CN101004281A - Warehouse for product ,especially for liquid crystal screen glass panel, to be processed in cleaning room, and method for keeping clean in the warehous - Google Patents
Warehouse for product ,especially for liquid crystal screen glass panel, to be processed in cleaning room, and method for keeping clean in the warehous Download PDFInfo
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- CN101004281A CN101004281A CNA2006100643425A CN200610064342A CN101004281A CN 101004281 A CN101004281 A CN 101004281A CN A2006100643425 A CNA2006100643425 A CN A2006100643425A CN 200610064342 A CN200610064342 A CN 200610064342A CN 101004281 A CN101004281 A CN 101004281A
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- warehouse
- pure air
- ventilation blower
- air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
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- Combustion & Propulsion (AREA)
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Abstract
The present invention discloses a warehouse used for products to be treated, especially glass plates used for liquid crystal screens in a cleaning room, and a method used in such a warehouse to keep products clean. A warehouse of a storage frame form is utilized in production of liquid crystal screens, wherein brackets used for glass plates are deposited. The glass plates have been stored in a condition of clean air for a long time until they (glass plates) are transferred to other treating equipment in other cleaning room. In order to avoid that the amount of air in the cleaning room and in the well bore necessary for a transferring as well as circulating in the channels is, at least remarkably, reduced, and then in order to achieve that the area to be needed is remarkably reduced, a ventilator used for pumping clean air is deposited at an area below the warehouse coping. Therefore, the clean air transferred to product is capable of being taken directly out of the clean air which flows downwards. Said warehouse and said method are applied for manufacturing liquid crystal screens.
Description
Technical field
The present invention relates to a kind of be used for the pending product of clean room, especially for the warehouse of the glass plate of LCD screen, as described in preamble section before the claim 1, and relate to a kind of method that is used for making product maintenance cleaning at such warehouse, as described in preamble section before the claim 25.
Background technology
Particularly in the production of LCD screen, adopted the warehouse of storage rack form, it also is referred to as layer frame and support is housed therein.They include glass plate, and these glass plates are applied to make LCD screen and are deposited so for a long time under the pure air condition in the warehouse, till they are transported to a treatment facility in the clean room.The support that is equipped with glass plate for example moves between different treatment facilities by a conveying device, between the different treatment steps and during the stage of depositing that flow process requires a kind of safe and reliable handling process is being arranged so that guarantee.Glass sheet size increases along with the generation of each new processing procedure.When the size of front glass panel for example be in about 1.5m to 1.85m (between).Each support can be admitted 28 such glass plates.In the warehouse, this support becomes multiple row ground lower support on two vertical sides at warehouse respectively in storing unit.This warehouse can reach sizable scale, and for example about 80m is long, the wide and about 7m height of about 7m.In the warehouse, by filter-ventilation blower-unit input pure air, its (unit) is arranged on the top of warehouse top cover.Below the top cover with above the storing unit pressure space being arranged, pure air is imported in it by filter-ventilation blower-unit.In this pressure space, clean empty institute is so distributed, make a part (pure air) vertically flow between the storing unit another part downwards by orifice plate and then flow downwards by passage on two lateral surfaces that deviate from each other of storing unit, these passages constitute by double wall.Be equipped with conveying device in the zone between storing unit, therefore it applied effect by this pure air equally.In vertical channel, pure air by like this band to, it is flatly flowed by support, in support, equally flatly settling glass plate.Therefore whole pure airs of being carried by filter-ventilation blower-unit flow to the zone, air channel, tunnel of central authorities, rise from here it by drainage surface or by opening arrive the residing position of treatment facility, around clean room in.Another part pure air then flow into a building plane that is arranged in below it by a double bottom in the warehouse positioned beneath, it is clean room zone that is disposed at the zone both, it is applied to install the used servicing unit of processing procedure, perhaps it is also by a hollow space that is configured to, and this space is by an other clean room regions shield that is positioned at its below.
In the known embodiment of another kind, the air supply is independent of the clean room top cover and designs in this wise, promptly, tunnel area between the storing unit comes air feed by filter-ventilation blower of settling-unit on the top cover of warehouse, and the air of level flows through support by the filter-ventilation blower on the lateral surface of the vertical wall that is set directly at the warehouse-unit realization.
