CN101025471A - Multibeam straight-line laser scanning device - Google Patents
Multibeam straight-line laser scanning device Download PDFInfo
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- CN101025471A CN101025471A CN 200610003187 CN200610003187A CN101025471A CN 101025471 A CN101025471 A CN 101025471A CN 200610003187 CN200610003187 CN 200610003187 CN 200610003187 A CN200610003187 A CN 200610003187A CN 101025471 A CN101025471 A CN 101025471A
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Abstract
The invention relates to a multi-line laser beam scanning device, which includes a semiconductor laser group, straight-shooting group, a MEMS Swing Mirror Group, and a linear scanning lens group, of which, the semiconductor laser group may shoot multiple laser beam as four beams, respectively the Collimation group formed parallel beam, and each shot to the MEMS Swing Mirror Group, then through the harmonic swing of Mirror Group to linear scanning lens group which respectively reflected from multi-channel laser beam and then by linear scanning lens group enables multi-channel laser beams were projected onto the surface imaging (photosensitive drum), and do the scanning with a uniform velocity rate, and so Laser scanning device achieve the required function of linear scan.
Description
Technical field
The present invention provides a kind of straight-line laser scanning device of multiple beam, especially refer to that a kind of structure kenel of utilizing in-line arrangement micro electronmechanical (MEMS Array) constitutes the microminiaturization in-line arrangement micro electro mechanical swing formula reflector group of a vertically stacked, and utilize several F-Sin Theta lens vertically stacked being aligned scan mirror groups with corresponding to this in-line arrangement reflector group, use the volume that effectively dwindles color printer and promote scan efficiency person.
Background technology
At present in the application technology of laser beam printer LBP (Laser Beam Printer), included U.S. Pat 5,128,795, US5,162,938, US5,329,399, US5,710,654, US5,757,533, US5,619,362, US5,721,631, US5,553,729, US5,111,219, US5,995,131, US6,724,509, and Japanese 4-50908, many patents such as Japan 5-45580, and the laser scanning device LSU of its use (Laser Scanning Unit) module mostly is to utilize the scanning motion (laser beam scanning) of the polygonal mirror of a high speed rotating (polygonmirror) to control laser beam, and it is to utilize the semiconductor laser to send a laser beam (laser beam), and this laser beam is through a collimating mirror (collimator lens), form parallel beam again through an aperture (aperture), parallel beam is again through a cylindrical mirror (cylindrical lens), and this cylindrical mirror mainly to act on be the width of aforementioned parallel beam on sub scanning direction (subscanning direction) Y-axis can be focused on along the parallel direction of main scanning direction (main scanning direction) X-axis and to form a wire imaging (line image), be projected to again on the polygonal mirror (polygonal mirror) of a high speed rotating; Evenly be laid with polygonal mirror continuously on this polygonal mirror (polygonal mirror), it just is positioned at or approaches the focal position of above-mentioned wire imaging (line image); And the reflection direction of mat polygonal mirror control laser beam, when continuous plural catoptron during at high speed rotating can be incident upon on the catoptron laser beam along the parallel direction of main scanning direction (X-axis) with same tarnsition velocity (angular velocity) deflective reflector to F-Theta lens on; And this F-Theta lens is to be arranged at the polygonal mirror side, can be single-piece lens structure (single-element scanning lens) or for the two-piece type lens structure (as US5,995, shown in 131 the patent figure), and this F-Theta lens mainly is to make the laser beam of injecting the F-Theta lens via the reflection of polygonal mirror upper reflector can be focused into an Elliptical circular light spot and be incident upon an imaging surface (image plane, that is light receiving surface, photoreceptor drum) on, and the requirement of reaching linear sweep (scanning linearity) simultaneously.So, have following point in the use for the above-mentioned laser scanning device LSU that commonly uses:
(1) the manufacture difficulty height and the price of this rotary multi mirror (polygon mirror) are not low, increase the cost of manufacture of LSU relatively.
