CN101070005B - Actuator, its manufacturing method and printing head - Google Patents
Actuator, its manufacturing method and printing head Download PDFInfo
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- CN101070005B CN101070005B CN 200710102534 CN200710102534A CN101070005B CN 101070005 B CN101070005 B CN 101070005B CN 200710102534 CN200710102534 CN 200710102534 CN 200710102534 A CN200710102534 A CN 200710102534A CN 101070005 B CN101070005 B CN 101070005B
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
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Abstract
An actuator, its manufacturing method and a printer head are provided. The actuator 1 in which a displacement element 7 has a piezoelectric ceramic layer 4 and a pair of electrodes 5, 6 interposing therebetween the piezoelectric ceramic layer 4. The entire thickness of the actuator 1 is 100 mum or less. The piezoelectric ceramic layer 4 and the substrate 2 have as their principal component a perovskite crystal containing at least Pb; Zr and Ti, and, the maximum difference in a composition ratio Pb/(Ti+Zr) between the surface of the piezoelectric ceramic layer 4 and the inside of the substrate 2 is 0.02 or less. This reduces characteristic variation.
Description
The application divides an application, the application number of its female case application: 200310101418.3, and the applying date: 2003.10.17, denomination of invention: actuator and manufacture method thereof and printhead
Technical field
The present invention relates to actuator (actuator) and the manufacture method thereof that constitutes by the thin layer sintered body that with the piezoceramics layer that contains Pb, Zr and Ti is principal component and be adapted at being used for the printhead that the ink-jet recording apparatus of literal or image printing uses.
Background technology
In recent years, along with popularizing and multimedia development of PC, the tape deck of ink-jetting style is as the tape deck that information is outputed in the recording medium, and its utilization is developed rapidly.
In the tape deck of above-mentioned ink-jetting style, be equipped with printhead.About this printhead, what generally know is thermal head mode and piezoelectricity mode.The thermal head mode is with the heater heating printing ink that is arranged in the printing ink stream that is filled with printing ink, makes it boiling, and the bubble pressurized ink by being produced in the printing ink stream thus, and printing ink is sprayed from the printing ink squit hole.On the other hand, in the piezoelectricity mode, utilize displacement component, make the wall bending displacement of a printing ink stream part that is filled with printing ink, mechanically the printing ink in the pressurized ink stream makes printing ink spray from the printing ink squit hole.
Be used in the printhead in the ink recorder that utilizes the piezoelectricity mode, for example be disclosed in the spy and open in the flat 10-151739 communique.That is, shown in Fig. 4 (a), this printhead, 23a is arranged side by side a plurality of grooves as the printing ink stream, and on the top that forms the channel member 23 of next door 23b as dividing plate with each printing ink stream 23a, is provided with actuator 21 across adhesive linkage 21a.
Actuator 21 by form common electrode 25 on the one side of piezoelectric layer 24, forms a plurality of absolute electrodes 26 simultaneously, and a plurality of displacement components 27 is set on another side.Bonding actuator 21 and channel member 23 are so that actuator 21 is provided with absolute electrode 26 directly over the printing ink stream 23a of the peristome of channel member 23.
In addition, make displacement component 27 vibrations by between common electrode 25 and absolute electrode 26, add driving voltage by drive circuit, displacement component 27 constitutes the part of printing ink stream 23a, so the printing ink in the pressurized ink stream 23a is from the printing ink squit hole 8 ejection ink droplets of opening in the bottom surface of channel member 23.
In above-mentioned formation, if add driving voltage to common electrode 25 and absolute electrode 26, then piezoelectric layer 24 is to face direction d
xExtend, but the position (constriction) of the piezoelectric layer 24 that engages with next door 23b around being arranged on printing ink stream 23a is tied, so piezoelectric layer 24 does not have affined position (unconfinement portion) to thickness direction d
YBending, 23a exerts pressure to the printing ink stream, by the printing ink squit hole 28 that is communicated with printing ink stream 23a, ejection printing ink.
Shown in Fig. 4 (b), printhead is by on piezoceramics layer 24, a plurality of displacement components 27 are set and form in the mode that equidistantly is set up in parallel a plurality of absolute electrodes 26.Each displacement component 27 can help the high speed and the high precision int of inkjet printing by being independently controlled.
Open in flat 11-34321 communique and the flat 7-315923 communique of Te Kai the spy and to have proposed, contain at least a kind the perovskite-type compounds that is selected among Pb, Zr, Ti, Zn, Sb, Ni, Te, Sr and the Ba by in above-mentioned actuator, using as metal ingredient, can realize the piezoelectrics of hear resistance, durability, heatproof degree variability excellence.
When this actuator is used as the printhead of ink-jet printer, importantly control the offset deviation of actuator.But, when sintered body is used as piezoceramics layer, because characteristic deviation is big, so there is the big problem of offset deviation.Its result, the ejection of printing ink is inhomogeneous, so the deep or light deviation of literal that is recorded or image is big, vividness worsens, and then can not carry out flying print.
In addition, in nearest high accuracy printer,, usually make it thin thickness for the displacement that makes actuator is big.For this reason, for example for directly obtain below the 100 μ m, the piezoelectricity sintered body of the following thickness of 60 μ m particularly, and when the high temperature more than 1000 ℃ burns till, Pb will cause the variation of composition from the formed body surface evaporation, thereby make the composition of the piezoelectricity sintered body that obtains produce deviation.If with the printhead of this actuator as ink-jet printer, then offset deviation becomes big, and the ejection of printing ink is inhomogeneous, and the vividness of literal that is recorded or image partly worsens, and then brings the problem that can not carry out flying print.
In order to obtain the actuator below the 100 μ m, only utilize and form the few core of deviation even from the thick piezoelectric ceramics that obtains by sintering, remove the surface element of Pb evaporation, but be difficult to actually ceramic grinding is become minimal thickness below the 100 μ m.Therefore, be difficult to produce the actuator that constitutes by the thin pottery of not forming deviation.
On the other hand, when the thickness of actuator 21 when 100 μ m are following, reason is burnt till the residual stress when shrinking, and produces distortion, so have the stress that is produced by the constraint because of next door 23b, the problem that the displacement of displacement component 27 descends.
In addition, because of adhesive linkage 21a not being controlled at specific thickness, so if the adjacent displacement component 27N corresponding to printing ink stream 23a is subjected to displacement simultaneously, then should can not be presented sufficient restraining force by the restrained position of the affined piezoelectric layer 24 of next door 23b, thereby there are adjacent displacement component 27 and 27N mutual interference mutually, make the deviation of displacement become big problem.Especially remarkable under the little situation of the thickness of this problem next door 23b.
Summary of the invention
The present invention is based on by control and contains ratio of components Pb/ (Ti+Zr) in the piezoelectric ceramics of Pb, Zr and Ti, can reduce the new opinion of the composition deviation that produces to thickness direction from the surface significantly, has successfully made the little actuator of characteristic deviation.
That is, one of the present invention's actuator is basically by substrate be arranged on the displacement component that the pair of electrodes by piezoceramics layer and this piezoceramics layer of clamping on this substrate surface forms and constitute, and its gross thickness is below the 100 μ m.Described piezoceramics layer and substrate with the Ca-Ti ore type crystallization that contains Pb, Zr and Ti at least as principal component.The maximum difference of the ratio of components Pb/ (Ti+Zr) of the surface of piezoceramics layer and substrate inside is below 0.02.
