CN101038347A - Manufacture of lens array, lens array and optical elements array device - Google Patents
Manufacture of lens array, lens array and optical elements array device Download PDFInfo
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- CN101038347A CN101038347A CN 200610065125 CN200610065125A CN101038347A CN 101038347 A CN101038347 A CN 101038347A CN 200610065125 CN200610065125 CN 200610065125 CN 200610065125 A CN200610065125 A CN 200610065125A CN 101038347 A CN101038347 A CN 101038347A
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Abstract
A manufacture method for lens array, its steps as below: Firstly, form a self-organized monomolecular layer on the substrate to form a hydrophilic area and hydrophobic area. Apply a liquid material on the substrate to condense a plurality of liquid lens in the hydrophilic area and then solidified to form the lens array, accordingly, the manufacture cost of lens array may be reduced. Moreover, it may be used for the electronic elements for improving their performances.
Description
Technical field
The present invention relates to a kind of array of optical elements and manufacture method thereof, and be particularly related to a kind of lens arra and manufacture method thereof.
Background technology
The application of lenticule (microlens) in recent years is subjected to the attention of height, and reason is the performance that it can significantly improve photovalve, particularly in fields such as light-emitting component, optical detector, solar cell, optical fiber communication and Micro-Opto-Electro-Mechanical Systems.Known technology proposes to make lenticule on LED surface, so the luminescence efficiency of light emitting diode can promote 50%.Known technology proposes to make lenticule on the optical detector surface, so the photocurrent of optical detector also can promote 11%.Similarly, lenticule also is used in the solar panels of artificial satellite, to improve the light utilization efficiency of solar panels.Therefore, as economy how and effective method is made lenticule, can being complementary with photovalve simultaneously, is the target of needing effort badly.
Present lenticular method for making is a lot, for example ink-jet printing process, photoresistance hot melt, hot pressing model method, photomask photoetching process and laser lithography method etc.Ink-jet printing process mainly utilizes ink gun that the liquid lens material of equivalent is squeezed on the substrate.The liquid lens material can be condensed into hemispherical drop automatically under capillary effect, therefore behind the solidified liquid lens material, just can form lens on the surface of substrate.Surface nature by control volume of solution and substrate is the shape of may command lens just.In addition, collocation inkjet technology and precise mobile platform just can accurately be controlled the position of lens.Yet the major defect of ink-jet printing process is that apparatus expensive is consuming time with making.
Hot melt mainly is to utilize rotary coating to control the thickness of photoresistance, defines the figure and the position of photoresistance then with photoetching process.Then, photoresistance is heated to liquid state.At this moment, liquid photoresistance will be condensed into hemispherically under capillary effect, just can form the solid shape after room temperature falls back in hemispheric liquid photoresistance.Then, utilize dry ecthing the shape of photoresistance to be transformed into the surface of substrate again.Under the situation that lens substrate is fixed, photoresistance thickness and lens shape will have certain transformational relation.Yet the shortcoming of hot melt is to need expensive lithographic equipment and manufacturing process too complex.
Hot pressing model method mainly is to utilize micromachined and diamond abrasive mode, makes the lens master mold of depression on the metal block material surface.Then, by ejection formation or use the mechanical force pressing mode, the shape of definition lens.Yet the shortcoming of hot pressing model method is that the too high and lens of the cost of manufacture of master mold can't microminiaturization.
The photomask photoetching process mainly is to utilize GTG photomask (half-tong mask) to control the size of luminous flux, and with macromolecule as lens material.Because ultraviolet light can interrupt high molecular bond and becomes micromolecule, and micromolecule can be dissolved in the developer solution, so the big more etch depth of luminous flux is dark more.The photolithographic shortcoming of photomask is the cost of manufacture costliness of GTG photomask, and is not easy to obtain.
The laser lithography method mainly is to utilize excimer laser, directly with the substrate gasification, to form lens shape.The shortcoming of laser lithography method is the excimer laser apparatus expensive, and surface of the work causes molecule residual and influence light transmittance easily.
Summary of the invention
In view of this, the purpose of this invention is to provide a kind of manufacture method of lens arra, to reduce manufacturing cost.
In addition, another object of the present invention provides a kind of lens arra, to change the travel path of light.
In addition, another purpose of the present invention provides a kind of optical elements array device, to improve the photoelectric properties of element.
