CN101024248A - Metal powder production apparatus and metal powder - Google Patents
Metal powder production apparatus and metal powder Download PDFInfo
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- CN101024248A CN101024248A CN 200710005184 CN200710005184A CN101024248A CN 101024248 A CN101024248 A CN 101024248A CN 200710005184 CN200710005184 CN 200710005184 CN 200710005184 A CN200710005184 A CN 200710005184A CN 101024248 A CN101024248 A CN 101024248A
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Abstract
The invention relates to a metal powder production device capable of effectively producing micron metallic powder of uniform particle size with enhancing quality. The said device (atomizer) crushes the molten metal into metal powder using atomizing method. The said device comprises supplying part (hopper)for supplying the molten metal, nozzle set under the supplying part, tubular part set between the supplying part and nozzle. The said tubular part makes sure the molten metal sprayed from injector nozzle pass through the cavity bore of tubular part and then contact with fluid beam. In addition, the said tubular part comprises top end air-tight connecting with the supplying part and bottom end approximately at the mid position of the first flow path. The molten metal passes through the said first flow path.
Description
The cross reference of related application
The application requires the Japanese patent application No.2006-039903 that submits on February 16th, 2006 and the priority of the Japanese patent application No.2006-331201 that submits on December 7th, 2006, and above-mentioned Japanese patent application No.2006-039903 and No.2006-331201 clearly incorporate in full at this by reference.
Technical field
The present invention relates to a kind of metal powder production apparatus and a kind of metal dust.
Background technology
Traditionally, by atomization method the metal powder production apparatus (atomizer) that motlten metal is ground into metal dust has been used to produce metal dust.The example of metal powder production apparatus well known in the prior art is included in motlten metal atomizing and the disintegrating apparatus that discloses among the JP-B-3-55522.
Motlten metal atomizing and disintegrating apparatus are provided with jet and nozzle, described jet is used for melt spray on downward direction (or liquid-bath) (motlten metal), and described nozzle has flow passage that the melt-flow of spraying from melt nozzle crosses and the opening slit in the flow passage.Water is injected from the slit of nozzle.
The equipment of above-mentioned technology formerly is designed to by making the melt that flows through flow passage and water collision from slot injection, thereby melt is dispersed into the form of a lot of fine droplets, and makes a lot of fine droplets coolings and solidify.
The melt that sprays from jet freely falls by flow passage, and contacts with water.Yet the path of the passage of melt is with for example variation such as flow velocity, its shape of nozzle of water of several factors, and this can change wherein melt and water position contacting again.
Problem below this has caused: melt changes aspect its dispersion, cooling and curdled appearance, has produced the granularity of the metal dust of being produced or the variation on the particle size distribution thus.
And, because surrounding air is introduced in the flow passage that is depressurized, so near flow passage, produced air stream.Yet when contacting with air, melt can solidify or because oxidation is gone bad or degraded, exists final metal dust the possibility of quality reduction to occur thus owing to temperature reduces.Especially, this problem contains high activity metal composition very at motlten metal and for example becomes outstanding under the situation of Ti and Al.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of metal powder production apparatus, described metal powder production apparatus can be produced effectively has the fine (that is, meticulous of uniform particle size, trickle) metal dust, and the metal dust that provides the quality of producing by described metal powder production apparatus to improve.
A first aspect of the present invention relates to a kind of metal powder production apparatus.Described metal powder production apparatus comprises supplying melting metal supply part and is arranged on the described following nozzle of part of supplying with.Described nozzle comprises flow passage and hole, described flow passage is limited by the inner circumferential surface of nozzle, can flow through described flow passage from the motlten metal of supplying with the part supply, and described flow passage has bottom part, described hole towards the bottom part opening of flow passage, be used to spray a fluid in the flow passage.
By the motlten metal that flows through flow passage is contacted with the fluid that sprays from the hole of nozzle, motlten metal can be disperseed and be transformed into a lot of fine droplets, thereby a lot of fine droplets is cooled and solidifies so that produce metal dust.
Described metal powder production apparatus further comprises tubular part, described tubular part is arranged between the flow passage of supplying with part and nozzle, described tubular part has top, bottom and vestibule, passes through described vestibule to contact with fluid from the motlten metal of supplying with the part supply.
According to above-mentioned metal powder production apparatus,, tubular part supplies with between part and the flow passage, so motlten metal can be directed into the suitable target location of flow passage by tubular part because being arranged on.Therefore, this metal powder production apparatus can be produced the refining metallic powder with uniform particle size effectively.
In above-mentioned metal powder production apparatus, the bottom that preferably described tubular part is arranged to tubular part approximately is positioned at the centre position of flow passage.
This has guaranteed that motlten metal is fed into the appearance part of fierce decompression by the inside of tubular part.As a result, can prevent reliably or suppress and to contact the unfavorable effect that causes with air by motlten metal.
In above-mentioned metal powder production apparatus, preferably described flow passage has the part that its internal diameter that is limited by the inner circumferential surface of nozzle reduces continuously on downward direction.
This helps to make the inner circumferential surface of nozzle level and smooth.The air that is inhaled in the flow passage quickens without any obstacle ground along the inner circumferential surface of the inner-diameter portion whose that reduces gradually, thereby has reduced the interior pressure of flow passage.This feasible drop that can disperse motlten metal imperceptibly and obtain fine sizes.
In above-mentioned metal powder production apparatus, preferably described flow passage has the minimum diameter part, and the bottom that described tubular part is arranged to tubular part is positioned near the minimum diameter part of flow passage.
This flow velocity that has guaranteed the air in the inhalation flow path becomes the fastest at the bottom end vicinity of tubular part, for this reason, pressure is further reduced at bottom end vicinity.This makes and can disperse motlten metal imperceptibly and obtain special fine liquid drops.
In above-mentioned metal powder production apparatus, preferably the top of described tubular part contacts with the supply unit branch.
This makes and can cut off air, described air otherwise will be absorbed and be introduced in the conduit component by the motlten metal that falls on the top of conduit component.As a result, become and can suppress described unfavorable effect (for example oxidation of the reduction of the interference of glide path, temperature and motlten metal), described unfavorable effect is that the motlten metal ingress of air causes.
In above-mentioned metal powder production apparatus, preferably the top of described tubular part is connected to the supply part airtightly.