Also known at last, supply with in order to carry out vertical air, used the filter-ventilation blower-unit that in the clean room top cover, is provided with, and, supply with for the air that carries out level, adopted filter-ventilation blower-unit other, that on the longitudinal side wall at warehouse, be provided with.
These warehouses require to account for the quite most gross area.The air capacity demand of supplying with for pure air also is corresponding high.Therefore this air supply can cause influencing significantly the flow mass in the environment of warehouse.Must be discharged from by double bottom in order to the major part of supplying with the necessary air capacity in warehouse, under extreme case even 100% air capacity (being discharged from).Its (air capacity) must be with the air capacity of discharging from other clean room face by being transported to the supercharging device of being located at above the clean room on the side of clean room or at return air pit shaft that the clean room face is provided with or passage again.Because there is sizable air share at the warehouse, so the essential backflow area of this pit shaft also correspondingly is determined by this air share.This backflow area then makes the clean room net area that uses for product reduce and cause thus the cost increase.Therefore, building is for example for required clean room area, because the event of described backflow area also must be configured to correspondingly huge.
Often be, this huge return air quantity since in the return air plane restricted cross section thus can not be fully from clean room central authorities by delivery to the return air pit shaft of side, but the part air-flow must just be discharged from by the other return air pit shaft that is provided with in the clean room face the backflow plane of side under double bottom before this.Such structural configuration is unfavorable for treatment facility is carried out the configuration of suitable treatment process and causes additional cost.
Summary of the invention
Purpose as basis of the present invention is, the warehouse of affiliated type and the method for affiliated type are so designed, so that the air capacity of avoiding in clean room and in for necessary pit shaft of loopback and passage, circulating or it is reduced at least significantly, and therefore can realize obviously reducing to this required area.
This purpose is achieved by the feature of claim 1 characteristic according to the present invention for the warehouse of affiliated type, and is achieved by the feature of claim 25 characteristic according to the present invention for the method for described type.
In warehouse of the present invention, be arranged in the lower zone of the top cover at warehouse by the ventilation blower of the mobile pure air of product in order to suction.Directly from the pure air stream that flows downward, extract to the pure air that product is carried.This pure air share to product is carried that is extracted does not give that the flox condition around the stock causes burden in the circulating air system of clean room equipment and the clean room.
The present invention's additional features content shows in other claim, specification and accompanying drawing.
Description of drawings
Explain the present invention in detail by the specific embodiment of describing in the accompanying drawing below.Accompanying drawing shows:
Fig. 1 has shown that with schematic diagram and side view the present invention borrows the part of first embodiment of stack,
Fig. 2-Figure 11 has shown the other specific embodiment at warehouse of the present invention respectively with the describing mode corresponding to Fig. 1.
The specific embodiment
The warehouse that a part only is shown among Fig. 1 has a clean room top cover 1, and it is with the known manner setting.It is set to trellis plate lid and has cross one another year rail, has settled filtration-ventilation blower-unit 2 on it.Be equipped with storing unit 3,4 below clean room lid 1, promptly so-called layer frame disposed support 5,6 therein.In storing unit 3 upper and lower settings 3 supports 5, opposed storing unit 4 then only is equipped with a support 6.In each support 5,6, stacked glass plate 7 up and down, made LCD screen (FPD) by these glass plates with less spacing.Glass plate 7 flatly is placed in the support 5,6. Storing unit 3,4 is transverse to the extension of plan ground and correspondingly have a plurality of supports of arranging successively 5,6. Storing unit 3,4 for example can have the length of about 80m.As an example, storing unit 3,4th, the wide and about 7m height of about 7m.The quantity of supporting plane and position can change according to operational depth of building and storage requirements.
Be equipped with a conveying device 8 between two storing units 3,4, by it, support 5,6 is transported in (unshowned) treatment facility by a transfer port zone 9, and they are positioned on the side that deviates from storing unit 3 of storing unit 4.Conveying device 8 be can along storing unit 3,4 transverse to plan operation and have one on the short transverse of storing unit 3,4 and the delivery element 10 that transversely can move, by it, the support 5,6 of storing unit 3,4 can be extracted.