For reaching above-mentioned or other purpose, the present invention proposes a kind of manufacture method of lens arra, and it comprises the following steps.At first, on substrate, form self assembled monolayer, to form hydrophilic region and water repellent region.On substrate, be coated with liquid material, on hydrophilic region, to condense a plurality of liquid lens.Solidify these liquid lens, to form a plurality of lens.
In one embodiment of this invention, the zone that self assembled monolayer covered is a water repellent region, and the zone that self assembled monolayer exposed is a hydrophilic region.
In one embodiment of this invention, the zone that self assembled monolayer covered is a hydrophilic region, and the zone that self assembled monolayer exposed is a water repellent region.
In one embodiment of this invention, the method for formation self assembled monolayer can be to form glue-line on first mould.Then, solidify glue-line, to form second mould.Separate first mould and second mould.Use second mould on substrate, to form self assembled monolayer in micro-contact printing mode (micro contactprinting).
In one embodiment of this invention, the material of glue-line can be dimethione (plolydimethylsiloxane, PDMS).
In one embodiment of this invention, the method for curing liquid lens can be to utilize ultraviolet ray or heating.
For reaching above-mentioned or other purpose, the present invention proposes a kind of lens arra, and it is suitable for being arranged on the substrate.This lens arra comprises self assembled monolayer and a plurality of lens, and wherein self assembled monolayer is arranged on the substrate, and self assembled monolayer defines hydrophilic region and water repellent region on substrate.These lens are arranged on the hydrophilic region.
In one embodiment of this invention, the general formula of self assembled monolayer is X-R-Y, and wherein the X functional group is suitable for producing bond with substrate, R is the character of surface that hydrocarbon chain, Y functional group are suitable for changing substrate.
In one embodiment of this invention, the X functional group can be symmetry or asymmetrical silane compound, trichlorosilane (trichlorosilane), trimethoxy silane (trimethoxysilane), disulfide (disulfide), sulfide (sulfide), diselenide (diselenide), selenide (selenide), selenol (selenol), mercaptan compound (alkanethiol), nitrous compound (nitrile), isonitrile (isonitrile), three phosphides (trivalentphosphorous compounds), rhodanide (isothiocyanate), xanthate (xanthate), mercaptan compound (thiocarbamate), hydrogen phosphide (phosphine), thiocarboxylic acid (thioacid), carbodithioic acid (dithioacid), carboxylic acid (carboxylic acids), hydroxy acid (hydroxylic acids) or hydroximic acid (hydroxamic acids).
In one embodiment of this invention, the Y functional group can be hydroxyl (hydroxy), carboxyl (carboxyl), amido (amino), acetaldehyde (aldehyde), hydrazine (hydrazine), fluoro (fluoro), phenyl (phenyl), the metallic compound that contains carbonyl (carbonyl), epoxide (epoxy) or vinyl (vinyl groups).
In one embodiment of this invention, the material of lens can be epoxy resin (epoxyresin), acryl (acrylate), polysiloxane (polysiloxane), polyimide (polyimide), polyetherimide (polyetherimide), poly-fluorine cyclo-butane (perfluorocyclobutene), benzocyclobutane (Benzoyclobutane, BCB), polycarbonate (polycarbonate), plexiglass, poly-fluorine fat (polyurethane) or dimethione.
For reaching above-mentioned or other purpose, the present invention proposes a kind of optical elements array device, and it comprises optical elements array device main body and lens arra.Wherein, lens arra is arranged on the surface of optical elements array device main body.This lens arra comprises self assembled monolayer and a plurality of lens, and wherein self assembled monolayer is arranged on the surface of optical elements array device main body, and self assembled monolayer defines hydrophilic region and water repellent region from the teeth outwards.These lens are arranged on the hydrophilic region.
In one embodiment of this invention, the general formula of self assembled monolayer is X-R-Y, and wherein the X functional group is suitable for producing bond with substrate, R is the character of surface that hydrocarbon chain, Y functional group are suitable for changing substrate.
In one embodiment of this invention, the X functional group can be symmetry or asymmetrical silane compound, trichlorosilane, trimethoxy silane, disulfide, sulfide, diselenide, selenide, selenol, mercaptan compound, nitrous compound, isonitrile, three phosphides, rhodanide, xanthate, mercaptan compound, hydrogen phosphide, thiocarboxylic acid, carbodithioic acid, carboxylic acid, hydroxy acid or hydroximic acid.
In one embodiment of this invention, the Y functional group can be hydroxyl, carboxyl, amido, acetaldehyde, hydrazine, fluoro, phenyl, the metallic compound that contains carbonyl, epoxide or vinyl.