This makes can prevent more reliably that air is introduced in the tubular part on the top of tubular part.And the bottom part of tubular part is by the decompression of the stream of flow air below tubular part.As a result, motlten metal is injected in such a manner, and promptly it is by the hole sucking-off from tubular part, thereby the material adhesion that prevents to solidify is to the periphery in hole.
In above-mentioned metal powder production apparatus, preferably the vestibule of described tubular part has 1 to 400mm
2Cross-sectional area.
The tubular part that use has this size range makes this metal powder production apparatus can produce the atomic thin metal dust with uniform particle size effectively.
In above-mentioned metal powder production apparatus, preferably described tubular part has the shape of substantial cylindrical.
This guaranteed when motlten metal from the bottom face (bottom part) of tubular part when falling, drop is scattered in the horizontal direction without any contacting with the fluid beam of common cone shape unevenly.As a result, fluid beam makes drop can be disperseed equably and be cooled on the whole, produces the metal dust with uniform particle size thus.This also helps to prevent to introduce, and air stream in the flow passage is by mistake disturbed by tubular part and the reformed possibility of whereabouts circuit of motlten metal thus.
In above-mentioned metal powder production apparatus, preferably described tubular part is provided with separating device, and described separating device is used for substantially equably, separately passes through in the mode of dispersing the motlten metal of the vestibule of tubular part.
Use separating device to make drop drop on the whole flow passage down equably, thereby make drop contact equably substantially, and have and be cooled high cooling efficiency very much and solidify with the cone of fluid beam.This makes and may obtain the even metal powder in reliable more mode.
In above-mentioned metal powder production apparatus, preferably described tubular part has bottom face, and described separating device comprises at least one projection, and described at least one projection is along the circumferencial direction setting of the bottom face of tubular part.
Such projection can easily be used as separating device, and described separating device is used for along the motlten metal that separately passes through the vestibule of tubular part on the circumferencial direction of tubular part substantially equably.
In above-mentioned metal powder production apparatus, preferably described at least one projection comprises a plurality of projectioies.
Even the axis of tubular part for example keeps tilting a little with respect to vertical direction, this also helps to eliminate the possibility that liquid concentrates on the regional area of bottom face.This makes drop drop on the whole flow passage down equably.
In above-mentioned metal powder production apparatus, preferably described a plurality of projectioies are equidistantly arranged substantially along the circumferencial direction of the bottom face of tubular part.
This makes easy circumferencial direction along tubular part be formed uniformly liquid substantially.
In above-mentioned metal powder production apparatus, preferably described at least one projection comprises a projection with tubular shape.
This feasible projection can be as the separating device that can separate motlten metal equably.
In above-mentioned metal powder production apparatus, preferably described at least one projection has sharp-pointed bottom.
This helps to reduce the contact area between drop and the tubular part, thereby makes drop separate fast with tubular part.As a result, can further shorten the lip-deep time that drop rests on tubular part, i.e. time of contacting with air of drop.
In above-mentioned metal powder production apparatus, preferably described tubular part be have diapire, the tubular form of wall is arranged at the bottom, and described separating device comprises a plurality of holes, described a plurality of holes form in diapire and are evenly distributed in the diapire.
This has guaranteed that motlten metal just was divided into little and metal flow uniform-dimension before standing once to break, this makes the more fine liquid drops that can obtain narrow size distribution in once breaking.
In above-mentioned metal powder production apparatus, preferably described tubular part is made by ceramic material.
Preferably use ceramic material, because the ceramic material hear resistance is high especially and the less chemical change that may be subjected to for example oxidation.And ceramic material has shown high relatively heat insulation characteristics (low relatively thermal conductivity), and this provides and has suppressed the advantage that temperature of melt metal reduces.
In above-mentioned metal powder production apparatus, preferably described fluid is a liquid form.
Therefore liquid fluid has greater than the proportion of the proportion of gaseous fluid and thermal capacitance and thermal capacitance, and can be so that motlten metal is finer and cooling molten metal (in the secondary rupture process) effectively in the very short time period.And liquid fluid is easy to absorb more substantial air, and it is more low-level to this means that liquid fluid can be reduced to the pressure in the flow passage (atmospheric pressure), and further is convenient to pulverize motlten metal in a rupture process.
In above-mentioned metal powder production apparatus, preferably described motlten metal comprises at least a among Ti and the Al.
These compositions are high activity, and as common practise, the motlten metal that contains these compositions is difficult to pulverize, because described motlten metal is easy to by easily being oxidized to oxide-film with just contacting in short-term of air.This metal powder production apparatus even can easily make this motlten metal powdered.
In above-mentioned metal powder production apparatus, preferably described nozzle comprises first parts and is arranged in second parts below described first parts, and slot milling is to form the hole between first parts and second parts, described first parts have recessed portion, the circumferencial direction of the moving path of the female part longshore current forms the tubular shape corresponding to the part of flow passage, and air stream is partly disturbed by the female and towards the tubular part orientation, described air stream produces in flow passage under the effect of the fluid that sprays from the hole of nozzle.
This has guaranteed to flow downward towards the external peripheral surface of the air of tubular part orientation stream along tubular part.Therefore, in the bottom part of tubular part, the zone of more close tubular part is crossed in circulation of air, thereby further promotes near the pressure of bottom part of tubular part to reduce.
A second aspect of the present invention relates to a kind of metal dust by the device fabrication of aforementioned metal powder production.
This makes can obtain high-quality metal dust.
In the superincumbent metal dust, preferably described metal dust has the particle mean size in 1 to 20 mu m range.
The metal powder production apparatus of front can be advantageously used in produces this refining metallic powder.
Description of drawings
By describing the preferred embodiment provide below in conjunction with accompanying drawing, of the present invention above and other purpose, feature and advantage will become obvious.Accompanying drawing is as follows:
Fig. 1 is the schematic diagram (longitudinal section) that shows according to the metal powder production apparatus of first embodiment of the invention;
Fig. 2 is by the enlarged partial view (schematic diagram) of the single-point chain line region surrounded (A) among Fig. 1;
Fig. 3 is by the enlarged partial view (schematic diagram) of the single-point chain line region surrounded (B) among Fig. 1;
Fig. 4 is the partial sectional view of another exemplary constructions of indicative icon tubular part;
Fig. 5 is the partial sectional view of an exemplary constructions again of indicative icon tubular part;
Fig. 6 is the enlarged partial view (schematic diagram) of demonstration according to the some parts of the metal powder production apparatus of second embodiment of the invention; With
Fig. 7 is the enlarged partial view (schematic diagram) of demonstration according to the some parts of the metal powder production apparatus of third embodiment of the invention.