Filter-ventilation blower-unit 2 is placed in the top of a middle section 2, and it is stored device 3,4 gauges on side direction.According to the length of middle section 12, a plurality of filter-ventilation blowers-unit 2 is set on clean room top cover 1 with distributing.Their ventilation blower 13 is from the zone suction pure air of clean room top cover 1 top.Its (air) arrives (referring to flow arrow) in the middle section 12 downwards by filter 14 then.In middle section 12, the pure air that has been filtered flows down to bottom 11 with layer flow mode, and this bottom design is double bottom.The overwhelming majority of the pure air that this flows downwards is sucked out and is sent back in clean room top cover 1 upper area facing to ventilation blower 2 by (unshowned) return flow line along side direction below the warehouse with known manner.
Be equipped with ventilation blower 15 in the zone of side under storing unit 3, it is 16 parts of aspirating the pure air that flows downward in the middle sections 12 in the direction of arrows.Transverse to plan, disposed a plurality of such ventilation blowers 15 and the filter 17 that connects in the back spaced apart from each otherly, therefore, the pure air of this part is aspirated on the length of storing unit 3 equably.Ventilation blower 15 and filter 17 are settled in the horizontal channel 18, this horizontal channel its from middle section 12 away from the end be connected on the vertical channel 19, this vertical channel be arranged on support 5 from storing unit 4 away from the side on and by a double wall 20,21 by gauge.In the zone of support 5, wall portion 21 is uncovered and forms located opening 22 up and down, makes the pure air that upwards flows in passage 19 can flatly flow to support 5 by them.Support 5 opens wide towards passage 19, and therefore, pure air can be between stacked up and down glass plate 7 level, that spacing is arranged.In this way, 7 of glass plates are between its storage period in a kind of pure air stream of continuous-flow, thereby glass plate 7 can be not contaminated in the resting period.After flowing through support 5, pure air arrives in the middle section 12 again and mixes mutually with the pure air that flows from the top down there.
Extend in 11 the region, bottom at storing unit 6, in this bottom section with the mode configuration filter-ventilation blower- unit 23,24 identical with the filter-ventilation blower of storing unit 3- unit 15,17.
In the mode of having stated, support 5,6 is flow through by pure air in the horizontal direction, and its outflow zone from middle section 12 is drawn through this filter ventilation blower unit 15,17; 23,24.Therefore the pure air of this share is run in the inner loop and is caused burden for the flow equilibrium of clean room environment.This return flow line 18,19; 25,26 only require little room.The air capacity that flows to support 5,6 is seldom.
By transfer port zone 9, the pure air that a part flows downward in middle section 12 arrives in the zone of (unshowned) treatment facility.
In transfer port zone 9, under storing unit 4, there is not placing rack 6 in the limit and the supporting plane centre.Filter-ventilation blower- unit 23,24 is set directly at side under the supporting plane on limit on the storing unit 4 in this case.
Be by the embodiment of Fig. 2 and the difference of front embodiment, be provided with suspension-filter 14 in clean room top cover 1, it is connected on (unshowned) air distribution system by cover part 29 and passage 30.This suspension-filter 14 extends on the width of middle section 12 by optimal way.On the length of middle section 12, front and back in turn dispose the suspension-filter 14 of respective number.Cover part 29 has covered suspension-filter 14.Therefore between the lid 31 of suspension-filter 14 and cover part 29, constitute an inflow space 32 that is used for pure air.Protrude upward passage 30 from lid 31, transport pure air from air distribution system by these passages.All the other aspects, present embodiment is identical structure setting with front embodiment.
Fig. 3 has shown a kind of like this embodiment, and wherein, pure air is sucked from bottom section.Therefore in the zone of clean room top cover 1, there is not filter-ventilation blower-unit.The air capacity that the air of middle section 12 is supplied with by flowing out from storing unit 3,4 realizes.Therefore form a directed from the top down air stream.Settled filter-ventilation blower-unit 33 in the zone of side under the storing unit 3,4, it is arranged in the horizontal channel 18.Be that passage 18 is relative middle section 12 sealings with the difference of front embodiment.Therefore filter-ventilation blower-unit 33 is set to, and makes them aspirate pure air from the below.Corresponding with it, horizontal channel 18 is to open wide downwards.The pure air that is inhaled into then flows upward in vertical channel 19 and outwards flows out by 22 levels of the opening in the conduit wall.The glass plate of in support 5, laying 7 by pure air flatly circulation wash away, its (air) arrives in the middle section 12 at warehouse then.