The manufacture method of actuator of the present invention is made of the stacked operation that is produced on the operation of the layered product that electrode is set on inside and the surface as the undressed sheet material of principal component and burns till this layered product under high concentration oxygen atmosphere with the Ca-Ti ore type crystallization that contains Pb, Zr and Ti at least basically.At this moment,, be contained in the Pb amount in the above-mentioned undressed sheet material, become greater than the Pb amount of the stoichiometric composition that is equivalent to above-mentioned Ca-Ti ore type crystallization according to the present invention.Thus, can make above-mentioned actuator of the present invention.
On the other hand, if add stress on the thin layer piezoelectrics, then its electric capacity descends, and this will lure the characteristic deviation of actuator.Therefore, if strictly control constitutes the lattice paprmeter ratio of the perovskite-type compounds of piezoceramics layer, and make the crystalline phase of piezoceramics layer be similar to regular crystal sound of laughing, even the compression stress effect is then arranged, also can suppress the decline of electric capacity.Particularly, can realize engaging and when being compressed stress, also can keep the actuator of excellent piezoelectric property with support component with a plurality of constrictions.Thus, burn till, form the few actuator of deviation and improve the printhead that the ink-jet of offset deviation is used even successfully provide with the thickness below the 100 μ m.
Therefore, the present invention's two actuator is made of ceramic substrate and a plurality of displacement components of being arranged on the pair of electrodes that possesses piezoceramics layer and this piezoceramics layer of clamping on this substrate surface basically, and its gross thickness is below the 100 μ m.Described piezoceramics layer is to be made of the perovskite-type compounds that contains Pb, Zr and Ti.The lattice paprmeter of this perovskite-type compounds is 1.013～1.016 than c/a.
In addition, be under the situation of the actuator below the 100 μ m at thickness, by thickness of adhibited layer and d constant are controlled, can suppress the interference of adjacent displacement component, can have sufficient displacement and can reduce offset deviation.
Therefore, the present invention's three actuator basically by substrate, be arranged on the displacement component on the one side of this substrate and a plurality of constrictions of being bonded in by adhesive linkage on the another side of described substrate constitute, and described displacement component is worked respectively independently, make and do not lured displacement by the described constriction ground unconfinement portion that is tied, gross thickness is that 100 μ m are following, the d constant is more than the 200pm/V simultaneously, and the thickness of described adhesive linkage is 0.5～5 μ m.
Like this, be under the situation of the actuator below the 100 μ m at thickness, owing to controlled the thickness and the d constant of adhesive linkage,, can suppress the offset deviation of actuator so can prevent the interference of adjacent displacement component.And the ratio by control next door and substrate thickness can suppress described interference more effectively.
Printhead of the present invention is by the channel member with a plurality of printing ink streams and is arranged on this channel member and the above-mentioned actuator that forms a plurality of displacement components constitutes, described displacement component be positioned at the printing ink stream directly over, and the displacement by described displacement component, ejection printing ink.Thus, the deviation of droplet of ink amount and spouting velocity can be suppressed, printing ink can be sprayed at a high speed, accurately.
Description of drawings
Fig. 1 (a) is the schematic sectional view of expression actuator of the present invention, and Fig. 1 (b) is its vertical view.
Fig. 2 (a) is the schematic sectional view of printhead of the present invention, and Fig. 2 (b) is the schematic sectional view of the state that is subjected to displacement of expression displacement component.
Fig. 3 (a) is the schematic sectional view when actuator is provided with constriction, and Fig. 3 (b) is its vertical view.
Fig. 4 (a) is the schematic sectional view of printhead in the past, and Fig. 4 (b) is a diagrammatic top view.
The specific embodiment
(embodiment 1)
Shown in Fig. 1 (a), actuator of the present invention is a plurality of displacement components 7 to be set form on the surface of ceramic substrate 2.Displacement component 7 possesses: be arranged on common electrode 5 on the ceramic substrate 2, be arranged on the piezoceramics layer 4 on the common electrode 5 and be arranged on absolute electrode 6 on the piezoceramics layer 4.That is, displacement component 7 constitutes, with common electrode 5 and absolute electrode 4 clamping piezoceramics layers 4, and common electrode 5 be set at ceramic substrate 2 above.
On ceramic substrate 2, be provided with a plurality of displacement components 7, shown in Fig. 1 (b), absolute electrode 6 is equidistantly to arrange in the plane, be connected with the electronic control circuit of outside independently respectively, if applied voltage between each electrode then can make by the piezoceramics layer 4 at the position of the common electrode 5 of applied voltage and absolute electrode 6 clampings to be subjected to displacement.
Constitute the piezoceramics layer 4 of displacement component 7, importantly with the Ca-Ti ore type crystallization that contains Pb, Zr and Ti at least as principal component.For example, constitute element as the A position and contain Pb, and constitute the crystallization that element contains Zr and Ti,, can obtain having the piezoceramics layer of high piezoelectric constant by such composition as the B position.
As above-mentioned Ca-Ti ore type crystallization, specifically can enumerate PbZrTiO
3The oxide that can mix in addition, other.In addition, as the subsidy composition,, can on A position and/or B position, there be other elements to replace as long as in the scope of influencing characterisitic not.For example, can be used as the subsidy composition, add Zn, Sb, Ni and Te, form Pb (Zn
1/3Sb
2/3) O
3And Pb (Ni
1/2Tc
1/2) O
3Solid solution.
According to the present invention, constitute element as the A position in the above-mentioned Ca-Ti ore type crystallization, preferably further contain the alkali earths element.As the alkali earths element, can enumerate Ba, Sr, Ca etc., from obtaining the viewpoint of high displacement, preferred especially Ba, Sr.Thus, dielectric constant rises, and its result can show higher piezoelectric constant.
Be specially, can enumerate and use Pb
1-x-ySr
xBa
y(Zn
1/3Sb
2/3)
a(Ni
1/2Te
1/2)
bZr
1-a-b-cTi
cO
3+ α quality %Pb
1/2NbO
3The compound of (0 〉=x 〉=0.14,0 〉=y 〉=0.14,0.05 〉=a 〉=0.1,0.002 〉=b 〉=0.01,0.44 〉=c 〉=0.50, α=0.1～1.0) expression.
In addition, can use magnesium lead niobate (PMN class) and nickel lead niobate (PNN class) etc. to contain the Ca-Ti ore type crystallization of Pb, Zr and Ti.
In addition, ceramic substrate 2 can be an individual layer, but in order to control thickness, composition deviation or characteristic deviation behind the control sintering, preferably layered product.
Actuator of the present invention, importantly with the Pb/ (Ti+Zr) on piezoceramics layer 4 surfaces than and the maximum difference of Pb/ (Ti+Zr) ratio of substrate 2 inside be controlled at below 0.02.If this maximum difference is greater than 0.02, then because departing from of surface element composition will be subjected to displacement the characteristic deviation of element 7.
As, will form controlled actuator, during as the printhead of piezoelectricity mode ink-jet printer, can suppress the ejection deviation of printing ink, can help to improve greatly the print characteristic of print speed or vividness etc.