The specific embodiment
Hereinafter describe in detail with reference to the accompanying drawings according to metal powder production apparatus of the present invention and metal dust.
First embodiment
At first, with the metal powder production apparatus of describing according to first embodiment of the invention.
Fig. 1 is the schematic diagram (longitudinal section) that shows according to the metal powder production apparatus of first embodiment of the invention, Fig. 2 is by the enlarged partial view (schematic diagram) of the single-point chain line region surrounded (A) among Fig. 1, and Fig. 3 is by the enlarged partial view (schematic diagram) of the single-point chain line region surrounded (B) among Fig. 1.
In the following description, only for the ease of understanding, the upside among Fig. 1 to 3 be called as " top " or " on " and downside be called as " end " or D score.
Metal powder production apparatus shown in Fig. 1 (atomizer) the 1st utilizes atomization method motlten metal Q to be ground into the equipment of metal dust R.Metal powder production apparatus 1 comprises: be used for supply part (funnel) 2 of supplying melting metal Q, be arranged on the nozzle of supplying with below the part 23, be arranged on the tubular part of supplying with between part 2 and the nozzle 3 10.
The structure of various piece will be described now.
As shown in fig. 1, supply with part 2 and have the tubular portion that wall is arranged at the bottom.In supplying with the inner space (cavity part) 22 of part 2, stored the motlten metal Q that the raw material by the deposite metal powder obtain temporarily.
And jet 23 is formed on the center of the bottom 21 of supplying with part 2.Motlten metal Q in the inner space 22 freely falls on downward direction and is injected from jet 23.
First flow passage 31 has circular cross section and extends in vertical direction at the center of nozzle 3.First flow passage 31 is limited by the inner circumferential surface of nozzle 3.
First flow passage 31 has the inner-diameter portion whose that reduces gradually 33 of contraction shape, and (or be called: the part that internal diameter reduces gradually), the internal diameter of the described inner-diameter portion whose that reduces gradually 33 reduces towards the bottom of nozzle 3 gradually from the top end face 41 of nozzle 3.In other words, first flow passage 31 has the part that internal diameter that its inner circumferential surface by nozzle 3 limits reduces continuously on downward direction.Thus, be present in top air (gas) G of nozzle 3, the water S stream that is sprayed by 34 (the back descriptions) from the hole sucks the inner-diameter portion whose 33 that reduces gradually.
Thus, the air G that is introduced into is at minimum diameter part 331 places near the inner-diameter portion whose 33 (first flow passage 31) that reduces gradually, promptly hole 34 by the part of opening near, demonstrate maximum flow velocity.When air G flowed in this way, the pressure (atmospheric pressure) in first flow passage 31 reduced gradually from the top towards minimum diameter part 331.
If the pressure around the motlten metal Q, when the motlten metal Q that remains on this decompression state is reduced during by first flow passage 31, if and decompression degree on every side overwhelmed cohesiveness, motlten metal Q is disperseed (standing primary crushing) so, and is transformed into a lot of fine droplets Q1 thus.
Motlten metal will be called as " primary crushing position " by the position that the reduction ambient pressure stands first disintegration in first flow passage 31.
Near although the most fierce zone of reducing pressure that has been described to of the minimum diameter part 331 of the inner-diameter portion whose that reduces gradually 33, but it should be understood that, decompression the most definite position in fierce zone be not limited in the present embodiment minimum diameter part 331 near, but can be changed based on the shape in inner-diameter portion whose 33 that reduces gradually and hole 34 etc. and angle etc.
The internal diameter of the inner-diameter portion whose 33 that reduces gradually in the present embodiment, reduces on downward direction continuously.Thus, the inner-diameter portion whose 33 that reduces gradually has level and smooth inner circumferential surface.The air G that is inhaled into the inner-diameter portion whose 33 that reduces gradually quickens without any obstacle ground along the inner circumferential surface of the inner-diameter portion whose 33 that reduces gradually, thereby reduced the interior pressure of first flow passage 31.
Especially, in first flow passage 31, the flow velocity of air G becomes the fastest near the minimum diameter part 331 of the inner-diameter portion whose 33 that reduces gradually, and this is because pressure further reduces near minimum diameter part 331.This makes and can disperse motlten metal Q also can obtain the drop Q1 of fine sizes imperceptibly.
As shown in Figure 2, second flow passage 32 is made up of following: hole 34, and described hole 34 is towards near the bottom of first flow passage 31 (the minimum diameter part 331) opening; Preserve part 35, described preservation part 35 is used for keeping water S temporarily; With introducing path 36, water S is introduced in the hole 34 from preserving part 35 by described introducing path 36.
Preserve part 35 and be connected to the water source to receive water S from the water source.Preserving part 35 is communicated with hole 34 by introducing path 36.
Introducing path 36 is that its vertical section is the zone of wedge-type shape.This makes can to increase gradually from preserving part 35 and flows to the flow velocity of introducing the water S in the path 36, and therefore can be stably from the hole the 34 water S that spray flow velocity with increase.
By the hole 34 that mode like this forms, water S is as the roughly fluid beam S1 injection of conical profile, and the summit S2 of described conical profile is positioned at the downside (see figure 1).Motlten metal Q contacts with fluid beam S1, and is disperseed (standing to break for the second time) to become finer shape.
At this moment, drop Q1 is cooled and solidifies to produce metal dust R.Metal dust R is accommodated in the container (not shown) that is arranged in below the metal powder production apparatus 1 thus.
As shown in figs. 1 and 2, first flow passage 31 and second flow passage 32 form within it nozzle 3 comprise discoid shape (tubular shape) first parts 4 and with second parts 5 of the discoid shape (tubular shape) of first parts, 4 arranged concentric.Second parts 5 are arranged in the following of first parts 4 and slot milling 37 between them.
The example of the constituent material of first parts 4 and second parts 5 comprises, but whether is limited to various metal materials especially.Especially, preferably use stainless steel.
As shown in fig. 1, the lid 7 that is formed by tubular body is fixed on the bottom face 51 that is fixed to second parts 5 unchangeably.The lid 7 and first flow passage 31 are arranged with one heart.Use lid 7 can prevent that metal dust R from dispersing when they fall, metal dust R can be contained in the container reliably by this.