In one embodiment of this invention, the material of lens can be epoxy resin, acryl, polysiloxane, polyimide, polyetherimide, poly-fluorine cyclo-butane, benzocyclobutane, polycarbonate, plexiglass, poly-fluorine fat or dimethione.
In one embodiment of this invention, the optical elements array device main body can be display, light emitting diode, optical detector or solar cell.
Based on above-mentioned, the present invention utilizes the surface nature of self assembled monolayer change substrate, to form hydrophilic region and water repellent region.Then, utilize liquid lens material under capillary effect, can condense upon on the hydrophilic region, to form liquid lens.Therefore, the present invention can be fast and is made lens arra in large quantities, to reduce the manufacturing cost of lens arra.
State with other purpose, feature and advantage and can become apparent on the present invention for allowing, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Fig. 1 is the process flow diagram according to the manufacture method of a kind of lens arra of one embodiment of the invention.
Fig. 2 A to Fig. 2 F is the flow process sectional view according to the manufacture method of a kind of lens arra of one embodiment of the invention.
Fig. 3 A is the vertical view according to a kind of optical elements array device of one embodiment of the invention.
3B is the sectional view along the A-A ' line of Fig. 3 A.
The main element description of symbols
100: the first moulds
110,410: substrate
120: column structure
200: the second moulds
210: glue-line
300,520: lens arra
310,522: self assembled monolayer
310a, 522a: water repellent region
320,524: lens
410a, 510a: hydrophilic region
500: optical elements array device
510: the optical elements array device main body
S110, S120, S130: step
Embodiment
Fig. 1 is the process flow diagram according to the manufacture method of a kind of lens arra of one embodiment of the invention, and Fig. 2 A to Fig. 2 G is the flow process sectional view according to the manufacture method of a kind of lens arra of one embodiment of the invention.Please refer to Fig. 1, the manufacture method of the lens arra of present embodiment comprises the following steps.At first, carry out step S110, step S110 is for forming self assembled monolayer, to form hydrophilic region and water repellent region on substrate.Then, carry out step S120, and step S120 is for to be coated with liquid material, to condense a plurality of liquid lens on hydrophilic region on substrate.Come, carry out step S130, step S130 is for solidifying these liquid lens, to form a plurality of lens.Below will cooperate sectional view to be described in detail for each step.
In the present embodiment, the method that forms self assembled monolayer is the micro-contact printing mode, yet self assembled monolayer also can adopt alternate manner to form.
Please refer to Fig. 2 A, with regard to the micro-contact printing mode, the method that forms self assembled monolayer comprises the following steps.At first, provide first mould 100, and first mould 100 comprises substrate 110 and a plurality of column structures 120 that are arranged on the substrate 110, wherein column structure 120 can be cylinder or corner post.In more detail, substrate 110 for example is a silicon wafer.Then, carry out patterning, to form column structure 120 for substrate 110.Yet in another embodiment, the mode that forms column structure 120 also can be to form material layer on substrate 110, carries out patterning for this material layer then, to form column structure 120.
Please refer to Fig. 2 B, on first mould 100, form glue-line 210 then, and the material of this glue-line 210 can be PDMS.In more detail, the raw material of glue-line 210 can be the silicon rubber (siliconeelastomer) 184 that adopts Dow Corning Corporation (Dow Corning Corporation) to be produced, and main body (A agent) is mixed with 10: 1 ratio with initiator (B agent).Mix solution and made its even mixing in five to ten minutes, leave standstill then and allowed the bubble disengagement solution surface in about one hour.Then, mixed solution is evenly injected first mould, 100 surfaces, and the several approximately millimeter of the thickness of glue-line 210.
Please refer to Fig. 2 C, solidify glue-line 210 then, to form second mould 200.Then, separate first mould 100 and second mould 200.In more detail, use heating lamp that glue-line 210 is toasted, and baking temperature is about 60～80 ℃.In addition, stoving time is about one to two hour.After solidifying glue-line 210, first mould 100 is separated with second mould 200 in the mechanical force mode.
Because the PDMS after solidifying is an elastic body, and has very high physical strength and chemical stability, so PDMS can duplicate the figure on first mould, 100 surfaces fully.In other words, second mould 200 can be considered as elastic mould (elastomeric stamp).In addition, same first mould 100 can copy a plurality of second moulds 200 according to above-mentioned mode, and its accuracy is still within error range, so the method has economic benefit very much.