(2) this polygonal mirror must rotate (as 40000 rev/mins) function by the tool height, precision requirement is high again, the minute surface Y-axis width that causes reflecting surface on the general polygonal mirror as thin as a wafer, make to commonly use and must set up a cylindrical mirror (cylindrical lens) among the LSU so that laser beam can focus on being aligned (becoming a bit on the Y-axis) through this cylindrical mirror and be incident upon on the catoptron of polygonal mirror again, causing increases member and assembling operation flow process.
(3) commonly use polygonal mirror must be highly rotation (as 40000 rev/mins), cause Rotation Noise and improve relatively, and polygonal mirror must expend the long period from activating to working speed, increase the stand-by period after starting shooting.
(4) commonly use in the package assembly of LSU, the laser beam central shaft that is projected to the polygonal mirror catoptron is not the central rotating shaft over against polygonal mirror, when causing the F-Theta lens that matches in design, must consider simultaneously polygonal mirror from axle offset issue (deviation), increase the design of F-Theta lens relatively and make to go up trouble.
Again, the employed laser scanning device LSU of color printer LBP module must be controlled the reflection direction of multiple tracks (as 4 roads) laser beam simultaneously to reach the requirement of linear sweep simultaneously, as U.S. Pat 6,798,820, US6,839,074, US6,914,705, and the employed laser scanning device LSU of above-mentioned United States Patent (USP) module is still the reflection direction that the polygonal mirror that utilizes a high speed rotating is controlled the multiple tracks laser beam, causing it not only has the above-mentioned disappearance of commonly using laser scanning device LSU, and its structure and the configuration more complicated, so both increased the difficult design degree, also increase the volume of color printer relatively, do not meet compact requirement.
Summary of the invention
Fundamental purpose of the present invention is straight-line laser scanning device (the multi-beam LSU that is to provide a kind of multiple beam, Multi-Beam Laser Scanning Unit), it is a structure kenel of utilizing in-line arrangement micro electronmechanical (MEMS Array), make several micro electro mechanical swing formula catoptron vertically stacked become a microminiaturization in-line arrangement reflector group, utilize F-Sin θ linear sweep eyeglass to commonly use F-θ linear sweep eyeglass again with replacement, make and to become the angle variable quantity of sine relation to make correction in time at MEMS simple harmonic quantity swing type catoptron, and make several F-Sin Theta lens vertically stacked become an in-line arrangement linear sweep lens set, with corresponding to this in-line arrangement reflector group, use the scanning that makes the multiple tracks laser beam speed such as on the imaging surface group, make; By this, but mat semiconductor laser group penetrates the multiple tracks laser beam as 4 road light beams, make it form parallel beam through this collimating mirror group respectively, be incident upon in-line arrangement micro electro mechanical swing formula reflector group more respectively, simple harmonic quantity formula swing through this reflector group makes the multiple tracks laser beam reflex to in-line arrangement F-Sin θ linear sweep lens set respectively again, be incident upon the scanning that imaging surface group (photosensitive drums) goes up speed such as work more respectively, to reach the desired linear sweep function of laser scanning device, make and can be applicable to color printer (LBP, Laser Beam Printer) light engine is used the volume that effectively dwindles color printer and is promoted scan efficiency person.
The present invention again a syllabus be the straight-line laser scanning device that is to provide a kind of multiple beam, it is to cause luminous point spacing on imaging surface to present to increase in time with simple harmonic motion mode reflection lasering beam and the speed scanning phenomenon such as non-of successively decreasing at micro electro mechanical swing formula catoptron, and design a F-Sin Theta lens especially, this F-Sin Theta lens can be revised the angle variable quantity that becomes sine relation in time, the speed scanning phenomenon such as non-that micro electronmechanical simple harmonic motion catoptron was successively decreased by originally increasing in time at imaging surface glazing dot spacing, speed scanning such as be modified to, speed scanning such as laser beam is incident upon do on the imaging surface, and reaches the desired linear sweep effect of laser scanning device.
