CN100593747C - Device and method for manufacturing display device, ink-jet type liquid supply apparatus - Google Patents

Device and method for manufacturing display device, ink-jet type liquid supply apparatus Download PDF

Info

Publication number
CN100593747C
CN100593747C CN200710199606A CN200710199606A CN100593747C CN 100593747 C CN100593747 C CN 100593747C CN 200710199606 A CN200710199606 A CN 200710199606A CN 200710199606 A CN200710199606 A CN 200710199606A CN 100593747 C CN100593747 C CN 100593747C
Authority
CN
China
Prior art keywords
protuberance
recess
ink
fluororesin
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200710199606A
Other languages
Chinese (zh)
Other versions
CN101201501A (en
Inventor
生田亮
鹤冈保次
武石浩司
宫本高志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of CN101201501A publication Critical patent/CN101201501A/en
Application granted granted Critical
Publication of CN100593747C publication Critical patent/CN100593747C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1275Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention relates to a producing device for a display device, a method for producing the display device and an ink-jet liquid supplying device. The invention is characterized in that the convex part is ensured with ink-resistance property and the concave part with ink-affinity property even when ink-resistance processing a substrate with the convex part and the concave part with the. The proposal of the invention is that the invention provides a method for producing the display device; the convex part (2) which is made of organic material is formed on the substrate (1) which is made of inorganic material; a film material liquid is supplied to the concave part (3) which is divided by the convex part (2) through the mode of ink-jet so as to form a film layer; the FI resin F is depositedin the convex part (2) and the concave part (3) and then is washed.