Preferably, lid 7 is connected to the bottom face of second parts 5 airtightly.This makes and can prevent that extraneous air from flowing into lid 7.As a result, when drop Q1 stands secondary and breaks, can prevent reliably that drop Q1 from contacting with extraneous air and prevent to suffer otherwise the oxidation deterioration that can occur.
Under the effect of fluid beam S1, lid 7 inside remain on decompression state.This has further reduced the pressure in first flow passage 31 with lid 7 internal communication.As a result, motlten metal Q is divided in once breaking more imperceptibly, and this makes and can obtain even fine liquid drops Q1 more, finally obtains even finer metal dust R.
From this point, the internal diameter of lid 7 is preferably about 1 to 4 times big of ring footpath (diameter of annular aperture 34) in hole 34, preferably 1.5 to 3 times big.This feasible pressure that can reduce fully in the lid 7 fully cools off drop Q1 simultaneously.
If, existing in the drop that secondary forms by division drop Q1 in breaking so less than lower limit above-mentioned, the internal diameter of lid 7 do not have sufficiently cooled possibility.Thus, the metal dust R of acquisition can have unusual shape.
On the other hand, if the situation that the internal diameter of lid 7 greater than higher limit above-mentioned, can exist the pressure in the lid 7 fully not reduced so.This makes and cannot further reduce pressure inside with first flow passage 31 of the internal communication of lid 7.
Now, formerly the metal powder production apparatus of technology (atomizer) is configured to freely fall air from the motlten metal that the jet of supplying with part sprays and contacts by flow passage and with fluid beam.
As mentioned above, under the effect of fluid beam, in fluid passage, produced air-flow.Thus, the whereabouts route of the motlten metal of free-falling is by interference in air flow.This means that motlten metal is not deferred to constant passage route when motlten metal passes through a rupture location.
As a result, dispersion (once breaking) degree has appearred, for example variation of the size of drop, and the problem below having produced thus: the size distribution of the final metal dust that obtains is dispersed in the very wide scope.
And, owing to be incorporated into the fact that the air in the flow passage contacts with the motlten metal of free-falling, solidify because temperature reduces, also go bad owing to oxidation or degrade with the mode motlten metal that quickens, another problem below this has produced: the metal adhesion that solidifies is to jet.
Thus, contain the high activity metal ingredient for example when Ti and Al when motlten metal especially, produced the needs that adopt bigger a little the jet 23 of size.In this case, the granularity of final metal dust also increases pro rata with the size of jet 23, thereby makes and be difficult to obtain fine sizes and high-quality metal dust.
In the present invention, tubular part 10 is arranged between first flow passage 31 of supplying with part 2 and nozzle.Tubular part 10 is used for the motlten metal Q that will spray from jet 23 and is incorporated in first flow passage 31 by its inside (vestibule).
Because the protection motlten metal Q of tubular part 10 avoids the ability of air G stream influence, tubular part 10 can be directed to motlten metal Q suitable target location, and motlten metal Q can stand once to break a rupture location reliably by this.Thus, motlten metal Q is disperseed reliably by decompression, thereby produces the refining metallic powder R with uniform grain sizes.
And, because motlten metal Q avoids the influence of air G stream, so can suppress to reduce solidifying of causing and the rotten or degraded of the motlten metal Q that causes by oxidation by temperature.Therefore, even contain at metal dust under the situation of high activity metal composition, metal powder production apparatus 1 also can easily be produced metal dust R.
And, because this favourable effect, even when the size of jet 23 is made very little so that when reducing the emitted dose of motlten metal Q, also still can suppress to reduce solidifying of causing and the rotten or degraded of the motlten metal Q that causes by oxidation, make motlten metal Q injected thus in reliable mode by temperature.
In addition, the minimizing of the emitted dose of motlten metal Q makes fine droplets Q1 be formed with and the proportional size of emitted dose, and final making can obtain finer metal dust R.
The metal dust R that produces by metal powder production apparatus 1 has the preferably more preferably particle mean size in about 1 to 10 mu m range in about 1 to 20 mu m range.This metal powder production apparatus can be advantageously used in produces this refining metallic powder R.
In the present embodiment, as shown in Figure 3, tubular part 10 is elongate configuration and has the tubular form that wall is arranged at the bottom.Be arranged on the tubular part of supplying with between the part 2 and first flow passage 31 10, have single opening 11 in its tip side, and on its diapire, have a plurality of small diameter bore 12.
By hole 12, the motlten metal Q that flows through tubular part 10 is divided into a plurality of metal flows.This makes motlten metal Q be broken into more fine liquid drops Q1 in once breaking.That is, separating device is played in a plurality of holes 12, and described separating device is used for equally separating substantially motlten metal Q (in the mode of dispersing) on the circumferencial direction of tubular part 10.
From this point, preferably, hole 12 forms in the diapire (bottom) of tubular part 10 and is uniformly distributed in the diapire.This has guaranteed that motlten metal Q just was divided into little and metal flow uniform-dimension before standing once to break, this makes the more fine liquid drops Q1 that can obtain narrow size distribution in once breaking.
In the hole 12 internal diameter of each be not limited to especially, but can be preferably in about scope of 1 to 10mm more preferably in about scope of 1 to 5mm.If the internal diameter of each falls into above-mentioned scope in the hole 12, becoming so to form fine droplets Q1, prevents that simultaneously motlten metal Q material that hole 12 is solidified or the surface tension by motlten metal Q from getting clogged.
As shown in fig. 1, tubular part 10 arranges that in such a manner promptly tubular part 10 can be concentric and consistent with the central axis 0 of first flow passage 31 with jet 23.And as shown in Figure 3, keep in touch with the bottom 21 of supplying with part 2 on the top of tubular part 10.
This makes and can cut off air G, described air G otherwise will be absorbed and be introduced in the conduit component 10 by the motlten metal Q that falls on the top of conduit component 10.As a result, become and can suppress aforementioned unfavorable effect (for example reduction of the interference of the glide path of motlten metal Q, temperature and oxidation), described unfavorable effect is that motlten metal Q ingress of air G causes.
On the other hand, the bottom of tubular part 10 is arranged to approximately be positioned at the centre position of first flow passage 31.This has guaranteed that the inside of motlten metal Q by tubular part 10 is fed into decompression and takes place near the most fierce minimum diameter part 331.As a result, can prevent or suppress the unfavorable effect that will cause by motlten metal Q and contacting of air G reliably.