Another object of the present invention is the straight-line laser scanning device that is to provide a kind of multiple beam, wherein, this other semiconductor lasers group, the collimating mirror group, micro electro mechanical swing formula reflector group, and institute's other semiconductor lasers of use respectively in each in-line arrangement group body such as F-Sin Theta lens group, collimating mirror, micro electro mechanical swing formula catoptron, and the individual number of in-line arrangement F-Sin θ linear sweep eyeglass, can be corresponding one to one, as utilize one/two/four other semiconductor lasers to send four road laser beam, and utilize four collimating mirrors, four micro electro mechanical swing formula catoptrons, four F-Sin θ linear sweep eyeglasses and corresponding matching, use to make and respectively organize employed each individual structure and specificationization in the body, help mass production and assembling operation.
Another purpose of the present invention is the straight-line laser scanning device that is to provide a kind of multiple beam, wherein, this other semiconductor lasers group, the collimating mirror group, micro electro mechanical swing formula reflector group, and institute's other semiconductor lasers of use respectively in each in-line arrangement group body such as in-line arrangement F-Sin θ linear sweep lens set, collimating mirror, micro electro mechanical swing formula catoptron, and the individual number of in-line arrangement F-Sin θ linear sweep eyeglass, can be with the need and appropriate combination, as utilize the semiconductor laser respectively to send two road laser beam, utilize two collimating mirrors again, two micro electro mechanical swing formula catoptrons, two F-Sin θ linear sweep eyeglasses and corresponding matching, use reduced volume, and increase the selectivity of each individual structural design and manufacturing, help mass production and reduce cost.
The present invention again another syllabus be the straight-line laser scanning device that is to provide a kind of multiple beam, wherein the multiple tracks laser beam of this other semiconductor lasers group ejaculation is as 4 road light beams, make the machine center (be the oscillation centre of in-line arrangement catoptron) of each laser beam central shaft over against this in-line arrangement micro electro mechanical swing formula reflector group, use eliminate the person's of commonly using polygonal mirror from axle deviation (ddeviation), in order to do design and the assembling that can simplify in-line arrangement F-Sin θ linear sweep lens set.
Another syllabus of the present invention be the straight-line laser scanning device that is to provide a kind of multiple beam, wherein between this collimating mirror group and this micro electro mechanical swing formula reflector group, can be provided with or not be provided with a cylindrical mirror (cylindrical lens) group with the need, use member and the assembling operation flow process of simplifying laser scanning device.
Description of drawings
Fig. 1 is the schematic perspective view of a preferred embodiment of the present invention.
Look synoptic diagram on Fig. 2 Fig. 1.
Fig. 3 is another visual angle schematic perspective view of the part (not representing shell) of Fig. 1.
Fig. 4 is another visual angle schematic perspective view of Fig. 3.
Fig. 5 is the three-dimensional enlarged diagram of in-line arrangement micro electro mechanical swing formula reflector group one embodiment among the present invention.
Fig. 6 is the three-dimensional enlarged diagram of in-line arrangement F-Sin Theta lens group one embodiment among the present invention.
Fig. 7 is the three-dimensional enlarged diagram of in-line arrangement collimating mirror group one embodiment among the present invention.
Fig. 8 is the three-dimensional enlarged diagram of in-line arrangement cylinder lens set one embodiment of the present invention.
Fig. 9 (A), Fig. 9 (B), Fig. 9 (C) are the optical path synoptic diagram of Fig. 1 of the present invention and other two embodiment.
Figure 10 (A), Figure 10 (B) be respectively the rotary multi mirror and with micro electro mechanical swing formula mirror reflects after reflection angle θ and the graph of a relation of time t.
Figure 11 (A), Figure 11 (B) be respectively the rotary multi mirror and with the scanning spot trajectory diagram of micro electro mechanical swing formula catoptron.
Figure 12 (A), Figure 12 (B) are respectively optical design (layout) synoptic diagram of the laser scanning device (LSU) of rotary multi mirror and micro electro mechanical swing formula catoptron.
Figure 13 (A), Figure 13 (B) are respectively that rotary multi mirror and micro electro mechanical swing formula catoptron use F-Theta lens and F-Sin Theta lens to produce the optical characteristics synoptic diagram of distortion (Distortion) respectively.