The same middle sections 12 relatively in the horizontal channel 25 of storing unit 4 be sealing and open wide downwards.Filter-ventilation blower-unit 34 of in passage 25, settling with pure air from below be drawn into the passage 25, it flows upward in vertical channel 26 and flows in the middle section 12 between the glass plate 7 of support 6 therefrom.Because passage 25 is to open wide downwards, so be inhaled in the passage 25 by the part of the mobile pure air in transfer port zone 9.
As among the embodiment in front, in this embodiment, flow through the also operation in a looping fashion of pure air of glass plate 7.Pure air part that this is sucked, operation in a looping fashion is caused burden for the circulating air system of whole clean room equipment and does not also cause burden to the flox condition around storing unit 3,4 in this clean room.
Fig. 4 has shown that the embodiment according to Fig. 3 has an additional operating means 35, and it is placed between storing unit 4 and the treatment facility 36.A filter-ventilation blower-unit 37 is set on operating means 35 at least, by its produce one vertically downward and non-vortex pure air stream as squeezing exhaust stream.This pure air runs through that operating means 35 ground flow and the transfer port zone 9 by storing unit 4 turns back in the middle section 12 again.Therefore prevent one otherwise exist, outwards directed current drainage in this clean room.All the other aspects, this embodiment is the structure setting as the embodiment of Fig. 3.
The warehouse of Fig. 5 has two storing units 3,4.Horizontal channel 18 is arranged below storing unit 3, and this horizontal channel is to open wide towards the direction of middle section 12.Settled filter-ventilation blower-unit 33 in passage 18, they are from middle section 12 suction pure airs, and it flows in described mode in vertical channel 19 then upward.By the opening in the conduit wall 21 22, this pure air arrives between each glass plate 7 of support 5.This pure air arrives again in the middle section 12 after overflow is by glass plate 7.
In the embodiment of Fig. 6, pure air is in filter-ventilation blower-unit 33 suctions that are placed in the zone of storing unit 3,4 belows in the horizontal channel 18,39.Be with the difference of front embodiment, do not have the current drainage in the return air zone of base plate 11 belows.The air at warehouse is supplied with relative clean room 38 and the return air zone isolates fully.Only be pure air to be flow to the clean room 38 on every side from middle section 12 by transfer port zone 9.
Pure air by 33 suctions of filter-ventilation blower-unit flow to the vertical channel 19 that is connecting from horizontal channel 18, and it upwards flows and the opening 22 by conduit wall 21 flows in the support 5 in vertical channel.Its (air-flow) flows on the glass plate 7 of level and arrives in the middle section 12 again along support 5.
Filter-the ventilation blower of storing unit 4-unit 34 aspirates pure air accordingly with the embodiment among Fig. 5 from clean room 38.Pure air arrives in the horizontal channel 25, comes out thus, and pure air flow in the vertical channel 26.Its (air) flows between the glass plate 7 of support 6 and arrives in the middle section 12.
Fig. 7 has shown a kind of like this embodiment, and wherein, the member of aeration technology is arranged in the zone in the return air plane, its conductively-closed (abgeschotteten) relatively.Therefore in the positioned beneath of storing unit 3 some ventilation blowers 15, they aspirate pure air, by they can delivery ratio by the bigger air capacity in single filter-ventilation blower-unit.Ventilation blower 15 is pumped in the pure air that flows downward in the middle section 12.With ventilation blower 15 dividually the lower horizontal of double bottom 11 disposed suspension-filter 17, flow through pure air by this filter by ventilation blower 15 suctions.Its (air stream) arrives in the horizontal channel 18 and arrives therefrom in the vertical channel 19.Ventilation blower 15 and suspension-filter 17 are placed in the zone 40 that a relative return air plane 41 of double bottom 11 belows is closed.