Description

The manufacturing installation of display device, the manufacture method of display device, ink-jet type liquid supply device
Technical field
The present invention relates to manufacturing installation, the manufacture method of display device, the ink-jet type liquid supply device of display device such as color filter.
Background technology
In manufacturing method of color filter, thereby when on substrate, form protuberance, in the time of will forming dyed layer (thin layer) as the inking of membraneous material liquid to the recess of dividing by this protuberance by ink-jetting style, if upper surface residual ink at protuberance, then diminish the uniform coloring between flatness or pixel, thereby preferably to make protuberance be oleophobic China ink (hydrophobicity), and to make recess be that oleophylic China ink (water wettability) is so that the diffusion of printing ink becomes good.
In the manufacture method of the display device that patent documentation 1 is put down in writing, giving protuberance with the method for oleophobic China ink is: the protuberance that coating is made of photosensitive material on glass substrate forms material, be coated with oleophobic China ink treating agent widely by methods such as spin coating, sprayings on this photosensitive material, pattern forms (patterning) protuberance and recess afterwards.In addition, making recess is that the method for oleophylic China ink is shone for the recess of substrate being carried out ultraviolet ray.
The manufacture method of the display device that patent documentation 1 is put down in writing has following problem.
(1) before the pattern that carries out protuberance and recess forms, must carry out the oleophobic China ink and handle, not consider behind the formation protuberance that the oleophobic China ink of this protuberance is handled.
(2) when to the surface irradiation ultraviolet ray of substrate when improving the oleophylic China ink of recess since the carrying out of protuberance the oleophylic China ink of the part handled of oleophobic China ink also improve, therefore diminish the effect that the oleophobic China ink of protuberance is handled.
Patent documentation 1: Japanese kokai publication hei 9-230129 communique
Summary of the invention
Problem of the present invention is, handles even pattern has been formed the whole implementation oleophobic China ink of the substrate of protuberance and recess, and also making protuberance is that oleophobic China ink, recess are the oleophylic China ink.
The invention of technical scheme 1 is for being formed with the protuberance that is made of organic material and by ink-jetting style membraneous material liquid being supplied to the recess divided by this protuberance manufacturing installation with the display device that forms thin layer on the substrate that is made of inorganic material, it has makes fluororesin be deposited on the precipitation equipment of described protuberance and recess and the wash mill that the fluororesin that is deposited on protuberance and recess is washed.
The invention of technical scheme 2 is in the invention of technical scheme 1, and described precipitation equipment is a sputter equipment.
The invention of technical scheme 3 is in the invention of technical scheme 1 or 2, and described wash mill is for using the informed later of pure water as cleansing solution.
The invention of technical scheme 4 is for forming protuberance that organic material constitutes and by ink-jetting style membraneous material liquid being supplied to by the recess of this protuberance division manufacture method with the display device that forms thin layer on the substrate that is made of inorganic material, wherein, make fluororesin be deposited on described protuberance and recess, and the fluororesin that is deposited on protuberance and recess is washed.
The invention of technical scheme 5 is in the invention of technical scheme 4, and described fluororesin is deposited by sputter equipment.
The invention of technical scheme 6 is in the invention of technical scheme 4 or 5, washs described fluororesin by informed later.
The invention of technical scheme 7 provides membraneous material liquid to form the ink-jet type liquid supply device of thin layer for the recess to substrate, wherein, and the substrate of described substrate for making by technical scheme 4~6 each described methods.
(technical scheme 1,4)
(a) be better than absorption affinity as the fluororesin of hydrophobic material with respect to the absorption affinity of the protuberance that constitutes by organic materials such as resins with respect to the substrate that constitutes by inorganic material such as glass (recess bottom surface).Among the present invention, on the surface of protuberance that pattern on the substrate forms and recess, deposit fluororesin, afterwards the fluororesin that is deposited on protuberance and recess is washed.The fluororesin that is deposited on the weak recess of the absorption affinity of fluororesin is peeled off, and only the fluororesin of protuberance is residual.Thereby even the substrate whole implementation oleophobic China ink that pattern is formed with protuberance and recess is handled, also can to make protuberance be the oleophobic China ink, make recess is the oleophylic China ink.Thereby, when membraneous material liquid being supplied with recess by ink-jetting style, because the oleophylic China ink of recess makes that the diffusion of ink material liquid in recess is good, because the oleophobic China ink of protuberance, can prevent that membraneous material liquid is exuded to the upper surface of protuberance, can improve the flatness of the thin layer that is formed at recess.
(technical scheme 2,5)
(b) can be by sputter equipment effectively at protuberance and recess deposition fluororesin.
(technical scheme 3,6)
(c) by informed later, give on one side be deposited on protuberance and recess fluororesin with impulsive force, Yi Bian wash, thereby can peel off the fluororesin that is deposited on the more weak recess of fluororesin absorption affinity effectively.
(technical scheme 7)
(d) make protuberance that fluororesin is adsorbed on substrate with after carrying out the oleophobic China ink and handling, membraneous material liquid can not be exuded to the upper surface of protuberance, can improve the flatness of thin layer or the uniform coloring between pixel.In addition, because the oleophylic China ink of recess makes membraneous material liquid be filled in recess equably, can make the diffusion of membraneous material liquid good.
Description of drawings
Fig. 1 is the synoptic diagram of expression sputter equipment.
Fig. 2 is the synoptic diagram of expression informed later.
Fig. 3 (A)~(D) is the synoptic diagram of the surface treatment state of expression substrate.
Fig. 4 is expression ink-jet type liquid supply schematic representation of apparatus.
Symbol description
1 substrate
2 protuberances
3 recesses
4 printing ink
10 sputter equipments
20 informed laters
30 ink-jet type liquid supply devices
Embodiment
Fig. 1 is expression ink-jet type liquid supply schematic representation of apparatus for synoptic diagram, Fig. 3 of expression informed later for synoptic diagram, Fig. 4 of the surface treatment state of expression substrate for synoptic diagram, Fig. 2 of expression sputter equipment.
The present invention relates to the manufacturing installation of the color filter that in making display panels, uses, by using sputter equipment 10 (Fig. 1), informed later 20 (Fig. 2), ink jet type feedway 30 (Fig. 4) in order, on the substrate 1 that constitutes by glass, form by the protuberance that resin constituted 2 as organic material as inorganic material, to be supplied to the recess of dividing by raised part 23 as the printing ink 4 of membraneous material liquid by ink-jetting style, thereby form dyed layer as thin layer.
The protuberance 2 of substrate 1 is divided dyed layers, can be corresponding by the recess 3 of its division with pixel, when forming banded color filter, form wire, for corresponding with tetragonal pixel and form clathrate.In the present invention, the formation method to protuberance 2 is not particularly limited.