Description of reference numerals: laser scanning device 1; Other semiconductor lasers group 10; Other semiconductor lasers 11,12,13; Collimating mirror group 20; Collimating mirror 21; Micro electro mechanical swing formula reflector group 30; Micro electro mechanical swing formula catoptron 31,32,33; Linear sweep lens set 40; F-Sin Theta lens 41,42,43; Cylindrical mirror group 50; Cylindrical mirror 51,52,53; Imaging surface (photosensitive drums) 60.
Embodiment
For making the present invention clear and definite more full and accurate, lift preferred embodiment now and cooperate the following icon, structure of the present invention and technical characterictic thereof are described in detail as the back:
Shown in figure 1-7, it is the schematic perspective view of straight-line laser scanning device LSU (Multi-Beam Laser Scanning Unit) preferred embodiment of multiple beam of the present invention, now the laser scanning device 1 with four road light beams is an example, the in-line arrangement LSU1 of multiple beam of the present invention comprises semiconductor laser group 10, one collimating mirror group 20, one micro electro mechanical swing formula catoptron (MEMS oscillatory mirror) group 30, an and linear sweep lens set 40, wherein, this other semiconductor lasers group 10 can utilize four groups of single beam other semiconductor lasers LD (single-beam Laser Diode) 11 to form, each single beam other semiconductor lasers 11 penetrates a laser beam shown in Fig. 9 (A), or utilize two groups of twin-beam other semiconductor lasers (dual-beam LD) 12 to form, each twin-beam other semiconductor lasers 12 can penetrate the dual-laser bundle shown in Fig. 9 (B), or utilize a TO-Can to form shown in Fig. 9 (C), or utilize the other semiconductor lasers of multiple beam to form by the other semiconductor lasers 13 of four road laser beam; And in the present embodiment, four groups of single beam other semiconductor lasers 11 or two groups of twin-beam other semiconductor lasers (dual-beam LD) 12 or the four road laser beam of TO-Can other semiconductor lasers 13 or the other semiconductor lasers of multiple beam, be that to become an in-line arrangement structure with vertically stacked be good for Fig. 1-4 and shown in Figure 7, and in Fig. 7, each collimating mirror 21 is arranged on the front end place of collimating mirror external member inside, and the inner other end of collimating mirror external member promptly is provided with semiconductor laser 11 respectively.
Four laser beam that other semiconductor lasers group 10 is sent be respectively through this collimating mirror group 20 to form parallel beam, this collimating mirror group 20 can utilize several collimating mirrors to form, as utilize four groups of collimating mirrors (collimator lens) 21 to form as Fig. 1-4 and shown in Figure 7, or utilize the enough large-numerical aperture (NA of single tool, numericalaperture) collimating mirror constitutes (figure does not show), and enough large-numerical apertures represent that it has the light collecting light ability of multi-beam laser, so that collimating mirror group 20 can be accepted four road laser beam of other semiconductor lasers group 10, and form respectively parallel beam again outgoing to micro electro mechanical swing formula reflector group 30; And in the present embodiment, four groups of collimating mirrors 21 are that to become an in-line arrangement structure with vertically stacked be good, use corresponding one to one respectively in four road laser beam shown in Fig. 9 (A).
Four laser beam can be distinguished again through a cylindrical mirror group 50 after penetrating through collimating mirror group 20, this cylindrical mirror group 50 can utilize four cylindrical mirrors (cylindrical lens) 51 to form as Fig. 1-4 and Fig. 8, shown in 9 (A), or utilize two groups of cylindrical mirrors 52 to form shown in Fig. 9 (B), or utilize one group of cylindrical mirror 53 to form shown in Fig. 9 (C), and cylindrical mirror mainly to act on be the width of aforementioned parallel beam on sub scanning direction (sub scanningdirection) Y-axis to be focused on to go up in imaging surface group 60 (light receiving surface, photoreceptor drum) along the parallel direction of main scanning direction (main scanning direction) X-axis form wire imaging (line image); And in the present invention, because of not using the polygonal mirror (polygonmirror) of high speed rotating, so cylindrical mirror group 50 can be provided with or not be provided with the need, if have, then four collimating mirrors 51 or two groups of cylindrical mirrors 52 or one group of cylindrical mirror 53 are that to become an in-line arrangement structure with vertically stacked be good, use corresponding respectively to four road laser beam.