Be provided with the filter-ventilation blower-unit 42 of horizontal setting under storing unit 4 and double bottom 11 in the zone of side, they aspirate pure air and carry upward from return air plane 41.Below the support 6 of storing unit 4 is the filter-ventilation blower-unit 34 of horizontal setting, and they are equipped with treatment facility 36 (Fig. 4) from clean room 38 suction pure airs in described clean room 38.At first arrive in the horizontal channel 25 and also arrive therefrom in the vertical channel 26 by this filter-ventilation blower-pure air of unit suction.The glass plate of pure air by horizontal setting in support 6 flows and arrives in the middle section 12 that pure air flows downward therein then.
In the embodiment of Fig. 8, below the storing unit 3 He above the double bottom 11 supercharging device 43 is being arranged, its relative middle section 12 seals.At least feed a vertical channel 44 in supercharging device 43, by this vertical channel, pure air is transported in the supercharging device 43.This horizontally extending supercharging device 43 is connected on the vertical channel 19, in vertical channel pure air upwards flow and by the opening in wall 21 22 with in the support 5 of stating mode and flowing to storing unit 3.Around washing away, this pure air stream arrives in the middle section 12 after flowing through support 5 glass plate 7 of horizontal positioned by pure air stream in support 5.At this, the pure air of the remainder that flows downward in pure air stream and the middle section 12 mixes mutually.
Flow out in the clean room 38 by transfer port zone 9 on ground as among the embodiment in front in the part of the pure air that flows downward in the middle section 12.
Be do not have placement filter device-ventilation blower-unit or ventilation blower with the difference of front embodiment in the below of storing unit 3,4, but (arrangement) corresponding supercharging device 43,50.Pure air can be from warehouse current drainage freely to the return air plane.By ventilation equipment 46, pure air is sucked from the return air plane and is flowed to corresponding supercharging device 43,50 in described mode.
In the embodiment of Fig. 9, below each supporting plane of storing unit 3, all settled filter-ventilation blower-unit 51, they provide pure air to the support 5 that settle its top respectively.These filter-ventilation blowers-unit is placed in respectively in the horizontal channel 18, is connecting vertical channel 19 on it.In they the insides, the pure air that aspirate from middle section 12 by filter-ventilation blower-unit 51 is mobile upward and flow back in the middle section 12 between each glass plate 7 of support 5.
Be equipped with filter-ventilation blower-unit 2 on top cover 1, by them, pure air arrives in the middle section 12, and in middle section, its (air) flows downwards.
Be provided with the filter-ventilation blower- unit 23,24 that is arranged in horizontal channel 25 in the zone below the support 6 of storing unit 4.The pure air that is aspirated from middle section 12 by ventilation blower 23 flow in the vertical channel 26 via passage 25.Pure air comes out to flow back in the middle section 12 between the horizontal glass plate 7 of support 6 from here.The part of the pure air that flows downward in middle section 12 arrives in the clean room 38 by transfer port zone 9.
The pure air of being sent into middle section 12 by ventilation blower 2 flows out downwards by double bottom 11 and is sent back to filter-ventilation blower-unit 2 by the return air system.
The difference of the embodiment of Figure 10 and front embodiment only is, disposed filter-ventilation blower-unit 52 below the horizontal channel 25 of storing unit 4, and it is from clean room 38 suction pure airs.The pure air of this suction is transported in the pure air stream of middle section 12.Middle section 12 is maintained on the high pressure (level).Ventilation equipment 52 are placed in the top in the transfer port zone 9 of leading to treatment facility set in the clean room 38 36 (Fig. 4).
Figure 11 has shown a kind of like this embodiment, and wherein, the embodiment with Fig. 9 and 10 below the support 5 of storing unit 3 has disposed filter-ventilation blower-unit 51 accordingly respectively.