According to the present invention, absolute electrode 6 can be an individualism, but in order to improve print speed and printing precision, preferably exists a plurality of.
As the material of common electrode 5, absolute electrode 6,, can use Au, Ag, Pd, Pt, Cu, Al or their alloy etc. as long as have the just passable of electric conductivity.In addition, as the thickness of electrode 5 and absolute electrode 6, have electric conductivity and need the thickness that does not hinder degree of displacement, preferred 0.5～5 μ m is about preferred especially 1～3 μ m.
The thickness T of actuator of the present invention is below 100 μ m, to obtaining big displacement and can giving full play on the characteristic aspect as actuator important.Thickness T is especially below 80 μ m, preferably below 65 μ m, more preferably below 50 μ m.The thickness T of actuator is represented the bed thickness of substrate 2 and displacement component 7.And the lower limit of the thickness T of actuator in order to have sufficient mechanical and to prevent in operation and the destruction in working, is 3 μ m, is in particular 5 μ m, preferred 10 μ m, more preferably 20 μ m.
In addition, the porosity of displacement component 7 is below 1%, preferably below 0.5%.By reducing the porosity, the intensity of actuator 1 improves.When the ink jet-print head, can suppress the leakage of the printing ink that causes to the infiltration of chinaware because of printing ink effectively.
When actuator of the present invention is used as the printhead of ink-jet printer,, for example can use d as piezoelectric strain constant
31Mode.For printhead, bring into play sufficient ejection ability, and realize the meticulous printing of high speed, d as ink-jet printer
31More than 200pm/V, preferably more than 225pm/V, more preferably more than 250pm/V.
Below, specifically with PbZrTiO
3The situation that the crystallization of perovskite-like type is applied to the printhead of ink-jet printer is an example, and actuator of the present invention is described.
At first, as material powder, prepare Pb
2O
3, ZrO
2, TiO
2, BaCO
3, ZnO, SrCO
3, Sb
2O
3, NiO, TeO
2These modulation are mixed into, and the Pb of adding is than more composition of Pb amount of the stoichiometric composition that is equivalent to the Ca-Ti ore type crystallization.Particularly, from reducing characteristic deviation, the angle that obtains more excellent piezoelectric property is set out, and preferably the Pb amount is adjusted into respect to above-mentioned stoichiometric composition excessive 1～5 weight %, particularly 2～4 quality %.
With the mixed-powder that obtains, utilize common band forming processes such as rolling method, slit (slit) rubbing method, carry out the shaping of the band that constitutes by piezoceramics layer and organic composite, and make undressed sheet material (green sheet).Because of the Pb amount of the Pb content in this undressed sheet material,, play an important role for obtaining actuator of the present invention so can reduce the composition deviation of the chinaware after burning till significantly greater than the stoichiometric composition that is equivalent to above-mentioned Ca-Ti ore type crystallization.
On the surface of the part of undressed sheet material,, form common electrode and absolute electrode by methods such as printings.And, as required, on the part of undressed sheet material, forming through hole, portion inserts and connects (via) conductor within it.
Then, the needed undressed sheet material of lamination and make layered product.And then, will add organic composite, and make it form identical with this undressed sheet material in fact constraint sheet material, be configured on the two sides or single face of above-mentioned layered product the driving fit of pressurizeing.
Layered product after the pressurization driving fit is configured in the inside of firing furnace, and, is particularly burning till more than 900 ℃ at firing temperature under the high concentration oxygen atmosphere at 950～1100 ℃.Thus, can prevent evaporation owing to the Pb in the layered product, the phenomenon that the Pb during it is formed forms less than above-mentioned perovskite, its result, the maximum difference that can obtain ratio of components Pb/ (Ti+Zr) ratio is at the piezoelectrics pottery below 0.02.
The original density of undressed sheet material is at 4.2g/cm after the pressurization driving fit
2More than, particularly at 4.5g/cm
2When above, Pb evaporation internally reduced, and can more easily control the composition deviation of Pb, so preferred.
In addition, the oxygen concentration when burning till in the oxygen atmosphere more than 98%, is being preferred more than 99% especially.Thus, have the decomposition that can suppress lead oxides, further reduce the evaporation capacity of Pb, the effect that deviation is formed in inhibition, the offset deviation that can make actuator is for littler.
The actuator of Zhi Zuoing is made of the piezoelectric ceramics below the 100 μ m that do not form deviation thus, easily offset deviation is controlled at below 10%, can be fit to be utilized as the actuator in the printhead that is used in ink-jet printer.
Printhead of the present invention possesses channel member and the above-mentioned actuator that is arranged on this channel member, and passes through the displacement of the described displacement component of the described actuator of formation, and ejection is filled in the printing ink in the printing ink stream that is arranged at described channel member.
Use Fig. 2 (a) that an example of printhead of the present invention is described.Have the channel member 13 of the structure that is separated by next door 13b as the printing ink stream 13a of a plurality of grooves, be bonded in actuator 11 of the present invention.That is, on channel member 13 surfaces, be bonded with substrate 12, and on substrate 12, be provided with a plurality of displacement components 17 by adhesives.In addition, it is overlapping to be set to the peristome printing ink stream 13a of the position that contacts with displacement component 17 of substrate 12 and channel member 13 respectively.
In addition, the common electrode 15 of displacement component 17 and absolute electrode 16 are connected electrically on the outside drive circuit.If by drive circuit applied voltage between common electrode 15 and absolute electrode 16, then shown in Fig. 2 (b), printing ink in the displacement component 17 corresponding printing ink stream 13a that pressurization is subjected to displacement with the voltage that is added, and from the printing ink squit hole 18 of opening on an end face of channel member 13, the ejection ink droplet.
In addition, shown in Fig. 4 (b), in printhead of the present invention, a plurality of displacement components are arranged on the substrate, and each displacement component is independently controlled, and carry out displacement separately.
By adopting such structure, can be stably with at a high speed, spray printing ink accurately, can realize to obtain the printhead on the printer of being applicable to of distinct image at a high speed.
(embodiment 2)
Fig. 1 (a) and (b) shown in actuator of the present invention have, on ceramic substrate 2 and the face face opposition side that is provided with displacement component 7, be provided with the constriction that constitutes by metal by adhesive linkage, when the structure that unconfinement portion is subjected to displacement, especially can bring into play effect of the present invention fully.That is, because of be provided with the constriction that is made of metal by adhesive linkage, so piezoelectric layer 4 is compressed stress, portion is subjected to displacement at unconfinement.
Particularly, shown in Fig. 3 (a), on the ceramic substrate 2 of actuator 1 of the present invention, be fixed with support component 3, and on the face of the ceramic substrate 2 that engages with support component 3, be formed with the 8b of unconfinement portion (free vibration portion) of the peristome that is positioned at groove and the constriction 8a (fixed part) that forms by joint.In addition, in case between common electrode 5 and absolute electrode 6 applied voltage, just by the displacement of piezoceramics layer 4, displacement component 7 is subjected to displacement, its result can vibrate at the 8b of unconfinement portion.By such structure,, can bring into play its feature fully as the big actuator of displacement.