Four laser beam can be incident upon this micro electro mechanical swing formula reflector group 30 through cylindrical mirror group 50 respectively after penetrating, this reflector group 30 is to utilize the structure kenel of in-line arrangement micro electronmechanical (MEMS Array), make several micro electro mechanical swing formula catoptrons (MEMS oscillatory mirror) but 31 vertically stacked become an in-line arrangement structure; And in the present embodiment, this MEMS reflector group 30 can utilize four groups of MEMS catoptrons 31 to form, make each MEMS catoptron 31 a corresponding laser beam such as Fig. 1-4 and shown in Figure 5, or utilize two MEMS catoptrons 32 to form, and the vertical width of the minute surface of MEMS catoptron 32 (highly) is bigger than MEMS catoptron 31, make each MEMS catoptron 32 can corresponding four road laser beam shown in Fig. 9 (B), or utilize a MEMS catoptron 33 to form, and the vertical width of the minute surface of MEMS catoptron 33 (highly) is bigger than MEMS catoptron 32, make a MEMS catoptron 33 can corresponding four road laser beam shown in Fig. 9 (C); Again in the present embodiment, four MEMS catoptrons 31, or two MEMS catoptron 32 or a MEMS catoptron 33 be vertically stacked become an in-line arrangement structure as Fig. 1-4,5 and Fig. 9 (B), (C) shown in, use the volume that effectively dwindles the multi-beam laser scanister, and then dwindle the volume of color printer, reach compact requirement.
The simple harmonic quantity formula swing of several catoptrons 31/32/33 on the four laser beam difference mat reflector group 30 again, make four road laser beam reflex to linear sweep lens set 40 respectively, again through the refraction of this linear sweep lens set 40, make four road laser beam be incident upon the scanning of speed such as work on the imaging surface (photosensitive drums) 60 respectively, to reach the desired linear sweep function of laser scanning device; This linear sweep lens set 40 is to utilize several F-Sin Theta lens 41 vertically stacked to become an in-line arrangement structure, and in the present embodiment, this linear sweep lens set 40 is to utilize four F-Sin Theta lens 41 to form, and make four F-Sin Theta lens 41 vertically stacked become an in-line arrangement structure shown in Fig. 1-4,6,9 (A), and each F-Sin Theta lens 41 be corresponding to one the refraction after laser beam shown in Fig. 9 (A), use cooperation MEMS reflector group 30, and effectively dwindle the volume of multi-beam laser scanister.This linear sweep lens set 40 can utilize two F-Sin Theta lens 42 to form shown in Fig. 9 (B) again, or utilizes a F-Sin Theta lens 43 to form shown in Fig. 9 (C).Each F-Sin Theta lens 41/42/43 can be designed to single-piece (one chip, single-element scanning lens) structure or two pieces type (double-disk) structure or multi-piece type (multiple-piece) structure again.
During use, this other semiconductor lasers group 10 can penetrate four road laser beam, four road laser beam form parallel beam through this collimating mirror group 20 respectively again, and parallel beam can through or without a cylindrical mirror group 50, be projected to respectively again on the catoptron of micro electro mechanical swing formula catoptron (MEMS oscillatory mirror) group, and this micro electro mechanical swing formula catoptron (MEMS oscillatory mirror) group 30 is to carry out simple harmonic motion under a certain amplitude of fluctuation, use the reflection direction of this four roads incoming laser beam of control, laser beam is reflexed to be positioned at the F-Sin θ linear sweep lens set 40 of side, four road laser beam are incident upon respectively on the imaging surface (photosensitive drums) 60, and reach the desired linear sweep of a laser scanning device (scanning linearity) effect.