Below the support 6 of storing unit 3, in horizontal channel 25, be provided with filter-ventilation blower- unit 23,24, by they a part of pure airs of suction and being transported in the vertical channel 26 from the pure air of middle section 12 stream.Be provided with filter-ventilation blower-unit 52 accordingly with the embodiment of Figure 10 above below the horizontal channel 25 and transfer port zone 9, they are from clean room 38 suction pure airs and be transported to the middle section 12.In addition, be provided with other filter-ventilation blower-unit 53 above the support 6 He below the top cover 1, they as filter-ventilation blower-unit 52 from clean room 38 suction pure airs and be transported to the middle section 12.Pure air is imported in the zone between a top cover 1 and an orifice plate 54, and described orifice plate is arranged in the middle section 12 and is parallel to top cover 1 and extends in middle section 12.Orifice plate 54 be on the length of middle section 12, be provided with and preferably constitute by orifice plate element single, that be abutted against configuration mutually.Orifice plate 54 can be guaranteed: pure air flows between storing unit 3,4 on the length of middle section 12 and width equably.Pure air by additional suction as the embodiment of Figure 10, is maintained on the high-pressure horizontal pure air in the middle section 12.The part of the pure air that flows downward therefrom entreats zone 12 to arrive in the clean room 38 via transfer port zone 9.The clean empty institute of part that flow downward in middle section 12 and that be not filtered 23,24,51,52 suctions of device-ventilation blower-unit then arrives downwards in the return air plane 41.
In whole embodiment, pure air is directly arranged to storing unit 3,4 from the outflow zone at warehouse.Corresponding ventilation blower is arranged on the below at edge on the warehouse, makes their outflow zone 12 suction airs from the warehouse.Chou Xi pure air share can not give that the flox condition around the warehouse causes burden in the air circulation system of entire equipment and the clean room like this.Pure air by glass plate 7 water conservancy diversion in the support 5,6 is guided upward from the below.
In order to be implemented in the high-pressure horizontal in the warehouse, by optimal way at least one (unshowned) ventilation blower is set, be transported in the warehouse by its pure air right quantity.
Claims (28)
1. be used for the pending product of clean room, especially for the warehouse of the glass plate of LCD screen, has the storing unit that at least one is used for product, product is passed through by pure air slime flux stream, and described pure air stream be is characterized in that by at least one ventilation blower suction:
Ventilation blower (15,23; 33,34; 42; 47; 51) be arranged in the zone of top cover (1) below at warehouse.
2. by the warehouse of claim 1, it is characterized in that:
Ventilation blower (15,23; 33,34; 42; 47; 51) be the part of a filter-ventilation blower-unit.
3. by the warehouse of claim 1 or 2, it is characterized in that:
Ventilation blower (15,23; 33,34) be arranged on side under the storing unit (3,4).
4. by the warehouse of one of claim 1-3, it is characterized in that:
Ventilation blower (15,23; 33,34; 51) be arranged in the horizontal channel (18,25), on this horizontal channel, connect at least one upwards directed passage (19,26), should upwards directed passage pure air be flowed to product (7).
5. by the warehouse of claim 4, it is characterized in that:
Described upwards directed passage (19,26) has the port (22) that is used for pure air.
6. by the warehouse of claim 5, it is characterized in that:
Each port (22) is arranged in the wall portion (21) of passage (19,26).
7. by the warehouse of claim 5, it is characterized in that:
Each port (22) forms by the spacing between the product (7).
8. by the warehouse of one of claim 2-7, it is characterized in that:
Described upwards directed passage (19,26) extends on the whole height of storing unit (3,4).
9. by the warehouse of one of claim 1-8, it is characterized in that:
Product (7) is placed at least one support (5,6).
10. by the warehouse of claim 9, it is characterized in that:
Storing unit (3,4) has the supporting plane of at least two support (5,6) usefulness of arranging up and down.
11. the warehouse by claim 10 is characterized in that:
Below each supporting plane, be respectively provided to a few ventilation blower (51).
12. the warehouse by claim 11 is characterized in that:
Each ventilation blower (51) is arranged in the horizontal channel (18), and the supporting plane that this horizontal channel lays respectively at its below relatively seals.
13. the warehouse by one of claim 1-12 is characterized in that:
Two storing units opposite each other (3,4) are set, and they are separated from each other by a middle section (12), and pure air flows downwards in this middle section.
14. the warehouse by claim 13 is characterized in that:
Filter-ventilation blower-unit (2) is set in the zone on middle section (12).
15. the warehouse by claim 13 is characterized in that:
Suspension-filter (14) is set in the zone on middle section (12), pure air is flowed to described suspension-filter by an air distribution system.