For substrate 1, if, then diminish the uniform coloring between flatness or pixel, therefore must make protuberance 2 be the oleophobic China ink at the remaining printing ink 4 of upper surface of protuberance 2, and make recess 3 for the oleophylic China ink so that the diffusion of printing ink 4 is good.Among the present invention, use sputter equipment 10 and informed later 20, make protuberance 2 for the oleophobic China ink, make recess 3 be the oleophylic China ink.
Sputter equipment 10 makes the protuberance 2 and the recess 3 that are deposited on substrate 1 as the fluororesin F of oleophobic China ink material as shown in Figure 1.The anode 12 side placement substrates 1 (be formed with the substrate 1 (Fig. 3 (A)) of protuberance 2 and recess 3) of sputter equipment 10 in infrabar gas compartment 11, be provided as in negative electrode 13 sides target material fluororesin F be with 5.In infrabar gas atmospheres such as Ar gas, between anode 12 and negative electrode 13, apply high-frequency power voltage, make gas ionization and ionization, make this gaseous ion impinge upon being with on 5 of fluororesin F, drop down onto the protuberance 2 of substrate 1 and recess 3 surfaces and deposit (Fig. 3 (B)) thereby make from the particle of the fluororesin F of the outside that flies out with 5 surface.Fluororesin F is strong with respect to the absorption affinity of the protuberance 2 that is made of resin, a little less than the absorption affinity with respect to the substrate 1 that constitutes by glass (bottom surface of recess 3).
Informed later 20 has ultrasonic vibrator 22 in the outside, the end of container 21, uses the pure water W that is contained in the container 21 as cleansing solution.The substrate 1 that utilizes sputter equipment 10 and deposited fluororesin F is immersed among the pure water W of container 21, is placed on the bottom surface of container 21, drive ultrasonic oscillator 22, the fluororesin that is deposited on protuberance 2 and recess 3 is washed.The fluororesin F that is deposited on the weak recess 3 of fluororesin F absorption affinity is stripped from, the fluororesin F of protuberance 2 residual (Fig. 3 (C)) only.The surface that is adsorbed with the protuberance 2 of fluororesin F demonstrates the oleophobic China ink, and the bottom surface of the recess 3 that fluororesin F peels off demonstrates the oleophylic China ink that is caused by glass.
In the present embodiment, by using sputter equipment 10 and informed later 20, has following action effect.
(a) as the fluororesin F of hydrophobic material with respect to the absorption affinity of the protuberance 2 that constitutes by organic materials such as resins absorption affinity greater than the substrate 1 that constitutes by inorganic material such as glass (recess 3 bottom surfaces).Among the present invention, fluororesin F is deposited on the surface of protuberance 2 that pattern on the substrate 1 forms and recess 3, afterwards, the fluororesin F that is deposited on protuberance 2 and recess 3 is washed.By this washing, the fluororesin F that is deposited on the more weak recess 3 of fluororesin F absorption affinity is stripped from, and only the fluororesin F of protuberance 2 is residual.Thereby, handle even can implement the oleophobic China ink the substrate whole 1 that pattern form protuberance 2 and recess 3, also can make protuberance 2 for the oleophobic China ink, make recess 3 be the oleophylic China ink.
Thereby, using ink-jet type liquid supply device 30 when recess 3 is supplied with printing ink 4, because the oleophylic China ink of recess 3 makes the printing ink 4 in the recess 3 spread well, in addition, because the oleophobic China ink of protuberance 2, the printing ink 4 that can prevent to be supplied to recess 3 is exuded to the upper surface of protuberance 2, can improve flatness, the uniform coloring of the dyed layer that is formed at recess 3.
(b) can be by sputter equipment 10 effectively at protuberance 2 and recess 3 deposition fluororesin F.
(c) by informed later 20, wash with impulsive force, thereby can peel off the fluororesin F that is deposited on the weak recess 3 of fluororesin F absorption affinity effectively while give the fluororesin F that is deposited on protuberance 2 and recess 3.
Ink-jet type liquid supply device 30 as shown in Figure 4, it is the device that printing ink 4 is provided to the recess 3 of substrate 1, the upper surface of the conveyance platform 32 on brace table 31 is placed substrate 1, moves conveyance platform 32 by engine 33, has the linear encoder 34 of the position of detecting conveyance platform 32.When on brace table 31, make conveyance platform 32 by shower nozzle 36 with door type supporter 35 of crossing over conveyance platform 32 below the time, printing ink 4 is sprayed from a plurality of nozzles of shower nozzle 36 via control module 37A by control device 37, this printing ink 4 is filled in the recess 3 of substrate 1 (Fig. 3 (D)).
As the substrate of moving in the ink-jet type liquid supply device 30 1, during the substrate 1 made when be suitable for using above-mentioned sputter equipment 10 and informed later 20,, handles the protuberance 2 that makes fluororesin F be adsorbed on substrate 1 because thereby having carried out the oleophobic China ink, so the upper surface printing ink 4 at protuberance 2 is upspring, therefore can prevent that printing ink 4 from oozing out or remaining upper surface to protuberance 2, can improve the flatness of dyed layer and the uniform coloring between pixel.In addition, because the oleophylic China ink of recess 3, make the diffusion of the printing ink 4 in the recess 3 become well, thus printing ink 4 can too not concentrate on recess 3 interior but filled equably, can improve the flatness of dyed layer.
Below, describe for result of implementation of the present invention.Embodiments of the invention are with respect to the substrate 1 (protuberance 2 is formed clathrate) that uses sputter equipment 10 and informed later 20 to make, to use ink-jet type liquid supply device 30 to supply with printing ink 4.The service condition of sputter equipment 10 is: Ar gas 50sccm, pressure 5Pa, voltage 500W, 20 minutes processing times.The wash time of utilizing informed later 20 is 3 minutes.In the substrate 1 that has been suitable for sputter equipment 10 and informed later 20, printing ink 4 is that 71.5 degree, printing ink 4 are 2 degree with respect to the contact angle of recess 3 bottom surfaces (glass) with respect to the contact angle on protuberance 2 surfaces.Use ink-jet type liquid supply device 30 to provide printing ink 4 to 9 recesses 3 corresponding to 9 pixels of this substrate 1, consequently, in all 9 pixels, printing ink 4 can be provided equably, can guarantee the flatness of dyed layer (thin layer), the uniform coloring between pixel.
As comparative example of the present invention, the substrate 1 that does not use informed later 20 to make with respect to only using sputter equipment 10 uses ink-jet type liquid supply device 30 to supply with printing ink 4.The service condition of sputter equipment 10 is: Ar gas 50sccm, pressure 5Pa, voltage 500W, 2 minutes processing times.In the substrate 1 that has been suitable for sputter equipment 10, printing ink 4 is that 72 degree, printing ink 4 are 65 degree with respect to the contact angle of recess 3 bottom surfaces (glass) with respect to the contact angle on protuberance 2 surfaces.Use ink-jet type liquid supply device 30 to provide printing ink 4, consequently, can't obtain the even diffusion of printing ink with respect to all 9 pixels to 9 recesses 3 corresponding to pixel of this substrate 1.
More than, understand embodiments of the invention in detail by accompanying drawing, but concrete formation of the present invention is not limited to this embodiment.Design change in not breaking away from purport scope of the present invention etc. is also contained among the present invention.For example, precipitation equipment is not limited to sputter equipment.In addition, wash mill is not limited to informed later.
In addition, though for example understand and in the recess of dividing by the protuberance in the color filter of display panels, provide printing ink, but it is not limited thereto, for example, can also in the manufacturing of EL (electroluminescence) display element, be applicable to the EL material is supplied in the recess that the next door surrounded by transparency carrier.