Please refer to Fig. 2 D, the self-composed monomolecular material is uniformly coated on second mould, 200 surfaces, to form self assembled monolayer 310.Because the part of the projection of second mould 200 has many small holes, therefore second mould 200 can utilize capillarity absorption self-composed monomolecular material.In addition, relevant for the composition of self assembled monolayer 310 and concocting method will describe in detail as after.
The composition of self assembled monolayer 310 is silane compound or mercaptan compound normally, mixes with organic solvent with volume ratio or molar concentration rate and is diluted, and can use after fully stirring.Because silane compound or mercaptan compound all have very strong activity, be easy to and airborne water and oxygen reaction, so be preferably in the glove box in the process of solution setting and carry out, select highly purified solvent to avoid solution rotten simultaneously.
In more detail, the general formula of self assembled monolayer 310 is X-R-Y, and wherein the X functional group is suitable for producing bond with substrate, R is the character of surface that hydrocarbon chain, Y functional group are suitable for changing substrate.In addition, R have usually-(CH2) form of n-, and n is usually more than or equal to 2.
The X functional group can be symmetry or asymmetrical silane compound, trichlorosilane (SiCl3), trimethoxy silane (SiOCH3), disulfide (R ' SSR,-RSSR), sulfide (R ' SR,-RSR), diselenide (R ' Se-SeR), selenide (R ' SeR ,-RSeR), selenol (SeH), mercaptan compound (RSH), nitrous compound (CN), isonitrile, three phosphides, rhodanide, xanthate, mercaptan compound, hydrogen phosphide, thiocarboxylic acid, carbodithioic acid, carboxylic acid, hydroxy acid or hydroximic acid.In addition, above-mentioned R and R ' are made up of hydrocarbon (hydrocarbon), present long-chain shape structure, and wherein may mix heterogeneous element similarly is nitrogen or fluorine etc.In addition, in order to allow the regular arrangement of molecule, R and R ' do not wish to have side chain to exist.
The Y functional group can be hydroxyl, carboxyl, amido, acetaldehyde, hydrazine, fluoro, phenyl, the metallic compound that contains carbonyl, epoxide or vinyl.
Please refer to Fig. 2 E, use second mould 200 on substrate 410, to form self assembled monolayer 310 in the micro-contact printing mode.In the present embodiment, substrate 410 can be metallic film, metal oxide, semiconductor, conductor oxidate or macromolecular material.Wherein, the material of metallic film can be gold, silver, copper, aluminium, iron, nickel, zirconium or platinum.In addition, semiconductor for example is a silicon.Conductor oxidate for example is silicon dioxide, glass or quartz.In addition, macromolecular material for example is polyethylene terephthalate (polyethylene-terephthalate), propylene dried meat (acrylonitrile-butadiene-styrene), acrylic acid formicester (acrylonitrile-methylacrylate copolymer), viscose paper (cellophane), ethyl cellulose (thyl cellulose), acetic acid is knitted dimension plain (cellulose acetate), cellulose acetate-butyrate (cellulose acetatebutyrate), cellulose propionate (cellulose propionate), cellulose triacetate fibre-forming polymers (cellulosic polymers) such as (cellulosetriacetate), tygon (polyethylene), tygon and vinyl acetate copolymerized compound (polyethylene-vinyl acetatecopolymers), ethene ionomer (ionomers (ethylene polymers)), tygon nylon polymer (polyethylene-nylon copolymers), polypropylene (polypropylene), methylpentene polymer (methyl pentene polymers), polyvinyl fluoride (polyvinylfluoride) or fragrant aluminium compound (aromatic polysulfones) etc.
By the covalency bond of self assembled monolayer 310, to change substrate 410 Surface Physical character, for example change of hydrophilic and hydrophobic and liquid contact angle with substrate 410 generations.Therefore, on substrate 410, just can define hydrophilic region 410a and water repellent region 310a.In the present embodiment, because the surface nature of substrate 410 is a water wettability, and the surface nature of self assembled monolayer 310 is a hydrophobicity, therefore when self assembled monolayer 310 is arranged on the substrate 410, the zone that self assembled monolayer 310 is covered is water repellent region 310a, and the zone that self assembled monolayer 310 is exposed is hydrophilic region 410a, shown in Fig. 2 E.