For the piezoceramics layer 4 that constitutes displacement component 7, importantly with the Ca-Ti ore type crystallization that contains Pb, Zr and Ti at least as principal component.For example, constitute element as the A position and contain Pb, and constitute the crystallization that element contains Zr and Ti, especially, when being the lead titanate-zirconate compounds, can obtain having the stable piezoelectricity sintered body of higher d constant, so preferred as the B position.
In addition, described piezoceramics layer preferably contains and is selected from least a among Sr, Ba, Ni, Sb, Nb, Zn and the Te.Thus, more stable piezoelectricity sintered body can be accessed, for example, solid solution Pb (Zn can be enumerated as the subsidy composition
1/3Sb
2/3) O
3And Pb (Ni
1/2Tc
1/2) O
3The solid solution that forms.
Particularly, constitute element, preferably further contain the alkali earths element as the A position.As the alkali earths element, from obtaining the viewpoint of high displacement, preferred especially Ba, Sr.Particularly, consist of at tetragonal under the situation of main body composition,, then help obtaining big displacement if contain the Ba of 0.02～0.08mol and the Sr of 0.02～0.12mol.
For example, with respect to using Pb
1-x-ySr
xBa
y(Zn
1/3Sb
2/3)
a(Ni
1/2Te
1/2)
bZr
1-a-b-cTi
cO
3+ α quality %Pb
1/2NbO
3The composition of (0 〉=x 〉=0.14,0 〉=y 〉=0.14,0.05 〉=a 〉=0.1,0.002 〉=b 〉=0.01,0.44 〉=c 〉=0.50, α=0.1～1.0) expression makes the Pb of adding measure excessive 1～5 quality %.
If will the formed body that Pb is modulated to stoichiometric composition be burnt till 2 hours at 1000 ℃, then Pb is evaporated as PbO, form deviation and produce surface element, cause the decline and the aberrations in property of displacement component characteristic easily, so that the Pb amount of adding is more excessive than stoichiometric composition, particularly the excessive ratio in A position is 1.005～1.04, particularly preferably in 1.01～1.03.Thus, can be easily with the Deviation Control of thickness direction Pb/ (Ti+Zr) ratio of displacement component 7 below 0.02, can further reduce the composition deviation.
In addition, A position surplus is than (A/B than), is meant the value after the molal quantity sum of the full composition in A position is divided by with the molal quantity sum of the full composition in B position.Just refer to, when A/B is 1 than in stoichiometric perofskite type oxide, on the A position, add, and make A/B become state greater than 1 than its excessive Pb and other element.
In addition, constituting the perovskite-type compounds of piezoceramics layer 4, have 2 kinds of crystalline forms usually, generally is to exist with the state that rhombohedral crystal and tetragonal mix.In order to improve piezoelectric property, the preferred composition composition of boundary (MPB) mutually that becomes rhombohedral crystal and tetragonal that adopts.But, be the following actuators of 100 μ m if burn till thickness T, then Pb evaporation changes the piezoelectrics composition from the actuator surface to inside, produces deterioration in characteristics.With respect to this, according to the present invention, than c/a, and mix 2 kinds of crystalline forms, even but can keep excellent characteristic and also rejection characteristic deterioration under ambient stress with specific ratio by the control lattice paprmeter.
That is, importantly the lattice paprmeter of the perovskite-type compounds of piezoceramics layer 4 is set at 1.013～1.016 than c/a.Thus, the main body of perovskite-type compounds can be formed as tetragonal.Particularly, in order to obtain stable piezoelectric property, lattice paprmeter is 1.0135～1.0155 than c/a, preferably 1.014～1.015.
The thickness of displacement component 7 is below 100 μ m, and is very important for obtaining big displacement, from making the big angle of displacement, is below the 80 μ m, preferably below 60 μ m, further preferably below 50 μ m.In addition, the destruction in order to prevent to make or during work, if consider sufficient mechanical, lower limit is 3 μ m, preferred 5 μ m, further preferred 10 μ m.
In addition, ceramic substrate 2 can be an individual layer, but in order to control thickness, composition deviation or characteristic deviation behind the control sintering, preferably layered product.
Piezoelectric strain constant when using as ink jet-print head for example is d
31If will give play to sufficient ejection ability, d as the printhead of ink-jet printer
31Size need be more than 200pm/V.If be lower than 200pm/V, just there is not sufficient ejection ability, can not be used as ink jet-print head.If will realize the printing that high speed is meticulous, more preferably d
31More than 250pm/V.
The elastic compliance of actuator is 14.0 * 10
-12m
2Below/the N, be preferably 13.5 * 10
-12m
2Below/the N, more preferably 13.0 * 10
-12m
2Below/the N.Thus, can easily suppress for actuator being installed in the support component decline of the electric capacity of the stress of generation afterwards.
In addition, the porosity of displacement component 7 is below 1%, preferably below 0.8%, more preferably below 0.5%.Thus, can prevent the infiltration of liquid such as printing ink effectively, so can reduce spilling of printing ink.
As the material of absolute electrode 4 and common electrode 6,, can use Au, Ag, Pd, Pt, Cu, Al or their alloy etc. as long as have the just passable of electric conductivity.In addition,, need have electric conductivity and the thickness of the degree of displacement of not hindering is arranged, be generally about 0.5～5 μ m, about preferred 1～4 μ m as thickness of electrode.
By adopting such structure, can be independently and control the displacement size of each displacement component 7 of actuator fully.Therefore, can critically control the spray volume of printing ink, so can carry out high-precision contraposition, its result can provide the ejection deviation few, high-quality ink jet print head.
Below, specifically with PbZrTiO
3The situation that the crystallization of perovskite-like type is applied to the printhead of ink-jet printer is an example, and the manufacture method of the actuator of this embodiment is described.
At first, as material powder, prepare Pb
2O
3, ZrO
2, TiO
2, BaCO
3, ZnO, SrCO
3, Sb
2O
3, NiO, TeO
2These modulation are mixed into, and the Pb of adding is than more composition of Pb amount of the stoichiometric composition that is equivalent to the Ca-Ti ore type crystallization.Particularly, preferably that the A position is superfluous than being adjusted into 1.005～1.04 from keeping the angle of excellent piezoelectric property, particularly 1.01～1.03.
With the mixed-powder that obtains, utilize common band forming processes such as rolling method, slit (slit) rubbing method, carry out the shaping of the band that constitutes by piezoelectric ceramics and organic composite, and make undressed sheet material.
On the surface of the part of undressed sheet material,, form common electrode and absolute electrode by methods such as printings.And, as required, on the part of undressed sheet material, forming through hole, portion inserts and connects (via) conductor within it.
Then, lamination is needed does not add sheet material and makes layered product.And then, will by with this undressed sheet material piezoelectric ceramics of same composition and the constraint sheet material that organic composite constitutes in fact, be configured on the two sides or single face of above-mentioned layered product the driving fit of pressurizeing.
Layered product after the pressurization driving fit is configured in the inside of firing furnace, and, is particularly burning till more than 900 ℃ at firing temperature under the high concentration oxygen atmosphere at 950～1100 ℃.Thus, can prevent evaporation owing to the Pb in the layered product, the phenomenon that the Pb during it is formed forms less than above-mentioned perovskite, its result, the deviate that can obtain ratio of components Pb/ (Ti+Zr) ratio is at the piezoelectricity sintered body below 0.02.