Organize 30 simple harmonic motion (harmonic motion) mode again at this micro electro mechanical swing formula catoptron (MEMS oscillatory mirror), the present invention utilizes the F-Sin Theta lens as the linear sweep eyeglass especially, to reach the requirement of linear sweep (scanning linearity); Now levy feature and action and efficacy at the skill of this F-Sin Theta lens 23, with and and original F-Theta lens between do not exist together and be described as follows:
General traditional laser scanning device (LSU) is to adopt rotary multi mirror (Polygon Mirror) to finish laser beam in sensitization to wait for angular speed rotate
Do the action of scanning on the drum; This moment, laser beam satisfied following formula by the angle of Polygon Mirror reflection:
θ (t)=ω * t, wherein ω is the rotation angle speed of Polygon Mirror ... E (1)
Shown in Figure 10 (A), 11 (A), because polygonal mirror rotates for waiting angular speed, promptly ω is a constant, so reflection angle θ is proportional to time t; Change speech, under the identical time interval, it also is identical that reflection angle θ measures over time.The laser beam that is reflected focuses on imaging surface (Image Plane) via eyeglass and locates, and this time point satisfies following formula at the position of Y direction Y ':
Y '=L
P* Tan (θ (t)), wherein L
PBe the mirror surface of polygonal mirror distance to imaging surface ... E (2)
Shown in dotted line among Figure 11 (A), increase in time at the luminescent spot track of imaging surface, and between between luminous point and next luminous point distance also with cumulative, promptly the speed of luminous point is non-constant speed and cumulative on imaging surface, and this phenomenon is unallowed in LSU; This moment, this eyeglass was except the function that focuses on, and still needed and revised the function of the non-movement at the uniform velocity of luminous point, and the track that makes luminous point such as is at a speed, makes revised light spot position Y ' satisfy following formula:
Y '=F* θ (t), wherein F is the focal length of this eyeglass ... E (3)
Shown in solid line among Figure 11 (A), the variable quantity of the reflection angle that the identical time interval is corresponding identical, just the light spot position Y ' that is corresponded to as can be known by E (3) formula is equally spaced variation, so claim this kind to have simultaneously to revise that luminous point size and its track of correction are that the special lens of constant speed is the F-Theta lens; And for example shown in Figure 12 (A), in optical design, this eyeglass be will be painstakingly generation one " barrel distortion (Negative Distortion orBarrel Distortion) ", being about to original light path (Original Beam Path) bends to print center (Printing Center) via the F-Theta lens, and by eyeglass light beams bent and the original position residual quantity of light beam on imaging surface d1, d2, d3 shown in Figure 11 (A)), outwards cumulative by the center.
And the present invention utilizes a micro electro mechanical swing formula catoptron (MEMS oscillatory mirror) to replace polygonal mirror (Polygon Mirror), and the motor pattern of micro electro mechanical swing formula catoptron is simple harmonic motion (Harmonic Motion), different with the rotary multi mirror, promptly laser beam after the swing type mirror reflects reflection angle θ and the pass of time t be:
θ(t)＝θ
S*Sin(2πf*t)………E(4)
Wherein: f is the sweep frequency of MEMS Mirror;
θ
SFor light beam behind MEMS Mirror, the scanning angle of monolateral maximum;
Shown in Figure 10 (B), under the identical time interval, the variable quantity of pairing reflection angle is also inequality and for successively decreasing, and is one to become the relation of sine function (Sinusoidal) with the time; It once is a complete cycle that micro electro mechanical swing formula catoptron swings back and forth, and only is four minutes one-period shown in Figure 10 (B), promptly reaches maximum reflection angle θ S this moment.
Shown in Figure 11 (B), the position Y ' that in like manner can get luminous point also satisfies E (2), and E (4) substitution E (2) can be got:
Y′＝L
M*Tan[θ
S*Sin(2πf*t)]，………E(5)
Wherein, L
MBe the distance of mirror surface to imaging surface
By E (5) Shi Kede, between luminous point on the imaging surface and next luminous point, successively decrease apart from increasing in time, promptly the speed of luminous point is non-constant speed and successively decreases on imaging surface; Therefore and this phenomenon is opposite with the situation of rotary multi mirror (Polygon Mirror), must add a special lens and revise this phenomenon, makes it scanning of speed such as do on imaging surface; Because this eyeglass is to revise at the angle variable quantity that becomes sine relation in time, and the different employed F-Theta lens of rotary multi mirror that is used for, so be called the F-Sin Theta lens; And in optical design, this F-Sin Theta lens is painstakingly to produce one " pincushion distortion (PositiveDistortion or Pincushion Distortion) ", being about to original light path bends to printing terminal (Printing End) via the F-Sin Theta lens, shown in Figure 11 (B), and by F-Sin Theta lens light beams bent and original light beam position residual quantity such as d1 ', d2 ', the d3 ' on imaging surface, outwards cumulative by the center.