Please refer to Fig. 2 F, on substrate 410, be coated with liquid material, on hydrophilic region 410a, to condense a plurality of liquid lens.Owing to divide into water repellent region 310a and hydrophilic region 410a on the substrate 410, therefore when being coated with liquid material on the substrate 410, under capillary effect, this liquid material will condense a plurality of liquid lens on hydrophilic region 410a.More specifically, because liquid lens material has free-flowing properties, therefore when this liquid material runs into the less water repellent region 310a of surface energy, liquid material can be repelled and mobile toward the bigger hydrophilic region 410a of surface energy.In addition, under capillary effect, liquid material will pool hemispherical, to form liquid lens.
Then, solidify these liquid lens, forming a plurality of lens 320, and the mode of solidifying can be to utilize ultraviolet light or heating.So far, lens arra 300 is roughly finished.That above-mentioned lens 320 have is transparent, physical strength is high, the tool chemical stability, obtain and characteristics such as low price easily.In addition, the refractive index of lens 320 is between 1-2.For example, the material of lens 320 for example is epoxy resin, acryl, polysiloxane, polyimide, polyetherimide, poly-fluorine cyclo-butane, benzocyclobutane, polycarbonate, plexiglass, poly-fluorine fat, dimethione or other macromolecular material.
Fig. 3 A is according to the vertical view of a kind of optical elements array device of one embodiment of the invention, and Fig. 3 B is the sectional view along the A-A ' line of Fig. 3 A.Please refer to Fig. 3 A and Fig. 3 B, optical elements array device 500 comprises optical elements array device main body 510 and lens arra 520.Wherein, optical elements array device main body 510 for example is display, light emitting diode, optical detector or solar cell.In addition, lens arra 520 is arranged on the surface of optical elements array device main body 510.This lens arra 520 comprises self assembled monolayer 522 and a plurality of lens 524, wherein self assembled monolayer 522 is arranged on the surface of optical elements array device main body 510, and self assembled monolayer 522 defines water repellent region 522a and hydrophilic region 510a from the teeth outwards.In addition, these lens 524 are arranged on the hydrophilic region 510a.
In the present embodiment, when the surface nature of optical elements array device main body 510 is hydrophobicity,, for example use ultraviolet light ozone (UV ozone) or oxygen plasma (O2 plasma), just can obtain hydrophilic surface as long as carry out surfaction.For example, when the surface nature of optical elements array device main body 510 is a hydrophobicity, and the surface nature of self assembled monolayer 522 is when being water wettability, the zone that self assembled monolayer 522 is covered is a hydrophilic region, and the zone that self assembled monolayer 522 is exposed is a water repellent region.
It should be noted that, the manufacture method of above-mentioned lens arra is not limited on display, light emitting diode, optical detector or the solar cell and forms lens arra, and the manufacture method of above-mentioned lens arra can form lens arra on the optical elements array device surface of various kenels.
With regard to light emitting diode, lens arra not only can reduce the generation of total reflection, more can destroy waveguiding structure (wave guide structure) and microresonator effect (microcavityeffect), to increase light extraction efficiency.
With regard to optical detector, lens arra can concentrate on photosensitive area with light signal, and its result not only can promote the utilization factor of light and improve the signal of optical detector and the ratio of noise, can shorten the reaction time simultaneously, reduces distortion.
With regard to solar cell, lens arra can increase the absorption of solar cell to surround lighting, to remedy the deficiency of energy conversion efficiency.In addition, therefore the cost of manufacture costliness of solar cell increases lens arra in solar cell surface at present, can effectively reduce the usable floor area of element.
In sum, the manufacture method of lens arra of the present invention can be applied in electronic products such as light emitting diode, optical detector and solar cell, to improve photoelectric efficiency.In addition, the manufacture method of lens arra of the present invention does not need expensive machine and complicated technology, therefore can reach quick, a large amount of and produce, and have the advantage that reduces cost.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; any person of ordinary skill in the field; without departing from the spirit and scope of the invention; when can doing a little change and improvement, so the present invention's protection domain is as the criterion when looking the claim person of defining.
Claims (17)
1. the manufacture method of a lens arra is characterized in that comprising:
On substrate, form self assembled monolayer, to form hydrophilic region and water repellent region;
On this substrate, be coated with liquid material, on this hydrophilic region, to condense a plurality of liquid lens; And
Solidify above-mentioned these liquid lens, to form a plurality of lens.
2. the manufacture method of lens arra according to claim 1 it is characterized in that the zone that this self assembled monolayer covers is this hydrophilic region, and the zone that this self assembled monolayer exposed is this water repellent region.