Oxygen concentration when burning till preferably burns till under oxygen atmosphere.From the evaporation that suppresses Pb, the angle that reduces density variation, oxygen concentration is more than 80%, preferably more than 90%, more preferably more than 95%, further preferably more than 98%.
As shown in Figure 2, the printhead of this embodiment also is that actuator 11 is bonded on the channel member 13 and forms.Because this printhead has at a high speed, high-precision ink-jet ability, so be fit to be used in the flying print.Other are identical with above-mentioned embodiment.
(embodiment 3)
Shown in Fig. 3 (a), in the actuator 1 of this embodiment, substrate 2 is bonded on the support component 3, and substrate 2 and support component 3 become one by adhesive linkage 1a.In addition, piezoelectric layer 4 is set on the surface of substrate 2, between substrate 2 and piezoelectric layer 4, forms common electrode 5, absolute electrode 6 is set on the surface of piezoelectric layer 4 simultaneously.Common electrode 5 and absolute electrode 6 clamping piezoelectric layers 4.
Shown in Fig. 3 (b), preferably on piezoelectric layer 4, a plurality of displacement components 7 to be set in the mode that equidistantly is set up in parallel a plurality of absolute electrodes 6, by adopting such structure, when being applicable to printhead, can can help the high speed and the high precision int of ink-jet printer by controlling each displacement component 7 respectively independently.
Because the next door 3b of substrate 2 supported parts 3, by partial fixing, so the interarea of the substrate 2 that is engaging with support component 3 is by constituting by the 8b of unconfinement portion that engages constriction 8a that forms, is fixed and the peristome that is positioned at groove 3a, can vibrating at the 8b of unconfinement portion.
Constituting the piezoelectric layer 4 of displacement component 7, preferably is main component with the perofskite type oxide, constitutes element as the A position and contains Pb, and contain Zr, Ti as B position formation element.In addition, as the subsidy composition, preferred solid solution Pb (Zn
1/3Sb
2/3) O
3And Pb (Ni
/ 2Te
1/2) O
3The solid solution that forms.
For example, can use with lead titanate-zirconate as piezoelectric ceramics of principal component etc., but be not limited to these, so long as have the just passable of piezoelectricity.As the material that constitutes this displacement component, preferred piezoelectric strain constant d
31High.
Particularly, the A position formation element as perofskite type oxide greatly preferably further contains the alkali earths element in order to make displacement.As the alkali earths element, Ba, Sr, Ca etc. are arranged, particularly from obtaining the viewpoint of big displacement, preferred Ba, Sr.
Particularly, preferably use Pb
1-x-ySr
xBa
y(Zn
1/3Sb
2/3)
a(Ni
1/2Te
1/2)
bZr
1-a-b-cTi
cO
3+ α quality %Pb
1/2NbO
3The piezoelectric ceramic composition that (0 〉=x 〉=0.14,0 〉=y 〉=0.14,0.05 〉=a 〉=0.1,0.002 〉=b 〉=0.01,0.44 〉=c 〉=0.50, α=0.1～1.0) expression is formed.
The gross thickness T of actuator 1 of the present invention from brought the angle of high performance, miniaturization and low consumption electrification (lower voltage) by big displacement, is important below 100 μ m.In order to have mechanical strength and the proof voltage intensity in the practicality, lower limit is 5 μ m, preferred 10 μ m, and more preferably 20 μ m, in addition, in order to strengthen displacement, higher limit is 80 μ m, preferably 60 μ m are more preferably 45 μ m.
In addition, the porosity of substrate 2 and piezoelectric layer 4 is below 1%, to be preferably below 0.8%.If the porosity is greater than 1%, during then as ink jet-print head, might cause spilling of printing ink by the infiltration of printing ink, so undesirable.And, consider also undesirable from the face of chinaware intensity.
As the material of common electrode 5 and absolute electrode 6, there is electric conductivity just passable, can use Au, Ag, Pd, Pt, Cu, Al or their alloy.In addition,, the degree of electric conductivity and not overslaugh displacement be arranged, preferred 1～5 μ m as the thickness of electrode 5,6.
According to the present invention, importantly the d constant of the displacement component 7 of actuator 1 is more than 200pm/V.If the d constant is less than 200pm/V, then the spray volume of ink-jet descends.Particularly, for the stabilisation of discharge performance, the d constant is preferably more than 220pm/V, more preferably more than 250pm/V.
When displacement component 7 deforms, need prevent the abnormal deformation of displacement component in constriction 8a, for this reason, the thickness t that importantly makes adhesive linkage 1a is at 0.5～5 μ m.Particularly, in order to reduce the interference between the mutually adjacent displacement component, the upper limit of the thickness t of adhesive linkage 1a is at 4 μ m, preferably at 3 μ m, more preferably at 2 μ m, most preferably at 1 μ m.
In addition, if there is a big pore in the inside of adhesive linkage 1a, then the displacement quantitative change of the constriction 8a displacement component 7 that exists in pore sometimes is big.Therefore, the interference between the sometimes mutually adjacent displacement component 7 becomes big.In order to prevent this phenomenon, the maximum hole diameter of adhesive linkage 1a internal porosity is below 10 μ m, preferably below 7 μ m, more preferably below 5 μ m.
In addition, even under the thin situation of the thickness t of adhesive linkage 1a, preferably adhesive linkage 1a is formed uniformly on whole of bonding plane, and keeps anti-sufficient adhesion strength in vibration.
In addition, the thickness of substrate 2 can at random be set, and particularly, the thickness of substrate 2 is 10～80 μ m, preferred 15～70 μ m, more preferably 20～50 μ m.This is the miniaturization for ink-jet.
The following describes the manufacture method of the actuator that ink jet print head uses.At first, use the isobaric electro-powder raw material of known manufacturing process shaping PZT.From obtaining the angle of uniform thin layer chinaware, preferably utilize common band forming processes such as rolling method, slit (slit) rubbing method, carry out the shaping of the band that constitutes by piezoelectric ceramics and organic composite.
In order on the desired area of the undressed sheet surface that obtains, to form electrode, stick with paste with coating conductions such as print processes, and as required, formation is with the through hole electrode of these electrodes and external circuit electrical connection, then that undressed sheet material is stacked by required formation, the driving fit of pressurizeing forms layered product.
Spread the constraint sheet material in the top and bottom of this layered product, they are burnt till simultaneously, and utilize methods such as sandblast or ultrasonic washing to remove the constraint sheet material, can obtain the actuator substrate thus from the sintered body that obtains.
On gained chinaware surface, form absolute electrode, then bonding support component on chinaware.Bonding can be by the room temperature of silicon resinoid etc. the carrying out of bonding or epoxylite etc. at 80～150 ℃ of high temperature bondings that carry out etc.
Carry out preferably pressurizeing, so that adhesive linkage is unlikely to thick when bonding.Be specially, carry out the metal pressurization.And, as making the thin method of adhesive linkage, adjust the viscosity of bonding agent, under the high state of flowability, carry out bonding.Be specially, preferably viscosity be set in 100～200psi.
