting vertical with described first direction, ii) second probe, it is spaced apart from each other along first direction, described second probe is arranged on above described first probe and between described first probe, the longitudinally of each second probe is along described second direction setting, iii) first supporting member, it is used to support the two ends of each described first probe, iv) second supporting member, it is arranged on described first supporting member to support the two ends of each described second probe, v) framework, it is used to support described first supporting member and described second supporting member, vi) first fixed component, it is used for pushing described first supporting member and described second supporting member along described second direction, thereby described first supporting member and described second supporting member are fixed on the described framework, and vii) second fixed component, it is used for along pushing described first supporting member and described second supporting member with the described first direction third direction vertical with described second direction, thereby described first supporting member and described second supporting member are fixed on the described framework; And

Test cell, it is used for providing electric signal to check whether described object is normal to described first probe and described second probe.