In this connected, preferably, the bottom of tubular part 10 was positioned near rupture location.This has guaranteed that motlten metal Q is when just standing once to break when spray the bottom of tubular part 10.As a result, can obtain ultramicrofine drop Q1.
Rupture location is easy to change with the composition of motlten metal Q and the inner-diameter portion whose that reduces gradually 33 of viscosity and nozzle 3 and the shape and the angle in hole 34.Thus, it is desirable to, the position of the bottom of tubular part 10 obtains adjusting based on a rupture location.
And frequent situation is, in the most fierce zone of the decompression that rupture location is usually located at first flow passage 31, or near the most fierce zone of the decompression of first flow passage 31.Therefore, a rupture location in the present embodiment is positioned near the minimum diameter part 331.
Thus, in the present embodiment, because the bottom of tubular part 10 is positioned near the fact the minimum diameter part 331, motlten metal Q just stands once to break from tubular part 10 ejects after at it immediately.This makes motlten metal Q stand once to break when high temperature and low viscosity, thereby makes and can obtain even fine liquid drops Q1 more, and finally obtains even finer metal dust R.
And, if motlten metal Q is the composition that can become the amorphous powder particle, by reducing the size of drop Q1, can increase the cooling velocity of drop Q1 so.This makes can remain on liquid condition with atomic arrangement more reliably, thus the amorphous metal powder R that acquisition has higher amorphous degree.
Also preferably, tubular part 10 is connected to airtightly on its top and supplies with part 2.This makes can prevent more reliably that air G is in the top of tubular part 10 is introduced into tubular part 10.
And the bottom part of tubular part 10 is by the decompression of the stream of flow air G below tubular part 10.As a result, motlten metal Q is injected in such a manner, and promptly it is by hole 12 sucking-offs from tubular part 10, thereby the material adhesion that prevents to solidify is to the periphery in hole 12.
Although based on the size of jet 23, the external diameter of the motlten metal stream that promptly falls, the size of tubular part 10 can suitably be set,, the cross-sectional area of the vestibule of tubular part 10 preferably about 1 to 400mm
2Scope in more preferably 5 to 80mm
2Scope in.The atomic fine metal powder R that the tubular part 10 that use has a this size range makes this metal powder production apparatus to produce effectively to have uniform particle size.
Keep in touch in the present embodiment although supply with part 2 and tubular part 10, they also can be spaced apart from each other.
And tubular part 10 is preferably cylinder form.This guaranteed when motlten metal Q when the bottom face of tubular part 10 falls, drop Q1 is scattered in the horizontal direction without any contacting with the fluid beam S1 of common cone shape unevenly.As a result, fluid beam S1 makes drop Q1 can be disperseed equably and be cooled on the whole, produces the metal dust R with uniform particle size thus.
This helps also to prevent that (or elimination) introducing first flow passage 31 interior air G streams from by mistake being disturbed by tubular part 10 and the final reformed possibility of whereabouts circuit of motlten metal Q.
Alternatively, the interior a plurality of holes 12 of diapire that are formed on tubular part 10 can quantitatively reduce to single, and tubular part 10 can have the tubular form that does not have diapire.
The partial sectional view of other exemplary constructions of Figure 4 and 5 indicative icon tubular part.
Illustrated tubular part 10 has the annular projection 13 that extends among Fig. 4 on the circumferencial direction of the bottom face of tubular part 10.Projection 13 can be used as separating device easily, and described separating device is used for separating equably substantially the motlten metal Q (in the mode of dispersing) by the vestibule of tubular part 10 on the circumferencial direction of tubular part 10.
Use the separating device can be, thereby make drop Q1 contact equably substantially, and have and be cooled high cooling efficiency very much and solidify with cone of fluid beam S1 so that drop Q1 drops on down on whole first flow passage 31 equably.This makes and may obtain even metal powder R in reliable more mode.
By projection 13 is formed above-mentioned this tubular shape, projection 13 is as the separating device that can separate motlten metal Q more equably.If the motlten metal Q by tubular part 10 is near the bottom opening 12 that arrives tubular part 10, motlten metal Q just moves by the inwall of surface tension towards tubular part 10, and dirty along inwall to arrive the bottom part of projection 13, be divided into drop Q1 simultaneously.
As illustrated in Figure 4, projection 13 is a sharp edge in its lower end.This helps to reduce the contact area between drop Q1 and the tubular part 10, thereby makes drop Q1 separate fast with tubular part 10.As a result, can further shorten the lip-deep time that drop Q1 rests on tubular part 10, i.e. time of contacting with air G of drop Q1.
By bump 14 is formed a plurality of quantity along the circumferencial direction of the bottom face of tubular part 10, become easily along the circumferencial direction of the bottom face (bottom part) of tubular part 10, form drop Q1 with the interval that equates substantially, even and the axis of tubular part 10 does not have liquid Q1 to concentrate on the possibility of the regional area of bottom face for example with respect to vertical direction maintenance inclination a little yet.This makes drop Q1 drop on down equably on whole first flow passage 31.
Other example of separating device comprises that the axis with tubular part 10 is formed on slit or the projection on the inner circumferential surface of tubular part 10 abreast.The separating device of this structure can provide above-mentioned advantage.
In these materials, ceramic material particularly preferably is used as the composition material of tubular part 10.Reason is the high especially and less chemical change that may be subjected to for example oxidation of ceramic material hear resistance.And ceramic material has shown high relatively heat insulation characteristics (low relatively thermal conductivity), and this provides the advantage of the temperature reduction that suppresses motlten metal Q.
In the present embodiment, water S is described typically as the example of fluid.Described fluid also can be the liquid or the gaseous coolant of any kind, but preferably uses liquid fluid in the present embodiment.Therefore liquid fluid has greater than the proportion of the proportion of gaseous fluid and thermal capacitance and thermal capacitance, and can be so that motlten metal Q is finer and cooling molten metal Q (in the secondary rupture process) effectively in the very short time period.
And liquid fluid is easy to absorb more substantial air G, and it is more low-level to this means that liquid fluid can be reduced to the pressure (atmospheric pressure) in first flow passage 31, and further is convenient to pulverize motlten metal Q in a rupture process.
Motlten metal Q can contain the composition of any kind of, and even for example contains that at least a metal material can be used as motlten metal Q among the Ti and Al.These compositions are high activity, and as common practise, the motlten metal Q that contains these compositions is difficult to pulverize, because described motlten metal Q is easy to by easily being oxidized to oxide-film with just contacting in short-term of air G.This metal powder production apparatus even can easily make this motlten metal Q powdered.