Again with reference to Figure 12 (A), (B), it is respectively the optical design of the laser scanning device (LSU) of rotary multi mirror (Polygon Mirror) and micro electro mechanical swing formula catoptron (MEMS oscillatory mirror), wherein, optics is that the eyeglass in the system all has the function of revising light spot position, make speed such as its sweep speed on imaging surface is, be under identical time interval, between luminous point and next luminous point apart from for equating.
Again with reference to Figure 13 (A), (B), it is respectively the employed F-Theta lens of laser scanning device (LSU) of rotary multi mirror and micro electro mechanical swing formula catoptron and the F-Sin Theta lens optical characteristics in distortion (Distortion), Figure 13 (A) is the optical characteristics of expression one " barrel distortion ", and Figure 13 (B) then is the optical characteristics of " pincushion distortion ".
Again, the present invention utilizes several micro electro mechanical swing formula catoptron 31/32 vertically stacked to become an in-line arrangement reflector group 30, and utilizes several F-Sin Theta lens 4142 to form an in-line arrangement linear sweep lens set 40; And known person be utilize a rotary multi mirror and F-Theta lens with the laser scanning device (LSU) of forming a multiple beam as U.S. Pat 6,798,820, US6,839,074, US6,914,705, so architectural feature of the present invention is different with known person; And the present invention can reach following advantage at least:
(1) micro electro mechanical swing formula reflector group of the present invention is to utilize the structure kenel of in-line arrangement micro electronmechanical (MEMS Array), make several micro electro mechanical swing formula catoptron vertically stacked become a microminiaturization in-line arrangement reflector group, and utilize several F-Sin Theta lens vertically stacked to become an in-line arrangement linear sweep lens set, with corresponding to this in-line arrangement reflector group, therefore be applied to color printer (LBP, during Laser Beam Printer) light engine, can effectively dwindle the volume of color printer and promote scan efficiency person.
(2) in laser scanning device (LSU) module, a cylindrical mirror (cylindricallens) must be set again, can make the optical design of F-Sin Theta lens will be firmer (more robust) and higher tolerance (highertolerance).
(3) machine center of laser beam central axial alignment micro electro mechanical swing formula catoptron of the present invention, no longer include commonly use polygonal mirror (polygon mirror) from axle offset issue (deviation), therefore when design F-Sin Theta lens, symmetry optical region (symmetric optical field) can be only considered, and the design and the making of F-Sin Theta lens can be simplified.
(4) simple harmonic motion of micro electro mechanical swing formula catoptron of the present invention (harmonic motion) can be reached working speed after activating at once, almost there is not stand-by time, can have a higher running speed, even it is high to use gas formula bearing motor (air-bearing motor) to go back than polygonal mirror motor (polygon motor), so the scan efficiency of micro electro mechanical swing formula catoptron mems mirror is preferable.
(5) simple harmonic motion of micro electro mechanical swing formula catoptron of the present invention (harmonic motion) is the forward and reverse swing under the moving amplitude of a certain fixed pendulum, direction of scanning (scanning direction) can two-wayly be carried out back and forth, cause the following of same running speed, the bilateral scanning speed of micro electro mechanical swing formula catoptron can double the simple scanning speed of polygonal mirror, promotes scan efficiency relatively.
In sum, the present invention can reach desired effect by above-mentioned disclosed structure really, and does not see the also unexposed use of publication before the present patent application, has really met the important documents such as novelty, progress of patent.Only, above-mentioned graphic and explanation of taking off only is embodiments of the invention, and is non-for limiting embodiments of the invention; Generally be familiar with the personage of this skill, it complies with feature category of the present invention, and other equivalence of being done changes or modifies, and all should be encompassed in the claim of following this case.