Claims (7)

1. the manufacturing installation of a display device, it is formed with the protuberance that is made of organic material on the substrate that is made of inorganic material, by ink-jetting style membraneous material liquid is supplied to the recess divided by this protuberance to form thin layer; It is characterized in that described manufacturing installation has makes fluororesin be deposited on the precipitation equipment of described protuberance and recess and the wash mill that the fluororesin that is deposited on protuberance and recess is washed.
2. the manufacturing installation of display device according to claim 1, wherein, described precipitation equipment is a sputter equipment.
3. the manufacturing installation of display device according to claim 1 and 2, wherein, described wash mill is for the informed later of pure water as cleansing solution.
4. the manufacture method of a display device, it forms the protuberance that is made of organic material on the substrate that is made of inorganic material, by ink-jetting style membraneous material liquid is supplied to the recess divided by this protuberance to form thin layer; It is characterized in that, before membraneous material liquid being supplied to described recess, making fluororesin be deposited on described protuberance and recess, and the fluororesin that is deposited on protuberance and recess is washed by ink-jetting style.
5. the manufacture method of display device according to claim 4, wherein, described fluororesin is deposited by sputter equipment.
6. according to the manufacture method of claim 4 or 5 described display device, wherein, described fluororesin is washed by informed later.
7. ink-jet type liquid supply device, thus its recess of being divided by protuberance on substrate provides membraneous material liquid to form thin layer, it is characterized in that, and described substrate is the substrate of the display device of each the described method manufacturing by claim 4~6.
CN200710199606A 2006-12-11 2007-12-11 Device and method for manufacturing display device, ink-jet type liquid supply apparatus Expired - Fee Related CN100593747C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP333653/2006 2006-12-11
JP2006333653A JP5031348B2 (en) 2006-12-11 2006-12-11 Manufacturing method of display device