Use the metal powder production apparatus of above describing 1 to make and to produce refining metallic powder R effectively with uniform particle size.
For example be used as under the grinding-material situation of (described grinding-material is used for the surface of grinding work-piece) at this high-quality metal dust R, what can guarantee is, when grinding-material is a metal dust of the present invention when workpiece sprays, the kinetic energy of each particle becomes almost equal, carries out grinding operation thereby can use with the proportional uniform abrasive power of kinetic energy.This makes workpiece be processed into to have very high machining accuracy.
And, if metal dust of the present invention for example is used as the unprocessed powder that is used to form briquetting, can prevents so and form for example defective in space, and can obtain to have highdensity briquetting.By curing thus obtained briquetting, also can produce the sintered body of high accuracy to size.
Second embodiment
Metal powder production apparatus according to a second embodiment of the present invention will be described below.
Fig. 6 is the enlarged partial view (schematic diagram) of demonstration according to the some parts of the metal powder production apparatus of second embodiment of the invention.In the following description, only for the ease of understanding, the upside among Fig. 6 be called as " top " or " on " and downside be called as " end " or D score.
Description to second embodiment will concentrate on the point different with first embodiment below, and identical point will not described.
Except tubular part has different structures, the metal powder production apparatus of present embodiment is identical with metal powder production apparatus among first embodiment.
As shown in Figure 6, be provided with a plurality of tubular parts 10 ' in the present embodiment.As above-mentioned first embodiment, each in the tubular part 10 ' arranges that in such a manner promptly it can contact with the bottom of supplying with part 2 on its top, approximately is positioned at the centre position of first flow passage 31 simultaneously in its bottom.
Use this structure to allow motlten metal Q to be disperseed more widely, be directed into first flow passage 31 by a plurality of tubular parts 10 ' by described structure motlten metal Q.This helps the drop Q1 that reduces to form thus to contact with each other and possibility bonded to one another, thus, suppresses or prevent the increase of the granularity of drop Q1.
In the tubular part 10 ' each can be taked the structure identical construction with the tubular part of implementing 10 in first embodiment.
The 3rd embodiment
The metal powder production apparatus of a third embodiment in accordance with the invention will be described below.
Fig. 7 is the enlarged partial view (schematic diagram) of demonstration according to the some parts of the metal powder production apparatus of third embodiment of the invention.In the following description, only for the ease of understanding, the upside among Fig. 7 be called as " top " or " on " and downside be called as " end " or D score.
Description to the 3rd embodiment will concentrate on the point different with first embodiment below, and identical point will not described.
Different with the structure of second parts except first parts, the metal powder production apparatus 1 of present embodiment is identical with metal powder production apparatus among first embodiment.
As seeing from Fig. 7, first recessed portion 43 and the first easily deformable part 44 are formed in first parts 4.Equally, second recessed portion 53 and the second easily deformable part 54 are formed in second parts 5.
First recessed portion 43 forms by a part that cuts the inner-diameter portion whose 33 that reduces gradually.The formation of first recessed portion 43 has reduced the thickness of first parts 4.Reduced thickness portions has been showed low physical strength and become can be easily deformable, thus serves as the first easily deformable part 44.
Since the first easily deformable part 44 as mentioned above can be easily deformable the fact, first core 45 than the central axis 0 of first easily deformable part 44 more close first flow passages 31 (among Fig. 7 more to the right) is arranged can easily and reliably move around the first easily deformable part 44.As an example of this displacement, stood first core 45 ' of displacement and represented by the two point chain line among Fig. 7.
First recessed portion 43 forms the tubular shape on the whole circumference of the inner-diameter portion whose 33 that reduces gradually.This means that the first easily deformable part 44 forms on the circumferencial direction of the inner-diameter portion whose 33 that reduces gradually extends, and first core 45 can (uniformly) be moved by as one man in each circumferential section of the inner-diameter portion whose 33 that reduces gradually by this.
As shown in Figure 7, with respect to 38, the first recessed portions 43 inside (in the central axis 0 side) location, border between retaining part 35 and the introducing path 36, i.e. right side in Fig. 7.
First recessed portion 43 forms has triangular cross-sectional shape.Thereby this is out of shape two inclined- planes 431 and 432 of the recessed portion 43 of winning and moves towards each other on direction like this.That is, the first easily deformable part 44 can be out of shape so that reduce the drift angle of the apex portion 433 of first recessed portion 43, thereby the core 45 of winning is moved easily and reliably.
Although in illustrated structure, first recessed portion 43 is inwardly located with respect to border 38, and this does not apply any restriction to the present invention.Alternatively, first recessed portion 43 can be positioned at the outside on border 38.
And although first recessed portion 43 has triangular cross-sectional shape in illustrated structure, this does not apply any restriction to the present invention.Alternatively, first recessed portion 43 can have for example cross section of U-shaped.
The part of the bottom 55 of the adjacent bores 34 of second recessed portion 53 by cutting second parts 5 forms.The formation of second recessed portion 53 has reduced the thickness of second parts 5.The part that thickness reduces has been showed lower physical strength and become can be easily deformable, thus serves as the second easily deformable part 54.
Since the second easily deformable part 54 as mentioned above can be easily deformable the fact, second core 56 than the central axis 0 of first easily deformable part 54 more close first flow passages 31 is arranged can move to follow the displacement of first core 45 '.As an example of this displacement, stood second core 56 ' of displacement and represented by the double dot dash line among Fig. 7.
Second recessed portion 53 forms along the tubular shape of the circumferencial direction of the inner-diameter portion whose 33 that reduces gradually.This means that the second easily deformable part 54 forms on the circumferencial direction of the inner-diameter portion whose 33 that reduces gradually extends, and second core 56 can as one man be moved in each circumferential section of the inner-diameter portion whose 33 that reduces gradually by this.
As shown in Figure 7, inwardly locate with respect to border 38, the second recessed portions 53, i.e. right side in Fig. 7.
Second recessed portion 53 forms has triangular cross-sectional shape.This makes the distortion so that move away from each other on direction like this of two inclined-planes 531 and 532 of second recessed portion 53.That is, the second easily deformable part 54 can be out of shape so that increase the drift angle of the apex portion 533 of second recessed portion 53, thereby makes that second core 56 is moved easily and reliably.