And,, preferably will carry out bonding atmosphere and become decompression state for not at the adhesive linkage remaining pore.Particularly, below 10kPa, preferably below 1kPa, more preferably the vacuum below 100Pa is carried out bonding.In addition, reduce the viscosity of bonding agent, also will prevent the residual of pore effectively, best combination bonding agent and bonding method, and determine decompression state and viscosity aptly.
In addition,, preferably before bonding, wash the composition surface in order to improve adhesive strength, particularly carry out etch processes and remove the surface oxide layer or metamorphic layer.The amount of removing, according to material and difference, but preferably about 10～20nm.
The actuator of Zhi Zuoing like this, can be with the THICKNESS CONTROL of adhesive linkage at 0.5～5 μ m, the actuator THICKNESS CONTROL is below 100 μ m, and the d constant is controlled at more than the 200pm/V, even and support component engaged also will show sufficient displacement, can realize the little actuator of deviation of displacement.
As shown in Figure 2, printhead of the present invention is on the channel member 13 with a plurality of printing ink stream 13a, engages by adhesive linkage 11a that above-mentioned actuator 11 forms.Applied voltage between common electrode 15 that is arranged at actuator 11 and absolute electrode 16, and the displacement of the displacement component 17 by containing piezoelectric layer 14 can be from printing ink squit hole 18 ejection printing ink.
Electrode pads (pad) can be set, to absolute electrode 16 supply capabilities on absolute electrode 16.In addition, the thickness t of the composition surface 11a of above-mentioned actuator and support component is preferably at 0.5～5 μ m.
In addition, the maximum hole diameter that contains in described adhesive linkage 11a is preferably below 10 μ m.Thus, can prevent the interference of the offset deviation and the adjacent displacement component of each displacement component.
If the print head applications that will constitute so then can realize carrying out with high accuracy the printer of flying print in the inkjet type printer,, can realize more at a high speed and high-precision printing particularly by being set up in parallel a plurality of printheads.Other are identical with above-mentioned embodiment 1.
More than, the actuator of each embodiment has been described, but actuator of the present invention can combine by 2 in the above-mentioned embodiment 1～3 or 3.That is, preferably make the maximum difference of ratio of components Pb/ (Ti+Zr) of piezoelectric ceramics laminar surface and substrate inside at the embodiment below 0.02 to the major general; The lattice paprmeter that contains the perovskite-type compounds of Pb, Zr and Ti is 1.013～1.016 embodiment than c/a; Described displacement component is worked respectively independently, so that on the another side of substrate, do not lured displacement by the unconfinement portion of the constraint of bonding constriction by adhesive linkage, simultaneously the d constant is more than the 200pm/V, and the thickness of described adhesive linkage is 2 or 3 actuators that combine in the embodiment of 0.5～5 μ m.
And then for those skilled in the art, other various variations and distortion and other purposes will be tangible.Therefore, the present invention is not limited to concrete disclosure.
Below illustrate the specific embodiment of the present invention.
Will be as the high-purity Pb of material powder
2O
3, ZrO
2, TiO
2, BaCO
3, ZnO, SrCO
3, Sb
2O
3, NiO, TeO
2Each material powder, weighing is a certain amount of, sintered body is become use Pb
1-x-ySr
xBa
y(Zn
1/3Sb
2/3)
a(Ni
1/2Te
1/2)
bZr
1-a-b-cTi
cO
3The composition of (x=0.04, y=0.02, a=0.075, b=0.005, c=0.42) expression.And then, the excessive Pb of adding the amount of Table 1 in this is formed.
With above-mentioned modulated powder, utilized the ball mill wet mixed 20 hours.Then, dehydration, dry this mixture.Then, 900 ℃ of calcinings 3 hours, the calcined material that obtains is used the ball mill case of wet attrition once more.
Then, in this crushed material, mix organic bond, water, dispersant and plasticizer, make slip, utilize normally used rolling method then in order to be shaped thin undressed sheet material, make the undressed sheet material of considering shrinkage factor in advance, make the gauge after burning till be the value shown in the table.
Then, using mould, is the brachmorphy shape with above-mentioned undressed sheet material punching, has prepared the sheet material of many brachmorphy shapes.Then, adopt the screen painting method, and use the paste for use in electrode that constitutes by Ag-Pd, coating common electrode and absolute electrode on the surface of this brachmorphy shape sheet material.
Then, the undressed sheet material of coating undressed sheet material of electrode and uncoated electrode is overlapping, make it to become structure as shown in Figure 1, that is, on substrate surface, form a plurality of displacement components, add thermo-compressed then, made lamination actuator formed body.
At last, after 400 ℃ are taken off bonding agent to this formed body degreasing, under the condition shown in the table 1, carry out 2 hours burn till, obtained actuator.
Measured the thickness of gained actuator with micrometer.And, ratio of components Pb/ (Ti+Zr) is by cutting off sintered body, observe the cross section with EPMA, Pb, the Ti of the surface of quantitative assay piezoceramics layer and described substrate inside, Zr and try to achieve, and obtained the difference of the ratio of components of the surface of piezoceramics layer and substrate inside.
In addition, the porosity is by cutting off sintered body, and its cross section is processed into after the mirror status, use microscopic examination, obtains the interior stomatal size of given area and calculates.The piezoelectric property d of actuator
31Be, measure 10 places, calculate that its mean value tries to achieve with the resonance method of using the impedance analysis device.
Then, actuator is used for the ink-jet printhead.At this moment, measure the displacement of 10 place's displacement components, calculate offset deviation by its mean value with LASER DOPPLER VIBROMETER.Then, with the maximum difference of mean value, represent that with percentage the back is as deviation except that each displacement and mean value.Its result is shown in the table 1.
Table 1
*Sample outside the expression scope of the invention
Sample No.I-2 of the present invention～15, I-17～19 and I-21～25, its d
31More than 200pm/V, offset deviation is below 2%.Can confirm that these values enough play a role ink-jet printer.
On the other hand, the sample No.I-1 that Pb is in harmonious proportion with stoichiometric composition because the maximum difference of tool Pb/ (Ti+Zr) is bigger, is 0.04, so d
31Lower, be 190pm/V, offset deviation is bigger, is 8%.In addition, having bigger actuator thickness is that actuator thickness is the sample No.I-16 of 150 μ m, its d
31Lower, be 150pm/V, abundant inadequately as the characteristic of inkjet printer head.And then, because firing temperature is higher, be 1200 ℃, so the maximum difference of its ratio of components Pb/ (Ti+Zr) is bigger, be 0.035 sample No.I-20, its offset deviation is bigger, is 5.5%.
Will be as the high-purity Pb of material powder
2O
3, ZrO
2, TiO
2, SrCO
3, BaCO
3, NiO, Sb
2O
3, ZnO, TeO
2Each material powder, weighing is a certain amount of, makes it to become the composition shown in the table 2.And then, add with respect to this and form excessive Pb.The composition of table 2 is represented Pb
1-x-ySr
xBa
y(Zn
1/3Sb
2/3)
a(Ni
1/2Te
1/2)
bZr
1-a-b-cTi
cO
3In x, y, a, b, the mol ratio of c.Sample No.II-25 has used BaTiO
3
With above-mentioned modulated powder, utilized the ball mill wet mixed 20 hours.Then, dehydration, dry this mixture.Then, 900 ℃ of calcinings 3 hours, the calcined material that obtains is used the ball mill case of wet attrition once more.