Publications (2)

Publication Number Publication Date
CN101201501A CN101201501A (en) 2008-06-18
CN100593747C true CN100593747C (en) 2010-03-10

Family

ID=39516745

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200710199606A Expired - Fee Related CN100593747C (en) 2006-12-11 2007-12-11 Device and method for manufacturing display device, ink-jet type liquid supply apparatus

Country Status (4)

Country Link
JP (1) JP5031348B2 (en)
KR (1) KR20080053896A (en)
CN (1) CN100593747C (en)
TW (1) TW200834131A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114573240B (en) * 2022-02-24 2024-03-01 西安中易建科技有限公司 Front plate glass, preparation method thereof, photovoltaic module and photovoltaic curtain wall

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2819245B2 (en) * 1994-10-19 1998-10-30 大日本印刷株式会社 How to fix color filters

Also Published As

Publication number Publication date
TW200834131A (en) 2008-08-16
CN101201501A (en) 2008-06-18
KR20080053896A (en) 2008-06-16
JP2008145780A (en) 2008-06-26
JP5031348B2 (en) 2012-09-19

Similar Documents

Publication Publication Date Title
CN107403877B (en) The packaging method of oled panel
TWI389315B (en) In-line process for making thin film electronic devices
CN101993032B (en) Method for manufacturing microstructural film pattern and TFT-LCD array substrate
CN1906650B (en) Display device and its fabrication method
KR100561864B1 (en) Method for forming hydrophobic coating layer on surface of nozzle plate of inkjet printhead
US20110261112A1 (en) Non-wetting coating on a fluid ejector
KR20130038822A (en) Letterpress printing device and printed matter produced using same and process for production of organic electroluminescent element
CN101722728A (en) Method for discharging liquid body, method for manufacturing color filter, and method for manufacturing organic el device
TWI532537B (en) Structure for printing including thin primer film, stencil printing plate, and process for producing said structure for printing
US10153333B1 (en) Method for manufacturing an OLED backplate and method for manufacturing an OLED panel
CN100593747C (en) Device and method for manufacturing display device, ink-jet type liquid supply apparatus
JP4019791B2 (en) Deposition equipment
US20130180955A1 (en) Segmented or selected-area coating
JP2005327667A (en) Method for manufacturing organic el device, system for manufacturing organic el device, and electronic equipment
US8580335B2 (en) Method for discharging liquid body, method for manufacturing color filter, and method for manufacturing organic EL device
KR20060090075A (en) Apparatus and method for forming liquid droplet and method for forming a thin film, and display substrate
KR100579120B1 (en) An ink jet head and method for manufacturing the same, an apparatus and method for coating ink, and an organic electro luminescence display device and method for manufacturing the same
KR20160058600A (en) Manufacturing method and apparatus of flexible transparent electrode having trench structure
KR101586837B1 (en) An application apparatus for panels with adhesive material and application method of using the same apparatus.
Moro et al. Encapsulation of flexible displays: Background, status, and perspective
JP4656843B2 (en) Method for manufacturing semiconductor device
JP2003133069A (en) Method for manufacturing organic el element
JP4506788B2 (en) EL panel manufacturing method
JP5482382B2 (en) Letterpress printing apparatus, method for producing printed matter, method for producing organic EL element
JP2007178532A (en) Method for manufacturing color filter substrate and method for manufacturing liquid crystal display device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100310

Termination date: 20161211