Although in illustrated structure, second recessed portion 53 is inwardly located with respect to border 38, and this does not apply any restriction to the present invention.Alternatively, second recessed portion 53 can be positioned at the outside on border 38.
And although second recessed portion 53 has triangular cross-sectional shape in illustrated structure, this does not apply any restriction to the present invention.Alternatively, second recessed portion 53 can have for example cross section of U-shaped.
Utilize the metal powder production apparatus 1 of said structure, when fluid beam S1 from the hole 34 when spraying, inner circumferential surface 341 and external peripheral surface 342 are flow through the pressure extrusion of the water S in hole 34.Thus, hole 34 is easy to extended.
Yet, metal powder production apparatus 1 among Fig. 7 guaranteed when fluid beam S1 from the hole 34 when spraying, first core 45 centers on first easily deformable part 44 displacements under by the pressure of the water S border 38, introducing path 36 and the hole 34 near, supposed the position of being represented by Reference numeral 45 ' in Fig. 7 thus.
The same with first core 45, second core 56 is moved to follow first core 45 ' (first core 45 that moves) by the pressure of water S, thus, has supposed the position by Reference numeral 56 ' expression.
So, the metal powder production apparatus 1 shown in Fig. 7 is suitable for guaranteeing first core 45 and displacement (distortion), the expansion of the diameter of limiting holes 34 (gap) as a result respectively on identical direction of second core 56.
This make can retaining hole 34 constant dimension, the flow velocity of the 34 fluid beam S1 that spray can be kept constant in reliable mode from the hole by this.As a result,, can keep the constant flow rate of fluid beam S1, make the ability of fluid beam S1 cooling drop Q1 keep constant thus regardless of the pressure of water S.
And, utilize the metal powder production apparatus 1 shown in Fig. 7, be inhaled into the air G stream in the inner-diameter portion whose 33 that reduces gradually, first recessed portion 43 that is formed the centre position that approximately is positioned at the inner-diameter portion whose 33 that reduces gradually disturbs, and quilt is towards tubular part 10 orientations.Flow downward towards the external peripheral surface of the air G of tubular part 10 orientations stream along tubular part 10.
Therefore, in the bottom part of tubular part 10, air G stream passes through the zone of more close tubular part 10, thereby further promotes near the pressure of bottom part of tubular part 10 to reduce.This helps the inside sucking-off from tubular part 10 with motlten metal Q, guarantees the reliable injection of motlten metal Q thus.
And because a rupture location is in the office, bottom of more close tubular part 10, institute is so that motlten metal Q stands once to break under high temperature and low viscosity situation.This makes can obtain more fine liquid drops Q1, and the finer metal dust R of final acquisition.
And, if motlten metal Q is the composition that can become the amorphous powder particle, can increase the cooling velocity of liquid Q1 so by the size that reduces drop Q1.This makes can maintain liquid state with atomic arrangement (atomic arrangement) more reliably, thus the amorphous metal powder R that acquisition has higher amorphous degree.
Although metal powder production apparatus of the present invention and metal dust obtain describing by illustrated embodiment, the invention is not restricted to this in the above.For example, the various piece of forming metal powder production apparatus can be replaced by other any part that can carry out identity function.Can also add any part in case of necessity.In addition, a plurality of structures by describing in conjunction with previous embodiment above for example being combined in can constitute tubular part.
Example
1, the production of metal dust
Example 1
At first, obtain melted material by in high-frequency induction furnace, melting Cu (copper).
Secondly, melted material is ground into copper powders may (metal dust) by the atomizer (this metal powder production apparatus) shown in Fig. 1 thus.
In the atomizer shown in Figure 1, the top that the cylindrical parts that aluminium is made (tubular part) is arranged to it is connected to funnel (supply part) airtightly, and its bottom approximately is located at the centre position of flow passage (first flow passage), and motlten metal is by described flow passage.
The cylindrical parts that uses has internal diameter (the cross-sectional area 19.6mm of 5mm
2).Water is used as the fluid that is used for cooling molten metal.
Example 2
In the same manner as in Example 1, internal diameter (the cross-sectional area 28.3mm that has 6mm except the cylindrical parts that uses
2), obtain copper powders may.
Comparative example
In the same manner as in Example 1, except using the atomizer that does not have cylindrical parts, obtain copper powders may.
2, the mensuration of metal dust
For the copper powders may that in each example and comparative example, obtains, measure the standard deviation of particle mean size and size distribution by type of laser particle size distribution measurement instrument.Table 1 has shown the result of test and appraisal.
Table 1
| Cylindrical parts internal diameter (mm) | Evaluating result | ||
| Particle mean size (μ m) | The size distribution standard deviation | ||
| Example 1 | 5 | 5.2 | 2.09 |
| Example 2 | 6 | 6.0 | 2.30 |
| Comparative example | - | 7.7 | 2.55 |
As shown in table 1, can recognize that compared to the copper powders may of comparative example, the copper powders may of each example has very little and uniform grain sizes.Obvious especially under the situation of the copper powders may that this trend obtains in example 1.
In this, replaced C u powder, Cu-Ti alloy (Cu on the weight: Ti=99: 1) powder, Cu-Al alloy (Cu on the weight: Al=97: 3) each in powder and Cu-Ti-Al alloy (Cu on the weight: Ti: Al=98: 1: the 1) powder, make in the mode identical with comparative example, so that implement the test and appraisal test identical with above-mentioned test and appraisal with each example.Evaluating result is identical substantially with evaluating result in each example and the comparative example.
Claims (21)
1, a kind of metal powder production apparatus comprises:
Supply with part, described supply part supplying melting metal; With
Nozzle, described nozzle is arranged on below the described supply part, described nozzle comprises flow passage and hole, described flow passage is limited by the inner circumferential surface of nozzle, can flow through described flow passage from the motlten metal of supplying with the part supply, and described flow passage has bottom part, described hole is used to spray a fluid in the flow passage towards the bottom part opening of flow passage, thus by the motlten metal that flows through flow passage is contacted with the fluid that sprays from the hole of nozzle, motlten metal can be disperseed and be transformed into a lot of fine droplets, thereby a lot of fine droplets are cooled and solidify so that produce metal dust
Wherein said metal powder production apparatus further comprises tubular part, described tubular part is arranged between the flow passage of supplying with part and nozzle, described tubular part has top, bottom and vestibule, passes through described vestibule to contact with fluid from the motlten metal of supplying with the part supply.
2, the bottom that metal powder production apparatus according to claim 1, wherein said tubular part are arranged to tubular part is positioned near the centre position of flow passage.