Then, mix organic bond, water, dispersant and plasticizer in this crushed material, make slip, utilize rolling method then, make the undressed sheet material of considering shrinkage factor in advance, making the gauge after burning till is the value shown in the table 2.
Then, using mould, is the brachmorphy shape with above-mentioned undressed sheet material punching, has prepared the sheet material of many brachmorphy shapes.Then,, use the paste for use in electrode that constitutes by Ag-Pd, utilize screen painting to be coated on the surface of this brachmorphy shape sheet material common electrode and absolute electrode.
Then, the undressed sheet material of coating undressed sheet material of electrode and uncoated electrode is overlapping, make it to become structure shown in Fig. 1 (b), promptly, on substrate surface, form 10 of vertical assortments, transversely arranged 10 displacement component, add thermo-compressed then, made lamination actuator formed body.
At last, 400 ℃ with this formed body degreasing after, with 5 kinds of layered products at 99%O
2Burnt till 2 hours under atmosphere, 1000 ℃ of temperature, obtained 5 kinds of actuators.
After the grinding and sintering body section,, measure the thickness of gained actuator by the キ one ェ Application ス system microscope that utilizes CCD.And, forming deviation Pb/ (Ti+Zr) is by cutting off ceramic layer, observe the cross section with EPMA, quantitative assay Pb, Ti, Zr and calculate, in addition, the porosity is by cutting off piezoceramics layer, and its cross section is processed into after the mirror status, obtain the area of the hole in the given area with microscopic examination, remove with the gross area then and obtain.
Form deviation, Pb, Zr, Ti amount are compared with the internal standard sample and recorded according to EPMA.Pb, Zr, the Ti amount of gained are converted into mole, have calculated Pb/ (Ti+Zr) ratio.And, the lattice paprmeter of perovskite-type compounds than c/a be by with the d in the X-ray diffraction (002) face at interval and d (200) face be updated in the following formula at interval and calculate.
1/d
2＝h
2+k
2+(a/c)
2l
2/a
2
In addition, measured the d of actuator by the resonance method of utilizing the impedance analysis device
31And, measured elastic compliance S according to sintered density and resonant frequency
11 E
Then, actuator is bonded on the channel member, has made printhead shown in Figure 2, use the impedance analysis device to measure the electric capacity of bonding front and back respectively then, and the value after bonding is calculated as rate of change with respect to the value before bonding.In addition, utilize the multispectral analyzer of reining in to measure the displacement when each displacement component applied voltage respectively, calculated the offset deviation in the face.With and mean value between maximum difference divided by mean value, and this mean value of representing with percentage is as deviation.The results are shown in Table 2.
*Sample outside the expression scope of the invention
A1：Pb
0.94Sr
0.04Ba
0.02(Zn
1/3Sb
2/3)
0.075(Ni
1/2Te
1/2)
0.005Zr
0.47Ti
0.45O
3
B1：Pb(Zn
1/3Sb
2/3)
0.075(Ni
1/2Te
1/2)
0.005Zr
0.47Ti
0.45O
3
C1：PbZr
0.5Ti
0.5O
3
D1：BaTiO
3
The changes in capacitance rate of sample No II-2 of the present invention～5, II-7～10, II-12～24 and II-26 below 35%, the average displacement amount more than the 22nm and its deviation be below 4%.Particularly, principal phase is the Pb of A1
0.94Sr
0.04Ba
0.02(Zn
1/3Sb
2/3)
0.075(Ni
1/2Te
1/2)
0.005Zr
0.47Ti
0.45O
3In, the average displacement amount is more than the 35nm, deviation is 2%.
In addition, less than 1.013 sample No.II-1, its changes in capacitance rate is big, is 50% than c/a for lattice paprmeter, and the average displacement amount is 40nm, but its deviation is big, is 15%.In addition, greater than 1.016 sample No.II-6, its average displacement amount is 40nm to lattice paprmeter than c/a, but its deviation is 20%, and is bigger.
In addition, thickness is greater than the sample No.II-11 of 100 μ m, and its average displacement amount is 20nm, and is less, so can not give practicability especially for the actuator of printhead as actuator.
By the sample No.II-25 that the perovskite-type compounds that does not contain Pb, Zr constitutes, its average displacement amount is 10nm, and is less, so can not give practicability especially for the actuator of printhead as actuator.
Will be as the high-purity Pb of material powder
2O
3, ZrO
2, TiO
2, BaCO
3, ZnO, SrCO
3, Sb
2O
3, NiO, TeO
2Each material powder, weighing is a certain amount of, sintered body is become use Pb
1-x-ySr
xBa
y(Zn
1/3Sb
2/3)
a(Ni
1/2Te
1/2)
bZr
1-a-b-cTi
cO
3The composition of (x=0.04, y=0.02, a=0.075, b=0.005, c=0.45) expression.And then, add with respect to this and form excessive Pb.Then, utilize wet mixed such as ball mill 20 hours.Then, dehydration, ten dry these mixtures.Then, 700～900 ℃ of calcinings 3 hours, with this calcined material of obtaining once more with case of wet attrition such as ball mills.
Then, mix organic bond, water, dispersant and plasticizer in this crushed material, make slip, then utilizing the rolling method forming thickness is the band of 30 μ m.Then, use 70: 30 Ag-Pd electrode paste, forming thickness with print process respectively in the top and bottom of band is absolute electrode and the common electrode of 5 μ m.Then, will not form the band of electrode and form the absolute electrode that constitutes by the displacement component that drives usefulness in top and bottom and the band of common electrode lamination relatively,, obtain layered product with the driving fit of pressurizeing of the pressure of 12Mpa.
At last, after 400 ℃ make this formed body degreasing, at 99%O
2Burnt till 5 hours under atmosphere, 1100 ℃ of temperature, obtained the actuator substrate.
The actuator that obtains is cut off, grind after its cross section,, measure the thickness t of gross thickness T and adhesive linkage by the キ one ェ Application ス system microscope that utilizes CCD.And the porosity is by cutting off sintered body, and its cross section is processed into after the mirror status, use microscopic examination, and the area of obtaining the interior hole of given area obtains.
Above-mentioned actuator engagement at channel member, has been made ink jet print head shown in Figure 2.Use the epoxies bonding agent as bonding agent, under 150 ℃, moulding pressure 1Mpa, carry out bonding.
In addition, the d of bonding channel member actuator
31Be, measure 10 places, calculate that its mean value tries to achieve with the resonance method of using the impedance analysis device.
Then, add the AC field of 0～20V with the 10KHz frequency, measure the displacement component displacement at 10 places with the laser-Doppler displacement meter to ink jet print head, with its mean value as displacement.In addition, with the maximum difference of mean value, represent that with percentage the back is as offset deviation except that each displacement and mean value.
And then, when on a displacement component, adding the 40V DC voltage, with the displacement of fixed its element (vibrating elements) of Doppler displacement instrumentation with there is not the displacement of the adjacent displacement component (adjacent elements) of applied voltage, thereby investigated the influence of disturbing.It is the results are shown in the table 3.
