CN100593838C - 堆料机 - Google Patents
堆料机 Download PDFInfo
- Publication number
- CN100593838C CN100593838C CN200680024921A CN200680024921A CN100593838C CN 100593838 C CN100593838 C CN 100593838C CN 200680024921 A CN200680024921 A CN 200680024921A CN 200680024921 A CN200680024921 A CN 200680024921A CN 100593838 C CN100593838 C CN 100593838C
- Authority
- CN
- China
- Prior art keywords
- container
- top board
- board type
- conveyor
- stacker
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US69761605P | 2005-07-08 | 2005-07-08 | |
US60/697,616 | 2005-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101218661A CN101218661A (zh) | 2008-07-09 |
CN100593838C true CN100593838C (zh) | 2010-03-10 |
Family
ID=37137462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200680024921A Expired - Fee Related CN100593838C (zh) | 2005-07-08 | 2006-07-07 | 堆料机 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070010909A1 (zh) |
JP (1) | JP5035761B2 (zh) |
KR (1) | KR101275607B1 (zh) |
CN (1) | CN100593838C (zh) |
SG (1) | SG163587A1 (zh) |
TW (1) | TWI385111B (zh) |
WO (1) | WO2007008736A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090067957A1 (en) * | 2007-09-06 | 2009-03-12 | Mitsuhiro Ando | Transport system with buffering |
US8070410B2 (en) * | 2008-02-05 | 2011-12-06 | Lutz Rebstock | Scalable stocker with automatic handling buffer |
US9633881B2 (en) * | 2008-02-05 | 2017-04-25 | Brooks Automation, Inc. | Automatic handling buffer for bare stocker |
US8718815B2 (en) * | 2009-01-23 | 2014-05-06 | Murata Machinery, Ltd. | Automated warehouse system |
JP5212200B2 (ja) * | 2009-03-17 | 2013-06-19 | 村田機械株式会社 | 天井搬送システム |
US8977387B2 (en) * | 2009-10-29 | 2015-03-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for overhead cross-system transportation |
US20130123966A1 (en) * | 2011-11-14 | 2013-05-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Spatial three-dimensional inline handling system |
JP5865178B2 (ja) * | 2012-05-25 | 2016-02-17 | 株式会社イトーキ | 自動倉庫 |
US9415934B2 (en) * | 2014-05-14 | 2016-08-16 | Murata Machinery, Ltd. | Transport system and transport method |
US10099864B1 (en) * | 2016-03-15 | 2018-10-16 | Staples, Inc. | Carton induction optimization in order fulfillment picking system |
KR102495681B1 (ko) * | 2018-05-16 | 2023-02-02 | 세메스 주식회사 | 스토커 및 이를 포함하는 기판 이송 시스템 |
CN112239038B (zh) * | 2019-07-18 | 2022-02-25 | 杭州海康机器人技术有限公司 | 一种搬运方法、装置和仓储*** |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5284412A (en) * | 1990-08-17 | 1994-02-08 | Tokyo Electron Sagami Limited | Stock unit for storing carriers |
US5980183A (en) * | 1997-04-14 | 1999-11-09 | Asyst Technologies, Inc. | Integrated intrabay buffer, delivery, and stocker system |
US6579052B1 (en) * | 1997-07-11 | 2003-06-17 | Asyst Technologies, Inc. | SMIF pod storage, delivery and retrieval system |
US6283692B1 (en) * | 1998-12-01 | 2001-09-04 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US6435330B1 (en) * | 1998-12-18 | 2002-08-20 | Asyai Technologies, Inc. | In/out load port transfer mechanism |
US6089811A (en) * | 1998-12-25 | 2000-07-18 | Fujitsu Limited | Production line workflow and parts transport arrangement |
JP2000286318A (ja) * | 1999-01-27 | 2000-10-13 | Shinko Electric Co Ltd | 搬送システム |
US6711450B1 (en) * | 2000-02-02 | 2004-03-23 | Advanced Micro Devices, Inc. | Integration of business rule parameters in priority setting of wafer processing |
US6677690B2 (en) * | 2001-02-02 | 2004-01-13 | Asyst Technologies, Inc. | System for safeguarding integrated intrabay pod delivery and storage system |
US6854583B1 (en) * | 2001-02-06 | 2005-02-15 | Middlesex General Industries, Inc. | Conveyorized storage and transportation system |
JP2002319609A (ja) * | 2001-04-19 | 2002-10-31 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JP3991852B2 (ja) * | 2002-12-09 | 2007-10-17 | 村田機械株式会社 | 天井搬送車システム |
TWI220672B (en) * | 2003-07-16 | 2004-09-01 | Au Optronics Corp | Automatic material transporting system and its storage cabinet |
US7099739B2 (en) * | 2003-12-09 | 2006-08-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stocker utilization self-balancing system and method |
-
2006
- 2006-07-07 TW TW095124991A patent/TWI385111B/zh not_active IP Right Cessation
- 2006-07-07 JP JP2008520428A patent/JP5035761B2/ja not_active Expired - Fee Related
- 2006-07-07 CN CN200680024921A patent/CN100593838C/zh not_active Expired - Fee Related
- 2006-07-07 SG SG201004938-5A patent/SG163587A1/en unknown
- 2006-07-07 US US11/482,650 patent/US20070010909A1/en not_active Abandoned
- 2006-07-07 WO PCT/US2006/026642 patent/WO2007008736A1/en active Application Filing
- 2006-07-07 KR KR1020087000534A patent/KR101275607B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2007008736A1 (en) | 2007-01-18 |
JP2009500266A (ja) | 2009-01-08 |
SG163587A1 (en) | 2010-08-30 |
US20070010909A1 (en) | 2007-01-11 |
CN101218661A (zh) | 2008-07-09 |
KR101275607B1 (ko) | 2013-06-17 |
KR20080075490A (ko) | 2008-08-18 |
TW200714536A (en) | 2007-04-16 |
TWI385111B (zh) | 2013-02-11 |
JP5035761B2 (ja) | 2012-09-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA AUTOMATIC MACHINERY CO., LTD. Free format text: FORMER OWNER: AISAISITE TECHNOLOGY CO., LTD. Effective date: 20091016 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20091016 Address after: Kyoto Japan Applicant after: Asyst Technologies Address before: American California Applicant before: Asyst Technologies |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130516 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130516 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto Japan Patentee before: Asyst Technologies |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100310 Termination date: 20140707 |
|
EXPY | Termination of patent right or utility model |