Claims (10)
1. the straight-line laser scanning device of a multiple beam, it is characterized in that comprising semiconductor laser group, a collimating mirror group, a micro electro mechanical swing formula reflector group, reach a F-sin θ linear sweep lens set, wherein: the other semiconductor lasers group, can launch several laser beam and be incident upon the collimating mirror group respectively;
The collimating mirror group can be accepted several laser beam of other semiconductor lasers group, and outgoing is to micro electro mechanical swing formula reflector group again to form parallel beam respectively, and the main shaft of each laser beam is a swinging center of aiming at micro electro mechanical swing formula catoptron;
Micro electro mechanical swing formula reflector group, comprise several micro electro mechanical swing formula catoptrons, and utilize the micro electronmechanical structure kenel of in-line arrangement, make several micro electro mechanical swing formula catoptron vertically stacked become an in-line arrangement structure, each catoptron is its micro electro mechanical swing structure of mat and to carry out simple harmonic motion formula swing under a certain amplitude of fluctuation, so that incoming laser beam reflexes to F-sin θ linear sweep lens set again;
F-sin θ linear sweep lens set, comprise several F-Sin Theta lens, and several F-Sin Theta lens are that vertically stacked becomes an in-line arrangement structure, and each F-Sin Theta lens is corresponding to the laser beam after micro electro mechanical swing formula mirror reflects, and the F-Sin Theta lens can become the angle variable quantity of sine relation to revise at micro electro mechanical swing formula catoptron in time, makes laser beam speed scanning such as do on imaging surface.
2. the straight-line laser scanning device of multiple beam according to claim 1, it is characterized in that, this F-Sin θ mirror is to cause luminous point spacing on imaging surface to present to increase in time with simple harmonic motion mode reflection lasering beam and the speed scanning phenomenon such as non-of successively decreasing designs a F-Sin Theta lens at micro electro mechanical swing formula catoptron, this F-Sin Theta lens can be revised the angle variable quantity that becomes sine relation in time, make micro electronmechanical simple harmonic motion catoptron in the speed scanning phenomenon such as non-that imaging surface glazing dot spacing successively decreased by originally increasing in time, speed scanning such as be modified to.
3. the straight-line laser scanning device of multiple beam according to claim 1 is characterized in that this F-Sin Theta lens can be the single-piece lens structure, or the two-piece type lens structure, or the multi-piece type lens structure.
4. the straight-line laser scanning device of multiple beam according to claim 1 is characterized in that, this other semiconductor lasers group can utilize the single beam other semiconductor lasers to form.
5. the straight-line laser scanning device of multiple beam according to claim 1 is characterized in that, this other semiconductor lasers group can utilize the multi-beam semiconductor laser to constitute.
6. the straight-line laser scanning device of multiple beam according to claim 1 is characterized in that, this collimating mirror group can utilize several collimating mirrors and vertically stacked to become one in upright arrangemently to constitute.
7. the straight-line laser scanning device of multiple beam according to claim 1 is characterized in that, this collimating mirror group utilizes the collimating mirror of single numerical aperture to constitute.
8. the straight-line laser scanning device of multiple beam according to claim 1 is characterized in that the minute surface of this micro electro mechanical swing formula catoptron has vertical width, makes its catoptron can simultaneously corresponding several laser beam.
9. the straight-line laser scanning device of multiple beam according to claim 1, it is characterized in that, between collimating mirror group and micro electro mechanical swing formula reflector group, a cylindrical mirror group can be set, make through each laser beam of collimating mirror and can distinguish again, be projected to again on each catoptron of micro electro mechanical swing formula reflector group through cylindrical mirror.
10. as the straight-line laser scanning device of multiple beam as described in the claim 9, it is characterized in that this cylindrical mirror group can utilize several cylindrical mirrors and vertically stacked to become one in upright arrangemently to constitute.
Priority Applications (1)
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| CN113048908A (en) * | 2021-03-08 | 2021-06-29 | 中国海洋大学 | Submarine landform detection image generation system based on laser scanning |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113048908A (en) * | 2021-03-08 | 2021-06-29 | 中国海洋大学 | Submarine landform detection image generation system based on laser scanning |
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