3, metal powder production apparatus according to claim 2, wherein said flow passage have the part that its internal diameter that is limited by the inner circumferential surface of nozzle reduces continuously on downward direction.
4, metal powder production apparatus according to claim 3, wherein said flow passage has the minimum diameter part, and the bottom that described tubular part is arranged to tubular part is positioned near the minimum diameter part of flow passage.
5, metal powder production apparatus according to claim 1, the top of wherein said tubular part contacts with the supply unit branch.
6, metal powder production apparatus according to claim 5, the top of wherein said tubular part is connected to the supply part airtightly.
7, metal powder production apparatus according to claim 1, the vestibule of wherein said tubular part has 1 to 400mm
2Cross-sectional area.
8, metal powder production apparatus according to claim 1, wherein said tubular part has the shape of general cylindrical.
9, metal powder production apparatus according to claim 1, wherein said tubular part is provided with separating device, and described separating device is used for substantially equably, separately passes through in the mode of dispersing the motlten metal of the vestibule of tubular part.
10, metal powder production apparatus according to claim 9, wherein said tubular part has bottom face, and described separating device comprises at least one projection, and described at least one projection is along the circumferencial direction setting of the bottom face of tubular part.
11, metal powder production apparatus according to claim 9, wherein said at least one projection comprises a plurality of projectioies.
12, metal powder production apparatus according to claim 11, wherein said a plurality of projectioies are equidistantly arranged substantially along the circumferencial direction of the bottom face of tubular part.
13, metal powder production apparatus according to claim 10, wherein said at least one projection comprise a projection with tubular shape.
14, metal powder production apparatus according to claim 10, wherein said at least one projection has sharp-pointed bottom.
15, metal powder production apparatus according to claim 9, wherein said tubular part be have diapire, the tubular form of wall is arranged at the bottom, and described separating device comprises a plurality of holes, and described a plurality of holes form in described diapire and are evenly distributed in the diapire.
16, metal powder production apparatus according to claim 1, wherein said tubular part is made by ceramic material.
17, metal powder production apparatus according to claim 1, wherein said fluid is a liquid form.
18, metal powder production apparatus according to claim 1, wherein said motlten metal comprise at least a among Ti and the Al.
19, metal powder production apparatus according to claim 3, wherein said nozzle comprises first parts and is arranged in second parts below described first parts, and slot milling is to form the hole between first parts and second parts, described first parts have recessed portion, the circumferencial direction of the moving path of the female part longshore current forms the tubular shape corresponding to the described part of flow passage, and air stream is partly disturbed by the female and towards the tubular part orientation, described air stream produces in flow passage under the effect of the fluid that sprays from the hole of nozzle.
20, a kind of metal dust, the metal powder production apparatus production that described metal dust limits by claim 1.
21, metal dust according to claim 20, described metal dust have the particle mean size in 1 to 20 mu m range.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104972133A (en) * | 2015-07-18 | 2015-10-14 | 山东理工大学 | Method for preparing Cu-based SiC composite micro powder for electrode of electric spark tool |
| CN107225250A (en) * | 2016-03-24 | 2017-10-03 | 宁波江丰电子材料股份有限公司 | The forming method of clipped wire and the device for preparing clipped wire |
| CN108025365A (en) * | 2015-07-17 | 2018-05-11 | Ap&C高端粉末涂料公司 | Plasma atomized metal pow der manufacturing process and its system |
| CN111182986A (en) * | 2018-07-27 | 2020-05-19 | 株式会社东北磁材研究所 | High-speed fluid ejection device |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101024248A (en) * | 2006-02-16 | 2007-08-29 | 精工爱普生株式会社 | Metal powder production apparatus and metal powder |
| EP4159345A1 (en) | 2016-04-11 | 2023-04-05 | AP&C Advanced Powders And Coatings Inc. | Reactive metal powders in-flight heat treatment processes |
| PL233461B1 (en) * | 2017-06-22 | 2019-10-31 | Politechnika Rzeszowska Im Ignacego Lukasiewicza | Method for obtaining metal powders and the device for its execution |
| KR102296910B1 (en) * | 2020-10-21 | 2021-09-02 | 박요설 | Manufacturing apparatus of amorphous magnetic powder for enhancing cooling efficiency and manufacturing method of amorphous magnetic powder therewith |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05148514A (en) * | 1991-10-01 | 1993-06-15 | Hitachi Metals Ltd | Spraying device for molten metal |
| US6254661B1 (en) * | 1997-08-29 | 2001-07-03 | Pacific Metals Co., Ltd. | Method and apparatus for production of metal powder by atomizing |
| JP4867630B2 (en) * | 2006-02-16 | 2012-02-01 | セイコーエプソン株式会社 | Metal powder manufacturing apparatus and metal powder |
| CN101024248A (en) * | 2006-02-16 | 2007-08-29 | 精工爱普生株式会社 | Metal powder production apparatus and metal powder |
-
2007
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108025365A (en) * | 2015-07-17 | 2018-05-11 | Ap&C高端粉末涂料公司 | Plasma atomized metal pow der manufacturing process and its system |
| CN104972133A (en) * | 2015-07-18 | 2015-10-14 | 山东理工大学 | Method for preparing Cu-based SiC composite micro powder for electrode of electric spark tool |
| CN104972133B (en) * | 2015-07-18 | 2017-01-25 | 山东理工大学 | Method for preparing Cu-based SiC composite micro powder for electrode of electric spark tool |
| CN107225250A (en) * | 2016-03-24 | 2017-10-03 | 宁波江丰电子材料股份有限公司 | The forming method of clipped wire and the device for preparing clipped wire |
| CN111741826A (en) * | 2018-02-19 | 2020-10-02 | 哈都工业有限会社 | Metal powder manufacturing device and metal powder manufacturing method |
| CN111741826B (en) * | 2018-02-19 | 2023-08-18 | 哈都工业有限会社 | Metal powder manufacturing device and metal powder manufacturing method |
| CN111182986A (en) * | 2018-07-27 | 2020-05-19 | 株式会社东北磁材研究所 | High-speed fluid ejection device |
Also Published As
| Publication number | Publication date |
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| JP5582208B2 (en) | 2014-09-03 |
| JP5299445B2 (en) | 2013-09-25 |
| JP2013129916A (en) | 2013-07-04 |
| JP2011089212A (en) | 2011-05-06 |
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