3. the manufacture method of lens arra according to claim 1 it is characterized in that the zone that this self assembled monolayer covers is this water repellent region, and the zone that this self assembled monolayer exposed is this hydrophilic region.
4. the manufacture method of lens arra according to claim 1 is characterized in that the method that forms this self assembled monolayer comprises:
On first mould, form glue-line;
Solidify this glue-line, to form second mould;
Separate this first mould and this second mould; And
Use this second mould on this substrate, to form this self assembled monolayer in the micro-contact printing mode.
5. the manufacture method of lens arra according to claim 4, the material that it is characterized in that this glue-line is a plexiglass.
6. the manufacture method of lens arra according to claim 1 is characterized in that the method for solidifying above-mentioned these liquid lens comprises the mode of utilizing ultraviolet ray or heating.
7. a lens arra is suitable for being arranged on the substrate, it is characterized in that this lens arra comprises:
Self assembled monolayer is arranged on this substrate, and this self assembled monolayer defines hydrophilic region and water repellent region on this substrate; And
A plurality of lens are arranged on this hydrophilic region.
8. lens arra according to claim 7, the general formula that it is characterized in that this self assembled monolayer is X-R-Y, this X functional group is suitable for producing bond with this substrate, this R is the character of surface that hydrocarbon chain, this Y functional group are suitable for changing this substrate.
9. lens arra according to claim 8 is characterized in that this X functional group comprises symmetry or asymmetrical silane compound, trichlorosilane, trimethoxy silane, disulfide, sulfide, diselenide, selenide, selenol, mercaptan compound, nitrous compound, isonitrile, three phosphides, rhodanide, xanthate, mercaptan compound, hydrogen phosphide, thiocarboxylic acid, carbodithioic acid, carboxylic acid, hydroxy acid or hydroximic acid.
10. lens arra according to claim 8 is characterized in that this Y functional group comprises hydroxyl, carboxyl, amido, acetaldehyde, hydrazine, the metallic compound that contains carbonyl, epoxide or vinyl.
11. lens arra according to claim 7 is characterized in that the material of above-mentioned these lens comprises epoxy resin, acryl, polysiloxane, polyimide, polyetherimide, poly-fluorine cyclo-butane, benzocyclobutane, polycarbonate, plexiglass, poly-fluorine fat or dimethione.
12. an optical elements array device is characterized in that comprising:
The optical elements array device main body;
Lens arra is arranged on the surface of this optical elements array device main body, and this lens arra comprises:
Self assembled monolayer is arranged on this surface of this optical elements array device main body, and this self assembled monolayer defines hydrophilic region and water repellent region on this surface; And
A plurality of lens are arranged on this hydrophilic region.
13. optical elements array device according to claim 12, the general formula that it is characterized in that this self assembled monolayer is X-R-Y, and this X functional group is suitable for producing bond with this substrate, this R is the character of surface that hydrocarbon chain, this Y functional group are suitable for changing this substrate.
14. optical elements array device according to claim 13 is characterized in that this X functional group comprises symmetry or asymmetrical silane compound, trichlorosilane, trimethoxy silane, disulfide, sulfide, diselenide, selenide, selenol, mercaptan compound, nitrous compound, isonitrile, three phosphides, rhodanide, xanthate, mercaptan compound, hydrogen phosphide, thiocarboxylic acid, carbodithioic acid, carboxylic acid, hydroxy acid or hydroximic acid.
15. optical elements array device according to claim 13 is characterized in that this Y functional group comprises hydroxyl, carboxyl, amido, acetaldehyde, hydrazine, the metallic compound that contains carbonyl, epoxide or vinyl.
16. optical elements array device according to claim 12 is characterized in that the material of above-mentioned these lens comprises epoxy resin, acryl, polysiloxane, polyimide, polyetherimide, poly-fluorine cyclo-butane, benzocyclobutane, polycarbonate, plexiglass, poly-fluorine fat or dimethione.
17. optical elements array device according to claim 12 is characterized in that this optical elements array device main body comprises display, light emitting diode, optical detector or solar cell.
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| CN 200610065125 CN101038347A (en) | 2006-03-17 | 2006-03-17 | Manufacture of lens array, lens array and optical elements array device |
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| CN 200610065125 CN101038347A (en) | 2006-03-17 | 2006-03-17 | Manufacture of lens array, lens array and optical elements array device |
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