The d of sample No.III-1 of the present invention～7, III-10～15 and III-17～23
31More than 200pm/V, the displacement of vibrating elements (on average) is more than the 70nm, and the offset deviation of vibrating elements is below 2.8%, and the displacement of adjacent displacement component is below the 5nm.
In addition, the gross thickness T of actuator surpasses the d of the sample No.III-8 of 100 μ m
31Be 150pm/V, less, the displacement of vibrating elements also is 48nm, and is less.
And the thickness t of adhesive linkage is less than the thickness t of the sample No.III-9 of 0.5 μ m and the adhesive linkage sample No.III-16 greater than 5 μ m, and the offset deviation of its vibrating elements is more than 10%, and the displacement of its adjacent elements also is more than the 12nm, and is bigger.
Table 3
*Sample outside the expression scope of the invention.
Claims (10)
1. actuator, constitute by ceramic substrate and a plurality of displacement components of being arranged on this substrate surface, this displacement component is made of the pair of electrodes of piezoceramics layer and this piezoceramics layer of clamping, described piezoceramics layer is made of the perovskite-type compounds that contains Pb, Zr and Ti at least, and the lattice paprmeter of this perovskite-type compounds is 1.013～1.016 than c/a, the gross thickness of described actuator is below the 100 μ m, and the maximum difference of the ratio of components Pb/ (Ti+Zr) of the surface of described piezoceramics layer and described ceramic substrate inside is below 0.02.
2. actuator according to claim 1 is characterized in that described perovskite-type compounds is the lead titanate-zirconate compounds.
3. actuator according to claim 1 is characterized in that described piezoceramics layer contains to be selected from least a among Sr, Ba, Ni, Sb, Nb, Zn and the Te.
4. actuator according to claim 3 is characterized in that described piezoceramics layer contains 0.02～0.08 mole of Ba and 0.02～0.12 mole of Sr.
5. actuator according to claim 1, it is characterized in that the Pb that contains in the described piezoceramics layer measures and it is excessive to be in a ratio of according to the desired Pb amount of the stoichiometric proportion of described perovskite-type compounds, the excessive ratio in A position is 1.005～1.04, the value after the excessive ratio in described A position is meant the molal quantity sum of the full composition in A position is divided by with the molal quantity sum of the full composition in B position.
6. actuator according to claim 1 is characterized in that described ceramic substrate is piezoelectrics.
7. actuator according to claim 1 is characterized in that being bonded with constriction in the part of described ceramic substrate by adhesive linkage, and portion is subjected to displacement at unconfinement.
8. actuator according to claim 1 is characterized in that the d of described piezoceramics layer
31Size be more than the 200pm/V.
9. actuator according to claim 1 is characterized in that elastic compliance is 14.0 * 10
- 12m
2Below/the N.
10. printhead, it is characterized in that by channel member and be bonded on above the described channel member so that constitute the described actuator of claim 1 that the displacement component of actuator is positioned at directly over the described printing ink stream and constitute with a plurality of printing ink streams, and the displacement by described displacement component, ejection is filled in the printing ink in the described printing ink stream.
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002-303548 | 2002-10-17 | ||
| JP2002303548 | 2002-10-17 | ||
| JP2002303548 | 2002-10-17 | ||
| JP2002306276 | 2002-10-21 | ||
| JP2002-306276 | 2002-10-21 | ||
| JP2002306276 | 2002-10-21 | ||
| JP2002311829 | 2002-10-25 | ||
| JP2002-311829 | 2002-10-25 | ||
| JP2002311829A JP2004142350A (en) | 2002-10-25 | 2002-10-25 | Actuator and printing head |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101014183A Division CN100363179C (en) | 2002-10-17 | 2003-10-17 | Actuator and its manufacturing method and print head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101070005A CN101070005A (en) | 2007-11-14 |
| CN101070005B true CN101070005B (en) | 2010-06-02 |
Family
ID=38897497
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101014183A Expired - Lifetime CN100363179C (en) | 2002-10-17 | 2003-10-17 | Actuator and its manufacturing method and print head |
| CN 200710102534 Expired - Lifetime CN101070005B (en) | 2002-10-17 | 2003-10-17 | Actuator, its manufacturing method and printing head |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101014183A Expired - Lifetime CN100363179C (en) | 2002-10-17 | 2003-10-17 | Actuator and its manufacturing method and print head |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN100363179C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5344143B2 (en) * | 2008-12-11 | 2013-11-20 | セイコーエプソン株式会社 | Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element |
| EP2833423B1 (en) * | 2012-03-30 | 2020-11-04 | Kyocera Corporation | Piezoelectric actuator, inkjet head, and method for manufacturing piezoelectric actuator |
| JP6164405B2 (en) * | 2013-03-28 | 2017-07-19 | セイコーエプソン株式会社 | Piezoelectric element module, ultrasonic transducer, ultrasonic device, liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric element module |
| JP6131333B2 (en) * | 2013-11-29 | 2017-05-17 | 京セラ株式会社 | Piezoelectric substrate, assembly using the same, liquid discharge head, and recording apparatus |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5719607A (en) * | 1994-08-25 | 1998-02-17 | Seiko Epson Corporation | Liquid jet head |
| US6097133A (en) * | 1995-09-19 | 2000-08-01 | Seiko Epson Corporation | Thin piezoelectric film element, process for the preparation thereof and ink jet recording head using thin piezoelectric film element |
| US6142615A (en) * | 1997-03-25 | 2000-11-07 | Seiko Epson Corporation | Ink-jet recording head with piezoelectric device and method for manufacturing the same |
| CN1274994A (en) * | 1999-05-24 | 2000-11-29 | 株式会社村田制作所 | Piezoelectric device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3159015B2 (en) * | 1995-11-10 | 2001-04-23 | ブラザー工業株式会社 | Inkjet head |
| JP3758255B2 (en) * | 1996-11-25 | 2006-03-22 | ブラザー工業株式会社 | Inkjet head |
| JPH1134321A (en) * | 1997-07-17 | 1999-02-09 | Mita Ind Co Ltd | Ink jet head |
| JP3850163B2 (en) * | 1999-02-26 | 2006-11-29 | 京セラ株式会社 | Multilayer piezoelectric actuator and manufacturing method thereof |
| JP2002142469A (en) * | 2000-11-01 | 2002-05-17 | Suncall Corp | Piezoelectric actuator and its manufacturing method |
-
2003
- 2003-10-17 CN CNB2003101014183A patent/CN100363179C/en not_active Expired - Lifetime
- 2003-10-17 CN CN 200710102534 patent/CN101070005B/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5719607A (en) * | 1994-08-25 | 1998-02-17 | Seiko Epson Corporation | Liquid jet head |
| US6097133A (en) * | 1995-09-19 | 2000-08-01 | Seiko Epson Corporation | Thin piezoelectric film element, process for the preparation thereof and ink jet recording head using thin piezoelectric film element |
| US6142615A (en) * | 1997-03-25 | 2000-11-07 | Seiko Epson Corporation | Ink-jet recording head with piezoelectric device and method for manufacturing the same |
| CN1274994A (en) * | 1999-05-24 | 2000-11-29 | 株式会社村田制作所 | Piezoelectric device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101070005A (en) | 2007-11-14 |
| CN1496833A (en) | 2004-05-19 |
| CN100363179C (en) | 2008-01-23 |
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