16. the warehouse by one of claim 13-15 is characterized in that:
Described upwards directed passage (19,26) be placed in storing unit (3,4) from that side that middle section (12) deviates from.
17. the warehouse by one of claim 13-16 is characterized in that:
In the zone of middle section (12) below, a return air zone (41) is set.
18. the warehouse by claim 17 is characterized in that:
Middle section (12) is that relative return air zone (41) is opened wide.
19. the warehouse by claim 17 is characterized in that:
Middle section (12) is relative return air zone (41) sealing.
20. the warehouse by one of claim 1-19 is characterized in that:
Ventilation blower (15,42) is arranged on the below of the double bottom (11) at warehouse.
21. the warehouse by claim 20 is characterized in that:
Ventilation blower (15,42) is arranged in return air zone (41).
22. the warehouse by one of claim 1-21 is characterized in that:
The side is provided with a supercharging device (43,50) under storing unit (3,4), connects ventilation equipment (46) and described upwards directed passage (19,26) on it.
23. the warehouse by one of claim 1-22 is characterized in that:
At least one filter ventilation blower-unit (52,53) is set, and it is transported to the pure air warehouse in flows from clean room (38) suction pure air degree.
24. the warehouse by one of claim 1-22 is characterized in that:
The air circulation device that at least one comprises at least one ventilation blower and at least one filter is set, and it is from clean room (38) suction pure air and be transported to the pure air warehouse in flows.
25. be used for making product keep clean method by the described warehouse of one of claim 1-24, wherein, pure air flows downwards and at least a portion pure air is fed to product, it is characterized in that:
Directly from the pure air stream that flows downward, extract to the pure air that product (7) is carried.
26. the method by claim 25 is characterized in that:
The pure air stream that is sucked is carried upward from the below.
27. the method by claim 25 or 26 is characterized in that:
The pure air stream that is sucked is transported to by product (7) in the pure air stream that flows downward afterwards in overflow.
28. the method by one of claim 25-27 is characterized in that:
Pure air is extracted from return air zone (41).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005050010.2 | 2005-10-11 | ||
| DE102005050010A DE102005050010A1 (en) | 2005-10-11 | 2005-10-11 | Storage arrangement for glass panes for liquid crystal screens comprises ventilators arranged in a region below the ceiling |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101004281A true CN101004281A (en) | 2007-07-25 |
| CN101004281B CN101004281B (en) | 2011-11-23 |
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ID=37887125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100643425A Expired - Fee Related CN101004281B (en) | 2005-10-11 | 2006-10-11 | Warehouse for product ,especially for liquid crystal screen glass panel, to be processed in cleaning room, and method for keeping clean in the warehous |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN101004281B (en) |
| DE (1) | DE102005050010A1 (en) |
| TW (1) | TW200730266A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014047956A1 (en) * | 2012-09-26 | 2014-04-03 | 深圳市华星光电技术有限公司 | Clean room and automatic cleaning box thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007051726A1 (en) * | 2007-10-25 | 2009-04-30 | Hänel & Co. | Bearing arrangement with predeterminable storage atmosphere |
| EP4144450A1 (en) * | 2021-09-07 | 2023-03-08 | Camfil APC GmbH | Method for cleaning exhaust air generated in a processing process in a clean room/dry room, and system for carrying out the method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1464233A (en) * | 2002-06-25 | 2003-12-31 | 沈阳市空调净化成套设备有限公司 | Hospital clean operation department purification air-conditioning power-saving technology and system thereof |
| CN2628025Y (en) * | 2003-05-30 | 2004-07-28 | 杜鸿钧 | Infectious diseasesproof bed |
-
2005
- 2005-10-11 DE DE102005050010A patent/DE102005050010A1/en not_active Withdrawn
-
2006
- 2006-10-04 TW TW095136810A patent/TW200730266A/en unknown
- 2006-10-11 CN CN2006100643425A patent/CN101004281B/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014047956A1 (en) * | 2012-09-26 | 2014-04-03 | 深圳市华星光电技术有限公司 | Clean room and automatic cleaning box thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102005050010A1 (en) | 2007-04-12 |
| TW200730266A (en) | 2007-08-16 |
| CN101004281B (en) | 2011-11-23 |
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